WO2013075269A1 - High-voltage ac light emitting diode structure - Google Patents
High-voltage ac light emitting diode structure Download PDFInfo
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- WO2013075269A1 WO2013075269A1 PCT/CN2011/001962 CN2011001962W WO2013075269A1 WO 2013075269 A1 WO2013075269 A1 WO 2013075269A1 CN 2011001962 W CN2011001962 W CN 2011001962W WO 2013075269 A1 WO2013075269 A1 WO 2013075269A1
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- emitting diode
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H29/00—Integrated devices, or assemblies of multiple devices, comprising at least one light-emitting semiconductor element covered by group H10H20/00
- H10H29/10—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00
- H10H29/14—Integrated devices comprising at least one light-emitting semiconductor component covered by group H10H20/00 comprising multiple light-emitting semiconductor components
- H10H29/142—Two-dimensional arrangements, e.g. asymmetric LED layout
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10H—INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
- H10H20/00—Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
- H10H20/80—Constructional details
- H10H20/83—Electrodes
- H10H20/831—Electrodes characterised by their shape
- H10H20/8312—Electrodes characterised by their shape extending at least partially through the bodies
Definitions
- the present invention relates to a high voltage alternating current light emitting diode structure, and more particularly to a high voltage alternating current light emitting diode structure for use in illumination. Background technique
- U.S. Patent No. 6,853,011 discloses a luminescent epitaxial layer structure comprising a temporary substrate having a light absorbing type at one end and a transparent transparent substrate adhered to the other end by a benzene ring . The portion of the light absorbing temporary substrate is then removed. The LED structure then forms a connection channel for connecting the first ohmic contact electrode and an insulating trench to separate the active layer of the LED structure into two portions. Then, a second ohmic contact electrode is formed on the cladding layer, a bonding metal layer is filled in the first via hole and successfully formed on the second ohmic contact electrode. Since the two bonding metal layers have the same height, the resulting LED structure can be more conveniently applied to the flip chip structure.
- U.S. Patent No. 6,998,642 discloses a semiconductor structure having two light emitting diodes in a series connected state.
- the above semiconductor structure includes two light emitting diodes having the same stacked structure, and is isolated by insulating trenches.
- the stacked structure forms a thermally conductive substrate from the bottom; an insulating protective layer; a metal adhesion layer; a reflective protective layer; a P-type ohmic connection epitaxial layer; an upper cladding layer; an active layer and a lower cladding layer .
- Two P-type ohmic contact metal electrodes belonging to two light emitting diodes are formed on an interface between the reflective protective layer and the ohmic contact epitaxial layer, and are buried in the reflective protective layer.
- US Patent Publication No. 6, 85 3, 01 1 can be applied to a flip chip structure, if there is no second substrate, the connection between the two light emitting diodes cannot be performed, and the flip chip process is performed. When it is necessary to process multiple chips, the process complexity is increased.
- US Patent Publication No. 6,998,642 can electrically connect two LEDs, the use of metal for bonding must be achieved by a complicated process, which is prone to problems in production efficiency and cost. .
- the main object of the present invention is to overcome the defects of the existing light emitting diodes and provide a high voltage alternating current light emitting diode structure.
- the technical problem to be solved is to make a small volume.
- High voltage AC LED structure The invention provides a high-power AC light-emitting diode structure: it comprises:, a circuit! ⁇ board; and a plurality of high voltage LED chips.
- the high voltage LED chip comprises: a first substrate; an adhesive layer; a first ohmic connection layer; an epitaxial layer; a first insulating layer; at least two first conductive plates; at least two second conductive plates; and a second substrate.
- the invention is to combine a low-cost circuit substrate with a high-voltage LED chip of a wafer level process to fabricate a small-sized high-voltage AC light-emitting diode structure.
- the invention provides a high voltage alternating current light emitting diode structure, a package-circuit substrate thereof, and a plurality of high voltage LED chips fixed and electrically connected to the circuit substrate and forming a series connection of the high voltage LED chips by the circuit substrate.
- a "high voltage LED chip ⁇ a first substrate having a first surface and a second surface; an adhesive layer formed on the first surface; at least two first ohmic connecting layers formed on the adhesive layer At least two epitaxial layers, a first trench is formed between any two epitaxial layers, each epitaxial layer has: a lower cladding layer formed on a first ohmic connection layer; and an active layer formed on the lower cladding layer And a top coating layer formed on the active layer; a first insulating layer covering each of the first ohmic connecting layer and the exposed surface of each of the upper cladding layers, and formed on any two Between the first ohmic connection layers, the first insulating layer is formed with a first opening and a second opening at each of the upper cladding layer and each of the first ohmic connecting layers; at least two first Conductive plates, formed separately Each of the first openings is electrically connected to an upper cladding layer; at least two second conductive plates are respectively formed in each of the second openings and electrical
- the invention further provides a high voltage alternating current light emitting diode structure, which comprises a substrate and a plurality of high voltage LED chips, which are fixedly and electrically connected to the circuit substrate and form a series connection of the high voltage LED chips by the circuit substrate.
- the high voltage LED chip comprises: a first substrate having a first surface and a second surface; an adhesive layer formed on the first surface; at least two first ohmic connecting layers formed on the adhesive layer; at least two The epitaxial layer, each epitaxial layer has: a lower cladding layer formed on a first ohmic connection layer; an active layer formed on the lower cladding layer; and an upper cladding layer formed on the active layer _; And a second trench extending vertically through the upper cladding layer and the active layer, and partially extending through the lower cladding layer; a second insulating layer covering each of the upper cladding layers and formed on any two epitaxial layers and Between any two first ohmic connection layers, a second insulating layer is formed on the upper cladding layer and inside the second trench, and a third opening and a fourth opening are respectively formed; at least two fifth conductive plates are respectively formed on Inside each third opening, and electricity Sexually connected to an upper cladding layer; and at least two sixth conductive plates,
- a high-voltage LED chip with a wafer-level process can be combined with a lower-cost circuit substrate to make a small-sized high-voltage AC LED structure.
- the high voltage AC LED structure can be formed more easily and quickly.
- a more diverse high voltage AC LED structure can be combined.
- FIG. 1A is a schematic structural diagram of a high voltage alternating current light emitting diode according to an embodiment of the present invention.
- FIG. 1B is a series equivalent circuit diagram of an embodiment of the present invention.
- FIG 2A shows an equivalent circuit structure 1 after series connection and parallel connection according to an embodiment of the present invention.
- FIG. 2B is an equivalent circuit structure 2 of a series connection and a parallel connection according to an embodiment of the present invention.
- FIG. 3 is a cross-sectional view of a high voltage LED chip according to an embodiment of the present invention, which is completed by unit division.
- Fig. 4A is a view showing an embodiment of the manufacturing method before the first etching in Fig. 3;
- Fig. 4B is a view showing an embodiment of a manufacturing method in which the second etching is performed again after completion of Fig. 4A.
- FIG. 5 is a cross-sectional view showing the embodiment of FIG. 3 after the first insulating layer and the conductive plate are further completed.
- 6A is a cross-sectional view of a high voltage LED chip further incorporating a second substrate in accordance with an embodiment of the present invention.
- Figure 6B is a top plan view of Figure 6A.
- Fig. 6C is an equivalent circuit diagram of Fig. 6A.
- Figure 7A is a cross-sectional view of a high voltage LED chip of the present invention further forming a first conductor layer.
- Figure 7B is a top plan view of Figure 7A.
- Figure 8 is a cross-sectional view showing a high voltage LED chip of the present invention after cell division, epitaxial layer division, and second trench fabrication.
- Figure 9 is a cross-sectional view showing a high voltage LED chip of the present invention further incorporating a second substrate.
- Figure 10 is a cross-sectional view showing a high voltage LED chip of the present invention further forming a second conductor layer.
- 11A to 11G are respectively equivalent circuit embodiments of various high voltage LED chips of the present invention Figure.
- FIG. 1A is a schematic structural diagram of a high voltage alternating current light emitting diode according to an embodiment of the present invention.
- FIG. 1B is a series equivalent circuit diagram of an embodiment of the present invention.
- 2A is an equivalent circuit structure 1 of a series connection and parallel connection according to an embodiment of the present invention.
- 2B shows an equivalent circuit structure 2 after series connection and parallel connection according to an embodiment of the present invention.
- this embodiment is a high voltage AC LED structure 100, which includes: a circuit substrate 200; and a plurality of high voltage LED chips 300.
- the high voltage LED chip 300 is a high voltage LED chip 301 and a high voltage LED chip 302 representing different embodiments below.
- the circuit substrate 200 can be an aluminum substrate or a ceramic substrate.
- the circuit substrate 200 is much larger than the high voltage LED chip 300, so that the circuit substrate 200 can be supplied with a high voltage.
- the circuit connection required for the LED chip 300 By designing a variety of series-parallel circuits, a more diverse high-voltage AC LED structure 100 can be combined more easily and quickly.
- each substrate 200 also provides heat dissipation. Furthermore, when the circuit substrate 200 is a ceramic substrate, a plurality of heat conducting columns or a plurality of conductors may be further disposed in the substrate of the ceramic substrate, so that the heat generated by the operation of the high voltage LED chip 300 is effectively transmitted, and at the same time The electrodes of the high voltage LED chip 300 can smoothly extend to the other side of the ceramic substrate.
- a plurality of high voltage LED chips 300 are fixedly and electrically connected to the circuit substrate 200 and connected to the circuit board 200 to form a series circuit 400.
- the high voltage LED chip 300 is a high voltage LED chip 300 in the form of an alternating current, it can become a high voltage alternating current light emitting diode structure 100, which is the most basic structure of the series circuit 400 of the present embodiment.
- any two high voltage LED chips 300 may be further connected to each other in parallel, so that the series circuit 400 further has at least one parallel connection, and the series circuit 400 may further Further, at least one series circuit 400 is connected in parallel to thereby combine various high voltage AC circuits.
- the structure of the high voltage LED chip 300 will be described in detail below, and in the following embodiments, the respective layer structures of the high voltage LED chip 300 are fabricated by conventional semiconductor molding techniques, and the details thereof will not be described again.
- the terms "etching process” or “etching method” are specifically defined as the abbreviation covering the entire complete yellow light process.
- the high voltage LED chip 300 can form a multi-dimensional array, which is not limited to the number in the embodiment, which is described above.
- FIG. 3 is a cross-sectional view of a high voltage LED chip according to an embodiment of the present invention, which is completed by unit division.
- Fig. 4A is a view showing an embodiment of the manufacturing method before the first etching in Fig. 3.
- Fig. 4B is a view showing an embodiment of a method of fabricating the second etching again after completion of Fig. 4A.
- Fig. 5 is a cross-sectional view showing the embodiment of Fig. 3 after further completing the first insulating layer and the conductive plate.
- 6A is a cross-sectional view of a high voltage LED chip further incorporating a second substrate in accordance with an embodiment of the present invention.
- Figure 6B is a top plan view of Figure 6A.
- Fig. 6C is an equivalent circuit diagram of Fig. 6A.
- Figure 7A is a cross-sectional view of a high voltage LED chip of the present invention further forming a first conductor layer.
- Figure 7B is a top plan view
- the high-voltage LED chip 300 is fabricated on a wafer by a semiconductor process in which a pre-process high-voltage LED chip that has not been subjected to cell division and that has not completed other insulating layers and conductive plates is formed.
- a pre-process high-voltage LED chip that has not been subjected to cell division and that has not completed other insulating layers and conductive plates is formed.
- the wafer is only a temporary substrate in the process of manufacturing the high voltage LED chip 300, that is, a temporary substrate.
- the etching method is the most commonly used one.
- the high voltage LED chip 300 In order to protect the high voltage LED chip 300 during the etching process, the high voltage LED chip 300 is not caused by excessive etching. The damage is therefore set to an etch stop layer. Most of the etch stop layer is also etched away during the etching process of the wafer. By the action of the etch stop layer, the effect of protecting the high voltage LED chip 300 can be achieved.
- a high-voltage LED chip of the pre-process can be produced. As shown in FIG. 3 to FIG.
- the embodiment is a high voltage LED chip 301 comprising: a first substrate 21 , an adhesive layer 22 , at least two first ohmic connection layers 23 , and at least two epitaxial layers 24 . a first insulating layer 25, at least two first conductive plates 26, and at least two second conductive plates 27.
- the first substrate 21 has a first surface 211 and a second surface 212.
- the first substrate 21 is mainly used to support the entire high voltage LED chip 301.
- the first substrate 21 may be a single crystal, a polycrystalline or an amorphous structure substrate, such as glass (glas s), sapphire (sapphi re), silicon carbide (SiC), gallium phosphide (GaP), phosphorus arsenic.
- a substrate made of a material such as gallium (GaAsP), zinc selenide (ZnSe), zinc sulfide (ZnS) or strontium sulfide (AmSSe).
- the first substrate 21 may be a transparent substrate or a non-transparent substrate, which is mainly considered according to the light-emitting direction of the high-voltage LED chip 301 or the design of the reflective layer, so as to simultaneously guide the upward/downward two-way.
- the first substrate 21 must be a transparent substrate.
- the adhesive layer 22 is formed on the first surface 211 for bonding the first substrate 21 and the first ohmic connecting layer 23.
- the adhesive layer 22 may be selected from the group consisting of B-s tagged benzocyclobutene (BCB), an epoxy tree, a stone gelatin (si 1 icone), and a polymethyl methacry. , PMMA), a polymer and a spin-on glas s (S0G).
- the adhesive layer 22 may be a transparent adhesive layer 22 or a non-transparent adhesive layer 22, which is also considered in accordance with the light-emitting direction of the high-voltage LED chip 301 or the design of the reflective layer. To simultaneously guide the upward/downward bidirectional light, the adhesive layer is adhered. Layer 22 must be a transparent adhesive layer 22.
- the light emitting diode 28 includes a first ohmic connecting layer 23 and an epitaxial layer 24, which are disposed on the same first substrate 21 and the adhesive layer 22, so that the unit split only needs to be for the first ohmic connecting layer.
- 23 and the epitaxial layer 24 are divided, and units such as Al, A2, A3, ... are formed.
- a first ohmic connection layer 23 is formed on the adhesion layer 22, and the first ohmic connection layer 23 may be a P-type ohmic connection layer, and a first ohmic connection layer 23 originally formed on the wafer, It can be etched to distinguish different units.
- the epitaxial layer 24, which is a single LED unit 28, is also etched to distinguish different cells.
- the epitaxial layer 24 is also formed by an etching process to form the first trench 291.
- the formation of the first trench 291 will cause the first ohmic connection layer 23 to produce a partially exposed exposed portion 231, thereby facilitating the arrangement of the second conductive plate 27, and also because of the arrangement of the second conductive plate 27,
- the unit's light-emitting diodes 28 can be easily designed in series/parallel, thus enabling the high-voltage LEDs 28 to be easily fabricated.
- the first ohmic contact layer and a first dividing unit 23 making trenches 291 can be achieved by means of different etching steps. In many etching steps, In one etching, a gap of the same size and relative position between the two first ohmic connecting layers 23 is first etched, and the second etching is performed by etching the first trench 291 after the first etching. The method makes the process easier.
- each epitaxial layer 24 has at least: a lower cladding layer 241, an active layer 242, and an upper cladding layer 243.
- Each of the underlying cladding layers 241 is formed on a first ohmic connecting layer 23, and the lower cladding layer 241 may be a P-type galvanized aluminum indium gallium (Al Ga l nP) cladding layer.
- An active layer 242 is formed on the lower cladding layer 241, which may be a single heterostructure (Single Hetero - s gagture, SH), a double Hetero - sulture (DH) or A multi-quantum well structure (Mul t iple Quantum Wel ls, MQW) prosecut an upper cladding layer 243 formed on the active layer 242, and the upper cladding layer 243 may be an N-type aluminum indium gallium arsenide coating layer.
- a second ohmic connection layer 292 may be further formed between the cladding layer 243 and the first conductive plate 26.
- the first insulating layer 25 is made of, for example, silicon oxide (S iO), covering the exposed surface of each of the first ohmic connecting layer 23 and each of the upper cladding layers 243, and is formed on any two first ohmic connections. Layer 23.
- SiO silicon oxide
- a first opening 251 and a second opening 252 are formed in each of the upper insulating layer 25 and the exposed portion 231 of each of the first ohmic connecting layers 23, and the first opening 251 is formed in the first opening 251.
- the second opening 252 is formed by etching after the first insulating layer 25 is completed.
- the first conductive plates 26 are respectively formed in the first openings 251 of each unit and electrically connected to the corresponding upper cladding layers 243.
- the second conductive plates 27 are respectively formed in the second openings 252 of each unit and electrically connected to the corresponding first ohmic connecting layers 23.
- the first conductive plate 26 and the second conductive plate 27 are disposed to provide power so that the epitaxial layer 24 can receive power to generate light.
- the high voltage LED chip 301 is designed as a face up structure.
- the first substrate 21 is designed as a transparent substrate
- the adhesive layer 22 is designed as a transparent adhesive layer 22, and a reflective layer is formed on the second surface 212 of the first substrate 21 (not shown).
- the light emitted by the epitaxial layer 24 can be reflected by the reflective layer, so that the high-voltage LED chip 301 can achieve better light-emitting efficiency.
- the adhesive layer 22 may be designed as a transparent adhesive layer 22, and a reflective layer (not shown) may be formed between the first substrate 21 and the adhesive layer 22, so that light reflection can also be achieved. The same effect makes the high voltage LED chip 301 achieve better light extraction efficiency.
- the high voltage LED chip 301 includes a second substrate 50, so that a flip-chip structure can be produced.
- the first substrate 21 is a transparent substrate and the adhesive layer 11 is a transparent adhesive layer 11.
- a second substrate 50 having at least a third surface 51, the third surface 51 is formed with at least two third conductive plate 52, and at least two fourth conductive plate 53, each A third conductive plate 52 and a fourth conductive plate 53 are electrically connected to the corresponding first conductive plate 26 and second conductive plate 27 by solder joints 60, respectively.
- a plurality of circuit structures may be formed on the second substrate 50 (not shown). ), so that the third conductive plate 52 and the fourth conductive plate 53 are electrically connected.
- a complicated circuit structure can be formed by the above connection method.
- the advantage of using the second substrate 50 will allow the serial/parallel circuit between the different light emitting diodes 28 to be performed on the second substrate 50. Since the area and thickness of the second substrate 50 can be made relatively flexible, it is sufficient to cope with a very complicated circuit structure.
- the application of the high voltage LED chip 301 will be more versatile when complex circuit structures are available.
- the second substrate 50 may be a silicon substrate, a printed circuit board / a printed circuit board (PCB) or a ceramic substrate (ceramic subs tra te).
- alumina A1203
- aluminum nitride A1N
- beryllium oxide BeO
- low temperature co-existing ceramics LTCC
- high temperature co-fired multi-layer ceramics High Temperature Cof i Red Ceramic, HTCC...etc.
- a reflective layer is further formed on the third surface 51 of the second substrate 50, at portions other than the third conductive plate 52 and the fourth conductive plate 53.
- a reflective layer may also be formed on the exposed surface of the first insulating layer 25, that is, the first insulating layer 25.
- Each of the above reflective layers may be selected from one of aluminum (Al), silver (Ag), and gold (Au). It should be noted that when the reflective layer is a conductive material, the reflective layer cannot be in contact with the third conductive plate 52 or the fourth conductive plate 53, nor with the first conductive plate 26 or the second conductive plate 27. Contact, and the reflective layer preferably maintains a certain gap with each of the conductive plates to avoid short circuit between the conductive plates.
- the high voltage LED chip 301 further includes a first conductor layer 293 formed with at least one conductor and covering the first insulating layer 25, and the two ends of each conductor are respectively electrically connected.
- the second conductive plate 27 and the first conductive plate 26 are connected to different units. In this way, different ⁇ and tube 28 can be easily connected in series/and supported by the first color edge layer 25, so that the first conductor layer 293 can also perform complicated circuit layout design.
- the high-voltage LED chip 301 can be configured by the reverse connection of at least two light-emitting diodes 28 to form an AC-type high-voltage LED chip 301, and then the AC-type high-voltage LED chip 301 is provided through the circuit substrate 200.
- the circuit is connected to form a high voltage AC light emitting diode structure having a high voltage LED chip 301 of a series, parallel or series-parallel AC type.
- FIG. 8 is a cross-sectional view showing a high voltage LED chip of the present invention after cell division, epitaxial layer division, and second trench fabrication.
- Figure 9 is a high voltage LED chip of the present invention A step-by-step embodiment of a second substrate is combined.
- Figure 10 is a cross-sectional view showing a high voltage LED chip of the present invention further forming a second conductor layer.
- 11A to 11G are diagrams showing an equivalent circuit embodiment of various high voltage LED chips of the present invention, respectively.
- the embodiment is a high voltage LED chip 302, comprising: a first substrate 21, an adhesive layer 22, at least two first ohmic connection layers 23, and at least two epitaxial layers. 24.
- a second insulating layer 31 at least two fifth conductive plates 32, and at least two sixth conductive plates 33.
- the high voltage LED chip 302 of the present example can be combined with the first substrate 21 coated with the adhesive layer 22 and the front process light emitting diode 28 formed on the wafer, similarly to the first embodiment. Then, the temporary substrate and the etch stop layer are removed by etching or the like to obtain a high voltage LED chip which has not been subjected to cell division.
- the first substrate 21 has a first surface 211 and a second surface 212.
- the first substrate 21 is mainly used to support the entire high voltage LED chip 302.
- the first substrate 21 may be a single crystal, a polycrystalline or an amorphous structure substrate, such as glass, sapphire, silicon carbide, gallium phosphide, gallium arsenide, zinc selenide, zinc sulfide or antimony sulfide. .
- Substrate made of materials.
- the first substrate 21 can be a transparent substrate or a non-transparent substrate, which is mainly considered according to the light-emitting direction of the high-voltage LED chip 302 or the design of the reflective layer, so as to simultaneously guide the upward/downward two-way. When the light is emitted, the first substrate 21 must be a transparent substrate.
- the adhesive layer 22 is formed on the first surface 211 for bonding the first substrate 21 and the first ohmic connecting layer 23.
- the adhesive layer 22 is selected from the group consisting of monophenylene butylene, an epoxy resin, a silica gel, a polydecylmercaptoacrylate, a polymer, and a spin-on glass.
- the adhesive layer 22 may be a transparent adhesive layer 22 or a non-transparent adhesive layer 22, which is also considered according to the light-emitting direction of the high-voltage LED chip 302 or the design of the reflective layer. If the upward/downward bidirectional light is simultaneously guided, the adhesive layer is adhered.
- Layer 22 must be a transparent adhesive layer 22.
- each of the high voltage LED chips 302 of the present embodiment also shares the first substrate 21 and the adhesive layer 22. Therefore, the cell division is also divided only for the first ohmic connection layer 23 and the epitaxial layer 24, and is divided. Units such as Al, A2, A3, . . . may also be formed later.
- the first ohmic connection layer 23, is formed on the adhesive layer 22.
- the first ohmic connection layer 23 may be a P-type ohmic connection layer.
- the first ohmic connection layer 23, which was originally formed on the wafer, can be etched to distinguish different cells.
- the epitaxial layer 24 which is an LED unit, is also etched to distinguish different cells.
- Each of the epitaxial layers 24 has a lower cladding layer 241, an active layer 242, an upper cladding layer 243, and a second trench 34.
- Each of the underlying cladding layers 241 is formed on a first ohmic connecting layer 23, and the lower cladding layer 241 is a P-type aluminum indium gallium arsenide coating layer.
- the active layer 242 is formed on the lower cladding layer 241, which may be a single heterostructure, a double heterostructure or a multiple quantum well structure.
- the upper cladding layer 243 is formed on the active layer 242, and the upper cladding layer 243 may be an N-type aluminum indium gallium arsenide coating layer.
- the second trench 34 is formed by etching.
- the second trench 34 vertically penetrates the upper cladding layer 243 and the active layer 242, and partially penetrates the lower cladding layer 241, and the gap between the second trenches 34 is
- the active layer 242 and the upper cladding layer 243 on both sides of the second trench 34 can be electrically isolated.
- the second trench 34 may be formed around the periphery of the sixth conductive plate 33 so that the active layer 242 can be effectively electrically isolated, so that the extending portion 331 of the sixth conductive plate 33 can The power is smoothly conducted to the first ohmic connection layer 23, . Further, in order to make the subsequent process easier to operate, when the second insulating layer 31 is formed, the second trench 34 may be filled with the second insulating layer 31.
- the second insulating layer 31 is made of, for example, silicon oxide, covering the exposed surface of each of the upper cladding layers 243, and formed between any two epitaxial layers 24 and any two first ohmic connecting layers 23.
- the second insulating layer 31 defines a third opening 35 and a fourth opening 36 on the upper cladding layer 243 and the second trench 34. The third opening 35 and the fourth opening 36 are in the first After the second insulating layer 31 is completed, it is formed by etching.
- the fifth conductive plates 32 are respectively formed in each of the third openings 35 and electrically connected to the corresponding upper cladding layer 243.
- a second ohmic connection layer 292 may be formed between the upper cladding layer 243 and the fifth conductive plate 32.
- the sixth conductive plate 33 is formed in each of the fourth openings 36, and has an extending portion 331 extending downwardly. The extending portion 331 vertically penetrates the epitaxial layer 24 and is electrically connected to the corresponding first ohm. Connection layer 23, .
- the fifth conductive plate 32 and the sixth conductive plate 33 are disposed to supply electric power so that the epitaxial layer 24 can receive power to generate light.
- the high voltage LED chip 302 When the high voltage LED chip 302 is designed as an upper structure.
- the first substrate 21 is designed as a transparent substrate
- the adhesive layer 22 is designed as a transparent adhesive layer 22, and a reflective layer is formed on the second surface 212 of the first substrate 21, which can be used by The reflective layer reflects the light emitted by the epitaxial layer 24, so that the high voltage LED chip 302 can achieve better light extraction efficiency.
- the high voltage LED chip 302 achieves better light extraction efficiency.
- the high voltage LED chip 302 further includes a second substrate 50, which produces a flip chip structure.
- the first substrate 21 is a transparent substrate and the adhesive layer 22 is a transparent adhesive layer 22.
- the second substrate 50 has at least one third surface 51.
- the third surface 51 is formed with at least two third conductive plates 52 and at least two fourth conductive plates 53, each of the third conductive plates 52 and the fourth conductive plates 53.
- the solder joints 60 are electrically connected to the corresponding fifth conductive plate 32 and sixth conductive plate 33, respectively. '
- a plurality of circuit structures may be formed on the second substrate 50 (Fig. Not shown), the third conductive plate 52 and the fourth conductive plate 53 are electrically connected to each other.
- a complicated circuit structure can be formed by the above connection method.
- the advantage of using the second substrate 50 will allow the serial/parallel circuit between the different light emitting diodes to be performed on the second substrate 50. Since the area and thickness of the second substrate 50 can be relatively elastic, it is sufficient to cope with a very complicated circuit structure.
- the application of the high voltage LED chip 302 will be more versatile when complex circuit structures are available.
- the second substrate 50 can be a silicon substrate, a printed circuit board/printed circuit multilayer board or a ceramic substrate.
- the third conductive substrate 52 and the fourth conductive plate 53 may be further on the third surface 51 of the second substrate 50.
- a reflective layer is formed.
- a reflective layer may be formed on the exposed surface of the second insulating layer 31, that is, the second insulating layer 31.
- Each of the above reflective layers may be selected from one of aluminum, silver, gold, and the like.
- the reflective layer is a conductive material, the reflective layer cannot be in contact with the third conductive plate 52 or the fourth conductive plate 53 and cannot be in contact with the fifth conductive plate 32 or the sixth conductive plate 33, and Preferably, the reflective layer can maintain a certain gap with each of the conductive plates to avoid short circuit between the conductive plates.
- the surface height of the sixth conductive plate 33 of all the fifth conductive plates 32 is the same level of height, which will be advantageous for the process. Casting.
- the high voltage LED chip 302 further includes a second conductor layer 37 formed with at least one conductor and covering the second insulating layer 31, and two ends of each conductor are electrically connected to different units.
- the fifth conductive plate 32 or the sixth conductive plate 33 This makes it easy to connect different LEDs in series/parallel.
- the second conductor layer 37 can also be subjected to complicated circuit layout design.
- the high voltage LED chip 302 of the present embodiment has the complete first insulating layer 25 and the second insulating layer 31, the same can be made on each insulating layer as shown in FIGS. 11A to 11G. Similar complex circuits, especially when using the second substrate 50 to form a flip chip structure, are easier to achieve with related circuits.
- the high voltage LED chip 302 can be reversely connected in parallel with at least two light emitting tubes and tubes to form an alternating current type high voltage LED chip 302, the alternating current type high voltage LED chip 302 is connected through a plurality of circuits provided by the circuit substrate 200.
- the circuit substrate 200 To form a high voltage AC LED structure having a high voltage LED chip 302 of series, parallel or series-parallel AC type.
- the high voltage LED chips 301, 302 are DC type high voltage LED chips 301, 302, at least two DC types can also be connected through the various circuit connections provided by the circuit substrate 200.
- the high voltage LED chips 301, 302 are connected in anti-parallel to form a high voltage AC light emitting diode structure.
- the high voltage LED chips 301 and 302 can be connected to the high voltage AC light emitting diode structure through the circuit substrate 200. The manner in which the high voltage LED chips 301 and 302 are connected will not be described herein.
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Abstract
Description
高电压交流发光二极管结构 技术领域 High voltage AC light emitting diode structure
本发明涉及一种高电压交流发光二极管结构, 特别是涉及一种应用于 照明用的高电压交流发光二极管结构。 背景技术 The present invention relates to a high voltage alternating current light emitting diode structure, and more particularly to a high voltage alternating current light emitting diode structure for use in illumination. Background technique
美国专利公告第 6, 853, 011号, 揭霽了一种发光磊晶层结构, 其一端 包括有一吸光型的临时基材, 而另一端借由苯环丁浠粘着一透光的透明基 材。 然后将吸光型临时基材的部份被移除。 接着发光二极管结构形成一连 接通道以连接第一欧姆接触电极, 以及形成一绝缘沟槽以将发光二极管结 构的作用层分离成两个部分。然后,一第二欧姆接触电极形成在披覆层上、一 接合金属层充填于第一通道内并成功的形成在第二欧姆接触电极上。 因为 两个接合金属层具有相同的高度, 因此所产生的发光二极管结构能更方便 的适用于覆晶结构中。 U.S. Patent No. 6,853,011 discloses a luminescent epitaxial layer structure comprising a temporary substrate having a light absorbing type at one end and a transparent transparent substrate adhered to the other end by a benzene ring . The portion of the light absorbing temporary substrate is then removed. The LED structure then forms a connection channel for connecting the first ohmic contact electrode and an insulating trench to separate the active layer of the LED structure into two portions. Then, a second ohmic contact electrode is formed on the cladding layer, a bonding metal layer is filled in the first via hole and successfully formed on the second ohmic contact electrode. Since the two bonding metal layers have the same height, the resulting LED structure can be more conveniently applied to the flip chip structure.
美国专利公告第 6, 998, 642号, 揭露了一种具有两个发光二极管在串 联状态下的半导体结构。 上述半导体结构包括了两个具有相同堆叠结构的 发光二极管, 并且借由绝缘沟槽使两者隔离。 上述堆叠结构从底部起形成 一导热基材; 一绝缘保护层; 一金属粘着层; 一反射保护层; 一 P型欧姆 连接磊晶层; 一上披覆层; 一作用层以及一下披覆层。 属于两个发光二极 管的两个 P型欧姆接触金属电极, 被形成于一个介于反射保护层及欧姆接 触磊晶层间的介面上, 并且被埋设于反射保护层内。 U.S. Patent No. 6,998,642 discloses a semiconductor structure having two light emitting diodes in a series connected state. The above semiconductor structure includes two light emitting diodes having the same stacked structure, and is isolated by insulating trenches. The stacked structure forms a thermally conductive substrate from the bottom; an insulating protective layer; a metal adhesion layer; a reflective protective layer; a P-type ohmic connection epitaxial layer; an upper cladding layer; an active layer and a lower cladding layer . Two P-type ohmic contact metal electrodes belonging to two light emitting diodes are formed on an interface between the reflective protective layer and the ohmic contact epitaxial layer, and are buried in the reflective protective layer.
然而美国专利公告第 6, 85 3, 01 1号虽然可以应用于覆晶结构中, 但若 无第二基材(submount) , 则无法进行两个发光二极管间的连接, 且在作覆 晶工艺时,需要处理多个芯片,增加工艺复杂度。美国专利公告第 6, 998 , 642 号虽然可以进行两颗发光二极管间的电性连接, 但是利用金属进行接合, 必 须借由复杂的工艺方能达成, 因此在生产效能及成本上均易产生问题。 However, although US Patent Publication No. 6, 85 3, 01 1 can be applied to a flip chip structure, if there is no second substrate, the connection between the two light emitting diodes cannot be performed, and the flip chip process is performed. When it is necessary to process multiple chips, the process complexity is increased. Although US Patent Publication No. 6,998,642 can electrically connect two LEDs, the use of metal for bonding must be achieved by a complicated process, which is prone to problems in production efficiency and cost. .
以上现有习知技术, 使用的发光二极管大多是以非晶圆级工艺制造的 一般二极管, 并且未考量到将多颗发光二极管进行串联、 并联或串并联以 符合使用的需求, 因此如何达到以简单便利的方式制造高电压交流的发光 二极管实为一重要课题。 发明内容 In the above prior art, most of the light-emitting diodes used are general diodes fabricated in a non-wafer-level process, and it is not considered to connect a plurality of light-emitting diodes in series, parallel or series-parallel to meet the requirements of use, so how to achieve It is an important issue to manufacture high-voltage AC light-emitting diodes in a simple and convenient manner. Summary of the invention
本发明的主要目的, 在于克服现有的发光二极管存在的缺陷, 而提供 一种高电压交流发光二极管结构, 所要解决的技术问题是, 制作出体积小 的高电压交流发光二极管结构。 本发明提供一 高电 交流发光^极管结构: 其包括:、 电路! ^板; 以 及多个高压 LED芯片。 高压 LED芯片包括: 第一基材; 粘着层; 第一欧姆 连接层; 磊晶层; 第一绝缘层; 至少两第一导电板; 至少两第二导电板; 以 及第二基材。 本发明是要以晶圆级工艺的高压 LED芯片结合较低成本的电 路基板, 以制作出体积小的高电压交流发光二极管结构。 The main object of the present invention is to overcome the defects of the existing light emitting diodes and provide a high voltage alternating current light emitting diode structure. The technical problem to be solved is to make a small volume. High voltage AC LED structure. The invention provides a high-power AC light-emitting diode structure: it comprises:, a circuit! ^ board; and a plurality of high voltage LED chips. The high voltage LED chip comprises: a first substrate; an adhesive layer; a first ohmic connection layer; an epitaxial layer; a first insulating layer; at least two first conductive plates; at least two second conductive plates; and a second substrate. The invention is to combine a low-cost circuit substrate with a high-voltage LED chip of a wafer level process to fabricate a small-sized high-voltage AC light-emitting diode structure.
本发明提供一种高电压交流发光二极管结构, 其包 —电路基板; 以 及多个高压 LED芯片, 固设且电性连接于电路基板上并借由电路基板使上 述高压 LED芯片形成一串联^■, 又^ "高压 LED芯片^: 一第一基材, 具 有一第一表面及一第二表面; 一粘着层, 形成于第一表面上; 至少两第一 欧姆连接层, 形成于粘着层上; 至少两磊晶层, 任两磊晶层间形成有一第 一沟槽, 每一磊晶层具有: 一下披覆层, 形成于一第一欧姆连接层上; 一 作用层, 形成于下披覆层上; 以及一上披覆层, 形成于作用层上; 一第一 绝缘层, 覆盖于每一第一欧姆连接层及每一上披覆层其棵露的表面, 且形 成于任两第一欧姆连接层间, 第一绝缘层于每一上披覆层及每一第一欧姆 连接层其棵露部处, 分别形成有一第一开孔及一第二开孔; 至少两第一导 电板, 分别形成于每一第一开孔内, 且电性连接于一上披覆层; 至少两第 二导电板, 分别形成于每一第二开孔内, 且电性连接于一第一欧姆连接层; 以 及一第二基材, 其具有一第三表面, 第三表面形成有至少两第三导电板及 至少两第四导电板, 又第二基材形成有多条电路结构, 用以电性连接上述 第三导电板及上述第四导电板, 且每一第三导电板及每一第四导电板分别 借由焊点电性连接于相对应的第一导电板及第二导电板, 又第一基材为一 透明基材且粘着层为一透明粘着层, 且第三表面上在第三导电板及第四导 电板以外的部位形成有一反射层。 The invention provides a high voltage alternating current light emitting diode structure, a package-circuit substrate thereof, and a plurality of high voltage LED chips fixed and electrically connected to the circuit substrate and forming a series connection of the high voltage LED chips by the circuit substrate. And a "high voltage LED chip ^: a first substrate having a first surface and a second surface; an adhesive layer formed on the first surface; at least two first ohmic connecting layers formed on the adhesive layer At least two epitaxial layers, a first trench is formed between any two epitaxial layers, each epitaxial layer has: a lower cladding layer formed on a first ohmic connection layer; and an active layer formed on the lower cladding layer And a top coating layer formed on the active layer; a first insulating layer covering each of the first ohmic connecting layer and the exposed surface of each of the upper cladding layers, and formed on any two Between the first ohmic connection layers, the first insulating layer is formed with a first opening and a second opening at each of the upper cladding layer and each of the first ohmic connecting layers; at least two first Conductive plates, formed separately Each of the first openings is electrically connected to an upper cladding layer; at least two second conductive plates are respectively formed in each of the second openings and electrically connected to a first ohmic connection layer; a second substrate having a third surface, the third surface is formed with at least two third conductive plates and at least two fourth conductive plates, and the second substrate is formed with a plurality of circuit structures for electrically connecting the above a third conductive plate and the fourth conductive plate, and each of the third conductive plates and each of the fourth conductive plates are electrically connected to the corresponding first conductive plate and the second conductive plate by solder joints, and first The substrate is a transparent substrate and the adhesive layer is a transparent adhesive layer, and a reflective layer is formed on the third surface at portions other than the third conductive plate and the fourth conductive plate.
本发明又提供一种高电压交流发光二极管结构,其包 —¾ ^基板; 以 及多个高压 LED芯片, 固设且电性连接于电路基板上并借由电路基板使上 述高压 LED芯片形成一串联 又 高压 LED芯片包括: 一第一基材, 具 有一第一表面及一第二表面; 一粘着层, 形成于第一表面上; 至少两第一 欧姆连接层, 形成于粘着层上; 至少两磊晶层, 每一磊晶层具有: 一下披 覆层, 形成于一第一欧姆连接层上; 一作用层, 形成于下披覆层上; 一上 披覆层, 形成于作用层 _ ; 以及一第二沟槽, 垂直贯穿上披覆层及作用层, 又 局部贯穿下披覆层; 一第二绝缘层, 覆盖于每一上披覆层上, 并形成于任 两磊晶层及任两第一欧姆连接层间, 第二绝缘层在上披覆层上及第二沟槽 内侧, 分别形成有一第三开孔及一第四开孔; 至少两第五导电板, 分别形 成于每一第三开孔内, 且电性连接于一上披覆层; 以及至少两第六导电板, 分 别形成于每一第四开孔内, 其具有向下延伸的一延伸部, 延伸部垂直贯穿 磊晶层, 且电性连接于第一欧姆连接层。 The invention further provides a high voltage alternating current light emitting diode structure, which comprises a substrate and a plurality of high voltage LED chips, which are fixedly and electrically connected to the circuit substrate and form a series connection of the high voltage LED chips by the circuit substrate. The high voltage LED chip comprises: a first substrate having a first surface and a second surface; an adhesive layer formed on the first surface; at least two first ohmic connecting layers formed on the adhesive layer; at least two The epitaxial layer, each epitaxial layer has: a lower cladding layer formed on a first ohmic connection layer; an active layer formed on the lower cladding layer; and an upper cladding layer formed on the active layer _; And a second trench extending vertically through the upper cladding layer and the active layer, and partially extending through the lower cladding layer; a second insulating layer covering each of the upper cladding layers and formed on any two epitaxial layers and Between any two first ohmic connection layers, a second insulating layer is formed on the upper cladding layer and inside the second trench, and a third opening and a fourth opening are respectively formed; at least two fifth conductive plates are respectively formed on Inside each third opening, and electricity Sexually connected to an upper cladding layer; and at least two sixth conductive plates, Optionally, it is formed in each of the fourth openings, and has an extending portion extending downwardly. The extending portion vertically penetrates the epitaxial layer and is electrically connected to the first ohmic connecting layer.
借由本发明的实施, 至少可达到下列进步功效: By the implementation of the present invention, at least the following advancements can be achieved:
1、 可以以晶圆级工艺的高压 LED芯片结合较低成本的电路基板, 以制 作出体积小的高电压交流发光二极管结构。 1. A high-voltage LED chip with a wafer-level process can be combined with a lower-cost circuit substrate to make a small-sized high-voltage AC LED structure.
2、 可以更容易且快速形成高电压交流发光二极管结构。 2. The high voltage AC LED structure can be formed more easily and quickly.
3、 可以组合出更具多样性的高电压交流发光二极管结构。 3. A more diverse high voltage AC LED structure can be combined.
为了使任何熟习相关技艺者了解本发明的技术内容并据以实施, 且根 据本说明书所揭露的内容、 申请专利范围及图式, 任何熟习相关技艺者可 轻易地理解本发明相关的目的及优点, 因此将在实施方式中详细叙述本发 明的详细特征以及优点。 附图的简要说明 In order to make the technical content of the present invention familiar to those skilled in the art and to implement the present invention, and in light of the disclosure, the scope of the invention and the drawings, the related objects and advantages of the present invention can be easily understood by those skilled in the art. The detailed features and advantages of the present invention will be described in detail in the embodiments. BRIEF DESCRIPTION OF THE DRAWINGS
图 1A为本发明实施例的一种高电压交流发光二极管结构示意图。 图 1B为本发明实施例的一种串联等效电路图。 FIG. 1A is a schematic structural diagram of a high voltage alternating current light emitting diode according to an embodiment of the present invention. FIG. 1B is a series equivalent circuit diagram of an embodiment of the present invention.
图 2A为本发明实施例的一种串联后又并联的等效电路结构一。 2A shows an equivalent circuit structure 1 after series connection and parallel connection according to an embodiment of the present invention.
图 2B为本发明实施例的一种串联后又并联的等效电路结构二。 FIG. 2B is an equivalent circuit structure 2 of a series connection and a parallel connection according to an embodiment of the present invention.
图 3为本发明实施例的一种高压 LED芯片, 其完成单元分割后的剖视 图。 3 is a cross-sectional view of a high voltage LED chip according to an embodiment of the present invention, which is completed by unit division.
图 4A为第 3图进行第一次蚀刻前的制作方法实施例图。 Fig. 4A is a view showing an embodiment of the manufacturing method before the first etching in Fig. 3;
图 4B为图 4A完成后再次进行第二次蚀刻的制作方法实施例图。 Fig. 4B is a view showing an embodiment of a manufacturing method in which the second etching is performed again after completion of Fig. 4A.
图 5为图 3进一步完成第一绝缘层及导电板后的剖视实施例图。 FIG. 5 is a cross-sectional view showing the embodiment of FIG. 3 after the first insulating layer and the conductive plate are further completed.
图 6A为本发明实施例的一种高压 LED芯片进一步结合一第二基材的剖 视图。 6A is a cross-sectional view of a high voltage LED chip further incorporating a second substrate in accordance with an embodiment of the present invention.
图 6B为图 6A的俯视实施例图。 Figure 6B is a top plan view of Figure 6A.
图 6C为图 6A的等效电路图。 Fig. 6C is an equivalent circuit diagram of Fig. 6A.
图 7A为本发明的一种高压 LED芯片, 其进一步形成一第一导体层的剖 视实施例图。 Figure 7A is a cross-sectional view of a high voltage LED chip of the present invention further forming a first conductor layer.
图 7B为图 7A的俯视实施例图。 Figure 7B is a top plan view of Figure 7A.
图 8为本发明的一种高压 LED芯片, 已完成单元分割、 磊晶层分割及 第二沟槽制作后的剖视实施例图。 Figure 8 is a cross-sectional view showing a high voltage LED chip of the present invention after cell division, epitaxial layer division, and second trench fabrication.
图 9为本发明的一种高压 LED芯片进一步结合一第二基材的剖视实施 例图。 Figure 9 is a cross-sectional view showing a high voltage LED chip of the present invention further incorporating a second substrate.
图 10为本发明的一种高压 LED芯片进一步形成一第二导体层的剖视实 施例图。 Figure 10 is a cross-sectional view showing a high voltage LED chip of the present invention further forming a second conductor layer.
图 11A至图 11G分别为本发明的各种高压 LED芯片的等效电路实施例 图。 11A to 11G are respectively equivalent circuit embodiments of various high voltage LED chips of the present invention Figure.
【主要元件符号说明】 [Main component symbol description]
100 高电压交流发光二极管结构 200 电路基板 100 high voltage AC LED structure 200 circuit board
300、 301、 302 高压 LED芯片 400 串联电路 300, 301, 302 high voltage LED chip 400 series circuit
21第一基材 21 first substrate
211 第一表面 212 第二表面 211 first surface 212 second surface
22粘着层 23、 23,第一欧姆连接层 22 adhesive layer 23, 23, first ohmic connecting layer
231 棵露部 24 曰日 ¾■ 231 dews 24th day 3⁄4■
241 下披覆层 242 作用层 241 undercoat 242 layer
243 上披覆层 25 第一绝缘层 243 upper coating 25 first insulation
251 第一开孔 252 第二开孔 251 first opening 252 second opening
26第一导电板 27 第二导电板 26 first conductive plate 27 second conductive plate
28发光二极管 291 第一沟槽 28 LEDs 291 First trench
292 第二欧姆连接层 293 第一导体层 292 second ohmic connection layer 293 first conductor layer
31第二绝缘层 32 第五导电板 31 second insulating layer 32 fifth conductive plate
33第六导电板 331 延伸部 33 sixth conductive plate 331 extension
34第二沟槽 35 第三开孔 34 second groove 35 third opening
36第四开孔 37 第二导体层 36 fourth opening 37 second conductor layer
50第二基材 51 第三表面 50 second substrate 51 third surface
52第三导电板 53 第四导电板 52 third conductive plate 53 fourth conductive plate
60焊点 A1 、 , A2 、 A3 单元 实现发明的最佳方式 60 solder joints A1 , , A2 , A3 units The best way to achieve the invention
为更进一步阐述本发明为达成预定发明目的所采取的技术手段及功 效,以下结合附图及较佳实施例,对依据本发明提出的高电压交流发光二极 管结构其具体实施方式、 结构、 特征及其功效, 详细说明如后。 In order to further illustrate the technical means and functions of the present invention for achieving the intended purpose of the present invention, the specific embodiments, structures, features and structures of the high voltage AC light emitting diode structure according to the present invention will be described below with reference to the accompanying drawings and preferred embodiments. Its efficacy, detailed description as follows.
图 1A 为本发明实施例的一种高电压交流发光二极管结构示意图。 图 1B为本发明实施例的一种串联等效电路图。图 2A为本发明实施例的一种串 联后又并联的等效电路结构一。 图 2B为本发明实施例的一种串联后又并联 的等效电路结构二。 FIG. 1A is a schematic structural diagram of a high voltage alternating current light emitting diode according to an embodiment of the present invention. FIG. 1B is a series equivalent circuit diagram of an embodiment of the present invention. 2A is an equivalent circuit structure 1 of a series connection and parallel connection according to an embodiment of the present invention. 2B shows an equivalent circuit structure 2 after series connection and parallel connection according to an embodiment of the present invention.
如图 1A所示, 本实施例为一种高电压交流发光二极管结构 100, 其包 括: 一电路基板 200; 以及多个高压 LED芯片 300。 其中高压 LED芯片 300 是代表以下不同实施例的高压 LED芯片 301及高压 LED芯片 302。 As shown in FIG. 1A, this embodiment is a high voltage AC LED structure 100, which includes: a circuit substrate 200; and a plurality of high voltage LED chips 300. The high voltage LED chip 300 is a high voltage LED chip 301 and a high voltage LED chip 302 representing different embodiments below.
电路基板 200, 其可以为一铝基板或一陶瓷基板, 当高压 LED芯片 300 结合于电路基板 200时, 电路基板 200体积要比高压 LED芯片 300大上许 多, 因此可以借由电路基板 200提供高压 LED芯片 300所需的电路连接, 进 而设计出多样性的串并联电路, 所以可以更容易且快速的组合出更具多样 性的高电压交流发光二极管结构 100。 The circuit substrate 200 can be an aluminum substrate or a ceramic substrate. When the high voltage LED chip 300 is bonded to the circuit substrate 200, the circuit substrate 200 is much larger than the high voltage LED chip 300, so that the circuit substrate 200 can be supplied with a high voltage. The circuit connection required for the LED chip 300, By designing a variety of series-parallel circuits, a more diverse high-voltage AC LED structure 100 can be combined more easily and quickly.
除了提供电路连接外, ^各基板 200同时也提供散热的功能。 再者, 当 电路基板 200 为一陶瓷基板时, 陶瓷基板的基板内可以进一步设有多条导 热柱或多条导 ^主, 以使高压 LED芯片 300工作产生的热能有效的传递, 同 时也使高压 LED芯片 300的电极能顺利的延伸到陶瓷基板的另一侧面。 In addition to providing circuit connections, each substrate 200 also provides heat dissipation. Furthermore, when the circuit substrate 200 is a ceramic substrate, a plurality of heat conducting columns or a plurality of conductors may be further disposed in the substrate of the ceramic substrate, so that the heat generated by the operation of the high voltage LED chip 300 is effectively transmitted, and at the same time The electrodes of the high voltage LED chip 300 can smoothly extend to the other side of the ceramic substrate.
如图 1B所示,多个高压 LED芯片 300,固设且电性连接于电路基板 200 上并借由电路基板 200提供的多样化电路连接, 使多个高压 LED芯片 300 形成一串联电路 400, 当高压 LED芯片 300为交流形式的高压 LED芯片 300 时, 更可成为高电压交流发光二极管结构 100, 此为本实施例的串联电路 400最基本结构。 As shown in FIG. 1B, a plurality of high voltage LED chips 300 are fixedly and electrically connected to the circuit substrate 200 and connected to the circuit board 200 to form a series circuit 400. When the high voltage LED chip 300 is a high voltage LED chip 300 in the form of an alternating current, it can become a high voltage alternating current light emitting diode structure 100, which is the most basic structure of the series circuit 400 of the present embodiment.
如图 2A及图 2B所示, 除了上述的最基本结构外, 还可以将任两个高 压 LED芯片 300进一步彼此相互并联, 使串联电路 400又进一步具有至少 一并联 ¾r亦可使串联电路 400进一步又并联至少一串联电路 400,借 此以组合出多样的高电压交流电路。 As shown in FIG. 2A and FIG. 2B, in addition to the above-mentioned most basic structure, any two high voltage LED chips 300 may be further connected to each other in parallel, so that the series circuit 400 further has at least one parallel connection, and the series circuit 400 may further Further, at least one series circuit 400 is connected in parallel to thereby combine various high voltage AC circuits.
以下将详述高压 LED芯片 300的结构, 并且在以下各实施例中, 高压 LED芯片 300的各层结构是以现有习知的半导体成型技术加以制造,其细节 将不再赘述。 又为避免冗长的描述, 特将『蚀刻工艺』或 『蚀刻方式』等 用词, 定义为涵盖整个完整黄光工艺的简称。 又高压 LED芯片 300可形成 多维的阵列, 并非限定于实施例中的数量, 以上合先叙明。 The structure of the high voltage LED chip 300 will be described in detail below, and in the following embodiments, the respective layer structures of the high voltage LED chip 300 are fabricated by conventional semiconductor molding techniques, and the details thereof will not be described again. In order to avoid lengthy descriptions, the terms "etching process" or "etching method" are specifically defined as the abbreviation covering the entire complete yellow light process. Further, the high voltage LED chip 300 can form a multi-dimensional array, which is not limited to the number in the embodiment, which is described above.
【高压 LED芯片 300第一实施例】 [First Embodiment of High Voltage LED Chip 300]
图 3为本发明实施例的一种高压 LED芯片, 其完成单元分割后的剖视 图。 图 4A为图 3进行第一次蚀刻前的制作方法实施例图。 图 4B为图 4A完 成后再次进行第二次蚀刻的制作方法实施例图。 图 5为图 3进一步完成第 一绝缘层及导电板后的剖视实施例图。图 6 A为本发明实施例的一种高压 LED 芯片进一步结合一第二基材的剖视图。 图 6B为图 6A的俯视实施例图。 图 6C为图 6A的等效电路图。 图 7A为本发明的一种高压 LED芯片, 其进一步 形成一第一导体层的剖视实施例图。 图 7B为图 7A的俯视实施例图。 3 is a cross-sectional view of a high voltage LED chip according to an embodiment of the present invention, which is completed by unit division. Fig. 4A is a view showing an embodiment of the manufacturing method before the first etching in Fig. 3. Fig. 4B is a view showing an embodiment of a method of fabricating the second etching again after completion of Fig. 4A. Fig. 5 is a cross-sectional view showing the embodiment of Fig. 3 after further completing the first insulating layer and the conductive plate. 6A is a cross-sectional view of a high voltage LED chip further incorporating a second substrate in accordance with an embodiment of the present invention. Figure 6B is a top plan view of Figure 6A. Fig. 6C is an equivalent circuit diagram of Fig. 6A. Figure 7A is a cross-sectional view of a high voltage LED chip of the present invention further forming a first conductor layer. Figure 7B is a top plan view of Figure 7A.
一般高压 LED芯片 300的制造, 是以半导体工艺方式, 将尚未进行单 元分割及未完成其它绝缘层及导电板的前工艺高压 LED 芯片形成于一晶圆 (wafer)上。 但实际高压 LED芯片 300应用时, 由于晶圆厚度过厚且具有不 透光的特性, 因此无法加以应用而必须去除。 所以晶圆只是制造高压 LED 芯片 300过程中一临时性的基材, 也就是临时基材。 Generally, the high-voltage LED chip 300 is fabricated on a wafer by a semiconductor process in which a pre-process high-voltage LED chip that has not been subjected to cell division and that has not completed other insulating layers and conductive plates is formed. However, when the actual high voltage LED chip 300 is applied, since the thickness of the wafer is too thick and has an opaque property, it cannot be applied and must be removed. Therefore, the wafer is only a temporary substrate in the process of manufacturing the high voltage LED chip 300, that is, a temporary substrate.
一般去除临时基材的方法中, 蚀刻方式是最常使用的一种, 为了保护 高压 LED芯片 300于蚀刻过程中,不会因蚀刻过度而造成高压 LED芯片 300 的损伤, 因此会设置一蚀刻终止层。 蚀刻终止层在晶圆蚀刻的过程中, 大 部分亦会被蚀刻掉, 借由蚀刻终止层的作用, 可以达到保护高压 LED 芯片 300的功效。 完成上述工艺后, 即可产生前工艺的高压 LED芯片。 如图 3至 图 7B所示, 本实施例为一种高压 LED芯片 301, 其包括: 一第一基材 21、 一 粘着层 22、 至少两第一欧姆连接层 23、 至少两磊晶层 24、 一第一绝缘层 25、 至少两第一导电板 26以及至少两第二导电板 27。 In the method of generally removing the temporary substrate, the etching method is the most commonly used one. In order to protect the high voltage LED chip 300 during the etching process, the high voltage LED chip 300 is not caused by excessive etching. The damage is therefore set to an etch stop layer. Most of the etch stop layer is also etched away during the etching process of the wafer. By the action of the etch stop layer, the effect of protecting the high voltage LED chip 300 can be achieved. After the above process is completed, a high-voltage LED chip of the pre-process can be produced. As shown in FIG. 3 to FIG. 7B , the embodiment is a high voltage LED chip 301 comprising: a first substrate 21 , an adhesive layer 22 , at least two first ohmic connection layers 23 , and at least two epitaxial layers 24 . a first insulating layer 25, at least two first conductive plates 26, and at least two second conductive plates 27.
第一基材 21, 具有一第一表面 211及一第二表面 212, 第一基材 21主 要是用以支撑整个高压 LED芯片 301。 第一基材 21可以为一单晶体、 一多 晶体或一非晶体结构的基材, 例如玻璃(glas s)、 蓝宝石(sapphi re) , 碳化 硅(SiC)、 磷化镓(GaP)、 磷砷化镓(GaAsP)、 硒化锌(ZnSe)、 硫化锌(ZnS) 或硒硫化镅(AmSSe)…等材料所制成的基材。 此外, 第一基材 21 可以为一 透明基材或一非透明基材, 其主要是依照高压 LED芯片 301的出光方向或 反射层的设计而考量, 若要同时引导出向上 /向下的双向出光, 则第一基材 21必须为一透明基材。 The first substrate 21 has a first surface 211 and a second surface 212. The first substrate 21 is mainly used to support the entire high voltage LED chip 301. The first substrate 21 may be a single crystal, a polycrystalline or an amorphous structure substrate, such as glass (glas s), sapphire (sapphi re), silicon carbide (SiC), gallium phosphide (GaP), phosphorus arsenic. A substrate made of a material such as gallium (GaAsP), zinc selenide (ZnSe), zinc sulfide (ZnS) or strontium sulfide (AmSSe). In addition, the first substrate 21 may be a transparent substrate or a non-transparent substrate, which is mainly considered according to the light-emitting direction of the high-voltage LED chip 301 or the design of the reflective layer, so as to simultaneously guide the upward/downward two-way. When the light is emitted, the first substrate 21 must be a transparent substrate.
粘着层 22 , 形成于第一表面 211上, 其用以结合第一基材 21及第一 欧姆连接层 23。 粘着层 22 可选 自 一苯环丁烯 (B - s taged benzocyclobutene, BCB)、 一环氧树月旨 (epoxy)、 一石圭胶 (s i 1 icone)、 一聚 甲基丙烯酸曱酯(polymethyl methacry, PMMA)、 一聚合物(polymer)及一旋 转涂布玻璃(Spin - on glas s, S0G)…等其中的一种材质。 粘着层 22可以为 一透明粘着层 22或一非透明粘着层 22,其亦依照高压 LED芯片 301的出光 方向或反射层的设计而考量, 若要同时引导出向上 /向下双向出光, 则粘着 层 22必须为一透明粘着层 22。 The adhesive layer 22 is formed on the first surface 211 for bonding the first substrate 21 and the first ohmic connecting layer 23. The adhesive layer 22 may be selected from the group consisting of B-s tagged benzocyclobutene (BCB), an epoxy tree, a stone gelatin (si 1 icone), and a polymethyl methacry. , PMMA), a polymer and a spin-on glas s (S0G). The adhesive layer 22 may be a transparent adhesive layer 22 or a non-transparent adhesive layer 22, which is also considered in accordance with the light-emitting direction of the high-voltage LED chip 301 or the design of the reflective layer. To simultaneously guide the upward/downward bidirectional light, the adhesive layer is adhered. Layer 22 must be a transparent adhesive layer 22.
如图 3所示, 发光二极管 28包括第一欧姆连接层 23及磊晶层 24, 其 均设置于相同的第一基材 21及粘着层 22上, 因此单元分割仅需针对第一 欧姆连接层 23及磊晶层 24进行分割, 并形成例如 Al、 A2、 A3…等单元。 As shown in FIG. 3, the light emitting diode 28 includes a first ohmic connecting layer 23 and an epitaxial layer 24, which are disposed on the same first substrate 21 and the adhesive layer 22, so that the unit split only needs to be for the first ohmic connecting layer. 23 and the epitaxial layer 24 are divided, and units such as Al, A2, A3, ... are formed.
如图 4A所示, 第一欧姆连接层 23形成于粘着层 22上, 第一欧姆连接 层 23可以为一 P型欧姆连接层, 而且原本在晶圆上成型的第一欧姆连接层 23, 其可借由蚀刻方式, 以区分出不同的单元。 As shown in FIG. 4A, a first ohmic connection layer 23 is formed on the adhesion layer 22, and the first ohmic connection layer 23 may be a P-type ohmic connection layer, and a first ohmic connection layer 23 originally formed on the wafer, It can be etched to distinguish different units.
如图 3所示, 磊晶层 24, 其为一发光二极管 28单体, 其亦借由蚀刻 的方式以区分出不同的单元。 磊晶层 24 亦借由蚀刻工艺以形成第一沟槽 291。 第一沟槽 291的形成, 将使得第一欧姆连接层 23产生一局部棵露的 棵露部 231 , 因而能方便第二导电板 27的设置, 也因为第二导电板 27的设 置, 所以不同单元的发光二极管 28 , 能方便的进行串 /并联的设计, 因而使 得高电压的发光二极管 28得以轻易的制成。 As shown in FIG. 3, the epitaxial layer 24, which is a single LED unit 28, is also etched to distinguish different cells. The epitaxial layer 24 is also formed by an etching process to form the first trench 291. The formation of the first trench 291 will cause the first ohmic connection layer 23 to produce a partially exposed exposed portion 231, thereby facilitating the arrangement of the second conductive plate 27, and also because of the arrangement of the second conductive plate 27, The unit's light-emitting diodes 28 can be easily designed in series/parallel, thus enabling the high-voltage LEDs 28 to be easily fabricated.
如图 3、 图 4A及图 4B所示, 第一欧姆连接层 23的单元分割及第一沟 槽 291 的制作, 可以借由不同的蚀刻步骤达成的。 在众多蚀刻步骤中, 第 一次蚀刻, 是先蚀刻出与两个第一欧姆连接层 23间相同大小及相对位置的 缺口, 第二次蚀刻, 是在第一次蚀刻后再蚀刻出第一沟槽 291 的大小, 此 种方式可使工艺较为简便。 3, shown in FIGS. 4 A and 4B, the first ohmic contact layer and a first dividing unit 23 making trenches 291, can be achieved by means of different etching steps. In many etching steps, In one etching, a gap of the same size and relative position between the two first ohmic connecting layers 23 is first etched, and the second etching is performed by etching the first trench 291 after the first etching. The method makes the process easier.
如图 5所示, 每一磊晶层 24, 其至少具有: 一下披覆层 241、 一作用 层 242以及一上披覆层 243。 每一下披覆层 241, 形成于一第一欧姆连接层 23上, 下披覆层 241可以为一 P型磚化铝铟镓 (Al Ga l nP)披覆层。 作用层 (act ive layer) 242 , 形成于下披覆层 241 上, 其可以为一单异质结构 (Single Hetero - s tructure, SH) 、 一双异盾结构(Double Hetero - s tructure, DH)或一多量子阱结构(Mul t iple Quantum Wel l s, MQW)„ 上披覆 层 243, 形成于作用层 242上, 上披覆层 243可以为一 N型磷化铝铟镓披覆 层。 上披覆层 243与第一导电板 26间, 亦可进一步形成有一第二欧姆连接 层 292。 As shown in FIG. 5, each epitaxial layer 24 has at least: a lower cladding layer 241, an active layer 242, and an upper cladding layer 243. Each of the underlying cladding layers 241 is formed on a first ohmic connecting layer 23, and the lower cladding layer 241 may be a P-type galvanized aluminum indium gallium (Al Ga l nP) cladding layer. An active layer 242 is formed on the lower cladding layer 241, which may be a single heterostructure (Single Hetero - s tructure, SH), a double Hetero - s tructure (DH) or A multi-quantum well structure (Mul t iple Quantum Wel ls, MQW) „ an upper cladding layer 243 formed on the active layer 242, and the upper cladding layer 243 may be an N-type aluminum indium gallium arsenide coating layer. A second ohmic connection layer 292 may be further formed between the cladding layer 243 and the first conductive plate 26.
第一绝缘层 25是例如氧化硅(S iO)的材质, 其覆盖于每一第一欧姆连 接层 23及每一上披覆层 243其棵露的表面, 并形成于任两第一欧姆连接层 23间。 借由第一绝缘层 25的设置, 除了可使不同单元的发光二极管 28完 全隔离不互相影响外, 亦可确保发光二极管 28不受外界环境, 例如: 水气 或湿气的影响而减损寿命。 The first insulating layer 25 is made of, for example, silicon oxide (S iO), covering the exposed surface of each of the first ohmic connecting layer 23 and each of the upper cladding layers 243, and is formed on any two first ohmic connections. Layer 23. By the arrangement of the first insulating layer 25, in addition to completely insulating the LEDs 28 of different units without affecting each other, the LEDs 28 can be protected from the external environment, such as moisture or moisture, thereby detracting from the life.
第一绝缘层 25于每一上披覆层 243及每一第一欧姆连接层 23其棵露 部 231处, 分别形成有一第一开孔 251及一第二开孔 252 , 第一开孔 251及 第二开孔 252是在第一绝缘层 25制作完成后, 再以蚀刻方式加以制成。 A first opening 251 and a second opening 252 are formed in each of the upper insulating layer 25 and the exposed portion 231 of each of the first ohmic connecting layers 23, and the first opening 251 is formed in the first opening 251. And the second opening 252 is formed by etching after the first insulating layer 25 is completed.
第一导电板 26, 分别形成于每一单元的第一开孔 251内, 且电性连接 于相对应的上披覆层 243。 第二导电板 27, 分别形成于每一单元的第二开 孔 252内, 且电性连接于相对应的第一欧姆连接层 23。 借由第一导电板 26 及第二导电板 27的设置以提供电力, 使得磊晶层 24能接收电力产生发光 的作用。 The first conductive plates 26 are respectively formed in the first openings 251 of each unit and electrically connected to the corresponding upper cladding layers 243. The second conductive plates 27 are respectively formed in the second openings 252 of each unit and electrically connected to the corresponding first ohmic connecting layers 23. The first conductive plate 26 and the second conductive plate 27 are disposed to provide power so that the epitaxial layer 24 can receive power to generate light.
当高压 LED芯片 301设计成一面上(face up)结构时。 此时将第一基材 21设计为一透明基材, 且将粘着层 22设计为一透明粘着层 22, 并且在第 一基材 21的第二表面 212上形成一反射层(图未示), 将可借由反射层将磊 晶层 24所发的光进行反射, 如此可使高压 LED芯片 301达到较佳的出光效 率。 除此之外, 亦可只将粘着层 22设计成为一透明粘着层 22, 并且将反射 层(图未示)形成于第一基材 21与粘着层 22之间, 如此亦可达到光反射的 作用, 同样的使得高压 LED芯片 301达到较佳的出光效率。 When the high voltage LED chip 301 is designed as a face up structure. At this time, the first substrate 21 is designed as a transparent substrate, and the adhesive layer 22 is designed as a transparent adhesive layer 22, and a reflective layer is formed on the second surface 212 of the first substrate 21 (not shown). The light emitted by the epitaxial layer 24 can be reflected by the reflective layer, so that the high-voltage LED chip 301 can achieve better light-emitting efficiency. In addition, the adhesive layer 22 may be designed as a transparent adhesive layer 22, and a reflective layer (not shown) may be formed between the first substrate 21 and the adhesive layer 22, so that light reflection can also be achieved. The same effect makes the high voltage LED chip 301 achieve better light extraction efficiency.
如图 6A至图 6C所示, 高压 LED芯片 301, 进" "^包括一第二基材 50, 如 此可产生一覆晶结构(f l ip - chip)。 在覆晶结构中, 第一基材 21为一透明 基材且粘着层 11为一透明粘着层 11。 第二基材 50其至少具有一第三表面 51 , 第三表面 51形成有至少两第三导电板 52及至少两第四导电板 53, 每 一第三导电板 52及第四导电板 53, 分别借由焊点 60电性连接于相对应的 第一导电板 26及第二导电板 27。 As shown in FIG. 6A to FIG. 6C, the high voltage LED chip 301 includes a second substrate 50, so that a flip-chip structure can be produced. In the flip chip structure, the first substrate 21 is a transparent substrate and the adhesive layer 11 is a transparent adhesive layer 11. A second substrate 50 having at least a third surface 51, the third surface 51 is formed with at least two third conductive plate 52, and at least two fourth conductive plate 53, each A third conductive plate 52 and a fourth conductive plate 53 are electrically connected to the corresponding first conductive plate 26 and second conductive plate 27 by solder joints 60, respectively.
第三导电板 52及第四导电板 53间, 除了可以直接将导电板的面积扩 大,而使彼此互相电性连接外,亦可在第二基材 50形成有多条电路结构(图 未示), 以使第三导电板 52及第四导电板 53间电性连接。 借由上述的连接 方式可形成复杂的电路结构。 使用第二基材 50的优点, 将使得不同发光二 极管 28间的串 /并电路得以在第二基材 50上进行。 由于第二基材 50的面 积及厚度可以有较大的弹性, 因此足以应付非常复杂的电路结构。 当复杂 的电路结构可以实践时, 高压 LED芯片 301的应用将更具多样性。 Between the third conductive plate 52 and the fourth conductive plate 53 , in addition to directly expanding the area of the conductive plate to electrically connect each other, a plurality of circuit structures may be formed on the second substrate 50 (not shown). ), so that the third conductive plate 52 and the fourth conductive plate 53 are electrically connected. A complicated circuit structure can be formed by the above connection method. The advantage of using the second substrate 50 will allow the serial/parallel circuit between the different light emitting diodes 28 to be performed on the second substrate 50. Since the area and thickness of the second substrate 50 can be made relatively flexible, it is sufficient to cope with a very complicated circuit structure. The application of the high voltage LED chip 301 will be more versatile when complex circuit structures are available.
第二基材 50 可以为一娃基材(s i l i con subs tra te)、 一印刷电路板 / 印刷电路多层板(Pr inted Circui t Board, PCB)或一陶瓷基材(ceramic subs tra te)。 例如: 氧化铝(A1203)、 氮化铝(A1N)、 氧化铍(BeO)、 低温共 烧多层陶瓷(Low Temperature Cof i red Ceramic, LTCC)或高温共烧多层陶 资 (High Temperature Cof i red Ceramic, HTCC)…等基材。 The second substrate 50 may be a silicon substrate, a printed circuit board / a printed circuit board (PCB) or a ceramic substrate (ceramic subs tra te). For example: alumina (A1203), aluminum nitride (A1N), beryllium oxide (BeO), low temperature co-existing ceramics (LTCC) or high temperature co-fired multi-layer ceramics (High Temperature Cof i Red Ceramic, HTCC)...etc.
在覆晶结构的设计中, 为了使发光二极管 28有较佳的出光效率, 可在 第二基材 50的第三表面 51上, 在第三导电板 52及第四导电板 53以外的 部位, 进一步形成一反射层。 亦可在第一绝缘层 25上, 也就是第一绝缘层 25棵露的表面上形成有一反射层。 In the design of the flip chip structure, in order to provide the light emitting diode 28 with better light extraction efficiency, on the third surface 51 of the second substrate 50, at portions other than the third conductive plate 52 and the fourth conductive plate 53, A reflective layer is further formed. A reflective layer may also be formed on the exposed surface of the first insulating layer 25, that is, the first insulating layer 25.
上述的各个反射层, 可选自于一铝(Al)、 一银 (Ag)及一金(Au)…等其 中的一材质加以制成。 帝 M乍反射层时必须注意, 若反紂层为一导电材质时, 反 射层不能与第三导电板 52或第四导电板 53接触, 亦不能与第一导电板 26 或第二导电板 27接触, 而且反射层最好能与各个导电板保持一定的间隙, 以 避免各个导电板间产生短路的现象。 Each of the above reflective layers may be selected from one of aluminum (Al), silver (Ag), and gold (Au). It should be noted that when the reflective layer is a conductive material, the reflective layer cannot be in contact with the third conductive plate 52 or the fourth conductive plate 53, nor with the first conductive plate 26 or the second conductive plate 27. Contact, and the reflective layer preferably maintains a certain gap with each of the conductive plates to avoid short circuit between the conductive plates.
如图 7A及图 7B所示, 高压 LED芯片 301 , 其进一步包括一第一导体 层 293, 其形成有至少一条导体并覆盖于第一绝缘层 25上, 且每一导体的 两端分别电性连接于不同单元的第二导电板 27及第一导电板 26。如此将可 轻易的将不同的^ ^及管 28进行串联 /并耽借由第 色缘层 25的支撑, 使 得第一导体层 293亦能进行复杂的电路布局设计。 As shown in FIG. 7A and FIG. 7B, the high voltage LED chip 301 further includes a first conductor layer 293 formed with at least one conductor and covering the first insulating layer 25, and the two ends of each conductor are respectively electrically connected. The second conductive plate 27 and the first conductive plate 26 are connected to different units. In this way, different ^^ and tube 28 can be easily connected in series/and supported by the first color edge layer 25, so that the first conductor layer 293 can also perform complicated circuit layout design.
借此, 可将高压 LED芯片 301可借由反向并联至少两个发光^ I管 28, 以 构成交流型的高压 LED芯片 301,再将交流型的高压 LED芯片 301通过电路 基板 200提供的多样化电路连接, 以构成具有串联、 并联或串并联交流型 的高压 LED芯片 301的高电压交流发光二极管结构。 Thereby, the high-voltage LED chip 301 can be configured by the reverse connection of at least two light-emitting diodes 28 to form an AC-type high-voltage LED chip 301, and then the AC-type high-voltage LED chip 301 is provided through the circuit substrate 200. The circuit is connected to form a high voltage AC light emitting diode structure having a high voltage LED chip 301 of a series, parallel or series-parallel AC type.
【高压 LED芯片第二实施例】 [High Voltage LED Chip Second Embodiment]
图 8为本发明的一种高压 LED芯片, 已完成单元分割、 磊晶层分割及 第二沟槽制作后的剖视实施例图。 图 9为本发明的一种高压 LED芯片进一 步结合一第二基材的剖视实施例图。 图 10为本发明的一种高压 LED芯片进 一步形成一第二导体层的剖视实施例图。 图 11A至图 11G分别为本发明的 各种高压 LED芯片的等效电路实施例图。 FIG. 8 is a cross-sectional view showing a high voltage LED chip of the present invention after cell division, epitaxial layer division, and second trench fabrication. Figure 9 is a high voltage LED chip of the present invention A step-by-step embodiment of a second substrate is combined. Figure 10 is a cross-sectional view showing a high voltage LED chip of the present invention further forming a second conductor layer. 11A to 11G are diagrams showing an equivalent circuit embodiment of various high voltage LED chips of the present invention, respectively.
如图 8至图 10所示, 本实施例为一种高压 LED芯片 302, 其包括: 一 第一基材 21、 一粘着层 22、 至少两第一欧姆连接层 23, 、 至少两磊晶层 24、 一第二绝缘层 31、 至少两第五导电板 32以及至少两第六导电板 33。 As shown in FIG. 8 to FIG. 10, the embodiment is a high voltage LED chip 302, comprising: a first substrate 21, an adhesive layer 22, at least two first ohmic connection layers 23, and at least two epitaxial layers. 24. A second insulating layer 31, at least two fifth conductive plates 32, and at least two sixth conductive plates 33.
本实例的高压 LED芯片 302, 可以使用类似第一实施例中, 将涂有粘 着层 22的第一基材 21与形成于晶圆上的前工艺发光二极管 28结合。 然后 再将临时基材及蚀刻终止层以蚀刻等方式去除, 以得到尚未进行单元分割 的高压 LED芯片。 The high voltage LED chip 302 of the present example can be combined with the first substrate 21 coated with the adhesive layer 22 and the front process light emitting diode 28 formed on the wafer, similarly to the first embodiment. Then, the temporary substrate and the etch stop layer are removed by etching or the like to obtain a high voltage LED chip which has not been subjected to cell division.
第一基材 21, 具有一第一表面 211及一第二表面 212, 第一基材 21主 要是用以支撑整个高压 LED芯片 302。 第一基材 21可以为一单晶体、 一多 晶体或一非晶体结构的基材, 例如玻璃、 蓝宝石、 碳化硅、 磷化镓、 磷砷 化镓、 硒化锌、 硫化锌或踊硫化镅 . . .等材料所制成的基材。 此外、 第一基 材 21可以为一透明基材或一非透明基材, 其主要是依照高压 LED芯片 302 的出光方向或反射层的设计而考量, 若要同时引导出向上 /向下的双向出 光, 则第一基材 21必须为一透明基材。 The first substrate 21 has a first surface 211 and a second surface 212. The first substrate 21 is mainly used to support the entire high voltage LED chip 302. The first substrate 21 may be a single crystal, a polycrystalline or an amorphous structure substrate, such as glass, sapphire, silicon carbide, gallium phosphide, gallium arsenide, zinc selenide, zinc sulfide or antimony sulfide. . Substrate made of materials. In addition, the first substrate 21 can be a transparent substrate or a non-transparent substrate, which is mainly considered according to the light-emitting direction of the high-voltage LED chip 302 or the design of the reflective layer, so as to simultaneously guide the upward/downward two-way. When the light is emitted, the first substrate 21 must be a transparent substrate.
粘着层 22 , 形成于第一表面 211上, 其用以结合第一基材 21及第一 欧姆连接层 23, 。 粘着层 22选自一苯环丁烯、 一环氧树脂、 一硅胶、 一聚 曱基丙烯酸曱酯、 一聚合物及一旋转涂布玻璃等其中的一材质。 粘着层 22 可以为一透明粘着层 22或一非透明粘着层 22 , 其亦依照高压 LED芯片 302 的出光方向或反射层的设计而考量,若要同时引导出向上 /向下双向出光, 则 粘着层 22必须为一透明粘着层 22。 The adhesive layer 22 is formed on the first surface 211 for bonding the first substrate 21 and the first ohmic connecting layer 23. The adhesive layer 22 is selected from the group consisting of monophenylene butylene, an epoxy resin, a silica gel, a polydecylmercaptoacrylate, a polymer, and a spin-on glass. The adhesive layer 22 may be a transparent adhesive layer 22 or a non-transparent adhesive layer 22, which is also considered according to the light-emitting direction of the high-voltage LED chip 302 or the design of the reflective layer. If the upward/downward bidirectional light is simultaneously guided, the adhesive layer is adhered. Layer 22 must be a transparent adhesive layer 22.
如图 8所示,本实施例的每一高压 LED芯片 302亦共用第一基材 21及 粘着层 22, 因此单元分割亦仅针对第一欧姆连接层 23, 及磊晶层 24进行 分割, 分割后亦可形成例如 Al、 A2、 A3. . .等单元。 As shown in FIG. 8, each of the high voltage LED chips 302 of the present embodiment also shares the first substrate 21 and the adhesive layer 22. Therefore, the cell division is also divided only for the first ohmic connection layer 23 and the epitaxial layer 24, and is divided. Units such as Al, A2, A3, . . . may also be formed later.
第一欧姆连接层 23, , 形成于粘着层 22上。 第一欧姆连接层 23, 可 以为一 P型欧姆连接层。 原本在晶圆上成型的第一欧姆连接层 23, , 其可 借由蚀刻方式, 以区分出不同的单元。 The first ohmic connection layer 23, is formed on the adhesive layer 22. The first ohmic connection layer 23 may be a P-type ohmic connection layer. The first ohmic connection layer 23, which was originally formed on the wafer, can be etched to distinguish different cells.
磊晶层 24, 其为一发光二极管单体, 其亦借由蚀刻的方式以区分出不 同的单元。 每一磊晶层 24, 其具有: 一下披覆层 241、 一作用层 242、 一上 披覆层 243以及一第二沟槽 34。 The epitaxial layer 24, which is an LED unit, is also etched to distinguish different cells. Each of the epitaxial layers 24 has a lower cladding layer 241, an active layer 242, an upper cladding layer 243, and a second trench 34.
每一下披覆层 241, 形成于一第一欧姆连接层 23, 上, 下披覆层 241 为一 P型磷化铝铟镓披覆层。 作用层 242 , 形成于下披覆层 241上, 其可以 为一单异质结构、 一双异质结构或一多量子阱结构。 上披覆层 243, 形成于 作用层 242上, 上披覆层 243可以为一 N型磷化铝铟镓披覆层。 第二沟槽 34 , 是以蚀刻方式加以制成, 第二沟槽 34垂直贯穿上披覆 层 243及作用层 242, 又局部贯穿下披覆层 241,借由第二沟槽 34的间隙, 可 以使第二沟槽 34两侧的作用层 242、 上披覆层 243产生电性隔离的作用。 为了工艺上制造的方便,第二沟槽 34可以围绕的方式形成于第六导电板 33 的周边, 以使作用层 242能被有效的电性隔离, 使得第六导电板 33的延伸 部 331能顺利的将电力传导至第一欧姆连接层 23, 。 又为了使后续工艺更 容易操作, 因此在制作第二绝缘层 31时, 可一并将第二沟槽 34 内填满第 二绝缘层 31。 Each of the underlying cladding layers 241 is formed on a first ohmic connecting layer 23, and the lower cladding layer 241 is a P-type aluminum indium gallium arsenide coating layer. The active layer 242 is formed on the lower cladding layer 241, which may be a single heterostructure, a double heterostructure or a multiple quantum well structure. The upper cladding layer 243 is formed on the active layer 242, and the upper cladding layer 243 may be an N-type aluminum indium gallium arsenide coating layer. The second trench 34 is formed by etching. The second trench 34 vertically penetrates the upper cladding layer 243 and the active layer 242, and partially penetrates the lower cladding layer 241, and the gap between the second trenches 34 is The active layer 242 and the upper cladding layer 243 on both sides of the second trench 34 can be electrically isolated. For the convenience of manufacturing in the process, the second trench 34 may be formed around the periphery of the sixth conductive plate 33 so that the active layer 242 can be effectively electrically isolated, so that the extending portion 331 of the sixth conductive plate 33 can The power is smoothly conducted to the first ohmic connection layer 23, . Further, in order to make the subsequent process easier to operate, when the second insulating layer 31 is formed, the second trench 34 may be filled with the second insulating layer 31.
第二绝缘层 31是例如氧化硅的材质,其覆盖于每一上披覆层 243其棵 露的表面, 并形成于任两磊晶层 24及任两第一欧姆连接层 23, 间。借由第 二绝缘层 31的设置, 除了可使不同单元的发光二极管完全隔离不互相影响 外, 亦可确保发光二极管不受外界环境, 例如: 水气或湿气的影响而减损 寿命。 第二绝缘层 31在上披覆层 243上及第二沟槽 34内侧, 分别形成有 一第三开孔 35及一第四开孔 36,第三开孔 35及第四开孔 36是在第二绝缘 层 31制作完成后, 再以蚀刻方式加以制成。 The second insulating layer 31 is made of, for example, silicon oxide, covering the exposed surface of each of the upper cladding layers 243, and formed between any two epitaxial layers 24 and any two first ohmic connecting layers 23. By the arrangement of the second insulating layer 31, in addition to completely ignoring the LEDs of different units without affecting each other, the LED can be protected from the external environment, such as moisture or moisture, thereby detracting from the life. The second insulating layer 31 defines a third opening 35 and a fourth opening 36 on the upper cladding layer 243 and the second trench 34. The third opening 35 and the fourth opening 36 are in the first After the second insulating layer 31 is completed, it is formed by etching.
第五导电板 32, 分别形成于每一第三开孔 35 内, 且电性连接于相对 应的上披覆层 243。 又上披覆层 243与第五导电板 32间, 可再形成一第二 欧姆连接层 292。 第六导电板 33, 分别形成于每一第四开孔 36内, 其具有 向下延伸的一延伸部 331, 延伸部 331垂直贯穿磊晶层 24, 且电性连接于 相对应的第一欧姆连接层 23, 。 借由第五导电板 32及第六导电板 33的设 置以提供电力, 使得磊晶层 24能接收电力产生发光的作用。 The fifth conductive plates 32 are respectively formed in each of the third openings 35 and electrically connected to the corresponding upper cladding layer 243. A second ohmic connection layer 292 may be formed between the upper cladding layer 243 and the fifth conductive plate 32. The sixth conductive plate 33 is formed in each of the fourth openings 36, and has an extending portion 331 extending downwardly. The extending portion 331 vertically penetrates the epitaxial layer 24 and is electrically connected to the corresponding first ohm. Connection layer 23, . The fifth conductive plate 32 and the sixth conductive plate 33 are disposed to supply electric power so that the epitaxial layer 24 can receive power to generate light.
当高压 LED芯片 302设计成一面上结构时。此时将第一基材 21设计为 一透明基材, 且将粘着层 22设计为一透明粘着层 22, 并且在第一基材 21 的第二表面 212上形成一反射层, 将可借由反射层将磊晶层 24所发的光进 行反射, 如此可使高压 LED芯片 302达到较佳的出光效率。 除此之外, 亦 可只将粘着层 22设计成为一透明粘着层 22 , 并将反射层形成于第一基材 21与粘着层 22之间, 如此亦可达到光反射的作用, 同样的使得高压 LED芯 片 302达到较佳的出光效率。 When the high voltage LED chip 302 is designed as an upper structure. At this time, the first substrate 21 is designed as a transparent substrate, and the adhesive layer 22 is designed as a transparent adhesive layer 22, and a reflective layer is formed on the second surface 212 of the first substrate 21, which can be used by The reflective layer reflects the light emitted by the epitaxial layer 24, so that the high voltage LED chip 302 can achieve better light extraction efficiency. In addition, it is also possible to design only the adhesive layer 22 as a transparent adhesive layer 22, and to form a reflective layer between the first substrate 21 and the adhesive layer 22, so that the light reflection effect can also be achieved. The high voltage LED chip 302 achieves better light extraction efficiency.
如图 9所示, 高压 LED芯片 302, 进一步包括一第二基材 50, 如此可 产生一覆晶结构。 在覆晶结构中, 第一基材 21 为一透明基材且粘着层 22 为一透明粘着层 22。 第二基材 50其至少具有一第三表面 51, 第三表面 51 形成有至少两第三导电板 52及至少两第四导电板 53, 每一第三导电板 52 及第四导电板 53, 分别借由焊点 60电性连接于相对应的第五导电板 32及 第六导电板 33。 ' As shown in Fig. 9, the high voltage LED chip 302 further includes a second substrate 50, which produces a flip chip structure. In the flip chip structure, the first substrate 21 is a transparent substrate and the adhesive layer 22 is a transparent adhesive layer 22. The second substrate 50 has at least one third surface 51. The third surface 51 is formed with at least two third conductive plates 52 and at least two fourth conductive plates 53, each of the third conductive plates 52 and the fourth conductive plates 53. The solder joints 60 are electrically connected to the corresponding fifth conductive plate 32 and sixth conductive plate 33, respectively. '
第三导电板 52及第四导电板 53间, 除了可以直接将导电板的面积扩 大,而使彼此互相电性连接外,亦可在第二基材 50形成有多条电路结构(图 未示), 以使第三导电板 52及第四导电板 53间电性连接。 借由上述的连接 方式可形成复杂的电路结构。 使用第二基材 50的优点, 将使得不同发光二 极管间的串 /并电路得以在第二基材 50上进行。 由于第二基材 50的面积及 厚度可以有较大的弹性, 因此足以应付非常复杂的电路结构。 当复杂的电 路结构可以实践时, 高压 LED芯片 302的应用将更具多样性。 Between the third conductive plate 52 and the fourth conductive plate 53, in addition to directly expanding the area of the conductive plate to electrically connect each other, a plurality of circuit structures may be formed on the second substrate 50 (Fig. Not shown), the third conductive plate 52 and the fourth conductive plate 53 are electrically connected to each other. A complicated circuit structure can be formed by the above connection method. The advantage of using the second substrate 50 will allow the serial/parallel circuit between the different light emitting diodes to be performed on the second substrate 50. Since the area and thickness of the second substrate 50 can be relatively elastic, it is sufficient to cope with a very complicated circuit structure. The application of the high voltage LED chip 302 will be more versatile when complex circuit structures are available.
第二基材 50可以为一硅基材、 一印刷电路板 /印刷电路多层板或一陶 瓷基材。 例如: 氧化铝、 氮化铝、 氧化铍低温共烧多层陶瓷或高温共烧多 层陶瓷…等基材。 The second substrate 50 can be a silicon substrate, a printed circuit board/printed circuit multilayer board or a ceramic substrate. For example: alumina, aluminum nitride, yttria low temperature co-fired multilayer ceramics or high temperature co-fired multi-layer ceramics...etc.
在覆晶结构的设计中, 为了使发光二极管有较佳的出光效率, 可在第 二基材 50的第三表面 51上, 在第三导电板 52及第四导电板 53以外的部 位, 进一步形成有一反射层。 或者亦可在第二绝缘层 31上, 也就是第二绝 缘层 31棵露的表面上形成有一反射层。 In the design of the flip chip structure, in order to provide a light-emitting diode with better light-emitting efficiency, the third conductive substrate 52 and the fourth conductive plate 53 may be further on the third surface 51 of the second substrate 50. A reflective layer is formed. Alternatively, a reflective layer may be formed on the exposed surface of the second insulating layer 31, that is, the second insulating layer 31.
上述的各个反射层, 可选自于一铝、 一银及一金…等其中的一材质加 以制成。 制作反射层时必须注意, 若反射层为一导电材质时, 反射层不能 与第三导电板 52或第四导电板 53接触, 亦不能与第五导电板 32或第六导 电板 33接触, 而且反射层最好能与各个导电板保持一定的间隙, 以避免各 个导电板间产生短路的现象。 Each of the above reflective layers may be selected from one of aluminum, silver, gold, and the like. When making the reflective layer, it must be noted that if the reflective layer is a conductive material, the reflective layer cannot be in contact with the third conductive plate 52 or the fourth conductive plate 53 and cannot be in contact with the fifth conductive plate 32 or the sixth conductive plate 33, and Preferably, the reflective layer can maintain a certain gap with each of the conductive plates to avoid short circuit between the conductive plates.
为了使高压 LED芯片 302的各发光二极管间能更轻易的相互连接。 或 者为了使高压 LED芯片 302与第二基材 50, 结合的更为平整及完整, 所有 第五导电板 32第六导电板 33的表面高度, 为相同水平的高度, 如此将有 利于工艺上的施作。 In order to make the light-emitting diodes of the high-voltage LED chip 302 more easily connected to each other. Or in order to make the high-voltage LED chip 302 and the second substrate 50 more flat and complete, the surface height of the sixth conductive plate 33 of all the fifth conductive plates 32 is the same level of height, which will be advantageous for the process. Casting.
如图 10所示, 高压 LED芯片 302, 进一步包括一第二导体层 37, 其形 成有至少一条导体并覆盖于第二绝缘层 31上, 且每一导体的两端分别电性 连接于不同单元的第五导电板 32或第六导电板 33。如此将可轻易的将不同 的发光二极管进行串联 /并联。 借由第二绝缘层 31 的支撑, 使得第二导体 层 37亦能进行复杂的电路布局设计。 As shown in FIG. 10, the high voltage LED chip 302 further includes a second conductor layer 37 formed with at least one conductor and covering the second insulating layer 31, and two ends of each conductor are electrically connected to different units. The fifth conductive plate 32 or the sixth conductive plate 33. This makes it easy to connect different LEDs in series/parallel. By the support of the second insulating layer 31, the second conductor layer 37 can also be subjected to complicated circuit layout design.
如图 11A至图 11G所示, 本实施例的高压 LED芯片 302, 因为有完整 的第一绝缘层 25及第二绝缘层 31 , 因此可以在各个绝缘层上制作出图 11A 至图 11G相同或类似的复杂电路, 尤其是使用第二基材 50而形成覆晶结构 时, 相关电路的达成又更为容易。 As shown in FIG. 11A to FIG. 11G, since the high voltage LED chip 302 of the present embodiment has the complete first insulating layer 25 and the second insulating layer 31, the same can be made on each insulating layer as shown in FIGS. 11A to 11G. Similar complex circuits, especially when using the second substrate 50 to form a flip chip structure, are easier to achieve with related circuits.
此外, 当将高压 LED芯片 302可借由反向并联至少两个发光 及管, 以 构成交流型的高压 LED芯片 302,再将交流型的高压 LED芯片 302通过电路 基板 200提供的多样化电路连接, 以构成具有串联、 并联或串并联交流型 的高压 LED芯片 302的高电压交流发光二极管结构。 In addition, when the high voltage LED chip 302 can be reversely connected in parallel with at least two light emitting tubes and tubes to form an alternating current type high voltage LED chip 302, the alternating current type high voltage LED chip 302 is connected through a plurality of circuits provided by the circuit substrate 200. To form a high voltage AC LED structure having a high voltage LED chip 302 of series, parallel or series-parallel AC type.
除此之外,当高压 LED芯片 301、 302是直流型的高压 LED芯片 301、 302 时, 也可以通过电路基板 200提供的多样化电路连接将至少两个直流型的 高压 LED芯片 301、 302反向并联, 以构成高电压交流发光二极管结构。 在 此泛指的是可通过电路基板 200将高压 LED芯片 301、 302连接成高电压交 流发光二极管结构的任何形式, 在此不再对高压 LED芯片 301、 302连接的 方式进行赘述。 In addition, when the high voltage LED chips 301, 302 are DC type high voltage LED chips 301, 302, at least two DC types can also be connected through the various circuit connections provided by the circuit substrate 200. The high voltage LED chips 301, 302 are connected in anti-parallel to form a high voltage AC light emitting diode structure. Generally speaking, the high voltage LED chips 301 and 302 can be connected to the high voltage AC light emitting diode structure through the circuit substrate 200. The manner in which the high voltage LED chips 301 and 302 are connected will not be described herein.
以上所述, 仅是本发明的较佳实施例而已, 并非对本发明作任何形式 上的限制, 虽然本发明已以较佳实施例揭露如上, 然而并非用以限定本发 明,任何熟悉本专业的技术人员, 在不脱离本发明技术方案范围内,当可利 用上述揭示的技术内容作出些许更动或修饰为等同变化的等效实施例,但 凡是未脱离本发明技术方案的内容, 依据本发明的技术实质对以上实施例 所作的任何简单修改、 等同变化与修饰, 均仍属于本发明技术方案的范围 内。 The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Although the present invention has been disclosed in the above preferred embodiments, it is not intended to limit the present invention. The skilled person can make some modifications or modifications to the equivalent embodiments by using the above-disclosed technical contents without departing from the technical scope of the present invention, but without departing from the technical solution of the present invention, according to the present invention. Technical simplifications Any simple modifications, equivalent changes and modifications made to the above embodiments are still within the scope of the technical solutions of the present invention.
Claims
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/CN2011/001962 WO2013075269A1 (en) | 2011-11-25 | 2011-11-25 | High-voltage ac light emitting diode structure |
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| Application Number | Priority Date | Filing Date | Title |
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| PCT/CN2011/001962 WO2013075269A1 (en) | 2011-11-25 | 2011-11-25 | High-voltage ac light emitting diode structure |
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