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WO2013068198A3 - Particle trap for euv source - Google Patents

Particle trap for euv source Download PDF

Info

Publication number
WO2013068198A3
WO2013068198A3 PCT/EP2012/070279 EP2012070279W WO2013068198A3 WO 2013068198 A3 WO2013068198 A3 WO 2013068198A3 EP 2012070279 W EP2012070279 W EP 2012070279W WO 2013068198 A3 WO2013068198 A3 WO 2013068198A3
Authority
WO
WIPO (PCT)
Prior art keywords
particle trap
hub
blades
euv source
anchoring portion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2012/070279
Other languages
French (fr)
Other versions
WO2013068198A2 (en
Inventor
Ivo Vanderhallen
Johannes Franken
Robert LANSBERGEN
Lambertus VAN DEN WILDENBERG
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ASML Netherlands BV
Original Assignee
ASML Netherlands BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ASML Netherlands BV filed Critical ASML Netherlands BV
Publication of WO2013068198A2 publication Critical patent/WO2013068198A2/en
Publication of WO2013068198A3 publication Critical patent/WO2013068198A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
    • G03F7/70916—Pollution mitigation, i.e. mitigating effect of contamination or debris, e.g. foil traps
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
    • G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
    • G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports

Landscapes

  • Health & Medical Sciences (AREA)
  • Epidemiology (AREA)
  • Public Health (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Atmospheric Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Environmental & Geological Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • X-Ray Techniques (AREA)

Abstract

There is disclosed a particle trap for a plasma EUV radiation source, a lithography apparatus comprising a particle trap and a device manufacturing method. In an embodiment, the particle trap includes a rotatable hub (44), and a plurality of blades (58) extending outwards from the hub. Each of the blades has an end anchoring portion (66) inserted into a complementary slot (68) in the hub, the end anchoring portion and slot being configured to hold the blades within the hub during rotation of the hub.
PCT/EP2012/070279 2011-11-10 2012-10-12 Particle trap for euv source Ceased WO2013068198A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US201161558203P 2011-11-10 2011-11-10
US61/558,203 2011-11-10

Publications (2)

Publication Number Publication Date
WO2013068198A2 WO2013068198A2 (en) 2013-05-16
WO2013068198A3 true WO2013068198A3 (en) 2013-10-03

Family

ID=47046589

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/EP2012/070279 Ceased WO2013068198A2 (en) 2011-11-10 2012-10-12 Particle trap for euv source

Country Status (2)

Country Link
TW (1) TW201319763A (en)
WO (1) WO2013068198A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10495987B2 (en) 2017-09-28 2019-12-03 Taiwan Semiconductor Manufacturing Co., Ltd. Radiation source apparatus, EUV lithography system, and method for decreasing debris in EUV lithography system

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070023693A1 (en) * 2004-12-28 2007-02-01 Asml Netherlands B.V. Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
US20080309893A1 (en) * 2007-06-12 2008-12-18 Asml Netherlands B.V. Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
US20090045357A1 (en) * 2006-03-29 2009-02-19 Asml Netherlands B.V. Contamination barrier and lithographic apparatus comprising same
US20090073401A1 (en) * 2007-09-14 2009-03-19 Asml Netherlands B.V. Lithographic apparatus with rotation filter device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070023693A1 (en) * 2004-12-28 2007-02-01 Asml Netherlands B.V. Method for filtering particles out of a beam of radiation and filter for a lithographic apparatus
US20090045357A1 (en) * 2006-03-29 2009-02-19 Asml Netherlands B.V. Contamination barrier and lithographic apparatus comprising same
US20080309893A1 (en) * 2007-06-12 2008-12-18 Asml Netherlands B.V. Contamination prevention system, lithographic apparatus, radiation source, and method for manufacturing a device
US20090073401A1 (en) * 2007-09-14 2009-03-19 Asml Netherlands B.V. Lithographic apparatus with rotation filter device

Also Published As

Publication number Publication date
WO2013068198A2 (en) 2013-05-16
TW201319763A (en) 2013-05-16

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