WO2012169385A1 - Composition, photosensitive film, photosensitive laminate, method for forming permanent pattern, and printed board - Google Patents
Composition, photosensitive film, photosensitive laminate, method for forming permanent pattern, and printed board Download PDFInfo
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- WO2012169385A1 WO2012169385A1 PCT/JP2012/063674 JP2012063674W WO2012169385A1 WO 2012169385 A1 WO2012169385 A1 WO 2012169385A1 JP 2012063674 W JP2012063674 W JP 2012063674W WO 2012169385 A1 WO2012169385 A1 WO 2012169385A1
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L75/00—Compositions of polyureas or polyurethanes; Compositions of derivatives of such polymers
- C08L75/04—Polyurethanes
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/08—Processes
- C08G18/0804—Manufacture of polymers containing ionic or ionogenic groups
- C08G18/0819—Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups
- C08G18/0823—Manufacture of polymers containing ionic or ionogenic groups containing anionic or anionogenic groups containing carboxylate salt groups or groups forming them
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/30—Low-molecular-weight compounds
- C08G18/34—Carboxylic acids; Esters thereof with monohydroxyl compounds
- C08G18/348—Hydroxycarboxylic acids
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/67—Unsaturated compounds having active hydrogen
- C08G18/675—Low-molecular-weight compounds
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/28—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the compounds used containing active hydrogen
- C08G18/67—Unsaturated compounds having active hydrogen
- C08G18/68—Unsaturated polyesters
- C08G18/683—Unsaturated polyesters containing cyclic groups
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G18/00—Polymeric products of isocyanates or isothiocyanates
- C08G18/06—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen
- C08G18/70—Polymeric products of isocyanates or isothiocyanates with compounds having active hydrogen characterised by the isocyanates or isothiocyanates used
- C08G18/72—Polyisocyanates or polyisothiocyanates
- C08G18/721—Two or more polyisocyanates not provided for in one single group C08G18/73 - C08G18/80
- C08G18/724—Combination of aromatic polyisocyanates with (cyclo)aliphatic polyisocyanates
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K5/00—Use of organic ingredients
- C08K5/0091—Complexes with metal-heteroatom-bonds
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/0047—Photosensitive materials characterised by additives for obtaining a metallic or ceramic pattern, e.g. by firing
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/033—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polymers obtained by reactions only involving carbon-to-carbon unsaturated bonds, e.g. vinyl polymers
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/027—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds
- G03F7/032—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders
- G03F7/035—Non-macromolecular photopolymerisable compounds having carbon-to-carbon double bonds, e.g. ethylenic compounds with binders the binders being polyurethanes
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0382—Macromolecular compounds which are rendered insoluble or differentially wettable the macromolecular compound being present in a chemically amplified negative photoresist composition
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/22—Secondary treatment of printed circuits
- H05K3/28—Applying non-metallic protective coatings
- H05K3/285—Permanent coating compositions
- H05K3/287—Photosensitive compositions
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08F—MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- C08F220/00—Copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and only one being terminated by only one carboxyl radical or a salt, anhydride ester, amide, imide or nitrile thereof
- C08F220/02—Monocarboxylic acids having less than ten carbon atoms; Derivatives thereof
- C08F220/10—Esters
- C08F220/34—Esters containing nitrogen, e.g. N,N-dimethylaminoethyl (meth)acrylate
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08K—Use of inorganic or non-macromolecular organic substances as compounding ingredients
- C08K3/00—Use of inorganic substances as compounding ingredients
- C08K3/34—Silicon-containing compounds
- C08K3/36—Silica
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
- G03F7/40—Treatment after imagewise removal, e.g. baking
Definitions
- the present invention relates to a composition suitably used for a solder resist or the like, a photosensitive film, a photosensitive laminate, a method for forming a permanent pattern, and a printed board.
- a photosensitive film in which a photosensitive layer is formed by applying a silica dispersion composition on a support and drying it has been used.
- a method for forming a permanent pattern such as a solder resist for example, a photosensitive film is laminated on a substrate such as a copper-clad laminate on which a permanent pattern is formed to form a laminate, and the photosensitive layer in the laminate is formed.
- a method of forming a permanent pattern by performing exposure on the substrate, developing the photosensitive layer after the exposure to form a pattern, and then performing a curing process or the like.
- solder resists such as semiconductor package substrates having a small L / S (line / space) has been promoted. Therefore, in order to improve impact resistance and insulation, it is required to increase the packing of silica fine particles.
- a polymer dispersant as a dispersant for inorganic fine particles.
- a commercially available specific dispersant is diverted for silica fine particles (see, for example, Patent Document 1).
- Patent Document 2 it is known to use a styrene / maleic anhydride / butyl acrylate copolymer for dispersion of barium sulfate.
- silica fine particles are highly filled with a photosensitive resin composition such as a solder resist or a photosensitive film
- the film physical properties change, and the performance as a solder resist is impaired.
- the silica fine particles are highly filled, the melt viscosity increases, and the transferability and developability deteriorate.
- the development of a dispersant capable of stably and densely dispersing silica fine particles and its dispersant composition especially when the silica fine particles are highly filled with a photosensitive resin composition such as a solder resist or a photosensitive film
- Development of a dispersion composition having excellent transferability, developability, impact resistance, and insulating properties has been desired.
- the present invention aims to solve the above-mentioned conventional problems and achieve the following objects. That is, the present invention provides a dispersing agent or composition capable of stably dispersing high density inorganic fine particles, particularly silica fine particles, or embedding, thermal shock resistance, developability, and insulating properties even when the silica fine particles are highly filled.
- An object of the present invention is to provide an excellent high performance cured film, and to provide a silica dispersion composition suitable for a photosensitive composition or a photosensitive film, particularly for a solder resist.
- the present inventors have conducted intensive studies. As a result, in the silica dispersion composition, the amine value and acid value of the dispersant, especially the amine value, are important, and polymers having a specific amine value are also used.
- the present inventors have found that the above problems can be effectively solved in the resin and resin structure, and have made the present invention based on this finding. Usually, when a basic group and an acidic group coexist in a polymer, a salt is formed and the solubility in a solvent is lowered. This point has also been solved in a specific polymer resin and resin structure.
- Means for solving the problems of the present invention are as follows.
- a composition comprising at least one acrylic resin and silica fine particles, the acrylic resin having a tertiary amino group and an amine value of 1.1 mmol / g or more.
- the composition according to (1), wherein the acrylic resin has a graft chain at a side chain of the resin or at a main chain terminal.
- composition according to any one of (1) to (9), wherein the composition contains an acid-modified ethylenically unsaturated group-containing polyurethane resin as a binder (12) A photosensitive film having a photosensitive layer containing the composition according to any one of (1) to (11) on a support. (13) A photosensitive laminate having a photosensitive layer containing the composition according to any one of (1) to (11) on a substrate. (14) A method for forming a permanent pattern comprising at least exposing a photosensitive layer formed of the composition according to any one of (1) to (11). (15) A printed board formed by the permanent pattern forming method according to (14).
- a dispersing agent or composition capable of stably dispersing high-density inorganic fine particles, particularly silica fine particles, or a silica fine particle having a high filling property, excellent embedding properties, thermal shock resistance, developability, and insulating properties.
- a high-performance cured film can be obtained, and a silica dispersion composition suitable for a photosensitive composition or a photosensitive film, particularly for a solder resist can be provided.
- composition of the present invention is a composition comprising at least one acrylic resin and silica fine particles, and includes a thermal crosslinking agent, a binder, a polymerizable compound, a photopolymerization initiator, and other components as necessary. It contains.
- content of each component is solid content (For example, solid content in the total solid of a silica dispersion composition) unless there is particular notice.
- the acrylic resin of the present invention used in the composition of the present invention has a tertiary amino group and an amine value of 1.1 mmol / g or more.
- This acrylic resin is useful as a dispersant for inorganic or organic fillers and pigments. In the present invention, it particularly acts as a dispersant for silica fine particles.
- the acrylic resin is a resin containing repeating units of acrylic acid, methacrylic acid and derivatives thereof such as acrylic acid ester, methacrylic acid ester, acrylonitrile, methacrylonitrile, acrylamide and methacrylamide components, and preferably has the following general formula ( Having a repeating unit represented by P).
- R P1 represents a hydrogen atom or a methyl group
- X P1 represents —CO 2 R P2 , CON (R P3 ) (R P4 ), or —CN.
- R P2 represents a hydrogen atom or an alkyl group, an alkenyl group, a cycloalkyl group, or an aryl group.
- R P3 and R P4 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group. Each of these groups may have a substituent.
- substituents examples include an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, a heterocyclic group, a halogen atom, an alkoxy group, and an aryloxy group.
- the said acrylic resin may also contain a different repeating unit within the range represented by general formula (P) among the repeating units represented by the said general formula (P). Moreover, you may include repeating units other than the repeating unit represented by the said general formula (P).
- R P1 is preferably a methyl group.
- X P1 is preferably —CO 2 R P2 .
- R P2 is preferably a hydrogen atom or an alkyl group, an acrylic resin used in the present invention, X P1 of the general formula (P) is within the range of the partial structure is a -CO 2 R P2, different two or more It is preferable that the repeating unit is included.
- the acrylic resin used in the present invention has a tertiary amino group.
- the tertiary amino group contained in the acrylic resin is adsorbed on the surface of the inorganic or organic filler or pigment, particularly the surface of the silica fine particles, for example, by ionic interaction.
- the tertiary amino group is preferably represented by the following general formula (M).
- R M1 and R M2 each independently represent an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, or a heterocyclic group, and each of these groups has a substituent. Also good. R M1 and R M2 may be bonded to each other to form a ring.
- the alkyl group preferably has 1 to 10 carbon atoms, and examples thereof include methyl, ethyl, isopropyl, t-butyl, n-hexyl, n-octyl, 2-ethylhexyl, and n-decyl.
- the alkenyl group preferably has 2 to 10 carbon atoms, and examples thereof include vinyl, allyl and 2-butenyl.
- the alkynyl group preferably has 2 to 10 carbon atoms, and examples thereof include ethynyl, 2-propynyl, and 2-butynyl.
- the cycloalkyl group preferably has 3 to 10 carbon atoms, and examples thereof include cyclopropyl, cyclopentyl, and cyclohexyl.
- the aryl group preferably has 6 to 12 carbon atoms, and examples thereof include phenyl and naphthyl.
- the heterocyclic group is preferably a 5- or 6-membered heterocyclic group having at least one oxygen atom, sulfur atom or nitrogen atom as a hetero atom constituting the ring skeleton, and the atom bonded to the N atom is carbon. Those that are atoms are preferred.
- the heterocyclic group include a tetrahydrofuran ring, a pyrrolidine ring, a piperazine ring, a piperidine ring, a morpholine ring, a dioxane ring, a furan ring, a thiophene ring, a pyridine ring, and a pyrazole ring.
- Each of these groups may have a substituent.
- substituents include an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, a heterocyclic group, a halogen atom, an alkoxy group, and an aryloxy group.
- a 5- or 6-membered ring is preferable, and a saturated ring is preferable, and examples thereof include a pyrrolidine ring, a piperazine ring, a piperidine ring, and a morpholine ring.
- R M1 and R M2 are preferably an alkyl group, an alkenyl group, a cycloalkyl group, or an aryl group, and more preferably an alkyl group.
- the alkyl group an unsubstituted alkyl group is preferable, and the number of carbon atoms is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and most preferably a methyl group.
- R M1 and R M2 are bonded to each other to form a pyrrolidine ring, piperazine ring, piperidine ring, or morpholine ring.
- the amine value of the acrylic resin used in the present invention is 1.1 mmol / g or more, preferably 1.2 mmol / g or more, and more preferably 1.5 mmol / g or more.
- the upper limit of the amine value is not particularly limited, but is preferably 4.5 mmol / g or less, more preferably 3.5 mmol / g or less. If the amine value is less than 1.1 mmol / g, the melt viscosity may increase and the embedding property may deteriorate.
- the amine value is measured, for example, by weighing a sample in a beaker, adding acetic acid, stirring and dissolving, adjusting the measurement temperature to 25 ° C., and then adding 0.1N perchloric acid acetic acid as a titration reagent. And can be determined by titrating with a titration apparatus.
- the amine value is the amount of perchlorate consumed when titrated, expressed in moles per gram of acrylic resin.
- the acrylic resin used in the present invention has a tertiary amino group, preferably a group represented by the general formula (M), and this tertiary amino group is represented by the general formula (P). Even if it is incorporated in a part of the repeating unit, the repeating unit obtained from a different monomer may have a tertiary amino group. In the present invention, it is preferably incorporated in the general formula (P), in any of R P2 ⁇ R P4, and more preferably are incorporated as substituents of the groups defined in R P2 ⁇ R P4 . Specifically, for example, an alkyl group substituted with a tertiary amino group, an aryl group substituted with a tertiary amino group, and the like. The tertiary amino group is preferably contained in the repeating unit as represented by the following general formula (P1).
- RP1 is synonymous with RP1 of general formula (P), and its preferable range is also the same.
- R M1 and R M2 have the same meanings as R M1 and R M2 of the general formula (M), and their preferable ranges are also the same.
- X P2 represents —O— or —N (R P3 ) —.
- R P3 has the same meaning as R P3 in Formula (P).
- L P1 represents an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or these groups and other divalent groups (for example, —O—, A group in which —S—, —C ( ⁇ O) —, —SO 2 —, —SO—, —N (R P5 ) — and the like are combined (however, other divalent groups are directly bonded to X P1 It is not bound).
- R P5 represents a group represented by R P3 , an acyl group, an alkyl or arylsulfonyl group, an alkoxy group, or an aryloxy group.
- each group of L P1 may have a substituent, and examples of such a substituent include the substituents that the groups R P3 and R P4 in the general formula (P) may have.
- X P2 is preferably —O—
- L P1 is preferably an alkylene group, and preferably has 1 to 12 carbon atoms, more preferably 2 to 8 carbon atoms. 4 is more preferable, and 2 is most preferable.
- the acrylic resin used in the present invention preferably further has an acidic group. Having a tertiary amino group and an acidic group is preferable not only from developability but also from the viewpoint of insulation.
- the acidic group is not particularly limited, and examples thereof include a carboxyl group, a sulfo group, a phosphonyl group, —COCH 2 CO—R B , —CONHCO—R B , —COCH 2 CN, a phenolic hydroxyl group, and —R F CH 2 OH. , — (R F ) 2 CHOH, an alkyl or arylsulfonamido group, and the like.
- R B represents a hydrocarbon group having 1 to 10 carbon atoms
- R F represents a perfluoroalkyl group.
- the hydrocarbon group is a saturated, unsaturated or cyclic hydrocarbon group, preferably an alkyl group.
- acidic groups a carboxyl group is particularly preferable from the viewpoint of developability.
- Such an acidic group may be incorporated into the repeating unit represented by the general formula (P) or may be incorporated into another repeating unit.
- R P2 X P1 is a -CO 2
- R P2 are those containing as a repeating unit of the hydrogen atom. Specifically, it is copolymerized with acrylic acid or methacrylic acid.
- monomers include, for example, crotonic acid, maleic acid, maleic acid monoalkyl ester, fumaric acid, fumaric acid monoalkyl ester, itaconic acid.
- Itaconic acid monoalkyl ester Itaconic acid monoalkyl ester, p-hydroxystyrene, p-sulfostyrene, p-carboxystyrene and the like.
- the acid value of the acrylic resin used in the present invention is preferably 0.3 mmol / g or more, and more preferably 0.45 mmol / g or more.
- the acid value of the acrylic resin used in the present invention is preferably 0.3 mmol / g or more, more preferably 0.5 mmol / g or more.
- the upper limit of an acid value is not specifically limited, Preferably it is 3.5 mmol / g or less, More preferably, it is 2.5 mmol / g or less. In the acrylic resin used in the present invention, if the acid value is less than 0.3 mmol / g, the developability deteriorates and a residue may be generated in the unexposed area.
- the acrylic resin used in the present invention preferably has a graft chain on the side chain or at least one of the ends of the main chain.
- the graft chain include a polyester chain, a polyalkyl acrylate chain, a polyalkyl methacrylate chain, a polyalkylene oxide chain (preferably a polyethylene oxide chain, a polypropylene oxide chain), a polycarbonate chain, a polystyrene chain, or a combination thereof.
- strand of which is included in partial structure is mentioned.
- a graft chain having a polyester moiety is preferable in terms of resolution.
- the chain length of the graft chain is such that the degree of polymerization is preferably 1 to 100, more preferably 1 to 80, and particularly preferably 1 to 60.
- the content of the graft is preferably 10% by mass to 60% by mass and more preferably 20% by mass to 50% by mass with respect to the entire acrylic resin.
- the acrylic resin preferably has a repeating unit represented by the following general formula (PG).
- RP1 is synonymous with RP1 of general formula (P), and its preferable range is also the same.
- X P2 has the same meaning as X P1 of the general formula (P1), and the preferred range is also the same.
- L P2 represents a single bond, an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or these groups and other divalent groups (for example,- Groups in which O—, —S—, —C ( ⁇ O) —, —SO 2 —, —SO—, —N ( RP 5 ) —, etc.) are combined (other divalent groups are directly Does not bind to XP2 ).
- R P5 represents a group represented by R P3 , an acyl group, an alkyl or arylsulfonyl group, an alkoxy group, or an aryloxy group.
- each group of L P2 may have a substituent, and examples of such a substituent include substituents that the groups R P3 and R P4 may have.
- R P6 represents a hydrogen atom or a substituent, and examples of the substituent include substituents that the groups R P3 and R P4 in the general formula (P) may have.
- X P2 is preferably —O—.
- L P2 is preferably a divalent group having a partial structure of polyoxyalkylene, polyacrylic ester, polymethacrylic ester, polyester, polycarbonate, and polystyrene.
- the polyoxyalkylene is preferably polyoxyethylene or polyoxypropylene.
- Polyester is represented by — [(CH 2 ) m P1 —COO] n p1 —
- polycarbonate is represented by — [(CH 2 ) m p2 —OCOO] n p2 —, wherein n P1 and n P2 are each independently 1 to 50 is preferable, and m P1 and m P2 each independently preferably represent 1 to 10.
- polyesters via a divalent linking group those polycarbonate binds preferable.
- the divalent linking group in this case, for example, an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or —O—, — And a group in which S—, —C ( ⁇ O) —, —SO 2 —, —SO—, and —N (R P5 ) — are combined.
- an -alkylene-NHC ( ⁇ O) O— group is preferable, and a —CH 2 CH 2 —NHC ( ⁇ O) O— group is particularly preferable.
- the acrylic resin used in the present invention has a mass average molecular weight of preferably 3000 to 30000, and more preferably 5000 to 18000.
- the acrylic resin used in the present invention may have a repeating unit other than the repeating unit represented by the general formula (P) throughout the resin, but in the present invention, the acrylic resin is represented by the general formula (P).
- the unit content is preferably 50 mol% or more, more preferably 60 mol% or more, and even more preferably 70 mol% or more.
- the acrylic resin used in the present invention contains 20 mol% to 70 mol% of the repeating unit represented by the general formula (P1) and 3 mol% to 25 mol of the repeating unit represented by the general formula (PG). It is preferable to contain 2 mol% to 40 mol% of a repeating unit obtained from a monomer having an mol group and an acidic group.
- an acrylic ester or a methacrylic ester may be used as a repeating unit different from the repeating unit represented by the general formula (P) and obtained from the general formula (P1), (PG), and a monomer having an acidic group.
- the obtained repeating unit is preferred, and the alcohol part of the ester preferably has 1 to 20 carbon atoms, more preferably 1 to 12 and even more preferably 1 to 8.
- the numerical value is% by mass and x is the degree of polymerization, which is 1 to 50.
- the acrylic resin used in the present invention can be easily synthesized by a general polymerization reaction using a corresponding monomer. Specific synthesis examples are shown in the examples.
- a silica of the silica particle used by this invention there is no restriction
- the average particle diameter (d50) of the silica fine particles used in the present invention is not particularly limited and can be appropriately selected according to the purpose, but is preferably 0.02 ⁇ m to 3.0 ⁇ m, preferably 0.1 ⁇ m to 2.0 ⁇ m. Is more preferable, and 0.2 ⁇ m to 1.5 ⁇ m is particularly preferable. If the average particle diameter (d50) of the silica particles is less than 0.02 ⁇ m, the coating viscosity may be high, and if it exceeds 3.0 ⁇ m, smoothness may not be maintained. On the other hand, when the average particle diameter (d50) of the silica particles is within the particularly preferable range, it is advantageous in terms of coating viscosity, smoothness of the cured film and heat resistance.
- the average particle size (d50) of the silica particles is defined as a particle size of an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D 50 ) or the like.
- silica fine particles those appropriately synthesized may be used, or commercially available products may be used.
- commercially available product examples include SO-C2 (manufactured by Admatechs).
- the solid content of the silica fine particles in the mixture of the silica fine particles and the silica fine particle dispersant is preferably 5% by mass to 80% by mass, and more preferably 10% by mass to 70% by mass. When the content is less than 5% by mass, impact resistance may be inferior, and when it exceeds 80% by mass, dispersibility may be insufficient.
- the acrylic resin of the present invention is preferably 0.001 to 10 parts by mass, more preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of silica fine particles.
- the composition used in the present invention preferably contains a thermal crosslinking agent.
- a thermal crosslinking agent there is no restriction
- the epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0095] of JP-A-2007-2030, and JP-A-2010-72340. And the compounds described in paragraph [0130].
- the polyfunctional oxetane compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the compounds described in paragraph [0096] of JP-A-2007-2030.
- the content of the thermal crosslinking agent in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1% by mass to 50% by mass, and 2% by mass to 40% by mass. Is more preferable, and 3% by mass to 30% by mass is particularly preferable.
- the content is less than 1% by mass, heat resistance may be inferior, and when it exceeds 50% by mass, developability and crack resistance may be inferior.
- a cured film can be produced with good sensitivity, and the formed cured film is advantageous in that both heat resistance and crack resistance can be achieved.
- the other thermal crosslinking agent can be added separately from the epoxy resin and the polyfunctional oxetane compound.
- the other thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0098] to [0100] of JP-A-2007-2030. Is mentioned.
- the binder is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include acid-modified ethylenically unsaturated group-containing polyurethane resins, ethylenically unsaturated group-containing polycarboxylic acid resins, and acid-modified ethylenically unsaturated resins. Examples thereof include a saturated group-containing epoxy resin, a resin containing an ethylenically unsaturated group and a carboxyl group, and a polyimide precursor.
- the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the purpose.
- a polyurethane having an ethylenically unsaturated bond (vinyl group) in the side chain and
- the urethane resin having an ethylenically unsaturated group in the side chain-- is not particularly limited and may be appropriately selected depending on the purpose.
- the side chain may be represented by the following general formulas (1) to (3). What has at least 1 among the functional groups represented is mentioned.
- R 1 is not particularly limited and may be appropriately selected depending on the intended purpose.
- examples thereof include a hydrogen atom and an alkyl group which may have a substituent. .
- a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
- the R 2 and R 3 are not particularly limited and may be appropriately selected depending on the intended purpose.
- a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
- X represents an oxygen atom, a sulfur atom, or —N (R 12 ) —
- R 12 represents a hydrogen atom or a monovalent organic group.
- R 12 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent.
- a hydrogen atom, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
- the substituent that can be introduced is not particularly limited and may be appropriately selected depending on the intended purpose.
- examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, and a halogen atom.
- R 4 to R 8 are not particularly limited and may be appropriately selected depending on the intended purpose.
- Examples of the substituent that can be introduced include the same as those in the general formula (1).
- Y represents an oxygen atom, a sulfur atom, or —N (R 12 ) —.
- Said R ⁇ 12 > is synonymous with the case of R ⁇ 12 > of the said General formula (1), and its preferable example is also the same.
- R 9 is not particularly limited and may be appropriately selected depending on the intended purpose.
- examples thereof include a hydrogen atom or an alkyl group which may have a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity.
- R 10 and R 11 are not particularly limited and may be appropriately selected depending on the intended purpose.
- a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
- Z represents an oxygen atom, a sulfur atom, —N (R 13 ) —, or an optionally substituted phenylene group.
- R 13 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
- the urethane resin having an ethylenically unsaturated bond in the side chain includes at least one diisocyanate compound represented by the following general formula (4) and at least one diol compound represented by the following general formula (5):
- At least one of the diisocyanate compound represented by the general formula (4) and the diol compound represented by the general formula (5) is a group represented by the general formulas (1) to (3). If at least one of them is present, a polyurethane resin in which the groups represented by the above general formulas (1) to (3) are introduced into the side chain as a reaction product of the diisocyanate compound and the diol compound is provided. Generated. According to such a method, a polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain can be easily used, rather than replacing and introducing a desired side chain after the reaction of the polyurethane resin. Can be manufactured.
- the diisocyanate compound represented by the general formula (4) is not particularly limited and can be appropriately selected depending on the purpose.
- a triisocyanate compound and a monofunctional alcohol having an unsaturated group Or the product obtained by addition-reacting with 1 equivalent of monofunctional amine compounds is mentioned.
- the triisocyanate compound is not particularly limited and may be appropriately selected depending on the purpose.
- diol compound represented by the said General formula (5) there is no restriction
- the monofunctional alcohol having an unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraphs of JP-A-2005-250438 And the compounds described in [0037] to [0040].
- the method for introducing an unsaturated group into the side chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
- a method using a diisocyanate compound containing is preferable.
- the diisocyanate compound that can be obtained include compounds having an unsaturated group in the side chain described in paragraphs [0042] to [0049] of JP-A-2005-250438.
- the polyurethane resin having an ethylenically unsaturated bond in the side chain is a diisocyanate containing the unsaturated group from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability.
- Diisocyanate compounds other than the compounds can also be copolymerized.
- the diisocyanate compound to be copolymerized is not particularly limited and may be appropriately selected depending on the intended purpose.
- it is a diisocyanate compound represented by the following general formula (6).
- OCN-L 1 -NCO General formula (6) L 1 represents an aliphatic or aromatic hydrocarbon group which may have a substituent. If necessary, L 1 may have another functional group that does not react with an isocyanate group, for example, an ester, urethane, amide, or ureido group.
- the diisocyanate compound represented by the general formula (6) is not particularly limited and may be appropriately selected depending on the intended purpose.
- An aromatic diisocyanate compound such as diisocyanate; an aliphatic diisocyanate compound such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer acid diisocyanate; isophorone diisocyanate, 4,4′-me Alicyclic diisocyanate compounds such as lenbis (cyclohexyl iso
- a method for introducing an unsaturated group into the side chain of the polyurethane resin in addition to the above-described method, a method using a diol compound containing an unsaturated group in the side chain as a raw material for producing a polyurethane resin is also preferable.
- the diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose. For example, a commercially available product such as trimethylolpropane monoallyl ether may be used.
- a compound such as a halogenated diol compound, a triol compound or an aminodiol compound and a compound containing an unsaturated group such as a carboxylic acid, acid chloride, isocyanate, alcohol, amine, thiol or halogenated alkyl compound. It may be a compound that is easily produced.
- the diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose.
- general formula (G) the compounds described in paragraphs [0064] to [0066] of JP-A-2005-250438 represented by the following general formula (G) are particularly preferable.
- R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group
- A represents a divalent organic residue
- X represents an oxygen atom or a sulfur atom.
- —N (R 12 ) — wherein R 12 represents a hydrogen atom or a monovalent organic group.
- R 1 ⁇ R 3 and X in the general formula (G) said a general formula (1) the same meaning as R 1 ⁇ R 3 and X in preferred embodiments versa.
- the polyurethane resin having an ethylenically unsaturated bond in the side chain is unsaturated in the side chain from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability, for example.
- a diol compound other than a diol compound containing a group can be copolymerized.
- the diol compound other than the diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose.
- the polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0068] to [0076] of JP-A-2005-250438. Can be mentioned.
- the polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs [0077] to [0079] and paragraphs [0083] to [0085] of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like, and the like.
- the polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs [0080] to [0081] and paragraph [0084] of JP-A-2005-250438, No. 9-No. 12 and the like, and the like.
- the diol compound which has a substituent which does not react with an isocyanate group other than the diol compound mentioned above can also be used together.
- the diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs [0087] to [0088] of JP-A-2005-250438 And the described compounds.
- a diol compound having a carboxyl group can be used in combination with the diol compound described above.
- Examples of the diol compound having a carboxyl group include those represented by the following formulas (X) to (Z).
- R 15 represents a hydrogen atom, a substituent (for example, a halogen atom such as a cyano group, a nitro group, —F, —Cl, —Br, —I, etc., —CONH 2 , —COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 is an alkyl group having 1 to 10 carbon atoms or an aralkyl group having 7 to 15 carbon atoms) And any other group that may have an alkyl group, an aralkyl group, an aryl group, an alkoxy group, an aryloxy group, and the like.
- a substituent for example, a halogen atom such as a cyano group, a nitro group, —F, —Cl, —Br, —I, etc., —CONH 2 , —COOR 16
- L 9 , L 10 and L 11 may be the same or different, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group).
- a substituent for example, an alkyl group, an aralkyl group, an aryl group.
- it represents a divalent aliphatic or aromatic hydrocarbon group that may have an alkyl group, and an alkoxy group and a halogen atom are not particularly limited, and can be appropriately selected depending on the purpose.
- an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable.
- the L 9 to L 11 may have other functional groups that do not react with isocyanate groups, such as carbonyl, ester, urethane, amide, ureido, and ether groups.
- a ring may be formed by two or three of R 15 , L 7 , L 8 and L 9 .
- Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and can be appropriately selected according to the purpose. However, an aromatic group having 6 to 15 carbon atoms is preferred.
- the diol compound having a carboxyl group represented by the formulas (X) to (Z) is not particularly limited and may be appropriately selected depending on the intended purpose.
- the polyurethane resin having an ethylenically unsaturated bond group in the side chain is a resin having a carboxyl group in the side chain.
- the compound which ring-opened tetracarboxylic dianhydride with the diol compound other than the diol compound mentioned above can also be used together.
- the compound obtained by ring-opening the tetracarboxylic dianhydride with a diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraph [0095] to JP 2005-250438 A And the compounds described in [0101].
- the polyurethane resin having an ethylenically unsaturated bond in the side chain those having an alkali developing group in the polymer terminal and main chain are also preferably used.
- the developability at the time of alkali development is further improved, and excellent pattern forming properties are provided.
- crosslinking reactivity is improved between the thermal crosslinking agent and the polyurethane resin having an ethylenically unsaturated bond in the side chain, and the cured product strength is increased.
- the alkali-developable group preferably has a carboxyl group from the viewpoint of imparting developability with a dilute alkali.
- Examples of a method for introducing an alkali-developable group at the polymer terminal include the following methods.
- the polyurethane resin has at least one carboxyl group at the end of the main chain and preferably has 2 or more and 5 or less carboxyl groups, and having two carboxyl groups is excellent in developability and forms a fine pattern. It is particularly preferable in terms of sex.
- the polyurethane resin has two main chain ends, but preferably has at least one carboxyl group at one end, and may have at least one carboxyl group at both ends. It is preferable that the terminal of the main chain of the polyurethane resin has a structure represented by the following general formula (7): -L 100- (COOH) n ...
- L 100 represents an (n + 1) -valent organic connecting chain
- n represents an integer of 1 or more, preferably 1 to 5, and particularly preferably 2.
- the organic linking group represented by L 100 is configured to include one or more atoms selected from a carbon atom, a hydrogen atom, an oxygen atom, a nitrogen atom, and a sulfur atom, specifically, represented by L 100.
- the number of atoms constituting the main skeleton of the organic linking group is preferably 1 to 30, more preferably 1 to 25, still more preferably 1 to 20, and particularly preferably 1 to 10.
- the “main skeleton of the organic linking group” means an atom or an atomic group used only for linking L 200 and the terminal COOH in the general formula (8) described later, and there are a plurality of linking paths. In some cases, it refers to an atom or atomic group that constitutes the path with the least number of atoms used.
- the method for introducing at least one carboxyl group at the end of the main chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
- a raw material for producing a polyurethane resin at least one Examples include a method using a carboxylic acid compound having a carboxyl group.
- carboxylic acid compound examples include a monocarboxylic acid compound having one carboxyl group, a dicarboxylic acid compound having two carboxyl groups, a tricarboxylic acid compound having three carboxyl groups, a tetracarboxylic acid compound having four carboxyl groups, and a carboxyl group.
- carboxylic acid compound examples include pentacarboxylic acid compounds having five groups.
- a dicarboxylic acid compound having two carboxyl groups is particularly preferable in terms of excellent developability and fine pattern formability.
- the carboxylic acid compound is not particularly limited as long as it has at least one carboxyl group, and can be appropriately selected according to the purpose, but a compound represented by the following general formula (8) is preferable.
- L 200 in the general formula (8) represents an alkylene group which may have a single bond or a substituent.
- the alkylene group an alkylene group having 1 to 20 carbon atoms is preferable, and an alkylene group having 2 to 10 carbon atoms is more preferable.
- the substituent that can be introduced into the alkylene group include a halogen atom (—F, —Br, —Cl, —I), an alkyl group which may have a substituent, and the like.
- a carboxylic acid compound represented by the said General formula (8) there is no restriction
- polyurethane resin having an ethylenically unsaturated bond in the side chain those having an unsaturated group in the polymer terminal and main chain are also preferably used.
- Polyurethane resin having an ethylenically unsaturated bond in the side chain, or between the silica dispersion composition and the polyurethane resin having an ethylenically unsaturated bond in the side chain by having an unsaturated group at the polymer terminal and main chain Crosslinking reactivity is improved, and the strength of the photocured product is increased.
- the durability is excellent.
- an unsaturated group it is especially preferable to have an unsaturated group from the ease of a crosslinking reaction.
- Examples of the method for introducing an unsaturated group at the polymer terminal include the following methods. That is, in the step of synthesizing the polyurethane resin having an ethylenically unsaturated bond in the side chain as described above, in the step of treating with the residual isocyanate group at the polymer end and the alcohol or amine, the alcohol having an unsaturated group. Alternatively, amines or the like may be used. Specific examples of such a compound include the same compounds as those exemplified above as the monofunctional alcohol or monofunctional amine compound having an unsaturated group.
- the unsaturated group is preferably introduced into the polymer side chain rather than the polymer terminal from the viewpoint that the introduction amount can be easily controlled and the introduction amount can be increased, and that the crosslinking reaction efficiency is improved.
- the ethylenically unsaturated bond group to be introduced is not particularly limited and may be appropriately selected depending on the intended purpose. From the viewpoint of forming a crosslinked cured film, a methacryloyl group, an acryloyl group, and a styryl group are preferable, and methacryloyl Group and acryloyl group are more preferable, and methacryloyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the raw storage stability.
- the amount of methacryloyl group introduced is not particularly limited and may be appropriately selected depending on the intended purpose.
- the ethylenically unsaturated group equivalent is preferably 0.05 mmol / g to 3.0 mmol / g, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
- a method for introducing an unsaturated group into the main chain there is a method of using a diol compound having an unsaturated group in the main chain direction for the synthesis of a polyurethane resin.
- the diol compound having an unsaturated group in the main chain direction is not particularly limited and may be appropriately selected depending on the intended purpose. For example, cis-2-butene-1,4-diol, trans-2-butene 1,4-diol, polybutadiene diol, and the like.
- the polyurethane resin having an ethylenically unsaturated bond in the side chain can be used in combination with an alkali-soluble polymer containing a polyurethane resin having a structure different from that of the specific polyurethane resin.
- the polyurethane resin having an ethylenically unsaturated bond in the side chain can be used in combination with a polyurethane resin containing an aromatic group in the main chain and / or side chain.
- polyurethane resin (i) having an ethylenically unsaturated bond in the side chain include, for example, P-1 to P— shown in paragraphs [0293] to [0310] of JP-A-2005-250438. 31 polymers, and the like. Among these, polymers of P-27 and P-28 shown in paragraphs [0308] and [0309] are preferable.
- Polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule--
- the polyurethane resin is a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane having a diisocyanate and a carboxylic acid group-containing diol as essential components, and a compound having an epoxy group and an ethylenically unsaturated group in the molecule.
- a low molecular diol having a mass average molecular weight of 300 or less and a high molecular diol having a mass average molecular weight of 500 or more may be added as a diol component as a copolymer component.
- the polyurethane resin includes a divalent aliphatic or aromatic hydrocarbon diisocyanate which may have a substituent, a COOH group and two OH groups via any one of a C atom and an N atom.
- a reaction product comprising a carboxylic acid-containing diol as an essential component, and reacting the obtained reaction product with a compound having an epoxy group and an ethylenically unsaturated group in the molecule via a —COO— bond. It may be obtained.
- the polyurethane resin includes at least one selected from diisocyanates represented by the following general formula (I) and carboxylic acid group-containing diols represented by the following general formulas (II-1) to (II-3): Is a high molecular weight diol having a mass average molecular weight of 80 to 8,000, preferably 80 to 3,000, represented by the following general formulas (III-1) to (III-5) depending on the purpose; A reaction product of at least one selected from the group consisting of an epoxy group and an ethylenically unsaturated group in a molecule represented by the following general formulas (IV-1) to (IV-16): It may be obtained by reacting a compound having
- R 1 may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogen atom is preferable). Represents an aromatic or aromatic hydrocarbon. If necessary, R 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group.
- R 2 represents a hydrogen atom, a substituent (for example, a cyano group, a nitro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR. 6 , —OR 6 , —NHCONHR 6 , —NHCOOR 6 , —NHCOR 6 , —OCONHR 6 , —CONHR 6 (where R 6 is an alkyl group having 1 to 10 carbon atoms and an aralkyl group having 7 to 15 carbon atoms) Or an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group.
- a substituent for example, a cyano group, a nitro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR. 6 , —OR 6 , —NH
- R 3 , R 4 and R 5 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group or an aralkyl group).
- An aryl group, an alkoxy group, and a halogeno group are preferable).
- an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable.
- any one of other functional groups that do not react with the isocyanate group in the R 3 , R 4 and R 5 for example, any one of a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, and an ether group. You may have. In addition, you may form a ring by 2 or 3 of said R ⁇ 2 >, R ⁇ 3 >, R ⁇ 4 > and R ⁇ 5 >.
- Ar represents a trivalent aromatic hydrocarbon which may have a substituent, and is preferably an aromatic group having 6 to 15 carbon atoms.
- R 7 , R 8 , R 9 , R 10 and R 11 may be the same or different from each other.
- R 7 , R 9 , R 10 and R 11 are each preferably an alkylene group having 2 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms, and an alkylene or carbon having 2 to 10 carbon atoms Several to 10 arylene groups are more preferred.
- R 8 represents an alkylene group having 1 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms, and an alkylene group having 1 to 10 carbon atoms or an arylene group having 6 to 10 carbon atoms is More preferred.
- R 7 , R 8 , R 9 , R 10 and R 11 other functional groups that do not react with isocyanate groups, such as ether groups, carbonyl groups, ester groups, cyano groups, olefin groups, urethane groups , An amide group, a ureido group, or a halogen atom.
- R 12 represents a hydrogen atom, an alkyl group, an aryl group, an aralkyl group, a cyano group, or a halogen atom.
- a hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 15 carbon atoms, an aralkyl having 7 to 15 carbon atoms, a cyano group, or a halogen atom is preferable, and a hydrogen atom or one carbon atom is preferable. More preferred are ⁇ 6 alkyl and aryl groups having 6 to 10 carbon atoms.
- R 12 may have other functional groups that do not react with isocyanate groups, such as alkoxy groups, carbonyl groups, olefin groups, ester groups, or halogen atoms.
- R 13 represents an aryl group or a cyano group, preferably an aryl group or a cyano group having 6 to 10 carbon atoms.
- m represents an integer of 2 to 4.
- n 1 , n 2 , n 3 , n 4 and n 5 each represents an integer of 2 or more, and an integer of 2 to 100 is preferable.
- n 6 represents 0 or an integer of 2 or more, preferably 0 or an integer of 2 to 100.
- R 14 represents a hydrogen atom or a methyl group
- R 15 represents an alkylene group having 1 to 10 carbon atoms
- R 16 represents a carbon atom. This represents a hydrocarbon group having a number of 1 to 10.
- p represents 0 or an integer of 1 to 10.
- the polyurethane resin may further be copolymerized with a low molecular weight diol containing no carboxylic acid group as a fifth component, and the low molecular weight diol may be any of the above general formulas (III-1) to (III-5). ) Having a mass average molecular weight of 500 or less.
- the low molecular weight diol containing no carboxylic acid group can be added as long as the alkali solubility is not lowered and the elastic modulus of the cured film can be kept sufficiently low.
- the polyurethane resin in particular, at least one selected from diisocyanates represented by the general formula (I) and carboxylic acid group-containing diols represented by the general formulas (II-1) to (II-3) And at least one selected from polymer diols having a mass average molecular weight of 800 to 3,000 represented by the general formulas (III-1) to (III-5) according to the purpose
- the reaction product of the general formulas (III-1) to (III-5) with the low molecular weight diol containing no carboxylic acid group having a mass average molecular weight of 500 or less is further added to the general formulas (IV-1) to (IV).
- IV-16 which is obtained by reacting a compound having one epoxy group and at least one (meth) acrylic group in the molecule represented by any one of the molecules, and has an acid value of 20 mgKOH / g to 120 mgK
- An alkali-soluble photocrosslinkable polyurethane resin that is OH / g is preferred.
- the polyurethane resin is synthesized by adding the above-mentioned diisocyanate compound and diol compound to an aprotic solvent, and adding a known catalyst having an activity corresponding to the reactivity thereof, followed by heating.
- the molar ratio (Ma: Mb) of the diisocyanate and diol compound used in the synthesis is not particularly limited and can be appropriately selected according to the purpose, preferably 1: 1 to 1.2: 1, and alcohols Alternatively, by treating with an amine or the like, a product having a desired physical property such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
- the amount of ethylenically unsaturated bonds introduced into the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose.
- the ethylenically unsaturated group equivalent is 0.05 mmol / g to 3.0 mmol. / G is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.5 mmol / g is particularly preferable.
- the polyurethane resin having an ethylenically unsaturated bond in the side chain preferably has a carboxyl group introduced in the side chain together with the ethylenically unsaturated bond group.
- the acid value is preferably 20 mgKOH / g to 120 mgKOH / g, more preferably 30 mgKOH / g to 110 mgKOH / g, and particularly preferably 35 mgKOH / g to 100 mgKOH / g.
- the molecular weight of the polyurethane resin having an ethylenically unsaturated bond in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3,000 to 60,000 in terms of mass average molecular weight. More preferably, 4,000 to 50,000, particularly preferably 4,000 to 30,000.
- the composition when used for a photosensitive solder resist, it is excellent in dispersibility with an inorganic filler, excellent in crack resistance and heat resistance, and excellent in developability of non-image areas with an alkaline developer.
- the diisocyanate compound and the diol compound are synthesized in an aprotic solvent by adding a known catalyst having an activity corresponding to each reactivity and heating.
- the molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. If an isocyanate group remains at the end of the polymer, the molar ratio can be reduced by treatment with alcohols or amines. It is synthesized in such a way that no isocyanate groups remain entangled.
- the diisocyanate compound represented by the general formula (I) is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0021] of JP-A-2007-2030, Etc.
- the high molecular weight diol compound represented by the general formulas (III-1) to (III-5) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, as disclosed in JP-A-2007-2030 And compounds described in paragraphs [0022] to [0046].
- diol compound having a carboxyl group represented by the general formulas (II-1) to (II-3) is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in paragraph [0047] of No. 2030 publication.
- the carboxylic acid group-free low molecular weight diol is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0048] of JP-A-2007-2030. Can be mentioned.
- the copolymerization amount of the carboxylic acid group-free diol is preferably 95 mol% or less, more preferably 80 mol% or less, and particularly preferably 50 mol% or less in the low molecular weight diol. When the copolymerization amount exceeds 95 mol%, a urethane resin having good developability may not be obtained.
- polyurethane resin obtained by reacting the above (ii) carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraphs of JP-A-2007-2030.
- glycidyl acrylate as a compound containing an epoxy group and an ethylenically unsaturated group in the polymers U1 to U4 and U6 to U11 is replaced with glycidyl methacrylate, 3,4-epoxycyclohexylmethyl acrylate (trade name). : Cyclomer A400, manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl methacrylate (trade name: Cyclomer M400 (produced by Daicel Chemical Industries, Ltd.)), and the like.
- the content of the acid-modified ethylenically unsaturated group-containing polyurethane resin in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5% by mass to 80% by mass, 10 mass% to 75 mass% is more preferable, and 15 mass% to 70 mass% is particularly preferable. If the content is less than 5% by mass, good crack resistance may not be maintained, and if it exceeds 80% by mass, the heat resistance may fail. On the other hand, when the content is within the particularly preferable range, it is advantageous in terms of both good crack resistance and heat resistance.
- the mass average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3,000 to 60,000, and preferably 3,000 to 50 Is more preferable, and 4,000 to 30,000 is particularly preferable.
- the mass average molecular weight is less than 3,000, a sufficiently low elastic modulus at a high temperature of the cured film may not be obtained, and when it exceeds 60,000, coating suitability and developability may deteriorate. is there.
- the mass average molecular weight is determined by using, for example, a high-speed GPC apparatus (manufactured by Toyo Soda Co., Ltd., HLC-802A), a 0.5 mass% THF solution as a sample solution, and a column of one TSKgel HZM-M. 200 ⁇ L of sample is injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or UV detector (detection wavelength 254 nm). Next, the mass average molecular weight can be determined from the molecular weight distribution curve calibrated with standard polystyrene.
- the acid value of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g, preferably 30 mgKOH / g to 110 mgKOH / g is more preferable, and 35 mgKOH / g to 100 mgKOH / g is particularly preferable. If the acid value is less than 20 mgKOH / g, the developability may be insufficient, and if it exceeds 120 mgKOH / g, the development speed may be too high, and the development control may be difficult.
- the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
- the ethylenically unsaturated group equivalent of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is 0.05 mmol / g to 3.0 mmol / g. Preferably, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.5 mmol / g is particularly preferable. When the ethylenically unsaturated group equivalent is less than 0.05 mmol / g, the heat resistance of the cured film may be inferior.
- the said ethylenically unsaturated group equivalent (typically vinyl group equivalent) can be calculated
- the bromine number can be measured according to, for example, JIS K2605. Bromine was added to the resin 100g of measurements obtained by bromine number (Br 2) grams of the (gBr 2 / 100g), a value obtained by converting the number of moles of the added bromine (Br 2) per resin 1g is there.
- the acid-modified ethylenically unsaturated group-containing epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, it is described in Japanese Patent No. 4127010 (Japanese Patent Laid-Open No. 2004-133060). And so on.
- the composition of the present invention preferably contains a polymerizable compound.
- the polymerizable compound is not particularly limited and may be appropriately selected depending on the purpose.
- Preferable examples include at least one selected from monomers having a (meth) acryloyl group.
- the polymerizable compound is a compound different from the binder resin described above, and is preferably a monomer or oligomer having a molecular weight of 1000 or less, preferably a monomer.
- a monomer which has the said (meth) acryloyl group there is no restriction
- trimethylolpropane tri (meth) acrylate pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, and tricyclodecane dimethanol (meth) acrylate are particularly preferable.
- the polymerizable compound compounds having two or more acryloyloxy groups and methacryloyloxy groups and compounds having an alicyclic ring such as tricyclodecanedimethanol (meth) acrylate are particularly preferable.
- the content of the polymerizable compound in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 2% by mass to 50% by mass, and 3% by mass to 40% by mass. Is more preferable, and 4% by mass to 35% by mass is particularly preferable.
- the content is less than 2% by mass, pattern formation may not be possible, and when it exceeds 50% by mass, crack resistance may be inferior.
- the content is within the particularly preferable range, it is advantageous in that both good pattern formation and crack resistance can be achieved.
- the composition used in the present invention preferably contains a photopolymerization initiator.
- the photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected depending on the purpose.
- a halogenated hydrocarbon derivative for example, a triazine skeleton And those having an oxadiazole skeleton
- phosphine oxide for example, a triazine skeleton And those having an oxadiazole skeleton
- oxime derivatives organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, and the like.
- the halogenated hydrocarbon compound having a triazine skeleton is not particularly limited and may be appropriately selected depending on the intended purpose.
- Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969) compounds described in British Patent No. 1388492, compounds described in Japanese Patent Laid-Open No. 53-133428, German Patent No. 3337024 Compounds, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-258241, compounds described in JP-A-5-281728, and compounds described in JP-A-5-34920.
- Examples of the halogenated hydrocarbon compound having an oxadiazole skeleton include the compounds described in US Pat. No. 4,221,976.
- the oxime derivative is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0085] of JP-A-2007-2030.
- the ketone compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0087] of Japanese Patent Application Laid-Open No. 2007-2030.
- the photopolymerization initiator other than the above is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0086] of JP-A-2007-2030. Can be mentioned.
- a sensitizer can be added for the purpose of adjusting exposure sensitivity and photosensitive wavelength in exposure to the photosensitive layer described later.
- the sensitizer can be appropriately selected by a visible light, an ultraviolet laser, a visible laser or the like as a light irradiation means described later.
- the sensitizer is excited by active energy rays and interacts with other substances (eg, radical generator, acid generator, etc.) (eg, energy transfer, electron transfer, etc.), thereby causing radicals, acids, etc. It is possible to generate a useful group of
- the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0089] of JP-A-2007-2030.
- the combination of the photopolymerization initiator and the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose.
- an electron transfer type initiation system described in JP-A-2001-305734 [ (1) Electron donating initiator and sensitizing dye, (2) Electron accepting initiator and sensitizing dye, (3) Electron donating initiator, sensitizing dye and electron accepting initiator (ternary initiation system) ] Etc. are mentioned.
- the content of the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. It is preferably 0.05% by mass to 30% by mass with respect to all components in the silica dispersion composition. 0.1 mass% to 20 mass% is more preferable, and 0.2 mass% to 10 mass% is particularly preferable. When the content is less than 0.05% by mass, the sensitivity to active energy rays decreases, the exposure process takes time, and the productivity may be reduced.
- the sensitizer may be precipitated from the photosensitive layer.
- the said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
- Particularly preferred examples of the photopolymerization initiator include composite light in which phosphine oxides, the ⁇ -aminoalkyl ketones, the halogenated hydrocarbon compound having the triazine skeleton and an amine compound as a sensitizer described later are combined. Examples thereof include an initiator, a hexaarylbiimidazole compound, and titanocene.
- the content of the photopolymerization initiator in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.5% by mass to 20% by mass, and preferably 0.5% by mass. % To 15% by mass is more preferable, and 1% to 10% by mass is particularly preferable. When the content is less than 0.5% by mass, the exposed portion tends to be eluted during development, and when it exceeds 20% by mass, the heat resistance may be lowered. On the other hand, when the content is within the particularly preferable range, it is advantageous in that a good pattern can be formed and heat resistance is also improved.
- the composition used in the present invention may contain other components.
- a component is not particularly limited and may be appropriately selected depending on the purpose.
- properties such as the stability, photographic properties, and film properties of the intended photosensitive film can be adjusted.
- thermoplastic elastomer is not particularly limited and may be appropriately selected depending on the intended purpose.
- styrene elastomer, olefin elastomer, urethane elastomer, polyester elastomer, polyamide elastomer, acrylic elastomer, and Examples include silicone elastomers. These elastomers are composed of a hard segment component and a soft segment component. In general, the former contributes to heat resistance and strength, and the latter contributes to flexibility and toughness.
- the thermoplastic elastomer is described in paragraphs [0197] to [0207] of JP-A-2007-199532.
- the filler is described in detail in, for example, paragraphs [0098] to [0099] of JP-A-2008-250074.
- the thermal polymerization inhibitor is described in detail, for example, in paragraphs [0101] to [0102] of JP-A-2008-250074.
- the thermosetting accelerator is described in detail, for example, in paragraph [0093] of JP-A-2008-250074.
- the plasticizer is described in detail, for example, in paragraphs [0103] to [0104] of JP-A-2008-250074.
- the colorant is described in detail, for example, in paragraphs [0105] to [0106] of JP-A-2008-250074.
- the adhesion promoter is described in detail, for example, in paragraphs [0107] to [0109] of JP-A-2008-250074.
- the composition used in the present invention can be used as a liquid resist by coating and drying on a substrate on which a conductor wiring is formed, but is particularly useful for the production of a photosensitive film.
- the photosensitive film has at least a support and a photosensitive layer, preferably has a protective film, and further, if necessary, a cushion layer, an oxygen barrier layer (hereinafter abbreviated as PC layer). ) And other layers.
- PC layer oxygen barrier layer
- the PC layer, the photosensitive layer, and the protective film are provided in this order on the support, and the cushion layer, the PC layer, the photosensitive layer, and the protection are provided on the support.
- the form which has a film in this order, etc. are mentioned.
- the photosensitive layer may be a single layer or a plurality of layers.
- the photosensitive layer is formed from the silica dispersion composition of the present invention.
- the melt viscosity at 70 ° C. of the photosensitive layer is preferably 1.4 ⁇ 10 3 Pa ⁇ s or less, more preferably 1.0 ⁇ 10 3 Pa ⁇ s or less, and 6.0 ⁇ 10 2 Pa ⁇ s or less. Further preferred.
- the melt viscosity at 70 ° C. of the photosensitive layer exceeds 1.4 ⁇ 10 3 Pa ⁇ s, the embedding property may be deteriorated, and when the melt viscosity at 70 ° C. is in a more preferable range, the embedding property is deteriorated. Is advantageous in that it is sufficiently obtained.
- the melt viscosity at 30 ° C. of the photosensitive layer is preferably 1.0 ⁇ 10 4 Pa ⁇ s or more, more preferably 1.3 ⁇ 10 4 Pa ⁇ s or more, and 3.0 ⁇ 10 4 Pa ⁇ s or more. Further preferred. If the melt viscosity at 30 ° C. of the photosensitive layer is less than 1.0 ⁇ 10 4 Pa ⁇ s, edge fusion may be deteriorated, and if the melt viscosity at 30 ° C. is in a more preferable range, embedding is performed. It is advantageous in that it can be compatible with edge fusion.
- the melt viscosity of the photosensitive layer is measured by, for example, a melt viscosity measuring device such as a rheometer VAR-1000 type (manufactured by Rheological Co., Ltd.), Vibron DD-III type (manufactured by Toyo Baldwin Co., Ltd.) or the like. Can be measured.
- a melt viscosity measuring device such as a rheometer VAR-1000 type (manufactured by Rheological Co., Ltd.), Vibron DD-III type (manufactured by Toyo Baldwin Co., Ltd.) or the like. Can be measured.
- the details are as described in paragraphs “0115” to “0127” of Japanese Patent Application Laid-Open No. 2007-2030.
- the permanent pattern used in the present invention is obtained by the permanent pattern forming method.
- the permanent pattern is described in paragraphs [0128] to [0283] of Japanese Patent Application Laid-Open No. 2007-2030.
- the printed board used in the present invention has at least a base and a permanent pattern formed by the permanent pattern forming method, and further has other configurations appropriately selected as necessary.
- the acid-modified ethylenically unsaturated group-containing polyurethane resin PU2 had a mass average molecular weight of 13,000, a solid content acid value of 63.3 mmol / g, and a solid content ethylenically unsaturated group equivalent of 1.46. .
- Exemplified polymers P-5, P-6 and P-7 were also synthesized by the same method as described above.
- the solids concentration of these polymers in the dispersion is 20%.
- As an antioxidant 2 parts by mass of Irganox 1330 (manufactured by Ciba Japan Co., Ltd.) and 0.9 parts by mass of tetrabutyl titanate were mixed in the reactor, and the temperature was raised from room temperature to 260 ° C.
- polyester resin E-1 was diluted and dissolved in propylene glycol monomethyl ether acetate to a solid content concentration of 60% by mass to obtain a polyester resin E-1 solution.
- the obtained polyester resin E-1 had a mass average molecular weight (polystyrene standard) measured by gel permeation chromatography was 34,000.
- ⁇ Measurement of acid value> 0.7 g of each silica dispersant was weighed into a 100 mL beaker, and 60 mL of a solution of THF / water 5/1 (volume ratio) was added and dissolved by stirring. After adjusting measurement temperature to 25 degreeC, it titrated with the titration apparatus using 0.1N NaOH aqueous solution as a titration reagent, and the acid value was measured.
- Example 1 Composition of silica dispersion composition solution- Polyurethane binder resin solution PU1 synthesized above (40%) 32.3 parts by mass Coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF) 0.021 parts by mass Coloring pigment: Pariotol Yellow D0960 (manufactured by BASF) 0.006 parts by mass Dispersant: Dispersant P-11 solution 0.22 parts by mass Polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by mass Initiator: Irgacure 907 (manufactured by BASF Corporation) 0 .6 parts by mass Sensitizer: DETX-S (Nippon Kayaku Co., Ltd.) 0.005 parts by mass Reaction aid: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 0.019 parts by mass Curing agent: Melamine (Japanese) 0.16 parts by mass Thermal
- a silica dispersion composition solution having the above composition is applied onto a polyethylene terephthalate film (16FB50, manufactured by Toray Industries, Inc.) having a thickness of 16 ⁇ m as a support, and dried to form a photosensitive layer having a thickness of 30 ⁇ m on the support. Formed.
- a 20 ⁇ m-thick polypropylene film manufactured by Oji Specialty Paper Co., Ltd., Alphan E-200 was laminated as a protective layer to produce a photosensitive film.
- the substrate was prepared by subjecting a surface of a copper clad laminate (no through hole, copper thickness: 12 ⁇ m) to chemical polishing.
- a vacuum laminator manufactured by Nichigo Morton Co., Ltd., VP130 was used on the copper-clad laminate while peeling off the protective film from the photosensitive film so that the photosensitive layer of the photosensitive film was in contact with the copper-clad laminate.
- the pressure bonding conditions were a vacuum drawing time of 40 seconds, a pressure bonding temperature of 70 ° C., a pressure bonding pressure of 0.2 MPa, and a pressure application time of 10 seconds.
- melt viscosity of each photosensitive film was measured using a rheometer VAR-1000 type (manufactured by Rheological Co., Ltd.) under the following conditions.
- -Measurement conditions of melt viscosity- Melt viscoelasticity was measured using a plate having a diameter of 20 mm at a strain of 0.005 and a frequency of 1 Hz.
- the temperature range was 25 ° C. to 85 ° C., and the measurement was performed at a rate of temperature increase of 5 ° C./min.
- the melt viscosity in Table 1 shows a value at 70 ° C.
- the photosensitive laminate was allowed to stand at 55% RH for 10 minutes at room temperature (23 ° C.). From the obtained photosensitive laminate polyethylene terephthalate film (support), using a circuit board exposure machine EXM-1172 (manufactured by Oak Manufacturing Co., Ltd.) through a photomask having a round hole pattern with a diameter of 50 ⁇ m to 200 ⁇ m. The film was exposed at 40 mJ / cm 2 . The exposure amount at this time is the amount of light energy necessary for curing the photosensitive layer of the photosensitive film in the sensitivity evaluation. After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the photosensitive laminate.
- EXM-1172 manufactured by Oak Manufacturing Co., Ltd.
- the photosensitive layer was irradiated with ultraviolet rays with an energy amount of 1 J / cm 2 using an ultraviolet irradiation device manufactured by Oak Manufacturing. Further, the photosensitive layer was heat-treated at 150 ° C. for 60 minutes to obtain an evaluation substrate on which a solder resist was formed. After connecting a shield wire made of polytetrafluoroethylene to these comb electrodes by Sn / Pb solder so that a voltage is applied between the comb electrodes of the evaluation laminate after heating, 50 V is applied to the evaluation laminate. With the voltage applied, the laminate for evaluation was allowed to stand in a super accelerated high temperature and high humidity life test (HAST) bath of 85% RH at 130 ° C. for 200 hours.
- HAST high temperature and high humidity life test
- TCT Thermal shock resistance
- appearance such as cracks and peeling was evaluated by a temperature cycle test (TCT).
- TCT uses a gas-phase cold heat tester, and the electronic component module is left in the gas phase at ⁇ 55 ° C. and 125 ° C. for 30 minutes each, and this is regarded as one cycle under the conditions of 1,000 cycles and 1,500 cycles.
- the thermal shock resistance was evaluated according to the following criteria. ⁇ Evaluation criteria ⁇ A: No crack occurrence B: Shallow crack occurrence C: Deep crack occurrence
- Example 2 to 7 and Comparative Examples 1 to 3 In Example 1, as shown in Table 1 below, the silica dispersant P-11 was replaced with silica dispersants P-4 to P-7 of the present invention and comparative silica dispersants Pa and Pb, respectively. In Example 6, except that the binder was changed to PU2, and in Example 7, the silica content was changed to 16%, the same as Example 1, except that the combinations of Examples 2 to 7 and Comparative Examples 1 to 3 photosensitive films, laminates, and permanent patterns were produced. About each obtained photosensitive film and laminated body, it carried out similarly to Example 1, and evaluated melt viscosity, embedding property, developability (unexposed part), insulation, and thermal shock resistance (TCT). The results are shown in Table 1.
- Comparative dispersants Pa and Pb have the following structures, and both used a cyclohexanone solution having a solid content concentration of 20%. In the following, the numerical value is% by mass, x represents the degree of polymerization and is 1 to 50.
- the dispersant of the present invention exhibits excellent dispersibility, and as a result, the fine particles of silica can be stably and densely dispersed with the dispersant of the present invention, and a composition containing this is used.
- the resulting photosensitive film exhibits excellent performance in embedding, developing, insulating and thermal shock resistance (TCT) as a photosensitive film such as a solder resist without increasing the melt viscosity. Recognize.
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Abstract
Description
本発明は、ソルダーレジスト等に好適に用いられる組成物、感光性フィルム、感光性積層体、永久パターン形成方法およびプリント基板に関する。 The present invention relates to a composition suitably used for a solder resist or the like, a photosensitive film, a photosensitive laminate, a method for forming a permanent pattern, and a printed board.
従来より、ソルダーレジスト等の永久パターンを形成するに際して、支持体上にシリカ分散組成物を塗布し、乾燥することにより感光層を形成させた感光性フィルムが用いられてきている。ソルダーレジスト等の永久パターンを形成する方法としては、例えば、永久パターンが形成される銅張積層板等の基体上に、感光性フィルムを積層させて積層体を形成し、該積層体における感光層に対して露光を行い、該露光後、感光層を現像してパターンを形成させ、その後硬化処理等を行うことにより永久パターンを形成する方法等が知られている。 Conventionally, when forming a permanent pattern such as a solder resist, a photosensitive film in which a photosensitive layer is formed by applying a silica dispersion composition on a support and drying it has been used. As a method for forming a permanent pattern such as a solder resist, for example, a photosensitive film is laminated on a substrate such as a copper-clad laminate on which a permanent pattern is formed to form a laminate, and the photosensitive layer in the laminate is formed. There is known a method of forming a permanent pattern by performing exposure on the substrate, developing the photosensitive layer after the exposure to form a pattern, and then performing a curing process or the like.
最近、デバイスの微細化に伴って、L/S(ライン/スペース)の小さい半導体パッケージ基板等のソルダーレジストの開発が進められている。そこで、耐衝撃性、絶縁性を向上させるため、シリカ微粒子の高充填化が求められている。
一方、ソルダーレジスト組成物において、無機微粒子の分散剤として、高分子分散剤を使用することが知られており、例えば、シリカ微粒子では市販の特定の分散剤を流用(例えば、特許文献1参照)したり、硫酸バリウムの分散にスチレン/無水マレイン酸/ブチルアクリレート共重合体を使用することが知られている(特許文献2参照)。
Recently, with the miniaturization of devices, development of solder resists such as semiconductor package substrates having a small L / S (line / space) has been promoted. Therefore, in order to improve impact resistance and insulation, it is required to increase the packing of silica fine particles.
On the other hand, in a solder resist composition, it is known to use a polymer dispersant as a dispersant for inorganic fine particles. For example, a commercially available specific dispersant is diverted for silica fine particles (see, for example, Patent Document 1). However, it is known to use a styrene / maleic anhydride / butyl acrylate copolymer for dispersion of barium sulfate (see Patent Document 2).
しかしながら、ソルダーレジストなどの感光性樹脂組成物や感光性フィルム等でシリカ微粒子を高充填すると、膜物性が変化し、ソルダーレジストとしての性能が逆に損なわれる。例えば、シリカ微粒子を高充填すると溶融粘度が高くなり、転写性、現像性が低下する。
このため、シリカ微粒子を安定かつ高密度に分散できる分散剤およびその分散剤組成物の開発、特に、ソルダーレジストなどの感光性樹脂組成物や感光性フィルム等でシリカ微粒子を高充填化した場合、転写性や現像性、耐衝撃性、さらには絶縁性に優れた分散組成物の開発が望まれていた。
However, when silica fine particles are highly filled with a photosensitive resin composition such as a solder resist or a photosensitive film, the film physical properties change, and the performance as a solder resist is impaired. For example, when the silica fine particles are highly filled, the melt viscosity increases, and the transferability and developability deteriorate.
For this reason, the development of a dispersant capable of stably and densely dispersing silica fine particles and its dispersant composition, especially when the silica fine particles are highly filled with a photosensitive resin composition such as a solder resist or a photosensitive film, Development of a dispersion composition having excellent transferability, developability, impact resistance, and insulating properties has been desired.
本発明は、かかる従来における前記諸問題を解決し、以下の目的を達成することを課題とする。即ち、本発明は、無機微粒子、特にシリカ微粒子を安定に高密度に分散できる分散剤もしくはその組成物、シリカ微粒子を高充填化しても、埋め込み性、耐熱衝撃性、現像性、及び絶縁性に優れた高性能な硬化膜を得ることができ、感光性組成物もしくは感光性フィルム等、特にソルダーレジスト用などに好適なシリカ分散組成物を提供することを目的とする。 The present invention aims to solve the above-mentioned conventional problems and achieve the following objects. That is, the present invention provides a dispersing agent or composition capable of stably dispersing high density inorganic fine particles, particularly silica fine particles, or embedding, thermal shock resistance, developability, and insulating properties even when the silica fine particles are highly filled. An object of the present invention is to provide an excellent high performance cured film, and to provide a silica dispersion composition suitable for a photosensitive composition or a photosensitive film, particularly for a solder resist.
前記課題を解決するため、本発明者等が鋭意検討を重ねた結果、シリカ分散組成物において、分散剤のアミン価および酸価、とりわけアミン価が重要であり、また特定のアミン価の高分子樹脂、樹脂構造において、前記課題が効果的に解決し得ることを見出し、この知見に基づき本発明をなすに至った。通常、塩基性基と酸性基がポリマー中に共存すると塩を形成し、溶剤への溶解性も低下するものであるが、この点も特定の高分子樹脂、樹脂構造において解決された。 In order to solve the above-mentioned problems, the present inventors have conducted intensive studies. As a result, in the silica dispersion composition, the amine value and acid value of the dispersant, especially the amine value, are important, and polymers having a specific amine value are also used. The present inventors have found that the above problems can be effectively solved in the resin and resin structure, and have made the present invention based on this finding. Usually, when a basic group and an acidic group coexist in a polymer, a salt is formed and the solubility in a solvent is lowered. This point has also been solved in a specific polymer resin and resin structure.
本発明の前記課題を解決するための手段は、以下の通りである。
(1)少なくとも1種のアクリル樹脂とシリカ微粒子を含有してなり、該アクリル樹脂が、第三級アミノ基を有し、かつアミン価が1.1mmol/g以上である組成物。
(2)前記アクリル樹脂が、該樹脂の側鎖に、ないしは主鎖端末にグラフト鎖を有する(1)に記載の組成物。
(3)前記アクリル樹脂が、さらに酸性基を有する(1)または(2)に記載の組成物。
(4)前記アクリル樹脂が、さらにカルボキシル基を有する(1)または(2)に記載の組成物。
(5)前記アクリル樹脂の酸価が0.3mmol/g以上である(1)~(4)のいずれか1項に記載の組成物。
(6)前記シリカ微粒子の平均粒径(d50)が0.02μm~3.0μmである(1)~(5)のいずれか1項に記載の組成物。
(7)熱架橋剤を含有する(1)~(6)のいずれか1項に記載の組成物。
(8)バインダー、重合性化合物および光重合開始剤を含有する(1)~(7)のいずれか1項に記載の組成物。
(9)前記組成物が、ソルダーレジスト用である(1)~(8)のいずれか1項に記載の組成物。
(10)前記組成物が、バインダーとして酸変性のエチレン性不飽和基を含有する樹脂を含有する(1)~(9)のいずれかに記載の組成物。
(11)前記組成物が、バインダーとして酸変性のエチレン性不飽和基含有ポリウレタン樹脂を含有する(1)~(9)のいずれか1項に記載の組成物。
(12)前記(1)~(11)のいずれか1項に記載の組成物を含む感光層を支持体上に有してなる感光性フィルム。
(13)基体上に、(1)~(11)のいずれか1項に記載の組成物を含む感光層を有する感光性積層体。
(14)前記(1)~(11)のいずれか1項に記載の組成物により形成された感光層に対して露光を行うことを少なくとも含む永久パターン形成方法。
(15)前記(14)に記載の永久パターン形成方法で形成されてなるプリント基板。
Means for solving the problems of the present invention are as follows.
(1) A composition comprising at least one acrylic resin and silica fine particles, the acrylic resin having a tertiary amino group and an amine value of 1.1 mmol / g or more.
(2) The composition according to (1), wherein the acrylic resin has a graft chain at a side chain of the resin or at a main chain terminal.
(3) The composition according to (1) or (2), wherein the acrylic resin further has an acidic group.
(4) The composition according to (1) or (2), wherein the acrylic resin further has a carboxyl group.
(5) The composition according to any one of (1) to (4), wherein the acrylic resin has an acid value of 0.3 mmol / g or more.
(6) The composition according to any one of (1) to (5), wherein the silica fine particles have an average particle size (d50) of 0.02 μm to 3.0 μm.
(7) The composition according to any one of (1) to (6), which contains a thermal crosslinking agent.
(8) The composition according to any one of (1) to (7), comprising a binder, a polymerizable compound, and a photopolymerization initiator.
(9) The composition according to any one of (1) to (8), wherein the composition is for a solder resist.
(10) The composition according to any one of (1) to (9), wherein the composition contains a resin containing an acid-modified ethylenically unsaturated group as a binder.
(11) The composition according to any one of (1) to (9), wherein the composition contains an acid-modified ethylenically unsaturated group-containing polyurethane resin as a binder.
(12) A photosensitive film having a photosensitive layer containing the composition according to any one of (1) to (11) on a support.
(13) A photosensitive laminate having a photosensitive layer containing the composition according to any one of (1) to (11) on a substrate.
(14) A method for forming a permanent pattern comprising at least exposing a photosensitive layer formed of the composition according to any one of (1) to (11).
(15) A printed board formed by the permanent pattern forming method according to (14).
本発明により、無機微粒子、特にシリカ微粒子を安定に高密度に分散できる分散剤もしくはその組成物、シリカ微粒子を高充填化しても、埋め込み性、耐熱衝撃性、現像性、及び絶縁性に優れた高性能な硬化膜を得ることができ、感光性組成物もしくは感光性フィルム等、特にソルダーレジスト用などに好適なシリカ分散組成物が提供できる。 According to the present invention, a dispersing agent or composition capable of stably dispersing high-density inorganic fine particles, particularly silica fine particles, or a silica fine particle having a high filling property, excellent embedding properties, thermal shock resistance, developability, and insulating properties. A high-performance cured film can be obtained, and a silica dispersion composition suitable for a photosensitive composition or a photosensitive film, particularly for a solder resist can be provided.
(組成物)
本発明の組成物は、少なくとも1種のアクリル樹脂とシリカ微粒子を含有してなる組成物であり、熱架橋剤、バインダー、重合性化合物、光重合開始剤、更に必要に応じてその他の成分を含有してなる。なお、各成分の含有量は、特に断りのない限り、固形分含有量(例えば、シリカ分散組成物の全固形分における固形分含有量)である。
(Composition)
The composition of the present invention is a composition comprising at least one acrylic resin and silica fine particles, and includes a thermal crosslinking agent, a binder, a polymerizable compound, a photopolymerization initiator, and other components as necessary. It contains. In addition, content of each component is solid content (For example, solid content in the total solid of a silica dispersion composition) unless there is particular notice.
<アクリル樹脂>
本発明の組成物に用いられる本発明のアクリル樹脂は、第三級アミノ基を有し、アミン価が1.1mmol/g以上である。このアクリル樹脂は無機もしくは有機のフィラーや顔料の分散剤として有用である。本発明においては、特にシリカ微粒子の分散剤として作用する。
<Acrylic resin>
The acrylic resin of the present invention used in the composition of the present invention has a tertiary amino group and an amine value of 1.1 mmol / g or more. This acrylic resin is useful as a dispersant for inorganic or organic fillers and pigments. In the present invention, it particularly acts as a dispersant for silica fine particles.
アクリル樹脂は、アクリル酸、メタクリル酸およびこれらの誘導体、例えばアクリル酸エステル、メタクリル酸エステル、アクリロニトリル、メタクリロニトリル、アクリルアミド、メタクリルアミド成分の繰り返し単位を含む樹脂であり、好ましくは、下記一般式(P)で表される繰り返し単位を有する。 The acrylic resin is a resin containing repeating units of acrylic acid, methacrylic acid and derivatives thereof such as acrylic acid ester, methacrylic acid ester, acrylonitrile, methacrylonitrile, acrylamide and methacrylamide components, and preferably has the following general formula ( Having a repeating unit represented by P).
一般式(P)において、RP1は水素原子またはメチル基を表し、XP1は-CO2RP2、CON(RP3)(RP4)または-CNを表す。ここで、RP2は水素原子またはアルキル基、アルケニル基、シクロアルキル基またはアリール基を表す。RP3およびRP4は各々独立に、水素原子、アルキル基、アルケニル基、シクロアルキル基またはアリール基を表す。
これらの各基は置換基を有してもよく、該置換基としては、例えばアルキル基、アルケニル基、アルキニル基、シクロアルキル基、アリール基、ヘテロ環基、ハロゲン原子、アルコキシ基、アリールオキシ基、アルキルチオ基、アリールチオ基、アミノ基、アルキルアミノ基、アリールアミノ基、アシルアミノ基、スルホンアミド基、アルキルもしくはアリールスルホニル基、アルキルもしくはアリールスルフィニル基、アルコキシカルボニル基、アリールオキシカルボニル基、アシル基、アシルオキシ基、カルバモイル基、スルファモイル基、ヒドロキシル基、メルカプト基、シアノ基、ニトロ基、カルボキシル基、スルホ基、ウレイド基、ウレタン基などが挙げられる。
また、前記アクリル樹脂は、上記一般式(P)で表される繰り返し単位のうち、一般式(P)で表される範囲内で、異なった繰り返し単位を含んでもよい。また、上記一般式(P)で表される繰り返し単位以外の繰り返し単位を含んでもよい。
In the general formula (P), R P1 represents a hydrogen atom or a methyl group, and X P1 represents —CO 2 R P2 , CON (R P3 ) (R P4 ), or —CN. Here, R P2 represents a hydrogen atom or an alkyl group, an alkenyl group, a cycloalkyl group, or an aryl group. R P3 and R P4 each independently represent a hydrogen atom, an alkyl group, an alkenyl group, a cycloalkyl group or an aryl group.
Each of these groups may have a substituent. Examples of the substituent include an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, a heterocyclic group, a halogen atom, an alkoxy group, and an aryloxy group. , Alkylthio group, arylthio group, amino group, alkylamino group, arylamino group, acylamino group, sulfonamido group, alkyl or arylsulfonyl group, alkyl or arylsulfinyl group, alkoxycarbonyl group, aryloxycarbonyl group, acyl group, acyloxy Group, carbamoyl group, sulfamoyl group, hydroxyl group, mercapto group, cyano group, nitro group, carboxyl group, sulfo group, ureido group, urethane group and the like.
Moreover, the said acrylic resin may also contain a different repeating unit within the range represented by general formula (P) among the repeating units represented by the said general formula (P). Moreover, you may include repeating units other than the repeating unit represented by the said general formula (P).
一般式(P)において、RP1はメチル基が好ましい。XP1は、好ましくは-CO2RP2である。また、RP2は水素原子またはアルキル基が好ましく、本発明に用いられるアクリル樹脂は、一般式(P)のXP1が-CO2RP2である部分構造の範囲内で、異なった2種以上の繰り返し単位を含むことが好ましい。 In general formula (P), R P1 is preferably a methyl group. X P1 is preferably —CO 2 R P2 . Also, R P2 is preferably a hydrogen atom or an alkyl group, an acrylic resin used in the present invention, X P1 of the general formula (P) is within the range of the partial structure is a -CO 2 R P2, different two or more It is preferable that the repeating unit is included.
本発明に用いられるアクリル樹脂は第三級アミノ基を有する。
アクリル樹脂中に含有する第三級アミノ基は、無機もしくは有機のフィラーや顔料の表面、特にシリカ微粒子の表面と相互作用、例えば、イオン的相互作用で表面に吸着する。
第三級アミノ基は、好ましくは下記一般式(M)で表される。
The acrylic resin used in the present invention has a tertiary amino group.
The tertiary amino group contained in the acrylic resin is adsorbed on the surface of the inorganic or organic filler or pigment, particularly the surface of the silica fine particles, for example, by ionic interaction.
The tertiary amino group is preferably represented by the following general formula (M).
一般式(M)
-N(RM1)(RM2)
General formula (M)
-N (R M1 ) (R M2 )
一般式(M)において、RM1およびRM2は各々独立に、アルキル基、アルケニル基、アルキニル基、シクロアルキル基、アリール基またはヘテロ環基を表し、これらの各基は置換基を有してもよい。また、RM1とRM2が互いに結合して環を形成してもよい。
アルキル基としては、好ましくは炭素数1~10で、例えばメチル、エチル、イソプロピル、t-ブチル、n-ヘキシル、n-オクチル、2-エチルヘキシル、n-デシルが挙げられる。アルケニル基として、好ましくは炭素数2~10で、例えばビニル、アリル、2-ブテニルが挙げられる。アルキニル基としては、好ましくは炭素数2~10で、例えばエチニル、2-プロピニル、2-ブチニルが挙げられる。シクロアルキル基としては、好ましくは炭素数3~10で、例えばシクロプロピル、シクロペンチル、シクロへキシルが挙げられる。アリール基としては、炭素数6~12が好ましく、例えばフェニル、ナフチルが挙げられる。ヘテロ環基としては、環骨格を構成するヘテロ原子として、酸素原子、硫黄原子、窒素原子を少なくとも1個有し、5または6員のヘテロ環基が好ましく、上記N原子と結合する原子が炭素原子であるものが好ましい。ヘテロ環基のヘテロ環としては、例えばテトラヒドロフラン環、ピロリジン環、ピペラジン環、ピペリジン環、モルホリン環、ジオキサン環、フラン環、チオフェン環、ピリジン環、ピラゾール環が挙げられる。
In General Formula (M), R M1 and R M2 each independently represent an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, or a heterocyclic group, and each of these groups has a substituent. Also good. R M1 and R M2 may be bonded to each other to form a ring.
The alkyl group preferably has 1 to 10 carbon atoms, and examples thereof include methyl, ethyl, isopropyl, t-butyl, n-hexyl, n-octyl, 2-ethylhexyl, and n-decyl. The alkenyl group preferably has 2 to 10 carbon atoms, and examples thereof include vinyl, allyl and 2-butenyl. The alkynyl group preferably has 2 to 10 carbon atoms, and examples thereof include ethynyl, 2-propynyl, and 2-butynyl. The cycloalkyl group preferably has 3 to 10 carbon atoms, and examples thereof include cyclopropyl, cyclopentyl, and cyclohexyl. The aryl group preferably has 6 to 12 carbon atoms, and examples thereof include phenyl and naphthyl. The heterocyclic group is preferably a 5- or 6-membered heterocyclic group having at least one oxygen atom, sulfur atom or nitrogen atom as a hetero atom constituting the ring skeleton, and the atom bonded to the N atom is carbon. Those that are atoms are preferred. Examples of the heterocyclic group include a tetrahydrofuran ring, a pyrrolidine ring, a piperazine ring, a piperidine ring, a morpholine ring, a dioxane ring, a furan ring, a thiophene ring, a pyridine ring, and a pyrazole ring.
これらの各基は置換基を有してもよく、該置換基としては、例えばアルキル基、アルケニル基、アルキニル基、シクロアルキル基、アリール基、ヘテロ環基、ハロゲン原子、アルコキシ基、アリールオキシ基、アルキルチオ基、アリールチオ基、アミノ基、アルキルアミノ基、アリールアミノ基、アシルアミノ基、スルホンアミド基、アルキルもしくはアリールスルホニル基、アルキルもしくはアリールスルフィニル基、アルコキシカルボニル基、アリールオキシカルボニル基、アシル基、アシルオキシ基、カルバモイル基、スルファモイル基、ヒドロキシル基、メルカプト基、シアノ基、ニトロ基、カルボキシル基、スルホ基、ウレイド基、ウレタン基などが挙げられる。 Each of these groups may have a substituent. Examples of the substituent include an alkyl group, an alkenyl group, an alkynyl group, a cycloalkyl group, an aryl group, a heterocyclic group, a halogen atom, an alkoxy group, and an aryloxy group. , Alkylthio group, arylthio group, amino group, alkylamino group, arylamino group, acylamino group, sulfonamido group, alkyl or arylsulfonyl group, alkyl or arylsulfinyl group, alkoxycarbonyl group, aryloxycarbonyl group, acyl group, acyloxy Group, carbamoyl group, sulfamoyl group, hydroxyl group, mercapto group, cyano group, nitro group, carboxyl group, sulfo group, ureido group, urethane group and the like.
RM1とRM2が互いに結合して形成される環としては、5または6員環が好ましく、また飽和環が好ましく、例えば、ピロリジン環、ピペラジン環、ピペリジン環、モルホリン環が挙げられる。 As the ring formed by combining R M1 and R M2 with each other, a 5- or 6-membered ring is preferable, and a saturated ring is preferable, and examples thereof include a pyrrolidine ring, a piperazine ring, a piperidine ring, and a morpholine ring.
RM1、RM2はアルキル基、アルケニル基、シクロアルキル基、アリール基が好ましく、アルキル基がより好ましい。アルキル基では、無置換のアルキル基が好ましく、炭素数としては1~8が好ましく、1~6がより好ましく、1~4がさらに好ましく、メチル基が最も好ましい。また、RM1とRM2が互いに結合してピロリジン環、ピペラジン環、ピペリジン環、モルホリン環を形成した場合も好ましい。 R M1 and R M2 are preferably an alkyl group, an alkenyl group, a cycloalkyl group, or an aryl group, and more preferably an alkyl group. As the alkyl group, an unsubstituted alkyl group is preferable, and the number of carbon atoms is preferably 1 to 8, more preferably 1 to 6, still more preferably 1 to 4, and most preferably a methyl group. It is also preferred that R M1 and R M2 are bonded to each other to form a pyrrolidine ring, piperazine ring, piperidine ring, or morpholine ring.
本発明に用いられるアクリル樹脂のアミン価は、1.1mmol/g以上であるが、好ましくは1.2mmol/g以上であり、さらに好ましくは1.5mmol/g以上である。アミン価の上限は、特に限定されるものではないが、好ましくは4.5mmol/g以下であり、さらに好ましくは3.5mmol/g以下である。アミン価は、1.1mmol/g未満であると溶融粘度が上昇し、埋め込み性が悪化することがある。
ここで、前記アミン価の測定は、例えば、試料をビーカーにはかりとり、酢酸を加え、撹拌して溶解させて、測定温度を25℃に調整後、滴定試薬として0.1N過塩素酸酢酸を用いて、滴定装置で滴定することにより、求めることができる。
アミン価は滴定した際に消費される過塩素の量を、アクリル樹脂1g当たりのモル数で表したものである。
The amine value of the acrylic resin used in the present invention is 1.1 mmol / g or more, preferably 1.2 mmol / g or more, and more preferably 1.5 mmol / g or more. The upper limit of the amine value is not particularly limited, but is preferably 4.5 mmol / g or less, more preferably 3.5 mmol / g or less. If the amine value is less than 1.1 mmol / g, the melt viscosity may increase and the embedding property may deteriorate.
Here, the amine value is measured, for example, by weighing a sample in a beaker, adding acetic acid, stirring and dissolving, adjusting the measurement temperature to 25 ° C., and then adding 0.1N perchloric acid acetic acid as a titration reagent. And can be determined by titrating with a titration apparatus.
The amine value is the amount of perchlorate consumed when titrated, expressed in moles per gram of acrylic resin.
本発明に用いられるアクリル樹脂は、第三級アミノ基、好ましくは前記一般式(M)で表される基を有するが、この第三級アミノ基は、上記一般式(P)で表される繰り返し単位の一部に組み込まれても、これとは別のモノマーから得られる繰り返し単位中に第三級アミノ基を有してもよい。
本発明においては、前記一般式(P)に組み込まれるのが好ましく、RP2~RP4のいずれかに、RP2~RP4で規定されている各基の置換基として組み込まれるのがより好ましい。
具体的には、例えば、第三級アミノ基が置換したアルキル基、第三級アミノ基が置換したアリール基等である。
第三級アミノ基は、下記の一般式(P1)で表されるように繰り返し単位中に含まれることが好ましい。
The acrylic resin used in the present invention has a tertiary amino group, preferably a group represented by the general formula (M), and this tertiary amino group is represented by the general formula (P). Even if it is incorporated in a part of the repeating unit, the repeating unit obtained from a different monomer may have a tertiary amino group.
In the present invention, it is preferably incorporated in the general formula (P), in any of R P2 ~ R P4, and more preferably are incorporated as substituents of the groups defined in R P2 ~ R P4 .
Specifically, for example, an alkyl group substituted with a tertiary amino group, an aryl group substituted with a tertiary amino group, and the like.
The tertiary amino group is preferably contained in the repeating unit as represented by the following general formula (P1).
一般式(P1)において、RP1は一般式(P)のRP1と同義であり、好ましい範囲も同じである。RM1およびRM2は一般式(M)のRM1およびRM2と同義であり、好ましい範囲も同じである。
XP2は-O-または-N(RP3)-を表す。ここで、RP3は前記一般式(P)におけるRP3と同義である。LP1はアルキレン基、アルケニレン基、シクロアルキレン基、フェニレン基、2価のヘテロ環基もしくはこれらの基が組み合わされた基、またはこれらの基と他の2価の基(例えば、-O-、-S-、-C(=O)-、-SO2-、-SO-、-N(RP5)-など)が組み合わされた基(ただし、この他の2価の基が直接XP1に結合することはない)を表す。ここで、RP5はRP3で表される基、アシル基、アルキルもしくはアリールスルホニル基、アルコキシ基またはアリールオキシ基を表す。なお、LP1の各基は置換基を有してもよく、このような置換基としては、一般式(P)におけるRP3およびRP4の基が有してもよい置換基が挙げられる。
In general formula (P1), RP1 is synonymous with RP1 of general formula (P), and its preferable range is also the same. R M1 and R M2 have the same meanings as R M1 and R M2 of the general formula (M), and their preferable ranges are also the same.
X P2 represents —O— or —N (R P3 ) —. Here, R P3 has the same meaning as R P3 in Formula (P). L P1 represents an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or these groups and other divalent groups (for example, —O—, A group in which —S—, —C (═O) —, —SO 2 —, —SO—, —N (R P5 ) — and the like are combined (however, other divalent groups are directly bonded to X P1 It is not bound). Here, R P5 represents a group represented by R P3 , an acyl group, an alkyl or arylsulfonyl group, an alkoxy group, or an aryloxy group. Note that each group of L P1 may have a substituent, and examples of such a substituent include the substituents that the groups R P3 and R P4 in the general formula (P) may have.
一般式(P1)で表される繰り返し単位のうち、XP2は-O-が好ましく、LP1はアルキレン基が好ましく、また炭素数は1~12が好ましく、2~8がより好ましく、2~4がさらに好ましく、2が最も好ましい。 Of the repeating units represented by the general formula (P1), X P2 is preferably —O—, L P1 is preferably an alkylene group, and preferably has 1 to 12 carbon atoms, more preferably 2 to 8 carbon atoms. 4 is more preferable, and 2 is most preferable.
本発明に用いられるアクリル樹脂は、さらに酸性基を有することが好ましい。第三級アミノ基と酸性基を有することは、現像性だけでなく、絶縁性の点でも好ましい。
酸性基としては、特に制限はなく、例えば、カルボキシル基、スルホ基、ホスホニル基、-COCH2CO-RB、-CONHCO-RB、-COCH2CN、フェノール性水酸基、-RFCH2OH、-(RF)2CHOH、アルキルもしくはアリールスルホンアミド基などが挙げられる。ここで、RBは炭素数1~10の炭化水素基を表し、RFはペルフルオロアルキル基を表す。なお、炭化水素基は、飽和、不飽和または環状の炭化水素基で、好ましくはアルキル基である。
酸性基のうち、現像性の点で、カルボキシル基が特に好ましい。
The acrylic resin used in the present invention preferably further has an acidic group. Having a tertiary amino group and an acidic group is preferable not only from developability but also from the viewpoint of insulation.
The acidic group is not particularly limited, and examples thereof include a carboxyl group, a sulfo group, a phosphonyl group, —COCH 2 CO—R B , —CONHCO—R B , —COCH 2 CN, a phenolic hydroxyl group, and —R F CH 2 OH. , — (R F ) 2 CHOH, an alkyl or arylsulfonamido group, and the like. Here, R B represents a hydrocarbon group having 1 to 10 carbon atoms, and R F represents a perfluoroalkyl group. The hydrocarbon group is a saturated, unsaturated or cyclic hydrocarbon group, preferably an alkyl group.
Of the acidic groups, a carboxyl group is particularly preferable from the viewpoint of developability.
このような酸性基は、前記一般式(P)で表される繰り返し単位中に組み込んでもよく、また他の繰り返し単位中に組み込んでもよい。これらの酸性基を前記一般式(P)で表される繰り返し単位中に組み込むには、XP1が-CO2RP2であってかつRP2が水素原子の繰り返し単位として含むものである。具体的にはアクリル酸、メタクリル酸で共重合させる。一方、酸性基を有する他のモノマーと共重合させることによって組み込む場合は、このようなモノマーとして、例えば、クロトン酸、マレイン酸、マレイン酸モノアルキルエステル、フマール酸、フマール酸モノアルキルエステル、イタコン酸、イタコン酸モノアルキルエステル、p-ヒドロキシスチレン、p-スルホスチレン、p-カルボキシスチレンなどが挙げられる。
本発明においては、アクリル酸またはメタクリル酸との共重合で酸性基を組み込むことが好ましい。
Such an acidic group may be incorporated into the repeating unit represented by the general formula (P) or may be incorporated into another repeating unit. To incorporate these acid groups in the repeating unit represented by Formula (P), and R P2 X P1 is a -CO 2 R P2 are those containing as a repeating unit of the hydrogen atom. Specifically, it is copolymerized with acrylic acid or methacrylic acid. On the other hand, when incorporating by copolymerizing with other monomers having an acidic group, such monomers include, for example, crotonic acid, maleic acid, maleic acid monoalkyl ester, fumaric acid, fumaric acid monoalkyl ester, itaconic acid. Itaconic acid monoalkyl ester, p-hydroxystyrene, p-sulfostyrene, p-carboxystyrene and the like.
In the present invention, it is preferable to incorporate an acidic group by copolymerization with acrylic acid or methacrylic acid.
本発明に用いられるアクリル樹脂の酸価は、0.3mmol/g以上が好ましく、0.45mmol/g以上がより好ましい。
本発明に用いられるアクリル樹脂の酸価は、0.3mmol/g以上が好ましく、さらに好ましくは0.5mmol/g以上である。酸価の上限は、特に限定されるものではないが、好ましくは3.5mmol/g以下であり、さらに好ましくは2.5mmol/g以下である。本発明に用いられるアクリル樹脂では、酸価が、0.3mmol/g未満であると、現像性が悪化し、未露光部に残渣が発生することがある。
ここで、前記酸価の測定は、例えば、試料をビーカーにはかりとり、THF/水=5/1(体積比)の溶液を加え、撹拌して溶解させて、測定温度を25℃に調整した後、滴定試薬として0.1NのNaOH水溶液を用いて、滴定装置で滴定することにより、酸価を求めることができる。
酸価は滴定した際に消費されるNaOHの量を、アクリル樹脂1g当たりのモル数で表したものである。
The acid value of the acrylic resin used in the present invention is preferably 0.3 mmol / g or more, and more preferably 0.45 mmol / g or more.
The acid value of the acrylic resin used in the present invention is preferably 0.3 mmol / g or more, more preferably 0.5 mmol / g or more. Although the upper limit of an acid value is not specifically limited, Preferably it is 3.5 mmol / g or less, More preferably, it is 2.5 mmol / g or less. In the acrylic resin used in the present invention, if the acid value is less than 0.3 mmol / g, the developability deteriorates and a residue may be generated in the unexposed area.
Here, for the measurement of the acid value, for example, a sample is weighed in a beaker, a solution of THF / water = 5/1 (volume ratio) is added, dissolved by stirring, and the measurement temperature is adjusted to 25 ° C. Thereafter, the acid value can be determined by titrating with a titration apparatus using a 0.1N NaOH aqueous solution as a titration reagent.
The acid value is the amount of NaOH consumed when titrated, expressed in moles per gram of acrylic resin.
-グラフト鎖-
本発明に用いられるアクリル樹脂は、側鎖に、ないしは主鎖末端の少なくともいずれかにグラフト鎖を有することが好ましい。
グラフト鎖としては、例えばポリエステル鎖、ポリアルキルアクリレート鎖、ポリアルキルメタクリレート鎖、ポリアルキレンオキシド鎖(好ましくはポリエチレンオキシド鎖、ポリプロピレンオキシド鎖)、ポリカーボネート鎖、ポリスチレン鎖、またはこれらが組合されたものおよびこれらの鎖を部分構造に含むものが挙げられる。これらの中でも、ポリエステル部位を有するグラフト鎖(ポリエステルグラフト鎖)であることが、解像性の点で好ましい。
前記グラフト鎖の鎖長は、重合度が、1~100が好ましく、1~80がより好ましく、1~60が特に好ましい。
前記グラフトの含有量は、アクリル樹脂全体に対し10質量%~60質量%が好ましく、20質量%~50質量%がより好ましい。
グラフト鎖は、アクリル樹脂が下記一般式(PG)で表される繰り返し単位を有することが好ましい。
-Graft chain-
The acrylic resin used in the present invention preferably has a graft chain on the side chain or at least one of the ends of the main chain.
Examples of the graft chain include a polyester chain, a polyalkyl acrylate chain, a polyalkyl methacrylate chain, a polyalkylene oxide chain (preferably a polyethylene oxide chain, a polypropylene oxide chain), a polycarbonate chain, a polystyrene chain, or a combination thereof. The chain | strand of which is included in partial structure is mentioned. Among these, a graft chain having a polyester moiety (polyester graft chain) is preferable in terms of resolution.
The chain length of the graft chain is such that the degree of polymerization is preferably 1 to 100, more preferably 1 to 80, and particularly preferably 1 to 60.
The content of the graft is preferably 10% by mass to 60% by mass and more preferably 20% by mass to 50% by mass with respect to the entire acrylic resin.
In the graft chain, the acrylic resin preferably has a repeating unit represented by the following general formula (PG).
一般式(PG)において、RP1は一般式(P)のRP1と同義であり、好ましい範囲も同じである。XP2は一般式(P1)のXP1と同義であり、好ましい範囲も同じである。LP2は単結合、アルキレン基、アルケニレン基、シクロアルキレン基、フェニレン基、2価のヘテロ環基もしくはこれらの基が組み合わされた基、またはこれらの基と他の2価の基(例えば、-O-、-S-、-C(=O)-、-SO2-、-SO-、-N(RP5)-など)が組み合わされた基(ただし、この他の2価の基が直接XP2に結合することはない)を表す。ここで、RP5はRP3で表される基、アシル基、アルキルもしくはアリールスルホニル基、アルコキシ基またはアリールオキシ基を表す。なお、LP2の各基は置換基を有してもよく、このような置換基としては、RP3およびRP4の基が有しても良い置換基が挙げられる。RP6は水素原子または置換基を表し、該置換基としては、一般式(P)におけるRP3およびRP4の基が有してもよい置換基が挙げられる。 In general formula (PG), RP1 is synonymous with RP1 of general formula (P), and its preferable range is also the same. X P2 has the same meaning as X P1 of the general formula (P1), and the preferred range is also the same. L P2 represents a single bond, an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or these groups and other divalent groups (for example,- Groups in which O—, —S—, —C (═O) —, —SO 2 —, —SO—, —N ( RP 5 ) —, etc.) are combined (other divalent groups are directly Does not bind to XP2 ). Here, R P5 represents a group represented by R P3 , an acyl group, an alkyl or arylsulfonyl group, an alkoxy group, or an aryloxy group. Note that each group of L P2 may have a substituent, and examples of such a substituent include substituents that the groups R P3 and R P4 may have. R P6 represents a hydrogen atom or a substituent, and examples of the substituent include substituents that the groups R P3 and R P4 in the general formula (P) may have.
XP2は-O-が好ましい。
LP2はポリオキシアルキレン、ポリアクリル酸エステル、ポリメタクリル酸エステル、ポリエステル、ポリカーボネート、ポリスチレンを部分構造に有す2価の基が好ましい。
ポリオキシアルキレンは、ポリオキシエチレン、ポリオキシプロピレンが好ましい。ポリエステルは、-[(CH2)mP1-COO]np1-、ポリカーボネートは、-[(CH2)mp2-OCOO]np2-で表され、nP1およびnP2は各々独立に1~50を表すものが好ましく、mP1およびmP2はそれぞれ独立に1~10を表すものが好ましい。
上記ポリエステル、ポリカーボネート部分構造は、XP1との結合に際して、2価の連結基を介してポリエステル、ポリカーボネートが結合するものが好ましい。この場合の2価の連結基としては、例えばアルキレン基、アルケニレン基、シクロアルキレン基、フェニレン基、2価のヘテロ環基もしくはこれらの基が組み合わされた基、またはこれらに、-O-、-S-、-C(=O)-、-SO2-、-SO-、-N(RP5)-が組み合わされた基が挙げられる。なかでも-アルキレン-NHC(=O)O-基が好ましく、特に、-CH2CH2-NHC(=O)O-基が好ましい。
X P2 is preferably —O—.
L P2 is preferably a divalent group having a partial structure of polyoxyalkylene, polyacrylic ester, polymethacrylic ester, polyester, polycarbonate, and polystyrene.
The polyoxyalkylene is preferably polyoxyethylene or polyoxypropylene. Polyester is represented by — [(CH 2 ) m P1 —COO] n p1 —, and polycarbonate is represented by — [(CH 2 ) m p2 —OCOO] n p2 —, wherein n P1 and n P2 are each independently 1 to 50 is preferable, and m P1 and m P2 each independently preferably represent 1 to 10.
The polyester, polycarbonate moiety, upon binding to X P1, polyesters via a divalent linking group, those polycarbonate binds preferable. As the divalent linking group in this case, for example, an alkylene group, an alkenylene group, a cycloalkylene group, a phenylene group, a divalent heterocyclic group, a group in which these groups are combined, or —O—, — And a group in which S—, —C (═O) —, —SO 2 —, —SO—, and —N (R P5 ) — are combined. Among them, an -alkylene-NHC (═O) O— group is preferable, and a —CH 2 CH 2 —NHC (═O) O— group is particularly preferable.
アクリル樹脂の分子量を調節する際にはチオール基を含む連鎖移動剤などを使用して行うことが好ましい。本発明に用いられるアクリル樹脂の質量平均分子量は3000~30000が好ましく、5000~18000がより好ましい。 When adjusting the molecular weight of the acrylic resin, it is preferable to use a chain transfer agent containing a thiol group. The acrylic resin used in the present invention has a mass average molecular weight of preferably 3000 to 30000, and more preferably 5000 to 18000.
本発明に用いられるアクリル樹脂は、樹脂全体に一般式(P)で表される繰り返し単位以外の繰り返し単位を有してもよいが、本発明においては、一般式(P)で表される繰り返し単位の含有量は50モル%以上が好ましく、60モル%以上がより好ましく、70モル%以上がさらに好ましい。
また、本発明に用いられるアクリル樹脂は、前記一般式(P1)で表される繰り返し単位を20モル%~70モル%、前記一般式(PG)で表される繰り返し単位を3モル%~25モル%、酸性基を有するモノマーから得られる繰り返し単位を2モル%~40モル%含有することが好ましい。
なお、前記一般式(P)で表され、かつ前記一般式(P1)、(PG)、酸性基を有するモノマーから得られる繰り返し単位とは異なる繰り返し単位としては、アクリル酸エステルまたはメタクリル酸エステルから得られる繰り返し単位が好ましく、エステルのアルコール部は炭素数1~20が好ましく、1~12がより好ましく、1~8がさらに好ましい。
The acrylic resin used in the present invention may have a repeating unit other than the repeating unit represented by the general formula (P) throughout the resin, but in the present invention, the acrylic resin is represented by the general formula (P). The unit content is preferably 50 mol% or more, more preferably 60 mol% or more, and even more preferably 70 mol% or more.
Further, the acrylic resin used in the present invention contains 20 mol% to 70 mol% of the repeating unit represented by the general formula (P1) and 3 mol% to 25 mol of the repeating unit represented by the general formula (PG). It is preferable to contain 2 mol% to 40 mol% of a repeating unit obtained from a monomer having an mol group and an acidic group.
In addition, as a repeating unit different from the repeating unit represented by the general formula (P) and obtained from the general formula (P1), (PG), and a monomer having an acidic group, an acrylic ester or a methacrylic ester may be used. The obtained repeating unit is preferred, and the alcohol part of the ester preferably has 1 to 20 carbon atoms, more preferably 1 to 12 and even more preferably 1 to 8.
以下に、本発明に用いられるアクリル樹脂の具体例を示すが、これによって本発明が制限されるものではない。なお、数値は質量%であり、xは重合度であって、1~50である。 Specific examples of the acrylic resin used in the present invention are shown below, but the present invention is not limited thereby. The numerical value is% by mass and x is the degree of polymerization, which is 1 to 50.
本発明に用いられるアクリル樹脂は対応するモノマーを使用し、一般的な重合反応で容易に合成することができる。具体的な合成例は、実施例において示す。 The acrylic resin used in the present invention can be easily synthesized by a general polymerization reaction using a corresponding monomer. Specific synthesis examples are shown in the examples.
<シリカ微粒子>
本発明で使用するシリカ微粒子のシリカとしては、特に制限はなく、目的に応じて適宜選択でき、例えば、気相法シリカ、結晶性シリカ、溶融シリカ、などが挙げられる。
<Silica fine particles>
There is no restriction | limiting in particular as a silica of the silica particle used by this invention, According to the objective, it can select suitably, For example, vapor phase method silica, crystalline silica, fused silica, etc. are mentioned.
本発明で使用するシリカ微粒子の平均粒径(d50)は、特に制限はなく、目的に応じて適宜選択することができるが、0.02μm~3.0μmが好ましく、0.1μm~2.0μmがより好ましく、0.2μm~1.5μmが特に好ましい。
シリカ粒子の平均粒径(d50)が、0.02μm未満であると、塗布粘度が高くなってしまうことがあり、3.0μmを超えると、平滑性を維持することができないことがある。一方、シリカ粒子の平均粒径(d50)が、前記特に好ましい範囲内であると、塗布粘度と硬化膜の平滑性及び耐熱性の点で有利である。
ここで、シリカ粒子の平均粒径(d50)は、積算(累積)質量百分率で表したときの積算値50%の粒度で定義されるもので、d50(D50)などと定義されるものであり、例えば、ダイナミック光散乱光度計(商品名:DLS7000、大塚電子社製)を用いて、測定原理を動的光散乱法として、サイズ分布解析手法をキュムラント法、ヒストグラム法などにより、測定することができる。
The average particle diameter (d50) of the silica fine particles used in the present invention is not particularly limited and can be appropriately selected according to the purpose, but is preferably 0.02 μm to 3.0 μm, preferably 0.1 μm to 2.0 μm. Is more preferable, and 0.2 μm to 1.5 μm is particularly preferable.
If the average particle diameter (d50) of the silica particles is less than 0.02 μm, the coating viscosity may be high, and if it exceeds 3.0 μm, smoothness may not be maintained. On the other hand, when the average particle diameter (d50) of the silica particles is within the particularly preferable range, it is advantageous in terms of coating viscosity, smoothness of the cured film and heat resistance.
Here, the average particle size (d50) of the silica particles is defined as a particle size of an integrated value of 50% when expressed as an integrated (cumulative) mass percentage, and is defined as d50 (D 50 ) or the like. Yes, for example, using a dynamic light scattering photometer (trade name: DLS7000, manufactured by Otsuka Electronics Co., Ltd.), using the measurement principle as the dynamic light scattering method, and the size distribution analysis method using the cumulant method, histogram method, etc. Can do.
シリカ微粒子としては、適宜合成したものを使用してもよいし、市販品を使用してもよい。該市販品としては、例えば、SO-C2(アドマテックス社製)などが挙げられる。 As the silica fine particles, those appropriately synthesized may be used, or commercially available products may be used. Examples of the commercially available product include SO-C2 (manufactured by Admatechs).
シリカ微粒子とシリカ微粒子分散剤との混合物におけるシリカ微粒子の固形分含有量は、5質量%~80質量%が好ましく、10質量%~70質量%がより好ましい。
含有量が、5質量%未満であると、耐衝撃性が劣ることがあり、80質量%を超えると、分散性が不十分となることがある。
本発明の前記アクリル樹脂はシリカ微粒子100質量部に対して0.001~10質量部が好ましく、0.01~5質量部がより好ましい。
The solid content of the silica fine particles in the mixture of the silica fine particles and the silica fine particle dispersant is preferably 5% by mass to 80% by mass, and more preferably 10% by mass to 70% by mass.
When the content is less than 5% by mass, impact resistance may be inferior, and when it exceeds 80% by mass, dispersibility may be insufficient.
The acrylic resin of the present invention is preferably 0.001 to 10 parts by mass, more preferably 0.01 to 5 parts by mass with respect to 100 parts by mass of silica fine particles.
<熱架橋剤>
本発明に用いられる組成物は熱架橋剤を含有するのが好ましい。
熱架橋剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、エポキシ樹脂、多官能オキセタン化合物、などが挙げられる。
これらの中でも、1分子内に少なくとも2つのオキシラン基を有するエポキシ樹脂化合物、1分子内に少なくとも2つのオキセタニル基を有するオキセタン化合物が好ましい。
<Thermal crosslinking agent>
The composition used in the present invention preferably contains a thermal crosslinking agent.
There is no restriction | limiting in particular as a thermal crosslinking agent, According to the objective, it can select suitably, For example, an epoxy resin, a polyfunctional oxetane compound, etc. are mentioned.
Among these, an epoxy resin compound having at least two oxirane groups in one molecule and an oxetane compound having at least two oxetanyl groups in one molecule are preferable.
前記エポキシ樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0095〕に記載された化合物、特開2010-72340号公報の段落〔0130〕に記載された化合物、などが挙げられる。 The epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0095] of JP-A-2007-2030, and JP-A-2010-72340. And the compounds described in paragraph [0130].
前記多官能オキセタン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0096〕に記載された化合物、などが挙げられる。 The polyfunctional oxetane compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include the compounds described in paragraph [0096] of JP-A-2007-2030.
前記熱架橋剤の前記シリカ分散組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、1質量%~50質量%が好ましく、2質量%~40質量%がより好ましく、3質量%~30質量%が特に好ましい。
前記含有量が、1質量%未満であると、耐熱性が劣ることがあり、50質量%を超えると、現像性及び耐クラック性が劣ることがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好な感度で硬化膜が作製でき、形成された硬化膜も、耐熱性と耐クラック性とを両立できる点で有利である。
The content of the thermal crosslinking agent in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 1% by mass to 50% by mass, and 2% by mass to 40% by mass. Is more preferable, and 3% by mass to 30% by mass is particularly preferable.
When the content is less than 1% by mass, heat resistance may be inferior, and when it exceeds 50% by mass, developability and crack resistance may be inferior. On the other hand, when the content is within the particularly preferable range, a cured film can be produced with good sensitivity, and the formed cured film is advantageous in that both heat resistance and crack resistance can be achieved.
前記その他の熱架橋剤としては、前記エポキシ樹脂及び前記多官能オキセタン化合物とは別に添加することができる。前記その他の熱架橋剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0098〕~〔0100〕に記載された化合物、などが挙げられる。 The other thermal crosslinking agent can be added separately from the epoxy resin and the polyfunctional oxetane compound. The other thermal crosslinking agent is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0098] to [0100] of JP-A-2007-2030. Is mentioned.
<<バインダー>>
前記バインダーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、酸変性エチレン性不飽和基含有ポリウレタン樹脂、エチレン性不飽和基含有ポリカルボン酸樹脂、酸変性エチレン性不飽和基含有エポキシ樹脂、エチレン性不飽和基及びカルボキシル基を含有する樹脂、ポリイミド前駆体、などが挙げられる。
<< Binder >>
The binder is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include acid-modified ethylenically unsaturated group-containing polyurethane resins, ethylenically unsaturated group-containing polycarboxylic acid resins, and acid-modified ethylenically unsaturated resins. Examples thereof include a saturated group-containing epoxy resin, a resin containing an ethylenically unsaturated group and a carboxyl group, and a polyimide precursor.
-酸変性エチレン性不飽和基含有ポリウレタン樹脂-
前記酸変性エチレン性不飽和基含有ポリウレタン樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、(i)側鎖にエチレン性不飽和結合(ビニル基)を有するポリウレタン樹脂、(ii)カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂、などが挙げられる。
-Acid-modified ethylenically unsaturated group-containing polyurethane resin-
The acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the purpose. For example, (i) a polyurethane having an ethylenically unsaturated bond (vinyl group) in the side chain And (ii) a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule.
--(i)側鎖にエチレン性不飽和基を有するポリウレタン樹脂--
前記側鎖にエチレン性不飽和基を有するウレタン樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、その側鎖に、下記一般式(1)~(3)で表される官能基のうち少なくとも1つを有するものが挙げられる。
-(I) Polyurethane resin having an ethylenically unsaturated group in the side chain--
The urethane resin having an ethylenically unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose. For example, the side chain may be represented by the following general formulas (1) to (3). What has at least 1 among the functional groups represented is mentioned.
前記一般式(1)において、前記R1としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、水素原子、置換基を有してもよいアルキル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基が好ましい。また、前記R2及びR3としては、特に制限はなく、目的に応じて適宜選択することができ、それぞれ独立に、例えば、水素原子、ハロゲン原子、アミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。
前記一般式(1)中、Xは、酸素原子、硫黄原子、又は-N(R12)-を表し、前記R12は、水素原子、又は1価の有機基を表す。前記R12としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、置換基を有してもよいアルキル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基、エチル基、イソプロピル基が好ましい。
ここで、導入し得る前記置換基としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、アルキル基、アルケニル基、アルキニル基、アリール基、アルコキシ基、アリーロキシ基、ハロゲン原子、アミノ基、アルキルアミノ基、アリールアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、アミド基、アルキルスルホニル基、アリールスルホニル基、などが挙げられる。
In the general formula (1), R 1 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom and an alkyl group which may have a substituent. . Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity. The R 2 and R 3 are not particularly limited and may be appropriately selected depending on the intended purpose. For example, each independently represents a hydrogen atom, a halogen atom, an amino group, a carboxyl group, an alkoxycarbonyl group, a sulfo group. Group, nitro group, cyano group, alkyl group which may have a substituent, aryl group which may have a substituent, alkoxy group which may have a substituent, aryl which may have a substituent An oxy group, an alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, an arylsulfonyl group which may have a substituent , Etc. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
In the general formula (1), X represents an oxygen atom, a sulfur atom, or —N (R 12 ) —, and R 12 represents a hydrogen atom or a monovalent organic group. R 12 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a hydrogen atom, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
Here, the substituent that can be introduced is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group, an alkenyl group, an alkynyl group, an aryl group, an alkoxy group, an aryloxy group, and a halogen atom. Amino group, alkylamino group, arylamino group, carboxyl group, alkoxycarbonyl group, sulfo group, nitro group, cyano group, amide group, alkylsulfonyl group, arylsulfonyl group, and the like.
前記一般式(2)において、R4~R8としては、特に制限はなく、目的に応じて適宜選択することができ、水素原子、ハロゲン原子、アミノ基、ジアルキルアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。 In the general formula (2), R 4 to R 8 are not particularly limited and may be appropriately selected depending on the intended purpose. The hydrogen atom, halogen atom, amino group, dialkylamino group, carboxyl group, alkoxycarbonyl A group, a sulfo group, a nitro group, a cyano group, an alkyl group which may have a substituent, an aryl group which may have a substituent, an alkoxy group which may have a substituent, and a substituent. An aryloxy group which may have a substituent, an alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, and a substituent. An arylsulfonyl group, and the like. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
導入し得る置換基としては、前記一般式(1)と同様のものが挙げられる。また、Yは、酸素原子、硫黄原子、又は-N(R12)-を表す。前記R12は、前記一般式(1)のR12の場合と同義であり、好ましい例も同様である。 Examples of the substituent that can be introduced include the same as those in the general formula (1). Y represents an oxygen atom, a sulfur atom, or —N (R 12 ) —. Said R < 12 > is synonymous with the case of R < 12 > of the said General formula (1), and its preferable example is also the same.
前記一般式(3)において、前記R9としては、特に制限はなく、目的に応じて適宜選択することができ、水素原子又は置換基を有してもよいアルキル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、メチル基が好ましい。前記一般式(3)中、前記R10及びR11としては、特に制限はなく、目的に応じて適宜選択することができ、水素原子、ハロゲン原子、アミノ基、ジアルキルアミノ基、カルボキシル基、アルコキシカルボニル基、スルホ基、ニトロ基、シアノ基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基、置換基を有してもよいアルコキシ基、置換基を有してもよいアリールオキシ基、置換基を有してもよいアルキルアミノ基、置換基を有してもよいアリールアミノ基、置換基を有してもよいアルキルスルホニル基、置換基を有してもよいアリールスルホニル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、水素原子、カルボキシル基、アルコキシカルボニル基、置換基を有してもよいアルキル基、置換基を有してもよいアリール基が好ましい。 In the general formula (3), R 9 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include a hydrogen atom or an alkyl group which may have a substituent. Among these, a hydrogen atom and a methyl group are preferable in terms of high radical reactivity. In the general formula (3), R 10 and R 11 are not particularly limited and may be appropriately selected depending on the intended purpose. A hydrogen atom, a halogen atom, an amino group, a dialkylamino group, a carboxyl group, an alkoxy group A carbonyl group, a sulfo group, a nitro group, a cyano group, an alkyl group which may have a substituent, an aryl group which may have a substituent, an alkoxy group which may have a substituent, and a substituent An aryloxy group which may have a substituent, an alkylamino group which may have a substituent, an arylamino group which may have a substituent, an alkylsulfonyl group which may have a substituent, and a substituent. And a good arylsulfonyl group. Among these, a hydrogen atom, a carboxyl group, an alkoxycarbonyl group, an alkyl group which may have a substituent, and an aryl group which may have a substituent are preferable because of high radical reactivity.
ここで、導入し得る置換基としては、前記一般式(1)と同様のものが挙げられる。また、Zは、酸素原子、硫黄原子、-N(R13)-、又は置換基を有してもよいフェニレン基を表す。前記R13としては、特に制限はなく、目的に応じて適宜選択することができ、置換基を有してもよいアルキル基、などが挙げられる。これらの中でも、ラジカル反応性が高い点で、メチル基、エチル基、イソプロピル基が好ましい。 Here, examples of the substituent that can be introduced include the same as those in the general formula (1). Z represents an oxygen atom, a sulfur atom, —N (R 13 ) —, or an optionally substituted phenylene group. R 13 is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include an alkyl group which may have a substituent. Among these, a methyl group, an ethyl group, and an isopropyl group are preferable because of high radical reactivity.
前記側鎖にエチレン性不飽和結合を有するウレタン樹脂は、下記一般式(4)で表されるジイソシアネート化合物の少なくとも1種と、下記一般式(5)で表されるジオール化合物の少なくとも1種と、の反応生成物で表される構造単位を基本骨格とするポリウレタン樹脂である。 The urethane resin having an ethylenically unsaturated bond in the side chain includes at least one diisocyanate compound represented by the following general formula (4) and at least one diol compound represented by the following general formula (5): A polyurethane resin having a structural unit represented by the reaction product as a basic skeleton.
OCN-X0-NCO ・・・一般式(4)
HO-Y0-OH ・・・一般式(5)
ただし、前記一般式(4)及び(5)中、X0、Y0は、それぞれ独立に2価の有機残基を表す。
OCN-X 0 -NCO General formula (4)
HO—Y 0 —OH —General formula (5)
However, in the general formulas (4) and (5), X 0 and Y 0 each independently represent a divalent organic residue.
前記一般式(4)で表されるジイソシアネート化合物、又は、前記一般式(5)で表されるジオール化合物の少なくともどちらか一方が、前記一般式(1)~(3)で表される基のうち少なくとも1つを有していれば、当該ジイソシアネート化合物と当該ジオール化合物との反応生成物として、側鎖に前記一般式(1)~(3)で表される基が導入されたポリウレタン樹脂が生成される。かかる方法によれば、ポリウレタン樹脂の反応生成後に所望の側鎖を置換、導入するよりも、側鎖に前記一般式(1)~(3)で表される基が導入されたポリウレタン樹脂を容易に製造することができる。 At least one of the diisocyanate compound represented by the general formula (4) and the diol compound represented by the general formula (5) is a group represented by the general formulas (1) to (3). If at least one of them is present, a polyurethane resin in which the groups represented by the above general formulas (1) to (3) are introduced into the side chain as a reaction product of the diisocyanate compound and the diol compound is provided. Generated. According to such a method, a polyurethane resin in which the groups represented by the general formulas (1) to (3) are introduced into the side chain can be easily used, rather than replacing and introducing a desired side chain after the reaction of the polyurethane resin. Can be manufactured.
前記一般式(4)で表されるジイソシアネート化合物としては、特に制限されるものではなく、目的に応じて適宜選択することができ、例えば、トリイソシアネート化合物と、不飽和基を有する単官能のアルコール又は単官能のアミン化合物1当量とを付加反応させて得られる生成物、などが挙げられる。
前記トリイソシアネート化合物としては、特に制限されるものではなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0034〕~〔0035〕に記載された化合物、などが挙げられる。
The diisocyanate compound represented by the general formula (4) is not particularly limited and can be appropriately selected depending on the purpose. For example, a triisocyanate compound and a monofunctional alcohol having an unsaturated group Or the product obtained by addition-reacting with 1 equivalent of monofunctional amine compounds is mentioned.
The triisocyanate compound is not particularly limited and may be appropriately selected depending on the purpose. For example, the compounds described in paragraphs [0034] to [0035] of JP-A-2005-250438, Etc.
前記一般式(5)で表されるジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物、などが挙げられる。 There is no restriction | limiting in particular as a diol compound represented by the said General formula (5), According to the objective, it can select suitably, For example, a polyether diol compound, a polyester diol compound, a polycarbonate diol compound etc. are mentioned. .
前記不飽和基を有する単官能のアルコール又は前記単官能のアミン化合物としては、特に制限されるものではなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0037〕~〔0040〕に記載された化合物、などが挙げられる。 The monofunctional alcohol having an unsaturated group or the monofunctional amine compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraphs of JP-A-2005-250438 And the compounds described in [0037] to [0040].
ここで、前記ポリウレタン樹脂の側鎖に不飽和基を導入する方法としては、特に制限はなく、目的に応じて適宜選択することができるが、ポリウレタン樹脂製造の原料として、側鎖に不飽和基を含有するジイソシアネート化合物を用いる方法が好ましい。前記ジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、トリイソシアネート化合物と不飽和基を有する単官能のアルコール又は単官能のアミン化合物1当量とを付加反応させることにより得ることできるジイソシアネート化合物であって、例えば、特開2005-250438号公報の段落〔0042〕~〔0049〕に記載された側鎖に不飽和基を有する化合物、などが挙げられる。 Here, the method for introducing an unsaturated group into the side chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. A method using a diisocyanate compound containing is preferable. There is no restriction | limiting in particular as said diisocyanate compound, According to the objective, it can select suitably, By carrying out addition reaction of the monoisocyanate which has a triisocyanate compound, and a monofunctional amine compound or monofunctional amine compound. Examples of the diisocyanate compound that can be obtained include compounds having an unsaturated group in the side chain described in paragraphs [0042] to [0049] of JP-A-2005-250438.
前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂は、重合性組成物中の他の成分との相溶性を向上させ、保存安定性を向上させるといった観点から、前記不飽和基を含有するジイソシアネート化合物以外のジイソシアネート化合物を共重合させることもできる。 The polyurethane resin having an ethylenically unsaturated bond in the side chain is a diisocyanate containing the unsaturated group from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability. Diisocyanate compounds other than the compounds can also be copolymerized.
前記共重合させるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することでき、例えば、下記一般式(6)で表されるジイソシアネート化合物である。
OCN-L1-NCO ・・・一般式(6)
ただし、前記一般式(6)中、L1は、置換基を有していてもよい2価の脂肪族又は芳香族炭化水素基を表す。必要に応じて、L1は、イソシアネート基と反応しない他の官能基、例えば、エステル、ウレタン、アミド、ウレイド基を有していてもよい。
The diisocyanate compound to be copolymerized is not particularly limited and may be appropriately selected depending on the intended purpose. For example, it is a diisocyanate compound represented by the following general formula (6).
OCN-L 1 -NCO General formula (6)
However, in the general formula (6), L 1 represents an aliphatic or aromatic hydrocarbon group which may have a substituent. If necessary, L 1 may have another functional group that does not react with an isocyanate group, for example, an ester, urethane, amide, or ureido group.
前記一般式(6)で表されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することでき、例えば、2,4-トリレンジイソシアネート、2,4-トリレンジイソシアネートの二量体、2,6-トリレンジイソシアネート、p-キシリレンジイソシアネート、m-キシリレンジイソシアネート、4,4’-ジフェニルメタンジイソシアネート、1,5-ナフチレンジイソシアネート、3,3’-ジメチルビフェニル-4,4’-ジイソシアネート等のような芳香族ジイソシアネート化合物;ヘキサメチレンジイソシアネート、トリメチルヘキサメチレンジイソシアネート、リジンジイソシアネート、ダイマー酸ジイソシアネート等の脂肪族ジイソシアネート化合物;イソホロンジイソシアネート、4,4’-メチレンビス(シクロヘキシルイソシアネート)、メチルシクロヘキサン-2,4(又は2,6)ジイソシアネート、1,3-(イソシアネートメチル)シクロヘキサン等の脂環族ジイソシアネート化合物;1,3-ブチレングリコール1モルとトリレンジイソシアネート2モルとの付加体等のジオールとジイソシアネートとの反応物であるジイソシアネート化合物;などが挙げられる。 The diisocyanate compound represented by the general formula (6) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, dimer of 2,4-tolylene diisocyanate and 2,4-tolylene diisocyanate 2,6-tolylene diisocyanate, p-xylylene diisocyanate, m-xylylene diisocyanate, 4,4'-diphenylmethane diisocyanate, 1,5-naphthylene diisocyanate, 3,3'-dimethylbiphenyl-4,4 ' An aromatic diisocyanate compound such as diisocyanate; an aliphatic diisocyanate compound such as hexamethylene diisocyanate, trimethylhexamethylene diisocyanate, lysine diisocyanate, dimer acid diisocyanate; isophorone diisocyanate, 4,4′-me Alicyclic diisocyanate compounds such as lenbis (cyclohexyl isocyanate), methylcyclohexane-2,4 (or 2,6) diisocyanate, 1,3- (isocyanatomethyl) cyclohexane; 1 mol of 1,3-butylene glycol and tolylene diisocyanate 2 A diisocyanate compound which is a reaction product of a diol such as an adduct with a mole and a diisocyanate;
ここで、前記ポリウレタン樹脂の側鎖に不飽和基を導入する方法としては、前述の方法の他に、ポリウレタン樹脂製造の原料として、側鎖に不飽和基を含有するジオール化合物を用いる方法も好ましい。前記側鎖に不飽和基を含有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、トリメチロールプロパンモノアリルエーテルのように市販されているものでもよいし、ハロゲン化ジオール化合物、トリオール化合物、アミノジオール化合物等の化合物と、不飽和基を含有する、カルボン酸、酸塩化物、イソシアネート、アルコール、アミン、チオール、ハロゲン化アルキル化合物等の化合物との反応により容易に製造される化合物であってもよい。前記側鎖に不飽和基を含有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0057〕~〔0060〕に記載された化合物、下記一般式(G)で表される特開2005-250438号公報の段落〔0064〕~〔0066〕に記載された化合物、などが挙げられる。これらの中でも、下記一般式(G)で表される特開2005-250438号公報の段落〔0064〕~〔0066〕に記載された化合物が特に好ましい。 Here, as a method for introducing an unsaturated group into the side chain of the polyurethane resin, in addition to the above-described method, a method using a diol compound containing an unsaturated group in the side chain as a raw material for producing a polyurethane resin is also preferable. . The diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose. For example, a commercially available product such as trimethylolpropane monoallyl ether may be used. By reaction with a compound such as a halogenated diol compound, a triol compound or an aminodiol compound and a compound containing an unsaturated group such as a carboxylic acid, acid chloride, isocyanate, alcohol, amine, thiol or halogenated alkyl compound. It may be a compound that is easily produced. The diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs [0057] to [0060] of JP-A-2005-250438 And the compounds described in paragraphs [0064] to [0066] of JP-A-2005-250438 represented by the following general formula (G). Among these, compounds described in paragraphs [0064] to [0066] of JP-A-2005-250438 represented by the following general formula (G) are particularly preferable.
ただし、前記一般式(G)中、R1~R3は、それぞれ独立に水素原子又は1価の有機基を表し、Aは2価の有機残基を表し、Xは、酸素原子、硫黄原子、又は-N(R12)-を表し、前記R12は、水素原子、又は1価の有機基を表す。
なお、前記一般式(G)におけるR1~R3及びXは、前記一般式(1)におけるR1~R3及びXと同義であり、好ましい態様もまた同様である。
前記一般式(G)で表されるジオール化合物に由来するポリウレタン樹脂を用いることにより、立体障害の大きい2級アルコールに起因するポリマー主鎖の過剰な分子運動を抑制効果により、層の被膜強度の向上が達成できるものと考えられる。
In the general formula (G), R 1 to R 3 each independently represents a hydrogen atom or a monovalent organic group, A represents a divalent organic residue, and X represents an oxygen atom or a sulfur atom. Or —N (R 12 ) —, wherein R 12 represents a hydrogen atom or a monovalent organic group.
Incidentally, R 1 ~ R 3 and X in the general formula (G), said a general formula (1) the same meaning as R 1 ~ R 3 and X in preferred embodiments versa.
By using the polyurethane resin derived from the diol compound represented by the general formula (G), the effect of suppressing the excessive molecular movement of the polymer main chain caused by the secondary alcohol having a large steric hindrance can be reduced. It is thought that improvement can be achieved.
前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂は、例えば、重合性組成物中の他の成分との相溶性を向上させ、保存安定性を向上させるといった観点から、前記側鎖に不飽和基を含有するジオール化合物以外のジオール化合物を共重合させることができる。
前記側鎖に不飽和基を含有するジオール化合物以外のジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエーテルジオール化合物、ポリエステルジオール化合物、ポリカーボネートジオール化合物、などが挙げられる。
The polyurethane resin having an ethylenically unsaturated bond in the side chain is unsaturated in the side chain from the viewpoint of improving compatibility with other components in the polymerizable composition and improving storage stability, for example. A diol compound other than a diol compound containing a group can be copolymerized.
The diol compound other than the diol compound containing an unsaturated group in the side chain is not particularly limited and may be appropriately selected depending on the purpose. For example, a polyether diol compound, a polyester diol compound, a polycarbonate diol compound, Etc.
前記ポリエーテルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0068〕~〔0076〕に記載された化合物、などが挙げられる。 The polyether diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraphs [0068] to [0076] of JP-A-2005-250438. Can be mentioned.
前記ポリエステルジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0077〕~〔0079〕、段落〔0083〕~〔0085〕におけるNo.1~No.8及びNo.13~No.18に記載された化合物、などが挙げられる。 The polyester diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include paragraphs [0077] to [0079] and paragraphs [0083] to [0085] of JP-A-2005-250438. No. 1-No. 8 and no. 13-No. 18 and the like, and the like.
前記ポリカーボネートジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0080〕~〔0081〕及び段落〔0084〕におけるNo.9~No.12に記載された化合物、などが挙げられる。 The polycarbonate diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in the paragraphs [0080] to [0081] and paragraph [0084] of JP-A-2005-250438, No. 9-No. 12 and the like, and the like.
また、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の合成には、上述したジオール化合物の他に、イソシアネート基と反応しない置換基を有するジオール化合物を併用することもできる。
前記イソシアネート基と反応しない置換基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0087〕~〔0088〕に記載された化合物、などが挙げられる。
Moreover, in the synthesis | combination of the polyurethane resin which has an ethylenically unsaturated bond in the said side chain, the diol compound which has a substituent which does not react with an isocyanate group other than the diol compound mentioned above can also be used together.
The diol compound having a substituent that does not react with the isocyanate group is not particularly limited and may be appropriately selected depending on the intended purpose. For example, in paragraphs [0087] to [0088] of JP-A-2005-250438 And the described compounds.
更に、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の合成には、上述したジオール化合物の他に、カルボキシル基を有するジオール化合物を併用することもできる。前記カルボキシル基を有するジオール化合物としては、例えば、以下の式(X)~(Z)に示すものが含まれる。 Furthermore, in the synthesis of a polyurethane resin having an ethylenically unsaturated bond in the side chain, a diol compound having a carboxyl group can be used in combination with the diol compound described above. Examples of the diol compound having a carboxyl group include those represented by the following formulas (X) to (Z).
前記式(X)~(Z)中、R15としては、水素原子、置換基(例えば、シアノ基、ニトロ基、-F、-Cl、-Br、-I等のハロゲン原子、-CONH2、-COOR16、-OR16、-NHCONHR16、-NHCOOR16、-NHCOR16、-OCONHR16(ここで、前記R16は、炭素数1~10のアルキル基、又は炭素数7~15のアラルキル基を表す。)などの各基が含まれる。)を有していてもよいアルキル基、アラルキル基、アリール基、アルコキシ基、アリールオキシ基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、水素原子、炭素数1~8個のアルキル基、炭素数6~15個のアリール基が好ましい。前記式(X)~(Z)中、L9、L10、L11は、それぞれ同一でもよいし、相違していてもよく、単結合、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲン原子が好ましい。)を有していてもよい2価の脂肪族又は芳香族炭化水素基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、炭素数1~20個のアルキレン基、炭素数6~15個のアリーレン基が好ましく、炭素数1~8個のアルキレン基がより好ましい。また必要に応じ、前記L9~L11中にイソシアネート基と反応しない他の官能基、例えば、カルボニル、エステル、ウレタン、アミド、ウレイド、エーテル基を有していてもよい。なお、前記R15、L7、L8、L9のうちの2個又は3個で環を形成してもよい。
前記式(Y)中、Arとしては、置換基を有していてもよい三価の芳香族炭化水素基を表すものである限り、特に制限はなく、目的に応じて適宜選択することができるが、炭素数6~15個の芳香族基が好ましい。
In the formulas (X) to (Z), R 15 represents a hydrogen atom, a substituent (for example, a halogen atom such as a cyano group, a nitro group, —F, —Cl, —Br, —I, etc., —CONH 2 , —COOR 16 , —OR 16 , —NHCONHR 16 , —NHCOOR 16 , —NHCOR 16 , —OCONHR 16 (wherein R 16 is an alkyl group having 1 to 10 carbon atoms or an aralkyl group having 7 to 15 carbon atoms) And any other group that may have an alkyl group, an aralkyl group, an aryl group, an alkoxy group, an aryloxy group, and the like. A hydrogen atom, an alkyl group having 1 to 8 carbon atoms, and an aryl group having 6 to 15 carbon atoms are preferable. In the above formulas (X) to (Z), L 9 , L 10 and L 11 may be the same or different, and may be a single bond, a substituent (for example, an alkyl group, an aralkyl group, an aryl group). As long as it represents a divalent aliphatic or aromatic hydrocarbon group that may have an alkyl group, and an alkoxy group and a halogen atom are not particularly limited, and can be appropriately selected depending on the purpose. However, an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable. If necessary, the L 9 to L 11 may have other functional groups that do not react with isocyanate groups, such as carbonyl, ester, urethane, amide, ureido, and ether groups. A ring may be formed by two or three of R 15 , L 7 , L 8 and L 9 .
In the formula (Y), Ar is not particularly limited as long as it represents a trivalent aromatic hydrocarbon group which may have a substituent, and can be appropriately selected according to the purpose. However, an aromatic group having 6 to 15 carbon atoms is preferred.
前記式(X)~(Z)で表されるカルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、3,5-ジヒドロキシ安息香酸、2,2-ビス(ヒドロキシメチル)プロピオン酸、2,2-ビス(2-ヒドロキシエチル)プロピオン酸、2,2-ビス(3-ヒドロキシプロピル)プロピオン酸、ビス(ヒドロキシメチル)酢酸、ビス(4-ヒドロキシフェニル)酢酸、2,2-ビス(ヒドロキシメチル)酪酸、4,4-ビス(4-ヒドロキシフェニル)ペンタン酸、酒石酸、N,N-ジヒドロキシエチルグリシン、N,N―ビス(2-ヒドロキシエチル)-3-カルボキシ-プロピオンアミド、などが挙げられる。 The diol compound having a carboxyl group represented by the formulas (X) to (Z) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, 3,5-dihydroxybenzoic acid, 2, 2-bis (hydroxymethyl) propionic acid, 2,2-bis (2-hydroxyethyl) propionic acid, 2,2-bis (3-hydroxypropyl) propionic acid, bis (hydroxymethyl) acetic acid, bis (4-hydroxy Phenyl) acetic acid, 2,2-bis (hydroxymethyl) butyric acid, 4,4-bis (4-hydroxyphenyl) pentanoic acid, tartaric acid, N, N-dihydroxyethylglycine, N, N-bis (2-hydroxyethyl) -3-carboxy-propionamide, and the like.
このようなカルボキシル基の存在により、ポリウレタン樹脂に水素結合性とアルカリ可溶性といった特性を付与できるため好ましい。より具体的には、前記側鎖にエチレン性不飽和結合基を有するポリウレタン樹脂が、更に側鎖にカルボキシル基を有する樹脂である。 It is preferable because the presence of such a carboxyl group can impart properties such as hydrogen bonding and alkali solubility to the polyurethane resin. More specifically, the polyurethane resin having an ethylenically unsaturated bond group in the side chain is a resin having a carboxyl group in the side chain.
また、側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の合成には、上述したジオール化合物の他に、テトラカルボン酸二無水物をジオール化合物で開環させた化合物を併用することもできる。
前記テトラカルボン酸二無水物をジオール化合物で開環させた化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2005-250438号公報の段落〔0095〕~〔0101〕に記載された化合物、などが挙げられる。
Moreover, in the synthesis | combination of the polyurethane resin which has an ethylenically unsaturated bond in a side chain, the compound which ring-opened tetracarboxylic dianhydride with the diol compound other than the diol compound mentioned above can also be used together.
The compound obtained by ring-opening the tetracarboxylic dianhydride with a diol compound is not particularly limited and may be appropriately selected depending on the intended purpose. For example, paragraph [0095] to JP 2005-250438 A And the compounds described in [0101].
また、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂としては、ポリマー末端、主鎖にアルカリ現像性基を有するものも好適に使用される。ポリマー末端、主鎖にアルカリ現像性基を有することにより、更に、アルカリ現像時の現像性が向上し、優れたパターン形成性を与える。更に熱架橋剤と側鎖にエチレン性不飽和結合を有するポリウレタン樹脂との間で架橋反応性が向上し、硬化物強度が増す。その結果、側鎖にエチレン性不飽和結合を有するポリウレタン樹脂をプリント基板材料に使用した際、耐久性に優れる材料を与えることができる。ここで、アルカリ現像性基としては、希アルカリによる現像性の付与から、カルボキシル基を有することが特に好ましい。 Further, as the polyurethane resin having an ethylenically unsaturated bond in the side chain, those having an alkali developing group in the polymer terminal and main chain are also preferably used. By having an alkali-developable group at the polymer terminal and main chain, the developability at the time of alkali development is further improved, and excellent pattern forming properties are provided. Furthermore, crosslinking reactivity is improved between the thermal crosslinking agent and the polyurethane resin having an ethylenically unsaturated bond in the side chain, and the cured product strength is increased. As a result, when a polyurethane resin having an ethylenically unsaturated bond in the side chain is used as a printed board material, a material having excellent durability can be provided. Here, the alkali-developable group preferably has a carboxyl group from the viewpoint of imparting developability with a dilute alkali.
ポリマー末端にアルカリ現像性基を導入する方法としては、以下に示す方法がある。 Examples of a method for introducing an alkali-developable group at the polymer terminal include the following methods.
-主鎖の末端のカルボキシル基-
前記ポリウレタン樹脂の主鎖の末端に、少なくとも1つのカルボキシル基を有し、2つ以上5つ以下のカルボキシル基を有することが好ましく、2つのカルボキシル基を有することが現像性に優れ、微細パターン形成性の点で特に好ましい。
なお、前記ポリウレタン樹脂における主鎖の末端は、2つあるが、片末端に少なくとも1つのカルボキシル基を有することが好ましく、両末端に少なくとも1つのカルボキシル基を有していてもよい。
前記ポリウレタン樹脂の主鎖の末端に、下記一般式(7)で表される構造を有することが好ましい
-L100-(COOH)n ・・・ 一般式(7)
ただし、前記一般式(7)中、L100は、(n+1)価の有機連結鎖を表し、nは1以上の整数を示し、1~5が好ましく、2が特に好ましい。
L100で表される有機連結基は、炭素原子、水素原子、酸素原子、窒素原子、及び硫黄原子から選択される1以上の原子を含んで構成され、具体的には、L100で表される有機連結基の主骨格を構成する原子数は、1~30が好ましく、1~25がより好ましく、1~20が更に好ましく、1~10が特に好ましい。
なお、前記「有機連結基の主骨格」とは、後述する一般式(8)におけるL200と末端COOHとを連結するためのみに使用される原子又は原子団を意味し、連結経路が複数ある場合には、使用される原子数が最も少ない経路を構成する原子又は原子団を指す。
-Carboxyl group at the end of the main chain-
The polyurethane resin has at least one carboxyl group at the end of the main chain and preferably has 2 or more and 5 or less carboxyl groups, and having two carboxyl groups is excellent in developability and forms a fine pattern. It is particularly preferable in terms of sex.
The polyurethane resin has two main chain ends, but preferably has at least one carboxyl group at one end, and may have at least one carboxyl group at both ends.
It is preferable that the terminal of the main chain of the polyurethane resin has a structure represented by the following general formula (7): -L 100- (COOH) n ... General formula (7)
In the general formula (7), L 100 represents an (n + 1) -valent organic connecting chain, n represents an integer of 1 or more, preferably 1 to 5, and particularly preferably 2.
The organic linking group represented by L 100 is configured to include one or more atoms selected from a carbon atom, a hydrogen atom, an oxygen atom, a nitrogen atom, and a sulfur atom, specifically, represented by L 100. The number of atoms constituting the main skeleton of the organic linking group is preferably 1 to 30, more preferably 1 to 25, still more preferably 1 to 20, and particularly preferably 1 to 10.
The “main skeleton of the organic linking group” means an atom or an atomic group used only for linking L 200 and the terminal COOH in the general formula (8) described later, and there are a plurality of linking paths. In some cases, it refers to an atom or atomic group that constitutes the path with the least number of atoms used.
前記ポリウレタン樹脂の主鎖の末端に、少なくとも1つのカルボキシル基を導入する方法としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリウレタン樹脂製造の原料として、少なくとも1つのカルボキシル基を有するカルボン酸化合物を用いる方法などが挙げられる。 The method for introducing at least one carboxyl group at the end of the main chain of the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, as a raw material for producing a polyurethane resin, at least one Examples include a method using a carboxylic acid compound having a carboxyl group.
-カルボン酸化合物-
前記カルボン酸化合物としては、カルボキシル基を1つ有するモノカルボン酸化合物、カルボキシル基を2つ有するジカルボン酸化合物、カルボキシル基を3つ有するトリカルボン酸化合物、カルボキシル基を4つ有するテトラカルボン酸化合物、カルボキシル基を5つ有するペンタカルボン酸化合物などが挙げられる。これらの中でも、カルボキシル基を2つ有するジカルボン酸化合物が、現像性に優れ、微細パターン形成性の点で特に好ましい。
-Carboxylic acid compound-
Examples of the carboxylic acid compound include a monocarboxylic acid compound having one carboxyl group, a dicarboxylic acid compound having two carboxyl groups, a tricarboxylic acid compound having three carboxyl groups, a tetracarboxylic acid compound having four carboxyl groups, and a carboxyl group. Examples thereof include pentacarboxylic acid compounds having five groups. Among these, a dicarboxylic acid compound having two carboxyl groups is particularly preferable in terms of excellent developability and fine pattern formability.
前記カルボン酸化合物としては、少なくとも1つのカルボキシル基を有すれば特に制限はなく、目的に応じて適宜選択することができるが、下記一般式(8)で表される化合物が好適である。 The carboxylic acid compound is not particularly limited as long as it has at least one carboxyl group, and can be appropriately selected according to the purpose, but a compound represented by the following general formula (8) is preferable.
H-O-L200-L100-(COOH)n 一般式(8) HO-L 200 -L 100- (COOH) n General formula (8)
ただし、前記一般式(8)中、L100及びnは、前記一般式(7)と同じ意味を表す。
前記一般式(8)におけるL200は、単結合又は置換基を有していてもよいアルキレン基を表す。前記アルキレン基としては、炭素原子数1~20のアルキレン基が好ましく、炭素原子数2~10のアルキレン基がより好ましい。前記アルキレン基に導入可能な置換基としては、例えばハロゲン原子(-F、-Br、-Cl、-I)、置換基を有していてもよいアルキル基、などが挙げられる。
However, the general formula (8), L 100 and n represent the same meaning as the general formula (7).
L 200 in the general formula (8) represents an alkylene group which may have a single bond or a substituent. As the alkylene group, an alkylene group having 1 to 20 carbon atoms is preferable, and an alkylene group having 2 to 10 carbon atoms is more preferable. Examples of the substituent that can be introduced into the alkylene group include a halogen atom (—F, —Br, —Cl, —I), an alkyl group which may have a substituent, and the like.
前記一般式(8)で表されるカルボン酸化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、乳酸、リンゴ酸、ヒドロキシへキサン酸、クエン酸、ジオール化合物と酸無水物の反応物などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。これらの中でも、リンゴ酸が特に好ましい。
前記ジオール化合物と酸無水物の反応物としては、例えば、下記構造式で表される化合物などが挙げられる。
There is no restriction | limiting in particular as a carboxylic acid compound represented by the said General formula (8), According to the objective, it can select suitably, For example, lactic acid, malic acid, hydroxyhexanoic acid, a citric acid, a diol compound, Examples include a reaction product of an acid anhydride. These may be used individually by 1 type and may use 2 or more types together. Among these, malic acid is particularly preferable.
Examples of the reaction product of the diol compound and the acid anhydride include compounds represented by the following structural formulas.
また、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂としては、ポリマー末端、主鎖に不飽和基を有するものも好適に使用される。ポリマー末端、主鎖に不飽和基を有することにより、更に、シリカ分散組成物と側鎖にエチレン性不飽和結合を有するポリウレタン樹脂との間、又は側鎖にエチレン性不飽和結合を有するポリウレタン樹脂間で架橋反応性が向上し、光硬化物強度が増す。その結果、側鎖にエチレン性不飽和結合を有するポリウレタン樹脂をプリント基板材料に使用した際、耐久性に優れる。ここで、不飽和基としては、架橋反応の起こり易さから、不飽和基を有することが特に好ましい。 Further, as the polyurethane resin having an ethylenically unsaturated bond in the side chain, those having an unsaturated group in the polymer terminal and main chain are also preferably used. Polyurethane resin having an ethylenically unsaturated bond in the side chain, or between the silica dispersion composition and the polyurethane resin having an ethylenically unsaturated bond in the side chain, by having an unsaturated group at the polymer terminal and main chain Crosslinking reactivity is improved, and the strength of the photocured product is increased. As a result, when a polyurethane resin having an ethylenically unsaturated bond in the side chain is used for the printed board material, the durability is excellent. Here, as an unsaturated group, it is especially preferable to have an unsaturated group from the ease of a crosslinking reaction.
ポリマー末端に不飽和基を導入する方法としては、以下に示す方法がある。即ち、上述した側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の合成の工程での、ポリマー末端の残存イソシアネート基と、アルコール類又はアミン類等で処理する工程において、不飽和基を有するアルコール類又はアミン類等を用いればよい。このような化合物としては、具体的には、先に、不飽和基を有する単官能のアルコール又は単官能のアミン化合物として挙げられた例示化合物と同様のものを挙げることができる。
なお、不飽和基は、導入量の制御が容易で導入量を増やすことができ、また、架橋反応効率が向上するといった観点から、ポリマー末端よりもポリマー側鎖に導入されることが好ましい。
Examples of the method for introducing an unsaturated group at the polymer terminal include the following methods. That is, in the step of synthesizing the polyurethane resin having an ethylenically unsaturated bond in the side chain as described above, in the step of treating with the residual isocyanate group at the polymer end and the alcohol or amine, the alcohol having an unsaturated group. Alternatively, amines or the like may be used. Specific examples of such a compound include the same compounds as those exemplified above as the monofunctional alcohol or monofunctional amine compound having an unsaturated group.
The unsaturated group is preferably introduced into the polymer side chain rather than the polymer terminal from the viewpoint that the introduction amount can be easily controlled and the introduction amount can be increased, and that the crosslinking reaction efficiency is improved.
導入されるエチレン性不飽和結合基としては、特に制限はなく、目的に応じて適宜選択することができるが、架橋硬化膜形成性の点で、メタクリロイル基、アクリロイル基、スチリル基が好ましく、メタクリロイル基、アクリロイル基がより好ましく、架橋硬化膜の形成性と生保存性との両立の点で、メタクリロイル基が特に好ましい。
また、メタクリロイル基の導入量としては、特に制限はなく、目的に応じて適宜選択することができるが、エチレン性不飽和基当量としては、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.4mmol/gが特に好ましい。
The ethylenically unsaturated bond group to be introduced is not particularly limited and may be appropriately selected depending on the intended purpose. From the viewpoint of forming a crosslinked cured film, a methacryloyl group, an acryloyl group, and a styryl group are preferable, and methacryloyl Group and acryloyl group are more preferable, and methacryloyl group is particularly preferable in terms of both the formability of the crosslinked cured film and the raw storage stability.
The amount of methacryloyl group introduced is not particularly limited and may be appropriately selected depending on the intended purpose. The ethylenically unsaturated group equivalent is preferably 0.05 mmol / g to 3.0 mmol / g, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.4 mmol / g is particularly preferable.
主鎖に不飽和基を導入する方法としては、主鎖方向に不飽和基を有するジオール化合物をポリウレタン樹脂の合成に用いる方法がある。前記主鎖方向に不飽和基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、cis-2-ブテン-1,4-ジオール、trans-2-ブテン-1,4-ジオール、ポリブタジエンジオール、などが挙げられる。 As a method for introducing an unsaturated group into the main chain, there is a method of using a diol compound having an unsaturated group in the main chain direction for the synthesis of a polyurethane resin. The diol compound having an unsaturated group in the main chain direction is not particularly limited and may be appropriately selected depending on the intended purpose. For example, cis-2-butene-1,4-diol, trans-2-butene 1,4-diol, polybutadiene diol, and the like.
前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂は、該特定ポリウレタン樹脂とは異なる構造を有するポリウレタン樹脂を含むアルカリ可溶性高分子を併用することも可能である。例えば、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂は、は、主鎖及び/又は側鎖に芳香族基を含有したポリウレタン樹脂を併用することが可能である。 The polyurethane resin having an ethylenically unsaturated bond in the side chain can be used in combination with an alkali-soluble polymer containing a polyurethane resin having a structure different from that of the specific polyurethane resin. For example, the polyurethane resin having an ethylenically unsaturated bond in the side chain can be used in combination with a polyurethane resin containing an aromatic group in the main chain and / or side chain.
前記(i)側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の具体例としては、例えば、特開2005-250438号公報の段落〔0293〕~〔0310〕に示されたP-1~P-31のポリマー、などが挙げられる。これらの中でも、段落〔0308〕及び〔0309〕に示されたP-27及びP-28のポリマーが好ましい。 Specific examples of the polyurethane resin (i) having an ethylenically unsaturated bond in the side chain include, for example, P-1 to P— shown in paragraphs [0293] to [0310] of JP-A-2005-250438. 31 polymers, and the like. Among these, polymers of P-27 and P-28 shown in paragraphs [0308] and [0309] are preferable.
--(ii)カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂--
前記ポリウレタン樹脂は、ジイソシアネートと、カルボン酸基含有ジオールとを必須成分とするカルボキシル基含有ポリウレタンと、分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂である。目的に応じて、ジオール成分として、質量平均分子量300以下の低分子ジオール、質量平均分子量500以上の高分子ジオールを共重合成分として加えてもよい。
前記ポリウレタン樹脂を用いることにより、無機充填剤との安定した分散性及び耐クラック性及び耐衝撃性に優れることから、耐熱性、耐湿熱性、密着性、機械特性、電気特性が向上する。
また、前記ポリウレタン樹脂としては、置換基を有していてもよい二価の脂肪族及び芳香族炭化水素のジイソシアネートと、C原子及びN原子のいずれかを介してCOOH基と2つのOH基を有するカルボン酸含有ジオールとを必須成分とした反応物であって、得られた反応物と、-COO-結合を介して分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるものであってもよい。
また、前記ポリウレタン樹脂としては、下記一般式(I)で示されるジイソシアネートと、下記一般式(II-1)~(II-3)で示されるカルボン酸基含有ジオールから選ばれた少なくとも1種とを必須成分とし、目的に応じて下記一般式(III-1)~(III-5)で示される質量平均分子量が80~8,000、好ましくは80~3,000の範囲にある高分子ジオールから選ばれた少なくとも1種との反応物であって、得られた反応物と、下記一般式(IV-1)~(IV-16)で示される分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるものであってもよい。
-(Ii) Polyurethane resin obtained by reacting a carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule--
The polyurethane resin is a polyurethane resin obtained by reacting a carboxyl group-containing polyurethane having a diisocyanate and a carboxylic acid group-containing diol as essential components, and a compound having an epoxy group and an ethylenically unsaturated group in the molecule. . Depending on the purpose, a low molecular diol having a mass average molecular weight of 300 or less and a high molecular diol having a mass average molecular weight of 500 or more may be added as a diol component as a copolymer component.
By using the polyurethane resin, it is excellent in stable dispersibility with an inorganic filler, crack resistance and impact resistance, so that heat resistance, moist heat resistance, adhesion, mechanical properties and electrical properties are improved.
The polyurethane resin includes a divalent aliphatic or aromatic hydrocarbon diisocyanate which may have a substituent, a COOH group and two OH groups via any one of a C atom and an N atom. A reaction product comprising a carboxylic acid-containing diol as an essential component, and reacting the obtained reaction product with a compound having an epoxy group and an ethylenically unsaturated group in the molecule via a —COO— bond. It may be obtained.
Further, the polyurethane resin includes at least one selected from diisocyanates represented by the following general formula (I) and carboxylic acid group-containing diols represented by the following general formulas (II-1) to (II-3): Is a high molecular weight diol having a mass average molecular weight of 80 to 8,000, preferably 80 to 3,000, represented by the following general formulas (III-1) to (III-5) depending on the purpose A reaction product of at least one selected from the group consisting of an epoxy group and an ethylenically unsaturated group in a molecule represented by the following general formulas (IV-1) to (IV-16): It may be obtained by reacting a compound having
ただし、前記一般式(I)中、R1は、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲン原子のいずれかが好ましい)を有していてもよい二価の脂肪族又は芳香族炭化水素を表す。必要に応じて、前記R1は、イソシアネート基と反応しない他の官能基、例えば、エステル基、ウレタン基、アミド基、ウレイド基のいずれかを有していてもよい。
前記一般式(II-1)中、R2は、水素原子、置換基(例えば、シアノ基、ニトロ基、ハロゲン原子(-F、-Cl、-Br、-I)、-CONH2、-COOR6、-OR6、-NHCONHR6、-NHCOOR6、-NHCOR6、-OCONHR6、-CONHR6(ここで、R6は、炭素数1~10のアルキル基、炭素数7~15のアラルキル基のいずれかを表す)、などの各基が含まれる)を有していてもよいアルキル基、アラルキル基、アリール基、アルコキシ基、又はアリーロキシ基を表す。これらの中でも、水素原子、炭素数1個~3個のアルキル基、炭素数6個~15個のアリール基が好ましい。
前記一般式(II-1)及び(II-2)中、R3、R4及びR5は、それぞれ同一でも相異していてもよく、単結合、置換基(例えば、アルキル基、アラルキル基、アリール基、アルコキシ基、ハロゲノ基の各基が好ましい)を有していてもよい二価の脂肪族又は芳香族炭化水素を表す。これらの中でも、炭素数1~20個のアルキレン基、炭素数6~15個のアリーレン基が好ましく、炭素数1~8個のアルキレン基が更に好ましい。また、必要に応じて、前記R3、R4及びR5中にイソシアネート基と反応しない他の官能基、例えば、カルボニル基、エステル基、ウレタン基、アミド基、ウレイド基、エーテル基のいずれかを有していてもよい。なお、前記R2、R3、R4及びR5のうちの2個又は3個で環を形成してもよい。Arは置換基を有していてもよい三価の芳香族炭化水素を表し、炭素数6個~15個の芳香族基が好ましい。
However, in the general formula (I), R 1 may have a substituent (for example, any of an alkyl group, an aralkyl group, an aryl group, an alkoxy group, and a halogen atom is preferable). Represents an aromatic or aromatic hydrocarbon. If necessary, R 1 may have any other functional group that does not react with an isocyanate group, such as an ester group, a urethane group, an amide group, or a ureido group.
In the general formula (II-1), R 2 represents a hydrogen atom, a substituent (for example, a cyano group, a nitro group, a halogen atom (—F, —Cl, —Br, —I), —CONH 2 , —COOR. 6 , —OR 6 , —NHCONHR 6 , —NHCOOR 6 , —NHCOR 6 , —OCONHR 6 , —CONHR 6 (where R 6 is an alkyl group having 1 to 10 carbon atoms and an aralkyl group having 7 to 15 carbon atoms) Or an alkyl group, an aralkyl group, an aryl group, an alkoxy group, or an aryloxy group. Among these, a hydrogen atom, an alkyl group having 1 to 3 carbon atoms, and an aryl group having 6 to 15 carbon atoms are preferable.
In the general formulas (II-1) and (II-2), R 3 , R 4 and R 5 may be the same or different from each other, and may be a single bond, a substituent (for example, an alkyl group or an aralkyl group). , An aryl group, an alkoxy group, and a halogeno group are preferable). Among these, an alkylene group having 1 to 20 carbon atoms and an arylene group having 6 to 15 carbon atoms are preferable, and an alkylene group having 1 to 8 carbon atoms is more preferable. Further, if necessary, any one of other functional groups that do not react with the isocyanate group in the R 3 , R 4 and R 5 , for example, any one of a carbonyl group, an ester group, a urethane group, an amide group, a ureido group, and an ether group. You may have. In addition, you may form a ring by 2 or 3 of said R < 2 >, R < 3 >, R < 4 > and R < 5 >. Ar represents a trivalent aromatic hydrocarbon which may have a substituent, and is preferably an aromatic group having 6 to 15 carbon atoms.
ただし、前記一般式(III-1)~(III-3)中、R7、R8、R9、R10及びR11は、それぞれ同一でもよいし、相異していてもよく、二価の脂肪族又は芳香族炭化水素を表す。前記R7、R9、R10及びR11は、それぞれ炭素数2個~20個のアルキレン基又は炭素数6個~15個のアリーレン基が好ましく、炭素数2個~10個のアルキレン又は炭素数6個~10個のアリーレン基がより好ましい。前記R8は、炭素数1個~20個のアルキレン基又は炭素数6個~15個のアリーレン基を表し、炭素数1個~10個のアルキレン又は炭素数6個~10個のアリーレン基がより好ましい。また、前記R7、R8、R9、R10及びR11中には、イソシアネート基と反応しない他の官能基、例えば、エーテル基、カルボニル基、エステル基、シアノ基、オレフィン基、ウレタン基、アミド基、ウレイド基、又はハロゲン原子などがあってもよい。前記一般式(III-4)中、R12は、水素原子、アルキル基、アリール基、アラルキル基、シアノ基又はハロゲン原子を表す。水素原子、炭素数1個~10個のアルキル基、炭素数6個~15個のアリール基、炭素数7個~15個のアラルキル、シアノ基又はハロゲン原子が好ましく、水素原子、炭素数1個~6個のアルキル及び炭素数6個~10個のアリール基がより好ましい。また、前記R12中には、イソシアネート基と反応しない他の官能基、例えば、アルコキシ基、カルボニル基、オレフィン基、エステル基又はハロゲン原子などがあってもよい。
前記一般式(III-5)中、R13は、アリール基又はシアノ基を表し、炭素数6個~10個のアリール基又はシアノ基が好ましい。前記一般式(III-4)中、mは、2~4の整数を表す。前記一般式(III-1)~(III-5)中、n1、n2、n3、n4及びn5は、それぞれ2以上の整数を表し、2~100の整数が好ましい。前記一般式(III-5)中、n6は、0又は2以上の整数を示し、0又は2~100の整数が好ましい。
However, in the general formulas (III-1) to (III-3), R 7 , R 8 , R 9 , R 10 and R 11 may be the same or different from each other. Represents an aliphatic or aromatic hydrocarbon. R 7 , R 9 , R 10 and R 11 are each preferably an alkylene group having 2 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms, and an alkylene or carbon having 2 to 10 carbon atoms Several to 10 arylene groups are more preferred. R 8 represents an alkylene group having 1 to 20 carbon atoms or an arylene group having 6 to 15 carbon atoms, and an alkylene group having 1 to 10 carbon atoms or an arylene group having 6 to 10 carbon atoms is More preferred. In addition, in R 7 , R 8 , R 9 , R 10 and R 11 , other functional groups that do not react with isocyanate groups, such as ether groups, carbonyl groups, ester groups, cyano groups, olefin groups, urethane groups , An amide group, a ureido group, or a halogen atom. In the general formula (III-4), R 12 represents a hydrogen atom, an alkyl group, an aryl group, an aralkyl group, a cyano group, or a halogen atom. A hydrogen atom, an alkyl group having 1 to 10 carbon atoms, an aryl group having 6 to 15 carbon atoms, an aralkyl having 7 to 15 carbon atoms, a cyano group, or a halogen atom is preferable, and a hydrogen atom or one carbon atom is preferable. More preferred are ˜6 alkyl and aryl groups having 6 to 10 carbon atoms. R 12 may have other functional groups that do not react with isocyanate groups, such as alkoxy groups, carbonyl groups, olefin groups, ester groups, or halogen atoms.
In the general formula (III-5), R 13 represents an aryl group or a cyano group, preferably an aryl group or a cyano group having 6 to 10 carbon atoms. In the general formula (III-4), m represents an integer of 2 to 4. In the general formulas (III-1) to (III-5), n 1 , n 2 , n 3 , n 4 and n 5 each represents an integer of 2 or more, and an integer of 2 to 100 is preferable. In the general formula (III-5), n 6 represents 0 or an integer of 2 or more, preferably 0 or an integer of 2 to 100.
ただし、前記一般式(IV-1)~(IV-16)中、R14は、水素原子又はメチル基を表し、R15は、炭素数1~10のアルキレン基を表し、R16は、炭素数1~10の炭化水素基を表す。pは、0又は1~10の整数を表す。 In the general formulas (IV-1) to (IV-16), R 14 represents a hydrogen atom or a methyl group, R 15 represents an alkylene group having 1 to 10 carbon atoms, and R 16 represents a carbon atom. This represents a hydrocarbon group having a number of 1 to 10. p represents 0 or an integer of 1 to 10.
また、前記ポリウレタン樹脂は、更に第5成分として、カルボン酸基非含有の低分子量ジオールを共重合させてもよく、該低分子量ジオールとしては、前記一般式(III-1)~(III-5)で表され、質量平均分子量が500以下のものである。該カルボン酸基非含有低分子量ジオールは、アルカリ溶解性が低下しない限り、また、硬化膜の弾性率が十分低く保つことができる範囲で添加することができる。 The polyurethane resin may further be copolymerized with a low molecular weight diol containing no carboxylic acid group as a fifth component, and the low molecular weight diol may be any of the above general formulas (III-1) to (III-5). ) Having a mass average molecular weight of 500 or less. The low molecular weight diol containing no carboxylic acid group can be added as long as the alkali solubility is not lowered and the elastic modulus of the cured film can be kept sufficiently low.
前記ポリウレタン樹脂としては、特に、前記一般式(I)で示されるジイソシアネートと、前記一般式(II-1)~(II-3)で示されるカルボン酸基含有ジオールから選ばれた少なくとも1種とを必須成分とし、目的に応じて、前記一般式(III-1)~(III-5)で示される質量平均分子量が800~3,000の範囲にある高分子ジオールから選ばれた少なくとも1種、前記一般式(III-1)~(III-5)で示される質量平均分子量が500以下のカルボン酸基非含有の低分子量ジオールとの反応物に、更に一般式(IV-1)~(IV-16)のいずれかで示される分子中に1個のエポキシ基と少なくとも1個の(メタ)アクリル基を有する化合物を反応して得られる、酸価が20mgKOH/g~120mgKOH/gであるアルカリ可溶性光架橋性ポリウレタン樹脂が好適である。 As the polyurethane resin, in particular, at least one selected from diisocyanates represented by the general formula (I) and carboxylic acid group-containing diols represented by the general formulas (II-1) to (II-3) And at least one selected from polymer diols having a mass average molecular weight of 800 to 3,000 represented by the general formulas (III-1) to (III-5) according to the purpose In addition, the reaction product of the general formulas (III-1) to (III-5) with the low molecular weight diol containing no carboxylic acid group having a mass average molecular weight of 500 or less is further added to the general formulas (IV-1) to (IV). IV-16), which is obtained by reacting a compound having one epoxy group and at least one (meth) acrylic group in the molecule represented by any one of the molecules, and has an acid value of 20 mgKOH / g to 120 mgK An alkali-soluble photocrosslinkable polyurethane resin that is OH / g is preferred.
前記ポリウレタン樹脂は、上記ジイソシアネート化合物及びジオール化合物を、非プロトン性溶媒中、それぞれの反応性に応じた活性の公知の触媒を添加し、加熱することにより合成される。合成に使用されるジイソシアネート及びジオール化合物のモル比(Ma:Mb)としては、特に制限はなく、目的に応じて適宜選択することができ、1:1~1.2:1が好ましく、アルコール類又はアミン類等で処理することにより、分子量あるいは粘度といった所望の物性の生成物が、最終的にイソシアネート基が残存しない形で合成される。 The polyurethane resin is synthesized by adding the above-mentioned diisocyanate compound and diol compound to an aprotic solvent, and adding a known catalyst having an activity corresponding to the reactivity thereof, followed by heating. The molar ratio (Ma: Mb) of the diisocyanate and diol compound used in the synthesis is not particularly limited and can be appropriately selected according to the purpose, preferably 1: 1 to 1.2: 1, and alcohols Alternatively, by treating with an amine or the like, a product having a desired physical property such as molecular weight or viscosity is synthesized in a form in which no isocyanate group remains finally.
前記ポリウレタン樹脂におけるエチレン性不飽和結合の導入量としては、特に制限はなく、目的に応じて適宜選択することができるが、エチレン性不飽和基当量としては、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.5mmol/gが特に好ましい。更に、前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂には、前記エチレン性不飽和結合基とともに、側鎖にカルボキシル基が導入されていることが好ましい。前記酸価としては、20mgKOH/g~120mgKOH/gが好ましく、30mgKOH/g~110mgKOH/gがより好ましく、35mgKOH/g~100mgKOH/gが特に好ましい。 The amount of ethylenically unsaturated bonds introduced into the polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose. The ethylenically unsaturated group equivalent is 0.05 mmol / g to 3.0 mmol. / G is preferable, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.5 mmol / g is particularly preferable. Furthermore, the polyurethane resin having an ethylenically unsaturated bond in the side chain preferably has a carboxyl group introduced in the side chain together with the ethylenically unsaturated bond group. The acid value is preferably 20 mgKOH / g to 120 mgKOH / g, more preferably 30 mgKOH / g to 110 mgKOH / g, and particularly preferably 35 mgKOH / g to 100 mgKOH / g.
前記側鎖にエチレン性不飽和結合を有するポリウレタン樹脂の分子量としては、特に制限はなく、目的に応じて適宜選択することができるが、質量平均分子量で3、000~60,000が好ましく、3,000~50,000がより好ましく、4,000~30,000が特に好ましい。特に、前記組成物を感光性ソルダーレジストに用いた場合には、無機充填剤との分散性に優れ、クラック耐性と耐熱性にも優れ、アルカリ性現像液による非画像部の現像性に優れる。 The molecular weight of the polyurethane resin having an ethylenically unsaturated bond in the side chain is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3,000 to 60,000 in terms of mass average molecular weight. More preferably, 4,000 to 50,000, particularly preferably 4,000 to 30,000. In particular, when the composition is used for a photosensitive solder resist, it is excellent in dispersibility with an inorganic filler, excellent in crack resistance and heat resistance, and excellent in developability of non-image areas with an alkaline developer.
-カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応して得られるポリウレタン樹脂の合成法-
前記ポリウレタン樹脂の合成方法としては、上記ジイソシアネート化合物及びジオール化合物を非プロトン性溶媒中、それぞれの反応性に応じた活性の公知な触媒を添加し、加熱することにより合成される。使用するジイソシアネート及びジオール化合物のモル比は好ましくは、0.8:1~1.2:1であり、ポリマー末端にイソシアネート基が残存した場合、アルコール類又はアミン類等で処理することにより、最絡的にイソシアネート基が残存しない形で合成される。
-Synthesis of polyurethane resin obtained by reacting carboxyl group-containing polyurethane with compound having epoxy group and ethylenically unsaturated group in molecule-
As a method for synthesizing the polyurethane resin, the diisocyanate compound and the diol compound are synthesized in an aprotic solvent by adding a known catalyst having an activity corresponding to each reactivity and heating. The molar ratio of the diisocyanate and diol compound to be used is preferably 0.8: 1 to 1.2: 1. If an isocyanate group remains at the end of the polymer, the molar ratio can be reduced by treatment with alcohols or amines. It is synthesized in such a way that no isocyanate groups remain entangled.
--ジイソシアネート--
前記一般式(I)で示されるジイソシアネート化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0021〕に記載された化合物、などが挙げられる。
--Diisocyanate--
The diisocyanate compound represented by the general formula (I) is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0021] of JP-A-2007-2030, Etc.
--高分子量ジオール--
前記一般式(III-1)~(III-5)で示される高分子量ジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0022〕~〔0046〕に記載された化合物、などが挙げられる。
--High molecular weight diol--
The high molecular weight diol compound represented by the general formulas (III-1) to (III-5) is not particularly limited and may be appropriately selected depending on the intended purpose. For example, as disclosed in JP-A-2007-2030 And compounds described in paragraphs [0022] to [0046].
--カルボン酸基含有ジオール--
また、前記一般式(II-1)~(II-3)で表されるカルボキシル基を有するジオール化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0047〕に記載された化合物、などが挙げられる。
--Carboxylic acid group-containing diol--
In addition, the diol compound having a carboxyl group represented by the general formulas (II-1) to (II-3) is not particularly limited and may be appropriately selected depending on the intended purpose. And the compounds described in paragraph [0047] of No. 2030 publication.
--カルボン酸基非含有低分子量ジオール--
前記カルボン酸基非含有低分子量ジオールとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0048〕に記載された化合物、などが挙げられる。
前記カルボン酸基非含有ジオールの共重合量としては、低分子量ジオール中の95モル%以下が好ましく、80モル%以下がより好ましく、50モル%以下が特に好ましい。前記共重合量が、95モル%を超えると現像性のよいウレタン樹脂が得られないことがある。
--Low molecular weight diol containing no carboxylic acid groups--
The carboxylic acid group-free low molecular weight diol is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0048] of JP-A-2007-2030. Can be mentioned.
The copolymerization amount of the carboxylic acid group-free diol is preferably 95 mol% or less, more preferably 80 mol% or less, and particularly preferably 50 mol% or less in the low molecular weight diol. When the copolymerization amount exceeds 95 mol%, a urethane resin having good developability may not be obtained.
前記(ii)カルボキシル基含有ポリウレタンと分子中にエポキシ基とエチレン性不飽和基を有する化合物とを反応させて得られるポリウレタン樹脂の具体例としては、例えば、特開2007-2030号公報の段落〔0314〕~〔0315〕に示されたU1~U4、U6~U11のポリマーにおけるエポキシ基及びエチレン性不飽和基含有化合物としてのグリシジルアクリレートを、グリシジルメタクリレート、3,4-エポキシシクロヘキシルメチルアクリレート(商品名:サイクロマーA400、ダイセル化学社製)、3,4-エポキシシクロヘキシルメチルメタクリレート(商品名:サイクロマーM400(ダイセル化学社製))に代えたポリマー、などが挙げられる。 Specific examples of the polyurethane resin obtained by reacting the above (ii) carboxyl group-containing polyurethane with a compound having an epoxy group and an ethylenically unsaturated group in the molecule include, for example, paragraphs of JP-A-2007-2030. 0314] to [0315], glycidyl acrylate as a compound containing an epoxy group and an ethylenically unsaturated group in the polymers U1 to U4 and U6 to U11 is replaced with glycidyl methacrylate, 3,4-epoxycyclohexylmethyl acrylate (trade name). : Cyclomer A400, manufactured by Daicel Chemical Industries, Ltd.), 3,4-epoxycyclohexylmethyl methacrylate (trade name: Cyclomer M400 (produced by Daicel Chemical Industries, Ltd.)), and the like.
--酸変性エチレン性不飽和基含有ポリウレタン樹脂の含有量--
前記酸変性エチレン性不飽和基含有ポリウレタン樹脂の前記シリカ分散組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、5質量%~80質量%が好ましく、10質量%~75質量%がより好ましく、15質量%~70質量%が特に好ましい。
前記含有量が、5質量%未満であると、耐クラック性が良好に保つことができないことがあり、80質量%を超えると、耐熱性が破綻をきたすことがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好な耐クラック性と耐熱性の両立の点で有利である。
-Content of acid-modified ethylenically unsaturated group-containing polyurethane resin-
The content of the acid-modified ethylenically unsaturated group-containing polyurethane resin in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 5% by mass to 80% by mass, 10 mass% to 75 mass% is more preferable, and 15 mass% to 70 mass% is particularly preferable.
If the content is less than 5% by mass, good crack resistance may not be maintained, and if it exceeds 80% by mass, the heat resistance may fail. On the other hand, when the content is within the particularly preferable range, it is advantageous in terms of both good crack resistance and heat resistance.
前記酸変性エチレン性不飽和基含有ポリウレタン樹脂の質量平均分子量としては、特に制限はなく、目的に応じて適宜選択することができるが、3、000~60,000が好ましく、3,000~50,000がより好ましく、4,000~30,000が特に好ましい。前記質量平均分子量が、3,000未満であると、硬化膜の高温時の十分な低弾性率が得られないことがあり、60,000を超えると、塗布適性及び現像性が悪化することがある。
ここで、前記質量平均分子量は、例えば、高速GPC装置(東洋曹達社製、HLC-802A)を使用して、0.5質量%のTHF溶液を試料溶液とし、カラムはTSKgel HZM-M 1本を使用し、200μLの試料を注入し、前記THF溶液で溶離して、25℃で屈折率検出器あるいはUV検出器(検出波長254nm)により測定することができる。次に、標準ポリスチレンで較正した分子量分布曲線より質量平均分子量を求めることができる。
The mass average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 3,000 to 60,000, and preferably 3,000 to 50 Is more preferable, and 4,000 to 30,000 is particularly preferable. When the mass average molecular weight is less than 3,000, a sufficiently low elastic modulus at a high temperature of the cured film may not be obtained, and when it exceeds 60,000, coating suitability and developability may deteriorate. is there.
Here, the mass average molecular weight is determined by using, for example, a high-speed GPC apparatus (manufactured by Toyo Soda Co., Ltd., HLC-802A), a 0.5 mass% THF solution as a sample solution, and a column of one TSKgel HZM-M. 200 μL of sample is injected, eluted with the THF solution, and measured at 25 ° C. with a refractive index detector or UV detector (detection wavelength 254 nm). Next, the mass average molecular weight can be determined from the molecular weight distribution curve calibrated with standard polystyrene.
前記酸変性エチレン性不飽和基含有ポリウレタン樹脂の酸価としては、特に制限はなく、目的に応じて適宜選択することができるが、20mgKOH/g~120mgKOH/gが好ましく、30mgKOH/g~110mgKOH/gがより好ましく、35mgKOH/g~100mgKOH/gが特に好ましい。前記酸価が、20mgKOH/g未満であると、現像性が不十分となることがあり、120mgKOH/gを超えると、現像速度が高すぎるため現像のコントロールが難しくなることがある。
ここで、前記酸価は、例えば、JIS K0070に準拠して測定することができる。ただし、サンプルが溶解しない場合は、溶媒としてジオキサン又はテトラヒドロフランなどを使用する。
The acid value of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 20 mgKOH / g to 120 mgKOH / g, preferably 30 mgKOH / g to 110 mgKOH / g is more preferable, and 35 mgKOH / g to 100 mgKOH / g is particularly preferable. If the acid value is less than 20 mgKOH / g, the developability may be insufficient, and if it exceeds 120 mgKOH / g, the development speed may be too high, and the development control may be difficult.
Here, the said acid value can be measured based on JISK0070, for example. However, if the sample does not dissolve, dioxane or tetrahydrofuran is used as the solvent.
前記酸変性エチレン性不飽和基含有ポリウレタン樹脂のエチレン性不飽和基当量としては、特に制限はなく、目的に応じて適宜選択することができるが、0.05mmol/g~3.0mmol/gが好ましく、0.5mmol/g~2.7mmol/gがより好ましく、0.75mmol/g~2.5mmol/gが特に好ましい。前記エチレン性不飽和基当量が、0.05mmol/g未満であると、硬化膜の耐熱性が劣ることがある。
ここで、前記エチレン性不飽和基当量(代表的にはビニル基当量)は、例えば、臭素価を測定することにより求めることができる。なお、前記臭素価は、例えば、JIS K2605に準拠して測定することができる。臭素価で得られた測定する樹脂100gに対して付加した臭素(Br2)のグラム数(gBr2/100g)から、樹脂1g当たりの付加した臭素(Br2)のモル数に変換した値である。
The ethylenically unsaturated group equivalent of the acid-modified ethylenically unsaturated group-containing polyurethane resin is not particularly limited and may be appropriately selected depending on the intended purpose, but is 0.05 mmol / g to 3.0 mmol / g. Preferably, 0.5 mmol / g to 2.7 mmol / g is more preferable, and 0.75 mmol / g to 2.5 mmol / g is particularly preferable. When the ethylenically unsaturated group equivalent is less than 0.05 mmol / g, the heat resistance of the cured film may be inferior.
Here, the said ethylenically unsaturated group equivalent (typically vinyl group equivalent) can be calculated | required by measuring a bromine number, for example. The bromine number can be measured according to, for example, JIS K2605. Bromine was added to the resin 100g of measurements obtained by bromine number (Br 2) grams of the (gBr 2 / 100g), a value obtained by converting the number of moles of the added bromine (Br 2) per resin 1g is there.
-不飽和基含有ポリカルボン酸樹脂-
前記不飽和基含有ポリカルボン酸樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特許第2877659号公報に記載されたもの、などが挙げられる。
-Unsaturated group-containing polycarboxylic acid resin-
There is no restriction | limiting in particular as said unsaturated group containing polycarboxylic acid resin, According to the objective, it can select suitably, For example, what was described in the patent 2877659 etc. is mentioned.
-酸変性エチレン性不飽和基含有エポキシ樹脂-
前記酸変性エチレン性不飽和基含有エポキシ樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特許第4127010号公報(特開2004-133060号公報)に記載されたもの、などが挙げられる。
-Acid-modified ethylenically unsaturated group-containing epoxy resin-
The acid-modified ethylenically unsaturated group-containing epoxy resin is not particularly limited and may be appropriately selected depending on the intended purpose. For example, it is described in Japanese Patent No. 4127010 (Japanese Patent Laid-Open No. 2004-133060). And so on.
-不飽和基及びカルボキシル基を含有する樹脂-
前記不飽和基及びカルボキシル基を含有する樹脂としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、国際公開第2004/034147号パンフレットに記載されたもの、などが挙げられる。
-Resins containing unsaturated groups and carboxyl groups-
There is no restriction | limiting in particular as resin containing the said unsaturated group and a carboxyl group, According to the objective, it can select suitably, For example, what was described in the international publication 2004/034147 pamphlet etc. are mentioned. .
-ポリイミド前駆体-
前記ポリイミド前駆体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2010-6946号公報に記載されたもの、などが挙げられる。
-Polyimide precursor-
There is no restriction | limiting in particular as said polyimide precursor, According to the objective, it can select suitably, For example, what was described in Unexamined-Japanese-Patent No. 2010-6946 etc. is mentioned.
<重合性化合物>
本発明の組成物は重合性化合物を含有することが好ましい。
重合性化合物としては、特に制限はなく、目的に応じて適宜選択することができ、分子中に少なくとも1個の付加重合可能な基を有し、沸点が常圧で100℃以上である化合物が好ましく、例えば、(メタ)アクリロイル基を有するモノマーから選択される少なくとも1種が好適に挙げられる。なお、この重合性化合物は、先に説明したバインダー樹脂とは異なる化合物で、例えば分子量が1000以下のモノマーもしくはオリゴマー、好ましくはモノマーであることが好ましい。
<Polymerizable compound>
The composition of the present invention preferably contains a polymerizable compound.
The polymerizable compound is not particularly limited and may be appropriately selected depending on the purpose. A compound having at least one addition-polymerizable group in the molecule and having a boiling point of 100 ° C. or higher at normal pressure. Preferable examples include at least one selected from monomers having a (meth) acryloyl group. The polymerizable compound is a compound different from the binder resin described above, and is preferably a monomer or oligomer having a molecular weight of 1000 or less, preferably a monomer.
前記(メタ)アクリロイル基を有するモノマーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、ポリエチレングリコールモノ(メタ)アクリレート、ポリプロピレングリコールモノ(メタ)アクリレート、フェノキシエチル(メタ)アクリレート等の単官能アクリレート;単官能メタクリレート;ポリエチレングリコールジ(メタ)アクリレート、ポリプロピレングリコールジ(メタ)アクリレート、トリメチロールエタントリアクリレート、トリメチロールプロパントリアクリレート、トリメチロールプロパンジアクリレート、ネオペンチルグリコールジ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ペンタエリトリトールトリ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレート、ヘキサンジオールジ(メタ)アクリレート、トリメチロールプロパントリ(アクリロイルオキシプロピル)エーテル、トリ(アクリロイルオキシエチル)イソシアヌレート、トリ(アクリロイルオキシエチル)シアヌレート、グリセリントリ(メタ)アクリレート、トリシクロデカンジメタノール(メタ)アクリレート、トリメチロールプロパン、グリセリン、ビスフェノール等の多官能アルコールに、エチレンオキサイド、プロピレンオキサイドを付加反応した後で(メタ)アクリレート化したもの、特公昭48-41708号公報、特公昭50-6034号公報、特開昭51-37193号公報などの各公報に記載されているウレタンアクリレート類;特開昭48-64183号公報、特公昭49-43191号公報、特公昭52-30490号公報などの各公報に記載されているポリエステルアクリレート類;エポキシ樹脂と(メタ)アクリル酸の反応生成物であるエポキシアクリレート類などの多官能アクリレート及びメタクリレート、などが挙げられる。これらは、1種単独で使用してもよいし、2種以上を併用してもよい。これらの中でも、トリメチロールプロパントリ(メタ)アクリレート、ペンタエリトリトールテトラ(メタ)アクリレート、ジペンタエリトリトールヘキサ(メタ)アクリレート、ジペンタエリトリトールペンタ(メタ)アクリレート、トリシクロデカンジメタノール(メタ)アクリレートが特に好ましい。
重合性化合物としては、アクリロイルオキシ基、メタクリロイルオキシ基を2個以上有するものやトリシクロデカンジメタノール(メタ)アクリレートのように脂環を有する化合物が特に好ましい。
There is no restriction | limiting in particular as a monomer which has the said (meth) acryloyl group, According to the objective, it can select suitably, For example, polyethyleneglycol mono (meth) acrylate, polypropylene glycol mono (meth) acrylate, phenoxyethyl (meta) ) Monofunctional acrylate such as acrylate; Monofunctional methacrylate; Polyethylene glycol di (meth) acrylate, Polypropylene glycol di (meth) acrylate, Trimethylolethane triacrylate, Trimethylolpropane triacrylate, Trimethylolpropane diacrylate, Neopentylglycol di (Meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol Sa (meth) acrylate, dipentaerythritol penta (meth) acrylate, hexanediol di (meth) acrylate, trimethylolpropane tri (acryloyloxypropyl) ether, tri (acryloyloxyethyl) isocyanurate, tri (acryloyloxyethyl) cyanurate , Glycerin tri (meth) acrylate, tricyclodecane dimethanol (meth) acrylate, trimethylolpropane, glycerin, bisphenol and other polyfunctional alcohols after addition reaction of ethylene oxide and propylene oxide to (meth) acrylate Urethane acrylates described in JP-B-48-41708, JP-B-50-6034, JP-A-51-37193, and the like; Polyester acrylates described in various publications such as Kokai 48-64183, JP-B 49-43191, and JP-B 52-30490; reaction products of epoxy resin and (meth) acrylic acid And polyfunctional acrylates and methacrylates such as epoxy acrylates. These may be used individually by 1 type and may use 2 or more types together. Among these, trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) acrylate, and tricyclodecane dimethanol (meth) acrylate are particularly preferable. preferable.
As the polymerizable compound, compounds having two or more acryloyloxy groups and methacryloyloxy groups and compounds having an alicyclic ring such as tricyclodecanedimethanol (meth) acrylate are particularly preferable.
前記重合性化合物の前記シリカ分散組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、2質量%~50質量%が好ましく、3質量%~40質量%がより好ましく、4質量%~35質量%が特に好ましい。
前記含有量が、2質量%未満であると、パターン形成ができないことがあり、50質量%を超えると、耐クラック性が劣ることがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好なパターン形成と耐クラック性とを両立できる点で有利である。
The content of the polymerizable compound in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 2% by mass to 50% by mass, and 3% by mass to 40% by mass. Is more preferable, and 4% by mass to 35% by mass is particularly preferable.
When the content is less than 2% by mass, pattern formation may not be possible, and when it exceeds 50% by mass, crack resistance may be inferior. On the other hand, when the content is within the particularly preferable range, it is advantageous in that both good pattern formation and crack resistance can be achieved.
<光重合開始剤>
本発明に用いられる組成物は光重合開始剤を含有することが好ましい。
光重合開始剤としては、前記重合性化合物の重合を開始する能力を有する限り、特に制限はなく、目的に応じて適宜選択することができ、例えば、ハロゲン化炭化水素誘導体(例えば、トリアジン骨格を有するもの、オキサジアゾール骨格を有するもの)、ホスフィンオキサイド、ヘキサアリールビイミダゾール、オキシム誘導体、有機過酸化物、チオ化合物、ケトン化合物、芳香族オニウム塩、ケトオキシムエーテル、などが挙げられる。
<Photopolymerization initiator>
The composition used in the present invention preferably contains a photopolymerization initiator.
The photopolymerization initiator is not particularly limited as long as it has the ability to initiate polymerization of the polymerizable compound, and can be appropriately selected depending on the purpose. For example, a halogenated hydrocarbon derivative (for example, a triazine skeleton And those having an oxadiazole skeleton), phosphine oxide, hexaarylbiimidazole, oxime derivatives, organic peroxides, thio compounds, ketone compounds, aromatic onium salts, ketoxime ethers, and the like.
前記トリアジン骨格を有するハロゲン化炭化水素化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、若林ら著、Bull.Chem.Soc.Japan,42,2924(1969)に記載された化合物、英国特許1388492号明細書に記載された化合物、特開昭53-133428号公報に記載された化合物、独国特許3337024号明細書に記載された化合物、F.C.SchaeferなどによるJ.Org.Chem.,29,1527(1964)に記載された化合物、特開昭62-58241号公報に記載された化合物、特開平5-281728号公報に記載された化合物、特開平5-34920号公報に記載された化合物、などが挙げられ、前記オキサジアゾール骨格を有するハロゲン化炭化水素化合物としては、例えば、米国特許第4212976号明細書に記載された化合物、などが挙げられる。 The halogenated hydrocarbon compound having a triazine skeleton is not particularly limited and may be appropriately selected depending on the intended purpose. For example, Wakabayashi et al., Bull. Chem. Soc. Japan, 42, 2924 (1969), compounds described in British Patent No. 1388492, compounds described in Japanese Patent Laid-Open No. 53-133428, German Patent No. 3337024 Compounds, F.I. C. J. Schaefer et al. Org. Chem. 29, 1527 (1964), compounds described in JP-A-62-258241, compounds described in JP-A-5-281728, and compounds described in JP-A-5-34920. Examples of the halogenated hydrocarbon compound having an oxadiazole skeleton include the compounds described in US Pat. No. 4,221,976.
前記オキシム誘導体としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0085〕に記載された化合物、などが挙げられる。 The oxime derivative is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0085] of JP-A-2007-2030.
前記ケトン化合物としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0087〕に記載された化合物、などが挙げられる。 The ketone compound is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0087] of Japanese Patent Application Laid-Open No. 2007-2030.
また、上記以外の光重合開始剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0086〕に記載された化合物、などが挙げられる。 The photopolymerization initiator other than the above is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0086] of JP-A-2007-2030. Can be mentioned.
また、後述する感光層への露光における露光感度及び感光波長を調整する目的で、前記光重合開始剤に加えて、増感剤を添加することが可能である。
前記増感剤は、後述する光照射手段としての可視光線、紫外光レーザ、可視光レーザなどにより適宜選択することができる。
前記増感剤は、活性エネルギー線により励起状態となり、他の物質(例えば、ラジカル発生剤、酸発生剤など)と相互作用(例えば、エネルギー移動、電子移動など)することにより、ラジカル、酸などの有用基を発生することが可能である。
In addition to the photopolymerization initiator, a sensitizer can be added for the purpose of adjusting exposure sensitivity and photosensitive wavelength in exposure to the photosensitive layer described later.
The sensitizer can be appropriately selected by a visible light, an ultraviolet laser, a visible laser or the like as a light irradiation means described later.
The sensitizer is excited by active energy rays and interacts with other substances (eg, radical generator, acid generator, etc.) (eg, energy transfer, electron transfer, etc.), thereby causing radicals, acids, etc. It is possible to generate a useful group of
前記増感剤としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2007-2030号公報の段落〔0089〕に記載された化合物、などが挙げられる。 The sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. Examples thereof include compounds described in paragraph [0089] of JP-A-2007-2030.
前記光重合開始剤と前記増感剤との組合せとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、特開2001-305734号公報に記載の電子移動型開始系[(1)電子供与型開始剤及び増感色素、(2)電子受容型開始剤及び増感色素、(3)電子供与型開始剤、増感色素及び電子受容型開始剤(三元開始系)]などの組合せが挙げられる。 The combination of the photopolymerization initiator and the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, an electron transfer type initiation system described in JP-A-2001-305734 [ (1) Electron donating initiator and sensitizing dye, (2) Electron accepting initiator and sensitizing dye, (3) Electron donating initiator, sensitizing dye and electron accepting initiator (ternary initiation system) ] Etc. are mentioned.
前記増感剤の含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、前記シリカ分散組成物中の全成分に対し、0.05質量%~30質量%が好ましく、0.1質量%~20質量%がより好ましく、0.2質量%~10質量%が特に好ましい。前記含有量が、0.05質量%未満であると、活性エネルギー線への感度が低下し、露光プロセスに時間がかかり、生産性が低下することがあり、30質量%を超えると、保存時に前記感光層から前記増感剤が析出してしまうことがある。 The content of the sensitizer is not particularly limited and may be appropriately selected depending on the intended purpose. It is preferably 0.05% by mass to 30% by mass with respect to all components in the silica dispersion composition. 0.1 mass% to 20 mass% is more preferable, and 0.2 mass% to 10 mass% is particularly preferable. When the content is less than 0.05% by mass, the sensitivity to active energy rays decreases, the exposure process takes time, and the productivity may be reduced. The sensitizer may be precipitated from the photosensitive layer.
前記光重合開始剤は、1種単独で使用してもよく、2種以上を併用してもよい。
前記光重合開始剤の特に好ましい例としては、ホスフィンオキサイド類、前記α-アミノアルキルケトン類、前記トリアジン骨格を有するハロゲン化炭化水素化合物と後述する増感剤としてのアミン化合物とを組合せた複合光開始剤、ヘキサアリールビイミダゾール化合物、あるいは、チタノセン、などが挙げられる。
The said photoinitiator may be used individually by 1 type, and may use 2 or more types together.
Particularly preferred examples of the photopolymerization initiator include composite light in which phosphine oxides, the α-aminoalkyl ketones, the halogenated hydrocarbon compound having the triazine skeleton and an amine compound as a sensitizer described later are combined. Examples thereof include an initiator, a hexaarylbiimidazole compound, and titanocene.
前記光重合開始剤の前記シリカ分散組成物における含有量としては、特に制限はなく、目的に応じて適宜選択することができるが、0.5質量%~20質量%が好ましく、0.5質量%~15質量%がより好ましく、1質量%~10質量%が特に好ましい。
前記含有量が、0.5質量%未満であると、露光部が現像中に溶出する傾向があり、20質量%を超えると、耐熱性が低下することがある。一方、前記含有量が、前記特に好ましい範囲内であると、良好なパターン形成ができ、耐熱性も良好になる点で有利である。
The content of the photopolymerization initiator in the silica dispersion composition is not particularly limited and may be appropriately selected depending on the intended purpose, but is preferably 0.5% by mass to 20% by mass, and preferably 0.5% by mass. % To 15% by mass is more preferable, and 1% to 10% by mass is particularly preferable.
When the content is less than 0.5% by mass, the exposed portion tends to be eluted during development, and when it exceeds 20% by mass, the heat resistance may be lowered. On the other hand, when the content is within the particularly preferable range, it is advantageous in that a good pattern can be formed and heat resistance is also improved.
<その他の成分>
本発明に用いられる組成物はその他の成分を含んでもよい。
このような成分としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、熱可塑性エラストマー、フィラー、熱硬化促進剤、熱重合禁止剤、可塑剤、着色剤(着色顔料あるいは染料)などが挙げられ、更に基材表面への密着促進剤、又はその他の助剤類(例えば、導電性粒子、充填剤、消泡剤、難燃剤、レベリング剤、剥離促進剤、酸化防止剤、香料、表面張力調整剤、連鎖移動剤など)を併用してもよい。
これらの成分を適宜含有させることにより、目的とする感光性フィルムの安定性、写真性、膜物性などの性質を調整することができる。
<Other ingredients>
The composition used in the present invention may contain other components.
Such a component is not particularly limited and may be appropriately selected depending on the purpose. For example, a thermoplastic elastomer, a filler, a thermosetting accelerator, a thermal polymerization inhibitor, a plasticizer, a colorant (color pigment or Dyes) and the like, and further adhesion promoters to the substrate surface, or other auxiliary agents (for example, conductive particles, fillers, antifoaming agents, flame retardants, leveling agents, peeling accelerators, antioxidants). , Fragrance, surface tension adjusting agent, chain transfer agent, etc.) may be used in combination.
By appropriately containing these components, properties such as the stability, photographic properties, and film properties of the intended photosensitive film can be adjusted.
前記熱可塑性エラストマーとしては、特に制限はなく、目的に応じて適宜選択することができ、例えば、スチレン系エラストマー、オレフィン系エラストマー、ウレタン系エラストマー、ポリエステル系エラストマー、ポリアミド系エラストマー、アクリル系エラストマー、及びシリコーン系エラストマー、などが挙げられる。
これらのエラストマーは、ハードセグメント成分とソフトセグメント成分から成り立っており、一般に前者が耐熱性、強度に、後者が柔軟性、強靭性に寄与している。
前記熱可塑性エラストマーとしては、特開2007-199532号公報の段落〔0197〕~〔0207〕に記載されている。
前記フィラーについては、例えば、特開2008-250074号公報の段落〔0098〕~〔0099〕に詳細に記載されている。
前記熱重合禁止剤については、例えば、特開2008-250074号公報の段落〔0101〕~〔0102〕に詳細に記載されている。
前記熱硬化促進剤については、例えば、特開2008-250074号公報の段落〔0093〕に詳細に記載されている。
前記可塑剤については、例えば、特開2008-250074号公報の段落〔0103〕~〔0104〕に詳細に記載されている。
前記着色剤については、例えば、特開2008-250074号公報の段落〔0105〕~〔0106〕に詳細に記載されている。
前記密着促進剤については、例えば、特開2008-250074号公報の段落〔0107〕~〔0109〕に詳細に記載されている。
The thermoplastic elastomer is not particularly limited and may be appropriately selected depending on the intended purpose. For example, styrene elastomer, olefin elastomer, urethane elastomer, polyester elastomer, polyamide elastomer, acrylic elastomer, and Examples include silicone elastomers.
These elastomers are composed of a hard segment component and a soft segment component. In general, the former contributes to heat resistance and strength, and the latter contributes to flexibility and toughness.
The thermoplastic elastomer is described in paragraphs [0197] to [0207] of JP-A-2007-199532.
The filler is described in detail in, for example, paragraphs [0098] to [0099] of JP-A-2008-250074.
The thermal polymerization inhibitor is described in detail, for example, in paragraphs [0101] to [0102] of JP-A-2008-250074.
The thermosetting accelerator is described in detail, for example, in paragraph [0093] of JP-A-2008-250074.
The plasticizer is described in detail, for example, in paragraphs [0103] to [0104] of JP-A-2008-250074.
The colorant is described in detail, for example, in paragraphs [0105] to [0106] of JP-A-2008-250074.
The adhesion promoter is described in detail, for example, in paragraphs [0107] to [0109] of JP-A-2008-250074.
(感光性フィルム)
本発明に用いられる組成物は、導体配線の形成された基板上に塗布乾燥することにより液状レジストとしても使用可能であるが、感光性フィルムの製造に特に有用である。
前記感光性フィルムは、少なくとも支持体と、感光層とを有してなり、好ましくは保護フィルムを有してなり、更に必要に応じて、クッション層、酸素遮断層(以下、PC層と省略する)などのその他の層を有してなる。
前記感光性フィルムの形態としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記支持体上に、前記感光層、及び前記保護膜フィルムをこの順に有してなる形態、前記支持体上に、前記PC層、前記感光性層、及び前記保護フィルムをこの順に有してなる形態、前記支持体上に、前記クッション層、前記PC層、前記感光層、及び前記保護フィルムをこの順に有してなる形態、などが挙げられる。なお、前記感光層は、単層であってもよいし、複数層であってもよい。
(Photosensitive film)
The composition used in the present invention can be used as a liquid resist by coating and drying on a substrate on which a conductor wiring is formed, but is particularly useful for the production of a photosensitive film.
The photosensitive film has at least a support and a photosensitive layer, preferably has a protective film, and further, if necessary, a cushion layer, an oxygen barrier layer (hereinafter abbreviated as PC layer). ) And other layers.
There is no restriction | limiting in particular as a form of the said photosensitive film, According to the objective, it can select suitably, For example, the form which has the said photosensitive layer and the said protective film in this order on the said support body. The PC layer, the photosensitive layer, and the protective film are provided in this order on the support, and the cushion layer, the PC layer, the photosensitive layer, and the protection are provided on the support. The form which has a film in this order, etc. are mentioned. The photosensitive layer may be a single layer or a plurality of layers.
<感光層>
前記感光層は、本発明の前記シリカ分散組成物から形成される。
前記感光層の70℃における溶融粘度としては、1.4×103Pa・s以下が好ましく、1.0×103Pa・s以下がより好ましく、6.0×102Pa・s以下が更に好ましい。
前記感光層の70℃における溶融粘度が、1.4×103Pa・sを超えると、埋め込み性が悪化することがあり、前記70℃における溶融粘度が、より好ましい範囲であると、埋め込み性が充分得られる点で有利である。
前記感光層の30℃における溶融粘度としては、1.0×104Pa・s以上が好ましく、1.3×104Pa・s以上がより好ましく、3.0×104Pa・s以上が更に好ましい。
前記感光層の30℃における溶融粘度が、1.0×104Pa・s未満であると、エッジヒュージョンが悪化することがあり、前記30℃における溶融粘度が、より好ましい範囲であると、埋め込み性とエッジヒュージョンを両立できる点で有利である。
<Photosensitive layer>
The photosensitive layer is formed from the silica dispersion composition of the present invention.
The melt viscosity at 70 ° C. of the photosensitive layer is preferably 1.4 × 10 3 Pa · s or less, more preferably 1.0 × 10 3 Pa · s or less, and 6.0 × 10 2 Pa · s or less. Further preferred.
When the melt viscosity at 70 ° C. of the photosensitive layer exceeds 1.4 × 10 3 Pa · s, the embedding property may be deteriorated, and when the melt viscosity at 70 ° C. is in a more preferable range, the embedding property is deteriorated. Is advantageous in that it is sufficiently obtained.
The melt viscosity at 30 ° C. of the photosensitive layer is preferably 1.0 × 10 4 Pa · s or more, more preferably 1.3 × 10 4 Pa · s or more, and 3.0 × 10 4 Pa · s or more. Further preferred.
If the melt viscosity at 30 ° C. of the photosensitive layer is less than 1.0 × 10 4 Pa · s, edge fusion may be deteriorated, and if the melt viscosity at 30 ° C. is in a more preferable range, embedding is performed. It is advantageous in that it can be compatible with edge fusion.
ここで、前記感光層の溶融粘度の測定は、例えば、レオメーター・VAR-1000型(レオロジカル株式会社製)、バイブロン・DD-III型(東洋ボールドウイン株式会社製)などの溶融粘度測定装置を用いて測定することができる。詳細は、特開2007-2030号公報の段落「0115」~段落「0127」に記載された通りである。 Here, the melt viscosity of the photosensitive layer is measured by, for example, a melt viscosity measuring device such as a rheometer VAR-1000 type (manufactured by Rheological Co., Ltd.), Vibron DD-III type (manufactured by Toyo Baldwin Co., Ltd.) or the like. Can be measured. The details are as described in paragraphs “0115” to “0127” of Japanese Patent Application Laid-Open No. 2007-2030.
<永久パターン及び永久パターン形成方法>
本発明で用いられる永久パターンは、前記永久パターン形成方法により得られる。
前記永久パターンとしては、特開2007-2030号公報の段落〔0128〕~〔0283〕に記載されている。
<Permanent pattern and permanent pattern forming method>
The permanent pattern used in the present invention is obtained by the permanent pattern forming method.
The permanent pattern is described in paragraphs [0128] to [0283] of Japanese Patent Application Laid-Open No. 2007-2030.
<プリント基板>
本発明で用いられるプリント基板は、少なくとも基体と、前記永久パターン形成方法により形成された永久パターンとを有してなり、更に必要に応じて適宜選択した、その他の構成を有してなる。
その他の構成としては、特に制限はなく、目的に応じて適宜選択することができ、例えば、前記基体と前記永久パターン間に、更に絶縁層が設けられたビルドアップ基板などが挙げられる。
<Printed circuit board>
The printed board used in the present invention has at least a base and a permanent pattern formed by the permanent pattern forming method, and further has other configurations appropriately selected as necessary.
There is no restriction | limiting in particular as another structure, According to the objective, it can select suitably, For example, the buildup board | substrate etc. in which the insulating layer was further provided between the said base | substrate and the said permanent pattern are mentioned.
以下、本発明の実施例を説明するが、本発明は、これらの実施例に何ら限定されるものではない。 Examples of the present invention will be described below, but the present invention is not limited to these examples.
-ポリウレタンバインダーの合成-
下記酸変性エチレン性不飽和基含有ポリウレタン樹脂を合成した。
-Synthesis of polyurethane binder-
The following acid-modified ethylenically unsaturated group-containing polyurethane resin was synthesized.
<酸変性エチレン性不飽和基含有ポリウレタン樹脂PU1の合成と樹脂溶液の調整>
コンデンサー、及び撹拌機を備えた1Lの3つ口丸底フラスコに、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)9.6g、グリセロールモノメタクリレート(GLM)29.6、リンゴ酸4.0gをシクロヘキサノン76gに溶解した。これに、4,4-ジフェニルメタンジイソシアネート(MDI)50.1g、ヘキサメチレンジイソシアネート(HMDI)8.4g、2,6-ジ-t-ブチルヒドロキシトルエン0.3g、及び触媒として、商品名:ネオスタンU-600(日東化成社製、無機ビスマス)0.3gをシクロヘキサノン77gと共に添加し、75℃にて、5時間加熱撹拌した。
酸変性エチレン性不飽和基含有ポリウレタン樹脂PU1の質量平均分子量は12000であった。固形分の酸価は68.9mmol/gであり、固形分のエチレン性不飽和基当量は1.82であった。
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin PU1 and adjustment of resin solution>
To a 1 L 3-neck round bottom flask equipped with a condenser and a stirrer, 9.6 g of 2,2-bis (hydroxymethyl) butyric acid (DMBA), 29.6 of glycerol monomethacrylate (GLM), 4.0 g of malic acid Was dissolved in 76 g of cyclohexanone. To this, 50.1 g of 4,4-diphenylmethane diisocyanate (MDI), 8.4 g of hexamethylene diisocyanate (HMDI), 0.3 g of 2,6-di-t-butylhydroxytoluene, and as a catalyst, trade name: Neostan U 0.3 g of −600 (manufactured by Nitto Kasei Co., Ltd., inorganic bismuth) was added together with 77 g of cyclohexanone, and the mixture was heated and stirred at 75 ° C. for 5 hours.
The mass average molecular weight of the acid-modified ethylenically unsaturated group-containing polyurethane resin PU1 was 12,000. The acid value of the solid content was 68.9 mmol / g, and the ethylenically unsaturated group equivalent of the solid content was 1.82.
<酸変性エチレン性不飽和基含有ポリウレタン樹脂PU2の合成と樹脂溶液の調整>
上記酸変性エチレン性不飽和基含有ポリウレタン樹脂PU1の合成において、2,2-ビス(ヒドロキシメチル)酪酸(DMBA)、グリセロールモノメタクリレート(GLM)、4,4-ジフェニルメタンジイソシアネート(MDI)、ヘキサメチレンジイソシアネート(HMDI)を使用し、リンゴ酸を抜き、これらの添加量を変更することで、上記酸変性エチレン性不飽和基含有ポリウレタン樹脂PU1と同様に変性エチレン性不飽和基含有ポリウレタン樹脂PU2を合成した。
酸変性エチレン性不飽和基含有ポリウレタン樹脂PU2の質量平均分子量は13000であり、固形分の酸価は63.3mmol/gであり、固形分のエチレン性不飽和基当量は1.46であった。
<Synthesis of acid-modified ethylenically unsaturated group-containing polyurethane resin PU2 and adjustment of resin solution>
In the synthesis of the acid-modified ethylenically unsaturated group-containing polyurethane resin PU1, 2,2-bis (hydroxymethyl) butyric acid (DMBA), glycerol monomethacrylate (GLM), 4,4-diphenylmethane diisocyanate (MDI), hexamethylene diisocyanate (HMDI) was used, malic acid was removed, and these addition amounts were changed to synthesize modified ethylenically unsaturated group-containing polyurethane resin PU2 in the same manner as acid-modified ethylenically unsaturated group-containing polyurethane resin PU1. .
The acid-modified ethylenically unsaturated group-containing polyurethane resin PU2 had a mass average molecular weight of 13,000, a solid content acid value of 63.3 mmol / g, and a solid content ethylenically unsaturated group equivalent of 1.46. .
-アクリル樹脂分散剤の合成-
<マクロモノマーの合成>
ε-カプロラクトン250g、2-エチルヘキサノール14.3g、モノブチルすずオキシド0.125gを500mLの3つ口丸底フラスコに入れ、90℃で4時間撹拌し、110℃で4時間撹拌した後、80℃に温度を下げ、昭和電工(株)性MOI 17.3g、2,6-ジ-t-ブチルヒドロキシトルエン0.07gを入れ、2時間撹拌した。シクロへキサノン650gで希釈し、ポリエステルマクロモノマーを得た。マクロモノマーの分子量はMn3100であった。
-Synthesis of acrylic resin dispersant-
<Synthesis of macromonomer>
250 g of ε-caprolactone, 14.3 g of 2-ethylhexanol, and 0.125 g of monobutyltin oxide were placed in a 500 mL three-necked round bottom flask, stirred at 90 ° C. for 4 hours, stirred at 110 ° C. for 4 hours, and then heated to 80 ° C. The temperature was lowered, and 17.3 g of Showa Denko MOI MOI and 0.07 g of 2,6-di-t-butylhydroxytoluene were added and stirred for 2 hours. Dilution with 650 g of cyclohexanone gave a polyester macromonomer. The molecular weight of the macromonomer was Mn3100.
<分散剤P-4の合成>
三つ口フラスコにシクロヘキサノン36gを入れた後、メタクリル酸 2-(ジメチルアミノ)エチルエステル21.6g、メタクリル酸8.0g、メタクリル酸メチル17.6g、マクロモノマー溶液109g、Dimethyl 2,2’-Azobis(isobutyrate)1.28g、3-メルカプトプロピオン酸 2-エチルへキシルエステル3.2gを混合した液を80℃、窒素気流下に、1時間半かけて滴下し、3時間撹拌した後、シクロヘキサノン200gを加え、分散剤溶液P-4を得た。
分散剤溶液P-4における例示ポリマーP-4の固形分濃度は20%である。
<Synthesis of Dispersant P-4>
After adding 36 g of cyclohexanone to a three-necked flask, 21.6 g of methacrylic acid 2- (dimethylamino) ethyl ester, 8.0 g of methacrylic acid, 17.6 g of methyl methacrylate, 109 g of a macromonomer solution, Dimethyl 2,2'- A solution obtained by mixing 1.28 g of Azobis (isobutyrate) and 3.2 g of 3-mercaptopropionic acid 2-ethylhexyl ester was added dropwise at 80 ° C. in a nitrogen stream over 1 hour and a half, followed by stirring for 3 hours, and then cyclohexanone. 200 g was added to obtain a dispersant solution P-4.
The solid content concentration of the exemplified polymer P-4 in the dispersant solution P-4 is 20%.
<分散剤P-11の合成>
三つ口フラスコにシクロヘキサノン36gを入れた後、メタクリル酸 2-(ジメチルアミノ)エチルエステル30.4g、メタクリル酸8.0g、メタクリル酸メチル8.8g、東亜合成(株)製マクロモノマーAS-6 32.8g、Dimethyl 2,2’-Azobis(isobutyrate)1.28g、3-メルカプトプロピオン酸 2-エチルへキシルエステル3.2g、シクロヘキサノン78gを混合した液を80℃、窒素気流下に、1時間半かけて滴下し、3時間撹拌した後、シクロヘキサノン200gを加え、分散剤溶液P-11を得た。
分散剤溶液P-11における例示ポリマーP-11の固形分濃度は20%である。
<Synthesis of Dispersant P-11>
After adding 36 g of cyclohexanone to a three-necked flask, 30.4 g of methacrylic acid 2- (dimethylamino) ethyl ester, 8.0 g of methacrylic acid, 8.8 g of methyl methacrylate, Macromonomer AS-6 manufactured by Toa Gosei Co., Ltd. 32.8 g, Dimethyl 2,2′-Azobis (isobutyrate) 1.28 g, 3-mercaptopropionic acid 2-ethylhexyl ester 3.2 g, and cyclohexanone 78 g were mixed at 80 ° C. under nitrogen stream for 1 hour. After dropwise addition over half and stirring for 3 hours, 200 g of cyclohexanone was added to obtain a dispersant solution P-11.
The solid content concentration of the exemplified polymer P-11 in the dispersant solution P-11 is 20%.
例示ポリマーP-5、P-6およびP-7も上記と同様の方法で合成した。分散溶液におけるこれらのポリマーの固形分濃度は20%である。
<エラストマーE-1の合成>
テレフタル酸ジメチル699質量部、イソフタル酸ジメチル524質量部、アジピン酸ジメチル226質量部、セバシン酸ジメチル553質量部、2,2-ジメチルプロパンジオール417質量部、ブタンジオール324質量部、エチレングリコール769質量部、酸化防止剤として、イルガノックス1330(チバジャパン株式会社製)2質量部、及びテトラブチルチタネート0.9質量部を反応器内で混合させ、攪拌下室温から260℃まで2時間かけて昇温し、その後260℃で1時間加熱しエステル交換反応を行った。次いで、反応器内を徐々に減圧にすると共に昇温し、30分間かけて245℃、0.5~2torrにして初期重縮合反応を行った。更に、245℃、0.5~2torrの状態で4時間重合反応を行った後、乾燥窒素を導入しながら30分間かけて常圧へ戻し、ポリエステルをペレット状に取り出し、ポリエステル樹脂E-1を得た。得られたポリエステル樹脂E-1をプロピレングリコールモノメチルエーテルアセテートにて60質量%の固形分濃度となるように希釈溶解し、ポリエステル樹脂E-1溶液を得た。
得られたポリエステル樹脂E-1のゲルパーミエーションクロマトグラフィーにて測定した質量平均分子量(ポリスチレン標準)は3.4万であった。
Exemplified polymers P-5, P-6 and P-7 were also synthesized by the same method as described above. The solids concentration of these polymers in the dispersion is 20%.
<Synthesis of Elastomer E-1>
699 parts by weight of dimethyl terephthalate, 524 parts by weight of dimethyl isophthalate, 226 parts by weight of dimethyl adipate, 553 parts by weight of dimethyl sebacate, 417 parts by weight of 2,2-dimethylpropanediol, 324 parts by weight of butanediol, 769 parts by weight of ethylene glycol As an antioxidant, 2 parts by mass of Irganox 1330 (manufactured by Ciba Japan Co., Ltd.) and 0.9 parts by mass of tetrabutyl titanate were mixed in the reactor, and the temperature was raised from room temperature to 260 ° C. over 2 hours with stirring. Then, the mixture was heated at 260 ° C. for 1 hour to conduct a transesterification reaction. Next, the pressure in the reactor was gradually reduced and the temperature was raised, and an initial polycondensation reaction was performed at 245 ° C. and 0.5 to 2 torr over 30 minutes. Further, after carrying out the polymerization reaction at 245 ° C. and 0.5 to 2 torr for 4 hours, the pressure was returned to normal pressure over 30 minutes while introducing dry nitrogen, and the polyester was taken out into pellets to obtain polyester resin E-1. Obtained. The obtained polyester resin E-1 was diluted and dissolved in propylene glycol monomethyl ether acetate to a solid content concentration of 60% by mass to obtain a polyester resin E-1 solution.
The obtained polyester resin E-1 had a mass average molecular weight (polystyrene standard) measured by gel permeation chromatography was 34,000.
<アミン価の測定方法>
各シリカ分散剤0.7gを100mLビーカーにはかりとり、酢酸60mLを加え、撹拌して溶解させた。測定温度を25℃に調整後、滴定試薬として0.1N過塩素酸酢酸を用いて、滴定装置で滴定し、アミン価を測定した。
<Method of measuring amine value>
0.7 g of each silica dispersant was weighed into a 100 mL beaker, and 60 mL of acetic acid was added and dissolved by stirring. After adjusting measurement temperature to 25 degreeC, it titrated with the titration apparatus using 0.1N perchloric acid acetic acid as a titration reagent, and measured the amine titer.
<酸価の測定>
各シリカ分散剤0.7gを100mLビーカーにはかりとり、THF/水=5/1(体積比)の溶液60mLを加え、撹拌して溶解させた。測定温度を25℃に調整した後、滴定試薬として0.1NのNaOH水溶液を用いて、滴定装置で滴定し、酸価を測定した。
<Measurement of acid value>
0.7 g of each silica dispersant was weighed into a 100 mL beaker, and 60 mL of a solution of THF / water = 5/1 (volume ratio) was added and dissolved by stirring. After adjusting measurement temperature to 25 degreeC, it titrated with the titration apparatus using 0.1N NaOH aqueous solution as a titration reagent, and the acid value was measured.
実施例1
-シリカ分散組成物溶液の組成-
上記で合成したポリウレタンバインダー樹脂溶液PU1(40%)
32.3質量部
着色顔料:HELIOGEN BLUE D7086(BASF社製)
0.021質量部
着色顔料:Pariotol Yellow D0960(BASF社製)
0.006質量部
分散剤:分散剤P-11溶液 0.22質量部
重合性化合物:DCP-A(共栄社化学社製) 5.3質量部
開始剤:イルガキュア907(BASF(株)製) 0.6質量部
増感剤:DETX-S(日本化薬株式会社製) 0.005質量部
反応助剤:EAB-F(保土ヶ谷化学(株)製) 0.019質量部
硬化剤:メラミン(和光純薬製) 0.16質量部
熱架橋剤:エポトートYDF-170(東都化成(株)製)2.9質量部
フィラー:SO-C2(アドマテックス社製) 16.0質量部
イオントラップ剤:IXE-6107(東亞合成製) 0.82質量部
塗布助剤:メガファックF-780F 0.2質量部
(大日本インキ(株)製:30質量%メチルエチルケトン溶液)
エラストマーE-1 2.7質量部
シクロヘキサノン(溶媒) 38.7質量部
Example 1
-Composition of silica dispersion composition solution-
Polyurethane binder resin solution PU1 synthesized above (40%)
32.3 parts by mass Coloring pigment: HELIOGEN BLUE D7086 (manufactured by BASF)
0.021 parts by mass Coloring pigment: Pariotol Yellow D0960 (manufactured by BASF)
0.006 parts by mass Dispersant: Dispersant P-11 solution 0.22 parts by mass Polymerizable compound: DCP-A (manufactured by Kyoeisha Chemical Co., Ltd.) 5.3 parts by mass Initiator: Irgacure 907 (manufactured by BASF Corporation) 0 .6 parts by mass Sensitizer: DETX-S (Nippon Kayaku Co., Ltd.) 0.005 parts by mass Reaction aid: EAB-F (manufactured by Hodogaya Chemical Co., Ltd.) 0.019 parts by mass Curing agent: Melamine (Japanese) 0.16 parts by mass Thermal crosslinking agent: Epototo YDF-170 (manufactured by Toto Kasei Co., Ltd.) 2.9 parts by mass Filler: SO-C2 (manufactured by Admatechs) 16.0 parts by mass Ion trap agent: IXE-6107 (manufactured by Toagosei Co., Ltd.) 0.82 parts by weight Coating aid: 0.2 parts by weight of MegaFuck F-780F (Dainippon Ink Co., Ltd .: 30% by weight methyl ethyl ketone solution)
Elastomer E-1 2.7 parts by mass Cyclohexanone (solvent) 38.7 parts by mass
-感光性フィルムの製造-
支持体としての厚み16μmのポリエチレンテレフタレートフィルム(東レ株式会社製、16FB50)上に、上記の組成からなるシリカ分散組成物溶液を塗布し、乾燥させて、前記支持体上に厚み30μmの感光層を形成した。前記感光層上に、保護層として厚み20μmのポリプロピレンフィルム(王子特殊紙株式会社製、アルファンE-200)を積層し、感光性フィルムを製造した。
-Production of photosensitive film-
A silica dispersion composition solution having the above composition is applied onto a polyethylene terephthalate film (16FB50, manufactured by Toray Industries, Inc.) having a thickness of 16 μm as a support, and dried to form a photosensitive layer having a thickness of 30 μm on the support. Formed. On the photosensitive layer, a 20 μm-thick polypropylene film (manufactured by Oji Specialty Paper Co., Ltd., Alphan E-200) was laminated as a protective layer to produce a photosensitive film.
-基体への積層-
前記基体として、銅張積層板(スルーホールなし、銅厚み12μm)の表面に化学研磨処理を施して調製した。該銅張積層板上に、前記感光性フィルムの感光層が前記銅張積層板に接するようにして前記感光性フィルムにおける保護フィルムを剥がしながら、真空ラミネータ(ニチゴーモートン株式会社製、VP130)を用いて積層させ、前記銅張積層板と、前記感光層と、前記ポリエチレンテレフタレートフィルム(支持体)とがこの順に積層された積層体を調製した。
圧着条件は、真空引きの時間40秒、圧着温度70℃、圧着圧力0.2MPa、加圧時間10秒とした。
-Lamination on substrate-
The substrate was prepared by subjecting a surface of a copper clad laminate (no through hole, copper thickness: 12 μm) to chemical polishing. A vacuum laminator (manufactured by Nichigo Morton Co., Ltd., VP130) was used on the copper-clad laminate while peeling off the protective film from the photosensitive film so that the photosensitive layer of the photosensitive film was in contact with the copper-clad laminate. Thus, a laminate in which the copper-clad laminate, the photosensitive layer, and the polyethylene terephthalate film (support) were laminated in this order was prepared.
The pressure bonding conditions were a vacuum drawing time of 40 seconds, a pressure bonding temperature of 70 ° C., a pressure bonding pressure of 0.2 MPa, and a pressure application time of 10 seconds.
得られた各感光性フィルム及び積層体について、以下のようにして、溶融粘度、埋め込み性、現像性(未露光部)、絶縁性、及び耐熱衝撃性(TCT)の評価を行った。結果を下記表1に示す。 Each of the obtained photosensitive films and laminates was evaluated for melt viscosity, embedding property, developability (unexposed portion), insulating property, and thermal shock resistance (TCT) as follows. The results are shown in Table 1 below.
<溶融粘度の測定>
ここでは、各感光性フィルムについて、レオメーター・VAR-1000型(レオロジカル株式会社製)を用いて、下記条件により溶融粘度の測定を行った。
-溶融粘度の測定条件-
直径20mmのプレートを用い歪0.005、周波数1Hzで溶融粘弾性を測定した。温度範囲を25℃~85℃とし、5℃/分の昇温速度で測定を行った。なお、表1中の溶融粘度は、70℃での値を示す。
<Measurement of melt viscosity>
Here, the melt viscosity of each photosensitive film was measured using a rheometer VAR-1000 type (manufactured by Rheological Co., Ltd.) under the following conditions.
-Measurement conditions of melt viscosity-
Melt viscoelasticity was measured using a plate having a diameter of 20 mm at a strain of 0.005 and a frequency of 1 Hz. The temperature range was 25 ° C. to 85 ° C., and the measurement was performed at a rate of temperature increase of 5 ° C./min. In addition, the melt viscosity in Table 1 shows a value at 70 ° C.
<埋め込み性の評価>
L/S(ライン/スペース)=50μm/50μmの配線パターン間への感光層の埋め込み状態を、光学顕微鏡を用いて50倍~200倍の倍率で観察し、下記基準に基づいて評価した。
〔評価基準〕
A:感光性フィルムが、前記パターン回路とベースフィルムとの段差を埋め込み、前記感光性フィルムと前記回路付き銅張り積層板との間に隙間ができていない場合
B:前記感光性フィルムと上記回路付き銅張り積層板との間に隙間が生じている場合、又はパターン回路と感光性積層体との間に空気の泡等が生じている場合
C:溶融粘度が高すぎてラミネートできない場合
<Evaluation of embeddability>
The embedded state of the photosensitive layer between the wiring patterns of L / S (line / space) = 50 μm / 50 μm was observed at a magnification of 50 to 200 times using an optical microscope and evaluated based on the following criteria.
〔Evaluation criteria〕
A: When the photosensitive film embeds a step between the pattern circuit and the base film, and no gap is formed between the photosensitive film and the copper-clad laminate with circuit B: The photosensitive film and the circuit When there is a gap between the laminated copper-clad laminate or when air bubbles are generated between the pattern circuit and the photosensitive laminate C: When the melt viscosity is too high to laminate
<現像性の評価>
前記感光性積層体を室温(23℃)で55%RHにて10分間静置した。得られた感光性積層体のポリエチレンテレフタレートフィルム(支持体)上から、回路基板用露光機EXM-1172(オーク製作所製)を用いて、直径の幅50μm~200μmの丸穴パターンを有するフォトマスク越しに40mJ/cm2で露光を行った。
この際の露光量は、前記感度の評価における前記感光性フィルムの感光層を硬化させるために必要な光エネルギー量である。室温にて10分間静置した後、前記感光性積層体からポリエチレンテレフタレートフィルム(支持体)を剥がし取った。
銅張積層板上の感光層の全面に、前記現像液として30℃の1質量%炭酸ナトリウム水溶液をスプレー圧0.15MPaにて前記最短現像時間の2倍の時間スプレーし、未硬化領域を溶解除去した。
このようにして得られた硬化樹脂パターン付き銅張積層板の表面を光学顕微鏡で観察し、パターンの丸穴底部に残渣が無いこと、パターン部の捲くれ・剥がれなどの異常が無く、かつスペース形成可能な最小の丸穴パターン幅を測定し、これを解像度とし、下記基準で評価した。該解像度は数値が小さいほど良好である。
〔現像性の評価基準〕
現像時間:最短現像時間を目視で評価した。
残渣については、以下の基準で評価した。
A:残渣なし
B:若干壁及び底面に残渣が見られる
C:残渣が明確に見られる
<Development evaluation>
The photosensitive laminate was allowed to stand at 55% RH for 10 minutes at room temperature (23 ° C.). From the obtained photosensitive laminate polyethylene terephthalate film (support), using a circuit board exposure machine EXM-1172 (manufactured by Oak Manufacturing Co., Ltd.) through a photomask having a round hole pattern with a diameter of 50 μm to 200 μm. The film was exposed at 40 mJ / cm 2 .
The exposure amount at this time is the amount of light energy necessary for curing the photosensitive layer of the photosensitive film in the sensitivity evaluation. After standing at room temperature for 10 minutes, the polyethylene terephthalate film (support) was peeled off from the photosensitive laminate.
The entire surface of the photosensitive layer on the copper clad laminate is sprayed with a 1% by weight sodium carbonate aqueous solution at 30 ° C. as the developer at a spray pressure of 0.15 MPa for twice the shortest development time to dissolve the uncured region. Removed.
The surface of the copper-clad laminate with a cured resin pattern obtained in this way is observed with an optical microscope, there is no residue at the bottom of the round hole of the pattern, there are no abnormalities such as blistering / peeling of the pattern, and space The minimum round hole pattern width that can be formed was measured, and this was taken as the resolution and evaluated according to the following criteria. The smaller the numerical value, the better the resolution.
[Development evaluation criteria]
Development time: The shortest development time was evaluated visually.
The residue was evaluated according to the following criteria.
A: No residue B: Some residue is seen on the wall and bottom C: Residue is clearly seen
<絶縁性(HAST)>
12μm厚の銅箔をガラスエポキシ基材に積層したプリント基板の銅箔にエッチングを施して、ライン幅/スペース幅が50μm/50μmであり、互いのラインが接触しておらず、互いに対向した同一面上の櫛形電極を得た。この基板の櫛形電極上にソルダーレジスト層を定法にて形成し、最適露光量(40mJ/cm2)で露光を行った。次いで、常温で1時間静置した後、30℃の1質量%炭酸ナトリウム水溶液にて20秒間スプレー現像を行った。続いて、オーク製作所製紫外線照射装置を使用して1J/cm2のエネルギー量で感光層に対する紫外線照射を行った。更に感光層を150℃で60分間加熱処理を行うことにより、ソルダーレジストを形成した評価用基板を得た。
加熱後の評価用積層体の櫛形電極間に電圧が印加されるように、ポリテトラフルオロエチレン製のシールド線をSn/Pbはんだによりそれらの櫛形電極に接続した後、評価用積層体に50Vの電圧を印可した状態で、該評価用積層体を130℃で85%RHの超加速高温高湿寿命試験(HAST)槽内に200時間静置した。その後の評価用積層体のソルダーレジストのマイグレーションの発生程度を100倍の金属顕微鏡により観察した。〔評価基準〕
A:マイグレーションの発生が確認できず、絶縁性に優れる。
B:マイグレーションの発生が確認され、絶縁性にやや劣る。
C:電極間が短絡し、絶縁性に劣る。
<Insulation (HAST)>
Etching was performed on the copper foil of a printed circuit board in which a 12 μm thick copper foil was laminated on a glass epoxy base material, the line width / space width was 50 μm / 50 μm, the lines were not in contact with each other, and the same facing each other A comb electrode on the surface was obtained. A solder resist layer was formed on the comb-shaped electrode of this substrate by a conventional method, and exposure was performed with an optimum exposure amount (40 mJ / cm 2 ). Subsequently, after leaving still at room temperature for 1 hour, spray development was performed for 20 second in 1 mass% sodium carbonate aqueous solution of 30 degreeC. Subsequently, the photosensitive layer was irradiated with ultraviolet rays with an energy amount of 1 J / cm 2 using an ultraviolet irradiation device manufactured by Oak Manufacturing. Further, the photosensitive layer was heat-treated at 150 ° C. for 60 minutes to obtain an evaluation substrate on which a solder resist was formed.
After connecting a shield wire made of polytetrafluoroethylene to these comb electrodes by Sn / Pb solder so that a voltage is applied between the comb electrodes of the evaluation laminate after heating, 50 V is applied to the evaluation laminate. With the voltage applied, the laminate for evaluation was allowed to stand in a super accelerated high temperature and high humidity life test (HAST) bath of 85% RH at 130 ° C. for 200 hours. Thereafter, the degree of migration of the solder resist in the laminate for evaluation was observed with a 100-fold metal microscope. 〔Evaluation criteria〕
A: The occurrence of migration cannot be confirmed, and the insulation is excellent.
B: Occurrence of migration was confirmed, and the insulation was slightly inferior.
C: The electrodes are short-circuited and insulative.
<耐熱衝撃性(耐クラック性)(TCT)>
信頼性試験項目として、温度サイクル試験(TCT)によりクラック及び剥れ等の外観を評価した。TCTは気相冷熱試験機を用い、電子部品モジュールを温度が-55℃及び125℃の気相中に各30分間放置し、これを1サイクルとして1,000サイクル及び1,500サイクルの条件で行い、以下の基準で耐熱衝撃性を評価した。
〔評価基準〕
A:クラック発生無し
B:浅いクラック発生有り
C:深いクラック発生有り
<Thermal shock resistance (crack resistance) (TCT)>
As reliability test items, appearance such as cracks and peeling was evaluated by a temperature cycle test (TCT). TCT uses a gas-phase cold heat tester, and the electronic component module is left in the gas phase at −55 ° C. and 125 ° C. for 30 minutes each, and this is regarded as one cycle under the conditions of 1,000 cycles and 1,500 cycles. The thermal shock resistance was evaluated according to the following criteria.
〔Evaluation criteria〕
A: No crack occurrence B: Shallow crack occurrence C: Deep crack occurrence
実施例2~7及び比較例1~3
実施例1において、下記表1に示すように、シリカ分散剤P-11を、本発明のシリカ分散剤P-4~P-7、比較のシリカ分散剤P-a、P-bにそれぞれ代え、実施例6ではバインダーをPU2に、実施例7ではシリカ含率を16%に代えた以外は、実施例1と同様にして、下記表1の組合せの実施例2~7及び比較例1~3の感光性フィルム、積層体、及び永久パターンを製造した。
得られた各感光性フィルム及び積層体について、実施例1と同様にして、溶融粘度、埋め込み性、現像性(未露光部)、絶縁性、及び耐熱衝撃性(TCT)の評価を行った。結果を表1に示す。
Examples 2 to 7 and Comparative Examples 1 to 3
In Example 1, as shown in Table 1 below, the silica dispersant P-11 was replaced with silica dispersants P-4 to P-7 of the present invention and comparative silica dispersants Pa and Pb, respectively. In Example 6, except that the binder was changed to PU2, and in Example 7, the silica content was changed to 16%, the same as Example 1, except that the combinations of Examples 2 to 7 and Comparative Examples 1 to 3 photosensitive films, laminates, and permanent patterns were produced.
About each obtained photosensitive film and laminated body, it carried out similarly to Example 1, and evaluated melt viscosity, embedding property, developability (unexposed part), insulation, and thermal shock resistance (TCT). The results are shown in Table 1.
酸価の1mmol/gは56.11KOHmg/gである。
また、比較の分散剤P-aおよびP-bは以下の構造であり、いずれも分散剤の固形分濃度が20%のシクロヘキサノン溶液を使用した。なお、下記において、数値は質量%であり、xは重合度を表し、1~50である。
The acid value of 1 mmol / g is 56.11 KOH mg / g.
Comparative dispersants Pa and Pb have the following structures, and both used a cyclohexanone solution having a solid content concentration of 20%. In the following, the numerical value is% by mass, x represents the degree of polymerization and is 1 to 50.
上記表1から明らかなように、本発明の分散剤は、優れた分散性を示し、この結果、本発明の分散剤でシリカ微粒子を安定かつ高密度に分散でき、これを含む組成物を使用して得られた感光性フィルムは溶融粘度が増大することなく、ソルダーレジストのような感光性フィルムとしての埋め込み性、現像性、絶縁性および耐熱衝撃性(TCT)に優れた性能を示すことがわかる。 As apparent from Table 1 above, the dispersant of the present invention exhibits excellent dispersibility, and as a result, the fine particles of silica can be stably and densely dispersed with the dispersant of the present invention, and a composition containing this is used. The resulting photosensitive film exhibits excellent performance in embedding, developing, insulating and thermal shock resistance (TCT) as a photosensitive film such as a solder resist without increasing the melt viscosity. Recognize.
本発明をその実施態様とともに説明したが、我々は特に指定しない限り我々の発明を説明のどの細部においても限定しようとするものでなく、添付の請求項の範囲に示した発明の精神と範囲に反することなく幅広く解釈されるべきであると考える。 While this invention has been described in conjunction with its embodiments, we do not intend to limit our invention in any detail of the description unless otherwise specified, but within the spirit and scope of the invention as set forth in the appended claims. I think it should be interpreted widely without conflict.
本願は、2011年6月9日に日本で特許出願された特願2011-129644に基づく優先権を主張するものであり、これはここに参照してその内容を本明細書の記載の一部として取り込む。 The present application claims priority based on Japanese Patent Application No. 2011-129644 filed in Japan on June 9, 2011, which is incorporated herein by reference. Capture as.
Claims (15)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011-129644 | 2011-06-09 | ||
| JP2011129644A JP2012255112A (en) | 2011-06-09 | 2011-06-09 | Composition, photosensitive film, photosensitive laminate, method for forming permanent pattern, and printed board |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2012169385A1 true WO2012169385A1 (en) | 2012-12-13 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2012/063674 Ceased WO2012169385A1 (en) | 2011-06-09 | 2012-05-28 | Composition, photosensitive film, photosensitive laminate, method for forming permanent pattern, and printed board |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2012255112A (en) |
| TW (1) | TW201302897A (en) |
| WO (1) | WO2012169385A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113677721A (en) * | 2019-03-29 | 2021-11-19 | 株式会社钟化 | Photosensitive resin composition preparation kit, photosensitive resin composition, cured film, substrate with cured film, and manufacturing method thereof |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2015052774A (en) * | 2013-08-07 | 2015-03-19 | 日立化成株式会社 | Method for manufacturing resist pattern or conductive pattern on decorative substrate, and transfer type photosensitive conductive film |
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| JPS60123563A (en) * | 1983-12-07 | 1985-07-02 | Kansai Paint Co Ltd | Aqueous pigment dispersion |
| JPH04227774A (en) * | 1990-05-02 | 1992-08-17 | Nippon Oil & Fats Co Ltd | Pigment dispersing agent |
| JP2001031900A (en) * | 1999-05-20 | 2001-02-06 | Hitachi Maxell Ltd | Dispersion composition and method for producing the same |
| JP2003105210A (en) * | 2001-09-28 | 2003-04-09 | Nippon Shokubai Co Ltd | Resin composition for cast molding |
| JP2008039863A (en) * | 2006-08-01 | 2008-02-21 | Fujifilm Corp | Photosensitive composition, photosensitive film, permanent pattern forming method, and printed circuit board |
| JP2009294319A (en) * | 2008-06-03 | 2009-12-17 | Hitachi Chem Co Ltd | Photosensitive resin composition, photosensitive film and photosensitive permanent resist |
| JP2010106268A (en) * | 2008-10-03 | 2010-05-13 | Fujifilm Corp | Dispersed composition, polymerizable composition, light-shielding color filter, solid-state imaging element, liquid crystal display device, wafer-level lens, and imaging unit |
| JP2012107167A (en) * | 2010-03-30 | 2012-06-07 | Fujifilm Corp | Titanium black dispersion for wafer level lens, photosensitive resin composition with the same, wafer level lens, and solid-state image pickup element |
-
2011
- 2011-06-09 JP JP2011129644A patent/JP2012255112A/en not_active Withdrawn
-
2012
- 2012-05-28 WO PCT/JP2012/063674 patent/WO2012169385A1/en not_active Ceased
- 2012-05-30 TW TW101119238A patent/TW201302897A/en unknown
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|---|---|---|---|---|
| JPS60123563A (en) * | 1983-12-07 | 1985-07-02 | Kansai Paint Co Ltd | Aqueous pigment dispersion |
| JPH04227774A (en) * | 1990-05-02 | 1992-08-17 | Nippon Oil & Fats Co Ltd | Pigment dispersing agent |
| JP2001031900A (en) * | 1999-05-20 | 2001-02-06 | Hitachi Maxell Ltd | Dispersion composition and method for producing the same |
| JP2003105210A (en) * | 2001-09-28 | 2003-04-09 | Nippon Shokubai Co Ltd | Resin composition for cast molding |
| JP2008039863A (en) * | 2006-08-01 | 2008-02-21 | Fujifilm Corp | Photosensitive composition, photosensitive film, permanent pattern forming method, and printed circuit board |
| JP2009294319A (en) * | 2008-06-03 | 2009-12-17 | Hitachi Chem Co Ltd | Photosensitive resin composition, photosensitive film and photosensitive permanent resist |
| JP2010106268A (en) * | 2008-10-03 | 2010-05-13 | Fujifilm Corp | Dispersed composition, polymerizable composition, light-shielding color filter, solid-state imaging element, liquid crystal display device, wafer-level lens, and imaging unit |
| JP2012107167A (en) * | 2010-03-30 | 2012-06-07 | Fujifilm Corp | Titanium black dispersion for wafer level lens, photosensitive resin composition with the same, wafer level lens, and solid-state image pickup element |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113677721A (en) * | 2019-03-29 | 2021-11-19 | 株式会社钟化 | Photosensitive resin composition preparation kit, photosensitive resin composition, cured film, substrate with cured film, and manufacturing method thereof |
Also Published As
| Publication number | Publication date |
|---|---|
| TW201302897A (en) | 2013-01-16 |
| JP2012255112A (en) | 2012-12-27 |
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