[go: up one dir, main page]

WO2012160730A1 - Dispositif de filtre à ondes acoustiques - Google Patents

Dispositif de filtre à ondes acoustiques Download PDF

Info

Publication number
WO2012160730A1
WO2012160730A1 PCT/JP2011/079817 JP2011079817W WO2012160730A1 WO 2012160730 A1 WO2012160730 A1 WO 2012160730A1 JP 2011079817 W JP2011079817 W JP 2011079817W WO 2012160730 A1 WO2012160730 A1 WO 2012160730A1
Authority
WO
WIPO (PCT)
Prior art keywords
electrode
wave filter
idt
filter device
acoustic wave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/079817
Other languages
English (en)
Japanese (ja)
Inventor
隆礼 乗地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of WO2012160730A1 publication Critical patent/WO2012160730A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/145—Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544—Transducers of particular shape or position
    • H03H9/14576—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger
    • H03H9/14579—Transducers whereby only the last fingers have different characteristics with respect to the other fingers, e.g. different shape, thickness or material, split finger the last fingers having a different shape

Definitions

  • the present invention relates to an elastic wave filter device.
  • the present invention relates to an acoustic wave filter device having a longitudinally coupled resonator type acoustic wave filter section.
  • Patent Document 1 discloses an elastic wave filter device having a longitudinally coupled resonator type surface acoustic wave filter unit in which a plurality of IDT electrodes are arranged along the elastic wave propagation direction as such an elastic wave filter device. ing.
  • acoustic wave filter devices used in communication devices are strongly required not only to have a small insertion loss in the pass band but also to have a large amount of attenuation in frequency bands other than the pass band. Yes.
  • an elastic wave filter device is strongly required to have a large attenuation amount of harmonics such as second harmonic and third harmonic.
  • the present invention has been made in view of such a point, and an object thereof is to provide an elastic wave filter device having a large amount of attenuation of harmonics.
  • the acoustic wave filter device includes a first signal terminal, a second signal terminal, and a longitudinally coupled resonator type acoustic wave filter section.
  • the longitudinally coupled resonator type acoustic wave filter unit is connected between the first signal terminal and the second signal terminal.
  • the longitudinally coupled resonator type acoustic wave filter section includes first and second IDT electrodes adjacent to each other in the acoustic wave propagation direction.
  • the first electrode finger that is the electrode finger closest to the second IDT electrode of the first IDT electrode is connected to the first or second signal terminal.
  • the first electrode finger has a portion facing the second IDT electrode.
  • the portion of the first electrode finger that faces the second IDT electrode includes a facing portion that faces the second IDT electrode in the cross width direction perpendicular to the elastic wave propagation direction.
  • the facing portion of the first electrode finger includes a portion facing the bus bar of the second IDT electrode in the cross width direction.
  • the length of the portion of the first electrode finger facing the second IDT electrode is 1.2 of the crossing width of the first IDT electrode. It is in the range of double to 3.0 times.
  • the second electrode finger that is the electrode finger closest to the first IDT electrode of the second IDT electrode is opposed to the first IDT electrode. It has a part.
  • the portion of the second electrode finger that faces the first IDT electrode includes a facing portion that faces the first IDT electrode in the cross width direction.
  • the facing portion of the second electrode finger includes a portion facing the bus bar of the first IDT electrode in the cross width direction.
  • a portion of the first electrode finger facing the second IDT electrode and a portion of the second electrode finger facing the first IDT electrode includes the part which has mutually opposed in the cross width direction.
  • the second electrode finger is connected to the first or second signal terminal.
  • FIG. 1 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the first embodiment.
  • FIG. 2 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a comparative example.
  • FIG. 3 is a graph showing the insertion loss of the elastic wave filter device according to the example and the insertion loss of the elastic wave filter device according to the comparative example.
  • FIG. 4 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the second embodiment.
  • FIG. 5 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the third embodiment.
  • FIG. 6 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the fourth embodiment.
  • FIG. 1 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the first embodiment.
  • FIG. 2 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a comparative example.
  • FIG. 3 is a graph showing the insertion loss
  • FIG. 7 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a fifth embodiment.
  • FIG. 8 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the sixth embodiment.
  • FIG. 9 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a seventh embodiment.
  • FIG. 10 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the eighth embodiment.
  • FIG. 1 is a schematic equivalent circuit diagram of an acoustic wave filter device according to this embodiment.
  • the acoustic wave filter device 1 includes a first signal terminal 11 and a second signal terminal 12.
  • a longitudinally coupled resonator type acoustic wave filter unit 20 is connected between the first signal terminal 11 and the second signal terminal 12.
  • the longitudinally coupled resonator type elastic wave filter unit 20 may be constituted by a longitudinally coupled resonator type surface acoustic wave filter unit that uses surface acoustic waves, or a longitudinally coupled resonator type elastic material that uses boundary acoustic waves. You may be comprised by the boundary wave filter part.
  • the longitudinally coupled resonator type acoustic wave filter unit 20 is formed on a piezoelectric substrate such as a LiNbO 3 substrate, a LiTaO 3 substrate, or a quartz substrate, and has a plurality of IDT electrodes adjacent to each other in the acoustic wave propagation direction x. .
  • the longitudinally coupled resonator-type elastic wave filter unit 20 includes first to fifth IDT electrodes 21 to 25 arranged along the elastic wave propagation direction x.
  • the first to fifth IDT electrodes 21 to 25 are arranged in this order along the elastic wave propagation direction x.
  • Reflectors 26 and 27 are disposed on both sides of the elastic wave propagation direction x in the region where the first to fifth IDT electrodes 21 to 25 are provided.
  • Each of the first to fifth IDT electrodes 21 to 25 is composed of a pair of comb-like electrodes that are interleaved with each other. Each of the pair of comb-like electrodes has a plurality of electrode fingers and a bus bar connecting one end of the plurality of electrode fingers.
  • one comb-like electrode of each of the second and fourth IDT electrodes 22 and 24 is connected to the first signal terminal 11, and the other comb
  • the tooth electrode is connected to the ground potential.
  • One of the first, third and fifth IDT electrodes 21, 23, 25 is connected to the ground potential, and the other comb electrode is connected to the second signal terminal 12. Has been.
  • the electrode finger 22 a located closest to the first IDT electrode 21 side of the second IDT electrode 22 is connected to the first signal terminal 11.
  • the electrode finger 22 b located closest to the third IDT electrode 23 side of the second IDT electrode 22 is connected to the first signal terminal 11. That is, each of the electrode fingers 22 a and 22 b located on the outermost side of the second IDT electrode 22 is connected to the first signal terminal 11.
  • the electrode finger 24 a located closest to the third IDT electrode 23 side of the fourth IDT electrode 24 is connected to the first signal terminal 11.
  • the electrode finger 24 b located closest to the fifth IDT electrode 25 side of the fourth IDT electrode 24 is connected to the first signal terminal 11. That is, each of the electrode fingers 24 a and 24 b located on the outermost side of the fourth IDT electrode 24 is connected to the first signal terminal 11.
  • the electrode finger 21 a located closest to the second IDT electrode 22 of the first IDT electrode 21 is connected to the second signal terminal 12.
  • the electrode finger 25 a located closest to the fourth IDT electrode 24 side of the fifth IDT electrode 25 is connected to the second signal terminal 12.
  • the electrode finger 23 a located closest to the second IDT electrode 22 side of the third IDT electrode 23 is connected to the second signal terminal 12.
  • the electrode finger 23 b located closest to the fourth IDT electrode 24 side of the third IDT electrode 23 is connected to the second signal terminal 12. That is, each of the electrode fingers 23 a and 23 b located on the outermost side of the third IDT electrode 23 is connected to the second signal terminal 12.
  • the electrode finger connected to the signal terminal may be referred to as a hot side electrode finger, and the electrode finger connected to the ground potential may be referred to as a ground side electrode finger.
  • each of the electrode fingers 22a, 22b, 24a, and 24b that are hot-side electrode fingers connected to the first signal terminal 11 is in the intersecting width direction y perpendicular to the elastic wave propagation direction x.
  • Opposing portions 22a1, 22b1, 24a1, and 24b1 that face adjacent IDT electrodes 21, 23, and 25 are provided.
  • the opposing portions 22a1, 22b1, 24a1, 24b1 are arranged in the cross width direction y with the bus bars 21B, 23B, 25B of one comb-like electrode of the IDT electrodes 21, 23, 25 adjacent to the opposing portions 22a1, 22b1, 24a1, 24b1.
  • Including facing parts for this reason, at least a part of the facing portions 22a1, 22b1, 24a1, and 24b1 extends along the elastic wave propagation direction x.
  • the electrode fingers 21a, 23a, 23b, 25a which are hot-side electrode fingers connected to the second signal terminal 12, are opposed portions 21a1, 23a1 facing the adjacent IDT electrodes 22, 24 in the cross width direction y. , 23b1 and 25a1.
  • the facing portions 21a1, 23a1, 23b1, and 25a1 are opposed to the bus bars 22B and 24B of one comb-like electrode of the adjacent IDT electrodes 22 and 24 in the intersecting width direction y, with the facing portions 21a1, 23a1, 23b1, and 25a1. Including parts. For this reason, at least a part of the facing portions 21a1, 23a1, 23b1, and 25a1 extends along the elastic wave propagation direction x.
  • the magnitude of the bridging capacitance formed between the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a, which are hot side electrode fingers, and the adjacent IDT electrodes. Can be increased. Thereby, the frequency of the attenuation pole can be shifted to the high frequency side to match the harmonic frequency. Further, it is not always necessary to change the crossing width of the first to fifth IDT electrodes, the pitch of the electrode fingers, or the like, and it is not always necessary to add another element.
  • the acoustic wave filter device The filter characteristics in one pass band are not substantially changed. Accordingly, it is possible to increase the attenuation of harmonics such as second harmonic and third harmonic while suppressing increase in insertion loss of the passband of the elastic wave filter device 1.
  • the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a are adjacent to the hot electrode fingers of the IDT electrode or the hot bus bar (the first or second signal terminal 11, 12 is opposed to the bus bar of the comb-shaped electrode connected to the terminal 12.
  • the length of the portion of the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a facing the adjacent IDT electrodes depends on the frequency of the attenuation pole to be matched with the harmonic frequency. Can be set as appropriate.
  • the length of the portion of the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, 25a facing the adjacent IDT electrodes is 1.2 to 3.0 times the crossing width of the IDT electrodes 21-25.
  • the range is preferably within the range of 1.5 times, and more preferably within the range of 1.5 to 2.0 times.
  • the frequency cannot be shifted to the harmonic frequency.
  • the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a are provided with facing portions 22a1, 22b1, 24a1, 24b1, 21a1, 23a1, 23b1, and 25a1, so the electrodes
  • the lengths of the portions of the fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a facing the adjacent IDT electrodes can be made sufficiently larger than the intersection width of the IDT electrodes 21 to 25.
  • the length of the portion of the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, 25a facing the adjacent IDT electrodes is too large with respect to the crossing width of the IDT electrodes 21 to 25, impedance matching May be difficult. Accordingly, the length of the portion of the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, and 25a facing the adjacent IDT electrodes is 3.0 times or less the intersection width of the IDT electrodes 21 to 25. Preferably there is.
  • an elastic wave filter device substantially similar to the elastic wave filter device 1 of the first embodiment is manufactured, a signal is input from the first signal terminal 11, and a signal is input from the second signal terminal 12.
  • the insertion loss of the acoustic wave filter device 1 was measured. The results are shown in FIG. In FIG. 3, the broken line indicates the insertion loss of this embodiment.
  • the length of the portion of the electrode fingers 22a, 22b, 24a, 24b, 21a, 23a, 23b, 25a facing the adjacent IDT electrodes is 1 of the intersection width of the IDT electrodes 21-25. .5 times.
  • FIG. 2 As a comparative example, as shown in FIG. 2, it is substantially the same as the elastic wave filter device 1 of the first embodiment except that the facing portions 22a1, 22b1, 24a1, 24b1, 21a1, 23a1, 23b1, and 25a1 are not provided.
  • the insertion loss of the acoustic wave filter device 1 when the signal is input from the first signal terminal 11 and the signal is output from the second signal terminal 12 is manufactured. It was measured. The results are shown in FIG. In FIG. 3, the solid line shows the insertion loss of the comparative example.
  • FIG. 4 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the second embodiment.
  • the elastic wave filter device 1 of the first embodiment has a so-called 5IDT type longitudinally coupled resonator type elastic wave filter unit 20 in which five IDT electrodes 21 to 25 are arranged along the elastic wave propagation direction x. ing.
  • An elastic wave filter device according to the present invention includes, for example, a 3IDT electrode type longitudinally coupled resonator type elastic wave filter section in which the number of IDT electrodes arranged along the elastic wave propagation direction is three. Also good.
  • the elastic wave filter device according to the present invention has, for example, a 7IDT electrode type longitudinally coupled resonator type elastic wave filter section in which the number of IDT electrodes arranged along the elastic wave propagation direction is seven. Also good.
  • the longitudinally coupled resonator type elastic wave filter unit 20 includes three IDT electrodes 31 to 31 arranged in this order along the elastic wave propagation direction x. 33.
  • One comb-like electrode of each of the first and third IDT electrodes 31 and 33 located on both sides of the elastic wave propagation direction x is connected to the first signal terminal 11 and the other comb-teeth shape is used.
  • the electrode is connected to ground potential.
  • One comb-like electrode of the second IDT electrode 32 located in the center of the elastic wave propagation direction x is connected to the ground potential, and the other comb-like electrode is connected to the second signal terminal 12. ing.
  • the electrode fingers 31 a and 33 a positioned closest to the IDT electrode 32 of the IDT electrodes 31 and 33 are hot-side electrode fingers connected to the first signal terminal 11.
  • the electrode fingers 32 a and 32 b located closest to the IDT electrodes 31 and 33 of the IDT electrode 32 are hot-side electrode fingers connected to the second signal terminal 12.
  • Each of the electrode fingers 31a and 33a which are hot-side electrode fingers, has opposing portions 31a1 and 33a1 that face the IDT electrode 32 in the cross width direction y.
  • Each of the electrode fingers 32a and 32b, which are hot-side electrode fingers has opposing portions 32a1 and 32b1 that face the IDT electrode 31 or the IDT electrode 33 in the intersecting width direction y.
  • each of the facing portions 31a1, 33a1, 32a1, and 32b1 constituting a part of the hot side electrode finger faces the hot side electrode finger and the bus bar connected to the hot side electrode finger. . For this reason, the attenuation amount of harmonics is further increased.
  • the opposing portions 31a1 and 33a1 are connected to the bus bar 32B of the comb-like electrode connected to the second signal terminal 12 among the pair of comb-like electrodes constituting the IDT electrode 32. Including facing parts.
  • the facing portions 32a1 and 32b1 face the bus bars 31B and 33B of the comb-shaped electrodes connected to the first signal terminal 11 among the pair of comb-shaped electrodes constituting the IDT electrodes 31 and 33. Including parts. For this reason, opposing part 31a1, 33a1, 32a1, 32b1 contains the part extended along the elastic wave propagation
  • FIG. 5 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the third embodiment.
  • FIG. 6 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the fourth embodiment.
  • the outermost electrode fingers of two adjacent IDT electrodes are hot-side electrode fingers and face the adjacent IDT electrodes in the cross width direction.
  • the present invention is not limited to this configuration.
  • the electrode finger on the other IDT electrode side is a hot-side electrode finger, and only the electrode finger has a facing portion. Good.
  • the electrode fingers 21a, 22b, 24a, and 25a have opposing portions 21a1, 22b1, 24a1, and 25a1.
  • the electrode fingers 22a, 23a, 23b, and 24b do not have a facing portion.
  • the electrode fingers 32a and 32b have the facing portions 32a1 and 32b1, and the electrode fingers 31a and 33a. Does not have a facing part.
  • the attenuation of harmonics can be increased while suppressing an increase in insertion loss in the passband.
  • FIG. 7 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a fifth embodiment.
  • both electrode fingers of IDT electrodes adjacent in the elastic wave propagation direction x are hot-side electrode fingers.
  • the present invention is not limited to this configuration.
  • the electrode finger on the other IDT electrode side of one IDT electrode of two IDT electrodes adjacent to each other in the elastic wave propagation direction x is a hot side electrode finger
  • the most IDT electrode side of the other IDT electrode may be a ground-side electrode finger.
  • the electrode fingers 32 a and 32 b on the most IDT electrodes 31 and 33 side of the IDT electrode 32 are hot side electrode fingers.
  • the electrode fingers 31a and 33a closest to the IDT electrode 32 of 33 are not hot-side electrode fingers but ground-side electrode fingers.
  • Each of the tip portions of the electrode fingers 32a and 32b that are hot-side electrode fingers and the tip portions of the electrode fingers 31a and 33a that are ground-side electrode fingers extend along the elastic wave propagation direction x.
  • the tip portions of the electrode fingers 32a and 32b that are hot-side electrode fingers are opposed to the tip portions of the electrode fingers 31a and 33a that are ground-side electrode fingers in the cross width direction y.
  • Opposing portions 32a1 and 32b1 are constituted by the tip portions of the electrode fingers 32a and 32b which are the hot side electrode fingers.
  • the opposing portions 31a1 and 33a1 are constituted by the tip portions of the electrode fingers 31a and 33a which are ground side electrode fingers.
  • the facing portions 32a1 and 32b1 and the facing portions 31a1 and 33a1 face each other in the cross width direction y.
  • FIG. 8 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the sixth embodiment.
  • FIG. 9 is a schematic equivalent circuit diagram of an acoustic wave filter device according to a seventh embodiment.
  • FIG. 10 is a schematic equivalent circuit diagram of the acoustic wave filter device according to the eighth embodiment.
  • the acoustic wave filter device according to the present invention may have, for example, one first signal terminal and two second signal terminals. In that case, it is preferable that an input terminal is configured by the first signal terminal, and a balanced output terminal that outputs a balanced signal is configured by the two second signal terminals. That is, the elastic wave filter device according to the present invention may be a balanced elastic wave filter device having a balance-unbalance conversion function.
  • the longitudinally coupled resonator type acoustic wave filter unit 20 is configured as an input terminal. 1 signal terminal 11 and two second signal terminals 12a and 12b constituting a balanced output terminal.
  • the elastic wave filter devices 6 to 8 having such a configuration, it is possible to increase the attenuation of harmonics while suppressing an increase in insertion loss in the passband.
  • the acoustic wave filter device having only one filter unit has been described.
  • the elastic wave filter device according to the present invention includes, for example, an elastic wave duplexer having a plurality of filter units, and at least one of the plurality of filter units is configured by a longitudinally coupled resonator type elastic wave filter unit. It may be.

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

L'invention porte sur un dispositif de filtre à ondes acoustiques destiné à obtenir une atténuation d'harmonique significative. Le dispositif de filtre à ondes acoustiques (1) comporte une première borne de signal (11), une seconde borne de signal (12) et une section filtre à ondes acoustiques de type résonateur à couplage longitudinal (20). La section filtre à ondes acoustiques de type résonateur à couplage longitudinal (20) est connectée entre la première borne de signal (11) et la seconde borne de signal (12). La section filtre à ondes acoustiques de type résonateur à couplage longitudinal (20) a des première et seconde électrodes interdigitées (22, 21) positionnées adjacentes l'une à l'autre dans la direction (x) suivant laquelle l'onde acoustique se propage. Un premier doigt d'électrode (22a), qui est le doigt d'électrode de la première électrode interdigitée (22) positionnée le plus près de la seconde électrode interdigitée (21), est connecté à la première ou à la seconde borne de signal (11, 12). Le premier doigt d'électrode (22a) a une section tournée vers la seconde électrode inter-digitée (21). Cette section comprend une section de vis-à-vis (22a1), qui est en vis-à-vis de la seconde électrode interdigitée (21) dans la direction de largeur (y) coupant à la perpendiculaire la direction de propagation d'ondes acoustiques (x).
PCT/JP2011/079817 2011-05-24 2011-12-22 Dispositif de filtre à ondes acoustiques Ceased WO2012160730A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-115313 2011-05-24
JP2011115313 2011-05-24

Publications (1)

Publication Number Publication Date
WO2012160730A1 true WO2012160730A1 (fr) 2012-11-29

Family

ID=47216825

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2011/079817 Ceased WO2012160730A1 (fr) 2011-05-24 2011-12-22 Dispositif de filtre à ondes acoustiques

Country Status (1)

Country Link
WO (1) WO2012160730A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20170121704A (ko) 2016-04-25 2017-11-02 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
US9970325B2 (en) 2015-04-30 2018-05-15 General Electric Company Jacking assembly for rotor
US20200021267A1 (en) * 2018-07-16 2020-01-16 Qorvo Us, Inc. Interdigital transducer arrangements for surface acoustic wave devices

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141813A (en) * 1979-04-24 1980-11-06 Murata Mfg Co Ltd Surface acoustic wave device
JP2002314367A (ja) * 2001-04-16 2002-10-25 Murata Mfg Co Ltd 弾性表面波装置、通信装置
JP2002359537A (ja) * 2001-06-01 2002-12-13 Murata Mfg Co Ltd 弾性表面波フィルタ、通信装置
JP2003309452A (ja) * 2000-04-18 2003-10-31 Murata Mfg Co Ltd 縦結合共振子型弾性表面波フィルタ
JP2008067032A (ja) * 2006-09-07 2008-03-21 Epson Toyocom Corp 平衡型弾性表面波フィルタ
JP2008086051A (ja) * 2007-12-21 2008-04-10 Seiko Epson Corp 弾性表面波フィルタおよび弾性表面波共振器

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55141813A (en) * 1979-04-24 1980-11-06 Murata Mfg Co Ltd Surface acoustic wave device
JP2003309452A (ja) * 2000-04-18 2003-10-31 Murata Mfg Co Ltd 縦結合共振子型弾性表面波フィルタ
JP2002314367A (ja) * 2001-04-16 2002-10-25 Murata Mfg Co Ltd 弾性表面波装置、通信装置
JP2002359537A (ja) * 2001-06-01 2002-12-13 Murata Mfg Co Ltd 弾性表面波フィルタ、通信装置
JP2008067032A (ja) * 2006-09-07 2008-03-21 Epson Toyocom Corp 平衡型弾性表面波フィルタ
JP2008086051A (ja) * 2007-12-21 2008-04-10 Seiko Epson Corp 弾性表面波フィルタおよび弾性表面波共振器

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9970325B2 (en) 2015-04-30 2018-05-15 General Electric Company Jacking assembly for rotor
US10344625B2 (en) 2015-04-30 2019-07-09 General Electric Company Jacking assembly for rotor
KR20170121704A (ko) 2016-04-25 2017-11-02 가부시키가이샤 무라타 세이사쿠쇼 탄성파 장치
US10193529B2 (en) 2016-04-25 2019-01-29 Murata Manufacturing Co., Ltd. Elastic wave device
US20200021267A1 (en) * 2018-07-16 2020-01-16 Qorvo Us, Inc. Interdigital transducer arrangements for surface acoustic wave devices
US10938373B2 (en) * 2018-07-16 2021-03-02 Qorvo Us, Inc. Interdigital transducer arrangements for surface acoustic wave devices

Similar Documents

Publication Publication Date Title
JP4631972B2 (ja) 弾性波フィルタ装置
JP5333650B2 (ja) 弾性波装置
JP4569713B2 (ja) 弾性波共振器、弾性波フィルタおよびこれを用いたアンテナ共用器
JP5397477B2 (ja) ラダー型弾性波フィルタ装置及び分波器
JPWO2015002047A1 (ja) 弾性表面波共振器及び弾性表面波フィルタ装置
JP6465047B2 (ja) 弾性波共振子、帯域通過型フィルタ及びデュプレクサ
WO2015198709A1 (fr) Filtre en échelle
JP4571200B2 (ja) 弾性波フィルタ
JP5369197B2 (ja) 弾性波装置
JP5045760B2 (ja) 弾性波フィルタ装置
WO2006068086A1 (fr) Filtre a ondes de surface de type equilibre
JP5784217B2 (ja) 弾性波装置
WO2012160730A1 (fr) Dispositif de filtre à ondes acoustiques
KR101711756B1 (ko) 탄성파 디바이스, 필터 및 분파기
JP2008035007A (ja) フィルタ
JP4900420B2 (ja) 弾性波装置
KR101974830B1 (ko) 탄성파 공진자, 탄성파 필터 및 듀플렉서
JP4936102B2 (ja) 弾性表面波デバイス
CN203406841U (zh) 用于数字电视的声表面波滤波器
JP5086140B2 (ja) 弾性波フィルタ
WO2010140456A1 (fr) Résonateur à ondes élastiques, filtre en échelle et duplexeur
JP4995923B2 (ja) 弾性境界波デバイス、およびそれを用いた通信機
WO2008053651A1 (fr) Dispositif et duplexeur de filtre d'onde acoustique de surface
JP2013247376A (ja) 縦結合型弾性表面波フィルタ及び縦続接続型フィルタ
JP5662130B2 (ja) 弾性波装置

Legal Events

Date Code Title Description
121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 11865967

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 11865967

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: JP