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WO2012153573A1 - Film conducteur transparent, corps stratifié conducteur transparent et panneau tactile - Google Patents

Film conducteur transparent, corps stratifié conducteur transparent et panneau tactile Download PDF

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Publication number
WO2012153573A1
WO2012153573A1 PCT/JP2012/057920 JP2012057920W WO2012153573A1 WO 2012153573 A1 WO2012153573 A1 WO 2012153573A1 JP 2012057920 W JP2012057920 W JP 2012057920W WO 2012153573 A1 WO2012153573 A1 WO 2012153573A1
Authority
WO
WIPO (PCT)
Prior art keywords
layer
transparent conductive
transparent
film
conductive film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2012/057920
Other languages
English (en)
Japanese (ja)
Inventor
伸一 岩崎
好隆 坂本
志郎 幾原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Reiko Co Ltd
Original Assignee
Reiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Reiko Co Ltd filed Critical Reiko Co Ltd
Priority to JP2012540971A priority Critical patent/JP5190854B2/ja
Priority to KR1020127026743A priority patent/KR101387705B1/ko
Publication of WO2012153573A1 publication Critical patent/WO2012153573A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B32LAYERED PRODUCTS
    • B32BLAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
    • B32B9/00Layered products comprising a layer of a particular substance not covered by groups B32B11/00 - B32B29/00
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01BCABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B5/00Non-insulated conductors or conductive bodies characterised by their form
    • H01B5/14Non-insulated conductors or conductive bodies characterised by their form comprising conductive layers or films on insulating-supports
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0445Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer
    • GPHYSICS
    • G06COMPUTING OR CALCULATING; COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • G06F3/0446Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means using a grid-like structure of electrodes in at least two directions, e.g. using row and column electrodes

Definitions

  • a conventional transparent conductive film represented by the transparent conductive film described in Patent Document 1 usually has a plurality of transparent layers laminated on a transparent film substrate (1 ′).
  • the surface layer is a transparent conductive layer (4 ′).
  • the transparent conductive film used in the capacitive touch panel is, as shown in FIG. 5B, by removing at least the transparent conductive layer (4 ′) to form a patterned electrode portion (4′P).
  • the pattern-like electrode portion refers to a portion in which the transparent conductive layer, which is the outermost layer of the transparent conductive film, is formed in a desired pattern such as a lattice or checkered pattern.
  • the portion other than the electrode portion is at least a portion (non-electrode portion) where a layer containing a conductive substance such as a transparent conductive layer is not formed.
  • a polyester-based anchor coat layer exists between the transparent film substrate and the cerium oxide layer.
  • Example 1 Production of transparent conductive film (transparent film substrate / CeO 2 layer / SiO 2 layer (CVD) / ITO layer) On both sides of a 125 ⁇ m thick polyethylene terephthalate film (transparent plastic film) by reverse coating method A transparent hard coat layer having a thickness of 2 ⁇ m made of an acrylic resin was formed to produce a double-sided hard coat film (transparent film substrate).
  • Comparative Example 4 In place of the transparent conductive film of the present invention produced in Example 1, the transparent conductive film produced in Comparative Example 1 (transparent film substrate / ITO layer / SiO 2 layer / ITO layer) was used except that In the same manner as in Example 3, a transparent conductive film of Comparative Example 4 in which a patterned electrode portion composed of ITO layer / SiO 2 layer / ITO layer electrically connected in the X direction was formed was produced. The portions other than the patterned electrode portions are non-electrode portions where no ITO layer / SiO 2 layer / ITO layer remains (see FIG. 5C).
  • the same process as in Example 3 was performed to produce a transparent conductive film on which the patterned electrode portion made of the ITO layer was formed, and then a screen printing method using an Ag paste. Formed by.
  • a lead wire made of Cu a 120 nm thick Cu layer is laminated on the entire surface of the ITO layer by sputtering deposition, and then a resist material (Ares SPR made by Kansai Paint Co., Ltd.) is formed on top of it.
  • a 5% copper chloride aqueous solution as an etching solution for Cu and performing a wet etching process at 40 ° C.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Human Computer Interaction (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Non-Insulated Conductors (AREA)
  • Laminated Bodies (AREA)
  • Position Input By Displaying (AREA)

Abstract

La présente invention vise à procurer un film conducteur transparent, par lequel d'excellentes caractéristiques incolores et transparentes peuvent être maintenues même si deux films conducteurs transparents sont stratifiés, et une section d'électrode en forme de motif peut être facilement formée. A cet effet, l'invention porte sur un film conducteur transparent, qui est caractérisé en ce qu'une couche d'oxyde de cérium, une couche à faible indice de réfraction transparente ayant un indice de réfraction supérieur ou égal à 1,4 mais inférieur à 1,7, et une couche conductrice transparente sont formées en séquence sur une surface d'un matériau de base de film transparent. La couche à faible indice de réfraction transparente est, de préférence, une couche de film mince constituée par un matériau en oxyde de silicium, et la couche conductrice transparente est, de préférence, une couche de film mince constituée par un matériau d'oxyde d'étain et d'indium.
PCT/JP2012/057920 2011-05-10 2012-03-27 Film conducteur transparent, corps stratifié conducteur transparent et panneau tactile Ceased WO2012153573A1 (fr)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2012540971A JP5190854B2 (ja) 2011-05-10 2012-03-27 透明導電フィルム及び透明導電積層体並びにタッチパネル
KR1020127026743A KR101387705B1 (ko) 2011-05-10 2012-03-27 투명 도전필름 및 투명 도전 적층체, 및 터치패널

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2011-105233 2011-05-10
JP2011105233 2011-05-10

Publications (1)

Publication Number Publication Date
WO2012153573A1 true WO2012153573A1 (fr) 2012-11-15

Family

ID=47139059

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2012/057920 Ceased WO2012153573A1 (fr) 2011-05-10 2012-03-27 Film conducteur transparent, corps stratifié conducteur transparent et panneau tactile

Country Status (4)

Country Link
JP (1) JP5190854B2 (fr)
KR (1) KR101387705B1 (fr)
TW (1) TWI480164B (fr)
WO (1) WO2012153573A1 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104503644A (zh) * 2014-12-30 2015-04-08 深圳力合光电传感股份有限公司 一种电容式触控面板及制作方法
WO2015200008A1 (fr) * 2014-06-23 2015-12-30 3M Innovative Properties Company Procédé de réalisation de motifs en un métal sur un conducteur transparent
JP2016541044A (ja) * 2013-10-18 2016-12-28 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated タッチパネル用透明体の製作方法及びタッチスクリーンパネル用透明体を製作するシステム

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI630849B (zh) * 2013-06-20 2018-07-21 Lg電子股份有限公司 導電薄膜及含有該導電薄膜的觸控面板
KR102053226B1 (ko) * 2013-07-16 2019-12-06 엘지이노텍 주식회사 터치 윈도우
KR101894035B1 (ko) * 2017-01-02 2018-10-04 에스케이씨하이테크앤마케팅(주) 다층 필름, 이의 제조방법 및 이를 포함하는 투명 전극 필름
KR101924102B1 (ko) * 2017-01-02 2018-11-30 에스케이씨하이테크앤마케팅(주) 다층 필름, 이의 제조방법 및 이를 포함하는 투명 전극 필름

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07178863A (ja) * 1993-12-24 1995-07-18 Toyobo Co Ltd 透明導電フィルム及びその製造方法
JP2010023282A (ja) * 2008-07-16 2010-02-04 Nitto Denko Corp 透明導電性フィルム、透明導電性積層体及びタッチパネル、並びに透明導電性フィルムの製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10282307A (ja) * 1997-04-04 1998-10-23 Toppan Printing Co Ltd 反射防止フィルム
KR101045026B1 (ko) * 2010-11-12 2011-06-30 (주)비엠씨 투명 도전성 적층 필름, 이의 제조방법 및 이를 포함하는 터치패널

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07178863A (ja) * 1993-12-24 1995-07-18 Toyobo Co Ltd 透明導電フィルム及びその製造方法
JP2010023282A (ja) * 2008-07-16 2010-02-04 Nitto Denko Corp 透明導電性フィルム、透明導電性積層体及びタッチパネル、並びに透明導電性フィルムの製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016541044A (ja) * 2013-10-18 2016-12-28 アプライド マテリアルズ インコーポレイテッドApplied Materials,Incorporated タッチパネル用透明体の製作方法及びタッチスクリーンパネル用透明体を製作するシステム
WO2015200008A1 (fr) * 2014-06-23 2015-12-30 3M Innovative Properties Company Procédé de réalisation de motifs en un métal sur un conducteur transparent
US10237985B2 (en) 2014-06-23 2019-03-19 3M Innovative Properties Company Method of patterning a metal on a transparent conductor
CN104503644A (zh) * 2014-12-30 2015-04-08 深圳力合光电传感股份有限公司 一种电容式触控面板及制作方法

Also Published As

Publication number Publication date
KR20130028079A (ko) 2013-03-18
JP5190854B2 (ja) 2013-04-24
JPWO2012153573A1 (ja) 2014-07-31
KR101387705B1 (ko) 2014-04-21
TW201244947A (en) 2012-11-16
TWI480164B (zh) 2015-04-11

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