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WO2012020788A1 - Dispositif de balayage optique - Google Patents

Dispositif de balayage optique Download PDF

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Publication number
WO2012020788A1
WO2012020788A1 PCT/JP2011/068255 JP2011068255W WO2012020788A1 WO 2012020788 A1 WO2012020788 A1 WO 2012020788A1 JP 2011068255 W JP2011068255 W JP 2011068255W WO 2012020788 A1 WO2012020788 A1 WO 2012020788A1
Authority
WO
WIPO (PCT)
Prior art keywords
plate
support beam
scanning device
frame
optical scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2011/068255
Other languages
English (en)
Japanese (ja)
Inventor
幸男 篠塚
明渡　純
載赫 朴
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinano Kenshi Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Shinano Kenshi Co Ltd
National Institute of Advanced Industrial Science and Technology AIST
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinano Kenshi Co Ltd, National Institute of Advanced Industrial Science and Technology AIST filed Critical Shinano Kenshi Co Ltd
Priority to KR1020137002362A priority Critical patent/KR20140017477A/ko
Publication of WO2012020788A1 publication Critical patent/WO2012020788A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/105—Scanning systems with one or more pivoting mirrors or galvano-mirrors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD

Definitions

  • the present invention relates to a technique effective when applied to an optical scanning device.
  • a piezoelectric body is disposed on a substrate having a torsion beam portion that supports a mirror portion, and torsional vibration is generated in the mirror portion by using a plate wave (deflection) of the substrate.
  • An optical scanning device including an optical scanner that can be used is disclosed.
  • Such an optical scanner (also referred to as a plate portion or an element portion) is formed using a metal material as a base material (metal base), and can be used as an alternative to a polygon scanner motor used in a laser printer or the like. Yes.
  • a substrate fixing frame is disposed so as to surround the substrate main body and the cantilever portion, the substrate main body is fixed to the substrate fixing frame on the fixed end side, and the substrate connecting beam is used.
  • a structure for connection is disclosed (see claim 10 of FIG. 1 and FIG. 8).
  • FIG. 1 shows a cross section of an optical scanning device 110 examined by the present inventor
  • FIG. 2 shows a plan view of a plate portion 120 that is a component of the optical scanning device 110
  • the optical scanning device 110 includes a plate unit 120 that is an element unit (optical scanner) having a mirror unit 121, a case 130 that fixes (accommodates) the plate unit 120, a light source 160 that projects light onto the mirror unit 121, and a plate And a vibration source 124 provided in the section 120.
  • the optical scanning device 110 projects light from a light source 160 onto a swinging mirror unit 121 and scans an object with reflected light 161 from the mirror unit 121.
  • the plate portion 120 of the optical scanning device 110 includes a frame portion 122, a plate main body portion 123 whose one end portion (fixed end) is cantilevered inside the frame portion 122, and the other end portion (free end) of the plate main body portion 123. And a hinge portion 125 (twisted beam portion) serving as an axis for causing the mirror portion 121 to swing by generating a stable standing wave by bending the plate body portion 123.
  • the case 130 of the optical scanning device 110 has a lower case part 140 mainly used as a base, and an upper case part 150 mainly used as a press on the upper side.
  • the plate portion 120 is supported by the frame portion 122 and provided in the lower case portion 140.
  • the upper case portion 150 that holds the frame portion 122 is assembled (fixed) to the lower case portion 140, and the optical scanning device 110 is configured. Has been.
  • the hinge portion is bent by actuating the vibration source 124 provided in the plate body portion 123 of the plate portion 120 to bend the plate body portion 123.
  • Irradiation light 161 can be reflected while oscillating the mirror 121 having the oscillating axis 125.
  • the optical scanning device 110 has a structure in which the fixed end of the plate main body 123 is supported in a cantilever manner in the plate portion 120 constituting the optical scanner in order to improve the driving efficiency.
  • the present inventor has found that a harmful low-frequency vibration component is generated by disturbance or driving of the optical scanner.
  • the optical scanning device 110 since the optical scanning device 110 has a structure in which the plate main body 123 is cantilevered only by a fixed end, the hinge portion 125 provided at the free end of the plate main body 123 itself is the mirror portion 121.
  • the present inventor has found that there is a case where the hinge portion 125 which is the swing axis is displaced in the vertical direction when the shaft is swung, and the scanning characteristics of the optical scanner may be reduced.
  • the frame part 122 of the plate part 120 is pressed and the upper case part 150 and the lower case part 140 are assembled.
  • the scanning characteristics of the optical scanner cannot be improved more effectively.
  • An object of the present invention is to provide a technique capable of improving the scanning characteristics of an optical scanning device.
  • An optical scanning device includes a frame body and a plate body in which one end is fixed to an opening surrounded by the frame to form a fixed end and a free end is formed on the other end.
  • a mirror portion pivotally supported by a hinge portion between a pair of plate tongue portions formed so as to cut out the free end, and a plate main body portion.
  • a vibration source that swings the mirror part by bending the plate body part, and a support beam part that is provided in the axial direction of the hinge part and connects the plate tongue part and the frame part. And the support beam portion is branched and connected to the frame portion.
  • FIG. 4 is a cross-sectional view schematically showing an optical scanning device along the line XX in FIG. 3. It is a top view which shows typically the lower case part of the optical scanning device in FIG. It is a top view which shows typically the upper case part of the optical scanning device in FIG. It is a top view which shows typically the plate part of the optical scanning device in FIG. It is a top view which shows typically the principal part of the plate part in FIG.
  • FIG. 14 It is a top view which shows typically the principal part of the plate part in FIG. It is sectional drawing which shows typically the principal part of the state which assembled
  • FIG. 3 shows a plane of the optical scanning device 10 in the present embodiment.
  • FIG. 4 shows a cross section of the optical scanning device 10 taken along the line XX of FIG.
  • FIG. 5 shows a plan view of the lower case portion 40 of the optical scanning device 10.
  • FIG. 6 shows a plan view of the upper case portion 50 of the optical scanning device 10.
  • FIG. 7 shows a plan view of the plate portion 20 of the optical scanning device 10, and
  • FIG. 8 shows a main portion of the plate portion 20.
  • FIG. 9 shows a plane of the spacer 60 of the optical scanning device 10.
  • each member shown by FIG.3, FIG.5, FIG.6, FIG.7 and FIG. 9 becomes long in the left-right direction and short in the up-down direction in each figure.
  • the screws 31 are not hatched for easy explanation.
  • the optical scanning device 10 includes a plate unit 20 having a mirror unit 21, a case 30 for fixing (accommodating) the plate unit 20, and a light source (not shown) that projects light onto the mirror unit 21.
  • the optical scanning device 10 projects light from a light source onto a swinging mirror unit 21 and scans an object with reflected light from the mirror unit 21.
  • a more specific configuration of the optical scanning device 10 will be described.
  • the case 30 of the optical scanning device 10 has a lower case portion 40 mainly used as a base and an upper case portion 50 mainly used as a press on the upper side thereof.
  • the lower case part 40 has a casing shape with an open upper surface.
  • the lower case portion 40 when seen as a plate shape, the lower case portion 40 has a planar rectangular shape as shown in FIG.
  • the lower case portion 40 As shown in FIG. 5, an opening end 44, a stepped portion 45 provided at the inner peripheral edge portion, and a bottom portion 46 provided at a position deeper than the stepped portion are formed. For this reason, the lower case portion 40 has a first-stage recess 41 and a second-stage recess 42 deeper than the recess 41 in the thickness direction (depth direction).
  • a screw hole 43 penetrating in the thickness direction is formed in the opening end 44 at the center of each side portion (long and short) of the opening end 44.
  • the concave portion 41 of the lower case portion 40 has a planar rectangular shape as a planar shape on which the plate portion 20 (see FIG. 7) can be disposed.
  • the frame portion 22 of the plate portion 20 is supported by the stepped portion 45 of the concave portion 41 (see FIG. 4).
  • the plate part 20 can be easily arranged in the lower case part 40 by making the planar shape of the recessed part 41 the same as the outer shape of the plate part 20.
  • the plate part 20 is arrange
  • the plate-like upper case portion 50 has a planar rectangular shape.
  • the left-right direction is long and the vertical direction is short.
  • the upper case portion 50 includes a frame portion 52 in which an opening 51 penetrating in the thickness direction is formed, and a screw fixing hole 53 penetrating the frame portion 52 in the thickness direction.
  • the opening 51 projects (incidents) light from the light source to the mirror unit 21, and the reflected light from the mirror unit 21 is emitted, and vibrations due to bending of the plate main body unit 23 and the mirror unit 21 are prevented from swinging. There is no provision.
  • a screw fixing hole 53 is formed at the center of each side portion (long and short) of the frame portion 52.
  • the screw 31 by screwing the screw 31 at the position of the screw fixing hole 53, the lower case portion 40 as a base and the upper case portion 50 as a presser can be assembled with equal force.
  • the opening shape of the opening 51 of the upper case portion 50 and the bottom shape (the area of the bottom portion 46) of the concave portion 42 of the lower case portion 40 are made the same. Further, the frame portion 52 of the upper case portion 50 is assembled so as to overlap with the opening end 44 of the lower case portion 40.
  • the plate part 20 can be fixed to the lower case part 40 as a base, the upper case part 50 may not necessarily be used.
  • the plate portion 20 may be fixed to the lower case portion 40 by simply bonding or screwing without being pressed by the upper case portion 50, or the plate portion may be clamped by holding only the frame portion on the fixed end side as in Patent Document 1. It may be a case of fixing with a case.
  • the upper case portion 50 as a presser is used to fix the plate portion 20 having the frame portion 22 with the entire frame portion 22.
  • the entire frame portion 22 of the plate portion 20 when the plate main body portion 23 is bent, generation of low-frequency vibration components due to disturbance can be suppressed, and deterioration of the scanning characteristics can be prevented. It is.
  • the plate portion 20 of the optical scanning device 10 has a planar rectangular shape.
  • the horizontal direction is long and the vertical direction is short.
  • the plate part 20 is a plate main body part in which one end side is fixed to a flat rectangular frame part 22 and an opening part 27 surrounded by the frame part 22 to form a fixed end, and a free end is formed on the other end side. 23.
  • One end (fixed end) of the plate body portion 23 is cantilevered inside the frame portion 22.
  • the plate portion 20 is provided at the other end (free end) of the plate main body portion 23, and a hinge portion 25 (twisted beam) serving as a swinging axis of the mirror portion 21 by bending the plate main body portion 23.
  • the support beam portion 26 is provided in the axial direction of the portion 25, and spans between the plate main body portion 23 and the frame portion 22.
  • Such a plate part 20 can be formed into a planar shape as shown in FIG. 7 by, for example, a plate-like metal material by, for example, etching, punching, laser processing, wire cutting, or the like.
  • openings 27 and 28 are formed between the frame part 22 and the plate body part 23 so that the plate body part 23 cantilevered inside the frame part 22 is bent. Yes.
  • One end portion of the plate main body portion 23 is fixed to the frame portion 22 and thus becomes a fixed end, while the other end portion of the plate main body portion 23 becomes a free end so as to be free with respect to the fixed end.
  • the opening 27 is formed on the fixed end side of the plate main body 23, and the opening 28 is formed on the free end of the plate main body 23.
  • the plate body 23 includes a constricted portion 23a constricted toward the cantilever portion 22a of the frame portion 22 cantilevered from a rectangular central portion, and a plate tongue that supports the hinge portion 25 on the other short side. Part 23b.
  • the region of the frame portion 22 that is in contact with the constricted portion 23a (the fixed end of the main body portion 23) is a cantilever portion 22a (hatched in FIG. 7 for clarity). That is, the frame part 22 has the cantilever part 22a. Therefore, the main body 23 is cantilevered by the cantilever 22 a inside the frame 22.
  • the plate tongue portion 23b is formed to make a pair so as to cut out the free end of the plate main body portion 23.
  • hinge portions 25 that are torsion beam portions for swinging the mirror portion 21 are provided on both sides of the mirror portion 21.
  • One end of the hinge part 25 on one side is connected to the mirror part 21, and the other end is connected to the plate tongue part 23b.
  • the mirror portion 21 is pivotally supported by the hinge portion 25 between the pair of plate tongue portions 23b.
  • the plate part 20 has the two support beam parts 26 which connect the main-body part 23 and the frame part 22 separately from the cantilever part 22a which cantilever the main-body part 23.
  • the two support beam portions 26 are provided on the free end side from the center portion of the main body portion 23 so as to be symmetric with respect to the main body portion 23.
  • a support beam portion 26 is bridged between the plate main body portion 23 and the frame portion 22 in the axial direction of the hinge portion 25.
  • the support beam portion 26 is formed to be the same as or thinner than the hinge portion 25 (twisted beam portion) for swinging the mirror portion 21 and shorter.
  • the main body portion 23 and the frame portion 22 are connected by the support beam portion 26, but the main body portion 23 is cantilevered inside the frame portion 22. This is because the support beam portion 26 is provided to suppress the vertical displacement of the mirror portion 21 and does not act to bend the main body portion 23.
  • the support beam portion 26 is branched so as to form a gap 29 in the axial direction of the hinge portion 25 (in the swinging axis direction of the swinging mirror portion 21).
  • the support beam portion 26 is branched and connected to the frame portion 22.
  • the support beam portion 26 in which the air gap 29 is formed in this manner is easily deformed (lower in rigidity) in the shorter direction than the hinge portion 25 as well as the frame portion 22 and the plate tongue portion 23b.
  • the support beam portion 26 can be easily deformed in the shorter direction (reduced rigidity).
  • the support beam portion 26 is branched from the hinge portion 25 side to the frame portion 22 in a U-shape so as to be easily deformed in the short direction.
  • the space 29 surrounded by the branched support beam portion 26 and the frame portion 22 is formed in a rectangular shape.
  • the plate main body 23 is provided with a vibration source 24 in the vicinity of the opening 28 and in the center in the width direction.
  • the vibration source 24 swings the mirror portion 21 by bending the plate main body portion 23.
  • a piezoelectric element made of lead zirconate titanate (PZT), a piezoelectric body, a magnetostrictive body, a permanent magnet body, or the like can be used.
  • PZT lead zirconate titanate
  • the vibration source 24 can be provided on the plate main body 23 by adhesion or the like.
  • the PZT is expanded and contracted by applying an alternating voltage through a wiring (not shown), and a standing wave is generated by continuously bending the plate body 23.
  • the vibration source 24 can be directly formed in a film shape on the plate main body portion 23 by, for example, an aerosol deposition method.
  • the mirror portion 21 having the hinge portion 25 as the swing axis is formed by operating the vibration source 24 to bend the plate main body portion 23. Irradiation light can be reflected while swinging.
  • a thin film for example, gold
  • a thin film formation technique such as vacuum deposition, sputtering, or chemical vapor deposition.
  • Aluminum, or the like or a reflective material for mirror (for example, silicon, ceramic, etc.) may be attached to the mirror portion 21 separately.
  • the plate part 20 is formed, for example with stainless steel.
  • the case 30 for fixing the plate portion 20 is made of, for example, aluminum.
  • the sheet-like spacer 60 of the optical scanning device 10 has a planar rectangular shape as shown in FIG.
  • the spacer 60 has a frame portion 62 in which an opening portion 61 penetrating in the thickness direction is formed.
  • the opening 61 projects (incidents) light from the light source to the mirror unit 21, and the reflected light from the mirror unit 21 is emitted, and the vibration due to the bending of the plate body 23 and the oscillation of the mirror unit 21 are hindered. There is no provision.
  • the shape of the opening 61 of the spacer 60 is the same as the shape of the bottom of the recess 42 of the lower case 40 and the shape of the opening 51 of the upper case 50. .
  • the plate-like spacer 60 is thinner than other components (such as the plate portion 20) and is in the form of a sheet.
  • the spacer 60 having the frame portion 62 in which the opening portion 61 penetrating in the thickness direction can be formed by, for example, punching or die processing.
  • an elastic member (elastic body) is used.
  • the spacer 60 is an elastic body.
  • the elastic body for example, a resin material such as polypropylene or polyester, silicone, rubber or the like can be used.
  • the plate unit 20 includes the frame unit 22, the plate body unit 23 with one end cantilevered inside the frame unit 22, and the other end of the plate body unit 23.
  • Hinge part 25 which is provided in the part and serves as the swing axis of the mirror part 21, and a support beam part 26 provided in the axial direction of the hinge part 25 and spanning the frame part 22 and the plate body part 23. is doing. Below, the influence on the scanning characteristic by the presence or absence of this support beam part 26 is demonstrated.
  • the mirror side bottom surface (longitudinal right side in FIG. 5) of the lower case portion 40 is partially fixed in the presence or absence of the support beam portion 26, and a periodic external force is generated as a disturbance on the fixed end side (long left side in FIG. 9 shows the numerical analysis results of the frequency response characteristics with respect to the out-of-plane direction of the mirror unit 21 of the optical scanning device 10 when the above is applied.
  • the case where the support beam portion 26 is not provided is indicated by the symbol A
  • the case where the support beam portion 26 is provided is indicated by the symbol B.
  • the first resonance phenomenon can be shifted from around 110 Hz to around 500 Hz, thereby preventing the influence of disturbance in the low frequency region (for example, 0 to 400 Hz). be able to. Therefore, in the optical scanning device 10 in which the influence of disturbance is prevented, the scanning characteristics can be improved.
  • the support beam portion 26 has a shape provided in the axial direction of the hinge portion 25.
  • the support beam portion 26 is provided in the vicinity of the mirror portion 21, that is, the support beam is provided in the axial direction of the hinge portion 25 connected to the mirror portion 21. This is because providing the portion 26 is most effective.
  • the optical scanning device described in Patent Document 1 has a structure in which the substrate connecting beam is provided in the vicinity of the minimum amplitude of the substrate vibration. Is different.
  • Patent Document 1 in order to stably support the optical scanning device against disturbance vibration, the substrate connecting beam is provided at a position where the influence of the minimum amplitude of the substrate vibration, that is, the substrate vibration (scanning amplitude) is small. It is considered that the whole board is being addressed by paying attention to the whole board. Therefore, in the optical scanning device described in Patent Document 1 that takes measures against the entire substrate, the hinge portion 125 that is displaced in the vertical direction, which is one factor affecting the scanning characteristics, is not taken into consideration. it is conceivable that.
  • the support beam portion 26 is provided in the axial direction of the hinge portion 25 to prevent the hinge portion 25 from being displaced in the vertical direction.
  • the plate portion 20 in addition to providing the support beam portion 26 in the axial direction of the hinge portion 25, the plate portion 20 is supported by the frame portion 22 and provided in the lower case portion 40, and the frame portion 20 is provided in the upper case.
  • the optical scanning device 10 is stabilized against disturbance vibration from the entire plate portion 20 by being pressed by the portion 50 and assembled to the lower case portion 40. That is, the optical scanning device 10 according to the present embodiment is stable against disturbance vibrations and prevents the hinge portion 25 from being displaced in the vertical direction, so that the scanning characteristics can be improved. I can say that.
  • one end of the support beam portion 26 on the frame portion 22 side can be fixed (pressed). For this reason, since the other end of the support beam portion 26 on the plate main body portion 23 (hinge portion 25) side can be regarded as a free end, the influence on bending the plate main body portion 23 is reduced.
  • the scanning characteristic is reduced by the temperature characteristic, that is, the abnormal amplitude in which the optical scanning fluctuates irregularly due to the temperature change of the optical scanning device 10. Further, the present inventor has found that a loop-like scanning phenomenon occurs and the resonance frequency changes.
  • FIG. 12 shows a table for explaining temperature dependency when the support beam portion 26a (-shaped) and the support beam portion 26 (shaped in U) are used in the optical scanning device 10.
  • the evaluation of the scanning operation is performed by observing the operation state due to a change in ambient temperature environment ( ⁇ 40 ° C.) when a driving voltage of 30 V is applied to the piezoelectric element as the vibration source 24.
  • the stable state is indicated by “OK” and the unstable state is indicated by “NG”.
  • the scanning state becomes abnormal on the low temperature side (0 ° C.) and becomes unstable.
  • Such a state is considered to be an unstable state by twisting in a state where the hinge portion 25 is loosened.
  • the support beam portions 26 and 26a are formed to be thin so as not to have an effect on bending the cantilevered plate body portion 23. Specifically, the support beam portions 26 and 26 a are formed to be sufficiently narrower than the constricted portion 23 a on the fixed end side of the plate main body portion 23. Therefore, in the plate portion 20, the support beam portions 26 and 26 a are portions that are most sensitive to the force from the frame portion 22.
  • FIG. 13 shows the degree of tension exerted on the hinge portion 25 due to the shape of the support beam portion 26 in the optical scanning device 10.
  • the support beam portion 26 having a branched shape is provided so as to form a gap 29 in the axial direction of the hinge portion 25.
  • the gap 29 is formed on the frame portion 22 side from the hinge portion 25 (plate body portion 23) side so that the stress caused by the difference in linear expansion coefficient is not applied to the hinge portion 25 as much as possible.
  • the shape of the support beam portion 26 U-shaped it becomes possible to absorb stress (displacement) as a bending of the beam instead of an axial force, and alleviate the generation of thermal stress on the hinge portion 25. be able to. Therefore, in the optical scanning device 10, the scanning characteristics can be improved.
  • the support beam portion 26 has a U-shape
  • the present invention is not limited to this, and the support beam portion 26 may have a C-shape or a Y-shape as long as it is branched so as to form a gap 29 in the axial direction of the hinge portion 25. It may be a letter shape, a U shape, or the like. However, it is necessary to make the space between the frame portion 22 and the plate body portion 23 (plate tongue portion 23b) as narrow as possible when the optical scanning device 10 is downsized.
  • the shape of the gap 29 extends from the axial direction of the hinge portion 25 (short direction of the frame portion 22) to the direction along the frame portion 22 (longitudinal direction of the frame portion 22), that is, in the above embodiment.
  • the U-shape shown is effective.
  • FIG. 14 shows a plane of a plate portion 20a as a modified example of the plate portion 20, and FIG. 15 shows a main portion of the plate portion 20a.
  • FIG. 16 shows a cross section of the main part in a state where the plate part 20a is assembled to the lower case part 40.
  • FIG. 16 is a cross-sectional view corresponding to the line YY in FIG.
  • the entire support beam portion 26 is provided between the plate tongue portion 23 b and the frame portion 22.
  • a part of the support beam part 26b (26) is provided in a part of the frame part 22.
  • the branch portion 26d of the support beam portion 26b is Some are provided.
  • a trunk portion 26 c extending in the axial direction of the hinge portion 25 is provided between the plate tongue portion 23 b and the frame portion 22, and a branch extending in the frame portion 22 in a direction intersecting with the axial direction of the hinge portion 25.
  • a portion 26d is provided.
  • the lower plate portion 40 corresponding to the region including the branch portion 26d formed in the frame portion 22 is formed. As shown in FIG. 16, a recess 47 is formed. 14 and 15, the plate portion 20 a is flat, but the position of the recess 47 when the plate portion 20 a is assembled to the lower case portion 40 is indicated by a broken line.
  • the support beam part 26 b is provided to suppress the vertical displacement of the mirror part 21.
  • Any material that can be easily deformed in the short direction may be used.
  • the hinge portion 25 is prevented from being displaced in the vertical direction while reducing the size of the optical scanning device 10 (saving the space in the short direction). The characteristics can be improved.
  • a through hole 22b whose longitudinal direction intersects the axial direction of the hinge portion 25 is formed in the frame portion 22.
  • the formed plate portion 20a may be used.
  • a plate portion 20b in which a beam portion is formed in a part of the frame portion 22 and the beam portion is a branch portion 26d may be used.
  • the present invention is widely used in the manufacturing industry of optical scanning devices, in particular, image forming devices such as laser printers and digital copying machines, image display devices such as projection displays, barcode readers, area sensors, and the like. It is what is done.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Facsimile Scanning Arrangements (AREA)
  • Micromachines (AREA)

Abstract

L'invention concerne une technique permettant d'améliorer les caractéristiques de balayage d'un dispositif de balayage optique. Le dispositif de balayage optique comprend : une unité plaque (20) comprenant en outre une partie cadre (22) et une partie corps principal de plaque (23) sur laquelle une extrémité d'ancrage est formé par un côté d'extrémité qui est ancré dans une partie ouverture (27) entourée par la partie cadre (22), une extrémité non ancrée étant formée sur l'autre côté d'extrémité ; une partie miroir (21) qui est supportée autour d'un axe par des parties charnières (25) de manière à pouvoir bouger entre deux parties languettes de plaque (23b) formée de manière à définir des encoches dans le côté d'extrémité non ancré de la partie corps principal de plaque (23) ; une source d'oscillations (24) qui est disposée sur la partie corps principal de plaque (23) et qui fait bouger la partie miroir (21) en fléchissant la partie corps principal de plaque (23) ; et des parties barres de support (26) qui sont disposées dans le sens axial des parties charnière (25), et qui connectent les parties languettes de plaque (23b) à la partie cadre (22). Les parties barres de support (26) sont fourchues et sont connectées à la partie cadre (22).
PCT/JP2011/068255 2010-08-11 2011-08-10 Dispositif de balayage optique Ceased WO2012020788A1 (fr)

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KR1020137002362A KR20140017477A (ko) 2010-08-11 2011-08-10 광주사 장치

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JP2010-180281 2010-08-11
JP2010180281A JP2012037832A (ja) 2010-08-11 2010-08-11 光走査装置

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WO2012020788A1 true WO2012020788A1 (fr) 2012-02-16

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CN113552715A (zh) * 2020-04-23 2021-10-26 船井电机株式会社 振动镜元件以及光扫描装置
US20210382297A1 (en) * 2020-06-03 2021-12-09 Funai Electric Co., Ltd. Vibrating element

Families Citing this family (1)

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Publication number Priority date Publication date Assignee Title
JP2019052850A (ja) 2017-09-12 2019-04-04 シナノケンシ株式会社 光走査装置

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