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WO2012005454A2 - Glass substrate cutting system using laser - Google Patents

Glass substrate cutting system using laser Download PDF

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Publication number
WO2012005454A2
WO2012005454A2 PCT/KR2011/004388 KR2011004388W WO2012005454A2 WO 2012005454 A2 WO2012005454 A2 WO 2012005454A2 KR 2011004388 W KR2011004388 W KR 2011004388W WO 2012005454 A2 WO2012005454 A2 WO 2012005454A2
Authority
WO
WIPO (PCT)
Prior art keywords
glass substrate
laser
cutting
unit
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/004388
Other languages
French (fr)
Korean (ko)
Other versions
WO2012005454A3 (en
Inventor
윤덕환
정찬구
엄태준
박종진
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
A&E TECHNOLOGY Co Ltd
Original Assignee
A&E TECHNOLOGY Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by A&E TECHNOLOGY Co Ltd filed Critical A&E TECHNOLOGY Co Ltd
Publication of WO2012005454A2 publication Critical patent/WO2012005454A2/en
Publication of WO2012005454A3 publication Critical patent/WO2012005454A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/03Glass cutting tables; Apparatus for transporting or handling sheet glass during the cutting or breaking operations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03Observing, e.g. monitoring, the workpiece
    • B23K26/032Observing, e.g. monitoring, the workpiece using optical means
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/0604Shaping the laser beam, e.g. by masks or multi-focusing by a combination of beams
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/067Dividing the beam into multiple beams, e.g. multifocusing
    • B23K26/0673Dividing the beam into multiple beams, e.g. multifocusing into independently operating sub-beams, e.g. beam multiplexing to provide laser beams for several stations
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/083Devices involving movement of the workpiece in at least one axial direction
    • B23K26/0838Devices involving movement of the workpiece in at least one axial direction by using an endless conveyor belt
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/08Devices involving relative movement between laser beam and workpiece
    • B23K26/0869Devices involving movement of the laser head in at least one axial direction
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/38Removing material by boring or cutting
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36Removing material
    • B23K26/40Removing material taking account of the properties of the material involved
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/02Carriages for supporting the welding or cutting element
    • B23K37/0211Carriages for supporting the welding or cutting element travelling on a guide member, e.g. rail, track
    • B23K37/0235Carriages for supporting the welding or cutting element travelling on a guide member, e.g. rail, track the guide member forming part of a portal
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/04Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
    • B23K37/0408Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work for planar work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K37/00Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass
    • B23K37/04Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work
    • B23K37/047Auxiliary devices or processes, not specially adapted for a procedure covered by only one of the other main groups of this subclass for holding or positioning work moving work to adjust its position between soldering, welding or cutting steps
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063Transporting devices for sheet glass
    • B65G49/064Transporting devices for sheet glass in a horizontal position
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/02Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor
    • C03B33/023Cutting or splitting sheet glass or ribbons; Apparatus or machines therefor the sheet or ribbon being in a horizontal position
    • C03B33/033Apparatus for opening score lines in glass sheets
    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03BMANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B33/00Severing cooled glass
    • C03B33/09Severing cooled glass by thermal shock
    • C03B33/091Severing cooled glass by thermal shock using at least one focussed radiation beam, e.g. laser beam
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K2103/00Materials to be soldered, welded or cut
    • B23K2103/50Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00Technologies relating to the processing of minerals
    • Y02P40/50Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57Improving the yield, e-g- reduction of reject rates

Definitions

  • the present invention relates to a glass substrate cutting processing system using a laser
  • the glass substrate can be precisely processed by real-time correction of the cutting schedule line for irradiating the laser beam to the glass substrate that is seated on the process table in detail
  • Tak time can be significantly reduced by dividing the process of cutting both sides of the glass substrate, rotating the process by 90 °, and cutting the other side of the glass substrate on a continuous line.
  • the fixed rod part and the conveyor part disposed at the outermost part of the plurality of fixed rod parts and the plurality of conveyor parts provided on the table are installed to be folded and extended at right angles to their respective longitudinal directions and are seated on the upper surface of the process table. Glass substrate cutting process sheath using laser which can be cut to compatible specifications of glass substrate Relate to.
  • a glass substrate for a display means glass used for display apparatuses, such as a liquid crystal display, a plasma display, an organic electroluminescent display.
  • the scribe wheel method is a method of forming a scribe line having a predetermined depth on the surface of the glass substrate by installing a fine diamond on the circumferential surface of the disc having a predetermined diameter, and contacting the cutting schedule line to be cut while rotating it at high speed.
  • the scribing wheel method is a method in which a crack is propagated and cut along the scribe line by applying a physical impact to the glass substrate on which the scribe line is formed.
  • the scribe wheel method requires a cutting edge of a predetermined area or more, particles are generated during cutting and require a separate cleaning process and a drying process to remove them, the cutting surface is not smooth, and the cost of consumables increases. There was a downside.
  • a glass substrate cutting apparatus using a laser was introduced.
  • a method of moving the processing table in which the glass substrate is located in the cutting direction while maintaining the laser cutting head in a fixed state is used.
  • the laser oscillation part has a load of about 250 kg to 300 kg. When this load is moved, the structure supporting the laser cutting head is sag and the path position of the laser beam is distorted, thereby reducing the cutting accuracy and stability. Is generated.
  • a cutting head having a gantry stage structure and a laser oscillator connected integrally with the cutting head move forward and backward along the direction in which the glass substrate moves to solve the above problems.
  • the entire gantry stage is inevitably driven for the operation of the cutting head, which leads to unnecessary management and operation.
  • the glass substrate to be transported to the upper surface of the processing table is minutely distorted at a certain angle, it is necessary to correct such distortion.
  • Another problem arises in that there is no means to cut and finely cut glass substrates.
  • the present invention has been proposed in view of the above, and an object of the present invention is to provide a glass substrate cutting processing system using a laser that can cut the glass substrate more precisely and reduce the tack time as compared to the conventional one. There is.
  • the centering portion for correcting a certain direction before moving in a state in which the rectangular glass substrate is seated;
  • One side or both sides of the glass substrate, which has been uniformly transferred straight from the centering part, are cut along the transfer direction of the glass substrate by dividing the cutting schedule line, and a rectangular glass substrate with respect to the transfer direction of the glass substrate.
  • a first cutting unit capable of irradiating a laser by correcting a cutting schedule line in real time to correspond to the distorted angle;
  • a first breaking part for physically cutting and leaving one side or both side edge portions of the glass substrate sequentially moved straight after being irradiated by the laser from the first cutting part;
  • a rotating part rotated by 90 ° to cut the other side of the glass substrate sequentially transferred straight through the first breaking part;
  • a second cutting unit capable of irradiating a laser by correcting a cutting schedule line in real time correspondingly; And a second breaking part for physically cutting one or both edge portions of the glass substrate sequentially transferred straight after being irradiated by the laser from the second cutting part.
  • a plurality of cameras are disposed at predetermined positions on the upper portion of the centering portion in order to measure positional data on the standard and constant orientation of the glass substrate seated on the centering portion.
  • a plurality of cameras are disposed at an upper predetermined position of the second breaking portion to measure the angle and parallelism of each edge and each side of the glass substrate seated with the edges of the four sides cut in the second breaking portion. Based on the position data measured by the camera, each cutting schedule line by laser irradiation of the first and second cutting units is configured to be corrected in real time.
  • Each of the first cutting portion and the second cutting portion includes: a base plate seated on the bottom surface; A process table disposed on an upper surface of the base plate to move the glass substrate straight in a predetermined direction; A pair of guide tables installed side by side on an upper surface of both ends of the base plate; A pair of laser oscillators for oscillating the laser to process the glass substrate located on the upper surface of the process table while moving in a forward and backward direction along the pair of guide tables; And a pair of laser irradiation units which are conveyed along a pair of guide tables integrally with the laser oscillation unit and irradiate the glass substrate with the laser oscillated from the laser oscillation unit.
  • the pair of laser irradiation units are installed to be moved along the pair of guide tables in the forward and rear directions, and at the same time independently moveable in a left and right direction perpendicular to the longitudinal direction of the guide table. It is connected to each other cantilever (cantilever) structure from each laser oscillation portion is moved independently.
  • the laser irradiation unit for providing an initial crack to the glass substrate;
  • a reflector for guiding the laser beam oscillated from the laser oscillator;
  • a shopping lens unit for condensing the laser beam transmitted from the reflecting means;
  • a quenching nozzle unit for injecting cooling mist along the laser beam irradiated from the shopping lens;
  • an air suction unit for sucking dust generated from the cooling mist sprayed from the quenching nozzle unit and the initial crack of the glass substrate.
  • the laser oscillation unit is installed on the upper part of the pair of guide tables so as to be movable in the front and rear directions along the longitudinal direction of the guide table, and includes a laser source unit for oscillating the laser and a power supply unit for driving the laser source unit. It is composed.
  • Each of the process tables provided in the first and second cutting parts may include: a plurality of fixed rod parts disposed on an upper surface of the base plate side by side in the longitudinal direction of the guide table; And a plurality of conveyor parts disposed in parallel with each of the fixed rod parts alternately with the plurality of fixed rod parts, the height of the fixed rod being adjustable up and down with respect to the height of the fixed rod parts.
  • the centering portion the base plate seated on the bottom surface; And a process table disposed on an upper surface of the base plate to move the glass substrate straight to the first cutting portion, wherein the process table includes a plurality of fixed rods disposed on the upper surface of the base plate along a conveying direction of the glass substrate. And a plurality of conveyor parts disposed alternately with each of the plurality of fixed rod parts and arranged in parallel with each of the fixed rod parts, the height of which being adjustable up and down with respect to the height of the fixed rod parts.
  • the process table provided in the centering part includes: a plurality of stoppers disposed at the front end of the fixed rod part to temporarily stop the front end of the glass substrate seated on the fixed rod part; A plurality of side alignment parts disposed on the side of each of the fixed rod parts positioned at the outermost side of the plurality of fixed rod parts to correct centering and orientation of the glass substrate; And a plurality of rear alignment parts disposed at the rear end of the fixed rod part and interlocked with the stopper and the side alignment to correct the centering and the orientation of the glass substrate.
  • the process table provided in each of the centering part, the first cutting part, and the second cutting part is disposed at the outermost part of the plurality of fixed rod parts and the plurality of conveyor parts so as to be compatible with the specifications of the glass substrate seated on the upper surface of each process table.
  • Arranged fixed rod portion and the conveyor portion is installed to be able to fold and expand at right angles to each longitudinal direction.
  • the glass substrate cutting system of the present invention provides the following advantages.
  • the process of cutting both sides of the glass substrate through the first cutting portion and the first breaking portion, the process of rotating 90 ° through the rotating portion, and the other side of the glass substrate is cut through the second cutting portion and the second breaking portion It is possible to remarkably reduce the tack time by dividing each process into a continuous line.
  • the fixed rod portion and the conveyor portion disposed at the outermost of the plurality of fixed rod portion and the plurality of the conveyor portion provided on the process table are installed to be folded and extended at right angles to the respective longitudinal directions of the process table.
  • the pair of laser irradiation unit, the process of moving forward and backward along the pair of guide table and the process of moving a predetermined distance in the left and right directions perpendicular to the front and rear directions of the longitudinal direction of the guide table The cantilever structure is independently connected to each laser oscillation unit so as to be able to operate independently, so that the pair of laser irradiation units are mounted on the process table of the first and second cutting units in association with the interpolated control signals of the external interpolation controller.
  • One side or both sides of the glass substrate has the advantage that can be precisely cut processing in the micro unit by the desired width.
  • FIG. 1 and 2 is a schematic diagram showing the overall configuration of a glass substrate cutting processing system using a laser according to the present invention
  • Figure 3 is a schematic diagram showing a process of centering the glass substrate in the centering portion in accordance with the specifications of the glass substrate processed by the present invention
  • 4 and 5 are schematic diagrams showing a process of cutting the cutting schedule line through the interpolation control in the first cutting unit and the second cutting unit based on the position data measured from the camera provided in the second braking unit of the present invention
  • FIG. 6 is a perspective view showing an extract of a part of the present invention.
  • FIG. 7 is another perspective view showing a part of the configuration of the present invention.
  • FIG. 8 is a perspective view showing an extract of the process table disposed in the centering portion of the present invention.
  • FIG. 9 is a flowchart illustrating a process of operating a glass substrate cutting processing system using a laser according to the present invention.
  • FIG. 10 is a flowchart illustrating a process of operating a process table by position data measured by a camera of a centering unit according to the present invention
  • FIG. 11 is a flowchart illustrating a process of operating each laser irradiation unit based on the position data measured by the camera of the second breaking unit according to the present invention.
  • FIG. 1 and 2 is a schematic diagram showing the overall configuration of a glass substrate cutting processing system using a laser according to the present invention.
  • the part shown in FIG. 1 and the part shown in FIG. 2 are connected to constitute an entire glass substrate cutting processing system.
  • the rectangular glass substrate (G) is a centering portion (100) for correcting the constant direction before moving in the seated state;
  • a first cutting part 200 capable of irradiating a laser by correcting a cutting schedule line in real time so as to correspond to an angle at which the rectangular glass substrate G is twisted with respect to the feeding direction of (G);
  • a first breaking part 300 which physically cuts and detaches one side portion or both side edge portions of the glass substrate G sequentially moved straight after being irradiated by the laser from the first cutting portion 200;
  • a rotating part 400 which is rotated by 90 ° to cut the other side of the glass substrate G sequentially straight transferred through the first breaking part 300;
  • Reference numeral G3 of Figs. 1 and 2 denotes a cut piece in which a predetermined portion of both side edges of the glass substrate is cut from the first and second breaking parts.
  • Figure 3 is a schematic diagram showing the process of centering the glass substrate in the centering portion in accordance with the specifications of the glass substrate processed by the present invention, the position of the standard and constant orientation of the glass substrate (G) seated on the centering portion 100
  • a plurality of cameras 500 are disposed at a predetermined position on the upper portion of the centering unit 100.
  • the plurality of cameras 500 disposed in the centering unit 100 are fixedly positioned at a predetermined position, and photograph each side and each corner of a relatively large glass substrate G1 and a relatively small glass substrate G2 interchangeably. It is divided into being arranged to move a certain distance so that it can be measured.
  • the camera 500 is also provided at both ends of the center reference line L, which is commonly used as a reference to the glass substrate G located in the centering part 100, so that the position data of the glass substrate G, that is, the X and Y coordinate axes Provide a reference value.
  • the measured position data of the glass substrate G that is, the X and Y coordinate values are transmitted to an external interpolation control device in real time.
  • FIGS. 4 and 5 are schematic diagrams illustrating a process of cutting a cutting schedule line through interpolation control in the first and second cutting units based on position data measured from a camera provided in the second breaking unit of the present invention.
  • Four edges of the second breaking portion 300 'with the edges of the glass substrate (G) seated in a state in which cutting is cut, the angle and the parallelism of each side of the second braking portion 300' A plurality of cameras 500 'are arranged at an upper predetermined position, and the laser beams of the first and second cutting parts 200 and 200' are radiated based on the position data measured by the cameras 500 '.
  • Each cut schedule line is configured to be corrected in real time.
  • FIG. 5 is an analysis result parallelism, ie, a glass substrate, based on the position data of the glass substrate G measured from the plurality of cameras 500 'provided in the second braking unit 300'.
  • a pair of laser irradiation units 250 and 250 'provided in the first and second cutting units 200 and 200' are respectively integrated with the laser oscillating unit by the interpolation of the control signal. While moving along the tables 230 and 230 ′, they are gradually moved in a direction perpendicular to the direction of travel of the laser oscillator and obliquely at an angle with respect to the center reference line L.
  • the post-correction cutting schedule line L2 formed while moving in conjunction with the interpolated control signal for the pre-calibration cutting schedule line L1 formed while moving in conjunction with the original control signal parallel to the center reference line L in the center is It is corrected by a certain tilt angle.
  • the glass substrate G can be cut and processed more precisely than before by the movement of the laser irradiation units 250 and 250 ′ which are calibrated in real time.
  • FIG. 6 is a perspective view showing some components of the present invention
  • FIG. 7 shows another perspective view showing some components of the present invention.
  • each of the first cutting part 200 and the second cutting part 200 ′ may include: base plates 210 and 210 ′ mounted on a bottom surface thereof; Process tables 220 and 220 'disposed on the upper surfaces of the base plates 210 and 210' to move the glass substrate G straight in a predetermined direction; A pair of guide tables 230 and 230 'installed side by side on an upper surface of both ends of the base plates 210 and 210'; A pair of laser oscillators 240 and 240 'for oscillating the laser to process the glass substrate G located on the upper surface of the process table 220 and 220' while moving forward and backward along the pair of guide tables 230 and 230 '.
  • a pair of laser irradiators 250 and 250 ' which are conveyed along the pair of guide tables 230 and 230' integrally with the laser oscillators 240 and 240 'and irradiate the glass substrate G with the laser oscillated from the laser oscillators 240 and 240'. It is configured to include.
  • the rotating unit 400 serves to rotate 90 ° in order to cut the other side of the glass substrate G which is sequentially straight forwarded through the first breaking part 300.
  • the rotating unit 400 includes a base plate, a turntable 410 installed on the base plate, and a flat plate grid 420 seated on the turntable 410 and rotated by 90 °, and the turntable 410.
  • the glass substrate G is seated on the upper portion of the plate grid 420 rotated by the rotation of and rotates integrally.
  • the pair of laser irradiation units 250 and 250 ′ move forward and backward along the pair of guide tables 230 and 230 ′ and simultaneously independently of the guide tables 230 and 230 ′. It is installed to be movable a certain distance in the left and right directions perpendicular to the front and rear directions in the longitudinal direction.
  • the pair of laser irradiation units 250 and 250 ′ moves forward and backward along the pair of guide tables 230 and 230 ′ and is perpendicular to the front and rear directions of the guide tables 230 and 230 ′.
  • the process of moving a predetermined distance in the left and right directions is connected to the cantilever structure independently from each of the laser oscillators 240 and 240 'so as to operate independently.
  • the pair of laser irradiation units 250 and 250 ′ is mounted on the process tables 220 and 220 ′ of the first and second cutting units 200 and 200 ′ in association with the interpolated control signals of the external interpolation control apparatus.
  • One side or both sides of G) can be precisely cut in micro units by the desired width.
  • the laser irradiation units 250 and 250 ' move along the guide table integrally with the laser oscillating units 240 and 240' and move at right angles to the traveling direction of the laser oscillating units 240 and 240 'while irradiating laser beams to both sides of the glass substrate. Form the cut line.
  • the widths of the edge cut pieces of both sides cut from the glass substrate G may be different from each other.
  • the laser irradiator 250 or 250 ′ includes an initial cracker for providing an initial crack to the glass substrate G; A reflector for guiding the laser beam oscillated from the laser oscillators 240 and 240 '; A shopping lens unit for condensing the laser beam transmitted from the reflecting means; A quenching nozzle unit for injecting cooling mist along a laser beam irradiated from the shopping lens; And an air suction unit for sucking dust generated from the cooling mist sprayed from the quenching nozzle unit and the initial crack of the glass substrate (G).
  • the quenching nozzles in the laser irradiation units 250 and 250' may be formed along the upper surface of both sides of the glass substrate rapidly heated by the laser beam. Spray a cooling mist with a temperature significantly lower than the heating temperature.
  • the laser oscillators 240 and 240 ' are installed on the upper portion of the pair of guide tables 230 and 230' so as to be movable forward and backward along the longitudinal direction of the guide tables 230 and 230 ', and the laser source unit which oscillates the laser. And a power supply unit for driving the laser source unit.
  • each of the process tables 220 and 220 ′ disposed in the first cutting unit 200 and the second cutting unit 200 ′ has a length direction of the guide tables 230 and 230 ′.
  • a plurality of fixed rod parts 221 and 221 ' disposed on an upper surface of the base plates 210 and 210' side by side;
  • a plurality of conveyors are arranged in parallel with each of the fixed rods 221, 221 'alternately with the plurality of fixed rods 221, 221', and are installed to be capable of height adjustment up and down with respect to the height of the fixed rods 221,221 '. It comprises a portion (222,222 ').
  • FIG. 8 is a perspective view showing an extract of the process table disposed in the centering portion of the present invention, the centering portion 100, the base plate seated on the bottom surface; And a process table 120 disposed on an upper surface of the base plate to move the glass substrate G straight to the first cutting part 200.
  • the process table 120 includes a glass substrate G.
  • a plurality of fixing rods 121 and the plurality of fixing rods 121 disposed on the upper surface of the base plate along the conveying direction of the alternating arrangement is arranged in parallel to each of the fixing rods 121 and fixed rod portion 121 Consists of a plurality of conveyor portion 122 is installed so that the height can be adjusted up and down with respect to the height.
  • the process table 120 disposed in the centering part 100 may be disposed at the front end of the fixed rod part 121 and disposed at the front end of the glass substrate G seated on the fixed rod part 121.
  • a plurality of rear alignment parts 125 disposed at the rear end of the fixed rod part 121 and interlocking with the stopper 123 and the side alignment part 124 to correct the centering and the orientation of the glass substrate G; It is composed.
  • reference numeral 126 denotes a guide rod 126 that guides when the fixed rod 121 and the conveyor 122 disposed at the outermost portion of the process table 120 are folded or extended.
  • the process tables 120, 220, and 220 ′ provided in the centering unit 100, the first cutting unit 200, and the second cutting unit 200 ′ are each of the process tables 120, 220, and 220 ′.
  • the rod parts 121, 221, 221 ′ and the conveyor parts 121, 222, 222 ′ are installed to be able to be folded and extended at right angles to the respective longitudinal directions.
  • FIG. 9 is a flowchart illustrating a process of operating a glass substrate cutting processing system using a laser according to the present invention.
  • the process of cutting a glass substrate in detail is as follows.
  • the glass substrate before processing is input to the process table of the centering portion and seated.
  • a plurality of cameras disposed at an upper predetermined position of the centering unit measures position data such as parallelism with respect to each side of the glass substrate, right angle with each corner, and straightness with respect to the transfer direction with respect to a predetermined center reference line (S110). ).
  • the glass substrate sequentially moved straight through the centering part continues to move straight through the process table of the first cutting part.
  • the glass substrate is seated on the process table of the first cutting unit, and the laser irradiating unit provided in the first cutting unit continuously has a predetermined depth at a predetermined position at both edges of the glass substrate along the conveying direction of the glass substrate.
  • the cutting schedule line which is a crack is formed (S120).
  • the glass substrate sequentially moved straight through the first cutting part continues to move straight through the process table of the first breaking part.
  • the cutting device provided on both sides of the first breaking part is pressed and cut on both sides of the glass substrate based on the cutting schedule line generated by the laser irradiation part in the process of being seated on the process table of the first breaking part. Physically separated from the glass substrate body (S130).
  • the glass substrate sequentially transferred straight through the first breaking part is seated on the process table of the rotating part.
  • the glass substrate is seated on the plate grid provided on the upper surface of the rotating unit, and rotates by 90 ° using a turntable installed at the bottom of the plate grid in a state where the glass plate is seated on the plate grid (S140).
  • the glass substrate rotated by 90 ° by the rotation part is sequentially moved straight and is then placed on the process table of the second cutting part and continues to be transferred straight.
  • the second substrate is cut while the glass substrate is seated and transferred to the process table of the second cutting part.
  • the laser irradiation part provided in the portion is formed along the transfer direction of the glass substrate, the cutting scheduled line, which is a crack of a predetermined depth, is continuously formed at a predetermined position at both edges of the glass substrate (S150).
  • the glass substrate sequentially moved straight through the second cutting part continues to move straight through the process table of the second breaking part.
  • the cutting device provided on both sides of the second breaking part is pressed and cut on both sides of the glass substrate based on the cutting schedule line generated by the laser irradiation part in the process of being seated on the process table of the second breaking part. Physically separate from the glass substrate body (S160).
  • the glass substrate after the cutting process is output to the outside through the buffer means buffer (S170).
  • FIG. 10 is a flowchart illustrating a process of operating a process table by position data measured by a camera of a centering unit according to the present invention, and interworking with an external interpolation control apparatus based on position data of a glass substrate measured by a centering unit. The process is described in detail as follows.
  • the parallelism of each side of the glass substrate, the perpendicularity to each corner Measure position data such as straightness in the feed direction.
  • the position data of the glass substrate thus measured is transmitted to an external interpolation control device (S210).
  • the measured position data of the glass substrate is analyzed by the interpolation controller, and the interpolation controller analyzes the values thus analyzed, that is, the X and Y coordinate values, so that the slope of each side of the glass substrate with respect to the predetermined center reference line, A linear equation corresponding to an error such as an angle is derived.
  • the interpolated control signal is generated with respect to the predetermined original control signal through the linear equation derived as described above (S220).
  • Each process table disposed in the centering unit, the first and second cutting units, and the first and second braking units performs a corrected operation in conjunction with the interpolated control signals through the control signals generated by the interpolation control apparatus (S230). ).
  • each process table executes a corrected operation in conjunction with the interpolated control signals of the interpolation control apparatus.
  • the fixed rod part and the conveyor part disposed at the outermost sides of the plurality of fixed rod parts and the plurality of conveyor parts arranged on each process table execute folding or expanding in a direction perpendicular to the longitudinal direction (S240).
  • the fixed rod part and the conveyor part extend in a direction perpendicular to the longitudinal direction.
  • the glass substrate before processing placed on the centering part is relatively small.
  • the fixed rod portion and the conveyor portion is to perform folding in a direction perpendicular to the longitudinal direction.
  • the edge of the glass substrate is supported by the support shaft with the fixed rod part and the conveyor part disposed at the outermost part. It can be pressurized.
  • the stopper, the side alignment unit, and the rear alignment unit provided in the process table of the centering unit operate in cooperation with each other according to the interpolated control signal of the interpolation controller (S250).
  • the stopper provided at the front end of the process table of the centering part and in close contact with the front end of the glass substrate seated on the process table temporarily stops the progress of the glass substrate.
  • the glass substrate is centered according to the interpolated control signal of the interpolation controller.
  • FIG. 11 is a flowchart illustrating a process of operating each laser irradiator based on position data measured by a camera of a second braking unit according to the present invention, and an external interpolation control apparatus based on position data measured by the second braking unit. The following describes the interworking process with.
  • a plurality of cameras disposed on the second breaking part with respect to the glass substrate that has been cut in the second breaking part has a parallelism with respect to each side of the glass substrate, a right angle with respect to each corner, and a transfer with respect to a predetermined center reference line. Measure position data such as straightness in the direction. The position data of the glass substrate thus measured is transmitted to an external interpolation control device (S310).
  • the measured position data of the glass substrate is analyzed through the interpolation control device, and the interpolation control device analyzes the values thus analyzed, that is, the X and Y coordinate values, and the slope and angle of each side of the glass substrate with respect to the predetermined center reference line.
  • the linear equation corresponding to the error of the angle, etc. is derived.
  • the interpolated control signal is generated with respect to the predetermined original control signal through the linear equation derived as described above (S320).
  • the interpolation control apparatus commands the laser irradiation units of the first and second cutting units to perform a corrected operation in accordance with the interpolated control signals through the control signals generated by the interpolation control apparatus (S330).
  • each laser irradiation part disposed in the first and second cutting parts and connected in a cantilever structure to the laser oscillation part moves in the same direction as the traveling direction of the glass substrate integrally with the laser oscillation part and is perpendicular to the moving direction of the laser oscillation part. It moves (S340).
  • the pair of the laser irradiation unit, the process of moving in the front and rear directions along the pair of guide table and the process of moving a predetermined distance in the left and right directions perpendicular to the front and rear directions in the longitudinal direction of the guide table It is connected to the cantilever structure independently from each laser oscillation portion so as to be operable independently.
  • the pair of laser irradiation units are precisely measured in micro units by the desired width of one side or both sides of the glass substrate which is mounted and moved to the process table of the first and second cutting units in association with the interpolated control signals of the external interpolation controller. It can be cut and processed.
  • the movement of the pair of laser irradiation units interlocked with the interpolated control signals from the interpolation control device may be performed even when an error in the movement distance is generated even though the laser irradiation units are minutely moved in the same direction as the laser oscillation unit.
  • the error is precisely corrected by the interpolated control signal of the external interpolation controller.
  • the pair of laser irradiators connected in a cantilever structure to the laser oscillator independently corrects the width of the distance moving at right angles to the moving direction of the laser oscillator in real time by interpolated control signals of the external interpolation controller.
  • the laser beam is irradiated from each laser irradiator so as to correspond to more precise parallelism, perpendicularity, and straightness of the glass substrate.
  • a pair of laser irradiation units are disposed on both sides of the process table of each of the first and second cutting units, and the pair of laser irradiation units are independently connected to each of the laser oscillating units and move.
  • the distance moving at right angles to the moving direction of the laser oscillator may vary depending on the interpolated control signal of the interpolation control apparatus.
  • This phenomenon is more pronounced when the squareness corresponding to each edge of the glass substrate is not symmetric with each other before being processed.

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Abstract

The present invention relates to a glass substrate cutting system using a laser. In detail, the glass substrate cutting system using a laser may correct a cutting line radiated with a laser beam on a transferred glass substrate seated on a process table in real-time to precisely process the glass substrate. Also, a process for cutting both side portions of the glass substrate, a process for rotating the glass substrate at an angle of about 90 degrees, and a process for cutting both of the other side portions of the glass substrate may be performed on a continuous line to significantly reduce a takt time. In addition, the outermost fixing rod part and conveyer part of a plurality of fixing rod parts and conveyer parts may be perpendicularly folded and expanded with respect to a length direction to compatibly cut the glass substrate seated on a top surface of the process table in size.

Description

레이저를 이용한 유리기판 절단가공 시스템Glass substrate cutting processing system using laser

본 발명은 레이저를 이용한 유리기판 절단가공 시스템에 관한 것으로, 상세하게 공정테이블에 안착되어 이송되는 유리기판에 레이저 빔을 조사하는 절단 예정선을 실시간으로 교정함으로써 정교하게 유리기판을 가공할 수 있고, 유리기판의 양측부를 절단하는 공정과, 90°회전하는 공정과, 유리기판의 또다른 양측부를 절단하는 공정을 각각 연속선상에 구획하여 설치함으로써 택 타임(takt time)을 현저히 감소시킬 수 있으며, 공정테이블에 구비된 복수 개의 상기 고정로드부 및 복수 개의 상기 컨베이어부 중 최외각에 배치된 고정로드부와 컨베이어부는 각각의 길이방향에 대해 직각으로 폴딩 및 확장이 가능하도록 설치되어 공정테이블의 상면에 안착된 유리기판의 규격에 호환가능하게 절단가공할 수 있는 레이저를 이용한 유리기판 절단가공 시스템에 관한 것이다.The present invention relates to a glass substrate cutting processing system using a laser, the glass substrate can be precisely processed by real-time correction of the cutting schedule line for irradiating the laser beam to the glass substrate that is seated on the process table in detail, Tak time can be significantly reduced by dividing the process of cutting both sides of the glass substrate, rotating the process by 90 °, and cutting the other side of the glass substrate on a continuous line. The fixed rod part and the conveyor part disposed at the outermost part of the plurality of fixed rod parts and the plurality of conveyor parts provided on the table are installed to be folded and extended at right angles to their respective longitudinal directions and are seated on the upper surface of the process table. Glass substrate cutting process sheath using laser which can be cut to compatible specifications of glass substrate Relate to.

일반적으로 디스플레이용 유리기판은 액정 디스플레이, 플라즈마 디스플레이, 유기 EL 디스플레이 등의 디스플레이 장치에 사용되는 유리를 의미한다.Generally, a glass substrate for a display means glass used for display apparatuses, such as a liquid crystal display, a plasma display, an organic electroluminescent display.

디스플레이용 유리기판을 절단하는 종래 방법의 하나로는 스크라이브 휠 (Scribe Wheel) 방식이 있었다. 스크라이브 휠 방식은 소정 직경을 갖는 원판의 원주면에 미세한 다이아몬드를 설치하고, 이를 고속으로 회전시키면서 절단하고자 하는 절단 예정선에 접촉시켜 유리기판의 표면에 소정 깊이의 스크라이브 라인을 형성하는 방식이다. 스크라이브 라인이 형성된 유리기판에 물리적인 충격을 가하여 스크라이브 라인을 따라 기판에 크랙(Crack)을 전파시켜 절단하는 방법이 스크라이브 휠 방식이다. One of the conventional methods for cutting a glass substrate for display has been a scribe wheel method. The scribe wheel method is a method of forming a scribe line having a predetermined depth on the surface of the glass substrate by installing a fine diamond on the circumferential surface of the disc having a predetermined diameter, and contacting the cutting schedule line to be cut while rotating it at high speed. The scribing wheel method is a method in which a crack is propagated and cut along the scribe line by applying a physical impact to the glass substrate on which the scribe line is formed.

그러나, 스크라이브 휠 방식은 일정 면적 이상의 절단 가장자리을 필요로 하며, 절단시 파티클(particle)이 발생하여 이를 제거하기 위한 별도의 세정 공정 및 건조 공정이 요구되며, 절단면이 매끄럽지 못하고, 소모품의 비용이 증가하는 단점이 있었다.However, the scribe wheel method requires a cutting edge of a predetermined area or more, particles are generated during cutting and require a separate cleaning process and a drying process to remove them, the cutting surface is not smooth, and the cost of consumables increases. There was a downside.

이러한 단점을 극복하고자 레이저를 이용한 유리기판 절단 장치가 도입되었다. 종래 레이저를 이용한 유리기판 절단 장치는, 레이저 절단 헤드를 고정 상태로 유지하면서 유리기판이 위치하는 가공 테이블을 절단 방향으로 이동하는 방법을 사용하였다. In order to overcome this disadvantage, a glass substrate cutting apparatus using a laser was introduced. In the conventional glass substrate cutting device using a laser, a method of moving the processing table in which the glass substrate is located in the cutting direction while maintaining the laser cutting head in a fixed state is used.

이는 레이저 발진부의 무게가 무겁기 때문에 레이저 절단 헤드를 움직일 경우, 레이저 절단 헤드의 하중으로 인하여 절단 헤드를 정밀하게 제어하기 어렵기 때문이다. 레이저 발진부는 250 kg 내지 300 kg 정도의 하중을 지니게 되는데, 이러한 하중을 움직일 경우 레이저 절단 헤드를 지지하는 구조물의 처짐이 발생하여 레이저 빔의 경로(path) 위치가 틀어져 절단 정도 및 안정성이 저하되는 문제가 발생된다.This is because when the laser cutting head is moved because the weight of the laser oscillation part is heavy, it is difficult to precisely control the cutting head due to the load of the laser cutting head. The laser oscillation part has a load of about 250 kg to 300 kg. When this load is moved, the structure supporting the laser cutting head is sag and the path position of the laser beam is distorted, thereby reducing the cutting accuracy and stability. Is generated.

또한, 가공 테이블을 움직여야 하므로, 가공 테이블을 설치하기 위한 레이아웃이 차지하는 면적이 늘어나게 되며, 하나의 유리기판을 절단가공하는 단위시간인 택 타임 및 가공 테이블의 원위치 복귀에 시간이 소요되어 사이클 타임이 증가하므로 이에 따른 생산성이 저하되는 문제가 있었다.In addition, since the machining table must be moved, the area occupied by the layout for installing the machining table increases, and the cycle time increases due to the tack time, which is the unit time for cutting a single glass substrate, and the time required for returning to the original position of the machining table. Therefore, there was a problem that the productivity is reduced accordingly.

게다가, 유기기판 자체의 중량이 비교적 무거운 7세대 유리기판(1950×2200mm), 8세대 유리기판(2260×2500mm)을 절단가공하는 과정에서는 기존과 같이 가공 테이블 자체가 이송되는 구조는 많은 문제점을 안고 있다.In addition, in the process of cutting and processing seventh generation glass substrates (1950 × 2200mm) and eighth generation glass substrates (2260 × 2500mm), which are relatively heavy in weight, the structure in which the processing table itself is transported has many problems. have.

한편, 갠트리 스테이지 구조로 이루어진 절단헤드와, 이 절단헤드와 일체로 연결된 레이저 발진부가 유리기판이 이동하는 방향을 따라 전,후방으로 이동하는 구조의 절단장치가 개시되어 상기의 문제점을 일정부분 해소하였지만, 절단헤드의 동작을 위해 필연적으로 갠트리 스테이지 전체가 구동함으로써 불필요한 관리 운영이 드는 단점이 있으며, 가공 테이블의 상면에 안착되어 이송되는 유리기판이 일정각도 미세하게 틀어짐이 발생하는 경우 그러한 틀어짐을 교정하는 수단이 없어 정교하게 유리기판을 절단가공할 수 없는 또다른 문제점이 유발된다.Meanwhile, a cutting head having a gantry stage structure and a laser oscillator connected integrally with the cutting head move forward and backward along the direction in which the glass substrate moves to solve the above problems. Inevitably, the entire gantry stage is inevitably driven for the operation of the cutting head, which leads to unnecessary management and operation.In the case where the glass substrate to be transported to the upper surface of the processing table is minutely distorted at a certain angle, it is necessary to correct such distortion. Another problem arises in that there is no means to cut and finely cut glass substrates.

본 발명은 상기한 점을 감안하여 제안된 것으로, 본 발명의 목적은 기존에 비해 유리기판을 보다 더 정교하게 절단가공함은 물론 택 타임을 감소시킬 수 있는 레이저를 이용한 유리기판 절단가공 시스템을 제공하는 데 있다.The present invention has been proposed in view of the above, and an object of the present invention is to provide a glass substrate cutting processing system using a laser that can cut the glass substrate more precisely and reduce the tack time as compared to the conventional one. There is.

본 발명에 따른 유리기판 절단가공 시스템은, 장방형의 상기 유리기판이 안착된 상태에서 움직이기 전 일정한 방향성을 교정하는 센터링부; 센터링부로부터 일정한 방향성을 갖고 순차적으로 직진이송된 유리기판의 일측부 또는 양측부에 유리기판의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며, 유리기판의 이송방향에 대해 장방형의 유리기판이 틀어진 각도에 대응되게 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 1 커팅부; 제 1 커팅부로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 유리기판의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하여 이탈시키는 제 1 브레이킹부; 제 1 브레이킹부를 거쳐 순차적으로 직진이송된 유리기판의 타측부를 절단하기 위해 90°회전시키는 회전부; 회전부로부터 90°회전되어 순차적으로 직진이송된 유리기판의 일측부 또는 양측부에 유리기판의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며 유리기판의 이송방향에 대해 유리기판이 틀어진 각도에 대응되게 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 2 커팅부; 제 2 커팅부로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 유리기판의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하는 제 2 브레이킹부;를 포함하여 구성된다.Glass substrate cutting processing system according to the present invention, the centering portion for correcting a certain direction before moving in a state in which the rectangular glass substrate is seated; One side or both sides of the glass substrate, which has been uniformly transferred straight from the centering part, are cut along the transfer direction of the glass substrate by dividing the cutting schedule line, and a rectangular glass substrate with respect to the transfer direction of the glass substrate. A first cutting unit capable of irradiating a laser by correcting a cutting schedule line in real time to correspond to the distorted angle; A first breaking part for physically cutting and leaving one side or both side edge portions of the glass substrate sequentially moved straight after being irradiated by the laser from the first cutting part; A rotating part rotated by 90 ° to cut the other side of the glass substrate sequentially transferred straight through the first breaking part; One side or both sides of the glass substrate rotated by 90 ° from the rotating part and sequentially go straight along the conveying direction of the glass substrate to irradiate the laser to divide the cutting schedule line, and the glass substrate is twisted with respect to the conveying direction of the glass substrate. A second cutting unit capable of irradiating a laser by correcting a cutting schedule line in real time correspondingly; And a second breaking part for physically cutting one or both edge portions of the glass substrate sequentially transferred straight after being irradiated by the laser from the second cutting part.

센터링부에 안착된 유리기판의 규격 및 일정한 방향성에 대한 위치데이터를 측정하기 위해 센터링부의 상부 일정위치에 복수 개의 카메라가 배치된다.A plurality of cameras are disposed at predetermined positions on the upper portion of the centering portion in order to measure positional data on the standard and constant orientation of the glass substrate seated on the centering portion.

제 2 브레이킹부에 네 변의 가장자리가 절단가공된 상태로 안착된 유리기판의 각 모서리 및 각 변에 대한 직각도 및 평행도를 측정하기 위해 제 2 브레이킹부의 상부 일정위치에는 복수 개의 카메라가 배치되며, 이들 카메라에 의해 측정된 위치데이터를 기반으로 제 1 커팅부 및 제 2 커팅부의 레이저 조사에 의한 각각의 절단 예정선이 실시간으로 교정되도록 구성된다.A plurality of cameras are disposed at an upper predetermined position of the second breaking portion to measure the angle and parallelism of each edge and each side of the glass substrate seated with the edges of the four sides cut in the second breaking portion. Based on the position data measured by the camera, each cutting schedule line by laser irradiation of the first and second cutting units is configured to be corrected in real time.

각각의 제 1 커팅부 및 제 2 커팅부는, 바닥면에 안착되는 베이스플레이트; 베이스플레이트의 상면에 배치되어 유리기판을 일정한 방향으로 직진이송시키는 공정테이블; 베이스플레이트의 양측단 상면에 나란하게 설치되는 한 쌍의 가이드테이블; 한 쌍의 가이드테이블을 따라 전,후 방향으로 이동하면서 공정테이블의 상면에 위치된 유리기판을 가공하기 위해 레이저를 발진하는 한 쌍의 레이저 발진부; 레이저 발진부와 일체로 한 쌍의 가이드테이블을 따라 이송되며, 레이저 발진부로부터 발진된 레이저를 유리기판에 조사하는 한 쌍의 레이저 조사부;를 포함하여 구성된다.Each of the first cutting portion and the second cutting portion includes: a base plate seated on the bottom surface; A process table disposed on an upper surface of the base plate to move the glass substrate straight in a predetermined direction; A pair of guide tables installed side by side on an upper surface of both ends of the base plate; A pair of laser oscillators for oscillating the laser to process the glass substrate located on the upper surface of the process table while moving in a forward and backward direction along the pair of guide tables; And a pair of laser irradiation units which are conveyed along a pair of guide tables integrally with the laser oscillation unit and irradiate the glass substrate with the laser oscillated from the laser oscillation unit.

한 쌍의 레이저 조사부는, 한 쌍의 가이드테이블을 따라 전,후 방향으로 이동하면서 동시에 각각 독립적으로 가이드테이블의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동가능하게 설치되며, 각각의 레이저 발진부로부터 외팔보(cantilever) 구조로 연결되어 각각 독립적으로 이동된다.The pair of laser irradiation units are installed to be moved along the pair of guide tables in the forward and rear directions, and at the same time independently moveable in a left and right direction perpendicular to the longitudinal direction of the guide table. It is connected to each other cantilever (cantilever) structure from each laser oscillation portion is moved independently.

또한, 레이저 조사부는, 유리기판에 초기 크랙을 제공하는 이니셜 크래커; 레이저 발진부로부터 발진된 레이저 빔을 유도하는 반사부; 반사수단으로부터 전달된 레이저 빔을 집광시키는 샤핑렌즈부; 샤핑렌즈로부터 조사된 레이저 빔을 따라 냉각 미스트를 분사하는 켄칭노즐부; 켄칭노즐부로부터 분사된 냉각 미스트 및 유리기판의 초기 크랙으로부터 발생된 분진을 흡입하는 에어석션부;를 포함하여 구성된다.In addition, the laser irradiation unit, the initial cracker for providing an initial crack to the glass substrate; A reflector for guiding the laser beam oscillated from the laser oscillator; A shopping lens unit for condensing the laser beam transmitted from the reflecting means; A quenching nozzle unit for injecting cooling mist along the laser beam irradiated from the shopping lens; And an air suction unit for sucking dust generated from the cooling mist sprayed from the quenching nozzle unit and the initial crack of the glass substrate.

레이저 발진부는 각각 한 쌍의 가이드테이블의 상부에 가이드테이블의 길이방향을 따라 전,후 방향으로 이동가능하게 설치되며, 레이저를 발진하는 레이저 소스부와, 이 레이저 소스부를 구동시키는 파워 서플라이부를 포함하여 구성된다.The laser oscillation unit is installed on the upper part of the pair of guide tables so as to be movable in the front and rear directions along the longitudinal direction of the guide table, and includes a laser source unit for oscillating the laser and a power supply unit for driving the laser source unit. It is composed.

제 1 커팅부 및 제 2 커팅부에 구비된 각각의 공정테이블은, 가이드테이블의 길이방향을 따라 나란하게 베이스플레이트의 상면에 배치된 복수 개의 고정로드부; 복수 개의 고정로드부와 교번하여 각 고정로드부에 나란하게 배치되며, 고정로드부의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부;를 포함하여 구성된다.Each of the process tables provided in the first and second cutting parts may include: a plurality of fixed rod parts disposed on an upper surface of the base plate side by side in the longitudinal direction of the guide table; And a plurality of conveyor parts disposed in parallel with each of the fixed rod parts alternately with the plurality of fixed rod parts, the height of the fixed rod being adjustable up and down with respect to the height of the fixed rod parts.

센터링부는, 바닥면에 안착되는 베이스플레이트; 및 베이스플레이트의 상면에 배치되어 유리기판을 제 1 커팅부로 직진이송시키는 공정테이블;을 포함하여 구성되며, 이 공정테이블은, 유리기판의 이송방향을 따라 베이스플레이트의 상면에 배치된 복수 개의 고정로드부와, 복수 개의 고정로드부와 교번하여 각 고정로드부에 나란하게 배치되며 고정로드부의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부로 구성된다.The centering portion, the base plate seated on the bottom surface; And a process table disposed on an upper surface of the base plate to move the glass substrate straight to the first cutting portion, wherein the process table includes a plurality of fixed rods disposed on the upper surface of the base plate along a conveying direction of the glass substrate. And a plurality of conveyor parts disposed alternately with each of the plurality of fixed rod parts and arranged in parallel with each of the fixed rod parts, the height of which being adjustable up and down with respect to the height of the fixed rod parts.

센터링부에 구비된 공정테이블은, 고정로드부의 전단부에 배치되어 고정로드부에 안착된 유리기판의 전단부를 일시 정지시키는 복수 개의 스토퍼; 복수 개의 고정로드부 중 최외각에 위치된 각각의 고정로드부 측부에 배치되어 유리기판의 센터링 및 방향을 교정하는 복수 개의 사이드 얼라이먼트부; 고정로드부의 후단부에 배치되어 스토퍼 및 사이드 얼라이먼트와 연동하여 유리기판의 센터링 및 방향을 교정하는 복수 개의 리어 얼라이먼트부;를 더 포함하여 구성된다.The process table provided in the centering part includes: a plurality of stoppers disposed at the front end of the fixed rod part to temporarily stop the front end of the glass substrate seated on the fixed rod part; A plurality of side alignment parts disposed on the side of each of the fixed rod parts positioned at the outermost side of the plurality of fixed rod parts to correct centering and orientation of the glass substrate; And a plurality of rear alignment parts disposed at the rear end of the fixed rod part and interlocked with the stopper and the side alignment to correct the centering and the orientation of the glass substrate.

센터링부, 제 1 커팅부, 제 2 커팅부 각각에 구비된 공정테이블은, 각 공정테이블의 상면에 안착된 유리기판의 규격에 호환가능하도록 복수 개의 고정로드부 및 복수 개의 컨베이어부 중 최외각에 배치된 고정로드부와 컨베이어부가 각각의 길이방향에 대해 직각으로 폴딩 및 확장이 가능하도록 설치된다.The process table provided in each of the centering part, the first cutting part, and the second cutting part is disposed at the outermost part of the plurality of fixed rod parts and the plurality of conveyor parts so as to be compatible with the specifications of the glass substrate seated on the upper surface of each process table. Arranged fixed rod portion and the conveyor portion is installed to be able to fold and expand at right angles to each longitudinal direction.

본 발명의 유리기판 절단가공 시스템은 다음과 같은 장점을 제공한다.The glass substrate cutting system of the present invention provides the following advantages.

첫째, 공정테이블에 안착되어 이송되는 유리기판에 레이저 빔을 조사하는 절단 예정선을 실시간으로 교정함으로써 기존보다 현저히 정교하게 유리기판을 가공할 수 있게 된다.First, it is possible to process the glass substrate more precisely than the existing one by correcting the cutting schedule line irradiating the laser beam to the glass substrate that is seated on the process table in real time.

둘째, 제 1 커팅부 및 제 1 브레이킹부를 통해 유리기판의 양측부를 절단하는 공정과, 회전부를 통해 90°회전하는 공정과, 제 2 커팅부 및 제 2 브레이킹부를 통해 유리기판의 또다른 양측부를 절단하는 공정을 각각 연속선상에 구획하여 설치함으로써 택 타임을 현저히 감소시킬 수 있게 된다.Second, the process of cutting both sides of the glass substrate through the first cutting portion and the first breaking portion, the process of rotating 90 ° through the rotating portion, and the other side of the glass substrate is cut through the second cutting portion and the second breaking portion It is possible to remarkably reduce the tack time by dividing each process into a continuous line.

셋째, 공정테이블에 구비된 복수 개의 상기 고정로드부 및 복수 개의 상기 컨베이어부 중 최외각에 배치된 고정로드부와 컨베이어부는 각각의 길이방향에 대해 직각으로 폴딩 및 확장이 가능하도록 설치되어 공정테이블의 상면에 안착된 유리기판의 규격에 호환가능하게 절단가공할 수 있는 장점이 있다.Third, the fixed rod portion and the conveyor portion disposed at the outermost of the plurality of fixed rod portion and the plurality of the conveyor portion provided on the process table are installed to be folded and extended at right angles to the respective longitudinal directions of the process table. There is an advantage that can be cut cutting compatible with the specifications of the glass substrate seated on the upper surface.

넷째, 한 쌍의 상기 레이저 조사부가, 한 쌍의 가이드테이블을 따라 전,후 방향으로 이동하는 과정과 가이드테이블의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동하는 과정이 독립적으로 동작가능하도록 각각의 레이저 발진부로부터 독립하여 외팔보 구조로 연결됨으로써, 한 쌍의 레이저 조사부는 외부 보간제어장치의 보간된 제어신호에 연동하여 제 1, 2 커팅부의 공정테이블에 안착되어 이동하는 유리기판의 일측부 또는 양측부를 목적하는 너비만큼 마이크로 단위로 정밀하게 절단가공할 수 있는 장점이 있다.Fourth, the pair of laser irradiation unit, the process of moving forward and backward along the pair of guide table and the process of moving a predetermined distance in the left and right directions perpendicular to the front and rear directions of the longitudinal direction of the guide table The cantilever structure is independently connected to each laser oscillation unit so as to be able to operate independently, so that the pair of laser irradiation units are mounted on the process table of the first and second cutting units in association with the interpolated control signals of the external interpolation controller. One side or both sides of the glass substrate has the advantage that can be precisely cut processing in the micro unit by the desired width.

도 1과 도 2는 본 발명에 따른 레이저를 이용한 유리기판 절단가공 시스템의 전체구성을 도시한 개략도,1 and 2 is a schematic diagram showing the overall configuration of a glass substrate cutting processing system using a laser according to the present invention,

도 3은 본 발명에 의해 가공되는 유리기판의 규격에 따라 센터링부에서 유리기판이 센터링되는 과정을 나타내는 개략도,Figure 3 is a schematic diagram showing a process of centering the glass substrate in the centering portion in accordance with the specifications of the glass substrate processed by the present invention,

도 4와 도 5는 본 발명의 제 2 브레이킹부에 구비된 카메라로부터 측정된 위치데이터를 기반으로 제 1 커팅부 및 제 2 커팅부에서 보간제어를 통해 절단 예정선이 교정되는 과정을 나타낸 개략도,4 and 5 are schematic diagrams showing a process of cutting the cutting schedule line through the interpolation control in the first cutting unit and the second cutting unit based on the position data measured from the camera provided in the second braking unit of the present invention,

도 6은 본 발명의 일부 구성을 발췌하여 도시한 사시도,6 is a perspective view showing an extract of a part of the present invention,

도 7은 본 발명의 일부 구성을 발췌하여 도시한 또다른 사시도,7 is another perspective view showing a part of the configuration of the present invention,

도 8은 본 발명의 센터링부에 배치된 공정테이블을 발췌하여 도시한 사시도,8 is a perspective view showing an extract of the process table disposed in the centering portion of the present invention;

도 9는 본 발명에 따른 레이저를 이용한 유리기판 절단가공 시스템이 동작하는 과정을 나타낸 흐름도,9 is a flowchart illustrating a process of operating a glass substrate cutting processing system using a laser according to the present invention;

도 10은 본 발명에 따른 센터링부의 카메라에 의해 측정된 위치데이터에 의해 공정테이블이 동작하는 과정을 나타낸 흐름도,10 is a flowchart illustrating a process of operating a process table by position data measured by a camera of a centering unit according to the present invention;

도 11은 본 발명에 따른 제 2 브레이킹부의 카메라에 의해 측정된 위치데이터를 기반으로 각 레이저 조사부가 동작하는 과정을 나타낸 흐름도이다.11 is a flowchart illustrating a process of operating each laser irradiation unit based on the position data measured by the camera of the second breaking unit according to the present invention.

이하, 도면을 참조하여 본 발명의 실시예를 설명한다.Hereinafter, embodiments of the present invention will be described with reference to the drawings.

도 1과 도 2는 본 발명에 따른 레이저를 이용한 유리기판 절단가공 시스템의 전체구성을 도시한 개략도이다. 도 1에 도시된 부분과 도 2에 도시된 부분이 연결되어 전체 유리기판 절단가공 시스템을 구성한다.1 and 2 is a schematic diagram showing the overall configuration of a glass substrate cutting processing system using a laser according to the present invention. The part shown in FIG. 1 and the part shown in FIG. 2 are connected to constitute an entire glass substrate cutting processing system.

본 발명의 시스템은, 장방형의 상기 유리기판(G)이 안착된 상태에서 움직이기 전 일정한 방향성을 교정하는 센터링부(100); 센터링부(100)로부터 일정한 방향성을 갖고 순차적으로 직진이송된 유리기판(G)의 일측부 또는 양측부에 유리기판(G)의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며, 유리기판(G)의 이송방향에 대해 장방형의 유리기판(G)이 틀어진 각도에 대응되게 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 1 커팅부(200); 제 1 커팅부(200)로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 유리기판(G)의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하여 이탈시키는 제 1 브레이킹부(300); 제 1 브레이킹부(300)를 거쳐 순차적으로 직진이송된 유리기판(G)의 타측부를 절단하기 위해 90°회전시키는 회전부(400); 회전부(400)로부터 90°회전되어 순차적으로 직진이송된 유리기판(G)의 일측부 또는 양측부에 유리기판(G)의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며 유리기판(G)의 이송방향에 대해 유리기판(G)이 틀어진 각도에 대응되게 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 2 커팅부(200'); 제 2 커팅부(200')로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 유리기판(G)의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하는 제 2 브레이킹부(300');를 포함한다.The system of the present invention, the rectangular glass substrate (G) is a centering portion (100) for correcting the constant direction before moving in the seated state; One side or both sides of the glass substrate (G), which has a constant direction from the centering unit 100, and is sequentially straight forward, irradiates the laser along the conveying direction of the glass substrate (G) to divide the cutting schedule line, and the glass substrate A first cutting part 200 capable of irradiating a laser by correcting a cutting schedule line in real time so as to correspond to an angle at which the rectangular glass substrate G is twisted with respect to the feeding direction of (G); A first breaking part 300 which physically cuts and detaches one side portion or both side edge portions of the glass substrate G sequentially moved straight after being irradiated by the laser from the first cutting portion 200; A rotating part 400 which is rotated by 90 ° to cut the other side of the glass substrate G sequentially straight transferred through the first breaking part 300; One side or both sides of the glass substrate G, which is rotated 90 ° from the rotating part 400 and sequentially straight, are irradiated with a laser along the conveying direction of the glass substrate G to partition a cutting schedule line, and the glass substrate G A second cutting part 200 ′ capable of irradiating a laser by correcting a cutting schedule line in real time so as to correspond to an angle at which the glass substrate G is twisted with respect to a conveying direction of the back side; And a second breaking part 300 'that physically cuts an edge portion of one side or both side portions of the glass substrate G, which is sequentially transferred straight after being irradiated by the laser from the second cutting unit 200'. .

도 1과 도 2의 도면부호 G3은 제 1, 2 브레이킹부로부터 유리기판의 양측부 가장자리 일정부분이 절단된 절단편을 나타낸다.Reference numeral G3 of Figs. 1 and 2 denotes a cut piece in which a predetermined portion of both side edges of the glass substrate is cut from the first and second breaking parts.

도 3은 본 발명에 의해 가공되는 유리기판의 규격에 따라 센터링부에서 유리기판이 센터링되는 과정을 나타내는 개략도로서, 센터링부(100)에 안착된 유리기판(G)의 규격 및 일정한 방향성에 대한 위치데이터를 측정하기 위해 센터링부(100)의 상부 일정위치에 복수 개의 카메라(500)가 배치된다.Figure 3 is a schematic diagram showing the process of centering the glass substrate in the centering portion in accordance with the specifications of the glass substrate processed by the present invention, the position of the standard and constant orientation of the glass substrate (G) seated on the centering portion 100 In order to measure data, a plurality of cameras 500 are disposed at a predetermined position on the upper portion of the centering unit 100.

센터링부(100)에 배치된 복수 개의 카메라(500)는 일정한 위치에 고정배치되는 것과 상대적으로 큰 유리기판(G1)과 상대적으로 작은 유리기판(G2)의 각 변, 각 모서리를 호환적으로 촬영하여 측정할 수 있도록 일정거리 이동가능하게 배치되는 것으로 구분된다.The plurality of cameras 500 disposed in the centering unit 100 are fixedly positioned at a predetermined position, and photograph each side and each corner of a relatively large glass substrate G1 and a relatively small glass substrate G2 interchangeably. It is divided into being arranged to move a certain distance so that it can be measured.

센터링부(100)에 위치한 유리기판(G)에 대해 공통적으로 기준이 되는 중앙의 기준선(L) 양단에도 카메라(500)가 구비되어 유리기판(G)의 위치데이터, 즉 X,Y 좌표축에 대한 기준값을 제공한다.The camera 500 is also provided at both ends of the center reference line L, which is commonly used as a reference to the glass substrate G located in the centering part 100, so that the position data of the glass substrate G, that is, the X and Y coordinate axes Provide a reference value.

이렇게 측정된 유리기판(G)의 위치데이터, 즉 X,Y 좌표값은 실시간으로 외부의 보간제어장치에 전송된다.The measured position data of the glass substrate G, that is, the X and Y coordinate values are transmitted to an external interpolation control device in real time.

도 4와 도 5는 본 발명의 제 2 브레이킹부에 구비된 카메라로부터 측정된 위치데이터를 기반으로 제 1 커팅부 및 제 2 커팅부에서 보간제어를 통해 절단 예정선이 교정되는 과정을 나타낸 개략도이다. 제 2 브레이킹부(300')에 네 변의 가장자리가 절단가공된 상태로 안착된 유리기판(G)의 각 모서리 및 각 변에 대한 직각도 및 평행도를 측정하기 위해 제 2 브레이킹부(300')의 상부 일정위치에는 복수 개의 카메라(500')가 배치되며, 이들 카메라(500')에 의해 측정된 위치데이터를 기반으로 제 1 커팅부(200) 및 제 2 커팅부(200')의 레이저 조사에 의한 각각의 절단 예정선이 실시간으로 교정되게 구성된다.4 and 5 are schematic diagrams illustrating a process of cutting a cutting schedule line through interpolation control in the first and second cutting units based on position data measured from a camera provided in the second breaking unit of the present invention. . Four edges of the second breaking portion 300 'with the edges of the glass substrate (G) seated in a state in which cutting is cut, the angle and the parallelism of each side of the second braking portion 300' A plurality of cameras 500 'are arranged at an upper predetermined position, and the laser beams of the first and second cutting parts 200 and 200' are radiated based on the position data measured by the cameras 500 '. Each cut schedule line is configured to be corrected in real time.

도 4는 제 2 브레이킹부(300')에 구비된 복수 개의 카메라(500')로부터 측정된 유리기판(G)의 위치데이터를 기반으로 외부의 보간제어장치에 의한 분석 결과 평행도, 즉 유리기판(G)이 진행방향에 대해 틀어짐이 발생하지 않아 기설정된 본래의 제어신호에 의해 제 1, 2 커팅부(200,200')에 각각 구비된 한 쌍의 레이저 조사부(250,250')가 레이저 발진부와 일체로 한 쌍의 가이드테이블(230,230')을 따라 이동하며, 레이저 발진부의 진행방향에 대해 직각방향으로는 이동하지 않는 상태를 나타낸다.4 is an analysis result parallelism, i.e., glass substrate, based on the position data of the glass substrate G measured from the plurality of cameras 500 'provided in the second braking unit 300'. G) does not occur in the traveling direction, so that the pair of laser irradiation units 250 and 250 'provided in the first and second cutting units 200 and 200' are respectively integrated with the laser oscillation unit by the preset original control signal. It moves along the pair of guide tables 230, 230 ′, and does not move in a direction perpendicular to the traveling direction of the laser oscillator.

도 5는 제 2 브레이킹부(300')에 구비된 복수 개의 카메라(500')로부터 측정된 유리기판(G)의 위치데이터를 기반으로 외부의 보간제어장치에 의한 분석 결과 평행도, 즉 유리기판(G)이 진행방향에 대해 틀어짐이 발생하여 보간된 제어신호에 의해 제 1, 2 커팅부(200,200')에 각각 구비된 한 쌍의 레이저 조사부(250,250')가 레이저 발진부와 일체로 한 쌍의 가이드테이블(230,230')을 따라 이동하는 동시에 레이저 발진부의 진행방향에 대해 직각방향으로 점차 이동하여 중앙의 기준선(L)에 대해 일정한 각도로 비스듬히 이동하게 된다. FIG. 5 is an analysis result parallelism, ie, a glass substrate, based on the position data of the glass substrate G measured from the plurality of cameras 500 'provided in the second braking unit 300'. G) A pair of laser irradiation units 250 and 250 'provided in the first and second cutting units 200 and 200' are respectively integrated with the laser oscillating unit by the interpolation of the control signal. While moving along the tables 230 and 230 ′, they are gradually moved in a direction perpendicular to the direction of travel of the laser oscillator and obliquely at an angle with respect to the center reference line L.

즉, 중앙의 기준선(L)과 평행한 본래의 제어신호에 연동하여 이동되면서 형성된 교정전 절단 예정선(L1)에 대해 보간된 제어신호에 연동하여 이동되면서 형성된 교정후 절단 예정선(L2)은 일정한 경사각 만큼 교정된다.That is, the post-correction cutting schedule line L2 formed while moving in conjunction with the interpolated control signal for the pre-calibration cutting schedule line L1 formed while moving in conjunction with the original control signal parallel to the center reference line L in the center is It is corrected by a certain tilt angle.

이렇게 실시간으로 교정되는 레이저 조사부(250,250')의 운동으로 유리기판(G)을 기존보다 현저히 정밀하게 절단가공할 수 있게 된다.Thus, the glass substrate G can be cut and processed more precisely than before by the movement of the laser irradiation units 250 and 250 ′ which are calibrated in real time.

도 6은 본 발명의 일부 구성을 발췌하여 도시한 사시도이고, 도 7은 본 발명의 일부 구성을 발췌하여 도시한 또다른 사시도를 나타낸다.FIG. 6 is a perspective view showing some components of the present invention, and FIG. 7 shows another perspective view showing some components of the present invention.

도 6과 도 7을 참조하면, 각각의 제 1 커팅부(200) 및 제 2 커팅부(200')는, 바닥면에 안착되는 베이스플레이트(210,210'); 베이스플레이트(210,210')의 상면에 배치되어 유리기판(G)을 일정한 방향으로 직진이송시키는 공정테이블(220,220'); 베이스플레이트(210,210')의 양측단 상면에 나란하게 설치되는 한 쌍의 가이드테이블(230,230'); 한 쌍의 가이드테이블(230,230')을 따라 전,후 방향으로 이동하면서 공정테이블(220,220')의 상면에 위치된 유리기판(G)을 가공하기 위해 레이저를 발진하는 한 쌍의 레이저 발진부(240,240'); 레이저 발진부(240,240')와 일체로 한 쌍의 가이드테이블(230,230')을 따라 이송되며, 레이저 발진부(240,240')로부터 발진된 레이저를 유리기판(G)에 조사하는 한 쌍의 레이저 조사부(250,250');를 포함하여 구성된다.6 and 7, each of the first cutting part 200 and the second cutting part 200 ′ may include: base plates 210 and 210 ′ mounted on a bottom surface thereof; Process tables 220 and 220 'disposed on the upper surfaces of the base plates 210 and 210' to move the glass substrate G straight in a predetermined direction; A pair of guide tables 230 and 230 'installed side by side on an upper surface of both ends of the base plates 210 and 210'; A pair of laser oscillators 240 and 240 'for oscillating the laser to process the glass substrate G located on the upper surface of the process table 220 and 220' while moving forward and backward along the pair of guide tables 230 and 230 '. ); A pair of laser irradiators 250 and 250 'which are conveyed along the pair of guide tables 230 and 230' integrally with the laser oscillators 240 and 240 'and irradiate the glass substrate G with the laser oscillated from the laser oscillators 240 and 240'. It is configured to include.

회전부(400)는 제 1 브레이킹부(300)를 거쳐 순차적으로 직진이송된 유리기판(G)의 타측부를 절단하기 위해 90°회전시키는 역할을 한다.The rotating unit 400 serves to rotate 90 ° in order to cut the other side of the glass substrate G which is sequentially straight forwarded through the first breaking part 300.

이 경우 회전부(400)는 베이스플레이트와, 이 베이스플레이트의 상부에 설치되는 턴테이블(410)과, 이 턴테이블(410)에 안착되어 90°회전되는 평판격자(420)로 구성되며, 턴테이블(410)의 회전으로 회전되는 평판격자(420)의 상부에 유리기판(G)이 안착되어 일체로 회전된다.In this case, the rotating unit 400 includes a base plate, a turntable 410 installed on the base plate, and a flat plate grid 420 seated on the turntable 410 and rotated by 90 °, and the turntable 410. The glass substrate G is seated on the upper portion of the plate grid 420 rotated by the rotation of and rotates integrally.

도 4 내지 도 6에서 보는 바와 같이, 한 쌍의 레이저 조사부(250,250')는, 한 쌍의 가이드테이블(230,230')을 따라 전,후 방향으로 이동하면서 동시에 각각 독립적으로 가이드테이블(230,230')의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동가능하게 설치된다.As shown in FIGS. 4 to 6, the pair of laser irradiation units 250 and 250 ′ move forward and backward along the pair of guide tables 230 and 230 ′ and simultaneously independently of the guide tables 230 and 230 ′. It is installed to be movable a certain distance in the left and right directions perpendicular to the front and rear directions in the longitudinal direction.

한 쌍의 상기 레이저 조사부(250,250')는, 한 쌍의 가이드테이블(230,230')을 따라 전,후 방향으로 이동하는 과정과 가이드테이블(230,230')의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동하는 과정이 독립적으로 동작가능하도록 각각의 레이저 발진부(240,240')로부터 독립하여 외팔보(cantilever) 구조로 연결된다.The pair of laser irradiation units 250 and 250 ′ moves forward and backward along the pair of guide tables 230 and 230 ′ and is perpendicular to the front and rear directions of the guide tables 230 and 230 ′. The process of moving a predetermined distance in the left and right directions is connected to the cantilever structure independently from each of the laser oscillators 240 and 240 'so as to operate independently.

이로 인해, 한 쌍의 레이저 조사부(250,250')는 외부 보간제어장치의 보간된 제어신호에 연동하여 제 1, 2 커팅부(200,200')의 공정테이블(220,220')에 안착되어 이동하는 유리기판(G)의 일측부 또는 양측부를 목적하는 너비만큼 마이크로 단위로 정밀하게 절단가공할 수 있게 된다.As a result, the pair of laser irradiation units 250 and 250 ′ is mounted on the process tables 220 and 220 ′ of the first and second cutting units 200 and 200 ′ in association with the interpolated control signals of the external interpolation control apparatus. One side or both sides of G) can be precisely cut in micro units by the desired width.

레이저 조사부(250,250')는 레이저 발진부(240,240')와 일체로 가이드테이블을 따라 이동하는 동시에 레이저 발진부(240,240')의 진행방향에 대해 직각으로 이동하면서 유리기판의 양측부에 레이저 빔을 조사하여 일정한 절단 예정선을 형성한다.The laser irradiation units 250 and 250 'move along the guide table integrally with the laser oscillating units 240 and 240' and move at right angles to the traveling direction of the laser oscillating units 240 and 240 'while irradiating laser beams to both sides of the glass substrate. Form the cut line.

게다가 한 쌍의 레이저 조사부(250,250')는 각각의 레이저 발진부(240,240')에 대해 독립적으로 레이저 발진부(240,240')의 진행방향에 대해 직각으로 이동한다. 이로 인해, 유리기판(G)에서 절단되는 양측부의 가장자리 절단편의 너비는 서로 다를 수 있게 된다.In addition, the pair of laser irradiation units 250 and 250 'independently moves to the laser oscillating units 240 and 240' at right angles to the traveling direction of the laser oscillating units 240 and 240 '. As a result, the widths of the edge cut pieces of both sides cut from the glass substrate G may be different from each other.

레이저 조사부(250,250')는, 유리기판(G)에 초기 크랙을 제공하는 이니셜 크래커(Initial Cracker); 레이저 발진부(240,240')로부터 발진된 레이저 빔을 유도하는 반사부; 반사수단으로부터 전달된 레이저 빔을 집광시키는 샤핑렌즈부(Sharping Lens); 샤핑렌즈로부터 조사된 레이저 빔(Laser Beam)을 따라 냉각 미스트를 분사하는 켄칭노즐부(Quenching Nozzle); 켄칭노즐부로부터 분사된 냉각 미스트 및 유리기판(G)의 초기 크랙으로부터 발생된 분진을 흡입하는 에어석션부;를 포함하여 구성된다.The laser irradiator 250 or 250 ′ includes an initial cracker for providing an initial crack to the glass substrate G; A reflector for guiding the laser beam oscillated from the laser oscillators 240 and 240 '; A shopping lens unit for condensing the laser beam transmitted from the reflecting means; A quenching nozzle unit for injecting cooling mist along a laser beam irradiated from the shopping lens; And an air suction unit for sucking dust generated from the cooling mist sprayed from the quenching nozzle unit and the initial crack of the glass substrate (G).

레이저 조사부(250,250')에 의해 절단 예정선이 형성되는 과정을 구체적으로 설명하면, 레이저 빔에 의하여 급속 가열된 유리기판의 양측부 상면을 따라 레이저 조사부(250,250') 내의 켄칭노즐부를 통하여 유리기판의 가열 온도보다 현저히 낮은 온도를 갖는 냉각 미스트를 분사한다.Specifically, the process of forming the cutting schedule line by the laser irradiation units 250 and 250 'will be described. The quenching nozzles in the laser irradiation units 250 and 250' may be formed along the upper surface of both sides of the glass substrate rapidly heated by the laser beam. Spray a cooling mist with a temperature significantly lower than the heating temperature.

그러면, 유리기판이 급속 냉각되면서, 그 표면에 소정 깊이의 크랙이 발생하여 절단 예정선이 형성된다.Then, while the glass substrate is rapidly cooled, cracks having a predetermined depth are generated on the surface thereof, and a cut line is formed.

레이저 발진부(240,240')는 각각 한 쌍의 가이드테이블(230,230')의 상부에 가이드테이블(230,230')의 길이방향을 따라 전, 후 방향으로 이동가능하게 설치되며, 레이저를 발진하는 레이저 소스부와, 이 레이저 소스부를 구동시키는 파워 서플라이부를 포함하여 구성된다.The laser oscillators 240 and 240 'are installed on the upper portion of the pair of guide tables 230 and 230' so as to be movable forward and backward along the longitudinal direction of the guide tables 230 and 230 ', and the laser source unit which oscillates the laser. And a power supply unit for driving the laser source unit.

도 6과 도 7에 도시된 바와 같이, 제 1 커팅부(200) 및 제 2 커팅부(200')에 배치된 각각의 공정테이블(220,220')은, 가이드테이블(230,230')의 길이방향을 따라 나란하게 베이스플레이트(210,210')의 상면에 배치된 복수 개의 고정로드부(221,221'); 복수 개의 고정로드부(221,221')와 교번하여 각 고정로드부(221,221')에 나란하게 배치되며, 고정로드부(221,221')의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부(222,222');를 포함하여 구성된다.As shown in FIG. 6 and FIG. 7, each of the process tables 220 and 220 ′ disposed in the first cutting unit 200 and the second cutting unit 200 ′ has a length direction of the guide tables 230 and 230 ′. A plurality of fixed rod parts 221 and 221 'disposed on an upper surface of the base plates 210 and 210' side by side; A plurality of conveyors are arranged in parallel with each of the fixed rods 221, 221 'alternately with the plurality of fixed rods 221, 221', and are installed to be capable of height adjustment up and down with respect to the height of the fixed rods 221,221 '. It comprises a portion (222,222 ').

도 8은 본 발명의 센터링부에 배치된 공정테이블을 발췌하여 도시한 사시도로서, 센터링부(100)는, 바닥면에 안착되는 베이스플레이트; 및 베이스플레이트의 상면에 배치되어 유리기판(G)을 제 1 커팅부(200)로 직진이송시키는 공정테이블(120);을 포함하여 구성되며, 이 공정테이블(120)은, 유리기판(G)의 이송방향을 따라 베이스플레이트의 상면에 배치된 복수 개의 고정로드부(121)와, 복수 개의 고정로드부(121)와 교번하여 각 고정로드부(121)에 나란하게 배치되며 고정로드부(121)의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부(122)로 구성된다.8 is a perspective view showing an extract of the process table disposed in the centering portion of the present invention, the centering portion 100, the base plate seated on the bottom surface; And a process table 120 disposed on an upper surface of the base plate to move the glass substrate G straight to the first cutting part 200. The process table 120 includes a glass substrate G. A plurality of fixing rods 121 and the plurality of fixing rods 121 disposed on the upper surface of the base plate along the conveying direction of the alternating arrangement is arranged in parallel to each of the fixing rods 121 and fixed rod portion 121 Consists of a plurality of conveyor portion 122 is installed so that the height can be adjusted up and down with respect to the height.

도 8을 참조하면, 센터링부(100)에 배치된 공정테이블(120)은, 고정로드부(121)의 전단부에 배치되어 고정로드부(121)에 안착된 유리기판(G)의 전단부를 일시 정지시키는 복수 개의 스토퍼(123); 복수 개의 고정로드부(121) 중 최외각에 위치된 각각의 고정로드부(121) 측부에 배치되어 유리기판(G)의 센터링 및 방향을 교정하는 복수 개의 사이드 얼라이먼트부(124); 고정로드부(121)의 후단부에 배치되어 스토퍼(123) 및 사이드 얼라이먼트(124)와 연동하여 유리기판(G)의 센터링 및 방향을 교정하는 복수 개의 리어 얼라이먼트부(125);를 더 포함하여 구성된다.Referring to FIG. 8, the process table 120 disposed in the centering part 100 may be disposed at the front end of the fixed rod part 121 and disposed at the front end of the glass substrate G seated on the fixed rod part 121. A plurality of stoppers 123 for pausing; A plurality of side alignment parts 124 disposed on the side of each of the fixed rod parts 121 positioned at the outermost part of the plurality of fixed rod parts 121 to correct the centering and the orientation of the glass substrate G; A plurality of rear alignment parts 125 disposed at the rear end of the fixed rod part 121 and interlocking with the stopper 123 and the side alignment part 124 to correct the centering and the orientation of the glass substrate G; It is composed.

도 8의 도면부호 126은 공정테이블(120)의 최외각에 배치된 고정로드부(121) 및 컨베이어부(122)가 폴딩 또는 확장되는 경우 가이드하는 가이드부(126)를 나타낸다.In FIG. 8, reference numeral 126 denotes a guide rod 126 that guides when the fixed rod 121 and the conveyor 122 disposed at the outermost portion of the process table 120 are folded or extended.

도 6 내지 도 8에서 보는 바와 같이, 센터링부(100), 제 1 커팅부(200), 제 2 커팅부(200') 각각에 구비된 공정테이블(120,220,220')은, 각 공정테이블(120,220,220')의 상면에 안착된 유리기판(G)의 규격에 호환가능하도록 복수 개로 배치된 각각의 고정로드부(121,221,221') 및 복수 개로 배치된 각각의 컨베이어부(122,222,222') 중 최외각에 배치된 고정로드부(121,221,221')와 컨베이어부(121,222,222')가 각각의 길이방향에 대해 직각으로 폴딩 및 확장이 가능하도록 설치된다.As shown in FIGS. 6 to 8, the process tables 120, 220, and 220 ′ provided in the centering unit 100, the first cutting unit 200, and the second cutting unit 200 ′ are each of the process tables 120, 220, and 220 ′. Fixed at the outermost of each of the fixed rod parts 121, 221, 221 'disposed in plural and the conveyor parts 122, 222, 222' arranged in plural to be compatible with the specifications of the glass substrate G seated on the upper surface of The rod parts 121, 221, 221 ′ and the conveyor parts 121, 222, 222 ′ are installed to be able to be folded and extended at right angles to the respective longitudinal directions.

도 9는 본 발명에 따른 레이저를 이용한 유리기판 절단가공 시스템이 동작하는 과정을 나타낸 흐름도로서, 유리기판이 절단가공되는 과정을 구체적으로 설명하면 다음과 같다.9 is a flowchart illustrating a process of operating a glass substrate cutting processing system using a laser according to the present invention. The process of cutting a glass substrate in detail is as follows.

먼저, 센터링부의 공정테이블에 가공전의 유리기판이 인풋되어 안착된다. 센터링부의 상부 일정위치에 배치된 복수 개의 카메라가 기설정된 중앙의 기준선에 대해 유리기판의 각 변에 대한 평행도, 각 모서리에 대한 직각도, 이송방향에 대한 직진도 등의 위치데이터를 측정한다(S110).First, the glass substrate before processing is input to the process table of the centering portion and seated. A plurality of cameras disposed at an upper predetermined position of the centering unit measures position data such as parallelism with respect to each side of the glass substrate, right angle with each corner, and straightness with respect to the transfer direction with respect to a predetermined center reference line (S110). ).

단계 S110에서 측정된 위치데이터를 기반으로 외부의 보간제어장치와의 연동과정은 후술한다.An interworking process with an external interpolation control apparatus based on the position data measured in step S110 will be described later.

센터링부를 거쳐 순차적으로 직진이송된 유리기판은 제 1 커팅부의 공정테이블을 통해 계속하여 직진이송한다. 이 경우 제 1 커팅부의 공정테이블에 유리기판이 안착되어 이송되는 과정에서 제 1 커팅부에 구비된 레이저 조사부에 의해 유리기판의 이송방향을 따라 유리기판의 양측부 가장자리 일정위치에 연속적으로 소정 깊이의 크랙인 절단 예정선이 형성된다(S120).The glass substrate sequentially moved straight through the centering part continues to move straight through the process table of the first cutting part. In this case, the glass substrate is seated on the process table of the first cutting unit, and the laser irradiating unit provided in the first cutting unit continuously has a predetermined depth at a predetermined position at both edges of the glass substrate along the conveying direction of the glass substrate. The cutting schedule line which is a crack is formed (S120).

제 1 커팅부를 거쳐 순차적으로 직진이송된 유리기판은 제 1 브레이킹부의 공정테이블을 통해 계속하여 직진이송한다. 이 경우 제 1 브레이킹부의 공정테이블에 안착되어 이송되는 과정에서 제 1 브레이킹부의 양측에 구비된 절단장치가 레이저 조사부에 의해 생성된 절단 예정선을 기준으로 유리기판의 양측부 가장자리를 가압한 후 절단하여 유리기판 몸체부로부터 물리적으로 이탈시킨다(S130).The glass substrate sequentially moved straight through the first cutting part continues to move straight through the process table of the first breaking part. In this case, the cutting device provided on both sides of the first breaking part is pressed and cut on both sides of the glass substrate based on the cutting schedule line generated by the laser irradiation part in the process of being seated on the process table of the first breaking part. Physically separated from the glass substrate body (S130).

제 1 브레이킹부를 거쳐 순차적으로 직진이송된 유리기판은 회전부의 공정테이블에 안착된다. 이 경우 회전부의 상면에 구비된 평판격자에 유리기판이 안착되며, 평판격자에 유리기판이 안착된 상태에서 평판격자의 하부에 설치된 턴테이블을 이용하여 90°회전시키게 된다(S140).The glass substrate sequentially transferred straight through the first breaking part is seated on the process table of the rotating part. In this case, the glass substrate is seated on the plate grid provided on the upper surface of the rotating unit, and rotates by 90 ° using a turntable installed at the bottom of the plate grid in a state where the glass plate is seated on the plate grid (S140).

회전부에 의해 90°회전된 유리기판은 순차적으로 직진이송되어 제 2 커팅부의 공정테이블에 안착되어 계속 직진이송되며, 이 경우 제 2 커팅부의 공정테이블에 유리기판이 안착되어 이송되는 과정에서 제 2 커팅부에 구비된 레이저 조사부에 의해 유리기판의 이송방향을 따라 유리기판의 양측부 가장자리 일정위치에 연속적으로 소정 깊이의 크랙인 절단 예정선이 형성된다(S150).The glass substrate rotated by 90 ° by the rotation part is sequentially moved straight and is then placed on the process table of the second cutting part and continues to be transferred straight. In this case, the second substrate is cut while the glass substrate is seated and transferred to the process table of the second cutting part. The laser irradiation part provided in the portion is formed along the transfer direction of the glass substrate, the cutting scheduled line, which is a crack of a predetermined depth, is continuously formed at a predetermined position at both edges of the glass substrate (S150).

제 2 커팅부를 거쳐 순차적으로 직진이송된 유리기판은 제 2 브레이킹부의 공정테이블을 통해 계속하여 직진이송한다. 이 경우 제 2 브레이킹부의 공정테이블에 안착되어 이송되는 과정에서 제 2 브레이킹부의 양측에 구비된 절단장치가 레이저 조사부에 의해 생성된 절단 예정선을 기준으로 유리기판의 양측부 가장자리를 가압한 후 절단하여 유리기판 몸체부로부터 물리적으로 이탈시킨다(S160).The glass substrate sequentially moved straight through the second cutting part continues to move straight through the process table of the second breaking part. In this case, the cutting device provided on both sides of the second breaking part is pressed and cut on both sides of the glass substrate based on the cutting schedule line generated by the laser irradiation part in the process of being seated on the process table of the second breaking part. Physically separate from the glass substrate body (S160).

각 단계를 통해 네 변의 일정폭이 절단가공된 유리기판에 대해 제 2 브레이킹부의 상부 일정위치에 배치된 복수 개의 카메라가 기설정된 중앙의 기준선에 대해 유리기판의 각변에 대한 평행도, 각 모서리에 대한 직각도, 이송방향에 대한 직진도 등의 위치데이터를 측정한다(S160).The parallelism of each side of the glass substrate with respect to the predetermined center reference line of a plurality of cameras disposed at a predetermined position above the second breaking portion with respect to the glass substrate cut into four predetermined widths through each step, the right angle to each corner Also, position data such as straightness in the conveying direction is measured (S160).

단계 S160에서 측정된 위치데이터를 기반으로 외부의 보간제어장치와의 연동과정은 후술한다.An interworking process with an external interpolation control apparatus based on the position data measured in step S160 will be described later.

이렇게 절단가공 공정을 마친 유리기판은 완충수단인 버퍼를 통해 외부로 아웃풋된다(S170).The glass substrate after the cutting process is output to the outside through the buffer means buffer (S170).

도 10은 본 발명에 따른 센터링부의 카메라에 의해 측정된 위치데이터에 의해 공정테이블이 동작하는 과정을 나타낸 흐름도로서, 센터링부에서 측정된 유리기판의 위치데이터를 기반으로 외부의 보간제어장치와의 연동과정을 구체적으로 설명하면 다음과 같다.FIG. 10 is a flowchart illustrating a process of operating a process table by position data measured by a camera of a centering unit according to the present invention, and interworking with an external interpolation control apparatus based on position data of a glass substrate measured by a centering unit. The process is described in detail as follows.

먼저, 센터링부의 공정테이블에 가공전의 유리기판이 인풋되어 안착된 상태에서 센터링부에 배치된 복수 개의 카메라가 기설정된 중앙의 기준선에 대해 유리기판의 각 변에 대한 평행도, 각 모서리에 대한 직각도, 이송방향에 대한 직진도 등의 위치데이터를 측정한다. 이렇게 측정된 유리기판의 위치데이터는 외부의 보간제어장치에 전송된다(S210).First, in the state where the glass substrate before processing is input and seated on the process table of the centering portion, the parallelism of each side of the glass substrate, the perpendicularity to each corner, Measure position data such as straightness in the feed direction. The position data of the glass substrate thus measured is transmitted to an external interpolation control device (S210).

이렇게 측정된 유리기판의 위치데이터는 보간제어장치를 통해 분석되고 보간제어장치는 이렇게 분석된 값, 즉 X,Y 좌표값을 분석하여 기설정된 중앙의 기준선에 대해 유리기판 각 변의 기울기, 각 모서리의 각도 등의 오차에 대응되는 직선방정식을 도출한다.The measured position data of the glass substrate is analyzed by the interpolation controller, and the interpolation controller analyzes the values thus analyzed, that is, the X and Y coordinate values, so that the slope of each side of the glass substrate with respect to the predetermined center reference line, A linear equation corresponding to an error such as an angle is derived.

이렇게 도출된 직선방정식을 통해 기설정된 본래의 제어신호에 대해 보간된 제어신호를 생성한다(S220).The interpolated control signal is generated with respect to the predetermined original control signal through the linear equation derived as described above (S220).

보간제어장치에 의해 보간 생성된 제어신호를 통해 센터링부와 제 1, 2 커팅부 및 제 1, 2 브레이킹부에 배치된 각 공정테이블은 보간된 제어신호에 연동하여 교정된 동작을 실행한다(S230).Each process table disposed in the centering unit, the first and second cutting units, and the first and second braking units performs a corrected operation in conjunction with the interpolated control signals through the control signals generated by the interpolation control apparatus (S230). ).

상세하게, 센터링부의 공정테이블에 안착된 유리기판의 X,Y 좌표상의 위치데이터, 특히 그에 따른 유리기판의 평면 규격에 따라 센터링부, 제 1, 2 커팅부, 제 1, 2 브레이킹부에 배치된 각 공정테이블은 보간제어장치의 보간된 제어신호에 연동하여 교정된 동작을 실행한다.Specifically, according to the positional data on the X, Y coordinates of the glass substrate seated on the process table of the centering portion, in particular, the planar dimensions of the glass substrate accordingly, the centering portion, the first and second cutting portions, and the first and second braking portions are arranged. Each process table executes a corrected operation in conjunction with the interpolated control signals of the interpolation control apparatus.

즉, 각 공정테이블에 배치된 복수 개의 고정로드부 및 복수 개의 컨베이어부 중 최외각에 배치된 고정로드부 및 컨베이어부는 길이방향에 대해 직각방향으로 폴딩 또는 확장을 실행한다(S240).That is, the fixed rod part and the conveyor part disposed at the outermost sides of the plurality of fixed rod parts and the plurality of conveyor parts arranged on each process table execute folding or expanding in a direction perpendicular to the longitudinal direction (S240).

이 경우 센터링부에 안착된 가공전의 유리기판이 상대적으로 큰 경우에는 고정로드부 및 컨베이어부는 길이방향에 대해 직각방향으로 확장을 실행하며, 반대로 센터링부에 안착된 가공전의 유리기판이 상대적으로 작은 경우에는 고정로드부 및 컨베이어부는 길이방향에 대해 직각방향으로 폴딩을 실행하게 된다.In this case, when the glass substrate before processing placed on the centering part is relatively large, the fixed rod part and the conveyor part extend in a direction perpendicular to the longitudinal direction. On the contrary, when the glass substrate before processing placed on the centering part is relatively small. The fixed rod portion and the conveyor portion is to perform folding in a direction perpendicular to the longitudinal direction.

이로 인해, 제 1, 2 브레이킹부에 각각 구비된 절단장치의 가압으로 인해 유리기판의 가장자리 일정부분을 물리적으로 절단하는 경우 최외각에 배치된 고정로드부 및 컨베이어부를 지지축으로 유리기판의 가장자리를 가압할 수 있게 된다.For this reason, when physically cutting a certain portion of the edge of the glass substrate due to the pressurization of the cutting device provided in the first and second braking portions, the edge of the glass substrate is supported by the support shaft with the fixed rod part and the conveyor part disposed at the outermost part. It can be pressurized.

센터링부, 제 1, 2 커팅부, 제 1, 2 브레이킹부에 배치된 각 공정테이블에 배치된 복수 개의 고정로드부 및 복수 개의 컨베이어부 중 최외각에 배치된 고정로드부 및 컨베이어부는 길이방향에 대해 직각방향으로 폴딩 또는 확장을 실행한 후, 보간제어장치의 보간된 제어신호에 따라 센터링부의 공정테이블에 구비된 스토퍼, 사이드 얼라이먼트부, 리어 얼라이먼트부가 상호 연동하여 동작한다(S250).The plurality of fixed rod parts disposed on each process table disposed in the centering part, the first and second cutting parts, the first and second braking parts, and the fixed rod parts and the conveyor parts disposed at the outermost sides of the plurality of conveyor parts in the longitudinal direction. After the folding or extending in the perpendicular direction, the stopper, the side alignment unit, and the rear alignment unit provided in the process table of the centering unit operate in cooperation with each other according to the interpolated control signal of the interpolation controller (S250).

상세하게, 센터링부의 공정테이블의 전단부에 구비되어 공정테이블에 안착된 유리기판의 전단부에 밀착되는 스토퍼가 유리기판의 진행을 일시 정지시킨다.In detail, the stopper provided at the front end of the process table of the centering part and in close contact with the front end of the glass substrate seated on the process table temporarily stops the progress of the glass substrate.

이어 공정테이블 양측단에 구비되어 유리기판의 양측단부에 밀착된 한 쌍의 사이드 얼라이먼트부와 공정테이블의 후단부에 구비되어 공정테이블에 안착된 유리기판의 후단부 하면에 밀착되는 한 쌍의 리어 얼라이먼트부가 상호 연동하여 보간제어장치의 보간된 제어신호에 따라 유리기판을 센터링하게 된다.Next, a pair of side alignment parts provided at both ends of the process table and adhered to both ends of the glass substrate and a pair of rear alignment parts provided at the rear end of the process table and adhered to the lower surface of the rear end of the glass substrate seated at the process table In addition, the glass substrate is centered according to the interpolated control signal of the interpolation controller.

도 11은 본 발명에 따른 제 2 브레이킹부의 카메라에 의해 측정된 위치데이터를 기반으로 각 레이저 조사부가 동작하는 과정을 나타낸 흐름도로서, 제 2 브레이킹부에서 측정된 위치데이터를 기반으로 외부의 보간제어장치와의 연동과정을 구체적을 설명하면 다음과 같다.11 is a flowchart illustrating a process of operating each laser irradiator based on position data measured by a camera of a second braking unit according to the present invention, and an external interpolation control apparatus based on position data measured by the second braking unit. The following describes the interworking process with.

먼저, 제 2 브레이킹부에서 절단가공을 마친 유리기판에 대해 제 2 브레이킹부에 배치된 복수 개의 카메라가 기설정된 중앙의 기준선에 대해 유리기판의 각 변에 대한 평행도, 각 모서리에 대한 직각도, 이송방향에 대한 직진도 등의 위치데이터를 측정한다. 이렇게 측정된 유리기판의 위치데이터는 외부의 보간제어장치에 전송된다(S310).First, a plurality of cameras disposed on the second breaking part with respect to the glass substrate that has been cut in the second breaking part has a parallelism with respect to each side of the glass substrate, a right angle with respect to each corner, and a transfer with respect to a predetermined center reference line. Measure position data such as straightness in the direction. The position data of the glass substrate thus measured is transmitted to an external interpolation control device (S310).

이렇게 측정된 유리기판의 위치데이터는 보간제어장치를 통해 분석되고 보간제어장치는 이렇게 분석된 값, 즉, X,Y 좌표값을 분석하여 기설정된 중앙의 기준선에 대해 유리기판 각 변의 기울기, 각 모서리의 각도 등의 오차에 대응되는 직선방정식을 도출한다.The measured position data of the glass substrate is analyzed through the interpolation control device, and the interpolation control device analyzes the values thus analyzed, that is, the X and Y coordinate values, and the slope and angle of each side of the glass substrate with respect to the predetermined center reference line. The linear equation corresponding to the error of the angle, etc. is derived.

이렇게 도출된 직선방정식을 통해 기설정된 본래의 제어신호에 대해 보간된 제어신호를 생성한다(S320).The interpolated control signal is generated with respect to the predetermined original control signal through the linear equation derived as described above (S320).

보간제어장치에 의해 보간 생성된 제어신호를 통해 보간제어장치는 제 1, 2 커팅부의 각 레이저 조사부는 보간된 제어신호에 연동하여 교정된 동작을 하도록 명령한다(S330).The interpolation control apparatus commands the laser irradiation units of the first and second cutting units to perform a corrected operation in accordance with the interpolated control signals through the control signals generated by the interpolation control apparatus (S330).

상세하게, 제 1, 2 커팅부에 배치되어 레이저 발진부에 대해 외팔보 구조로 연결된 각 레이저 조사부는 레이저 발진부와 일체로 유리기판의 진행방향과 동일한 방향으로 이동하는 동시에 레이저 발진부의 이동방향에 대해 직각으로 이동한다(S340).In detail, each laser irradiation part disposed in the first and second cutting parts and connected in a cantilever structure to the laser oscillation part moves in the same direction as the traveling direction of the glass substrate integrally with the laser oscillation part and is perpendicular to the moving direction of the laser oscillation part. It moves (S340).

특히, 한 쌍의 상기 레이저 조사부는, 한 쌍의 가이드테이블을 따라 전,후 방향으로 이동하는 과정과 가이드테이블의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동하는 과정이 독립적으로 동작가능하도록 각각의 레이저 발진부로부터 독립하여 외팔보 구조로 연결된다.In particular, the pair of the laser irradiation unit, the process of moving in the front and rear directions along the pair of guide table and the process of moving a predetermined distance in the left and right directions perpendicular to the front and rear directions in the longitudinal direction of the guide table It is connected to the cantilever structure independently from each laser oscillation portion so as to be operable independently.

이로 인해, 한 쌍의 레이저 조사부는 외부 보간제어장치의 보간된 제어신호에 연동하여 제 1, 2 커팅부의 공정테이블에 안착되어 이동하는 유리기판의 일측부 또는 양측부를 목적하는 너비만큼 마이크로 단위로 정밀하게 절단가공할 수 있게 된다.As a result, the pair of laser irradiation units are precisely measured in micro units by the desired width of one side or both sides of the glass substrate which is mounted and moved to the process table of the first and second cutting units in association with the interpolated control signals of the external interpolation controller. It can be cut and processed.

보다 구체적으로, 한 쌍의 레이저 조사부가 보간제어장치로부터의 보간된 제어신호에 연동하는 운동은 레이저 발진부와 동일한 방향으로 이동하는 과정에서 각각의 레이저 조사부가 미세하게나마 이동거리의 오차가 발생하는 경우에도 그에 따른 오차를 외부 보간제어장치의 보간된 제어신호에 의해 정밀하게 교정이 이루어진다.More specifically, the movement of the pair of laser irradiation units interlocked with the interpolated control signals from the interpolation control device may be performed even when an error in the movement distance is generated even though the laser irradiation units are minutely moved in the same direction as the laser oscillation unit. The error is precisely corrected by the interpolated control signal of the external interpolation controller.

즉, 레이저 발진부에 대해 외팔보 구조로 연결된 한 쌍의 레이저 조사부는 각각 독립적으로 레이저 발진부의 이동방향에 대해 직각으로 이동하는 거리의 폭을 실시간으로 외부 보간제어장치의 보간된 제어신호에 의해 각각 달리 교정함으로써 유리기판의 보다 정밀한 평행도, 직각도, 직진도에 대응되도록 각각의 레이저 조사부로부터 레이저 빔의 조사가 이루어진다.That is, the pair of laser irradiators connected in a cantilever structure to the laser oscillator independently corrects the width of the distance moving at right angles to the moving direction of the laser oscillator in real time by interpolated control signals of the external interpolation controller. As a result, the laser beam is irradiated from each laser irradiator so as to correspond to more precise parallelism, perpendicularity, and straightness of the glass substrate.

제 1, 2 커팅부 각각의 공정테이블 양측에는 한 쌍의 레이저 조사부가 배치되며, 한 쌍의 레이저 조사부는 각각 독립적으로 각각의 레이저 발진부에 일체로 연결되어 운동하는 것으로, 한 쌍의 레이저 조사부가 각각의 레이저 발진부의 이동방향에 대해 직각으로 이동하는 거리는 보간제어장치의 보간된 제어신호에 따라 달라질 수 있다.A pair of laser irradiation units are disposed on both sides of the process table of each of the first and second cutting units, and the pair of laser irradiation units are independently connected to each of the laser oscillating units and move. The distance moving at right angles to the moving direction of the laser oscillator may vary depending on the interpolated control signal of the interpolation control apparatus.

이러한 현상은 가공되기 전 유리기판의 각 모서리에 상응하는 직각도가 상호 대칭되지 않는 경우에 더 뚜렷하게 나타난다.This phenomenon is more pronounced when the squareness corresponding to each edge of the glass substrate is not symmetric with each other before being processed.

Claims (9)

레이저를 이용하여 장방형의 유리기판을 가공하는 절단가공 시스템으로서,A cutting system for processing rectangular glass substrates using a laser, 장방형의 상기 유리기판(G)이 안착된 상태에서 움직이기 전 일정한 방향성을 교정하며, 바닥면에 안착되는 베이스플레이트와, 상기 베이스플레이트의 상면에 배치되어 유리기판(G)을 일정한 방향으로 직진이송시키는 공정테이블(120)을 포함하는 센터링부(100);The rectangular glass substrate (G) is corrected in a fixed direction before moving in the state of seating, the base plate seated on the bottom surface, and disposed on the upper surface of the base plate to move the glass substrate (G) in a straight direction A centering part 100 including a process table 120 to be used; 상기 센터링부(100)로부터 일정한 방향성을 갖고 순차적으로 직진이송된 상기 유리기판(G)의 일측부 또는 양측부에 상기 유리기판(G)의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며, 상기 유리기판(G)의 이송방향에 대해 장방형의 상기 유리기판(G)이 틀어진 각도에 대응되게 상기 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 1 커팅부(200);A cutting line is divided by irradiating a laser along the conveying direction of the glass substrate G to one side or both sides of the glass substrate G which is sequentially and straightly transferred from the centering part 100 in order. A first cutting part 200 capable of irradiating a laser by correcting the cutting schedule line in real time so as to correspond to an angle at which the rectangular glass substrate G is twisted with respect to the conveying direction of the glass substrate G; 상기 제 1 커팅부(200)로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 상기 유리기판(G)의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하여 이탈시키는 제 1 브레이킹부(300);A first breaking part 300 which physically cuts and detaches one side portion or both side edge portions of the glass substrate G sequentially moved straight after being irradiated by the laser from the first cutting portion 200; 상기 제 1 브레이킹부(300)를 거쳐 순차적으로 직진이송된 상기 유리기판(G)의 타측부를 절단하기 위해 90°회전시키는 회전부(400);A rotating part 400 which is rotated by 90 ° to cut the other side of the glass substrate G sequentially straight forwarded through the first breaking part 300; 상기 회전부(400)로부터 90°회전되어 순차적으로 직진이송된 상기 유리기판(G)의 일측부 또는 양측부에 상기 유리기판(G)의 이송방향을 따라 레이저를 조사하여 절단 예정선을 구획하며 상기 유리기판(G)의 이송방향에 대해 유리기판(G)이 틀어진 각도에 대응되게 상기 절단 예정선을 실시간으로 교정하여 레이저의 조사가 가능한 제 2 커팅부(200');One side or both sides of the glass substrate (G) rotated 90 ° from the rotary unit 400 sequentially straight to the laser beam along the transport direction of the glass substrate (G) to divide the cutting schedule line and the A second cutting part 200 ′ capable of irradiating a laser by correcting the cutting schedule line in real time so as to correspond to an angle at which the glass substrate G is twisted with respect to the conveying direction of the glass substrate G; 상기 제 2 커팅부(200')로부터 레이저에 의해 조사된 후 순차적으로 직진이송된 상기 유리기판(G)의 일측부 또는 양측부 가장자리 부분을 물리적으로 절단하는 제 2 브레이킹부(300');A second breaking part 300 'that physically cuts an edge portion of one side or both side portions of the glass substrate G which is sequentially moved straight after being irradiated by the laser from the second cutting part 200'; 상기 제 2 브레이킹부(300')에 네 변의 가장자리가 절단가공된 상태로 안착된 상기 유리기판(G)의 각 모서리 및 각 변에 대한 직각도 및 평행도를 측정하고 측정된 위치데이터를 기반으로 상기 제 1 커팅부(200) 및 상기 제 2 커팅부(200')의 레이저 조사에 의한 각각의 절단 예정선을 실시간으로 교정하기 위해 상기 제 2 브레이킹부(300')의 상부 일정위치에 배치된 복수 개의 카메라(500');를 포함하여 구성되며, Measuring the squareness and parallelism of each corner and each side of the glass substrate (G) seated in the state in which the edges of the four sides cut to the second braking portion 300 'and based on the measured position data A plurality of arranged in the upper predetermined position of the second braking portion 300 'to correct in real time the respective cutting schedule line by the laser irradiation of the first cutting portion 200 and the second cutting portion 200'. Two cameras 500 '; 상기 공정테이블(120)은 상기 유리기판(G)의 이송방향을 따라 상기 베이스플레이트의 상면에 배치된 복수 개의 고정로드부(121)와, 복수 개의 상기 고정로드부(121)와 교번하여 각 고정로드부(121)에 나란하게 배치되며 상기 고정로드부(121)의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부(122)와, 상기 고정로드부(121)의 전단부에 배치되어 상기 고정로드부(121)에 안착된 상기 유리기판(G)의 전단부를 일시 정지시키는 복수 개의 스토퍼(123)와, 복수 개의 상기 고정로드부(121) 중 최외각에 위치된 각각의 고정로드부(121) 측부에 배치되어 상기 유리기판(G)의 센터링 및 방향을 교정하는 복수 개의 사이드 얼라이먼트부(124)와, 상기 고정로드부(121)의 후단부에 배치되어 상기 스토퍼(123) 및 상기 사이드 얼라이먼트(124)와 연동하여 상기 유리기판(G)의 센터링 및 방향을 교정하는 복수 개의 리어 얼라이먼트부(125)를 포함하여 구성된 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.The process table 120 alternates with the plurality of fixing rods 121 and the plurality of fixing rods 121 disposed on the upper surface of the base plate along the conveying direction of the glass substrate G. A plurality of conveyors 122 arranged side by side on the rod portion 121 so that the height can be adjusted up and down with respect to the height of the fixed rod portion 121 and the front end of the fixed rod portion 121 A plurality of stoppers 123 disposed at the outer side of the glass substrate G to be temporarily seated on the fixing rod 121 and positioned at an outermost portion of the plurality of fixing rods 121. A plurality of side alignment parts 124 disposed on the side of the fixed rod part 121 and correcting the centering and orientation of the glass substrate G, and a stopper 123 disposed on the rear end of the fixed rod part 121. ) And the side alignment 124 A glass substrate cutting system using a laser, characterized in that configured to include a plurality of rear-alignment unit 125 for correcting the centering and direction of the glass substrate (G). 청구항 1에 있어서,The method according to claim 1, 상기 센터링부(100)에 안착된 상기 유리기판(G)의 규격 및 일정한 방향성에 대한 위치데이터를 측정하기 위해 상기 센터링부(100)의 상부 일정위치에 복수 개의 카메라(500)가 배치된 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.A plurality of cameras 500 are disposed in a predetermined position on the upper portion of the centering portion 100 in order to measure the position data of the standard and the predetermined direction of the glass substrate (G) seated on the centering portion 100. Glass substrate cutting processing system using a laser. 청구항 1에 있어서,The method according to claim 1, 각각의 상기 제 1 커팅부(200) 및 상기 제 2 커팅부(200')는,Each of the first cutting part 200 and the second cutting part 200 ′, 바닥면에 안착되는 베이스플레이트(210,210');Base plates 210 and 210 'are mounted on the bottom surface; 상기 베이스플레이트(210,210')의 상면에 배치되어 유리기판(G)을 일정한 방향으로 직진이송시키는 공정테이블(220,220');Process tables (220, 220 ') disposed on the upper surfaces of the base plates (210, 210') to move the glass substrate (G) straight in a predetermined direction; 상기 베이스플레이트(210,210')의 양측단 상면에 나란하게 설치되는 한 쌍의 가이드테이블(230,230');A pair of guide tables 230 and 230 'installed side by side on the upper surfaces of both side ends of the base plates 210 and 210'; 한 쌍의 상기 가이드테이블(230,230')을 따라 전,후 방향으로 이동하면서 상기 공정테이블(220,220')의 상면에 위치된 유리기판(G)을 가공하기 위해 레이저를 발진하는 한 쌍의 레이저 발진부(240,240');A pair of laser oscillators for oscillating the laser to process the glass substrate (G) located on the upper surface of the process table (220,220 ') while moving in a forward and backward direction along the pair of guide tables (230, 230') ( 240,240 '); 상기 레이저 발진부(240,240')와 일체로 한 쌍의 상기 가이드테이블(230,230')을 따라 이송되며, 상기 레이저 발진부(240,240')로부터 발진된 레이저를 상기 유리기판(G)에 조사하는 한 쌍의 레이저 조사부(250,250');A pair of lasers which are transported along the pair of guide tables 230 and 230 'integrally with the laser oscillator 240 and 240' and irradiate the glass substrate G with the laser oscillated from the laser oscillator 240 and 240 '. Irradiation units 250 and 250 '; 를 포함하여 구성되는 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.Glass substrate cutting processing system using a laser, characterized in that comprises a. 청구항 3에 있어서,The method according to claim 3, 한 쌍의 상기 레이저 조사부(250,250')는,The pair of laser irradiation unit 250, 250 ', 한 쌍의 상기 가이드테이블(230,230')을 따라 전,후 방향으로 이동하면서 동시에 각각 독립적으로 상기 가이드테이블(230,230')의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동가능하게 설치되는 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.While moving forward and backward along the pair of guide tables 230 and 230 ', they are independently moved at a predetermined distance in the left and right directions perpendicular to the longitudinal directions of the guide tables 230 and 230', respectively. Glass substrate cutting processing system using a laser, characterized in that possible installation. 청구항 4에 있어서,The method according to claim 4, 한 쌍의 상기 레이저 조사부(250,250')는,The pair of laser irradiation unit 250, 250 ', 한 쌍의 상기 가이드테이블(230,230')을 따라 전,후 방향으로 이동하는 과정과 상기 가이드테이블(230,230')의 길이방향인 전,후 방향에 대해 직각인 좌,우방향으로 일정거리 이동하는 과정이 독립적으로 동작가능하도록 각각의 상기 레이저 발진부(240,240')로부터 독립하여 외팔보 구조로 연결된 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.A process of moving forward and backward along a pair of the guide tables 230 and 230 'and a process of moving a predetermined distance in a left and right direction perpendicular to the front and rear directions that are longitudinal directions of the guide tables 230 and 230'. Glass substrate cutting processing system using a laser, characterized in that connected to the cantilever structure independently from each of the laser oscillation portion (240,240 ') to be able to operate independently. 청구항 5에 있어서,The method according to claim 5, 상기 레이저 조사부(250,250')는,The laser irradiation unit 250, 250 ', 상기 유리기판(G)에 초기 크랙을 제공하는 이니셜 크래커;An initial cracker providing an initial crack to the glass substrate (G); 상기 레이저 발진부(240,240')로부터 발진된 레이저 빔을 유도하는 반사부;A reflector for guiding the laser beam oscillated from the laser oscillator (240,240 '); 상기 반사수단으로부터 전달된 레이저 빔을 집광시키는 샤핑렌즈부;A shopping lens unit for condensing the laser beam transmitted from the reflecting means; 상기 샤핑렌즈로부터 조사된 레이저 빔을 따라 냉각 미스트를 분사하는 켄칭노즐부;A quenching nozzle unit for spraying cooling mist along the laser beam irradiated from the shopping lens; 상기 켄칭노즐부로부터 분사된 냉각 미스트 및 상기 유리기판(G)의 초기 크랙으로부터 발생된 분진을 흡입하는 에어석션부;An air suction unit for sucking dust generated from the cooling mist sprayed from the quenching nozzle unit and the initial crack of the glass substrate (G); 를 포함하여 구성되는 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.Glass substrate cutting processing system using a laser, characterized in that comprises a. 청구항 6에 있어서,The method according to claim 6, 상기 레이저 발진부(240,240')는 각각 한 쌍의 상기 가이드테이블(230,230')의 상부에 가이드테이블(230,230')의 길이방향을 따라 전,후 방향으로 이동가능하게 설치되며, 레이저를 발진하는 레이저 소스부와, 이 레이저 소스부를 구동시키는 파워 서플라이부를 포함하여 구성된 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공시스템.The laser oscillators 240 and 240 'are installed on the upper portion of the pair of guide tables 230 and 230' so as to be movable in the front and rear directions along the longitudinal direction of the guide tables 230 and 230 ', respectively. And a power supply unit for driving the laser source unit. 청구항 3에 있어서,The method according to claim 3, 상기 공정테이블(220,220')은,The process table 220, 220 ', 상기 가이드테이블(230,230')의 길이방향을 따라 나란하게 상기 베이스플레이트(210,210')의 상면에 배치된 복수 개의 고정로드부(221,221');A plurality of fixed rod parts 221 and 221 'disposed on an upper surface of the base plates 210 and 210' side by side in the longitudinal direction of the guide tables 230 and 230 '; 복수 개의 상기 고정로드부(221,221')와 교번하여 각 고정로드부(221,221')에 나란하게 배치되며, 상기 고정로드부(221,221')의 높이에 대하여 상하방으로 높낮이 조절이 가능하게 설치되는 복수 개의 컨베이어부(222,222');A plurality of fixing rods 221 and 221 'are alternately arranged in parallel with each of the fixing rods 221 and 221', and a plurality of heights of the fixing rods 221 and 221 'are installed to be able to be adjusted up and down with respect to the height of the fixing rods 221 and 221'. Two conveyor sections 222, 222 '; 를 포함하여 구성된 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공시스템.Glass substrate cutting processing system using a laser, characterized in that configured to include. 청구항 1 또는 청구항 8에 있어서,The method according to claim 1 or 8, 상기 센터링부(100), 상기 제 1 커팅부(200), 상기 제 2 커팅부(200') 각각에 구비된 상기 공정테이블(120,220,220')은, 각 공정테이블(120,220,220')의 상면에 안착된 상기 유리기판(G)의 규격에 호환가능하도록 복수 개로 배치된 각각의 상기 고정로드부(121,221,221') 및 복수 개로 배치된 각각의 상기 컨베이어부(122,222,222') 중 최외각에 배치된 고정로드부(121,221,221')와 컨베이어부(121,222,222')가 각각의 길이방향에 대해 직각으로 폴딩 및 확장이 가능하도록 설치되는 것을 특징으로 하는 레이저를 이용한 유리기판 절단가공 시스템.The process tables 120, 220, and 220 ′ provided in the centering unit 100, the first cutting unit 200, and the second cutting unit 200 ′ are mounted on upper surfaces of the process tables 120, 220, and 220 ′, respectively. Fixed rod parts disposed at the outermost portion of each of the fixed rod parts 121, 221, 221 ′ arranged in a plurality and compatible with the conveyor parts 122, 222, 222 ′ arranged in a plurality so as to be compatible with the standard of the glass substrate G ( 121, 221, 221 ') and the conveyor unit (121, 222, 222') is a glass substrate cutting processing system using a laser, characterized in that installed so as to be able to fold and expand at right angles to each longitudinal direction.
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