WO2012003914A1 - Device and method for processing workpieces using energetic radiation with the support of process gas - Google Patents

Abstract

The invention relates to a device and method for processing workpieces using energetic radiation (3), in which an energetic beam (3) is guided through a nozzle arrangement and can be directed at a workpiece (11) together with a process gas (10), said device comprising a means (1, 2) for deflecting the energetic beam (3), by means of which the processing point on the workpiece (11) can be moved two-dimensionally, wherein the nozzle arrangement has a first (7) and a second nozzle element (17) and the second nozzle element (17) comprises a nozzle head (9), and wherein the first and/or the second nozzle element (7, 17) is rotatably arranged, and furthermore the first and the second nozzle element (7, 17) are designed in such a way that the nozzle head (9) can be tilted by a rotation of the first and/or of the second nozzle element (7, 17) selected according to the deflection of the energetic beam, in such a way that the energetic beam (3) passes through the nozzle head outlet opening (16).

Description

 Patent Application:

Apparatus and method for processing gas accompanied processing

 Workpieces with energetic radiation

applicant:

 Fraunhofer-Gesellschaft for the promotion of applied research e.V.

Technical application

The invention relates to a device for machining workpieces with energetic radiation, in which an energetic beam can be passed through a nozzle assembly and directed together with a process gas on a workpiece with a means for deflecting the energetic beam, whereby the processing point on the workpiece can be moved two-dimensionally, wherein the nozzle assembly comprises a first and a second nozzle member and the second nozzle member comprises a nozzle head, and wherein the first and / or the second nozzle member is arranged rotatably / are. The invention also relates to a corresponding method for machining workpieces with energetic radiation. Preferred fields of application are laser beam cutting and laser deposition welding. Another field of application is jet cleaning, in particular with a sandblast, a jet of dry ice or a plasma jet.

State of the art

In many fields of application, an energetic jet is to be directed onto a workpiece for processing of workpieces together with a process gas jet, which is generated and / or guided by a nozzle arrangement. Typically, the energetic beam is also passed through the nozzle assembly. The process gas is used for example in laser beam cutting, the expulsion of the liquid melt from the To support kerf. To move the nozzle assembly over the workpiece, often axis or robotic systems are used.

Such axis or robotic systems have a comparatively large working space, but are limited in their dynamics. Large forces and electrical currents must be used to accelerate and decelerate the system masses. Thus, such systems reach their maximum speeds only at longer cutting lengths. With shorter cutting lengths with frequent changes of direction, the axle systems are subjected to extreme mechanical stress despite only a comparatively low cutting speed. Abrupt changes in acceleration also induce vibrations that adversely affect contour accuracy.

It is also known to deflect the energetic radiation by means of a scanner system. As a result, due to the comparatively low moving masses of the scanner mirror, generally higher speeds and accuracies in the positioning of the energetic radiation can be achieved. However, with a stationary nozzle, the working field is severely limited and / or the nozzle opening must have a suitably large cross-section in order to allow an exit of the deflected energetic radiation, which is associated with a greatly increased gas throughput.

DE 102008027524 B3 describes a device for laser beam cutting, in which a deflectable laser beam is directed onto a workpiece through a nozzle with a cutting gas. Two disk-shaped rotatable elements in the form of a double eccentric drive serve as carriers for the nozzle head, which can thereby be moved parallel to the workpiece surface. The nozzle opening can follow in this way within a processing range of the deflection movement of the laser beam.

The invention has for its object to provide an apparatus and a method for machining workpieces with energetic radiation and a process gas, which both a high processing speed, as well as a high contour accuracy with low or efficient consumption is made possible by process gas and wherein only a relatively low wear occurs.

Presentation of the invention

The solution of this technical problem is achieved by a method and a device according to the independent claims. Advantageous embodiments and further developments are indicated by the dependent claims or can be taken from the following description and the exemplary embodiments.

In the device according to the invention for processing workpieces with energetic radiation, an energetic beam is passed through a nozzle arrangement and directed together with a process gas onto a workpiece. The apparatus comprises one or more means for deflecting the energetic beam, whereby the processing point on the workpiece, i. in the tool plane, can be moved two-dimensionally. The nozzle arrangement has a first and a second nozzle element, wherein the second nozzle element comprises a nozzle head with a nozzle head outlet opening, and wherein the first and / or the second nozzle element is rotatably arranged / are. The device is characterized in that the first and the second nozzle element are formed so that the nozzle head can be tilted by a selected depending on the deflection of the energetic beam rotation of the first and / or the second nozzle member so that the energetic beam the Run through the nozzle head outlet opening.

According to a further aspect, the problem underlying the invention is solved by a method for machining workpieces with energetic radiation, in which an energetic beam is passed through a nozzle arrangement and directed together with a process gas on a workpiece, wherein the processing point on the Workpiece can be displaced two-dimensionally by one or more means for deflecting the energetic jet, wherein the nozzle arrangement has a first and a second nozzle element and the second nozzle element comprises a nozzle head, wherein the first and / or the second nozzle member is rotatably disposed /, and wherein the nozzle head is tilted by a selected depending on the deflection of the energetic beam rotation of the first and / or the second nozzle member so that the energetic beam passes through the nozzle head exit opening.

Such a device or method in which the energetic radiation and the nozzle arrangement are synchronized with each other or are matched to one another, makes it possible to provide a small cross section for the nozzle head outlet opening, whereby the consumption of process gas can be kept low. Preferably, the diameter of the die head outlet opening from 0.25 to 2 mm, even more advantages has a diameter between 0.5 and 1 mm, or the cross-sectional area of the die head outlet orifice is from 0.05 to 3 mm ^2, preferably between 0.2 and 0.8 mm ^2.

Despite the small nozzle head outlet opening, the arrangement according to the invention ensures that a comparatively large working field can be processed on the workpiece. As a working field while the surface to be defined on the workpiece, which alone by the deflection of the energetic beam, ie without movement of the axis system, ie without relative movement between the nozzle assembly and the workpiece, except the rotation of the first and second nozzle member, can be edited. Due to the large field of work, within which can be processed with the more dynamic scanner technology, the production times can be significantly reduced. Preferably, the working field has a size of at least 15 mm ² , even greater advantages are achieved by a working field of at least 50 mm ² , based on an assumed distance between the nozzle head outlet opening and workpiece of a maximum of 5 mm or less; In general, the distance between the nozzle head outlet opening and the workpiece is between 0.25 mm and 2 mm, preferably between 0.5 mm and 1 mm.

Advantageously, can be dispensed within the working field in the apparatus according to the invention to change direction, ie the only movements of the arrangement, namely the rotation of the two nozzle elements, can preferably take place exclusively in one direction of rotation. This allows higher average machining speeds to be achieved. By eliminating change of direction or the forces occurring, the device according to the invention is also comparatively low wear and has a long service life. In addition, by eliminating changes of direction and vibrations of the system are reduced, so that a better contour accuracy and more accurate guidance of the energetic beam can be achieved.

The invention can be used for different types of machining of workpieces, in which a workpiece process gas accompanied with energetic radiation is applied. Possible applications are u.a. the cutting, welding or cleaning of workpieces. The energetic beam can be, for example, an electron beam, a sandblast, a jet of dry ice or a plasma jet, but preferably it is electromagnetic radiation, in particular laser radiation. The process gas may be, for example, nitrogen, argon, oxygen, compressed air or mixtures thereof.

A particularly important field of application is the laser beam cutting of workpieces.

An essential component of the device according to the invention is the nozzle arrangement, which has at least two nozzle elements, namely a first and a second nozzle element. The second nozzle element moreover comprises in particular a nozzle head with a nozzle head outlet opening. During processing, a process gas stream provided by means of a process gas supply traverses the nozzle arrangement, in particular the first and the second nozzle element, which each have an opening suitable for the passage of the gas, or at least a part of the nozzle arrangement, and passes through the nozzle head exit opening and as a process gas jet guided the workpiece. The nozzle head preferably has a cross-section that tapers in the direction of the nozzle head outlet opening in a manner known per se. The openings of the first and second nozzle elements including the In addition, nozzle heads are intended to ensure that the energetic beam is also passed through them.

At least one of the two nozzle elements is rotatably arranged, that is rotatable relative to the rest of the device attached thereto. The two nozzle elements are configured such that they are arranged relative to one another and connected to one another such that the nozzle head encompassed by the second nozzle element can be tilted by a rotation of the first and / or the second nozzle element. By tilting the beam direction of the process gas jet and its impact on the workpiece can be changed. In this way, the process gas can be performed in a simple manner, without consuming movement of an axis or robot system within a relatively large working field on the workpiece. The tilting of the nozzle head and the configuration of the nozzle elements allows the escape of a deflected, e.g. tilted, energetic beam through the nozzle head opening.

It has considerable advantages if both nozzle elements are rotatably arranged, that is each rotatable relative to the rest of the device attached thereto. This increases the flexibility of the device and allows a particularly fast processing. Both nozzle elements should be independently controllable, i. the angular position of the nozzle elements into which they are respectively rotated in their plane of rotation, as well as the direction of rotation can be adjusted independently. The setting of the angular position of the first nozzle member can be, for example, by an adjustment angle ε (0 ° <= ε <360 °), the second nozzle member by a twist angle δ (0 ° <= δ <360 °), which the rotation of the second nozzle member relative to the first nozzle element parameterize (each defined with respect to a fixed starting position).

Although the angular position or the angle of rotation as well as the direction of rotation of the second nozzle member can be adjusted freely, ie independently of the position or direction of rotation of the first nozzle member, the orientation however, its axis of rotation changes depending on the angular position of the first nozzle member. In other words, a rotation of the first nozzle element causes a tilting of the axis of rotation of the second nozzle element. A rotation of the second nozzle element causes a tilting of the beam direction in space. An additional rotation of the first nozzle element rotates this beam direction about the axis of rotation of the first nozzle element.

For this purpose, the first nozzle element has a jet exit side, which is coupled to the jet entry side of the second nozzle element. By the geometric shape of the first nozzle member at the beam exit side while an exit plane is defined, which predetermines the plane of rotation for the rotational movement of the second nozzle member relative to the first nozzle member, in particular represents this plane of rotation or is parallel thereto. In other words, the axis of rotation of the second nozzle element is preferably perpendicular to the jet exit plane of the first nozzle element. The first nozzle element, in particular its beam exit side, is shaped such that its exit plane is not parallel to its plane of rotation. Instead, the exit plane of the first nozzle element and its plane of rotation form a first angle, which should be designated here by α. A possible embodiment of the shape of the first nozzle element has, for example, a trapezoidal cross-section. In other words, the first nozzle element has a first side in a beam entry plane, which is preferably perpendicular to its axis of rotation, and a second side in a beam exit plane, wherein the beam exit plane is tilted by a first angle α with respect to the beam entry plane. The first angle α is preferably 0 <lal <15 °, particularly preferred is the range between 1.5 ° and 3 °.

The second nozzle element comprises on its beam exit side, ie on its side facing the workpiece, the nozzle head, which has a nozzle head outlet opening on the workpiece side. The shape of the nozzle head defines a process gas jet exit plane, typically the nozzle head exit opening lies in this plane. The process gas jet is with a Main movement direction, which is perpendicular to this process gas jet exit plane, led out through the nozzle head exit opening from the nozzle head. According to a particularly preferred embodiment of the invention, the nozzle head is shaped or arranged within the device or the second nozzle element according to the invention such that the process gas jet exit plane is not parallel to the plane of rotation of the second nozzle element. Instead, the process gas jet exit plane and the plane of rotation of the second nozzle element form a second angle, which should be designated here by β. In other words, the nozzle head has a process gas exit axis, which is tilted by the second angle β with respect to the axis of rotation of the second nozzle element. The second angle .beta. Is likewise preferably 0.ltoreq.15.degree., The range between 1.5.degree. And 3.degree. Being particularly preferred. By the rotation of both nozzle elements, a particularly high flexibility of movement of the nozzle head can be achieved in such an arrangement.

Despite the strong deflection of the energetic jet and the large working field made possible in this manner, the center of gravity for both nozzle elements is comparatively close to their respective axis of rotation. This leads to comparatively low forces occurring during acceleration and deceleration processes and as a result to reduced vibrations and a higher positioning accuracy.

The intended for the passage of the process gas and the energetic beam opening of the first nozzle member is arranged centrally in the first nozzle member. Preferably, the axis of rotation of the first nozzle element passes through the first nozzle element within, preferably centrally within this opening. The intended for the passage of the process gas and the energetic beam opening of the second nozzle member connects to the opening of the first nozzle member and is also centrally disposed in the second nozzle member. The axis of rotation of the second nozzle element intersects the second nozzle element on its input side within, preferably centrally within the opening of the second nozzle element, preferably there it intersects the axis of rotation of the first nozzle element. Due to the small size of the nozzle head outlet opening at the On the output side of the second nozzle element arranged nozzle head and the tilting of the axis of rotation of the second nozzle member relative to the process gas exit axis of the nozzle head, the axis of rotation of the second nozzle member, the nozzle head and the second nozzle member on the output side, however, typically outside the nozzle head outlet opening.

For example, a conical, conically cylindrical, bizylindrische or a Lavalgeometrie can be selected for the nozzle head outlet opening.

The device has one or more means for deflecting the energetic beam. The beam can thus be guided so that the processing point (or point of impact on the workpiece surface) in the working plane by the deflection of the beam two-dimensional, i. can be moved within the area of work. The deflection of the energetic beam or the means used therefor can be designed in such a way that the energetic beam is shifted in parallel without changing the beam direction. In this way, the angle of incidence on a flat workpiece surface remains basically the same.

However, an alternative advantageous embodiment of the invention is just then given when the energetic beam can not be deflected by parallel displacement but by tilting or is deflected solely by tilting, in particular a tilting with respect to the axis of rotation of the first nozzle member. This embodiment is associated with comparatively low expenditure on equipment and allows a particularly precise and rapid deflection. In addition, the absorptivity can be locally modulated by employed (piercing or sluggish) beam guidance or a higher degree of absorption can be effected. Incidentally, in certain laser applications, a suitable tilting of the laser beam can influence the flow direction of the melt and the formation of a beard.

By deflecting the energetic beam in this embodiment of the invention by tilting, thus, a beam direction change, ie, a change in the angle of incidence of the energetic beam on the workpiece causes. Preferably, the one or more means for deflecting the energetic beam are designed so that the beam can be deflected in all directions at least within a certain beam cone. The tilting of the jet can take place relative to a central main axis, for example the axis of rotation of the first nozzle element, of the device. Preferably, any tilt angle between 0 ° and 3 °, preferably between 0 ° and 10 °, adjustable, even greater advantages are achieved by adjustability between 0 ° and 30 °. This makes a large field of work feasible.

Due to the geometric conditions, in particular the tilting of the nozzle head, the device according to the invention makes it possible to arrange the means for deflecting the energetic beam outside the nozzle arrangement, in particular in the beam direction in the beam path in front of the nozzle arrangement. This simplifies the apparatus design.

However, it has particular advantages if the deflection of the energetic jet takes place only in the nozzle arrangement, ie within the opening of the first and / or the second nozzle element, preferably in the transition region between the first and the second nozzle element. Accordingly, the means for deflecting or tilting the energetic beam are preferably arranged there. In this case, for example, the process gas can be guided past the means or for the deflection or tilting of the energetic jet, for example through circulating bores, or is supplied only below this or this means. In this way, the energy beam can be deflected or tilted in a direction that corresponds to the process gas exit axis, and thus the main movement direction of the process gas jet at the exit from the nozzle head exit opening or at most slightly deviates from it. In this embodiment, it is possible, in particular, to set particularly large deflection angles, for example deflection angles between 0 and 90 °, so that the device is not only used for machining approximately flat surfaces, but also approximately for hemispherical surfaces or other complex shaped surfaces and thus, as it were is particularly well suited for 3D editing For applications in which an electromagnetic beam is used for processing, in particular one or more, eg reflective or refractive, optical means may be used as means for deflecting this electromagnetic beam, such as mirrors or prisms or combinations thereof.

In a further advantageous embodiment of the invention, one or more means for deflecting or tilting the energetic beam are fixedly connected to the first and / or second nozzle element, i. stands / stand during processing in fixed positional relationship to the first and / or second nozzle element, so that the alignment of the means or for deflecting or tilting of the energetic beam relative to the beam path of the energetic beam by rotation of the first and / or second nozzle member directly is changed. In this way, the deflection of the process gas jet and the energetic jet can be coupled directly and thus take place together. In particular, one or more means may be configured and arranged so that the energetic beam is tilted at a rotation of the first and / or second nozzle member so that the energetic beam passes through the nozzle head exit opening, preferably that it always passes through the nozzle head exit opening, i. at each angular position of the first and second nozzle elements. The energetic beam is preferably deflected or tilted in the direction of the process gas outlet axis upon rotation of the first and / or second nozzle element. In other words, the deflection of the energetic jet immediately and automatically follows the tilting of the nozzle head. Thus, a control of the synchronization of the deflection of the energetic beam and the movement of the nozzle head can be dispensed with. Even complex shaped surfaces can be processed in this way very flexible, fast and without much effort. The fixed connection between the means for deflecting or tilting the energetic jet and the first and / or second nozzle element can be realized in various ways, preferably the connection is adjustable.

A special embodiment provides, for example, to firmly connect at least a first means for deflecting or tilting the energetic beam with the first nozzle element, preferably within the opening of the nozzle first nozzle element is arranged in the beam path of the energetic beam. Due to the connection with the first nozzle element, it assumes the rotational movement of this first nozzle element during its rotation. Depending on the setting angle of the first nozzle element thus changes the orientation of the first means for deflecting or tilting of the energetic beam and thus the direction of the tilted energetic beam. At least a second means for deflecting or tilting the energetic jet is also firmly connected to the second nozzle element, in particular within the opening of the second nozzle element. Accordingly, due to the connection with the second nozzle element, it assumes the rotational movement of this second nozzle element during its rotation. Thus, it also takes over the tilting of its axis of rotation during rotation of the first nozzle member. The two means for deflecting or tilting the energetic beam are designed and arranged relative to one another such that the energetic beam is tilted during a rotation of the first and / or second nozzle element such that the energetic beam passes through the nozzle head exit opening. It is thus possible, for example, to dispense with a complex separate scanning device in its entirety. The beam guidance of the laser beam takes place directly by means of the nozzle arrangement; a synchronization between the movement of the laser beam and the nozzle arrangement is not required or takes place automatically.

In a further advantageous embodiment of the invention, the nozzle head is arranged displaceably within the second nozzle element. The position of the nozzle head encompassed by the second nozzle element can be changed relative to other regions of the second nozzle element in one direction, in particular in the direction of the process gas exit axis, or preferably this position change can be controlled during processing. For this purpose, the second nozzle element or the nozzle head suitable, known per se, for example, mechanical, adjusting medium. Preferably, the arrangement of the nozzle head on the second nozzle element in this way is variable so that the distance of the nozzle head from the first nozzle member or the distance of the nozzle head from the workpiece can be changed. This increases the flexibility of the device, since thus the size of the surface irradiated by the process gas jet on the workpiece and thus its intensity is easily controlled. It has particular advantages if the arrangement of the nozzle head on the second nozzle element can be varied such that a change in the length of the process gas jet path caused by tilting of the nozzle head between the nozzle head exit opening and the processing point or impingement point of the process gas jet can be counteracted on the workpiece, preferably this change in length can be compensated. In other words, for each processing point within the working field, the position of the nozzle head relative to the second nozzle element can be adjusted so that the length of the process gas jet path between the nozzle head outlet opening and the processing point is the same for all processing points. In this way, fluctuations in the size of the area irradiated by the process gas jet on the workpiece and thus in its intensity can be reduced or completely avoided.

Incidentally, a further embodiment of the invention provides that there is a focusing means for focusing the energetic beam, which is likewise displaceably arranged within the device, so that the degree of focusing of the energetic beam impinging on the workpiece can be changed. Preferably, the position of the focusing can be changed so that the path length of the beam path between the focusing and the point of impact of the energetic beam on the workpiece (even) remains unchanged when tilting the energetic beam. This makes it possible to keep the degree of focus of the energetic radiation largely constant during processing. The focusing means may for example be connected or coupled to the nozzle head, which is displaceably arranged within the second nozzle element as described above, so that the focusing means is displaced accordingly upon displacement of the nozzle head.

For the laser cutting process of the invention allows due to the tilted loading of the workpiece with the process gas in particular an improved Schmelzaustrieb, so that a particularly smooth and burr-free cut can be achieved. In addition, the device offers the possibility to reduce the acceleration phase of the nozzle deflection via a "dynamic bias". The machining of the workpiece is started with already rotating nozzle elements. In other words, a common rotation of the two nozzle elements preferably takes place initially, wherein in particular the angle of rotation δ initially remains in an initial position. Only with or after the start of processing, in particular irradiation of the workpiece with energy radiation or the process gas jet, the second nozzle element is rotated relative to the first nozzle member. In other words, only a rotation of the process gas jet takes place about its vertical axis before the beam is moved from its initial position.

Due to the large working field, which can be processed with the device according to the invention, without a translational relative movement between the entire device and the workpiece is required, sufficient in many applications alone the deflection of the energetic beam together with the synchronously acted upon process gas to a processing step, For example, the production of a weld or a cut to complete. On the movement of the device by an axis / robotic system during processing can be omitted. This allows a particularly fast and precise processing. A conventional axis / robot system is additionally used for a relative movement between two processing steps. Furthermore, advantageous process effects can result in the superposition of the feed movement by circular or figure eight figures.

Special advantages, however, have just the processing of combined movement by means of an axis / robot system and a scanner system. In this way, a large-scale machining with high dynamics and speed and comparatively high precision is possible. The movement of the axle / robot system during machining preferably takes place uniformly, ie without acceleration or deceleration. Brief description of the drawings

The present invention will be explained in more detail below with reference to exemplary embodiments in conjunction with the drawings without limiting the scope of protection specified by the claims. Hereby show:

Fig. 1 Schematic representation of a first embodiment of the invention Fig. 2: Schematic representation of the nozzle arrangement

Fig. 3: Representation of the shift of the operating point from the starting point B to a point B 'within the working field

Fig. 4: Two different settings for the adjustment angle ε and the

 Angle of rotation δ for driving a point B ".

Fig. 5: Special cases: operating point B 'on the edge of the working field and

 Operating point B on the central axis (initial position)

Fig. 6: Further schematic representation of the nozzle arrangement

Fig. 7: Further schematic representation of the nozzle arrangement

Fig. 8: Example of performing a rectangular section with the

 Device according to the invention, in which the device is moved on a circular path through an axis system

Fig. 9: Representation of the compensating movement of the invention

 Device for the example described in FIG. 8 in a coordinate system carried on the axis system

Fig. 10: Calculation of the adjustment angle ε and angle of rotation δ for some exemplary

 Points of the example of FIGS. 8 and 9

Further schematic representation of the nozzle arrangement with arranged within the first and second nozzle element deflection means Fig. 12: Further schematic representation of the nozzle assembly with additional adjustment medium for the nozzle head

Ways to carry out the invention

Fig. 1 shows a schematic representation of a first embodiment of the device according to the invention. The device has a scanner system 1, comprising in particular two deflecting mirrors 2 as means for deflecting an electromagnetic beam 3 in the form of a tilt. In the beam path, a focusing lens 4 is present (permanently installed within the scanner system 1), with which the electromagnetic beam 3 can be focused on the workpiece 11. The focusing lens 4 is arranged, formed and dimensioned so that it can afford the desired focusing effect for all tilt angles. The scanner system 1 is connected to the nozzle assembly. The nozzle arrangement comprises a first nozzle element 7 designed as an upper rotor disk and a second nozzle element 17, which comprises a lower rotor disk 8 and a nozzle head 9 attached to the side facing the workpiece 11 to be machined. In profile section, the upper 7 and the lower rotor disks 8 in FIG This embodiment in each case the shape of a rectangular trapezoid. On the side facing away from the workpiece to be machined 11 of the nozzle assembly, a process gas supply 6 is present. The process gas passes from the process gas supply 6 through a central opening in the upper rotor disk 7 and a central opening in the lower rotor disk 8 and through the nozzle head 9 through the nozzle head outlet opening 16 as a process gas jet 10 on the workpiece 11. The deflection or tilting of the electromagnetic beam 3 and the position of the upper and lower rotor disk 7,8 and the first and second nozzle member 7,17 and the associated tilting of the nozzle head 9 are coordinated so that the electromagnetic beam 3 passes through the outlet opening 16 of the nozzle head 9 without contact and hits the workpiece 11. Since the electromagnetic beam 3 in the representation (not to scale) of the present embodiment is already tilted significantly above the nozzle arrangement, the electromagnetic beam 3 and the process gas jet arrive 10 inevitably with an angle slightly different from each other on the workpiece 11. In realistic embodiments, this deviation and the distance between the outlet opening 16 of the nozzle head 9 and the workpiece

11 sufficiently small that the electromagnetic beam 3 and the process gas jet 10 hit the same location of the workpiece surface 11, or the electromagnetic beam 3 is enveloped at the point of impact on the workpiece 11 from the process gas jet 10. The distance of the entire device to the workpiece 11 is otherwise adjustable in a conventional manner by means of a Z-axis movement device 5.

In the central opening of the upper and lower rotor disks 7, 8, a double arrow is shown, which lies in each case in the plane of rotation of the respective rotor disk 7, 8 and indicates the possible directions of rotation of the respective rotor disk. The rotation of the upper rotor disk 7 takes place about the central axis 13 of the device according to the invention, i. in a plane perpendicular to the central axis 13 rotation plane.

A rotation of the lower rotor disk 8 relative to the upper rotor disk 7 leads to a rotation of the nozzle head 9 about its own central axis or process gas outlet axis 18 and in the section shown in Fig. 2 (ia) to a pivoting movement of the nozzle head 9 about the point A. Der auf the workpiece 11 projected center of the nozzle head outlet opening 16, in Fig. 2 in the starting position, in which the process gas outlet axis 18 coincides with the central axis 13, denoted by B, is thereby shifted to the point B '. Without loss of generality, point B 'in the illustrated example represents a point resulting in a position of the upper 7 and the lower rotor disk 8, which causes a maximum tilt of the nozzle head 9 from the central axis 13 (= rotation axis of the first nozzle member 7).

This displacement takes place, as shown in Fig. 3, in dependence on the rotation of the lower rotor disk 8 in the plan view of the workpiece 11 along a circular path 12. The shift can on this circular path depending on the direction of rotation of the second nozzle member 17 with or against the Clockwise to be selected, as indicated by arrows. A rotation of the first nozzle element or the upper rotor disk 7 causes in the 1

Projection an additional rotation of the circular motion 12 described in Fig. 3 about the vertical axis and central axis 13 of the system. This gives a total of a circular working field 14 with radius R _ma x. within which each point results in at least one position of the upper 7 and the lower rotor disk 8 as a projected center of the nozzle head outlet opening 16 and thus can be achieved for processing. The resulting working field 14 is determined by the geometry of the rotor disks 7, 8, of the nozzle head 9 and by the distance of the device or of the nozzle head outlet opening 16 from the workpiece 11.

The nozzle head 9 thus generally describes a three-dimensional movement. The movement space of the nozzle head 9 is similar to a circle in the supervision; On average, it generally represents an upwardly open trough-shaped path.

FIGS. 4 (a) and (b) show how an exemplarily selected point B "in the working field 14 is projected by different combinations of the positions of the upper 7 and lower rotor disks 8 and of the first and second nozzle elements 7, 17 The position of the upper rotor disk 7 (or first nozzle element 7) is determined by the adjustment angle ε, the position of the lower rotor disk 8 (or second nozzle element 17) by the angle of rotation δ, which the rotation the lower rotor disk 8 (or second nozzle member 17) relative to the upper rotor disk 7 (or first nozzle member 7) is parameterized in Fig. 4 (a), the upper rotor disk 7 has a large adjustment angle of ε = 330 ° a rotation of the lower rotor disk 8 relative to the upper 7 moves the projected center of the nozzle head outlet opening 16 on the circular path 12. At a twist angle of δ = 78 ° is reached point B ". In Fig. 4 (b) the same point B "is approached, but here along the circular path 12 'and with another adjustment angle ε and other angle of rotation δ. For all target points in the working field 14 with a radius R with 0 <R <R _max can be basically find two combinations of setting and torsion angle in this way.

In Fig. 5 (a), the special case is again shown that a located at the edge of the working field 14 point B ', ie a point with R = R _max , approached shall be. For this purpose, the nozzle head 9 must be deflected maximum, that is tilted relative to the central axis 13 maximum. This is achieved only at exactly one angle of rotation δ (in the embodiment shown here and nomenclature at a twist angle of δ = 180 °). For each point on the edge of the working field 14 therefore obviously exists exactly one possible combination of angle and the fixed angle of rotation.

In Fig. 5 (b), the nozzle head 9 is to be positioned in the center of the working field (R = 0), i. the nozzle head 9 should not be deflected. This determines the angle of rotation clearly (in the embodiment and nomenclature shown here, the angle of rotation δ = 0 °). The upper rotor disk 7 (or first nozzle element) can be set arbitrarily (shown are two exemplary settings) or can - together with the lower rotor disk 8 and second nozzle element 17 - rotate freely (ε = variable).

Fig. 6 shows a further schematic representation of an embodiment of the device according to the invention, wherein some parameters are explained. H1 represents the mean height of the upper rotor disk 7, H2 the mean height of the lower rotor disk 8, H3 the effective nozzle height and H4 the distance between the nozzle head 9 and the workpiece 11. Typical values for H1, H2, H3 and H4 are for example: H1 = 50mm; H2 = 30mm; H3 = 15mm; H4 = 1 mm. D1 denotes the diameter of the upper rotor disk 7, D2 the diameter of the lower rotor disk 8; Typical values for this are D1 = D2 = 125mm.

In the profile section shown in FIG. 6, the upper 7 and the lower rotor disk 8 again each have the shape of a rectangular trapezium.

The trapezoid angle α represents the angle between the beam entry plane of the upper rotor disk 7 and the beam exit plane of the upper rotor disk 7. The trapezoid angle β in the embodiment shown corresponds to the angle between the beam entry plane of the lower rotor disk 8 and the side of the lower rotor disk 8 facing the workpiece 11 (wherein the nozzle head 9 is arranged so that the jet exit axis 18 of the nozzle head 9 is perpendicular to the workpiece 11 facing side of the lower rotor disk 8). 2

In general, β represents the angle between the process gas exit axis 18 and the axis of rotation 19 of the second nozzle element 17.

The tilt angle γ, which is marked in FIG. 7, is generally calculated (as a function of the two trapezoid angles α and β and the angle of rotation δ) by:

 At maximum tilt, the tilt angle is thus given by the sum of the two trapeze angles α and β. The projected on the workpiece 11 in the profile section shown section BB "between the center B of the working field 14 and a point B" is given by:

BB "= tan γ ^■ (H ₂ + H ₃ + H ₄ )

For the radius of the working field 14, the following applies:

R _{ma] i} = tan (a + β) - (H ₂ + H _i + H ₄ )

An exemplary embodiment has two rotor disks 7, 8 with equal trapezoid angles of 3 ° each. The possible tilt angle is then between 0 ° and the maximum of 6 °. For an exemplary value of H ₂ + H ₃ + H ₄ = 20.82 mm, the radius of the working field 14 is R _max = 2.19 mm, and for the working field size A = 15.07 mm ² .

An example of the generation of a rectangular sectional contour is described in FIGS. 8, 9 and 10. The right-angled sectional contour to be produced is shown in FIG. 8 (wherein the two cut edges each have a length normalized to 1). In a conventional method, an axis system would be moved along this contour. In the method according to the invention, the axis system can, for example, according to the circular contour shown in Fig. 8 (ie on a circle portion of a circle with the normalized radius 1), with respect to which the two cutting edges are arranged tangentially, perform a uniform (circular) movement. In addition, a scanner system moved by the axis system passes the laser radiation through Compensation movement on the desired right-angled cut contour. Coaxially and synchronously with the laser radiation, the nozzle arrangement is guided or describes the same compensation movement as the scanner system. In this way, the processing time can be significantly reduced compared to the conventional method.

FIG. 9 shows the compensating movement which the device according to the invention (scanner and nozzle arrangement) for the case shown in FIG. 8 has to perform in a coordinate system carried along on the axis system (which completes the circular movement according to FIG. 8) This representation the shape of a pointed biconvex lens. The ascending lower branch of the "lens" corresponds to the vertical portion of the section, the descending upper branch of the "lens" corresponds to the horizontal portion of the sectional contour of FIG. 8.

Fig. 10 (a) shows schematically again in plan view the corresponding compensating movement of the device for the rectangular section according to Fig. 8 and Fig. 9. The compensatory movement is indicated by the dotted line. By way of example, 5 points (indicated by circled numerals 0 to 4) have been highlighted on this line (points 1 to 4 are also indicated in Fig. 8 and Fig. 9). For these, the respective adjustment angles ε, of the first nozzle element 7 (or of the upper rotor disk) and the respective angles of rotation δ of the second nozzle element 8 relative to the first nozzle element 7 are exemplarily indicated in the table according to FIG. 10 (b). The setting angle εο at the position "0" can basically be selected as desired since the nozzle arrangement rotates about its own axis (without tilting the nozzle head 9) when the angle of rotation δο = 0 °. Preferably, the nozzle assembly is "dynamically biased", i. the upper nozzle element 7 is already accelerated together with the lower nozzle element 8, i. rotated in this arrangement, before the machining of the workpiece 11 begins.

As can be seen, reversing the direction of rotation is not required for either of the two nozzle elements 7, 17 during the generation of the rectangular section and is therefore preferably not performed. Instead, the Compensating be controlled solely on the velocity profile of the rotating nozzle elements 7,17.

11 shows schematically a particularly advantageous embodiment, in which a first means 2 for deflecting or tilting the energetic beam 3 within the central opening of the first nozzle element 7 and a second means 2 'for deflecting or tilting the energetic beam 3 are disposed within the central opening of the second nozzle member 17. In this example, the energetic beam 3 is an electromagnetic beam; the two means 2,2 'are formed as prisms. The first prism 2 is firmly connected to the first nozzle element 7, the second prism 2 'is fixedly connected to the second nozzle element 17. The prisms 2, 2 'are designed and arranged relative to one another such that the energetic beam 3 is always tilted so as to rotate the first and / or second nozzle element 7, 17 so that the energy beam 3 always automatically passes through the nozzle head outlet opening 16. Incidentally, a focusing lens 4 is preferably present in the nozzle head 9. The supply of the process gas via the process gas supply 6 takes place in this example without limiting the generality only in the beam direction behind the focusing lens 4th

Fig. 12 describes a further advantageous embodiment of the device according to the invention, in which an additional Z-axis is added. In this case, the second nozzle member 17 adjacent to its central opening on an adjusting means 15, with which the position of the nozzle head 9 can be changed within the second nozzle member 17; The nozzle head 9 can be moved relative to the second nozzle member 17 axially along the opening of the second nozzle member 17 with this adjusting means 15. Thereby, the distance of the nozzle head 9 to the workpiece 11 can be changed. The length of the process gas jet path between the nozzle head outlet opening 16 and the processing point increases without such an adjustment means 15 by a distance dz, starting from the processing point B, a processing point B 'to be processed and the nozzle head 9 is tilted accordingly. This extension of the process gas jet path can be counteracted or canceled out, ie compensated, by suitable displacement of the nozzle head 9 in the direction of the workpiece 11 by means of the adjusting means 15. This displacement of the nozzle head 9 is preferably carried out automatically. LIST OF REFERENCE NUMBERS

I scanner system

 2,2 'means for deflecting an energetic beam

 3 energetic beam

 4 focusing lens

 5 Z-axis movement device

 6 process gas supply

 7 first nozzle element or upper rotor disk

 8 lower rotor disk

 9 nozzle head

 10 process gas jet

 I I workpiece

 12,12 'upon rotation of the lower nozzle member by projection of the

 Nozzle head exit opening formed on the workpiece circular path

13 vertical axis / central axis of the device, rotation axis of the first

 nozzle member

 14 working field

 15 Z-axis adjustment means

 16 nozzle head exit opening

 17 second nozzle element

 18 process gas outlet axis

 19 rotation axis of the second nozzle member

Claims

claims 1. An apparatus for processing workpieces with energetic radiation, wherein an energetic beam (3) passed through a nozzle assembly and together with a process gas (10) can be directed to a workpiece (11), with at least one means (2) for Deflecting the energetic beam (3), causing the processing point on the  Workpiece (11) can be moved two-dimensionally, wherein the nozzle assembly, a first nozzle member (7) and a second  Nozzle element (17) and the second nozzle element (17) comprises a nozzle head (9), and wherein the first and / or the second  Nozzle element (7,17) is arranged rotatably / are, characterized  in that the first and the second nozzle element (7, 17) are designed such that the nozzle head (9) is rotated by a rotation of the first and / or the second nozzle element (7, 17) selected as a function of the deflection of the energetic beam (3) ) can be tilted so that the energetic beam (3) passes through the nozzle head outlet opening (16). 2. Device according to the preceding claim, characterized  characterized in that both nozzle elements (7,17) are rotatably arranged and can be controlled independently. 3. Device according to the preceding claim, characterized  in that the axis of rotation (19) of the second nozzle element (17) can be tilted by a rotation of the first nozzle element (7). 4. Device according to one of the preceding claims, characterized  characterized in that the first nozzle element (7) in one Beam entry plane, which is preferably perpendicular to its axis of rotation (13), a first side and in a beam exit plane has a second side and the beam exit plane is tilted relative to the beam entry plane by a first angle α. 5. Device according to one of the preceding claims, characterized in that the axis of rotation (19) of the second nozzle element (17) is perpendicular to the jet exit plane of the first nozzle member (7). 6. Device according to one of the preceding claims, characterized  in that the nozzle head (9) has a process gas outlet axis (18), with respect to the axis of rotation (19) of the second  Nozzle element (17) is tilted by a second angle ß. 7. Device according to one of the preceding claims, characterized  characterized in that the energetic beam (3) can be deflected by means of a tilting, in particular a tilting with respect to the axis of rotation (13) of the first nozzle member (7), wherein tilting angle with an amount between 0 and 3 °, preferably set between 0 and 10 ° can be. 8. Device according to one of the preceding claims, characterized  characterized in that the working field (14), which is the without Relative movement between the nozzle assembly and the workpiece (11), except the rotation of the first and second nozzle member (7,17), defined machinable surface on the workpiece (11), a size of at least 15 mm ² , preferably at least 50 mm ² and / or that the diameter of the nozzle head outlet opening (16) is between 0.25 and 2 mm, preferably between 0.5 and 1 mm. 9. Device according to one of the preceding claims, characterized  characterized in that the nozzle head (9) within the second  Nozzle element (17), in particular in the direction of the process gas outlet axis (18), is displaceably arranged. 10. Device according to one of the preceding claims, characterized in that one or more means (2, 2 ') for deflecting the energetic beam (3) are fixedly connected to the first and / or second nozzle element (7, 17) in such a way that the orientation of the means (2, 2) is ') for deflecting or tilting the energetic beam (3) relative is changed directly to the beam path of the energetic beam (3) during rotation of the first and / or second nozzle element (7,17). 11. Method for processing workpieces (11) with energetic  Radiation, in particular using a device according to one of the preceding claims, in which an energetic beam (3) passed through a nozzle arrangement and together with a  Process gas (4) is directed to a workpiece (11), wherein the  Processing point on the workpiece (11) by a means (2) for  Deflection of the energetic beam (3) can be moved two-dimensionally, wherein the nozzle arrangement has a first and a second  Nozzle element (7,17) and the second nozzle member (17) comprises a nozzle head (9), and wherein the first and / or the second  Nozzle element (7,17) is arranged rotatably / are, characterized  characterized in that the nozzle head (9) is tilted by a rotation of the first and / or the second nozzle element (7, 17) selected as a function of the deflection of the energetic beam (3) such that the energetic beam (3) projects the nozzle head outlet opening (16 ) goes through. 12. The method according to the preceding claim, characterized in that the machining of the workpiece (11) with already rotating  Nozzle elements (7,17) is started.