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WO2012002176A1 - Method for hardening surface of platinum molded article and platinum molded article having hardened surface - Google Patents

Method for hardening surface of platinum molded article and platinum molded article having hardened surface Download PDF

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Publication number
WO2012002176A1
WO2012002176A1 PCT/JP2011/063924 JP2011063924W WO2012002176A1 WO 2012002176 A1 WO2012002176 A1 WO 2012002176A1 JP 2011063924 W JP2011063924 W JP 2011063924W WO 2012002176 A1 WO2012002176 A1 WO 2012002176A1
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WIPO (PCT)
Prior art keywords
platinum
coating
coating layer
molded product
iridium
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Ceased
Application number
PCT/JP2011/063924
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French (fr)
Japanese (ja)
Inventor
島宗 孝之
重治 赤塚
松下 桂一郎
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Furuya Metal Co Ltd
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Furuya Metal Co Ltd
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Publication date
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Publication of WO2012002176A1 publication Critical patent/WO2012002176A1/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/08Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of metallic material
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02TCLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T50/00Aeronautics or air transport
    • Y02T50/60Efficient propulsion technologies, e.g. for aircraft

Definitions

  • the present invention relates to a method for curing the surface of a platinum molded article and a platinum molded article having a cured surface.
  • the single crystal synthesized using the pressure vessel is, for example, artificial quartz or zinc oxide in the hydrothermal synthesis method, and is, for example, gallium nitride in the low temperature synthesis method. These single crystals are used for various applications such as optics and electronic elements, and high purity is required. Therefore, the inner surface of the pressure vessel is required not to elute impurities in an ultra-high temperature and ultra-high pressure state, and is generally formed of platinum or a platinum alloy having excellent corrosion resistance and durability.
  • the molded product is used in a wide variety of fields such as physics and chemistry experiments at high temperature conditions and mining industry.
  • platinum is easily deformed due to its softness.
  • the specific gravity is large, if the thickness of the molded product is thin, it may be deformed by its own weight. Therefore, in order to maintain strength, it is necessary to increase the thickness of the molded product.
  • the amount of platinum used increases, there is a problem that the material price naturally increases and the molded product becomes very expensive. It was.
  • the pressure vessel usually has a double structure in which the physical strength is held by an outer cylinder made of a nickel-base alloy, and a thin molded product formed of platinum for the purpose of corrosion resistance is used as the inner cylinder container.
  • an outer cylinder made of a nickel-base alloy
  • a thin molded product formed of platinum for the purpose of corrosion resistance is used as the inner cylinder container.
  • Platinum has the property of being heat resistant and chemically stable, but has the property of easily causing grain growth and intergranular corrosion in a high temperature reducing atmosphere. Therefore, when used as an inner cylinder of a pressure vessel that is exposed to a high-temperature reducing atmosphere such as a low temperature synthesis method, there is a problem that platinum is consumed quickly and the life of the inner cylinder is shortened. On the other hand, iridium and ruthenium are known to be stable against a high-temperature reducing atmosphere.
  • Platinum alloys are known to have better physical strength and chemical stability than platinum. However, when platinum is used as an alloy, there is a problem that workability is extremely inferior. There are almost no cases where these alloys are used as the inner cylinder of a pressure vessel. Further, as shown in paragraphs 0034 and 0035 of Patent Document 2, the pressure vessel is easily deformed in order to prevent the inner tube vessel from being deformed or damaged due to the difference between the internal pressure and the external pressure. However, it is preferable to install a pressure buffering mechanism such as a bellows structure for eliminating the pressure difference, but platinum alloys cannot be used for bellows because of their poor workability. Therefore, even if an alloy of platinum is used for the inner cylinder container, platinum is used for the bellows, which has a problem that the structure becomes complicated.
  • Patent Document 3 proposes a technique for chemically and physically stabilizing the surface of a titanium base material by applying a precious metal coating to the surface of the titanium base material. This is a technology that forms a titanium layer and coats the electrode material containing noble metal on its surface, improving the strength of the platinum molded product, and preventing platinum from causing grain growth and intergranular corrosion in a reducing atmosphere. Not to do.
  • the object is to provide a platinum molded article having a cured surface and a surface hardening method thereof, which can prevent growth and intergranular corrosion.
  • the platinum molding surface hardening method includes a coating step of coating a coating liquid containing either or both of an iridium salt and a ruthenium salt on the surface of the platinum molding, And pyrolyzing the coating layer in a nitrogen gas atmosphere or in a flame to form the coating layer as a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. .
  • the surface-curing method for a platinum molded product according to the present invention is more suitable for a form in which the thickness of the platinum molded product is 0.2 to 1.0 mm (0.2 mm to 1.0 mm). Even if the platinum molded product is thin, the strength can be maintained.
  • the method for surface hardening a platinum molded product according to the present invention it is preferable that the method further includes a step of nitriding a partial region or the entire region of the surface of the coating layer.
  • the surface of the platinum molded product can be made harder.
  • oxide formation can be prevented, and a product with higher purity can be obtained in the low-temperature synthesis method.
  • the coating solution preferably further contains a platinum compound.
  • the coating layer can be an alloy of either iridium or ruthenium or both and platinum, and the adhesion between the coating layer and the platinum molded product can be further enhanced.
  • the coating liquid further contains an alcohol. Since thermal decomposition becomes a reducing atmosphere and oxygen can be removed, generation of oxides can be prevented. Further, since iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium having high corrosion resistance can be precipitated more stably, corrosion can be minimized when used in a high-temperature reducing atmosphere.
  • the platinum molded product is an inner cylinder of a pressure vessel, and the application step is performed by applying the application to one or both of the inner surface and the outer surface of the inner cylinder.
  • a mode in which a liquid is applied to form the coating layer is included. Since the self-weight deformation resistance is obtained, the handleability of the inner cylinder alone is improved, and the inner cylinder can be easily attached to the pressure vessel body. In addition, in the low temperature synthesis method, platinum grain growth and intergranular corrosion can be prevented.
  • the platinum molded product is an inner cylinder of a pressure vessel, and further includes an installation process of installing the inner cylinder in the main body of the pressure vessel, the installation process
  • the coating step and the thermal decomposition step are included, and the coating step applies the coating liquid to the inner surface of the inner cylinder to form the coating layer, and the thermal decomposition step includes the coating step.
  • the inner surface of the inner cylinder can be hardened without special equipment such as a large heating furnace while being installed in the main body of the pressure vessel.
  • the platinum molded product is a shelf for attaching a seed crystal housed in a main body of a pressure vessel, and the coating step is performed on the entire surface of the shelf.
  • coating is included. Impurities can be reduced in the growth of single crystals by the low-temperature synthesis method.
  • the platinum molded product is a flange provided at an opening of a pressure vessel, and the coating step is performed on the surface of at least a portion to be a seal portion of the flange.
  • coats a coating liquid and forms the said coating layer is included.
  • the surface hardness of the flange can be increased. Further, the surface of the flange can be hardened without special equipment such as a large heating furnace while being installed in the main body of the pressure vessel.
  • the platinum molded product is a crucible, and the coating step is performed by applying the coating liquid to either or both of the inner surface and the outer surface of the crucible.
  • the form which forms the said application layer is included. Even if the crucible is thin, the handleability can be improved. Further, durability in a reducing atmosphere is improved.
  • the platinum molded product having a cured surface according to the present invention is characterized in that a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium is provided on the surface of the platinum molded product.
  • the surface of the platinum molded product is either the inner surface or the outer surface of the inner tube of the pressure vessel, or both, or a seed crystal accommodated in the main body of the pressure vessel. It includes a form that is the entire surface of the mounting shelf, the surface of at least the portion of the flange provided at the opening of the pressure vessel, or the inner surface or the outer surface of the crucible, or both.
  • the platinum molded product having a cured surface according to the present invention includes a form in which the thickness of the platinum molded product is 0.2 to 1.0 mm. Even if the molded product is thin, it can maintain strength and has resistance to self-weight deformation.
  • the coating layer preferably has a thickness of 1 to 30 ⁇ m.
  • the surface of the platinum molding can be coated to improve chemical stability and physical strength.
  • the platinum element of the platinum molded product and the metal element contained in the coating layer are diffused. Adhesion between the platinum molded product and the coating layer is improved, and chemical stability and physical strength can be further improved.
  • the platinum molded product having a cured surface In the platinum molded product having a cured surface according to the present invention, nitriding treatment of an alloy containing at least one kind of iridium, ruthenium, iridium or ruthenium on at least the surface side of the coating layer in a partial region or the entire region of the coating layer. A layer is preferred.
  • the surface of the platinum molded product can be made harder. In addition, oxide formation can be prevented, and a product with higher purity can be obtained in the low-temperature synthesis method.
  • the thickness of the nitriding layer is preferably 1 to 30 ⁇ m.
  • the surface of the platinum molded product can be made harder.
  • the present invention is excellent in its own weight deformation resistance even if it is thin, is not easily deformed, is easy to handle, has corrosion resistance and durability in a high temperature and high pressure state, and grows platinum particles in a reducing atmosphere. It is possible to provide a platinum molded article having a cured surface capable of preventing intergranular corrosion and a method for curing the surface.
  • FIG. 4 It is a schematic diagram which shows one form of the cross-sectional structure of the platinum molded product which concerns on this embodiment. It is sectional drawing which shows an example of the pressure vessel which has a shelf. It is sectional drawing which shows an example of the pressure vessel which has an inner cylinder container. It is sectional drawing which shows an example of a large sized pressure vessel. It is the elements on larger scale which show the seal part of the pressure vessel shown in FIG. 4, (a) is a section fragmentary enlarged view which shows one form of a flange and a gasket, (b) is a top view which shows one form of a gasket. is there.
  • FIG. 1 is a schematic diagram showing an embodiment of a cross-sectional structure of a platinum molded product according to this embodiment.
  • the platinum molded product 100 having a hardened surface according to this embodiment is provided with a coating layer 30 made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium on the surface of the platinum molded product 20.
  • the type of the platinum molded product 20 is not particularly limited.
  • a seed crystal mounting shelf (baffle / saddle / crystal mounting) housed in the inner body of the pressure vessel or the main body of the pressure vessel (hereinafter referred to as a shelf).
  • a flange and a crucible provided at the opening of the pressure vessel.
  • the inner cylinder of the pressure vessel forms a sealed space by itself, is accommodated in the main body of the pressure vessel and is used without being joined to the pressure vessel (hereinafter referred to as an inner cylinder container) and pressure.
  • It includes a lining-type inner cylinder (hereinafter referred to as an inner cylinder) that is housed in a container body and used in close contact with or adhered to the inner surface of the pressure vessel body.
  • the thickness of the platinum molded product 20 is preferably 0.2 to 1.0 mm. More preferably, it is 0.3 to 0.7 mm. If it is less than 0.2 mm, it may be inferior to physical strength and resistance to self-deformation. If the thickness exceeds 1.0 mm, it is difficult to reduce the price of the molded product by making the platinum molded product thinner and reducing the amount of platinum used.
  • the thickness of the platinum molded product 20 may be uniform as a whole, or the thickness may be partially changed.
  • the form in which the thickness is partially changed is, for example, a form in which the inner cylinder is reinforced by making the thickness of the flange and the thickness of the bottom thicker than the thickness of the cylinder. At this time, it is preferable that the thickness of the thinnest part (for example, the thickness of the side wall part or the bottom part of the cylinder) is 0.2 to 1.0 mm.
  • the covering layer 30 is made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium.
  • An alloy containing iridium, ruthenium, or at least one of iridium or ruthenium has a property of hardly causing grain growth in a reducing atmosphere. Moreover, since those melting
  • the platinum molded product 100 with the surface cured according to the present embodiment is exposed to iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium on the surface, so that chemical stability in a reducing atmosphere is achieved. Can be improved.
  • iridium alloys examples include iridium-ruthenium alloys, iridium-platinum alloys, iridium-rhodium alloys, iridium-gold alloys, and iridium-rhenium alloys.
  • the alloy containing ruthenium examples include a ruthenium-iridium alloy, a ruthenium-platinum alloy, a ruthenium-rhodium alloy, a ruthenium-gold alloy, and a ruthenium-rhenium alloy.
  • an iridium-platinum alloy or ruthenium-platinum alloy which is an alloy with platinum, is preferable in that the adhesion to the platinum molded product 20 is further improved and the physical strength and the chemical stability are further improved.
  • the platinum content is preferably 10 to 70% by mass, more preferably 15 to 60% by mass. If the platinum content in the alloy is less than 10% by mass, the desired effect may not be obtained. When it exceeds 70 mass%, physical strength and corrosion resistance in a reducing atmosphere may be insufficient. In particular, sufficient hardness may not be obtained and the intended purpose may not be achieved.
  • the coating layer 30 does not contain the oxide of iridium or ruthenium. A reaction product with higher purity can be obtained.
  • the metal contained in the coating layer 30 is iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium can be appropriately selected according to the conditions and purpose of use.
  • an alloy is not limited to the alloy which consists of 2 types of illustrated metals, As long as it alloyes, it can be set as the alloy which consists of 3 or more types of metals.
  • the alloys composed of three or more metals include, for example, ruthenium-platinum-rhodium alloy, iridium-platinum-rhodium alloy, iridium-ruthenium-rhodium alloy, iridium-platinum-rhenium alloy, ruthenium-platinum-rhenium alloy, iridium-ruthenium.
  • the platinum element of the platinum molded product 20 and the metal elements such as iridium and ruthenium contained in the coating layer 30 are diffused.
  • the platinum of the platinum molded product 20 and the coating layer 30 of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium are diffused so that the platinum molded product 20 and the coating layer 30 are integrated to improve adhesion. , Physical strength and chemical stability can be further improved.
  • the diffusion state includes, for example, a state in which platinum element diffuses from the platinum molded product 20 into the coating layer 30, a state in which a metal element diffuses from the coating layer 30 into the platinum molded product 20, and a platinum element from the platinum molded product 20 into the coating layer 30. It is an interdiffusion state in which the metal element diffuses and the metal element diffuses from the coating layer 30 into the platinum molded product 20.
  • the platinum molded article 100 having a hardened surface forms a coating layer made of iridium, ruthenium, or an alloy containing at least one kind of iridium or ruthenium after molding platinum having good workability.
  • the interface between the platinum molded product 20 and the coating layer 30 is alloyed.
  • physical strength and chemical stability can be increased. Therefore, it can respond to the platinum molded product 20 of various shapes.
  • the covering layer 30 may be formed of only one layer, or may be formed of two or more layers. In the case of forming with two or more layers, the configuration of each layer can be changed.
  • the first coating layer adjacent to the platinum molded product 20 is preferably a layer made of an alloy of platinum and at least one kind of iridium or ruthenium.
  • the first coating layer and the second coating layer are sequentially provided on the surface of the platinum molded product 20, for example, the first coating layer is made of iridium or an alloy of ruthenium and platinum, and the second coating layer is made of iridium or ruthenium. And rhodium alloy.
  • the second coating layer may contain a third metal in addition to iridium and ruthenium, or iridium and ruthenium.
  • a third metal in addition to iridium and ruthenium, or iridium and ruthenium.
  • the structure of each layer is iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium can be selected as appropriate according to the use conditions and purpose, and the present embodiment is not limited to this.
  • the metal elements contained in each coating layer formed of two or more layers are diffused in the same manner as the platinum element of the platinum molded product 20 and the metal contained in the coating layer 30. Since each layer is united and alloyed by diffusion, adhesion is improved, and physical strength and chemical stability can be enhanced.
  • the thickness of the coating layer 30 is preferably 1 to 30 ⁇ m. More preferably, it is 3 to 10 ⁇ m. If it is less than 1 ⁇ m, physical strength and corrosion resistance in a reducing atmosphere may be insufficient. In some cases, the coating layer 30 may be buried by diffusion of the platinum molded product 20 with the platinum element. If it exceeds 30 ⁇ m, the coating layer 30 is likely to peel off depending on handling conditions such as rapid heating and quenching due to the difference in thermal expansion coefficient between the platinum element of the platinum molded product 20 and the metal contained in the coating layer 30. In addition, the amount of metal used such as iridium and ruthenium increases, which is not economically preferable. When the covering layer 30 is formed of two or more layers, the total thickness of all the covering layers is within the above range. Moreover, thickness can be changed for every layer.
  • An alloy containing at least one kind of iridium, ruthenium, or iridium or ruthenium has a characteristic of absorbing oxygen, albeit slightly. Therefore, in the case of being used for a reaction in a reducing atmosphere such as a low-temperature synthesis method, there is an effect that the reducing atmosphere can be maintained.
  • the platinum molded product 100 having a hardened surface includes iridium, ruthenium, or at least one kind of iridium or ruthenium.
  • the nitriding layer (not shown) is preferable.
  • the surface of the platinum molded product 100 can be further cured.
  • a reaction such as a low-temperature synthesis method is used as a reaction in which oxygen becomes an impurity. It is suitable for use.
  • the platinum molded product 20 when a partial region of the coating layer 30 is a nitriding layer, for example, it becomes a seal portion that requires particularly physical strength. Only the portion is a nitriding layer.
  • a partial region of the coating layer 30 when a partial region of the coating layer 30 is a nitriding layer, for example, a part of the inner surface that requires corrosion resistance, and a part in contact with a chemical used for the reaction can be in contact. Only the portion is a nitriding layer.
  • the nitriding layer contains iridium, ruthenium, or an alloy nitride containing at least one of iridium or ruthenium contained in the coating layer 30.
  • the nitride content of the nitriding layer has a distribution in which the surface is the largest and gradually decreases toward the inside of the substrate.
  • the thickness of the nitriding layer is preferably 1 to 30 ⁇ m. More preferably, it is 1 to 10 ⁇ m. If it is less than 1 ⁇ m, the effect of curing the surface may be insufficient.
  • the surface of the nitriding layer becomes brittle, the surface becomes brittle due to the occurrence of cracks due to residual stress inside the nitriding layer, and peeling may occur when pressure is applied.
  • the time required for the nitriding treatment becomes long, it is not economically preferable.
  • the platinum molding surface hardening method includes a coating step in which a coating liquid containing one or both of an iridium salt and a ruthenium salt is applied to the surface of the platinum molding 20 to form a coating layer. And a thermal decomposition step of thermally decomposing the coating layer in a nitrogen gas atmosphere or flame to form the coating layer 30 made of iridium, ruthenium, or an alloy containing at least one kind of iridium or ruthenium.
  • the platinum molded product 20 can be obtained by a generally known method such as a casting method, a forging method, press molding, welding, or the like. Therefore, the method for molding the platinum molded product 20 is not particularly limited in the present embodiment.
  • the thickness of the platinum molded product 20 is preferably 0.2 to 1.0 mm.
  • a coating solution containing either or both of an iridium salt and a ruthenium salt is coated on the surface of the platinum molded product 20 and dried to form a coating layer.
  • the coating solution is not particularly limited in the present embodiment as long as it can form the coating layer 30 by depositing iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium by thermal decomposition performed later.
  • the coating solution is, for example, a solution in which an iridium salt or a ruthenium salt is mixed with alcohol as a solvent.
  • the iridium salt include iridium chloride, iridium nitrate, chloroiridic acid, and iridium butoxide.
  • the ruthenium salt examples include ruthenium chloride, ruthenium nitrate, ruthenium chloride, and ruthenium butoxide.
  • the iridium salt is preferably iridium chloride in that it can efficiently precipitate iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium by thermal decomposition.
  • the ruthenium salt is preferably ruthenium chloride because it is easily available and relatively inexpensive.
  • the coating liquid may further contain a metal compound that forms an alloy with iridium or ruthenium.
  • metal compounds forming alloys with iridium or ruthenium include platinum compounds such as chloroplatinic acid and dinitrodiammine platinum, rhodium compounds such as rhodium chloride and rhodium nitrate, gold compounds such as chloroauric acid, gold chloride and gold cyanide.
  • Compounds, rhenium compounds such as rhenium chloride and rhenium nitrate.
  • chloroplatinic acid, dinitrodiammine platinum and the like are preferably used as the platinum compound, and chloroplatinic acid is particularly preferred for combination with iridium salts and ruthenium salts. Since an alloy of iridium or ruthenium and platinum is formed and adhesion to the platinum molded article is increased, physical strength and corrosion resistance in a reducing atmosphere are further improved.
  • the coating solution preferably contains alcohol as a solvent.
  • alcohol is a solvent and an organic reducing agent.
  • examples of the alcohol include methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, isobutanol, tert-butanol, and 1-pentanol.
  • the coating solution may further contain an organic reducing agent other than alcohol such as turpentine oil.
  • the present embodiment is not limited to the method of applying the coating liquid and the method of drying.
  • the coating layer is thermally decomposed in a nitrogen gas atmosphere or in a flame, whereby one or both of iridium salt and ruthenium salt and iridium or ruthenium and alloy contained in the coating layer obtained in the coating step are alloyed.
  • the coating layer 30 is formed by precipitating a metal compound that forms iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. When iridium and ruthenium are thermally decomposed in an atmosphere containing oxygen, an oxide is formed. Therefore, the metal can be precipitated by thermally decomposing the coating layer in a nitrogen gas atmosphere or in a flame.
  • Pyrolysis is preferably performed in a nitrogen atmosphere using a heating furnace capable of supplying nitrogen gas.
  • a heating furnace capable of supplying nitrogen gas.
  • thermal decomposition can be performed in a flame using a gas burner in an atmospheric atmosphere.
  • oxygen in the air is used for combustion, the surface of the platinum molded product is substantially in a nitrogen atmosphere, and can deposit iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium as a metal.
  • the coating liquid contain alcohol, a reducing atmosphere can be obtained and generation of oxides can be prevented.
  • the thickness of the coating layer 30 is preferably 1 to 30 ⁇ m. More preferably, it is 1 to 10 ⁇ m. It is preferable to repeat the coating step and the thermal decomposition step a plurality of times until the thickness is reached. A uniform coating layer with few pores can be obtained, and the surface of the platinum molded product can be more reliably covered with iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium.
  • the coating amount per coating step is preferably 0.05 to 1 ⁇ m. More preferably, it is 0.10 to 0.5 ⁇ m.
  • the components of the coating solution may be the same in all coating steps, or two or more types of coating solutions may be used.
  • the coating solution used in the first coating step may contain a platinum compound such as chloroplatinic acid in addition to one or both of the iridium salt and the ruthenium salt. preferable.
  • the coating solution is applied as an alcohol solution of iridium chloride and chloroplatinic acid once.
  • the coating solution is an alcohol solution of iridium chloride and ruthenium chloride, and the coating amount per coating step is 0.4 ⁇ m. .
  • a two-layer coating layer comprising a first coating layer made of iridium-platinum alloy formed on the surface of the platinum molded product 20 and a second coating layer made of iridium formed on the first coating layer. 30 can be formed. Since the coating layer 30 has improved adhesion to the platinum molded product 20, physical strength and corrosion resistance in a reducing atmosphere are further improved. Furthermore, since the coefficient of thermal expansion (linear expansion coefficient) occurs in stages, the coating layer itself is less likely to break during heating and cooling, and is difficult to peel off.
  • diffusion is performed between the platinum element of the platinum molded product 20 and the metal element contained in the coating layer 30.
  • the diffusion may be performed simultaneously with the thermal decomposition process by heating in the thermal decomposition step, but after the thermal decomposition step, further heating is performed to diffuse the platinum element of the platinum molded product 20 and the metal element contained in the coating layer 30.
  • a metal containing at least one kind of iridium or ruthenium is pre-alloyed to form a coating layer in the pyrolysis step, By further heating in the stabilization step, diffusion can be performed more efficiently.
  • the coating layer is formed by repeating the coating step and the thermal decomposition step a plurality of times, in the thermal decomposition step, a metal containing at least one kind of iridium or ruthenium is alloyed in the thermal decomposition step, and the stabilization step is performed. Diffusion treatment can be performed between the metals contained in the adjacent coating layers and between the platinum element of the platinum molded product and the metal contained in the first coating layer adjacent to the platinum molded product.
  • the heating conditions are not particularly limited.
  • the heating temperature is set to 700 to 1000 ° C. and the heating time is set to 1 to 2 hours, so that the thermal decomposition process and the diffusion process can be performed simultaneously.
  • the heating temperature is set to 500 to 600 ° C.
  • the processing time is set to 5 to 15 minutes, and the thermal decomposition process is performed.
  • the heating temperature is set to 700
  • the diffusion treatment is performed at a temperature of ⁇ 1000 ° C. and a heating time of 1 to 2 hours.
  • the diffusion treatment can be performed in an inert atmosphere such as nitrogen or argon or in an oxygen-containing atmosphere such as air. More preferably, it is in an inert atmosphere such as nitrogen or argon.
  • an inert atmosphere such as nitrogen or argon.
  • the method for hardening a surface of a platinum molded article according to the present embodiment further includes a step of nitriding a partial region or the entire region of the surface of the coating layer 30.
  • the nitriding treatment can be performed by heating in a gas containing nitrogen or a nitrogen compound.
  • the gas containing nitrogen or a nitrogen compound is not particularly limited, and examples thereof include nitrogen gas, ammonia gas, and nitrogen-hydrogen mixed gas.
  • the heating temperature and the heating time are not particularly limited, and it is preferable to select conditions under which the thickness of the nitriding layer is in the range of 1 to 30 ⁇ m, for example. By nitriding, the surface hardness of the platinum molded product can be further increased.
  • a method of nitriding a part of the region is not particularly limited, and for example, there is a method of masking a portion where nitriding is not performed.
  • FIG. 2 is a cross-sectional view showing an example of a pressure vessel having a shelf.
  • a pressure vessel 119 shown in FIG. 2 is used as a single crystal growth vessel.
  • the basic configuration of the pressure vessel 119 is as follows.
  • the pressure vessel 119 has a main body 1 and a lid 2.
  • the main body 1 and the lid 2 are made of a heat-resistant alloy such as low alloy steel or nickel chrome alloy, for example.
  • the main body 1 is heated by a heater 4 disposed on the outer periphery thereof.
  • a lower inner cylinder 105 is installed inside the main body 1.
  • the lower inner cylinder 105 is formed with a flange 105a (hereinafter also referred to as a lower flange).
  • an upper inner cylinder 106 is installed in the inside of the lid 2 in the same manner as the main body 1.
  • the upper inner cylinder 106 is formed with a flange 106a (hereinafter also referred to as an upper flange).
  • the lower inner cylinder 105 and the upper inner cylinder 106 are lining type inner cylinders.
  • the main body 1 has a bottomed cylindrical shape with one end opened, and a lower flange 105a projecting in the centrifugal direction is provided on the outer peripheral edge of the opening.
  • the pressure vessel 119 is structured to be sealed by being fixed with a fixing tool 3 such as a nut or a clamp through a gasket 7 between the upper flange 106a and the lower flange 105a.
  • the contact portion is referred to as a seal portion.
  • a seal portion a seal portion
  • the lower inner cylinder 105 and the upper inner cylinder 106 are formed of a metal having heat and corrosion resistance such as platinum.
  • the gasket 7 is formed of a metal having heat and corrosion resistance, such as a nickel-based alloy or a platinum group metal, and more preferably formed of a material having lower hardness than the upper flange 106a and the lower flange 105a.
  • a shelf 108 is accommodated in the main body 1 of the pressure vessel 119 shown in FIG.
  • the shelf 108 is a platinum frame.
  • the shelf 108 has a seed crystal gantry 10 at the upper part, a raw material 11 at the lower part, and a convection control plate 9 between the seed crystal gantry 10 and the raw material 11, and is filled with a solvent (not shown). It is installed in the cylinder 105 and the upper inner cylinder 106.
  • the single crystal is grown in the lower inner cylinder 105 and the upper inner cylinder 106. Accordingly, the lower inner cylinder 105 and the upper inner cylinder 106 are required to have high corrosion resistance, and thus need to be molded with platinum.
  • the platinum molded product is preferably the lower inner cylinder 105 and the upper inner cylinder 106 of the pressure vessel 119.
  • the size of the lower inner cylinder 105 varies depending on the size of the pressure vessel. For example, it is a medium-sized pressure vessel and has an inner diameter of 20 to 70 mm and a capacity of 0.1 to 8 l. A large pressure vessel with an inner diameter of 70 to 150 mm and a capacity of 8 to 50 l.
  • the surface treatment of the lower inner cylinder 105 can be performed either before installation on the main body 1 of the pressure vessel 119 or after installation on the main body 1 of the pressure vessel 119.
  • the surface on which the coating layer is provided can be either the inner surface or the outer surface of the lower inner cylinder 105, or both.
  • the inner cylinder 105 can be appropriately selected according to various conditions such as dimensions, applications, and reaction conditions. Even if the thickness of the lower inner cylinder 105 is reduced to, for example, 0.2 to 1.0 mm, the attachment and detachment work into the main body 1 is facilitated.
  • the lower inner cylinder 105 can be easily handled, and the attachment and removal work of the pressure vessel 119 in the main body 1 is facilitated.
  • a coating layer on at least the inner surface of the lower inner cylinder 105, it is possible to prevent grain growth and intergranular corrosion in a high-temperature reducing atmosphere, and a reaction with higher purity. A product can be obtained. Furthermore, by nitriding the coating layer, the physical strength can be further improved, and the purity of the reaction product obtained by the low temperature synthesis method can be further increased.
  • the surface on which the coating layer is provided can be the inner surface of the lower inner cylinder 105.
  • the pyrolysis step is preferably pyrolyzed in a flame of a gas burner to form the coating layer as a coating layer.
  • the pressure vessel having the platinum lower inner cylinder 105 already installed at the work site can be cured on the inner surface of the lower inner cylinder 105 without being moved from the work site. It can be set as the pressure vessel corresponding to.
  • the surface of the coating layer is further nitrided by adding nitrogen or hydrogen gas to which this nitrogen or hydrogen is added and heated from the outside, thereby further improving the physical strength, and by using a low-temperature synthesis method. The purity of the reaction product can be further increased.
  • the surface of the platinum molded product is preferably the upper inner cylinder 106 disposed on the lid 2 of the pressure vessel 119.
  • the production of impurities can be further suppressed, and a reaction product with high purity can be obtained.
  • the platinum molded product is preferably a shelf 108 accommodated in the main body 1 of the pressure vessel 119.
  • the material thickness of the shelf 108 can be reduced to, for example, 0.2 to 1.0 mm. Even if the shelf 108 is made thin, it can be prevented from being deformed by its own weight. Further, the shelf 108 can be easily handled, and the operation of storing and taking out the pressure vessel 119 into the main body 1 is facilitated. Further, the shelf 108 can be integrally formed of platinum.
  • the dimensions of the shelf 108 vary depending on the size of the pressure vessel.
  • the shelf 108 is a medium-sized pressure vessel having an inner diameter of 20 to 70 mm and a height of 300 to 2000 mm. A large pressure vessel with an inner diameter of 70 to 150 mm and a height of 2000 to 3000 mm.
  • the surface on which the coating layer 30 is provided is preferably the entire surface of the shelf 108 accommodated in the main body 1 of the pressure vessel 119.
  • a coating layer By forming a coating layer on the entire surface of the constituent parts of the shelf 108, when used in the low temperature synthesis method, grain growth and intergranular corrosion in a high temperature reducing atmosphere can be prevented, and a reaction with higher purity can be achieved. A product can be obtained. Furthermore, by nitriding the coating layer, the purity of the reaction product can be further improved and the physical strength can be increased.
  • FIG. 3 is a cross-sectional view showing an example of a pressure vessel having an inner cylinder vessel.
  • the pressure vessel 19 shown in FIG. 3 has the same basic configuration as the pressure vessel shown in FIG.
  • An inner cylinder container 8 is accommodated in the main body 1 of the pressure container 19 shown in FIG.
  • the inner cylinder container 8 is a sealable cylindrical container made of platinum.
  • a bellows 12 for pressure adjustment is attached to the upper portion of the inner cylinder container 8 in a sealed state.
  • a shelf 108 and a solvent (not shown) illustrated in FIG. 2 are accommodated inside the inner cylinder container 8.
  • the single crystal is grown in the inner cylinder container 8. Therefore, in the pressure vessel 19 shown in FIG.
  • the lower anticorrosion lining 5 and the upper anticorrosion lining 6 do not directly touch the treatment liquid, and therefore do not require high corrosion resistance as required for the inner cylinder.
  • platinum is particularly preferable, the present invention is not limited to this.
  • nickel-based alloys such as the trade names “HASTELLOY” and “INCONEL”, titanium, titanium alloys, tantalum, and tantalum alloys can be used.
  • the size of the inner cylinder container 8 varies depending on the size of the pressure container, but is, for example, a medium-sized pressure container having an inner diameter of 20 to 70 mm and a capacity of 0.1 to 8 l. A large pressure vessel with an inner diameter of 70 to 150 mm and a capacity of 8 to 50 l.
  • the platinum molded product is preferably the inner cylinder container 8 of the pressure vessel 19.
  • the thickness of the inner cylinder container 8 can be reduced to, for example, 0.2 to 1.0 mm. Even if the thickness of the inner cylinder container 8 is reduced, it can be prevented from being deformed by its own weight. Moreover, it becomes easy to handle the inner cylinder container alone, and the operation of storing and taking out the pressure container 19 into the main body 1 is facilitated. Furthermore, since the inner cylinder container 8 and the bellows 12 can be integrally formed of platinum, complicated joining between the inner cylinder container 8 and the bellows 12 becomes unnecessary, and the pressure resistance of the inner cylinder container 8 can be further increased. it can.
  • the surface on which the coating layer 30 is provided can be either one or both of the inner surface and the outer surface of the inner cylinder container 8 of the pressure vessel 19, and depends on various conditions such as the dimensions, applications, reaction conditions, etc. of the inner cylinder container 8 Can be selected as appropriate.
  • a coating layer on at least the inner surface of the inner cylinder container 8
  • grain growth and intergranular corrosion in a high-temperature reducing atmosphere can be prevented, and a reaction with higher purity can be achieved.
  • a product can be obtained.
  • the purity of the reaction product can be further improved and the physical strength can be increased.
  • FIG. 4 is a cross-sectional view showing an example of a large pressure vessel.
  • the pressure vessel 900 shown in FIG. 4 has the same basic configuration as the pressure vessel shown in FIG.
  • a lower anticorrosion lining 5 is further disposed between the main body 1 and the lower inner cylinder 105, and an upper anticorrosion lining 6 is also disposed between the lid 2 and the upper inner cylinder 106.
  • the lower anticorrosion lining 5 and the upper anticorrosion lining 6 are made of a nickel-based alloy having excellent pressure resistance, heat resistance and corrosion resistance, such as trade names of Inconel and Hastelloy.
  • the lower anticorrosion lining 5 and the upper anticorrosion lining 6 have a role of preventing the main body 1 from being corroded when the lower inner cylinder 105 and the upper inner cylinder 106 are damaged and a highly corrosive substance flows out. It can be set as the pressure vessel corresponding to high temperature / high pressure conditions.
  • the pressure vessel 119 of FIG. 2 is a medium-sized pressure vessel, you may provide anticorrosion lining in them.
  • the large pressure vessel 900 shown in FIG. 4 has a structure in which the lower anticorrosion lining 5 and the lower inner cylinder 105 are arranged on the inner surface of the main body 1, the surface treatment of the lower inner cylinder 105 inevitably increases in size.
  • the inner cylinder itself can be made thinner. As a result, the amount of expensive platinum used can be reduced, and a great economic advantage can be obtained.
  • FIG. 5 is a partially enlarged cross-sectional view showing a seal portion of the pressure vessel shown in FIG.
  • the platinum molded product surface hardening method according to the present embodiment is suitable for a form in which the platinum molded product 20 is the lower flange 105 a and the upper flange 106 a provided in the opening of the pressure vessel 900.
  • the lower inner cylinder 105 and the lower flange 105a may be integrally formed of platinum, or the lower flange 105a may be formed as a separate part and the lower inner cylinder 105 and the lower flange 105a may be joined.
  • the present embodiment is not limited to the method of joining the lower inner cylinder 105 and the lower flange 105a.
  • a method of joining for example, as shown in FIG. 5, there is a method in which a flange mounting portion T is provided on the opening periphery of the lower inner cylinder 105 and the lower flange 105 a is attached thereon by welding or diffusion joining.
  • the upper inner cylinder 106 and the upper flange 106a may be integrally formed of platinum, or the upper flange 106a is formed as a separate part, and the upper inner cylinder 106 is formed. And the upper flange 106a may be joined.
  • the surface on which the coating layer is provided is preferably the surface of the portion S that becomes at least a seal portion of the lower flange 105a and the upper flange 106a.
  • the coating layer should just be formed in the surface of the part S used as a seal location at least, More preferably, it is a form which coat
  • the flange as the platinum molded product is connected to the lower flange 105 a attached to the lower inner cylinder 105 shown in FIG. 4. It is not limited, For example, the lower flange 5a and the upper flange 6a which were formed in the lower anticorrosion lining 5 and the upper anticorrosion lining 6 shown in FIG. 3 are included.
  • the coating solution used in the first coating step is blended with an iridium salt or ruthenium salt and a platinum compound such as chloroplatinic acid to form a coating layer made of an alloy of iridium or ruthenium and platinum. It is preferable to do.
  • the adhesion between the platinum molded product and the coating layer is increased, and the physical strength can be further improved.
  • the surface hardness and physical strength can be raised more by carrying out the nitriding process of the surface of the coating layer 30.
  • the surface of the platinum molded product whose surface is hardened according to the present embodiment is the upper flange 106a and the lower flange 105a in FIG. 4, the upper flange 6a and the lower flange 5a in FIG. 3, JIS Z 2244: 2009
  • the surface Vickers hardness measured according to the above is preferably 300 Hv to 500 Hv. More preferably, it is 350 Hv to 450 Hv. If it is less than 300 Hv, a large deformation (collapse) may occur due to tightening, and sufficient sealing may not be achieved. In addition, the surface hardness may be lower than that of the gasket, and the flange may be deformed to shorten the life of the pressure vessel. If it exceeds 500 Hv, cracks may occur. Furthermore, it may break.
  • the platinum molded product is preferably a crucible.
  • the platinum crucible is used for the purpose of preventing contamination of trace impurities such as single crystal growth of various oxides and melting of optical glass.
  • the platinum molded product 20 includes a so-called reinforced platinum crucible in which an oxide such as zirconia (ZrO 2 ) is dispersed.
  • the surface on which the coating layer 30 is provided can be either one or both of the inner surface and the outer surface of the crucible, and can be appropriately selected according to various conditions such as the size of the crucible, application, and reaction conditions.
  • the thickness of the crucible can be reduced to 0.2 to 1.0 mm, for example.
  • the crucible Even if the thickness of the crucible is reduced, the crucible can be prevented from being deformed by its own weight. In addition, the crucible can be handled easily. Furthermore, durability in a reducing atmosphere is improved. Furthermore, by nitriding the coating layer 30, the purity of the reaction product can be further improved, and the physical strength can be increased.
  • the dimensions of the crucible are, for example, an inner diameter of 25 to 100 mm, a height of 25 to 150 mm, and a capacity of 0.01 to 2 l. In addition, this embodiment is not restrict
  • Example 1 As a platinum molded product, an inner cylinder of a bottomed cylindrical pressure vessel having one end opened with platinum having a diameter (inner dimension) of 30 mm, a height of 200 mm, and a thickness of 0.2 mm was formed. Iridium chloride and chloroplatinic acid were mixed at a molar ratio of 80:20, dissolved in butanol, and a solution having a total molar concentration of iridium and platinum of 0.25 mol-Ir + Pt / l was used as a coating solution. The obtained coating solution was applied to the inner surface of the inner cylinder, allowed to stand at 60 ° C. for 10 minutes, and dried to form a coating layer.
  • the coating amount per one time was 20 ml / m 2 .
  • an iridium-platinum alloy film having a thickness of 0.1 ⁇ m was obtained.
  • heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 600 to 750 ° C., and the treatment time was 10 minutes.
  • the flame temperature was measured using a radiation thermometer (model AD-5616, manufactured by A & D).
  • the coating from coating to thermal decomposition was repeated 10 times to form a coating layer made of iridium-platinum alloy having a thickness of 1.0 ⁇ m.
  • the surface of the coating layer was further heated by using a gas burner flame in an air atmosphere to carry out a stabilization treatment.
  • heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 750 to 900 ° C., and the treatment time was 20 minutes.
  • the obtained inner cylinder has increased surface hardness and is easy to attach to the pressure vessel body. Further, since the inner surface was coated with an iridium-platinum alloy, it was possible to form an inner cylinder that hardly caused grain growth and intergranular corrosion even when used as a container for the low temperature synthesis method.
  • Example 2 As a platinum molded product, a flange having a diameter of 70 mm and a thickness of 2.0 mm was formed on the outer peripheral edge of the opening of the platinum inner cylinder. Ruthenium chloride and chloroplatinic acid were mixed at a molar ratio of 1: 1, dissolved in butanol, and a solution having a total molar concentration of ruthenium and platinum of 0.5 mol-Ru + Pt / l was used as the first coating solution. . The obtained first coating solution was applied to the surface of the flange facing the flange (upper flange) on the lid side, allowed to stand at 40 ° C. for 15 minutes, and dried to form a coating layer.
  • the coating amount per one time was 20 ml / m 2 .
  • a 0.2 ⁇ m thick ruthenium-platinum alloy film was obtained.
  • heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 550 to 650 ° C., and the treatment time was 30 minutes. From application of the first coating solution to thermal decomposition was repeated 5 times to form a first coating layer made of ruthenium-platinum having a thickness of 1.0 ⁇ m.
  • ruthenium chloride and rhodium chloride are blended at a molar ratio of 1: 1, dissolved in butanol, and a solution having a total molar concentration of ruthenium and rhodium of 1.0 mol-Ru + Rh / l is used as the second coating solution.
  • the obtained 2nd coating liquid was apply
  • the coating amount per one time was 0.5 ⁇ m.
  • the surface of the coating layer was heat-treated using a gas burner flame in the air atmosphere and thermally decomposed to obtain a ruthenium-rhodium alloy film having a thickness of 0.5 ⁇ m.
  • the second pyrolysis step heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 650 to 750 ° C., and the treatment time was 30 minutes.
  • the application from the second coating solution to thermal decomposition was repeated 20 times to form a second coating layer made of ruthenium-rhodium having a thickness of 10 ⁇ m.
  • the stabilization process was performed using an electric furnace with a muffle in an air atmosphere at an atmospheric temperature of 700 ° C. and a processing time of 2 hours.
  • the obtained flange having a hardened surface apparently had a slightly different color tone from platinum, and showed a slightly blackish metallic luster.
  • the Vickers hardness was measured according to JIS Z 2244: 2009, it was 350 to 380 Hv, and it was confirmed that the surface hardness was sufficient as a flange.
  • Example 3 As a platinum molded product, a crucible having a diameter (inner dimension) of 70 mm, a height of 100 mm, and a thickness of 0.8 mm was molded. Iridium chloride was dissolved in butanol, and a solution having a molar concentration of iridium of 0.5 mol-Ir / l was used as a coating solution. The obtained coating solution was applied to the inner and outer surfaces of the crucible, allowed to stand at 40 to 50 ° C. for 10 minutes, and dried to form a coating layer. The coating amount per one time was 20 ml / m 2 .
  • a iridium metal film having a thickness of 0.1 ⁇ m was obtained.
  • heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 800 to 850 ° C., and the treatment time was 20 minutes.
  • the coating liquid coating to thermal decomposition was repeated 10 times to form a coating layer made of iridium metal and having a thickness of 1.0 ⁇ m.
  • the surface of the coating layer was further heated in an air atmosphere using a flame of a gas burner to perform a stabilization treatment.
  • the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 850 to 900 ° C., and the treatment time was 40 minutes.
  • the resulting crucible had increased surface hardness and improved handling.
  • Example 4 In Example 1, iridium chloride and ruthenium chloride were blended in a molar ratio of 80:20, dissolved in butanol, and a solution having a total molar concentration of iridium and ruthenium of 0.5 mol-Ir + Ru / l was applied as a coating solution. Except that, the surface of the inner cylinder of the pressure vessel, which is a platinum molded product, was cured according to Example 1. The inner surface of the obtained inner cylinder was coated with an iridium-ruthenium alloy. The obtained inner cylinder has increased surface hardness and is easy to attach to the pressure vessel body.
  • the Vickers hardness was measured according to JIS Z 2244: 2009 in the same manner as in Example 2, and it was 380 to 400 Hv.
  • Example 5 In Example 2, after the stabilization treatment, the entire surface of the flange surface was nitrided by holding in pure nitrogen gas at 1100 ° C. for 3 hours. The thickness of the nitriding layer was about 5 ⁇ m. When the Vickers hardness of the surface of the nitrided layer was measured according to JIS Z 2244: 2009, it was 420 to 450 Hv, and it was confirmed that the surface hardness was improved as compared with the flange obtained in Example 2.
  • the surface hardening method for a platinum molded product according to the present invention can ensure physical strength even if the platinum molded product is thin, for example, 0.2 to 1.0 mm.
  • the inner surface of the platinum molded article an alloy containing at least one of iridium, ruthenium or iridium or ruthenium, platinum grain growth and intergranular corrosion can be prevented even in a reducing atmosphere such as a thermal synthesis method. It can be prevented and a chemically stable platinum molded article can be obtained.
  • the surface-curing method for a platinum molded product according to the present invention is suitable for curing the inner surface, outer surface, or inner / outer surface of an inner cylinder, a flange, and a crucible of a pressure vessel, for example.
  • the surface hardening method of the platinum molded product according to the present invention is suitable for curing the surface of a platinum molded product such as platinum tongs and evaporating dishes.

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Abstract

Provided is a platinum molded article having a hardened surface, which has excellent self-weight deformation resistance even if the platinum molded article is thin, hardly deforms and is easy handle, has corrosion resistance and durability under high temperatures and pressure, and can prevent platinum particle growth and particle boundary corrosion in a reducing atmosphere, and also provided is a method for hardening the surface of a platinum molded article. The method for hardening the surface of a platinum molded article comprises: an application step for forming an application layer by applying an application solution containing an iridium salt and/or ruthenium salt to the surface of a platinum molded article (20); and a pyrolysis step for pyrolysis of the application layer in a nitrogen gas atmosphere or in a flame in order to convert the application layer to a coating layer (30) comprising iridium, ruthenium, or an alloy containing iridium and/or ruthenium.

Description

白金成形物の表面硬化方法及び表面が硬化された白金成形物Method for curing surface of platinum molded article and platinum molded article with surface cured

 本発明は、白金成形物の表面を硬化する方法及び表面が硬化された白金成形物に関する。 The present invention relates to a method for curing the surface of a platinum molded article and a platinum molded article having a cured surface.

 近年、合成、分解、結晶育成などの化学反応において、反応効率、反応性などを向上させることを目的として、超臨界状態の溶媒を用いた処理が行なわれている。使用する溶媒の種類によって、例えば、溶媒として水を用いる水熱合成法(hydrothermal synthesis method)、溶媒としてアンモニアを用いる安熱合成法(ammonothermal synthesis method)が挙げられる。このような処理は、オートクレーブと呼ばれる圧力容器内において高温高圧条件下で実施することができる。その処理条件は、例えば、800℃及び4000気圧の超高温超高圧状態で実施されることもある。圧力容器を用いて合成される単結晶は、水熱合成法では、例えば、人工水晶、酸化亜鉛であり、安熱合成法では、例えば、窒化ガリウムである。これらの単結晶は、各種光学、電子素子などの用途に利用され、高い純度が要求される。したがって、圧力容器の内表面は、超高温超高圧状態で不純物が溶出しないことが求められ、一般に、耐食性及び耐久性に優れる白金又は白金の合金で形成される。 In recent years, in chemical reactions such as synthesis, decomposition, and crystal growth, processing using a solvent in a supercritical state is performed for the purpose of improving reaction efficiency, reactivity, and the like. Depending on the type of solvent to be used, for example, a hydrothermal synthesis method using water as a solvent, and an athermal synthesis method using ammonia as a solvent can be given. Such treatment can be carried out under high temperature and high pressure conditions in a pressure vessel called an autoclave. The processing conditions may be implemented, for example, in an ultrahigh temperature and ultrahigh pressure state of 800 ° C. and 4000 atmospheres. The single crystal synthesized using the pressure vessel is, for example, artificial quartz or zinc oxide in the hydrothermal synthesis method, and is, for example, gallium nitride in the low temperature synthesis method. These single crystals are used for various applications such as optics and electronic elements, and high purity is required. Therefore, the inner surface of the pressure vessel is required not to elute impurities in an ultra-high temperature and ultra-high pressure state, and is generally formed of platinum or a platinum alloy having excellent corrosion resistance and durability.

 ところで、白金は、耐熱性を有し、化学的に安定であり、更に柔らかく加工しやすいため、その成形物は、高温状態での理化学実験、鉱工業など多岐にわたって利用されている。しかし、白金は、その柔らかさゆえ、変形しやすい。また、比重が大きいため、成形物の厚さが薄いと、自重で変形することがある。したがって、強度を保持するためには、成形物の厚さを厚くする必要があるが、白金の使用量が増えると、当然に素材価格が上がり、成形物が非常に高価になるという問題があった。 By the way, since platinum has heat resistance, is chemically stable, and is soft and easy to process, the molded product is used in a wide variety of fields such as physics and chemistry experiments at high temperature conditions and mining industry. However, platinum is easily deformed due to its softness. Moreover, since the specific gravity is large, if the thickness of the molded product is thin, it may be deformed by its own weight. Therefore, in order to maintain strength, it is necessary to increase the thickness of the molded product. However, as the amount of platinum used increases, there is a problem that the material price naturally increases and the molded product becomes very expensive. It was.

 そこで、通常、圧力容器は、物理強度をニッケル基合金からなる外筒で保持し、その内部に耐食性を目的として白金で形成された薄肉の成形物を内筒容器として用いた2重構造としている(例えば、特許文献1を参照。)。しかし、この内筒容器は、非常に薄肉であるため、自重による変形が生じ(自重による変形の耐性を、以降、「耐自重変形性」という。)、圧力容器本体への取り付け作業などの取り扱いが困難になるという問題があった。 Therefore, the pressure vessel usually has a double structure in which the physical strength is held by an outer cylinder made of a nickel-base alloy, and a thin molded product formed of platinum for the purpose of corrosion resistance is used as the inner cylinder container. (For example, see Patent Document 1). However, since this inner cylinder container is very thin, deformation occurs due to its own weight (resistance to deformation due to its own weight, hereinafter referred to as “self-weight deformation resistance”), and handling such as attachment work to the pressure container body. There was a problem that became difficult.

 白金を合金化することで、強度が高まり、成形物の取り扱いが容易になり、更には化学的安定性が向上することが知られている(例えば、特許文献2の段落0033を参照。)。また、用途は異なるが、電解用電極構造体として、金属表面に皮膜を形成することによって、化学的安定性及び物理的強度を向上させる技術が提案されている(例えば、特許文献3を参照。)。 It is known that alloying platinum increases strength, facilitates handling of a molded product, and further improves chemical stability (see, for example, paragraph 0033 of Patent Document 2). Moreover, although the use is different, a technique for improving chemical stability and physical strength by forming a film on a metal surface as an electrode structure for electrolysis has been proposed (see, for example, Patent Document 3). ).

特開2002-102671号公報JP 2002-102671 A 特開2010-53017号公報JP 2010-53017 A 特開2006-130486号公報JP 2006-130486 A

 白金は、耐熱性を有し、化学的に安定であるという性質を有する反面、高温の還元雰囲気中では、粒成長及び粒界腐食を起こしやすいという性質がある。そのため、安熱合成法などの高温の還元雰囲気中にさらされる圧力容器の内筒として使用する場合には、白金の消耗が早く、内筒の寿命が短くなるという問題がある。他方、イリジウム及びルテニウムは、高温の還元雰囲気に対して安定であることが知られている。 Platinum has the property of being heat resistant and chemically stable, but has the property of easily causing grain growth and intergranular corrosion in a high temperature reducing atmosphere. Therefore, when used as an inner cylinder of a pressure vessel that is exposed to a high-temperature reducing atmosphere such as a low temperature synthesis method, there is a problem that platinum is consumed quickly and the life of the inner cylinder is shortened. On the other hand, iridium and ruthenium are known to be stable against a high-temperature reducing atmosphere.

 白金の合金は、白金と比較して物理的強度及び化学的安定性に優れることが知られているが、白金を合金にすると、加工性が極端に劣るという問題を抱えており、現実に白金の合金を圧力容器の内筒として使用しているケースはほとんどない。また、特許文献2の段落0034及び段落0035に示されるように、圧力容器には、内筒容器が内部圧力と外部圧力との差によって変形又は破損することを防止するために、容易に変形して圧力差を解消するためのベローズ構造などの圧力緩衝機構を設置することが好ましいが、白金の合金は、その加工性の悪さからベローズには、使用できない。したがって、内筒容器に白金の合金を用いたとしても、ベローズに、白金を用いることとなり、構造が複雑になるという問題を抱えている。 Platinum alloys are known to have better physical strength and chemical stability than platinum. However, when platinum is used as an alloy, there is a problem that workability is extremely inferior. There are almost no cases where these alloys are used as the inner cylinder of a pressure vessel. Further, as shown in paragraphs 0034 and 0035 of Patent Document 2, the pressure vessel is easily deformed in order to prevent the inner tube vessel from being deformed or damaged due to the difference between the internal pressure and the external pressure. However, it is preferable to install a pressure buffering mechanism such as a bellows structure for eliminating the pressure difference, but platinum alloys cannot be used for bellows because of their poor workability. Therefore, even if an alloy of platinum is used for the inner cylinder container, platinum is used for the bellows, which has a problem that the structure becomes complicated.

 前記のとおり、白金成形物の強度を向上させて取り扱いを容易にし、かつ、安熱合成法などの高温の還元雰囲気中でも安定して使用できる程度に耐食性を向上させた白金成形物は無いのが現状である。特許文献3には、チタン基材の表面に貴金属コーティングを行なうことで、化学的及び物理的な安定化を図る技術が提案されているが、この技術は、あくまでも、チタン基材の表面に窒化チタン層を形成し、その表面に貴金属を含む電極物質のコーティングを行なう技術であり、白金成形物の強度を向上させ、かつ、白金が還元雰囲気中で粒成長及び粒界腐食を起こすことを防止するというものではない。 As described above, there is no platinum molded article that improves the strength of the platinum molded article so that it can be easily handled, and has improved corrosion resistance to such an extent that it can be stably used even in a high-temperature reducing atmosphere such as a low temperature synthesis method. Currently. Patent Document 3 proposes a technique for chemically and physically stabilizing the surface of a titanium base material by applying a precious metal coating to the surface of the titanium base material. This is a technology that forms a titanium layer and coats the electrode material containing noble metal on its surface, improving the strength of the platinum molded product, and preventing platinum from causing grain growth and intergranular corrosion in a reducing atmosphere. Not to do.

 本発明の目的は、薄肉であっても耐自重変形性に優れて、変形しにくく、取り扱いが容易であり、高温高圧状態での耐食性及び耐久性を有し、還元雰囲気中での白金の粒成長及び粒界腐食を防止できる表面が硬化された白金成形物及びその表面硬化方法を提供することである。 It is an object of the present invention to be excellent in its own weight deformation resistance even if it is thin, difficult to deform, easy to handle, has corrosion resistance and durability in a high temperature and high pressure state, and is a platinum particle in a reducing atmosphere. The object is to provide a platinum molded article having a cured surface and a surface hardening method thereof, which can prevent growth and intergranular corrosion.

 本発明に係る白金成形物の表面硬化方法は、白金成形物の表面に、イリジウム塩若しくはルテニウム塩のいずれか一方又は両方を含有する塗布液を塗布して塗布層を形成する塗布工程と、該塗布層を窒素ガス雰囲気中又は火炎中で熱分解して前記塗布層をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層とする熱分解工程と、を有することを特徴とする。 The platinum molding surface hardening method according to the present invention includes a coating step of coating a coating liquid containing either or both of an iridium salt and a ruthenium salt on the surface of the platinum molding, And pyrolyzing the coating layer in a nitrogen gas atmosphere or in a flame to form the coating layer as a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. .

 本発明に係る白金成形物の表面硬化方法は、前記白金成形物の厚さが、0.2~1.0mm(0.2mm以上1.0mm以下)である形態により適している。白金成形物が、薄肉であっても強度を保持できる。 The surface-curing method for a platinum molded product according to the present invention is more suitable for a form in which the thickness of the platinum molded product is 0.2 to 1.0 mm (0.2 mm to 1.0 mm). Even if the platinum molded product is thin, the strength can be maintained.

 本発明に係る白金成形物の表面硬化方法では、さらに、前記被覆層の表面の一部の領域又は全部の領域を窒化処理する工程を有することが好ましい。白金成形物の表面をより硬くすることができる。また、酸化物の形成を防止でき、安熱合成法において、より純度の高い生成物を得ることができる。 In the method for surface hardening a platinum molded product according to the present invention, it is preferable that the method further includes a step of nitriding a partial region or the entire region of the surface of the coating layer. The surface of the platinum molded product can be made harder. In addition, oxide formation can be prevented, and a product with higher purity can be obtained in the low-temperature synthesis method.

 本発明に係る白金成形物の表面硬化方法では、前記塗布液は、更に白金化合物を含有することが好ましい。被覆層をイリジウム若しくはルテニウムのいずれか一方又は両方と白金との合金とすることができ、被覆層と白金成形物との密着をより高めることができる。 In the method for curing a surface of a platinum molded product according to the present invention, the coating solution preferably further contains a platinum compound. The coating layer can be an alloy of either iridium or ruthenium or both and platinum, and the adhesion between the coating layer and the platinum molded product can be further enhanced.

 本発明に係る白金成形物の表面硬化方法では、前記塗布液は、更にアルコールを含有することが好ましい。熱分解が還元雰囲気となり、酸素を除去することができるため、酸化物の生成を防止できる。また、耐食性の高いイリジウム、ルテニウム又はイリジウムもしくはルテニウムの少なくとも一種を含む合金をより安定的に析出することができるため、高温の還元雰囲気中での使用において、腐食を最小とすることができる。 In the method for hardening a surface of a platinum molded article according to the present invention, it is preferable that the coating liquid further contains an alcohol. Since thermal decomposition becomes a reducing atmosphere and oxygen can be removed, generation of oxides can be prevented. Further, since iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium having high corrosion resistance can be precipitated more stably, corrosion can be minimized when used in a high-temperature reducing atmosphere.

 本発明に係る白金成形物の表面硬化方法では、前記白金成形物が、圧力容器の内筒であり、前記塗布工程は、前記内筒の内表面若しくは外表面のいずれか一方又は両方に前記塗布液を塗布して前記塗布層を形成する形態を含む。耐自重変形性が得られるので内筒単体での取り扱い性が向上し、圧力容器本体へ内筒の取り付けが容易になる。また、安熱合成法において、白金の粒成長及び粒界腐食を防止できる。 In the method for hardening a surface of a platinum molded product according to the present invention, the platinum molded product is an inner cylinder of a pressure vessel, and the application step is performed by applying the application to one or both of the inner surface and the outer surface of the inner cylinder. A mode in which a liquid is applied to form the coating layer is included. Since the self-weight deformation resistance is obtained, the handleability of the inner cylinder alone is improved, and the inner cylinder can be easily attached to the pressure vessel body. In addition, in the low temperature synthesis method, platinum grain growth and intergranular corrosion can be prevented.

 本発明に係る白金成形物の表面硬化方法では、前記白金成形物が、圧力容器の内筒であり、更に、該内筒を前記圧力容器の本体に設置する設置工程を有し、該設置工程の後に、前記塗布工程と前記熱分解工程とを有し、前記塗布工程は、前記内筒の内表面に前記塗布液を塗布して前記塗布層を形成し、前記熱分解工程は、該塗布層をガスバーナーの火炎中で熱分解して前記被覆層を形成する形態を含む。圧力容器の本体に設置したままで、大型加熱炉などの特別な設備がなくても内筒の内表面の硬化処理を行なうことができる。 In the method for surface hardening a platinum molded product according to the present invention, the platinum molded product is an inner cylinder of a pressure vessel, and further includes an installation process of installing the inner cylinder in the main body of the pressure vessel, the installation process The coating step and the thermal decomposition step are included, and the coating step applies the coating liquid to the inner surface of the inner cylinder to form the coating layer, and the thermal decomposition step includes the coating step. Including a form in which the layer is pyrolyzed in a flame of a gas burner to form the covering layer. The inner surface of the inner cylinder can be hardened without special equipment such as a large heating furnace while being installed in the main body of the pressure vessel.

 本発明に係る白金成形物の表面硬化方法では、前記白金成形物が、圧力容器の本体に収容される種結晶取り付け用の棚であり、前記塗布工程は、前記棚の全表面に前記塗布液を塗布して前記塗布層を形成する形態を含む。安熱合成法による単結晶の育成において、不純物を少なくすることができる。 In the method for hardening a surface of a platinum molded product according to the present invention, the platinum molded product is a shelf for attaching a seed crystal housed in a main body of a pressure vessel, and the coating step is performed on the entire surface of the shelf. The form which forms the said application layer by apply | coating is included. Impurities can be reduced in the growth of single crystals by the low-temperature synthesis method.

 本発明に係る白金成形物の表面硬化方法では、前記白金成形物が、圧力容器の開口部に設けられたフランジであり、前記塗布工程は、前記フランジの少なくともシール箇所となる部分の表面に前記塗布液を塗布して前記塗布層を形成する形態を含む。フランジの表面硬度を高めることができる。また、圧力容器の本体に設置したままで、大型加熱炉などの特別な設備がなくてもフランジの表面の硬化処理を行なうことができる。 In the surface hardening method for a platinum molded product according to the present invention, the platinum molded product is a flange provided at an opening of a pressure vessel, and the coating step is performed on the surface of at least a portion to be a seal portion of the flange. The form which apply | coats a coating liquid and forms the said coating layer is included. The surface hardness of the flange can be increased. Further, the surface of the flange can be hardened without special equipment such as a large heating furnace while being installed in the main body of the pressure vessel.

 本発明に係る白金成形物の表面硬化方法では、前記白金成形物が、るつぼであり、前記塗布工程は、前記るつぼの内表面若しくは外表面のいずれか一方又は両方に前記塗布液を塗布して前記塗布層を形成する形態を含む。るつぼが薄肉であっても、取り扱い性を良好とすることができる。また、還元雰囲気中での耐久性が向上する。 In the surface hardening method for a platinum molded product according to the present invention, the platinum molded product is a crucible, and the coating step is performed by applying the coating liquid to either or both of the inner surface and the outer surface of the crucible. The form which forms the said application layer is included. Even if the crucible is thin, the handleability can be improved. Further, durability in a reducing atmosphere is improved.

 本発明に係る表面が硬化された白金成形物は、白金成形物の表面にイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層を設けたことを特徴とする。 The platinum molded product having a cured surface according to the present invention is characterized in that a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium is provided on the surface of the platinum molded product.

 本発明に係る表面が硬化された白金成形物では、前記白金成形物の表面は、圧力容器の内筒の内表面若しくは外表面のいずれか一方又は両方、圧力容器の本体に収容される種結晶取り付け用の棚の全表面、圧力容器の開口部に設けられたフランジの少なくともシール箇所となる部分の表面又はるつぼの内表面若しくは外表面のいずれか一方又は両方である形態を含む。 In the platinum molded product having a cured surface according to the present invention, the surface of the platinum molded product is either the inner surface or the outer surface of the inner tube of the pressure vessel, or both, or a seed crystal accommodated in the main body of the pressure vessel. It includes a form that is the entire surface of the mounting shelf, the surface of at least the portion of the flange provided at the opening of the pressure vessel, or the inner surface or the outer surface of the crucible, or both.

 本発明に係る表面が硬化された白金成形物では、前記白金成形物の厚さが、0.2~1.0mmである形態を含む。成形物が薄肉であっても強度を保持でき、耐自重変形性を有する。 The platinum molded product having a cured surface according to the present invention includes a form in which the thickness of the platinum molded product is 0.2 to 1.0 mm. Even if the molded product is thin, it can maintain strength and has resistance to self-weight deformation.

 本発明に係る表面が硬化された白金成形物では、前記被覆層の厚さが、1~30μmであることが好ましい。白金成形物の表面を被覆して、化学的安定性及び物理的強度を向上させることができる。 In the platinum molded product having a cured surface according to the present invention, the coating layer preferably has a thickness of 1 to 30 μm. The surface of the platinum molding can be coated to improve chemical stability and physical strength.

 本発明に係る表面が硬化された白金成形物では、前記白金成形物の白金元素と前記被覆層に含まれる金属元素とが拡散していることが好ましい。白金成形物と被覆層との密着性が向上し、より化学的安定性及び物理的強度を向上させることができる。 In the platinum molded product whose surface is cured according to the present invention, it is preferable that the platinum element of the platinum molded product and the metal element contained in the coating layer are diffused. Adhesion between the platinum molded product and the coating layer is improved, and chemical stability and physical strength can be further improved.

 本発明に係る表面が硬化された白金成形物では、前記被覆層の一部の領域又は全部の領域において前記被覆層の少なくとも表面側がイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金の窒化処理層であることが好ましい。白金成形物の表面をより硬くすることができる。また、酸化物の形成を防止でき、安熱合成法において、より純度の高い生成物を得ることができる。 In the platinum molded product having a cured surface according to the present invention, nitriding treatment of an alloy containing at least one kind of iridium, ruthenium, iridium or ruthenium on at least the surface side of the coating layer in a partial region or the entire region of the coating layer. A layer is preferred. The surface of the platinum molded product can be made harder. In addition, oxide formation can be prevented, and a product with higher purity can be obtained in the low-temperature synthesis method.

 本発明に係る表面が硬化された白金成形物では、前記窒化処理層の厚さが、1~30μmであることが好ましい。白金成形物の表面をより硬くすることができる。 In the platinum molded product having a cured surface according to the present invention, the thickness of the nitriding layer is preferably 1 to 30 μm. The surface of the platinum molded product can be made harder.

 本発明は、薄肉であっても耐自重変形性に優れて、変形しにくく、取り扱いが容易であり、高温高圧状態での耐食性及び耐久性を有し、還元雰囲気中での白金の粒成長及び粒界腐食を防止できる表面が硬化された白金成形物及びその表面硬化方法を提供することができる。 The present invention is excellent in its own weight deformation resistance even if it is thin, is not easily deformed, is easy to handle, has corrosion resistance and durability in a high temperature and high pressure state, and grows platinum particles in a reducing atmosphere. It is possible to provide a platinum molded article having a cured surface capable of preventing intergranular corrosion and a method for curing the surface.

本実施形態に係る白金成形物の断面構造の一形態を示す模式図である。It is a schematic diagram which shows one form of the cross-sectional structure of the platinum molded product which concerns on this embodiment. 棚を有する圧力容器の一例を示す断面図である。It is sectional drawing which shows an example of the pressure vessel which has a shelf. 内筒容器を有する圧力容器の一例を示す断面図である。It is sectional drawing which shows an example of the pressure vessel which has an inner cylinder container. 大型の圧力容器の一例を示す断面図である。It is sectional drawing which shows an example of a large sized pressure vessel. 図4に示す圧力容器のシール部を示す部分拡大断面図であり、(a)はフランジ及びガスケットの一形態を示す断面部分拡大図であり、(b)はガスケットの一形態を示す平面図である。It is the elements on larger scale which show the seal part of the pressure vessel shown in FIG. 4, (a) is a section fragmentary enlarged view which shows one form of a flange and a gasket, (b) is a top view which shows one form of a gasket. is there.

 以下、本発明について実施形態を示して詳細に説明するが本発明はこれらの記載に限定して解釈されない。本発明の効果を奏する限り、実施形態は種々の変形をしてもよい。 Hereinafter, the present invention will be described in detail with reference to embodiments, but the present invention is not construed as being limited to these descriptions. As long as the effect of the present invention is exhibited, the embodiment may be variously modified.

 図1は、本実施形態に係る白金成形物の断面構造の一形態を示す模式図である。本実施形態に係る表面が硬化された白金成形物100は、白金成形物20の表面にイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層30を設けている。 FIG. 1 is a schematic diagram showing an embodiment of a cross-sectional structure of a platinum molded product according to this embodiment. The platinum molded product 100 having a hardened surface according to this embodiment is provided with a coating layer 30 made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium on the surface of the platinum molded product 20.

 白金成形物20の種類は、特に限定されないが、例えば、圧力容器の内筒、圧力容器の本体に収容される種結晶取り付け用の棚(バッフル・籠・結晶取りつけ)(以降、棚という。)、圧力容器の開口部に設けられたフランジ、るつぼである。ここで、圧力容器の内筒は、単独で密閉空間を形成し、圧力容器本体に収容して圧力容器に接合せずに使用するカプセルタイプの内筒(以降、内筒容器という。)及び圧力容器本体に収容し、圧力容器本体の内表面に密着又は接着させて使用するライニングタイプの内筒(以降、内筒という。)を包含する。 The type of the platinum molded product 20 is not particularly limited. For example, a seed crystal mounting shelf (baffle / saddle / crystal mounting) housed in the inner body of the pressure vessel or the main body of the pressure vessel (hereinafter referred to as a shelf). And a flange and a crucible provided at the opening of the pressure vessel. Here, the inner cylinder of the pressure vessel forms a sealed space by itself, is accommodated in the main body of the pressure vessel and is used without being joined to the pressure vessel (hereinafter referred to as an inner cylinder container) and pressure. It includes a lining-type inner cylinder (hereinafter referred to as an inner cylinder) that is housed in a container body and used in close contact with or adhered to the inner surface of the pressure vessel body.

 白金成形物20の厚さは、0.2~1.0mmであることが好ましい。より好ましくは、0.3~0.7mmである。0.2mm未満では、物理的強度及び耐自重変形性に劣る場合がある。1.0mmを超えると、白金成形物を薄肉とし、白金の使用量を減らして成形物の価格を抑えることが困難となる。なお、白金成形物20の厚さは、全体が均一であってもよいし、部分的に厚さを変えてもよい。部分的に厚さを変える形態は、例えば、前記内筒において、フランジの厚さ並びに底部の厚さを筒部の厚さよりも厚くして補強する形態である。このとき、最も薄い部分の厚さ(例えば、円筒の側壁部分又は底部の厚さ)が、0.2~1.0mmであることが好ましい。 The thickness of the platinum molded product 20 is preferably 0.2 to 1.0 mm. More preferably, it is 0.3 to 0.7 mm. If it is less than 0.2 mm, it may be inferior to physical strength and resistance to self-deformation. If the thickness exceeds 1.0 mm, it is difficult to reduce the price of the molded product by making the platinum molded product thinner and reducing the amount of platinum used. In addition, the thickness of the platinum molded product 20 may be uniform as a whole, or the thickness may be partially changed. The form in which the thickness is partially changed is, for example, a form in which the inner cylinder is reinforced by making the thickness of the flange and the thickness of the bottom thicker than the thickness of the cylinder. At this time, it is preferable that the thickness of the thinnest part (for example, the thickness of the side wall part or the bottom part of the cylinder) is 0.2 to 1.0 mm.

 被覆層30は、イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる。イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金は、還元雰囲気において粒成長を起こしにくい性質を有する。また、それらの融点は、2000℃以上であることから、1000℃程度の使用条件では化学的及び物理的に安定である。このように、本実施形態に係る表面が硬化された白金成形物100は、表面にイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金が露出しているため、還元雰囲気中での化学的安定性を向上することができる。イリジウムを含む合金(以降、イリジウム合金という。)としては、例えば、イリジウム-ルテニウム合金、イリジウム-白金合金、イリジウム-ロジウム合金、イリジウム-金合金、イリジウム-レニウム合金である。ルテニウムを含む合金(以降、ルテニウム合金という。)としては、例えば、ルテニウム-イリジウム合金、ルテニウム-白金合金、ルテニウム-ロジウム合金、ルテニウム-金合金、ルテニウム-レニウム合金である。この中で、白金との合金である、イリジウム-白金合金又はルテニウム-白金合金が、白金成形物20との密着性がより高まり、物理的強度及び化学的安定性がより向上する点で好ましい。なお、イリジウム又はルテニウムと白金との合金のうち、白金の含有量は、10~70質量%であることが好ましく、より好ましくは15~60質量%である。合金中の白金の含有量が、10質量%未満では、所望の効果が得られない場合がある。70質量%を超えると、物理的強度及び還元雰囲気中での耐食性が不足する場合がある。特に、十分な硬さが得られず、所期の目的が達成出来ない可能性がある。また、安熱合成法で使用する場合には、被覆層30は、イリジウム又はルテニウムの酸化物を含まないことが好ましい。より純度の高い反応生成物を得ることができる。 The covering layer 30 is made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. An alloy containing iridium, ruthenium, or at least one of iridium or ruthenium has a property of hardly causing grain growth in a reducing atmosphere. Moreover, since those melting | fusing point is 2000 degreeC or more, it is chemically and physically stable on about 1000 degreeC use conditions. As described above, the platinum molded product 100 with the surface cured according to the present embodiment is exposed to iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium on the surface, so that chemical stability in a reducing atmosphere is achieved. Can be improved. Examples of alloys containing iridium (hereinafter referred to as iridium alloys) include iridium-ruthenium alloys, iridium-platinum alloys, iridium-rhodium alloys, iridium-gold alloys, and iridium-rhenium alloys. Examples of the alloy containing ruthenium (hereinafter referred to as a ruthenium alloy) include a ruthenium-iridium alloy, a ruthenium-platinum alloy, a ruthenium-rhodium alloy, a ruthenium-gold alloy, and a ruthenium-rhenium alloy. Among these, an iridium-platinum alloy or ruthenium-platinum alloy, which is an alloy with platinum, is preferable in that the adhesion to the platinum molded product 20 is further improved and the physical strength and the chemical stability are further improved. In the alloy of iridium or ruthenium and platinum, the platinum content is preferably 10 to 70% by mass, more preferably 15 to 60% by mass. If the platinum content in the alloy is less than 10% by mass, the desired effect may not be obtained. When it exceeds 70 mass%, physical strength and corrosion resistance in a reducing atmosphere may be insufficient. In particular, sufficient hardness may not be obtained and the intended purpose may not be achieved. Moreover, when using by a low-temperature synthesis method, it is preferable that the coating layer 30 does not contain the oxide of iridium or ruthenium. A reaction product with higher purity can be obtained.

 被覆層30に含有させる金属をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金のいずれとするかは、使用する条件及び目的に応じて適宜選択可能である。なお、合金は、例示した2種の金属からなる合金に限定されず、合金化する限りにおいて、3種以上の金属からなる合金とすることができる。3種以上の金属からなる合金は、例えば、ルテニウム-白金-ロジウム合金、イリジウム-白金-ロジウム合金、イリジウム-ルテニウム-ロジウム合金、イリジウム-白金-レニウム合金、ルテニウム-白金-レニウム合金、イリジウム-ルテニウム-レニウム合金、イリジウム-ルテニウム-ロジウム-白金である。 Whether the metal contained in the coating layer 30 is iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium can be appropriately selected according to the conditions and purpose of use. In addition, an alloy is not limited to the alloy which consists of 2 types of illustrated metals, As long as it alloyes, it can be set as the alloy which consists of 3 or more types of metals. The alloys composed of three or more metals include, for example, ruthenium-platinum-rhodium alloy, iridium-platinum-rhodium alloy, iridium-ruthenium-rhodium alloy, iridium-platinum-rhenium alloy, ruthenium-platinum-rhenium alloy, iridium-ruthenium. A rhenium alloy, iridium-ruthenium-rhodium-platinum.

 本実施形態に係る表面が硬化された白金成形物100では、白金成形物20の白金元素と被覆層30に含まれるイリジウム、ルテニウムなどの金属元素とが拡散していることが好ましい。白金成形物20の白金と被覆層30のイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金とが、拡散することで、白金成形物20と被覆層30とが一体となり、密着性が向上し、物理的強度及び化学的安定性をより向上させることができる。拡散状態は、例えば、白金成形物20から白金元素が被覆層30に拡散する状態、被覆層30から金属元素が白金成形物20に拡散する状態、白金成形物20から白金元素が被覆層30に拡散し、かつ、被覆層30から金属元素が白金成形物20に拡散する相互拡散状態である。このように、本実施形態に係る表面が硬化された白金成形物100は、加工性の良好な白金を成形した後、イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層を形成し、白金成形物20の白金元素と被覆層30の金属元素とを拡散させることによって、白金成形物20と被覆層30との界面を合金化しているため、白金の優れた加工適性を活かし、かつ、物理的強度及び化学的安定性を高めることができる。よって、様々な形状の白金成形物20に対応可能である。 In the platinum molded product 100 having a cured surface according to the present embodiment, it is preferable that the platinum element of the platinum molded product 20 and the metal elements such as iridium and ruthenium contained in the coating layer 30 are diffused. The platinum of the platinum molded product 20 and the coating layer 30 of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium are diffused so that the platinum molded product 20 and the coating layer 30 are integrated to improve adhesion. , Physical strength and chemical stability can be further improved. The diffusion state includes, for example, a state in which platinum element diffuses from the platinum molded product 20 into the coating layer 30, a state in which a metal element diffuses from the coating layer 30 into the platinum molded product 20, and a platinum element from the platinum molded product 20 into the coating layer 30. It is an interdiffusion state in which the metal element diffuses and the metal element diffuses from the coating layer 30 into the platinum molded product 20. As described above, the platinum molded article 100 having a hardened surface according to the present embodiment forms a coating layer made of iridium, ruthenium, or an alloy containing at least one kind of iridium or ruthenium after molding platinum having good workability. Then, by diffusing the platinum element of the platinum molded product 20 and the metal element of the coating layer 30, the interface between the platinum molded product 20 and the coating layer 30 is alloyed. In addition, physical strength and chemical stability can be increased. Therefore, it can respond to the platinum molded product 20 of various shapes.

 被覆層30は、1層だけで形成してもよいし、2層以上で形成してもよい。2層以上で形成する場合には、各層の構成を変えることができる。被覆層30を2層以上で形成する場合には、白金成形物20と隣接する第一被覆層は、イリジウム若しくはルテニウムの少なくとも一種と白金との合金からなる層とすることが好ましい。白金成形物20の表面上に第一被覆層と第二被覆層とを順に設ける場合には、例えば、第一被覆層をイリジウム又はルテニウムと白金との合金とし、第二被覆層をイリジウム又はルテニウムとロジウムとの合金とする。また、この第二の被覆層が、上記、イリジウム、ルテニウム、又はイリジウム、ルテニウムに更に第三の金属を含むことが出来ることも当然である。なお、各層の構成をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金のいずれとするかは、使用条件及び目的に応じて、適宜選択可能であり、本実施形態はこれに制限されない。2層以上で形成した各被覆層に含まれる金属元素同士の間においても、白金成形物20の白金元素及び被覆層30に含まれる金属と同様に拡散していることが好ましい。拡散によって各層間が一体となり合金化するため、密着性が向上し、物理的強度及び化学的安定性を高めることができる。 The covering layer 30 may be formed of only one layer, or may be formed of two or more layers. In the case of forming with two or more layers, the configuration of each layer can be changed. When the coating layer 30 is formed of two or more layers, the first coating layer adjacent to the platinum molded product 20 is preferably a layer made of an alloy of platinum and at least one kind of iridium or ruthenium. When the first coating layer and the second coating layer are sequentially provided on the surface of the platinum molded product 20, for example, the first coating layer is made of iridium or an alloy of ruthenium and platinum, and the second coating layer is made of iridium or ruthenium. And rhodium alloy. Of course, the second coating layer may contain a third metal in addition to iridium and ruthenium, or iridium and ruthenium. Note that whether the structure of each layer is iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium can be selected as appropriate according to the use conditions and purpose, and the present embodiment is not limited to this. It is preferable that the metal elements contained in each coating layer formed of two or more layers are diffused in the same manner as the platinum element of the platinum molded product 20 and the metal contained in the coating layer 30. Since each layer is united and alloyed by diffusion, adhesion is improved, and physical strength and chemical stability can be enhanced.

 被覆層30の厚さは、1~30μmであることが好ましい。より好ましくは、3~10μmである。1μm未満では、物理的強度及び還元雰囲気中での耐食性が不十分である場合がある。また、時として白金成形物20の白金元素との拡散によって、被覆層30が埋没する可能性がある。30μmを超えると、白金成形物20の白金元素と被覆層30に含まれる金属との熱膨張係数の差異により、急熱急冷など取り扱い条件によっては、被覆層30が剥離しやすくなる。また、イリジウム、ルテニウムなどの金属の使用量が増え、経済的に好ましくない。被覆層30を2層以上で形成する場合には、全被覆層の合計の厚さを前記範囲とする。また、層毎に厚さを変えることができる。 The thickness of the coating layer 30 is preferably 1 to 30 μm. More preferably, it is 3 to 10 μm. If it is less than 1 μm, physical strength and corrosion resistance in a reducing atmosphere may be insufficient. In some cases, the coating layer 30 may be buried by diffusion of the platinum molded product 20 with the platinum element. If it exceeds 30 μm, the coating layer 30 is likely to peel off depending on handling conditions such as rapid heating and quenching due to the difference in thermal expansion coefficient between the platinum element of the platinum molded product 20 and the metal contained in the coating layer 30. In addition, the amount of metal used such as iridium and ruthenium increases, which is not economically preferable. When the covering layer 30 is formed of two or more layers, the total thickness of all the covering layers is within the above range. Moreover, thickness can be changed for every layer.

 イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金は、僅かではあるが、酸素を吸収する特性を有する。したがって、安熱合成法などの還元雰囲気中での反応に用いられる場合において、還元雰囲気を保持することができるという効果を奏する。 An alloy containing at least one kind of iridium, ruthenium, or iridium or ruthenium has a characteristic of absorbing oxygen, albeit slightly. Therefore, in the case of being used for a reaction in a reducing atmosphere such as a low-temperature synthesis method, there is an effect that the reducing atmosphere can be maintained.

 本実施形態に係る表面が硬化された白金成形物100では、被覆層30の一部の領域又は全部の領域において被覆層30の少なくとも表面側が、イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金の窒化処理層(不図示)であることが好ましい。白金成形物100の表面をより硬化することができる。また、被覆層30の表面を窒化処理層とすることによって、被覆層20の表面に酸化物が形成されることを防止することができるため、安熱合成法などの酸素が不純物となる反応に用いる場合に好適である。 In the platinum molded product 100 having a hardened surface according to the present embodiment, at least a surface side of the coating layer 30 in a part or all of the coating layer 30 includes iridium, ruthenium, or at least one kind of iridium or ruthenium. The nitriding layer (not shown) is preferable. The surface of the platinum molded product 100 can be further cured. In addition, by forming the surface of the coating layer 30 as a nitriding layer, it is possible to prevent oxides from being formed on the surface of the coating layer 20, so that a reaction such as a low-temperature synthesis method is used as a reaction in which oxygen becomes an impurity. It is suitable for use.

 白金成形物20が圧力容器の開口部に設けられたフランジである場合において、被覆層30の一部の領域を窒化処理層とするときは、例えば、特に物理的強度が必要なシール箇所となる部分だけを窒化処理層とする。白金成形物20がるつぼである場合において、被覆層30の一部の領域を窒化処理層とするときは、例えば、特に耐食性が必要な内表面のうち、反応に用いる薬品が接する部分及び接しうる部分だけを窒化処理層とする。 In the case where the platinum molded product 20 is a flange provided at the opening of the pressure vessel, when a partial region of the coating layer 30 is a nitriding layer, for example, it becomes a seal portion that requires particularly physical strength. Only the portion is a nitriding layer. In the case where the platinum molded product 20 is a crucible, when a partial region of the coating layer 30 is a nitriding layer, for example, a part of the inner surface that requires corrosion resistance, and a part in contact with a chemical used for the reaction can be in contact. Only the portion is a nitriding layer.

 窒化処理層は、被覆層30に含有されるイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金の窒化物を含有する。窒化処理層の窒化物の含有量は、表面が最も多く、基材の内部に向かうにつれて、次第に少なくなる分布となっている。窒化処理層の厚さは、1~30μmであることが好ましい。より好ましくは、1~10μmである。1μm未満では、表面を硬化する効果が不足する場合がある。30μmを超えると、窒化処理層の表面が脆くなり、窒化処理層内部で残留応力によるクラックの発生で表面が脆くなり、圧力を加えた場合に剥離が発生することがある。また、窒化処理にかかる時間が長くなるため、経済的に好ましくない。 The nitriding layer contains iridium, ruthenium, or an alloy nitride containing at least one of iridium or ruthenium contained in the coating layer 30. The nitride content of the nitriding layer has a distribution in which the surface is the largest and gradually decreases toward the inside of the substrate. The thickness of the nitriding layer is preferably 1 to 30 μm. More preferably, it is 1 to 10 μm. If it is less than 1 μm, the effect of curing the surface may be insufficient. If it exceeds 30 μm, the surface of the nitriding layer becomes brittle, the surface becomes brittle due to the occurrence of cracks due to residual stress inside the nitriding layer, and peeling may occur when pressure is applied. In addition, since the time required for the nitriding treatment becomes long, it is not economically preferable.

 本実施形態に係る白金成形物の表面硬化方法は、白金成形物20の表面に、イリジウム塩若しくはルテニウム塩のいずれか一方又は両方を含有する塗布液を塗布して塗布層を形成する塗布工程と、該塗布層を窒素ガス雰囲気中又は火炎中で熱分解して前記塗布層をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層30とする熱分解工程と、を有する。 The platinum molding surface hardening method according to the present embodiment includes a coating step in which a coating liquid containing one or both of an iridium salt and a ruthenium salt is applied to the surface of the platinum molding 20 to form a coating layer. And a thermal decomposition step of thermally decomposing the coating layer in a nitrogen gas atmosphere or flame to form the coating layer 30 made of iridium, ruthenium, or an alloy containing at least one kind of iridium or ruthenium.

 白金成形物20は、一般公知の方法、例えば、鋳造方法、鍛造方法、プレス成形、溶接などで作製する方法で得ることができる。したがって、白金成形物20を成形する方法は、本実施形態では特に限定されない。白金成形物20の厚さは、0.2~1.0mmであることが好ましい。 The platinum molded product 20 can be obtained by a generally known method such as a casting method, a forging method, press molding, welding, or the like. Therefore, the method for molding the platinum molded product 20 is not particularly limited in the present embodiment. The thickness of the platinum molded product 20 is preferably 0.2 to 1.0 mm.

 塗布工程は、白金成形物20の表面に、イリジウム塩若しくはルテニウム塩のいずれか一方又は両方を含有する塗布液を塗布し、乾燥させて塗布層を形成する。塗布液は、後に行なわれる熱分解によってイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金を析出させて被覆層30を形成できればよく、本実施形態では特に限定されない。塗布液は、例えば、イリジウム塩又はルテニウム塩と、溶媒としてアルコールと、を配合した溶液である。イリジウム塩は、例えば、塩化イリジウム、硝酸イリジウム、塩化イリジウム酸、イリジウムブトキシドである。ルテニウム塩は、例えば、塩化ルテニウム、硝酸ルテニウム、塩化ルテニウム酸、ルテニウムブトキシドである。この中で、イリジウム塩は、加熱分解によってイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金を効率的に析出できる点で、塩化イリジウムであることが好ましい。ルテニウム塩は、入手しやすく、かつ、比較的安価である点で、塩化ルテニウムであることが好ましい。 In the coating step, a coating solution containing either or both of an iridium salt and a ruthenium salt is coated on the surface of the platinum molded product 20 and dried to form a coating layer. The coating solution is not particularly limited in the present embodiment as long as it can form the coating layer 30 by depositing iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium by thermal decomposition performed later. The coating solution is, for example, a solution in which an iridium salt or a ruthenium salt is mixed with alcohol as a solvent. Examples of the iridium salt include iridium chloride, iridium nitrate, chloroiridic acid, and iridium butoxide. Examples of the ruthenium salt include ruthenium chloride, ruthenium nitrate, ruthenium chloride, and ruthenium butoxide. Among these, the iridium salt is preferably iridium chloride in that it can efficiently precipitate iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium by thermal decomposition. The ruthenium salt is preferably ruthenium chloride because it is easily available and relatively inexpensive.

 塗布液には、更にイリジウム又はルテニウムと合金を形成する金属の化合物を配合することができる。イリジウム又はルテニウムと合金を形成する金属の化合物は、例えば、塩化白金酸、ジニトロジアンミン白金などの白金化合物、塩化ロジウム、硝酸ロジウムなどのロジウム化合物、塩化金酸、塩化金、シアン化金などの金化合物、塩化レニウム、硝酸レニウムなどのレニウム化合物である。この中で、白金化合物としては、塩化白金酸、ジニトロジアンミン白金などを使用することが好ましく、イリジウム塩やルテニウム塩と組み合わせるには、塩化白金酸を選定することが特に好ましい。イリジウム又はルテニウムと白金との合金が形成され、白金成形物との密着性が高まるため、物理的強度及び還元雰囲気中での耐食性がより向上する。 The coating liquid may further contain a metal compound that forms an alloy with iridium or ruthenium. Examples of metal compounds forming alloys with iridium or ruthenium include platinum compounds such as chloroplatinic acid and dinitrodiammine platinum, rhodium compounds such as rhodium chloride and rhodium nitrate, gold compounds such as chloroauric acid, gold chloride and gold cyanide. Compounds, rhenium compounds such as rhenium chloride and rhenium nitrate. Of these, chloroplatinic acid, dinitrodiammine platinum and the like are preferably used as the platinum compound, and chloroplatinic acid is particularly preferred for combination with iridium salts and ruthenium salts. Since an alloy of iridium or ruthenium and platinum is formed and adhesion to the platinum molded article is increased, physical strength and corrosion resistance in a reducing atmosphere are further improved.

 塗布液は、溶媒としてアルコールを含有することが好ましい。ここで、アルコールは、溶媒であり、かつ、有機還元剤となる。アルコールは、例えば、メタノール、エタノール、1-プロパノール、2-プロパノール、1-ブタノール、イソブタノール、tert-ブタノール、1-ペンタノールが挙げられる。塗布液には、更に、テレビン油などのアルコール以外の有機還元剤を配合してもよい。本実施形態は、塗布液を塗布する方式及び乾燥する方式に制限されない。 The coating solution preferably contains alcohol as a solvent. Here, alcohol is a solvent and an organic reducing agent. Examples of the alcohol include methanol, ethanol, 1-propanol, 2-propanol, 1-butanol, isobutanol, tert-butanol, and 1-pentanol. The coating solution may further contain an organic reducing agent other than alcohol such as turpentine oil. The present embodiment is not limited to the method of applying the coating liquid and the method of drying.

 熱分解工程では、塗布層を窒素ガス雰囲気中又は火炎中で熱分解することによって、塗布工程で得られた塗布層に含まれるイリジウム塩若しくはルテニウム塩のいずれか一方又は両方及びイリジウム又はルテニウムと合金を形成する金属の化合物を、イリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金として析出させて被覆層30を形成する。イリジウム及びルテニウムは、酸素を含む雰囲気中で熱分解すると、酸化物を形成するため、窒素ガス雰囲気中又は火炎中で塗布層を熱分解することで、金属を析出させることができる。熱分解は、窒素ガスが供給可能な加熱炉を用いて、窒素雰囲気中で行なうことが好ましい。しかし、作業現場においては、例えば、白金成形物が加熱炉に入らないような大型である場合、白金成形物が着脱困難な状態で別部品に取りつけられていて全体を加熱することができない場合、設備を整えることができない場合が想定される。そのような場合には、大気雰囲気中でガスバーナーを用いて火炎中で熱分解を行なうことができる。ここで、空気中の酸素は燃焼に使用されるため、白金成形物の表面は、実質的に窒素雰囲気となり、金属としてイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金を析出することができる。さらに、窒素雰囲気をより高めることができる点で、ガスバーナーのトーチの周囲に窒素ガスを供給しながら熱分解を行なうことがより好ましい。また、塗布液にアルコールを含有させることで、より還元雰囲気とすることができ、酸化物の生成を防止できる。 In the thermal decomposition step, the coating layer is thermally decomposed in a nitrogen gas atmosphere or in a flame, whereby one or both of iridium salt and ruthenium salt and iridium or ruthenium and alloy contained in the coating layer obtained in the coating step are alloyed. The coating layer 30 is formed by precipitating a metal compound that forms iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. When iridium and ruthenium are thermally decomposed in an atmosphere containing oxygen, an oxide is formed. Therefore, the metal can be precipitated by thermally decomposing the coating layer in a nitrogen gas atmosphere or in a flame. Pyrolysis is preferably performed in a nitrogen atmosphere using a heating furnace capable of supplying nitrogen gas. However, at the work site, for example, if the platinum molding is large enough not to enter the heating furnace, if the platinum molding is attached to another part in a state where it is difficult to attach and detach, the whole cannot be heated, It is assumed that the equipment cannot be prepared. In such a case, thermal decomposition can be performed in a flame using a gas burner in an atmospheric atmosphere. Here, since oxygen in the air is used for combustion, the surface of the platinum molded product is substantially in a nitrogen atmosphere, and can deposit iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium as a metal. . Furthermore, it is more preferable to perform thermal decomposition while supplying nitrogen gas around the torch of the gas burner in that the nitrogen atmosphere can be further increased. Moreover, by making the coating liquid contain alcohol, a reducing atmosphere can be obtained and generation of oxides can be prevented.

 被覆層30の厚さは、1~30μmであることが好ましい。より好ましくは、1~10μmである。当該厚さになるまで塗布工程及び熱分解工程を複数回繰り返すことが好ましい。ポアが少なく、均一な塗布層を得ることができ、白金成形物の表面をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金によって更に確実に被覆することができる。塗布工程1回あたりの塗布量は、0.05~1μmとすることが好ましい。より好ましくは、0.10~0.5μmである。 The thickness of the coating layer 30 is preferably 1 to 30 μm. More preferably, it is 1 to 10 μm. It is preferable to repeat the coating step and the thermal decomposition step a plurality of times until the thickness is reached. A uniform coating layer with few pores can be obtained, and the surface of the platinum molded product can be more reliably covered with iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium. The coating amount per coating step is preferably 0.05 to 1 μm. More preferably, it is 0.10 to 0.5 μm.

 塗布工程及び熱分解工程を複数回繰り返す場合には、全塗布工程において塗布液の成分を同じとしてもよいし、2種類以上の塗布液を用いてもよい。2種類以上の塗布液を用いる場合には、最初の塗布工程で用いる塗布液には、イリジウム塩若しくはルテニウム塩のいずれか一方又は両方に加えて、塩化白金酸などの白金化合物を含有させることが好ましい。例えば、塗布工程及び熱分解工程を15回繰り返して被覆層を5μmにする場合において、最初の5回の塗布工程では、塗布液を、塩化イリジウムと塩化白金酸とのアルコール溶液として塗布工程1回あたりの塗布量を0.2μmとし、次の10回の塗布工程では、塗布液を、塩化イリジウムと塩化ルテニウムとのアルコール溶液として塗布工程1回あたりの塗布量を0.4μmとする形態である。これによって、白金成形物20の表面上に形成したイリジウム-白金合金からなる第一被覆層と該第一被覆層の上に形成したイリジウムからなる第二被覆層とからなる2層構成の被覆層30を形成することができる。被覆層30は、白金成形物20との密着性が高まるため、物理的強度及び還元雰囲気中での耐食性がより向上する。更に、熱膨張率(線膨張係数)が段階的に起こるために、加熱、冷却において被覆層自身の破壊が起こりにくくなると共に剥離しにくくなる。 When repeating the coating step and the thermal decomposition step a plurality of times, the components of the coating solution may be the same in all coating steps, or two or more types of coating solutions may be used. When two or more kinds of coating solutions are used, the coating solution used in the first coating step may contain a platinum compound such as chloroplatinic acid in addition to one or both of the iridium salt and the ruthenium salt. preferable. For example, when the coating process and the thermal decomposition process are repeated 15 times to make the coating layer 5 μm, in the first 5 coating processes, the coating solution is applied as an alcohol solution of iridium chloride and chloroplatinic acid once. In the next 10 coating steps, the coating solution is an alcohol solution of iridium chloride and ruthenium chloride, and the coating amount per coating step is 0.4 μm. . Thus, a two-layer coating layer comprising a first coating layer made of iridium-platinum alloy formed on the surface of the platinum molded product 20 and a second coating layer made of iridium formed on the first coating layer. 30 can be formed. Since the coating layer 30 has improved adhesion to the platinum molded product 20, physical strength and corrosion resistance in a reducing atmosphere are further improved. Furthermore, since the coefficient of thermal expansion (linear expansion coefficient) occurs in stages, the coating layer itself is less likely to break during heating and cooling, and is difficult to peel off.

 白金成形物20の白金元素と被覆層30に含まれる金属元素との間では、拡散が行なわれることが好ましい。拡散は、熱分解工程における加熱によって熱分解処理と同時に行なってもよいが、熱分解工程後、更に加熱して、白金成形物20の白金元素と被覆層30に含まれる金属元素とを拡散させると共に、被覆層内の歪みを除去するための安定化工程を設けることが好ましい。特に、被覆層30に含まれる金属として、2種類以上の金属を含有する場合には、熱分解工程で、イリジウム若しくはルテニウムの少なくとも一種を含む金属を予め合金化して被覆層を形成しておき、安定化工程で更に加熱することよって、より効率的に拡散を行なうことができる。また、塗布工程及び熱分解工程を複数回繰り返して被覆層を形成する場合には、熱分解工程において、各被覆層のイリジウム若しくはルテニウムの少なくとも一種を含む金属の合金化を行ない、安定化工程によって隣接する被覆層に含まれる金属同士の間及び白金成形物の白金元素と白金成形物と隣接する第一被覆層に含まれる金属との間での拡散処理を行なうことができる。 It is preferable that diffusion is performed between the platinum element of the platinum molded product 20 and the metal element contained in the coating layer 30. The diffusion may be performed simultaneously with the thermal decomposition process by heating in the thermal decomposition step, but after the thermal decomposition step, further heating is performed to diffuse the platinum element of the platinum molded product 20 and the metal element contained in the coating layer 30. At the same time, it is preferable to provide a stabilization step for removing strain in the coating layer. In particular, when two or more kinds of metals are contained as the metal contained in the coating layer 30, a metal containing at least one kind of iridium or ruthenium is pre-alloyed to form a coating layer in the pyrolysis step, By further heating in the stabilization step, diffusion can be performed more efficiently. Further, when the coating layer is formed by repeating the coating step and the thermal decomposition step a plurality of times, in the thermal decomposition step, a metal containing at least one kind of iridium or ruthenium is alloyed in the thermal decomposition step, and the stabilization step is performed. Diffusion treatment can be performed between the metals contained in the adjacent coating layers and between the platinum element of the platinum molded product and the metal contained in the first coating layer adjacent to the platinum molded product.

 熱分解工程及び安定化工程において、加熱条件は、特に限定されない。安定化工程を行なわない場合には、例えば、熱分解工程において、加熱温度を700~1000℃とし、加熱時間を1~2時間とすることで熱分解処理及び拡散処理を同時に行なうことができる。また、安定化工程を行なう場合には、例えば、熱分解工程において、加熱温度を500~600℃とし、処理時間を5~15分として熱分解処理を行ない、安定化工程において、加熱温度を700~1000℃とし、加熱時間を1~2時間として拡散処理を行なう。安定化工程において、拡散処理は、窒素、アルゴンなどの不活性雰囲気中又は大気などの酸素含有雰囲気中で行なうことができる。より好ましくは、窒素、アルゴンなどの不活性雰囲気中である。不活性雰囲気中で行なうことで、表面に酸化物が形成されることがなく、安熱合成法において、より純度の高い結晶を得ることができる。なお、本実施形態では、熱分解工程で予め合金化されているため、大気雰囲気中などの酸化雰囲気中でも殆ど酸化物が形成されることなく、拡散させることができる。 In the pyrolysis step and the stabilization step, the heating conditions are not particularly limited. When the stabilization process is not performed, for example, in the thermal decomposition process, the heating temperature is set to 700 to 1000 ° C. and the heating time is set to 1 to 2 hours, so that the thermal decomposition process and the diffusion process can be performed simultaneously. Further, when the stabilization process is performed, for example, in the thermal decomposition process, the heating temperature is set to 500 to 600 ° C., the processing time is set to 5 to 15 minutes, and the thermal decomposition process is performed. In the stabilization process, the heating temperature is set to 700 The diffusion treatment is performed at a temperature of ˜1000 ° C. and a heating time of 1 to 2 hours. In the stabilization step, the diffusion treatment can be performed in an inert atmosphere such as nitrogen or argon or in an oxygen-containing atmosphere such as air. More preferably, it is in an inert atmosphere such as nitrogen or argon. By carrying out in an inert atmosphere, oxides are not formed on the surface, and crystals with higher purity can be obtained in the low-temperature synthesis method. In this embodiment, since the alloy is preliminarily alloyed in the thermal decomposition step, the oxide can be diffused almost without being formed even in an oxidizing atmosphere such as an air atmosphere.

 本実施形態に係る白金成形物の表面硬化方法では、さらに、被覆層30の表面の一部の領域又は全部の領域を窒化処理する工程を有することが好ましい。窒化処理は、窒素又は窒素化合物を含有するガス中で加熱することによって行なうことができる。窒素又は窒素化合物を含有するガスは、特に限定されず、例えば、窒素ガス、アンモニアガス、窒素-水素混合ガスである。加熱温度及び加熱時間は、特に限定されず、窒化処理層の厚さが、例えば、1~30μmの範囲内になる条件を選定することが好ましい。窒化処理によって、白金成形物の表面硬度をより高めることができる。さらに、酸化物を除去できるため、安熱合成法において、生成される結晶の純度を向上させることができる。一部の領域を窒化処理する方法は、特に限定されないが、例えば、窒化処理を行なわない部分にマスキングを施す方法がある。 It is preferable that the method for hardening a surface of a platinum molded article according to the present embodiment further includes a step of nitriding a partial region or the entire region of the surface of the coating layer 30. The nitriding treatment can be performed by heating in a gas containing nitrogen or a nitrogen compound. The gas containing nitrogen or a nitrogen compound is not particularly limited, and examples thereof include nitrogen gas, ammonia gas, and nitrogen-hydrogen mixed gas. The heating temperature and the heating time are not particularly limited, and it is preferable to select conditions under which the thickness of the nitriding layer is in the range of 1 to 30 μm, for example. By nitriding, the surface hardness of the platinum molded product can be further increased. Furthermore, since the oxide can be removed, the purity of the generated crystal can be improved in the low-temperature synthesis method. A method of nitriding a part of the region is not particularly limited, and for example, there is a method of masking a portion where nitriding is not performed.

 図2は、棚を有する圧力容器の一例を示す断面図である。図2に示す圧力容器119は、単結晶の育成用容器として使用されるものである。圧力容器119の基本的な構成は、次のとおりである。圧力容器119は、本体1と蓋2とを有する。本体1及び蓋2は、例えば、低合金鋼、ニッケルクロム合金などの耐熱合金で構成されている。本体1は、その外周部に配置したヒータ4によって加熱される。本体1の内部は、下内筒105が設置されている。下内筒105にはフランジ105a(以降、下フランジということもある。)が形成されている。また、蓋2の内部も本体1と同様に、上内筒106が設置されている。上内筒106にはフランジ106a(以降、上フランジということもある。)が形成されている。この下内筒105及び上内筒106は、ライニングタイプの内筒である。本体1は、一端が開口した有底筒状であり、その開口部の外周縁には、遠心方向に張り出した下フランジ105aが設けられている。圧力容器119は、上フランジ106aと下フランジ105aとの間に、ガスケット7を介してナット、クランプなどの固定具3で固定することで密封する構造になっている。したがって、フランジには大きな圧力がかかるため、十分な耐圧を有することが必要である。また、圧力容器の密封時には、上フランジ106aと、ガスケット7と、下フランジ105aとは、線又は面で当接してシール部を形成している(以降、該当接部分をシール箇所という。)。特に、シール箇所には、高い表面硬度が求められる。下内筒105及び上内筒106は、白金などの耐熱耐食性を有する金属で成形されている。ガスケット7は、ニッケル基合金、白金族金属などの耐熱耐食性を有する金属で成形され、より好ましくは、上フランジ106a及び下フランジ105aよりも硬度の低い材料で成形される。 FIG. 2 is a cross-sectional view showing an example of a pressure vessel having a shelf. A pressure vessel 119 shown in FIG. 2 is used as a single crystal growth vessel. The basic configuration of the pressure vessel 119 is as follows. The pressure vessel 119 has a main body 1 and a lid 2. The main body 1 and the lid 2 are made of a heat-resistant alloy such as low alloy steel or nickel chrome alloy, for example. The main body 1 is heated by a heater 4 disposed on the outer periphery thereof. A lower inner cylinder 105 is installed inside the main body 1. The lower inner cylinder 105 is formed with a flange 105a (hereinafter also referred to as a lower flange). In addition, an upper inner cylinder 106 is installed in the inside of the lid 2 in the same manner as the main body 1. The upper inner cylinder 106 is formed with a flange 106a (hereinafter also referred to as an upper flange). The lower inner cylinder 105 and the upper inner cylinder 106 are lining type inner cylinders. The main body 1 has a bottomed cylindrical shape with one end opened, and a lower flange 105a projecting in the centrifugal direction is provided on the outer peripheral edge of the opening. The pressure vessel 119 is structured to be sealed by being fixed with a fixing tool 3 such as a nut or a clamp through a gasket 7 between the upper flange 106a and the lower flange 105a. Therefore, since a large pressure is applied to the flange, it is necessary to have a sufficient pressure resistance. When the pressure vessel is sealed, the upper flange 106a, the gasket 7, and the lower flange 105a are in contact with each other by a line or a surface to form a seal portion (hereinafter, the contact portion is referred to as a seal portion). In particular, a high surface hardness is required for the seal portion. The lower inner cylinder 105 and the upper inner cylinder 106 are formed of a metal having heat and corrosion resistance such as platinum. The gasket 7 is formed of a metal having heat and corrosion resistance, such as a nickel-based alloy or a platinum group metal, and more preferably formed of a material having lower hardness than the upper flange 106a and the lower flange 105a.

 図2に示す圧力容器119の本体1内には、棚108が収容されている。棚108は、白金製の架台である。棚108は、上部に種結晶架台10と、下部に原料11と、種結晶架台10と原料11との間に対流制御板9と、を有し、溶媒(不図示)で満たされた下内筒105及び上内筒106内に設置されている。単結晶の育成は、下内筒105及び上内筒106内で行なわれる。したがって、下内筒105及び上内筒106には、高い耐食性が求められるため、白金で成形する必要がある。 A shelf 108 is accommodated in the main body 1 of the pressure vessel 119 shown in FIG. The shelf 108 is a platinum frame. The shelf 108 has a seed crystal gantry 10 at the upper part, a raw material 11 at the lower part, and a convection control plate 9 between the seed crystal gantry 10 and the raw material 11, and is filled with a solvent (not shown). It is installed in the cylinder 105 and the upper inner cylinder 106. The single crystal is grown in the lower inner cylinder 105 and the upper inner cylinder 106. Accordingly, the lower inner cylinder 105 and the upper inner cylinder 106 are required to have high corrosion resistance, and thus need to be molded with platinum.

 本実施形態に係る白金成形物の表面硬化方法では、白金成形物が、圧力容器119の下内筒105及び上内筒106であることが好ましい。下内筒105の寸法は、圧力容器の大きさによって異なるが、例えば、中型圧力容器で、内径が20~70mmであり、容量が0.1~8lである。大型圧力容器で、内径が70~150mmであり、容量が8~50lである。 In the surface hardening method for a platinum molded product according to this embodiment, the platinum molded product is preferably the lower inner cylinder 105 and the upper inner cylinder 106 of the pressure vessel 119. The size of the lower inner cylinder 105 varies depending on the size of the pressure vessel. For example, it is a medium-sized pressure vessel and has an inner diameter of 20 to 70 mm and a capacity of 0.1 to 8 l. A large pressure vessel with an inner diameter of 70 to 150 mm and a capacity of 8 to 50 l.

 下内筒105の表面処理は、圧力容器119の本体1に設置する前又は圧力容器119の本体1に設置した後のいずれにも行なうことができる。下内筒105の表面処理を本体1への設置前に行なう場合には、被覆層を設ける表面は、下内筒105の内表面若しくは外表面のいずれか一方又は両方とすることができ、下内筒105の寸法、用途、反応条件など各種条件に応じて適宜選択可能である。下内筒105の厚さを、例えば、0.2~1.0mmのように薄くしても、本体1内への取り付け及び取り外し作業が容易になる。下内筒105の厚さを薄くしても、耐自重変形性を付与することができる。また、下内筒105のハンドリングがしやすくなり、圧力容器119の本体1内への取り付け及び取り外し作業が容易になる。安熱合成法に使用する場合には、下内筒105の少なくとも内表面に被覆層を形成することで、高温の還元雰囲気中での粒成長及び粒界腐食を防止でき、より純度の高い反応生成物を得ることができる。さらに、被覆層を窒化処理することによって、物理的強度をより向上させ、かつ、安熱合成法による反応生成物の純度をより高めることができる。 The surface treatment of the lower inner cylinder 105 can be performed either before installation on the main body 1 of the pressure vessel 119 or after installation on the main body 1 of the pressure vessel 119. When the surface treatment of the lower inner cylinder 105 is performed before installation on the main body 1, the surface on which the coating layer is provided can be either the inner surface or the outer surface of the lower inner cylinder 105, or both, The inner cylinder 105 can be appropriately selected according to various conditions such as dimensions, applications, and reaction conditions. Even if the thickness of the lower inner cylinder 105 is reduced to, for example, 0.2 to 1.0 mm, the attachment and detachment work into the main body 1 is facilitated. Even if the thickness of the lower inner cylinder 105 is reduced, resistance to self-weight deformation can be imparted. In addition, the lower inner cylinder 105 can be easily handled, and the attachment and removal work of the pressure vessel 119 in the main body 1 is facilitated. When used in the low-temperature synthesis method, by forming a coating layer on at least the inner surface of the lower inner cylinder 105, it is possible to prevent grain growth and intergranular corrosion in a high-temperature reducing atmosphere, and a reaction with higher purity. A product can be obtained. Furthermore, by nitriding the coating layer, the physical strength can be further improved, and the purity of the reaction product obtained by the low temperature synthesis method can be further increased.

 下内筒105の表面処理を圧力容器119の本体1への設置後に行なう場合には、被覆層を設ける表面は、下内筒105の内表面とすることができる。この場合において、熱分解工程は、ガスバーナーの火炎中で熱分解して塗布層を被覆層とすることが好ましい。熱分解工程に、ガスバーナーの火炎を用いることによって、圧力容器119の本体1に設置したままで、表面処理を行なうことができ、下内筒105を取り外し時の、変形又は破損のおそれを避けることができる。また、既に作業現場に設備された白金製下内筒105を有する圧力容器についても、作業現場から移動させることなく、下内筒105の内表面の硬化処理を行なうことができ、安熱合成法に対応した圧力容器とすることができる。さらに、被覆層を、窒素又は水素を加えた窒素ガスをこの容器に加え、外部から加熱することによって、該表面を更に窒化処理し、物理的強度をより向上させ、かつ、安熱合成法による反応生成物の純度をより高めることができる。 When the surface treatment of the lower inner cylinder 105 is performed after the pressure vessel 119 is installed on the main body 1, the surface on which the coating layer is provided can be the inner surface of the lower inner cylinder 105. In this case, the pyrolysis step is preferably pyrolyzed in a flame of a gas burner to form the coating layer as a coating layer. By using a flame of a gas burner in the pyrolysis process, the surface treatment can be performed with the gas burner being installed in the main body 1 of the pressure vessel 119, and avoiding the possibility of deformation or breakage when the lower inner cylinder 105 is removed. be able to. In addition, the pressure vessel having the platinum lower inner cylinder 105 already installed at the work site can be cured on the inner surface of the lower inner cylinder 105 without being moved from the work site. It can be set as the pressure vessel corresponding to. Furthermore, the surface of the coating layer is further nitrided by adding nitrogen or hydrogen gas to which this nitrogen or hydrogen is added and heated from the outside, thereby further improving the physical strength, and by using a low-temperature synthesis method. The purity of the reaction product can be further increased.

 また、本実施形態に係る表面が硬化された白金成形物では、白金成形物の表面は、圧力容器119の蓋2に配置された上内筒106とすることが好ましい。不純物の生成をより抑制して純度の高い反応生成物を得ることができる。 Moreover, in the platinum molded product having a hardened surface according to the present embodiment, the surface of the platinum molded product is preferably the upper inner cylinder 106 disposed on the lid 2 of the pressure vessel 119. The production of impurities can be further suppressed, and a reaction product with high purity can be obtained.

 本実施形態に係る白金成形物の表面硬化方法では、白金成形物が、圧力容器119の本体1に収容される棚108であることが好ましい。棚108の素材厚さを、例えば、0.2~1.0mmのように薄くすることができる。棚108の厚さを薄くしても、自重によって変形することを防止することができる。また、棚108のハンドリングがしやすくなり、圧力容器119の本体1内への収容及び取り出し作業が容易になる。さらに、棚108は白金で一体に成形することができる。棚108の寸法は、圧力容器の大きさによって異なるが、例えば、中型圧力容器で、内径が20~70mmであり、高さが300~2000mmである。大型圧力容器で、内径が70~150mmであり、高さが2000~3000mmである。 In the surface hardening method for a platinum molded product according to the present embodiment, the platinum molded product is preferably a shelf 108 accommodated in the main body 1 of the pressure vessel 119. The material thickness of the shelf 108 can be reduced to, for example, 0.2 to 1.0 mm. Even if the shelf 108 is made thin, it can be prevented from being deformed by its own weight. Further, the shelf 108 can be easily handled, and the operation of storing and taking out the pressure vessel 119 into the main body 1 is facilitated. Further, the shelf 108 can be integrally formed of platinum. The dimensions of the shelf 108 vary depending on the size of the pressure vessel. For example, the shelf 108 is a medium-sized pressure vessel having an inner diameter of 20 to 70 mm and a height of 300 to 2000 mm. A large pressure vessel with an inner diameter of 70 to 150 mm and a height of 2000 to 3000 mm.

 被覆層30を設ける表面は、圧力容器119の本体1に収容される棚108の全表面とすることが好ましい。棚108の構成部の全表面に被覆層を形成することで、安熱合成法で使用する場合には、高温の還元雰囲気中での粒成長及び粒界腐食を防止でき、より純度の高い反応生成物を得ることができる。さらに、被覆層を窒化処理することによって、反応生成物の純度をより向上させることができ、かつ、物理的強度を高めることができる。安熱合成法で使用する場合には、当然に、下内筒105及び上内筒106の内表面にも被覆層を設けることが好ましい。 The surface on which the coating layer 30 is provided is preferably the entire surface of the shelf 108 accommodated in the main body 1 of the pressure vessel 119. By forming a coating layer on the entire surface of the constituent parts of the shelf 108, when used in the low temperature synthesis method, grain growth and intergranular corrosion in a high temperature reducing atmosphere can be prevented, and a reaction with higher purity can be achieved. A product can be obtained. Furthermore, by nitriding the coating layer, the purity of the reaction product can be further improved and the physical strength can be increased. When used in the low temperature synthesis method, it is naturally preferable to provide a coating layer on the inner surfaces of the lower inner cylinder 105 and the upper inner cylinder 106.

 図3は、内筒容器を有する圧力容器の一例を示す断面図である。図3に示す圧力容器19は、基本構成を図2に示す圧力容器と同じくする。図3に示す圧力容器19の本体1内には、内筒容器8が収容されている。内筒容器8は、白金製の密封可能な筒状容器である。その上部には、圧力調整のためのベローズ12が内筒容器8の内部を密封した状態で取りつけられている。内筒容器8の内部には、図2に記載された棚108と溶媒(不図示)とが収容されている。単結晶の育成は、内筒容器8内で行なわれる。したがって、図3の圧力容器19では、下防食ライニング5及び上防食ライニング6は、直接は処理液には触れないために、内筒に要求されるほどの高い耐食性は必須としない。白金であることが特に好ましいが、これに限定されず、例えば、商品名ハステロイ(HASTELLOY)、インコネル(INCONEL)などのニッケル基合金、チタン、チタン合金、タンタル、タンタル合金とすることができる。内筒容器8の寸法は、圧力容器の大きさによって異なるが、例えば、中型圧力容器で、内径が20~70mmであり、容量が0.1~8lである。大型圧力容器で、内径が70~150mmであり、容量が8~50lである。 FIG. 3 is a cross-sectional view showing an example of a pressure vessel having an inner cylinder vessel. The pressure vessel 19 shown in FIG. 3 has the same basic configuration as the pressure vessel shown in FIG. An inner cylinder container 8 is accommodated in the main body 1 of the pressure container 19 shown in FIG. The inner cylinder container 8 is a sealable cylindrical container made of platinum. A bellows 12 for pressure adjustment is attached to the upper portion of the inner cylinder container 8 in a sealed state. A shelf 108 and a solvent (not shown) illustrated in FIG. 2 are accommodated inside the inner cylinder container 8. The single crystal is grown in the inner cylinder container 8. Therefore, in the pressure vessel 19 shown in FIG. 3, the lower anticorrosion lining 5 and the upper anticorrosion lining 6 do not directly touch the treatment liquid, and therefore do not require high corrosion resistance as required for the inner cylinder. Although platinum is particularly preferable, the present invention is not limited to this. For example, nickel-based alloys such as the trade names “HASTELLOY” and “INCONEL”, titanium, titanium alloys, tantalum, and tantalum alloys can be used. The size of the inner cylinder container 8 varies depending on the size of the pressure container, but is, for example, a medium-sized pressure container having an inner diameter of 20 to 70 mm and a capacity of 0.1 to 8 l. A large pressure vessel with an inner diameter of 70 to 150 mm and a capacity of 8 to 50 l.

 本実施形態に係る白金成形物の表面硬化方法では、白金成形物が、圧力容器19の内筒容器8であることが好ましい。内筒容器8の厚さを、例えば、0.2~1.0mmのように薄くすることができる。内筒容器8の厚さを薄くしても、自重によって変形することを防止することができる。また、内筒容器単体でのハンドリングがしやすくなり、圧力容器19の本体1内への収容及び取り出し作業が容易になる。さらに、内筒容器8とベローズ12とを白金で一体に成形することができるため、内筒容器8とベローズ12との複雑な接合が不要となり、内筒容器8の耐圧性をより高めることができる。 In the surface hardening method for a platinum molded product according to this embodiment, the platinum molded product is preferably the inner cylinder container 8 of the pressure vessel 19. The thickness of the inner cylinder container 8 can be reduced to, for example, 0.2 to 1.0 mm. Even if the thickness of the inner cylinder container 8 is reduced, it can be prevented from being deformed by its own weight. Moreover, it becomes easy to handle the inner cylinder container alone, and the operation of storing and taking out the pressure container 19 into the main body 1 is facilitated. Furthermore, since the inner cylinder container 8 and the bellows 12 can be integrally formed of platinum, complicated joining between the inner cylinder container 8 and the bellows 12 becomes unnecessary, and the pressure resistance of the inner cylinder container 8 can be further increased. it can.

 被覆層30を設ける表面は、圧力容器19の内筒容器8の内表面若しくは外表面のいずれか一方又は両方とすることができ、内筒容器8の寸法、用途、反応条件など各種条件に応じて適宜選択可能である。安熱合成法に使用する場合には、内筒容器8の少なくとも内表面に被覆層を形成することで、高温の還元雰囲気中での粒成長及び粒界腐食を防止でき、より純度の高い反応生成物を得ることができる。さらに、被覆層を窒化処理することによって、反応生成物の純度をより向上させることができ、かつ、物理的強度を高めることができる。 The surface on which the coating layer 30 is provided can be either one or both of the inner surface and the outer surface of the inner cylinder container 8 of the pressure vessel 19, and depends on various conditions such as the dimensions, applications, reaction conditions, etc. of the inner cylinder container 8 Can be selected as appropriate. When used in the low-temperature synthesis method, by forming a coating layer on at least the inner surface of the inner cylinder container 8, grain growth and intergranular corrosion in a high-temperature reducing atmosphere can be prevented, and a reaction with higher purity can be achieved. A product can be obtained. Furthermore, by nitriding the coating layer, the purity of the reaction product can be further improved and the physical strength can be increased.

 図3の圧力容器19において、下防食ライニング5、上防食ライニング6を白金としたときは、その内表面に被覆層を形成して表面を硬化することができる。これによって、ガスケット/フランジ部分の簡略化を図ることができ、構造を簡単に出来る。 In the pressure vessel 19 of FIG. 3, when the lower anticorrosion lining 5 and the upper anticorrosion lining 6 are made of platinum, a coating layer can be formed on the inner surface to harden the surface. As a result, the gasket / flange portion can be simplified and the structure can be simplified.

 図4は、大型の圧力容器の一例を示す断面図である。図4に示す圧力容器900は、基本構成を図2に示す圧力容器と同じとする。図4の圧力容器900には、更に、本体1と下内筒105との間に下防食ライニング5が配置され、蓋2と上内筒106との間にも上防食ライニング6が配置されている。下防食ライニング5及び上防食ライニング6は、商品名インコネル、ハステロイなどの耐圧耐熱耐食性に優れたニッケル基合金で構成されている。下防食ライニング5及び上防食ライニング6は、下内筒105及び上内筒106が破損して強腐食性の物質が流出した場合に、本体1が腐食されるのを防止する役割をもち、より高温高圧条件に対応した圧力容器とすることができる。なお、図2の圧力容器119は中型の圧力容器であるが、それらに防食ライニングを設けてもよい。 FIG. 4 is a cross-sectional view showing an example of a large pressure vessel. The pressure vessel 900 shown in FIG. 4 has the same basic configuration as the pressure vessel shown in FIG. In the pressure vessel 900 of FIG. 4, a lower anticorrosion lining 5 is further disposed between the main body 1 and the lower inner cylinder 105, and an upper anticorrosion lining 6 is also disposed between the lid 2 and the upper inner cylinder 106. Yes. The lower anticorrosion lining 5 and the upper anticorrosion lining 6 are made of a nickel-based alloy having excellent pressure resistance, heat resistance and corrosion resistance, such as trade names of Inconel and Hastelloy. The lower anticorrosion lining 5 and the upper anticorrosion lining 6 have a role of preventing the main body 1 from being corroded when the lower inner cylinder 105 and the upper inner cylinder 106 are damaged and a highly corrosive substance flows out. It can be set as the pressure vessel corresponding to high temperature / high pressure conditions. In addition, although the pressure vessel 119 of FIG. 2 is a medium-sized pressure vessel, you may provide anticorrosion lining in them.

 図4に示す大型圧力容器900は、本体1の内面に下防食ライニング5と下内筒105とが配置された構造であるため、下内筒105の表面処理を行なうことによって、どうしても大型化する内筒自身の白金材を薄くすることが出来る。これによって、高価な白金の使用量を減らすことが可能となり、大きな経済メリットを得ることが出来る。 Since the large pressure vessel 900 shown in FIG. 4 has a structure in which the lower anticorrosion lining 5 and the lower inner cylinder 105 are arranged on the inner surface of the main body 1, the surface treatment of the lower inner cylinder 105 inevitably increases in size. The inner cylinder itself can be made thinner. As a result, the amount of expensive platinum used can be reduced, and a great economic advantage can be obtained.

 図5は、図4に示す圧力容器のシール部を示す部分拡大断面図である。前述のとおり、下フランジ105a及び上フランジ106aには大きな圧力がかかるため、高い表面硬度が求められる。したがって、本実施形態に係る白金成形物の表面硬化方法では、白金成形物20が、圧力容器900の開口部に設けられた下フランジ105a及び上フランジ106aである形態に好適である。 FIG. 5 is a partially enlarged cross-sectional view showing a seal portion of the pressure vessel shown in FIG. As described above, since high pressure is applied to the lower flange 105a and the upper flange 106a, high surface hardness is required. Therefore, the platinum molded product surface hardening method according to the present embodiment is suitable for a form in which the platinum molded product 20 is the lower flange 105 a and the upper flange 106 a provided in the opening of the pressure vessel 900.

 下内筒105と下フランジ105aとは、白金で一体として成形してもよいし、下フランジ105aを別部品として成形し、下内筒105と下フランジ105aとを接合してもよい。下フランジ105aを別部品として成形する場合には、本実施形態では、下内筒105と下フランジ105aとを接合する方法に制限されない。接合する方法は、例えば、図5に示すように、下内筒105の開口周縁にフランジ取付部Tを設け、その上に下フランジ105aを溶接又は拡散による接合によって取りつける方法が挙げられる。また、下内筒105及び下フランジ105aと同様に、上内筒106と上フランジ106aとは、白金で一体として成形してもよいし、上フランジ106aを別部品として成形し、上内筒106と上フランジ106aとを接合してもよい。 The lower inner cylinder 105 and the lower flange 105a may be integrally formed of platinum, or the lower flange 105a may be formed as a separate part and the lower inner cylinder 105 and the lower flange 105a may be joined. In the case where the lower flange 105a is formed as a separate part, the present embodiment is not limited to the method of joining the lower inner cylinder 105 and the lower flange 105a. As a method of joining, for example, as shown in FIG. 5, there is a method in which a flange mounting portion T is provided on the opening periphery of the lower inner cylinder 105 and the lower flange 105 a is attached thereon by welding or diffusion joining. Similarly to the lower inner cylinder 105 and the lower flange 105a, the upper inner cylinder 106 and the upper flange 106a may be integrally formed of platinum, or the upper flange 106a is formed as a separate part, and the upper inner cylinder 106 is formed. And the upper flange 106a may be joined.

 被覆層を設ける表面は、下フランジ105a及び上フランジ106aの少なくともシール箇所となる部分Sの表面とすることが好ましい。被覆層は、少なくともシール箇所となる部分Sの表面に形成されていればよいが、より好ましくは、上フランジ106aと下フランジ105aとが対面する側の全表面を被覆する形態である。全表面に形成することで、上フランジ106a及び下フランジ105aの耐久性を向上させることができる。なお、図5を用いて、図4に示す圧力容器のフランジについて説明したが、本実施形態では、白金成形物としてのフランジは、図4に示す下内筒105に取りつけられた下フランジ105aに限定されず、例えば、図3に示す下防食ライニング5及び上防食ライニング6に形成された下フランジ5a及び上フランジ6aを包含する。 The surface on which the coating layer is provided is preferably the surface of the portion S that becomes at least a seal portion of the lower flange 105a and the upper flange 106a. Although the coating layer should just be formed in the surface of the part S used as a seal location at least, More preferably, it is a form which coat | covers the whole surface of the side which the upper flange 106a and the lower flange 105a face. By forming it on the entire surface, the durability of the upper flange 106a and the lower flange 105a can be improved. Although the flange of the pressure vessel shown in FIG. 4 has been described with reference to FIG. 5, in this embodiment, the flange as the platinum molded product is connected to the lower flange 105 a attached to the lower inner cylinder 105 shown in FIG. 4. It is not limited, For example, the lower flange 5a and the upper flange 6a which were formed in the lower anticorrosion lining 5 and the upper anticorrosion lining 6 shown in FIG. 3 are included.

 図4における上フランジ106a、下フランジ105a、図3における上フランジ6a、下フランジ5aの変形を防止するために、図4における上フランジ106a、下フランジ105a、図3における上フランジ6a、下フランジ5aの表面は、ガスケット7の表面よりも硬いことが好ましい。図4における上フランジ106a、下フランジ105a、図3における上フランジ6a、下フランジ5aの表面に被覆層30を形成することよって、ガスケット7よりも表面を硬くすることができる。図4における上フランジ106a、下フランジ105a、図3における上フランジ6a、下フランジ5aの表面をより硬くするために、塗布工程及び熱分解工程を2回以上繰り返して被覆層を形成することが好ましい。ポアが少なく、均一な被覆層を得ることができ、物理的強度を高めることができる。ここで、少なくとも最初の塗布工程で用いる塗布液には、イリジウムの塩又はルテニウムの塩と塩化白金酸などの白金化合物とを配合して、イリジウム又はルテニウムと白金との合金からなる被覆層を形成することが好ましい。白金成形物と被覆層との密着性が高まり、より物理的強度を向上させることができる。さらに硬さを求める場合には、被覆層30の表面を窒化処理することで、表面硬度及び物理的強度をより高めることができる。 In order to prevent deformation of the upper flange 106a and the lower flange 105a in FIG. 4, the upper flange 6a and the lower flange 5a in FIG. 3, the upper flange 106a and the lower flange 105a in FIG. 4, the upper flange 6a and the lower flange 5a in FIG. This surface is preferably harder than the surface of the gasket 7. By forming the coating layer 30 on the surfaces of the upper flange 106a and the lower flange 105a in FIG. 4 and the upper flange 6a and the lower flange 5a in FIG. 3, the surface can be made harder than the gasket 7. In order to make the surfaces of the upper flange 106a and the lower flange 105a in FIG. 4 and the upper flange 6a and the lower flange 5a in FIG. 3 harder, it is preferable to repeat the coating process and the thermal decomposition process twice or more to form a coating layer. . There are few pores, a uniform coating layer can be obtained, and physical strength can be increased. Here, at least the coating solution used in the first coating step is blended with an iridium salt or ruthenium salt and a platinum compound such as chloroplatinic acid to form a coating layer made of an alloy of iridium or ruthenium and platinum. It is preferable to do. The adhesion between the platinum molded product and the coating layer is increased, and the physical strength can be further improved. Furthermore, when calculating | requiring hardness, the surface hardness and physical strength can be raised more by carrying out the nitriding process of the surface of the coating layer 30. FIG.

 本実施形態に係る表面が硬化された白金成形物の表面が、図4における上フランジ106a、下フランジ105a、図3における上フランジ6a、下フランジ5aである場合には、JIS Z 2244:2009に準じて測定した表面のビッカース硬度が、300Hv~500Hvであることが好ましい。より好ましくは、350Hv~450Hvである。300Hv未満では、締め付けによって、大きな変形(つぶれ)が起こり、十分なシールができなくなる場合がある。また、ガスケットより表面硬度が低くなる場合があり、フランジが変形し、圧力容器の寿命を縮めてしまうことがある。500Hvを超えると、亀裂が生じるおそれがある。さらに、破断する場合がある。 When the surface of the platinum molded product whose surface is hardened according to the present embodiment is the upper flange 106a and the lower flange 105a in FIG. 4, the upper flange 6a and the lower flange 5a in FIG. 3, JIS Z 2244: 2009 The surface Vickers hardness measured according to the above is preferably 300 Hv to 500 Hv. More preferably, it is 350 Hv to 450 Hv. If it is less than 300 Hv, a large deformation (collapse) may occur due to tightening, and sufficient sealing may not be achieved. In addition, the surface hardness may be lower than that of the gasket, and the flange may be deformed to shorten the life of the pressure vessel. If it exceeds 500 Hv, cracks may occur. Furthermore, it may break.

 本実施形態に係る白金成形物の表面硬化方法では、白金成形物が、るつぼであることが好ましい。白金製のるつぼは、例えば、各種酸化物の単結晶育成、光学ガラスの融解など微量不純物の混入を防止する目的で使用される。本実施形態では、白金成形物20として、ジルコニア(ZrO)などの酸化物を分散させた、いわゆる強化白金製のるつぼを包含する。被覆層30を設ける表面は、るつぼの内表面若しくは外表面のいずれか一方又は両方とすることができ、るつぼの寸法、用途、反応条件など各種条件に応じて適宜選択可能である。るつぼの厚さを、例えば、0.2~1.0mmのように薄くすることができる。るつぼの厚さを薄くしても、自重によって変形することを防止することができる。また、るつぼのハンドリングがしやすくなる。さらに、還元雰囲気中での耐久性が向上する。さらに、被覆層30を窒化処理することによって、反応生成物の純度をより向上させることができ、かつ、物理的強度を高めることができる。るつぼの寸法は、例えば、内径が25~100mmであり、高さが25~150mmであり、容量が0.01~2lである。なお、本実施形態は、るつぼの形状及び寸法に制限されるものではない。 In the method for surface hardening a platinum molded product according to the present embodiment, the platinum molded product is preferably a crucible. The platinum crucible is used for the purpose of preventing contamination of trace impurities such as single crystal growth of various oxides and melting of optical glass. In this embodiment, the platinum molded product 20 includes a so-called reinforced platinum crucible in which an oxide such as zirconia (ZrO 2 ) is dispersed. The surface on which the coating layer 30 is provided can be either one or both of the inner surface and the outer surface of the crucible, and can be appropriately selected according to various conditions such as the size of the crucible, application, and reaction conditions. The thickness of the crucible can be reduced to 0.2 to 1.0 mm, for example. Even if the thickness of the crucible is reduced, the crucible can be prevented from being deformed by its own weight. In addition, the crucible can be handled easily. Furthermore, durability in a reducing atmosphere is improved. Furthermore, by nitriding the coating layer 30, the purity of the reaction product can be further improved, and the physical strength can be increased. The dimensions of the crucible are, for example, an inner diameter of 25 to 100 mm, a height of 25 to 150 mm, and a capacity of 0.01 to 2 l. In addition, this embodiment is not restrict | limited to the shape and dimension of a crucible.

 以下、実施例を示しながら本発明についてさらに詳細に説明するが、本発明は実施例に限定して解釈されない。 Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not construed as being limited to the examples.

(実施例1)
 白金成形物として、白金を直径(内寸)30mm、高さ200mm、厚さ0.2mmである一端が開口した有底円筒状の圧力容器の内筒を成形した。塩化イリジウムと塩化白金酸とをモル比で80:20となるように配合し、ブタノールに溶解し、イリジウム及び白金の合計モル濃度で0.25mol-Ir+Pt/lの溶液を塗布液とした。得られた塗布液を内筒の内表面に塗布し、60℃で10分間静置し、乾燥させ塗布層を形成した。1回あたりの塗布量は、20ml/mであった。塗布層の表面を大気雰囲気中でガスバーナーの火炎を用いて加熱処理して熱分解を行ったところ、厚さ0.1μmのイリジウム-白金合金の被膜を得た。熱分解工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が600~750℃の範囲になるように加熱し、処理時間は10分とした。なお、本実施例において、火炎の温度は、放射温度計(型式AD‐5616、A&D社製)を用いて測定した。塗布液の塗布から熱分解までを10回繰り返し、イリジウム-白金合金からなる厚さが1.0μmの被覆層を形成した。被覆層の表面を、更に大気雰囲気中でガスバーナーの火炎を用いて加熱することによって、安定化処理を行なった。安定化工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が750~900℃の範囲になるように加熱し、処理時間は20分とした。得られた内筒は、表面の硬さが増し、圧力容器本体への取り付けが容易となった。また、内表面は、イリジウム-白金合金で被覆されているため、安熱合成法の容器として用いても粒成長及び粒界腐食を起こしにくい内筒とすることができた。
Example 1
As a platinum molded product, an inner cylinder of a bottomed cylindrical pressure vessel having one end opened with platinum having a diameter (inner dimension) of 30 mm, a height of 200 mm, and a thickness of 0.2 mm was formed. Iridium chloride and chloroplatinic acid were mixed at a molar ratio of 80:20, dissolved in butanol, and a solution having a total molar concentration of iridium and platinum of 0.25 mol-Ir + Pt / l was used as a coating solution. The obtained coating solution was applied to the inner surface of the inner cylinder, allowed to stand at 60 ° C. for 10 minutes, and dried to form a coating layer. The coating amount per one time was 20 ml / m 2 . When the surface of the coating layer was thermally decomposed by heat treatment using a gas burner flame in the atmosphere, an iridium-platinum alloy film having a thickness of 0.1 μm was obtained. In the thermal decomposition process, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 600 to 750 ° C., and the treatment time was 10 minutes. In this example, the flame temperature was measured using a radiation thermometer (model AD-5616, manufactured by A & D). The coating from coating to thermal decomposition was repeated 10 times to form a coating layer made of iridium-platinum alloy having a thickness of 1.0 μm. The surface of the coating layer was further heated by using a gas burner flame in an air atmosphere to carry out a stabilization treatment. In the stabilization step, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 750 to 900 ° C., and the treatment time was 20 minutes. The obtained inner cylinder has increased surface hardness and is easy to attach to the pressure vessel body. Further, since the inner surface was coated with an iridium-platinum alloy, it was possible to form an inner cylinder that hardly caused grain growth and intergranular corrosion even when used as a container for the low temperature synthesis method.

(実施例2)
 白金成形物として、白金製内筒の開口部の外周縁に直径70mm、厚さ2.0mmであるフランジを成形した。塩化ルテニウムと塩化白金酸とをモル比で1:1となるように配合し、ブタノールに溶解し、ルテニウム及び白金の合計モル濃度で0.5mol-Ru+Pt/lの溶液を第一塗布液とした。得られた第一塗布液をフランジの蓋側のフランジ(上フランジ)と対面する側の表面に塗布し、40℃で15分間静置し、乾燥させ塗布層を形成した。1回あたりの塗布量は、20ml/mであった。塗布層の表面を、大気雰囲気中でガスバーナーの火炎を用いて加熱処理して熱分解を行ったところ、厚さ0.2μmのルテニウム-白金合金の被膜を得た。第一熱分解工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が550~650℃の範囲になるように加熱し、処理時間は30分とした。第一塗布液の塗布から熱分解までを5回繰り返し、ルテニウム-白金合金からなる厚さが1.0μmの第一被覆層を形成した。次いで、塩化ルテニウムと塩化ロジウムとをモル比で1:1となるように配合し、ブタノールに溶解し、ルテニウム及びロジウムの合計モル濃度で1.0mol-Ru+Rh/lの溶液を第二塗布液とした。得られた第二塗布液を第一被覆層上に塗布し、60℃で10分間静置し、乾燥させ塗布層を形成した。1回あたりの塗布量は、0.5μmであった。塗布層の表面を大気雰囲気中でガスバーナーの火炎を用いて加熱処理して熱分解を行ない、厚さ0.5μmのルテニウム-ロジウム合金の被膜を得た。第二熱分解工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が650~750℃の範囲になるように加熱し、処理時間は30分とした。第二塗布液の塗布から熱分解までを20回繰り返し、ルテニウム-ロジウムからなる厚さが10μmの第二被覆層を形成した。さらに、マッフル付きの電気炉を用いて大気雰囲気中で、雰囲気温度を700℃とし、処理時間を2時間として安定化処理を行なった。得られた表面が硬化されたフランジは、見かけ上、白金とは僅かに色調が異なり、若干黒色を帯びた金属光沢を示した。JIS Z 2244:2009に準じてビッカース硬度を測定したところ、350~380Hvであり、フランジとして十分な表面硬度を有することが確認できた。
(Example 2)
As a platinum molded product, a flange having a diameter of 70 mm and a thickness of 2.0 mm was formed on the outer peripheral edge of the opening of the platinum inner cylinder. Ruthenium chloride and chloroplatinic acid were mixed at a molar ratio of 1: 1, dissolved in butanol, and a solution having a total molar concentration of ruthenium and platinum of 0.5 mol-Ru + Pt / l was used as the first coating solution. . The obtained first coating solution was applied to the surface of the flange facing the flange (upper flange) on the lid side, allowed to stand at 40 ° C. for 15 minutes, and dried to form a coating layer. The coating amount per one time was 20 ml / m 2 . When the surface of the coating layer was thermally decomposed by heat treatment using a gas burner flame in an air atmosphere, a 0.2 μm thick ruthenium-platinum alloy film was obtained. In the first pyrolysis step, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 550 to 650 ° C., and the treatment time was 30 minutes. From application of the first coating solution to thermal decomposition was repeated 5 times to form a first coating layer made of ruthenium-platinum having a thickness of 1.0 μm. Next, ruthenium chloride and rhodium chloride are blended at a molar ratio of 1: 1, dissolved in butanol, and a solution having a total molar concentration of ruthenium and rhodium of 1.0 mol-Ru + Rh / l is used as the second coating solution. did. The obtained 2nd coating liquid was apply | coated on the 1st coating layer, and it left still for 10 minutes at 60 degreeC, and it was made to dry and the coating layer was formed. The coating amount per one time was 0.5 μm. The surface of the coating layer was heat-treated using a gas burner flame in the air atmosphere and thermally decomposed to obtain a ruthenium-rhodium alloy film having a thickness of 0.5 μm. In the second pyrolysis step, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 650 to 750 ° C., and the treatment time was 30 minutes. The application from the second coating solution to thermal decomposition was repeated 20 times to form a second coating layer made of ruthenium-rhodium having a thickness of 10 μm. Furthermore, the stabilization process was performed using an electric furnace with a muffle in an air atmosphere at an atmospheric temperature of 700 ° C. and a processing time of 2 hours. The obtained flange having a hardened surface apparently had a slightly different color tone from platinum, and showed a slightly blackish metallic luster. When the Vickers hardness was measured according to JIS Z 2244: 2009, it was 350 to 380 Hv, and it was confirmed that the surface hardness was sufficient as a flange.

(実施例3)
 白金成形物として、直径(内寸)70mm、高さ100mm、厚さ0.8mmであるるつぼを成形した。塩化イリジウムをブタノールに溶解し、イリジウムのモル濃度で0.5mol-Ir/lの溶液を塗布液とした。得られた塗布液をるつぼの内表面及び外表面に塗布し、40~50℃で10分間静置し、乾燥させ塗布層を形成した。1回あたりの塗布量は、20ml/mであった。塗布層の表面をブタンガス及び空気の混合気体を送りながらガスバーナーの火炎を用いて加熱処理して熱分解を行ったところ、厚さ0.1μmのイリジウム金属の被膜を得た。熱分解工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が800~850℃の範囲になるように加熱し、処理時間は20分とした。塗布液の塗布から熱分解までを10回繰り返し、イリジウム金属からなる厚さが1.0μmの被覆層を形成した。被覆層の表面を更に大気雰囲気中でガスバーナーの火炎を用いて加熱することによって、安定化処理を行なった。安定化工程において、火炎があたっている部分の中心部における加熱処理面の最高温度が850~900℃の範囲になるように加熱し、処理時間は40分とした。得られたるつぼは、表面の硬さが増し、ハンドリング性が向上した。
(Example 3)
As a platinum molded product, a crucible having a diameter (inner dimension) of 70 mm, a height of 100 mm, and a thickness of 0.8 mm was molded. Iridium chloride was dissolved in butanol, and a solution having a molar concentration of iridium of 0.5 mol-Ir / l was used as a coating solution. The obtained coating solution was applied to the inner and outer surfaces of the crucible, allowed to stand at 40 to 50 ° C. for 10 minutes, and dried to form a coating layer. The coating amount per one time was 20 ml / m 2 . When the surface of the coating layer was subjected to thermal decomposition using a flame of a gas burner while feeding a mixed gas of butane gas and air, a iridium metal film having a thickness of 0.1 μm was obtained. In the pyrolysis step, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 800 to 850 ° C., and the treatment time was 20 minutes. The coating liquid coating to thermal decomposition was repeated 10 times to form a coating layer made of iridium metal and having a thickness of 1.0 μm. The surface of the coating layer was further heated in an air atmosphere using a flame of a gas burner to perform a stabilization treatment. In the stabilization process, heating was performed so that the maximum temperature of the heat-treated surface at the center of the portion exposed to the flame was in the range of 850 to 900 ° C., and the treatment time was 40 minutes. The resulting crucible had increased surface hardness and improved handling.

(実施例4)
 実施例1において、塩化イリジウムと塩化ルテニウムとをモル比で80:20となるように配合し、ブタノールに溶解し、イリジウム及びルテニウムの合計モル濃度で0.5mol-Ir+Ru/lの溶液を塗布液とした以外は、実施例1に準じて、白金成形物である圧力容器の内筒の表面を硬化処理した。得られた内筒の内表面は、イリジウム-ルテニウム合金で被覆されていた。得られた内筒は、表面の硬さが増し、圧力容器本体への取り付けが容易となった。また、安熱合成法の容器として用いても粒成長及び粒界腐食を起こしにくい内筒とすることができた。参考までに、実施例2と同様に、JIS Z 2244:2009に準じてビッカース硬度を測定したところ、380~400Hvであった。
Example 4
In Example 1, iridium chloride and ruthenium chloride were blended in a molar ratio of 80:20, dissolved in butanol, and a solution having a total molar concentration of iridium and ruthenium of 0.5 mol-Ir + Ru / l was applied as a coating solution. Except that, the surface of the inner cylinder of the pressure vessel, which is a platinum molded product, was cured according to Example 1. The inner surface of the obtained inner cylinder was coated with an iridium-ruthenium alloy. The obtained inner cylinder has increased surface hardness and is easy to attach to the pressure vessel body. Moreover, even if it used as a container of the low temperature synthesis method, it was able to be set as the inner cylinder which hardly raise | generates a grain growth and intergranular corrosion. For reference, the Vickers hardness was measured according to JIS Z 2244: 2009 in the same manner as in Example 2, and it was 380 to 400 Hv.

(実施例5)
 実施例2において、安定化処理後、更に、純窒素ガス中で、1100℃で3時間保持してフランジ表面の全部の領域を窒化処理した。窒化処理層の厚さは、約5μmであった。窒化処理層の表面について、JIS Z 2244:2009に準じてビッカース硬度を測定したところ、420~450Hvであり、実施例2で得られたフランジよりも表面硬度が向上したことが確認できた。
(Example 5)
In Example 2, after the stabilization treatment, the entire surface of the flange surface was nitrided by holding in pure nitrogen gas at 1100 ° C. for 3 hours. The thickness of the nitriding layer was about 5 μm. When the Vickers hardness of the surface of the nitrided layer was measured according to JIS Z 2244: 2009, it was 420 to 450 Hv, and it was confirmed that the surface hardness was improved as compared with the flange obtained in Example 2.

 本発明に係る白金成形物の表面硬化方法は、白金成形物が、例えば、0.2~1.0mmのように薄肉であっても、物理的強度を確保できる。また、白金成形物の内表面をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金とすることで、安熱合成法などの還元雰囲気中であっても、白金の粒成長及び粒界腐食を防止でき、化学的に安定な白金成形物とすることができる。本発明に係る白金成形物の表面硬化方法は、例えば、圧力容器の内筒、フランジ及びるつぼの内表面、外表面又は内外表面を硬化するのに好適である。また、本発明に係る白金成形物の表面硬化方法は、白金製のトング、蒸発皿など白金成形物の表面を硬化するのに適している。 The surface hardening method for a platinum molded product according to the present invention can ensure physical strength even if the platinum molded product is thin, for example, 0.2 to 1.0 mm. In addition, by making the inner surface of the platinum molded article an alloy containing at least one of iridium, ruthenium or iridium or ruthenium, platinum grain growth and intergranular corrosion can be prevented even in a reducing atmosphere such as a thermal synthesis method. It can be prevented and a chemically stable platinum molded article can be obtained. The surface-curing method for a platinum molded product according to the present invention is suitable for curing the inner surface, outer surface, or inner / outer surface of an inner cylinder, a flange, and a crucible of a pressure vessel, for example. Moreover, the surface hardening method of the platinum molded product according to the present invention is suitable for curing the surface of a platinum molded product such as platinum tongs and evaporating dishes.

1 本体
2 蓋
3 固定具
4 ヒータ
5 下防食ライニング
6 上防食ライニング
5a,105a 下フランジ
6a,106a 上フランジ
7 ガスケット
8 内筒容器
8a 内筒容器のフランジ
9 対流制御版
10 種結晶架台
11 原料
12 ベローズ
19,119,900 圧力容器
20 白金成形物
30 被覆層
100 表面が硬化された白金成形物
105 下内筒
106 上内筒
100 白金成形物
108 棚(バッフル・籠・結晶取りつけ)
DESCRIPTION OF SYMBOLS 1 Main body 2 Cover 3 Fixing tool 4 Heater 5 Lower anticorrosion lining 6 Upper anticorrosion lining 5a, 105a Lower flange 6a, 106a Upper flange 7 Gasket 8 Inner cylinder container 8a Inner cylinder container flange 9 Convection control plate 10 Seed crystal mount 11 Raw material 12 Bellows 19, 119, 900 Pressure vessel 20 Platinum molded product 30 Cover layer 100 Platinum molded product 105 whose surface is cured Lower inner cylinder 106 Upper inner cylinder 100 Platinum molded product 108 Shelf (baffle / saddle / crystal mounting)

Claims (17)

 白金成形物の表面に、イリジウム塩若しくはルテニウム塩のいずれか一方又は両方を含有する塗布液を塗布して塗布層を形成する塗布工程と、
 該塗布層を窒素ガス雰囲気中又は火炎中で熱分解して前記塗布層をイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層とする熱分解工程と、
 を有することを特徴とする白金成形物の表面硬化方法。
An application step of applying a coating liquid containing either or both of an iridium salt and a ruthenium salt to the surface of the platinum molded product to form a coating layer;
A thermal decomposition step of thermally decomposing the coating layer in a nitrogen gas atmosphere or in a flame to form the coating layer as a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium;
A surface-curing method for a platinum molded product, comprising:
 前記白金成形物の厚さが、0.2~1.0mmであることを特徴とする請求項1に記載の白金成形物の表面硬化方法。 2. The method for hardening a surface of a platinum molded article according to claim 1, wherein the platinum molded article has a thickness of 0.2 to 1.0 mm.  さらに、前記被覆層の表面の一部の領域又は全部の領域を窒化処理する工程を有することを特徴とする請求項1又は2に記載の白金成形物の表面硬化方法。 The method for hardening a surface of a platinum molded article according to claim 1 or 2, further comprising a step of nitriding a partial area or the entire area of the surface of the coating layer.  前記塗布液は、更に白金化合物を含有することを特徴とする請求項1~3のいずれか一つに記載の白金成形物の表面硬化方法。 4. The method for curing a surface of a platinum molded article according to claim 1, wherein the coating solution further contains a platinum compound.  前記塗布液は、更にアルコールを含有することを特徴とする請求項1~4のいずれか一つに記載の白金成形物の表面硬化方法。 The method for curing a surface of a platinum molded article according to any one of claims 1 to 4, wherein the coating solution further contains an alcohol.  前記白金成形物が、圧力容器の内筒であり、
 前記塗布工程は、前記内筒の内表面若しくは外表面のいずれか一方又は両方に前記塗布液を塗布して前記塗布層を形成することを特徴とする請求項1~5のいずれか一つに記載の白金成形物の表面硬化方法。
The platinum molded product is an inner cylinder of a pressure vessel,
6. The coating process according to claim 1, wherein in the coating step, the coating layer is formed by coating the coating liquid on either or both of the inner surface and the outer surface of the inner cylinder. A method for curing a surface of a platinum molded article as described.
 前記白金成形物が、圧力容器の内筒であり、
 更に、該内筒を前記圧力容器の本体に設置する設置工程を有し、
 該設置工程の後に、前記塗布工程と前記熱分解工程とを有し、
 前記塗布工程は、前記内筒の内表面に前記塗布液を塗布して前記塗布層を形成し、
 前記熱分解工程は、該塗布層をガスバーナーの火炎中で熱分解して前記被覆層を形成することを特徴とする請求項1~5のいずれか一つに記載の白金成形物の表面硬化方法。
The platinum molded product is an inner cylinder of a pressure vessel,
Furthermore, it has an installation step of installing the inner cylinder in the main body of the pressure vessel,
After the installation step, the coating step and the thermal decomposition step,
The coating step forms the coating layer by coating the coating liquid on the inner surface of the inner cylinder,
The surface hardening of a platinum molded article according to any one of claims 1 to 5, wherein in the pyrolysis step, the coating layer is formed by pyrolyzing the coating layer in a flame of a gas burner. Method.
 前記白金成形物が、圧力容器の本体に収容される種結晶取り付け用の棚であり、
 前記塗布工程は、前記棚の全表面に前記塗布液を塗布して前記塗布層を形成することを特徴とする請求項1~5のいずれか一つに記載の白金成形物の表面硬化方法。
The platinum molded product is a seed crystal mounting shelf accommodated in the body of the pressure vessel,
The method for hardening a surface of a platinum molded article according to any one of claims 1 to 5, wherein, in the coating step, the coating layer is formed by coating the coating liquid on the entire surface of the shelf.
 前記白金成形物が、圧力容器の開口部に設けられたフランジであり、
 前記塗布工程は、前記フランジの少なくともシール箇所となる部分の表面に前記塗布液を塗布して前記塗布層を形成することを特徴とする請求項1~5のいずれか一つに記載の白金成形物の表面硬化方法。
The platinum molded product is a flange provided at the opening of the pressure vessel,
The platinum molding according to any one of claims 1 to 5, wherein, in the coating step, the coating layer is formed by coating the coating liquid on a surface of at least a portion to be a seal portion of the flange. Surface curing method for objects.
 前記白金成形物が、るつぼであり、
 前記塗布工程は、前記るつぼの内表面若しくは外表面のいずれか一方又は両方に前記塗布液を塗布して前記塗布層を形成することを特徴とする請求項1~5のいずれか一つに記載の白金成形物の表面硬化方法。
The platinum molded product is a crucible,
6. The coating process according to claim 1, wherein the coating step forms the coating layer by coating the coating solution on one or both of the inner surface and the outer surface of the crucible. Surface hardening method for platinum moldings.
 白金成形物の表面にイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金からなる被覆層を設けたことを特徴とする表面が硬化された白金成形物。 A platinum molded article having a cured surface, wherein a coating layer made of iridium, ruthenium, or an alloy containing at least one of iridium or ruthenium is provided on the surface of the platinum molded article.  前記白金成形物の表面は、圧力容器の内筒の内表面若しくは外表面のいずれか一方又は両方、圧力容器の本体に収容される種結晶取り付け用の棚の全表面、圧力容器の開口部に設けられたフランジの少なくともシール箇所となる部分の表面又はるつぼの内表面若しくは外表面のいずれか一方又は両方であることを特徴とする請求項11に記載の表面が硬化された白金成形物。 The surface of the platinum molded article is either one or both of the inner surface and the outer surface of the inner tube of the pressure vessel, the entire surface of the shelf for attaching a seed crystal accommodated in the main body of the pressure vessel, and the opening of the pressure vessel. The surface-cured platinum molded product according to claim 11, which is at least one of or both of a surface of a portion to be a sealing portion of a provided flange, an inner surface or an outer surface of a crucible.  前記白金成形物の厚さが、0.2~1.0mmであることを特徴とする請求項11又は12に記載の表面が硬化された白金成形物。 The platinum molded product with a hardened surface according to claim 11 or 12, wherein the platinum molded product has a thickness of 0.2 to 1.0 mm.  前記被覆層の厚さが、1~30μmであることを特徴とする請求項11~13のいずれか一つに記載の表面が硬化された白金成形物。 The platinum molded product with a hardened surface according to any one of claims 11 to 13, wherein the coating layer has a thickness of 1 to 30 µm.  前記白金成形物の白金元素と前記被覆層に含まれる金属元素とが拡散していることを特徴とする請求項11~14のいずれか一つに記載の表面が硬化された白金成形物。 15. The platinum molded product with a hardened surface according to claim 11, wherein the platinum element of the platinum molded product and the metal element contained in the coating layer are diffused.  前記被覆層の一部の領域又は全部の領域において前記被覆層の少なくとも表面側がイリジウム、ルテニウム又はイリジウム若しくはルテニウムの少なくとも一種を含む合金の窒化処理層であることを特徴とする請求項11~15のいずれか一つに記載の表面が硬化された白金成形物。 The nitriding layer of an alloy containing at least one kind of iridium, ruthenium, or iridium or ruthenium in at least the surface side of the coating layer in a partial region or the entire region of the coating layer. A platinum molded article having the surface according to any one of which is cured.  前記窒化処理層の厚さが、1~30μmであることを特徴とする請求項16に記載の表面が硬化された白金成形物。 The surface-cured platinum molded product according to claim 16, wherein the nitriding layer has a thickness of 1 to 30 µm.
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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1123374A (en) * 1997-06-27 1999-01-29 Tokyo Electron Ltd Thermometer for heat treatment furnace
JP2002060296A (en) * 2000-08-21 2002-02-26 Crystal System:Kk Crucible for single crystal production, single crystal production apparatus and single crystal production method using the same
JP2005154805A (en) * 2003-11-21 2005-06-16 Furuya Kinzoku:Kk Corrosion resistant material
JP2005154818A (en) * 2003-11-25 2005-06-16 Furuya Kinzoku:Kk Corrosion resistant material and method for producing the same
JP2006002248A (en) * 2004-05-18 2006-01-05 Kuwayama Corp Hardened platinum ornaments
JP2008162819A (en) * 2006-12-27 2008-07-17 Mitsubishi Chemicals Corp Halogenated gallium pentaammonate, method for producing the same, and method for producing gallium nitride single crystal

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH1123374A (en) * 1997-06-27 1999-01-29 Tokyo Electron Ltd Thermometer for heat treatment furnace
JP2002060296A (en) * 2000-08-21 2002-02-26 Crystal System:Kk Crucible for single crystal production, single crystal production apparatus and single crystal production method using the same
JP2005154805A (en) * 2003-11-21 2005-06-16 Furuya Kinzoku:Kk Corrosion resistant material
JP2005154818A (en) * 2003-11-25 2005-06-16 Furuya Kinzoku:Kk Corrosion resistant material and method for producing the same
JP2006002248A (en) * 2004-05-18 2006-01-05 Kuwayama Corp Hardened platinum ornaments
JP2008162819A (en) * 2006-12-27 2008-07-17 Mitsubishi Chemicals Corp Halogenated gallium pentaammonate, method for producing the same, and method for producing gallium nitride single crystal

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