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WO2011112008A3 - 결정성 산화세륨 및 이의 제조 방법 - Google Patents

결정성 산화세륨 및 이의 제조 방법 Download PDF

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Publication number
WO2011112008A3
WO2011112008A3 PCT/KR2011/001641 KR2011001641W WO2011112008A3 WO 2011112008 A3 WO2011112008 A3 WO 2011112008A3 KR 2011001641 W KR2011001641 W KR 2011001641W WO 2011112008 A3 WO2011112008 A3 WO 2011112008A3
Authority
WO
WIPO (PCT)
Prior art keywords
cerium oxide
crystalline cerium
preparing same
predetermined range
crystalline
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2011/001641
Other languages
English (en)
French (fr)
Other versions
WO2011112008A2 (ko
Inventor
최상순
조승범
하현철
곽익순
조준연
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LG Chem Ltd
Original Assignee
LG Chem Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LG Chem Ltd filed Critical LG Chem Ltd
Priority to EP11753613.6A priority Critical patent/EP2546198A4/en
Priority to JP2012556979A priority patent/JP2013522151A/ja
Priority to CN201180023381.XA priority patent/CN102884002B/zh
Publication of WO2011112008A2 publication Critical patent/WO2011112008A2/ko
Publication of WO2011112008A3 publication Critical patent/WO2011112008A3/ko
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/20—Compounds containing only rare earth metals as the metal element
    • C01F17/206—Compounds containing only rare earth metals as the metal element oxide or hydroxide being the only anion
    • C01F17/224—Oxides or hydroxides of lanthanides
    • C01F17/235—Cerium oxides or hydroxides
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1454—Abrasive powders, suspensions and pastes for polishing
    • C09K3/1463—Aqueous liquid suspensions
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B82—NANOTECHNOLOGY
    • B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
    • B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/10—Preparation or treatment, e.g. separation or purification
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01F—COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM, CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THE RARE-EARTH METALS
    • C01F17/00—Compounds of rare earth metals
    • C01F17/20—Compounds containing only rare earth metals as the metal element
    • C01F17/247—Carbonates
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09K—MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FOR ELSEWHERE
    • C09K3/00—Materials not provided for elsewhere
    • C09K3/14—Anti-slip materials; Abrasives
    • C09K3/1409—Abrasive particles per se
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/60—Compounds characterised by their crystallite size
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2002/00—Crystal-structural characteristics
    • C01P2002/70—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data
    • C01P2002/72—Crystal-structural characteristics defined by measured X-ray, neutron or electron diffraction data by d-values or two theta-values, e.g. as X-ray diagram
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/01—Particle morphology depicted by an image
    • C01P2004/03—Particle morphology depicted by an image obtained by SEM
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C01P2004/38—Particle morphology extending in three dimensions cube-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/30—Particle morphology extending in three dimensions
    • C01P2004/39—Particle morphology extending in three dimensions parallelepiped-like
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/51—Particles with a specific particle size distribution
    • C01P2004/52—Particles with a specific particle size distribution highly monodisperse size distribution
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/62—Submicrometer sized, i.e. from 0.1-1 micrometer
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
    • C01P2004/00—Particle morphology
    • C01P2004/60—Particles characterised by their size
    • C01P2004/64—Nanometer sized, i.e. from 1-100 nanometer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/29—Coated or structually defined flake, particle, cell, strand, strand portion, rod, filament, macroscopic fiber or mass thereof
    • Y10T428/2982—Particulate matter [e.g., sphere, flake, etc.]

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Nanotechnology (AREA)
  • Inorganic Chemistry (AREA)
  • Geology (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Composite Materials (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • Compounds Of Alkaline-Earth Elements, Aluminum Or Rare-Earth Metals (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)

Abstract

본 발명은 결정 구조, 형상 및 크기 등이 용이하게 조절될 수 있고, 우수한 연마 특성을 나타낼 수 있으며, 단순한 공정을 통하여 경제적이고 효율적으로 제조 될 수 있는 결정성 산화세륨 및 이의 제조 방법에 관한 것이다. 상기 결정성 산화세륨은 일정 범위의 부피 평균 입경 및 입경의 표준 편차를 갖는 서브마이크론 결정성 산화세륨으로 될 수 있다.
PCT/KR2011/001641 2010-03-09 2011-03-09 결정성 산화세륨 및 이의 제조 방법 Ceased WO2011112008A2 (ko)

Priority Applications (3)

Application Number Priority Date Filing Date Title
EP11753613.6A EP2546198A4 (en) 2010-03-09 2011-03-09 CRYSTALLINE CERIUM OXIDE AND PROCESS FOR PREPARING THE SAME
JP2012556979A JP2013522151A (ja) 2010-03-09 2011-03-09 結晶性酸化セリウム及びその製造方法
CN201180023381.XA CN102884002B (zh) 2010-03-09 2011-03-09 晶体氧化铈及其制备方法

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
KR20100021004 2010-03-09
KR10-2010-0021004 2010-03-09
KR10-2011-0020559 2011-03-08
KR1020110020559A KR101075966B1 (ko) 2010-03-09 2011-03-08 결정성 산화세륨 및 이의 제조 방법

Publications (2)

Publication Number Publication Date
WO2011112008A2 WO2011112008A2 (ko) 2011-09-15
WO2011112008A3 true WO2011112008A3 (ko) 2012-01-12

Family

ID=44954040

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2011/001641 Ceased WO2011112008A2 (ko) 2010-03-09 2011-03-09 결정성 산화세륨 및 이의 제조 방법

Country Status (6)

Country Link
US (1) US8703085B2 (ko)
EP (1) EP2546198A4 (ko)
JP (2) JP2013522151A (ko)
KR (1) KR101075966B1 (ko)
CN (1) CN102884002B (ko)
WO (1) WO2011112008A2 (ko)

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KR102123906B1 (ko) * 2012-05-25 2020-06-17 닛산 가가쿠 가부시키가이샤 웨이퍼용 연마액 조성물
CN106029572B (zh) * 2013-12-16 2018-03-20 罗地亚经营管理公司 氧化铈颗粒的液体悬浮液
JP2015120844A (ja) * 2013-12-24 2015-07-02 旭硝子株式会社 研磨剤の製造方法、研磨方法および半導体集積回路装置の製造方法
CN106915760B (zh) * 2015-12-28 2021-04-30 安集微电子科技（上海）股份有限公司 一种氧化铈的制备方法及其在sti抛光领域的应用
CN106915761B (zh) * 2015-12-28 2021-04-30 安集微电子科技（上海）股份有限公司 一种氧化铈制备方法及其在sti化学机械抛光中的应用
FR3059660B1 (fr) * 2016-12-02 2019-03-15 Rhodia Operations Suspension d'oxyde de cerium
CN110214126A (zh) * 2016-12-02 2019-09-06 罗地亚经营管理公司 氧化铈的悬浮液
JP6473851B2 (ja) * 2017-01-31 2019-02-20 三井金属鉱業株式会社 成形体
IL292956A (en) * 2019-11-26 2022-07-01 Rhodia Operations Liquid and powder dispersion of cerium-based core-shell particles, process for their production and use in polishing
KR102261151B1 (ko) * 2020-02-27 2021-06-07 비드오리진(주) 표면 돌기가 형성된 구형 무기 입자 및 그 제조 방법
CN115974127B (zh) * 2022-11-25 2025-01-03 深圳市聚芯半导体材料有限公司 类球形纳米二氧化铈及其悬浮液、制备方法和应用

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JP2004168639A (ja) * 2002-10-28 2004-06-17 Nissan Chem Ind Ltd 酸化セリウム粒子及び加湿焼成による製造方法
KR20050018975A (ko) * 1997-12-18 2005-02-28 히다치 가세고교 가부시끼가이샤 연마제
JP2008260673A (ja) * 2007-03-20 2008-10-30 National Institute For Materials Science 希土類元素をドープしたセリア焼結体とその製造方法
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Publication number Priority date Publication date Assignee Title
KR20050018975A (ko) * 1997-12-18 2005-02-28 히다치 가세고교 가부시끼가이샤 연마제
JP2004168639A (ja) * 2002-10-28 2004-06-17 Nissan Chem Ind Ltd 酸化セリウム粒子及び加湿焼成による製造方法
KR20090064566A (ko) * 2006-10-09 2009-06-19 로디아 오퍼레이션스 세륨 옥시드 입자의 액체 현탁액 및 분말, 이의 제조 방법 및 연마에서의 이의 용도
JP2008260673A (ja) * 2007-03-20 2008-10-30 National Institute For Materials Science 希土類元素をドープしたセリア焼結体とその製造方法

Also Published As

Publication number Publication date
CN102884002B (zh) 2015-05-06
US8703085B2 (en) 2014-04-22
US20120000137A1 (en) 2012-01-05
JP5836472B2 (ja) 2015-12-24
WO2011112008A2 (ko) 2011-09-15
KR20110102230A (ko) 2011-09-16
EP2546198A2 (en) 2013-01-16
EP2546198A4 (en) 2015-09-16
KR101075966B1 (ko) 2011-10-21
JP2015110513A (ja) 2015-06-18
JP2013522151A (ja) 2013-06-13
CN102884002A (zh) 2013-01-16

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