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WO2011099550A1 - Elément optique et système optique - Google Patents

Elément optique et système optique Download PDF

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Publication number
WO2011099550A1
WO2011099550A1 PCT/JP2011/052848 JP2011052848W WO2011099550A1 WO 2011099550 A1 WO2011099550 A1 WO 2011099550A1 JP 2011052848 W JP2011052848 W JP 2011052848W WO 2011099550 A1 WO2011099550 A1 WO 2011099550A1
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Prior art keywords
optical
waveguide
optical element
component
refractive index
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Japanese (ja)
Inventor
政俊 林
桂 大滝
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Nikon Corp
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Nikon Corp
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1866—Transmission gratings characterised by their structure, e.g. step profile, contours of substrate or grooves, pitch variations, materials
    • G02B5/1871—Transmissive phase gratings
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/18—Diffraction gratings
    • G02B5/1814—Diffraction gratings structurally combined with one or more further optical elements, e.g. lenses, mirrors, prisms or other diffraction gratings
    • G02B5/1819—Plural gratings positioned on the same surface, e.g. array of gratings
    • G02B5/1823—Plural gratings positioned on the same surface, e.g. array of gratings in an overlapping or superposed manner

Definitions

  • the present invention relates to an optical element and an optical system.
  • This application claims priority based on Japanese Patent Application No. 2010-030435 filed in Japan on February 15, 2010, the contents of which are incorporated herein by reference.
  • a diffraction element in which a relief pattern having a sawtooth cross-section is formed is widely used.
  • this type of diffractive element optical performance deteriorates due to the flare light generated at the edge of the relief pattern, and therefore various contrivances have been made to suppress the generation of flare light and the adverse effects of flare light (for example, patents).
  • the present invention has been made in view of the above-described problems of the prior art, and an object thereof is to provide an optical element with reduced flare light.
  • the optical element according to the first aspect of the present invention includes an optical member having a lattice interface on which a relief pattern is formed.
  • a waveguide made of an optical material having a refractive index higher than that of the optical member is formed on a cliff surface substantially parallel to the optical axis of the optical element among the surfaces constituting the relief pattern.
  • the optical element according to the second aspect of the present invention is laminated with a first optical member having a lattice interface on which a relief pattern is formed, in close contact with or close to the lattice interface of the first optical member. And a second optical member.
  • a cliff surface substantially parallel to the optical axis of the optical element is made of an optical material having a higher refractive index than the first optical member and the second optical member.
  • a waveguide is formed.
  • an optical element with reduced flare light can be provided.
  • FIG. 1 is a partial cross-sectional view showing an optical element 10 according to an embodiment of the first aspect of the present invention.
  • the optical element 10 is a single-layer diffractive optical element (single-layer DOE (Diffractive Optical Elements)).
  • the optical element 10 includes an optical member 10A made of a transparent optical material, and one main surface (the upper surface in the drawing) of the optical member 10A is a lattice interface 11 on which a relief pattern having a sawtooth cross section is formed. .
  • the grating interface 11 is formed with a plurality of inclined surfaces 11a formed to be inclined with respect to the optical axis direction of the incident light L, and a plurality of ridges having a triangular cross section along with the inclined surfaces 11a.
  • a plurality of cliff surfaces 11b formed as surfaces substantially parallel to the axial direction are formed.
  • the relief pattern is formed by alternately arranging the inclined surface 11a and the cliff surface 11b.
  • the waveguide 12 having a uniform width (thickness) is formed on the cliff surface 11b at any position in the direction along the optical axis of the incident light L.
  • the waveguide 12 is formed on the cliff surface 11b, the diffraction efficiency can be increased and diffracted light (flare light) other than the designed order can be reduced.
  • the optical element 10 of the present embodiment will be described in comparison with a conventional optical element.
  • FIG. 2 is a graph showing the result of calculating the diffraction efficiency of the optical element 10 shown in FIG. 1 by the RCWA (Rigorous Coupled Wave Analysis) method.
  • the incident light L was a TE (Transverse Electric) plane wave having a wavelength of 0.55 ⁇ m.
  • the calculation is made on the assumption that the incident light L is emitted from the inside of the optical member 10A through the lattice interface 11 to the outside.
  • the diffraction efficiency it is necessary to consider the light incident on the optical member 10A from the air.
  • the diffraction efficiency when the refractive index ng and the width W1 of the waveguide 12 are changed is completely compared. I left it out to simplify the calculation because it had no effect.
  • the horizontal axis of the graph shown in FIG. 2 corresponds to the width W1 of the waveguide 12, and the vertical axis corresponds to the first-order diffraction efficiency.
  • FIG. 2 also shows 10 curves showing changes in diffraction efficiency with respect to the width W1 of the waveguide 12 when ⁇ n is changed in increments of 0.02 in the range of 0.02 to 0.2. Yes.
  • the first-order diffraction efficiency when the width W1 of the waveguide 12 is 0 (zero) corresponds to the first-order diffraction efficiency of an optical element having a conventional configuration that does not include the waveguide 12.
  • FIG. 9 is a partial sectional view showing a conventional optical element.
  • a conventional optical element 1000 shown in FIG. 9 is a single-layer DOE composed of an optical member 1000A having a lattice interface 11 formed on one surface.
  • the optical element 1000 is usually used only at a single wavelength with optimized diffraction efficiency.
  • the grating height H is set so that the diffraction efficiency of the primary light L1 is highest at a wavelength of 0.55 ⁇ m.
  • the grating height H ( ⁇ m) for obtaining the optimum first-order diffraction efficiency at the wavelength ⁇ ( ⁇ m) is the refractive index of the optical member 1000A.
  • the first-order diffraction efficiency according to the scalar calculation of the above formula is 100%, but this is valid only when the grating period (grating pitch P shown in FIG. 9) is sufficiently large. Assuming the use in the visible light region, the deviation from the strict calculation with respect to the scalar calculation starts to be noticeable when the grating pitch P is in the range of 100 ⁇ m or less or 50 ⁇ m or less. In particular, when the grating pitch P is reduced to about 10 ⁇ m, the maximum diffraction efficiency is reduced to about 90%.
  • FIG. 10 is a graph showing a calculation result of diffraction efficiency by the RCWA method when the incident light L is 0.55 ⁇ m in wavelength, the grating pitch P is 10 ⁇ m, and the refractive index nb is 1.5.
  • the horizontal axis of the graph shown in FIG. 10 corresponds to the grating height H, and the vertical axis corresponds to the first-order diffraction efficiency.
  • the grating height H at which the optimum first-order diffraction efficiency is obtained under the above conditions is 1.1 ⁇ m, and the maximum diffraction efficiency at that time is about 91.3%.
  • the first-order diffraction efficiency is not 100%.
  • the grating height H deviates from the optimum value 1.1 ⁇ m the first-order diffraction efficiency is greatly reduced.
  • the optical element 10 according to the present embodiment is suitable for all conditions in which the refractive index of the waveguide 12 is changed by appropriately selecting the width W1 of the waveguide 12. 1st diffraction efficiency higher than the maximum diffraction efficiency (91.3%) of the optical element 1000 can be obtained.
  • the diffraction efficiency is about 93.5% when the width W1 of the waveguide 12 is about 0.2 ⁇ m.
  • the refractive index difference ⁇ n (that is, the refractive index ng, na) between the waveguide 12 and the optical member 10A and the width W1 of the waveguide 12 are appropriately selected. With this configuration, it is possible to obtain a diffraction efficiency that exceeds that of the conventional optical element 1000 that does not include the waveguide 12.
  • the optical element 10 of the present embodiment can obtain a higher diffraction efficiency than the conventional optical element 1000 for the following reason.
  • the above results shown in FIGS. 2 and 10 are knowledge obtained only when the electromagnetic field is calculated by vector calculation (RCWA method in the present embodiment), and therefore it is difficult to explain based on geometrical differences. . However, it is probably related to the disturbance of the electromagnetic field at the cliff portion of the relief pattern, which is the cause of the diffraction efficiency falling below the scalar value.
  • the grating height is not included in the parameters. This is because it is assumed that the phase is smoothly switched at the joint of each grating. However, there is actually a phase disturbance in this part. Therefore, only when the grating pitch is sufficiently large with respect to the wavelength, the scalar calculation of the diffraction efficiency is valid. As the lattice pitch decreases, the number of relief pattern cliffs per unit area increases, and the ratio of disturbance of the electromagnetic field by the cliffs increases. If the disturbance of the electromagnetic field becomes a magnitude that cannot be ignored, the diffraction efficiency will be less than 100%. The reason why the maximum value of the diffraction efficiency is about 90% when the grating pitch is as small as about 10 ⁇ m is considered to be largely due to the phase disturbance of the cliff portion of the relief pattern.
  • the waveguide 12 by providing the waveguide 12 at the cliff portion of the relief pattern where the electromagnetic field is disturbed, the light passing just outside the cliff surface 11b is confined in the waveguide 12. Then, the light confined in the waveguide 12 travels in substantially the same phase as the light traveling toward the inclined surface 11a in the convex portion of the relief pattern, and is output as a substantially spherical wave from the tip of the waveguide 12. .
  • the edge part of a relief pattern the phase on either side of this edge part can be connected smoothly. As a result, it is considered that the diffraction efficiency can be improved.
  • the next diffraction efficiency changes greatly.
  • the first-order diffraction efficiency can be prevented from changing (decreasing) rapidly even if an error occurs in the width W1 of the waveguide 12 by reducing the refractive index difference ⁇ n. For example, as shown in FIG.
  • the change in diffraction efficiency is within a range of ⁇ 0.5% from the peak value compared to the case where the refractive index difference ⁇ n is 0.2.
  • the allowable range of the width W1 is about double.
  • the width W1 of the waveguide 12 can be controlled with sufficient accuracy, a very high diffraction efficiency can be obtained by increasing the refractive index difference ⁇ n.
  • FIG. 3 is a cross-sectional view showing the optical element of the present embodiment.
  • the optical element 20 shown in FIG. 3 is a contact multilayer type DOE.
  • the optical element 20 has an optical member 20A, which is a lattice interface 11 having a relief pattern with a sawtooth cross section on one main surface (illustrated upper surface), and a second optical element formed in close contact with the lattice interface 11 of the optical member 20A. And a member 20B.
  • the grating interface 11 has a plurality of inclined surfaces 11a formed to be inclined with respect to the optical axis direction of the incident light L, and a plurality of ridges having a triangular cross section along with the inclined surfaces 11a.
  • a plurality of cliff surfaces 11b formed as surfaces substantially parallel to the direction are formed.
  • the relief pattern is formed by alternately arranging the inclined surface 11a and the cliff surface 11b.
  • a waveguide 12 having a uniform width (thickness) is formed on the cliff surface 11b at any position in the direction along the optical axis of the incident light L.
  • the contact multilayer DOE when vector calculation using the RCWA method is performed, disturbance of the electromagnetic field is observed at the cliff portion of the relief pattern. Therefore, even if the refractive index n1 of the first optical member 20A and the refractive index n2 of the second optical member 20B are optimized, the first-order diffraction efficiency is 90 when the grating pitch is 20 ⁇ m and the grating height is 25 ⁇ m, for example. % Is the maximum. In the scalar calculation, the diffraction efficiency when the wavelength is optimized is 100%. This is because the lattice height is not included in the parameters in the scalar calculation.
  • the optical material constituting the first optical member 20A and the optical material constituting the second optical member 20B are extremely reduced in refractive index dispersion. A good combination is required. Further, when the grating height is reduced, the influence of height variation is increased, and there is a concern that the diffraction efficiency largely fluctuates due to manufacturing errors. On the other hand, the optical element 20 of the present embodiment can obtain a higher diffraction efficiency than the conventional optical element without excessively reducing the grating height H2 due to the action of the waveguide 12.
  • the optical element 20 was verified with respect to the relationship between the configuration (width W2, refractive index ng) of the waveguide 12 and the diffraction efficiency when the optical element 20 was configured using a glass material.
  • the optical element 20 was composed of the materials shown in Table 1 below.
  • N-SF2 (trade name) shown in Table 1 is a low refractive index and high dispersion material
  • N-BAF10 trade name
  • the refractive index of each wavelength for calculating the diffraction efficiency was calculated using the following Cermeier dispersion formula using the constants of the dispersion formula disclosed by Schott.
  • the grating pitch P2 of the optical element 20 was 20 ⁇ m.
  • the grating height H2 was optimized at a wavelength of 0.62 ⁇ m. That is, from the refractive index difference ⁇ n 620 at a wavelength of 0.62 ⁇ m between the optical material (N-SF2) constituting the first optical member 20A and the optical material (N-BAF10) constituting the second optical member 20B, A height corresponding to the blaze condition at a wavelength of 0.62 ⁇ m was calculated and used. The calculation formula is shown below.
  • FIG. 11 is a diagram showing a contact multilayer DOE in which the second optical member 2000B is formed in close contact with the lattice interface 11 of the first optical member 2000A.
  • the same conditions were set for the conventional optical element 2000 shown in FIG. 11 except that the waveguide 12 was not provided.
  • the grating pitch is 20 ⁇ m
  • the grating height is 26.9095 ⁇ m
  • the optical material constituting the first optical member 20A is N-SF2 (refractive index 1.64481)
  • the optical material constituting the second optical member 20B is used.
  • N-BAF10 reffractive index: 1.667785 was used.
  • the calculation was performed by the RCWA method with the incident light as the TE plane wave (wavelength 0.62 ⁇ m) and the wavelength range of the incident light as the visible light range (0.42 to 0.75 ⁇ m).
  • the diffraction efficiency inside the optical member 20B (2000B) was calculated.
  • the light incident on the first optical member 20A (2000A) from the outside of the first optical member 20A (2000A) and the light emitted from the second optical member 20B (2000B) to the outside.
  • it is necessary to consider the light beam to be used it is omitted here because it does not affect the comparison of diffraction efficiency when the configuration of the waveguide 12 is changed.
  • FIG. 4 is a graph showing the relationship between the width W2 of the waveguide 12 and the first-order diffraction efficiency obtained by calculation.
  • FIG. 5 is a graph showing the relationship between the wavelength of the incident light L and the first-order diffraction efficiency.
  • the waveguide width W2 is in the range of 0.6 ⁇ m to 0.8 ⁇ m, it stably exceeds the diffraction efficiency of the conventional optical element 2000 in all wavelength regions.
  • FIG. 6 shows 1 when the waveguide width W2 is fixed to 0.8 ⁇ m and the refractive index difference ⁇ n between the waveguide 12 and the second optical member 20B is changed in the range of 0 to 0.1. It is a graph which shows the result of having calculated the change of the next diffraction efficiency by RCWA method about TE plane wave.
  • the waveguide width W2 is fixed at 0.8 ⁇ m and the refractive index of the waveguide 12 is gradually increased from the refractive index of the second optical member 20B, first, the refractive index difference ⁇ n is 0.
  • the first-order diffraction efficiency has a maximum value at a position M1 near .008.
  • the first-order diffraction efficiency rapidly decreases. This is because the phase of the light traveling inside the waveguide 12 is shifted from the phase of the light traveling outside the waveguide 12, so that disturbance of the electromagnetic field occurs at the tip of the waveguide 12 (the edge portion of the relief pattern). It is believed that there is.
  • the refractive index difference ⁇ n is further increased, the first-order diffraction efficiency starts to increase around the refractive index difference ⁇ n exceeding 0.025, and takes the local maximum again at the position M2 where ⁇ n is near 0.04. .
  • the first-order diffraction efficiency at the position M2 is also higher than the diffraction efficiency of the conventional optical element 2000. This is because the phase of the light traveling in the waveguide 12 and the phase of the light traveling outside the waveguide 12 are aligned because the phase is shifted by 2 ⁇ from the first maximum position M1.
  • FIG. 7 is a graph in which the calculation result shown in FIG. 6 is plotted with the horizontal axis converted into a phase shift amount.
  • the amount of phase shift means a phase difference generated between light traveling in the waveguide 12 and light traveling in the second optical member 20B.
  • the position where the phase shift amount is 0 is a case where the effective refractive index of the waveguide 12 matches the refractive index of the second optical member 20B, and the fundamental mode of the slab waveguide is established. It corresponds to a point. Since the peak of the first-order diffraction efficiency shown in FIG. 7 is shifted by 2 ⁇ , it can be understood that the condition of the waveguide 12 is allowed even if the phase is shifted by 2 ⁇ ⁇ N (N: natural number). . Further, the phase shift amount from the position where the diffraction efficiency takes the maximum value is allowed to be about ⁇ 0.25 ⁇ to ⁇ 0.4 ⁇ .
  • the high diffraction efficiency is obtained with respect to the conventional multi-layer DOE because of the same reason as in the first embodiment. That is, light in the vicinity of the cliff portion is confined by the waveguide 12 formed on the cliff portion of the relief pattern, and the phase is smoothly connected at the edge portion of the relief pattern by emitting the light as a substantially spherical wave from the tip of the waveguide 12. be able to. As a result, it is considered that the diffraction efficiency can be improved.
  • [Modification] 8A and 8B are diagrams showing a modification of the optical element 20 of the present embodiment.
  • 8A corresponds to the first modification
  • FIG. 8B corresponds to the second modification.
  • Each of the optical element 201 and the optical element 202 shown in FIGS. 8A and 8B has a high refractive index layer 121 formed so as to cover the lattice interface 11 of the first optical member 20A.
  • the high refractive index layer 121 is formed using an optical material having a higher refractive index than either of the first optical member 20A and the second optical member 20B, similarly to the waveguide 12 in the optical element 20 of the above embodiment. ing.
  • the difference between the optical element 201 and the optical element 202 is only the configuration of the lattice interface 11, and the optical element 201 is used for the light L incident perpendicularly to the optical element 201, whereas the optical element 201 is optical.
  • the element 202 is used for light L incident on the optical element 202 from an oblique direction. Therefore, in the optical element 202, the cliff surface 11b of the lattice interface 11 is formed as an inclined surface that intersects the normal direction (vertical direction in the figure) of the horizontal plane 202a in the optical element 202.
  • the relationship between the incident light L and the cliff 11b in the optical element 202 is the same as that of the optical element 201, and the cliff 11b is formed substantially parallel to the optical axis of the incident light L.
  • the high refractive index layer 121 is formed on the cliff surface 11b, so that the effect of increasing the diffraction efficiency and reducing the flare light as in the previous embodiment. Obtainable.
  • the high refractive index layer 121 is covered with the high refractive index layer 121.
  • the high refractive index layer 121 on the inclined surface 11a. The portion formed in does not affect the optical characteristics of the optical elements 201 and 202. This is because this portion only gives a uniform phase difference to the light transmitted through the high refractive index layer 121, so that it is the same as no change when viewed from the whole optical element.
  • an element in which the optical member 20B is an air layer can be configured.
  • the refractive index difference between the high refractive index layer 121 and the air layer is between the optical member 20A and the air layer. Therefore, the reflection loss may increase due to the formation of the high refractive index layer 121 on the inclined surface 11a.
  • an appropriate antireflection film may be provided in consideration of the refractive index and film thickness of the high refractive index layer 121 on the inclined surface 11a.
  • the base material is a glass material
  • the configuration of the above embodiment and the modified example includes two types as disclosed in International Publication No. WO2006 / 068137.
  • the present invention can also be applied to a contact multilayer DOE made of a resin.
  • the refractive index ng and the width of the high refractive index member (waveguide 12) added to the side surface of the grating are Wg.
  • wavefronts separated by the grating after passing through the grating are well joined, so that energy is concentrated and diffracted in a specific direction. As is well known, this condition is represented by the following formula (1).
  • the wavefront is disturbed during wavefront propagation because the refractive index differs between the left and right sides of the grating side surface. This can be interpreted as it is scattered on the grating side surface and the wavefront spreads. As a result, the wavefront does not succeed after the grating is transmitted, and the diffraction efficiency is lower than the value predicted from an ideal blazed grating.
  • a high refractive index member to the side surface of the blazed grating and confining light by this waveguide structure, it becomes possible to suppress wavefront disturbance due to scattering and to suppress a decrease in diffraction efficiency. Consider the light confinement conditions necessary for this.
  • conditional expressions (2) and (3) for the TE mode are the following conditional expressions (2) and (3) for the TE mode, and the following conditional expressions (4) and (5) for the TM mode: (See the following document). (Reference) A. Yariv Quantum Electronics, 2nd ed. P512
  • n eff corresponds to the effective refractive index of the high refractive index member (waveguide) on the side surface of the grating. If the waveguide width Wg is made wider than W in this equation, light can be confined. That is, the waveguide width Wg according to the aspect of the present invention is expressed by Expression (6) and Expression (7) for each of the TE wave and the TM wave.
  • the intensity ratio of the TE component of the polarization component is ⁇
  • the intensity ratio of the TM component is ⁇
  • the intensity ratio of the non-polarization component is 1 ⁇ (where ⁇ + ⁇ ⁇ 1)
  • the waveguide thickness Wg may be obtained by the following equations (8) and (9).
  • Equation (8) the contribution of the TE component to Wg is ⁇ W TE
  • the contribution of the TM component is ⁇ W TM
  • the contribution of the non-polarization component is ⁇ (W TE + W TM ) / 2 ⁇ ⁇ (1 ⁇ ).
  • Wg should be as small as possible within the range satisfying the confinement conditions. In the conditions where Wg is the smallest in the equations (6), (7), and (9), that is, in the conditions where the equal sign is established in each equation. Efficiency is highest.
  • phase matching conditions a condition in which the wavefronts of the waveguide and the wavefronts transmitted through the medium 1 and the medium 2 are substantially in phase.
  • the conditions for aligning the phases of the TE wave are to use the effective refractive index n eff, TE obtained by solving equations (2) and (3) simultaneously, where H is the grating height, and n is large in n 1 and n 2 .
  • H the effective refractive index
  • phase matching conditions of the aspect of the present invention relating to the TE wave and TM wave are expressed by the following formula (12), respectively. It is represented by (13).
  • phase matching condition of the aspect of the present invention relating to general light including partially polarized light is expressed by the equation (14) similarly to the equation (8) based on the above discussion.
  • each peak is not pinpoint but has a width.
  • the default efficiency value efficiency value when no highly refractive member is not provided
  • optical elements described in each embodiment are used for an optical system of a projection apparatus (stepper, liquid crystal projector, etc.), an optical system of a photographing apparatus (camera, etc.), and an optical system of an observation apparatus (microscope, binoculars, etc.). In any optical system, the effect of reducing flare light can be obtained.
  • an optical element with reduced flare light can be provided.
  • Optical element 10A Optical member 11 Lattice interface 11a Inclined surface 11b Cliff surface 12 Waveguide 20A First optical member 20B Second optical member

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Abstract

L'invention concerne un élément optique pourvu d'un organe optique ayant une interface de grille sur laquelle un motif en relief est formé. Un guide d'onde comprenant un matériau optique ayant un indice de réfraction plus élevé que ledit organe optique est formé sur les faces constituant le motif en relief susmentionné, lesquelles sont des faces verticales approximativement parallèles à l'axe optique de l'élément optique susmentionné.
PCT/JP2011/052848 2010-02-15 2011-02-10 Elément optique et système optique Ceased WO2011099550A1 (fr)

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JP2010030435 2010-02-15

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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257689A (ja) * 2010-06-11 2011-12-22 Canon Inc 回折光学素子、光学系および光学機器
JP2013125259A (ja) * 2011-12-16 2013-06-24 Canon Inc 回折光学素子、光学系および光学機器
JP2014170109A (ja) * 2013-03-04 2014-09-18 Canon Inc 回折光学素子、光学系および光学機器
JP2016218436A (ja) * 2015-05-15 2016-12-22 キヤノン株式会社 回折光学素子、光学系、および、光学機器
WO2018179164A1 (fr) * 2017-03-29 2018-10-04 キヤノン株式会社 Élément optique diffractif, système optique le comprenant, dispositif de capture d'image et dispositif de lentille
US10133084B2 (en) 2015-05-15 2018-11-20 Canon Kabushiki Kaisha Diffractive optical element, optical system, and optical apparatus which reduce generation of unnecessary light
JPWO2018074595A1 (ja) * 2016-10-21 2019-09-05 大日本印刷株式会社 積層体、冊子体
US10845516B2 (en) 2017-02-20 2020-11-24 Canon Kabushiki Kaisha Diffractive optical element
US10890698B2 (en) 2017-10-12 2021-01-12 Canon Kabushiki Kaisha Diffraction optical element, optical system, and imaging apparatus
US11656389B2 (en) 2018-08-09 2023-05-23 Canon Kabushiki Kaisha Diffractive optical element, optical apparatus using the same, and method for manufacturing diffractive optical element

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615067U (ja) * 1993-05-21 1994-02-25 大日本印刷株式会社 レリーフホログラム
JPH09127321A (ja) * 1994-09-12 1997-05-16 Olympus Optical Co Ltd 回折光学素子
JP2002507770A (ja) * 1998-03-13 2002-03-12 オーファオデー キネグラム アーゲー 透明及び半透明回折素子、特にホログラム並びにその作製方法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0615067U (ja) * 1993-05-21 1994-02-25 大日本印刷株式会社 レリーフホログラム
JPH09127321A (ja) * 1994-09-12 1997-05-16 Olympus Optical Co Ltd 回折光学素子
JP2002507770A (ja) * 1998-03-13 2002-03-12 オーファオデー キネグラム アーゲー 透明及び半透明回折素子、特にホログラム並びにその作製方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011257689A (ja) * 2010-06-11 2011-12-22 Canon Inc 回折光学素子、光学系および光学機器
JP2013125259A (ja) * 2011-12-16 2013-06-24 Canon Inc 回折光学素子、光学系および光学機器
US9285518B2 (en) 2011-12-16 2016-03-15 Canon Kabushiki Kaisha Diffractive optical element, optical system, and optical apparatus
JP2014170109A (ja) * 2013-03-04 2014-09-18 Canon Inc 回折光学素子、光学系および光学機器
US10133084B2 (en) 2015-05-15 2018-11-20 Canon Kabushiki Kaisha Diffractive optical element, optical system, and optical apparatus which reduce generation of unnecessary light
JP2016218436A (ja) * 2015-05-15 2016-12-22 キヤノン株式会社 回折光学素子、光学系、および、光学機器
JPWO2018074595A1 (ja) * 2016-10-21 2019-09-05 大日本印刷株式会社 積層体、冊子体
JP7003928B2 (ja) 2016-10-21 2022-01-21 大日本印刷株式会社 積層体、冊子体
US10845516B2 (en) 2017-02-20 2020-11-24 Canon Kabushiki Kaisha Diffractive optical element
WO2018179164A1 (fr) * 2017-03-29 2018-10-04 キヤノン株式会社 Élément optique diffractif, système optique le comprenant, dispositif de capture d'image et dispositif de lentille
JPWO2018179164A1 (ja) * 2017-03-29 2020-01-30 キヤノン株式会社 回折光学素子及びそれを有する光学系、撮像装置、レンズ装置
US10890698B2 (en) 2017-10-12 2021-01-12 Canon Kabushiki Kaisha Diffraction optical element, optical system, and imaging apparatus
US11656389B2 (en) 2018-08-09 2023-05-23 Canon Kabushiki Kaisha Diffractive optical element, optical apparatus using the same, and method for manufacturing diffractive optical element

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