[go: up one dir, main page]

WO2011074290A1 - 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン - Google Patents

遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン Download PDF

Info

Publication number
WO2011074290A1
WO2011074290A1 PCT/JP2010/064691 JP2010064691W WO2011074290A1 WO 2011074290 A1 WO2011074290 A1 WO 2011074290A1 JP 2010064691 W JP2010064691 W JP 2010064691W WO 2011074290 A1 WO2011074290 A1 WO 2011074290A1
Authority
WO
WIPO (PCT)
Prior art keywords
thermal
particle size
heat
particles
ceramic layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2010/064691
Other languages
English (en)
French (fr)
Inventor
鳥越　泰治
一郎 永野
岡田　郁生
敬三 塚越
一剛 森
井上　好章
上村　好古
芳史 岡嶋
金子　秀明
妻鹿　雅彦
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to KR1020147029285A priority Critical patent/KR20140129392A/ko
Priority to US13/387,206 priority patent/US9822437B2/en
Priority to JP2011546002A priority patent/JP5602156B2/ja
Priority to CN201080034127.5A priority patent/CN102471863B/zh
Priority to EP10837321.8A priority patent/EP2514850B1/en
Publication of WO2011074290A1 publication Critical patent/WO2011074290A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
    • C04B41/45—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements
    • C04B41/4505—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application
    • C04B41/4523—Coating or impregnating, e.g. injection in masonry, partial coating of green or fired ceramics, organic coating compositions for adhering together two concrete elements characterised by the method of application applied from the molten state ; Thermal spraying, e.g. plasma spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/32—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer
    • C23C28/321—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer
    • C23C28/3215—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one pure metallic layer with at least one metal alloy layer at least one MCrAlX layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
    • C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
    • C23C28/345—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer
    • C23C28/3455—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates with at least one oxide layer with a refractory ceramic layer, e.g. refractory metal oxide, ZrO2, rare earth oxides or a thermal barrier system comprising at least one refractory oxide layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/06—Metallic material
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying
    • C23C4/134—Plasma spraying
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/284—Selection of ceramic materials
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/286—Particular treatment of blades, e.g. to increase durability or resistance against corrosion or erosion
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01D—NON-POSITIVE DISPLACEMENT MACHINES OR ENGINES, e.g. STEAM TURBINES
    • F01D5/00—Blades; Blade-carrying members; Heating, heat-insulating, cooling or antivibration means on the blades or the members
    • F01D5/12—Blades
    • F01D5/28—Selecting particular materials; Particular measures relating thereto; Measures against erosion or corrosion
    • F01D5/288—Protective coatings for blades
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611—Oxide-containing component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12535—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.] with additional, spatially distinct nonmetal component
    • Y10T428/12611—Oxide-containing component
    • Y10T428/12618—Plural oxides
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12931—Co-, Fe-, or Ni-base components, alternative to each other
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12937—Co- or Ni-base component next to Fe-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12944—Ni-base component
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/12—All metal or with adjacent metals
    • Y10T428/12493—Composite; i.e., plural, adjacent, spatially distinct metal components [e.g., layers, joint, etc.]
    • Y10T428/12771—Transition metal-base component
    • Y10T428/12861—Group VIII or IB metal-base component
    • Y10T428/12951—Fe-base component
    • Y10T428/12972—Containing 0.01-1.7% carbon [i.e., steel]
    • Y10T428/12979—Containing more than 10% nonferrous elements [e.g., high alloy, stainless]

Definitions

  • the present invention relates to a method for manufacturing a thermal barrier coating having excellent durability, and more particularly to a method for manufacturing a ceramic layer used as a top coat of the thermal barrier coating.
  • Thermal barrier coating formed by laminating ceramic layers made of is used to protect a refractory metal substrate from high temperatures.
  • Comparison material ZrO 2 system as the ceramic layer in particular Y 2 O 3 in partially stabilized or fully stabilized a ZrO 2 YSZ (yttria-stabilized zirconia) is a relatively low thermal conductivity in the ceramic material It is often used because of its high coefficient of thermal expansion.
  • the inlet temperature of the turbine rises to a temperature exceeding 1500 ° C.
  • a turbine blade or stationary blade of a gas turbine is coated with a thermal barrier coating provided with the ceramic layer made of YSZ, a part of the ceramic layer is in operation during operation of the gas turbine under severe operating conditions exceeding 1500 ° C. May peel off and heat resistance may be impaired.
  • gas turbines with higher thermal efficiency have been developed due to environmental measures, and the turbine inlet temperature is considered to reach 1600 ° C to 1700 ° C.
  • the surface temperature of the turbine blades is as high as 1300 ° C. It is expected to be. Accordingly, the thermal barrier coating is required to have higher heat resistance and thermal barrier properties.
  • Patent Document 1 Yb 2 O 3 added ZrO 2
  • Patent Document 2 Dy 2 O 3 added ZrO 2
  • Patent Document 3 Er 2 O 3 -added ZrO 2
  • SmYbZrO 7 Patent Document 4
  • the ceramic layer is generally formed by thermal spraying using particles having an average particle diameter of 10 ⁇ m to 100 ⁇ m.
  • JP 2003-160852 A (Claim 1, paragraphs [0006], [0027] to [0030]) JP 2001-348655 A (claims 4 and 5, paragraphs [0010] to [0011], [0015]) JP 2003-129210 A (Claim 1, paragraphs [0013] and [0015]) JP 2007-270245 A (Claim 2, paragraphs [0028] to [0029] JP 2002-69607 A (claim 21, paragraphs [0053] [0054])
  • the heat shielding property can be improved by introducing pores into the ceramic layer.
  • the porosity in the ceramic layer can be controlled by adjusting the spraying conditions.
  • the upper limit of the porosity obtained by the thermal spraying method is about 10%. In order to improve the heat shielding property of the ceramic layer, increasing the porosity is effective.
  • the present invention has been made in view of the above-described problems, and has a high thermal barrier effect and a thermal barrier coating manufacturing method excellent in thermal cycle durability, and a turbine in which the thermal barrier coating is formed by the manufacturing method.
  • a member and a gas turbine are provided.
  • the present invention includes a step of forming a metal bonding layer on a heat-resistant alloy substrate, and a particle size distribution in which an integrated particle size of 10% is 30 ⁇ m or more and 150 ⁇ m or less on the metal bonding layer. And a method of forming a ceramic layer by spraying thermal spray particles having a thermal spray coating.
  • the spray particles have a maximum particle size of 150 ⁇ m or less, a particle having a particle size of 30 ⁇ m, 3% or less, and a particle having a particle size of 40 ⁇ m in a ratio of 8% or less.
  • the ceramic layer is formed using thermal spray particles mainly composed of relatively large particles by reducing the proportion of small-diameter particles as defined by the above-mentioned proportion.
  • An increase in the 10% cumulative particle size of the spray particles means that the proportion of particles having a small particle size contained in the spray particles is small.
  • the present invention provides a turbine member including a thermal barrier coating formed by the above manufacturing method, and a gas turbine including the turbine member. Since the thermal barrier coating produced according to the present invention has both high thermal barrier properties and thermal cycle durability, it can be applied to, for example, 1600 ° C. class gas turbine members.
  • a ceramic layer having a higher porosity than conventional ones can be formed, so that a thermal barrier coating with excellent thermal barrier properties can be obtained.
  • the fine layer defects are reduced, the durability of the thermal barrier coating can be improved.
  • 4 is a SEM photograph of a cross section of a ceramic layer using spray particles A.
  • 4 is a SEM photograph of a cross section of a ceramic layer using spray particles B. It is the image which displayed the layer defect in the SEM photograph of FIG. It is the image which displayed the layer defect in the SEM photograph of FIG.
  • FIG. 1 is a schematic cross-sectional view of a turbine member provided with a thermal barrier coating.
  • a metal bonding layer 12 and a ceramic layer 13 are sequentially formed as a thermal barrier coating on a heat-resistant alloy substrate 11 such as a moving blade or a stationary blade of a turbine.
  • the metal bonding layer 12 is an MCrAlY alloy (M represents a metal element such as Ni, Co, Fe, or a combination of two or more of these).
  • Examples of the ceramic layer 13 include YbSZ (ytterbia stabilized zirconia), YSZ (yttria stabilized zirconia), SmYbZr 2 O 7 , DySZ (dysprosia stabilized zirconia), ErSZ (erbia stabilized zirconia), and the like.
  • the ceramic layer of this embodiment is formed by an atmospheric pressure plasma spraying method.
  • the spray particles to be used have a particle size distribution on the metal bonding layer such that a 10% cumulative particle size is 30 ⁇ m or more and 150 ⁇ m or less.
  • FIG. 2 shows the thermal cycle durability of a thermal barrier coating in which a ceramic layer is formed using YbSZ sprayed particles having various accumulated particle sizes of 10%.
  • the horizontal axis represents the accumulated particle size 10% particle size (d 10 )
  • the vertical axis represents the temperature difference ⁇ T (relative value) applied to the ceramic layer in the thermal cycle durability test.
  • ⁇ T is defined as the difference between the highest surface heating temperature and the highest interface temperature that can withstand without being destroyed even if the number of thermal cycles exceeds 1000.
  • ⁇ T is an index representing the durability of the ceramic layer in the thermal cycle durability test, and it is determined that the durability is higher as ⁇ T is larger.
  • a heat-resistant alloy base material (trade name: IN-738LC) having a thickness of 5 mm was applied to a metal bonding layer (Ni: 32 mass%, Cr: 21% by mass, Al: 8% by mass, Y: 0.5% by mass, Co: balance) were used.
  • a spray gun (F4 gun) manufactured by Sulzer Metco was used. The spraying conditions are: spraying current: 600 (A), spraying distance: 150 (mm), powder supply amount: 60 (g / min), Ar / H 2 amount: 35 / 7.4 (l / min), film thickness : 0.5 (mm).
  • spraying current 600 (A)
  • spraying distance 150 (mm)
  • powder supply amount 60 (g / min)
  • Ar / H 2 amount 35 / 7.4 (l / min)
  • film thickness 0.5 (mm).
  • the 10% cumulative particle size is 30 ⁇ m or more, ⁇ T is 600 ° C. or more, and a ceramic layer having high thermal cycle durability can be obtained. That is, the thermal cycle durability is improved by using sprayed particles with a small particle size.
  • the 10% cumulative particle size exceeds 60 ⁇ m, the thermal cycle durability becomes almost constant.
  • the 10% cumulative particle size used in this embodiment is preferably 100 ⁇ m or less.
  • FIG. 3 shows the particle size distribution of YbSZ spray particles.
  • the horizontal axis represents the particle size and the vertical axis represents the frequency.
  • the spray particles A are classified using a 44 ⁇ m mesh sieve, and the spray particles having a small particle diameter are removed.
  • the thermal spray particle A has a maximum particle size of 150 ⁇ m or less, and contains particles having a particle size of 30 ⁇ m in a proportion of 1% or less and particles having a particle size of 40 ⁇ m in a proportion of 1% or less.
  • the 10% cumulative particle size of the spray particles A is 42 ⁇ m.
  • the spray particles B are particles in which particles having a small particle diameter are not removed by classification.
  • the sprayed particle B has the same maximum particle size as the sprayed particle A, but contains 6% of particles having a particle size of 30 ⁇ m and 10% of particles having a particle size of 40 ⁇ m.
  • the 10% cumulative particle size of the spray particles B is 21 ⁇ m.
  • a ceramic layer was formed on the test piece using the spray particles A and the spray particles B.
  • the test piece (the material of the heat-resistant alloy substrate and the metal bonding layer) and the thermal spraying conditions of the ceramic layer are the same as in the case of FIG. 4 and 5 are scanning electron microscope (SEM) photographs of the cross section of the thermal barrier coating produced using the thermal spray particles A and the thermal spray particles B, respectively.
  • FIGS. 6 and 7 are images showing the fine defects (layered defects) that are expanded from the pores by image processing of the SEM photographs of FIGS. 4 and 5, respectively.
  • the film thickness of the ceramic layer was measured from FIGS. 4 and 5, it was 470 ⁇ m for the ceramic layer of the sprayed particles A and 460 ⁇ m for the ceramic layer of the sprayed particles B.
  • Table 1 shows the results of measuring the above-described ⁇ T as the porosity, thermal conductivity, and thermal cycle durability of the ceramic layer for the thermal barrier coating test pieces using the thermal spray particles A and the thermal spray particles B.
  • the porosity is determined by using an image processing method from a micrograph of a precisely polished thermal barrier coating cross section taken from any five fields of view (observation length of about 3 mm) using an optical microscope (100 times magnification). It was.
  • the thermal conductivity was measured by a laser flash method specified by JIS R 1611.
  • the number of thermal cycles (relative value) when the laser thermal cycle test was conducted under the conditions of maximum surface heating temperature: 1500 ° C., maximum interface temperature: 900 ° C., heating time 3 minutes, cooling time 3 minutes. ) Is shown in FIG. In the figure, the vertical axis represents the number of thermal cycles until the ceramic layer is destroyed as a relative value when the result of the thermal spray particle B is 1.
  • the ceramic layer of the spray particles A has a higher porosity and a lower thermal conductivity of about 10% than the ceramic layer of the spray particles B.
  • the increase in the porosity of the thermal spray particles A in the ceramic layer is due to the removal of the small diameter particles and the increase in the average particle diameter.
  • thermal spraying condition hardly affects the occurrence of layered defects.
  • thermal spray particles in which the number of small-diameter particles (for example, particles having a particle size of 40 ⁇ m or less) is greatly reduced, the porosity of the ceramic layer is increased and the heat shielding property is improved, and the heat cycle durability is also achieved. It is possible to obtain a thermal barrier coating that is excellent in resistance.
  • the porosity of the ceramic layer is increased and the thermal cycle durability is improved by forming the thermal barrier coating using the sprayed particles from which the small-diameter particles have been removed in the same manner as described above. I have confirmed that.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Metallurgy (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Inorganic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Structural Engineering (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Turbine Rotor Nozzle Sealing (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

　高い遮熱効果を有し、熱サイクル耐久性に優れる遮熱コーティングの製造方法を提供する。また、該製造方法により遮熱コーティングが形成されたタービン部材及びガスタービンを提供する。耐熱合金基材（１１）上に金属結合層（１２）を形成する工程と、前記金属結合層（１２）上に、積算粒度１０％粒径が３０μｍ以上１００μｍ以下とされる粒度分布を有する溶射粒子を溶射して、セラミックス層（１３）を形成する工程とを含む遮熱コーティングの製造方法。

Description

遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン
　本発明は、耐久性に優れる遮熱コーティングの製造方法に係り、特に遮熱コーティングのトップコートとして用いられるセラミックス層の製造方法に関する。
　近年、省エネルギー対策の一つとして、火力発電の熱効率を高めることが検討されている。発電用ガスタービンの発電効率を向上させるためには、ガス入口温度を上昇させることが有効であり、その温度は１５００℃程度とされる場合もある。そして、このように発電装置の高温化を実現するためには、ガスタービンを構成する静翼や動翼、あるいは燃焼器の壁材などを耐熱部材で構成する必要がある。しかし、タービン翼の材料は耐熱金属であるが、それでもこのような高温には耐えられないために、この耐熱金属の基材上に金属結合層を介して溶射等の成膜方法によって酸化物セラミックスからなるセラミックス層を積層した遮熱コーティング（Ｔｈｅｒｍａｌ　Ｂａｒｒｉｅｒ　Ｃｏａｔｉｎｇ，ＴＢＣ）を形成して、耐熱金属基材を高温から保護することが行われている。セラミックス層としてはＺｒＯ２系の材料、特にＹ２Ｏ３で部分安定化又は完全安定化したＺｒＯ２であるＹＳＺ（イットリア安定化ジルコニア）が、セラミックス材料の中では比較的低い熱伝導率と比較的高い熱膨張率を有しているためによく用いられている。
　ガスタービンの種類によっては、タービンの入口温度が１５００℃を越える温度に上昇することが考えられている。上記ＹＳＺからなるセラミックス層を備えた遮熱コーティングによりガスタービンの動翼や静翼などを被覆した場合、１５００℃を超える過酷な運転条件の下ではガスタービンの運転中に上記セラミックス層の一部が剥離し、耐熱性が損なわれるおそれがあった。また、近年環境対策の関係から、より熱効率の高いガスタービンの開発が進められており、タービンの入口温度が１６００℃から１７００℃に達すると考えられ、タービン翼の表面温度は１３００℃もの高温になることが予想される。従って、遮熱コーティングには、更に高い耐熱性及び遮熱性が要求される状況にある。
　上記ＹＳＺからなるセラミックス層の剥離の問題は、高温環境下におけるＹＳＺの結晶安定性が十分でなく、また大きな熱応力に対して十分な耐久性を有していないことによるものである。そのため、高温環境下での結晶安定性に優れ、高い熱耐久性を有するセラミックス層として、例えば、Ｙｂ２Ｏ３添加ＺｒＯ２（特許文献１）、Ｄｙ２Ｏ３添加ＺｒＯ２（特許文献２）、Ｅｒ２Ｏ３添加ＺｒＯ２（特許文献３）、ＳｍＹｂＺｒＯ７（特許文献４）などが開発されている。
　特許文献５に開示されるように、セラミックス層は、平均粒径１０μｍから１００μｍの粒子を用い、溶射法により成膜することが一般的である。
特開２００３－１６０８５２号公報（請求項１、段落［０００６］、［００２７］から［００３０］） 特開２００１－３４８６５５号公報（請求項４及び５、段落［００１０］から［００１１］、［００１５］） 特開２００３－１２９２１０号公報（請求項１、段落［００１３］、［００１５］） 特開２００７－２７０２４５号公報（請求項２、段落［００２８］から［００２９］ 特開２００２－６９６０７号公報（請求項２１、段落[００５３]［００５４］）
　セラミックス層に気孔を導入することで、遮熱性を向上させることができる。溶射条件を調整することでセラミックス層中の気孔率を制御できる。しかし、溶射法で得られる気孔率は、１０％程度が上限である。セラミックス層の遮熱性を向上させるためには、気孔率の増大が有効とされている。
　本発明は、上記課題に鑑みなされたものであって、高い遮熱効果を有し、熱サイクル耐久性に優れる遮熱コーティングの製造方法、及び、該製造方法により遮熱コーティングが形成されたタービン部材及びガスタービンを提供する。
　上記課題を解決するために、本発明は、耐熱合金基材上に金属結合層を形成する工程と、前記金属結合層上に、積算粒度１０％粒径が３０μｍ以上１５０μｍ以下とされる粒度分布を有する溶射粒子を溶射して、セラミックス層を形成する工程とを含む遮熱コーティングの製造方法を提供する。
　上記発明の一態様において、前記溶射粒子が、最大粒径が１５０μｍ以下とされ、粒径３０μｍの粒子を３％以下、粒径４０μｍの粒子を８％以下の割合で含有することが好ましい。
　従来は、平均粒径１０μｍから１５０μｍの範囲、一般には１０μｍから１００μｍで正規分布に近い粒度分布を有する溶射粒子を用いてセラミックス層を形成することが一般的であった。一方、本願発明は、上記の割合で規定するように、小径粒子の割合を低減し、比較的大きい粒子を主とする溶射粒子を用いてセラミックス層を形成するものである。溶射粒子の積算粒度１０％粒径が増大することは、溶射粒子中に含まれる粒径の小さい粒子の割合が小さいことを意味する。こうすることで、セラミックス層の気孔率が上昇してセラミックス層の遮熱性が向上する。更に、セラミックス層における微細な層状欠陥の発生が抑制されるために、熱サイクル耐久性が向上した遮熱コーティングを製造することができる。
　本発明は、上記製造方法により形成された遮熱コーティングを備えるタービン部材、及び、該タービン部材を備えるガスタービンを提供する。
　本発明により製造された遮熱コーティングは高い遮熱性と熱サイクル耐久性を両立したものであるため、例えば１６００℃級のガスタービン部材などに適用することができる。
　本発明によれば、従来よりも高気孔率のセラミックス層を形成することができるため、遮熱性に優れる遮熱コーティングとすることができる。また、微細な層状欠陥を低減されるため、遮熱コーティングの耐久性を向上させることができる。
遮熱コーティングを備えるタービン部材の断面の模式図である。 ＹｂＳＺ溶射粒子の積算粒度１０％粒径と、熱サイクル耐久性試験でセラミックス層（ＹｂＳＺ層）内に付与される温度差ΔＴとの関係を示すグラフである。 溶射粒子の粒度分布である。 溶射粒子Ａを用いたセラミックス層の断面のＳＥＭ写真である。 溶射粒子Ｂを用いたセラミックス層の断面のＳＥＭ写真である。 図４のＳＥＭ写真における層状欠陥を表示した画像である。 図５のＳＥＭ写真における層状欠陥を表示した画像である。 粒径分布の異なる溶射粒子を用いて形成されたセラミックス層を有する遮熱コーティングの熱サイクル耐久性を示すグラフである。
　以下、本発明の実施形態を説明する。
　図１は、遮熱コーティングを備えるタービン部材の断面の模式図である。タービンの動翼、静翼などの耐熱合金基材１１上に、遮熱コーティングとして金属結合層１２及びセラミックス層１３が順に形成される。
　金属結合層１２は、ＭＣｒＡｌＹ合金（Ｍは、Ｎｉ，Ｃｏ，Ｆｅ等の金属元素またはこれらのうち２種類以上の組合せを示す）などとされる。
　セラミックス層１３は、ＹｂＳＺ（イッテルビア安定化ジルコニア）、ＹＳＺ（イットリア安定化ジルコニア）、ＳｍＹｂＺｒ２Ｏ７、ＤｙＳＺ（ジスプロシア安定化ジルコニア）、ＥｒＳＺ（エルビア安定化ジルコニア）などが挙げられる。
　本実施形態のセラミックス層は、大気圧プラズマ溶射法によって形成される。使用される溶射粒子は、前記金属結合層上に、積算粒度１０％粒径が３０μｍ以上１５０μｍ以下とされる粒度分布を有する。
　図２に、種々の積算粒度１０％粒径を有するＹｂＳＺ溶射粒子を用いてセラミックス層を形成した遮熱コーティングの熱サイクル耐久性を示す。同図において、横軸は積算粒度１０％粒径（ｄ１０）、縦軸は熱サイクル耐久性試験でセラミックス層内に付与される温度差ΔＴ（相対値）である。ΔＴは、熱サイクル数１０００回を超えても破壊されずに耐え得ることができる、最高表面加熱温度と最高界面温度との差と定義される。ΔＴは、熱サイクル耐久性試験におけるセラミックス層の耐久性を表す指標であり、ΔＴが大きいほど耐久性が高いと判断される。
　図２の取得に当たり、試験片として、厚さ５ｍｍの耐熱合金基材（商標名：ＩＮ－７３８ＬＣ）に、低圧プラズマ溶射法にて膜厚１００μｍの金属結合層（Ｎｉ：３２質量％、Ｃｒ：２１質量％、Ａｌ：８質量％、Ｙ：０．５質量％、Ｃｏ：残部）が形成されたものを用いた。溶射には、スルザーメテコ社製溶射ガン（Ｆ４ガン）を使用した。溶射条件は、溶射電流：６００（Ａ）、溶射距離：１５０（ｍｍ）、粉末供給量：６０（ｇ／ｍｉｎ）、Ａｒ／Ｈ２量：３５／７．４（ｌ／ｍｉｎ）、膜厚：０．５（ｍｍ）とした。熱サイクル耐久性は、特許第４０３１６３１号公報に記載のレーザ熱サイクル試験を適用し、加熱時間３分、冷却時間３分、最高界面温度を９００℃にて、種々の最高表面加熱温度を設定して、ＹＳＺ層剥離までの熱サイクル数を計測した。
　なお、溶射粒子の粒度分布は、レーザ散乱回折式粒度分布測定装置（シーラス社製）を用いて測定した。
　図２に示すように、積算粒度１０％粒径が３０μｍ以上となると、ΔＴが６００℃以上となり、高い熱サイクル耐久性を有するセラミックス層とすることができる。すなわち、小粒径の粒子が少ない溶射粒子を用いることにより、熱サイクル耐久性が向上する。積算粒度１０％粒径が６０μｍを超えると、熱サイクル耐久性はほぼ一定となる。成膜効率を考慮すると、本実施形態に使用される積算粒度１０％粒径は、１００μｍ以下であることが好ましい。
　図３に、ＹｂＳＺ溶射粒子の粒度分布を示す。同図において、横軸は粒径、縦軸は頻度である。
　溶射粒子Ａは、４４μｍメッシュのふるいを用いて分級され、粒径の小さい溶射粒子が除去されている。溶射粒子Ａは、最大粒径が１５０μｍ以下とされ、粒径３０μｍの粒子を１％以下、粒径４０μｍの粒子を１％以下の割合で含有する。溶射粒子Ａの積算粒度１０％粒径は、４２μｍである。
　溶射粒子Ｂは、分級により粒径の小さい粒子を除去しなかったものである。溶射粒子Ｂにおいて、最大粒径は溶射粒子Ａと同程度であるが、粒径３０μｍの粒子を６％、粒径４０μｍの粒子を１０％の割合で含有する。溶射粒子Ｂの積算粒度１０％粒径は、２１μｍである。
　溶射粒子Ａ及び溶射粒子Ｂを用いて、試験片上にセラミックス層を形成した。試験片（耐熱合金基材及び金属結合層の材質）、及び、セラミックス層の溶射条件は、図２を取得した場合と同様である。
　図４及び図５はそれぞれ、溶射粒子Ａ及び溶射粒子Ｂを用いて作製した遮熱コーティングの断面の走査型電子顕微鏡（ＳＥＭ）写真である。図６及び図７はそれぞれ、図４及び図５のＳＥＭ写真を画像処理し、気孔を起点にして伸張する微細な欠陥（層状欠陥）を表示した画像である。図４及び図５よりセラミックス層の膜厚を計測したところ、溶射粒子Ａのセラミックス層で４７０μｍ、溶射粒子Ｂのセラミックス層で４６０μｍであった。
　溶射粒子Ａ及び溶射粒子Ｂを用いた遮熱コーティング試験片について、セラミックス層の気孔率、熱伝導率、及び、熱サイクル耐久性として上述のΔＴを測定した結果を、表１に示す。
　気孔率は、精密に研磨された遮熱コーティング断面を、光学顕微鏡（倍率１００倍）を用いて任意の５視野（観察長さ約３ｍｍ）を撮影した顕微鏡写真から、画像処理法を用いて求めた。熱伝導率は、ＪＩＳ　Ｒ　１６１１で規定されるレーザフラッシュ法により測定した。
Figure JPOXMLDOC01-appb-T000001
  
　上記遮熱コーティング試験片について、最高表面加熱温度：１５００℃、最高界面温度：９００℃、加熱時間３分、冷却時間３分の条件でレーザ熱サイクル試験を実施したときの熱サイクル数（相対値）を図８に示す。同図において、縦軸は、セラミックス層が破壊されるまでの熱サイクル数を溶射粒子Ｂの結果を１とした場合の相対値で表している。
　溶射粒子Ａのセラミックス層は、溶射粒子Ｂのセラミックス層と比べて気孔率が増加し、熱伝導率が１０％程度低下している。溶射粒子Ａのセラミックス層での気孔率上昇は、小径粒子を除去したこと及び平均粒径が増加したことに起因する。
　図６及び図７に示すように、溶射粒子Ｂのセラミックス層では多数の層状欠陥が見られた。これは溶射粒子Ｂは微細粒子を多く含むためと考えられる。一方、溶射粒子Ａのセラミックス層では、微細粒子が少ないことから、層状欠陥の発生が抑制されていることが確認できた。
　表１及び図８に示すように、溶射粒子Ａを用いた遮熱コーティングで、熱サイクル耐久性が大幅に向上した。この結果から、粒径４０μｍ以下の粒子が層状欠陥の発生に関与し、この層状欠陥が熱サイクル耐久性に悪影響を与えていると推測できる。
　なお、溶射条件（例えば溶射距離）を変えて溶射粒子Ａのセラミックス層を形成した場合でも、表１及び図８とほぼ同等の熱サイクル耐久性が得られた。このことから、溶射条件は層状欠陥発生にほとんど影響しないと考えることができる。
　以上のように、小径粒子（例えば粒径４０μｍ以下の粒子）の数が大幅に低減された溶射粒子を用いることにより、セラミックス層の気孔率が増大して遮熱性に優れるともに、熱サイクル耐久性に優れる遮熱コーティングを得ることができる。
　ＹＳＺ、ＳｍＹｂＺｒ２Ｏ７などの場合も、上述と同様に小径粒子を除去した溶射粒子を用いて遮熱コーティングを形成することにより、セラミックス層の気孔率が増大し、熱サイクル耐久性が向上することを確認している。
１１　耐熱合金基材
１２　金属結合層
１３　セラミックス層

Claims (4)

  1. 　耐熱合金基材上に金属結合層を形成する工程と、
    　前記金属結合層上に、積算粒度１０％粒径が３０μｍ以上１００μｍ以下とされる粒度分布を有する溶射粒子を溶射して、セラミックス層を形成する工程とを含む遮熱コーティングの製造方法。
  2. 　前記溶射粒子が、最大粒径が１５０μｍ以下とされ、粒径３０μｍの粒子を３％以下、粒径４０μｍの粒子を８％以下の割合で含有する請求項１に記載の遮熱コーティングの製造方法。
  3. 　請求項１または請求項２に記載の製造方法により形成された遮熱コーティングを備えるタービン部材。
  4. 　請求項３に記載のタービン部材を備えるガスタービン。
PCT/JP2010/064691 2009-12-17 2010-08-30 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン Ceased WO2011074290A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020147029285A KR20140129392A (ko) 2009-12-17 2010-08-30 차열 코팅의 제조 방법, 상기 차열 코팅을 구비하는 터빈 부재 및 가스 터빈
US13/387,206 US9822437B2 (en) 2009-12-17 2010-08-30 Process for producing thermal barrier coating
JP2011546002A JP5602156B2 (ja) 2009-12-17 2010-08-30 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン
CN201080034127.5A CN102471863B (zh) 2009-12-17 2010-08-30 隔热涂层的制造方法，具备该隔热涂层的涡轮部件及燃气轮机
EP10837321.8A EP2514850B1 (en) 2009-12-17 2010-08-30 Method for producing a heat-shielding coating, turbine member provided with said heat-shielding coating, and gas turbine

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-286659 2009-12-17
JP2009286659 2009-12-17

Publications (1)

Publication Number Publication Date
WO2011074290A1 true WO2011074290A1 (ja) 2011-06-23

Family

ID=44167057

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2010/064691 Ceased WO2011074290A1 (ja) 2009-12-17 2010-08-30 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン

Country Status (6)

Country Link
US (1) US9822437B2 (ja)
EP (1) EP2514850B1 (ja)
JP (1) JP5602156B2 (ja)
KR (2) KR101618919B1 (ja)
CN (1) CN102471863B (ja)
WO (1) WO2011074290A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20150071772A1 (en) * 2012-03-28 2015-03-12 Siemens Aktiengesellschaft Method for producing and restoring ceramic heat insulation coatings in gas turbines and associated gas turbine
WO2016076305A1 (ja) * 2014-11-11 2016-05-19 三菱日立パワーシステムズ株式会社 遮熱コーティング、および、タービン部材
TWI556897B (zh) * 2011-10-10 2016-11-11 富智康（香港）有限公司 殼體的製備方法及該方法所製備的殼體
JP2019173592A (ja) * 2018-03-27 2019-10-10 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法
JP2022134211A (ja) * 2021-03-03 2022-09-15 株式会社東芝 耐熱部材および発電システム
CN119238220A (zh) * 2024-09-28 2025-01-03 太原理工大学 一种热障涂层全制程分阶段滚磨光整加工方法
JP7653837B2 (ja) 2021-05-20 2025-03-31 株式会社東芝 耐熱部材、および、発電システム

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103774082A (zh) * 2014-02-21 2014-05-07 北京矿冶研究总院 热障涂层的制备方法
WO2016035618A1 (ja) * 2014-09-05 2016-03-10 三菱日立パワーシステムズ株式会社 溶射用粉末の製造方法、溶射用粉末の製造装置、該製造方法により製造された溶射用粉末、遮熱コーティングで被覆された高温部品、及び、該高温部品を備えるガスタービン
CN107208246A (zh) * 2015-02-12 2017-09-26 三菱日立电力系统株式会社 隔热涂层、涡轮构件、燃气轮机以及隔热涂层的制造方法
JP6908973B2 (ja) * 2016-06-08 2021-07-28 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン、ならびに遮熱コーティングの製造方法
WO2018181559A1 (ja) * 2017-03-28 2018-10-04 三菱重工業株式会社 遮熱コーティング皮膜およびタービン部材
JP7169077B2 (ja) 2018-03-26 2022-11-10 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法
JP7372866B2 (ja) 2020-03-30 2023-11-01 三菱重工業株式会社 セラミックスコーティング、タービン部材及びガスタービン
CN111926281A (zh) * 2020-09-03 2020-11-13 昆明理工大学 一种艾萨炉冶炼长寿命喷枪陶瓷涂层及其制备方法
JP7686395B2 (ja) * 2020-12-28 2025-06-02 三菱重工航空エンジン株式会社 遮熱コーティングの施工方法及び耐熱部材
EP4385967A1 (en) 2022-12-14 2024-06-19 Treibacher Industrie AG Spray powder for high porosity coatings

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431631B2 (ja) 1986-11-20 1992-05-27
JPH09316665A (ja) * 1996-03-29 1997-12-09 Toshiba Corp 耐熱部材及び耐熱部材の品質評価方法
JP2001348655A (ja) 2000-06-09 2001-12-18 Mitsubishi Heavy Ind Ltd 遮熱コーティング材、それを適用したガスタービン部材およびガスタービン
JP2002037665A (ja) * 2000-07-24 2002-02-06 Mitsubishi Heavy Ind Ltd 溶射用中空セラミックス粉末及びその製造方法
JP2002069607A (ja) 2000-06-16 2002-03-08 Mitsubishi Heavy Ind Ltd 遮熱コーティング材およびその製造方法、遮熱コーティング材を適用したガスタービン部材、並びにガスタービン
JP2003129210A (ja) 2001-10-24 2003-05-08 Mitsubishi Heavy Ind Ltd 遮熱コーティング材及びガスタービン部材並びにガスタービン
JP2003160852A (ja) 2001-11-26 2003-06-06 Mitsubishi Heavy Ind Ltd 遮熱コーティング材、その製造方法、タービン部材及びガスタービン
JP2007270245A (ja) 2006-03-31 2007-10-18 Mitsubishi Heavy Ind Ltd 遮熱コーティング部材及びその製造方法ならびに遮熱コート材料、ガスタービン及び焼結体

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0516665A (ja) * 1991-07-17 1993-01-26 Mitsubishi Heavy Ind Ltd 車両用空気清浄装置
US6071627A (en) * 1996-03-29 2000-06-06 Kabushiki Kaisha Toshiba Heat-resistant member and a method for evaluating quality of a heat-resistant member
JPH1088368A (ja) * 1996-09-19 1998-04-07 Toshiba Corp 遮熱コーティング部材およびその作製方法
US6866897B2 (en) * 2002-09-30 2005-03-15 General Electric Company Method for manufacturing articles for high temperature use, and articles made therewith
CN1259453C (zh) * 2003-05-21 2006-06-14 中国科学院金属研究所 一种抗热冲击热障涂层的制备方法
JP4388466B2 (ja) 2004-12-27 2009-12-24 三菱重工業株式会社 ガスタービン、遮熱コーティング材、その製造方法及びタービン部材
US20080167173A1 (en) * 2006-04-25 2008-07-10 Lima Rogerio S Thermal spray coating of porous nanostructured ceramic feedstock
JP5034350B2 (ja) * 2006-07-25 2012-09-26 住友化学株式会社 酸化ジルコニウム粉末の製造方法
US8053089B2 (en) * 2009-09-30 2011-11-08 General Electric Company Single layer bond coat and method of application

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0431631B2 (ja) 1986-11-20 1992-05-27
JPH09316665A (ja) * 1996-03-29 1997-12-09 Toshiba Corp 耐熱部材及び耐熱部材の品質評価方法
JP2001348655A (ja) 2000-06-09 2001-12-18 Mitsubishi Heavy Ind Ltd 遮熱コーティング材、それを適用したガスタービン部材およびガスタービン
JP2002069607A (ja) 2000-06-16 2002-03-08 Mitsubishi Heavy Ind Ltd 遮熱コーティング材およびその製造方法、遮熱コーティング材を適用したガスタービン部材、並びにガスタービン
JP2002037665A (ja) * 2000-07-24 2002-02-06 Mitsubishi Heavy Ind Ltd 溶射用中空セラミックス粉末及びその製造方法
JP2003129210A (ja) 2001-10-24 2003-05-08 Mitsubishi Heavy Ind Ltd 遮熱コーティング材及びガスタービン部材並びにガスタービン
JP2003160852A (ja) 2001-11-26 2003-06-06 Mitsubishi Heavy Ind Ltd 遮熱コーティング材、その製造方法、タービン部材及びガスタービン
JP2007270245A (ja) 2006-03-31 2007-10-18 Mitsubishi Heavy Ind Ltd 遮熱コーティング部材及びその製造方法ならびに遮熱コート材料、ガスタービン及び焼結体

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2514850A4

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI556897B (zh) * 2011-10-10 2016-11-11 富智康（香港）有限公司 殼體的製備方法及該方法所製備的殼體
US20150071772A1 (en) * 2012-03-28 2015-03-12 Siemens Aktiengesellschaft Method for producing and restoring ceramic heat insulation coatings in gas turbines and associated gas turbine
WO2016076305A1 (ja) * 2014-11-11 2016-05-19 三菱日立パワーシステムズ株式会社 遮熱コーティング、および、タービン部材
JPWO2016076305A1 (ja) * 2014-11-11 2017-07-06 三菱日立パワーシステムズ株式会社 遮熱コーティング、および、タービン部材
JP2019173592A (ja) * 2018-03-27 2019-10-10 三菱重工業株式会社 遮熱コーティング、タービン部材、ガスタービン及び遮熱コーティングの製造方法
JP2022134211A (ja) * 2021-03-03 2022-09-15 株式会社東芝 耐熱部材および発電システム
JP7516293B2 (ja) 2021-03-03 2024-07-16 株式会社東芝 耐熱部材および発電システム
JP7653837B2 (ja) 2021-05-20 2025-03-31 株式会社東芝 耐熱部材、および、発電システム
CN119238220A (zh) * 2024-09-28 2025-01-03 太原理工大学 一种热障涂层全制程分阶段滚磨光整加工方法
CN119238220B (zh) * 2024-09-28 2025-09-02 太原理工大学 一种热障涂层全制程分阶段滚磨光整加工方法

Also Published As

Publication number Publication date
EP2514850A1 (en) 2012-10-24
JP5602156B2 (ja) 2014-10-08
EP2514850A4 (en) 2014-03-26
KR101618919B1 (ko) 2016-05-09
CN102471863A (zh) 2012-05-23
US9822437B2 (en) 2017-11-21
JPWO2011074290A1 (ja) 2013-04-25
US20130202912A1 (en) 2013-08-08
KR20120025592A (ko) 2012-03-15
KR20140129392A (ko) 2014-11-06
EP2514850B1 (en) 2017-07-26
CN102471863B (zh) 2014-07-09

Similar Documents

Publication Publication Date Title
JP5602156B2 (ja) 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン
Jamali et al. Comparison of thermal shock resistances of plasma-sprayed nanostructured and conventional yttria stabilized zirconia thermal barrier coatings
JP5622399B2 (ja) 遮熱コーティング、これを備えたタービン部材及びガスタービン
JP5737996B2 (ja) 遮熱コーティングの製造方法、該遮熱コーティングを備えるタービン部材及びガスタービン
JP7174811B2 (ja) 高温部材
Vorkötter et al. Superior cyclic life of thermal barrier coatings with advanced bond coats on single-crystal superalloys
Zhu et al. Microstructure and oxidation behavior of conventional and pseudo graded NiCrAlY/YSZ thermal barrier coatings produced by supersonic air plasma spraying process
JP2010235415A (ja) 遮熱コーティング用材料、遮熱コーティング、タービン部材及びガスタービン、並びに、遮熱コーティング用材料の製造方法
JP2009228018A (ja) 遮熱コーティング材、これを備えたタービン部材及びガスタービン、並びに遮熱コーティング材の製造方法
JP5610698B2 (ja) 遮熱コーティング用材料、遮熱コーティング、タービン部材及びガスタービン
Tamaddon Masoule et al. Thermal insulation and thermal shock behavior of conventional and nanostructured plasma-sprayed TBCs
JP5285486B2 (ja) 遮熱コーティング用材料、遮熱コーティング、タービン部材及びガスタービン
WO2016147282A1 (ja) 遮熱コーティングおよび発電システム
Kumar Comparison of thermal fatigue of superNi 718 SGTBCs and APSTBCs
JP2005163172A (ja) 遮熱コーティング材、遮熱コーティング材を適用したガスタービン部材およびガスタービン
JP2005163185A (ja) ガスタービン、遮熱コーティング材、その製造方法及びタービン部材
WO2012029540A1 (ja) 熱遮蔽コーティング膜及びその製造方法、並びにそれを用いた耐熱合金部材
Jamali et al. Comparison of thermal shock behavior of nano-7YSZ, 15YSZ and 5.5 SYSZ thermal barrier coatings produced by APS method
JP7516293B2 (ja) 耐熱部材および発電システム
JP2015218379A (ja) 蒸気タービン用遮熱コーティング材料および発電用蒸気機器
JP2006328499A (ja) 遮熱コーティング、ガスタービン高温部品及びガスタービン
Karabaş et al. Thermal shock behavior of lanthanum zirconate-based thermal barrier coatings
KR101796731B1 (ko) 열차폐 코팅용 코어/쉘 복합체 분말의 제조방법 및 이에 의해 제조된 코어/쉘 복합체
JP2002294428A (ja) 熱遮蔽コーティング膜及びその製造方法
KR102798732B1 (ko) 가스터빈 고온부품용 열차폐 구조체 및 그 제조방법

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 201080034127.5

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 10837321

Country of ref document: EP

Kind code of ref document: A1

ENP Entry into the national phase

Ref document number: 20127000591

Country of ref document: KR

Kind code of ref document: A

REEP Request for entry into the european phase

Ref document number: 2010837321

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 2011546002

Country of ref document: JP

Ref document number: 2010837321

Country of ref document: EP

WWE Wipo information: entry into national phase

Ref document number: 13387206

Country of ref document: US

NENP Non-entry into the national phase

Ref country code: DE