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WO2011066701A1 - Dispositif de rotation d'un substrat de type fixation - Google Patents

Dispositif de rotation d'un substrat de type fixation Download PDF

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Publication number
WO2011066701A1
WO2011066701A1 PCT/CN2009/076114 CN2009076114W WO2011066701A1 WO 2011066701 A1 WO2011066701 A1 WO 2011066701A1 CN 2009076114 W CN2009076114 W CN 2009076114W WO 2011066701 A1 WO2011066701 A1 WO 2011066701A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
clamping
rail
slider
lower pressing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/CN2009/076114
Other languages
English (en)
Chinese (zh)
Inventor
杨明生
刘惠森
范继良
雷振宇
王曼媛
王勇
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dongguan Anwell Digital Machinery Co Ltd
Original Assignee
Dongguan Anwell Digital Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dongguan Anwell Digital Machinery Co Ltd filed Critical Dongguan Anwell Digital Machinery Co Ltd
Publication of WO2011066701A1 publication Critical patent/WO2011066701A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H10P72/7606—
    • H10P72/7608—

Definitions

  • the present invention relates to a clamp-type substrate inverting device, and more particularly to a clamp-type substrate inverting device that clamps and flips a substrate in an organic light-emitting display device. Background technique
  • flat panel display devices which are terminal display devices for various video signals and computer data information, have become more and more popular in people's lives.
  • the flat panel display device is thin and light, the whole machine can be made portable, low voltage, no X-ray radiation, no flickering, no static electricity, low power consumption, battery power supply, long life, etc. It is a microelectronic technology.
  • LCD technology and other technologies mainly used in notebook computers, desktop computers, large-screen color TV, mobile communications, digital cameras, digital cameras and other terminal products.
  • the organic light-emitting display device is a new product in the digital product, and the organic light-emitting display device has been widely used in the display screen of the digital product because of its light and thin, power-saving characteristics, and has a large market potential.
  • organic light-emitting display devices are the only technology that can be compared with liquid crystal display devices in application, and among all current display technologies, the only ones that can be made in large size,
  • the high-brightness, high-resolution soft-screen display technology can be made to the same thickness as paper; however, the organic light-emitting display device is different from the conventional liquid crystal display device, which does not require a backlight, and uses a very thin organic material coating and glass.
  • the substrate when an electric current passes, the organic material emits light, and the organic light emitting display device can be made lighter and thinner, has a larger viewing angle, and can significantly save power; accordingly, manufacturing the organic light emitting display device All devices must guarantee organic light-emitting displays The accuracy requirements of the piece.
  • a conventional liquid crystal display device generally includes a liquid crystal display panel and a backlight module, and the liquid crystal display panel is composed of two substrates and a liquid crystal layer between the two substrates.
  • the inverting device In the process of assembling the two substrates, one of the substrates must be turned over by the inverting device, and then re-entered. Row substrate assembly.
  • the flat-panel display device using a glass substrate also needs to be flipped of the substrate during the manufacturing process.
  • the substrate for performing the film coating of each functional layer needs to be flipped over and filled with the desiccant.
  • the backing of the filler The substrate flipping device of the existing flat panel display device is mainly an adsorption flip device, and the technology is mainly embodied in the patent application number.
  • the patent discloses a substrate flipping platform and a method for flipping the substrate, and mainly uses a vacuum adsorption method to flip the substrate, and the patented technology can ensure that the substrate does not flip while being Fall off.
  • the substrate is made thinner and thinner.
  • the thickness of the glass substrate of the liquid crystal display device is 0.63 mm, and the thickness of the substrate glass used for the organic light emitting display device is less than 0. . 3 As the thickness of the substrate becomes thinner, the ability to withstand deformation and breakage also decreases.
  • the prior art substrate flipping platform adopts vacuum adsorption, although it can be designed to ensure that the substrate of the flat panel display device does not fall off during the flipping process, but the vacuum adsorption device has a complicated structure and unstable factors, such as a nozzle. Damage, insufficient vacuum, etc. will cause relative sliding between the substrate and the nozzle; in addition, the vacuum chuck will wear the substrate due to the contact between the nozzle and the substrate, or leave traces on the substrate to affect the final display light transmission effect. , does not have good protection properties for the substrate.
  • the glass substrate area of the organic light-emitting display device is large, the thickness is thin, and the film layer plated on the substrate is complicated, the glass substrate of the organic light-emitting display device is vacuum-adsorbed.
  • the flipping is performed, not only the nozzle is in contact with the substrate to wear the substrate, but also marks on the substrate to affect the final display light transmission effect, and also causes deformation or breakage of the substrate.
  • An object of the present invention is to provide a clamp-type substrate inverting device capable of holding, transferring, and inverting a substrate in an all-round manner and effectively maintaining stability and damage of the substrate during the inversion of the substrate.
  • the present invention provides a clamp type substrate inverting device including a grip driving mechanism, an inversion driving mechanism, and a substrate holding mechanism.
  • the inverting drive mechanism includes a first driving mechanism, a worm, a hollow transmission shaft and a turbine, the worm is disposed on the first driving mechanism, and the turbine is fixed on the hollow transmission shaft and meshes with the worm.
  • Hollow pass A mounting hole for connecting the substrate clamping mechanism is formed on an end surface of one end of the moving shaft, the hollow transmission shaft has a hollow structure, and the turning drive mechanism provides power for turning the substrate.
  • the clamping drive mechanism includes a second driving mechanism, a rotating shaft, a mounting seat and a mounting block, and the second driving mechanism is fixed to the other end of the hollow transmission shaft through the mounting seat, and one end of the rotating shaft is fixed On the second driving mechanism, the other end of the rotating shaft passes through the hollow transmission shaft and is fixedly connected to the mounting block, and the clamping driving mechanism provides power for clamping or releasing the substrate.
  • the substrate clamping mechanism includes a driving connection mechanism, a clamping mechanism and a fixed guiding mechanism:
  • the driving connection mechanism includes a cam, and the cam is symmetrically opened with two arcuate guiding grooves, and the mounting block of the clamping driving mechanism is fixed Attached to the cam;
  • the clamping mechanism comprises an upper and a lower pressing plate and at least one pair of beading groups, the beading group comprises upper and lower pressing strips, and the respective sides of the upper and lower pressing plates are respectively arranged in a circular shape a roller follower, wherein the roller follower is slidably mounted in two arcuate guide grooves of the cam, and a clamping region is formed between the upper pressing plate and the lower pressing plate, An upper pressing strip is mounted on the upper pressing plate and protrudes into the clamping region, the falling bead is mounted on the lower pressing plate and protrudes into the clamping region, and the upper pressing strip and the lower pressing strip Positively disposed, the substrate is sandwiched between the upper bead and the
  • the clamping substrate inverting device clamps and flips the substrate in the vacuum chamber providing the vacuum environment, and the rotating shaft and the hollow transmission shaft are disposed adjacent to the mounting seat end.
  • a first sealed magnetic flow member, the first magnetic fluid seal blocking airflow communication between the clamping drive mechanism and the vacuum chamber.
  • the cavity wall of the vacuum chamber is provided with a mounting hole
  • the hollow drive shaft is sleeved with a flange seat
  • the flange seat is fixedly mounted on the cavity wall at both ends of the mounting hole
  • the flanged seat has a hollow structure, one end of the hollow drive shaft passes through the flange seat and the insertion hole in sequence, and a second sealed magnetic current flow member is disposed between the flange seat and the hollow transmission shaft The second magnetic fluid seal blocks airflow communication between the inversion drive mechanism and the vacuum chamber.
  • the guide rail includes a first upper rail and a first lower rail
  • the first upper rail is fixedly connected to the upper pressure plate
  • the first lower rail is fixedly connected to the lower pressure plate
  • the first The lower rail and the first upper rail are parallel to each other
  • the slider includes a first upper slider and a first lower slider fixedly connected to the mounting board, the first upper slider and the first The upper rail is slidably engaged, and the lower slider is slidably coupled to the first lower rail.
  • the said first upper rail and the first lower rail and the first lower rail and the first lower slider can be driven to drive the said first upper and lower rails to be fixedly connected
  • the upper and lower platens are approached or separated such that the clamping mechanism clamps or loosens the substrate.
  • the guide rail includes a second upper rail and a second lower rail fixedly connected to the mounting plate, and the second upper rail and the second lower rail are parallel to each other, and the slider includes a second upper slide And a second lower slider fixedly connected to the upper pressing plate, the second lower sliding block is fixedly connected to the lower pressing plate, the second upper sliding block and the second upper sliding block The upper rail is slidably engaged, and the second lower slider is slidably coupled to the second lower rail.
  • the second upper and lower sliders can be fixedly connected The upper and lower pressure plates are approached or separated to cause the clamping mechanism to clamp or open the substrate.
  • the clamping mechanism further comprises at least two springs, wherein the two springs are respectively in contact with the upper pressing strip and the upper pressing plate and between the lower pressing strip and the lower pressing plate.
  • a plurality of empty slots are defined in the surface of the upper and lower pressing plates, and the corresponding side surfaces of the upper and lower pressing plates are respectively provided with a groove, and the roller follower is located in the concave In the groove, the design of the empty groove and the groove greatly saves the materials of the upper and lower pressing plates, which is beneficial to reduce the production cost.
  • the upper and lower beadings respectively have a boss and a concave surface that cooperate with each other.
  • the first driving mechanism and the second driving mechanism are servo motors or cylinder motors.
  • the drive mechanism can be replaced by a human hand drive.
  • the clamping substrate inverting device of the present invention comprises a clamping driving mechanism, an inversion driving mechanism and a substrate clamping mechanism
  • the substrate clamping mechanism comprises a driving connection mechanism, a clamping mechanism and a fixed guiding mechanism.
  • the clamping mechanism includes upper and lower beadings, the upper pressing strip is mounted on the upper pressing plate and protrudes into the clamping region, and the lower pressing strip is mounted on the lower pressing plate and protrudes into the clamping plate
  • the second driving mechanism of the clamping drive mechanism drives the rotating shaft to rotate, thereby driving the cams fixedly connected to the rotating shaft, respectively, are mounted on the upper and lower pressing plates
  • the clamping substrate inverting device can realize clamping, conveying and turning of the substrate in an all-round manner, and can maintain the stability of the substrate during the conveying and turning; and, because the clamping substrate inverting device is The upper and lower layers are structured so that the structure is relatively simple and has good protection performance for the substrate.
  • Figure 1 is a perspective view of a substrate holding mechanism in a chucking substrate inverting device of the present invention.
  • Fig. 2 is a perspective view showing a chucking drive mechanism and a reverse drive mechanism in the clamp type substrate inverting device of the present invention.
  • FIG. 3 is a schematic structural view of a substrate clamping mechanism in the clamping substrate flipping device shown in FIG. 1.
  • FIG. 3 is a schematic structural view of a substrate clamping mechanism in the clamping substrate flipping device shown in FIG. 1.
  • Figure 4 is an enlarged view of a portion A in Figure 3.
  • Fig. 5 is a view showing a state in which the upper and lower bead of the clamp type substrate inverting device of the present invention clamps the substrate.
  • Fig. 6 is a structural schematic view showing another angle of the substrate holding mechanism in the clamp type substrate inverting device of the present invention.
  • Figure 7 is a schematic view showing the structure of a substrate holding mechanism in a specific embodiment of the clamp type substrate inverting device of the present invention.
  • Fig. 8 is a view showing the structure of a substrate holding mechanism in another embodiment of the clamp type substrate inverting device of the present invention.
  • Fig. 9 is a structural schematic view showing the application of the clamp type substrate inverting device of the present invention to a vacuum system.
  • Figure 10 is a cross-sectional view showing the application of the clamp type substrate inverting device of the present invention to a vacuum system. detailed description
  • the clamp-type substrate reversing device 1 of the present invention includes a grip drive mechanism, a flip drive mechanism, and a substrate chucking mechanism.
  • the inversion drive mechanism includes a first drive mechanism 11 , a worm 12 , a hollow drive shaft 13 , and a turbine 14 .
  • the worm 12 is disposed on the first drive mechanism 11 , and the turbine 14 is fixed to the hollow drive shaft 13 .
  • the end surface of one end of the hollow transmission shaft 13 is provided with a mounting hole 15 for connecting the substrate clamping mechanism, the hollow transmission shaft 13 has a hollow structure, and the inversion driving mechanism Power to flip the substrate 100 is provided.
  • the clamping drive mechanism includes a second driving mechanism 21, a rotating shaft 22, a mounting seat 23 and a mounting block 24, and the second driving mechanism 21 is fixed to the other end of the hollow transmission shaft 13 through the mounting seat 23, One end of the rotating shaft 22 is fixed to the second driving mechanism 21, and the other end of the rotating shaft 22 passes through the hollow transmission shaft 13 and is fixedly connected with the mounting block 24, the clamping driving mechanism The power to clamp or loosen the substrate 100 is provided.
  • the substrate clamping mechanism includes a driving connection mechanism, a clamping mechanism and a fixed guiding mechanism: the driving connection mechanism includes a cam 310, and the cam 310 is symmetrically opened with two arcuate guiding grooves 311, and the clamping driving mechanism
  • the mounting block 24 is fixedly coupled to the cam 310.
  • the clamping mechanism includes upper and lower pressing plates 320a and 320b and at least one pair of beading groups 321 including upper and lower pressing strips 321a. 321b.
  • a circular roller follower 322a, 322b is mounted on each of the respective sides of the lower pressing plates 320a, 320b.
  • the roller followers 322a, 322b are slidably mounted to the two arcs of the cam 310, respectively.
  • a clamping region 323 is formed between the upper pressing plate 320a and the lower pressing plate 320b, and the upper pressing bar 321a is mounted on the upper pressing plate 320a and protrudes into the clamping region 323.
  • the pressing strip 321b is mounted on the lower pressing plate 320b and protrudes into the clamping region 323, and the upper pressing strip 321a is disposed opposite to the lower pressing strip 321b, and the substrate 100 is clamped on the upper pressing strip Between the 321a and the lower bead 321b, the clamping The driving mechanism drives the clamping mechanism to clamp or loosen the substrate 100;
  • the fixed guiding mechanism includes a guiding rail 330, a slider 331 and a mounting plate 332, and the mounting plate 332 is disposed outside the clamping region 323.
  • the guide rail 330 is slidably coupled to the slider 331 , and the guide rail 330 and the slider 331 are connected between the mounting plate 332 and the upper pressing plate 320 a and the lower pressing plate 320 b.
  • the sliding direction of the guide rail 330 and the slider 331 Vertically to the upper and lower platens 320a, 320b, the fixed guide mechanism fixes the upper and lower platens 320a, 320b and controls the upper and lower platens 32Ga, 320b to always move in a straight line.
  • first driving mechanism 11 and the second driving mechanism 21 are servo motors or gas rainbow motors.
  • first driving mechanism 11 and the second driving mechanism 21 may also be replaced by manual driving.
  • the clamping mechanism further includes at least two springs 324a, 324b, between the two springs 324a and the lower pressure plate 320b.
  • the springs 324a, 324b are fixed by screws 325a, 325b that pass through the springs 324a, 324b, respectively, and the damping of the springs 324a, 325b can be controlled by adjusting the degree of tightening of the screws 325a, 325b and Clamping force and clamping stroke between upper and lower pressure plates 320a. 320b.
  • the upper and lower beaders 321a, 321b have bosses 3211a, 3211b and concave faces 3212a, 3212b that cooperate with each other.
  • the concave surface 3211b of the lower pressing strip 321b is used to carry the substrate 100.
  • the upper and lower pressing strips 321a, 321b are close to each other, the upper and lower pressing strips 3211a, 3211b and the concave surfaces 3212a, 3212b Cooperating with each other, the substrate 100 is sandwiched between the concave surfaces 3212a, 3212b of the upper and lower bead.
  • the upper and lower pressing plates 320a, 320b are each provided with a hollow groove 3201, and the corresponding sides of the upper and lower pressing plates 320a, 320b are respectively provided with grooves 3202a, 3202b, and the roller is
  • the moving parts 322a, 322b are located in the grooves 3202a, 3202b.
  • the size and the number of the empty grooves 3201 may be determined according to the size of the upper and lower pressing plates 320a, 320b.
  • the design of the empty groove 3201 and the grooves 3202a, 3202b greatly saves the materials of the upper and lower pressing plates 320a, 320b, which is advantageous for reducing the production cost.
  • the guide rail 330 includes a first upper rail 330a and a first lower rail 330b, and the first upper rail 330a is fixedly connected to the upper pressing plate 320a.
  • the lower rail 330b is fixedly connected to the lower pressing plate 320b, and the first lower rail 330b and the first upper rail 330a are parallel to each other, and the slider 331 includes a first upper portion fixedly connected to the mounting plate 332.
  • a slider 331a and a first lower slider 331b wherein the first upper slider 331a is slidably coupled to the first upper rail 330a, and the lower slider 331b and the first lower rail 330b are slidable The snap connection.
  • the relative sliding of the guide rail 330b and the first lower slider 331b can drive the upper and lower pressing plates 320a, 320b fixedly connected to the first upper and lower rails 3303a, 330b to approach or separate, so that the clip
  • the clamping mechanism performs a clamping or releasing operation on the substrate 100.
  • the guide rail 330 includes a second upper rail 3300a and a second lower rail 3300b fixedly connected to the mounting plate 332, and the second upper rail 3300a and The second lower rails 3300b are parallel to each other, and the slider 331 includes a second upper slider 3310a and a second lower slider 3310b.
  • the second upper slider 3310a is fixedly connected to the upper pressing plate 320a, and the second lower portion
  • the slider 3310b is fixedly coupled to the lower pressing plate 320b
  • the second upper slider 3310a is slidably coupled to the second upper rail 3300a, and the second lower slider 3310b and the second lower rail 3300b Slidable snap connection.
  • this type of connection also enables the clamping mechanism to clamp or loosen the substrate 100.
  • the substrate holding mechanism of the substrate rotating device 1 is placed in a vacuum chamber 400, the vacuum chamber An insertion hole (not shown) is defined in the cavity wall 401, and the second driving mechanism 21 of the clamping drive mechanism is fixed on the hollow transmission shaft 13 by the mounting seat 23 and the mounting screw 402; One end of the rotating shaft 22 is fixedly connected to the second driving mechanism 21, and the other end passes through the hollow transmission shaft 13 and the insertion hole of the cavity wall 401, and is fixed at the vacuum by the mounting block 24.
  • the rotating shaft 22 is driven by the rotation of the cam 310 by the driving of the second driving mechanism 21 to clamp the substrate 100;
  • a first magnetic fluid seal 403 is disposed between the rotating shaft 22 and the end of the mounting seat 23, and the first magnetic fluid seal 403 is configured to block the clamping drive mechanism and the vacuum chamber 400.
  • Air flow communication between; the hollow drive shaft 13 and Said rotary shaft and placed close to the bore end 22 is provided with a bearing 410, the bearing 410 for ensuring the stability of the rotary drive shaft 11.
  • the turbine 14 of the inversion drive mechanism is fixed to the hollow drive shaft 13 , and the hollow drive shaft 13 sequentially passes through the flange seat 404 , the insertion hole of the cavity wall 401 and is placed on the flange seat
  • the inner bearing (not shown) of the 404 is fixed; the flange seat 404 is fixed on the cavity wall 401 of the vacuum chamber by a screw 405, and the flange seat 404 and the cavity wall 401 are further installed.
  • a sealing device (not shown) of the "0" type, and a second magnetic fluid seal 406 is disposed between the flange seat 404 and the hollow drive shaft 13 , the second magnetic fluid seal 406 is configured to block airflow communication between the inversion driving mechanism and the vacuum chamber 400; the other end of the hollow transmission shaft 13 is fixed to a connecting plate 407 through the mounting hole 15 and the screw 151, The connecting plate 407 is fixedly connected to the mounting plate 332 of the substrate clamping mechanism; the first driving mechanism 11 drives the worm 12 to rotate, and then the turbine 1 and the hollow transmission shaft 13 are rotated, and finally the driving device is driven.
  • the inversion of the substrate holding mechanism realizes the inversion of the substrate 100 inside the substrate holding mechanism.
  • the flip drive mechanism remains stationary while the clamp drive mechanism is operating.
  • the upper and lower pressing plates 320a, 320b are separated from each other; when the second driving mechanism 21 of the clamping driving mechanism (here implemented by a servo motor) drives the transmission
  • the second driving mechanism 21 of the clamping driving mechanism here implemented by a servo motor
  • the two roller followers 322a, 322b respectively fixed to the upper and lower pressing plates 320a, 320b are respectively along the two arcuate guide grooves 311a of the cam 310,
  • the curved trajectory surface of the 311b is slid in the downward direction, and the upper pressing plate 320a and the upper pressing strip 321a are slid in the first upper sliding block 331a by the first upper sliding rail 330a to slide in the middle direction, and the driving is performed.
  • the lower pressing plate 320b and the lower pressing bar 321b slide in the first lower sliding block 331b by the first lower sliding rail 330b to slide in the middle direction, thereby realizing the first upper and lower pressing bars 321a, 321b against the substrate 100.
  • the first driving mechanism 11 (implemented by a servo motor) of the inversion driving mechanism is driven
  • the worm 12 rotates to drive the turbine 14 and the hollow drive shaft 13 to rotate, and finally the flipping of the substrate clamping mechanism is performed to realize the flipping of the substrate 100 inside the substrate clamping mechanism;
  • the second driving mechanism 21 is driven to rotate the rotating shaft 22 and the cam 310 in the clockwise direction, so that the two roller followers 322a and 322b respectively fixed to the upper and lower pressing plates 320a and 320b are respectively Rolling along the arcuate track surface of the two arcuate guide grooves 311a, 311b of the cam 310, while driving the upper pressing plate 320a and the upper pressing bar 321a through the first upper rail 330a on the first
  • the slider 331a slides to slide in the direction opposite to the middle, and drives the lower pressing plate 320b and the lower pressing bar 321b to slide in the first lower
  • clamped substrate inverting apparatus 1 of the present invention operates in the same manner as described above, and has been described in detail above and will not be described herein.
  • the substrate clamping mechanism includes a driving connection mechanism, a clamping mechanism, and a fixed guiding mechanism.
  • the clamping mechanism includes upper and lower pressing strips 321a and 321b.
  • the upper pressing portion 321a is mounted on the upper pressing plate 320a and extends into the clamping region 323, and the lower pressing strip 321b is mounted on the lower pressing plate 320b. And extending into the clamping area 323, when the second driving mechanism 21 of the clamping drive mechanism drives the rotating shaft 22 to rotate, thereby driving the cam 310 fixedly connected with the rotating shaft 22 to rotate.
  • the two roller followers 322a, 322b respectively mounted on the upper and lower pressing plates 320a, 320b are arcs along the two arcuate guide grooves 311a, 311b of the cam 310 according to the rotation of the cam 310 Movement of the shape track surface, simultaneously driving the upper pressing plate 320a and the upper pressing bar 321a to slide in the upper sliding block 331a through the upper rail 330a and driving the lower pressing plate 320b and the lower pressing bar 321b to pass through The guide rail 330b slides in the lower slider 331b, thereby controlling the upper and lower pressing plates 320a, 320b of the clamping mechanism to approach or separate, thereby causing the upper pressing strip 321a and the lower pressing plate 320b on the upper pressing plate 320a.
  • the lower pressing strip 321b clamps or loosens the substrate 100; when the first driving mechanism 11 of the inversion driving mechanism drives the scroll 12 to rotate, the turbine 14 and the hollow transmission shaft 13 are driven When rotated, the substrate holding mechanism fixedly coupled to the hollow drive shaft 13 also rotates. Therefore, the clamping substrate inverting device 1 can realize clamping, conveying and turning of the substrate 100 in an all-round manner, and can maintain the stability of the substrate 100 during the conveying and turning; and, also, due to the clamping substrate
  • the inverting device 1 has an upper and lower two-layer structure, so the structure is relatively simple, and the substrate 100 has better protection performance.

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  • Presses And Accessory Devices Thereof (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

L'invention porte sur un dispositif de rotation (1) d'un substrat (100) de type fixation comprenant un mécanisme d'entraînement de fixation, un mécanisme d'entraînement rotatif et d'un mécanisme de fixation de substrat, le mécanisme d'entraînement de fixation et le mécanisme d'entraînement rotatif sont respectivement reliés au mécanisme de fixation de substrat, lequel présente une structure de fixation et de libération de substrat, et sert à entraîner le mécanisme de fixation de substrat de manière à fixer et libérer le substrat se trouvant dans le mécanisme de fixation de substrat. Le mécanisme d'entraînement rotatif sert à entraîner le mécanisme de fixation de substrat subissant une rotation de manière à faire tourner le substrat placé dans le mécanisme de fixation de substrat. Aussi, le dispositif de rotation de substrat de type fixation à structure simple est-il en mesure d'assurer la stabilité du substrat lors de la rotation de ce dernier, tout en assurant une bonne protection du substrat.
PCT/CN2009/076114 2009-12-01 2009-12-28 Dispositif de rotation d'un substrat de type fixation Ceased WO2011066701A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN200910246910.7 2009-12-01
CN2009102469107A CN101814586B (zh) 2009-12-01 2009-12-01 夹持式基板翻转装置

Publications (1)

Publication Number Publication Date
WO2011066701A1 true WO2011066701A1 (fr) 2011-06-09

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Application Number Title Priority Date Filing Date
PCT/CN2009/076114 Ceased WO2011066701A1 (fr) 2009-12-01 2009-12-28 Dispositif de rotation d'un substrat de type fixation

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CN (1) CN101814586B (fr)
WO (1) WO2011066701A1 (fr)

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CN107322711A (zh) * 2017-08-25 2017-11-07 湖州民阁木业有限公司 一种旋转式木板拼接机
CN107894518A (zh) * 2017-11-09 2018-04-10 奥士康科技股份有限公司 一种双幅料基板检验车
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