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WO2011064642A3 - 加速度センサ - Google Patents

加速度センサ Download PDF

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Publication number
WO2011064642A3
WO2011064642A3 PCT/IB2010/002975 IB2010002975W WO2011064642A3 WO 2011064642 A3 WO2011064642 A3 WO 2011064642A3 IB 2010002975 W IB2010002975 W IB 2010002975W WO 2011064642 A3 WO2011064642 A3 WO 2011064642A3
Authority
WO
WIPO (PCT)
Prior art keywords
section
acceleration sensor
movable electrode
weight
concave
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/IB2010/002975
Other languages
English (en)
French (fr)
Other versions
WO2011064642A2 (ja
Inventor
仁 吉田
伸行 茨
英喜 上田
全史 岡田
岳志 森
昌利 野村
勝己 垣本
裕二 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Panasonic Electric Works Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP2009266583A external-priority patent/JP2011112390A/ja
Priority claimed from JP2009266585A external-priority patent/JP2011112392A/ja
Priority claimed from JP2009266582A external-priority patent/JP2011112389A/ja
Priority claimed from JP2009266581A external-priority patent/JP5716149B2/ja
Priority to US13/511,178 priority Critical patent/US9261530B2/en
Application filed by Panasonic Electric Works Co Ltd filed Critical Panasonic Electric Works Co Ltd
Priority to EP10832714.9A priority patent/EP2506018A4/en
Priority to CN201080052810.1A priority patent/CN102667497B/zh
Publication of WO2011064642A2 publication Critical patent/WO2011064642A2/ja
Publication of WO2011064642A3 publication Critical patent/WO2011064642A3/ja
Anticipated expiration legal-status Critical
Priority to US14/718,493 priority patent/US9244094B2/en
Priority to US14/874,845 priority patent/US9702895B2/en
Priority to US15/617,777 priority patent/US10126322B2/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
    • G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
    • G01P2015/0831—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being of the paddle type having the pivot axis between the longitudinal ends of the mass, e.g. see-saw configuration

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Pressure Sensors (AREA)

Abstract

　本発明は一面に開口する凹部と前記凹部を除く充実部が一体に形成された重り部と、前記凹部と前記充実部とが回動方向に沿って並ぶように前記重り部を回動自在に支持する１対のビーム部と、凹部が開口する前記一面と異なる他の一面において前記凹部と前記充実部とに跨って設けられた可動電極と、前記可動電極における前記凹部側と対向する位置に配設された第１の固定電極と、可動電極における前記充実部側と対向する位置に配設された第２の固定電極とから成るセンサ部を備え、１対の前記ビーム部を結ぶ直線を回動軸とした前記重り部の回動に伴う前記可動電極と前記固定電極との間の静電容量の変化から加速度を検出する加速度センサであって、前記重り部の重心位置から前記回動軸に下ろした垂線と前記可動電極の表面とが成す角度が略４５度となるように、前記ビーム部を前記凹部側にずらして配置したことを特徴とする加速度センサを提供する。
PCT/IB2010/002975 2009-11-24 2010-11-23 加速度センサ Ceased WO2011064642A2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
CN201080052810.1A CN102667497B (zh) 2009-11-24 2010-11-23 加速度传感器
EP10832714.9A EP2506018A4 (en) 2009-11-24 2010-11-23 ACCELEROMETER
US13/511,178 US9261530B2 (en) 2009-11-24 2010-11-23 Acceleration sensor
US14/718,493 US9244094B2 (en) 2009-11-24 2015-05-21 Acceleration sensor
US14/874,845 US9702895B2 (en) 2009-11-24 2015-10-05 Acceleration sensor
US15/617,777 US10126322B2 (en) 2009-11-24 2017-06-08 Acceleration sensor

Applications Claiming Priority (8)

Application Number Priority Date Filing Date Title
JP2009-266582 2009-11-24
JP2009266583A JP2011112390A (ja) 2009-11-24 2009-11-24 加速度センサ
JP2009-266583 2009-11-24
JP2009266581A JP5716149B2 (ja) 2009-11-24 2009-11-24 加速度センサ
JP2009266582A JP2011112389A (ja) 2009-11-24 2009-11-24 加速度センサ
JP2009-266585 2009-11-24
JP2009266585A JP2011112392A (ja) 2009-11-24 2009-11-24 加速度センサ
JP2009-266581 2009-11-24

Related Child Applications (2)

Application Number Title Priority Date Filing Date
US13/511,178 A-371-Of-International US9261530B2 (en) 2009-11-24 2010-11-23 Acceleration sensor
US14/718,493 Continuation US9244094B2 (en) 2009-11-24 2015-05-21 Acceleration sensor

Publications (2)

Publication Number Publication Date
WO2011064642A2 WO2011064642A2 (ja) 2011-06-03
WO2011064642A3 true WO2011064642A3 (ja) 2011-07-21

Family

ID=44066998

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IB2010/002975 Ceased WO2011064642A2 (ja) 2009-11-24 2010-11-23 加速度センサ

Country Status (4)

Country Link
US (4) US9261530B2 (ja)
EP (1) EP2506018A4 (ja)
CN (1) CN102667497B (ja)
WO (1) WO2011064642A2 (ja)

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WO2011064642A2 (ja) 2009-11-24 2011-06-03 パナソニック電工株式会社 加速度センサ
CA2860544A1 (en) 2012-01-12 2013-07-18 Murata Electronics Oy Accelerator sensor structure and use thereof
JP5979344B2 (ja) * 2012-01-30 2016-08-24 セイコーエプソン株式会社 物理量センサーおよび電子機器
JP5943192B2 (ja) * 2012-04-10 2016-06-29 セイコーエプソン株式会社 物理量センサーおよびその製造方法、並びに電子機器
JP6155832B2 (ja) * 2013-05-16 2017-07-05 セイコーエプソン株式会社 センサー素子、電子機器、および移動体
DE102014202816B4 (de) * 2014-02-17 2022-06-30 Robert Bosch Gmbh Wippeneinrichtung für einen mikromechanischen Z-Sensor
WO2016135852A1 (ja) * 2015-02-24 2016-09-01 三菱電機株式会社 半導体装置およびその製造方法
JP6631108B2 (ja) * 2015-09-15 2020-01-15 セイコーエプソン株式会社 物理量センサー、センサーデバイス、電子機器および移動体
JP6468167B2 (ja) * 2015-11-03 2019-02-13 株式会社デンソー 力学量センサ
JP7112876B2 (ja) 2017-07-06 2022-08-04 浜松ホトニクス株式会社 光学デバイス
CN114384686B (zh) 2017-07-06 2024-05-14 浜松光子学株式会社 光学装置
WO2019009396A1 (ja) * 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
US11733509B2 (en) 2017-07-06 2023-08-22 Hamamatsu Photonics K.K. Optical device
US12180063B2 (en) 2017-07-06 2024-12-31 Hamamatsu Photonics K.K. Optical device and method for manufacturing same
US11635613B2 (en) 2017-07-06 2023-04-25 Hamamatsu Photonics K.K. Optical device
WO2019009392A1 (ja) 2017-07-06 2019-01-10 浜松ホトニクス株式会社 光学デバイス
JP6514804B1 (ja) 2017-07-06 2019-05-15 浜松ホトニクス株式会社 光学デバイス
US10759656B2 (en) * 2017-09-29 2020-09-01 Apple Inc. MEMS sensor with dual pendulous proof masses
CN115657296A (zh) 2017-11-15 2023-01-31 浜松光子学株式会社 光学器件的制造方法
DE102017221891B4 (de) * 2017-12-05 2020-03-19 Bayerische Motoren Werke Aktiengesellschaft Verfahren zum Bestimmen eines Schadens, der bei einem Unfall zwischen einem Fahrzeug und einem Stoßpartner an dem Fahrzeug auftritt
KR102520722B1 (ko) * 2018-04-05 2023-04-11 삼성디스플레이 주식회사 압력 센서
DE102018211547A1 (de) 2018-07-11 2020-01-16 Robert Bosch Gmbh Mikromechanischer Sensor
DE102018219546B3 (de) 2018-11-15 2019-09-12 Robert Bosch Gmbh Mikromechanisches Bauelement
EP4116718B1 (en) * 2021-07-05 2026-01-28 Murata Manufacturing Co., Ltd. Seesaw accelerometer
EP4249923A1 (en) 2022-03-25 2023-09-27 Murata Manufacturing Co., Ltd. Improved accelerometer element for detecting out-of-plane accelerations

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See also references of EP2506018A4 *

Also Published As

Publication number Publication date
US9261530B2 (en) 2016-02-16
EP2506018A4 (en) 2013-06-19
US20150253350A1 (en) 2015-09-10
US20170276696A1 (en) 2017-09-28
CN102667497A (zh) 2012-09-12
WO2011064642A2 (ja) 2011-06-03
US20120227494A1 (en) 2012-09-13
US20160025768A1 (en) 2016-01-28
CN102667497B (zh) 2014-06-18
US10126322B2 (en) 2018-11-13
EP2506018A2 (en) 2012-10-03
US9702895B2 (en) 2017-07-11
US9244094B2 (en) 2016-01-26

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