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WO2011042041A1 - Capteur microélectromécanique à principe de condensateur différentiel - Google Patents

Capteur microélectromécanique à principe de condensateur différentiel Download PDF

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Publication number
WO2011042041A1
WO2011042041A1 PCT/EP2009/062887 EP2009062887W WO2011042041A1 WO 2011042041 A1 WO2011042041 A1 WO 2011042041A1 EP 2009062887 W EP2009062887 W EP 2009062887W WO 2011042041 A1 WO2011042041 A1 WO 2011042041A1
Authority
WO
WIPO (PCT)
Prior art keywords
sensor according
electrode
electrodes
microelectromechanical sensor
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/062887
Other languages
German (de)
English (en)
Inventor
Marco Dienel
Jörg Schaufuß
Jan Mehner
Dirk Scheibner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Priority to PCT/EP2009/062887 priority Critical patent/WO2011042041A1/fr
Publication of WO2011042041A1 publication Critical patent/WO2011042041A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0056—Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5783—Mountings or housings not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/038—Microengines and actuators not provided for in B81B2201/031 - B81B2201/037

Definitions

  • the invention relates to a microelectromechanical sensor with differential capacitor principle, which has a capacitor with a movable electrode and at least one fixed electrode, wherein the movable and the fixed electrode are formed at least in a partial area as flat surfaces which are arranged parallel to each other, i. between which there is a gap.
  • microelectromechanical sensors are known. It is also known in capacitive sensors to keep the gap as small as possible, since the sensitivity increases with the reduction of the gap distance. There are several methods available for generating small capacitive gap distances. For example, the microelectromechanical structure is produced with technologically easily realizable, relatively large gap distances. After completion, the gap distance is reduced by means of an adjustment actuator. Hitherto, the adjustment direction has always been the same as the detection direction or working direction of the sensor, such as, for example, the sensor. in the document "Micromechanical resonators with submicron capacitive gaps in 2 ⁇ process" from ELECTRONICS LETTERS, Dec. 6, 2007, Vol.43, No.25 This means that several adjustment actuators have to be integrated in order to reduce counteracting gap spacings of a differential arrangement ,
  • the invention has for its object to provide a microelectromechanical sensor of the type mentioned above, which allows a reduction in the gap distance in a simple manner.
  • the object is achieved with the features of claim 1.
  • the first means for gap reduction comprise at least one return spring.
  • the first means for gap reduction at least one stop umfas ⁇ sen.
  • microelectromechanical sensor is when, according to claim 4 second means are provided by which the movable electrode is movable in an Ar ⁇ beitsraum having an angle to the flat surfaces of the electrodes, which differs substantially from 90 °.
  • the adjustment direction and the working direction are separated from each other.
  • the cross-sensitivity for vibrations in the adjustment direction can be reduced.
  • the electrodes are formed in the shape of a comb with triangular tips which engage with each other, wherein the inclined surfaces of the triangular tips of the movable electrode at least partially opposite those of the fixed electrode with the gap.
  • a further particularly advantageous embodiment is when according to claim 9 for detecting the back and forth Movement of the movable electrode in the working direction two fixed electrodes are provided.
  • the fixed electrodes are designed with a multiplicity of triangular electrode elements which are interconnected by buried conductor tracks. This results in an electrode pair arrangement for detecting the movement of the movable electrode in the forward and reverse directions.
  • FIG. 3 shows a schematic representation of another erfinderi ⁇ rule sensor with differential capacitor principle and 4 different embodiments of electrode structures.
  • FIG 1 the basic principle of the inventive micro-electromechanical sensor with differential capacitor principle is shown schematically.
  • the sensor has a capacitor with a movable electrode and at least one fixed electrode.
  • the movable electrode is moved in the adjustment direction y.
  • the adjustment y has the position of the two surfaces 1.2 an angle ß, which is substantially smaller than 90 °.
  • the cross-sensitivity for vibrations in the adjustment direction is changed according to the angle ⁇ , preferably reduced by the factor sin ( ⁇ ), whereas the sensitivity in the working direction is changed only by cos ( ⁇ ).
  • sin (ß) is much smaller than cos (ß).
  • the sensor 3 has a movable electrode 4 and two fixed electrodes 5.
  • these electrodes 4, 5 is made comb-shaped with triangular tips 6 which interlock, wherein the inclined surfaces of the triangular tips 6 of the movable electrode 4 at least in part ⁇ as those of the fixed electrode 5 facing with a gap d.
  • the two fixed electrodes 5 lent a drive on the outward and return path during a movement in the working direction x.
  • two interconnected combs are provided for the electrodes 4, 5 in each case.
  • more combs can also be specified according to this principle.
  • the two combs forming the movable electrode 4 are each connected to first gap-reducing means 7 in an adjustment direction y.
  • the working direction x in which the deflection of the movable electrode 4 is provided, lies at an angle of 90 ° with respect to the adjustment direction y.
  • the separation of the working direction x and the adjustment direction y as well as the beveled shape of the electrodes 4, 5 also causes a gap reduction with only one adjusting actuator. tion simultaneously between two electrode pairs is possible and the use as a differential capacitor is still guaranteed.
  • the first means 7 for gap reduction comprise in addition to the Justieraktor two return springs 8 and two stops 9, which can be made fixed or variable. As stops 9, e.g. Serve stopper.
  • the adjustment movement can be stepped, e.g. via the stoppers or latching pawls or continuously. This also allows an adaptive adjustment of the gap distance.
  • second means 10 which are designed here as springs and which ensure the movement of the movable electrode 4 in the working direction x.
  • the described sensor 3 with first means 7 for gap reduction would be e.g. advantageous used when a vibration excitation occurs at high frequencies. In this case, smaller movement amplitudes result, which require greater sensor sensitivity by adjusting the gap distance.
  • FIG. 1 Another embodiment of an inventive sensor is shown in FIG.
  • the stationary electrodes 5 are not comb-shaped, but with a plurality of triangular electrode elements El and E2, which enable an electrode pair arrangement for detecting the movement of the movable electrode 4 in the forward and reverse directions.
  • the respective uniform electrode elements El and E2 are each connected by buried conductor tracks, ie in another plane of the microelectromechanical structure.
  • the present embodiment of the ⁇ be described embodiment of Figure 2 corresponds.
  • stops 9 are not absolutely necessary, since adjustment movements can also take place in several steps with a predetermined step size or continuously.
  • the adjustment movement can also take place via the stationary electrodes instead of via the inertial mass.
  • FIG. 4 shows various electrode structures for movable and stationary electrodes 4, 5.
  • the seismic mass (the tines or corners can be made larger or smaller in volume depending on the position of the resonance frequency).

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Micromachines (AREA)
  • Gyroscopes (AREA)

Abstract

L'invention concerne un capteur microélectromécanique (3) à principe de condensateur différentiel qui présente un condensateur avec une électrode mobile (4) et au moins une électrode fixe (5). L'électrode mobile (4) et l'électrode fixe (5) sont conçues au moins dans une région partielle comme des surfaces planes qui sont disposées parallèlement entre elles, c'est-à-dire qu'il y a une fente entre elles. Des premiers moyens (7) destinés à réduire la fente dans un sens d'ajustement (y) sont reliés à l'électrode mobile (4), le sens d'ajustement (y) présentant un angle s'écartant essentiellement de 90° par rapport aux surfaces planes des électrodes (4, 5). Les doigts des électrodes en forme de peigne sont orientés en oblique par rapport à la direction de déplacement des électrodes et à la direction de déplacement des moyens d'ajustement.
PCT/EP2009/062887 2009-10-05 2009-10-05 Capteur microélectromécanique à principe de condensateur différentiel Ceased WO2011042041A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/EP2009/062887 WO2011042041A1 (fr) 2009-10-05 2009-10-05 Capteur microélectromécanique à principe de condensateur différentiel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/EP2009/062887 WO2011042041A1 (fr) 2009-10-05 2009-10-05 Capteur microélectromécanique à principe de condensateur différentiel

Publications (1)

Publication Number Publication Date
WO2011042041A1 true WO2011042041A1 (fr) 2011-04-14

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Family Applications (1)

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Country Status (1)

Country Link
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114814293A (zh) * 2022-06-29 2022-07-29 成都华托微纳智能传感科技有限公司 一种锯齿形梳齿结构的mems加速度计

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888394A1 (fr) * 2005-07-08 2007-01-12 Commissariat Energie Atomique Dispositif capacitif a volume capacitif optimise
EP1819035A2 (fr) * 2006-02-13 2007-08-15 Commissariat A L'energie Atomique Système de conversion d'énergie à distance d'entrefer ajustable et procédé correspondant

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2888394A1 (fr) * 2005-07-08 2007-01-12 Commissariat Energie Atomique Dispositif capacitif a volume capacitif optimise
EP1819035A2 (fr) * 2006-02-13 2007-08-15 Commissariat A L'energie Atomique Système de conversion d'énergie à distance d'entrefer ajustable et procédé correspondant

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
CHANG HAN JE ET AL: "Sensing gap reconfigurable capacitive type MEMS accelerometer", PROCEEDINGS OF THE SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING SPIE - THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING USA, vol. 6800, 21 December 2007 (2007-12-21), pages 68001Z-1 - 68001Z-7, XP002588302, ISSN: 0277-786X *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114814293A (zh) * 2022-06-29 2022-07-29 成都华托微纳智能传感科技有限公司 一种锯齿形梳齿结构的mems加速度计

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