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WO2010119726A1 - Procédé de fabrication de lentilles minces - Google Patents

Procédé de fabrication de lentilles minces Download PDF

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Publication number
WO2010119726A1
WO2010119726A1 PCT/JP2010/052728 JP2010052728W WO2010119726A1 WO 2010119726 A1 WO2010119726 A1 WO 2010119726A1 JP 2010052728 W JP2010052728 W JP 2010052728W WO 2010119726 A1 WO2010119726 A1 WO 2010119726A1
Authority
WO
WIPO (PCT)
Prior art keywords
light
lens
manufacturing
resin
photocurable resin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2010/052728
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English (en)
Japanese (ja)
Inventor
雄一 藤井
明子 原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Konica Minolta Opto Inc
Original Assignee
Konica Minolta Opto Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Konica Minolta Opto Inc filed Critical Konica Minolta Opto Inc
Publication of WO2010119726A1 publication Critical patent/WO2010119726A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/003—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor characterised by the choice of material
    • B29C39/006—Monomers or prepolymers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
    • B29C39/22—Component parts, details or accessories; Auxiliary operations
    • B29C39/40—Compensating volume change, e.g. retraction
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B29D11/00307—Producing lens wafers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00432—Auxiliary operations, e.g. machines for filling the moulds
    • B29D11/00442—Curing the lens material
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B3/00—Simple or compound lenses
    • G02B3/0006—Arrays
    • G02B3/0012—Arrays characterised by the manufacturing method
    • G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses

Definitions

  • the present invention relates to a method for manufacturing a wafer lens.
  • Patent Document 2 An example of a method for forming a resin lens portion on a glass substrate is disclosed in Patent Document 2.
  • a composition comprising a photocurable resin, a thermosetting resin, a photopolymerization agent and a thermal polymerization agent is applied to a substrate, the resin is photocured (light irradiation), and then shaped ( (Pressing of mold to resin) and thermosetting (see paragraphs 0069 to 0080).
  • a photocurable resin is filled between a glass substrate and a mold and light is irradiated in that state.
  • the optical surface of the lens unit is required to be transferred from the mold with high accuracy of the order of submicron or less.
  • the photo-curable resin generally has a property of shrinking by curing, and is cured while slightly shrinking inside the mold when irradiated with light.
  • a main object of the present invention is to provide a method of manufacturing an optical element capable of suppressing the occurrence of sink marks within the effective diameter range of the lens part, at least the lens part.
  • a method for manufacturing a wafer lens in which a plurality of lenses having a lens portion and a non-lens portion around the lens portion are formed on a substrate with a photocurable resin, Filling the photocurable resin between the mold and the substrate; A curing step of advancing curing of the photocurable resin by performing light irradiation on the photocurable resin, The curing step includes a first light irradiation step of irradiating the first region of the photocurable resin with light, and a second light irradiating the second region of the irradiation region wider than the first region.
  • a method for manufacturing a wafer lens comprising an irradiation step.
  • a method for manufacturing a wafer lens in which a plurality of lenses having a lens portion and a non-lens portion around the lens portion are formed on a substrate with a photocurable resin, Filling the photocurable resin between the mold and the substrate; A curing step of proceeding curing of the photocurable resin by irradiating the photocurable resin with light, and the curing step irradiates only a portion corresponding to the lens portion of the photocurable resin. And a second light irradiation step of irradiating a portion corresponding to a non-lens portion around the lens portion of the photocurable resin. Is done.
  • the present invention it is possible to suppress the occurrence of sink marks within the effective diameter within the lens portion, at least the lens portion.
  • the wafer lens 1 has a glass substrate 2.
  • the glass substrate 2 is an example of a substrate and has a wafer shape (circular shape) when viewed from above.
  • the resin part 4 is provided on the upper part of the glass substrate 2.
  • the resin part 4 includes a convex lens part 4a that is a part for converging or diverging incident light by refraction or diffraction action with respect to the incident light, and a non-lens part 4b that transmits the incident light as it is.
  • the convex lens portion 4a serving as a part that causes a refractive action constitutes a convex lens-shaped optical surface.
  • the non-lens part 4b is a part other than the convex lens part 4a and a part around the convex lens part 4a, and is configured in a flat plate shape to transmit substantially incident light as it is.
  • the non-lens portion 4b does not necessarily have a flat plate shape, and may be a portion that does not contribute to the optical function as the lens when the present invention is used as a lens of an imaging optical system.
  • the region has a function suitable as a spacer portion for defining the shape suitable for holding and the distance from other lens members and imaging element members for positioning and holding with other members. May be.
  • the thickness 4ath of the convex lens portion 4a is thicker than the thickness 4bth of the non-lens portion 4b because the convex lens portion 4a has a convex shape.
  • the resin part 6 is provided in the lower part of the glass substrate 2.
  • the resin portion 6 includes a concave lens portion 6a that is a portion for converging or diverging incident light by refraction or diffraction action with respect to incident light, and a non-lens portion 6b that transmits incident light as it is.
  • the concave lens portion 6a serving as a portion that causes a refractive action constitutes a concave lens-shaped optical surface.
  • the non-lens portion 6b is a portion other than the concave lens portion 6a and a portion around the concave lens portion 6a, and is configured in a flat plate shape to transmit substantially incident light as it is.
  • the non-lens portion 6b does not necessarily have a flat plate shape, and may be a portion in a range that does not contribute to the optical function as the lens when the present invention is used as a lens of an imaging optical system.
  • the region has a function suitable as a spacer portion for defining the shape suitable for holding and the distance from other lens members and imaging element members for positioning and holding with other members. May be.
  • the thickness 6ath of the concave lens portion 6a is thinner than the thickness 6bth of the non-lens portion 6b because the concave lens portion 6a has a concave shape.
  • the resin parts 4 and 6 are formed in a form in which the non-lens parts 4 b and 6 b between the adjacent lens parts 4 a and 6 a are connected, but the resin parts 4 and 6 are not necessarily limited thereto. That is, by individually dropping and molding a photo-curable resin on the part corresponding to the cavity of the mold during molding, each lens part 4a, 6a is formed with non-lens parts 4b, 6b around, It may be formed independently.
  • the wafer lens 1 is a so-called meniscus lens in which the convex lens portion 4a and the concave lens portion 6a are in a one-to-one correspondence. .
  • the resin part 4 and the resin part 6 are composed of resins 4A and 6A, respectively.
  • Resins 4A and 6A are photocurable resins, but the present invention is most effective for resins that can be cured by radical polymerization, such as acrylic resins that are highly contracted by curing.
  • the (meth) acrylate used for the polymerization reaction is not particularly limited, and the following (meth) acrylate produced by a general production method can be used. That is, ester (meth) acrylate, urethane (meth) acrylate, epoxy (meth) acrylate, ether (meth) acrylate, alkyl (meth) acrylate, alkylene (meth) acrylate, (meth) acrylate having an aromatic ring, alicyclic Examples include (meth) acrylate having a structure. One or more of these can be used.
  • (Meth) acrylate having an alicyclic structure is particularly preferable, and may be an alicyclic structure containing an oxygen atom or a nitrogen atom.
  • 2-alkyl-2-adamantyl (meth) acrylate see Japanese Patent Application Laid-Open No. 2002-193883
  • adamantyl di (meth) acrylate see Japanese Patent Application Laid-Open No. 57-5000785
  • diallyl adamantyl dicarboxylate Japanese Patent Application Laid-Open No. 60-10000537
  • perfluoroadamantyl acrylate see JP 2004-123687
  • (meth) acrylate for example, methyl acrylate, methyl methacrylate, n-butyl acrylate, n-butyl methacrylate, 2-ethylhexyl acrylate, 2-ethylhexyl methacrylate, isobutyl acrylate, isobutyl methacrylate, tert-butyl acrylate Tert-butyl methacrylate, phenyl acrylate, phenyl methacrylate, benzyl acrylate, benzyl methacrylate, cyclohexyl acrylate, cyclohexyl methacrylate, and the like.
  • polyfunctional (meth) acrylate examples include trimethylolpropane tri (meth) acrylate, pentaerythritol tetra (meth) acrylate, pentaerythritol tri (meth) acrylate, dipentaerythritol hexa (meth) acrylate, dipentaerythritol penta (meth) ) Acrylate, dipentaerythritol tetra (meth) acrylate, dipentaerythritol tri (meth) acrylate, tripentaerythritol octa (meth) acrylate, tripentaerythritol septa (meth) acrylate, tripentaerythritol hexa (meth) acrylate, tripenta Erythritol penta (meth) acrylate, tripentaerythritol tetra (meth) acrylate, tripent
  • an allyl resin or the like can be used as the resins 4A and 6A, and the resin can be cured by radical polymerization.
  • photocurable resins that can be used as the resins 4A and 6A include, for example, epoxy resins, and the resins can be cured by cationic polymerization.
  • the photocurable resin used in the present invention includes not only the photocurable resin as described above but also a thermal polymerization initiator in addition to the photopolymerization initiator, and is combined with curing by thermal polymerization by heating. Also included.
  • the light to be cured includes not only visible light and ultraviolet light but also electron beams. Furthermore, you may provide what is called a post-cure process which completes hardening by applying heat after the 2nd light irradiation process mentioned later. Even in the case of a photocurable resin containing only a photopolymerization initiator as a polymerization initiator, photocuring is accelerated by heating, but if a thermal polymerization initiator is further blended here, the acceleration is promoted. The effect is further increased.
  • the wafer lens manufacturing apparatus 30 has a base 32.
  • a protruding portion 34 that protrudes inward is formed on the upper portion of the base 30.
  • a guide 36 is erected between the bottom of the base 32 and the protrusion 34.
  • a stage 40 is provided between the guides 36.
  • a through hole 42 is formed in the stage 40, and the guide 36 passes through the through hole 42.
  • a geared motor 50 is provided on the base 32 and below the stage 40.
  • the geared motor 50 has a built-in potentiometer 51 indicated by a dotted line.
  • a shaft 52 is connected to the geared motor 50.
  • a load cell 44 for pressure detection is provided between the lower portion of the stage 40 and the shaft 52, and the tip of the shaft 52 is in contact with the load cell 44 by the weight of the stage 40.
  • the shaft 52 extends and contracts in the vertical direction by the operation of the geared motor 50, and accordingly, the stage 40 is movable in the vertical direction while being guided by the guide 36.
  • the recess 40 having a substantially hemispherical shape is formed on the stage 40.
  • a paralleling member 60 is embedded in the recess 46.
  • the paralleling member 60 can swing with respect to the recess 46 like a bowl floating on the water surface.
  • An XY stage 62 and a ⁇ stage 64 are provided on the parallel projecting member 60.
  • the XY stage 62 is movable on an XY plane (two-dimensional plane) on the stage 40, and the ⁇ stage 64 is rotatable about its central portion as a rotation axis.
  • a vacuum chuck device 70 is installed on the XY stage 62 and the ⁇ stage 64.
  • a concentric communication groove 72 is formed in the vacuum chuck device 70.
  • a suction mechanism (not shown) is connected to the communication groove 72, and air can be sucked from the communication groove 72 by the operation of the suction mechanism, and members on the vacuum chuck device 70 can be sucked and fixed. ing.
  • the mold 20 is disposed on the vacuum chuck device 70, and the mold 20 is sucked and fixed by the vacuum chuck device 70.
  • the mold 20 is a metal mold and is an example of a mold used for resin molding.
  • a resin (resin 4A or the like) to be molded is placed on the mold 20.
  • the substrate holder 80 is fixed to the upper part of the base 32.
  • a concentric communication groove 82 is formed at the end of the substrate holder 80, and a suction mechanism (not shown) is connected to the communication groove 82.
  • a suction mechanism (not shown) is connected to the communication groove 82.
  • the suction mechanism operates, the glass substrate 2 is sucked and fixed to the substrate holder 80 by sucking air from the communication groove 82.
  • a light source 90 is provided above the substrate holder 80. When the light source 90 is turned on, light passes through the glass substrate 2 and is irradiated onto a resin (resin 4A, etc.) on the mold 20.
  • a resin resin 4A, etc.
  • a high-pressure mercury lamp metal halide lamp, xenon lamp, halogen lamp, fluorescent lamp, black light, G lamp, F lamp, LED, or the like is used.
  • the high-pressure mercury lamp is a lamp having a narrow spectrum at 365 nm and 436 nm.
  • a metal halide lamp is a kind of mercury lamp, and its output in the ultraviolet region is several times higher than that of a high-pressure mercury lamp.
  • a xenon lamp is a lamp having a spectrum closest to sunlight.
  • Halogen lamps contain a lot of long-wavelength light and are mostly near-infrared light. Fluorescent lamps have uniform illumination intensity for the three primary colors of light. Black light has a peak top at 351 nm and emits near-ultraviolet light of 300 to 400 nm. LEDs have different emission colors depending on the materials used, and can produce LEDs that emit light in the infrared region, visible light region, and ultraviolet region.
  • the load cell 44, geared motor 50, potentiometer 51, parallelizing member 60, XY stage 62, ⁇ stage 64, vacuum chuck device 70 (suction mechanism), substrate holder 80 (suction mechanism), and light source 90 are controlled. It is connected to the device 100.
  • the control device 100 controls the operation of these members.
  • control device 100 controls the operation (rotation amount) of the geared motor 50 based on the output values of the load cell 44 and the potentiometer 51.
  • the glass substrate 2 is placed on the substrate holder 80 and sucked and fixed, and the mold 20 is placed on the vacuum chuck device 70 and the mold 20 is sucked and fixed.
  • the dropping method is also a method in which each cavity 22 is filled by dropping and spreading them on a predetermined location, or each cavity 22 of the mold 20 or each lens portion 4a of the glass substrate 2 is formed in advance.
  • a method may be used in which the liquid is dropped individually, and is filled by pressing them with the mold 20 or the glass substrate 2 facing each other.
  • the position of the mold 20 is controlled, the mold 20 is moved to a predetermined position with respect to the glass substrate 2, and the mold 20 is held at that position.
  • the geared motor 50 is operated to extend the shaft 52 upward, and the mold 20 is moved upward.
  • the control device 100 controls the operation of the geared motor 50 based on the output value of the potentiometer 51, and moves the mold 20 to a predetermined height position.
  • the height position of the mold 20 to be moved is set in the control device 100 in advance, and the control device 100 operates the geared motor 50 to a position where the mold 20 reaches the reference position S.
  • the operation of the geared motor 50 is stopped (position control step).
  • the resin 4A gradually receives the pressure from the mold 20 to the glass substrate 2 and spreads between the glass substrate 2 and the mold 20 (particularly, the cavity 22 of the mold 20).
  • a light shielding mask 120 is disposed above the glass substrate 2 and between the glass substrate 2 and the light source 90.
  • the light shielding mask 120 has a portion corresponding to the cavity 22 of the mold 20 (preferably the optical effective diameter range of the convex lens portion 4a in the cavity 22; in the case of configuring an imaging device, the lens portion is transmitted through the lens portion later.
  • An opening 122 in which an entrance pupil diameter range necessary for forming an image in an effective pixel region of the image sensor is opened is formed.
  • the light source 90 is turned on while the mold 20 is held at the position corresponding to the reference position S, and light is irradiated toward the resin 4A (first light irradiation step).
  • the portion of the resin 4A that receives the transfer of the cavity 22 of the mold 20 and that corresponds to the convex lens portion 4a is irradiated with light prior to other portions, and the convex lens portion 4a ( Preferably, it begins to cure selectively within the optical effective diameter range of the convex lens portion 4a.
  • the convex lens portion 4a is divided according to the size of the diameter from the center by changing the light shielding mask 120 (the opening diameter of the opening portion 122), and the outer periphery from the center region is divided. You may make it irradiate light sequentially toward an area
  • the convex lens portion 4a is divided into a region (1) and a region (2), the region (1) is irradiated with light first, and then the light shielding mask 120 is changed to change the region ( 2) is irradiated with light.
  • the illuminance is increased for light irradiation in a region including the center of the optical axis with a thick lens thickness (for example, the region (1)), and other regions (for example, In the irradiation of the light in the region (2), the illuminance may be decreased (the illuminance is made smaller than that of the previous light irradiation).
  • the light shielding mask 120 is removed, and the entire resin 4A is irradiated with light (second light irradiation step).
  • the light shielding mask 120 that shields the light from the light source 90 since the light shielding mask 120 that shields the light from the light source 90 is removed, the light from the light source 90 propagates directly toward the resin 4A without being shielded. As a result, in the resin 4A, the portion corresponding to the convex lens portion 4a and the portion corresponding to the non-lens portion 4b, that is, the entire resin 4A are irradiated with light, and the non-lens portion 4b is cured together with the convex lens portion 4a. Proceed.
  • the illuminance of light may be kept constant (irradiation pattern A1), or the first light irradiation step and the second light irradiation step.
  • the light source 90 may be temporarily turned off to reduce the illuminance of the light (irradiation pattern A2).
  • a light source that emits divergent light is used as the light source 90, and the light shielding mask 120 is moved upward without removing the light shielding mask 120 (the distance between the light shielding mask 120 and the resin 4A is increased). You may make it irradiate light to resin 4A whole, expanding rather than the time of a 1st light irradiation process.
  • the light shielding mask 120 is formed on the glass substrate 2 in advance as an aperture stop, light is irradiated from the mask side, that is, the aperture stop side in the first light irradiation step, and light shielding by the mask is performed in the second light irradiation step.
  • the light may be irradiated from the side of the glass substrate 2 opposite to the aperture stop where the function does not work.
  • the mold 20 at this time needs to be formed transparently, and light irradiation is performed through the mold 20. In this case, there is an advantage that the process can be performed efficiently because it can be performed regardless of the type of light source and without removing the light shielding mask 120 each time.
  • the mold 20 and the glass substrate 2 may be removed and passed through a UV furnace to be cured entirely. Further, after the second light irradiation step, heat may be applied to promote photocuring. This is a so-called post-cure process, and accelerates curing by photopolymerization. Furthermore, a thermal polymerization initiator can be blended in the resin, and further curing can be promoted by light irradiation and heating.
  • the geared motor 50 is operated to shrink the shaft 52 downward, and the mold 20 is returned to the original height position. As shown in FIG. Release from the mold 20 (release process).
  • the resin part 4 in which a plurality of convex lens parts 4 a are formed can be formed on the glass substrate 2.
  • the pressing force of the mold 20 against the glass substrate 2 (pressure value detected by the load cell 44) in the process from the installation of the mold 20 at the reference position S to the release of the resin 4A from the mold 20 is as follows. As shown in FIG. 6, after the light irradiation is started in the first light irradiation step, it continues to gradually decrease until the light irradiation is finished in the second light irradiation step, and the resin 4A is separated from the mold 20. It drops rapidly when molding (pressure pattern B1).
  • the reason why the pressing force of the mold 20 decreases from the start of light irradiation to the end thereof is considered to be due to the resin 4A being irradiated with light and being cured and contracted.
  • the gold mold is used in the mold release process from the start of the light irradiation in the first light irradiation process until the end of the light irradiation in the second light irradiation process.
  • the operation of the geared motor 50 is controlled so that the pressing force of the mold 20 against the glass substrate 2 is kept constant during light irradiation (pressure pattern B2 ) Or in the middle of light irradiation (pressure pattern B3) to improve the transferability of the mold 20 to the resin 4A.
  • the resin 4A after light irradiation is temporarily cooled (naturally) between the end of light irradiation in the second light irradiation step and the release of the resin 4A from the mold 20 in the release step. (Including neglected).
  • a resin that is reactively cured by cationic polymerization such as an epoxy resin, has a slow reaction rate. Therefore, the reaction does not end only by irradiating a predetermined amount of light. Therefore, it is desirable to maintain the molding state until the reaction ends.
  • the pressing force of the mold 20 against the glass substrate 2 continues to decrease during the light irradiation period and during the cooling period, and during the transition from the light irradiation period to the cooling period. It switches in steps (pressure pattern B4).
  • the pressing force of the mold 20 against the glass substrate 2 is controlled according to the pressure pattern B2 or B3.
  • the glass substrate 2 is turned over, and the glass substrate 2 is formed in the same manner as the resin portion 4 is formed on the glass substrate 2 (by repeating the processes from the preparation step to the release step).
  • the resin part 6 is formed for 2.
  • a mold 24 for molding the concave lens portion 6a is used instead of the mold 20, and a resin 6A is used instead of the resin 4A.
  • the resin 6A may be temporarily cooled (including natural standing).
  • the light irradiation is divided into two stages of a first light irradiation process and a second light irradiation process, and the light irradiation range is determined by the convex lens part 4a in the first light irradiation process. Only in the range of the optical effective diameter (preferably within the range of the optical effective diameter), in the subsequent second light irradiation step, the entire resin 4A is changed (see FIGS. 4A and 4B).
  • the convex lens portion 4a begins to harden first, and then the non-lens portion 4b hardens, the convex shrinkage of the convex lens portion 4a occurs first, and the non-lens portion 4b shrinks after that.
  • the pressing force of the mold 20 is controlled according to the pressure patterns B2 and B3, so that the transferability of the mold 20 to the resin 4A can be reliably improved.
  • the thickness 4bth of the non-lens part 4b is thinner than the thickness 4ath of the convex lens part 4a, more accurate transfer can be achieved by simultaneously irradiating the non-lens part 4b and the convex lens part 4a with light. Transferability was not always sufficient for lenses that required high performance. This is because the non-lens portion 4b hardens first, and even if it tries to press the mold 20, the non-lens portion 4b inhibits the movement of the mold 20, and the pressing of the mold 20 is sufficiently transmitted to the convex lens portion 4a. It is thought that it is not possible to do.
  • the convex lens portion 4a is selectively irradiated with light and the non-lens portion 4b is not irradiated with light in the first light irradiation step. It can be seen that there is no hindrance to the movement of the mold 20, the pressure of the mold 20 can be sufficiently transmitted to the convex lens portion 4a, and as a result, the transferability of the mold 20 to the resin 4A can be improved reliably. It was.
  • ⁇ is an example in which sink marks are suppressed and shows good transferability
  • X is an example in which sink marks or transferability is not good.
  • ⁇ in the item of “deviation from optical surface design value” is an evaluation content that the lens portion 4a falls within a range where the optical surface can be corrected.
  • light irradiation may be intermittently performed as shown in FIG. 10 (irradiation pattern A3).
  • the light irradiation pattern A3 is effective when a resin having a particularly high curing rate is selected as the resin 4A among the photocurable resins.
  • the light irradiation is divided into two stages of a first light irradiation process and a second light irradiation process, and the light irradiation range is a concave lens in the first light irradiation process. Only the portion 6a (preferably within the optical effective diameter range) is changed to the entire resin 6A in the subsequent second light irradiation step (see FIG. 4D).
  • the concave lens portion 6a is already cured, and the contraction accompanying the curing of the non-lens portion 6b is the concave lens portion. 6a can be reduced, and the occurrence of sink marks can be suppressed in the concave lens portion 6a as the resin 6A is cured.
  • the pressing force of the mold 24 is not controlled after the second light irradiation process according to the pressure patterns B5 and B6. Transferability of the mold 24 to the resin 6A can be reliably improved.
  • the mold 24 is pressed while simultaneously irradiating light to the concave lens part 6a and the non-lens part 6b. If it continues, the concave lens part 6a will harden
  • the pressing of the mold 24 is released and the pressure is not controlled, so that the concave lens portion 6a is delayed during the curing of the non-lens portion 6b. Without being pressed, the state formed in the first light irradiation step can be maintained almost as it is, and as a result, the transferability of the mold 24 to the resin 6A can be reliably improved.
  • the method that does not control the pressing force in the second light irradiation step is not only in the case of a concave lens, but also in the case of an optical element in which a projection for positioning or the like as a non-lens part is formed thicker than the lens part around the lens part. Is also applicable.
  • the resin portion 6 may be temporarily reduced during a predetermined period in the first light irradiation process (irradiation pattern A4). ).
  • the light irradiation patterns A1 to A4 are disclosed in accordance with the formation mode of the resin parts 4 and 6, but the light irradiation patterns A1 to A4 are the first every time the resin parts 4 and 6 are formed.
  • the light irradiation step and the second light irradiation step may be appropriately combined.
  • the resin parts 4 and 6 are separately formed using the molds 20 and 24. However, the resin parts 4 and 6 may be formed simultaneously.
  • a mold 20 is used for forming the resin part 4 and a light-transmitting resin mold 26 is used for forming the resin part 6.
  • the resin mold 26 is a resin mold and is another example of a mold used for resin molding.
  • the resin mold 26 includes a molding part 26a and a support part 26b.
  • the molding part 26a has a convex surface corresponding to the concave lens part 6a, and the support part 26b supports the molding part 26a and increases its strength.
  • the resin 4A is filled between the mold 20 and the glass substrate 2
  • the resin 6A is filled between the resin mold 26 and the glass substrate 2, and light is applied in the first and second light irradiation steps. Irradiation is sufficient.
  • the resin portion 28 may be used for forming the resin portion 4, and the resin die 26 may be used for forming the resin portion 6.
  • the resin mold 28 is also a resin mold and is another example of a mold used for resin molding.
  • the resin mold 28 has substantially the same configuration as the resin mold 26.
  • the molding part 28a has a concave surface corresponding to the convex lens part 4a, and the support part 28b supports the molding part 26a and increases its strength.
  • the resin 4A is filled between the resin mold 28 and the glass substrate 2
  • the resin 6A is filled between the resin mold 26 and the glass substrate 2, respectively, in the first and second light irradiation steps.
  • Light may be irradiated from both above and below.
  • the wafer lens 1 is disclosed in which only one resin portion 4 or 6 is formed on the glass substrate 2, but a plurality of resin portions 4 (resin portions 6) are provided on the large-diameter glass substrate 2. And this may be used as the wafer lens 1.
  • the resin portion 4 is sequentially formed on one surface of the glass substrate 2 according to a so-called step-and-repeat method, and then the resin portion 6 is formed on the other surface of the glass substrate 2. You should form sequentially.
  • the second embodiment is different from the first embodiment in the following points, and other technical matters are the same as those of the first embodiment.
  • the second embodiment is largely different from the first embodiment in that the light shielding mask 120 is not used in the first and second light irradiation steps.
  • a lens array 96 is provided below the light source 90.
  • the light source 90 is turned on and the light is condensed by the lens array 96, and the convex lens portion 4a of the resin 4A is collected.
  • the lens array 96 is moved downward (the distance between the lens array 96 and the resin 4A is narrower than that in the first light irradiation step). ) The entire resin 4A is irradiated with light.
  • a plurality of point light sources 92 are provided instead of the light source 90.
  • the point light source 92 is disposed in a region where the resin 4A (resin 6A) can be irradiated with light.
  • the point light source 92 facing the cavity 22 of the mold 20 is turned on among the plurality of point light sources 92.
  • the resin 4A light is selectively irradiated only to a portion corresponding to the convex lens portion 4a.
  • the remaining point light sources 92 are also turned on, and the entire resin 4A is irradiated with light.
  • a plurality of point light sources 94 that are movable in the optical axis direction or a plurality of point light sources 94 ′ with variable irradiation light amount are provided.
  • the point light source 94 is a region where light can be irradiated to the resin 4A (resin 6A) and is disposed at a position facing the cavity 22 (transfer portion of the optical surface).
  • the point light source 94 is a light source that emits divergent light.
  • each point light source 94 in the first light irradiation step, is turned on (see the center of FIG. 17) and corresponds to the convex lens portion 4a in the resin 4A.
  • each point light source 94 is moved upward (the distance between each point light source 94 and the resin 4A is changed from the time of the first light irradiation step).
  • the resin 4A is irradiated with light (see the left side in FIG. 17). Alternatively, as shown on the right side in FIG.
  • the amount of electric power supplied to each point light source 94 ' is increased (the illuminance of each point light source 94' is increased from that in the first light irradiation step), and light is applied to the entire resin 4A. Irradiate.
  • the light distribution of the point light source 94 ′ has the largest amount of light in the central optical axis direction and the light amount in the peripheral portion is small. Therefore, the amount of electric power given in the first light irradiation step may be set to an amount of electric power that is not so large as to cure the resin of the non-lens portion, and in the second light irradiation step, the amount of electric power to cure the resin of the non-lens portion. .
  • the point light sources 92, 94, 94 ′ LEDs or lasers having an emission wavelength at a wavelength corresponding to the photosensitive wavelength of the reaction initiator or reaction sensitizer contained in the photocurable resin are used. it can.

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Health & Medical Sciences (AREA)
  • Ophthalmology & Optometry (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)

Abstract

L'invention concerne un procédé de fabrication d'une lentille mince dans le but d'éviter l'apparition de creux de retrait sur une section de lentille. Le procédé dans lequel la section de lentille composée d'une résine photodurcissable est formée sur un substrat de verre atteint ce but au moyen : d'une étape d'application d'une résine entre une matrice métallique et le substrat de verre ; d'une étape de projection d'une première lumière sur une partie formée de résine qui correspond à la section de lentille ; et d'une étape de projection d'une seconde lumière sur la partie formée de résine qui correspond à la section de lentille et la partie formée de résine qui correspond à la section ne constituant pas la lentille, à la périphérie de la section de lentille.
PCT/JP2010/052728 2009-04-13 2010-02-23 Procédé de fabrication de lentilles minces Ceased WO2010119726A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2009-097241 2009-04-13
JP2009097241 2009-04-13

Publications (1)

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WO2010119726A1 true WO2010119726A1 (fr) 2010-10-21

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PCT/JP2010/052728 Ceased WO2010119726A1 (fr) 2009-04-13 2010-02-23 Procédé de fabrication de lentilles minces

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WO (1) WO2010119726A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012125941A (ja) * 2010-12-13 2012-07-05 Toshiba Mach Co Ltd マスター型製造装置およびマスター型製造方法
JP5156990B1 (ja) * 2011-11-22 2013-03-06 ナルックス株式会社 金型加工方法
WO2013046887A1 (fr) * 2011-09-29 2013-04-04 シャープ株式会社 Dispositif de moulage et procédé de moulage
WO2014156960A1 (fr) * 2013-03-29 2014-10-02 コニカミノルタ株式会社 Procédé de fabrication d'élément optique

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JPH07137159A (ja) * 1993-11-19 1995-05-30 Olympus Optical Co Ltd レンズの成形装置
JPH10190058A (ja) * 1996-12-24 1998-07-21 Hitachi Cable Ltd 紫外線照射装置
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JPH01163027A (ja) * 1987-12-21 1989-06-27 Matsushita Electric Ind Co Ltd 光学素子の成形方法およびその装置
JPH0659104A (ja) * 1992-08-10 1994-03-04 Nikon Corp 非球面光学素子の製造方法
JPH06304936A (ja) * 1993-04-23 1994-11-01 Olympus Optical Co Ltd 複合型光学素子の成形方法
JPH07137159A (ja) * 1993-11-19 1995-05-30 Olympus Optical Co Ltd レンズの成形装置
JPH10190058A (ja) * 1996-12-24 1998-07-21 Hitachi Cable Ltd 紫外線照射装置
JP2003291159A (ja) * 2002-03-29 2003-10-14 Ricoh Opt Ind Co Ltd 樹脂硬化方法及び樹脂成型品等の製造方法、並びにそれらに用いる器具及び得られる製品
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JP2008023868A (ja) * 2006-07-21 2008-02-07 Hitachi High-Technologies Corp エネルギ線硬化型樹脂の転写方法、転写装置及びディスクまたは半導体デバイス

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012125941A (ja) * 2010-12-13 2012-07-05 Toshiba Mach Co Ltd マスター型製造装置およびマスター型製造方法
WO2013046887A1 (fr) * 2011-09-29 2013-04-04 シャープ株式会社 Dispositif de moulage et procédé de moulage
JP2013075379A (ja) * 2011-09-29 2013-04-25 Sharp Corp 成形装置および成形方法
CN103813894A (zh) * 2011-09-29 2014-05-21 夏普株式会社 成型装置以及成型方法
US10286615B2 (en) 2011-09-29 2019-05-14 Sharp Kabushiki Kaisha Molding apparatus and molding method
JP5156990B1 (ja) * 2011-11-22 2013-03-06 ナルックス株式会社 金型加工方法
WO2013076809A1 (fr) * 2011-11-22 2013-05-30 ナルックス株式会社 Procédé d'usinage de moule, moule et élément optique
WO2014156960A1 (fr) * 2013-03-29 2014-10-02 コニカミノルタ株式会社 Procédé de fabrication d'élément optique

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