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WO2010106533A3 - A method and apparatus for accurate determination of parameters of a stack of thin films - Google Patents

A method and apparatus for accurate determination of parameters of a stack of thin films Download PDF

Info

Publication number
WO2010106533A3
WO2010106533A3 PCT/IL2010/000174 IL2010000174W WO2010106533A3 WO 2010106533 A3 WO2010106533 A3 WO 2010106533A3 IL 2010000174 W IL2010000174 W IL 2010000174W WO 2010106533 A3 WO2010106533 A3 WO 2010106533A3
Authority
WO
WIPO (PCT)
Prior art keywords
stack
parameters
accurate determination
thin films
films
Prior art date
Application number
PCT/IL2010/000174
Other languages
French (fr)
Other versions
WO2010106533A2 (en
WO2010106533A4 (en
Inventor
Moshe Finarov
Original Assignee
Brightview Systems Ltd.
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brightview Systems Ltd. filed Critical Brightview Systems Ltd.
Publication of WO2010106533A2 publication Critical patent/WO2010106533A2/en
Publication of WO2010106533A3 publication Critical patent/WO2010106533A3/en
Priority to IL214467A priority Critical patent/IL214467A0/en
Publication of WO2010106533A4 publication Critical patent/WO2010106533A4/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
    • G01B11/303—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces using photoelectric detection means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/55—Specular reflectivity
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/8422—Investigating thin films, e.g. matrix isolation method

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Mathematical Physics (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A method for accurate determination of optical parameters of a stack of thin films with at least one of the films being an opaque film. The method includes measurement of the reflected or transmitted through the stack illumination and mutual correlation of the determined thin film parameters.
PCT/IL2010/000174 2009-03-14 2010-03-03 A method and apparatus for accurate determination of parameters of a stack of thin films WO2010106533A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
IL214467A IL214467A0 (en) 2009-03-14 2011-08-04 A method and apparatus for accurate determination of parameters of a stack of thin films

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16029409P 2009-03-14 2009-03-14
US61/160,294 2009-03-14

Publications (3)

Publication Number Publication Date
WO2010106533A2 WO2010106533A2 (en) 2010-09-23
WO2010106533A3 true WO2010106533A3 (en) 2010-12-16
WO2010106533A4 WO2010106533A4 (en) 2011-12-01

Family

ID=42740069

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2010/000174 WO2010106533A2 (en) 2009-03-14 2010-03-03 A method and apparatus for accurate determination of parameters of a stack of thin films

Country Status (1)

Country Link
WO (1) WO2010106533A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11377728B2 (en) 2016-07-13 2022-07-05 Evatec Ag Broadband optical monitoring
CN113514011A (en) * 2021-06-15 2021-10-19 先导薄膜材料（广东）有限公司 Method for rapidly judging roughness of metal film

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737896A (en) * 1985-07-23 1988-04-12 Canon Kabushiki Kaisha Illumination device
US7019650B2 (en) * 2003-03-03 2006-03-28 Caducys, L.L.C. Interrogator and interrogation system employing the same
US20080078444A1 (en) * 2006-06-05 2008-04-03 Translucent Photonics, Inc. Thin film solar cell

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4737896A (en) * 1985-07-23 1988-04-12 Canon Kabushiki Kaisha Illumination device
US7019650B2 (en) * 2003-03-03 2006-03-28 Caducys, L.L.C. Interrogator and interrogation system employing the same
US20080078444A1 (en) * 2006-06-05 2008-04-03 Translucent Photonics, Inc. Thin film solar cell

Also Published As

Publication number Publication date
WO2010106533A2 (en) 2010-09-23
WO2010106533A4 (en) 2011-12-01

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