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WO2010029817A1 - Light source device and image display device - Google Patents

Light source device and image display device Download PDF

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Publication number
WO2010029817A1
WO2010029817A1 PCT/JP2009/063643 JP2009063643W WO2010029817A1 WO 2010029817 A1 WO2010029817 A1 WO 2010029817A1 JP 2009063643 W JP2009063643 W JP 2009063643W WO 2010029817 A1 WO2010029817 A1 WO 2010029817A1
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WO
WIPO (PCT)
Prior art keywords
light source
light
laser
source device
wavelength
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Ceased
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PCT/JP2009/063643
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French (fr)
Japanese (ja)
Inventor
浩 今井
雅芳 角野
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NEC Corp
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NEC Corp
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Priority to JP2010528689A priority Critical patent/JPWO2010029817A1/en
Publication of WO2010029817A1 publication Critical patent/WO2010029817A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/1006Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/102Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/1006Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/102Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources
    • G02B27/104Beam splitting or combining systems for splitting or combining different wavelengths for generating a colour image from monochromatic image signal sources for use with scanning systems
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10Beam splitting or combining systems
    • G02B27/1086Beam splitting or combining systems operating by diffraction only
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/355Non-linear optics characterised by the materials used
    • G02F1/3558Poled materials, e.g. with periodic poling; Fabrication of domain inverted structures, e.g. for quasi-phase-matching [QPM]
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/35Non-linear optics
    • G02F1/37Non-linear optics for second-harmonic generation
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/2066Reflectors in illumination beam
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03BAPPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B21/00Projectors or projection-type viewers; Accessories therefor
    • G03B21/14Details
    • G03B21/20Lamp housings
    • G03B21/208Homogenising, shaping of the illumination light
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1335Structural association of cells with optical devices, e.g. polarisers or reflectors
    • G02F1/1336Illuminating devices
    • G02F1/133621Illuminating devices providing coloured light
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F2202/00Materials and properties
    • G02F2202/07Materials and properties poled

Definitions

  • the present invention relates to a light source device that generates a second harmonic light beam and an image display device including the same.
  • Projection type that illuminates a planar image display element such as a liquid crystal light valve with incoherent light from a light source such as a halogen lamp or high-pressure mercury lamp, and enlarges and projects the image formed on the image display element on the screen with a projection lens Image devices are known.
  • This type of projection-type image projection apparatus uses an incoherent light source, so that power consumption is large and the brightness of the display image is small.
  • the wavelength band of incoherent light sources is wide. For this reason, it is difficult to realize a display with a wide chromaticity range in a structure in which incoherent light sources are used as light sources of red, green, and blue colors.
  • the image formed on the image display element is formed using a projection lens
  • the focus is achieved only within the focal depth of the projection lens. For this reason, the user must adjust the focus according to the installation position of the screen.
  • Patent Document 1 discloses an image display device that includes a laser light source that is a coherent light source, and that projects and displays an image on a screen by scanning with the laser beam from the laser light source. It is disclosed.
  • speckle noise on speckles
  • Speckle can be reduced by widening the wavelength width of the laser beam and reducing the coherence.
  • As a method of widening the wavelength width there is a method of widening the wavelength width by causing a longitudinal multimode oscillation in a semiconductor laser.
  • a semiconductor laser having a green wavelength (530 nm) at present normally, infrared light of 1060 nm is converted into the second harmonic using a nonlinear optical crystal, A green laser beam is obtained.
  • Lc ⁇ / (4 ⁇ (ns-nf)) (Formula 1)
  • is the wavelength of the incident fundamental wave
  • nf is the refractive index of the incident fundamental wave
  • ns is the refractive index of the second harmonic.
  • the second harmonic is not satisfied unless the phase matching condition (in the case of a crystal having a domain-inverted structure, it may be referred to as quasi phase matching). Conversion efficiency is reduced. For this reason, when the second harmonic is generated using a laser light source having a wavelength width, wavelength conversion is performed only at a specific wavelength that satisfies the phase matching condition (pseudo phase matching condition). Becomes narrower.
  • Patent Document 2 Japanese Patent Laid-Open No. 2007-073552
  • Patent Document 3 Japanese Patent Laid-Open No. 2005-352393
  • FIG. 1 is a schematic diagram showing the configuration of the wavelength conversion element described in Patent Document 2.
  • FIG. This wavelength conversion element has a crystal 101 having a plurality of domain-inverted periodic structures 102a to 102e.
  • the polarization inversion periodic structures 102a to 102e have a periodic structure in a direction from the incident end face side to the outgoing single face side, and the period of each polarization inversion is different.
  • Light having different wavelengths is incident on each of the polarization inversion periodic structures 102a to 102e, and second harmonics corresponding to the incident wavelengths are generated by wavelength conversion.
  • FIG. 2 is a diagram for explaining the wavelength conversion element described in Patent Document 3.
  • the figure indicated by the arrow 100A is a top view of the wavelength conversion element, and the figure indicated by the arrow 100B is a cross-sectional view of the wavelength conversion element.
  • This wavelength conversion element has a branching waveguide 103a, a synthetic waveguide 103b, and a region 104 having a plurality of domain-inverted periodic regions provided between these waveguides.
  • a laser beam having a wavelength width is branched into a plurality by the branching waveguide 103 a, and the branched laser beam is incident on each polarization inversion periodic region of the region 104.
  • each domain inversion period region of the area 104 only a component satisfying each domain inversion period and the phase matching condition (pseudo phase matching condition) in the laser beam is converted into the second harmonic.
  • the laser beam of each wavelength converted into the second harmonic in each polarization inversion period region of the region 104 is synthesized by the synthesis waveguide 103b, and as a result, a second harmonic laser beam having a wavelength width can be obtained. .
  • Patent Document 4 Japanese Patent Laid-Open No. 10-325970
  • Patent Document 5 Japanese Patent Laid-Open No. 06-2006
  • FIG. 3 is a schematic diagram showing a configuration of a wavelength conversion device provided with the spectroscopic means described in Patent Document 4.
  • This wavelength converter includes prisms 105a and 105b, concave mirrors 106a and 106b, and a crystal 107.
  • the excitation laser light ( ⁇ 2) is split into laser light having a wavelength range of ⁇ 1 to ⁇ 2 by the prism 105a.
  • a concave mirror 106a is disposed in the traveling direction of the laser light dispersed by the prism 105a, and a crystal 107 is disposed in the traveling direction of the laser light condensed by the concave mirror 106a.
  • the crystal 107 performs wavelength conversion on the incident laser light.
  • a concave mirror 106b is disposed in the traveling direction of the laser light (second harmonic) wavelength-converted by the crystal 107, and a prism 105b is disposed in the traveling direction of the laser light condensed by the concave mirror 106b.
  • the incident angle of the laser beam dispersed by the prism 105a to the crystal 107 varies depending on the wavelength ⁇ . For this reason, the optical path length which passes through the crystal
  • FIG. 4 is a schematic diagram showing a configuration of a wavelength conversion element provided with the spectroscopic means described in Patent Document 5.
  • This wavelength conversion element includes a prism 108 and a crystal 109.
  • Laser light from the laser diode (LD) 110 is split by the prism 108, and the split laser light of each wavelength enters the crystal 109.
  • the incident angle of the dispersed laser light on the crystal 109 differs depending on the wavelength, and therefore the optical path lengths of the laser light of each wavelength passing through the crystal 109 are different. Therefore, by setting the optical path length of the split laser light of each wavelength so as to satisfy the phase matching condition (pseudo phase matching condition), light with different wavelengths can be efficiently converted to the second harmonic with one crystal. can do.
  • phase matching condition prseudo phase matching condition
  • the laser light of each wavelength is not condensed at one point, so that it is possible to maintain the resistance to the incident light intensity.
  • the image display device described in Patent Document 1 has a problem in that speckles are generated, thereby reducing the image quality.
  • Patent Documents 2 to 5 can reduce speckle by satisfying the phase matching condition for a light source having a wavelength width. However, those described in Patent Documents 2 to 5 have the following problems.
  • the second harmonic generated in each of the polarization inversion periodic structures 102a to 102e is not synthesized as a coaxial beam. Such a configuration is difficult to apply to an image display apparatus that scans with a laser beam as described in Japanese Patent Application Laid-Open No. H10-228707.
  • An object of the present invention is to solve the above-mentioned problems, and to provide a light source device that generates a second harmonic light beam having a large light resistance, a small size and a light weight and having a wavelength width, and an image with less speckle noise using the same. It is to provide a display device.
  • the light source device of the present invention comprises: A second end face provided with a first end face and a second end face opposed to the first end face, when viewed from a direction perpendicular to a plane intersecting each of the first end face and the second end face; Is inclined with respect to the first end face, and generates an optical harmonic wave of light incident from the first end face; A coherent light supply means for making a plurality of coherent lights having different wavelengths collimated so as to travel in parallel in the plane enter the first end face; Combining means for combining a plurality of second harmonics having different wavelengths output from the second end face; The phase matching for generating the harmonics in the optical crystal is continuously taken in the direction intersecting with the respective beam axes of the plurality of coherent lights.
  • the image display device of the present invention has the above light source device and means for scanning an external screen with a second harmonic light beam output from the light source device.
  • FIG. 2 is a schematic diagram showing a configuration of a wavelength conversion element described in Japanese Patent Application Laid-Open No. 2007-073552.
  • FIG. 3 is a diagram for explaining a wavelength conversion element described in JP-A-2005-352393.
  • FIG. 3 is a schematic diagram showing a configuration of a wavelength conversion device including a spectroscopic unit described in Japanese Patent Laid-Open No. 10-325970.
  • FIG. 2 is a schematic diagram showing a configuration of a wavelength conversion element including a spectroscopic unit described in Japanese Patent Laid-Open No. 06-160926. It is a schematic diagram which shows the structure of the light source device which is the 1st Embodiment of this invention.
  • FIG. 5A It is a schematic diagram which shows the polarization inversion structure of the crystal
  • FIG. 7A It is a block diagram which shows the structure of the image display apparatus carrying the light source device shown to FIG. 7A. It is a schematic diagram which shows the structure of the light source device which is the 4th Embodiment of this invention. It is a block diagram which shows the structure of the image display apparatus carrying the light source device shown to FIG. 8A.
  • FIG. 5A is a schematic diagram illustrating a configuration of the light source device according to the first embodiment of the present invention.
  • the light source device includes a laser 1 that emits laser light (fundamental wave) having a wavelength width, a spectral grating 2, a lens 3, a crystal 4, a lens 5, and a multiplexing grating 6.
  • Laser 1 is a longitudinal multimode semiconductor laser, and its output light (fundamental wave) has a center wavelength ⁇ of 1060 nm, a wavelength interval d ⁇ of 1 nm, and a wavelength width of 20 nm.
  • the laser light output from the laser 1 is split by the spectroscopic grating 2.
  • the grating interval ⁇ of the spectral grating 2 is 1.1 ⁇ m, and the laser beam from the laser 1 is dispersed at an angle ⁇ .
  • the angle ⁇ is, for example, 0.2 °.
  • the light beam split by the spectroscopic grating 2 enters the lens 3.
  • the focal length f of the lens 3 is 30 mm, and the aperture is 3 mm.
  • the principal rays of the light beams of the respective wavelengths separated by the spectral grating 2 are collimated by the lens 3.
  • the interval X between the light beams of the respective wavelengths collimated by the lens 3 is 100 ⁇ m.
  • the crystal 4 is made of LiNO 3 to which MgO is added and has nonlinear optical characteristics.
  • the exit surface of the crystal 4 is inclined with respect to the incident surface, and the shape of the crystal 4 when viewed from a direction perpendicular to the surface intersecting the entrance / exit surface is a wedge shape.
  • the difference (ns ⁇ nf) between the refractive index ns of the second harmonic and the refractive index nf of the incident fundamental wave in the crystal 4 is 0.039.
  • the coherent length Lc at a wavelength of 1060 nm given by the above-described Equation 1 is 6.8 ⁇ m.
  • the coherent length Lc changes in proportion to the wavelength of the incident light according to the above-described equation 1.
  • the crystal length that satisfies the phase matching condition changes by 6.4 ⁇ m, which is 1000 times the amount of change of the coherent length Lc at a wavelength difference of 1 nm. Therefore, by setting the inclination angle ⁇ of the exit surface with respect to the entrance surface to 3.66 ° so that the crystal length is changed by 6.4 ⁇ m with respect to the light having a wavelength difference of 1 nm paralleled at intervals of 100 ⁇ m, The phase matching condition of the light of the wavelength can be satisfied.
  • the light of each wavelength transmitted through the crystal 4 and converted into the second harmonic enters the lens 5.
  • the focal length f of the lens 5 is 30 mm, and the aperture is 3 mm.
  • the light beam of each wavelength from the crystal 4 is collected by the lens 5 and enters the multiplexing grating 6.
  • the multiplexing grating 6 is disposed at the condensing point of the lens 5.
  • the grating interval of the multiplexing grating 6 is 0.55 ⁇ m, which is 1 ⁇ 2 of the grating interval ⁇ of the spectral grating 2.
  • the multiplexing grating 6 combines the light beams (second harmonics) of the respective wavelengths from the crystal 4 so that the respective principal rays coincide on the same axis.
  • Laser light (second harmonic wave) 7 synthesized by the multiplexing grating 6 is used as output light of the light source device.
  • FIG. 5A shows the spectral distribution of the laser beam (second harmonic) 7.
  • the laser beam (second harmonic wave) 7 has a wavelength width, its center wavelength is 530 nm, which is a half value of the wavelength ⁇ of the fundamental wave, and the wavelength interval is the fundamental wave. It is 0.5 nm which is a half of the wavelength interval d ⁇ .
  • FIG. 5B schematically shows the polarization inversion structure of the crystal 4.
  • the crystal 4 has a polarization inversion portion 8 in which spontaneous polarization is spatially inverted from the incident surface side to the output surface side.
  • the inversion period of the polarization inversion unit 8 is twice the coherent length of the incident laser light. For example, if the coherent length of laser light (fundamental wave) with a wavelength of 1060 nm is Lc, the inversion period of the portion where the laser light (fundamental wave) of the polarization inversion unit 8 is incident is twice as long as the coherent length Lc. . Thereby, the amplitude of the second harmonic can be increased.
  • the “+” side region and the “ ⁇ ” side region are alternately arranged from the incident surface side, and viewed from a direction perpendicular to the surface intersecting with the incident / exit surface.
  • the “+” side region and the “ ⁇ ” side region each have a wedge shape.
  • the incident side in each of the “+” side region and the “ ⁇ ” side region is shown in FIG.
  • 5B includes a “+” side electrode and a “+” side electrode and a “+” side region on a plane intersecting the incident / exit plane of the crystal 4 and a region corresponding to each of the “+” side region and the “ ⁇ ” side region. This can be realized by forming a “ ⁇ ” side electrode and applying a voltage between the “+” side electrode and the “ ⁇ ” side electrode.
  • the shapes of the “+” side electrode and the “ ⁇ ” side electrode are similar to the shapes of the corresponding “+” side region and “ ⁇ ” side region.
  • the inclination angle of the exit end with respect to the entrance end is a value obtained by dividing the inclination angle ⁇ by A (for example, 0.00366 °). Is done.
  • Such an electrode can be formed using a photolithography process known as a semiconductor manufacturing process.
  • a comb-shaped electrode may be employed as the electrode.
  • the light source device of the present embodiment it is possible to improve the tolerance to the incident light intensity by collimating the light of each wavelength to be incident on the crystal 4.
  • the aperture of the lens 5 that is a condenser lens can be reduced.
  • a small and lightweight light source device can be provided as a light source for generating a second harmonic light beam having a wavelength width.
  • the display image with less speckle noise can be provided by applying the light source device of the present embodiment to an image display device that scans a laser beam.
  • LiNO 3 is used as the nonlinear optical material for forming the crystal 4, but instead, various nonlinear optical materials such as BBO, LBO, CLBO, and KTP may be used.
  • the size of the crystal 4 and the inclination angle ⁇ of the exit surface with respect to the entrance surface can be any value. Good.
  • the laser 1 used as the fundamental wave may be of any center wavelength as long as it oscillates in the longitudinal multimode.
  • the laser 1 may be a super luminescent diode.
  • the spectral grating 2 and the multiplexing grating 6 may be any values.
  • a refractive index dispersion means such as a prism may be used.
  • a concave mirror may be used instead of the lenses 3 and 5.
  • each of the lenses 3 and 5 may be composed of a combination of a convex lens 2001 and a concave lens 200 as shown in FIG. 5C. According to this configuration, since the lenses 3 and 5 can be configured with an optical system having a short focal length, the size can be reduced.
  • FIG. 6A is a schematic diagram illustrating a configuration of a light source device according to a second embodiment of the present invention.
  • the light source device is different from the light source device of the first embodiment in that a laser group 11 is used in place of the laser 1 and the spectral grating 2 in the configuration shown in FIG. 5A.
  • a laser group 11 is used in place of the laser 1 and the spectral grating 2 in the configuration shown in FIG. 5A.
  • the same components as those of the light source device of the first embodiment are denoted by the same reference numerals.
  • the laser group 11 includes 2N + 1 lasers having different oscillation wavelengths arranged in parallel.
  • FIG. 6A shows a laser 11a having an oscillation wavelength ⁇ , a laser 11b having an oscillation wavelength of ( ⁇ + N ⁇ d ⁇ ), and a laser 11c having an oscillation wavelength of ( ⁇ N ⁇ d ⁇ ).
  • the oscillation wavelength ⁇ of the laser 11a is 1060 nm.
  • N is a positive integer
  • d ⁇ is 1 nm, for example.
  • N lasers whose oscillation wavelengths are shifted by 1 nm from the oscillation wavelength ⁇ of the laser 11a located at the center are arranged in parallel on both sides of the laser 11a.
  • FIG. 6B shows the range of the oscillation wavelength of the laser group 11 when N is 10.
  • the laser group 11 includes 21 lasers, and the wavelength range of laser light output from each laser is 1050 nm to 1070 nm as a whole.
  • the interval between the laser beams from each laser is 100 ⁇ m, and the beam diameter is 100 ⁇ m (beam area 0.0079 mm 2 ).
  • the laser light of each wavelength from the laser group 11 is a parallel light bundle, and is incident on the crystal 4 in parallel.
  • the output of each laser constituting the laser group 11 is 3 mW, and the energy of laser light incident on the crystal 4 from the laser group 11 is 63 mW in total.
  • the incident energy density is 0.38 W / m 2 .
  • This value is smaller than 0.5 W / m 2 which is the light resistance of the lithium niobate (LiNO 3 ) crystal. Therefore, the structure using the laser group 11 can improve the tolerance to the incident light intensity.
  • a longitudinal mode single semiconductor laser or a super luminescent diode is used for each wavelength of the laser constituting the laser group 11.
  • the light source device of this embodiment it is possible to improve resistance to incident light intensity by arranging a plurality of lasers having different wavelengths in parallel and allowing laser light from each laser to enter the crystal in parallel. It is.
  • the aperture of the condenser lens can be reduced, and as a result, a light source that generates a second harmonic light beam having a wavelength width that is small and lightweight. Can be realized.
  • the light source device of the present embodiment to an image display device that scans a laser beam, a display image with less speckle noise can be provided.
  • LiNO 3 is used as the nonlinear optical material for forming the crystal 4, but various nonlinear optical materials such as BBO, LBO, CLBO, and KTP may be used instead.
  • the size of the crystal 4 and the inclination angle of the exit surface with respect to the entrance surface may be set to any values as long as the parallelized light of each wavelength satisfies the phase matching condition (pseudo phase matching condition).
  • the aperture may have any value.
  • a refractive index dispersion means such as a prism may be used.
  • FIG. 7A is a schematic diagram illustrating a configuration of a light source device according to a third embodiment of the present invention.
  • the light source device is different from the light source device of the second embodiment in that a modulation element group 21 is added to the configuration shown in FIG. 6A.
  • the same reference numerals are given to the same components as those of the light source device of the second embodiment.
  • the laser group 11 includes N lasers having different oscillation wavelengths arranged in parallel.
  • a laser 11a having an oscillation wavelength ⁇ for convenience, a laser 11a having an oscillation wavelength ⁇ , a laser 11b having an oscillation wavelength of [ ⁇ + (N / 2) ⁇ d ⁇ ], and an oscillation wavelength of [ ⁇ (N / 2-1) ⁇ d ⁇
  • the oscillation wavelength ⁇ of the laser 11a is 1060 nm, and N is a positive integer.
  • the modulation element group 21 is composed of N modulation elements provided in each of the lasers of each wavelength constituting the laser group 11. For example, an acousto-optic element is used as the modulation element.
  • Each laser constituting the laser group 11 and each modulation element constituting the modulation element group 21 correspond one-to-one. By controlling each modulation element, on / off control of laser light of each wavelength is performed.
  • FIG. 7B shows the oscillation wavelength range of the laser group 11 when N is 8.
  • the laser group 11 includes eight lasers, and the wavelength range of laser light output from each laser is 1057 nm to 1064 nm as a whole.
  • the interval between laser beams from each laser is 100 ⁇ m, and the beam diameter is 100 ⁇ m.
  • the wavelength interval is 1 nm.
  • the weight of the laser beam output from each laser is weighted at a different rate.
  • the ratio to the laser beam having a wavelength of 1060 nm is 128, the ratio to the laser beam having a wavelength of 1061 nm is 64, the ratio to the laser beam having a wavelength of 1059 nm is 32, the ratio to the laser beam having a wavelength of 1062 nm is 16, and the laser beam having a wavelength of 1058 nm is used.
  • Intensity weighting is performed with a ratio of 8 to a laser beam having a wavelength of 1063 nm, a ratio of 4 to a laser beam having a wavelength of 1057 nm, and a ratio of 1 to a laser beam having a wavelength of 1064 nm.
  • the modulation element group 21 selects a laser combination corresponding to the luminance of the pixel for each pixel. For example, for a pixel whose luminance data is 160, a laser with a ratio of 128 (wavelength 1060 nm) and a laser with a ratio of 32 (wavelength 1059 nm) are selected. Thus, by performing laser selection control for each pixel, a multi-gradation image can be stably supplied.
  • FIG. 7C is a block diagram showing a configuration of an image display device equipped with the light source device of the present embodiment.
  • the main part of the image display device includes a color synthesis optical system 31, a blue light source 32, a red light source 33, a light source device 51, a signal processing device 52, and scanning means 53.
  • the light source device 51 is the light source device shown in FIG. 7A and is used as a green light source.
  • the blue light source 32 and the red light source 33 are composed of vertical multimode semiconductor lasers.
  • the wavelength of the blue light source 32 is 445 nm
  • the wavelength of the red light source 33 is 645 nm
  • both output collimated laser light is 445 nm
  • the color synthesis optical system 31 includes first and second dichroic mirrors.
  • the first dichroic mirror is disposed at a position where the laser light (red) from the red light source 33 and the laser light (green) from the light source device 51 intersect.
  • the laser light from the light source device 51 passes through the first dichroic mirror.
  • the laser light from the red light source 33 is reflected by the first dichroic mirror so as to be directed in the same direction as the laser light (transmitted light) from the light source device 51.
  • the second dichroic mirror is disposed at a position where the laser light (red / green) from the first dichroic mirror and the laser light (blue) from the blue light source 32 intersect.
  • the laser light from the first dichroic mirror passes through the second dichroic mirror.
  • the laser light from the blue light source 32 is reflected by the second dichroic mirror so as to be directed in the same direction as the laser light (transmitted light) from the first dichroic mirror.
  • Laser light (red / green / blue) from the second dichroic mirror is supplied to the scanning means 53.
  • the signal processing device 52 receives the video signal 54 from an external device such as a personal computer.
  • the video signal 54 includes bit information related to video of each color of red (R), green (G), and blue (B).
  • the signal processing device 52 generates a signal for intensity-modulating the laser beam corresponding to each color (wavelength) based on the bit information regarding the RGB color images of the video signal 54.
  • the bit information regarding the green (G) video is converted into a signal for driving each modulation element of the light source device 51, and the bit information regarding the blue (B) and red (R) video.
  • the blue light source 32 and the red light source 33 are modulated by controlling current drive.
  • RGB modulated light 56 is supplied from the color synthesis optical system 31 to the scanning unit 53.
  • the scanning unit 53 scans the screen with the RGB modulated light 56 supplied from the color synthesis optical system 31.
  • the scanning of the RGB modulated light 56 by the scanning unit 53 is performed in synchronization with the synchronization signal 55 output from the signal processing device 52, and a display image 57 is displayed on the screen.
  • the image definition is 1280 horizontal pixels and 1024 vertical pixels.
  • the scanning unit 53 includes a resonant micromechanical scanning element for performing horizontal scanning and a galvanometer mirror for performing vertical scanning.
  • the drive frequency of the resonant micromechanical scanning element is, for example, 31 KHz.
  • the galvanometer mirror is driven by a sawtooth wave, and the drive frequency is, for example, 60 Hz.
  • the intensity modulation of the laser beam is performed every 12.7 ns in synchronization with the scanning element. Thereby, the light of the brightness
  • a light source that generates a second harmonic light beam having a small wavelength and a wide wavelength range can be provided.
  • an image display device including the light source device of the present embodiment can provide an image display with less speckle noise and good gradation reproduction characteristics.
  • the light source device of the present embodiment described above is an example of the present invention, and the configuration and operation thereof can be changed as appropriate.
  • the laser intensity modulation in the blue light source 32 and the red light source 33 may be performed by performing pulse width modulation within the time for scanning one pixel.
  • the image definition may be set appropriately.
  • the scanning frequency of the scanning element and the modulation frequency of the laser are frequencies corresponding to the image definition.
  • FIG. 8A is a schematic diagram illustrating a configuration of a light source device according to a fourth embodiment of the present invention.
  • the light source device has an infrared laser group 41, modulation element groups 42a to 42c, a crystal 43, a lens 44, a multiplexing grating 45, a blue laser group 46, and a red laser group 47.
  • the infrared laser group 41, the modulation element group 42a, the crystal 43, the lens 44, and the multiplexing grating 45 are the laser group 11, the modulation element group 21, the crystal 4, the lens 5, and the multiplexing grating shown in FIG. 7A. Same as 6.
  • the light source device of the present embodiment is different from the light source device of the third embodiment in that modulation element groups 42b and 42c, a blue laser group 46, and a red laser group 47 are added to the configuration shown in FIG. 7A. .
  • Each of the infrared laser group 41, the blue laser group 46, and the red laser group 47 has N lasers with different oscillation wavelengths arranged in parallel, and the oscillation wavelengths of the lasers are as shown in FIG. 7A. It is the same relationship. However, the oscillation wavelength ⁇ of the laser arranged at the center of the infrared laser group 41 is 1060 nm, the oscillation wavelength ⁇ of the laser arranged at the center of the blue laser group 46 is 445 nm, and the center of the red laser group 47 is The oscillation wavelength ⁇ of the arranged laser is 645 nm. N is a positive integer.
  • the modulation element group 42b is composed of N modulation elements provided in each of the lasers of the respective wavelengths constituting the blue laser group 46.
  • an acousto-optic element is used as the modulation element.
  • Each laser constituting the blue laser group 46 and each modulation element constituting the modulation element group 42b correspond one-to-one. By controlling each modulation element, on / off control of laser light of each wavelength is performed.
  • the modulation element group 42 c is composed of N modulation elements provided for each of the lasers of each wavelength constituting the red laser group 47.
  • an acousto-optic element is used as the modulation element.
  • Each laser constituting the red laser group 47 and each modulation element constituting the modulation element group 42c have a one-to-one correspondence. By controlling each modulation element, on / off control of laser light of each wavelength is performed.
  • the multiplexing grating 45 is supplied from the infrared laser group 41 via the modulation element group 42a, the crystal 43 and the lens 44, and from the blue laser group 46 via the modulation element group 42b.
  • the laser beam (blue) and the laser beam (red) supplied from the red laser group 47 via the modulation element group 42c are combined to generate one white laser beam.
  • the intensity of the laser light output from each laser is weighted at a different rate.
  • the infrared laser group 41, the blue laser group 46, and the red laser group 47 are each composed of eight lasers, the following intensity weighting is performed.
  • the ratio to the laser beam having a wavelength of 1060 nm is 128, the ratio to the laser beam having a wavelength of 1061 nm is 64, the ratio to the laser beam having a wavelength of 1059 nm is 32, the ratio to the laser beam having a wavelength of 1062 nm is 16, and the wavelength is 1058 nm.
  • Intensity weighting is performed with a ratio of 8 for the laser light of 4, a ratio of 4 for the laser light of wavelength 1063 nm, a ratio of 2 for the laser light of wavelength 1057 nm, and a ratio of 1 for the laser light of wavelength 1064 nm.
  • the ratio to the laser beam having a wavelength of 445 nm is 128, the ratio to the laser beam having a wavelength of 446 nm is 64, the ratio to the laser beam having a wavelength of 444 nm is 32, the ratio to the laser beam having a wavelength of 447 nm is 16, and Intensity weighting is performed with a ratio of 8 for laser light, 4 for laser light with a wavelength of 448 nm, 2 for laser light with a wavelength of 442 nm, and 1 for laser light with a wavelength of 449 nm.
  • a longitudinal mode single semiconductor laser that oscillates at a wavelength of about 440 nm is used as the laser of each wavelength.
  • the ratio to the laser beam having a wavelength of 645 nm is 128, the ratio to the laser beam having a wavelength of 646 nm is 64, the ratio to the laser beam having a wavelength of 644 nm is 32, the ratio to the laser beam having a wavelength of 647 nm is 16, and the wavelength is 643 nm.
  • Intensity weighting is performed, with the ratio to the laser light being 8, the ratio to the laser light having a wavelength of 648 nm is 4, the ratio to the laser light having a wavelength of 642 nm is 2, and the ratio to the laser light having a wavelength of 649 nm is 1.
  • a longitudinal mode single semiconductor laser that oscillates at a wavelength of 640 nm is used as the laser of each wavelength.
  • FIG. 8B is a block diagram showing a configuration of an image display device equipped with the light source device of the present embodiment.
  • the main part of the image display device includes a light source device 51, a signal processing device 52, and scanning means 53.
  • the light source device 51 is the light source device shown in FIG. 8A.
  • the signal processing device 52 receives the video signal 54 from an external device such as a personal computer.
  • the video signal 54 includes bit information related to video of each color of red (R), green (G), and blue (B).
  • the signal processing device 52 generates a signal for intensity-modulating the laser beam corresponding to each color (wavelength) based on the bit information regarding the RGB color images of the video signal 54.
  • the bit information regarding the green (G) video is converted into a signal for driving the modulation element group 42 a provided in the infrared laser group 41.
  • Bit information relating to the blue (B) video is converted into a signal for driving the modulation element group 42 b provided in the blue laser group 46.
  • Bit information relating to the red (R) video is converted into a signal for driving the modulation element group 42 c provided in the red laser group 47.
  • the RGB modulated light 56 is supplied from the light source device 51 to the scanning unit 53.
  • the scanning unit 53 scans the screen with the RGB modulated light 56 supplied from the light source device 51.
  • the scanning of the RGB modulated light 56 by the scanning unit 53 is performed in synchronization with the synchronization signal 55 output from the signal processing device 52, and a display image 57 is displayed on the screen.
  • the image definition is 1280 horizontal pixels and 1024 vertical pixels.
  • the scanning unit 53 includes a resonant micromechanical scanning element for performing horizontal scanning and a galvanometer mirror for performing vertical scanning.
  • the drive frequency of the resonant micromechanical scanning element is, for example, 31 KHz.
  • the galvanometer mirror is driven by a sawtooth wave, and the drive frequency is, for example, 60 Hz.
  • the intensity modulation of the laser beam is performed every 12.7 ns in synchronization with the scanning element. Thereby, the light of the brightness
  • a light source that generates a second harmonic light beam having a small wavelength and a wide wavelength range can be provided.
  • an image display device including the light source device of the present embodiment can provide an image display with less speckle noise and good gradation reproduction characteristics.
  • the light source device of the present embodiment described above is an example of the present invention, and the configuration and operation thereof can be changed as appropriate.
  • the image definition may be set as appropriate.
  • the scanning frequency of the scanning element and the modulation frequency of the laser are frequencies corresponding to the image definition.
  • the modulation element used in the modulation element group may be other than the acousto-optic element.
  • various optical modulators such as an electro-optic crystal, a Mach-Tunda type waveguide modulation element, and a MEMS modulation element may be used as the modulation element.
  • a light source device includes a first end surface and a second end surface that faces the first end surface, and is perpendicular to a plane that intersects each of the first and second end surfaces.
  • the second end face is inclined with respect to the first end face when viewed from any direction, an optical crystal that generates harmonics of light incident from the first end face, and in the plane
  • a plurality of coherent light beams having different wavelengths, which are collimated so as to travel in parallel, are incident on the first end face; and a plurality of second harmonics having different wavelengths output from the second end face.
  • a means for combining the waves, and the phase matching for generating the harmonics in the optical crystal is continuously taken in a direction intersecting with the respective beam axes of the plurality of coherent lights. .
  • the coherent light supply means includes means comprising the laser 1, the spectral grating 2 and the lens 3 described in the first embodiment, and the laser group 11 described in the second and third embodiments. This corresponds to the infrared laser group 41 described in the fourth embodiment.
  • the coherent light supply means includes a laser light source, a spectroscopic means for spectroscopically splitting the laser light from the laser light source, and a first lens for collimating the principal rays of each wavelength split by the spectroscopic means. Also good.
  • the spectroscopic means may be a diffraction grating or a prism.
  • the coherent light supply means may be composed of a plurality of laser light sources having different oscillation wavelengths, and the laser light from each laser light source may be collimated so as to travel in parallel in the plane.
  • the laser light source or the plurality of laser light sources may be a longitudinal multimode semiconductor laser or a super luminescent diode.
  • It may further include a modulation means for individually modulating the intensity of each wavelength of laser light from a plurality of laser light sources. Weighting may be applied to the intensity of laser light output from a plurality of laser light sources at different rates.
  • the optical crystal corresponds to the crystal 4 described in the first to fourth embodiments.
  • the optical crystal has a domain-inverted structure in which spontaneous polarization is spatially inverted from the first end surface toward the second end surface, and a direction perpendicular to the plane of each polarization region of the domain-inverted structure
  • the shape when viewed from above may be a wedge shape.
  • the inversion period of the domain-inverted structure may continuously change in a direction intersecting with each light axis of the plurality of coherent lights in the plane.
  • the multiplexing means corresponds to the means including the lens 5 and the grating 6 described in the first to fourth embodiments.
  • the multiplexing means combines the second lens for collecting the second harmonic light output from the second end face of the optical crystal and the second harmonic light from the second lens. You may have a diffraction grating or a prism to wave.
  • the light source device further includes another light source that generates light having a wavelength different from the wavelengths of the plurality of coherent lights, and the multiplexing unit includes the second harmonic light and the other light source. You may combine light.
  • Other light sources correspond to the red light source and blue light source described in the third embodiment, and the red laser group and blue laser group described in the fourth embodiment.
  • the light source device may include a moving unit that moves the optical crystal in a direction intersecting with each light axis of the plurality of coherent lights in the plane. According to this configuration, the following effects can be obtained.
  • the oscillation wavelength of a laser light source varies depending on the manufacturing rod. For example, there is a manufacturing variation in which an oscillation wavelength of a laser light source in one rod is 1060 nm and an oscillation wavelength of a laser light source in another rod is 1063 nm. Since the oscillation wavelength varies in this way, for example, in a wavelength conversion element having a waveguide structure as shown in FIG. Efficiency is reduced. According to the light source device including the moving means described above, even if the oscillation wavelength of the laser light source varies, it is possible to accurately adjust the phase matching for each wavelength by moving the optical crystal.
  • an image display device includes the above-described light source device and means for scanning an external screen with a second harmonic light beam output from the light source device.
  • an image display device includes: a light source device including the above-described modulation unit; a signal processing unit that controls the modulation unit of the light source device according to an input video signal; and the light source device. Means for scanning the external screen with the output second harmonic light beam.
  • the coherent light of each wavelength is made parallel to each other and incident on the optical crystal, so that it is possible to improve resistance to incident light intensity.
  • the aperture of the condensing lens constituting the multiplexing means can be reduced.
  • a small and lightweight light source device can be provided as a light source for generating a second harmonic light beam having a wavelength width.
  • a display image with less speckle noise can be provided by using the light source device that generates the second harmonic light beam having the above-described wavelength width.

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  • General Physics & Mathematics (AREA)
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Abstract

A light source device is provided with a first edge surface; a second edge surface opposite to the first edge surface, wherein the second edge surface is inclined with respect to the first edge surface in the case of a view from the vertical direction with respect to a plane intersecting the first and second edge surfaces, respectively; a crystal (4) that generates harmonics of light incident through the first edge surface; a coherent light supply means that makes a plurality of coherent light rays with different wavelengths travel in parallel with each other in the plane and incident on the first edge surface; and a multiplexing means that multiplexes a plurality of second harmonics that are outputted from the second edge surface and have different wavelengths, wherein phase matching for the generation of the harmonics in the crystal (4) is continuously carried out in directions intersecting the respective light ray axes of the plurality of the coherent light rays.

Description

光源装置及び画像表示装置Light source device and image display device

 本発明は、第2高調波の光ビームを発生する光源装置及びそれを備える画像表示装置に関する。 The present invention relates to a light source device that generates a second harmonic light beam and an image display device including the same.

 ハロゲンランプや高圧水銀ランプなどの光源からのインコヒーレント光で液晶ライトバルブ等面状の画像表示素子を照明し、画像表示素子上に形成された像を投射レンズでスクリーン上に拡大投影する投射型画像装置が知られている。 Projection type that illuminates a planar image display element such as a liquid crystal light valve with incoherent light from a light source such as a halogen lamp or high-pressure mercury lamp, and enlarges and projects the image formed on the image display element on the screen with a projection lens Image devices are known.

 この種の投射型画像投影装置では、インコヒーレント光源を使用しているため、消費電力が大きく、表示画像の輝度も小さい。 This type of projection-type image projection apparatus uses an incoherent light source, so that power consumption is large and the brightness of the display image is small.

 また、インコヒーレント光源の波長帯域は広い。このため、赤色、緑色、青色の各色の光源にインコヒーレント光源を用いる構造において、色度域の広いディスプレイを実現することは困難である。 Also, the wavelength band of incoherent light sources is wide. For this reason, it is difficult to realize a display with a wide chromaticity range in a structure in which incoherent light sources are used as light sources of red, green, and blue colors.

 さらに、液晶ライトバルブ等の面状の画像表示素子を用いる構造では、投射光学系が大きくなるために、装置の小型化が困難である。 Furthermore, in a structure using a planar image display element such as a liquid crystal light valve, it is difficult to reduce the size of the apparatus because the projection optical system becomes large.

 さらに、画像表示素子上に形成された像を、投射レンズを用いて結像させる構造であるため、投射レンズの焦点深度内でしかピントが合わない。このため、使用者は、スクリーンの設置位置に応じてピント調節を行わなければならない。 Furthermore, since the image formed on the image display element is formed using a projection lens, the focus is achieved only within the focal depth of the projection lens. For this reason, the user must adjust the focus according to the installation position of the screen.

 そこで、可搬性、携帯性を備え、ある程度の投射範囲においてピント調節を必要としない小型の画像投射装置が提案されている。例えば、特許文献1(米国特許6921170号明細書)には、コヒーレント光源であるレーザー光源を備え、このレーザー光源からのレーザービームで走査することで、スクリーン上に画像を投射表示する画像表示装置が開示されている。 Therefore, there has been proposed a compact image projection apparatus that is portable and portable and does not require focus adjustment within a certain projection range. For example, Patent Document 1 (US Pat. No. 6,921,170) discloses an image display device that includes a laser light source that is a coherent light source, and that projects and displays an image on a screen by scanning with the laser beam from the laser light source. It is disclosed.

 しかし、上記のような画像表示装置においては、レーザー光のコヒーレンスに起因するスペックルと呼ばれる斑点上のノイズが生じる。スペックルは、ディスプレイ観察時に目障りであり、画質を低下させてしまう。 However, in the image display device as described above, noise on speckles called speckle is generated due to the coherence of the laser beam. Speckle is a nuisance when observing a display and degrades image quality.

 レーザー光の波長幅を広げてコヒーレンスを低下させることで、スペックルを低減することができる。波長幅を広げる方法としては、半導体レーザーにおいて、縦マルチモード発振させることで、波長幅を広くする方法がある。ただし、発振波長が緑色の波長(530nm)である半導体レーザーは、今のところ存在しないため、通常は、1060nmの赤外光を、非線形光学結晶を用いて第2高調波に変換することにより、緑色のレーザー光を得ている。 Speckle can be reduced by widening the wavelength width of the laser beam and reducing the coherence. As a method of widening the wavelength width, there is a method of widening the wavelength width by causing a longitudinal multimode oscillation in a semiconductor laser. However, since there is no semiconductor laser having a green wavelength (530 nm) at present, normally, infrared light of 1060 nm is converted into the second harmonic using a nonlinear optical crystal, A green laser beam is obtained.

 非線形光学結晶を用いて第2高調波を発生する場合、結晶長が以下の式1で示されるコヒーレント長Lcの整数倍の長さである条件、即ち位相整合条件が満たされないと、第2高調波への変換効率が低下する。 When the second harmonic is generated using a nonlinear optical crystal, if the condition that the crystal length is an integral multiple of the coherent length Lc represented by the following Equation 1, that is, the phase matching condition, is not satisfied, The conversion efficiency to waves is reduced.

  Lc=λ/(4・(ns - nf))   (式1)
ここで、λは入射基本波の波長、nfは入射基本波の屈折率、nsは第2高調波の屈折率である。
Lc = λ / (4 · (ns-nf)) (Formula 1)
Here, λ is the wavelength of the incident fundamental wave, nf is the refractive index of the incident fundamental wave, and ns is the refractive index of the second harmonic.

 また、コヒーレント長Lc毎に分極反転構造を持たせた結晶においても、位相整合条件(分極反転構造を持つ結晶の場合は、擬似位相整合と呼ぶこともある)が満たされないと、第2高調波への変換効率が低下する。このため、波長幅のあるレーザー光源を用いて第2高調波を発生させると、位相整合条件(擬似位相整合条件)が満たされた特定の波長のみで波長変換が行われ、その結果、波長幅が狭くなってしまう。 Further, even in a crystal having a domain-inverted structure for each coherent length Lc, the second harmonic is not satisfied unless the phase matching condition (in the case of a crystal having a domain-inverted structure, it may be referred to as quasi phase matching). Conversion efficiency is reduced. For this reason, when the second harmonic is generated using a laser light source having a wavelength width, wavelength conversion is performed only at a specific wavelength that satisfies the phase matching condition (pseudo phase matching condition). Becomes narrower.

 波長幅のある光源に対して位相整合条件を満たす手法として、特許文献2(特開2007-073552号公報)や特許文献3(特開2005-352393号公報)には、複数の分極反転周期構造からなる波長変換領域を備えた波長変換素子が記載されている。 Patent Document 2 (Japanese Patent Laid-Open No. 2007-073552) and Patent Document 3 (Japanese Patent Laid-Open No. 2005-352393) describe methods for satisfying the phase matching condition for a light source having a wavelength width. The wavelength conversion element provided with the wavelength conversion area | region which consists of is described.

 図1は、特許文献2に記載の波長変換素子の構成を示す模式図である。この波長変換素子は、複数の分極反転周期構造102a~102eを備えた結晶101を有する。分極反転周期構造102a~102eは、入射端面側から出射単面側に向かう方向に周期構造を有し、それぞれの分極反転の周期は異なる。分極反転周期構造102a~102eのそれぞれに、波長の異なる光を入射させて、波長変換により各入射波長に対応した第2高調波を発生させる。 FIG. 1 is a schematic diagram showing the configuration of the wavelength conversion element described in Patent Document 2. FIG. This wavelength conversion element has a crystal 101 having a plurality of domain-inverted periodic structures 102a to 102e. The polarization inversion periodic structures 102a to 102e have a periodic structure in a direction from the incident end face side to the outgoing single face side, and the period of each polarization inversion is different. Light having different wavelengths is incident on each of the polarization inversion periodic structures 102a to 102e, and second harmonics corresponding to the incident wavelengths are generated by wavelength conversion.

 図2は、特許文献3に記載の波長変換素子を説明するための図である。矢印100Aで示される図は、波長変換素子の上面図、矢印100Bで示される図は、波長変換素子の断面図である。この波長変換素子は、分岐導波路103aと、合成導波路103bと、これら導波路の間に設けられた複数の分極反転周期領域を備えた領域104とを有する。 FIG. 2 is a diagram for explaining the wavelength conversion element described in Patent Document 3. The figure indicated by the arrow 100A is a top view of the wavelength conversion element, and the figure indicated by the arrow 100B is a cross-sectional view of the wavelength conversion element. This wavelength conversion element has a branching waveguide 103a, a synthetic waveguide 103b, and a region 104 having a plurality of domain-inverted periodic regions provided between these waveguides.

 波長幅のあるレーザービームが分岐導波路103aにより複数に分岐され、分岐したレーザービームは、領域104の各分極反転周期領域にそれぞれ入射する。領域104の各分極反転周期領域では、レーザービームのうち各分極反転周期と位相整合条件(擬似位相整合条件)が満たされる成分のみが第2高調波に変換される。領域104の各分極反転周期領域で第2高調波に変換された各波長のレーザービームは、合成導波路103bで合成され、その結果、波長幅のある第2高調波レーザービームを得ることができる。 A laser beam having a wavelength width is branched into a plurality by the branching waveguide 103 a, and the branched laser beam is incident on each polarization inversion periodic region of the region 104. In each domain inversion period region of the area 104, only a component satisfying each domain inversion period and the phase matching condition (pseudo phase matching condition) in the laser beam is converted into the second harmonic. The laser beam of each wavelength converted into the second harmonic in each polarization inversion period region of the region 104 is synthesized by the synthesis waveguide 103b, and as a result, a second harmonic laser beam having a wavelength width can be obtained. .

 上記の他、波長幅のあるレーザービームを効率よく第2高調波レーザービームに変換するための分光手段を備えるものが特許文献4(特開平10-325970号公報)や特許文献5(特開平06-160926号公報)に記載されている。 In addition to the above, Patent Document 4 (Japanese Patent Laid-Open No. 10-325970) and Patent Document 5 (Japanese Patent Laid-Open No. 06-2006) are provided with spectroscopic means for efficiently converting a laser beam having a wavelength width into a second harmonic laser beam. -160926).

 図3は、特許文献4に記載の分光手段を備えた波長変換装置の構成を示す模式図である。この波長変換装置は、プリズム105a、105b、凹面鏡106a、106b、および結晶107を有する。 FIG. 3 is a schematic diagram showing a configuration of a wavelength conversion device provided with the spectroscopic means described in Patent Document 4. This wavelength converter includes prisms 105a and 105b, concave mirrors 106a and 106b, and a crystal 107.

 励起レーザー光(λ2)は、プリズム105aにて、波長範囲λ1~λ2のレーザー光に分光される。プリズム105aにて分光されたレーザー光の進行方向に凹面鏡106aが配置されており、この凹面鏡106aによって集光されたレーザー光の進行方向に結晶107が配置されている。 The excitation laser light (λ2) is split into laser light having a wavelength range of λ1 to λ2 by the prism 105a. A concave mirror 106a is disposed in the traveling direction of the laser light dispersed by the prism 105a, and a crystal 107 is disposed in the traveling direction of the laser light condensed by the concave mirror 106a.

 結晶107は、入射したレーザー光に対して波長変換を行う。結晶107により波長変換されたレーザー光(第2高調波)の進行方向に凹面鏡106bが配置されており、この凹面鏡106bによって集光されたレーザー光の進行方向にプリズム105bが配置されている。 The crystal 107 performs wavelength conversion on the incident laser light. A concave mirror 106b is disposed in the traveling direction of the laser light (second harmonic) wavelength-converted by the crystal 107, and a prism 105b is disposed in the traveling direction of the laser light condensed by the concave mirror 106b.

 上記の波長変換装置においては、プリズム105aにて分光されたレーザー光の結晶107への入射角度は、波長λによって異なる。このため、各波長のレーザー光のそれぞれにおける結晶107を通過する光路長が異なる。分光された各波長のレーザー光の光路長を、位相整合条件を満たすように設定することで、波長の異なる光を1つの結晶で効率よく第2高調波に変換することができる。 In the above wavelength conversion device, the incident angle of the laser beam dispersed by the prism 105a to the crystal 107 varies depending on the wavelength λ. For this reason, the optical path length which passes through the crystal | crystallization 107 in each of the laser beam of each wavelength differs. By setting the optical path length of the laser light having each wavelength separated so as to satisfy the phase matching condition, light having different wavelengths can be efficiently converted into the second harmonic by one crystal.

 図4は、特許文献5に記載の分光手段を備えた波長変換素子の構成を示す模式図である。この波長変換素子は、プリズム108および結晶109からなる。レーザーダイオード(LD)110からのレーザー光がプリズム108にて分光され、分光された各波長のレーザー光が結晶109に入射する。図3に示したものと同様、分光されたレーザー光の結晶109への入射角度は、波長により異なるため、各波長のレーザー光のそれぞれにおける結晶109を通過する光路長が異なる。したがって、分光された各波長のレーザー光の光路長を、位相整合条件(擬似相整合条件)を満たすように設定することで、波長の異なる光を1つの結晶で効率よく第2高調波に変換することができる。 FIG. 4 is a schematic diagram showing a configuration of a wavelength conversion element provided with the spectroscopic means described in Patent Document 5. This wavelength conversion element includes a prism 108 and a crystal 109. Laser light from the laser diode (LD) 110 is split by the prism 108, and the split laser light of each wavelength enters the crystal 109. As in the case shown in FIG. 3, the incident angle of the dispersed laser light on the crystal 109 differs depending on the wavelength, and therefore the optical path lengths of the laser light of each wavelength passing through the crystal 109 are different. Therefore, by setting the optical path length of the split laser light of each wavelength so as to satisfy the phase matching condition (pseudo phase matching condition), light with different wavelengths can be efficiently converted to the second harmonic with one crystal. can do.

 上記の波長変換素子では、各波長のレーザー光は1点に集光されないため、入射光強度に対する耐性を保つことが可能である。 In the above-described wavelength conversion element, the laser light of each wavelength is not condensed at one point, so that it is possible to maintain the resistance to the incident light intensity.

 上述したように、特許文献1に記載の画像表示装置においては、スペックルが生じ、それにより画質が低下する、という問題がある。 As described above, the image display device described in Patent Document 1 has a problem in that speckles are generated, thereby reducing the image quality.

 特許文献2~5に記載のものは、波長幅のある光源に対して位相整合条件を満たすことにより、スペックルを低減することが可能である。しかし、これら特許文献2~5に記載のものには、以下のような問題がある。 Patent Documents 2 to 5 can reduce speckle by satisfying the phase matching condition for a light source having a wavelength width. However, those described in Patent Documents 2 to 5 have the following problems.

 特許文献2に記載の波長変換素子においては、分極反転周期構造102a~102eのそれぞれで発生した第2高調波は、同軸のビームとして合成されることがない。このような構成は、特許文献1に記載のような、レーザービームを走査する画像表示装置に適用することは困難である。 In the wavelength conversion element described in Patent Document 2, the second harmonic generated in each of the polarization inversion periodic structures 102a to 102e is not synthesized as a coaxial beam. Such a configuration is difficult to apply to an image display apparatus that scans with a laser beam as described in Japanese Patent Application Laid-Open No. H10-228707.

 特許文献3に記載の波長変換素子においては、光源からのレーザー光のうち、位相整合条件(擬似位相整合条件)が満たされる成分のみが、領域104の各分極反転周期領域で第2高調波に変換される。したがって、波長幅のあるレーザービーム(第2高調波)を得ることができるものの、第2高調波への変換効率が低下する。 In the wavelength conversion element described in Patent Document 3, only the component satisfying the phase matching condition (pseudo phase matching condition) of the laser light from the light source becomes the second harmonic in each polarization inversion period region of the region 104. Converted. Therefore, although a laser beam (second harmonic) having a wavelength width can be obtained, the conversion efficiency to the second harmonic is lowered.

 特許文献4に記載の波長変換装置においては、結晶中の1点にビームが集光されるため、結晶の材料によっては、入射光強度に対する十分な耐性を得られない場合がある。例えば、第2高調波発生用結晶としてニオブ酸リチウム(LiNO3)結晶を用いた場合は、その光耐性は0.5(W/mm2)である。このため、例えばビームの集光径が0.1mm(ビーム面積0.0079mm2)の場合、結晶が耐えうる入射光強度は3.9mW以下となり、画像表示装置のような、入射光強度が大きなものに対応することは困難である。 In the wavelength conversion device described in Patent Document 4, since the beam is focused at one point in the crystal, depending on the crystal material, sufficient resistance to incident light intensity may not be obtained. For example, when a lithium niobate (LiNO 3 ) crystal is used as the second harmonic generation crystal, its light resistance is 0.5 (W / mm 2 ). Therefore, for example, when the beam condensing diameter is 0.1 mm (beam area 0.0079 mm 2 ), the incident light intensity that the crystal can withstand is 3.9 mW or less, and the incident light intensity is high as in an image display device. It is difficult to deal with things.

 特許文献5に記載の波長変換素子においては、分光された各波長の主光線は結晶を通過中に発散するため、各波長の光線同士を結晶透過後に集光して1つのビームに合成する光学系が必要となる。このような光学系は、一般に大きなものとなることから、特許文献5に記載の波長変換素子を画像表示装置に適用した場合、装置の小型化が困難になる。 In the wavelength conversion element described in Patent Document 5, since the principal light of each wavelength that has been dispersed diverges while passing through the crystal, the light that condenses each wavelength of light after passing through the crystal and synthesizes it into one beam. A system is required. Since such an optical system is generally large, when the wavelength conversion element described in Patent Document 5 is applied to an image display device, it is difficult to reduce the size of the device.

 本発明の目的は、上記各問題を解決し、光耐性が大きく、小型で軽量な、波長幅のある第2高調波光ビームを発生する光源装置、及びそれを用いた、スペックルノイズの少ない画像表示装置を提供することにある。 An object of the present invention is to solve the above-mentioned problems, and to provide a light source device that generates a second harmonic light beam having a large light resistance, a small size and a light weight and having a wavelength width, and an image with less speckle noise using the same. It is to provide a display device.

 上記目的を達成するため、本発明の光源装置は、
 第1の端面と、該第1の端面と対向する第2の端面を備え、前記第1及び第2の端面のそれぞれと交差する平面に垂直な方向から見た場合に、前記第2の端面が前記第1の端面に対して傾斜しており、前記第1の端面から入射した光の高調波を発生する光学結晶と、
 前記平面内を平行に進むように平行化された、波長が異なる複数のコヒーレント光を、前記第1の端面に入射させるコヒーレント光供給手段と、
 前記第2の端面から出力された波長が異なる複数の第2高調波を合波する合波手段を有し、
 前記光学結晶における前記高調波を発生するための位相整合が、前記複数のコヒーレント光のそれぞれの光線軸と交差する方向に連続的にとられている。
In order to achieve the above object, the light source device of the present invention comprises:
A second end face provided with a first end face and a second end face opposed to the first end face, when viewed from a direction perpendicular to a plane intersecting each of the first end face and the second end face; Is inclined with respect to the first end face, and generates an optical harmonic wave of light incident from the first end face;
A coherent light supply means for making a plurality of coherent lights having different wavelengths collimated so as to travel in parallel in the plane enter the first end face;
Combining means for combining a plurality of second harmonics having different wavelengths output from the second end face;
The phase matching for generating the harmonics in the optical crystal is continuously taken in the direction intersecting with the respective beam axes of the plurality of coherent lights.

 本発明の画像表示装置は、上記の光源装置と、前記光源装置から出力された第2高調波の光ビームで外部スクリーン上を走査する手段を有する。 The image display device of the present invention has the above light source device and means for scanning an external screen with a second harmonic light beam output from the light source device.

特開2007-073552号公報に記載の波長変換素子の構成を示す模式図である。FIG. 2 is a schematic diagram showing a configuration of a wavelength conversion element described in Japanese Patent Application Laid-Open No. 2007-073552. 特開2005-352393号公報に記載の波長変換素子を説明するための図である。FIG. 3 is a diagram for explaining a wavelength conversion element described in JP-A-2005-352393. 特開平10-325970号公報に記載の分光手段を備えた波長変換装置の構成を示す模式図である。FIG. 3 is a schematic diagram showing a configuration of a wavelength conversion device including a spectroscopic unit described in Japanese Patent Laid-Open No. 10-325970. 特開平06-160926号公報に記載の分光手段を備えた波長変換素子の構成を示す模式図である。FIG. 2 is a schematic diagram showing a configuration of a wavelength conversion element including a spectroscopic unit described in Japanese Patent Laid-Open No. 06-160926. 本発明の第1の実施形態である光源装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the light source device which is the 1st Embodiment of this invention. 図5Aに示す光源装置の結晶の分極反転構造を示す模式図である。It is a schematic diagram which shows the polarization inversion structure of the crystal | crystallization of the light source device shown to FIG. 5A. 図5Aに示す光源装置の各レンズの構成を示す模式図である。It is a schematic diagram which shows the structure of each lens of the light source device shown to FIG. 5A. 本発明の第2の実施形態である光源装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the light source device which is the 2nd Embodiment of this invention. 図6Aに示す光源装置のレーザー群の発振波長の範囲を説明するための図である。It is a figure for demonstrating the range of the oscillation wavelength of the laser group of the light source device shown to FIG. 6A. 本発明の第3の実施形態である光源装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the light source device which is the 3rd Embodiment of this invention. 図7Aに示す光源装置のレーザー群の発振波長の範囲を説明するための図である。It is a figure for demonstrating the range of the oscillation wavelength of the laser group of the light source device shown to FIG. 7A. 図7Aに示す光源装置を搭載する画像表示装置の構成を示すブロック図である。It is a block diagram which shows the structure of the image display apparatus carrying the light source device shown to FIG. 7A. 本発明の第4の実施形態である光源装置の構成を示す模式図である。It is a schematic diagram which shows the structure of the light source device which is the 4th Embodiment of this invention. 図8Aに示す光源装置を搭載する画像表示装置の構成を示すブロック図である。It is a block diagram which shows the structure of the image display apparatus carrying the light source device shown to FIG. 8A.

1 レーザー(基本波)
2 分光用グレーティング
3、5 レンズ
4 結晶
6 合波用グレーティング
1 Laser (fundamental wave)
2 Spectral grating 3, 5 Lens 4 Crystal 6 Combined grating

 以下、本発明における一実施形態を、図面を参照して説明する。
(第1の実施形態)
 図5Aは、本発明の第1の実施形態である光源装置の構成を示す模式図である。
Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
(First embodiment)
FIG. 5A is a schematic diagram illustrating a configuration of the light source device according to the first embodiment of the present invention.

 図5Aを参照すると、光源装置は、波長幅のあるレーザー光(基本波)を出射するレーザー1、分光用グレーティング2、レンズ3、結晶4、レンズ5、および合波用グレーティング6を有する。 Referring to FIG. 5A, the light source device includes a laser 1 that emits laser light (fundamental wave) having a wavelength width, a spectral grating 2, a lens 3, a crystal 4, a lens 5, and a multiplexing grating 6.

 レーザー1は、縦マルチモードの半導体レーザーであって、その出力光(基本波)の中心波長λは1060nm、波長間隔dλは1nm、波長幅は20nmである。レーザー1から出力されたレーザー光は、分光用グレーティング2により分光される。 Laser 1 is a longitudinal multimode semiconductor laser, and its output light (fundamental wave) has a center wavelength λ of 1060 nm, a wavelength interval dλ of 1 nm, and a wavelength width of 20 nm. The laser light output from the laser 1 is split by the spectroscopic grating 2.

 分光用グレーティング2の格子間隔Λは1.1μmであり、レーザー1からのレーザー光を角度θの間隔で分光する。角度θは例えば0.2°である。分光用グレーティング2により分光された光ビームは、レンズ3に入射する。 The grating interval Λ of the spectral grating 2 is 1.1 μm, and the laser beam from the laser 1 is dispersed at an angle θ. The angle θ is, for example, 0.2 °. The light beam split by the spectroscopic grating 2 enters the lens 3.

 レンズ3の焦点距離fは30mm、口径は3mmである。分光用グレーティング2で分光された各波長の光ビームの主光線が、レンズ3によって平行化される。レンズ3によって平行化された各波長の光ビームの間隔Xは100μmである。これら平行化された各波長の光ビームはそれぞれ並列に結晶4内で集光される。 The focal length f of the lens 3 is 30 mm, and the aperture is 3 mm. The principal rays of the light beams of the respective wavelengths separated by the spectral grating 2 are collimated by the lens 3. The interval X between the light beams of the respective wavelengths collimated by the lens 3 is 100 μm. These collimated light beams having respective wavelengths are condensed in the crystal 4 in parallel.

 結晶4は、MgOを添加したLiNO3よりなり、非線形光学特性を有する。結晶4は、入射面に対して出射面が傾斜しており、入出射面と交差する面に垂直な方向から見た場合の結晶4の形状は楔形である。波長1060nmの光(基本波)が結晶4に入射した場合の、結晶4中における第2高調波の屈折率nsと入射基本波の屈折率nfの差(ns-nf)は0.039である。前述の式1により与えられる、波長1060nmにおけるコヒーレント長Lcは、6.8μmである。 The crystal 4 is made of LiNO 3 to which MgO is added and has nonlinear optical characteristics. The exit surface of the crystal 4 is inclined with respect to the incident surface, and the shape of the crystal 4 when viewed from a direction perpendicular to the surface intersecting the entrance / exit surface is a wedge shape. When light (fundamental wave) having a wavelength of 1060 nm is incident on the crystal 4, the difference (ns−nf) between the refractive index ns of the second harmonic and the refractive index nf of the incident fundamental wave in the crystal 4 is 0.039. . The coherent length Lc at a wavelength of 1060 nm given by the above-described Equation 1 is 6.8 μm.

 結晶4において、平行化された各波長の光ビームのうち、中心波長1060nmの光が通過する部分の結晶長は、6.8mmであり、これは波長1060nmにおけるコヒーレント長Lc(Lc=6.8μm)の1000倍の長さである。 In the crystal 4, the crystal length of the portion of the collimated light beam of each wavelength through which the light having the center wavelength of 1060 nm passes is 6.8 mm, which is the coherent length Lc (Lc = 6.8 μm) at the wavelength of 1060 nm. ) 1000 times longer.

 コヒーレント長Lcは、前述の式1に従い、入射光の波長に比例して変化する。波長差1nmで、コヒーレント長Lcが6.4nmだけ変化する場合、位相整合条件が満たされる結晶長は、波長差1nmで、コヒーレント長Lcの変化量の1000倍の6.4μmだけ変化する。したがって、100μm間隔で並列化された波長差1nmの光に対し、結晶長が6.4μmだけ変化するように、入射面に対する出射面の傾斜角度αを3.66°に設定することで、各波長の光の位相整合条件を満すことができる。 The coherent length Lc changes in proportion to the wavelength of the incident light according to the above-described equation 1. When the coherent length Lc changes by 6.4 nm at a wavelength difference of 1 nm, the crystal length that satisfies the phase matching condition changes by 6.4 μm, which is 1000 times the amount of change of the coherent length Lc at a wavelength difference of 1 nm. Therefore, by setting the inclination angle α of the exit surface with respect to the entrance surface to 3.66 ° so that the crystal length is changed by 6.4 μm with respect to the light having a wavelength difference of 1 nm paralleled at intervals of 100 μm, The phase matching condition of the light of the wavelength can be satisfied.

 結晶4を透過し、第2高調波に変換された各波長の光は、レンズ5に入射する。レンズ5の焦点距離fは30mmで、口径は3mmである。結晶4からの各波長の光ビームはレンズ5で集光されて合波用グレーティング6に入射する。 The light of each wavelength transmitted through the crystal 4 and converted into the second harmonic enters the lens 5. The focal length f of the lens 5 is 30 mm, and the aperture is 3 mm. The light beam of each wavelength from the crystal 4 is collected by the lens 5 and enters the multiplexing grating 6.

 合波用グレーティング6は、レンズ5の集光点に配置されている。合波用グレーティング6の格子間隔は0.55μmであり、これは分光用グレーティング2の格子間隔Λの1/2である。合波用グレーティング6は、結晶4からの各波長の光ビーム(第2高調波)を、それぞれの主光線が同軸上で一致するように合成する。この合波用グレーティング6で合成されたレーザー光(2倍波)7が、光源装置の出力光とされる。 The multiplexing grating 6 is disposed at the condensing point of the lens 5. The grating interval of the multiplexing grating 6 is 0.55 μm, which is ½ of the grating interval Λ of the spectral grating 2. The multiplexing grating 6 combines the light beams (second harmonics) of the respective wavelengths from the crystal 4 so that the respective principal rays coincide on the same axis. Laser light (second harmonic wave) 7 synthesized by the multiplexing grating 6 is used as output light of the light source device.

 図5Aには、レーザー光(2倍波)7のスペクトル分布が示されている。この分布によれば、レーザー光(2倍波)7は波長幅を有しており、その中心波長は、基本波の波長λの二分の一の値である530nmであり、波長間隔は基本波の波長間隔dλの二分の一である0.5nmである。 FIG. 5A shows the spectral distribution of the laser beam (second harmonic) 7. According to this distribution, the laser beam (second harmonic wave) 7 has a wavelength width, its center wavelength is 530 nm, which is a half value of the wavelength λ of the fundamental wave, and the wavelength interval is the fundamental wave. It is 0.5 nm which is a half of the wavelength interval dλ.

 なお、結晶4は、分極反転構造を有するものであってもよい。図5Bに、結晶4の分極反転構造を模式的に示す。図5Bに示すように、結晶4は、入射面側から出射面側に向かって自発分極が空間的に周期反転した分極反転部8を有する。分極反転部8の反転周期は、入射するレーザー光のコヒーレント長の2倍である。例えば、波長1060nmのレーザー光(基本波)のコヒーレント長をLcとすると、分極反転部8のレーザー光(基本波)が入射する部分の反転周期は、コヒーレント長Lcの2倍の周期とされる。これにより、第2高調波の振幅を大きくすることができる。 Note that the crystal 4 may have a domain-inverted structure. FIG. 5B schematically shows the polarization inversion structure of the crystal 4. As shown in FIG. 5B, the crystal 4 has a polarization inversion portion 8 in which spontaneous polarization is spatially inverted from the incident surface side to the output surface side. The inversion period of the polarization inversion unit 8 is twice the coherent length of the incident laser light. For example, if the coherent length of laser light (fundamental wave) with a wavelength of 1060 nm is Lc, the inversion period of the portion where the laser light (fundamental wave) of the polarization inversion unit 8 is incident is twice as long as the coherent length Lc. . Thereby, the amplitude of the second harmonic can be increased.

 図5Bに示した分極反転部8では、入射面側から「+」側領域と「-」側領域とが交互に配置されており、入出射面と交差する面に垂直な方向から見た場合、「+」側領域および「-」側領域はそれぞれ楔形状とされている。「+」側領域および「-」側領域の数の合計をAとすると(結晶長をコヒーレント長LcのA倍とすると)、「+」側領域および「-」側領域のそれぞれにおける、入射側の分極境界面(または入射面)に対する出射側の分極境界面(または出射面)の傾斜角度は、結晶4の入射面に対する出射面の傾斜角度αが3.66°のとき、図5Bに示した構造(図5B中では、A=4として省略して図示しているが、実際にはA=1000である。)である場合は、「+」側領域および「-」側領域のそれぞれにおける、入射側の分極境界面(または入射面)に対する出射側の分極境界面(または出射面)の傾斜角度は、3.66°の1/Aである0.00366°である。 In the polarization inversion unit 8 shown in FIG. 5B, the “+” side region and the “−” side region are alternately arranged from the incident surface side, and viewed from a direction perpendicular to the surface intersecting with the incident / exit surface. The “+” side region and the “−” side region each have a wedge shape. When the total number of “+” side regions and “−” side regions is A (when the crystal length is A times the coherent length Lc), the incident side in each of the “+” side region and the “−” side region The inclination angle of the polarization boundary surface (or exit surface) on the exit side with respect to the polarization interface surface (or entrance surface) is shown in FIG. 5B when the exit surface tilt angle α with respect to the entrance surface of the crystal 4 is 3.66 °. (In FIG. 5B, abbreviated as A = 4, but actually A = 1000), each of the “+” side region and the “−” side region The inclination angle of the outgoing polarization interface (or outgoing surface) with respect to the incoming polarized interface (or incoming surface) is 0.00366 °, which is 1 / A of 3.66 °.

 図5Bに示した分極反転部8は、結晶4の入出射面と交差する面上の、「+」側領域および「-」側領域のそれぞれと対応する領域に、「+」側電極および「-」側電極を形成し、「+」側および「-」側の各電極間に電圧を印加することで実現可能である。「+」側電極および「-」側電極の形状は、対応する「+」側領域および「-」側領域の形状と相似である。すなわち、「+」側および「-」側の各電極は、入射側の端部に対する出射側の端部の傾斜角度が、傾斜角度αをAで割った値(例えば、0.00366°)とされる。このような電極は、半導体製造プロセスとして知られているフォトリソグラフィ工程を利用して形成することができる。電極として、例えば櫛型電極を採用してもよい。 5B includes a “+” side electrode and a “+” side electrode and a “+” side region on a plane intersecting the incident / exit plane of the crystal 4 and a region corresponding to each of the “+” side region and the “−” side region. This can be realized by forming a “−” side electrode and applying a voltage between the “+” side electrode and the “−” side electrode. The shapes of the “+” side electrode and the “−” side electrode are similar to the shapes of the corresponding “+” side region and “−” side region. That is, for each of the electrodes on the “+” side and the “−” side, the inclination angle of the exit end with respect to the entrance end is a value obtained by dividing the inclination angle α by A (for example, 0.00366 °). Is done. Such an electrode can be formed using a photolithography process known as a semiconductor manufacturing process. For example, a comb-shaped electrode may be employed as the electrode.

 本実施形態の光源装置によれば、分光された各波長の光を互いに平行化して結晶4に入射することで、入射光強度に対する耐性を向上することが可能である。 According to the light source device of the present embodiment, it is possible to improve the tolerance to the incident light intensity by collimating the light of each wavelength to be incident on the crystal 4.

 また、結晶4内で各波長の光の主光線が発散しないため、集光レンズであるレンズ5の口径を小さくすることができる。これにより、波長幅のある第2高調波光ビームを発生する光源として小型かつ軽量の光源装置を提供できる。 In addition, since the principal ray of each wavelength of light does not diverge within the crystal 4, the aperture of the lens 5 that is a condenser lens can be reduced. Thereby, a small and lightweight light source device can be provided as a light source for generating a second harmonic light beam having a wavelength width.

 本実施形態の光源装置を、レーザービームを走査する方式の画像表示装置に適用することで、スペックルノイズの少ない表示画像を提供することができる。 The display image with less speckle noise can be provided by applying the light source device of the present embodiment to an image display device that scans a laser beam.

 なお、本実施形態の光源装置において、結晶4を形成する非線形光学材料としてLiNO3を用いているが、これに代えて、BBO、LBO、CLBO、KTP等各種非線形光学材料を用いてもよい。 In the light source device of this embodiment, LiNO 3 is used as the nonlinear optical material for forming the crystal 4, but instead, various nonlinear optical materials such as BBO, LBO, CLBO, and KTP may be used.

 また、平行化された各波長の光がそれぞれ位相整合条件(擬似位相整合条件)を満たすのであれば、結晶4の大きさ、入射面に対する出射面の傾斜角度αは、どのような値としてもよい。 Further, if the collimated light of each wavelength satisfies the phase matching condition (pseudo phase matching condition), the size of the crystal 4 and the inclination angle α of the exit surface with respect to the entrance surface can be any value. Good.

 基本波として使用するレーザー1は、縦マルチモード発振するものであれば、どのような中心波長のものを用いてもよい。例えば、レーザー1は、スーパールミネッセントダイオードであってもよい。 The laser 1 used as the fundamental wave may be of any center wavelength as long as it oscillates in the longitudinal multimode. For example, the laser 1 may be a super luminescent diode.

 分光用グレーティング2に入射する基本波を合波用グレーティング6にて1本のビームに合成し、結晶4と位相整合が取れる条件を満たすのであれば、分光用グレーティング2および合波用グレーティング6の各格子間隔、レンズ3、5の焦点距離および口径は、どのような値としてもよい。 If the fundamental wave incident on the spectral grating 2 is combined into one beam by the multiplexing grating 6 and satisfies the condition for phase matching with the crystal 4, the spectral grating 2 and the multiplexing grating 6 The lattice spacing, the focal lengths and the apertures of the lenses 3 and 5 may be any values.

 分光用グレーティング2および合波用グレーティング6に代えて、プリズムなど屈折率分散手段を用いてもよい。 In place of the spectral grating 2 and the combining grating 6, a refractive index dispersion means such as a prism may be used.

 レンズ3、5に代えて凹面鏡を用いてもよい。 A concave mirror may be used instead of the lenses 3 and 5.

 また、レンズ3、5はそれぞれ、図5Cに示すような凸レンズ2001と凹レンズ200の組み合わせで構成してもよい。この構成によれば、焦点距離が短い光学系でレンズ3、5を構成することができるので、小型化が可能となる。 Further, each of the lenses 3 and 5 may be composed of a combination of a convex lens 2001 and a concave lens 200 as shown in FIG. 5C. According to this configuration, since the lenses 3 and 5 can be configured with an optical system having a short focal length, the size can be reduced.

 また、本実施形態のような楔形状の結晶4(または、楔形の分極反転構造)を用いる光源装置において、結晶4を移動方向9に移動させる手段を設けてもよい。この構成によれば、結晶4を移動方向9に移動させることで、各波長に対する位相整合の調整を連続的に行うことが可能である。ここで、移動方向9は、分光用グレーティング2にて分光され、レンズ3によって平行化された各波長の主光線と交差する方向である。
(第2の実施形態)
 図6Aは、本発明の第2の実施形態である光源装置の構成を示す模式図である。
Further, in the light source device using the wedge-shaped crystal 4 (or the wedge-shaped polarization inversion structure) as in the present embodiment, means for moving the crystal 4 in the movement direction 9 may be provided. According to this configuration, it is possible to continuously adjust the phase matching for each wavelength by moving the crystal 4 in the moving direction 9. Here, the moving direction 9 is a direction that intersects the principal ray of each wavelength that is split by the spectroscopic grating 2 and collimated by the lens 3.
(Second Embodiment)
FIG. 6A is a schematic diagram illustrating a configuration of a light source device according to a second embodiment of the present invention.

 図6Aを参照すると、光源装置は、図5Aに示した構成において、レーザー1および分光用グレーティング2に代えてレーザー群11を用いる点が、第1の実施形態の光源装置と異なる。図6A中、第1の実施形態の光源装置と同じ構成には、同じ符号を付している。 Referring to FIG. 6A, the light source device is different from the light source device of the first embodiment in that a laser group 11 is used in place of the laser 1 and the spectral grating 2 in the configuration shown in FIG. 5A. In FIG. 6A, the same components as those of the light source device of the first embodiment are denoted by the same reference numerals.

 レーザー群11は、発振波長の異なる2N+1個のレーザーを並列に配置したものである。図6Aには、便宜上、発振波長λのレーザー11aと、発振波長が(λ+N・dλ)で与えられるレーザー11bと、発振波長が(λ-N・dλ)で与えられるレーザー11cとが示されている。レーザー11aの発振波長λは1060nmである。ここで、Nは正の整数であり、dλは例えば1nmである。この条件によれば、中央に位置するレーザー11aの発振波長λから1nmずつ発振波長がずれたN個のレーザーがレーザー11aの両側にそれぞれ並列して配置されることになる。 The laser group 11 includes 2N + 1 lasers having different oscillation wavelengths arranged in parallel. For convenience, FIG. 6A shows a laser 11a having an oscillation wavelength λ, a laser 11b having an oscillation wavelength of (λ + N · dλ), and a laser 11c having an oscillation wavelength of (λ−N · dλ). Yes. The oscillation wavelength λ of the laser 11a is 1060 nm. Here, N is a positive integer, and dλ is 1 nm, for example. According to this condition, N lasers whose oscillation wavelengths are shifted by 1 nm from the oscillation wavelength λ of the laser 11a located at the center are arranged in parallel on both sides of the laser 11a.

 図6Bに、Nを10とした場合のレーザー群11の発振波長の範囲を示す。この例では、レーザー群11は21個のレーザーからなり、各レーザーから出力されるレーザー光の波長範囲は全体で1050nmから1070nmである。各レーザーからのレーザー光の間隔(光軸の間隔)は100μmであり、ビーム径はいずれも100μm(ビーム面積0.0079mm2)である。 FIG. 6B shows the range of the oscillation wavelength of the laser group 11 when N is 10. In this example, the laser group 11 includes 21 lasers, and the wavelength range of laser light output from each laser is 1050 nm to 1070 nm as a whole. The interval between the laser beams from each laser (the interval between the optical axes) is 100 μm, and the beam diameter is 100 μm (beam area 0.0079 mm 2 ).

 レーザー群11からの各波長のレーザー光は、平行光線束であって、それぞれ並列に結晶4に入射する。レーザー群11を構成する各レーザーの出力はいずれも3mWであり、レーザー群11から結晶4に入射するレーザー光のエネルギーは合計で63mWである。 The laser light of each wavelength from the laser group 11 is a parallel light bundle, and is incident on the crystal 4 in parallel. The output of each laser constituting the laser group 11 is 3 mW, and the energy of laser light incident on the crystal 4 from the laser group 11 is 63 mW in total.

 各波長のレーザー光は、100μm間隔で並列に結晶4に入射するため、その入射エネルギー密度は0.38W/m2である。この値は、ニオブ酸リチウム(LiNO3)結晶の光耐性である0.5W/m2より小さい。よって、レーザー群11を用いた構造により、入射光強度に対する耐性を向上することができる。なお、レーザー群11を構成する各波長のレーザーには、縦モードシングル半導体レーザーまたはスーパールミネッセントダイオードが用いられる。 Since the laser light of each wavelength is incident on the crystal 4 in parallel at intervals of 100 μm, the incident energy density is 0.38 W / m 2 . This value is smaller than 0.5 W / m 2 which is the light resistance of the lithium niobate (LiNO 3 ) crystal. Therefore, the structure using the laser group 11 can improve the tolerance to the incident light intensity. Note that a longitudinal mode single semiconductor laser or a super luminescent diode is used for each wavelength of the laser constituting the laser group 11.

 本実施形態の光源装置によれば、波長の異なる複数のレーザーを並列して配置し、各レーザーからのレーザー光を並列に結晶に入射させることで、入射光強度に対する耐性を向上することが可能である。 According to the light source device of this embodiment, it is possible to improve resistance to incident light intensity by arranging a plurality of lasers having different wavelengths in parallel and allowing laser light from each laser to enter the crystal in parallel. It is.

 また、結晶4内で各波長のレーザー光の主光線が発散しないため、集光レンズの口径を小型化でき、その結果、小型で軽量な、波長幅のある第2高調波光ビームを発生する光源を実現できる。 Further, since the chief rays of the laser light of each wavelength do not diverge within the crystal 4, the aperture of the condenser lens can be reduced, and as a result, a light source that generates a second harmonic light beam having a wavelength width that is small and lightweight. Can be realized.

 また、本実施形態の光源装置を、レーザービームを走査する方式の画像表示装置に適用することで、スペックルノイズの少ない表示画像を提供することができる。 Further, by applying the light source device of the present embodiment to an image display device that scans a laser beam, a display image with less speckle noise can be provided.

 本実施形態の光源装置においても、結晶4を形成する非線形光学材料としてLiNO3を用いているが、これに代えて、BBO、LBO、CLBO、KTP等各種非線形光学材料を用いてもよい。 In the light source device of this embodiment, LiNO 3 is used as the nonlinear optical material for forming the crystal 4, but various nonlinear optical materials such as BBO, LBO, CLBO, and KTP may be used instead.

 結晶4の大きさ、入射面に対する出射面の傾斜角度は、平行化された各波長の光がそれぞれ位相整合条件(擬似位相整合条件)を満たせば、どのような値に設定してもよい。 The size of the crystal 4 and the inclination angle of the exit surface with respect to the entrance surface may be set to any values as long as the parallelized light of each wavelength satisfies the phase matching condition (pseudo phase matching condition).

 入射する基本波を合波用グレーティング6にて1本のビームに合成し、結晶4と位相整合が取れる条件を満たすのであれば、合波用グレーティング6の各格子間隔、レンズ5の焦点距離および口径は、どのような値としてもよい。 If the incident fundamental wave is synthesized into one beam by the multiplexing grating 6 and satisfies the condition that the phase matching with the crystal 4 is satisfied, each grating interval of the multiplexing grating 6, the focal length of the lens 5, and the like. The aperture may have any value.

 合波用グレーティング6に代えて、プリズムなど屈折率分散手段を用いてもよい。 Instead of the multiplexing grating 6, a refractive index dispersion means such as a prism may be used.

 レンズ5に代えて凹面鏡を用いてもよい。
(第3の実施形態)
 図7Aは、本発明の第3の実施形態である光源装置の構成を示す模式図である。
A concave mirror may be used instead of the lens 5.
(Third embodiment)
FIG. 7A is a schematic diagram illustrating a configuration of a light source device according to a third embodiment of the present invention.

 図7Aを参照すると、光源装置は、図6Aに示した構成において、変調素子群21を加えた点が、第2の実施形態の光源装置と異なる。図7A中、第2の実施形態の光源装置と同じ構成には、同じ符号を付している。 Referring to FIG. 7A, the light source device is different from the light source device of the second embodiment in that a modulation element group 21 is added to the configuration shown in FIG. 6A. In FIG. 7A, the same reference numerals are given to the same components as those of the light source device of the second embodiment.

 レーザー群11は、発振波長の異なるN個のレーザーを並列に配置したものである。図7Aには、便宜上、発振波長λのレーザー11aと、発振波長が[λ+(N/2)・dλ]で与えられるレーザー11bと、発振波長が[λ-(N/2-1)・dλ]で与えられるレーザー11cとが示されている。レーザー11aの発振波長λは1060nmであり、Nは正の整数である。 The laser group 11 includes N lasers having different oscillation wavelengths arranged in parallel. In FIG. 7A, for convenience, a laser 11a having an oscillation wavelength λ, a laser 11b having an oscillation wavelength of [λ + (N / 2) · dλ], and an oscillation wavelength of [λ− (N / 2-1) · dλ And a laser 11c given in FIG. The oscillation wavelength λ of the laser 11a is 1060 nm, and N is a positive integer.

 変調素子群21は、レーザー群11を構成する各波長のレーザーのそれぞれに設けられたN個の変調素子からなる。変調素子には、例えば音響光学素子を用いる。レーザー群11を構成する各レーザーと変調素子群21を構成する各変調素子とは1対1で対応する。各変調素子を制御することで、各波長のレーザー光のオン・オフ制御を行う。 The modulation element group 21 is composed of N modulation elements provided in each of the lasers of each wavelength constituting the laser group 11. For example, an acousto-optic element is used as the modulation element. Each laser constituting the laser group 11 and each modulation element constituting the modulation element group 21 correspond one-to-one. By controlling each modulation element, on / off control of laser light of each wavelength is performed.

 図7Bに、Nを8とした場合のレーザー群11の発振波長の範囲を示す。この例では、レーザー群11は8個のレーザーからなり、各レーザーから出力されるレーザー光の波長範囲は全体で1057nmから1064nmである。各レーザーからのレーザー光の間隔は100μmであり、ビーム径はいずれも100μmである。波長間隔は1nmである。 FIG. 7B shows the oscillation wavelength range of the laser group 11 when N is 8. In this example, the laser group 11 includes eight lasers, and the wavelength range of laser light output from each laser is 1057 nm to 1064 nm as a whole. The interval between laser beams from each laser is 100 μm, and the beam diameter is 100 μm. The wavelength interval is 1 nm.

 各レーザーから出力されるレーザー光の強度に対して、それぞれ異なる割合で重み付けが施されている。具体的には、波長1060nmのレーザー光に対する割合を128、波長1061nmのレーザー光に対する割合を64、波長1059nmのレーザー光に対する割合を32、波長1062nmのレーザー光に対する割合を16、波長1058nmのレーザー光に対する割合を8、波長1063nmのレーザー光に対する割合を4、波長1057nmのレーザー光に対する割合を2、波長1064nmのレーザー光に対する割合を1とする強度の重み付けが施されている。 The weight of the laser beam output from each laser is weighted at a different rate. Specifically, the ratio to the laser beam having a wavelength of 1060 nm is 128, the ratio to the laser beam having a wavelength of 1061 nm is 64, the ratio to the laser beam having a wavelength of 1059 nm is 32, the ratio to the laser beam having a wavelength of 1062 nm is 16, and the laser beam having a wavelength of 1058 nm is used. Intensity weighting is performed with a ratio of 8 to a laser beam having a wavelength of 1063 nm, a ratio of 4 to a laser beam having a wavelength of 1057 nm, and a ratio of 1 to a laser beam having a wavelength of 1064 nm.

 上記のような重み付けをすることで、デジタル映像における多階調の画像を安定して供給することが可能となる。具体的に説明すると、複数の画素からなる画像を256階調で表示する場合において、画素毎に、その画素の輝度に対応するレーザーの組み合わせを変調素子群21にて選択する。例えば、輝度を示すデータが160である画素に対しては、割合が128とされたレーザー(波長1060nm)と割合が32とされたレーザー(波長1059nm)を選択する。このように画素毎にレーザー選択制御を行うことで、多階調の画像を安定して供給することができる。 By performing the weighting as described above, it is possible to stably supply a multi-gradation image in digital video. More specifically, when an image composed of a plurality of pixels is displayed with 256 gradations, the modulation element group 21 selects a laser combination corresponding to the luminance of the pixel for each pixel. For example, for a pixel whose luminance data is 160, a laser with a ratio of 128 (wavelength 1060 nm) and a laser with a ratio of 32 (wavelength 1059 nm) are selected. Thus, by performing laser selection control for each pixel, a multi-gradation image can be stably supplied.

 上記のレーザー選択制御において、輝度によっては1つのレーザーしか選択されない画素がある。しかし、通常、全画素において、同時に、同一波長のレーザーが1つ選択されることは稀である。また、画素の輝度は、映像信号に応じて変化することから、1つのレーザーしか選択されない状態が長時間にわたって連続することは稀である。したがって、上記のレーザー選択制御においては、画像全体で見た場合、部分的、かつ、瞬間的に、スペックルノイズが発生することがあるが、そのようなスペックルノイズによる画質への影響は小さい。 In the above laser selection control, there are pixels where only one laser is selected depending on the brightness. However, it is rare that one laser having the same wavelength is selected at the same time in all pixels. Further, since the luminance of the pixel changes according to the video signal, it is rare that a state where only one laser is selected continues for a long time. Therefore, in the laser selection control described above, speckle noise may occur partially and instantaneously when viewed in the entire image, but the effect of such speckle noise on image quality is small. .

 図7Cは、本実施形態の光源装置を搭載する画像表示装置の構成を示すブロック図である。図7Cを参照すると、画像表示装置の主要部は、色合成光学系31、青色光源32、赤色光源33、光源装置51、信号処理装置52、および走査手段53からなる。 FIG. 7C is a block diagram showing a configuration of an image display device equipped with the light source device of the present embodiment. Referring to FIG. 7C, the main part of the image display device includes a color synthesis optical system 31, a blue light source 32, a red light source 33, a light source device 51, a signal processing device 52, and scanning means 53.

 光源装置51は、図7Aに示した光源装置であって、緑色光源として用いられる。青色光源32および赤色光源33は縦マルチモード半導体レーザーよりなる。青色光源32の波長は445nmであり、赤色光源33の波長は645nmであり、いずれもコリメートされたレーザー光を出力する。 The light source device 51 is the light source device shown in FIG. 7A and is used as a green light source. The blue light source 32 and the red light source 33 are composed of vertical multimode semiconductor lasers. The wavelength of the blue light source 32 is 445 nm, the wavelength of the red light source 33 is 645 nm, and both output collimated laser light.

 色合成光学系31は、第1及び第2のダイクロイックミラーよりなる。第1のダイクロイックミラーは、赤色光源33からのレーザー光(赤)と光源装置51からのレーザー光(緑)が交差する位置に配置されている。光源装置51からのレーザー光は、第1のダイクロイックミラーを透過する。赤色光源33からのレーザー光は、第1のダイクロイックミラーにて、光源装置51からのレーザー光(透過光)と同じ方向に向かうように反射される。 The color synthesis optical system 31 includes first and second dichroic mirrors. The first dichroic mirror is disposed at a position where the laser light (red) from the red light source 33 and the laser light (green) from the light source device 51 intersect. The laser light from the light source device 51 passes through the first dichroic mirror. The laser light from the red light source 33 is reflected by the first dichroic mirror so as to be directed in the same direction as the laser light (transmitted light) from the light source device 51.

 第2のダイクロイックミラーは、第1のダイクロイックミラーからのレーザー光(赤・緑)と青色光源32からのレーザー光(青)が交差する位置に配置されている。第1のダイクロイックミラーからのレーザー光は、第2のダイクロイックミラーを透過する。青色光源32からのレーザー光は、第2のダイクロイックミラーにて、第1のダイクロイックミラーからのレーザー光(透過光)と同じ方向に向かうように反射される。第2のダイクロイックミラーからのレーザー光(赤・緑・青)は、走査手段53に供給される。 The second dichroic mirror is disposed at a position where the laser light (red / green) from the first dichroic mirror and the laser light (blue) from the blue light source 32 intersect. The laser light from the first dichroic mirror passes through the second dichroic mirror. The laser light from the blue light source 32 is reflected by the second dichroic mirror so as to be directed in the same direction as the laser light (transmitted light) from the first dichroic mirror. Laser light (red / green / blue) from the second dichroic mirror is supplied to the scanning means 53.

 信号処理装置52は、パーソナルコンピュータ等の外部装置から映像信号54を受信する。映像信号54は、赤色(R)、緑色(G)、青色(B)の各色の映像に関するビット情報を含む。信号処理装置52は、映像信号54のRGBの各色の映像に関するビット情報に基づいて、それぞれの色(波長)に対応するレーザー光を強度変調するための信号を生成する。具体的には、信号処理装置52では、緑色(G)の映像に関するビット情報は光源装置51の各変調素子を駆動する信号に変換され、青色(B)および赤色(R)の映像に関するビット情報は、それぞれ青色光源32、赤色光源33を強度変調する信号に変換される。青色光源32および赤色光源33の変調は、電流駆動を制御することにより行う。 The signal processing device 52 receives the video signal 54 from an external device such as a personal computer. The video signal 54 includes bit information related to video of each color of red (R), green (G), and blue (B). The signal processing device 52 generates a signal for intensity-modulating the laser beam corresponding to each color (wavelength) based on the bit information regarding the RGB color images of the video signal 54. Specifically, in the signal processing device 52, the bit information regarding the green (G) video is converted into a signal for driving each modulation element of the light source device 51, and the bit information regarding the blue (B) and red (R) video. Are converted into signals for intensity-modulating the blue light source 32 and the red light source 33, respectively. The blue light source 32 and the red light source 33 are modulated by controlling current drive.

 光源装置51、青色光源32および赤色光源33のそれぞれにおいて、信号処理装置52からの信号に従って強度変調が行われると、RGB変調光56が色合成光学系31から走査手段53に供給される。走査手段53は、色合成光学系31から供給されるRGB変調光56でスクリーン上を走査する。走査手段53によるRGB変調光56の走査は、信号処理装置52から出力される同期信号55と同期して行われ、スクリーン上に表示画像57が表示される。 In each of the light source device 51, the blue light source 32, and the red light source 33, when intensity modulation is performed in accordance with a signal from the signal processing device 52, RGB modulated light 56 is supplied from the color synthesis optical system 31 to the scanning unit 53. The scanning unit 53 scans the screen with the RGB modulated light 56 supplied from the color synthesis optical system 31. The scanning of the RGB modulated light 56 by the scanning unit 53 is performed in synchronization with the synchronization signal 55 output from the signal processing device 52, and a display image 57 is displayed on the screen.

 画像精細度は、水平1280画素、垂直1024画素である。走査手段53は、水平方向の走査を行うための共振型マイクロメカニカル走査素子と、垂直方向の走査を行うためのガルバノミラーとを備える。共振型マイクロメカニカル走査素子の駆動周波数は、例えば31KHzである。ガルバノミラーはノコギリ波駆動し、その駆動周波数は、例えば60Hzである。 The image definition is 1280 horizontal pixels and 1024 vertical pixels. The scanning unit 53 includes a resonant micromechanical scanning element for performing horizontal scanning and a galvanometer mirror for performing vertical scanning. The drive frequency of the resonant micromechanical scanning element is, for example, 31 KHz. The galvanometer mirror is driven by a sawtooth wave, and the drive frequency is, for example, 60 Hz.

 レーザー光の強度変調は、走査素子と同期して12.7ns毎に行う。これにより、画素値に応じた輝度の光が得られる。 The intensity modulation of the laser beam is performed every 12.7 ns in synchronization with the scanning element. Thereby, the light of the brightness | luminance according to a pixel value is obtained.

 本実施形態の光源装置においても、小型で軽量な、波長幅のある第2高調波光ビームを発生する光源を提供できる。また、本実施形態の光源装置を備える画像表示装置においては、スペックルノイズの少ない、階調再現特性のよい画像表示を提供することができる。 Also in the light source device of this embodiment, a light source that generates a second harmonic light beam having a small wavelength and a wide wavelength range can be provided. In addition, an image display device including the light source device of the present embodiment can provide an image display with less speckle noise and good gradation reproduction characteristics.

 上述した本実施形態の光源装置は、本発明の一例であり、その構成および動作は適宜に変更することができる。例えば、青色光源32および赤色光源33におけるレーザーの強度変調は、1画素を走査する時間内で、パルス幅変調をすることで行ってもよい。 The light source device of the present embodiment described above is an example of the present invention, and the configuration and operation thereof can be changed as appropriate. For example, the laser intensity modulation in the blue light source 32 and the red light source 33 may be performed by performing pulse width modulation within the time for scanning one pixel.

 画像精細度も適宜に設定してよい。ただし、走査素子の走査周波数、レーザーの変調周波数は、画像精細度に対応した周波数とする。 The image definition may be set appropriately. However, the scanning frequency of the scanning element and the modulation frequency of the laser are frequencies corresponding to the image definition.

 変調素子群で用いる変調素子は、音響光学素子以外であってもよい。例えば、変調素子として、電気光学結晶、マッハツンダ型導波路変調素子、MEMS変調素子等、各種光変調器を用いてもよい。
(第4の実施形態)
 図8Aは、本発明の第4の実施形態である光源装置の構成を示す模式図である。
The modulation element used in the modulation element group may be other than the acousto-optic element. For example, various optical modulators such as an electro-optic crystal, a Mach-Tunda type waveguide modulation element, and a MEMS modulation element may be used as the modulation element.
(Fourth embodiment)
FIG. 8A is a schematic diagram illustrating a configuration of a light source device according to a fourth embodiment of the present invention.

 図8Aを参照すると、光源装置は、赤外レーザー群41、変調素子群42a~42c、結晶43、レンズ44、合波用グレーティング45、青色レーザー群46、および赤色レーザー群47を有する。 Referring to FIG. 8A, the light source device has an infrared laser group 41, modulation element groups 42a to 42c, a crystal 43, a lens 44, a multiplexing grating 45, a blue laser group 46, and a red laser group 47.

 赤外レーザー群41、変調素子群42a、結晶43、レンズ44、および合波用グレーティング45は、図7Aに示したレーザー群11、変調素子群21、結晶4、レンズ5、および合波用グレーティング6と同じである。本実施形態の光源装置は、図7Aに示した構成に、変調素子群42b、42c、青色レーザー群46および赤色レーザー群47を加えており、この点が第3の実施形態の光源装置と異なる。 The infrared laser group 41, the modulation element group 42a, the crystal 43, the lens 44, and the multiplexing grating 45 are the laser group 11, the modulation element group 21, the crystal 4, the lens 5, and the multiplexing grating shown in FIG. 7A. Same as 6. The light source device of the present embodiment is different from the light source device of the third embodiment in that modulation element groups 42b and 42c, a blue laser group 46, and a red laser group 47 are added to the configuration shown in FIG. 7A. .

 赤外レーザー群41、青色レーザー群46および赤色レーザー群47は、いずれも発振波長の異なるN個のレーザーを並列に配置したものであり、各レーザーの発振波長は、図7Aで示したものと同様な関係である。ただし、赤外レーザー群41の中央に配置されたレーザーの発振波長λは1060nmであり、青色レーザー群46の中央に配置されたレーザーの発振波長λは445nmであり、赤色レーザー群47の中央に配置されたレーザーの発振波長λは645nmである。Nは正の整数である。 Each of the infrared laser group 41, the blue laser group 46, and the red laser group 47 has N lasers with different oscillation wavelengths arranged in parallel, and the oscillation wavelengths of the lasers are as shown in FIG. 7A. It is the same relationship. However, the oscillation wavelength λ of the laser arranged at the center of the infrared laser group 41 is 1060 nm, the oscillation wavelength λ of the laser arranged at the center of the blue laser group 46 is 445 nm, and the center of the red laser group 47 is The oscillation wavelength λ of the arranged laser is 645 nm. N is a positive integer.

 変調素子群42bは、青色レーザー群46を構成する各波長のレーザーのそれぞれに設けられたN個の変調素子からなる。変調素子には、例えば音響光学素子を用いる。青色レーザー群46を構成する各レーザーと変調素子群42bを構成する各変調素子とは1対1で対応する。各変調素子を制御することで、各波長のレーザー光のオン・オフ制御を行う。 The modulation element group 42b is composed of N modulation elements provided in each of the lasers of the respective wavelengths constituting the blue laser group 46. For example, an acousto-optic element is used as the modulation element. Each laser constituting the blue laser group 46 and each modulation element constituting the modulation element group 42b correspond one-to-one. By controlling each modulation element, on / off control of laser light of each wavelength is performed.

 変調素子群42cは、赤色レーザー群47を構成する各波長のレーザーのそれぞれに設けられたN個の変調素子からなる。変調素子には、例えば音響光学素子を用いる。赤色レーザー群47を構成する各レーザーと変調素子群42cを構成する各変調素子とは1対1で対応する。各変調素子を制御することで、各波長のレーザー光のオン・オフ制御を行う。 The modulation element group 42 c is composed of N modulation elements provided for each of the lasers of each wavelength constituting the red laser group 47. For example, an acousto-optic element is used as the modulation element. Each laser constituting the red laser group 47 and each modulation element constituting the modulation element group 42c have a one-to-one correspondence. By controlling each modulation element, on / off control of laser light of each wavelength is performed.

 合波用グレーティング45は、赤外レーザー群41から変調素子群42a、結晶43およびレンズ44を介して供給されるレーザー光(緑)と、青色レーザー群46から変調素子群42bを介して供給されるレーザー光(青)と、赤色レーザー群47から変調素子群42cを介して供給されるレーザー光(赤)とを合成して1本の白色レーザー光を生成する。 The multiplexing grating 45 is supplied from the infrared laser group 41 via the modulation element group 42a, the crystal 43 and the lens 44, and from the blue laser group 46 via the modulation element group 42b. The laser beam (blue) and the laser beam (red) supplied from the red laser group 47 via the modulation element group 42c are combined to generate one white laser beam.

 本実施形態においても、赤外レーザー群41、青色レーザー群46および赤色レーザー群47のそれぞれにおいて、各レーザーから出力されるレーザー光の強度に対して、それぞれ異なる割合で重み付けが施されている。例えば、赤外レーザー群41、青色レーザー群46および赤色レーザー群47をそれぞれ8個のレーザーで構成した場合において、以下のような強度の重み付けがなされる。 Also in the present embodiment, in the infrared laser group 41, the blue laser group 46, and the red laser group 47, the intensity of the laser light output from each laser is weighted at a different rate. For example, when the infrared laser group 41, the blue laser group 46, and the red laser group 47 are each composed of eight lasers, the following intensity weighting is performed.

 赤外レーザー群41においては、波長1060nmのレーザー光に対する割合を128、波長1061nmのレーザー光に対する割合を64、波長1059nmのレーザー光に対する割合を32、波長1062nmのレーザー光に対する割合を16、波長1058nmのレーザー光に対する割合を8、波長1063nmのレーザー光に対する割合を4、波長1057nmのレーザー光に対する割合を2、波長1064nmのレーザー光に対する割合を1とする強度の重み付けが施されている。 In the infrared laser group 41, the ratio to the laser beam having a wavelength of 1060 nm is 128, the ratio to the laser beam having a wavelength of 1061 nm is 64, the ratio to the laser beam having a wavelength of 1059 nm is 32, the ratio to the laser beam having a wavelength of 1062 nm is 16, and the wavelength is 1058 nm. Intensity weighting is performed with a ratio of 8 for the laser light of 4, a ratio of 4 for the laser light of wavelength 1063 nm, a ratio of 2 for the laser light of wavelength 1057 nm, and a ratio of 1 for the laser light of wavelength 1064 nm.

 青色レーザー群46においては、波長445nmのレーザー光に対する割合を128、波長446nmのレーザー光に対する割合を64、波長444nmのレーザー光に対する割合を32、波長447nmのレーザー光に対する割合を16、波長443nmのレーザー光に対する割合を8、波長448nmのレーザー光に対する割合を4、波長442nmのレーザー光に対する割合を2、波長449nmのレーザー光に対する割合を1とする強度の重み付けが施されている。この場合、各波長のレーザーとして、440nm台の波長で発振する縦モードシングル半導体レーザーが使用される。 In the blue laser group 46, the ratio to the laser beam having a wavelength of 445 nm is 128, the ratio to the laser beam having a wavelength of 446 nm is 64, the ratio to the laser beam having a wavelength of 444 nm is 32, the ratio to the laser beam having a wavelength of 447 nm is 16, and Intensity weighting is performed with a ratio of 8 for laser light, 4 for laser light with a wavelength of 448 nm, 2 for laser light with a wavelength of 442 nm, and 1 for laser light with a wavelength of 449 nm. In this case, a longitudinal mode single semiconductor laser that oscillates at a wavelength of about 440 nm is used as the laser of each wavelength.

 赤色レーザー群47においては、波長645nmのレーザー光に対する割合を128、波長646nmのレーザー光に対する割合を64、波長644nmのレーザー光に対する割合を32、波長647nmのレーザー光に対する割合を16、波長643nmのレーザー光に対する割合を8、波長648nmのレーザー光に対する割合を4、波長642nmのレーザー光に対する割合を2、波長649nmのレーザー光に対する割合を1とする強度の重み付けが施されている。この場合、各波長のレーザーとして、640nm台の波長で発振する縦モードシングル半導体レーザーが使用される。 In the red laser group 47, the ratio to the laser beam having a wavelength of 645 nm is 128, the ratio to the laser beam having a wavelength of 646 nm is 64, the ratio to the laser beam having a wavelength of 644 nm is 32, the ratio to the laser beam having a wavelength of 647 nm is 16, and the wavelength is 643 nm. Intensity weighting is performed, with the ratio to the laser light being 8, the ratio to the laser light having a wavelength of 648 nm is 4, the ratio to the laser light having a wavelength of 642 nm is 2, and the ratio to the laser light having a wavelength of 649 nm is 1. In this case, a longitudinal mode single semiconductor laser that oscillates at a wavelength of 640 nm is used as the laser of each wavelength.

 上記のような重み付けをすることで、デジタルカラー映像における多階調の画像を安定して供給することが可能となる。具体的に説明すると、赤外レーザー群41、青色レーザー群46および赤色レーザー群47のそれぞれにおいて、画素毎に、その画素の輝度に対応するレーザーの組み合わせを変調素子群にて選択する。これにより、赤、緑、青の各色の画像について多階調の画像を安定して供給することができる。 By weighting as described above, it is possible to stably supply a multi-gradation image in a digital color image. More specifically, in each of the infrared laser group 41, the blue laser group 46, and the red laser group 47, for each pixel, a laser combination corresponding to the luminance of the pixel is selected by the modulation element group. As a result, a multi-gradation image can be stably supplied for each of the red, green, and blue images.

 図8Bは、本実施形態の光源装置を搭載する画像表示装置の構成を示すブロック図である。図8Bを参照すると、画像表示装置の主要部は、光源装置51、信号処理装置52、および走査手段53からなる。光源装置51は、図8Aに示した光源装置である。 FIG. 8B is a block diagram showing a configuration of an image display device equipped with the light source device of the present embodiment. Referring to FIG. 8B, the main part of the image display device includes a light source device 51, a signal processing device 52, and scanning means 53. The light source device 51 is the light source device shown in FIG. 8A.

 信号処理装置52は、パーソナルコンピュータ等の外部装置から映像信号54を受信する。映像信号54は、赤色(R)、緑色(G)、青色(B)の各色の映像に関するビット情報を含む。信号処理装置52は、映像信号54のRGBの各色の映像に関するビット情報に基づいて、それぞれの色(波長)に対応するレーザー光を強度変調するための信号を生成する。具体的には、緑色(G)の映像に関するビット情報は、赤外レーザー群41に設けられた変調素子群42aを駆動する信号に変換される。青色(B)の映像に関するビット情報は、青色レーザー群46に設けられた変調素子群42bを駆動する信号に変換される。赤色(R)の映像に関するビット情報は、赤色レーザー群47に設けられた変調素子群42cを駆動する信号に変換される。 The signal processing device 52 receives the video signal 54 from an external device such as a personal computer. The video signal 54 includes bit information related to video of each color of red (R), green (G), and blue (B). The signal processing device 52 generates a signal for intensity-modulating the laser beam corresponding to each color (wavelength) based on the bit information regarding the RGB color images of the video signal 54. Specifically, the bit information regarding the green (G) video is converted into a signal for driving the modulation element group 42 a provided in the infrared laser group 41. Bit information relating to the blue (B) video is converted into a signal for driving the modulation element group 42 b provided in the blue laser group 46. Bit information relating to the red (R) video is converted into a signal for driving the modulation element group 42 c provided in the red laser group 47.

 変調素子群42a~42cのそれぞれが信号処理装置52からの信号に従って駆動されると、RGB変調光56が光源装置51から走査手段53に供給される。走査手段53は、光源装置51から供給されるRGB変調光56でスクリーン上を走査する。走査手段53によるRGB変調光56の走査は、信号処理装置52から出力される同期信号55と同期して行われ、スクリーン上に表示画像57が表示される。 When each of the modulation element groups 42 a to 42 c is driven in accordance with a signal from the signal processing device 52, the RGB modulated light 56 is supplied from the light source device 51 to the scanning unit 53. The scanning unit 53 scans the screen with the RGB modulated light 56 supplied from the light source device 51. The scanning of the RGB modulated light 56 by the scanning unit 53 is performed in synchronization with the synchronization signal 55 output from the signal processing device 52, and a display image 57 is displayed on the screen.

 画像精細度は、水平1280画素、垂直1024画素である。走査手段53は、水平方向の走査を行うための共振型マイクロメカニカル走査素子と、垂直方向の走査を行うためのガルバノミラーとを備える。共振型マイクロメカニカル走査素子の駆動周波数は、例えば31KHzである。ガルバノミラーはノコギリ波駆動し、その駆動周波数は、例えば60Hzである。 The image definition is 1280 horizontal pixels and 1024 vertical pixels. The scanning unit 53 includes a resonant micromechanical scanning element for performing horizontal scanning and a galvanometer mirror for performing vertical scanning. The drive frequency of the resonant micromechanical scanning element is, for example, 31 KHz. The galvanometer mirror is driven by a sawtooth wave, and the drive frequency is, for example, 60 Hz.

 レーザー光の強度変調は、走査素子と同期して12.7ns毎に行う。これにより、画素値に応じた輝度の光が得られる。 The intensity modulation of the laser beam is performed every 12.7 ns in synchronization with the scanning element. Thereby, the light of the brightness | luminance according to a pixel value is obtained.

 本実施形態の光源装置においても、小型で軽量な、波長幅のある第2高調波光ビームを発生する光源を提供できる。また、本実施形態の光源装置を備える画像表示装置においては、スペックルノイズの少ない、階調再現特性のよい画像表示を提供することができる。 Also in the light source device of this embodiment, a light source that generates a second harmonic light beam having a small wavelength and a wide wavelength range can be provided. In addition, an image display device including the light source device of the present embodiment can provide an image display with less speckle noise and good gradation reproduction characteristics.

 上述した本実施形態の光源装置は、本発明の一例であり、その構成および動作は適宜に変更することができる。例えば、画像精細度は適宜に設定してよい。ただし、走査素子の走査周波数、レーザーの変調周波数は、画像精細度に対応した周波数とする。 The light source device of the present embodiment described above is an example of the present invention, and the configuration and operation thereof can be changed as appropriate. For example, the image definition may be set as appropriate. However, the scanning frequency of the scanning element and the modulation frequency of the laser are frequencies corresponding to the image definition.

 変調素子群で用いる変調素子は、音響光学素子以外であってもよい。例えば、変調素子として、電気光学結晶、マッハツンダ型導波路変調素子、MEMS変調素子等、各種光変調器を用いてもよい。 The modulation element used in the modulation element group may be other than the acousto-optic element. For example, various optical modulators such as an electro-optic crystal, a Mach-Tunda type waveguide modulation element, and a MEMS modulation element may be used as the modulation element.

 本発明の一態様によれば、光源装置は、第1の端面と、該第1の端面と対向する第2の端面を備え、上記第1及び第2の端面のそれぞれと交差する平面に垂直な方向から見た場合に、上記第2の端面が上記第1の端面に対して傾斜しており、上記第1の端面から入射した光の高調波を発生する光学結晶と、上記平面内を平行に進むように平行化された、波長が異なる複数のコヒーレント光を、上記第1の端面に入射させるコヒーレント光供給手段と、上記第2の端面から出力された波長が異なる複数の第2高調波を合波する合波手段を有し、上記光学結晶における上記高調波を発生するための位相整合が、上記複数のコヒーレント光のそれぞれの光線軸と交差する方向に連続的にとられている。 According to an aspect of the present invention, a light source device includes a first end surface and a second end surface that faces the first end surface, and is perpendicular to a plane that intersects each of the first and second end surfaces. The second end face is inclined with respect to the first end face when viewed from any direction, an optical crystal that generates harmonics of light incident from the first end face, and in the plane A plurality of coherent light beams having different wavelengths, which are collimated so as to travel in parallel, are incident on the first end face; and a plurality of second harmonics having different wavelengths output from the second end face. A means for combining the waves, and the phase matching for generating the harmonics in the optical crystal is continuously taken in a direction intersecting with the respective beam axes of the plurality of coherent lights. .

 上記の光源装置において、コヒーレント光供給手段は、第1の実施形態で説明したレーザー1、分光用グレーティング2およびレンズ3からなる手段と、第2および第3の実施形態で説明したレーザー群11と、第4の実施形態で説明した赤外レーザー群41に対応する。 In the above light source device, the coherent light supply means includes means comprising the laser 1, the spectral grating 2 and the lens 3 described in the first embodiment, and the laser group 11 described in the second and third embodiments. This corresponds to the infrared laser group 41 described in the fourth embodiment.

 コヒーレント光供給手段は、レーザー光源と、上記レーザー光源からのレーザー光を分光する分光手段と、上記分光手段によって分光された各波長の主光線を平行化するための第1のレンズを有してもよい。分光手段は、回折格子またはプリズムであってもよい。 The coherent light supply means includes a laser light source, a spectroscopic means for spectroscopically splitting the laser light from the laser light source, and a first lens for collimating the principal rays of each wavelength split by the spectroscopic means. Also good. The spectroscopic means may be a diffraction grating or a prism.

 また、コヒーレント光供給手段は、発振波長の異なる複数のレーザー光源からなり、各レーザー光源からのレーザー光が、上記平面内を平行に進むように平行化されてもよい。 The coherent light supply means may be composed of a plurality of laser light sources having different oscillation wavelengths, and the laser light from each laser light source may be collimated so as to travel in parallel in the plane.

 レーザー光源または複数のレーザー光源は、縦マルチモード半導体レーザーまたはスーパールミネッセントダイオードであってもよい。 The laser light source or the plurality of laser light sources may be a longitudinal multimode semiconductor laser or a super luminescent diode.

 複数のレーザー光源からの各波長のレーザー光を個別に強度変調する変調手段をさらに有してもよい。複数のレーザー光源から出力されるレーザー光の強度に対して、それぞれ異なる割合で重み付けが施されてもよい。 It may further include a modulation means for individually modulating the intensity of each wavelength of laser light from a plurality of laser light sources. Weighting may be applied to the intensity of laser light output from a plurality of laser light sources at different rates.

 光学結晶は、第1乃至第4の実施形態で説明した結晶4に対応する。この光学結晶は、上記第1の端面から上記第2の端面に向かって自発分極が空間的に周期反転した分極反転構造を有し、該分極反転構造の各分極領域の上記平面に垂直な方向から見た場合の形状が楔形であってもよい。分極反転構造の反転周期が、上記平面内の上記複数のコヒーレント光の各光線軸と交差する方向において連続的に変化してもよい。 The optical crystal corresponds to the crystal 4 described in the first to fourth embodiments. The optical crystal has a domain-inverted structure in which spontaneous polarization is spatially inverted from the first end surface toward the second end surface, and a direction perpendicular to the plane of each polarization region of the domain-inverted structure The shape when viewed from above may be a wedge shape. The inversion period of the domain-inverted structure may continuously change in a direction intersecting with each light axis of the plurality of coherent lights in the plane.

 合波手段は、第1乃至第4の実施形態で説明したレンズ5およびグレーティング6からなる手段に対応する。合波手段は、上記光学結晶の第2の端面から出力された第2高調波の光を集光するための第2のレンズと、上記第2のレンズからの第2高調波の光を合波するための回折格子またはプリズムを有してもよい。 The multiplexing means corresponds to the means including the lens 5 and the grating 6 described in the first to fourth embodiments. The multiplexing means combines the second lens for collecting the second harmonic light output from the second end face of the optical crystal and the second harmonic light from the second lens. You may have a diffraction grating or a prism to wave.

 上記の光源装置において、上記複数のコヒーレント光の波長とは異なる波長の光を発生する他の光源をさらに有し、上記合波手段は、上記第2高調波の光と上記他の光源からの光を合波してもよい。他の光源は、第3の実施形態で説明した赤色光源や青色光源、第4の実施形態で説明した赤色レーザー群や青色レーザー群に対応する。 The light source device further includes another light source that generates light having a wavelength different from the wavelengths of the plurality of coherent lights, and the multiplexing unit includes the second harmonic light and the other light source. You may combine light. Other light sources correspond to the red light source and blue light source described in the third embodiment, and the red laser group and blue laser group described in the fourth embodiment.

 上記の光源装置において、上記光学結晶を上記平面内の上記複数のコヒーレント光の各光線軸と交差する方向に移動する移動手段を有してもよい。この構成によれば、以下のような効果を奏する。 The light source device may include a moving unit that moves the optical crystal in a direction intersecting with each light axis of the plurality of coherent lights in the plane. According to this configuration, the following effects can be obtained.

 一般に、レーザー光源の発振波長には、製造ロッドの違いによるバラツキがある。例えば、あるロッドにおけるレーザー光源の発振波長が1060nmであり、別のロッドにおけるレーザー光源の発振波長が1063nmである、といった製造バラツキがある。このように発振波長にバラツキがあるため、例えば、図2に示したような導波路構造の波長変換素子においては、発振波長が目的とする波長からずれたレーザー光源を用いた場合に、波長変換効率が低下する。上記の移動手段を備える光源装置によれば、レーザー光源の発振波長にバラツキがあっても、光学結晶を移動させることで、各波長に対する位相整合の調整を正確に行うことが可能である。 Generally, the oscillation wavelength of a laser light source varies depending on the manufacturing rod. For example, there is a manufacturing variation in which an oscillation wavelength of a laser light source in one rod is 1060 nm and an oscillation wavelength of a laser light source in another rod is 1063 nm. Since the oscillation wavelength varies in this way, for example, in a wavelength conversion element having a waveguide structure as shown in FIG. Efficiency is reduced. According to the light source device including the moving means described above, even if the oscillation wavelength of the laser light source varies, it is possible to accurately adjust the phase matching for each wavelength by moving the optical crystal.

 本発明の別の態様によれば、画像表示装置は、上述の光源装置と、この光源装置から出力された第2高調波の光ビームで外部スクリーン上を走査する手段を有する。 According to another aspect of the present invention, an image display device includes the above-described light source device and means for scanning an external screen with a second harmonic light beam output from the light source device.

 本発明の他の態様によれば、画像表示装置は、上述の変調手段を備えた光源装置と、入力映像信号に応じて上記光源装置の変調手段を制御する信号処理手段と、上記光源装置から出力された第2高調波の光ビームで外部スクリーン上を走査する手段を有する。 According to another aspect of the present invention, an image display device includes: a light source device including the above-described modulation unit; a signal processing unit that controls the modulation unit of the light source device according to an input video signal; and the light source device. Means for scanning the external screen with the output second harmonic light beam.

 以上説明した本発明の光源装置によれば、各波長のコヒーレント光を互いに平行化して光学結晶に入射する構成であるので、入射光強度に対する耐性を向上することが可能である。 According to the light source device of the present invention described above, the coherent light of each wavelength is made parallel to each other and incident on the optical crystal, so that it is possible to improve resistance to incident light intensity.

 また、光学結晶内で各波長の主光線が発散しないため、合波手段を構成する集光レンズの口径を小さくすることができる。これにより、波長幅のある第2高調波光ビームを発生する光源として小型かつ軽量の光源装置を提供できる。 In addition, since the principal ray of each wavelength does not diverge in the optical crystal, the aperture of the condensing lens constituting the multiplexing means can be reduced. Thereby, a small and lightweight light source device can be provided as a light source for generating a second harmonic light beam having a wavelength width.

 本発明の画像表示装置によれば、上記の波長幅のある第2高調波光ビームを発生する光源装置を用いることで、スペックルノイズの少ない表示画像を提供することができる。 According to the image display device of the present invention, a display image with less speckle noise can be provided by using the light source device that generates the second harmonic light beam having the above-described wavelength width.

 以上、実施形態を参照して本発明を説明したが、本発明は上述した実施形態に限定されるものではない。本発明の構成および動作については、本発明の趣旨を逸脱しない範囲において、当業者が理解し得る様々な変更を行うことができる。 The present invention has been described above with reference to the embodiments, but the present invention is not limited to the above-described embodiments. Various modifications that can be understood by those skilled in the art can be made to the configuration and operation of the present invention without departing from the spirit of the present invention.

 この出願は、2008年9月10日に出願された日本出願特願2008-232254を基礎とする優先権を主張し、その開示の全てをここに取り込む。 This application claims priority based on Japanese Patent Application No. 2008-232254 filed on Sep. 10, 2008, the entire disclosure of which is incorporated herein.

Claims (15)

 第1の端面と、該第1の端面と対向する第2の端面を備え、前記第1及び第2の端面のそれぞれと交差する平面に垂直な方向から見た場合に、前記第2の端面が前記第1の端面に対して傾斜しており、前記第1の端面から入射した光の高調波を発生する光学結晶と、
 前記平面内を平行に進むように平行化された、波長が異なる複数のコヒーレント光を、前記第1の端面に入射させるコヒーレント光供給手段と、
 前記第2の端面から出力された波長が異なる複数の第2高調波を合波する合波手段を有し、
 前記光学結晶における前記高調波を発生するための位相整合が、前記複数のコヒーレント光のそれぞれの光線軸と交差する方向に連続的にとられている、光源装置。
A second end face provided with a first end face and a second end face opposed to the first end face, when viewed from a direction perpendicular to a plane intersecting each of the first and second end faces; Is inclined with respect to the first end face, and generates an optical harmonic wave of light incident from the first end face;
Coherent light supply means for making a plurality of coherent lights having different wavelengths collimated to travel in parallel in the plane enter the first end face;
Combining means for combining a plurality of second harmonics having different wavelengths output from the second end face;
The light source device, wherein phase matching for generating the harmonics in the optical crystal is continuously taken in a direction intersecting with the respective light axis of the plurality of coherent lights.
 前記光学結晶は、前記第1の端面から前記第2の端面に向かって自発分極が空間的に周期反転した分極反転構造を有し、該分極反転構造の各分極領域の前記平面に垂直な方向から見た場合の形状が楔形である、請求の範囲第1項に記載の光源装置。 The optical crystal has a domain-inverted structure in which spontaneous polarization is spatially inverted from the first end surface toward the second end surface, and a direction perpendicular to the plane of each polarization region of the domain-inverted structure The light source device according to claim 1, wherein the light source device has a wedge shape when viewed from above.  前記分極反転構造の反転周期が、前記平面内の前記複数のコヒーレント光の各光線軸と交差する方向において連続的に変化する、請求の範囲第2項に記載の光源装置。 The light source device according to claim 2, wherein an inversion period of the polarization inversion structure continuously changes in a direction intersecting with each light axis of the plurality of coherent lights in the plane.  前記コヒーレント光供給手段は、
 レーザー光源と、
 前記レーザー光源からのレーザー光を分光する分光手段と、
 前記分光手段によって分光された各波長の主光線を平行化するための第1のレンズを有する、請求の範囲第1項から第3項のいずれか1項に記載の光源装置。
The coherent light supply means includes
A laser light source;
A spectroscopic means for splitting laser light from the laser light source;
The light source device according to any one of claims 1 to 3, further comprising a first lens for collimating chief rays of respective wavelengths separated by the spectroscopic means.
 前記分光手段は、回折格子またはプリズムよりなる、請求の範囲第4項に記載の光源装置。 The light source device according to claim 4, wherein the spectroscopic means is formed of a diffraction grating or a prism.  前記レーザー光源は、縦マルチモード半導体レーザーまたはスーパールミネッセントダイオードである、請求の範囲第4項または第5項に記載の光源装置。 The light source device according to claim 4 or 5, wherein the laser light source is a longitudinal multimode semiconductor laser or a super luminescent diode.  前記コヒーレント光供給手段は、発振波長の異なる複数のレーザー光源からなり、各レーザー光源からのレーザー光が、前記平面内を平行に進むように平行化されている、請求の範囲第1項から第3項のいずれか1項に記載の光源装置。 The coherent light supply means includes a plurality of laser light sources having different oscillation wavelengths, and the laser light from each laser light source is collimated so as to travel in parallel in the plane. 4. The light source device according to any one of items 3.  前記複数のレーザー光源は、縦マルチモード半導体レーザーまたはスーパールミネッセントダイオードである、請求の範囲第7項に記載の光源装置。 The light source device according to claim 7, wherein the plurality of laser light sources are longitudinal multimode semiconductor lasers or superluminescent diodes.  前記複数のレーザー光源からの各波長のレーザー光を個別に強度変調する変調手段をさらに有する、請求の範囲第7項または第8項に記載の光源装置。 The light source device according to claim 7 or 8, further comprising modulation means for individually modulating the intensity of laser light of each wavelength from the plurality of laser light sources.  前記複数のレーザー光源から出力されるレーザー光の強度に対して、それぞれ異なる割合で重み付けが施されている、請求の範囲第9項に記載の光源装置。 The light source device according to claim 9, wherein weighting is performed at different ratios with respect to the intensities of the laser beams output from the plurality of laser light sources.  前記合波手段は、
 前記光学結晶の第2の端面から出力された第2高調波の光を集光するための第2のレンズと、
 前記第2のレンズからの第2高調波の光を合波するための回折格子またはプリズムを有する、請求の範囲第1項から第10項のいずれか1項に記載の光源装置。
The multiplexing means is
A second lens for collecting the second harmonic light output from the second end face of the optical crystal;
11. The light source device according to claim 1, further comprising a diffraction grating or a prism for combining the second harmonic light from the second lens.
 前記複数のコヒーレント光の波長とは異なる波長の光を発生する他の光源をさらに有し、
 前記合波手段は、前記第2高調波の光と前記他の光源からの光を合波する、請求の範囲第1項から第11項のいずれか1項に記載の光源装置。
And further comprising another light source that generates light having a wavelength different from the wavelength of the plurality of coherent lights,
The light source device according to any one of claims 1 to 11, wherein the multiplexing unit combines the second harmonic light and the light from the other light source.
 前記光学結晶を前記平面内の前記複数のコヒーレント光の各光線軸と交差する方向に移動する移動手段をさらに有する、請求の範囲第1項から第12項のいずれか1項に記載の光源装置。 The light source device according to any one of claims 1 to 12, further comprising a moving unit that moves the optical crystal in a direction intersecting with each light axis of the plurality of coherent lights in the plane. .  請求の範囲第1項から第13項のいずれか1項に記載の光源装置と、
 前記光源装置から出力された第2高調波の光ビームで外部スクリーン上を走査する手段を有する、画像表示装置。
A light source device according to any one of claims 1 to 13,
An image display device comprising means for scanning an external screen with a second harmonic light beam output from the light source device.
 請求の範囲第9項または第10項に記載の光源装置と、
 入力映像信号に応じて前記光源装置の変調手段を制御する信号処理手段と、
 前記光源装置から出力された第2高調波の光ビームで外部スクリーン上を走査する手段を有する、画像表示装置。
A light source device according to claim 9 or 10, and
Signal processing means for controlling the modulation means of the light source device in accordance with an input video signal;
An image display device comprising means for scanning an external screen with a second harmonic light beam output from the light source device.
PCT/JP2009/063643 2008-09-10 2009-07-31 Light source device and image display device Ceased WO2010029817A1 (en)

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