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WO2010013765A1 - Method for manufacturing magnetic recording medium, and magnetic recording medium - Google Patents

Method for manufacturing magnetic recording medium, and magnetic recording medium Download PDF

Info

Publication number
WO2010013765A1
WO2010013765A1 PCT/JP2009/063543 JP2009063543W WO2010013765A1 WO 2010013765 A1 WO2010013765 A1 WO 2010013765A1 JP 2009063543 W JP2009063543 W JP 2009063543W WO 2010013765 A1 WO2010013765 A1 WO 2010013765A1
Authority
WO
WIPO (PCT)
Prior art keywords
recording medium
magnetic recording
etching
forming
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/063543
Other languages
French (fr)
Japanese (ja)
Inventor
和人 山中
雅弘 芝本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP2010522746A priority Critical patent/JP5174170B2/en
Publication of WO2010013765A1 publication Critical patent/WO2010013765A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/84—Processes or apparatus specially adapted for manufacturing record carriers
    • G11B5/855—Coating only part of a support with a magnetic layer

Landscapes

  • Drying Of Semiconductors (AREA)
  • Manufacturing Of Magnetic Record Carriers (AREA)
  • Magnetic Heads (AREA)

Abstract

Provided is a method for manufacturing a magnetic recording medium, wherein the magnetic recording medium can be surely planarized without grinding a recording magnetic layer. A manufacturing apparatus having a stop layer forming chamber (116), an embedding layer forming chamber (117), a first etching chamber (118) and a second etching chamber (119) is used, and the following steps are executed; a step of forming a recording magnetic layer with an uneven pattern, a step of filling a recessed section of the recording magnetic layer by forming an embedding layer composed of a nonmagnetic material in the recessed section, an etching step of removing an excess embedding layer by etching, and a step of forming a film of a nonmagnetic material as a stop layer prior to the etching step.
PCT/JP2009/063543 2008-07-31 2009-07-30 Method for manufacturing magnetic recording medium, and magnetic recording medium Ceased WO2010013765A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010522746A JP5174170B2 (en) 2008-07-31 2009-07-30 Magnetic recording medium manufacturing method and magnetic recording medium manufacturing apparatus

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2008197736 2008-07-31
JP2008-197736 2008-07-31

Publications (1)

Publication Number Publication Date
WO2010013765A1 true WO2010013765A1 (en) 2010-02-04

Family

ID=41610464

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2009/063543 Ceased WO2010013765A1 (en) 2008-07-31 2009-07-30 Method for manufacturing magnetic recording medium, and magnetic recording medium

Country Status (3)

Country Link
JP (1) JP5174170B2 (en)
CN (2) CN101645276B (en)
WO (1) WO2010013765A1 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011118974A (en) * 2009-12-02 2011-06-16 Hitachi Global Storage Technologies Netherlands Bv Magnetic recording medium and method for manufacturing the same

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130004736A1 (en) * 2011-06-30 2013-01-03 Seagate Technology, Llc Method of protecting patterned magnetic materials of a stack

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274142A (en) * 1995-03-30 1996-10-18 Anelva Corp In-line type film deposition system
JP2006318648A (en) * 2003-12-25 2006-11-24 Tdk Corp Method for filling recessed section in irregular pattern, and manufacturing method of magnetic recording medium
JP2007220196A (en) * 2006-02-16 2007-08-30 Fujitsu Ltd Magnetic recording medium and method for manufacturing the same

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62162219A (en) * 1986-01-10 1987-07-18 Hitachi Maxell Ltd Double-sided magnetic recording medium and its manufacturing method
CN1240635C (en) * 1996-02-26 2006-02-08 日本碍子株式会社 Crystalled glass and manufacture thereof, magnetic disc and substrate therefor
JP2005056535A (en) * 2003-08-07 2005-03-03 Tdk Corp Method and device for manufacturing magnetic recording medium
JP3916636B2 (en) * 2005-02-15 2007-05-16 Ｔｄｋ株式会社 Magnetic recording medium, magnetic recording / reproducing apparatus
US20070137063A1 (en) * 2005-12-21 2007-06-21 Hitachi Global Storage Technologies Netherlands, B.V. Carbon beam deposition chamber for reduced defects

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08274142A (en) * 1995-03-30 1996-10-18 Anelva Corp In-line type film deposition system
JP2006318648A (en) * 2003-12-25 2006-11-24 Tdk Corp Method for filling recessed section in irregular pattern, and manufacturing method of magnetic recording medium
JP2007220196A (en) * 2006-02-16 2007-08-30 Fujitsu Ltd Magnetic recording medium and method for manufacturing the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011118974A (en) * 2009-12-02 2011-06-16 Hitachi Global Storage Technologies Netherlands Bv Magnetic recording medium and method for manufacturing the same

Also Published As

Publication number Publication date
CN101645275A (en) 2010-02-10
JP5174170B2 (en) 2013-04-03
CN101645276A (en) 2010-02-10
CN101645276B (en) 2011-06-15
JPWO2010013765A1 (en) 2012-01-12
CN101645275B (en) 2011-06-15

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