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WO2010006764A2 - Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail - Google Patents

Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail Download PDF

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Publication number
WO2010006764A2
WO2010006764A2 PCT/EP2009/005111 EP2009005111W WO2010006764A2 WO 2010006764 A2 WO2010006764 A2 WO 2010006764A2 EP 2009005111 W EP2009005111 W EP 2009005111W WO 2010006764 A2 WO2010006764 A2 WO 2010006764A2
Authority
WO
WIPO (PCT)
Prior art keywords
sensor device
sensor
sensor head
fiber
head
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2009/005111
Other languages
German (de)
English (en)
Other versions
WO2010006764A3 (fr
Inventor
Ralf Nicolaus
Jürgen Petter
Theo Tschudi
André Noack
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Luphos GmbH
Original Assignee
Luphos GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Luphos GmbH filed Critical Luphos GmbH
Publication of WO2010006764A2 publication Critical patent/WO2010006764A2/fr
Publication of WO2010006764A3 publication Critical patent/WO2010006764A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/268—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/266—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light by interferometric means

Definitions

  • MWLI Fiber Optic Multi-wavelength Interferometer
  • the invention relates to a sensor device for absolute distance measurement and for measuring topologies of surfaces of an object.
  • the achievable high-precision distance determination and topology measurement is applicable to both rough and polished surfaces of any materials.
  • Sensor device is designed purely fiber optic; It is therefore flexible for industrial use in high-precision metrology usable.
  • contact sensors are always force transmitting sensors that can damage the surface to be measured or wear the sensor
  • non-contact and force-less optical sensors are becoming more popular in more applications and are gaining more and more in the sensor market in importance.
  • the serially operating sensors which scan the surface to be measured in time sequence, ie in scanning mode
  • the parallel operating systems which scan and evaluate a certain surface area in one step.
  • the parallel operating optical methods offer the advantage of a fast processing - but at the same time partly the disadvantage of a limited accuracy, for example in strip projection method or the established method of electronic image recognition.
  • the method of multi-wavelength interferometry can be used.
  • the absolute measuring range of a system can be extended to half the greatest intrinsic beat wavelength, which results from the wavelength difference of the light sources.
  • the range in which a clear distance determination can be made can thus be significantly extended, the measurement accuracy being maintained.
  • the topology of rough surfaces can be determined, the roughness of which is greater than half the wavelength of the light used.
  • US Pat. No. 4,552,457 discloses a two-wavelength interferometer which is implemented in the manner of a Mach-Zehnder configuration.
  • the signal and the reference arm are in two different optical fibers.
  • the phase difference, which corresponds to the optical path difference between signal and reference arm, is evaluated.
  • this can be influenced by external environmental influences.
  • WO 2007/087301 A2 a Mehrwellenininterferometer is known which has a plurality of individual interferometers and in which the signals of different laser light sources are each directed to different, separately formed and spatially separated from each other arranged sensors.
  • the internal structure and handling of such an interferometer turns out to be relatively expensive and expensive.
  • the senor according to the invention should be characterized by the highest possible accuracy, preferably in the nanometer and even in the subnanometer range.
  • the sensor according to the invention should be equally suitable for the measurement of topologies of surfaces as well as for measuring distances to both polished and comparatively rough surfaces and working distances to the object to be measured from
  • the senor should be designed for absolute distance measurement.
  • the sensor device should also be distinguished by a particularly compact, flexibly adaptable and universally applicable design.
  • the sensor device is designed for measuring distances and likewise for measuring and detecting topologies of virtually any objects.
  • the sensor device has at least two, preferably three or more radiation sources, which are designed to generate optical signals of different wavelengths.
  • the optical signals that can be generated by the radiation sources can be fed via a fiber-optic coupling to a sensor head, preferably a single sensor head, wherein the signals of the at least two radiation sources can be brought together by means of at least one optical multiplexer device in a common fiber and fed to the sensor head by means of this fiber.
  • Wavelengths are applied to calibrate or control each other in terms of their positioning and alignment.
  • the size of such a sensor device can also advantageously be reduced.
  • the sensor device to a particularly compact design, which allows the use of the sensor device in a variety of technical fields for the high-precision measurement of distances and topologies.
  • Merging the optical signals in a single fiber and in a single sensor head also advantageous in terms of cost, since compared to the prior art, the number of sensor heads to be used and corresponding leads can be significantly reduced.
  • the use of a single sensor head also minimizes the number of potential sources of error that can affect the measurement result.
  • the sensor head is preferably designed to decouple the optical signals generated by the radiation sources toward the object and to at least partially absorb the radiation reflected by the object again and to reconnect it to the fiber connected to the sensor head.
  • the sensor head and the associated fiber are thus designed for bidirectional propagation of optical signals.
  • the sensor head for decoupling a directed onto a surface to be measured of the object measuring beam as well as for receiving one of the with Radiation impinged surface of the reflected object beam is formed.
  • both the sensor head and the associated fiber are provided for bidirectional propagation of optical signals and designed for this purpose.
  • the sensor device is designed according to a further advantageous embodiment as a multi-wavelength sensor, in particular as a Mehrwellenzininterferometer.
  • the reference and object arms of the interferometer both run at least partially within the sensor head.
  • a reference beam can be generated by partial reflection of the measuring beam at the exit surface of the sensor head and interferes within the sensor head with the object beam which can be coupled into the measuring head.
  • the sensor head is thus designed so that the reference beam reflected by the exit surface or a corresponding reference wave is co-propagated with an injected object wave and superimposed at least partially coherently to form evaluable interferences and the phase information contained therein.
  • the reference beam can be generated by partial reflection at the fiber end surface and interferes within the fiber with an object beam reflected by the object to be measured and coupled into the fiber.
  • the signals generated by the radiation sources can be directed in principle without further optical components directly from the fiber end to the object to be measured and the reflected radiation from there can also be coupled directly into those faders again. A coupling of the free fiber end to diffractive or refractive optical components can therefore be eliminated in an advantageous manner.
  • a Such a configuration is advantageous insofar as possible, caused by external influences path or length changes in the region of the sensor head are equally transmitted to both paths evenly.
  • phase deviations between the signal and reference arm of the interferometer outside of the sensor head and object surface lying to be measured difference distance are excluded.
  • the extraction and coupling surface of the sensor head is designed as a gradient index lens and / or as a barrel lens. This is facing away from the free end of the sensor head by means of an adhesive to the fiber.
  • the adhesive has an optical quality in that it has a gradient index lens and / or fiber comparable refractive index and / or comparable absorption coefficients.
  • the sensor head-side fiber end and the extraction or coupling-in optics of the sensor head are accommodated in a common guide element.
  • Fiber end and launch optics typically in the form of the gradient index lens, thus form a structural unit that is particularly resistant to interference.
  • the sensor head is mounted in an oscillating manner relative to the surface of the object to be measured in the propagation direction of the measuring beam emerging from the sensor head.
  • the guide element may further be provided for the guide element to be mounted in a periodically oscillating manner relative to a sensor head housing in the propagation direction of the measurement beam.
  • the sensor head housing can for example be fixed relative to the surface to be measured of the object. In this case, only one guide element is moved in an oscillating manner, which is advantageous due to a smaller mass in comparison to the entire sensor head compared to a movement of the entire sensor head.
  • the guide element and / or the entire sensor head are movable, in particular oscillating, by means of at least one electromagnetic and / or electromechanical actuator, in particular a piezoelectric actuator.
  • the amplitude of the oscillation movement of the sensor head and / or guide element in the region of the wavelength is at least one of the at least two radiation sources. Since wavelengths in the infrared range are preferred for the invention, the oscillation amplitude of the sensor head and / or guide element lies in the ⁇ m range. Typical vibration amplitudes are between 0.2 to 1.6 ⁇ m, preferably 0.4 to 1.4 ⁇ m, most preferably 0.6 to 1.2 ⁇ m or 0.8 to 1.0 ⁇ m.
  • all the radiation sources are designed as lasers, which are designed to generate optical signals in the wavelength range commonly referred to as the telecommunications area.
  • the lasers used as radiation sources emit optical radiation in the range between 1520 nm and 1630 nm, in particular radiation with wavelengths in the S, C or L band.
  • the reference and object beams can be fed and separated from one another by means of at least one circulator or a phase splitter and / or by means of fiber-optic demultiplexer with wavelength-selective different detectors.
  • the electrical signals of the detectors are evaluated in a phase-sensitive manner.
  • the so-called lock-in-analysis method is used for this phase evaluation.
  • the periodically oscillating mounting of the sensor head, or its optical components with respect to the surface to be measured proves to be advantageous.
  • the absolute distance between the sensor head and the surface to be measured can ultimately be determined by forming differences between the determined phases of individual, wavelength-selectively detected signals.
  • the invention further relates to a fiber optically designed multi-wavelength optical sensor for the quantitative detection of distance and / or topologies of surfaces, which comprises two or more lasers, wherein the wavelengths of the laser in the optical telecommunications range between 1520 nm and 1630 nm in S, C or L band are.
  • a sensor head is periodically spatially modulated in the direction of a measuring beam.
  • Lasers are brought together by multiplexer in a common fiber and passed to the sensor head.
  • Such a multi-wavelength sensor is with all
  • Fig. 2 is an enlarged view of the sensor head in cross section
  • Fig. 3 shows a further variant of a sensor head.
  • the geometry of the sensor system is shown schematically in FIG.
  • the light sources used are two or more spectrally stable lasers 101 from the optical telecommunications sector, in particular from the S, C or L band, which may be fiber-coupled.
  • the light of the lasers 101 for example of three different lasers, is combined via multiplexer 102 in an optical fiber 110, passes through a fiber-optic coupling element, such as a circulator 103, and is then fed to the sensor head 104, which directs the light onto the surface 105 to be measured ,
  • the light reflected back from the surface 105 in the form of an object beam 114 is picked up by the sensor head 104 and returned to the optical fiber 110, which now travels in the opposite direction.
  • the coherent superimposition of the light 114 reflected by the surface 105 with a partial reflection of the light 112 'within the sensor head forms the optical measuring signal. This contains the required distance information.
  • the signal again passes through the fiber-optic coupling element 103 and is directed into the evaluation unit 108 of the sensor system.
  • fiber optic demultiplexer 106 the signal is again decomposed into the individual wavelengths, spectrally separated and by Photodiode 107 each converted into electrical signals and individually phase-sensitive analog or digital evaluation 108 supplied.
  • the respective phases of the individual signals are determined by the method of "lock-in-analysis” (LIA) with an accuracy of 10 "4 and then converted electronically from analog to digital signals.
  • LIA lock-in-analysis
  • DSP digital signal processing unit
  • the phase of the individual wavelengths required for evaluation is contained in the local relative value of the intensity within the interference distribution according to the known principle of interferometry.
  • two coherent partial optical waves are required, which are referred to as signal 114 and reference 112 '.
  • the light 114 reflected by the surface 105 to be measured represents the signal wave
  • the reference wave 112 ' is generated by partial reflection at a surface 202, in particular at the coupling-out surface in the sensor head 104 ,
  • a decoupling optics is used, for example in the form of a Gradient index lens 203, which is fixedly connected to the optical fiber 110 by means of an adhesive 205.
  • the fiber end and the coupling-out optics are adhesively bonded in a guide element 206.
  • the sensor head 104 is spatially modulated periodically in the direction of the distance to be measured, which essentially corresponds to the direction of the measuring beam. This can e.g. by a piezoactuator 207 or other actuator, e.g. by an electro-magnetic actuator in which or on which the guide element 206 is attached. #
  • the sensor head 124 shown in cross section in FIG. 3 differs from the embodiment according to FIG. 2 in that the reference beam 112 'can be generated by partial reflection at the end face 220 of the fiber 110.
  • the adhesive 215 or the adhesive layer comes to lie outside the optical signal path, so that absorption of reference and / or measuring signals 112, 114 by the adhesive 215 is no longer to be feared.
  • a suitable holder for the fiber 110 may also be used.
  • a lens 218 is arranged, which is held on the guide member 206.
  • the radiation characteristic of the sensor head 124 can be influenced in a targeted manner.
  • the divergence or the focus of the measuring beam 112 may preferably be fixed during the final assembly of the sensor head 124 and possibly adapted to particular needs of a measurement setup and adjusted accordingly.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

L'invention concerne un système de détection pour la mesure de distances comprenant au moins deux sources de rayonnement (101) de longueurs d'ondes différentes destinées à la génération de signaux optiques (112), lesdits signaux optiques pouvant être transmis à une tête d'analyse (104; 124) par un couplage par fibres optiques (102, 103), les signaux optiques (112) desdites au moins deux sources de rayonnement (101) étant aptes à être réunis dans une fibre commune (110) par au moins un dispositif multiplexeur optique (102) puis transmis à la tête d'analyse (104; 124) par cette fibre (110).
PCT/EP2009/005111 2008-07-18 2009-07-14 Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail Ceased WO2010006764A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102008033942A DE102008033942B3 (de) 2008-07-18 2008-07-18 Faseroptisches Mehrwellenlängeninterferometer (MWLI) zur absoluten Vermessung von Abständen und Topologien von Oberflächen in großem Arbeitsabstand
DE102008033942.3 2008-07-18

Publications (2)

Publication Number Publication Date
WO2010006764A2 true WO2010006764A2 (fr) 2010-01-21
WO2010006764A3 WO2010006764A3 (fr) 2010-11-18

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PCT/EP2009/005111 Ceased WO2010006764A2 (fr) 2008-07-18 2009-07-14 Interféromètre multi-longueurs d'ondes à fibres optiques pour la mesure absolue de distances et topologies de surfaces pour de grandes distances de travail

Country Status (2)

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DE (1) DE102008033942B3 (fr)
WO (1) WO2010006764A2 (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014012641A3 (fr) * 2012-07-19 2014-03-20 Carl Zeiss Smt Gmbh Appareil d'exposition par projection pour microlithographie comprenant un système de mesure de distance optique
US9829306B2 (en) 2013-05-24 2017-11-28 Attocube Systems Ag Absolute distance laser interferometer
US20220357430A1 (en) * 2021-05-10 2022-11-10 Carl Mahr Holding Gmbh Fiber-optic Point Probe and Distance Measurement System having a Fiber-optic Point Probe

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011011065B4 (de) 2011-02-11 2013-04-04 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
DE102012017015B4 (de) 2012-08-20 2015-03-19 Luphos Gmbh Verfahren und Vorrichtung zur hochpräzisen Vermessung von Oberflächen
DE102015201754A1 (de) 2015-02-02 2016-08-04 Picofine GmbH Vorrichtung und Verfahren zur Justierung eines Laserinterferometers
DE102015209567B3 (de) * 2015-05-26 2016-10-27 Carl Zeiss Industrielle Messtechnik Gmbh Optischer Mehrwellenlängen-Sensor zur Messung von Abständen zu einer Oberfläche und entsprechendes Messgerät
DE102016100745B3 (de) * 2016-01-18 2017-03-09 Friedrich Vollmer Feinmessgerätebau Gmbh Verfahren zur optischen Abstandsmessung sowie ein Abstandsmessgerät
DE202016100211U1 (de) 2016-01-18 2017-04-19 Friedrich Vollmer Feinmessgerätebau Gmbh Abstandsmessgerät
EP3401634A1 (fr) 2017-05-12 2018-11-14 Taylor Hobson Limited Dispositif télémétrique destiné à déterminer une distance par rapport à un objet
EP3789727B1 (fr) 2019-09-04 2024-04-10 Taylor Hobson Limited Dispositif de mesure interférométrique
GB2622565B (en) 2022-07-15 2025-05-28 Taylor Hobson Ltd A collision protection apparatus

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US4552457A (en) * 1983-02-01 1985-11-12 Giallorenzi Thomas G Fiber optic interferometer using two wavelengths or variable wavelength
JPS62106306A (ja) * 1985-11-01 1987-05-16 Olympus Optical Co Ltd 多波長干渉計
DE4139865C2 (de) * 1991-12-03 1994-03-10 Deutsche Aerospace Abstimmbarer Zwei-Wellenlängen-Laser für Superheterodyn-Interferometer
TW367407B (en) * 1997-12-22 1999-08-21 Asml Netherlands Bv Interferometer system with two wavelengths, and lithographic apparatus provided with such a system
US7365858B2 (en) * 2001-12-18 2008-04-29 Massachusetts Institute Of Technology Systems and methods for phase measurements
US6781699B2 (en) * 2002-10-22 2004-08-24 Corning-Tropel Two-wavelength confocal interferometer for measuring multiple surfaces
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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2014012641A3 (fr) * 2012-07-19 2014-03-20 Carl Zeiss Smt Gmbh Appareil d'exposition par projection pour microlithographie comprenant un système de mesure de distance optique
CN104487896A (zh) * 2012-07-19 2015-04-01 卡尔蔡司Smt有限责任公司 包括光学距离测量系统的用于微光刻的投射曝光设备
US9759550B2 (en) 2012-07-19 2017-09-12 Carl Zeiss Smt Gmbh Projection exposure apparatus for microlithography comprising an optical distance measurement system
TWI613521B (zh) * 2012-07-19 2018-02-01 卡爾蔡司Ｓｍｔ有限公司 用於微影製程之包含光學距離量測系統的投影曝光設備
US9829306B2 (en) 2013-05-24 2017-11-28 Attocube Systems Ag Absolute distance laser interferometer
US20220357430A1 (en) * 2021-05-10 2022-11-10 Carl Mahr Holding Gmbh Fiber-optic Point Probe and Distance Measurement System having a Fiber-optic Point Probe
DE102021112120A1 (de) 2021-05-10 2022-11-10 Carl Mahr Holding Gmbh Faseroptische Punktsonde und Distanzmesssystem mit einer faseroptischen Punktsonde

Also Published As

Publication number Publication date
DE102008033942B3 (de) 2010-04-08
WO2010006764A3 (fr) 2010-11-18

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