WO2010004774A1 - Silicon nanoparticle suspension, and labeling agent for biological substance - Google Patents
Silicon nanoparticle suspension, and labeling agent for biological substance Download PDFInfo
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- WO2010004774A1 WO2010004774A1 PCT/JP2009/052764 JP2009052764W WO2010004774A1 WO 2010004774 A1 WO2010004774 A1 WO 2010004774A1 JP 2009052764 W JP2009052764 W JP 2009052764W WO 2010004774 A1 WO2010004774 A1 WO 2010004774A1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
- G01N33/48—Biological material, e.g. blood, urine; Haemocytometers
- G01N33/50—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing
- G01N33/58—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving labelled substances
- G01N33/585—Chemical analysis of biological material, e.g. blood, urine; Testing involving biospecific ligand binding methods; Immunological testing involving labelled substances with a particulate label, e.g. coloured latex
- G01N33/587—Nanoparticles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y15/00—Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
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- the present invention relates to a silicon nanoparticle suspension and a biological material labeling agent that is safe for a living body using the silicon nanoparticle suspension.
- the silicon nanoparticle phosphor is manufactured by performing high-frequency sputtering, and then performing heat treatment and HF treatment (see, for example, Patent Documents 1 and 2).
- a method of immersing in a solution is employed.
- quantum dots compound semiconductors such as III-IV compound semiconductors and II-IV compound semiconductors are widely known.
- these compounds have a great impact on the environment, and it is necessary to give sufficient consideration to handling and disposal during use.
- silicon quantum dots are used that are superior in safety and have less environmental impact than these compound semiconductors.
- the fluoride adsorbed physically on the surface can be sufficiently removed, but the fluorine that has penetrated into the film.
- the chemicals are not removed. Therefore, after that, the silicon nanoparticle is taken out as a suspension, and a dangerous level of fluoride is left to be used for biolabeling. In other words, it is extremely dangerous for a living body to use a silicon nanoparticle suspension synthesized by a high-frequency sputtering method as a fluorescent substance for biomarking.
- JP 2006-70089 A Japanese Patent Application Laid-Open No. 2004-296781 JP 2005-172429 A
- an object of the present invention is to provide a silicon nanoparticle suspension that can be applied in vivo by removing the fluoride and has excellent emission luminance, and further uses the silicon nanoparticle suspension.
- a biological material labeling agent that is safe for the living body is provided.
- a process of producing a silicon atom-containing silicon oxide film on a substrate subjecting the silicon atom-containing silicon oxide film to heat treatment (annealing), hydrofluoric acid treatment, removing fluorine ions from the hydrofluoric acid, and separating the substrate
- the silicon nanoparticle suspension manufactured in (1) wherein the total content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less.
- a biological material labeling agent wherein the silicon nanoparticle suspension according to any one of 1 to 7 and a molecular labeling material are bonded via an organic molecule.
- the present invention it is possible to provide a silicon nanoparticle suspension that can be applied in vivo by removing the fluoride and has excellent emission luminance, and further to the living body using the silicon nanoparticle suspension. It was possible to provide a safe biological material labeling agent.
- the silicon nanoparticle suspension of the present invention is characterized in that the total content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less.
- the silicon nanoparticle suspension of the present invention is generally obtained through the following steps.
- a silicon atom-containing silicon oxide film is formed on a semiconductor substrate (for example, a silicon substrate) using a high-frequency sputtering method, (B) heat-treating (annealing) the silicon atom-containing silicon oxide film to form silicon nanoparticles in the silicon oxide film; (C) The silicon oxide film is treated with hydrofluoric acid to remove the silicon oxide to expose the silicon nanoparticles, (D) The exposed silicon nanoparticles are immersed in pure water and subjected to a stirring process to remove adhering hydrofluoric acid and separate the semiconductor substrate to obtain a suspension of silicon nanoparticles.
- high-temperature and high-pressure treatment of pure water is preferably performed in place of the immersion and stirring treatment in pure water in (d) above.
- an autoclave it is preferable to use an autoclave.
- the temperature is preferably 100 to 300 ° C, more preferably 200 to 250 ° C.
- the pressure is preferably from 0.1 to 10 MPa, more preferably from 1 to 5 MPa.
- this treatment is not limited to the inside of the autoclave as long as it can be immersed in high-temperature and high-pressure water.
- High-temperature, high-pressure water includes so-called subcritical and supercritical water, regardless of gas or liquid state.
- the temperature and time of the heat treatment (annealing) in the above (b) is preferably 1000 to 1150 ° C. for 45 to 90 minutes, more preferably 1000 to 1100 ° C. for 50 to 80 minutes.
- hydrofluoric acid treatment in the above (c) a hydrofluoric acid aqueous solution or hydrofluoric acid vapor is used, but hydrofluoric acid vapor is preferred, and the temperature and time of the hydrofluoric acid vapor to be exposed are preferably 3 to 30 at 30 to 60 ° C. Minutes, more preferably at 35 to 50 ° C. for 5 to 15 minutes.
- the formation of the silicon atom-containing silicon oxide film is performed by, for example, a high-speed sputtering method (for example, Japanese Patent Application Laid-Open No. 2004-296781).
- forming a silicon atom-containing silicon oxide film on a semiconductor substrate is generated by (1) evaporating the opposing raw material semiconductor by the first high-temperature plasma generated between the electrodes and generating an electrodeless discharge in a reduced-pressure atmosphere. It is also possible to pass through the second high temperature plasma (for example, Japanese Patent Laid-Open No. 6-279015) and (2) laser ablation method (for example, Japanese Patent Laid-Open No. 2004-356163).
- argon gas is introduced into a vacuum chamber, the argon gas is ionized, and the ionized argon ions are converted into a silicon chip and quartz glass (a silicon chip is formed on a quartz glass as a predetermined material).
- the atoms and molecules emitted from the target material are deposited on the semiconductor substrate to form a silicon atom-containing silicon oxide (SiO x ) film.
- Examples of the target material in the high-speed sputtering method include silicon chip and quartz glass, and silicon nanoparticles having various particle sizes can be obtained by controlling the area ratio of the silicon chip and quartz glass.
- the area ratio between the silicon chip and the quartz glass is in the range of 1 to 50%.
- the particle size can also be controlled by changing the high-frequency power and gas pressure, which are sputtering conditions.
- the high frequency power is 10 to 500 W
- the gas pressure is 1.33 ⁇ 10 ⁇ 2 to 1.33 ⁇ 10 Pa.
- the average particle size of the silicon nanoparticles according to the present invention is preferably 1 nm or more and 10 nm or less. More preferably, they are 3 nm or more and 8 nm or less, Especially preferably, they are 3.5 nm or more and 6 nm or less.
- the content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less, preferably 50 ppm or less, More preferably, it is 15 ppm or less.
- the content of the fluoride is 100 ppm or less, the biological safety of the biological material labeling agent prepared from the silicon nanoparticle suspension is improved, and the emission luminance of the silicon nanoparticle suspension itself is also improved.
- Fluoride content of the silicon nanoparticle suspension is measured using a fluorine ion meter (manufactured by Toko Chemical Co., Ti-5101).
- the silicon nanoparticle suspension of the present invention can be applied to a biological material labeling agent. Further, by adding the silicon nanoparticle labeling agent (biological material labeling agent) of the present invention to a living cell or living body having a target (tracking) substance, the target substance binds or adsorbs to the conjugate or adsorbent. By irradiating excitation light of a predetermined wavelength and detecting fluorescence of a predetermined wavelength generated from the fluorescent semiconductor fine particles according to the excitation light, fluorescence dynamic imaging of the target (tracking) substance can be performed. That is, the biomaterial labeling agent of the present invention can be used for bioimaging methods (technical means for visualizing biomolecules constituting the biomaterial and dynamic phenomena thereof).
- the surface of the above-mentioned silicon nanoparticles is generally hydrophobic, for example, when used as a biological material labeling agent, the water dispersibility is poor as it is, and there is a problem that particles aggregate, It is preferable to hydrophilize the surface of the silicon nanoparticles.
- hydrophilization treatment for example, there is a method of chemically and / or physically binding a surface modifier to the particle surface after removing the lipophilic group on the surface with pyridine or the like.
- the surface modifier those having a carboxyl group and an amino group as hydrophilic groups are preferably used, and specific examples include mercaptopropionic acid, mercaptoundecanoic acid, aminopropanethiol and the like.
- 10 ⁇ 5 g of Si / SiO 2 type nanoparticles are dispersed in 10 ml of pure water in which 0.2 g of mercaptoundecanoic acid is dissolved, and stirred at 40 ° C. for 10 minutes to treat the surface of the shell. By doing so, the surface of the shell of the inorganic nanoparticles is modified with a carboxyl group.
- the biosubstance labeling agent is obtained in a structure in which at least the above-described hydrophilized silicon nanoparticles and the molecular labeling substance that binds to the biomolecule at the end are bound.
- An organic molecule having a functional group that becomes a linking group and binds to the molecular labeling substance may be interposed between the hydrophilic silicon nanoparticles and the molecular labeling substance.
- the biological material labeling agent can label the biological material by specifically binding and / or reacting with the target biological material.
- the molecular labeling substance include nucleotide chains, antibodies, proteins, and cyclodextrins.
- silicon nanoparticles subjected to hydrophilization treatment and a molecular labeling substance are bound by organic molecules.
- the organic molecule is not particularly limited as long as it is an organic molecule capable of binding silicon nanoparticles and a molecular labeling substance.
- albumin, myoglobin, casein, and the like are part of the protein, and are a kind of protein. It is also preferable to use avidin together with biotin.
- a binding functional group for example, an amino group or a carboxyl group may have a mercapto group or a maleimide group at the terminal.
- the link group is not particularly limited as long as it is organic, but preferably has hydrophilicity, may have a hydrophilic functional group, and an ethylene glycol chain is also preferably used.
- the form of bonding is not particularly limited, and examples thereof include covalent bonding, ionic bonding, hydrogen bonding, coordination bonding, physical adsorption, and chemical adsorption.
- a bond having a strong bonding force such as a covalent bond is preferable from the viewpoint of bond stability.
- silicon nanoparticles are hydrophilized with mercaptoundecanoic acid and biotin is used as an organic molecule.
- the carboxyl groups of the hydrophilized silicon nanoparticles are preferably covalently bonded to biotin, Is further selectively bound to a molecular labeling substance (such as an antibody) to which avidin is bound to obtain a biological substance labeling agent.
- Example 1 Fluorescence formation by sputtering
- Ar gas is introduced into the vacuum chamber, and Ar gas ions ionized by the high-frequency controller are collided with a target material made of Si chip and quartz glass. These emitted atoms and molecules are deposited on a semiconductor substrate to form a silicon oxide film in which silicon atoms are mixed in the silicon oxide film.
- the obtained silicon atom-containing silicon oxide film containing silicon atoms is rapidly heated to 1000 ° C. in an Ar atmosphere and subjected to heat treatment to agglomerate the silicon atoms in the film to nano size to oxidize silicon nanoparticles.
- a silicon film is formed.
- the heat treatment time is 60 minutes, and the temperature is 1000 ° C.
- Example 2-7 cleaning treatment was performed in the same manner except that the temperature and pressure described in Table 1 were used.
- Example 8 Residual fluorine ions were removed by immersing the silicon oxide film containing silicon nanoparticles after hydrofluoric acid treatment in pure water at 25 ° C. for 10 minutes.
- a silicon nanoparticle suspension can be obtained by introducing a silicon oxide film containing naturally oxidized silicon nanoparticles into a solution and performing ultrasonic treatment for 10 minutes.
- luminance of the silicon nanoparticle suspension shown in Table 1 is the brightness
- a 146 nm vacuum ultraviolet lamp manufactured by Ushio was used as a light source, a sample was set in a vacuum chamber, irradiated from a fixed distance at a vacuum degree of 1.33 ⁇ 10 Pa, and excitation luminescence was measured with a luminance meter.
- the luminance value is shown as a relative value when the sample of Example 8 is 100.
- Silicon nanoparticle suspension prepared in Example 1-8, to 10ml of pure water were dissolved mercaptoundecanoic acid 0.2 g, redispersed 1 ⁇ 10 -5 g min (equivalent amount), 40 ° C., By stirring for 10 minutes, nanoparticles having a hydrophilic surface were obtained.
- the obtained avidin-conjugated nanoparticle solution was mixed with a biotinylated oligonucleotide with a known base sequence and stirred to prepare an oligonucleotide labeled with the nanoparticle.
- the biosafety of the silicon nanoparticle labeling agent is evaluated using trypan blue staining.
- a 0.3% trypan blue solution is diluted with PBS ( ⁇ ) and placed in a test board together with the silicon nanoparticle labeling agent and HERA cells. By counting the number of cells stained blue, the ratio of viable cells after trypan blue staining is calculated. The higher the percentage of living cells, the higher the safety.
- the silicon nanoparticle suspension having the structure of the present invention As shown in Table 1, by obtaining the silicon nanoparticle suspension having the structure of the present invention, it is excellent in luminance and high detectability is obtained as a biological material labeling agent. Moreover, since the proportion of living cells is high in the biological safety test, an excellent biological substance labeling agent can be provided.
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Abstract
Description
本発明は、シリコンナノ粒子懸濁液、及び該シリコンナノ粒子懸濁液を用いた生体に安全な生体物質標識剤に関する。 The present invention relates to a silicon nanoparticle suspension and a biological material labeling agent that is safe for a living body using the silicon nanoparticle suspension.
シリコンナノ粒子蛍光体は高周波スパッタを行い、その後、熱処理、HF処理をすることにより作製される(例えば、特許文献1、2参照)。これら特許では、HF処理によりシリコンナノ粒子含有酸化ケイ素膜表面に残留してしまっているフッ化物イオンを除去するために、溶液に浸漬させるという方法をとっている。 The silicon nanoparticle phosphor is manufactured by performing high-frequency sputtering, and then performing heat treatment and HF treatment (see, for example, Patent Documents 1 and 2). In these patents, in order to remove fluoride ions remaining on the surface of the silicon oxide film containing silicon nanoparticles by HF treatment, a method of immersing in a solution is employed.
また、量子ドットとしては、III-IV族化合物半導体やII-IV族化合物半導体といった化合物半導体が広く知られている。しかしながら、これらの化合物は環境への影響が非常に大きく、使用時において取り扱いや廃棄に十分な配慮をする必要がある。その為、環境面や生体へ配慮して、これら化合物半導体と比べ安全性の優れ、環境への影響が少ないシリコン量子ドットを用いている。 Also, as quantum dots, compound semiconductors such as III-IV compound semiconductors and II-IV compound semiconductors are widely known. However, these compounds have a great impact on the environment, and it is necessary to give sufficient consideration to handling and disposal during use. For this reason, in consideration of the environment and living organisms, silicon quantum dots are used that are superior in safety and have less environmental impact than these compound semiconductors.
ただ従来は、シリコンナノ粒子懸濁液製造プロセスにおいて、酸処理等により残留する不純物等については注意を払っておらず、最終的に懸濁液として用いる際の安全性という意味ではなく、粒子のみの安全性に注目している(例えば、特許文献3参照)。 However, conventionally, in the silicon nanoparticle suspension manufacturing process, attention is not paid to impurities remaining due to acid treatment, etc., and it does not mean safety when used as a suspension, only particles. (See, for example, Patent Document 3).
HF処理後のシリコンナノ粒子含有酸化ケイ素膜を溶液に浸漬させるだけでは、表面に物理的に吸着しているフッ素化物に関しては十分に除去できているが、膜内部まで浸透してしまっているフッ素化物までは除去されていない。その為、その後、懸濁液としてシリコンナノ粒子を取り出し生体標識に用いるには危険なレベルのフッ素化物が残留してしまっている。即ち、従来の方法で高周波スパッタ法により合成したシリコンナノ粒子懸濁液を生体標識用の蛍光体として用いるのは生体にとって非常に危険となる。 By simply immersing the silicon nanoparticle-containing silicon oxide film after the HF treatment in the solution, the fluoride adsorbed physically on the surface can be sufficiently removed, but the fluorine that has penetrated into the film. The chemicals are not removed. Therefore, after that, the silicon nanoparticle is taken out as a suspension, and a dangerous level of fluoride is left to be used for biolabeling. In other words, it is extremely dangerous for a living body to use a silicon nanoparticle suspension synthesized by a high-frequency sputtering method as a fluorescent substance for biomarking.
また、これまで生体物質標識に蛍光体を用いる際に、フッ素化物がどの程度含まれていると生体にとって有毒となるのかについては明確に分かっていないという問題もある。
従って、本発明の目的は、フッ素化物を除去することによって生体内でも適用可能で、発光輝度に優れるシリコンナノ粒子懸濁液を提供することであり、更には該シリコンナノ粒子懸濁液を用いて、生体に安全な生体物質標識剤を提供することである。 Accordingly, an object of the present invention is to provide a silicon nanoparticle suspension that can be applied in vivo by removing the fluoride and has excellent emission luminance, and further uses the silicon nanoparticle suspension. Thus, a biological material labeling agent that is safe for the living body is provided.
本発明の上記目的は、下記構成により達成される。 The above object of the present invention is achieved by the following configuration.
1.基板上にシリコン原子含有酸化ケイ素膜を作製し、該シリコン原子含有酸化ケイ素膜に熱処理(アニール)を施し、フッ酸処理を施し、更にフッ酸からのフッ素イオンを除去すると共に基板を分離する工程で製造されるシリコンナノ粒子懸濁液において、フッ素イオンに基づく該シリコンナノ粒子懸濁液中のフッ素化物の総含有量が100ppm以下であることを特徴とするシリコンナノ粒子懸濁液。 1. A process of producing a silicon atom-containing silicon oxide film on a substrate, subjecting the silicon atom-containing silicon oxide film to heat treatment (annealing), hydrofluoric acid treatment, removing fluorine ions from the hydrofluoric acid, and separating the substrate The silicon nanoparticle suspension manufactured in (1), wherein the total content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less.
2.前記フッ素イオンに基づくシリコンナノ粒子懸濁液中のフッ素化物の総含有量が50ppm以下であることを特徴とする前記1に記載のシリコンナノ粒子懸濁液。 2. 2. The silicon nanoparticle suspension according to 1 above, wherein the total content of fluoride in the silicon nanoparticle suspension based on the fluorine ions is 50 ppm or less.
3.前記フッ素イオンに基づくシリコンナノ粒子懸濁液中のフッ素化物の総含有量が15ppm以下であることを特徴とする前記2に記載のシリコンナノ粒子懸濁液。 3. 3. The silicon nanoparticle suspension according to 2 above, wherein the total content of fluoride in the silicon nanoparticle suspension based on the fluorine ions is 15 ppm or less.
4.前記フッ酸からのフッ素イオンを除去する工程が高温、高圧の水に浸漬させることを特徴とする前記1~3のいずれか1項に記載のシリコンナノ粒子懸濁液。 4. 4. The silicon nanoparticle suspension according to any one of 1 to 3, wherein the step of removing fluorine ions from the hydrofluoric acid is immersed in high-temperature and high-pressure water.
5.前記高温、高圧の水における温度が100~300℃、圧力が0.1~10MPaであることを特徴とする前記4に記載のシリコンナノ粒子懸濁液。 5. 5. The silicon nanoparticle suspension according to 4 above, wherein the temperature in the high-temperature and high-pressure water is 100 to 300 ° C. and the pressure is 0.1 to 10 MPa.
6.前記温度が200~250℃、前記圧力が0.1~10MPaであることを特徴とする前記5に記載のシリコンナノ粒子懸濁液。 6. 6. The silicon nanoparticle suspension according to 5, wherein the temperature is 200 to 250 ° C. and the pressure is 0.1 to 10 MPa.
7.前記温度が200~250℃、前記圧力が1~5MPaであることを特徴とする前記6に記載のシリコンナノ粒子懸濁液。 7. 7. The silicon nanoparticle suspension according to 6 above, wherein the temperature is 200 to 250 ° C. and the pressure is 1 to 5 MPa.
8.前記1~7のいずれか1項に記載のシリコンナノ粒子懸濁液と分子標識物質とを有機分子を介して結合させたことを特徴とする生体物質標識剤。 8. 8. A biological material labeling agent, wherein the silicon nanoparticle suspension according to any one of 1 to 7 and a molecular labeling material are bonded via an organic molecule.
本発明によって、フッ素化物を除去することによって生体内でも適用可能で、発光輝度に優れるシリコンナノ粒子懸濁液を提供することができ、更には該シリコンナノ粒子懸濁液を用いて、生体に安全な生体物質標識剤を提供することができた。 According to the present invention, it is possible to provide a silicon nanoparticle suspension that can be applied in vivo by removing the fluoride and has excellent emission luminance, and further to the living body using the silicon nanoparticle suspension. It was possible to provide a safe biological material labeling agent.
以下、本発明について詳述する。 Hereinafter, the present invention will be described in detail.
本発明のシリコンナノ粒子懸濁液は、フッ素イオンに基づくシリコンナノ粒子懸濁液中のフッ素化物の総含有量が100ppm以下であることを特徴とする。 The silicon nanoparticle suspension of the present invention is characterized in that the total content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less.
本発明のシリコンナノ粒子懸濁液は、一般に下記工程を経て得られる。 The silicon nanoparticle suspension of the present invention is generally obtained through the following steps.
(a)高周波スパッタリング法を用い、半導体基板(例えば、シリコン基板)上にシリコン原子含有酸化ケイ素膜を作製し、
(b)上記シリコン原子含有酸化ケイ素膜に熱処理(アニール)を施し、該酸化ケイ素膜内にシリコンナノ粒子を形成し、
(c)上記酸化ケイ素膜にフッ酸処理を施して酸化ケイ素を除去して、シリコンナノ粒子を露出させ、
(d)上記露出したシリコンナノ粒子を純水中に浸漬、攪拌処理を施し、付着したフッ酸を除去すると共に半導体基板を分離し、シリコンナノ粒子の懸濁液を得る。
(A) A silicon atom-containing silicon oxide film is formed on a semiconductor substrate (for example, a silicon substrate) using a high-frequency sputtering method,
(B) heat-treating (annealing) the silicon atom-containing silicon oxide film to form silicon nanoparticles in the silicon oxide film;
(C) The silicon oxide film is treated with hydrofluoric acid to remove the silicon oxide to expose the silicon nanoparticles,
(D) The exposed silicon nanoparticles are immersed in pure water and subjected to a stirring process to remove adhering hydrofluoric acid and separate the semiconductor substrate to obtain a suspension of silicon nanoparticles.
本発明は、上記(d)における純水中での浸漬、攪拌処理に代えて、好ましくは純水の高温、高圧処理を行ったものである。具体的には、例えば、オートクレーブを用いることが好ましい。温度としては100~300℃が好ましく、より好ましくは200~250℃である。圧力としては0.1~10MPaが好ましく、より好ましくは1~5MPaである。 In the present invention, high-temperature and high-pressure treatment of pure water is preferably performed in place of the immersion and stirring treatment in pure water in (d) above. Specifically, for example, it is preferable to use an autoclave. The temperature is preferably 100 to 300 ° C, more preferably 200 to 250 ° C. The pressure is preferably from 0.1 to 10 MPa, more preferably from 1 to 5 MPa.
なお、高温、高圧の水中に浸漬させることができるのであれば、この処理はオートクレーブ内には限らない。高温、高圧の水というのは、いわゆる亜臨界、超臨界状態の水も含み、気体、液体状態を問わない。 Note that this treatment is not limited to the inside of the autoclave as long as it can be immersed in high-temperature and high-pressure water. High-temperature, high-pressure water includes so-called subcritical and supercritical water, regardless of gas or liquid state.
上記(b)における熱処理(アニール)の温度、時間に関しては好ましくは1000~1150℃で45~90分、更に好ましくは1000~1100℃で50~80分である。 Regarding the temperature and time of the heat treatment (annealing) in the above (b), it is preferably 1000 to 1150 ° C. for 45 to 90 minutes, more preferably 1000 to 1100 ° C. for 50 to 80 minutes.
上記(c)におけるフッ酸処理については、フッ酸水溶液またはフッ酸蒸気が用いられるが、フッ酸蒸気が好ましく、曝すフッ酸蒸気の温度、時間については、好ましくは30~60℃で3~30分、更に好ましくは35~50℃で5~15分である。 In the hydrofluoric acid treatment in the above (c), a hydrofluoric acid aqueous solution or hydrofluoric acid vapor is used, but hydrofluoric acid vapor is preferred, and the temperature and time of the hydrofluoric acid vapor to be exposed are preferably 3 to 30 at 30 to 60 ° C. Minutes, more preferably at 35 to 50 ° C. for 5 to 15 minutes.
シリコン原子含有酸化ケイ素膜の形成は、例えば、高速スパッタリング法(例えば、特開2004-296781号公報)によって行われる。 The formation of the silicon atom-containing silicon oxide film is performed by, for example, a high-speed sputtering method (for example, Japanese Patent Application Laid-Open No. 2004-296781).
なお、半導体基板上にシリコン原子含有酸化ケイ素膜を形成することは、(1)対向する原料半導体を電極間で発生させた第一の高温プラズマによって蒸発させ、減圧雰囲気中において無電極放電で発生させた第二の高温プラズマ中に通過させる方法(例えば、特開平6-279015号公報)、(2)レーザーアブレーション法(例えば、特開2004-356163号公報)によっても可能である。 In addition, forming a silicon atom-containing silicon oxide film on a semiconductor substrate is generated by (1) evaporating the opposing raw material semiconductor by the first high-temperature plasma generated between the electrodes and generating an electrodeless discharge in a reduced-pressure atmosphere. It is also possible to pass through the second high temperature plasma (for example, Japanese Patent Laid-Open No. 6-279015) and (2) laser ablation method (for example, Japanese Patent Laid-Open No. 2004-356163).
高速スパッタリング装置において、アルゴンガスを真空チャンバーにアルゴンガス導入し、アルゴンガスをイオン化し、イオン化されたアルゴンイオンを高周波電極のターゲット材料であるシリコンチップと石英ガラス(石英ガラス上にシリコンチップが所定の間隔で配列されている。)へ衝突させ、ターゲット材料から放出された原子や分子を半導体基板上に堆積させ、シリコン原子含有酸化ケイ素(SiOx)膜を形成する。 In a high-speed sputtering apparatus, argon gas is introduced into a vacuum chamber, the argon gas is ionized, and the ionized argon ions are converted into a silicon chip and quartz glass (a silicon chip is formed on a quartz glass as a predetermined material). The atoms and molecules emitted from the target material are deposited on the semiconductor substrate to form a silicon atom-containing silicon oxide (SiO x ) film.
高速スパッタリング法におけるターゲット材料としては、シリコンチップと石英ガラスが挙げられ、シリコンチップと石英ガラスの面積比を制御することによって、様々な粒子サイズのシリコンナノ粒子が得られる。シリコンチップと石英ガラスの面積比は1~50%の範囲である。 Examples of the target material in the high-speed sputtering method include silicon chip and quartz glass, and silicon nanoparticles having various particle sizes can be obtained by controlling the area ratio of the silicon chip and quartz glass. The area ratio between the silicon chip and the quartz glass is in the range of 1 to 50%.
スパッタリング条件である高周波電力やガス圧を変化させても粒子サイズを制御することができる。高周波電力は10~500W、ガス圧は1.33×10-2~1.33×10Paの範囲である。 The particle size can also be controlled by changing the high-frequency power and gas pressure, which are sputtering conditions. The high frequency power is 10 to 500 W, and the gas pressure is 1.33 × 10 −2 to 1.33 × 10 Pa.
本発明に係るシリコンナノ粒子の平均粒径は、1nm以上10nm以下が好ましい。より好ましくは3nm以上8nm以下、特に好ましくは3.5nm以上6nm以下である。 The average particle size of the silicon nanoparticles according to the present invention is preferably 1 nm or more and 10 nm or less. More preferably, they are 3 nm or more and 8 nm or less, Especially preferably, they are 3.5 nm or more and 6 nm or less.
本発明のシリコンナノ粒子懸濁液の製造方法によって製造されたシリコンナノ粒子懸濁液において、フッ素イオンに基づくシリコンナノ粒子懸濁液中のフッ素化物の含有量が100ppm以下、好ましくは50ppm以下、より好ましくは15ppm以下である。フッ素化物の含有量が100ppm以下であると、シリコンナノ粒子懸濁液から作製した生体物質標識剤の生体安全性が向上し、更にシリコンナノ粒子懸濁液自身の発光輝度も改良される。 In the silicon nanoparticle suspension produced by the method for producing a silicon nanoparticle suspension of the present invention, the content of fluoride in the silicon nanoparticle suspension based on fluorine ions is 100 ppm or less, preferably 50 ppm or less, More preferably, it is 15 ppm or less. When the content of the fluoride is 100 ppm or less, the biological safety of the biological material labeling agent prepared from the silicon nanoparticle suspension is improved, and the emission luminance of the silicon nanoparticle suspension itself is also improved.
シリコンナノ粒子懸濁液のフッ素化物含有量は、フッ素イオンメーター(東興化学製、Ti-5101)を用い、計測している。 Fluoride content of the silicon nanoparticle suspension is measured using a fluorine ion meter (manufactured by Toko Chemical Co., Ti-5101).
本発明のシリコンナノ粒子懸濁液は、生体物質標識剤に適応することができる。また、標的(追跡)物質を有する生細胞もしくは生体に、本発明のシリコンナノ粒子標識剤(生体物質標識剤)を添加することで、標的物質と結合もしくは吸着し、当該結合体もしくは吸着体に所定の波長の励起光を照射し、当該励起光に応じて蛍光半導体微粒子から発生する所定の波長の蛍光を検出することにより、上記標的(追跡)物質の蛍光動態イメージングを行うことができる。即ち、本発明の生体物質標識剤は、バイオイメージング法(生体物質を構成する生体分子やその動的現象を可視化する技術手段)に利用することができる。 The silicon nanoparticle suspension of the present invention can be applied to a biological material labeling agent. Further, by adding the silicon nanoparticle labeling agent (biological material labeling agent) of the present invention to a living cell or living body having a target (tracking) substance, the target substance binds or adsorbs to the conjugate or adsorbent. By irradiating excitation light of a predetermined wavelength and detecting fluorescence of a predetermined wavelength generated from the fluorescent semiconductor fine particles according to the excitation light, fluorescence dynamic imaging of the target (tracking) substance can be performed. That is, the biomaterial labeling agent of the present invention can be used for bioimaging methods (technical means for visualizing biomolecules constituting the biomaterial and dynamic phenomena thereof).
上述したシリコンナノ粒子表面は一般的には疎水性であるため、例えば、生体物質標識剤として使用する場合は、このままでは水分散性が悪く、粒子が凝集してしまう等の問題があるため、シリコンナノ粒子の表面を親水化処理することが好ましい。 Since the surface of the above-mentioned silicon nanoparticles is generally hydrophobic, for example, when used as a biological material labeling agent, the water dispersibility is poor as it is, and there is a problem that particles aggregate, It is preferable to hydrophilize the surface of the silicon nanoparticles.
親水化処理の方法としては、例えば、表面の親油性基をピリジン等で除去した後に粒子表面に表面修飾剤を化学的及び/または物理的に結合させる方法がある。表面修飾剤としては、親水基としてカルボキシル基、アミノ基を持つものが好ましく用いられ、具体的には、メルカプトプロピオン酸、メルカプトウンデカン酸、アミノプロパンチオールなどが挙げられる。具体的には、例えば、Si/SiO2型ナノ粒子10-5gをメルカプトウンデカン酸0.2gが溶解した純水10ml中に分散させて、40℃、10分間攪拌し、シェルの表面を処理することで無機ナノ粒子のシェルの表面をカルボキシル基で修飾する。 As a method of hydrophilization treatment, for example, there is a method of chemically and / or physically binding a surface modifier to the particle surface after removing the lipophilic group on the surface with pyridine or the like. As the surface modifier, those having a carboxyl group and an amino group as hydrophilic groups are preferably used, and specific examples include mercaptopropionic acid, mercaptoundecanoic acid, aminopropanethiol and the like. Specifically, for example, 10 −5 g of Si / SiO 2 type nanoparticles are dispersed in 10 ml of pure water in which 0.2 g of mercaptoundecanoic acid is dissolved, and stirred at 40 ° C. for 10 minutes to treat the surface of the shell. By doing so, the surface of the shell of the inorganic nanoparticles is modified with a carboxyl group.
生体物質標識剤は、少なくとも上述した親水化処理されたシリコンナノ粒子と末端で生体分子に結合する分子標識物質を結合させた構造で得られる。親水化したシリコンナノ粒子と分子標識物質との間に、リンク基となり分子標識物質に結合する官能基を持つ有機分子を介してもよい。 The biosubstance labeling agent is obtained in a structure in which at least the above-described hydrophilized silicon nanoparticles and the molecular labeling substance that binds to the biomolecule at the end are bound. An organic molecule having a functional group that becomes a linking group and binds to the molecular labeling substance may be interposed between the hydrophilic silicon nanoparticles and the molecular labeling substance.
生体物質標識剤は、分子標識物質が目的とする生体物質と特異的に結合及び/または反応することにより、生体物質の標識が可能となる。当該分子標識物質としては、例えば、ヌクレオチド鎖、抗体、蛋白及びシクロデキストリン等が挙げられる。 The biological material labeling agent can label the biological material by specifically binding and / or reacting with the target biological material. Examples of the molecular labeling substance include nucleotide chains, antibodies, proteins, and cyclodextrins.
生体物質標識剤は、親水化処理されたシリコンナノ粒子と分子標識物質とが有機分子により結合されている。当該有機分子としては、シリコンナノ粒子と分子標識物質とを結合できる有機分子であれば特に制限はないが、例えば、その一部にタンパク質中でも、アルブミン、ミオグロビン及びカゼイン等、またタンパク質の一種であるアビジンをビオチンと共に用いることも好適に用いられる。 In the biological substance labeling agent, silicon nanoparticles subjected to hydrophilization treatment and a molecular labeling substance are bound by organic molecules. The organic molecule is not particularly limited as long as it is an organic molecule capable of binding silicon nanoparticles and a molecular labeling substance. For example, albumin, myoglobin, casein, and the like are part of the protein, and are a kind of protein. It is also preferable to use avidin together with biotin.
特に分子標識物質へ結合する末端に位置して用いられる。また、分子標識物質に結合するために結合官能基、例えば、アミノ基、カルボシキル基がメルカプト基、マレイミド基などが末端に有してもよい。更には、有機分子の中にシリコンナノ粒子側の末端と分子標識物質側の末端を繋ぐリンク基を有してもよい。リンク基としては有機であれば特に限定されないが、親水性を有することが好ましく、親水官能基を有してもよく、エチレングリコール鎖なども好適に用いられる。結合の態様としては特に限定されず、共有結合、イオン結合、水素結合、配位結合、物理吸着及び化学吸着等が挙げられる。結合の安定性から共有結合などの結合力の強い結合が好ましい。 Especially, it is used at the end that binds to the molecular labeling substance. Further, in order to bind to the molecular labeling substance, a binding functional group, for example, an amino group or a carboxyl group may have a mercapto group or a maleimide group at the terminal. Furthermore, you may have a link group which connects the terminal by the side of a silicon nanoparticle and the terminal by the side of a molecule | numerator in an organic molecule. The link group is not particularly limited as long as it is organic, but preferably has hydrophilicity, may have a hydrophilic functional group, and an ethylene glycol chain is also preferably used. The form of bonding is not particularly limited, and examples thereof include covalent bonding, ionic bonding, hydrogen bonding, coordination bonding, physical adsorption, and chemical adsorption. A bond having a strong bonding force such as a covalent bond is preferable from the viewpoint of bond stability.
具体的な例としては、シリコンナノ粒子をメルカプトウンデカン酸で親水化処理し、有機分子としてビオチンを用い、この場合親水化処理されたシリコンナノ粒子のカルボキシル基はビオチンと好適に共有結合し、ビオチンが更にアビジンが結合した分子標識物質(抗体など)に選択的に結合し、生体物質標識剤が得られる。 As a specific example, silicon nanoparticles are hydrophilized with mercaptoundecanoic acid and biotin is used as an organic molecule. In this case, the carboxyl groups of the hydrophilized silicon nanoparticles are preferably covalently bonded to biotin, Is further selectively bound to a molecular labeling substance (such as an antibody) to which avidin is bound to obtain a biological substance labeling agent.
以下、実施例により本発明をより詳細に説明するが、本発明はこれに限定されるものではない。 Hereinafter, the present invention will be described in more detail with reference to examples, but the present invention is not limited thereto.
実施例1
(スパッタリングによる成膜)
真空チャンバー内にArガスを導入し、高周波コントローラによりイオン化されたArガスイオンをSiチップと石英ガラスからなるターゲット材料に衝突させる。これらの放出された原子及び分子を半導体基板上に堆積し、酸化ケイ素膜内にシリコン原子が混ざった酸化ケイ素膜を形成する。
Example 1
(Film formation by sputtering)
Ar gas is introduced into the vacuum chamber, and Ar gas ions ionized by the high-frequency controller are collided with a target material made of Si chip and quartz glass. These emitted atoms and molecules are deposited on a semiconductor substrate to form a silicon oxide film in which silicon atoms are mixed in the silicon oxide film.
(アニール処理)
得られたシリコン原子を含有したシリコン原子含有酸化ケイ素膜を、Ar雰囲気中で1000℃まで急速に昇温して熱処理を行い、膜中のシリコン原子をナノサイズまで凝集させてシリコンナノ粒子含有酸化ケイ素膜を形成する。ここで、熱処理時間は60分、温度は1000℃である。
(Annealing treatment)
The obtained silicon atom-containing silicon oxide film containing silicon atoms is rapidly heated to 1000 ° C. in an Ar atmosphere and subjected to heat treatment to agglomerate the silicon atoms in the film to nano size to oxidize silicon nanoparticles. A silicon film is formed. Here, the heat treatment time is 60 minutes, and the temperature is 1000 ° C.
(フッ酸処理)
得られたシリコンナノ粒子含有酸化ケイ素膜を、40℃のフッ酸の蒸気の10分間曝した。
(Hydrofluoric acid treatment)
The obtained silicon oxide film containing silicon nanoparticles was exposed to a hydrofluoric acid vapor at 40 ° C. for 10 minutes.
(洗浄処理)
高温、高圧の水を用いた洗浄処理は、オートクレーブ内で行った。300℃まで昇温し、外部から圧縮空気を導入し、1MPaの圧力とした。処理時間は10分間である。
(Cleaning process)
The cleaning treatment using high-temperature and high-pressure water was performed in an autoclave. The temperature was raised to 300 ° C., compressed air was introduced from the outside, and the pressure was 1 MPa. The processing time is 10 minutes.
実施例2~7
実施例1において、表1に記載の温度、圧力とした以外は同様にして洗浄処理を行った。
Examples 2-7
In Example 1, cleaning treatment was performed in the same manner except that the temperature and pressure described in Table 1 were used.
実施例8(比較)
フッ酸処理後のシリコンナノ粒子含有酸化ケイ素膜を25℃の純水中に10分間浸漬させることで、残留フッ素イオンの除去を行った。
Example 8 (comparison)
Residual fluorine ions were removed by immersing the silicon oxide film containing silicon nanoparticles after hydrofluoric acid treatment in pure water at 25 ° C. for 10 minutes.
(加熱酸化処理)
洗浄後のシリコンナノ粒子含有酸化ケイ素膜に自然酸化を行う。自然酸化とは空気中でシリコンナノ粒子含有酸化ケイ素膜を保存することである。
(Heat oxidation treatment)
The silicon nanoparticle-containing silicon oxide film after cleaning is naturally oxidized. Natural oxidation is the preservation of a silicon oxide film containing silicon nanoparticles in air.
(シリコンナノ粒子の分離・液中への分散)
自然酸化したシリコンナノ粒子含有酸化ケイ素膜を溶液中に投入して10分間の超音波処理を行うことにより、シリコンナノ粒子懸濁液を得ることができる。表1に示すシリコンナノ粒子懸濁液の輝度は、本処理後に測定した輝度である。光源として146nmの真空紫外線ランプ(ウシオ製)を使用し、真空チャンバー内にサンプルをセットし、真空度1.33×10Paにて一定距離から照射し、励起発光を輝度計で測定した。輝度の値については、実施例8の試料を100としたときの相対値で示している。
(Separation of silicon nanoparticles and dispersion in liquid)
A silicon nanoparticle suspension can be obtained by introducing a silicon oxide film containing naturally oxidized silicon nanoparticles into a solution and performing ultrasonic treatment for 10 minutes. The brightness | luminance of the silicon nanoparticle suspension shown in Table 1 is the brightness | luminance measured after this process. A 146 nm vacuum ultraviolet lamp (manufactured by Ushio) was used as a light source, a sample was set in a vacuum chamber, irradiated from a fixed distance at a vacuum degree of 1.33 × 10 Pa, and excitation luminescence was measured with a luminance meter. The luminance value is shown as a relative value when the sample of Example 8 is 100.
(シリコンナノ粒子標識剤の作製)
実施例1~8において作製したシリコンナノ粒子懸濁液を、メルカプトウンデカン酸0.2gを溶解した10ml純水中に、1×10-5g分(相当量)を再分散させ、40℃、10分間攪拌することで表面が親水化処理されたナノ粒子を得た。
(Production of silicon nanoparticle labeling agent)
Silicon nanoparticle suspension prepared in Example 1-8, to 10ml of pure water were dissolved mercaptoundecanoic acid 0.2 g, redispersed 1 × 10 -5 g min (equivalent amount), 40 ° C., By stirring for 10 minutes, nanoparticles having a hydrophilic surface were obtained.
その後、表面が親水化処理されたシリコンナノ粒子の水溶液それぞれにアビジン25mgを添加し、40℃で10分間攪拌を行い、アビジンコンジュゲートナノ粒子を作製した。 Thereafter, 25 mg of avidin was added to each aqueous solution of silicon nanoparticles whose surface was hydrophilized, and stirred at 40 ° C. for 10 minutes to prepare avidin-conjugated nanoparticles.
得られたアビジンコンジュゲートナノ粒子溶液に、ビオチン化された塩基配列が既知であるオリゴヌクレオチドを混合、攪拌し、ナノ粒子でラベリングされたオリゴヌクレオチドを作製した。 The obtained avidin-conjugated nanoparticle solution was mixed with a biotinylated oligonucleotide with a known base sequence and stirred to prepare an oligonucleotide labeled with the nanoparticle.
様々な塩基配列を持つオリゴヌクレオチドを固定化したDNAチップ上に、上記のラベリングしたオリゴヌクレオチドを滴下、洗浄したところ、ラベリングされたオリゴヌクレオチドと相補的な塩基配列を持つDNAチップ上のオリゴヌクレオチドのスポットのみが、紫外線照射によりシリコンナノ粒子の粒径に依存して異なる色の発光をすることが確認された。 When the above labeled oligonucleotides were dropped and washed on a DNA chip on which oligonucleotides having various base sequences were immobilized, the oligonucleotides on the DNA chip having base sequences complementary to the labeled oligonucleotides were washed. Only the spot was confirmed to emit light of different colors depending on the particle size of the silicon nanoparticles by ultraviolet irradiation.
このことより、本発明に係るシリコンナノ粒子でのオリゴヌクレオチドのラベリングが可能なことを確認した。 From this, it was confirmed that oligonucleotide labeling with silicon nanoparticles according to the present invention was possible.
(生体安全性試験)
上記シリコンナノ粒子標識剤の生体安全性は、トリパンブルー染色を用いて評価している。0.3%トリパンブルー液をPBS(-)で希釈し、上記シリコンナノ粒子標識剤とHERA細胞と共に検査盤に入れる。青く染色されている細胞数をカウントすることにより、トリパンブルー染色後の生細胞の割合を計算している。生細胞の割合が高ければ安全性が高いことを表す。
(Biological safety test)
The biosafety of the silicon nanoparticle labeling agent is evaluated using trypan blue staining. A 0.3% trypan blue solution is diluted with PBS (−) and placed in a test board together with the silicon nanoparticle labeling agent and HERA cells. By counting the number of cells stained blue, the ratio of viable cells after trypan blue staining is calculated. The higher the percentage of living cells, the higher the safety.
表1に示すように本発明の構成のシリコンナノ粒子懸濁液を得ることにより輝度に優れ、生体物質標識剤として高検出性が得られる。しかも、生体安全性試験で生細胞の割合が高いことから、優れた生体物質標識剤を提供できる。 As shown in Table 1, by obtaining the silicon nanoparticle suspension having the structure of the present invention, it is excellent in luminance and high detectability is obtained as a biological material labeling agent. Moreover, since the proportion of living cells is high in the biological safety test, an excellent biological substance labeling agent can be provided.
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| WO2009051016A1 (en) * | 2007-10-17 | 2009-04-23 | Konica Minolta Medical & Graphic, Inc. | Silicon quantum dots and biological labeling agent using the same |
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