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WO2010001800A1 - Élément piézoélectrique multicouches et appareil d'injection et système d'injection de carburant l'utilisant - Google Patents

Élément piézoélectrique multicouches et appareil d'injection et système d'injection de carburant l'utilisant Download PDF

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Publication number
WO2010001800A1
WO2010001800A1 PCT/JP2009/061579 JP2009061579W WO2010001800A1 WO 2010001800 A1 WO2010001800 A1 WO 2010001800A1 JP 2009061579 W JP2009061579 W JP 2009061579W WO 2010001800 A1 WO2010001800 A1 WO 2010001800A1
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WO
WIPO (PCT)
Prior art keywords
piezoelectric element
multilayer piezoelectric
internal electrode
gap
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2009/061579
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English (en)
Japanese (ja)
Inventor
健 岡村
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Kyocera Corp
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Kyocera Corp
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Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2010519019A priority Critical patent/JP5334972B2/ja
Publication of WO2010001800A1 publication Critical patent/WO2010001800A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02MSUPPLYING COMBUSTION ENGINES IN GENERAL WITH COMBUSTIBLE MIXTURES OR CONSTITUENTS THEREOF
    • F02M51/00Fuel-injection apparatus characterised by being operated electrically
    • F02M51/06Injectors peculiar thereto with means directly operating the valve needle
    • F02M51/0603Injectors peculiar thereto with means directly operating the valve needle using piezoelectric or magnetostrictive operating means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/01Manufacture or treatment
    • H10N30/05Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes
    • H10N30/053Manufacture of multilayered piezoelectric or electrostrictive devices, or parts thereof, e.g. by stacking piezoelectric bodies and electrodes by integrally sintering piezoelectric or electrostrictive bodies and electrodes
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure
    • H10N30/508Piezoelectric or electrostrictive devices having a stacked or multilayer structure adapted for alleviating internal stress, e.g. cracking control layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/80Constructional details
    • H10N30/85Piezoelectric or electrostrictive active materials
    • H10N30/853Ceramic compositions
    • H10N30/8548Lead-based oxides
    • H10N30/8554Lead-zirconium titanate [PZT] based

Definitions

  • the present invention relates to a laminated piezoelectric element used for, for example, a driving element (piezoelectric actuator) using a piezoelectric body, a sensor element, or a circuit element.
  • the drive element include a fuel injection device for an automobile engine, a liquid injection device such as a printing device for an ink jet printer, a precision positioning device such as a positioning device for an optical device, and a vibration prevention device.
  • the sensor element include a combustion pressure sensor, a knock sensor, an acceleration sensor, a load sensor, an ultrasonic sensor, a pressure sensor, and a yaw rate sensor.
  • Examples of the circuit element include a piezoelectric gyro, a piezoelectric switch, a piezoelectric transformer, and a piezoelectric breaker.
  • multilayer piezoelectric elements have been required to be able to ensure a large amount of displacement under a large pressure while being reduced in size. For this reason, it is required that a higher voltage corresponding to a larger displacement amount is applied and that it can be used under harsh conditions in which continuous driving is performed for a long time.
  • the present invention has been made in view of the above problems, and an object of the present invention is to provide a laminated piezoelectric element having a stable displacement even when driven for a long time.
  • the multilayer piezoelectric element of the present invention is a multilayer piezoelectric element having a multilayer structure in which piezoelectric layers and internal electrode layers are alternately stacked, and the piezoelectric layer has a gap including a metal body. It is characterized by being.
  • the voids of the piezoelectric layer form a locally deformed region in the piezoelectric layer to absorb the stress, and the metal contained in the voids
  • the body can improve the heat conduction of the piezoelectric layer and dissipate the self-heating generated during the driving of the piezoelectric element to the surface of the piezoelectric element. As a result, the amount of displacement can be stabilized even when driven for a long time.
  • FIG.1 (a) is a perspective view which shows the example of embodiment of the lamination type piezoelectric element of this invention.
  • FIG. 1B is an exploded perspective view of the example shown in FIG.
  • FIG. 2 is a cross-sectional view of the main part including internal electrodes that are adjacent to each other in the stacking direction, that is, opposite to each other in the direction perpendicular to the stacking direction of the piezoelectric elements in the example shown in FIG.
  • the laminated piezoelectric element 1 of this example (hereinafter also simply referred to as the piezoelectric element 1) includes a laminated body 7 having a laminated structure in which piezoelectric layers 3 and internal electrode layers 5 are alternately laminated.
  • a multilayer piezoelectric element 1 having a void 11 including a metal body 13 in a piezoelectric layer 3.
  • the piezoelectric layer 3 has the void 11 including the metal body 13 as described above, the void 11 forms a locally deformed region in the piezoelectric layer 3 to absorb stress, and further, the void 11, the heat conduction of the piezoelectric layer 3 can be improved and the self-heating generated during driving of the piezoelectric element 1 can be dissipated to the surface of the piezoelectric element 1. As a result, the amount of displacement can be stabilized even when driven for a long time.
  • the size of the gap 11 included in the piezoelectric layer 3 is preferably 50% or less with respect to the thickness of the piezoelectric layer 3. By making it within this range, the void 11 forms a locally deformed region in the piezoelectric layer 3 to effectively absorb the stress, and has an effect of having a high insulation resistance over the entire surface of the piezoelectric layer 3. Play. Moreover, it is preferable that the shape of the metal body 13 contained in the space
  • gap 11 is extended in the direction (direction parallel to the main surface of a piezoelectric material layer) orthogonal to the lamination direction.
  • the metal body 13 in the gap 11 can preferentially improve the heat conduction of the piezoelectric layer 3 in the direction of the side surface of the element, and the self-heating generated during driving of the piezoelectric element 1 can be reduced. The effect of dissipating to the surface of is improved.
  • the gap 11 at a portion sandwiched between the internal electrode layers 5 facing each other such as being positioned one above the other.
  • the stress relaxation effect and the heat dissipation effect can be brought about by the air gap 11 in the drive region called the active layer in the multilayer piezoelectric element 1, the heat generated during the drive can be effectively dissipated.
  • interposed between the internal electrode layers 5 of different polarities it is possible to suppress local thermal expansion by suppressing local heating, so that the piezoelectric element 1 can be prevented from cracking and laminated.
  • the type piezoelectric element 1 can be driven stably.
  • the internal electrode layer 5 includes a porous internal electrode layer 5 (not shown separately) including a large number of independent metal particles, and voids 11 are formed in the piezoelectric layer 3 in contact with the porous internal electrode layer 5. It is preferable to have.
  • the porous internal electrode layer 5 including a large number of independent metal particles has an effect of relieving stress on itself, it is highly durable due to a synergistic effect with the piezoelectric layer 3 having the voids 11.
  • the multilayer piezoelectric element 1 can be obtained.
  • the porous internal electrode layer 5 has lower heat conduction than the other dense internal electrode layers 5, heat can be effectively dissipated by bringing the gap 11 including the metal body 13 close thereto. As a result, a highly durable multilayer piezoelectric element 1 can be obtained.
  • the metal body 13 contained in the gap 11 is attached to the wall surface of the gap 11. According to this, since the metal body 13 can be in direct contact with the heated piezoelectric layer 3, heat can be effectively dissipated, so that a highly durable multilayer piezoelectric element 1 is obtained. Can do.
  • the piezoelectric layer 3 has a metal body 13 in which the periphery is in contact with the piezoelectric layer 3 (the metal body 13 is included in the piezoelectric layer 3). is there.
  • the multi-layer piezoelectric element 1 having high durability can be obtained by disposing the gap 11 including the dense metal body 13 at the boundary between the active layer and the inactive layer where heat is easily generated and is easily trapped. It can be.
  • the metal body 13 is made of the same material as the main component of the internal electrode layer 5, the thermal expansion can be made equal to that of the internal electrode layer 5, so that the temperature of the multilayer piezoelectric element 1 changes rapidly. Even when used in a harsh environment, the generation of stress due to thermal expansion can be prevented, so that the multilayer piezoelectric element 1 can be used stably over a long period of time. Further, the thermal stress in the piezoelectric element 1 can be evenly dispersed.
  • the metal body 13 is silver, excellent heat conduction is realized, and at the same time, since the silver is a relatively soft metal, the metal body 13 can be deformed at the same time even when the gap 11 is deformed. Thus, since the stress can be effectively absorbed, a highly durable multilayer piezoelectric element 1 can be obtained.
  • the void 11 is closed in the piezoelectric layer 3, that is, is a so-called closed pore, and functions as a damper containing gas in the piezoelectric layer 3.
  • the laminated piezoelectric element 1 that functions and has high durability can be obtained.
  • a ceramic green sheet to be the piezoelectric layer 3 is produced. Specifically, a calcined powder of piezoelectric ceramic, a binder made of an organic polymer such as acrylic or butyral, and a plasticizer are mixed to prepare a slurry. And a ceramic green sheet is produced by using this slurry for tape forming methods, such as a known doctor blade method and a calender roll method.
  • the piezoelectric ceramic may be any piezoelectric ceramic, and for example, a perovskite oxide made of PbZrO 3 —PbTiO 3 or the like can be used.
  • a plasticizer DBP (dibutyl phthalate), DOP (dioctyl phthalate), etc. can be used.
  • a conductive paste to be the internal electrode layer 5 is produced.
  • a conductive paste can be prepared by adding and mixing a binder, a plasticizer, and the like with a metal powder such as silver-palladium. This conductive paste is printed on the ceramic green sheet in a predetermined pattern using a screen printing method. Further, a plurality of ceramic green sheets on which the conductive paste is screen-printed are stacked. And the laminated body 7 provided with the piezoelectric material layer 3 and the internal electrode layer 5 which were laminated
  • the carbon powder is contained in the conductive paste, and the carbon powder disappears during firing. Or a pattern printing so as to form a dot pattern when the conductive paste is printed, or a dry ice blasting is performed after the conductive paste is printed and dried to roughen the printed surface. Further, by changing the metal component ratio between the conductive paste of the internal electrode layer 5 to be the porous internal electrode layer 5 and the conductive paste of the other internal electrode layers 5, the concentration difference is used during firing to make the porous A method in which a metal is made porous by diffusing metal from the internal electrode layer 5 to be the internal electrode layer 5 is preferable.
  • the silver concentration of the internal electrode layer 5 to be the porous internal electrode layer 5 is higher than the silver concentration of the other internal electrode layers 5, Since a liquid phase is formed and a liquid phase containing silver can easily move between the piezoelectric particles of the piezoelectric layer 3, it is preferable because a very uniform porous internal electrode layer 5 is completed.
  • a powder (which becomes the metal body 13 after firing) pulverized after printing silver or silver-palladium or the like on a carbon sheet is formed.
  • the powder is prepared and contained in a slurry for producing a ceramic green sheet to produce a ceramic green sheet for voids.
  • the ceramic green sheet for voids As a part or all of the ceramic green sheets constituting the laminate 7, the laminate 7 is formed and fired to have the voids 11 including the metal bodies 13.
  • the multilayer piezoelectric element 1 including the piezoelectric layer 3 can be obtained.
  • a conductive paste having a different silver-palladium ratio is prepared as the conductive paste to be the internal electrode layer 5, and metal diffusion is actively generated between the internal electrode layers 5 using a concentration gradient.
  • the ceramic green sheet which is the piezoelectric layer 3 where the diffusion occurs, contains carbon or excessive binder so that voids 11 are easily formed, and the metal is diffused into the piezoelectric layer 3 during firing.
  • the multilayer piezoelectric element 1 including the piezoelectric layer 3 having the gap 11 including the metal body 13 can be obtained.
  • an external electrode 9 is formed on the outer surface of the multilayer body 7 of the multilayer piezoelectric element 1 so as to obtain electrical continuity with the internal electrode layer 5 whose end is exposed.
  • the external electrode 9 can be obtained by adding a binder to silver powder and glass powder to produce a silver glass conductive paste, printing this on the side surface of the laminate 7, and drying or bonding.
  • the laminate 7 on which the external electrodes 9 are formed is immersed in a resin solution containing an exterior resin made of silicone rubber. Then, the silicone resin solution is vacuum degassed to bring the silicone resin into close contact with the concavo-convex portions on the outer peripheral side surface of the laminate 7, and then the laminate 7 is pulled up from the silicone resin solution. Thereby, a silicone resin (not shown) is coated on the side surface of the laminate 7. Then, a lead wire is connected to the external electrode 9 as a current-carrying portion with a conductive adhesive (not shown) or the like.
  • a direct current electric field of 0.1 to 3 kV / mm is applied to the piezoelectric layer 3 from the pair of external electrodes 9 via the lead wires by the internal electrode layer 5 to polarize the piezoelectric layer 3 of the laminate 7.
  • the laminated piezoelectric element 1 of this example is completed.
  • the lead wire is connected to an external voltage supply unit (not shown), and a voltage is applied to the piezoelectric layer 3 by the internal electrode layer 5 via the lead wire and the external electrode 9, whereby each piezoelectric layer 3 is It can be displaced greatly by the inverse piezoelectric effect.
  • an automobile fuel injection valve mechanism for injecting and supplying fuel to the engine.
  • FIG. 3 is a schematic cross-sectional view showing an example of an embodiment of an injection device of the present invention.
  • the injection device 21 of the present example includes a multilayer piezoelectric element 1 of the present invention represented by the example of the above embodiment inside a storage container (container) 25 having an injection gap 23 at one end. Is stored.
  • a needle valve 27 capable of opening and closing the injection gap 23 is disposed in the storage container 25, a needle valve 27 capable of opening and closing the injection gap 23 is disposed.
  • a fluid passage 29 is arranged in the ejection gap 23 so that it can communicate with the movement of the needle valve 27.
  • the fluid passage 29 is connected to an external fluid supply source, and fluid is constantly supplied at a high pressure. Therefore, when the needle valve 27 opens the injection gap 23 by driving the multilayer piezoelectric element 1, the fluid supplied to the fluid passage 29 is outside the injection gap 23 or a container adjacent to the injection gap 23, for example, an internal combustion engine. It is configured to be ejected into a fuel chamber (not shown).
  • the upper end portion of the needle valve 27 has a large inner diameter, and a cylinder 31 formed in the storage container 25 and a slidable piston 33 are disposed in that portion.
  • the multilayer piezoelectric element 1 of the present invention is stored in the storage container 25.
  • the fluid ejection operation includes applying a voltage to the multilayer piezoelectric element 1 to open the fluid passage 29 to discharge the fluid from the ejection gap 23, and closing the voltage passage to close the fluid passage 29. Thus, the discharge of the fluid may be stopped.
  • the ejection device 21 of the present invention includes a container (storage container) 25 having an ejection gap 23 and the multilayer piezoelectric element 1 of the present invention, and the fluid filled in the container 25 is used as the multilayer piezoelectric element 1.
  • the fluid is not only supplied to the ejection gap 23 through the fluid passage 29 but also provided with a portion for temporarily storing the fluid at an appropriate location in the container 25 so that the fluid filled in the container 25 can be stored. You may make it discharge from the ejection space
  • the fluid includes various liquid materials (such as conductive paste) and gas in addition to fuel or ink.
  • the ejection device 21 By using the ejection device 21 for these fluids, the flow rate and ejection timing of the fluid can be controlled.
  • FIG. 4 is a schematic diagram showing an example of an embodiment of the fuel injection system of the present invention.
  • the fluid ejection system 41 of the present example includes a common rail 43 that stores high-pressure fluid, a plurality of injection devices 21 according to the present invention that inject the fluid stored in the common rail 43, and a high pressure applied to the common rail 43.
  • a pressure pump 45 that supplies fluid and an injection control unit 47 that supplies a drive signal to the injection device 21 are provided.
  • the ejection control unit 47 controls the amount and timing of fluid ejection based on external information or an external signal. For example, in the case of the injection control unit 47 used for fuel injection of the engine, the amount and timing of fuel injection can be controlled while sensing the condition in the combustion chamber of the engine with a sensor or the like.
  • the pressure pump 45 plays a role of feeding fluid fuel from the fluid tank 49 to the common rail 43 at a high pressure.
  • fluid is fed into the common rail 43 at a pressure of about 1000 to 2000 atmospheres, preferably about 1500 to 1700 atmospheres.
  • the fluid fuel sent from the pressure pump 45 is stored, and is appropriately sent to the injection device 21 according to the driving of the multilayer piezoelectric element 1.
  • the injection device 21 discharges (injects) a predetermined amount of fluid from the injection gap 23 to the outside of the injection gap 23 or a container adjacent to the injection gap 23 as described above.
  • fuel which is a fluid, is injected into the combustion chamber in a mist form.
  • this invention is not limited to the example of said embodiment, A various change may be performed within the range which does not deviate from the summary of this invention.
  • the present invention relates to a multilayer piezoelectric element, an injection device, and a fuel injection system, but is not limited to the example of the above embodiment, for example, a printing device of an inkjet printer, a pressure sensor, etc.
  • a multilayer piezoelectric element utilizing piezoelectric characteristics can be implemented with the same configuration.
  • An example of the multilayer piezoelectric element of the present invention was produced as follows.
  • a slurry in which a binder and a plasticizer are mixed with a raw material powder mainly composed of lead zirconate titanate (PZT) powder having an average particle size of 0.4 ⁇ m is prepared, and a ceramic green sheet A having a thickness of 150 ⁇ m is obtained by a doctor blade method.
  • PZT lead zirconate titanate
  • the conductive paste A was printed on one side of the ceramic green sheet A with a pattern of the internal electrode layer 5 so as to have a thickness of 30 ⁇ m by screen printing. And each green ceramic sheet A on which conductive paste A was printed was laminated to produce a green laminate.
  • the internal electrode layers 5 are stacked so that the number of layers is 300, and only the ceramic green sheets A on which the conductive paste A is not printed are provided at both ends in the stacking direction of the green laminate. Each sample was laminated to give sample number 1.
  • the internal electrode layer 5 positioned at the 50th and 250th positions in the stacking direction is printed using the conductive paste B, and the sheet that becomes the piezoelectric layer 3 at the position where the conductive paste B is sandwiched.
  • a ceramic green sheet B was used.
  • the internal electrode layers 5 positioned at the 100th and 200th positions in the stacking direction are printed using the conductive paste B, and in the sample number 4, the 50th, 100th, The internal electrode layers 5 located at the 150th, 200th and 250th positions were printed using the conductive paste B.
  • the internal electrode layers 5 positioned at the 50th, 100th, 150th, 200th and 250th positions in the stacking direction are printed using the conductive paste B, and the conductive paste B is sandwiched between them.
  • the ceramic green sheet B was used for the sheet to be the piezoelectric layer 3 and the sheet to be the adjacent (upper and lower) piezoelectric layers 3.
  • the raw laminate of each sample number was subjected to a binder removal treatment at a predetermined temperature, and then fired at 800 to 1000 ° C. to obtain a laminate 7.
  • the external electrode 9 was formed, respectively.
  • a conductive paste for the external electrode 9 was prepared by adding and mixing a binder, a plasticizer, a glass powder and the like to a metal powder containing silver as a main component. This conductive paste was printed on the side surface of the laminate 7 where the external electrodes 9 are to be formed by screen printing or the like. Thereafter, the external electrode 9 was formed by baking at 600 to 800 ° C.
  • the drive evaluation was performed using each sample thus prepared. As drive evaluation, high-speed response evaluation and durability evaluation were performed. First, a lead wire is connected to the external electrode 9, a 3 kV / mm DC electric field is applied to the piezoelectric layer 3 from the positive electrode and the negative external electrode 9 via the lead wire for 15 minutes, and polarization treatment is performed. A piezoelectric actuator using the element 1 was produced. A DC voltage of 170 V was applied to the obtained piezoelectric actuator, and the amount of displacement in the initial state was measured.
  • the multilayer piezoelectric element was cut and observed with a microscope.
  • the voids and the metal bodies contained in the voids were included in the piezoelectric layer. And found. In Table 1, these are indicated as “Yes” in the column of voids (voids) containing a metal body.
  • the metal particles are slightly peeled off from the adjacent piezoelectric layer in the region close to the voids. It was.
  • the initial displacement was 38 ⁇ m, which was relatively small compared to Sample Nos. 2 to 4 of 40 ⁇ m. This is because, in the internal electrode layer, there were many voids in the porous internal electrode layer containing a large number of independent metal particles to improve durability, and the voids in this internal electrode layer absorbed the displacement of the laminate. As mentioned.
  • FIG. 2 is a cross-sectional view of a main part including internal electrodes adjacent to each other in a direction perpendicular to the stacking direction of piezoelectric elements in the example illustrated in FIG. It is a schematic sectional drawing which shows the example of embodiment of the injection apparatus of this invention. It is the schematic which shows the example of embodiment of the fuel-injection system of this invention.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Combustion & Propulsion (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Fuel-Injection Apparatus (AREA)

Abstract

Il est nécessaire que des éléments piézoélectriques multicouches aient une durabilité supérieure. Cependant, de manière classique, si un élément piézoélectrique multicouche est déplacé de manière importante ou entraîné à haute vitesse, l'élément ne peut pas absorber la contrainte, ce qui a pour conséquence d'augmenter l'échauffement spontané dû à l'entraînement et provoquer des craquelures. Ceci provoque un problème selon lequel l'élément piézoélectrique multicouche ne peut pas être entraîné de façon stable. Un élément piézoélectrique multicouche (1) a une structure multicouche dans laquelle des couches piézoélectriques (3) et des couches d'électrode internes (5) sont formées de façon alternée, et la couche piézoélectrique (3) comporte des vides (11) contenant chacun des corps métalliques (13). Les vides (11) absorbent la contrainte, et les corps métalliques (13) à l'intérieur des vides (11) peuvent améliorer la conduction de chaleur de la couche piézoélectrique (3). Par conséquent, l'élément piézoélectrique multicouche (1) a une excellente durabilité.
PCT/JP2009/061579 2008-06-30 2009-06-25 Élément piézoélectrique multicouches et appareil d'injection et système d'injection de carburant l'utilisant Ceased WO2010001800A1 (fr)

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JP2010519019A JP5334972B2 (ja) 2008-06-30 2009-06-25 積層型圧電素子、これを備えた噴射装置および燃料噴射システム

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JP2008-170207 2008-06-30
JP2008170207 2008-06-30

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WO2010001800A1 true WO2010001800A1 (fr) 2010-01-07

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Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002054526A (ja) * 2000-05-31 2002-02-20 Denso Corp インジェクタ用圧電体素子
JP2005285883A (ja) * 2004-03-29 2005-10-13 Kyocera Corp 積層型圧電素子およびその製造方法ならびにこれを用いた噴射装置
JP2007157849A (ja) * 2005-12-01 2007-06-21 Denso Corp 積層型圧電素子の製造方法
WO2008066098A1 (fr) * 2006-11-29 2008-06-05 Kyocera Corporation Elément piézoélectrique laminé, dispositif de projection fourni avec l'élément piézoélectrique laminé et système de projection de carburant
WO2008072768A1 (fr) * 2006-12-15 2008-06-19 Kyocera Corporation Élément piézoélectrique laminé, dispositif d'injection comportant l'élément piézoélectrique laminé et système d'injection de carburant

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002054526A (ja) * 2000-05-31 2002-02-20 Denso Corp インジェクタ用圧電体素子
JP2005285883A (ja) * 2004-03-29 2005-10-13 Kyocera Corp 積層型圧電素子およびその製造方法ならびにこれを用いた噴射装置
JP2007157849A (ja) * 2005-12-01 2007-06-21 Denso Corp 積層型圧電素子の製造方法
WO2008066098A1 (fr) * 2006-11-29 2008-06-05 Kyocera Corporation Elément piézoélectrique laminé, dispositif de projection fourni avec l'élément piézoélectrique laminé et système de projection de carburant
WO2008072768A1 (fr) * 2006-12-15 2008-06-19 Kyocera Corporation Élément piézoélectrique laminé, dispositif d'injection comportant l'élément piézoélectrique laminé et système d'injection de carburant

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