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WO2010059217A2 - Moteurs piézoélectriques miniatures pour fonctionnement pas à pas à ultra haute précision - Google Patents

Moteurs piézoélectriques miniatures pour fonctionnement pas à pas à ultra haute précision Download PDF

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Publication number
WO2010059217A2
WO2010059217A2 PCT/US2009/006198 US2009006198W WO2010059217A2 WO 2010059217 A2 WO2010059217 A2 WO 2010059217A2 US 2009006198 W US2009006198 W US 2009006198W WO 2010059217 A2 WO2010059217 A2 WO 2010059217A2
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WIPO (PCT)
Prior art keywords
annular
teethed
motor
rotor
piezoelectric material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2009/006198
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English (en)
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WO2010059217A3 (fr
Inventor
Bruce C. Sun
Tzong-Shii Pan
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Ceradigm Corp
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Ceradigm Corp
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Filing date
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Application filed by Ceradigm Corp filed Critical Ceradigm Corp
Publication of WO2010059217A2 publication Critical patent/WO2010059217A2/fr
Publication of WO2010059217A3 publication Critical patent/WO2010059217A3/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/103—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors by pressing one or more vibrators against the rotor
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0005—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing non-specific motion; Details common to machines covered by H02N2/02 - H02N2/16
    • H02N2/001—Driving devices, e.g. vibrators
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/0095—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing combined linear and rotary motion, e.g. multi-direction positioners

Definitions

  • the present invention relates to the field of electrical motors and motor technology as well as camera lenses and actuation mechanisms that move and/or rotate camera lenses.
  • a stator surrounds a rotor and through deformation of the stator, it engages with the rotor in order to drive it.
  • Both rotational and linear versions of such motors are known, however the rotational version is especially useful for positioning the lens in a miniature camera (for autofocus, zoom, or both), since the rotor can have a hollow center in which a lens can be carried, a light path being established axially through the lens and motor assembly.
  • a miniature lens and motor assembly may find application in a number of consumer electronic devices, including smart phones, PDAs, and notebook computers in addition to the obvious application of digital cameras. Since these are all devices that are used in close contact with people, it is important that the motor not make annoying noises as it operates. [0006] It is also important that a miniature motor utilize as little space as possible. The circuitry that drives the motor should be compact and efficient, requiring as little input power as possible over that which is required to actually drive the motor. In this regard, it is useful if the voltage level required to properly drive the PZT elements on the motor is as low as possible. [0007] Additionally, a miniature motor should have a low manufacturing cost and be easy to assemble - especially in very high volume applications. Prior art rotary piezoelectric motors utilize curved PZT elements which are difficult to construct, difficult to attach, and have a reputation for less than desired reliability due to the fragile nature of the curved PZT.
  • a miniature electric motor uses the stresses induced in an annular shaped teethed structure by the flat PZT pads attached thereto in order to deform the teethed structure which is comprised of a resilient material.
  • teeth protruding inward from the teethed structure intermittently contact a cylindrical center piece and move the cylindrical center piece or the teethed structure by very small increments, enabling positioning the rotated structure with a fine degree of accuracy.
  • a motor per the present invention will normally be driven at its resonant frequency where a maximum amount of deformity can be achieved with a minimum amount of voltage/energy applied to the PZT pads.
  • the resonant frequency for an annular teethed structure depends on a number of variables including the material it comprises, the cross-sectional thickness of the teethed structure, and the shape of the teethed structure.
  • the shape of the teethed structure has been modified by introducing a plurality of flat facets that serve two purposes. First, they provide locations to apply flat PZT pads - a solution that is far more cost effective and reliable than attempting to apply curved PZT elements to a teethed structure. Second, the number and shape of the facets can be altered along with the thickness of the teethed structure in order to vary the resonant frequency of the teethed structure.
  • Some of the applications for such a miniature motor include handheld devices such as cell phones and digital cameras where the motor positions a lens for the purpose of auto focus, zoom, or both. Since these devices are used by people, it is important that the operation of the motor is silent with an operational sonic frequency that is always greater than 20KHz - the generally agreed upon limit of human hearing. A motor whose resonant frequency is in the audible range of human hearing would be quite annoying and in the end, would not be a commercial success.
  • One aspect of the present invention is to provide a miniature piezoelectric motor that has facets on the outer surface of the teethed structure with flat PZT pads attached to each facet.
  • the inner surface of the teethed structure may be either curved or faceted, except where a plurality of protrusions emanate inward for the teethed structure toward its center.
  • An alternate embodiment provides for a smaller number of flat facets where attached to each facet is a PZT pad comprising dual electrode co-planer segments that are polarized similarly.
  • Another aspect of the present invention is to provide a miniature piezoelectric motor that has facets on the inner surface of the teethed structure with flat PZT pads attached to each facet.
  • the teethed structure On the inner surface of the teethed structure, there are also a plurality of protrusions that emanate inward from the teethed structure toward the center of the teethed structure, with the PZT pads attached between protrusions. Placing the PZT pads on the inner surface has the added advantage of making the overall dimensions of the motor smaller since the PZT pads reside in the spaces between protrusions that would otherwise have been wasted space.
  • the outer surface of the teethed structure for this embodiment may be either curved or faceted.
  • An alternate embodiment provides for a smaller number of flat facets where attached to each facet is a PZT pad comprising dual-electrode co-planer segments that are polarized similarly.
  • Another aspect of the present invention is to provide a miniature piezoelectric motor that has facets on both the inner and outer circumferential surfaces of the teethed structure with flat PZT pads attached to each facet.
  • Another aspect of the present invention is to provide a miniature piezoelectric motor that may be driven by either standing or traveling wave methodologies.
  • Another aspect of the present invention is to provide high precision stepping whereby the rotated structure is positioned in very small dimensional increments.
  • Another aspect of the present invention is that the rotated structure is inherently held in position when voltages are not applied to the PZT elements.
  • Figure 1 shows a prior art PZT motor with curved PZT elements.
  • Figure 2 shows the PKl embodiment of the present invention describing an annular or cylindrical Teethed Structure (TS) to which plurality of PZT elements of proper polarities may be later attached.
  • TS Teethed Structure
  • Figure 3 shows the PKl embodiment including an annular teethed structure with eight single-electrode PZT flat elements or pads attached to facets.
  • Figure 4 shows the a cylindrical threaded center piece (TCP) structure that fits inside a teethed structure such as in the PKl embodiment shown in Figure 3.
  • TCP cylindrical threaded center piece
  • Figure 5 shows the components of a miniature piezoelectric motor embodiment
  • Figure 6 shows the deformation of a teethed structure with PZT pads attached, and how it is electrically driven with a standing wave methodology in order to cause rotation in a first direction.
  • Figure 7 shows the deformation of a teethed structure with PZT pads attached, and how it is electrically driven with a standing wave methodology in order to cause rotation in a second direction.
  • Figure 8 shows the deformation of a teethed structure with PZT pads attached, and how it is electrically driven with a traveling wave methodology.
  • Figure 9 shows the PKl_f embodiment of an annular teethed structure with both its outer circumferential surface and inner circumferential surface cut in flat facets.
  • Figure 10 shows the PKl_f teethed structure where eight single-electrode PZT elements/pads have been attached to facets on the exterior circumferential surface.
  • Figure 11 shows the PKl_f embodiment of a miniature piezoelectric motor.
  • Figure 12 shows the PK2 embodiment of a teethed structure having 4 facets on the external circumferential surface and four co-planar dual-electrode PZT elements forming an 8-pole deformation structure.
  • Figure 13 shows a miniature piezoelectric motor embodiment, PK2, based on the
  • Figure 14 shows an embodiment of the PK2_f-teethed structure having four facets and four dual-electrode PZT elements forming an 8-pole deformation structure.
  • Figure 15 shows a miniature piezoelectric motor embodiment, PK2_f, based on the TS/PZT embodiment shown in Figure 14.
  • Figure 16 shows the CKl embodiment of an annular teethed structure with its outer circumferential surface in circular finish and inner circumferential surface cut in flat facets to which a plurality of PZT elements or pads of proper polarities may be attached to form a structure for deformation when driven by the proper control signal of certain amplitude and frequency.
  • Figure 17 shows the teethed structure of the CKl embodiment as in Figure 16 with eight single-electrode PZT elements attached to the facets on the inner circumferential surface of the teethed structure forming an 8-pole deformation structure.
  • Figure 18 shows a miniature piezoelectric motor embodiment, CKl, based on the
  • Figure 19 shows the CKl_f embodiment of a teethed structure and eight single- electrode PZT elements 1902 forming an 8-pole deformation structure.
  • both the outer circumferential surface and inner circumferential surface of the teethed structure are faceted.
  • Figure 20 shows a miniature piezoelectric motor embodiment, CKl_f, based on the TS/PZT embodiment shown in Figure 19.
  • Figure 21 shows the CK2 embodiment of a teethed structure where four dual- electrode PZT co-planar elements are attached on the inner circumferential surface of the annular teethed structure thereby forming an 8-pole deformation structure.
  • Figure 22 shows a miniature piezoelectric motor embodiment, CK2, based on the
  • Figure 23 shows the CK2_f embodiment of a teethed structure where four dual- electrode coplanar PZT elements are attached on the inner circumferential surface of the annular teethed structure thereby forming an 8-pole deformation structure.
  • both the inner circumferential surface and outer circumferential surface of the annular teethed structure are faceted.
  • Figure 24 shows a miniature piezoelectric motor embodiment, CK2_f, based on the TS/PZT embodiment shown in Figure 23.
  • Figure 25 shows eight embodiments of an annular teethed structure and attached
  • PZT elements as previously described in figures 3, 10, 12, 14, 17, 19, 21, and 23. Under the image for each embodiment is shown the resonant frequency for that embodiment as determined by finite element analysis and simulation.
  • Figure 26 shows the PCKl embodiment of an annular teethed structure 2601 where both the inner and outer circumferential surfaces of the annular teethed structure are faceted.
  • Figure 27 shows a miniature piezoelectric motor embodiment, PCKl, based on the TS/PZT embodiment shown in Figure 26.
  • Figure 28 shows the mounting of a PKl Type 1 miniature piezoelectric motor using a mounting bracket.
  • Figure 29 shows a PKl Type 1 miniature piezoelectric motor with hard stop tabs on the Stator that determine the limit of travel for the rotor.
  • Figure 30 shows the mounting of a PKl Type 2 miniature piezoelectric motor using a mounting disk which also acts as the hard stop for the rotor.
  • Embodiments described as being implemented in software should not be limited thereto, but can include embodiments implemented in hardware, or combinations of software and hardware, and vice- versa, as will be apparent to those skilled in the art, unless otherwise specified herein.
  • an embodiment showing a singular component should not be considered limiting; rather, the invention is intended to encompass other embodiments including a plurality of the same component, and vice- versa, unless explicitly stated otherwise herein.
  • the present invention encompasses present and future known equivalents to the known components referred to herein by way of illustration.
  • the invention described herein is generally directed to a rotary motor driven by a piezoelectric means utilizing electronically actuated (PZT - Lead [Pb] Zirconate Titanate) material, or equivalents thereof such as BaTiO 3 or crystals.
  • PZT - Lead [Pb] Zirconate Titanate electronically actuated
  • the embodiments shown herein comprise an outer structure of annular shape having teeth shaped protrusions emanating inward from its inner circumferential surface towards its axial center.
  • This annular teethed structure comprises a resilient material such as stainless steel, aluminum, ceramic or polymer and typically has a conductive surface on one or more of its circumferential surfaces. Alternately, the entire structure could be conductive for some embodiments.
  • annular teethed structure Within the annular teethed structure, and in contact with the teethed protrusions, is a cylindrical center piece structure.
  • the center piece structure and the teethed protrusions would be threaded.
  • these structures would not be threaded.
  • the difference between these threaded and non-threaded alternatives relates to whether or not rotary motion will be converted to linear motion by way of the action of threaded surfaces. While it may be preferable that the annular teethed structure implement a stator in many applications, the design of the present invention provides that either of the teethed structure or the cylindrical center piece structure may implement a stator.
  • the cylindrical center piece structure may be held stationary thus implementing a stator, while the annular teethed structure is allowed to rotate when the PZT elements are electrically actuated.
  • some form of electrical commutation would need to be provided to allow electrical connectivity to the annular teethed structure as it rotates.
  • Such commutation mechanisms are well known in the art.
  • flat pads of PZT material are placed at different locations around a circumferential surface of the teethed structure. This could include the inner circumferential surface, the outer circumferential surface, or both.
  • PZT pads make electrical contact with the conductive surface of the teethed structure, and the exposed surface of a PZT pad contains one or more electrodes attached to it as will be demonstrated. Electrical connections are made from one or more driving voltage sources to these electrodes such that when electrical power waveforms are applied to different PZT pads, these PZT pads deform causing the annular teethed structure to deform.
  • the deformation causes the circular shape of the annular teethed structure to change to an elliptical shape. In doing so, some of the teethed protrusions are caused to withdraw from contact with the cylindrical centerpiece while other teethed protrusions continue to make contact with the cylindrical center piece and due to the elliptical deformation, cause a tangential force to be imparted.
  • whichever structure is acting as a rotor for a particular motor configuration (cylindrical centerpiece or annular teethed structure) will rotate.
  • the embodiments shown here vary as to the shape of the annular teethed structure, including the addition of faceted flat surfaces to that structure.
  • the embodiments also vary as to the number of flat facets, the number of pads of PZT material and the locations to which these pads are attached, and the configuration of a particular PZT material pad.
  • the various embodiments described herein make the motor design flexible to achieve: Optimal size and dimension for applications, e.g. lens actuation for AF & Zoom; Resonant frequency beyond the audible range (>20KHz); and Low peak-to-peak voltage of the drive signal.
  • Figure 1 shows a prior art PZT motor with curved PZT elements.
  • a teethed structure is shown implementing a stator 101 with curved or ring shaped PZT material 102 applied to the outer circumferential surface. Curved electrodes 103 are then applied to the curved PZT material. While functional, this configuration has been shown to be difficult to manufacture. Creating curved PZT material is difficult and applying it to a curved surface is also difficult. Similarly applying a curved electrode is difficult and the resulting structures are generally seen as fragile compared with structures where flat PZT material is applied to flat surfaces. This curved PZT structure has also been shown to have a lower resonant frequency than the structures shown in the embodiments contained herein for the present invention.
  • Controlling the resonant frequency is critically important for applications where the motor will be used within hearing distance of people.
  • a resonant frequency less than 20 kHz can create an audible distraction that is not acceptable.
  • the resonance for this prior art structure is estimated at 22.2KHz by means of finite element analysis and simulation. Any significant variation on this frequency could place it below 20KHz and in the audible range - an eventuality that is unacceptable for applications like cell phone cameras where the sound would be annoying to many individuals.
  • Figure 2 shows the PKl embodiment of the present invention describing an annular or cylindrical Teethed Structure (TS) to which a plurality of Piezoelectric Ceramic PZT elements of proper polarities may be later attached.
  • the resulting structure deforms when driven by the proper control signal of certain amplitude and frequency.
  • this teethed structure has its outer circumferential surface 202 cut in flat facets and inner surface 203 in circular or curved finish. Note that the teethed protrusions 204 in Figure 2 are threaded.
  • Potential embodiments may not require these teeth 204 to be threaded, and when threaded, the threads may be either angled or straight depending upon whether the purpose is to simply rotate the cylindrical center piece (shown later) or both rotate and axially move the cylindrical center piece in order to affect linear motion of the center piece.
  • suspension or mounting points 205 located between flat facets on the outer circumferential surface of structure 201. These may be simply mounting tabs, or alternately may be spring-like structures as shown in figure 2. These spring-like structures may be molded or machined as part of structure 201, or alternately may be fabricated separately and attached to structure 201.
  • structure 201 is comprised of a resilient material such as stainless steel, aluminum, ceramic or polymer, is about 6mm to 7mm in outer diameter, about 2mm high, and has a thickness between inner and outer walls of about 0.5mm.
  • a resilient material such as stainless steel, aluminum, ceramic or polymer
  • Figure 3 shows the PKl embodiment including annular teethed structure 301 as previously shown in Figure 2, with eight single-electrode PZT flat elements or pads 302 attached to the facets on the outer surface forming an 8-pole deformation structure. Note the polarity of the different PZT pads, where half of the pads have a positive polarity and the other half have a negative polarity.
  • FIG 4 shows the a cylindrical threaded center piece (TCP) structure 401 intended to fit inside a teethed structure such as for the PKl embodiment shown in Figure 3.
  • the cylindrical center piece is threaded 402 although in some applications it may not be threaded.
  • the threads may be either flat or angled depending upon the purpose of this cylindrical centerpiece in a particular embodiment, hi embodiments, structure 401, as well as similar structures described below, is comprised of any solid material with a smooth surface finish, is about 5mm to 6mm in diameter, about 2mm to 15mm high, and has a thickness between inner and outer walls of about 0.4mm.
  • Figure 5 shows the components of a miniature piezoelectric motor embodiment
  • FIG. 5 shows the deformation of teethed structure 601, similar to the one shown in Figure 3, with its poles (poles 1,3,5,7) driven by an appropriate signal 602 of proper amplitude and with a frequency matching a resonant frequency of teethed structure 601. Teethed structure 601, or the outer conductive circumferential surface thereof, is tied to ground 603.
  • the scheme of holding the TS/PZT structure stable to rotate the TCP results in a motor, which will be called a Type 1 motor.
  • the scheme of holding the TCP stable to rotate the TS/PZT structure results in a motor, which will be called a Type 2 motor.
  • the piezoelectric motors driven as described in this drawing are normally referred to as Standing Wave PZT Motors. Those skilled in the piezoelectric motor arts will recognize various possible driving circuit and voltage source implementations for realizing the signals and schemes showed in Figure 6, as well as in similar embodiments, and so even more details thereof in addition to those provided herein will be omitted for sake of clarity of the invention.
  • Figure 7 shows the deformation of teethed (TS/PZT) structure 701, similar to the structure in Figure 3, with its poles (2,4,6,8) driven by an appropriate signal 702 of proper amplitude and with a frequency matching a resonant frequency of the TS/PZT structure 701.
  • Teethed structure 701, or the outer conductive circumferential surface thereof is tied to ground 703.
  • a TCP like the one shown in Figure 4 is fitted inside structure 701, its threads come into contact with the threads on TS/PZT structure 701.
  • a first phase 801 is connected to a first pole group (1,2,5,6) via connections 802, while the second phase 803 is connected to a second pole group (3,4,7,8) via connections 804.
  • the teethed structure 805, or the outer conductive circumferential surface thereof 806 is tied to ground 807.
  • the rotational direction control is achieved by altering the phase difference between the phases of drive signals 801 and
  • the PZT motors thus driven are normally referred to as Traveling Wave PZT Motors.
  • Figure 9 shows the PKl_f embodiment of an annular teethed structure 901 to which a plurality of PZT elements of proper polarities may be later attached to form a structure for deformation when driven by the proper control signal of certain amplitude and frequency.
  • this teethed structure has both its outer surface 902 and inner surface 903 cut in flat facets.
  • Figure 10 shows the TS/PZT embodiment of the PKl_f-teethed structure of figure
  • Figure 11 shows the PKl_f embodiment of a miniature piezoelectric motor, based on the TS/PZT embodiment shown in Figure 10.
  • the basic teethed structure 1101 has flat PZT pads 1102 attached to form structure 1103.
  • the resulting assembly 1105 is as shown.
  • Figure 12 shows the PK2 embodiment of a teethed structure 1201 having 4 facets on the external circumferential surface and four co-planar dual-electrode PZT elements 1202 forming an 8-pole deformation structure.
  • each element has the same polarization.
  • the PZT material for a co-planar pair may be one continuous PZT piece. Only the electrodes are separate, enabling each segment to be driven at a different point in time, thus causing an asymmetry of forces applied to the annular teethed structure and producing an elliptical deformation similar to that shown in figures 6 and 7.
  • PK2 embodiment is driven in the same manner as shown in figures 6 and 7.
  • Figure 13 shows a miniature piezoelectric motor embodiment, PK2, based on the
  • the basic teethed structure 1301 has flat dual electrode co-planar pairs of PZT pads 1302 attached to form structure 1303.
  • a cylindrical center piece 1304 in this instance a threaded center piece
  • the resulting assembly 1305 is as shown.
  • Figure 14 shows an embodiment of the PK2_f teethed structure 1401 having four facets and four dual-electrode PZT elements 1402 forming an 8-pole deformation structure.
  • PK2_f embodiment of figure 14 is similar to the PK2 embodiment of figure 13, except that PK2_f embodiment also has four flat facets 1403 on the inner circumferential surface of teethed structure 1401.
  • Figure 15 shows a miniature piezoelectric motor embodiment, PK2_f, based on the TS/PZT embodiment shown in Figure 14.
  • the basic teethed structure 1501 has flat PZT pads
  • Figure 16 shows the CKl embodiment of an annular teethed structure 1601 to which a plurality of PZT elements or pads of proper polarities may be attached to form a structure for deformation when driven by the proper control signal of certain amplitude and frequency.
  • this teethed structure has its outer circumferential surface 1602 in circular finish and inner circumferential surface 1603 cut in flat facets 1604.
  • Placing the PZT pads on inner surface 1603 has the added advantage of making the overall dimensions of the motor smaller since the PZT pads reside in the spaces between teethed protrusions 1605 that would otherwise have been wasted space.
  • Positioning the PZT pads on the inner surface also offers protection for the PZT elements after they are attached during the handling and final assembly process for the motor.
  • Figure 17 shows the teethed structure 1701 of the CKl embodiment as in Figure
  • Figure 18 shows a miniature piezoelectric motor embodiment, CKl, based on the
  • the basic teethed structure 1801 has flat PZT pads
  • Figure 19 shows the CKl_f embodiment 1901 of a teethed structure and eight single-electrode PZT elements 1902 forming an 8-pole deformation structure.
  • both the outer circumferential surface 1903 and inner circumferential surface 1904 of the teethed structure are faceted.
  • Figure 20 shows the miniature piezoelectric motor embodiment, CKl_f, based on the TS/PZT embodiment shown in Figure 19.
  • the basic teethed structure 2001 has flat PZT pads 2002 attached to form structure 2003.
  • a cylindrical center piece 2004 in this instance a threaded center piece
  • the resulting assembly 2005 is as shown.
  • Figure 21 shows the CK2 embodiment of a teethed structure 2101 where four dual-electrode co-planar PZT elements 1202 are attached on the inner circumferential surface of the annular teethed structure thereby forming an 8-pole deformation structure.
  • Figure 22 shows the miniature piezoelectric motor embodiment CK2, based on the TS/PZT embodiment shown in Figure 21.
  • the basic teethed structure 2201 has flat dual electrode coplanar pairs of PZT pads 2202 attached to facets on the inner circumferential surface to form structure 2203.
  • a cylindrical center piece 2204 in this instance a threaded center piece
  • the resulting assembly 2205 is as shown.
  • Figure 23 shows the CK2_f embodiment of a teethed structure 2301 where four dual-electrode coplanar PZT elements 2302 are attached on the inner circumferential surface of the annular teethed structure 2301 thereby forming an 8-pole deformation structure.
  • both the inner circumferential surface 2303 and outer circumferential surface 2304 of the annular teethed structure are faceted.
  • Figure 24 shows one miniature piezoelectric motor embodiment, CK2_f, based on the TS/PZT embodiment shown in Figure 23.
  • the basic teethed structure 2401 has flat coplanar dual-electrode PZT pads 2402 attached to form structure 2403.
  • a cylindrical center piece 2404 in this instance a threaded center piece
  • Figure 25 shows eight embodiments of an annular teethed structure with attached
  • PZT elements as previously described in figures 3, 10, 12, 14, 17, 19, 21, and 23.
  • the differences between these structures with regard to number and placement of facets, as well as configuration of PZT pads enables various design optimizations for dimensions, resonant frequency, and drive signal voltage.
  • the resonant frequency 2501 for that embodiment is shown under the image for each embodiment in figure 25 as shown the resonant frequency 2501 for that embodiment as determined by finite element analysis and simulation.
  • the calculated resonant frequencies for the structures shown in figure 25 are:
  • Figure 26 shows the PCKl embodiment of an annular teethed structure 2601 where both the inner and outer circumferential surfaces of the annular teethed structure are faceted.
  • PZT pads are attached to facets on both sides of teethed structure 2601.
  • the PZT pad 2602 on the outer circumferential surface will have the same polarity as the corresponding PZT pad 2603 on the inner circumferential surface. This provides the ability for both PZT pads on a particular facet to work in unison while being driven simultaneously in order to affect a larger stretching or shrinking of the teethed structure material for that facet than a single PZT pad alone could have accomplished.
  • Figure 27 shows one miniature piezoelectric motor embodiment, PCKl, based on the TS/PZT embodiment shown in Figure 26.
  • the basic teethed structure 2701 has flat PZT pads 2702 added on each facet of teethed structure 2701.
  • cylindrical center piece 2703 in this instance a threaded center piece
  • the resulting motor assembly 2704 is as shown.
  • the PCK2 embodiment (not shown) represents a variation on the structures shown in figures 26 and 27, and is created by reducing the number of facets from eight to four, and utilizing flat coplanar dual-electrode PZT pads attached to each facet both on the inner and outer circumferential surfaces of the teethed structure, in a manner similar to figures 14 and 23.
  • Figure 28 shows the mounting of a PKl Type 1 miniature piezoelectric motor using a mounting bracket 2801, which could have fins or a flange (not shown) to act as the hard stop for the rotor (TCP) 2802. Also included is a clamping ring 2803 which contains the motor assembly by holding it against mounting bracket 2801.
  • FIG. 28 shows how camera lens 2804 fitted to rotor 2802 can be actuated in the axial direction to achieve auto-focus.
  • teethed structure 2805 is held stationary (as a stator) by mounting tabs 2806 while rotor 2802 is allowed to rotate.
  • Spiral threads on rotor 2802 provide linear movement as it rotates thereby moving camera lens 2804 axially to affect the autofocus function.
  • Hard stop tabs 2807 shown here are implemented as extended teeth on the stator. These may alternately be implemented as hard stop tabs attached to mounting bracket 2801.
  • Figure 29 shows a PKl Type 1 miniature piezoelectric motor with hard stop tabs
  • Figure 30 shows the mounting of a PKl Type 2 miniature piezoelectric motor using a mounting disk 3001, which also acts as the hard stop for rotor 3002, which for a type 2 motor is a teethed structure. An enclosure 3003 for the motor is also shown. Figure 30 also shows how a camera lens 3004 fitted on rotor 3002 can be actuated to achieve auto-focus. Cylindrical threaded center piece (TCP) structure 3005 is kept stationary by attachment to mounting disk 3001 hence functioning as the stator for this Type 2 motor configuration.
  • TCP Cylindrical threaded center piece

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Abstract

On décrit un moteur piézoélectrique miniature où, dans un mode de réalisation, des protubérances dentées, s’étendant vers l’intérieur à partir d’un stator de forme annulaire, interagissent avec un rotor tandis que le stator se déforme en réponse à des contraintes appliquées au stator par des palettes de PZT fixées à celui-ci. Les palettes de PZT sont excitées par des formes d’ondes en tension selon un procédé à ondes stationnaires ou progressives, chaque déformation du stator appliquant une force tangentielle au rotor via une pluralité de protubérances dentées, déplaçant ainsi le rotor d’une petite quantité. On fait appel à des palettes plates de PZT fixées à des facettes plates sur des surfaces conductrices du stator afin d’accroître l’aptitude à la fabrication et de réduire le coût. La configuration des facettes accorde la fréquence résonante du stator de façon à s’assurer que le moteur fonctionne dans la gamme ultrasonique, et accorde également le niveau de tension du signal d’excitation requis. La disposition des éléments de PZT sur la surface circonférentielle intérieure optimise davantage l’encombrement global du moteur.
PCT/US2009/006198 2008-11-21 2009-11-20 Moteurs piézoélectriques miniatures pour fonctionnement pas à pas à ultra haute précision Ceased WO2010059217A2 (fr)

Applications Claiming Priority (4)

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US19994508P 2008-11-21 2008-11-21
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CN104079205A (zh) * 2014-07-18 2014-10-01 环一军 多振片式驻波型超声波电机

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JP5835212B2 (ja) * 2010-03-31 2015-12-24 株式会社ニコン モータ装置、モータ装置の製造方法及びロボット装置
CN103607136B (zh) * 2013-11-21 2016-04-20 河北大学 弯扭型压电超声电机
DE102013226418B3 (de) * 2013-12-18 2015-04-02 Physik Instrumente (Pi) Gmbh & Co. Kg Ultraschallmotor
CN107947631B (zh) * 2017-11-27 2024-02-09 中国工程物理研究院电子工程研究所 一种mems行波型微马达结构
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CN103888018A (zh) * 2012-12-20 2014-06-25 江苏三江电器集团有限公司 多振片式驻波型超声波电机
CN103888018B (zh) * 2012-12-20 2016-10-12 江苏三江电器集团有限公司 多振片式驻波型超声波电机
CN104079205A (zh) * 2014-07-18 2014-10-01 环一军 多振片式驻波型超声波电机

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