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WO2010053229A1 - Procédé et système de mesure d’erreur de mouvement dans un étage linéaire de précision - Google Patents

Procédé et système de mesure d’erreur de mouvement dans un étage linéaire de précision Download PDF

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Publication number
WO2010053229A1
WO2010053229A1 PCT/KR2009/000415 KR2009000415W WO2010053229A1 WO 2010053229 A1 WO2010053229 A1 WO 2010053229A1 KR 2009000415 W KR2009000415 W KR 2009000415W WO 2010053229 A1 WO2010053229 A1 WO 2010053229A1
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WIPO (PCT)
Prior art keywords
error
measuring
axis
sensor
measurement value
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Ceased
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PCT/KR2009/000415
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English (en)
Inventor
Changsoo Han
Dongik Shin
Weijun Wang
Yunggi Lee
Indong Kim
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Industry University Cooperation Foundation IUCF HYU
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Industry University Cooperation Foundation IUCF HYU
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0002—Arrangements for supporting, fixing or guiding the measuring instrument or the object to be measured
    • G01B5/0004—Supports
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
    • G01D11/30—Supports specially adapted for an instrument; Supports specially adapted for a set of instruments
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
    • G01D5/24—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance
    • G01D5/241—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying capacitance by relative movement of capacitor electrodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant
    • G01R27/26—Measuring inductance or capacitance; Measuring quality factor, e.g. by using the resonance method; Measuring loss factor; Measuring dielectric constants ; Measuring impedance or related variables
    • G01R27/2605—Measuring capacitance
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices

Definitions

  • the present invention relates to a method of measuring an error in a linear stage that moves along a straight line, and more particularly to a method of indirectly measuring an error through various measurement values.
  • Fig. 12 shows errors in the linear stage.
  • a motion direction of a movable unit 800 is in an x-axis in a state that the linear stage moves along a linear guide 810
  • the linear stage undergoes a translational motion error, such as a horizontal motion error (e h ) that occurs in a y-axis direction and a vertical motion error (e v ) that occurs in a z-axis direction, a roll error based on rotational motions in the x-axis, y-axis and z-axis, a pitch error, and a yaw error.
  • the laser interferometer and the autocollimator are very expensive, thereby providing an economic burden when installing both of them.
  • the present invention is conceived to solve the problems as described above, and an aspect of the present invention is to provide a method of indirectly measuring an error of a linear stage with measurement values obtained from a single measurement system.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: obtaining measurement values represented by vector sums of components including some components of the errors in various directions with a sensor; and calculating values of the errors using the obtained measurement values.
  • the sensor may include an electrostatic capacity sensor.
  • the method may further include determining accuracy of error measurement by comparing the same kind of error values obtained by different processes among the calculated values of the errors after calculating the values of the errors.
  • a basic principle of indirectly measuring the error is based on a relationship between distance measurement values that have the same error components but differ in measuring direction.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: obtaining a first measurement value represented by a sum of components including the vertical motion error, the roll error, and a shape error on a measuring surface; obtaining a second measurement value and a third measurement value each represented by a sum of components including the vertical motion error, the roll error, and another shape error on the measuring surface at a position where a measuring direction for the first measurement value is reversed with respect to the y-axis or the z-axis; and calculating the vertical motion error, the roll error and the shape errors on the measuring surface based on the first to third measurement values.
  • the obtaining the measurement value by the sum of components including the vertical motion error, the roll error and the shape error on the measuring surface may include measuring a distance in the z-axis using a sensor in a state that the measuring surface of a straight ruler arranged in parallel with the x-axis is disposed to face upward or downward.
  • the sensor may include an electrostatic capacity sensor.
  • this method will be referred to as a vertical reverse method.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: obtaining a fourth measurement value represented by a sum of components including the horizontal motion error, the roll error, and a shape error on a measuring surface; obtaining a fifth measurement value represented by a sum of components including the horizontal motion error, the roll error and another shape error on the measuring surface at a position where a measuring direction for the fourth measurement value is reversed with respect to the z-axis; and calculating the shape errors on the measuring surface and the horizontal motion error based on the fourth and fifth measurement values and a separately measured roll error.
  • the obtaining the measurement value represented by the sum of components including the horizontal motion error, the roll error and the shape error on the measuring surface may include measuring a distance in the y-axis using a sensor in a state that the measuring surface of a straight ruler arranged in parallel with the x-axis is disposed to face laterally.
  • the sensor may include an electrostatic capacity sensor, and the separately measured roll error may be obtained by the vertical reverse method.
  • this method will be referred to as a horizontal reverse method.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: obtaining a first measurement value measured at a first measuring position and represented by a sum of components including the vertical motion error, the roll error, and a shape error on a measuring surface; obtaining a sixth measurement value measured at a second measuring position and represented by a sum of components including the vertical motion error and the roll error of the first measurement value, a component including the pitch error at the first measuring position, and a component including a shape error at the second measuring position on the measuring surface, the second measuring position being spaced a predetermined distance from the first measuring position in the x-axis; and calculating the pitch error based on the first and sixth measurement values and the shape errors separately measured at the
  • the obtaining the first measurement value may include measuring a distance along the z-axis with a sensor in a state that the measuring surface of a straight ruler arranged in parallel with the x-axis is disposed to face upward or downward
  • the obtaining the sixth measurement value may include measuring a distance in the z-axis with the sensor at the second measuring position spaced the predetermined distance from the first measuring axis in the x-axis in a state that the straight ruler is secured.
  • the sensor may include an electrostatic capacity sensor.
  • the separately measured shape errors at the first and second measuring positions on the measuring surface may be obtained by the vertical or horizontal reverse method. Hereinafter, this method will be referred to as a pitch error measuring method.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: obtaining a fourth measurement value represented by a sum of components including the horizontal motion error, the roll error, and a shape error on a measuring surface at a third measuring position; obtaining a seventh measurement value measured at a fourth measuring position and represented by a sum of components including the horizontal motion error and the roll error of the fourth measurement value, a component including the yaw error at the third measuring position, and a component including a shape error at the fourth measuring position on the measuring surface, the fourth measuring position being spaced a predetermined distance from the third measuring position in the x-axis; and calculating the yaw error based on the fourth and seventh measurement values and the
  • the obtaining the fourth measurement value may include measuring a distance in the y-axis with a sensor in a state that the measuring surface of a straight ruler arranged in parallel with the x-axis is disposed to face laterally, and the obtaining the seventh measurement value may include measuring a distance in the y-axis with the sensor at the fourth measuring position spaced the predetermined distance from the third measuring position in the x-axis in a state that the straight ruler is secured.
  • the sensor may include an electrostatic capacity sensor.
  • the separately measured shape errors at the third and fourth measuring positions on the measuring surface may be obtained by the vertical or horizontal reverse method. Hereinafter this method will be referred to as a yaw error measuring method.
  • a method of measuring an error in an ultra-precision linear stage that moves in a straight line along an x-axis and has a horizontal motion error of a y-axis, a vertical motion error of a z-axis, a roll error, a yaw error and a pitch error
  • the method including: calculating the vertical motion error, the roll error, and a shape error on a measuring surface using the vertical reverse method; calculating a shape error on the measuring surface, and the horizontal motion error based on the roll error calculated by the vertical reserve method, using the horizontal reverse method; calculating the pitch error based on the shape error on the measuring surface calculated by the vertical or horizontal reverse method, using the pitch error measuring method; and calculating the yaw error based on the shape error on the measuring surface calculated by the vertical or horizontal reverse method, using the yaw error measuring method.
  • the method may further include determining accuracy in error measurement by comparing the shape errors on the measuring surface obtained by the horizontal reverse method
  • a system of measuring an error in an ultra-precision linear stage including a movable unit and a stationary unit, the system including: a sensor jig including a jig column standing on the movable unit, and a jig arm hingably coupled to an upper portion of the jig column and having an end to which a sensor is rotatably coupled; an adjustment stage installed at a side of the ultra-precision linear stage and adjustable with respect to x-, y- and z-axes and a yaw; and a rotatable straight ruler installed in the adjustment stage and having a measuring surface.
  • the sensor installed in the sensor jig may include an electrostatic capacity sensor.
  • the jig arm of the sensor jig may include an arm hingably coupled to the jig column, and a sensor unit rotatably coupled to the arm, and the sensor unit may include two sensors and a single pointer which are arranged in a line.
  • the sensor unit may include a ball plunger to rotate by 90 degrees.
  • the pointer may be adjustable in a forward and rearward direction.
  • the adjustment stage may include a lower stage configured to allow adjustment in the x- and y-axes and the yaw, and an upper stage configured to allow adjustment in the z-axis.
  • the straight ruler may include a reference groove formed on the measuring surface.
  • the straight ruler may be modularized into a straight ruler module including a stationary body having a coupling portion to be coupled to the adjustment stage, and a straight body rotatably coupled to the stationary body and having a measuring surface at one side thereof. Further, the straight body may comprise a ball plunger to rotate by 90 degrees.
  • the method of indirectly measuring an error of a linear stage allows a single measurement system alone to measure any error. Accordingly, the method ensures convenient installation and operation of the measurement system, while providing a method of evaluating accuracy of a measured error. Further, according to another embodiment of the present invention, the system may be configured with only a relatively inexpensive electrostatic capacity sensor, thereby providing superior economic effects.
  • Fig. 1 is a perspective view of an error measurement system according to an embodiment of the present invention
  • Fig. 2 is a perspective view of a sensor jig
  • Fig. 3 is a perspective view of an adjustment stage
  • Fig. 4 is a perspective view of a straight ruler module
  • Fig. 5(a) is a perspective view of arrangement of the measurement system for measuring a first measurement value
  • Fig. 5(b) is a view for explaining vector components of the first measurement value
  • Fig. 6(a) is a perspective view of arrangement of the measurement system for measuring a second measurement value
  • Fig. 6(b) is a view for explaining vector components of the second measurement value
  • Fig. 7(a) is a perspective view of arrangement of the measurement system for measuring a third measurement value
  • Fig. 7(b) is a view for explaining vector components of the third measurement value
  • Fig. 8(a) is a perspective view of an arrangement of a measurement system for measuring a fourth measurement value
  • Fig. 8(b) is a view for explaining vector components of the fourth measurement value
  • Fig. 9(a) is a perspective view of an arrangement of a measurement system for measuring a fifth measurement value
  • Fig. 9(b) is a view for explaining vector components of the fifth measurement value
  • Fig. 10 is a view for explaining a method of measuring a pitch error
  • Fig. 11 is a view for explaining a method of measuring a yaw error.
  • Fig. 12 shows errors in a linear stage.
  • the error measurement system is used for an ultra-precision linear stage that includes a movable unit 800 movable along a linear guide 810, and a stationary unit 900.
  • the system includes a sensor jig 100, an adjustment stage 200 and a straight ruler module 300.
  • the sensor jig 100 includes a jig column 110 and a jig arm 120.
  • the jig column 110 is formed at an upper portion thereof with a hinge shaft 112 for hinge coupling, and stands on the movable unit 800 such that the hinge shaft 112 is in parallel with a moving axis (i.e. an x-axis) of the movable unit 800.
  • the jig arm 120 includes an arm 122 and a sensor unit 126.
  • the arm 122 is hingably coupled at one end thereof to the hinge shaft 112 located at the upper portion of the jig column 110 to rotate by 180 degrees, and is formed at the other end thereof with a rotation shaft 124 which is parallel with the hinge shaft 112.
  • the sensor unit 126 is coupled to the rotation shaft 124 formed at the other end part of the arm 122, and includes a sensor 127 and a pointer 128 arranged side by side in a direction of the rotation shaft 124.
  • the sensor 127 includes two sensors 127(a) and 127(b) arranged in a line.
  • the sensor unit 126 is rotatable with respect to the rotation shaft 124, so that the sensor 127 and the pointer 128 can be oriented in different directions.
  • a ball plunger 129 is used to stop the sensor unit 126 at intervals of 90 degrees, so that the sensor 127 and the pointer 128 can be accurately oriented in lateral, upward, downward directions.
  • any sensor can be used for the sensor 127 so long as it can measure a distance, a relatively inexpensive electrostatic capacity sensor may be advantageously used as the sensor 127.
  • the pointer 128 is configured to have an adjustable extent of protrusion.
  • Fig. 3 shows the adjustment stage of the linear stage.
  • the adjustment stage 200 is disposed at one side of the linear stage, and is configured to permit yaw adjustment as well as position adjustment in x-, y- and z-axes so as to adjust a position of the straight ruler module 300 corresponding to a position of the sensor 127.
  • the adjustment stage 200 includes a lower stage 210 and an upper stage 220, which are coupled via a magnetic base 230.
  • the lower stage 210 is configured to adjust a position of the upper stage 220 located thereon in the x- and y-axes and a yaw direction.
  • the upper stage 220 is provided with a stage member 222 to which the straight ruler module 300 is coupled.
  • the upper stage 220 is configured to adjust a position of the stage member 222 in the z-axis.
  • the adjustment stage 200 may have any typical adjustment structure without limitation.
  • Fig. 4 shows the straight ruler module of the linear stage.
  • the straight ruler module 300 is a modularized straight ruler, which will be subject to measurement according to an embodiment of the present invention. By modularizing the straight ruler, the straight ruler modules 300 fabricated corresponding to various lengths can be replaced in accordance with the size of the linear stage.
  • the straight ruler module 300 includes a stationary body 310 and a straight body 320.
  • the stationary body 310 is formed with a coupling portion 312 to be coupled to the stage member 222, and includes a rotation shaft 314 arranged in parallel with the x-axis.
  • the straight body 320 is rotatably coupled to the rotation shaft 314 and has a measuring surface 322.
  • the measuring surface 322 is a surface to be detected by the sensor 127, and can be oriented in various directions as the straight body 320 rotates.
  • a ball plunger 326 is used to stop at intervals of 90 degrees, so that the measuring surface 322 can be accurately oriented in lateral, upward, downward directions.
  • the straight ruler module 300 is coupled to the adjustment stage 200 so that the position of the straight ruler module 300 can be adjusted corresponding to the position of the sensor 127 of the sensor jig 100. Further, the measuring surface 322 is formed with a reference groove 324. The adjustment stage 200 is adjusted such that an end point of the pointer 128 faces the reference groove 324. Thus, even if a sensing direction of the sensor jig 100 is changed, the measurement system can be easily adjusted to measure the same point.
  • a method of indirectly measuring an error in an ultra-precision linear stage with the measurement system as described above will be given.
  • a basic principle of indirectly measuring the error is based on a relationship between distance measurement values that have the same error components but differ in measuring direction.
  • the error components of the distance measurement values depend on the measuring direction due to arrangement of the measuring surface and the sensor, and thus the method is classified into a vertical reverse method, a horizontal reverse method, and a rotational error measuring method.
  • the vertical reverse method is a method of indirectly measuring an error on the basis of a relationship between a basic measurement value having a vertical motion error component and measurement values obtained by reversing the measuring direction or position with respect to the y- and z-axes.
  • the measurement of an error using the vertical reverse method is as follows.
  • a first measurement value is obtained by adjusting the measurement system.
  • Fig. 5(a) is a perspective view of arrangement of the measurement system for measuring the first measurement value
  • Fig. 5(b) is a view for explaining vector components of the first measurement value.
  • the sensor jig 100 is installed on the movable unit 800 of the linear stage such that the hinge shaft 112 of the jig column 110 is in parallel with the x-axis, and the angle of the sensor unit 126 is adjusted to cause the sensor 127 to face downward.
  • the adjustment stage 200 is installed at a side of the linear stage, with its position and direction selected corresponding to the position of the sensor unit 126. Finally, with the measuring surface 322 disposed to face upward, the adjustment stage 200 is adjusted such that the reference groove 324 is aligned with the end point of the pointer 128.
  • the first measurement value M 1 (x) is obtained by measuring a distance to the measuring surface 322 with the sensor 127.
  • the first measurement value can be represented together with the error of the linear stage as follows.
  • r(x) indicates an error value due to the shape of the measuring surface
  • y indicates a distance between a motion axis of the linear stage and the y-axis
  • a rotational error of the motion axis is a roll error.
  • the motion axis of the linear stage is varied according to the kind of the linear stage.
  • a linear stage where the movable unit 800 moves along the linear guide 810 will be described.
  • the motion axis of the linear stage is the center of the linear guide 810.
  • Fig. 6(a) is a perspective view of arrangement of the measurement system for measuring the second measurement value
  • Fig. 6(b) is a view for explaining vector components of the second measurement value.
  • the sensor unit 126 is rotated by 180 degrees such that the sensor 127 faces upward. Further, with the measuring surface 322 disposed to face downward, the adjustment stage 200 is adjusted such that the reference groove 324 is aligned with the end point of the pointer 128.
  • the second measurement value M 2 (x) is obtained by measuring a distance to the measuring surface 322 with the sensor 127.
  • the second measurement value can be represented together with the error of the linear stage as follows.
  • a third measurement value is obtained in a measuring direction where the measuring direction for the first measurement value is reversed with respect to the z-axis.
  • Fig. 7(a) is a perspective view of arrangement of the measurement system for measuring a third measurement value
  • Fig. 7(b) is a view for explaining vector components of the third measurement value.
  • the arm 122 of the sensor jig 100 is rotated by 180 degrees and the sensor 127 is disposed to face downward. Further, the adjustment stage 200 is moved to an opposite side of the linear stage and installed facing the sensor jig 100. Last, with the measuring surface 322 disposed to face upward, the adjustment stage 200 is adjusted such that the reference groove 324 is aligned with the end point of the pointer 128.
  • the third measurement value M 3 (x) is obtained by measuring a distance to the measuring surface 322 with the sensor 127.
  • the third measurement value can be represented together with the error of the linear stage as follows.
  • the horizontal reverse method is a method of indirectly measuring an error on the basis of a relationship between a basic measurement value having a horizontal motion error component and a measurement value obtained by reversing the measuring position for the basic measurement value with respect to the z-axes.
  • the method of measuring an error using the horizontal reverse method is as follows.
  • a fourth measurement value is obtained by adjusting the measurement system.
  • Fig. 8(a) is a perspective view of arrangement of the measurement system for measuring the fourth measurement value
  • Fig. 8(b) is a view for explaining vector components of the fourth measurement value.
  • the sensor jig 100 is installed on the movable unit 800 of the linear stage such that the hinge shaft 112 of the jig column 110 is in parallel with the x-axis, and the angle of the sensor unit 126 is adjusted to cause the sensor 127 to face laterally.
  • the adjustment stage 200 is installed at a side of the linear stage, with its position and direction selected corresponding to the position of the sensor unit 126. Finally, with the measuring surface 322 disposed to face laterally, the adjustment stage 200 is adjusted such that the reference groove 324 is aligned with the end point of the pointer 128.
  • the fourth measurement value M 4 (x) is obtained by measuring a distance to the measuring surface 322 with the sensor 127.
  • the fourth measurement value can be represented together with the error of the linear stage asfollows.
  • z indicates a distance between a motion axis of the linear stage and the z-axis.
  • a fifth measurement value is obtained in a measuring direction where the measuring direction for the fourth measurement value is reversed with respect to the z-axis.
  • Fig. 9(a) is a perspective view of arrangement of the measurement system for measuring the fifth measurement value
  • Fig. 9(b) is a view for explaining vector components of the fifth measurement value.
  • the arm 122 of the sensor jig 100 is rotated by 180 degrees and the sensor 127 is disposed to face laterally. Further, the adjustment stage 200 is moved to an opposite side of the linear stage and installed facing the sensor jig 100. Last, with the measuring surface 322 disposed to face laterally, the adjustment stage 200 is adjusted such that the reference groove 324 is aligned with the end point of the pointer 128.
  • the fifth measurement value M 5 (x) is obtained by measuring a distance to the measuring surface 322 with the sensor 127.
  • the fifth measurement value can be represented together with the error of the linear stage as follows.
  • the shape error on the measuring surface. If the roll error is given, it is also possible to calculate even the horizontal motion error. In this regard, the roll error can be measured by a separate method, but may be easily calculated by the foregoing vertical reverse method when using the measurement system according to the embodiment of the invention.
  • the rotational error measuring method is a method of indirectly measuring an error on the basis of a relationship between a basic measurement value having a vertical motion error component or a horizontal motion error component and a measurement value at a position moved a predetermined distance from a measuring position for the basic measurement value in the x-axis.
  • two sensors spaced a predetermined distance from each other may be used to easily obtain a desired value.
  • a method using the measurement value having the vertical motion error component will be referred to as a pitch error measuring method
  • a method using the measurement value having the horizontal motion error component will be referred to as a yaw error measuring method.
  • the method of measuring an error on the basis of the rotational error measuring method is as follows.
  • Fig. 10 is a view for explaining a method of measuring a pitch error.
  • An arrow of Fig. 10 indicates a moving direction of the linear stage.
  • the measurement system includes two sensors 127 spaced a predetermined distance ⁇ x from each other along the x-axis.
  • a position measured by a first sensor 127 and a position measured by a second sensor 127 will be referred to as a first measuring position and a second measuring position, respectively.
  • a value obtained at the first measuring position is equal to the first measurement value M 1 (x), but can be represented as follows to distinguish the measuring positions.
  • the sixth measurement value M 6 (x) can be represented as follows.
  • the pitch error can be calculated from the first and sixth measurement values.
  • the shape errors on the measuring surface can be measured by a separate method, but may be easily calculated by the aforementioned vertical or horizontal reverse method.
  • Fig. 11 is a view for explaining a method of measuring a yaw error.
  • An arrow in Fig. 11 indicates a moving direction of the linear stage.
  • the measurement system includes two sensors 127 spaced a predetermined distance ⁇ x from each other along the x-axis.
  • a position measured by a first sensor 127 and a position measured by a second sensor 127 will be referred to as a third measuring position and a fourth measuring position, respectively.
  • a value obtained at the third measuring position is equal to the fourth measurement value M 4 (x), but can be represented as follows to distinguish the measuring positions.
  • the seventh measurement value M 7 (x) can be represented as follows.
  • the yaw error can be calculated from the fourth and seventh measurement values.
  • the shape error on the measuring surface can be measured by a separate method, but may be easily calculated by the aforementioned vertical or horizontal reverse method.
  • any error of the linear stage can be indirectly measured by a single measurement system using a relatively inexpensive electrostatic capacity sensor. Further, accuracy of the measured error can be determined through the measurement system and method according to the embodiment of the present invention.
  • the shape errors on the measuring surface can be separately calculated by the vertical and horizontal reverse methods, respectively.
  • it is possible to indirectly evaluate the accuracy of the indirectly measured error by comparing the shape error r v (x) calculated by the vertical reverse method and the shape error r h (x) calculated by the horizontal reverse method. It can be judged that the smaller the difference between the two shape errors, the more accurate the indirectly measure derror.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Abstract

La présente invention a pour objet un procédé de mesure d’une erreur d’un étage linéaire qui se déplace en ligne droite. L’étage linéaire se déplace en ligne droite le long d’un axe x, et possède une erreur de mouvement horizontal d’un axe y, une erreur de mouvement vertical d’un axe z, une erreur de roulis, une erreur de lacet et une erreur de pas. Le procédé comprend les étapes consistant à obtenir des valeurs de mesure représentées par des sommes vectorielles de composantes comprenant certaines composantes des erreurs dans différentes directions avec un capteur, et à calculer les erreurs au moyen des valeurs de mesure obtenues. En conséquence, le procédé mesure indirectement les erreurs de l’étage linéaire, et permet à un système de mesure unique de mesurer seul toute erreur de l’étage linéaire, assurant de cette façon une installation et un fonctionnement pratiques du système de mesure, tout en déterminant la précision d’une erreur mesurée. En outre, le système peut être conçu avec uniquement un capteur de capacité électrostatique relativement bon marché, ce qui permet de réaliser des économies supérieures.
PCT/KR2009/000415 2008-11-06 2009-01-28 Procédé et système de mesure d’erreur de mouvement dans un étage linéaire de précision Ceased WO2010053229A1 (fr)

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KR1020080109983A KR101016229B1 (ko) 2008-11-06 2008-11-06 초정밀 리니어 스테이지의 운동오차 측정방법 및 측정시스템
KR10-2008-0109983 2008-11-06

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CN102607400A (zh) * 2012-03-23 2012-07-25 合肥工业大学 精密球铰链间隙测量仪及测量方法
US20120274768A1 (en) * 2011-04-27 2012-11-01 Georgetown Rail Equipment Company Method and system for calibrating laser profiling systems
CN103335621A (zh) * 2013-07-12 2013-10-02 大连理工大学 一种船舶自校准式相对浮沉测量系统及测量方法
CN110595359A (zh) * 2019-09-19 2019-12-20 中国科学院长春光学精密机械与物理研究所 一种球铰链在线精度检测设备
TWI724185B (zh) * 2016-06-20 2021-04-11 日商東京威力科創股份有限公司 靜電電容檢測用之檢測器及使用檢測器來校正處理系統中之搬送位置資料之方法
CN116608784A (zh) * 2023-03-28 2023-08-18 华侨大学 一种六自由度误差修正的三维运动测量系统及测量方法

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Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120274768A1 (en) * 2011-04-27 2012-11-01 Georgetown Rail Equipment Company Method and system for calibrating laser profiling systems
US8711222B2 (en) 2011-04-27 2014-04-29 Georgetown Rail Equipment Company Method and system for calibrating laser profiling systems
CN102607400A (zh) * 2012-03-23 2012-07-25 合肥工业大学 精密球铰链间隙测量仪及测量方法
CN103335621A (zh) * 2013-07-12 2013-10-02 大连理工大学 一种船舶自校准式相对浮沉测量系统及测量方法
CN103335621B (zh) * 2013-07-12 2015-11-18 大连理工大学 一种船舶自校准式相对浮沉测量系统及测量方法
TWI724185B (zh) * 2016-06-20 2021-04-11 日商東京威力科創股份有限公司 靜電電容檢測用之檢測器及使用檢測器來校正處理系統中之搬送位置資料之方法
CN110595359A (zh) * 2019-09-19 2019-12-20 中国科学院长春光学精密机械与物理研究所 一种球铰链在线精度检测设备
CN116608784A (zh) * 2023-03-28 2023-08-18 华侨大学 一种六自由度误差修正的三维运动测量系统及测量方法

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