WO2009128445A1 - Objective lens and optical pickup device - Google Patents
Objective lens and optical pickup device Download PDFInfo
- Publication number
- WO2009128445A1 WO2009128445A1 PCT/JP2009/057502 JP2009057502W WO2009128445A1 WO 2009128445 A1 WO2009128445 A1 WO 2009128445A1 JP 2009057502 W JP2009057502 W JP 2009057502W WO 2009128445 A1 WO2009128445 A1 WO 2009128445A1
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- WIPO (PCT)
- Prior art keywords
- optical
- path difference
- optical path
- difference providing
- objective lens
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1353—Diffractive elements, e.g. holograms or gratings
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B7/12—Heads, e.g. forming of the optical beam spot or modulation of the optical beam
- G11B7/135—Means for guiding the beam from the source to the record carrier or from the record carrier to the detector
- G11B7/1372—Lenses
- G11B7/1374—Objective lenses
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- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B7/00—Recording or reproducing by optical means, e.g. recording using a thermal beam of optical radiation by modifying optical properties or the physical structure, reproducing using an optical beam at lower power by sensing optical properties; Record carriers therefor
- G11B2007/0003—Recording, reproducing or erasing systems characterised by the structure or type of the carrier
- G11B2007/0006—Recording, reproducing or erasing systems characterised by the structure or type of the carrier adapted for scanning different types of carrier, e.g. CD & DVD
Definitions
- the present invention relates to an optical pickup apparatus capable of recording and / or reproducing information interchangeably for different types of optical discs and an objective lens used therefor.
- a laser light source used as a light source for reproducing information recorded on an optical disc and recording information on the optical disc has been shortened.
- a blue-violet semiconductor laser Laser light sources with wavelengths of 400 to 420 nm, such as blue SHG lasers that perform wavelength conversion of infrared semiconductor lasers using harmonics, are being put into practical use.
- these blue-violet laser light sources it is possible to record 15 to 20 GB of information on an optical disk having a diameter of 12 cm when an objective lens having the same numerical aperture (NA) as that of a DVD (digital versatile disk) is used.
- NA numerical aperture
- an optical disk and a magneto-optical disk using a blue-violet laser light source are collectively referred to as a āhigh density optical diskā.
- an optical pickup device mounted on an optical disc player / recorder for high density optical discs can appropriately receive information while maintaining compatibility with both high density optical discs, DVDs, and even CDs. It is desired to have a performance capable of recording / reproducing.
- optical systems for high-density optical discs and optical systems for DVDs and CDs are used.
- a method of selectively switching the system to and from the recording density of an optical disk for recording / reproducing information is conceivable, but a plurality of optical systems are required, which is disadvantageous for miniaturization and increases the cost.
- the optical system for high-density optical discs and the optical system for DVDs and CDs must be shared in compatible optical pickup devices. It is preferable to reduce the number of optical components constituting the optical pickup device as much as possible. And, it is most advantageous to simplify the configuration of the optical pickup device and to reduce the cost to make the objective lens arranged facing the optical disc in common.
- an optical path difference providing structure having wavelength dependency of spherical aberration is formed in the objective optical system. It is necessary to reduce the spherical aberration that occurs due to the difference in thickness and the thickness of the protective layer.
- Patent Document 1 describes an optical element that has an optical path difference providing structure and is used for an objective lens that can be used in common with high-density optical discs and conventional DVDs and CDs.
- the first optical path difference function is added to the second optical path difference function in order to enable compatibility with high-density optical discs, DVDs, and CDs.
- the optical path difference providing structure formed in this way is formed on the objective lens.
- a complex structure such as a depression at the top of the mountain, making it difficult to configure the mold, making it difficult for the material to enter the mold at the time of molding, and the optical surface of the molded objective lens to be ideal Therefore, it is difficult to obtain desired optical characteristics.
- the present invention has been made in consideration of the above-mentioned problems. Even if a single lens is used as an objective lens, the recording density of the high-density optical disc (particularly BD), DVD, and CD is different. An optical pickup device and an objective lens capable of appropriately recording and / or reproducing information with respect to a disc of the above, and exhibiting desired optical characteristics, and the configuration of a molding die becomes too complicated It is an object of the present invention to provide an objective lens that can prevent this, improve transferability, simplify the configuration, and reduce the cost, and an optical pickup device using the objective lens.
- the invention according to claim 1 is directed to information on the first optical disc having a protective layer having a thickness t1 using the first light flux having the wavelength ā 1 ( ā m) emitted from the first light source.
- a third optical disc having a protective layer with a thickness of t3 (t2 ā t3) using a third light flux of wavelength ā 3 ( ā 2 ā 3) emitted from the third light source, forming a condensed spot on the information recording surface
- An optical path difference providing structure is formed on the optical surface of the objective lens,
- the optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the steps of the second basic structure.
- the position of the part matches, Of the diffracted light generated when the first light flux is incident on the optical path difference providing structure, where L, M, and N are arbitrary integers, the L-order diffracted light has the largest amount of diffracted light, and the optical path Diffraction generated when M-th order diffracted light has the maximum amount of diffracted light among the diffracted light generated when the second light flux is incident on the difference providing structure, and the third light flux is incident on the optical path difference providing structure. Of the light, the Nth order diffracted light has the maximum amount of diffracted light.
- the optical path difference providing structure can be simplified by overlapping the positions of all the step portions of the first foundation structure so that the positions of the step portions of the second foundation structure coincide with each other. Processing of the mold for the objective lens is easy, resin and glass can easily enter the end of the mold when molding the objective lens, the manufacturing accuracy can be improved, and the light quantity close to the design value can be obtained, Light loss can be reduced.
- the objective lens according to the first aspect wherein the second basic structure is a four-step staircase structure, and the optical axis direction of the small step of the stepped structure of the second basic structure.
- Length d21 ( ā m), the length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 ( ā m) is the following conditional expression: (1.2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (1.2 ā 1 + 0.4 ā 1) / (n ā 1) (1.25 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.25 ā 1 + 0.2 ā 1) / (n ā 1) (3.75 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (3.75 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying. However,
- the objective lens according to claim 3 is the invention according to claim 1 or 2, wherein the first optical path difference providing structure is a four-part blazed stepped structure, which is the largest of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the step is the following conditional expression: (4.95 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (4.95 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying.
- the objective lens according to claim 4 is the invention according to any one of claims 1 to 3,
- 1
- the sign of L and N is different.
- the objective lens according to the first aspect wherein the second basic structure is a six-step staircase structure, and the optical axis direction of the small step of the stepped structure of the second basic structure.
- Length d21 ( ā m), the length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 ( ā m) is the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) (6 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (6 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying. However, n represents the refractive index of
- the objective lens according to claim 6 is the objective lens according to claim 1 or 5, wherein the first optical path difference providing structure is a four-part blazed stepped structure, which is the largest of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the step is the following conditional expression: (5 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying.
- 2,
- 3, The sign of M and N is equal.
- the objective lens according to the first aspect wherein the second basic structure is a seven-stage stepped structure, and the optical axis direction of the small step of the stepped structure of the second basic structure.
- Length d21 ( ā m), the length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 ( ā m) is the following conditional expression: (3 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (3 ā 1 + 0.4 ā 1) / (n ā 1) (1.31 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.31 ā 1 + 0.2 ā 1) / (n ā 1) (7.86 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (7.86 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying. However, n represents
- the objective lens according to claim 9 is the invention according to claim 1 or 5, wherein the first optical path difference providing structure is a seven-part blazed stepped structure, which is the largest of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the step is the following conditional expression: (4.86 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (4.86 ā 1 + 0.2 ā 1) / (n ā 1) It is characterized by satisfying.
- the objective lens according to claim 10 is the invention according to claim 1, 8 or 9,
- 1,
- 3,
- 4,
- L, M, and N are equal.
- the objective lens according to claim 11 is the invention according to any one of claims 1 to 10,
- the optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region.
- Has a surrounding area The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc, The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc, The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
- the first optical path difference providing structure is provided in the central region.
- the optical pickup device is focused on the information recording surface of the first optical disc having a protective layer having a thickness t1 by using the first light flux of wavelength ā 1 ( ā m) emitted from the first light source.
- Spot formation is performed on the information recording surface of the second optical disc having a protective layer having a thickness t2 (t1 ā t2) using a second light flux having a wavelength ā 2 ( ā 1 ā 2) emitted from the second light source.
- the information recording surface of the third optical disk having a protective layer having a thickness t3 (t2 ā t3) using a third light beam having a wavelength ā 3 ( ā 2 ā 3) emitted from the third light source.
- a first optical path difference providing structure is formed on the optical surface of the objective lens,
- the first optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the second basic structure.
- the Mth order diffracted light has the largest amount of diffracted light
- the third light beam is incident on the first optical path difference providing structure.
- the Nth order diffracted light has the maximum amount of diffracted light.
- the second basic structure is a four-step staircase structure, and the optical axis of the small step of the stepped structure of the second basic structure.
- Length d21 ( ā m) in the direction, length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 ( ā m) is the following conditional expression: (1.2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (1.2 ā 1 + 0.4 ā 1) / (n ā 1) (1.25 ā 1-0.4 ā 1) / (n ā 1) ā d21 ā (1.25 ā 1 + 0.4 ā 1) / (n ā 1) (3.75 ā 1-0.4 ā 1) / (n ā 1) ā d22 ā (3.75 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying. However,
- An optical pickup device is the invention according to the twelfth or thirteenth aspect, wherein the first optical path difference providing structure is a four-part blazed stepped structure, and is the most of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the large step is the following conditional expression: (4.95 ā 1-0.4 ā 1) / (n ā 1) ā d0 ā (4.95 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying.
- optical pickup device is the invention according to any one of claims 12 to 14,
- 1
- L and N is different.
- the optical pickup device according to the twelfth aspect, wherein the second basic structure is a six-step staircase structure, and the optical axis of the small step of the stepped structure of the second basic structure.
- Length d21 ( ā m) in the direction, length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 ( ā m) is the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.2 ā 1-0.4 ā 1) / (n ā 1) ā d21 ā (1.2 ā 1 + 0.4 ā 1) / (n ā 1) (6 ā 1-0.4 ā 1) / (n ā 1) ā d22 ā (6 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
- the first optical path difference providing structure is a four-part blazed stepped structure, which is the most of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the large step is the following conditional expression: (5 ā 1-0.4 ā 1) / (n ā 1) ā d0 ā (5 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying.
- 2,
- 3, The sign of M and N is equal.
- An optical pickup device is the optical pickup device according to the twelfth aspect, wherein the second basic structure is a seven-step staircase structure, and the optical axis of a small step of the stepped structure of the second basic structure.
- Length d21 ( ā m) in the direction, length d22 ( ā m) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 ( ā m) is the following conditional expression: (3 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (3 ā 1 + 0.4 ā 1) / (n ā 1) (1.31 ā 1-0.4 ā 1) / (n ā 1) ā d21 ā (1.31 ā 1 + 0.4 ā 1) / (n ā 1) (7.86 ā 1-0.4 ā 1) / (n ā 1) ā d22 ā (7.86 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying. However, however,
- An optical pickup device is the invention according to the twelfth or nineteenth aspect, wherein the first optical path difference providing structure is a seven-part blazed stepped structure, and is the most of the first optical path difference providing structure.
- the length d0 ( ā m) in the optical axis direction of the large step is the following conditional expression (4.86 ā 1-0.4 ā 1) / (n ā 1) ā d0 ā (4.86 ā 1 + 0.4 ā 1) / (n ā 1) It is characterized by satisfying.
- optical pickup device is the invention according to claim 12, 19 or 20,
- 1,
- 3,
- 4, The signs of L, M, and N are equal.
- the optical pickup device is the invention according to any one of claims 12 to 21,
- the optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region.
- Has a surrounding area The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc, The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc, The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
- the first optical path difference providing structure is provided in the central region.
- An optical pickup device is the optical pickup device according to any one of the twelfth to twenty-second aspects, wherein the objective lens is imaged when the first light flux is incident on the objective lens.
- the magnification m1 is the following equation (1)
- the imaging magnification m2 of the objective lens when the second light beam is incident on the objective lens is the following equation (2)
- the third light beam is incident on the objective lens.
- the imaging magnification m3 of the objective lens is set to the following formula (3), -0.02 ā m1 ā 0.02 (1) -0.02 ā m2 ā 0.02 (2) -0.02 ā m3 ā 0.02 (3) It is characterized by satisfying.
- the optical pickup device has at least three light sources: a first light source, a second light source, and a third light source. Furthermore, the optical pickup device of the present invention condenses the first light flux on the information recording surface of the first optical disc, condenses the second light flux on the information recording surface of the second optical disc, and causes the third light flux to be third. It has a condensing optical system for condensing on the information recording surface of the optical disc.
- the optical pickup device of the present invention includes a light receiving element that receives a reflected light beam from the information recording surface of the first optical disc, the second optical disc, or the third optical disc.
- the first optical disc is preferably a BD (Blu-ray Disc) or HD DVD (hereinafter referred to as HD), the second optical disc is preferably a DVD, and the third optical disc is preferably a CD. Not limited.
- the first optical disc, the second optical disc, or the third optical disc may be a multi-layer optical disc having a plurality of information recording surfaces.
- BD records and reproduces information with an objective lens with NA of 0.85, and the thickness of the protective substrate is about 0.1 mm.
- information is recorded / reproduced by an objective lens having NA of 0.65 to 0.67, and the thickness of the protective substrate is about 0.6 mm.
- DVD is a general term for DVD series optical discs in which information is recorded / reproduced by an objective lens having an NA of about 0.60 to 0.67, and the thickness of the protective substrate is about 0.6 mm.
- CD is a generic name for CD-series optical discs in which information is recorded / reproduced by an objective lens having an NA of about 0.45 to 0.53, and the thickness of the protective substrate is about 1.2 mm.
- the recording density the recording density of BD is the highest, followed by HD, DVD, and CD in that order.
- the present invention is not limited to this.
- the first light source, the second light source, and the third light source are preferably laser light sources.
- the laser light source a semiconductor laser, a silicon laser, or the like can be preferably used.
- the wavelength ā 3 ( ā 3> ā 2) is defined by the following conditional expressions (7), (8), 1.5 ā ā 1 ā 2 ā 1.7 ā ā 1 (7) 1.9 ā ā 1 ā 3 ā 2.1 ā ā 1 (8) It is preferable to satisfy.
- the first wavelength ā 1 of the first light source is preferably 0.35 ā m or more and 0.44 ā m or less. More preferably, it is 0.38 ā m or more and 0.415 ā m or less, and the second wavelength ā 2 of the second light source is preferably 0.57 ā m or more and 0.68 ā m or less, more preferably 0.63 ā m or more and 0.67 ā m.
- the third wavelength ā 3 of the third light source is preferably 0.75 ā m or more and 0.88 ā m or less, more preferably 0.76 ā m or more and 0.82 ā m or less.
- the first light source, the second light source, and the third light source may be unitized.
- the unitization means that the first light source and the second light source are fixedly housed in one package, for example. However, the unitization is not limited to this, and the two light sources are fixed so that the aberration cannot be corrected. Is widely included.
- a light receiving element to be described later may be packaged.
- a photodetector such as a photodiode is preferably used.
- Light reflected on the information recording surface of the optical disc enters the light receiving element, and a read signal of information recorded on each optical disc is obtained using the output signal. Furthermore, it detects the change in the light amount due to the spot shape change and position change on the light receiving element, performs focus detection and track detection, and based on this detection, the objective lens can be moved for focusing and tracking I can do it.
- the light receiving element may comprise a plurality of photodetectors.
- the light receiving element may have a main photodetector and a sub photodetector.
- two sub photodetectors are provided on both sides of a photodetector that receives main light used for recording and reproducing information, and the sub light for tracking adjustment is received by the two sub photodetectors. It is good also as a simple light receiving element.
- the light receiving element may have a plurality of light receiving elements corresponding to the respective light sources.
- the condensing optical system has an objective lens.
- the condensing optical system may include only the objective lens, but the condensing optical system may include a coupling lens such as a collimator in addition to the objective lens.
- the coupling lens is a single lens or a lens group that is disposed between the objective lens and the light source and changes the divergence angle of the light beam.
- the collimator is a type of coupling lens, and is a lens that emits light incident on the collimator as parallel light.
- the condensing optical system has an optical element such as a diffractive optical element that divides the light beam emitted from the light source into a main light beam used for recording and reproducing information and two sub light beams used for tracking and the like. May be.
- the objective lens refers to an optical system that is disposed at a position facing the optical disk in the optical pickup device and has a function of condensing the light beam emitted from the light source onto the information recording surface of the optical disk.
- the objective lens is an optical system which is disposed at a position facing the optical disk in the optical pickup device and has a function of condensing the light beam emitted from the light source on the information recording surface of the optical disk, and further includes an actuator An optical system that can be integrally displaced at least in the optical axis direction.
- the objective lens is preferably a single objective lens, but may be formed of a plurality of optical elements.
- the objective lens may be a glass lens, a plastic lens, or a hybrid lens in which an optical path difference providing structure or the like is provided on a glass lens with a photocurable resin or the like.
- the objective lens preferably has a refractive surface that is aspheric.
- the base surface on which the optical path difference providing structure is provided is preferably an aspherical surface.
- the objective lens is a glass lens
- a glass material having a glass transition point Tg of 400 ° C. or lower it is preferable to use a glass material having a glass transition point Tg of 400 ° C. or lower.
- a glass material having a glass transition point Tg of 400 ° C. or lower molding at a relatively low temperature becomes possible, so that the life of the mold can be extended.
- Examples of such a glass material having a low glass transition point Tg include K-PG325 and K-PG375 (both product names) manufactured by Sumita Optical Glass Co., Ltd.
- the specific gravity of the glass lens is generally larger than that of the resin lens, if the objective lens is a glass lens, the weight increases and a load is imposed on the actuator that drives the objective lens. Therefore, when the objective lens is a glass lens, it is preferable to use a glass material having a small specific gravity. Specifically, the specific gravity is preferably 3.0 or less, and more preferably 2.8 or less.
- the objective lens is a plastic lens
- the refractive index at a temperature of 25 ° C. with respect to a wavelength of 405 nm is 1.52 to 1.60.
- the refractive index change rate dN / dT (° C. ā 1 ) is ā 20 ā 10 ā 5 to ā 5 ā 10 ā with respect to the wavelength of 405 nm accompanying the temperature change within the temperature range of ā 5 ° C. to 70 ° C.
- the coupling lens is preferably a plastic lens.
- At least one optical surface of the objective lens has a central region and a peripheral region around the central region. At least one optical surface of the objective lens may have an outermost peripheral region around the peripheral region.
- the central region is preferably a region including the optical axis of the objective lens, but may be a region not including the optical axis. It is preferable that the central region, the peripheral region, and the most peripheral region are provided on the same optical surface. As shown in FIG. 1, the central region CN, the peripheral region MD, and the most peripheral region OT are preferably provided concentrically around the optical axis on the same optical surface. Moreover, it is preferable that a first optical path difference providing structure is provided in the central region of the objective lens.
- a second optical path difference providing structure may be provided in the peripheral region.
- the outermost peripheral region may be a refractive surface, or the third optical path difference providing structure may be provided in the outermost peripheral region.
- the central region, the peripheral region, and the outermost peripheral region are preferably adjacent to each other, but there may be a slight gap between them.
- the first optical path difference providing structure is preferably provided in a region of 70% or more of the area of the central region of the objective lens, and more preferably 90% or more. More preferably, the first optical path difference providing structure is provided on the entire surface of the central region.
- the second optical path difference providing structure is preferably provided in a region of 70% or more of the area of the peripheral region of the objective lens, and more preferably 90% or more. More preferably, the second optical path difference providing structure is provided on the entire surface of the peripheral region.
- the third optical path difference providing structure is preferably provided in a region of 70% or more of the area of the outermost peripheral region of the objective lens, and more preferably 90% or more. More preferably, the third optical path difference providing structure is provided on the entire surface of the outermost peripheral region.
- the optical path difference providing structure referred to in this specification is a general term for structures that add an optical path difference to an incident light beam.
- the optical path difference providing structure also includes a phase difference providing structure for providing a phase difference.
- the phase difference providing structure includes a diffractive structure. It can be said that the optical path difference providing structure of the present invention is a diffractive structure.
- the optical path difference providing structure has a step, preferably a plurality of steps. This step adds an optical path difference and / or phase difference to the incident light flux.
- the optical path difference added by the optical path difference providing structure may be an integer multiple of the wavelength of the incident light beam or a non-integer multiple of the wavelength of the incident light beam.
- the steps may be arranged with a periodic interval in the direction perpendicular to the optical axis, or may be arranged with a non-periodic interval in the direction perpendicular to the optical axis.
- the optical path difference providing structure has a plurality of concentric annular zones centered on the optical axis.
- the optical path difference providing structure can have various cross-sectional shapes (cross-sectional shapes in a plane including the optical axis).
- the first optical path difference providing structure is obtained by superimposing a first basic structure whose cross-sectional shape including the optical axis is a blazed structure and a second basic structure whose cross-sectional shape including the optical axis is a stepped structure. Is preferred.
- the blazed structure means that the cross-sectional shape including the optical axis of an optical element having an optical path difference providing structure is a sawtooth shape.
- the optical path difference providing structure has an oblique surface that is neither perpendicular nor parallel to the base surface.
- the staircase structure means that the cross-sectional shape including the optical axis of the optical element having the optical path difference providing structure has a plurality of small staircase shapes.
- the optical path difference providing structure has only a surface parallel to the base surface and a surface parallel to the optical axis, and does not have an oblique surface with respect to the base surface.
- X division means that a ring-shaped surface corresponding to (or facing) the vertical direction of the optical axis of one staircase structure is divided by steps and divided into X pieces.
- Small step means the smallest step in the optical axis direction in one staircase structure, and ālarge stepā means the largest step in the optical axis direction in one staircase structure.
- the second foundation structure different from the first foundation structure is placed on the first foundation structure, the positions of all the step portions of the first foundation structure, and the second foundation structure. It is preferable to superimpose so that the position of the level
- the deepest position P1 of the blaze structure shown in FIG. 3A and the deepest position P2 of the staircase structure shown in FIG. Thereby, the 1st optical path difference providing structure shown in FIG.3 (c) can be obtained.
- the structure as shown in FIG. 3C obtained by superimposing the blaze type structure and the staircase type structure with the position of the blaze type step and the position of the large step of the staircase structure being coincident with each other is obtained.
- the blazed staircase structure has an optical path difference providing structure that has an oblique surface with respect to the base surface and a surface parallel to the optical axis.
- a plurality of unit zones of the second foundation structure may be superimposed on one unit zone of the first foundation structure.
- not all the positions of the step portions of the second foundation structure need to coincide with the positions of the step portions of the first foundation structure. That is, some of the step portions of the second foundation structure may not coincide with the position of the step portion of the first foundation structure.
- the second optical path difference providing structure and the third optical path difference providing structure may or may not overlap the basic structure. In this case, a structure having an arbitrary shape shown in FIGS.
- the optical path difference providing structure or the basic structure is preferably a structure in which a certain unit shape is periodically repeated.
- unit shape is periodically repeated naturally includes shapes in which the same shape is repeated in the same cycle.
- the unit shape that is one unit of the cycle has regularity, and the shape in which the cycle gradually increases or decreases gradually is also included in the āunit shape is periodically repeatedā.
- the sawtooth shape as a unit shape is repeated.
- the same sawtooth shape may be repeated, and as shown in FIG. 2 (b), the size of the sawtooth shape gradually increases as it goes in the direction of the base surface. It may be a shape that increases in size or a shape that decreases. Moreover, it is good also as a shape which combined the shape where the magnitude
- the size in the optical axis direction (or the direction of the passing light beam) hardly changes in the serrated shape.
- the length in the optical axis direction of one sawtooth shape (may be the length in the direction of the light beam passing through the sawtooth shape) is referred to as the pitch depth, and one sawtooth shape light.
- the length in the direction perpendicular to the axis is called the pitch width.
- the blazed structure has a step opposite to the optical axis (center) side, and in other areas, the blazed structure has a step toward the optical axis (center).
- transition region is a region corresponding to a point that becomes an extreme value of the optical path difference function when the optical path difference added by the optical path difference providing structure, which is an optical path difference providing structure, is expressed by an optical path difference function. If the optical path difference function has an extreme point, the inclination of the optical path difference function becomes small, so that the annular zone pitch can be widened, and the decrease in transmittance due to the shape error of the optical path difference providing structure can be suppressed.
- the shape is a unit shape, which is a repeated staircase shape.
- the same small staircase shape of several stages for example, a structure of five divisions as shown in FIG. 2C
- the shape of the staircase may gradually increase in size as it proceeds in the direction of the base surface, or the shape of the staircase may gradually decrease in size. It is preferable that the length of the direction of light) hardly changes.
- the optical path difference providing structure When the optical path difference providing structure has a binary shape as shown in FIG. 2D (such a structure can be said to be a two-step staircase structure), the optical path difference providing structure gradually increases in the direction of the base surface.
- a shape in which the size of the binary increases or a shape in which the size of the staircase gradually decreases may be used, but it is preferable that the length of the light beam passing through hardly changes.
- L, M, and N shown in the following examples are the diffraction orders of the diffracted light having the maximum diffracted light quantity among the diffracted lights generated when the first light flux is incident on the first optical path difference providing structure.
- the diffraction order of the diffracted light having the maximum diffracted light amount is M order
- the third light beam is applied to the first optical path difference providing structure.
- the integers L, M, and N are shown when the diffraction order of the diffracted light having the maximum amount of diffracted light among the diffracted light generated when incident is N order.
- Example 1 (First optical path difference providing structure example 1)
- the 2nd foundation structure which is a staircase type structure is a 4 stepped staircase structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 4 stepped staircase structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (1.2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (1.2 ā 1 + 0.4 ā 1) / (n ā 1) (1.25 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.25 ā 1 + 0.2 ā 1) / (n ā 1) (3.75 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (3.75 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- n represents the refractive index of the objective lens in the first light flux.
- the step amount d1 in the optical axis direction of the first basic structure is a step amount that gives an optical path difference of 1.2 ā 1 ā 0.4 ā 1 with respect to the wavelength ā 1 of the first light flux. It can also be said that it means.
- the step amount d21 in the direction of the small optical axis of the second foundation structure is such a step amount that gives an optical path difference of 1.25 ā 1 ā 0.2 ā 1 with respect to the wavelength ā 1 of the first light beam.
- the large step amount d22 in the optical axis direction is a step amount that gives an optical path difference of 3.75 ā 1 ā 0.2 ā 1 with respect to the wavelength ā 1 of the first light flux.
- the diffraction efficiency can be calculated based on the following equation (1).
- the diffraction efficiency can be calculated based on the following equation (2).
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- āSame orientationā means the direction of inclination of the slanted surface of the blazed structure (decreasing to the right) when the optical axis is the vertical axis and the optical axis orthogonal direction is the horizontal axis in the cross section including the optical axis of the objective lens. It means that the direction of the inclination of the slanted surface which is the envelope surface of each step of the staircase structure is the same.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (4.95 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (4.95 ā 1 + 0.2 ā 1) / (n ā 1) (1.25 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.25 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the above equation is a step amount such that the small step amount d00 in the optical axis direction of the first optical path difference providing structure gives an optical path difference of 1.25 ā 1 ā 0.2 ā 1 with respect to the wavelength ā 1 of the first light flux.
- the large step amount d0 in the optical axis direction of the first optical path difference providing structure is a step amount that gives an optical path difference of 4.95 ā 1 ā 0.2 ā 1 with respect to the wavelength ā 1 of the first light flux. It can be said that they are doing.
- L is preferably positive.
- the phase of the first light beam that has passed through the first optical path difference providing structure increases as it moves away from the optical axis, and the phase of the third light beam that has passed through the first optical path difference providing structure is delayed as it moves away from the optical axis.
- the phase of the first light flux that has passed through the first optical path difference providing structure is delayed as the distance from the optical axis increases, and the phase of the third light flux that has passed through the first optical path difference providing structure is increased as the distance from the optical axis increases.
- the first optical path difference providing structure is a staircase-shaped repetitive structure, it is preferable that the phase advance and the phase delay occur in one staircase shape that is a unit structure.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 77% for the first beam, about 68% for the second beam, and about 57% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- the diffraction efficiency can also be calculated based on the following equation (3).
- Example 2 (First optical path difference providing structure example 2)
- the 2nd foundation structure which is a staircase type structure is a 6-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 6-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) (6 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (6 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- āDifferent orientationā refers to the direction of inclination of a slanted surface of a blazed structure (decrease to the right) when the optical axis is the vertical axis and the optical axis orthogonal direction is the horizontal axis in the cross section including the optical axis of the objective lens It means that the inclination direction of the slanted surface, which is the envelope surface of each step of the staircase structure, is reversed.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a six-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (5 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the phase of the second light flux that has passed through the first optical path difference providing structure is advanced as the distance from the optical axis increases, and the phase of the second light flux that has passed through the first optical path difference providing structure is advanced as it is further away from the optical axis.
- the phase of the second light flux that has passed through the first optical path difference providing structure is delayed as the distance from the optical axis increases, and the phase of the third light flux that has passed through the first optical path difference providing structure is also determined to be away from the optical axis. Is delayed, it can be said that the signs of M and N are equal.
- the first optical path difference providing structure is a staircase-shaped repetitive structure, it is preferable that the phase advance and the phase delay occur in one staircase shape that is a unit structure.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 80% for the first beam, about 62% for the second beam, and about 54% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 3 (First optical path difference giving structure example 3)
- the 2nd foundation structure which is a staircase type structure is a 7-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 7-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (3 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (3 ā 1 + 0.4 ā 1) / (n ā 1) (1.31 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.31 ā 1 + 0.2 ā 1) / (n ā 1) (7.86 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (7.86 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (4.86 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (4.86 ā 1 + 0.2 ā 1) / (n ā 1) (1.31 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.31 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 69% for the first beam, about 65% for the second beam, and about 64% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 4 (First optical path difference providing structure example 4)
- the second basic structure having a stepped structure is a seven-stage stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 9B, the second basic structure having a stepped structure is a seven-stage stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (4 ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā (4 ā 1 + 0.4 ā 1) / (n ā 1) (1.28 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.28 ā 1 + 0.2 ā 1) / (n ā 1) (7.68 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (7.68 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (3.68 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (3.68 ā 1 + 0.2 ā 1) / (n ā 1) (1.28 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.28 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 67% for the first beam, about 68% for the second beam, and about 60% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 5 (First optical path difference providing structure example 5)
- the 2nd foundation structure which is a staircase type structure is a 5-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 5-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (2 ā 1 + 0.4 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) (4.8 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (4.8 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a five-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.8 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.8 ā 1 + 0.2 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 88% for the first beam, about 70% for the second beam, and about 57% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 6 (First optical path difference providing structure example 6)
- the second basic structure having a stepped structure is a two-step stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (4 ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā (4 ā 1 + 0.4 ā 1) / (n ā 1) (1.1 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.1 ā 1 + 0.2 ā 1) / (n ā 1) (1.1 ā 1-0.2 ā 1) / (n ā 1) ā 1) ā d22 ā (1.1 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first foundation structure and the second foundation structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (2.9 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (2.9 ā 1 + 0.2 ā 1) / (n ā 1) (1.1 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.1 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 97% for the first beam, about 74% for the second beam, and about 45% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 7 (First optical path difference providing structure example 7)
- the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 12B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (2 ā 1 + 0.2 ā 1) / (n ā 1) (2 ā 1-0.2 ā 1) / (n ā 1) ā 1) ā d22 ā (2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (3 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (3 ā 1 + 0.2 ā 1) / (n ā 1) (2 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 82% for the first beam, about 91% for the second beam, and about 57% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the blazed structure.
- Example 8 (First optical path difference providing structure example 8)
- the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 13B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (3.1 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (3.1 ā 1 + 0.2 ā 1) / (n ā 1) (3.1 ā 1-0.2 ā 1) / (n ā 1) ā 1) ā d22 ā (3.1 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first foundation structure and the second foundation structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (3.1 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (3.1 ā 1 + 0.2 ā 1) / (n ā 1) (2.1 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (2.1 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 90% for the first beam, about 85% for the second beam, and about 50% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the blazed structure.
- Example 9 (First optical path difference providing structure example 9)
- the second basic structure having a stepped structure is a seven-step stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 14B, the second basic structure having a stepped structure is a seven-step stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.29 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.29 ā 1 + 0.2 ā 1) / (n ā 1) (7.74 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (7.74 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.74 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.74 ā 1 + 0.2 ā 1) / (n ā 1) (1.29 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.29 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 76% for the first beam, about 76% for the second beam, and about 64% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 10 (First optical path difference providing structure example 10)
- the 2nd foundation structure which is a step type structure is a step type structure of 8 divisions.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a step type structure of 8 divisions.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.13 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.13 ā 1 + 0.2 ā 1) / (n ā 1) (7.91 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (7.91 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is an eight-divided blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.91 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.91 ā 1 + 0.2 ā 1) / (n ā 1) (1.13 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.13 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 95% for the first beam, about 70% for the second beam, and about 51% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 11 (First optical path difference providing structure example 11)
- the 2nd foundation structure which is a step type structure is a step type structure of 8 divisions.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (3 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (3 ā 1 + 0.4 ā 1) / (n ā 1) (1.37 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.37 ā 1 + 0.2 ā 1) / (n ā 1) (9.59 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (9.59 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is an eight-divided blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.59 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.59 ā 1 + 0.2 ā 1) / (n ā 1) (1.37 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.37 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 61% for the first beam, about 81% for the second beam, and about 71% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 12 (First optical path difference providing structure example 12)
- the second basic structure having a stepped structure is a nine-stage stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 17 (b), the second basic structure having a stepped structure is a nine-stage stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (2 ā 1 + 0.4 ā 1) / (n ā 1) (1.11 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.11 ā 1 + 0.2 ā 1) / (n ā 1) (8.88 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (8.88 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a nine-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.88 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.88 ā 1 + 0.2 ā 1) / (n ā 1) (1.11 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.11 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- 1,
- 4,
- 5 is satisfied, and the positive and negative signs of L, M, and N are equal.
- L, M, and N are preferably positive.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 91% for the first beam, about 66% for the second beam, and about 48% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 13 (First optical path difference providing structure example 13)
- the 2nd basic structure which is a staircase type structure is a 10-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 10-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (2 ā 1 + 0.4 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) (10.8 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (10.8 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a 10-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (8.8 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (8.8 ā 1 + 0.2 ā 1) / (n ā 1) (1.2 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 88% for the first beam, about 76% for the second beam, and about 57% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 14 (First optical path difference providing structure example 14)
- the second basic structure having a stepped structure is a ten-step divided structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 19B, the second basic structure having a stepped structure is a ten-step divided structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (3 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (3 ā 1 + 0.4 ā 1) / (n ā 1) (1.33 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.33 ā 1 + 0.2 ā 1) / (n ā 1) (11.97 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (11.97 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a 10-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (8.97 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (8.97 ā 1 + 0.2 ā 1) / (n ā 1) (1.33 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.33 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 74% for the first beam, about 85% for the second beam, and about 65% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 15 (First optical path difference providing structure example 15)
- the second basic structure that is a stepped structure is a six-step staircase structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (1.19 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (1.19 ā 1 + 0.2 ā 1) / (n ā 1) (5.95 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (5.95 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a six-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (6.95 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (6.95 ā 1 + 0.2 ā 1) / (n ā 1) (1.19 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (1.19 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 86% for the first beam, about 74% for the second beam, and about 54% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 16 (First optical path difference providing structure example 16)
- the second basic structure having a stepped structure is a four-step stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 21 (b), the second basic structure having a stepped structure is a four-step stepped structure. Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (3.25 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (3.25 ā 1 + 0.2 ā 1) / (n ā 1) (9.75 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (9.75 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (8.75 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (8.75 ā 1 + 0.2 ā 1) / (n ā 1) (3.25 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (3.25 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 81% for the first beam, about 89% for the second beam, and about 61% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
- Example 17 (First optical path difference providing structure example 17)
- the 2nd foundation structure which is a staircase type structure is a 4 stepped staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a 4 stepped staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (3.22 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (3.22 ā 1 + 0.2 ā 1) / (n ā 1) (9.66 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (9.66 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (10.66 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (10.66 ā 1 + 0.2 ā 1) / (n ā 1) (3.22 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (3.22 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 78% for the first beam, about 72% for the second beam, and about 58% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- the second basic structure having a stepped structure is a two-step staircase structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 23B, the second basic structure having a stepped structure is a two-step staircase structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: (2 ā 1-0.4 ā 1) / (n ā 1) ā d1 ā (2 ā 1 + 0.4 ā 1) / (n ā 1) (3.05 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (3.05 ā 1 + 0.2 ā 1) / (n ā 1) (3.05 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (3.05 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are overlapped in the same direction.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (5.05 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (5.05 ā 1 + 0.2 ā 1) / (n ā 1) (3.05 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (3.05 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 98% for the first beam, about 91% for the second beam, and about 41% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- Example 19 (First optical path difference providing structure example 19)
- the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 24B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 ( ā m) of the large step of the stepped structure of the second basic structure, and As shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (5 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) (5 ā 1-0.2 ā 1) / (n ā 1) ā 1) ā d22 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (5 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) (4 ā 1-0.2 ā 1) / (n-1) ā d00 ā (4 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 82% for the first beam, about 83% for the second beam, and about 54% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
- Example 20 (First optical path difference providing structure example 20)
- the 2nd foundation structure which is a staircase type structure is a three-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a three-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.25 (b).
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (2 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (2 ā 1 + 0.2 ā 1) / (n ā 1) (4 ā 1 ā 0.2 ā 1) / (n ā 1) ā d22 ā (4 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a three-part blazed stepped structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (3 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (3 ā 1 + 0.2 ā 1) / (n ā 1) (2 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (2 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 100% for the first beam, about 88% for the second beam, and about 44% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
- Example 21 (First optical path difference providing structure example 21)
- the 2nd foundation structure which is a staircase type structure is a three-step staircase type structure.
- the length d21 ( ā m) of the small step of the stepped structure of the second basic structure in the optical axis direction is a three-step staircase type structure.
- the length d22 ( ā m) of the large step of the stepped structure of the second basic structure is shown in FIG.
- the length d1 ( ā m) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression: ( ā 1 ā 0.4 ā 1) / (n ā 1) ā d1 ā ( ā 1 + 0.4 ā 1) / (n ā 1) (3 ā 1-0.2 ā 1) / (n ā 1) ā d21 ā (3 ā 1 + 0.2 ā 1) / (n ā 1) (6 ā 1-0.2 ā 1) / (n ā 1) ā d22 ā (6 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- the directions of the first basic structure and the second basic structure are superimposed in different directions.
- the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a three-part blazed staircase structure as shown in FIG.
- the length d0 ( ā m) of the largest step of the structure in the optical axis direction and the length d00 ( ā m) of the small step of the first optical path difference providing structure in the optical axis direction are as follows: (5 ā 1-0.2 ā 1) / (n ā 1) ā d0 ā (5 ā 1 + 0.2 ā 1) / (n ā 1) (3 ā 1-0.2 ā 1) / (n ā 1) ā d00 ā (3 ā 1 + 0.2 ā 1) / (n ā 1) Meet.
- step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression.
- the aspheric surface of the objective lens is curved.
- the step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
- 1,
- 1,
- 2, and the signs of L, M, and N are equal.
- L, M, and N are preferably positive.
- the first wavelength of the first light beam is about 405 nm
- the second wavelength of the second light beam is about 655 nm
- the third wavelength of the third light beam is about 785 nm.
- the diffraction efficiency can be about 100% for the first beam, about 80% for the second beam, and about 40% for the third beam.
- the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
- the second optical path difference providing structure when the second optical path difference providing structure is provided in the peripheral area of the objective lens, it may be provided on different optical surfaces of the objective lens, but the same It is preferably provided on the optical surface. Providing them on the same optical surface is preferable because it makes it possible to reduce eccentricity errors during manufacturing. Moreover, it is preferable that the first optical path difference providing structure and the second optical path difference providing structure are provided on the light source side surface of the objective lens rather than the optical disk side surface of the objective lens.
- the objective lens condenses the first light beam, the second light beam, and the third light beam that pass through the central region where the first optical path difference providing structure of the objective lens is provided so as to form a condensed spot.
- the objective lens is capable of recording and / or reproducing information on the information recording surface of the first optical disc, with the first light beam passing through the central region provided with the first optical path difference providing structure of the objective lens. Condensate.
- the objective lens collects the second light flux that passes through the central region where the first optical path difference providing structure of the objective lens is provided so that information can be recorded and / or reproduced on the information recording surface of the second optical disc. Shine.
- the objective lens collects the third light flux that passes through the central region where the first optical path difference providing structure of the objective lens is provided so that information can be recorded and / or reproduced on the information recording surface of the third optical disc. Shine.
- the first optical path difference providing structure includes the first light flux passing through the first optical path difference providing structure and the second optical flux. It occurs due to the spherical aberration generated by the difference between the thickness t1 of the protective substrate of the first optical disk and the thickness t2 of the protective substrate of the second optical disk and / or the difference in the wavelengths of the first and second light beams.
- the first optical path difference providing structure has a thickness t1 of the protective substrate of the first optical disc and a thickness of the protective substrate of the third optical disc with respect to the first light beam and the third light beam that have passed through the first optical path difference providing structure. It is preferable to correct spherical aberration generated due to a difference from t3 and / or spherical aberration generated due to a difference in wavelength between the first light flux and the third light flux.
- the working distance of the CD as the third optical disk can be secured without reducing the pitch of the optical path difference providing structure, and the objective lens can be easily manufactured.
- the light use efficiency is increased. Can be maintained.
- 2.1mm ā ā ā 4.2mm ā represents the effective diameter of the objective lens when the first optical disk is used.
- the objective lens condenses the first light flux and the second light flux that pass through the peripheral region so as to form a condensed spot, respectively.
- the objective lens is capable of recording and / or reproducing information on the information recording surface of the first optical disc, with the first light flux passing through the peripheral region provided with the second optical path difference providing structure of the objective lens. Condensate.
- the objective lens records the information on the information recording surface of the second optical disk and / or records the second light flux that passes through the peripheral region. Light is collected so that it can be regenerated.
- the second optical path difference providing structure corrects chromatic spherical aberration caused by a difference in wavelength between the first light beam and the second light beam that pass through the second optical path difference providing structure.
- the third light flux that has passed through the peripheral area is not used for recording and / or reproduction of the third optical disk. It is preferable that the third light flux that has passed through the peripheral region does not contribute to the formation of a focused spot on the information recording surface of the third optical disc. That is, when the objective lens is provided with the second optical path difference providing structure, it is preferable that the third light flux passing through the peripheral region thereby forms a flare on the information recording surface of the third optical disc. As shown in FIG. 4, in the spot formed on the information recording surface of the third optical disc by the third light flux that has passed through the objective lens, the light amount density is high in the order from the optical axis side (or the spot center) to the outside.
- the center portion of the spot is used for recording and / or reproducing information on the optical disc, and the spot intermediate portion and the spot peripheral portion are not used for recording and / or reproducing information on the optical disc.
- this spot peripheral part is called flare. That is, it is preferable that the third light flux that has passed through the second optical path difference providing structure provided in the peripheral region of the objective lens forms a spot peripheral portion on the information recording surface of the third optical disc.
- the condensing spot or spot of a 3rd light beam is a spot in 1st best focus.
- the first light flux that has passed through the outermost peripheral area is used for recording and / or reproduction of the first optical disc
- the second and third light fluxes that have passed through the outermost peripheral area Includes an aspect that is not used for recording and / or reproduction of the second optical disc and the third optical disc. It is preferable that the second light flux and the third light flux that have passed through the outermost peripheral region do not contribute to the formation of a condensed spot on the information recording surfaces of the second optical disc and the third optical disc, respectively.
- the second light flux and the third light flux that pass through the outermost peripheral area of the objective lens preferably form a flare on the information recording surfaces of the second optical disc and the third optical disc.
- the second light flux and the third light flux that have passed through the most peripheral area of the objective lens form a spot peripheral portion on the information recording surface of the second optical disc and the third optical disc.
- the third optical path difference providing structure is generated by a slight variation in the wavelength of the first light source with respect to the first light flux that has passed through the third optical path difference providing structure.
- Spherochromatism chromatic spherical aberration
- a slight change in wavelength refers to a change within ā 10 nm.
- the third optical path difference providing structure compensates for the variation in spherical aberration of the first light beam that has passed through the most peripheral region, and on the information recording surface of the first optical disc. It is preferable that the amount of change in the wavefront aberration at 0.001 ā 2 rms or more and 0.070 ā 2 rms or less.
- the second optical path difference providing structure may be a single stepped structure or a single blazed structure, or a blazed structure and a rougher (large pitch) blazed structure are superimposed. The structure which becomes may be sufficient.
- the second optical path difference providing structure is the superposition structure, the first wavelength ā 1 of the first light flux is used for the blaze structure (in the case of the second optical path difference providing structure, a diffractive structure that is not rough (small pitch)).
- An optical path difference corresponding to an even multiple of the first light flux may be imparted to the first light flux so that the phase of the wavefront of the first light flux does not change.
- the third wavelength ā 3 of the third light flux is a wavelength that is substantially an even multiple of the first wavelength of the first light flux
- an optical path difference of an integral multiple is given to the third light flux.
- the first light flux and the third light flux are not affected by the diffraction structure.
- even multiples means a range of (2n ā 0.1) ā ā 1 or more and (2n + 0.1) ā ā 1 or less when n is a natural number.
- the first optical path difference providing structure by superimposing the first basic structure and the second basic structure, all of the first, second, and third light beams that have passed through the first optical path difference providing structure are output. Since the directions of the incident light can be made different, even if all the first, second, and third light beams are incident on the objective lens with the same imaging magnification (for example, all parallel light beams), they are different. Aberrations caused by using different types of optical discs can be corrected, and compatibility is possible.
- the third basic structure as the temperature characteristic correcting structure may be further overlapped with the first basic structure and the second basic structure as the first optical path difference providing structure.
- the first optical disc is an HD
- the influence of temperature change is not so great, so that the objective lens does not have to be provided with a basic structure as a temperature characteristic correcting structure.
- the step difference in the optical axis direction of the third basic structure gives an optical path difference of about 10 wavelengths of the first wavelength to the first light flux, and about 6 of the second wavelength to the second light flux. It is preferable that the difference in level be such that an optical path difference corresponding to the wavelength is given and an optical path difference equivalent to about 5 wavelengths of the third wavelength is given to the third light flux.
- the basic structure may be used as the temperature characteristic correcting structure, and the stacked structure may be used as the second optical path difference providing structure.
- the first optical disc is an HD
- the influence of temperature change is not so great, so that the objective lens does not have to be provided with a basic structure as a temperature characteristic correcting structure.
- the step difference in the optical axis direction of the third basic structure gives an optical path difference corresponding to approximately five wavelengths of the first wavelength to the first light flux, and approximately the second wavelength relative to the second light flux. It is preferable that the step amount is such that an optical path difference for three wavelengths is given and an optical path difference for about two wavelengths of the third wavelength is given to the third light flux.
- the outermost peripheral region is provided and the objective lens is made of plastic, it is preferable to further provide the third optical path difference providing structure in the outermost peripheral region. It is good also as a structure which has a basic structure.
- the level difference is not too large. If the level difference of the annular zone with the optical path difference providing structure that is the basis obtained by superimposing multiple foundation structures is higher than the reference value, the level difference of the annular zone is only 10 ā ā B / (n-1) ( ā m) By making it low, it becomes possible to reduce an excessively large step amount without affecting the optical performance.
- An arbitrary value can be set as the reference value, but it is preferable to set 10 ā ā B / (n ā 1) ( ā m) as the reference value.
- the value of (step amount / pitch width) is 1 or less in all the ring zones of the first optical path difference providing structure, and more preferable. Is 0.8 or less. More preferably, the value of (step difference / pitch width) is preferably 1 or less, and more preferably 0.8 or less, in all annular zones of all optical path difference providing structures.
- the objective-side numerical aperture of the objective lens necessary for reproducing and / or recording information on the first optical disk is NA1
- the objective lens necessary for reproducing and / or recording information on the second optical disk is NA2 (NA1 ā NA2)
- NA3 NA2> NA3
- NA1 is preferably 0.6 or more and 0.9 or less.
- NA1 is preferably 0.85.
- NA2 is preferably 0.55 or more and 0.7 or less.
- NA2 is preferably 0.60 or 0.65.
- NA3 is preferably 0.4 or more and 0.55 or less.
- NA3 is preferably 0.45 or 0.53.
- the boundary between the central region and the peripheral region of the objective lens is 0.9 ā NA3 or more and 1.2 ā NA3 or less (more preferably 0.95 ā NA3 or more, 1.15 ā NA3) when the third light flux is used. It is preferably formed in a portion corresponding to the following range. More preferably, the boundary between the central region and the peripheral region of the objective lens is formed in a portion corresponding to NA3.
- the boundary between the peripheral area and the most peripheral area of the objective lens is 0.9 ā NA 2 or more and 1.2 ā NA 2 or less (more preferably 0.95 ā NA 2 or more, 1. 15 ā NA2 or less) is preferable. More preferably, the boundary between the peripheral region and the most peripheral region of the objective lens is formed in a portion corresponding to NA2.
- the spherical aberration has at least one discontinuous portion.
- the discontinuous portion has a range of 0.9 ā NA 3 or more and 1.2 ā NA 3 or less (more preferably 0.95 ā NA 3 or more and 1.15 ā NA 3 or less) when the third light flux is used. It is preferable that it exists in.
- NA2 it is preferable that the absolute value of the spherical aberration is 0.03 ā m or more, and in NA3, the absolute value of the longitudinal spherical aberration is 0.02 ā m or less. More preferably, in NA2, the absolute value of longitudinal spherical aberration is 0.08 ā m or more, and in NA3, the absolute value of longitudinal spherical aberration is 0.01 ā m or less.
- the diffraction efficiency for each wavelength in the central region can be set as appropriate according to the use of the optical pickup device.
- the diffraction efficiency of the central region and / or the peripheral region is expressed as It is preferable to set with emphasis.
- the second and third light fluxes are emphasized with respect to the diffraction efficiency of the central region. It is preferable to set the diffraction efficiency of the peripheral region with the second light flux as important.
- the diffraction efficiency in this specification can be defined as follows.
- the transmittance of an objective lens that has the same focal length, lens thickness, and numerical aperture, is formed of the same material, and does not have the first and second optical path difference providing structures is formed in the central region and the peripheral region. Separately measure. At this time, the transmittance of the central region is measured by blocking the light beam incident on the peripheral region, and the transmittance of the peripheral region is measured by blocking the light beam incident on the central region.
- the transmittance of the objective lens having the first and second optical path difference providing structures is measured separately for the central region and the peripheral region.
- the value obtained by dividing the result of [2] by the result of [1] is the diffraction efficiency of each region.
- the light utilization efficiency of any two of the first to third light fluxes is 70% or more, and the light utilization efficiency of the remaining one light flux is 30% or more and 70% or less. Good.
- the light utilization efficiency of the remaining one light beam may be 40% or more and 60% or less. In this case, it is preferable that the light beam having the light use efficiency of 30% or more and 70% or less (or 40% or more and 60% or less) is the third light beam.
- the light utilization efficiency is the information recording on the optical disk by the objective lens in which the first optical path difference providing structure is formed (the second optical path difference providing structure and the third optical path difference providing structure may be formed).
- the amount of light in the Airy disk of the focused spot formed on the surface is A
- the first optical path is formed from the same material and has the same focal length, axial thickness, numerical aperture, and wavefront aberration.
- the amount of light in the Airy disk of the focused spot formed on the information recording surface of the optical information recording medium by the objective lens in which the difference providing structure, the second optical path difference providing structure, and the third optical path difference providing structure are not formed is defined as B.
- the first light beam, the second light beam, and the third light beam may be incident on the objective lens as parallel light, or may be incident on the objective lens as divergent light or convergent light.
- the imaging magnification m1 of the objective lens when the first light beam enters the objective lens is expressed by the following formula (1), -0.02 ā m1 ā 0.02 (1) Is to satisfy.
- the imaging magnification m1 of the objective lens when the first light flux is incident on the objective lens is expressed by the following equation (1 ā²), -0.10 ā m1 ā 0 (1 ') It is preferable to satisfy.
- the imaging magnification m2 of the objective lens when the second light flux is incident on the objective lens is expressed by the following equation (2): -0.02 ā m2 ā 0.02 (2) It is preferable to satisfy.
- the imaging magnification m2 of the objective lens when the second light flux is incident on the objective lens is expressed by the following equation (2 ā²): -0.10 ā m2 ā 0 (2 ') It is preferable to satisfy.
- the imaging magnification m3 of the objective lens when the third light beam enters the objective lens satisfies the following expression (3). Is preferred.
- the third light flux is parallel light, a problem easily occurs in tracking.
- the present invention can obtain good tracking characteristics, and can be used for three different optical disks. On the other hand, recording and / or reproduction can be appropriately performed.
- the imaging magnification m3 of the objective lens when the third light beam enters the objective lens is expressed by the following equation (3 ā²): -0.10 ā m3 ā 0 (3 ') It is preferable to satisfy.
- the working distance (WD) of the objective lens when using the third optical disk is preferably 0.20 mm or more and 1.5 mm or less. Preferably, it is 0.3 mm or more and 1.20 mm or less.
- the WD of the objective lens when using the second optical disk is preferably 0.4 mm or more and 1.3 mm or less.
- the WD of the objective lens when using the first optical disk is preferably 0.4 mm or more and 1.2 mm or less.
- An optical information recording / reproducing apparatus includes an optical disc drive apparatus having the above-described optical pickup apparatus.
- the optical disk drive apparatus can hold an optical disk mounted from the optical information recording / reproducing apparatus main body containing the optical pickup apparatus or the like. There are a system in which only the tray is taken out, and a system in which the optical disc drive apparatus main body in which the optical pickup device is stored is taken out to the outside.
- optical information recording / reproducing apparatus using each method described above is generally equipped with the following components, but is not limited thereto.
- a drive source of an optical pickup device such as a seek motor that moves the optical pickup device together with the housing toward the inner periphery or outer periphery of the optical disc
- the optical pickup device housing the inner periphery or outer periphery of the optical disc include a transfer means of an optical pickup device having a guide rail or the like that guides toward the head, a spindle motor that rotates the optical disk, and the like.
- the former method is provided with a tray that can be held in a state in which an optical disk is mounted and a loading mechanism for sliding the tray, and the latter method has no tray and loading mechanism. It is preferable that each component is provided in a drawer corresponding to a chassis that can be pulled out to the outside.
- the desired optical characteristics can be exhibited, the molding die configuration can be prevented from becoming too complicated, the transferability can be improved, and the configuration can be simplified and reduced in cost. It is possible to provide a possible objective lens and an optical pickup device using the same.
- FIG. 3 is a cross-sectional view schematically showing several examples (a) to (d) of an optical path difference providing structure provided in the objective lens OBJ according to the present invention. It is a figure which shows the superimposition of the optical path difference providing structure. It is the figure which showed the shape of the spot by the objective lens which concerns on this invention. It is a figure which shows schematically the structure of the optical pick-up apparatus which concerns on this invention.
- optical path difference providing structure In the optical path difference providing structure according to Example 1, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 2 In the optical path difference providing structure according to Example 2, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 3 In the optical path difference providing structure according to Example 3, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 4, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 5 In the optical path difference providing structure according to Example 5, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 6 In the optical path difference providing structure according to Example 6, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 7, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 8 (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 9 In the optical path difference providing structure according to Example 9, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 10, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 11 (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 12 In the optical path difference providing structure according to Example 12, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 13, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 14 (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 15 In the optical path difference providing structure according to Example 15, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 16, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure. In the optical path difference providing structure according to Example 17, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure. In the optical path difference providing structure according to Example 18, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure In the optical path difference providing structure according to Example 19, (a) the cross section of the first basic structure, (b) the cross section of the second basic structure, (c) the cross section of the superimposed optical path difference providing structure.
- the optical path difference providing structure according to Example 20 In the optical path difference providing structure according to Example 20, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, and (c) a cross section of the superimposed optical path difference providing structure.
- optical path difference providing structure according to Example 21 In the optical path difference providing structure according to Example 21, (a) a cross section of the first basic structure, (b) a cross section of the second basic structure, (c) a cross section of the superimposed optical path difference providing structure.
- FIG. 5 is a diagram schematically showing a configuration of the optical pickup device PU1 of the present embodiment that can appropriately record and / or reproduce information on BD, DVD, and CD, which are different optical disks.
- Such an optical pickup device PU1 can be mounted on an optical information recording / reproducing device.
- the first optical disc is a BD
- the second optical disc is a DVD
- the third optical disc is a CD.
- the present invention is not limited to the present embodiment.
- the MD and the outermost peripheral region OT disposed around the MD are formed concentrically around the optical axis.
- a first optical path difference providing structure in which the first basic structure and the second basic structure are superimposed is formed in the central area CN, and a second optical path difference providing structure is formed in the peripheral area MD.
- the third optical path difference providing structure is formed and a structure in which the third optical path difference providing structure is not formed and a refractive surface.
- the first optical path difference providing structure for example, the 0th-order diffracted light amount of the first light beam that has passed is made larger than any other order diffracted light amount, and the second-order diffracted light amount of the second light beam is made any other order of diffraction
- a structure in which the third-order diffracted light quantity of the third light beam is made larger than any other order diffracted light quantity can be used, but examples of the first optical path difference providing structure in this specification are 1 to Any of those described in 21 can be used.
- the second optical path difference providing structure and the third optical path difference providing structure can be arbitrarily selected according to the first optical path difference providing structure.
- the second optical path difference providing structure is preferably a structure in which the fourth basic structure and the fifth basic structure are superimposed.
- the fourth basic structure has a structure that maximizes the first-order diffracted light amount in the first light beam and the second light beam
- the fifth basic structure has the maximum zero-order diffracted light amount in the first light beam
- the second light beam is ā
- a structure that maximizes the first-order diffracted light amount is preferable.
- the 3rd optical path difference providing structure is formed only by the 7th foundation structure.
- the seventh basic structure is a blazed structure in which the second-order diffracted light amount of the first light beam that has passed is made larger than any other order of diffracted light amount, and the first-order diffracted light amount of the second light beam is made to be any other.
- the first order diffracted light amount of the third light flux is made larger than any other order diffracted light amount. Note that the ratios of the areas of the central region, the peripheral region, and the outermost peripheral region in FIGS. 1A and 1B are not accurately represented.
- the diameter of the light beam is regulated by the stop ST, and enters the objective lens OBJ.
- the light beam condensed by the central region, the peripheral region, and the outermost peripheral region of the objective lens OBJ is a spot formed on the information recording surface RL1 of the BD via the protective substrate PL1 having a thickness of 0.1 mm.
- the reflected light beam modulated by the information pits on the information recording surface RL1 passes through the objective lens OBJ and the aperture stop ST again, is converted from circularly polarized light to linearly polarized light by a ā 1 / 4 wavelength plate (not shown), and is converged by the collimating lens CL. After being transmitted through the dichroic prism PPS, it is converged on the light receiving surface of the first light receiving element PD1. Then, by using the output signal of the first light receiving element PD1 to focus or track the objective lens OBJ by the biaxial actuator AC, it is possible to read information recorded on the BD.
- Polarized light is converted by the / 4 wavelength plate and enters the objective lens OBJ.
- the light beam condensed by the central region and the peripheral region of the objective lens OBJ (the light beam that has passed through the most peripheral region is flared and forms a spot peripheral part) is passed through the protective substrate PL2 having a thickness of 0.6 mm.
- the spot is formed on the information recording surface RL2 of the DVD, and the center of the spot is formed.
- the reflected light beam modulated by the information pits on the information recording surface RL2 is again transmitted through the objective lens OBJ and the aperture stop ST, is then polarized by a ā 1 / 4 wave plate (not shown), is converted into a convergent light beam by the collimator lens CL, and is dichroic. After being reflected by the prism PPS, then after being reflected twice in the prism, it converges on the second light receiving element DS1. The information recorded on the DVD can be read using the output signal of the second light receiving element DS1. It should be noted that the light utilization efficiency can be increased by performing polarization conversion with the ā 1 / 4 wavelength plate in the round-trip path as compared with the case where there is no ā 1 / 4 wavelength plate.
- Polarized light is converted by the ā 1 / 4 wave plate and enters the objective lens OJT.
- the light beam condensed by the central region of the objective lens OBJ (the light beam that has passed through the peripheral region and the most peripheral region is flared and forms a spot peripheral part) is passed through the protective substrate PL3 having a thickness of 1.2 mm.
- the spot is formed on the information recording surface RL3 of the CD.
- the reflected light beam modulated by the information pits on the information recording surface RL3 is again transmitted through the objective lens OBJ and the aperture stop ST, and then is converted by the ā 1 / 4 wavelength plate (not shown), and is converted into a convergent light beam by the collimator lens CL. After being reflected by the prism PPS, then after being reflected twice in the prism, it converges on the third light receiving element DS2.
- the information recorded on the CD can be read using the output signal of the third light receiving element DS2. It should be noted that the light utilization efficiency can be increased by performing polarization conversion with the ā 1 / 4 wavelength plate in the round-trip path as compared with the case where there is no ā 1 / 4 wavelength plate.
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Abstract
Description
ćę¬ēŗęćÆćē°ćŖć種é”ć®å ćć£ć¹ćÆć«åƾćć¦äŗęåÆč½ć«ę å ±ć®čØé²åć³ļ¼åćÆåēćč”ććå ćććÆć¢ććč£ ē½®åć³ććć«ēØćć対ē©ć¬ć³ćŗć«é¢ććć The present invention relates to an optical pickup apparatus capable of recording and / or reproducing information interchangeably for different types of optical discs and an objective lens used therefor.
ćčæå¹“ćå ćććÆć¢ććč£ ē½®ć«ććć¦ćå ćć£ć¹ćÆć«čØé²ćććę å ±ć®åēććå ćć£ć¹ćÆćøć®ę å ±ć®čØé²ć®ććć®å ęŗćØćć¦ä½æēØćććć¬ć¼ć¶å ęŗć®ēę³¢é·åćé²ćæćä¾ćć°ćéē“«č²åå°ä½ć¬ć¼ć¶ćć第ļ¼é«čŖæę³¢ćå©ēØćć¦čµ¤å¤åå°ä½ć¬ć¼ć¶ć®ę³¢é·å¤ęćč”ćéč²ļ¼³ļ¼Øļ¼§ć¬ć¼ć¶ēćę³¢é·ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ½ļ½ć®ć¬ć¼ć¶å ęŗćå®ēØåććć¤ć¤ććććććéē“«č²ć¬ć¼ć¶å ęŗć使ēØćććØćDVDļ¼ććøćæć«ćć¼ćµćæć¤ć«ćć£ć¹ćÆļ¼ćØåćéå£ę°ļ¼ļ¼®ļ¼”ļ¼ć®åƾē©ć¬ć³ćŗć使ēØććå “åć§ćē“å¾ļ¼ļ¼ļ½ļ½ć®å ćć£ć¹ćÆć«åƾćć¦ćļ¼ļ¼ļ½ļ¼ļ¼ļ¼§ļ¼¢ć®ę å ±ć®čØé²ćåÆč½ćØćŖćć対ē©ć¬ć³ćŗć®ļ¼®ļ¼”ćļ¼ļ¼ļ¼ļ¼ć«ć¾ć§é«ććå “åć«ćÆćē“å¾ļ¼ļ¼ļ½ļ½ć®å ćć£ć¹ćÆć«åƾćć¦ćļ¼ļ¼ļ½ļ¼ļ¼ļ¼§ļ¼¢ć®ę å ±ć®čØé²ćåÆč½ćØćŖćć仄äøćę¬ęē“°ęøć§ćÆćéē“«č²ć¬ć¼ć¶å ęŗć使ēØććå ćć£ć¹ćÆåć³å ē£ę°ćć£ć¹ćÆćē·ē§°ćć¦ćé«åÆåŗ¦å ćć£ć¹ćÆććØććć In recent years, in an optical pickup device, a laser light source used as a light source for reproducing information recorded on an optical disc and recording information on the optical disc has been shortened. For example, a blue-violet semiconductor laser, Laser light sources with wavelengths of 400 to 420 nm, such as blue SHG lasers that perform wavelength conversion of infrared semiconductor lasers using harmonics, are being put into practical use. When these blue-violet laser light sources are used, it is possible to record 15 to 20 GB of information on an optical disk having a diameter of 12 cm when an objective lens having the same numerical aperture (NA) as that of a DVD (digital versatile disk) is used. When the NA of the objective lens is increased to 0.85, 23 to 25 GB of information can be recorded on an optical disk having a diameter of 12 cm. Hereinafter, in this specification, an optical disk and a magneto-optical disk using a blue-violet laser light source are collectively referred to as a āhigh density optical diskā.
ćå°ćN4ļ¼ļ¼ļ¼ļ¼ć®åƾē©ć¬ć³ćŗć使ēØććé«åÆåŗ¦å ćć£ć¹ćÆć§ćÆćå ćć£ć¹ćÆć®å¾ćļ¼ć¹ćć„ć¼ļ¼ć«čµ·å ćć¦ēŗēććć³ćåå·®ćå¢å¤§ćććććDVDć«ćććå “åćććäæč·å±¤ćčćčØčØćļ¼ļ¼¤ļ¼¶ļ¼¤ć®ļ¼ļ¼ļ¼ļ½ļ½ć«åƾćć¦ćļ¼ļ¼ļ¼ļ½ļ½ļ¼ćć¹ćć„ć¼ć«ććć³ćåå·®éćä½ęøćć¦ćććć®ćććććØććć§ćććććæć¤ćć®é«åÆåŗ¦å ćć£ć¹ćÆć«åƾćć¦é©åć«ę å ±ć®čØé²ļ¼åēćć§ćććØčØćć ćć§ćÆćå ćć£ć¹ćÆćć¬ć¼ć¤ļ¼ć¬ć³ć¼ćļ¼å ę å ±čØé²åēč£ ē½®ļ¼ć®č£½åćØćć¦ć®ä¾”å¤ćÆååćŖćć®ćØćÆćććŖććē¾åØć«ććć¦ćå¤ēØ®å¤ę§ćŖę å ±ćčØé²ććDVDćCDļ¼ć³ć³ććÆććć£ć¹ćÆļ¼ć販売ććć¦ććē¾å®ććµć¾ćććØćé«åÆåŗ¦å ćć£ć¹ćÆć«åƾćć¦ę å ±ć®čØé²ļ¼åēćć§ććć ćć§ćÆč¶³ćććä¾ćć°ć¦ć¼ć¶ćęęćć¦ććDVDćCDć«åƾćć¦ćåę§ć«é©åć«ę å ±ć®čØé²ļ¼åēćć§ććććć«ććććØććé«åÆåŗ¦å ćć£ć¹ćÆēØć®å ćć£ć¹ćÆćć¬ć¼ć¤ļ¼ć¬ć³ć¼ććØćć¦ć®ååä¾”å¤ćé«ććććØć«éććć®ć§ććććć®ćććŖčęÆćććé«åÆåŗ¦å ćć£ć¹ćÆēØć®å ćć£ć¹ćÆćć¬ć¼ć¤ļ¼ć¬ć³ć¼ćć«ęč¼ćććå ćććÆć¢ććč£ ē½®ćÆćé«åÆåŗ¦å ćć£ć¹ćÆćØļ¼¤ļ¼¶ļ¼¤ćę“ć«ćÆļ¼£ļ¼¤ćØć®ä½ćć«åƾćć¦ćäŗęę§ćē¶ęććŖććé©åć«ę å ±ćčØé²ļ¼åēć§ććę§č½ćęććććØćęć¾ććć In a high-density optical disk using an NA 0.85 objective lens, coma aberration generated due to the inclination (skew) of the optical disk increases, so the protective layer is designed thinner than in the case of DVD (0 of DVD). Some have reduced the amount of coma due to skew. By the way, it can not be said that the value of an optical disc player / recorder (optical information recording / reproducing device) as a product is sufficient only by appropriately recording / reproducing information on such a high-density optical disc. In light of the reality that DVDs and CDs (compact discs) on which a wide variety of information is recorded are currently being sold, it is not possible to record / reproduce information on high-density optical discs. Similarly, making it possible to appropriately record / reproduce information on DVDs and CDs leads to an increase in commercial value as an optical disc player / recorder for high-density optical discs. From such a background, an optical pickup device mounted on an optical disc player / recorder for high density optical discs can appropriately receive information while maintaining compatibility with both high density optical discs, DVDs, and even CDs. It is desired to have a performance capable of recording / reproducing.
ćé«åÆåŗ¦å ćć£ć¹ćÆćØļ¼¤ļ¼¶ļ¼¤ćę“ć«ćÆļ¼£ļ¼¤ćØć®ä½ćć«åƾćć¦ćäŗęę§ćē¶ęććŖććé©åć«ę å ±ćčØé²ļ¼åēć§ććććć«ććę¹ę³ćØćć¦ćé«åÆåŗ¦å ćć£ć¹ćÆēØć®å å¦ē³»ćØļ¼¤ļ¼¶ļ¼¤ćCDēØć®å å¦ē³»ćØćę å ±ćčØé²ļ¼åēććå ćć£ć¹ćÆć®čØé²åÆåŗ¦ć«åæćć¦éøęēć«åćęæććę¹ę³ćčććććććč¤ę°ć®å å¦ē³»ćåæ č¦ćØćŖćć®ć§ćå°ååć«äøå©ć§ćććć¾ćć³ć¹ććå¢å¤§ććć As a method for recording / reproducing information appropriately while maintaining compatibility with both high-density optical discs and DVDs, and even CDs, optical systems for high-density optical discs and optical systems for DVDs and CDs are used. A method of selectively switching the system to and from the recording density of an optical disk for recording / reproducing information is conceivable, but a plurality of optical systems are required, which is disadvantageous for miniaturization and increases the cost.
ćå¾ć£ć¦ćå ćććÆć¢ććč£ ē½®ć®ę§ęćē°”ē“ åććä½ć³ć¹ćåćå³ćććć«ćÆćäŗęę§ćęććå ćććÆć¢ććč£ ē½®ć«ććć¦ććé«åÆåŗ¦å ćć£ć¹ćÆēØć®å å¦ē³»ćØļ¼¤ļ¼¶ļ¼¤ćCDēØć®å å¦ē³»ćØćå ±éåćć¦ćå ćććÆć¢ććč£ ē½®ćę§ęććå å¦éØåē¹ę°ćꄵåęøććć®ć儽ć¾ćććććć¦ćå ćć£ć¹ćÆć«åƾåćć¦é ē½®ććć対ē©ć¬ć³ćŗćå ±éåććććØćå ćććÆć¢ććč£ ē½®ć®ę§ęć®ē°”ē“ åćä½ć³ć¹ćåć«ęćęå©ćØćŖććå°ćčØé²ļ¼åēę³¢é·ćäŗćć«ē°ćŖćč¤ę°ēØ®é”ć®å ćć£ć¹ćÆć«åƾćć¦å ±éć«ä½æēØåÆč½ćŖåƾē©ć¬ć³ćŗćå¾ćććć«ćÆćēé¢åå·®ć®ę³¢é·ä¾åę§ćęććå č·Æå·®ä»äøę§é ć対ē©å å¦ē³»ć«å½¢ęććę³¢é·ć®éććäæč·å±¤ć®åćæć®éćć«ććēŗēććēé¢åå·®ćä½ęøććåæ č¦ćććć Therefore, in order to simplify the configuration of the optical pickup device and reduce the cost, the optical system for high-density optical discs and the optical system for DVDs and CDs must be shared in compatible optical pickup devices. It is preferable to reduce the number of optical components constituting the optical pickup device as much as possible. And, it is most advantageous to simplify the configuration of the optical pickup device and to reduce the cost to make the objective lens arranged facing the optical disc in common. In order to obtain an objective lens that can be used in common for a plurality of types of optical discs having different recording / reproducing wavelengths, an optical path difference providing structure having wavelength dependency of spherical aberration is formed in the objective optical system. It is necessary to reduce the spherical aberration that occurs due to the difference in thickness and the thickness of the protective layer.
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ćę¬ēŗęćÆćäøčæ°ć®åé”ćčę ®ćć¦ćŖććććć®ć§ććć対ē©ć¬ć³ćŗćØćć¦åēć®ć¬ć³ćŗćēØćććØćć¦ććé«åÆåŗ¦å ćć£ć¹ćÆļ¼ē¹ć«ļ¼¢ļ¼¤ļ¼ćØļ¼¤ļ¼¶ļ¼¤ćØļ¼£ļ¼¤ēć®ćčØé²åÆåŗ¦ćē°ćŖćļ¼ēØ®é”ć®ćć£ć¹ćÆć«åƾćć¦ę å ±ć®čØé²åć³ļ¼åćÆåēćé©åć«č”ćććØćć§ććå ćććÆć¢ććč£ ē½®åć³åƾē©ć¬ć³ćŗć§ćć£ć¦ćęęć®å å¦ē¹ę§ćēŗę®ć§ćććØå ±ć«ćęå½¢éåć®ę§ęćč¤éćŖćć®ć«ćŖććććäŗćé²ę¢ćć転åę§ćčÆå„½ć«ć§ćććć®ę§ęć®ē°”ē“ åćä½ć³ć¹ćåćå®ē¾åÆč½ćŖåƾē©ć¬ć³ćŗåć³ćććēØććå ćććÆć¢ććč£ ē½®ćęä¾ććććØćē®ēćØććć The present invention has been made in consideration of the above-mentioned problems. Even if a single lens is used as an objective lens, the recording density of the high-density optical disc (particularly BD), DVD, and CD is different. An optical pickup device and an objective lens capable of appropriately recording and / or reproducing information with respect to a disc of the above, and exhibiting desired optical characteristics, and the configuration of a molding die becomes too complicated It is an object of the present invention to provide an objective lens that can prevent this, improve transferability, simplify the configuration, and reduce the cost, and an optical pickup device using the objective lens.
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In order to solve the above problems, the invention according to
An optical path difference providing structure is formed on the optical surface of the objective lens,
The optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the steps of the second basic structure. It is superimposed so that the position of the part matches,
Of the diffracted light generated when the first light flux is incident on the optical path difference providing structure, where L, M, and N are arbitrary integers, the L-order diffracted light has the largest amount of diffracted light, and the optical path Diffraction generated when M-th order diffracted light has the maximum amount of diffracted light among the diffracted light generated when the second light flux is incident on the difference providing structure, and the third light flux is incident on the optical path difference providing structure. Of the light, the Nth order diffracted light has the maximum amount of diffracted light.
ćä¾ćć°ćć¬ć¼ćŗåå½¢ē¶ć®åęę§é åćÆé段形ē¶ć®åęę§é ć®ććććć®ćæćäŗęēØć®åƾē©ć¬ć³ćŗć«å½¢ęććå “åćåęå¹ēćé«ć第ļ¼å ęćØē¬¬ļ¼å ęćØē¬¬ļ¼å ęć®åęꬔę°ć®ēµćæåćććå®ć¾ć£ć¦ćć¾ććććčØčØć®čŖē±åŗ¦ćä½äøćććØććåé”ććććę¬ēŗęć®ććć«åŗē¤ę§é ćéē³ćććććØć§ćä»»ęć®åęꬔę°ć®éøęćč”ćććØćåŗę„ćčØčØć®čŖē±åŗ¦ćåäøćććØå ±ć«ćåäøć®å č·Æå·®é¢ę°ć使ēØćć¦čØčØććććØćåÆč½ćŖćććčØčØććććććŖććå ćć¦ćåčØē¬¬ļ¼ć®åŗē¤ę§é ć®å Øć¦ć®ę®µå·®éØć®ä½ē½®ćØåčØē¬¬ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćäøč“ććććć«éē³ćććććØć«ćććåčØå č·Æå·®ä»äøę§é ćć·ć³ćć«ć«ććććØćć§ćć対ē©ć¬ć³ćŗć®ęå½¢éåć®å å·„ć容ęć«ćŖćć対ē©ć¬ć³ćŗć®ęå½¢ęć«ęعčćć¬ć©ć¹ćéåć®ę«ē«Æć¾ć§å „ćč¾¼ćæćććć製é 精度ćé«ććććØćåŗę„ćčØčØå¤ć«čæćå éćå¾ćäŗćåÆč½ćØćŖććå éćć¹ćęøććććØćåÆč½ćØćŖćć For example, when only a blazed diffraction structure or a staircase diffraction structure is formed on a compatible objective lens, the combination of the diffraction orders of the first, second, and third light beams with high diffraction efficiency is determined. Therefore, there is a problem that the degree of freedom in design is reduced. By superimposing the basic structure as in the present invention, it is possible to select an arbitrary diffraction order, improving the degree of design freedom, and designing using a single optical path difference function. Therefore, it becomes easy to design. In addition, the optical path difference providing structure can be simplified by overlapping the positions of all the step portions of the first foundation structure so that the positions of the step portions of the second foundation structure coincide with each other. Processing of the mold for the objective lens is easy, resin and glass can easily enter the end of the mold when molding the objective lens, the manufacturing accuracy can be improved, and the light quantity close to the design value can be obtained, Light loss can be reduced.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćåčØē¬¬ļ¼åŗē¤ę§é ć®åčØę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććććć ććļ½ćÆćåčØē¬¬ļ¼å
ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć
According to a second aspect of the present invention, there is provided the objective lens according to the first aspect, wherein the second basic structure is a four-step staircase structure, and the optical axis direction of the small step of the stepped structure of the second basic structure. Length d21 (μm), the length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 (μm) is the following conditional expression:
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(1.25Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.25Ī»1 + 0.2Ī»1) / (nā1)
(3.75Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(3.75Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼åćÆļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬äøå
č·Æå·®ä»äøę§é ćÆćļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ćććåčØē¬¬äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććć
The objective lens according to
(4.95Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.95Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ććč«ę±é
ļ¼ć®ććććäøé
ć«čØč¼ć®ēŗęć«ććć¦ć
ļ½ļ¼¬ļ½ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗććć
LćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖćććØćē¹å¾“ćØććć
The objective lens according to
| L | = 2, M = 0, | N | = 1
The sign of L and N is different.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćåčØē¬¬ļ¼åŗē¤ę§é ć®åčØę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććććć ććļ½ćÆćåčØē¬¬ļ¼å
ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć
According to a fifth aspect of the present invention, there is provided the objective lens according to the first aspect, wherein the second basic structure is a six-step staircase structure, and the optical axis direction of the small step of the stepped structure of the second basic structure. Length d21 (μm), the length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 (μm) is the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
(6Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼åćÆļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬äøå
č·Æå·®ä»äøę§é ćÆćļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ćććåčØē¬¬äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććć
The objective lens according to
(5Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ćļ¼åćÆļ¼ć«čØč¼ć®ēŗęć«ććć¦ć
Lļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗććć
ļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććć
The objective lens according to
Satisfy L = 0, | M | = 2, | N | = 3,
The sign of M and N is equal.
ćč«ę±é
ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØåčØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćåčØē¬¬ļ¼åŗē¤ę§é ć®åčØę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććććć ććļ½ćÆćåčØē¬¬ļ¼å
ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć
According to an eighth aspect of the present invention, there is provided the objective lens according to the first aspect, wherein the second basic structure is a seven-stage stepped structure, and the optical axis direction of the small step of the stepped structure of the second basic structure. Length d21 (μm), the length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and the length in the optical axis of the step portion of the first basic structure d1 (μm) is the following conditional expression:
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.31Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.31Ī»1 + 0.2Ī»1) / (nā1)
(7.86Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.86Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
ćč«ę±é
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ļ¼åćÆļ¼ć«čØč¼ć®ēŗęć«ććć¦ćåčØē¬¬äøå
č·Æå·®ä»äøę§é ćÆćļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ćććåčØē¬¬äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććććØćē¹å¾“ćØććć
The objective lens according to
(4.86Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.86Ī»1 + 0.2Ī»1) / (nā1)
It is characterized by satisfying.
ćč«ę±é
ļ¼ļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗćÆćč«ę±é
ļ¼ćļ¼åćÆļ¼ć«čØč¼ć®ēŗęć«ććć¦ć
ļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗććć
LćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććć
The objective lens according to
| L | = 1, | M | = 3, | N | = 4,
The signs of L, M, and N are equal.
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ćåčØåƾē©ć¬ć³ćŗć®å
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軸ćå«ćč¼ŖåøÆē¶ć®äøå¤®é åćØćåčØäøå¤®é åć®åØå²ć«å½¢ęćććč¼ŖåøÆē¶ć®åØč¾ŗé åćØćåčØåØč¾ŗé åć®åØå²ć«å½¢ęćććč¼ŖåøÆē¶ć®ęåØč¾ŗé åćęćć
ćåčØäøå¤®é åćåčØåØč¾ŗé ååć³åčØęåØč¾ŗé åćééććåčØē¬¬ļ¼å
ęććåčØē¬¬ļ¼å
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å ±čØé²é¢ć«éå
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č·Æå·®ä»äøę§é ćÆåčØäøå¤®é åć«čØćććć¦ććććØćē¹å¾“ćØććć
The objective lens according to
The optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region. Has a surrounding area,
The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc,
The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc,
The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
The first optical path difference providing structure is provided in the central region.
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The optical pickup device according to claim 12 is focused on the information recording surface of the first optical disc having a protective layer having a thickness t1 by using the first light flux of wavelength λ1 (μm) emitted from the first light source. Spot formation is performed on the information recording surface of the second optical disc having a protective layer having a thickness t2 (t1 ⦠t2) using a second light flux having a wavelength λ2 (λ1 <λ2) emitted from the second light source. With respect to the information recording surface of the third optical disk having a protective layer having a thickness t3 (t2 <t3) using a third light beam having a wavelength λ3 (λ2 <λ3) emitted from the third light source. In an optical pickup device equipped with an objective lens for forming a condensed spot,
A first optical path difference providing structure is formed on the optical surface of the objective lens,
The first optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the second basic structure. Is superimposed so that the position of the step part of
L-th order diffracted light has the largest amount of diffracted light among the diffracted light generated when the first light flux is incident on the first optical path difference providing structure when L, M, and N are arbitrary integers, Of the diffracted light generated when the second light beam is incident on the first optical path difference providing structure, the Mth order diffracted light has the largest amount of diffracted light, and the third light beam is incident on the first optical path difference providing structure. Of the diffracted light generated in this case, the Nth order diffracted light has the maximum amount of diffracted light.
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ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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According to a thirteenth aspect of the present invention, in the invention according to the twelfth aspect, the second basic structure is a four-step staircase structure, and the optical axis of the small step of the stepped structure of the second basic structure. Length d21 (μm) in the direction, length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 (μm) is the following conditional expression:
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(1.25Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.25Ī»1 + 0.4Ī»1) / (nā1)
(3.75Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(3.75Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
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ćęŗććććØćē¹å¾“ćØććć
An optical pickup device according to a fourteenth aspect is the invention according to the twelfth or thirteenth aspect, wherein the first optical path difference providing structure is a four-part blazed stepped structure, and is the most of the first optical path difference providing structure. The length d0 (μm) in the optical axis direction of the large step is the following conditional expression:
(4.95Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(4.95Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying.
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The optical pickup device according to claim 15 is the invention according to any one of claims 12 to 14,
| L | = 2, M = 0, | N | = 1
The sign of L and N is different.
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ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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According to a sixteenth aspect of the present invention, there is provided the optical pickup device according to the twelfth aspect, wherein the second basic structure is a six-step staircase structure, and the optical axis of the small step of the stepped structure of the second basic structure. Length d21 (μm) in the direction, length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 (μm) is the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(6Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
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In an optical pickup device according to a seventeenth aspect, in the invention according to the twelfth or sixteenth aspect, the first optical path difference providing structure is a four-part blazed stepped structure, which is the most of the first optical path difference providing structure. The length d0 (μm) in the optical axis direction of the large step is the following conditional expression:
(5Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying.
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The optical pickup device according to claim 18 is the invention according to claim 12, 16 or 17,
Satisfy L = 0, | M | = 2, | N | = 3,
The sign of M and N is equal.
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ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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An optical pickup device according to a nineteenth aspect is the optical pickup device according to the twelfth aspect, wherein the second basic structure is a seven-step staircase structure, and the optical axis of a small step of the stepped structure of the second basic structure. Length d21 (μm) in the direction, length d22 (μm) in the optical axis direction of the large step of the stepped structure of the second basic structure, and length in the optical axis direction of the step portion of the first basic structure D1 (μm) is the following conditional expression:
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.31Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.31Ī»1 + 0.4Ī»1) / (nā1)
(7.86Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(7.86Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying. However, n represents the refractive index of the objective lens in the first light flux.
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č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
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ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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An optical pickup device according to a twentieth aspect is the invention according to the twelfth or nineteenth aspect, wherein the first optical path difference providing structure is a seven-part blazed stepped structure, and is the most of the first optical path difference providing structure. The length d0 (μm) in the optical axis direction of the large step is the following conditional expression
(4.86Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(4.86Ī»1 + 0.4Ī»1) / (nā1)
It is characterized by satisfying.
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The optical pickup device according to claim 21 is the invention according to claim 12, 19 or 20,
| L | = 1, | M | = 3, | N | = 4,
The signs of L, M, and N are equal.
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ćåčØäøå¤®é åćåčØåØč¾ŗé ååć³åčØęåØč¾ŗé åćééććåčØē¬¬ļ¼å
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The optical pickup device according to claim 22 is the invention according to any one of claims 12 to 21,
The optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region. Has a surrounding area,
The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc,
The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc,
The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
The first optical path difference providing structure is provided in the central region.
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„å°ććęć®ćåčØåƾē©ć¬ć³ćŗć®ēµååēļ½ļ¼ćäøčØć®å¼ļ¼ļ¼ļ¼ćåčØē¬¬ļ¼å
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An optical pickup device according to a twenty-third aspect is the optical pickup device according to any one of the twelfth to twenty-second aspects, wherein the objective lens is imaged when the first light flux is incident on the objective lens. The magnification m1 is the following equation (1), and the imaging magnification m2 of the objective lens when the second light beam is incident on the objective lens is the following equation (2), and the third light beam is incident on the objective lens. When the imaging magnification m3 of the objective lens is set to the following formula (3),
-0.02 <m1 <0.02 (1)
-0.02 <m2 <0.02 (2)
-0.02 <m3 <0.02 (3)
It is characterized by satisfying.
ćę¬ēŗęć«äæćå ćććÆć¢ććč£ ē½®ćÆć第ļ¼å ęŗć第ļ¼å ęŗć第ļ¼å ęŗć®å°ćŖććØćļ¼ć¤ć®å ęŗćęćććććć«ćę¬ēŗęć®å ćććÆć¢ććč£ ē½®ćÆć第ļ¼å ęć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ććć第ļ¼å ęć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ććć第ļ¼å ęć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ćććććć®éå å å¦ē³»ćęćććć¾ććę¬ēŗęć®å ćććÆć¢ććč£ ē½®ćÆć第ļ¼å ćć£ć¹ćÆć第ļ¼å ćć£ć¹ćÆåćÆē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ććć®åå°å ęćåå ććåå ē“ åćęććććć®ćØćć®ē¬¬ļ¼å ćć£ć¹ćÆćÆļ¼¢ļ¼¤ļ¼ļ¼¢ļ½ļ½ļ¼ļ½ļ½ļ½ćDļ½ļ½ļ½ļ¼åćÆļ¼Øļ¼¤ćDVDļ¼ä»„äøćHDćØčØč¼ļ¼ć第ļ¼å ćć£ć¹ćÆćÆļ¼¤ļ¼¶ļ¼¤ć§ććäŗć儽ć¾ććć第ļ¼å ćć£ć¹ćÆćÆļ¼£ļ¼¤ć§ććććØć儽ć¾ććććććć«éćććŖćć第ļ¼å ćć£ć¹ćÆć第ļ¼å ćć£ć¹ćÆćåćÆē¬¬ļ¼å ćć£ć¹ćÆćÆćč¤ę°ć®ę å ±čØé²é¢ćęććč¤ę°å±¤ć®å ćć£ć¹ćÆć§ćććć The optical pickup device according to the present invention has at least three light sources: a first light source, a second light source, and a third light source. Furthermore, the optical pickup device of the present invention condenses the first light flux on the information recording surface of the first optical disc, condenses the second light flux on the information recording surface of the second optical disc, and causes the third light flux to be third. It has a condensing optical system for condensing on the information recording surface of the optical disc. The optical pickup device of the present invention includes a light receiving element that receives a reflected light beam from the information recording surface of the first optical disc, the second optical disc, or the third optical disc. At this time, the first optical disc is preferably a BD (Blu-ray Disc) or HD DVD (hereinafter referred to as HD), the second optical disc is preferably a DVD, and the third optical disc is preferably a CD. Not limited. The first optical disc, the second optical disc, or the third optical disc may be a multi-layer optical disc having a plurality of information recording surfaces.
ćBDćÆćN4ļ¼ļ¼ļ¼ļ¼ć®åƾē©ć¬ć³ćŗć«ććę å ±ć®čØé²ļ¼åēćč”ćććäæč·åŗęæć®åććļ¼ļ¼ļ¼ļ½ļ½ēØåŗ¦ć§ćććć¾ććHDćÆćN4ļ¼ļ¼ļ¼ļ¼ä¹č³ļ¼ļ¼ļ¼ļ¼ć®åƾē©ć¬ć³ćŗć«ććę å ±ć®čØé²ļ¼åēćč”ćććäæč·åŗęæć®åććļ¼ļ¼ļ¼ļ½ļ½ēØåŗ¦ć§ćććę“ć«ćDVDćØćÆćN4ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ēØåŗ¦ć®åƾē©ć¬ć³ćŗć«ććę å ±ć®čØé²ļ¼åēćč”ćććäæč·åŗęæć®åććļ¼ļ¼ļ¼ļ½ļ½ēØåŗ¦ć§ććDVD系åå ćć£ć¹ćÆć®ē·ē§°ć§ćććDVDļ¼ļ¼²ļ¼Æļ¼ćDVDļ¼ļ¼¶ļ½ļ½ļ½ ļ½ćDVDļ¼ļ¼”ļ½ļ½ļ½ļ½ćDVDļ¼ļ¼²ļ¼”ļ¼ćDVDļ¼ļ¼²ćDVDļ¼ļ¼²ļ¼·ćDVDļ¼ļ¼²ćDVDļ¼ļ¼²ļ¼·ēćå«ććć¾ććę¬ęē“°ęøć«ććć¦ćÆćCDćØćÆćN4ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ēØåŗ¦ć®åƾē©ć¬ć³ćŗć«ććę å ±ć®čØé²ļ¼åēćč”ćććäæč·åŗęæć®åććļ¼ļ¼ļ¼ļ½ļ½ēØåŗ¦ć§ććCD系åå ćć£ć¹ćÆć®ē·ē§°ć§ćććCDļ¼ļ¼²ļ¼Æļ¼ćCDļ¼ļ¼”ļ½ļ½ļ½ļ½ćCDļ¼ļ¼¶ļ½ļ½ļ½ ļ½ćCDļ¼ļ¼²ćCDļ¼ļ¼²ļ¼·ēćå«ććå°ćčØé²åÆåŗ¦ć«ć¤ćć¦ćÆćBDć®čØé²åÆåŗ¦ćęćé«ććꬔćć§ļ¼Øļ¼¤ćDVDćCDć®é ć«ä½ććŖćć BD records and reproduces information with an objective lens with NA of 0.85, and the thickness of the protective substrate is about 0.1 mm. In the HD, information is recorded / reproduced by an objective lens having NA of 0.65 to 0.67, and the thickness of the protective substrate is about 0.6 mm. Further, DVD is a general term for DVD series optical discs in which information is recorded / reproduced by an objective lens having an NA of about 0.60 to 0.67, and the thickness of the protective substrate is about 0.6 mm. DVD-Video, DVD-Audio, DVD-RAM, DVD-R, DVD-RW, DVD + R, DVD + RW, and the like. In this specification, CD is a generic name for CD-series optical discs in which information is recorded / reproduced by an objective lens having an NA of about 0.45 to 0.53, and the thickness of the protective substrate is about 1.2 mm. Including CD-ROM, CD-Audio, CD-Video, CD-R, CD-RW and the like. As for the recording density, the recording density of BD is the highest, followed by HD, DVD, and CD in that order.
ććŖććäæč·åŗęæć®åćļ½ļ¼ćļ½ļ¼ćļ½ļ¼ć«é¢ćć¦ćÆć仄äøć®ę”ä»¶å¼ļ¼ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ¼ļ¼ļ¼ć
ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½åćÆć
ćććļ¼ļ¼ļ¼ļ½ļ½ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ½ļ½ćććććļ¼ļ¼ļ¼
ćććļ¼ļ¼ļ¼ļ½ļ½ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ½ļ½ćććććļ¼ļ¼ļ¼
ćććļ¼ļ¼ļ¼ļ½ļ½ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ½ļ½ćććććļ¼ļ¼ļ¼
ćęŗććććØć儽ć¾ććććććć«éćććŖćć
In addition, regarding the thicknesses t1, t2, and t3 of the protective substrate, the following conditional expressions (4), (5), (6),
0.0750 mm ⦠t1 ⦠0.1125 mm or
0.5mm ⦠t1 ⦠0.7mm (4)
0.5mm ⦠t2 ⦠0.7mm (5)
1.0mm ⦠t3 ⦠1.3mm (6)
However, the present invention is not limited to this.
ćę¬ęē“°ęøć«ććć¦ć第ļ¼å
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ęŗćØćć¦ćÆć儽ć¾ćććÆåå°ä½ć¬ć¼ć¶ćć·ćŖć³ć³ć¬ć¼ć¶ēćēØććććØćåŗę„ćć第ļ¼å
ęŗććåŗå°ććć第ļ¼å
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ęŗććåŗå°ććć第ļ¼å
ęć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ļ¼Ī»ļ¼ļ¼Ī»ļ¼ļ¼ć第ļ¼å
ęŗććåŗå°ććć第ļ¼å
ęć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ļ¼Ī»ļ¼ļ¼Ī»ļ¼ļ¼ćÆä»„äøć®ę”ä»¶å¼ļ¼ļ¼ļ¼ćļ¼ļ¼ļ¼ć
ćļ¼ļ¼ļ¼ĆĪ»ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ĆĪ»ļ¼ćććććļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ĆĪ»ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ĆĪ»ļ¼ćććććļ¼ļ¼ļ¼
ćęŗććććØć儽ć¾ććć
In the present specification, the first light source, the second light source, and the third light source are preferably laser light sources. As the laser light source, a semiconductor laser, a silicon laser, or the like can be preferably used. The first wavelength λ1 of the first light beam emitted from the first light source, the second wavelength λ2 (λ2> λ1) of the second light beam emitted from the second light source, and the third of the third light beam emitted from the third light source. The wavelength λ3 (λ3> λ2) is defined by the following conditional expressions (7), (8),
1.5 à λ1 <λ2 <1.7 à λ1 (7)
1.9 à λ1 <λ3 <2.1 à λ1 (8)
It is preferable to satisfy.
ćć¾ćć第ļ¼å ćć£ć¹ćÆć第ļ¼å ćć£ć¹ćÆć第ļ¼å ćć£ć¹ćÆćØćć¦ććććććBDåćÆļ¼Øļ¼¤ćDVDåć³ļ¼£ļ¼¤ćēØććććå “åć第ļ¼å ęŗć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ćÆå„½ć¾ćććÆćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøććć儽ć¾ćććÆćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ćć£ć¦ć第ļ¼å ęŗć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ćÆå„½ć¾ćććÆļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøććć儽ć¾ćććÆļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ćć£ć¦ć第ļ¼å ęŗć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ćÆå„½ć¾ćććÆćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøććć儽ć¾ćććÆćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ććć In addition, when BD or HD, DVD, and CD are used as the first optical disc, the second optical disc, and the third optical disc, respectively, the first wavelength Ī»1 of the first light source is preferably 0.35 μm or more and 0.44 μm or less. More preferably, it is 0.38 μm or more and 0.415 μm or less, and the second wavelength Ī»2 of the second light source is preferably 0.57 μm or more and 0.68 μm or less, more preferably 0.63 μm or more and 0.67 μm. The third wavelength Ī»3 of the third light source is preferably 0.75 μm or more and 0.88 μm or less, more preferably 0.76 μm or more and 0.82 μm or less.
ćć¾ćć第ļ¼å ęŗć第ļ¼å ęŗć第ļ¼å ęŗć®ćć”å°ćŖććØćļ¼ć¤ć®å ęŗćć¦ćććåćć¦ććććć¦ćććåćØćÆćä¾ćć°ē¬¬ļ¼å ęŗćØē¬¬ļ¼å ęŗćØćļ¼ććć±ć¼ćøć«åŗå®åē“ććć¦ćććććŖćć®ćććććććć«éććććļ¼ć¤ć®å ęŗćåå·®č£ę£äøč½ćŖććć«åŗå®ććć¦ććē¶ę ćåŗćå«ććć®ć§ćććć¾ććå ęŗć«å ćć¦ćå¾čæ°ććåå ē“ åćļ¼ććć±ć¼ćøåćć¦ćććć Also, at least two of the first light source, the second light source, and the third light source may be unitized. The unitization means that the first light source and the second light source are fixedly housed in one package, for example. However, the unitization is not limited to this, and the two light sources are fixed so that the aberration cannot be corrected. Is widely included. In addition to the light source, a light receiving element to be described later may be packaged.
ćåå ē“ åćØćć¦ćÆććć©ććć¤ćŖć¼ććŖć©ć®å ę¤åŗåØć儽ć¾ććēØćććććå ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§åå°ććå ćåå ē“ åćøå „å°ćććć®åŗåäæ”å·ćēØćć¦ćåå ćć£ć¹ćÆć«čØé²ćććę å ±ć®čŖćæåćäæ”å·ćå¾ććććććć«ćåå ē“ åäøć®ć¹ćććć®å½¢ē¶å¤åćä½ē½®å¤åć«ććå éå¤åćę¤åŗćć¦ćåē¦ę¤åŗććć©ććÆę¤åŗćč”ćććć®ę¤åŗć«åŗć„ćć¦ćåē¦ććć©ććć³ć°ć®ććć«åƾē©ć¬ć³ćŗćē§»åćććććØćåŗę„ććåå ē“ åćÆćč¤ę°ć®å ę¤åŗåØćććŖć£ć¦ćć¦ććććåå ē“ åćÆćć”ć¤ć³ć®å ę¤åŗåØćØćµćć®å ę¤åŗåØćęćć¦ćć¦ććććä¾ćć°ćę å ±ć®čØé²åēć«ēØććććć”ć¤ć³å ćåå ććå ę¤åŗåØć®äø”čć«ļ¼ć¤ć®ćµćć®å ę¤åŗåØćčØććå½č©²ļ¼ć¤ć®ćµćć®å ę¤åŗåØć«ćć£ć¦ćć©ććć³ć°čŖæę“ēØć®ćµćå ćåå ćććććŖåå ē“ åćØćć¦ććććć¾ććåå ē“ åćÆåå ęŗć«åƾåæććč¤ę°ć®åå ē“ åćęćć¦ćć¦ćććć As the light receiving element, a photodetector such as a photodiode is preferably used. Light reflected on the information recording surface of the optical disc enters the light receiving element, and a read signal of information recorded on each optical disc is obtained using the output signal. Furthermore, it detects the change in the light amount due to the spot shape change and position change on the light receiving element, performs focus detection and track detection, and based on this detection, the objective lens can be moved for focusing and tracking I can do it. The light receiving element may comprise a plurality of photodetectors. The light receiving element may have a main photodetector and a sub photodetector. For example, two sub photodetectors are provided on both sides of a photodetector that receives main light used for recording and reproducing information, and the sub light for tracking adjustment is received by the two sub photodetectors. It is good also as a simple light receiving element. The light receiving element may have a plurality of light receiving elements corresponding to the respective light sources.
ćéå å å¦ē³»ćÆć対ē©ć¬ć³ćŗćęćććéå å å¦ē³»ćÆć対ē©ć¬ć³ćŗć®ćæćęćć¦ćć¦ćčÆćććéå å å¦ē³»ćÆć対ē©ć¬ć³ćŗć®ä»ć«ć³ćŖć”ć¼ćæēć®ć«ćććŖć³ć°ć¬ć³ćŗćęćć¦ćć¦ććććć«ćććŖć³ć°ć¬ć³ćŗćØćÆć対ē©ć¬ć³ćŗćØå ęŗć®éć«é ē½®ćććå ęć®ēŗę£č§ćå¤ććåć¬ć³ćŗåćÆć¬ć³ćŗē¾¤ć®ććØććććć³ćŖć”ć¼ćæćÆćć«ćććŖć³ć°ć¬ć³ćŗć®äøēØ®ć§ćć³ćŖć”ć¼ćæć«å „å°ććå ćå¹³č”å ć«ćć¦åŗå°ććć¬ć³ćŗć§ćććę“ć«éå å å¦ē³»ćÆćå ęŗććå°åŗćććå ęććę å ±ć®čØé²åēć«ēØććććć”ć¤ć³å ęćØććć©ććć³ć°ēć«ēØććććäŗć¤ć®ćµćå ęćØć«åå²ććåęå å¦ē“ åćŖć©ć®å å¦ē“ åćęćć¦ćć¦ććććę¬ęē“°ęøć«ććć¦ć対ē©ć¬ć³ćŗćØćÆćå ćććÆć¢ććč£ ē½®ć«ććć¦å ćć£ć¹ćÆć«åƾåććä½ē½®ć«é ē½®ćććå ęŗććå°åŗćććå ęćå ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ććę©č½ćęććå å¦ē³»ćęćć儽ć¾ćććÆć対ē©ć¬ć³ćŗćØćÆćå ćććÆć¢ććč£ ē½®ć«ććć¦å ćć£ć¹ćÆć«åƾåććä½ē½®ć«é ē½®ćććå ęŗććå°åŗćććå ęćå ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ććę©č½ćęććå å¦ē³»ć§ćć£ć¦ćę“ć«ćć¢ćÆćć„ćØć¼ćæć«ććå°ćŖććØćå 軸ę¹åć«äøä½ēć«å¤ä½åÆč½ćØćććå å¦ē³»ćęćć対ē©ć¬ć³ćŗćÆć儽ć¾ćććÆåēć®åƾē©ć¬ć³ćŗć§ććććč¤ę°ć®å å¦ē“ åććå½¢ęććć¦ćć¦ćčÆććć¾ćć対ē©ć¬ć³ćŗćÆćć¬ć©ć¹ć¬ć³ćŗć§ćć£ć¦ććć©ć¹ćććÆć¬ć³ćŗć§ćć£ć¦ććåćÆćć¬ć©ć¹ć¬ć³ćŗć®äøć«å 甬åę§ęعčćŖć©ć§å č·Æå·®ä»äøę§é ćŖć©ćčØćććć¤ććŖććć¬ć³ćŗć§ćć£ć¦ććććć¾ćć対ē©ć¬ć³ćŗćÆćå±ęé¢ćéēé¢ć§ććććØć儽ć¾ćććć¾ćć対ē©ć¬ć³ćŗćÆćå č·Æå·®ä»äøę§é ćčØćććććć¼ć¹é¢ćéēé¢ć§ććććØć儽ć¾ććć The condensing optical system has an objective lens. The condensing optical system may include only the objective lens, but the condensing optical system may include a coupling lens such as a collimator in addition to the objective lens. The coupling lens is a single lens or a lens group that is disposed between the objective lens and the light source and changes the divergence angle of the light beam. The collimator is a type of coupling lens, and is a lens that emits light incident on the collimator as parallel light. Further, the condensing optical system has an optical element such as a diffractive optical element that divides the light beam emitted from the light source into a main light beam used for recording and reproducing information and two sub light beams used for tracking and the like. May be. In this specification, the objective lens refers to an optical system that is disposed at a position facing the optical disk in the optical pickup device and has a function of condensing the light beam emitted from the light source onto the information recording surface of the optical disk. Preferably, the objective lens is an optical system which is disposed at a position facing the optical disk in the optical pickup device and has a function of condensing the light beam emitted from the light source on the information recording surface of the optical disk, and further includes an actuator An optical system that can be integrally displaced at least in the optical axis direction. The objective lens is preferably a single objective lens, but may be formed of a plurality of optical elements. The objective lens may be a glass lens, a plastic lens, or a hybrid lens in which an optical path difference providing structure or the like is provided on a glass lens with a photocurable resin or the like. The objective lens preferably has a refractive surface that is aspheric. In the objective lens, the base surface on which the optical path difference providing structure is provided is preferably an aspherical surface.
ćć¾ćć対ē©ć¬ć³ćŗćć¬ć©ć¹ć¬ć³ćŗćØććå “åćÆćć¬ć©ć¹č»¢ē§»ē¹ļ¼“ļ½ćļ¼ļ¼ļ¼ā仄äøć§ććć¬ć©ć¹ęęć使ēØććććØć儽ć¾ćććć¬ć©ć¹č»¢ē§»ē¹ļ¼“ļ½ćļ¼ļ¼ļ¼ā仄äøć§ććć¬ć©ć¹ęęć使ēØććććØć«ćććęÆč¼ēä½ęø©ć§ć®ęå½¢ćåÆč½ćØćŖćć®ć§ćéåć®åÆæå½ćå»¶ć°ćććØćåŗę„ćććć®ćććŖć¬ć©ć¹č»¢ē§»ē¹ļ¼“ļ½ćä½ćć¬ć©ć¹ęęćØćć¦ćÆćä¾ćć°ļ¼ę Ŗļ¼ä½ē°å å¦ć¬ć©ć¹č£½ć®ļ¼«ļ¼ļ¼°ļ¼§ļ¼ļ¼ļ¼ććKļ¼ļ¼°ļ¼§ļ¼ļ¼ļ¼ļ¼å ±ć«č£½ååļ¼ćććć Further, when the objective lens is a glass lens, it is preferable to use a glass material having a glass transition point Tg of 400 ° C. or lower. By using a glass material having a glass transition point Tg of 400 ° C. or lower, molding at a relatively low temperature becomes possible, so that the life of the mold can be extended. Examples of such a glass material having a low glass transition point Tg include K-PG325 and K-PG375 (both product names) manufactured by Sumita Optical Glass Co., Ltd.
ććØććć§ćć¬ć©ć¹ć¬ć³ćŗćÆäøč¬ēć«ęعčć¬ć³ćŗćććęÆéć大ććććć対ē©ć¬ć³ćŗćć¬ć©ć¹ć¬ć³ćŗćØćććØćééć大ćććŖć対ē©ć¬ć³ćŗćé§åććć¢ćÆćć„ćØć¼ćæć«č² ę ććććććć®ććć対ē©ć¬ć³ćŗćć¬ć©ć¹ć¬ć³ćŗćØććå “åć«ćÆćęÆéćå°ććć¬ć©ć¹ęęć使ēØććć®ć儽ć¾ćććå ·ä½ēć«ćÆćęÆéćļ¼ļ¼ļ¼ä»„äøć§ććć®ć儽ć¾ćććļ¼ļ¼ļ¼ä»„äøć§ććć®ććć儽ć¾ććć By the way, since the specific gravity of the glass lens is generally larger than that of the resin lens, if the objective lens is a glass lens, the weight increases and a load is imposed on the actuator that drives the objective lens. Therefore, when the objective lens is a glass lens, it is preferable to use a glass material having a small specific gravity. Specifically, the specific gravity is preferably 3.0 or less, and more preferably 2.8 or less.
ćć¾ćć対ē©ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗćØććå “åćÆćē°ē¶ćŖć¬ćć£ć³ē³»ć®ęعčęęć使ēØććć®ć儽ć¾ćććē°ē¶ćŖć¬ćć£ć³ē³»ć®äøć§ććę³¢é·ļ¼ļ¼ļ¼ļ½ļ½ć«åƾććęø©åŗ¦ļ¼ļ¼āć§ć®å±ęēćļ¼ļ¼ļ¼ļ¼ä¹č³ļ¼ļ¼ļ¼ļ¼ć®ēÆå²å ć§ćć£ć¦ćļ¼ļ¼āććļ¼ļ¼āć®ęø©åŗ¦ēÆå²å ć§ć®ęø©åŗ¦å¤åć«ä¼“ćę³¢é·ļ¼ļ¼ļ¼ļ½ļ½ć«åƾććå±ęēå¤åēļ½ļ¼®ļ¼ļ½ļ¼“ļ¼āļ¼ļ¼ļ¼ćļ¼ļ¼ļ¼Ćļ¼ļ¼ļ¼ļ¼ä¹č³ļ¼ļ¼Ćļ¼ļ¼ļ¼ļ¼ļ¼ćć儽ć¾ćććÆćļ¼ļ¼ļ¼Ćļ¼ļ¼ļ¼ļ¼ä¹č³ļ¼ļ¼Ćļ¼ļ¼ļ¼ļ¼ļ¼ć®ēÆå²å ć§ćć樹čęęć使ēØććć®ććć儽ć¾ćććć¾ćć対ē©ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗćØććå “åćć«ćććŖć³ć°ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗćØććććØć儽ć¾ććć When the objective lens is a plastic lens, it is preferable to use a cyclic olefin-based resin material. Among the cyclic olefin-based materials, the refractive index at a temperature of 25 ° C. with respect to a wavelength of 405 nm is 1.52 to 1.60. The refractive index change rate dN / dT (° C. ā1 ) is ā20 Ć 10 ā5 to ā5 Ć 10 ā with respect to the wavelength of 405 nm accompanying the temperature change within the temperature range of ā5 ° C. to 70 ° C. It is more preferable to use a resin material in the range of 5 (more preferably, ā10 Ć 10 ā5 to ā8 Ć 10 ā5 ). When the objective lens is a plastic lens, the coupling lens is preferably a plastic lens.
ć対ē©ć¬ć³ćŗć«ć¤ćć¦ć仄äøć«čØč¼ććć対ē©ć¬ć³ćŗć®å°ćŖććØćäøć¤ć®å å¦é¢ććäøå¤®é åćØćäøå¤®é åć®åØćć®åØč¾ŗé åćØćęććć対ē©ć¬ć³ćŗć®å°ćŖććØćäøć¤ć®å å¦é¢ććåØč¾ŗé åć®åØćć«ęåØč¾ŗé åćęćć¦ćć¦ććććäøå¤®é åćÆć対ē©ć¬ć³ćŗć®å 軸ćå«ćé åć§ććććØć儽ć¾ććććå«ć¾ćŖćé åć§ćć£ć¦ććććäøå¤®é åćåØč¾ŗé åćåć³ęåØč¾ŗé åćÆåäøć®å å¦é¢äøć«čØćććć¦ććććØć儽ć¾ćććå³ļ¼ć«ē¤ŗćććććć«ćäøå¤®é åCNćåØč¾ŗé åļ¼ļ¼¤ćęåØč¾ŗé åO3ćÆćåäøć®å å¦é¢äøć«ćå 軸ćäøåæćØććååæåē¶ć«čØćććć¦ććććØć儽ć¾ćććć¾ćć対ē©ć¬ć³ćŗć®äøå¤®é åć«ćÆē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććććØć儽ć¾ćććć¾ććåØč¾ŗé åć«ćÆē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØćććć¦ćć¦ććććęåØč¾ŗé åćęććå “åćęåØč¾ŗé åćÆå±ęé¢ć§ćć£ć¦ćććććęåØč¾ŗé åć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØćććć¦ćć¦ććććäøå¤®é åćåØč¾ŗé åćęåØč¾ŗé åćÆććććé£ę„ćć¦ććććØć儽ć¾ććććéć«å ćć«ééććć£ć¦ćčÆćć The objective lens is described below. At least one optical surface of the objective lens has a central region and a peripheral region around the central region. At least one optical surface of the objective lens may have an outermost peripheral region around the peripheral region. The central region is preferably a region including the optical axis of the objective lens, but may be a region not including the optical axis. It is preferable that the central region, the peripheral region, and the most peripheral region are provided on the same optical surface. As shown in FIG. 1, the central region CN, the peripheral region MD, and the most peripheral region OT are preferably provided concentrically around the optical axis on the same optical surface. Moreover, it is preferable that a first optical path difference providing structure is provided in the central region of the objective lens. Further, a second optical path difference providing structure may be provided in the peripheral region. In the case of having the outermost peripheral region, the outermost peripheral region may be a refractive surface, or the third optical path difference providing structure may be provided in the outermost peripheral region. The central region, the peripheral region, and the outermost peripheral region are preferably adjacent to each other, but there may be a slight gap between them.
ć第ļ¼å č·Æå·®ä»äøę§é ćÆć対ē©ć¬ć³ćŗć®äøå¤®é åć®é¢ē©ć®ļ¼ļ¼ļ¼ 仄äøć®é åć«čØćććć¦ććććØć儽ć¾ćććļ¼ļ¼ļ¼ 仄äøććć儽ć¾ććććć儽ć¾ćććÆć第ļ¼å č·Æå·®ä»äøę§é ććäøå¤®é åć®å Øé¢ć«čØćććć¦ććććØć§ććć第ļ¼å č·Æå·®ä»äøę§é ćÆć対ē©ć¬ć³ćŗć®åØč¾ŗé åć®é¢ē©ć®ļ¼ļ¼ļ¼ 仄äøć®é åć«čØćććć¦ććććØć儽ć¾ćććļ¼ļ¼ļ¼ 仄äøććć儽ć¾ććććć儽ć¾ćććÆć第ļ¼å č·Æå·®ä»äøę§é ććåØč¾ŗé åć®å Øé¢ć«čØćććć¦ććććØć§ććć第ļ¼å č·Æå·®ä»äøę§é ćÆć対ē©ć¬ć³ćŗć®ęåØč¾ŗé åć®é¢ē©ć®ļ¼ļ¼ļ¼ 仄äøć®é åć«čØćććć¦ććććØć儽ć¾ćććļ¼ļ¼ļ¼ 仄äøććć儽ć¾ććććć儽ć¾ćććÆć第ļ¼å č·Æå·®ä»äøę§é ććęåØč¾ŗé åć®å Øé¢ć«čØćććć¦ććććØć§ććć The first optical path difference providing structure is preferably provided in a region of 70% or more of the area of the central region of the objective lens, and more preferably 90% or more. More preferably, the first optical path difference providing structure is provided on the entire surface of the central region. The second optical path difference providing structure is preferably provided in a region of 70% or more of the area of the peripheral region of the objective lens, and more preferably 90% or more. More preferably, the second optical path difference providing structure is provided on the entire surface of the peripheral region. The third optical path difference providing structure is preferably provided in a region of 70% or more of the area of the outermost peripheral region of the objective lens, and more preferably 90% or more. More preferably, the third optical path difference providing structure is provided on the entire surface of the outermost peripheral region.
ććŖććę¬ęē“°ęøć§ććå č·Æå·®ä»äøę§é ćØćÆćå „å°å ęć«åƾćć¦å č·Æå·®ćä»å ććę§é ć®ē·ē§°ć§ćććå č·Æå·®ä»äøę§é ć«ćÆćä½ēøå·®ćä»äøććä½ēøå·®ä»äøę§é ćå«ć¾ćććć¾ććä½ēøå·®ä»äøę§é ć«ćÆåęę§é ćå«ć¾ćććę¬é”ēŗęć®å č·Æå·®ä»äøę§é ćÆćåęę§é ć§ćććØććććå č·Æå·®ä»äøę§é ćÆć段差ćęćć儽ć¾ćććÆę®µå·®ćč¤ę°ęććććć®ę®µå·®ć«ććå „å°å ęć«å č·Æå·®åć³ļ¼åćÆä½ēøå·®ćä»å ććććå č·Æå·®ä»äøę§é ć«ććä»å ćććå č·Æå·®ćÆćå „å°å ęć®ę³¢é·ć®ę“ę°åć§ćć£ć¦ćčÆćććå „å°å ęć®ę³¢é·ć®éę“ę°åć§ćć£ć¦ćčÆćć段差ćÆćå 軸åē“ę¹åć«åØęēćŖééććć£ć¦é ē½®ććć¦ćć¦ćććććå 軸åē“ę¹åć«éåØęēćŖééććć£ć¦é ē½®ććć¦ćć¦ćććć In addition, the optical path difference providing structure referred to in this specification is a general term for structures that add an optical path difference to an incident light beam. The optical path difference providing structure also includes a phase difference providing structure for providing a phase difference. The phase difference providing structure includes a diffractive structure. It can be said that the optical path difference providing structure of the present invention is a diffractive structure. The optical path difference providing structure has a step, preferably a plurality of steps. This step adds an optical path difference and / or phase difference to the incident light flux. The optical path difference added by the optical path difference providing structure may be an integer multiple of the wavelength of the incident light beam or a non-integer multiple of the wavelength of the incident light beam. The steps may be arranged with a periodic interval in the direction perpendicular to the optical axis, or may be arranged with a non-periodic interval in the direction perpendicular to the optical axis.
ćå č·Æå·®ä»äøę§é ćÆćå 軸ćäøåæćØććååæåē¶ć®č¤ę°ć®č¼ŖåøÆćęććććØć儽ć¾ćććć¾ććå č·Æå·®ä»äøę§é ćÆćę§ć ćŖęé¢å½¢ē¶ļ¼å 軸ćå«ćé¢ć§ć®ęé¢å½¢ē¶ļ¼ććØćå¾ććē¹ć«ć第ļ¼å č·Æå·®ä»äøę§é ćÆćå 軸ćå«ćęé¢å½¢ē¶ććć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ćØćå 軸ćå«ćęé¢å½¢ē¶ćéꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćØćéē³ććććć®ć儽ć¾ććć It is preferable that the optical path difference providing structure has a plurality of concentric annular zones centered on the optical axis. In addition, the optical path difference providing structure can have various cross-sectional shapes (cross-sectional shapes in a plane including the optical axis). In particular, the first optical path difference providing structure is obtained by superimposing a first basic structure whose cross-sectional shape including the optical axis is a blazed structure and a second basic structure whose cross-sectional shape including the optical axis is a stepped structure. Is preferred.
ććć¬ć¼ćŗåę§é ćØćÆćå³ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććććć«ćå č·Æå·®ä»äøę§é ćęććå å¦ē“ åć®å 軸ćå«ćęé¢å½¢ē¶ććéøęÆē¶ć®å½¢ē¶ćØććććØć§ćććå„ć®čØćę¹ćØćć¦ćÆćå č·Æå·®ä»äøę§é ććć¼ć¹é¢ć«åƾćć¦ćē“č§ć§ćå¹³č”ć§ććŖććęćć®é¢ćęćććØććććØć§ćććć¾ććéꮵåę§é ćØćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććććć«ćå č·Æå·®ä»äøę§é ćęććå å¦ē“ åć®å 軸ćå«ćęé¢å½¢ē¶ććå°éꮵē¶ć®ćć®ćč¤ę°ęćććØććććØć§ćććå„ć®čØćę¹ćØćć¦ćÆćå č·Æå·®ä»äøę§é ććć¼ć¹é¢ć«åƾćć¦å¹³č”ćŖé¢ćØå 軸ć«åƾćć¦å¹³č”ćŖé¢ć®ćæćęćććć¼ć¹é¢ć«åƾćć¦ęćć®é¢ćęććććć¼ć¹é¢ć®ę¹åć«é²ćć«å¾ć£ć¦ćꮵéēć«å 軸ę¹åć®é·ććå¤åććå°ę§é ćč¤ę°ęćććØććććØć§ćććć¾ććåŗē¤ę§é ćéꮵåę§é ć§ććå “åććć¼ć¹é¢ćę²ēćęććé¢ć§ćććØććć¼ć¹é¢ć«ććć¦å ē·ćå±ęććććå 軸ććć®č·é¢ććØć«å±ęč§åŗ¦ćē°ćŖććØććē¾č±”ćēććććć®ććććć¼ć¹é¢ćå 軸ę¹åć«å¹³č”ć«ć·ććććććØć«ććéꮵåę§é ćå¾ćććććå ē·ć®é²ćę¹åć«ćć¼ć¹é¢ćåćå č·Æé·åć·ććććććØć«ććéꮵåę§é ćå¾ćäŗć儽ć¾ćććå°ćę¬ęē“°ęøäøććļ¼øåå²ććØćÆćļ¼ć¤ć®éꮵåę§é ć®å 軸åē“ę¹åć«åƾåæććļ¼åććļ¼č¼ŖåøÆē¶ć®é¢ćć段差ć«ćć£ć¦åŗåćććļ¼øåć«åå²ććć¦ććććØćććććå°ćć段差ććØćÆćļ¼ć¤ć®éꮵåę§é ć«ććć¦ćęćå°ććŖå 軸ę¹åć®ę®µå·®ććććć大ććŖę®µå·®ććØćÆćļ¼ć¤ć®éꮵåę§é ć«ććć¦ćęć大ććŖå 軸ę¹åć®ę®µå·®ććććć®ćØććć As shown in FIGS. 2 (a) and 2 (b), the blazed structure means that the cross-sectional shape including the optical axis of an optical element having an optical path difference providing structure is a sawtooth shape. In other words, the optical path difference providing structure has an oblique surface that is neither perpendicular nor parallel to the base surface. Further, as shown in FIG. 2 (c), the staircase structure means that the cross-sectional shape including the optical axis of the optical element having the optical path difference providing structure has a plurality of small staircase shapes. In other words, the optical path difference providing structure has only a surface parallel to the base surface and a surface parallel to the optical axis, and does not have an oblique surface with respect to the base surface. This means that it has a plurality of small structures whose length in the optical axis direction changes step by step. Further, when the base structure is a stepped structure, if the base surface is a surface having a curvature, a light beam is refracted on the base surface, so that a refraction angle varies depending on the distance from the optical axis. For this reason, it is preferable to obtain a stepped structure by shifting the base surface by the same optical path length in the light traveling direction, rather than shifting the base surface parallel to the optical axis direction. In the present specification, āX divisionā means that a ring-shaped surface corresponding to (or facing) the vertical direction of the optical axis of one staircase structure is divided by steps and divided into X pieces. āSmall stepā means the smallest step in the optical axis direction in one staircase structure, and ālarge stepā means the largest step in the optical axis direction in one staircase structure. And
ć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćØćéē³ććå “åć第ļ¼åŗē¤ę§é ć«ć第ļ¼åŗē¤ę§é ćØćÆē°ćŖć第ļ¼åŗē¤ę§é ćć第ļ¼åŗē¤ę§é ć®å Øć¦ć®ę®µå·®éØć®ä½ē½®ćØē¬¬ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćäøč“ććććć«éē³ććććØć儽ć¾ććć儽ć¾ććę ę§ćØćć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗććć¬ć¼ćŗåę§é ć®ęćę·±ććŖćä½ē½®ļ¼°ļ¼ćØćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćéꮵåę§é ć®ęćę·±ććŖćä½ē½®ļ¼°ļ¼ćØćäøč“ććć¦éē³ććććØććććććć«ćććå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗć第ļ¼å č·Æå·®ä»äøę§é ćå¾ćććØćć§ććććć®ććć«ććć¬ć¼ćŗåę§é ćØéꮵåę§é ćØććć¬ć¼ćŗåć®ę®µå·®ć®ä½ē½®ćØéꮵåę§é ć®å¤§ććŖę®µå·®ć®ä½ē½®ćØćäøč“ććć¦éē³ććć¦å¾ćććå³ļ¼ļ¼ļ½ļ¼ć®ćććŖę§é ććę¬ęē“°ęøć«ććć¦ćć¬ć¼ćŗåéꮵę§é ćØē§°ććććć¬ć¼ćŗåéꮵę§é ćÆćå č·Æå·®ä»äøę§é ććć¼ć¹é¢ć«åƾćć¦ęćć®é¢ćØå 軸ć«åƾćć¦å¹³č”ćŖé¢ćęćććć¼ć¹é¢ć®ę¹åć«é²ćć«å¾ć£ć¦ćꮵéēć«å 軸ę¹åć®é·ććå¤åććå°ę§é ćč¤ę°ęććę§é ć§ććććŖćć第ļ¼ć®åŗē¤ę§é ć®äøåä½ć®č¼ŖåøÆć«åƾćć¦ć第ļ¼ć®åŗē¤ę§é ć®č¤ę°åä½ć®č¼ŖåøÆćéē³ććć¦ćčÆććć¾ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å Øć¦ć®ä½ē½®ć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćØäøč“ćć¦ććŖćć¦ććććå³ć”ć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®äøć«ćÆć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćØäøč“ććŖććć®ććć£ć¦ćććć第ļ¼å č·Æå·®ä»äøę§é ć第ļ¼å č·Æå·®ä»äøę§é ćÆćåŗē¤ę§é ćéē³ććć¦ćéē³ćććŖćć¦ćčÆćććć®å “åć«ćÆå³ļ¼ćå³ļ¼ć«ē¤ŗćä»»ęć®å½¢ē¶ć®ę§é ćę”ćććć When the first foundation structure and the second foundation structure are overlapped, the second foundation structure different from the first foundation structure is placed on the first foundation structure, the positions of all the step portions of the first foundation structure, and the second foundation structure. It is preferable to superimpose so that the position of the level | step-difference part matches. As a preferred mode, the deepest position P1 of the blaze structure shown in FIG. 3A and the deepest position P2 of the staircase structure shown in FIG. Thereby, the 1st optical path difference providing structure shown in FIG.3 (c) can be obtained. Thus, the structure as shown in FIG. 3C obtained by superimposing the blaze type structure and the staircase type structure with the position of the blaze type step and the position of the large step of the staircase structure being coincident with each other is obtained. In the specification, it is referred to as a blaze-type step structure. The blazed staircase structure has an optical path difference providing structure that has an oblique surface with respect to the base surface and a surface parallel to the optical axis. A structure having a plurality of small structures that change. Note that a plurality of unit zones of the second foundation structure may be superimposed on one unit zone of the first foundation structure. Further, not all the positions of the step portions of the second foundation structure need to coincide with the positions of the step portions of the first foundation structure. That is, some of the step portions of the second foundation structure may not coincide with the position of the step portion of the first foundation structure. The second optical path difference providing structure and the third optical path difference providing structure may or may not overlap the basic structure. In this case, a structure having an arbitrary shape shown in FIGS.
ćå°ćå č·Æå·®ä»äøę§é åćÆåŗē¤ę§é ćÆćććåä½å½¢ē¶ćåØęēć«ē¹°ćčæććć¦ććę§é ć§ććććØć儽ć¾ćććććć§ćććåä½å½¢ē¶ćåØęēć«ē¹°ćčæććć¦ććććØćÆćåäøć®å½¢ē¶ćåäøć®åØęć§ē¹°ćčæććć¦ććå½¢ē¶ćÆå½ē¶å«ććććć«ćåØęć®ļ¼åä½ćØćŖćåä½å½¢ē¶ććč¦åę§ćęć£ć¦ćåØęćå¾ć ć«é·ććŖć£ćććå¾ć ć«ēććŖć£ććććå½¢ē¶ćććåä½å½¢ē¶ćåØęēć«ē¹°ćčæććć¦ććććć®ć«å«ć¾ćć¦ćććØććć It should be noted that the optical path difference providing structure or the basic structure is preferably a structure in which a certain unit shape is periodically repeated. As used herein, āunit shape is periodically repeatedā naturally includes shapes in which the same shape is repeated in the same cycle. In addition, the unit shape that is one unit of the cycle has regularity, and the shape in which the cycle gradually increases or decreases gradually is also included in the āunit shape is periodically repeatedā. Suppose that
ćå č·Æå·®ä»äøę§é åćÆåŗē¤ę§é ćććć¬ć¼ćŗåę§é ćęććå “åćåä½å½¢ē¶ć§ććéøęÆē¶ć®å½¢ē¶ćē¹°ćčæćććå½¢ē¶ćØćŖććå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććććć«ćåäøć®éøęÆē¶å½¢ē¶ćē¹°ćčæććć¦ćććććå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććććć«ććć¼ć¹é¢ć®ę¹åć«é²ćć«å¾ć£ć¦ćå¾ć ć«éøęÆē¶å½¢ē¶ć®å¤§ććć大ćććŖć£ć¦ććå½¢ē¶ćåćÆćå°ćććŖć£ć¦ććå½¢ē¶ć§ćć£ć¦ććććć¾ććå¾ć ć«éøęÆē¶å½¢ē¶ć®å¤§ććć大ćććŖć£ćå½¢ē¶ćØćå¾ć ć«éøęÆē¶å½¢ē¶ć®å¤§ćććå°ćććŖć£ć¦ććå½¢ē¶ćēµćæåćććå½¢ē¶ćØćć¦ććććä½ććéøęÆē¶å½¢ē¶ć®å¤§ćććå¾ć ć«å¤åććå “åć§ćć£ć¦ććéøęÆē¶å½¢ē¶ć«ććć¦ćå 軸ę¹åļ¼åćÆééććå ē·ć®ę¹åļ¼ć®å¤§ćććÆć»ćØćć©å¤åććŖćććØć儽ć¾ććććŖćććć¬ć¼ćŗåę§é ć«ććć¦ćļ¼ć¤ć®éøęÆē¶å½¢ē¶ć®å 軸ę¹åć®é·ćļ¼éøęÆē¶å½¢ē¶ćééććå ē·ć®ę¹åć®é·ććØćć¦ćććļ¼ćććććę·±ććØćććļ¼ć¤ć®éøęÆē¶å½¢ē¶ć®å 軸åē“ę¹åć®é·ćććććå¹ ćØćććå ćć¦ćććé åć«ććć¦ćÆććć¬ć¼ćŗåę§é ć®ę®µå·®ćå 軸ļ¼äøåæļ¼å“ćØćÆéćåćć¦ććå½¢ē¶ćØććä»ć®é åć«ććć¦ćÆććć¬ć¼ćŗåę§é ć®ę®µå·®ćå 軸ļ¼äøåæļ¼å“ćåćć¦ććå½¢ē¶ćØćććć®éć«ććć¬ć¼ćŗåę§é ć®ę®µå·®ć®åććåćęæććććć«åæ č¦ćŖé·ē§»é åćčØćććć¦ććå½¢ē¶ćØćć¦ćććććć®é·ē§»é åćÆćå č·Æå·®ä»äøę§é ć§ććå č·Æå·®ä»äøę§é ć«ććä»å ćććå č·Æå·®ćå č·Æå·®é¢ę°ć§č”Øē¾ććęćå č·Æå·®é¢ę°ć®ę„µå¤ćØćŖćē¹ć«ēøå½ććé åć§ććććŖććå č·Æå·®é¢ę°ćꄵå¤ćØćŖćē¹ćęć¤ćØćå č·Æå·®é¢ę°ć®å¾ććå°ćććŖćć®ć§ćč¼ŖåøÆććććåŗććććØćåÆč½ćØćŖććå č·Æå·®ä»äøę§é ć®å½¢ē¶čŖ¤å·®ć«ććééēä½äøćęå¶ć§ććć When the optical path difference providing structure or the basic structure has a blazed structure, the sawtooth shape as a unit shape is repeated. As shown in FIG. 2 (a), the same sawtooth shape may be repeated, and as shown in FIG. 2 (b), the size of the sawtooth shape gradually increases as it goes in the direction of the base surface. It may be a shape that increases in size or a shape that decreases. Moreover, it is good also as a shape which combined the shape where the magnitude | size of the serrated shape became large gradually and the shape where the magnitude | size of a serrated shape becomes small gradually. However, even in the case where the size of the serrated shape changes gradually, it is preferable that the size in the optical axis direction (or the direction of the passing light beam) hardly changes in the serrated shape. In the blazed structure, the length in the optical axis direction of one sawtooth shape (may be the length in the direction of the light beam passing through the sawtooth shape) is referred to as the pitch depth, and one sawtooth shape light. The length in the direction perpendicular to the axis is called the pitch width. In addition, in some areas, the blazed structure has a step opposite to the optical axis (center) side, and in other areas, the blazed structure has a step toward the optical axis (center). It is good also as a shape in which the transition area | region required in order to switch the direction of the level | step difference of a blaze | braze type | mold structure is provided in the meantime. This transition region is a region corresponding to a point that becomes an extreme value of the optical path difference function when the optical path difference added by the optical path difference providing structure, which is an optical path difference providing structure, is expressed by an optical path difference function. If the optical path difference function has an extreme point, the inclination of the optical path difference function becomes small, so that the annular zone pitch can be widened, and the decrease in transmittance due to the shape error of the optical path difference providing structure can be suppressed.
ćå č·Æå·®ä»äøę§é åćÆåŗē¤ę§é ććéꮵåę§é ćęććå “åćåä½å½¢ē¶ć§ćććé段形ē¶ćē¹°ćčæćććå½¢ē¶ćØćŖććå³ļ¼ļ¼ļ½ļ¼ć§ē¤ŗććććććŖę°ę®µļ¼ä¾ćć°ćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ę§é ļ¼ć®åäøć®å°é段形ē¶ććē¹°ćčæććććććŖå½¢ē¶ēćććå¾ććććć«ććć¼ć¹é¢ć®ę¹åć«é²ćć«å¾ć£ć¦ćå¾ć ć«éꮵć®å¤§ććć大ćććŖć£ć¦ććå½¢ē¶ććå¾ć ć«éꮵć®å¤§ćććå°ćććŖć£ć¦ććå½¢ē¶ć§ćć£ć¦ćććććå 軸ę¹åļ¼åćÆééććå ē·ć®ę¹åļ¼ć®é·ććÆć»ćØćć©å¤åććŖćććØć儽ć¾ććć When the optical path difference providing structure or the basic structure has a staircase structure, the shape is a unit shape, which is a repeated staircase shape. There may be a shape in which the same small staircase shape of several stages (for example, a structure of five divisions as shown in FIG. 2C) is repeated as shown in FIG. Furthermore, the shape of the staircase may gradually increase in size as it proceeds in the direction of the base surface, or the shape of the staircase may gradually decrease in size. It is preferable that the length of the direction of light) hardly changes.
ćå č·Æå·®ä»äøę§é ććå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććććć«ćć¤ććŖē¶ć®å½¢ē¶ļ¼ćć®ę§ćŖę§é ćÆćļ¼åå²ć®éꮵåę§é ćØćčØććļ¼ćęććå “åććć¼ć¹é¢ć®ę¹åć«é²ćć«å¾ć£ć¦ćå¾ć ć«ćć¤ććŖć®å¤§ććć大ćććŖć£ć¦ććå½¢ē¶ććå¾ć ć«éꮵć®å¤§ćććå°ćććŖć£ć¦ććå½¢ē¶ć§ćć£ć¦ćććććééććå ē·ć®ę¹åć®é·ććÆć»ćØćć©å¤åććŖćććØć儽ć¾ććć When the optical path difference providing structure has a binary shape as shown in FIG. 2D (such a structure can be said to be a two-step staircase structure), the optical path difference providing structure gradually increases in the direction of the base surface. A shape in which the size of the binary increases or a shape in which the size of the staircase gradually decreases may be used, but it is preferable that the length of the light beam passing through hardly changes.
ćꬔć«ćę§ć ćŖē¬¬äøå č·Æå·®ä»äøę§é ć®ä¾ć«ć¤ćć¦ćå³ļ¼ļ½å³ļ¼ļ¼ćēØćććć詳瓰ć«čŖ¬ęćććå°ć仄äøć®ä¾ć§ē¤ŗćLćļ¼ćļ¼®ćØćÆć第äøå č·Æå·®ä»äøę§é ć«ē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćę大ć®åęå éćęććåęå ć®åęꬔę°ćL欔ć第äøå č·Æå·®ä»äøę§é ć«ē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćę大ć®åęå éćęććåęå ć®åęꬔę°ćļ¼ę¬”ć第äøå č·Æå·®ä»äøę§é ć«ē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćę大ć®åęå éćęććåęå ć®åęꬔę°ćN欔ćØćććØćć®ę“ę°ļ¼¬ćļ¼ćļ¼®ć蔨ćć¦ććć Next, examples of various first optical path difference providing structures will be described in more detail with reference to FIGS. Note that L, M, and N shown in the following examples are the diffraction orders of the diffracted light having the maximum diffracted light quantity among the diffracted lights generated when the first light flux is incident on the first optical path difference providing structure. Next, of the diffracted light generated when the second light beam enters the first optical path difference providing structure, the diffraction order of the diffracted light having the maximum diffracted light amount is M order, and the third light beam is applied to the first optical path difference providing structure. The integers L, M, and N are shown when the diffraction order of the diffracted light having the maximum amount of diffracted light among the diffracted light generated when incident is N order.
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(First optical path difference providing structure example 1)
In Example 1, as shown in FIG.6 (b), the 2nd foundation structure which is a staircase type structure is a 4 stepped staircase structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 6 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(1.25Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.25Ī»1 + 0.2Ī»1) / (nā1)
(3.75Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(3.75Ī»1 + 0.2Ī»1) / (nā1)
Meet. However, n represents the refractive index of the objective lens in the first light flux.
ćå°ćäøčØć®å¼ćÆć第ļ¼åŗē¤ę§é ć®å 軸ę¹åć®ę®µå·®éļ½ļ¼ć第ļ¼å ęć®ę³¢é·Ī»ļ¼ć«åƾćć¦ćļ¼ļ¼ļ¼Ī»ļ¼Ā±ļ¼ļ¼ļ¼Ī»ļ¼ć®å č·Æå·®ćäøćććććŖę®µå·®éć§ććććØćęå³ćć¦ćććØćčØćććć¾ćć第ļ¼åŗē¤ę§é ć®å°ććŖå 軸ę¹åć®ę®µå·®éļ½ļ¼ļ¼ć第ļ¼å ęć®ę³¢é·Ī»ļ¼ć«åƾćć¦ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼Ā±ļ¼ļ¼ļ¼Ī»ļ¼ć®å č·Æå·®ćäøćććććŖę®µå·®éć§ćć£ć¦ć第ļ¼åŗē¤ę§é ć®å¤§ććŖå 軸ę¹åć®ę®µå·®éļ½ļ¼ļ¼ć第ļ¼å ęć®ę³¢é·Ī»ļ¼ć«åƾćć¦ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼Ā±ļ¼ļ¼ļ¼Ī»ļ¼ć®å č·Æå·®ćäøćććććŖę®µå·®éć§ććććØćęå³ćć¦ćććØćčØććć Note that the above equation indicates that the step amount d1 in the optical axis direction of the first basic structure is a step amount that gives an optical path difference of 1.2Ī»1 ± 0.4Ī»1 with respect to the wavelength Ī»1 of the first light flux. It can also be said that it means. Further, the step amount d21 in the direction of the small optical axis of the second foundation structure is such a step amount that gives an optical path difference of 1.25Ī»1 ± 0.2Ī»1 with respect to the wavelength Ī»1 of the first light beam. It can be said that the large step amount d22 in the optical axis direction is a step amount that gives an optical path difference of 3.75Ī»1 ± 0.2Ī»1 with respect to the wavelength Ī»1 of the first light flux.
ćå°ć第ļ¼åŗē¤ę§é ć®ćććŖćć¬ć¼ćŗåę§é ć®å č·Æå·®ä»äøę§é ć«ććć¦ćåęå¹ēćÆä»„äøć®ę°ļ¼ć«ē¤ŗććććŖå¼ć«åŗć„ćć¦čØē®ććććØćåÆč½ć§ććć In the blazed optical path difference providing structure such as the first basic structure, the diffraction efficiency can be calculated based on the following equation (1).
ćć¾ćć段差ć®å 軸ę¹åć®ę®µå·®éļ½ćØåęꬔę°ļ½ć®é¢äæćÆćļ½ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ć»ļ½ļ¼Ī»ć§č”ØćććØćåÆč½ć§ććć The relationship between the step amount d in the optical axis direction of the step and the diffraction order m can be expressed by m = (nā1) Ā· d / Ī».
ćę“ć«ć第ļ¼åŗē¤ę§é ć®ćććŖéꮵåę§é ć«ććć¦ćåęå¹ēćÆä»„äøć®ę°ļ¼ć«ē¤ŗććććŖå¼ć«åŗć„ćć¦čØē®ććććØćåÆč½ć§ććć Furthermore, in a stepped structure such as the second basic structure, the diffraction efficiency can be calculated based on the following equation (2).
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććććåćåćććØćÆć対ē©ć¬ć³ćŗć®å 軸ćå«ćęé¢ć«ććć¦ćå 軸ć縦軸ćØćå 軸ē“äŗ¤ę¹åć横軸ćØćććØćć«ććć¬ć¼ćŗåę§é ć®ęćć®é¢ć®å¾ćć®ę¹åļ¼å³äøćććå·¦äøćććļ¼ćØćéꮵåę§é ć®åꮵć®å ēµ”é¢ć§ććęćć®é¢ć®å¾ćć®ę¹åćåćć§ććććØćććć In this example, as shown in FIGS. 6A and 6B, the directions of the first basic structure and the second basic structure are overlapped in the same direction. āSame orientationā means the direction of inclination of the slanted surface of the blazed structure (decreasing to the right) when the optical axis is the vertical axis and the optical axis orthogonal direction is the horizontal axis in the cross section including the optical axis of the objective lens. It means that the direction of the inclination of the slanted surface which is the envelope surface of each step of the staircase structure is the same.
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ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(4.95Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.95Ī»1 + 0.2Ī»1) / (nā1)
(1.25Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.25Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććäøčØć®å¼ćÆć第ļ¼å č·Æå·®ä»äøę§é ć®å°ććŖå 軸ę¹åć®ę®µå·®éļ½ļ¼ļ¼ć第ļ¼å ęć®ę³¢é·Ī»ļ¼ć«åƾćć¦ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼Ā±ļ¼ļ¼ļ¼Ī»ļ¼ć®å č·Æå·®ćäøćććććŖę®µå·®éć§ćć£ć¦ć第ļ¼å č·Æå·®ä»äøę§é ć®å¤§ććŖå 軸ę¹åć®ę®µå·®éļ½ļ¼ć第ļ¼å ęć®ę³¢é·Ī»ļ¼ć«åƾćć¦ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼Ā±ļ¼ļ¼ļ¼Ī»ļ¼ć®å č·Æå·®ćäøćććććŖę®µå·®éć§ććććØćęå³ćć¦ćććØćčØććć Further, the above equation is a step amount such that the small step amount d00 in the optical axis direction of the first optical path difference providing structure gives an optical path difference of 1.25Ī»1 ± 0.2Ī»1 with respect to the wavelength Ī»1 of the first light flux. This means that the large step amount d0 in the optical axis direction of the first optical path difference providing structure is a step amount that gives an optical path difference of 4.95Ī»1 ± 0.2Ī»1 with respect to the wavelength Ī»1 of the first light flux. It can be said that they are doing.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖććLćę£ć§ććććØć儽ć¾ććć In this example, | L | = 2, M = 0, and | N | = 1 are satisfied, and the signs of L and N are different. L is preferably positive.
ććŖćć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé²ćæćäøć¤ć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé ćććććŖå “åćåćÆć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé ććäøć¤ć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé²ććććŖå “åćLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖććØčØćććå°ć第ļ¼å č·Æå·®ä»äøę§é ććé段形ē¶ć®ē¹°ćčæćę§é ć§ććå “åćÆćåä½ę§é ć§ććäøć¤ć®é段形ē¶ć®äøć§ćäøčØć®ä½ēøć®é²ćæćØä½ēøć®é ććčµ·ćć¦ććäŗć儽ć¾ććć Note that the phase of the first light beam that has passed through the first optical path difference providing structure increases as it moves away from the optical axis, and the phase of the third light beam that has passed through the first optical path difference providing structure is delayed as it moves away from the optical axis. In such a case, the phase of the first light flux that has passed through the first optical path difference providing structure is delayed as the distance from the optical axis increases, and the phase of the third light flux that has passed through the first optical path difference providing structure is increased as the distance from the optical axis increases. Can be said to be different in the sign of L and N. In addition, when the first optical path difference providing structure is a staircase-shaped repetitive structure, it is preferable that the phase advance and the phase delay occur in one staircase shape that is a unit structure.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 1, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 77% for the first beam, about 68% for the second beam, and about 57% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćå°ćå č·Æå·®ä»äøę§é ć«ććć¦ćåęå¹ēćÆä»„äøć®ę°ļ¼ć«ē¤ŗććććŖå¼ć«åŗć„ćć¦ćčØē®ććććØćåÆč½ć§ććć In the optical path difference providing structure, the diffraction efficiency can also be calculated based on the following equation (3).
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 2)
In Example 2, as shown in FIG.7 (b), the 2nd foundation structure which is a staircase type structure is a 6-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 7 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
(6Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććććē°ćŖćåćććØćÆć対ē©ć¬ć³ćŗć®å 軸ćå«ćęé¢ć«ććć¦ćå 軸ć縦軸ćØćå 軸ē“äŗ¤ę¹åć横軸ćØćććØćć«ććć¬ć¼ćŗåę§é ć®ęćć®é¢ć®å¾ćć®ę¹åļ¼å³äøćććå·¦äøćććļ¼ćØćéꮵåę§é ć®åꮵć®å ēµ”é¢ć§ććęćć®é¢ć®å¾ćć®ę¹åćéć§ććććØćććć In this example, as shown in FIGS. 7A and 7B, the directions of the first basic structure and the second basic structure are superimposed in different directions. āDifferent orientationā refers to the direction of inclination of a slanted surface of a blazed structure (decrease to the right) when the optical axis is the vertical axis and the optical axis orthogonal direction is the horizontal axis in the cross section including the optical axis of the objective lens It means that the inclination direction of the slanted surface, which is the envelope surface of each step of the staircase structure, is reversed.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
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ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a six-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(5Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćLļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććļ¼ćØļ¼®ćå ±ć«ę£ć§ććććØć儽ć¾ććć In this example, L = 0, | M | = 2, and | N | = 3 are satisfied, and the signs of M and N are equal. It is preferred that both M and N are positive.
ććŖćć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé²ćæćäøć¤ć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćå 軸ććé¢ććēØćä½ēøćé²ććććŖå “åćåćÆć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆå 軸ććé¢ććēØćä½ēøćé ććäøć¤ć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćå 軸ććé¢ććēØćä½ēøćé ćććććŖå “åćļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććØčØćććå°ć第ļ¼å č·Æå·®ä»äøę§é ććé段形ē¶ć®ē¹°ćčæćę§é ć§ććå “åćÆćåä½ę§é ć§ććäøć¤ć®é段形ē¶ć®äøć§ćäøčØć®ä½ēøć®é²ćæćØä½ēøć®é ććčµ·ćć¦ććäŗć儽ć¾ććć The phase of the second light flux that has passed through the first optical path difference providing structure is advanced as the distance from the optical axis increases, and the phase of the second light flux that has passed through the first optical path difference providing structure is advanced as it is further away from the optical axis. In such a case, the phase of the second light flux that has passed through the first optical path difference providing structure is delayed as the distance from the optical axis increases, and the phase of the third light flux that has passed through the first optical path difference providing structure is also determined to be away from the optical axis. Is delayed, it can be said that the signs of M and N are equal. In addition, when the first optical path difference providing structure is a staircase-shaped repetitive structure, it is preferable that the phase advance and the phase delay occur in one staircase shape that is a unit structure.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 2, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 80% for the first beam, about 62% for the second beam, and about 54% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
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ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference giving structure example 3)
In Example 3, as shown in FIG.8 (b), the 2nd foundation structure which is a staircase type structure is a 7-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 8 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.31Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.31Ī»1 + 0.2Ī»1) / (nā1)
(7.86Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.86Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 8A and 8B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
Øć¦ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćäøčØć®ę”ä»¶å¼ćęŗććććØććć儽ć¾ććććå
軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
®ćć段差éć«ććŖććć°ćŖćććå
軸ććé¢ćć段差ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćå¾ć
ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(4.86Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.86Ī»1 + 0.2Ī»1) / (nā1)
(1.31Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.31Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćØļ¼ćØļ¼®ćå ±ć«ę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 3, and | N | = 4 are satisfied, and the signs of L, M, and N are equal. Moreover, it is preferable that L, M, and N are all positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 3, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 69% for the first beam, about 65% for the second beam, and about 64% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 4)
In Example 4, as shown in FIG. 9B, the second basic structure having a stepped structure is a seven-stage stepped structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 9 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(4Ī»1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(4Ī»1 + 0.4Ī»1) / (nā1)
(1.28Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.28Ī»1 + 0.2Ī»1) / (nā1)
(7.68Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.68Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 9A and 9B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
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軸ććé¢ćć段差ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćå¾ć
ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(3.68Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(3.68Ī»1 + 0.2Ī»1) / (nā1)
(1.28Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.28Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćØļ¼ćØļ¼®ćå ±ć«ę£ć§ććććØć儽ć¾ććć In this example, | L | = 2, | M | = 4, and | N | = 5 are satisfied, and the signs of L, M, and N are equal. Moreover, it is preferable that L, M, and N are all positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 4, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 67% for the first beam, about 68% for the second beam, and about 60% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 5)
In Example 5, as shown in FIG.10 (b), the 2nd foundation structure which is a staircase type structure is a 5-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 10 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(2Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
(4.8Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(4.8Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 10A and 10B, the directions of the first basic structure and the second basic structure are overlapped in the same direction.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
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ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a five-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.8Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.8Ī»1 + 0.2Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖććć¾ććLćę£ć§ććććØć儽ć¾ććć In this example, | L | = 3, M = 0, and | N | = 1 are satisfied, and the signs of L and N are different. Moreover, it is preferable that L is positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 5, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 88% for the first beam, about 70% for the second beam, and about 57% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ļ¼ćć¤ććŖę§é ļ¼ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććććć§ćÆćļ½ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ć®å “åćå«ćļ¼ä¾ļ¼ćļ¼ćļ¼ļ¼ćļ¼ļ¼ćåćļ¼ć
(First optical path difference providing structure example 6)
In Example 6, as shown in FIG. 11B, the second basic structure having a stepped structure is a two-step stepped structure (binary structure). Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 11 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(4Ī»1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(4Ī»1 + 0.4Ī»1) / (nā1)
(1.1Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.1Ī»1 + 0.2Ī»1) / (nā1)
(1.1Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(1.1Ī»1 + 0.2Ī»1) / (nā1)
Meet. Here, the case of d21 = d22 is included (the same applies to Examples 7, 8, 18, and 19).
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 11A and 11B, the directions of the first foundation structure and the second foundation structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
Øć¦ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćäøčØć®ę”ä»¶å¼ćęŗććććØććć儽ć¾ććććå
軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
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軸ććé¢ćć段差ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćå¾ć
ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(2.9Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(2.9Ī»1 + 0.2Ī»1) / (nā1)
(1.1Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.1Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 4, | M | = 3, and | N | = 3 are satisfied, and the signs of L, M, and N are equal. L, M, and N are preferably positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 6, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 97% for the first beam, about 74% for the second beam, and about 45% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ļ¼ćć¤ććŖę§é ļ¼ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 7)
In Example 7, as shown in FIG. 12B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 12 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(2Ī»1 + 0.2Ī»1) / (nā1)
(2Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(2Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 12A and 12B, the directions of the first basic structure and the second basic structure are overlapped in the same direction.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
®ćć段差éć«ććŖććć°ćŖćććå
軸ććé¢ćć段差ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćå¾ć
ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(3Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(3Ī»1 + 0.2Ī»1) / (nā1)
(2Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(2Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 1, | N | = 1 are satisfied, and the signs of L, M, and N are equal. L, M, and N are preferably positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ććć¬ć¼ćŗåę§é ć«ęÆć¹ćé«ćåęå¹ēćå¾ćććØćć§ććć In the first optical path difference providing structure of Example 7, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 82% for the first beam, about 91% for the second beam, and about 57% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the blazed structure.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ļ¼ćć¤ććŖę§é ļ¼ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 8)
In Example 8, as shown in FIG. 13B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 13 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(3.1Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(3.1Ī»1 + 0.2Ī»1) / (nā1)
(3.1Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(3.1Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 13A and 13B, the directions of the first foundation structure and the second foundation structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(3.1Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(3.1Ī»1 + 0.2Ī»1) / (nā1)
(2.1Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(2.1Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 1, | N | = 1 are satisfied, and the signs of L, M, and N are equal. L, M, and N are preferably positive.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ććć¬ć¼ćŗåę§é ć«ęÆć¹ćé«ćåęå¹ēćå¾ćććØćć§ććć In the first optical path difference providing structure of Example 8, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 90% for the first beam, about 85% for the second beam, and about 50% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the blazed structure.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼
ćä¾ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 9)
In Example 9, as shown in FIG. 14B, the second basic structure having a stepped structure is a seven-step stepped structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 14 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.29Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.29Ī»1 + 0.2Ī»1) / (nā1)
(7.74Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.74Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 14A and 14B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
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軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
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ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a seven-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.74Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.74Ī»1 + 0.2Ī»1) / (nā1)
(1.29Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.29Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććę£č² ć®ē¬¦å·ć«ć¤ćć¦ćÆćLć®ē¬¦å·ćØćļ¼åć³ļ¼®ć®ē¬¦å·ćē°ćŖććļ¼ćØļ¼®ć®ē¬¦å·ćēćććć¾ććLćč² ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 2, and | N | = 3 are satisfied, and the signs of L and the signs of M and N are different for positive and negative signs. The signs are equal. L is preferably negative.
ćä¾ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 9, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 76% for the first beam, about 76% for the second beam, and about 64% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
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ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 10)
In Example 10, as shown in FIG.15 (b), the 2nd foundation structure which is a step type structure is a step type structure of 8 divisions. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 15 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.13Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.13Ī»1 + 0.2Ī»1) / (nā1)
(7.91Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.91Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 15A and 15B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is an eight-divided blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.91Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.91Ī»1 + 0.2Ī»1) / (nā1)
(1.13Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.13Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććę£č² ć®ē¬¦å·ć«ć¤ćć¦ćÆćLć®ē¬¦å·ćØćļ¼åć³ļ¼®ć®ē¬¦å·ćē°ćŖććļ¼ćØļ¼®ć®ē¬¦å·ćēćććć¾ććLćę£ć§ććććØć儽ć¾ććć In this example, | L | = 2, | M | = 2, and | N | = 3 are satisfied, and the signs of L and the signs of M and N are different for positive and negative signs. The signs are equal. Moreover, it is preferable that L is positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 10, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 95% for the first beam, about 70% for the second beam, and about 51% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 11)
In Example 11, as shown in FIG.16 (b), the 2nd foundation structure which is a step type structure is a step type structure of 8 divisions. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 16 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.37Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.37Ī»1 + 0.2Ī»1) / (nā1)
(9.59Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(9.59Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 16A and 16B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
Øć¦ć®ę®µå·®éļ½ļ¼ćļ½ļ¼ļ¼ćäøčØć®ę”ä»¶å¼ćęŗććććØććć儽ć¾ććććå
軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is an eight-divided blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.59Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.59Ī»1 + 0.2Ī»1) / (nā1)
(1.37Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.37Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćLļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććļ¼åć³ļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, L = 0, | M | = 3, and | N | = 4 are satisfied, and the positive and negative signs of M and N are equal. Moreover, it is preferable that M and N are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 11, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 61% for the first beam, about 81% for the second beam, and about 71% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 12)
In Example 12, as shown in FIG. 17 (b), the second basic structure having a stepped structure is a nine-stage stepped structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 17 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(2Ī»1 + 0.4Ī»1) / (nā1)
(1.11Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.11Ī»1 + 0.2Ī»1) / (nā1)
(8.88Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(8.88Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 17A and 17B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a nine-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.88Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.88Ī»1 + 0.2Ī»1) / (nā1)
(1.11Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.11Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćļ¼åć³ļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 4, | N | = 5 is satisfied, and the positive and negative signs of L, M, and N are equal. L, M, and N are preferably positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 12, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 91% for the first beam, about 66% for the second beam, and about 48% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼ļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 13)
In Example 13, as shown in FIG.18 (b), the 2nd basic structure which is a staircase type structure is a 10-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 18 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(2Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
(10.8Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(10.8Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 18A and 18B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
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ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a 10-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(8.8Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(8.8Ī»1 + 0.2Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćLļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććļ¼åć³ļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, L = 0, | M | = 4, | N | = 5 is satisfied, and the positive and negative signs of M and N are equal. Moreover, it is preferable that M and N are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 13, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 88% for the first beam, about 76% for the second beam, and about 57% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼ļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 14)
In Example 14, as shown in FIG. 19B, the second basic structure having a stepped structure is a ten-step divided structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 19 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.33Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.33Ī»1 + 0.2Ī»1) / (nā1)
(11.97Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(11.97Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 19A and 19B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a 10-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(8.97Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(8.97Ī»1 + 0.2Ī»1) / (nā1)
(1.33Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.33Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćLļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććļ¼åć³ļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, L = 0, | M | = 4, | N | = 5 is satisfied, and the positive and negative signs of M and N are equal. Moreover, it is preferable that M and N are positive.
ććä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 14, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 74% for the first beam, about 85% for the second beam, and about 65% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
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ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 15)
In Example 15, as shown in FIG. 20B, the second basic structure that is a stepped structure is a six-step staircase structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 20 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.19Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.19Ī»1 + 0.2Ī»1) / (nā1)
(5.95Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(5.95Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććć Also, in this example, as shown in FIGS. 20A and 20B, the directions of the first basic structure and the second basic structure are overlapped in the same direction.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a six-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(6.95Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(6.95Ī»1 + 0.2Ī»1) / (nā1)
(1.19Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(1.19Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććę£č² ć®ē¬¦å·ć«ć¤ćć¦ćLć®ē¬¦å·ćØćļ¼åć³ļ¼®ć®ē¬¦å·ćē°ćŖććļ¼ćØļ¼®ć®ē¬¦å·ćēćććć¾ććLćę£ć§ććććØć儽ć¾ććć Also, in this example, | L | = 2, | M | = 1, | N | = 2, and the sign of L is different from the sign of M and N for positive and negative signs. Are equal. Moreover, it is preferable that L is positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 15, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 86% for the first beam, about 74% for the second beam, and about 54% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 16)
In Example 16, as shown in FIG. 21 (b), the second basic structure having a stepped structure is a four-step stepped structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 21 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(3.25Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(3.25Ī»1 + 0.2Ī»1) / (nā1)
(9.75Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(9.75Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć Further, in this example, as shown in FIGS. 21A and 21B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
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č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
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ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(8.75Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(8.75Ī»1 + 0.2Ī»1) / (nā1)
(3.25Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(3.25Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćLļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, L = 0, | M | = 1, | N | = 2, and the positive and negative signs of M and N are equal. Moreover, it is preferable that M and N are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéꮵåę§é ć«ęÆć¹ćé«ćåęå¹ēćå¾ćććØćć§ććć In the first optical path difference providing structure of Example 16, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 81% for the first beam, about 89% for the second beam, and about 61% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
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ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 17)
In Example 17, as shown in FIG.22 (b), the 2nd foundation structure which is a staircase type structure is a 4 stepped staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 22 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(3.22Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(3.22Ī»1 + 0.2Ī»1) / (nā1)
(9.66Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(9.66Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććć In this example, as shown in FIGS. 22A and 22B, the directions of the first basic structure and the second basic structure are overlapped in the same direction.
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ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a four-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(10.66Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(10.66Ī»1 + 0.2Ī»1) / (nā1)
(3.22Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(3.22Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖććć¾ććLćę£ć§ććććØć儽ć¾ććć In this example, | L | = 2, M = 0, and | N | = 1 are satisfied, and the signs of L and N are different. Moreover, it is preferable that L is positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 17, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 78% for the first beam, about 72% for the second beam, and about 58% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
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軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
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ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 18)
In Example 18, as shown in FIG. 23B, the second basic structure having a stepped structure is a two-step staircase structure (binary structure). Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 23 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(2Ī»1 + 0.4Ī»1) / (nā1)
(3.05Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(3.05Ī»1 + 0.2Ī»1) / (nā1)
(3.05Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(3.05Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććåćåćć§éē³ćć¦ććć Further, in this example, as shown in FIGS. 23A and 23B, the directions of the first basic structure and the second basic structure are overlapped in the same direction.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
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ććļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(5.05Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5.05Ī»1 + 0.2Ī»1) / (nā1)
(3.05Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(3.05Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ¼®ļ¼ļ¼ćęŗćććLćØļ¼ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 2, | M | = 1, N = 0 are satisfied, and the positive and negative signs of L and M are equal. Moreover, it is preferable that L and M are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 18, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 98% for the first beam, about 91% for the second beam, and about 41% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ļ¼ćć¤ććŖę§é ļ¼ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 19)
In Example 19, as shown in FIG. 24B, the second basic structure having a stepped structure is a two-stage stepped structure (binary structure). Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 24 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(5Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
(5Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć Further, in this example, as shown in FIGS. 24A and 24B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
č·Æå·®ä»äøę§é ć®å
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軸ććé¢ćć段差ć®å “åć対ē©ć¬ć³ćŗć®éēé¢å½¢ē¶ć®ę²é¢ćčę
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
č·Æå·®ä»äøę§é ć®å
軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
The first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a two-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(5Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
(4Ī»1-0.2Ī»1) / (n-1) ⦠d00 ⦠(4Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ¼®ļ¼ļ¼ćęŗćććLćØļ¼ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 1, N = 0 are satisfied, and the positive and negative signs of L and M are equal. Moreover, it is preferable that L and M are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéꮵåę§é ć«ęÆć¹ćé«ćåęå¹ēćå¾ćććØćć§ććć In the first optical path difference providing structure of Example 19, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 82% for the first beam, about 83% for the second beam, and about 54% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
ćļ¼ē¬¬äøå
č·Æå·®ä»äøę§é ćä¾ļ¼ļ¼ļ¼
ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćØē¬¬ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å¤§ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
ććļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 20)
In Example 20, as shown in FIG.25 (b), the 2nd foundation structure which is a staircase type structure is a three-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 25 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(2Ī»1 + 0.2Ī»1) / (nā1)
(4Ī»1ā0.2Ī»1) / (nā1) ⦠d22 ⦠(4Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć Further, in this example, as shown in FIGS. 25A and 25B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
ćć¾ćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéē³ćć¦å¾ććć第äøå
č·Æå·®ä»äøę§é ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćę§ć«ļ¼åå²ć®ćć¬ć¼ćŗéꮵåę§é ć§ććć第äøå
č·Æå·®ä»äøę§é ć®ęć大ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼Ī¼ļ½ļ¼ćØć第äøå
č·Æå·®ä»äøę§é ć®å°ććŖę®µå·®ć®å
軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
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ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗćććå°ćäøå¤®é åć®ē¬¬ļ¼å
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a three-part blazed stepped structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(3Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(3Ī»1 + 0.2Ī»1) / (nā1)
(2Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(2Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ¼ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćØļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, M = 0, and | N | = 1 are satisfied, and the signs of L and N are equal. Moreover, it is preferable that L and N are positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéꮵåę§é ć«ęÆć¹ćé«ćåęå¹ēćå¾ćććØćć§ććć In the first optical path difference providing structure of Example 20, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 100% for the first beam, about 88% for the second beam, and about 44% for the third beam. According to this example, higher diffraction efficiency can be obtained as compared with the stepped structure.
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ćä¾ļ¼ļ¼ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«éꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćÆļ¼åå²ć®éꮵåę§é ć§ćććć¾ćć第ļ¼åŗē¤ę§é ć®éꮵåę§é ć®å°ćć段差ć®å
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåć³ćå³ļ¼ļ¼ļ¼ļ½ļ¼ć«ē¤ŗćććć«ćć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ć®ę®µå·®éØć®å
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ćļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćęŗććć
(First optical path difference providing structure example 21)
In Example 21, as shown in FIG.26 (b), the 2nd foundation structure which is a staircase type structure is a three-step staircase type structure. Further, the length d21 (μm) of the small step of the stepped structure of the second basic structure in the optical axis direction, the length d22 (μm) of the large step of the stepped structure of the second basic structure, and As shown in FIG. 26 (a), the length d1 (μm) in the optical axis direction of the step portion of the first basic structure having a blaze structure is defined by the following conditional expression:
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(3Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(3Ī»1 + 0.2Ī»1) / (nā1)
(6Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.2Ī»1) / (nā1)
Meet.
ćć¾ććę¬ä¾ć«ććć¦ćÆćå³ļ¼ļ¼ļ¼ļ½ļ¼ćļ¼ļ½ļ¼ć«ē¤ŗćććć«ē¬¬ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ć®åććē°ćŖćåćć§éē³ćć¦ććć Further, in this example, as shown in FIGS. 26A and 26B, the directions of the first basic structure and the second basic structure are superimposed in different directions.
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軸ę¹åć®é·ćļ½ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć仄äøć®ę”ä»¶å¼ć
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ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
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ć«å¤§ćććŖć£ć¦č”ćå¾åććććäøčØę”ä»¶å¼ćććč„干大ććŖę®µå·®ćååØććććØććććå¾ć£ć¦ć第ļ¼å
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軸ć«ęćčæćļ½ļ¼ćØļ½ļ¼ļ¼ćå°ćŖććØćäøčØę”ä»¶å¼ćęŗććććØć儽ć¾ććć
Further, the first optical path difference providing structure obtained by superimposing the first basic structure and the second basic structure is a three-part blazed staircase structure as shown in FIG. The length d0 (μm) of the largest step of the structure in the optical axis direction and the length d00 (μm) of the small step of the first optical path difference providing structure in the optical axis direction are as follows:
(5Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
(3Ī»1-0.2Ī»1) / (nā1) ⦠d00 ⦠(3Ī»1 + 0.2Ī»1) / (nā1)
Meet. It is more preferable that all the step amounts d0 and d00 of the first optical path difference providing structure in the central region satisfy the above conditional expression. However, in the case of a step away from the optical axis, the aspheric surface of the objective lens is curved. The step amount must be taken into consideration, and the step amounts d0 and d00 of the step away from the optical axis tend to increase gradually, and there may be a step slightly larger than the above conditional expression. Therefore, it is preferable that d0 and d00 closest to the optical axis of the first optical path difference providing structure satisfy at least the above conditional expression.
ćć¾ććę¬ä¾ć«ććć¦ćÆćļ½ļ¼¬ļ½ļ¼ļ¼ćļ½ļ¼ļ½ļ¼ļ¼ćļ½ļ¼®ļ½ļ¼ļ¼ćęŗćććLćļ¼ćļ¼®ć®ę£č² ć®ē¬¦å·ćēćććć¾ććLćļ¼ćļ¼®ćę£ć§ććććØć儽ć¾ććć In this example, | L | = 1, | M | = 1, | N | = 2, and the signs of L, M, and N are equal. L, M, and N are preferably positive.
ćä¾ļ¼ļ¼ć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ć«ććć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ćē“ļ¼ļ¼ļ¼ļ½ļ½ćØććå “åć®åęå¹ēćć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ć第ļ¼å ęć«ććć¦ē“ļ¼ļ¼ļ¼ ćØć§ćććę¬ä¾ć«ććć°ćéåøøć®ćć¬ć¼ćŗåę§é ććéꮵåę§é ć®åęę§é ć§ćÆå¾ćććŖćꬔę°ćę大ć®åęå¹ēćØććććØćåÆč½ćØćŖćć In the first optical path difference providing structure of Example 21, the first wavelength of the first light beam is about 405 nm, the second wavelength of the second light beam is about 655 nm, and the third wavelength of the third light beam is about 785 nm. The diffraction efficiency can be about 100% for the first beam, about 80% for the second beam, and about 40% for the third beam. According to this example, the order that cannot be obtained with a normal blazed structure or a diffractive structure with a staircase structure can be set to the maximum diffraction efficiency.
ćć¾ćć対ē©ć¬ć³ćŗć®äøå¤®é åć«čØćććć第ļ¼å č·Æå·®ä»äøę§é ć«å ćć対ē©ć¬ć³ćŗć®åØč¾ŗé åć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććå “åć対ē©ć¬ć³ćŗć®ē°ćŖćå å¦é¢ć«čØćć¦ćććććåäøć®å å¦é¢ć«čØććććØć儽ć¾ćććåäøć®å å¦é¢ć«čØććććØć«ććć製é ęć®åčÆčŖ¤å·®ćå°ćŖćććććØćåÆč½ćØćŖććć儽ć¾ćććć¾ćć第ļ¼å č·Æå·®ä»äøę§é åć³ē¬¬ļ¼å č·Æå·®ä»äøę§é ćÆć対ē©ć¬ć³ćŗć®å ćć£ć¹ćÆå“ć®é¢ćććć対ē©ć¬ć³ćŗć®å ęŗå“ć®é¢ć«čØććććććØć儽ć¾ććć In addition to the first optical path difference providing structure provided in the central area of the objective lens, when the second optical path difference providing structure is provided in the peripheral area of the objective lens, it may be provided on different optical surfaces of the objective lens, but the same It is preferably provided on the optical surface. Providing them on the same optical surface is preferable because it makes it possible to reduce eccentricity errors during manufacturing. Moreover, it is preferable that the first optical path difference providing structure and the second optical path difference providing structure are provided on the light source side surface of the objective lens rather than the optical disk side surface of the objective lens.
ć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććäøå¤®é åćééćć第ļ¼å ęć第ļ¼å ęåć³ē¬¬ļ¼å ęććććććéå ć¹ććććå½¢ęććććć«éå ććć儽ć¾ćććÆć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććäøå¤®é åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«ę å ±ć®čØé²åć³ļ¼åćÆåēćć§ććććć«éå ćććć¾ćć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććäøå¤®é åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«ę å ±ć®čØé²åć³ļ¼åćÆåēćć§ććććć«éå ćććććć«ć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććäøå¤®é åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«ę å ±ć®čØé²åć³ļ¼åćÆåēćć§ććććć«éå ćććć¾ćć第ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ćØē¬¬ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ćē°ćŖćå “åć第ļ¼å č·Æå·®ä»äøę§é ćÆć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęć«åƾćć¦ć第ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ćØē¬¬ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ć®éćć«ććēŗēććēé¢åå·®åć³ļ¼åćÆē¬¬ļ¼å ęćØē¬¬ļ¼å ęć®ę³¢é·ć®éćć«ććēŗēććēé¢åå·®ćč£ę£ććććØć儽ć¾ćććććć«ć第ļ¼å č·Æå·®ä»äøę§é ćÆć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęć«åƾćć¦ć第ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ćØē¬¬ļ¼å ćć£ć¹ćÆć®äæč·åŗęæć®åćļ½ļ¼ćØć®éćć«ććēŗēććēé¢åå·®åć³ļ¼åćÆē¬¬ļ¼å ęćØē¬¬ļ¼å ęć®ę³¢é·ć®éćć«ććēŗēććēé¢åå·®ćč£ę£ććććØć儽ć¾ććć The objective lens condenses the first light beam, the second light beam, and the third light beam that pass through the central region where the first optical path difference providing structure of the objective lens is provided so as to form a condensed spot. Preferably, the objective lens is capable of recording and / or reproducing information on the information recording surface of the first optical disc, with the first light beam passing through the central region provided with the first optical path difference providing structure of the objective lens. Condensate. In addition, the objective lens collects the second light flux that passes through the central region where the first optical path difference providing structure of the objective lens is provided so that information can be recorded and / or reproduced on the information recording surface of the second optical disc. Shine. Further, the objective lens collects the third light flux that passes through the central region where the first optical path difference providing structure of the objective lens is provided so that information can be recorded and / or reproduced on the information recording surface of the third optical disc. Shine. In addition, when the thickness t1 of the protective substrate of the first optical disc and the thickness t2 of the protective substrate of the second optical disc are different, the first optical path difference providing structure includes the first light flux passing through the first optical path difference providing structure and the second optical flux. It occurs due to the spherical aberration generated by the difference between the thickness t1 of the protective substrate of the first optical disk and the thickness t2 of the protective substrate of the second optical disk and / or the difference in the wavelengths of the first and second light beams. It is preferable to correct spherical aberration. Further, the first optical path difference providing structure has a thickness t1 of the protective substrate of the first optical disc and a thickness of the protective substrate of the third optical disc with respect to the first light beam and the third light beam that have passed through the first optical path difference providing structure. It is preferable to correct spherical aberration generated due to a difference from t3 and / or spherical aberration generated due to a difference in wavelength between the first light flux and the third light flux.
ć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å
ęć«ćććē¦ē¹č·é¢ćļ½ļ¼ļ¼ļ½ļ½ļ¼ćØćć対ē©ć¬ć³ćŗć®äøåæåććļ½ļ¼ļ½ļ½ļ¼ćØććéć«ćäøčØć®å¼ļ¼ļ¼ļ¼ć
ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ½ļ¼ā¦ļ¼ļ¼ļ¼ćććććććļ¼ļ¼ļ¼
ćęŗććććØć儽ć¾ććć
When the focal length of the first light beam of the objective lens is f1 (mm) and the center thickness of the objective lens is d (mm), the following formula (7),
0.7 ⦠d / f1 ⦠2.0 (7)
It is preferable to satisfy.
ććŖććäøčØć®å¼ļ¼ļ¼ļ¼āć
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ćęŗććććØććć儽ć¾ććć
In addition, the following formula (7) ā²,
1.0 ⦠d / f1 ⦠1.5 (7) ā²
It is more preferable to satisfy.
ćäøčØę§ęć«ćććå č·Æå·®ä»äøę§é ć®ććććå°ććććććØćŖćć第ļ¼å ćć£ć¹ćÆćØćć¦ć®ļ¼£ļ¼¤ć®ćÆć¼ćć³ć°ćć£ć¹ćæć³ć¹ć確äæć§ćć対ē©ć¬ć³ćŗć®č£½é ć容ęć«ććäŗćåŗę„ćå ćć¦ćå ć®å©ēØå¹ēćé«ćē¶ęććććØćåÆč½ćØćŖćć With the above configuration, the working distance of the CD as the third optical disk can be secured without reducing the pitch of the optical path difference providing structure, and the objective lens can be easily manufactured. In addition, the light use efficiency is increased. Can be maintained.
ćć¾ćć仄äøć®ę”ä»¶å¼ćęŗććććØć儽ć¾ććć
ļ¼ļ¼ļ¼ļ½ļ½ā¦Ī¦ā¦ļ¼ļ¼ļ¼ļ½ļ½
å°ćΦćÆć第ļ¼å
ćć£ć¹ćÆä½æēØęć®åƾē©ć¬ć³ćŗć®ęå¹å¾ć蔨ććäøčØēÆå²ćęŗććććØć«ććć第ļ¼å
ćć£ć¹ćÆćØćć¦ć®ļ¼£ļ¼¤ć®ćÆć¼ćć³ć°ćć£ć¹ćæć³ć¹ćå®ä½æēØäøåé”ćŖćć¬ćć«ć®č·é¢ć確äæćć¤ć¤ćä¾ćć対ē©ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗć§ćć£ććØćć¦ććęø©åŗ¦å¤åęć«ćććåå·®å¤åćåé”ćŖćć¬ćć«ć«ē¶ęććććØćć§ććć
Moreover, it is preferable to satisfy the following conditional expressions.
2.1mm ⦠Φ ⦠4.2mm
Φ represents the effective diameter of the objective lens when the first optical disk is used. By satisfying the above range, the working distance of the CD as the third optical disk is secured at a distance that does not cause a problem in practical use, and even if the objective lens is a plastic lens, for example, the aberration change when the temperature changes It can be maintained at a problem-free level.
ćć¾ćć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććå “åććććēØćć¦åØč¾ŗé åćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęććććććéå ć¹ććććå½¢ęććććć«éå ććć儽ć¾ćććÆć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć®ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććåØč¾ŗé åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«ę å ±ć®čØé²åć³ļ¼åćÆåēćć§ććććć«éå ćććć¾ćć対ē©ć¬ć³ćŗćÆć対ē©ć¬ć³ćŗć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććå “åććććēØćć¦åØč¾ŗé åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«ę å ±ć®čØé²åć³ļ¼åćÆåēćć§ććććć«éå ćććć¾ć第ļ¼å č·Æå·®ä»äøę§é ćÆć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęć®ę³¢é·ć®éćć«ććēŗēććč²ēé¢åå·®ćč£ę£ććććØć儽ć¾ććć Further, when the objective lens is provided with the second optical path difference providing structure, the objective lens condenses the first light flux and the second light flux that pass through the peripheral region so as to form a condensed spot, respectively. To do. Preferably, the objective lens is capable of recording and / or reproducing information on the information recording surface of the first optical disc, with the first light flux passing through the peripheral region provided with the second optical path difference providing structure of the objective lens. Condensate. Further, when the objective lens is provided with the second optical path difference providing structure, the objective lens records the information on the information recording surface of the second optical disk and / or records the second light flux that passes through the peripheral region. Light is collected so that it can be regenerated. Further, it is preferable that the second optical path difference providing structure corrects chromatic spherical aberration caused by a difference in wavelength between the first light beam and the second light beam that pass through the second optical path difference providing structure.
ćć¾ćć儽ć¾ććę ę§ćØćć¦ćåØč¾ŗé åćééćć第ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆć®čØé²åć³ļ¼åćÆåēć«ēØććććŖćę ę§ćęćććććåØč¾ŗé åćééćć第ļ¼å ęćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§éå ć¹ćććć®å½¢ęć«åÆäøććŖćććć«ććććØć儽ć¾ćććć¤ć¾ćć対ē©ć¬ć³ćŗć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććå “åćććć«ććåØč¾ŗé åćééćć第ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ćć¬ć¢ćå½¢ęććććØć儽ć¾ćććå³ļ¼ć«ē¤ŗćććć«ć対ē©ć¬ć³ćŗćééćć第ļ¼å ęć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§å½¢ęććć¹ćććć«ććć¦ćå 軸å“ļ¼åćÆć¹ćććäøåæéØļ¼ććå¤å“ćøåććé ēŖć§ćå éåÆåŗ¦ćé«ćć¹ćććäøåæéØļ¼³ļ¼£ļ¼®ćå éåÆåŗ¦ćć¹ćććäøåæéØććä½ćć¹ćććäøééØļ¼³ļ¼ļ¼¤ćå éåÆåŗ¦ćć¹ćććäøééØćććé«ćć¹ćććäøåæéØćććä½ćć¹ćććåØč¾ŗéØļ¼³ļ¼Æļ¼“ćęćććć¹ćććäøåæéØććå ćć£ć¹ćÆć®ę å ±ć®čØé²åć³ļ¼åćÆåēć«ēØććććć¹ćććäøééØåć³ć¹ćććåØč¾ŗéØćÆćå ćć£ć¹ćÆć®ę å ±ć®čØé²åć³ļ¼åćÆåēć«ćÆēØććććŖććäøčØć«ććć¦ććć®ć¹ćććåØč¾ŗéØććć¬ć¢ćØčØć£ć¦ćććć¤ć¾ćć対ē©ć¬ć³ćŗć®åØč¾ŗé åć«čØćććć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ć¹ćććåØč¾ŗéØćå½¢ęććććØć儽ć¾ćććććććŖćććäøčæ°ć®ćććŖćć¬ć¢ć§ćŖćć¦ććå éåÆåŗ¦ćé«ćć¹ćććäøåæéØć®åØćć«ćć¹ćććäøééØććŖććå éåÆåŗ¦ćć¹ćććäøåæéØććä½ćć¹ćććåØč¾ŗéØćććå “åćććå¾ććć®å “åćÆćå½č©²ć¹ćććåØč¾ŗéØććć¬ć¢ćØććććŖććććć§ćć第ļ¼å ęć®éå ć¹ćććåćÆć¹ććććÆć第ļ¼ćć¹ććć©ć¼ć«ć¹ć«ćććć¹ćććć§ććććØć儽ć¾ććć Also, as a preferred mode, there is a mode in which the third light flux that has passed through the peripheral area is not used for recording and / or reproduction of the third optical disk. It is preferable that the third light flux that has passed through the peripheral region does not contribute to the formation of a focused spot on the information recording surface of the third optical disc. That is, when the objective lens is provided with the second optical path difference providing structure, it is preferable that the third light flux passing through the peripheral region thereby forms a flare on the information recording surface of the third optical disc. As shown in FIG. 4, in the spot formed on the information recording surface of the third optical disc by the third light flux that has passed through the objective lens, the light amount density is high in the order from the optical axis side (or the spot center) to the outside. The spot center portion SCN, the spot intermediate portion SMD whose light intensity density is lower than that of the spot center portion, and the spot peripheral portion SOT whose light intensity density is higher than that of the spot intermediate portion and lower than that of the spot center portion. The center portion of the spot is used for recording and / or reproducing information on the optical disc, and the spot intermediate portion and the spot peripheral portion are not used for recording and / or reproducing information on the optical disc. In the above, this spot peripheral part is called flare. That is, it is preferable that the third light flux that has passed through the second optical path difference providing structure provided in the peripheral region of the objective lens forms a spot peripheral portion on the information recording surface of the third optical disc. However, even if the flare is not as described above, there may be a spot peripheral portion around the spot center portion where the light density is high and there is no spot middle portion, and the light spot density is lower than the spot center portion. The periphery of the spot is called flare. In addition, it is preferable that the condensing spot or spot of a 3rd light beam here is a spot in 1st best focus.
ćć¾ććęåØč¾ŗé åćęććå “åć®å„½ć¾ććę ę§ćØćć¦ćęåØč¾ŗé åćééćć第ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆć®čØé²åć³ļ¼åćÆåēć«ēØććććęåØč¾ŗé åćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆåć³ē¬¬ļ¼å ćć£ć¹ćÆć®čØé²åć³ļ¼åćÆåēć«ēØććććŖćę ę§ćęćććććęåØč¾ŗé åćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęćććććć第ļ¼å ćć£ć¹ćÆåć³ē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ć®éå ć¹ćććć®å½¢ęć«åÆäøććŖćććć«ććććØć儽ć¾ćććć¤ć¾ćć対ē©ć¬ć³ćŗćęåØč¾ŗé åćęććå “åć対ē©ć¬ć³ćŗć®ęåØč¾ŗé åćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆåć³ē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ćć¬ć¢ćå½¢ęććććØć儽ć¾ćććčØćęćććØć対ē©ć¬ć³ćŗć®ęåØč¾ŗé åćééćć第ļ¼å ęåć³ē¬¬ļ¼å ęćÆć第ļ¼å ćć£ć¹ćÆåć³ē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ć¹ćććåØč¾ŗéØćå½¢ęććććØć儽ć¾ććć Moreover, as a preferable aspect in the case of having the outermost peripheral area, the first light flux that has passed through the outermost peripheral area is used for recording and / or reproduction of the first optical disc, and the second and third light fluxes that have passed through the outermost peripheral area. Includes an aspect that is not used for recording and / or reproduction of the second optical disc and the third optical disc. It is preferable that the second light flux and the third light flux that have passed through the outermost peripheral region do not contribute to the formation of a condensed spot on the information recording surfaces of the second optical disc and the third optical disc, respectively. That is, when the objective lens has the outermost peripheral area, the second light flux and the third light flux that pass through the outermost peripheral area of the objective lens preferably form a flare on the information recording surfaces of the second optical disc and the third optical disc. . In other words, it is preferable that the second light flux and the third light flux that have passed through the most peripheral area of the objective lens form a spot peripheral portion on the information recording surface of the second optical disc and the third optical disc.
ćęåØč¾ŗé åć第ļ¼å č·Æå·®ä»äøę§é ćęććå “åć第ļ¼å č·Æå·®ä»äøę§é ćć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęć«åƾćć¦ć第ļ¼å ęŗć®ę³¢é·ć®å ććŖå¤åć«ćć£ć¦ēŗēććć¹ćć§ććÆćććć£ćŗć ļ¼č²ēé¢åå·®ļ¼ćč£ę£ććććć«ćć¦ććććę³¢é·ć®å ććŖå¤åćØćÆć±ļ¼ļ¼ļ½ļ½ä»„å ć®å¤åćęććä¾ćć°ć第ļ¼å ęćę³¢é·Ī»ļ¼ćć±ļ¼ļ½ļ½å¤åććéć«ć第ļ¼å č·Æå·®ä»äøę§é ć«ćć£ć¦ćęåØč¾ŗé åćééćć第ļ¼å ęć®ēé¢åå·®ć®å¤åćč£åćć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć§ć®ę³¢é¢åå·®ć®å¤åéćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ½ļ½ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ½ļ½ļ½ä»„äøćØćŖćććć«ććććØć儽ć¾ććć When the outermost peripheral region has the third optical path difference providing structure, the third optical path difference providing structure is generated by a slight variation in the wavelength of the first light source with respect to the first light flux that has passed through the third optical path difference providing structure. Spherochromatism (chromatic spherical aberration) may be corrected. A slight change in wavelength refers to a change within ± 10 nm. For example, when the first light beam changes by ± 5 nm from the wavelength Ī»1, the third optical path difference providing structure compensates for the variation in spherical aberration of the first light beam that has passed through the most peripheral region, and on the information recording surface of the first optical disc. It is preferable that the amount of change in the wavefront aberration at 0.001Ī»2 rms or more and 0.070Ī»2 rms or less.
ććŖćć第ļ¼å č·Æå·®ä»äøę§é ćÆćåäøć®éꮵåę§é ććåäøć®ćć¬ć¼ćŗåę§é ć§ćć£ć¦ććććććć¬ć¼ćŗåę§é ćØćććčćļ¼ćććć®å¤§ććļ¼ćć¬ć¼ćŗåę§é ćéē³ćć¦ćŖćę§ęć§ćć£ć¦ćććć第ļ¼å č·Æå·®ä»äøę§é ćå½č©²éē³ę§é ć®å “åćå½č©²ćć¬ć¼ćŗåę§é ļ¼ē¬¬ļ¼å č·Æå·®ä»äøę§é ć®å “åćčććŖćļ¼ćććć®å°ććļ¼ę¹ć®åęę§é ļ¼ć«ć¤ćć¦ćÆć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ć®å¶ę°åēøå½ć®å č·Æå·®ć第ļ¼å ęć«ä»äøććććć«ććććć«ćć第ļ¼å ęćÆę³¢é¢ć®ä½ēøć«å¤åćēććŖćććć«ćć¦ććććę“ć«ć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·Ī»ļ¼ćć第ļ¼å ęć®ē¬¬ļ¼ę³¢é·ć®ć»ć¼å¶ę°åć®ę³¢é·ć§ćććØććÆćę“ę°åć®å č·Æå·®ć第ļ¼å ęć«ä»äøćććććØć«ćŖććåę§ć«ē¬¬ļ¼å ęć®ę³¢é¢ć®ä½ēøć«å¤åćēććŖćććØć«ćŖćććć®ę§ćŖę§ęć«ććć第ļ¼å ęćØē¬¬ļ¼å ęćÆćå½č©²åęę§é ć«ćć£ć¦éå ć«å½±éæćåć¼ćććććØććŖććØććå©ē¹ćććććŖććå¶ę°åēøå½ćØćÆćļ½ćčŖē¶ę°ćØććå “åćļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ļ¼ĆĪ»ļ¼ä»„äøćļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ļ¼ĆĪ»ļ¼ä»„äøć®ēÆå²ćčØćć The second optical path difference providing structure may be a single stepped structure or a single blazed structure, or a blazed structure and a rougher (large pitch) blazed structure are superimposed. The structure which becomes may be sufficient. When the second optical path difference providing structure is the superposition structure, the first wavelength Ī»1 of the first light flux is used for the blaze structure (in the case of the second optical path difference providing structure, a diffractive structure that is not rough (small pitch)). An optical path difference corresponding to an even multiple of the first light flux may be imparted to the first light flux so that the phase of the wavefront of the first light flux does not change. Further, when the third wavelength Ī»3 of the third light flux is a wavelength that is substantially an even multiple of the first wavelength of the first light flux, an optical path difference of an integral multiple is given to the third light flux. There is no change in the phase of the wavefront of the three light beams. With such a configuration, there is an advantage that the first light flux and the third light flux are not affected by the diffraction structure. Note that āeven multiplesā means a range of (2nā0.1) Ć Ī»1 or more and (2n + 0.1) Ć Ī»1 or less when n is a natural number.
ććŖćć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćéćä½µćć¦ē¬¬ļ¼å č·Æå·®ä»äøę§é ćå½¢ęććććØć«ććć第ļ¼å č·Æå·®ä»äøę§é ćééćć第ļ¼å ęć第ļ¼å ęć第ļ¼å ęå Øć¦ć®åŗå°å ć®ę¹åćē°ćŖćććććØćåÆč½ćØćŖćććć第ļ¼å ęć第ļ¼å ęć第ļ¼å ęć®å Øć¦ć®å ęćåćēµååēļ¼ä¾ćć°ćå Øć¦å¹³č”å ęļ¼ć§åƾē©ć¬ć³ćŗć«å „å°ćććØćć¦ććē°ćŖć種é”ć®å ćć£ć¹ćÆćēØćć¦ććććØć«čµ·å ćć¦ēŗēććåå·®ćč£ę£ć§ććäŗęćåÆč½ćØćŖćć Note that by forming the first optical path difference providing structure by superimposing the first basic structure and the second basic structure, all of the first, second, and third light beams that have passed through the first optical path difference providing structure are output. Since the directions of the incident light can be made different, even if all the first, second, and third light beams are incident on the objective lens with the same imaging magnification (for example, all parallel light beams), they are different. Aberrations caused by using different types of optical discs can be corrected, and compatibility is possible.
ć対ē©ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗć§ććå “åćęø©åŗ¦ē¹ę§č£ę£ēØę§é ćØćć¦ē¬¬ļ¼ć®åŗē¤ę§é ćć第ļ¼åŗē¤ę§é åć³ē¬¬ļ¼åŗē¤ę§é ć«ććć«éćććć®ć第ļ¼å č·Æå·®ä»äøę§é ćØćć¦ććććä½ćć第ļ¼å ćć£ć¹ćÆćHDć§ććå “åćÆćęø©åŗ¦å¤åć®å½±éæćććēØå¤§ćććŖćććć対ē©ć¬ć³ćŗć«ęø©åŗ¦ē¹ę§č£ę£ēØę§é ćØćć¦ć®åŗē¤ę§é ćÆčØććŖćć¦ććććå ·ä½ēć«ćÆć第ļ¼åŗē¤ę§é ć®å 軸ę¹åć®ę®µå·®éćÆć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ļ¼ę³¢é·åć®å č·Æå·®ćäøćć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ę³¢é·åć®å č·Æå·®ćäøćć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ę³¢é·åć®å č·Æå·®ćäøćććććŖę®µå·®éć§ććäŗć儽ć¾ććć When the objective lens is a plastic lens, the third basic structure as the temperature characteristic correcting structure may be further overlapped with the first basic structure and the second basic structure as the first optical path difference providing structure. However, when the first optical disc is an HD, the influence of temperature change is not so great, so that the objective lens does not have to be provided with a basic structure as a temperature characteristic correcting structure. Specifically, the step difference in the optical axis direction of the third basic structure gives an optical path difference of about 10 wavelengths of the first wavelength to the first light flux, and about 6 of the second wavelength to the second light flux. It is preferable that the difference in level be such that an optical path difference corresponding to the wavelength is given and an optical path difference equivalent to about 5 wavelengths of the third wavelength is given to the third light flux.
ćć¾ćć対ē©ć¬ć³ćŗććć©ć¹ćććÆć¬ć³ćŗć§ććå “åćęø©åŗ¦ē¹ę§č£ę£ēØę§é ćØćć¦åŗē¤ę§é ććéćććć®ć第ļ¼å č·Æå·®ä»äøę§é ćØćć¦ććććä½ćć第ļ¼å ćć£ć¹ćÆćHDć§ććå “åćÆćęø©åŗ¦å¤åć®å½±éæćććēØå¤§ćććŖćććć対ē©ć¬ć³ćŗć«ęø©åŗ¦ē¹ę§č£ę£ēØę§é ćØćć¦ć®åŗē¤ę§é ćÆčØććŖćć¦ććććå ·ä½ēć«ćÆć第ļ¼ć®åŗē¤ę§é ć®å 軸ę¹åć®ę®µå·®éćÆć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ę³¢é·åć®å č·Æå·®ćäøćć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ę³¢é·åć®å č·Æå·®ćäøćć第ļ¼å ęć«åƾćć¦ē¬¬ļ¼ę³¢é·ć®ē„ļ¼ę³¢é·åć®å č·Æå·®ćäøćććććŖę®µå·®éć§ććäŗć儽ć¾ććć Further, when the objective lens is a plastic lens, the basic structure may be used as the temperature characteristic correcting structure, and the stacked structure may be used as the second optical path difference providing structure. However, when the first optical disc is an HD, the influence of temperature change is not so great, so that the objective lens does not have to be provided with a basic structure as a temperature characteristic correcting structure. Specifically, the step difference in the optical axis direction of the third basic structure gives an optical path difference corresponding to approximately five wavelengths of the first wavelength to the first light flux, and approximately the second wavelength relative to the second light flux. It is preferable that the step amount is such that an optical path difference for three wavelengths is given and an optical path difference for about two wavelengths of the third wavelength is given to the third light flux.
ćć¾ććęåØč¾ŗé åćčØćć対ē©ć¬ć³ćŗććć©ć¹ćććÆć§ććå “åćÆćććć«ęåØč¾ŗé åć«ē¬¬ļ¼å č·Æå·®ä»äøę§é ćčØććććØć儽ć¾ćććććć®å “åćÆć第ļ¼å č·Æå·®ä»äøę§é ćÆćå°ćŖććØć第ļ¼åŗē¤ę§é ćęććę§é ćØćć¦ćććć In the case where the outermost peripheral region is provided and the objective lens is made of plastic, it is preferable to further provide the third optical path difference providing structure in the outermost peripheral region. It is good also as a structure which has a basic structure.
ćåčæ°ććććć«ć段差éćÆå¤§ććććŖćę¹ć儽ć¾ćććåŗē¤ę§é ćč¤ę°éćåććć¦å¾ćåŗē¤ćØćŖćå č·Æå·®ä»äøę§é ć®ććč¼ŖåøÆć®ę®µå·®éćåŗęŗć®å¤ććé«ćå “åćč¼ŖåøÆć®ę®µå·®éćļ¼ļ¼ć»Ī»ļ¼¢ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ć ćä½ćććććØć«ćććå å¦ę§č½ć«å½±éæćåć¼ćććØćŖćć大ćććć段差éćęøććććØćåÆč½ćØćŖćććŖććåŗęŗć®å¤ćØćć¦ćÆćä»»ęć®å¤ćčØå®ććäŗćć§ććććļ¼ļ¼ć»Ī»ļ¼¢ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼Ī¼ļ½ļ¼ćåŗęŗå¤ćØććäŗć儽ć¾ććć As described above, it is preferable that the level difference is not too large. If the level difference of the annular zone with the optical path difference providing structure that is the basis obtained by superimposing multiple foundation structures is higher than the reference value, the level difference of the annular zone is only 10 Ā· Ī»B / (n-1) (μm) By making it low, it becomes possible to reduce an excessively large step amount without affecting the optical performance. An arbitrary value can be set as the reference value, but it is preferable to set 10 Ā· Ī»B / (nā1) (μm) as the reference value.
ćć¾ććē“°é·ćč¼ŖåøÆćå°ćŖćę¹ć製é äøå„½ć¾ćććØćć観ē¹ććć第ļ¼å č·Æå·®ä»äøę§é ć®å Øć¦ć®č¼ŖåøÆć«ććć¦ćļ¼ę®µå·®éļ¼ćććå¹ ļ¼ć®å¤ććļ¼ä»„äøć§ććäŗć儽ć¾ćććę“ć«å„½ć¾ćććÆļ¼ļ¼ļ¼ä»„äøć§ććäŗć§ćććę“ć«å„½ć¾ćććÆćå Øć¦ć®å č·Æå·®ä»äøę§é ć®å Øć¦ć®č¼ŖåøÆć«ććć¦ćļ¼ę®µå·®éļ¼ćććå¹ ļ¼ć®å¤ććļ¼ä»„äøć§ććäŗć儽ć¾ćććę“ć«å„½ć¾ćććÆļ¼ļ¼ļ¼ä»„äøć§ććäŗć§ććć Further, from the viewpoint that it is preferable from the viewpoint of production that the number of elongated ring zones is small, it is preferable that the value of (step amount / pitch width) is 1 or less in all the ring zones of the first optical path difference providing structure, and more preferable. Is 0.8 or less. More preferably, the value of (step difference / pitch width) is preferably 1 or less, and more preferably 0.8 or less, in all annular zones of all optical path difference providing structures.
ć第ļ¼å ćć£ć¹ćÆć«åƾćć¦ę å ±ćåēåć³ļ¼åćÆčØé²ććććć«åæ č¦ćŖåƾē©ć¬ć³ćŗć®åå“éå£ę°ćN4ļ¼ćØćć第ļ¼å ćć£ć¹ćÆć«åƾćć¦ę å ±ćåēåć³ļ¼åćÆčØé²ććććć«åæ č¦ćŖåƾē©ć¬ć³ćŗć®åå“éå£ę°ćN4ļ¼ļ¼ļ¼®ļ¼”ļ¼ā§ļ¼®ļ¼”ļ¼ļ¼ćØćć第ļ¼å ćć£ć¹ćÆć«åƾćć¦ę å ±ćåēåć³ļ¼åćÆčØé²ććććć«åæ č¦ćŖåƾē©ć¬ć³ćŗć®åå“éå£ę°ćN4ļ¼ļ¼ļ¼®ļ¼”ļ¼ļ¼ļ¼®ļ¼”ļ¼ļ¼ćØćććN4ļ¼ćÆćļ¼ļ¼ļ¼ä»„äøćļ¼ļ¼ļ¼ä»„äøć§ććććØć儽ć¾ćććē¹ć«ļ¼®ļ¼”ļ¼ćÆļ¼ļ¼ļ¼ļ¼ć§ććććØć儽ć¾ćććN4ļ¼ćÆćļ¼ļ¼ļ¼ļ¼ä»„äøćļ¼ļ¼ļ¼ä»„äøć§ććććØć儽ć¾ćććē¹ć«ļ¼®ļ¼”ļ¼ćÆļ¼ļ¼ļ¼ļ¼åćÆļ¼ļ¼ļ¼ļ¼ć§ććććØć儽ć¾ćććć¾ććN4ļ¼ćÆćļ¼ļ¼ļ¼ä»„äøćļ¼ļ¼ļ¼ļ¼ä»„äøć§ććććØć儽ć¾ćććē¹ć«ļ¼®ļ¼”ļ¼ćÆļ¼ļ¼ļ¼ļ¼åćÆļ¼ļ¼ļ¼ļ¼ć§ććććØć儽ć¾ććć The objective-side numerical aperture of the objective lens necessary for reproducing and / or recording information on the first optical disk is NA1, and the objective lens necessary for reproducing and / or recording information on the second optical disk The image-side numerical aperture is NA2 (NA1 ā§ NA2), and the image-side numerical aperture of the objective lens necessary for reproducing and / or recording information on the third optical disk is NA3 (NA2> NA3). NA1 is preferably 0.6 or more and 0.9 or less. In particular, NA1 is preferably 0.85. NA2 is preferably 0.55 or more and 0.7 or less. In particular, NA2 is preferably 0.60 or 0.65. NA3 is preferably 0.4 or more and 0.55 or less. In particular, NA3 is preferably 0.45 or 0.53.
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ęć®ä½æēØęć«ććć¦ćļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøćļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøļ¼ćć儽ć¾ćććÆćļ¼ļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøćļ¼ļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøļ¼ć®ēÆå²ć«ēøå½ććéØåć«å½¢ęććć¦ććććØć儽ć¾ććććć儽ć¾ćććÆć対ē©ć¬ć³ćŗć®åØč¾ŗé åćØęåØč¾ŗé åć®å¢ēććN4ļ¼ć«ēøå½ććéØåć«å½¢ęććć¦ććććØć§ććć
The boundary between the central region and the peripheral region of the objective lens is 0.9 Ā· NA3 or more and 1.2 Ā· NA3 or less (more preferably 0.95 Ā· NA3 or more, 1.15 Ā· NA3) when the third light flux is used. It is preferably formed in a portion corresponding to the following range. More preferably, the boundary between the central region and the peripheral region of the objective lens is formed in a portion corresponding to NA3. The boundary between the peripheral area and the most peripheral area of the objective lens is 0.9 Ā·
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ęć®ä½æēØęć«ććć¦ćļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøćļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøļ¼ćć儽ć¾ćććÆćļ¼ļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøćļ¼ļ¼ļ¼ļ¼ć»ļ¼®ļ¼”ļ¼ä»„äøļ¼ć®ēÆå²ć«ååØććććØć儽ć¾ććć
When the third light flux that has passed through the objective lens is condensed on the information recording surface of the third optical disc, it is preferable that the spherical aberration has at least one discontinuous portion. In that case, the discontinuous portion has a range of 0.9 Ā·
ćć¾ććēé¢åå·®ćé£ē¶ćć¦ćć¦ćäøé£ē¶éØćęććŖćå “åć§ćć£ć¦ć対ē©ć¬ć³ćŗćééćć第ļ¼å ęć第ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«éå ććå “åć«ćN4ļ¼ć§ćÆćēø¦ēé¢åå·®ć®ēµ¶åƾå¤ćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ćć£ć¦ćN4ļ¼ć§ćÆēø¦ēé¢åå·®ć®ēµ¶åƾå¤ćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ććććØć儽ć¾ććććć儽ć¾ćććÆćN4ļ¼ć§ćÆćēø¦ēé¢åå·®ć®ēµ¶åƾå¤ćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ćć£ć¦ćN4ļ¼ć§ćÆēø¦ēé¢åå·®ć®ēµ¶åƾå¤ćļ¼ļ¼ļ¼ļ¼Ī¼ļ½ä»„äøć§ććć In addition, when spherical aberration is continuous and does not have a discontinuous portion and the third light flux that has passed through the objective lens is condensed on the information recording surface of the third optical disc, NA2 It is preferable that the absolute value of the spherical aberration is 0.03 μm or more, and in NA3, the absolute value of the longitudinal spherical aberration is 0.02 μm or less. More preferably, in NA2, the absolute value of longitudinal spherical aberration is 0.08 μm or more, and in NA3, the absolute value of longitudinal spherical aberration is 0.01 μm or less.
ćć¾ććå ćććÆć¢ććč£ ē½®ć®ēØéć«åæćć¦ćäøå¤®é åć®åę³¢é·ć«åƾććåęå¹ēćé©å®čØå®åÆč½ć§ćććä¾ćć°ć第ļ¼å ćć£ć¹ćÆć«åƾćć¦čØé²åć³åēćč”ćć第ļ¼ć第ļ¼å ćć£ć¹ćÆć«åƾćć¦åēć®ćæč”ćå ćććÆć¢ććč£ ē½®ć®å “åć«ćÆćäøå¤®é ååć³ļ¼åćÆåØč¾ŗé åć®åęå¹ēćć第ļ¼å ęćéč¦ćć¦čØå®ććć®ć儽ć¾ćććäøę¹ć第ļ¼å ćć£ć¹ćÆć«åƾćć¦åēć®ćæćč”ćć第ļ¼ć第ļ¼å ćć£ć¹ćÆć«åƾćć¦čØé²åć³åēćč”ćå ćććÆć¢ććč£ ē½®ć®å “åć«ćÆćäøå¤®é åć®åęå¹ēćć第ļ¼ć第ļ¼å ęćéč¦ćć¦čØå®ććåØč¾ŗé åć®åęå¹ēć第ļ¼å ęćéč¦ćć¦čØå®ććć®ć儽ć¾ććć Also, the diffraction efficiency for each wavelength in the central region can be set as appropriate according to the use of the optical pickup device. For example, in the case of an optical pickup device that performs recording and reproduction on the first optical disc and only reproduction on the second and third optical discs, the diffraction efficiency of the central region and / or the peripheral region is expressed as It is preferable to set with emphasis. On the other hand, in the case of an optical pickup device that performs only reproduction with respect to the first optical disc and performs recording and reproduction with respect to the second and third optical discs, the second and third light fluxes are emphasized with respect to the diffraction efficiency of the central region. It is preferable to set the diffraction efficiency of the peripheral region with the second light flux as important.
ćä½ćć®å “åć§ććäøčØę”ä»¶å¼ļ¼ļ¼ļ¼ćęŗććććć«ććććØć§ćåé åć®é¢ē©å éå¹³åć«ććčØē®ććć第ļ¼å
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In any case, by satisfying the following conditional expression (9), it is possible to ensure high diffraction efficiency of the first light flux calculated by the area weighted average of each region.
η11 ⦠η21 (9)
However, Ī·11 represents the diffraction efficiency of the first light flux in the central region, and Ī·21 represents the diffraction efficiency of the first light flux in the peripheral region. When the diffraction efficiency of the central region is focused on the light fluxes of the second and third wavelengths, the diffraction efficiency of the first light flux of the central region is low, but the numerical aperture of the first optical disc is the numerical aperture of the third optical disc. If it is larger than, the lowering of the diffraction efficiency in the central region does not have a significant effect when considering the entire effective diameter of the first light flux.
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č·Æå·®ä»äøę§é ćå½¢ęćććŖć対ē©ć¬ć³ćŗć®ééēććäøå¤®é åćåØč¾ŗé åć«åćć¦ęø¬å®ććććć®éćäøå¤®é åć®ééēćÆćåØč¾ŗé åć«å
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In addition, the diffraction efficiency in this specification can be defined as follows.
[1] The transmittance of an objective lens that has the same focal length, lens thickness, and numerical aperture, is formed of the same material, and does not have the first and second optical path difference providing structures is formed in the central region and the peripheral region. Separately measure. At this time, the transmittance of the central region is measured by blocking the light beam incident on the peripheral region, and the transmittance of the peripheral region is measured by blocking the light beam incident on the central region.
[2] The transmittance of the objective lens having the first and second optical path difference providing structures is measured separately for the central region and the peripheral region.
[3] The value obtained by dividing the result of [2] by the result of [1] is the diffraction efficiency of each region.
ćć¾ćć第ļ¼å ęä¹č³ē¬¬ļ¼å ęć®ä½ććäŗć¤ć®å ęć®å å©ēØå¹ēćļ¼ļ¼ļ¼ 仄äøć§ćć£ć¦ćę®ćć®äøć¤ć®å ęć®å å©ēØå¹ēćļ¼ļ¼ļ¼ 仄äøćļ¼ļ¼ļ¼ 仄äøć«ććććć«ćć¦ććććę®ćć®äøć¤ć®å ęć®å å©ēØå¹ēćļ¼ļ¼ļ¼ 仄äøćļ¼ļ¼ļ¼ 仄äøć«ććććć«ćć¦ćććććć®å “åćå å©ēØå¹ēćļ¼ļ¼ļ¼ 仄äøćļ¼ļ¼ļ¼ 仄äøļ¼ć¾ććÆļ¼ļ¼ļ¼ 仄äøćļ¼ļ¼ļ¼ 仄äøļ¼ćØććå ęćÆć第ļ¼å ęć§ććććØć儽ć¾ććć The light utilization efficiency of any two of the first to third light fluxes is 70% or more, and the light utilization efficiency of the remaining one light flux is 30% or more and 70% or less. Good. The light utilization efficiency of the remaining one light beam may be 40% or more and 60% or less. In this case, it is preferable that the light beam having the light use efficiency of 30% or more and 70% or less (or 40% or more and 60% or less) is the third light beam.
ććŖććććć§ććå å©ēØå¹ēćØćÆć第ļ¼å č·Æå·®ä»äøę§é ćå½¢ęććć対ē©ć¬ć³ćŗļ¼ē¬¬ļ¼å č·Æå·®ä»äøę§é åć³ē¬¬ļ¼å č·Æå·®ä»äøę§é ćå½¢ęććć¦ćć¦ćććļ¼ć«ććå ćć£ć¹ćÆć®ę å ±čØé²é¢äøć«å½¢ęćććéå ć¹ćććć®ćØć¢ćŖć¼ćć£ć¹ćÆå ć®å éćļ¼”ćØććåäøć®ęęććå½¢ęćććäøć¤ćåäøć®ē¦ē¹č·é¢ć軸äøåććéå£ę°ćę³¢é¢åå·®ćęćć第ļ¼å č·Æå·®ä»äøę§é ć第ļ¼å č·Æå·®ä»äøę§é åć³ē¬¬ļ¼å č·Æå·®ä»äøę§é ćå½¢ęćććŖć対ē©ć¬ć³ćŗć«ćććå ę å ±čØé²åŖä½ć®ę å ±čØé²é¢äøć«å½¢ęćććéå ć¹ćććć®ćØć¢ćŖć¼ćć£ć¹ćÆå ć®å éćļ¼¢ćØćććØććļ¼”ļ¼ļ¼¢ć«ććē®åŗćććć®ćØććććŖććććć§ćććØć¢ćŖć¼ćć£ć¹ćÆćØćÆćéå ć¹ćććć®å 軸ćäøåæćØććåå¾ļ½āć®åććććļ½āļ¼ļ¼ļ¼ļ¼ļ¼ć»Ī»ļ¼ļ¼®ļ¼”ć§č”Øćććć Here, the light utilization efficiency is the information recording on the optical disk by the objective lens in which the first optical path difference providing structure is formed (the second optical path difference providing structure and the third optical path difference providing structure may be formed). The amount of light in the Airy disk of the focused spot formed on the surface is A, and the first optical path is formed from the same material and has the same focal length, axial thickness, numerical aperture, and wavefront aberration. The amount of light in the Airy disk of the focused spot formed on the information recording surface of the optical information recording medium by the objective lens in which the difference providing structure, the second optical path difference providing structure, and the third optical path difference providing structure are not formed is defined as B. When calculating by A / B. Here, the Airy disk refers to a circle having a radius r ā² centered on the optical axis of the focused spot. r ā² = 0.61 Ā· Ī» / NA.
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The first light beam, the second light beam, and the third light beam may be incident on the objective lens as parallel light, or may be incident on the objective lens as divergent light or convergent light. Preferably, the imaging magnification m1 of the objective lens when the first light beam enters the objective lens is expressed by the following formula (1),
-0.02 <m1 <0.02 (1)
Is to satisfy.
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On the other hand, when the first light flux is incident on the objective lens as diverging light, the imaging magnification m1 of the objective lens when the first light flux is incident on the objective lens is expressed by the following equation (1 ā²),
-0.10 <m1 <0 (1 ')
It is preferable to satisfy.
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Further, when the second light flux is incident on the objective lens as parallel light or substantially parallel light, the imaging magnification m2 of the objective lens when the second light flux is incident on the objective lens is expressed by the following equation (2):
-0.02 <m2 <0.02 (2)
It is preferable to satisfy.
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On the other hand, when the second light flux is incident on the objective lens as diverging light, the imaging magnification m2 of the objective lens when the second light flux is incident on the objective lens is expressed by the following equation (2 ā²):
-0.10 <m2 <0 (2 ')
It is preferable to satisfy.
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In addition, when the third light beam is incident on the objective lens as parallel light or substantially parallel light, the imaging magnification m3 of the objective lens when the third light beam enters the objective lens satisfies the following expression (3). Is preferred. When the third light flux is parallel light, a problem easily occurs in tracking. However, even if the third light flux is parallel light, the present invention can obtain good tracking characteristics, and can be used for three different optical disks. On the other hand, recording and / or reproduction can be appropriately performed.
-0.02 <m3 <0.02 (3)
On the other hand, when the third light beam is incident on the objective lens as diverging light, the imaging magnification m3 of the objective lens when the third light beam enters the objective lens is expressed by the following equation (3 ā²):
-0.10 <m3 <0 (3 ')
It is preferable to satisfy.
ćć¾ćć第ļ¼å ćć£ć¹ćÆćēØććéć®åƾē©ć¬ć³ćŗć®ćÆć¼ćć³ć°ćć£ć¹ćæć³ć¹ļ¼ļ¼·ļ¼¤ļ¼ćÆćļ¼ļ¼ļ¼ļ¼ļ½ļ½ä»„äøćļ¼ļ¼ļ¼ļ½ļ½ä»„äøć§ććććØć儽ć¾ććć儽ć¾ćććÆćļ¼ļ¼ļ¼ļ½ļ½ä»„äøćļ¼ļ¼ļ¼ļ¼ļ½ļ½ä»„äøć§ćććꬔć«ć第ļ¼å ćć£ć¹ćÆćēØććéć®åƾē©ć¬ć³ćŗć®ļ¼·ļ¼¤ćÆćļ¼ļ¼ļ¼ļ½ļ½ä»„äøćļ¼ļ¼ļ¼ļ½ļ½ä»„äøć§ććććØć儽ć¾ćććććć«ć第ļ¼å ćć£ć¹ćÆćēØććéć®åƾē©ć¬ć³ćŗć®ļ¼·ļ¼¤ćÆćļ¼ļ¼ļ¼ļ½ļ½ä»„äøćļ¼ļ¼ļ¼ļ½ļ½ä»„äøć§ććććØć儽ć¾ććć The working distance (WD) of the objective lens when using the third optical disk is preferably 0.20 mm or more and 1.5 mm or less. Preferably, it is 0.3 mm or more and 1.20 mm or less. Next, the WD of the objective lens when using the second optical disk is preferably 0.4 mm or more and 1.3 mm or less. Further, the WD of the objective lens when using the first optical disk is preferably 0.4 mm or more and 1.2 mm or less.
ćę¬ēŗęć«äæćå ę å ±čØé²åēč£ ē½®ćÆćäøčæ°ć®å ćććÆć¢ććč£ ē½®ćęććå ćć£ć¹ćÆćć©ć¤ćč£ ē½®ćęććć An optical information recording / reproducing apparatus according to the present invention includes an optical disc drive apparatus having the above-described optical pickup apparatus.
ćććć§ćå ę å ±čØé²åēč£ ē½®ć«č£ åćććå ćć£ć¹ćÆćć©ć¤ćč£ ē½®ć«é¢ćć¦čŖ¬ęćććØćå ćć£ć¹ćÆćć©ć¤ćč£ ē½®ć«ćÆćå ćććÆć¢ććč£ ē½®ēćåē“ćć¦ććå ę å ±čØé²åēč£ ē½®ę¬ä½ććå ćć£ć¹ćÆćęč¼ććē¶ę ć§äæęåÆč½ćŖćć¬ć¤ć®ćæćå¤éØć«åćåŗćććę¹å¼ćØćå ćććÆć¢ććč£ ē½®ēćåē“ććć¦ććå ćć£ć¹ćÆćć©ć¤ćč£ ē½®ę¬ä½ććØćå¤éØć«åćåŗćććę¹å¼ćØćććć Here, the optical disk drive apparatus provided in the optical information recording / reproducing apparatus will be described. The optical disk drive apparatus can hold an optical disk mounted from the optical information recording / reproducing apparatus main body containing the optical pickup apparatus or the like. There are a system in which only the tray is taken out, and a system in which the optical disc drive apparatus main body in which the optical pickup device is stored is taken out to the outside.
ćäøčæ°ććåę¹å¼ćēØććå ę å ±čØé²åēč£ ē½®ć«ćÆćę¦ććꬔć®ę§ęéØęćč£ åććć¦ćććććć«éććććć®ć§ćÆćŖćć The optical information recording / reproducing apparatus using each method described above is generally equipped with the following components, but is not limited thereto.
ććć¦ćøć³ć°ēć«åē“ćććå ćććÆć¢ććč£ ē½®ćå ćććÆć¢ććč£ ē½®ććć¦ćøć³ć°ććØå ćć£ć¹ćÆć®å åØććććÆå¤åØć«åćć¦ē§»åćććć·ć¼ćÆć¢ć¼ćæēć®å ćććÆć¢ććč£ ē½®ć®é§åęŗćå ćććÆć¢ććč£ ē½®ć®ćć¦ćøć³ć°ćå ćć£ć¹ćÆć®å åØććććÆå¤åØć«åćć¦ć¬ć¤ćććć¬ć¤ćć¬ć¼ć«ćŖć©ćęććå ćććÆć¢ććč£ ē½®ć®ē§»éęꮵåć³ćå ćć£ć¹ćÆć®å転é§åćč”ćć¹ćć³ćć«ć¢ć¼ćæēć§ććć An optical pickup device housed in a housing or the like, a drive source of an optical pickup device such as a seek motor that moves the optical pickup device together with the housing toward the inner periphery or outer periphery of the optical disc, and the optical pickup device housing the inner periphery or outer periphery of the optical disc These include a transfer means of an optical pickup device having a guide rail or the like that guides toward the head, a spindle motor that rotates the optical disk, and the like.
ćåč ć®ę¹å¼ć«ćÆććććåę§ęéØęć®ä»ć«ćå ćć£ć¹ćÆćęč¼ććē¶ę ć§äæęåÆč½ćŖćć¬ć¤ććć³ćć¬ć¤ćęŗåćććććć®ćć¼ćć£ć³ć°ę©ę§ēćčØććććå¾č ć®ę¹å¼ć«ćÆćć¬ć¤ććć³ćć¼ćć£ć³ć°ę©ę§ććŖććåę§ęéØęćå¤éØć«å¼ćåŗćåÆč½ćŖć·ć£ć¼ć·ć«ēøå½ćććććÆć¼ć«čØćććć¦ććććØć儽ć¾ććć In addition to these components, the former method is provided with a tray that can be held in a state in which an optical disk is mounted and a loading mechanism for sliding the tray, and the latter method has no tray and loading mechanism. It is preferable that each component is provided in a drawer corresponding to a chassis that can be pulled out to the outside.
ćę¬ēŗęć«ććć°ćęęć®å å¦ē¹ę§ćēŗę®ć§ćććØå ±ć«ćęå½¢éåć®ę§ęćč¤éćŖćć®ć«ćŖććććäŗćé²ę¢ćć転åę§ćčÆå„½ć«ć§ćććć®ę§ęć®ē°”ē“ åćä½ć³ć¹ćåćå®ē¾åÆč½ćŖåƾē©ć¬ć³ćŗåć³ćććēØććå ćććÆć¢ććč£ ē½®ćęä¾ććććØćåÆč½ć«ćŖćć According to the present invention, the desired optical characteristics can be exhibited, the molding die configuration can be prevented from becoming too complicated, the transferability can be improved, and the configuration can be simplified and reduced in cost. It is possible to provide a possible objective lens and an optical pickup device using the same.
ć仄äøćę¬ēŗęć®å®ę½ć®å½¢ę ćå³é¢ćåē §ćć¦čŖ¬ęćććå³ļ¼ćÆćē°ćŖćå ćć£ć¹ćÆć§ććBDćØļ¼¤ļ¼¶ļ¼¤ćØļ¼£ļ¼¤ć«åƾćć¦é©åć«ę å ±ć®čØé²åć³ļ¼åćÆåēćč”ćććØćć§ććę¬å®ę½ć®å½¢ę ć®å ćććÆć¢ććč£ ē½®ļ¼°ļ¼µļ¼ć®ę§ęćę¦ē„ēć«ē¤ŗćå³ć§ććććććå ćććÆć¢ććč£ ē½®ļ¼°ļ¼µļ¼ćÆćå ę å ±čØé²åēč£ ē½®ć«ęč¼ć§ćććććć§ćÆć第ļ¼å ćć£ć¹ćÆćBDćØćć第ļ¼å ćć£ć¹ćÆćDVDćØćć第ļ¼å ćć£ć¹ćÆćCDćØććććŖććę¬ēŗęćÆćę¬å®ę½ć®å½¢ę ć«éććććć®ć§ćÆćŖćć Hereinafter, embodiments of the present invention will be described with reference to the drawings. FIG. 5 is a diagram schematically showing a configuration of the optical pickup device PU1 of the present embodiment that can appropriately record and / or reproduce information on BD, DVD, and CD, which are different optical disks. Such an optical pickup device PU1 can be mounted on an optical information recording / reproducing device. Here, the first optical disc is a BD, the second optical disc is a DVD, and the third optical disc is a CD. The present invention is not limited to the present embodiment.
ćå ćććÆć¢ććč£ ē½®ļ¼°ļ¼µļ¼ćÆć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼ŖćēµćS3ćć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ćBDć«åƾćć¦ę å ±ć®čØé²ļ¼åēćč”ćå “åć«ēŗå ććę³¢é·Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ć®ć¬ć¼ć¶å ęļ¼ē¬¬ļ¼å ęļ¼ćå°åŗćć第ļ¼åå°ä½ć¬ć¼ć¶ļ¼¬ļ¼¤ļ¼ļ¼ē¬¬ļ¼å ęŗļ¼ćØćBDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼ććć®åå°å ęćåå ćć第ļ¼ć®åå ē“ åPDļ¼ćØćäøä½åććć¦ćććļ¼ļ¼¤ļ¼ćć¬ć¼ć¶ć¢ćøć„ć¼ć«ļ¼¬ļ¼ēćęććć The optical pickup device PU1 emits a laser beam (first beam) having a wavelength Ī»1 = 405 nm that is emitted when information is recorded / reproduced with respect to the objective lens OBJ, aperture ST, collimator lens CL, dichroic prism PPS, and BD. A unit MD1, a laser module LM, and the like in which a first semiconductor laser LD1 (first light source) and a first light receiving element PD1 that receives a reflected light beam from the information recording surface RL1 of the BD are integrated.
ćć¾ććć¬ć¼ć¶ć¢ćøć„ć¼ć«ļ¼¬ļ¼ćÆćDVDć«åƾćć¦ę å ±ć®čØé²ļ¼åēćč”ćå “åć«ēŗå ććę³¢é·Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ć®ć¬ć¼ć¶å ęļ¼ē¬¬ļ¼å ęļ¼ćå°åŗćć第ļ¼åå°ä½ć¬ć¼ć¶ļ¼„ļ¼°ļ¼ļ¼ē¬¬ļ¼å ęŗļ¼ćØćCDć«åƾćć¦ę å ±ć®čØé²ļ¼åēćč”ćå “åć«ēŗå ććę³¢é·Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ć®ć¬ć¼ć¶å ęļ¼ē¬¬ļ¼å ęļ¼ćå°åŗćć第ļ¼åå°ä½ć¬ć¼ć¶ļ¼„ļ¼°ļ¼ļ¼ē¬¬ļ¼å ęŗļ¼ćØćDVDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼ććć®åå°å ęćåå ćć第ļ¼ć®åå ē“ åDSļ¼ćØćCDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼ććć®åå°å ęćåå ćć第ļ¼ć®åå ē“ åDSļ¼ćØćććŖćŗć ļ¼°ļ¼³ćØććęćć¦ććć The laser module LM includes a second semiconductor laser EP1 (second light source) that emits a laser beam (second beam) having a wavelength Ī»2 = 658 nm and is emitted when information is recorded / reproduced with respect to a DVD, and a CD. A third semiconductor laser EP2 (third light source) that emits a laser beam (third beam) having a wavelength Ī»3 = 785 nm and is reflected from the information recording surface RL2 of the DVD. It has a second light receiving element DS1 that receives the light beam, a third light receiving element DS2 that receives the reflected light beam from the information recording surface RL3 of the CD, and a prism PS.
ćå³ļ¼ļ¼ļ½ļ¼åć³ļ¼ļ½ļ¼ć«ē¤ŗćććććć«ćę¬å®ę½ć®å½¢ę ć®åƾē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć«ććć¦ćå ęŗå“ć®éēé¢å å¦é¢ć«å 軸ćå«ćäøå¤®é åCNćØććć®åØå²ć«é ē½®ćććåØč¾ŗé åļ¼ļ¼¤ćØćę“ć«ćć®åØå²ć«é ē½®ćććęåØč¾ŗé åO3ćØććå 軸ćäøåæćØććååæåē¶ć«å½¢ęććć¦ćććå³ē¤ŗćć¦ććŖćććäøå¤®é åCNć«ćÆć第ļ¼åŗē¤ę§é ćØē¬¬ļ¼åŗē¤ę§é ćØćéē³ćć第ļ¼å č·Æå·®ä»äøę§é ćå½¢ęćććåØč¾ŗé åļ¼ļ¼¤ć«ćÆē¬¬ļ¼å č·Æå·®ä»äøę§é ćå½¢ęććć¦ćććć¾ććęåØč¾ŗé åO3ć«ćÆć第ļ¼å č·Æå·®ä»äøę§é ćå½¢ęććć¦ćććć®ćØē¬¬ļ¼å č·Æå·®ä»äøę§é ćå½¢ęćććå±ęé¢ć®ćć®ćØćććć第ļ¼å č·Æå·®ä»äøę§é ćÆćä¾ćć°ćééćć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ćććć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ćććć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ććććę§é ćŖć©ćēØććäŗćć§ććććę¬ęē“°ęøć®ē¬¬äøå č·Æå·®ä»äøę§é ć®ä¾ļ¼ļ½ļ¼ļ¼ć«čØč¼ććććć®ć§ććć°ä½ććēØććććØćć§ćććę“ć«ć第ļ¼å č·Æå·®ä»äøę§é åć³ē¬¬ļ¼å č·Æå·®ä»äøę§é ćÆć第äøå č·Æå·®ä»äøę§é ć«åććć¦ćä»»ęć«éøęććććØćć§ćććä¾ćć°ć第äøå č·Æå·®ä»äøę§é ćäøčæ°ć®ä¾ļ¼ć®å “åćÆć第ļ¼å č·Æå·®ä»äøę§é ćÆć第ļ¼ć®åŗē¤ę§é ćØē¬¬ļ¼ć®åŗē¤ę§é ćéē³ććę§é ćØććććØć儽ć¾ććć第ļ¼ć®åŗē¤ę§é ćÆē¬¬1å ęåć³ē¬¬ļ¼å ęć«ććć¦1ꬔć®åęå éćę大ćØććę§é ćØćć第ļ¼ć®åŗē¤ę§é ćÆē¬¬ļ¼å ęćÆļ¼ę¬”ć®åęå éćę大ćØćŖćć第ļ¼å ęćÆļ¼1ꬔć®åęå éćę大ćØćŖćę§é ćØććććØć儽ć¾ćććć¾ćć第ļ¼å č·Æå·®ä»äøę§é ćęććå “åć第ļ¼å č·Æå·®ä»äøę§é ćÆć第ļ¼åŗē¤ę§é ć®ćæć«ććå½¢ęććć¦ććććØć儽ć¾ććć第ļ¼åŗē¤ę§é ćÆććć¬ć¼ćŗåę§é ć§ćć£ć¦ćééćć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ćććć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ćććć第ļ¼å ęć®ļ¼ę¬”ć®åęå éćä»ć®ćććŖćꬔę°ć®åęå éććć大ććććććŖććå³ļ¼ļ¼ļ½ļ¼åć³ļ¼ļ½ļ¼ć®äøå¤®é åćåØč¾ŗé åćęåØč¾ŗé åć®é¢ē©ćŖć©ć®ęÆēćÆę£ē¢ŗć«ćÆč”Øććć¦ććŖćć As shown in FIGS. 1A and 1B, in the objective lens OBJ of the present embodiment, a central region CN including the optical axis on the aspherical optical surface on the light source side, and a peripheral region disposed around the central region CN The MD and the outermost peripheral region OT disposed around the MD are formed concentrically around the optical axis. Although not shown, a first optical path difference providing structure in which the first basic structure and the second basic structure are superimposed is formed in the central area CN, and a second optical path difference providing structure is formed in the peripheral area MD. Yes. In the outermost peripheral region OT, there are a structure in which the third optical path difference providing structure is formed and a structure in which the third optical path difference providing structure is not formed and a refractive surface. In the first optical path difference providing structure, for example, the 0th-order diffracted light amount of the first light beam that has passed is made larger than any other order diffracted light amount, and the second-order diffracted light amount of the second light beam is made any other order of diffraction A structure in which the third-order diffracted light quantity of the third light beam is made larger than any other order diffracted light quantity can be used, but examples of the first optical path difference providing structure in this specification are 1 to Any of those described in 21 can be used. Furthermore, the second optical path difference providing structure and the third optical path difference providing structure can be arbitrarily selected according to the first optical path difference providing structure. For example, when the first optical path difference providing structure is Example 1 described above, the second optical path difference providing structure is preferably a structure in which the fourth basic structure and the fifth basic structure are superimposed. The fourth basic structure has a structure that maximizes the first-order diffracted light amount in the first light beam and the second light beam, the fifth basic structure has the maximum zero-order diffracted light amount in the first light beam, and the second light beam is ā A structure that maximizes the first-order diffracted light amount is preferable. Moreover, when it has a 3rd optical path difference providing structure, it is preferable that the 3rd optical path difference providing structure is formed only by the 7th foundation structure. The seventh basic structure is a blazed structure in which the second-order diffracted light amount of the first light beam that has passed is made larger than any other order of diffracted light amount, and the first-order diffracted light amount of the second light beam is made to be any other The first order diffracted light amount of the third light flux is made larger than any other order diffracted light amount. Note that the ratios of the areas of the central region, the peripheral region, and the outermost peripheral region in FIGS. 1A and 1B are not accurately represented.
ćéē“«č²åå°ä½ć¬ć¼ć¶ļ¼¬ļ¼¤ļ¼ććå°åŗććć第ļ¼å ęļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ļ¼ć®ēŗę£å ęćÆććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ćééććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććå¹³č”å ęćØćććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććē“ē·åå ććååå ć«å¤ęćććēµćS3ć«ćććć®å ęå¾ćč¦å¶ććć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć«å „å°ćććććć§ć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć®äøå¤®é åćØåØč¾ŗé åćØęåØč¾ŗé åć«ććéå ćććå ęćÆćåćļ¼ļ¼ļ¼ļ½ļ½ć®äæč·åŗęæļ¼°ļ¼¬ļ¼ćä»ćć¦ćBDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼äøć«å½¢ęćććć¹ććććØćŖćć The divergent light beam of the first light beam (Ī»1 = 405 nm) emitted from the blue-violet semiconductor laser LD1 is transmitted through the dichroic prism PPS, converted into a parallel light beam by the collimator lens CL, and then linearly polarized by a Ī»1 / 4 wavelength plate (not shown). To circularly polarized light, the diameter of the light beam is regulated by the stop ST, and enters the objective lens OBJ. Here, the light beam condensed by the central region, the peripheral region, and the outermost peripheral region of the objective lens OBJ is a spot formed on the information recording surface RL1 of the BD via the protective substrate PL1 having a thickness of 0.1 mm. Become.
ćę å ±čØé²é¢ļ¼²ļ¼¬ļ¼äøć§ę å ±ćććć«ććå¤čŖæćććåå°å ęćÆćåć³åƾē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼ŖćēµćS3ćééććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććååå ććē“ē·åå ć«å¤ęćććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććåęå ęćØććććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ćééććå¾ć第ļ¼ć®åå ē“ åPDļ¼ć®åå é¢äøć«åęćććććć¦ć第ļ¼ć®åå ē“ åPDļ¼ć®åŗåäæ”å·ćēØćć¦ćļ¼č»øć¢ćÆćć„ćØć¼ćæļ¼”ļ¼£ć«ćć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗććć©ć¼ć«ć·ć³ć°ććć©ććć³ć°ćććććØć§ćBDć«čØé²ćććę å ±ćčŖćæåćććØćć§ććć The reflected light beam modulated by the information pits on the information recording surface RL1 passes through the objective lens OBJ and the aperture stop ST again, is converted from circularly polarized light to linearly polarized light by a Ī»1 / 4 wavelength plate (not shown), and is converged by the collimating lens CL. After being transmitted through the dichroic prism PPS, it is converged on the light receiving surface of the first light receiving element PD1. Then, by using the output signal of the first light receiving element PD1 to focus or track the objective lens OBJ by the biaxial actuator AC, it is possible to read information recorded on the BD.
ć赤č²åå°ä½ć¬ć¼ć¶ļ¼„ļ¼°ļ¼ććå°åŗććć第ļ¼å ęļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ļ¼ć®ēŗę£å ęćÆćććŖćŗć ļ¼°ļ¼³ć§åå°ćććå¾ććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ć«ććåå°ćććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććå¹³č”å ęćØćććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććåå å¤ęććć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć«å „å°ćććććć§ć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć®äøå¤®é åćØåØč¾ŗé åć«ććéå ćććļ¼ęåØč¾ŗé åćééććå ęćÆćć¬ć¢åćććć¹ćććåØč¾ŗéØćå½¢ęććļ¼å ęćÆćåćļ¼ļ¼ļ¼ļ½ļ½ć®äæč·åŗęæļ¼°ļ¼¬ļ¼ćä»ćć¦ćDVDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼ć«å½¢ęćććć¹ććććØćŖććć¹ćććäøåæéØćå½¢ęććć The divergent light beam of the second light beam (Ī»2 = 658 nm) emitted from the red semiconductor laser EP1 is reflected by the prism PS, then reflected by the dichroic prism PPS, converted into a parallel light beam by the collimator lens CL, and then Ī»1 (not shown). Polarized light is converted by the / 4 wavelength plate and enters the objective lens OBJ. Here, the light beam condensed by the central region and the peripheral region of the objective lens OBJ (the light beam that has passed through the most peripheral region is flared and forms a spot peripheral part) is passed through the protective substrate PL2 having a thickness of 0.6 mm. Thus, the spot is formed on the information recording surface RL2 of the DVD, and the center of the spot is formed.
ćę å ±čØé²é¢ļ¼²ļ¼¬ļ¼äøć§ę å ±ćććć«ććå¤čŖæćććåå°å ęćÆćåć³åƾē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼ŖćēµćS3ćééććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććåå å¤ęćććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććåęå ęćØććććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ć«ććåå°ćććå¾ććć®å¾ćććŖćŗć å ć§ļ¼ååå°ćććå¾ć第ļ¼ć®åå ē“ åDSļ¼ć«åęćććććć¦ć第ļ¼ć®åå ē“ åDSļ¼ć®åŗåäæ”å·ćēØćć¦ļ¼¤ļ¼¶ļ¼¤ć«čØé²ćććę å ±ćčŖćæåćććØćć§ććććŖććå¾å¾©č·Æć§Ī»ļ¼ļ¼ļ¼ę³¢é·ęæć§åå å¤ęćććććØć§ćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæććŖćå “åć«ęÆč¼ćć¦å å©ēØå¹ēćé«ćććććØćć§ććć The reflected light beam modulated by the information pits on the information recording surface RL2 is again transmitted through the objective lens OBJ and the aperture stop ST, is then polarized by a Ī»1 / 4 wave plate (not shown), is converted into a convergent light beam by the collimator lens CL, and is dichroic. After being reflected by the prism PPS, then after being reflected twice in the prism, it converges on the second light receiving element DS1. The information recorded on the DVD can be read using the output signal of the second light receiving element DS1. It should be noted that the light utilization efficiency can be increased by performing polarization conversion with the Ī»1 / 4 wavelength plate in the round-trip path as compared with the case where there is no Ī»1 / 4 wavelength plate.
ć赤å¤åå°ä½ć¬ć¼ć¶ļ¼„ļ¼°ļ¼ććå°åŗććć第ļ¼å ęļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ½ļ¼ć®ēŗę£å ęćÆćććŖćŗć ļ¼°ļ¼³ć§åå°ćććå¾ććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ć«ććåå°ćććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććå¹³č”å ęćØćććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććåå å¤ęććć対ē©ć¬ć³ćŗļ¼Æļ¼Ŗļ¼“ć«å „å°ćććććć§ć対ē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼Ŗć®äøå¤®é åć«ććéå ćććļ¼åØč¾ŗé ååć³ęåØč¾ŗé åćééććå ęćÆćć¬ć¢åćććć¹ćććåØč¾ŗéØćå½¢ęććļ¼å ęćÆćåćļ¼ļ¼ļ¼ļ½ļ½ć®äæč·åŗęæļ¼°ļ¼¬ļ¼ćä»ćć¦ćCDć®ę å ±čØé²é¢ļ¼²ļ¼¬ļ¼äøć«å½¢ęćććć¹ććććØćŖćć The divergent light beam of the third light beam (Ī»3 = 785 nm) emitted from the infrared semiconductor laser EP2 is reflected by the prism PS, then reflected by the dichroic prism PPS, converted into a parallel light beam by the collimator lens CL, and is not shown in the figure. Polarized light is converted by the Ī»1 / 4 wave plate and enters the objective lens OJT. Here, the light beam condensed by the central region of the objective lens OBJ (the light beam that has passed through the peripheral region and the most peripheral region is flared and forms a spot peripheral part) is passed through the protective substrate PL3 having a thickness of 1.2 mm. Thus, the spot is formed on the information recording surface RL3 of the CD.
ćę å ±čØé²é¢ļ¼²ļ¼¬ļ¼äøć§ę å ±ćććć«ććå¤čŖæćććåå°å ęćÆćåć³åƾē©ć¬ć³ćŗļ¼Æļ¼¢ļ¼ŖćēµćS3ćééććå¾ćå³ē¤ŗććŖćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæć«ććåå å¤ęćććć³ćŖć”ć¼ćć¬ć³ćŗļ¼£ļ¼¬ć«ććåęå ęćØććććć¤ćÆćć¤ććÆććŖćŗć ļ¼°ļ¼°ļ¼³ć«ććåå°ćććå¾ććć®å¾ćććŖćŗć å ć§ļ¼ååå°ćććå¾ć第ļ¼ć®åå ē“ åDSļ¼ć«åęćććććć¦ć第ļ¼ć®åå ē“ åDSļ¼ć®åŗåäæ”å·ćēØćć¦ļ¼£ļ¼¤ć«čØé²ćććę å ±ćčŖćæåćććØćć§ććććŖććå¾å¾©č·Æć§Ī»ļ¼ļ¼ļ¼ę³¢é·ęæć§åå å¤ęćććććØć§ćĪ»ļ¼ļ¼ļ¼ę³¢é·ęæććŖćå “åć«ęÆč¼ćć¦å å©ēØå¹ēćé«ćććććØćć§ććć The reflected light beam modulated by the information pits on the information recording surface RL3 is again transmitted through the objective lens OBJ and the aperture stop ST, and then is converted by the Ī»1 / 4 wavelength plate (not shown), and is converted into a convergent light beam by the collimator lens CL. After being reflected by the prism PPS, then after being reflected twice in the prism, it converges on the third light receiving element DS2. The information recorded on the CD can be read using the output signal of the third light receiving element DS2. It should be noted that the light utilization efficiency can be increased by performing polarization conversion with the Ī»1 / 4 wavelength plate in the round-trip path as compared with the case where there is no Ī»1 / 4 wavelength plate.
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AC biaxial actuator PPS dichroic prism CL collimating lens LD1 blue-violet semiconductor laser LM laser module OBJ objective lens PL1 protective substrate PL2 protective substrate PL3 protective substrate PU1 optical pickup device RL1 information recording surface RL2 information recording surface RL3 information recording surface CN central region MD Peripheral area OT Most peripheral area
Claims (23)
ćåčØåƾē©ć¬ć³ćŗć®å å¦é¢ć«ćÆć第äøå č·Æå·®ä»äøę§é ćå½¢ęććć¦ććć
ćåčØē¬¬äøå č·Æå·®ä»äøę§é ćÆććć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ćØćéꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćØććåčØē¬¬ļ¼åŗē¤ę§é ć®å Øć¦ć®ę®µå·®éØć®ä½ē½®ćØåčØē¬¬ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćäøč“ććććć«éē³ććć¦ćŖćć
ćLćļ¼ćļ¼®ćä»»ęć®ę“ę°ćØćććØćć«ćåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćL欔åęå ćę大ć®åęå éćęććåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćļ¼ę¬”åęå ćę大ć®åęå éćęććåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćN欔åęå ćę大ć®åęå éćęććććØćē¹å¾“ćØćć対ē©ć¬ć³ćŗć Using a first light beam having a wavelength Ī»1 (μm) emitted from the first light source, a condensing spot is formed on the information recording surface of the first optical disc having a protective layer having a thickness t1, and emitted from the second light source. Using a second light beam having a wavelength Ī»2 (Ī»1 <Ī»2), a condensing spot is formed on the information recording surface of the second optical disc having a protective layer having a thickness t2 (t1 ⦠t2) and emitted from the third light source. For an optical pickup device that forms a condensing spot on the information recording surface of a third optical disc having a protective layer with a thickness t3 (t2 <t3) using a third light beam having a wavelength Ī»3 (Ī»2 <Ī»3). In the objective lens,
A first optical path difference providing structure is formed on the optical surface of the objective lens,
The first optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the second basic structure. Is superimposed so that the position of the step part of
L-th order diffracted light has the largest amount of diffracted light among the diffracted light generated when the first light flux is incident on the first optical path difference providing structure when L, M, and N are arbitrary integers, Of the diffracted light generated when the second light beam is incident on the first optical path difference providing structure, the Mth order diffracted light has the largest amount of diffracted light, and the third light beam is incident on the first optical path difference providing structure. An objective lens, wherein the Nth-order diffracted light among the diffracted light generated in this case has the maximum amount of diffracted light.
ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a four-step staircase structure, and the length d21 (μm) of a small step in the optical axis direction of the step structure of the second foundation structure is large and the step structure of the second foundation structure is large. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. Objective lens described in 1.
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(1.25Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.25Ī»1 + 0.2Ī»1) / (nā1)
(3.75Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(3.75Ī»1 + 0.2Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a four-divided blaze step structure, and the length d0 (μm) of the largest step of the first optical path difference providing structure in the optical axis direction satisfies the following conditional expression: The objective lens according to claim 1 or 2, characterized in that
(4.95Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.95Ī»1 + 0.2Ī»1) / (nā1)
ćLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖćććØćē¹å¾“ćØććč«ę±é ļ¼ććč«ę±é ļ¼ć¾ć§ć®ććććäøé ć«čØč¼ć®åƾē©ć¬ć³ćŗć | L | = 2, M = 0, | N | = 1
The objective lens according to any one of claims 1 to 3, wherein L and N have different signs.
ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a six-step staircase structure, and the length d21 (μm) in the optical axis direction of the small step of the step structure of the second foundation structure and the step structure of the second foundation structure are large. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. Objective lens described in 1.
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.2Ī»1) / (nā1)
(6Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.2Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a four-divided blaze step structure, and the length d0 (μm) of the largest step of the first optical path difference providing structure in the optical axis direction satisfies the following conditional expression: The objective lens according to claim 1 or 5, characterized in that
(5Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.2Ī»1) / (nā1)
ćļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććč«ę±é ļ¼ćļ¼åćÆļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗć Satisfy L = 0, | M | = 2, | N | = 3,
The objective lens according to claim 1, wherein M and N have the same sign.
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a seven-step staircase structure, and the length d21 (μm) in the optical axis direction of a small step of the step structure of the second foundation structure is larger than the step structure of the second foundation structure. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. Objective lens described in 1.
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.31Ī»1-0.2Ī»1) / (nā1) ⦠d21 ⦠(1.31Ī»1 + 0.2Ī»1) / (nā1)
(7.86Ī»1-0.2Ī»1) / (nā1) ⦠d22 ⦠(7.86Ī»1 + 0.2Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a seven-part blazed stepped structure, and the length d0 (μm) in the optical axis direction of the largest step of the first optical path difference providing structure satisfies the following conditional expression: The objective lens according to claim 1 or 5, characterized in that
(4.86Ī»1-0.2Ī»1) / (nā1) ⦠d0 ⦠(4.86Ī»1 + 0.2Ī»1) / (nā1)
ćLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććč«ę±é ļ¼ćļ¼åćÆļ¼ć«čØč¼ć®åƾē©ć¬ć³ćŗć | L | = 1, | M | = 3, | N | = 4,
The objective lens according to claim 1, wherein L, M, and N have the same sign.
ćåčØäøå¤®é åćåčØåØč¾ŗé ååć³åčØęåØč¾ŗé åćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØäøå¤®é åćØåčØåØč¾ŗé åćØćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØäøå¤®é åćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØē¬¬äøå č·Æå·®ä»äøę§é ćÆåčØäøå¤®é åć«čØćććć¦ććććØćē¹å¾“ćØććč«ę±é ļ¼ććč«ę±é ļ¼ļ¼ć¾ć§ć®ććććäøé ć«čØč¼ć®åƾē©ć¬ć³ćŗć The optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region. Has a surrounding area,
The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc,
The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc,
The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
The objective lens according to any one of claims 1 to 10, wherein the first optical path difference providing structure is provided in the central region.
ćåčØåƾē©ć¬ć³ćŗć®å å¦é¢ć«ćÆć第äøå č·Æå·®ä»äøę§é ćå½¢ęććć¦ććć
ćåčØē¬¬äøå č·Æå·®ä»äøę§é ćÆććć¬ć¼ćŗåę§é ć§ćć第ļ¼åŗē¤ę§é ćØćéꮵåę§é ć§ćć第ļ¼åŗē¤ę§é ćØććåčØē¬¬ļ¼åŗē¤ę§é ć®å Øć¦ć®ę®µå·®éØć®ä½ē½®ćØåčØē¬¬ļ¼åŗē¤ę§é ć®ę®µå·®éØć®ä½ē½®ćäøč“ććććć«éē³ććć¦ćŖćć
ćLćļ¼ćļ¼®ćä»»ęć®ę“ę°ćØćććØćć«ćåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćL欔åęå ćę大ć®åęå éćęććåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćļ¼ę¬”åęå ćę大ć®åęå éćęććåčØē¬¬äøå č·Æå·®ä»äøę§é ć«åčØē¬¬ļ¼å ęćå „å°ććå “åć«ēŗēććåęå ć®ćć”ćN欔åęå ćę大ć®åęå éćęććććØćē¹å¾“ćØććå ćććÆć¢ććč£ ē½®ć Using a first light beam having a wavelength Ī»1 (μm) emitted from the first light source, a condensing spot is formed on the information recording surface of the first optical disc having a protective layer having a thickness t1, and emitted from the second light source. Using a second light beam having a wavelength Ī»2 (Ī»1 <Ī»2), a condensing spot is formed on the information recording surface of the second optical disc having a protective layer having a thickness t2 (t1 ⦠t2) and emitted from the third light source. And an objective lens for forming a condensing spot on the information recording surface of the third optical disk having a protective layer having a thickness of t3 (t2 <t3) using a third light beam of wavelength Ī»3 (Ī»2 <Ī»3). In the optical pickup device,
A first optical path difference providing structure is formed on the optical surface of the objective lens,
The first optical path difference providing structure includes a first basic structure that is a blaze type structure and a second basic structure that is a staircase type structure, the positions of all the step portions of the first basic structure, and the second basic structure. Is superimposed so that the position of the step part of
L-th order diffracted light has the largest amount of diffracted light among the diffracted light generated when the first light flux is incident on the first optical path difference providing structure when L, M, and N are arbitrary integers, Of the diffracted light generated when the second light beam is incident on the first optical path difference providing structure, the Mth order diffracted light has the largest amount of diffracted light, and the third light beam is incident on the first optical path difference providing structure. An optical pickup device characterized in that the Nth order diffracted light has the maximum amount of diffracted light among the diffracted light generated.
ćļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a four-step staircase structure, and the length d21 (μm) of a small step in the optical axis direction of the step structure of the second foundation structure is large and the step structure of the second foundation structure is large. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. The optical pickup device described in 1.
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(1.25Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.25Ī»1 + 0.4Ī»1) / (nā1)
(3.75Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(3.75Ī»1 + 0.4Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a four-divided blaze step structure, and the length d0 (μm) of the largest step of the first optical path difference providing structure in the optical axis direction satisfies the following conditional expression: The optical pickup device according to claim 12 or 13, characterized in that:
(4.95Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(4.95Ī»1 + 0.4Ī»1) / (nā1)
ćLćØļ¼®ć®ę£č² ć®ē¬¦å·ćē°ćŖćććØćē¹å¾“ćØććč«ę±é ļ¼ļ¼ććč«ę±é ļ¼ļ¼ć¾ć§ć®ććććäøé ć«čØč¼ć®å ćććÆć¢ććč£ ē½®ć | L | = 2, M = 0, | N | = 1
The optical pickup device according to any one of claims 12 to 14, wherein L and N have different positive and negative signs.
ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a six-step staircase structure, and the length d21 (μm) in the optical axis direction of the small step of the step structure of the second foundation structure and the step structure of the second foundation structure are large. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. The optical pickup device described in 1.
(Ī1ā0.4Ī»1) / (nā1) ⦠d1 ⦠(Ī»1 + 0.4Ī»1) / (nā1)
(1.2Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.2Ī»1 + 0.4Ī»1) / (nā1)
(6Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(6Ī»1 + 0.4Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a four-divided blaze step structure, and the length d0 (μm) of the largest step of the first optical path difference providing structure in the optical axis direction satisfies the following conditional expression: The optical pickup device according to claim 12 or 16, characterized in that:
(5Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(5Ī»1 + 0.4Ī»1) / (nā1)
ćļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććč«ę±é ļ¼ļ¼ćļ¼ļ¼åćÆļ¼ļ¼ć«čØč¼ć®å ćććÆć¢ććč£ ē½®ć Satisfy L = 0, | M | = 2, | N | = 3,
18. The optical pickup device according to claim 12, 16 or 17, wherein the signs of M and N are equal.
ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼
ććć ććļ½ćÆćåčØē¬¬ļ¼å ęć«ćććåčØåƾē©ć¬ć³ćŗć®å±ęēć蔨ćć The second foundation structure is a seven-step staircase structure, and the length d21 (μm) in the optical axis direction of a small step of the step structure of the second foundation structure is larger than the step structure of the second foundation structure. The length d22 (μm) in the optical axis direction of the step and the length d1 (μm) in the optical axis direction of the step portion of the first basic structure satisfy the following conditional expression. The optical pickup device described in 1.
(3Ī»1-0.4Ī»1) / (nā1) ⦠d1 ⦠(3Ī»1 + 0.4Ī»1) / (nā1)
(1.31Ī»1-0.4Ī»1) / (nā1) ⦠d21 ⦠(1.31Ī»1 + 0.4Ī»1) / (nā1)
(7.86Ī»1-0.4Ī»1) / (nā1) ⦠d22 ⦠(7.86Ī»1 + 0.4Ī»1) / (nā1)
However, n represents the refractive index of the objective lens in the first light flux.
ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ā¦ļ½ļ¼ā¦ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ¼Ī»ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ The first optical path difference providing structure is a seven-part blazed stepped structure, and the length d0 (μm) in the optical axis direction of the largest step of the first optical path difference providing structure satisfies the following conditional expression: The optical pickup device according to claim 12 or 19, characterized in that:
(4.86Ī»1-0.4Ī»1) / (nā1) ⦠d0 ⦠(4.86Ī»1 + 0.4Ī»1) / (nā1)
ćLćØļ¼ćØļ¼®ć®ę£č² ć®ē¬¦å·ćēććććØćē¹å¾“ćØććč«ę±é ļ¼ļ¼ćļ¼ļ¼åćÆļ¼ļ¼ć«čØč¼ć®å ćććÆć¢ććč£ ē½®ć | L | = 1, | M | = 3, | N | = 4,
21. The optical pickup device according to claim 12, 19 or 20, wherein the signs of L, M, and N are equal.
ćåčØäøå¤®é åćåčØåØč¾ŗé ååć³åčØęåØč¾ŗé åćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØäøå¤®é åćØåčØåØč¾ŗé åćØćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØäøå¤®é åćééććåčØē¬¬ļ¼å ęććåčØē¬¬ļ¼å ćć£ć¹ćÆć®ę å ±čØé²é¢ć«éå ććć
ćåčØē¬¬äøå č·Æå·®ä»äøę§é ćÆåčØäøå¤®é åć«čØćććć¦ććććØćē¹å¾“ćØććč«ę±é ļ¼ļ¼ććč«ę±é ļ¼ļ¼ć¾ć§ć®ććććäøé ć«čØč¼ć®å ćććÆć¢ććč£ ē½®ć The optical surface of the objective lens includes at least a ring-shaped central region including an optical axis, a ring-shaped peripheral region formed around the central region, and a ring-shaped outermost region formed around the peripheral region. Has a surrounding area,
The first light flux that has passed through the central area, the peripheral area, and the most peripheral area is condensed on the information recording surface of the first optical disc,
The second light flux that has passed through the central area and the peripheral area is condensed on the information recording surface of the second optical disc,
The third light flux that has passed through the central region is condensed on the information recording surface of the third optical disc,
The optical pickup device according to any one of claims 12 to 21, wherein the first optical path difference providing structure is provided in the central region.
ćļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ćććććļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ćććććļ¼ļ¼ļ¼
ćļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ļ½ļ¼ļ¼ļ¼ļ¼ļ¼ļ¼ćććććļ¼ļ¼ļ¼ The imaging magnification m1 of the objective lens when the first light beam is incident on the objective lens satisfies the following formula (1), and the objective lens when the second light beam is incident on the objective lens. The imaging magnification m2 satisfies the following formula (2), and the imaging magnification m3 of the objective lens satisfies the following formula (3) when the third light beam enters the objective lens. The optical pickup device according to any one of claims 12 to 22.
-0.02 <m1 <0.02 (1)
-0.02 <m2 <0.02 (2)
-0.02 <m3 <0.02 (3)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010508215A JPWO2009128445A1 (en) | 2008-04-17 | 2009-04-14 | Objective lens and optical pickup device |
| CN200980113113XA CN102007538A (en) | 2008-04-17 | 2009-04-14 | Objective lens and optical pickup device |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008-107712 | 2008-04-17 | ||
| JP2008107712 | 2008-04-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2009128445A1 true WO2009128445A1 (en) | 2009-10-22 |
Family
ID=41199135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/JP2009/057502 Ceased WO2009128445A1 (en) | 2008-04-17 | 2009-04-14 | Objective lens and optical pickup device |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JPWO2009128445A1 (en) |
| CN (1) | CN102007538A (en) |
| WO (1) | WO2009128445A1 (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011118964A (en) * | 2009-12-01 | 2011-06-16 | Konica Minolta Opto Inc | Objective lens and molding die for optical pickup device |
| WO2011118161A1 (en) * | 2010-03-25 | 2011-09-29 | ććć½ćććÆę Ŗå¼ä¼ē¤¾ | Objective lens, optical head and optical disk device |
| CN103443857A (en) * | 2011-02-17 | 2013-12-11 | ęÆå°¼å”ē¾č½č¾¾ę Ŗå¼ä¼ē¤¾ | Object lens and optical pickup device |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004247025A (en) * | 2002-12-18 | 2004-09-02 | Konica Minolta Holdings Inc | Optical pickup apparatus and optical element |
| WO2007145202A1 (en) * | 2006-06-15 | 2007-12-21 | Konica Minolta Opto, Inc. | Optical element designing method, optical element and optical pickup device |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7577077B2 (en) * | 2002-09-05 | 2009-08-18 | Konica Corporation | Optical pickup apparatus and optical element |
| KR20070108226A (en) * | 2005-03-08 | 2007-11-08 | ģ½ė칓 미ėķ ģµķ ģøģ½ķ¬ė ģ“ķ°ė | Optical pickup device and design method of objective optical unit and objective optical system |
-
2009
- 2009-04-14 JP JP2010508215A patent/JPWO2009128445A1/en not_active Withdrawn
- 2009-04-14 WO PCT/JP2009/057502 patent/WO2009128445A1/en not_active Ceased
- 2009-04-14 CN CN200980113113XA patent/CN102007538A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004247025A (en) * | 2002-12-18 | 2004-09-02 | Konica Minolta Holdings Inc | Optical pickup apparatus and optical element |
| WO2007145202A1 (en) * | 2006-06-15 | 2007-12-21 | Konica Minolta Opto, Inc. | Optical element designing method, optical element and optical pickup device |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2011118964A (en) * | 2009-12-01 | 2011-06-16 | Konica Minolta Opto Inc | Objective lens and molding die for optical pickup device |
| WO2011118161A1 (en) * | 2010-03-25 | 2011-09-29 | ććć½ćććÆę Ŗå¼ä¼ē¤¾ | Objective lens, optical head and optical disk device |
| CN102754157A (en) * | 2010-03-25 | 2012-10-24 | ę¾äøēµåØäŗ§äøę Ŗå¼ä¼ē¤¾ | Objective lens, optical head and optical disk device |
| US8681593B2 (en) | 2010-03-25 | 2014-03-25 | Panasonic Corporation | Objective lens, optical head and optical disk device |
| JP5602833B2 (en) * | 2010-03-25 | 2014-10-08 | ććć½ćććÆę Ŗå¼ä¼ē¤¾ | Objective lens, optical head and optical disk apparatus |
| CN102754157B (en) * | 2010-03-25 | 2015-05-13 | ę¾äøēµåØäŗ§äøę Ŗå¼ä¼ē¤¾ | Objective lens, optical head and optical disk device |
| CN103443857A (en) * | 2011-02-17 | 2013-12-11 | ęÆå°¼å”ē¾č½č¾¾ę Ŗå¼ä¼ē¤¾ | Object lens and optical pickup device |
| CN103443857B (en) * | 2011-02-17 | 2016-07-06 | ęÆå°¼å”ē¾č½č¾¾ę Ŗå¼ä¼ē¤¾ | Object lens and optical take-up apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPWO2009128445A1 (en) | 2011-08-04 |
| CN102007538A (en) | 2011-04-06 |
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