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WO2009038244A3 - Magazine for depositing substrates - Google Patents

Magazine for depositing substrates Download PDF

Info

Publication number
WO2009038244A3
WO2009038244A3 PCT/KR2007/004654 KR2007004654W WO2009038244A3 WO 2009038244 A3 WO2009038244 A3 WO 2009038244A3 KR 2007004654 W KR2007004654 W KR 2007004654W WO 2009038244 A3 WO2009038244 A3 WO 2009038244A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrates
magazine
side plates
supporting
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/KR2007/004654
Other languages
French (fr)
Other versions
WO2009038244A4 (en
WO2009038244A2 (en
Inventor
Yeong Yeop Moon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Visionsemiconcoltd
VISIONSEMICON CO Ltd
Original Assignee
Visionsemiconcoltd
VISIONSEMICON CO Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Visionsemiconcoltd, VISIONSEMICON CO Ltd filed Critical Visionsemiconcoltd
Priority to PCT/KR2007/004654 priority Critical patent/WO2009038244A2/en
Publication of WO2009038244A2 publication Critical patent/WO2009038244A2/en
Publication of WO2009038244A3 publication Critical patent/WO2009038244A3/en
Publication of WO2009038244A4 publication Critical patent/WO2009038244A4/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/14—
    • H10P72/17—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

The present invention relates to a magazine (100a) for depositing substrates used for storage, carrying, or processing a plurality of substrates at the same time in a semiconductor fabrication process. The magazine for depositing substrates includes one pair of side plates (130) standing on opposite sides, a plurality of guide slots (140) on an inside surface of each of the side plates (130) for supporting substrates placed between the one pair of side plates (130) at side edges thereof respectively, and a plurality of supporting plates arranged between the side plates for supporting the substrates placed in the guide slots (140), respectively.
PCT/KR2007/004654 2007-09-21 2007-09-21 Magazine for depositing substrates Ceased WO2009038244A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
PCT/KR2007/004654 WO2009038244A2 (en) 2007-09-21 2007-09-21 Magazine for depositing substrates

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/KR2007/004654 WO2009038244A2 (en) 2007-09-21 2007-09-21 Magazine for depositing substrates

Publications (3)

Publication Number Publication Date
WO2009038244A2 WO2009038244A2 (en) 2009-03-26
WO2009038244A3 true WO2009038244A3 (en) 2009-06-11
WO2009038244A4 WO2009038244A4 (en) 2009-07-30

Family

ID=40468567

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/KR2007/004654 Ceased WO2009038244A2 (en) 2007-09-21 2007-09-21 Magazine for depositing substrates

Country Status (1)

Country Link
WO (1) WO2009038244A2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL2022185B1 (en) * 2018-12-12 2020-07-02 Suss Microtec Lithography Gmbh Substrate cassette
KR102786286B1 (en) * 2020-09-01 2025-03-26 삼성전자주식회사 Strip magazine used for manufacturing semiconductor packages
JP7637891B2 (en) * 2021-04-06 2025-03-03 パナソニックＩｐマネジメント株式会社 Substrate transport device and substrate transport method

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002079053A1 (en) * 2001-04-01 2002-10-10 Entegris, Inc. Thin wafer insert
US20030173316A1 (en) * 2002-03-15 2003-09-18 Lg.Philips Lcd Co., Ltd. Cassette for receiving substrates

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2002079053A1 (en) * 2001-04-01 2002-10-10 Entegris, Inc. Thin wafer insert
US20030173316A1 (en) * 2002-03-15 2003-09-18 Lg.Philips Lcd Co., Ltd. Cassette for receiving substrates

Also Published As

Publication number Publication date
WO2009038244A4 (en) 2009-07-30
WO2009038244A2 (en) 2009-03-26

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