[go: up one dir, main page]

WO2009037753A1 - Système de transfert de substrats - Google Patents

Système de transfert de substrats Download PDF

Info

Publication number
WO2009037753A1
WO2009037753A1 PCT/JP2007/068186 JP2007068186W WO2009037753A1 WO 2009037753 A1 WO2009037753 A1 WO 2009037753A1 JP 2007068186 W JP2007068186 W JP 2007068186W WO 2009037753 A1 WO2009037753 A1 WO 2009037753A1
Authority
WO
WIPO (PCT)
Prior art keywords
conveyer
substrate
transfer system
substrates
substrate transfer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/068186
Other languages
English (en)
Japanese (ja)
Inventor
Toru Gamo
Takehiko Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to CN2007801007133A priority Critical patent/CN101801815B/zh
Priority to KR1020107008262A priority patent/KR101132424B1/ko
Priority to JP2009532986A priority patent/JP4950297B2/ja
Priority to PCT/JP2007/068186 priority patent/WO2009037753A1/fr
Priority to TW097135654A priority patent/TWI403446B/zh
Publication of WO2009037753A1 publication Critical patent/WO2009037753A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67706—Mechanical details, e.g. roller, belt
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
    • B65G47/53—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another
    • B65G47/54—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices between conveyors which cross one another at least one of which is a roller-way
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/068—Stacking or destacking devices; Means for preventing damage to stacked sheets, e.g. spaces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H01L21/67736—Loading to or unloading from a conveyor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67745—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber characterized by movements or sequence of movements of transfer devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Stacking Of Articles And Auxiliary Devices (AREA)

Abstract

L'invention porte sur un système de transfert de substrats pour transférer des substrats entre une cassette de stockage de substrats, et un appareil de traitement. Le système de transfert de substrats comporte un premier convoyeur qui transfère une pluralité de substrats en même temps ; un deuxième convoyeur qui est disposé de façon continue à partir du premier convoyeur et qui transfère séparément les substrats dans la direction de transfert ; une unité de déplacement, qui comporte une section de disposition pour disposer le substrat qui se trouve sur le deuxième convoyeur, et qui déplace le substrat dans une direction coupant de façon orthogonale la direction de transfert sur le deuxième convoyeur ; et une unité de levage qui élève et abaisse de façon relative la section de disposition et le deuxième convoyeur.
PCT/JP2007/068186 2007-09-19 2007-09-19 Système de transfert de substrats Ceased WO2009037753A1 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2007801007133A CN101801815B (zh) 2007-09-19 2007-09-19 基板输送系统
KR1020107008262A KR101132424B1 (ko) 2007-09-19 2007-09-19 기판 반송 시스템
JP2009532986A JP4950297B2 (ja) 2007-09-19 2007-09-19 基板搬送システム
PCT/JP2007/068186 WO2009037753A1 (fr) 2007-09-19 2007-09-19 Système de transfert de substrats
TW097135654A TWI403446B (zh) 2007-09-19 2008-09-17 Substrate handling system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/068186 WO2009037753A1 (fr) 2007-09-19 2007-09-19 Système de transfert de substrats

Publications (1)

Publication Number Publication Date
WO2009037753A1 true WO2009037753A1 (fr) 2009-03-26

Family

ID=40467584

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/068186 Ceased WO2009037753A1 (fr) 2007-09-19 2007-09-19 Système de transfert de substrats

Country Status (5)

Country Link
JP (1) JP4950297B2 (fr)
KR (1) KR101132424B1 (fr)
CN (1) CN101801815B (fr)
TW (1) TWI403446B (fr)
WO (1) WO2009037753A1 (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
JP2014056944A (ja) * 2012-09-12 2014-03-27 Ulvac Japan Ltd 真空処理装置
WO2021234203A1 (fr) * 2020-05-20 2021-11-25 Tecglass Sl Machine d'impression de verre à transport continu du verre
EP4118018A1 (fr) * 2020-03-20 2023-01-18 Hubert Haselsteiner Système de chargement

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101545260B1 (ko) * 2012-06-12 2015-08-20 한화테크윈 주식회사 기판 이송 장치
JP6045376B2 (ja) * 2013-02-06 2016-12-14 Juki株式会社 基板搬送装置、基板の搬送方法
KR101797994B1 (ko) * 2013-07-01 2017-11-15 한화테크윈 주식회사 컨베이어
CN105692029B (zh) * 2016-03-21 2018-08-10 李毅 一种适用于瓦楞纸板生产的智能物流系统
CN106369955B (zh) * 2016-08-31 2019-08-16 武汉华星光电技术有限公司 薄膜烘干机支架及薄膜烘干机
CN113371469A (zh) * 2021-07-13 2021-09-10 上海金东唐科技有限公司 堆垛装置及自动化生产系统
KR20250009754A (ko) * 2023-07-11 2025-01-20 한화모멘텀 주식회사 이송 장치 및 이를 포함하는 전극재 열처리 장치

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290299A (ja) * 1988-05-18 1989-11-22 Sanyo Electric Co Ltd 基板供給収納装置
JP2004284722A (ja) * 2003-03-20 2004-10-14 Nec Mobiling Ltd 車輌積載管理システム及び方法
JP2005060110A (ja) * 2003-08-11 2005-03-10 Chi Mei Optoelectronics Corp 順次式基板カセット用基板搬送装置
JP2005170675A (ja) * 2003-11-21 2005-06-30 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置、基板保管搬送装置、基板搬入システム、基板搬出システム及び基板搬入／搬出システム
JP2007036227A (ja) * 2005-07-22 2007-02-08 Au Optronics Corp 基板の保存用カセット、搬送コンベア及びそれらを用いた搬送システム
WO2007029401A1 (fr) * 2005-09-02 2007-03-15 Hirata Corporation Systeme de chargement/dechargement de piece de fabrication et dispositif de transport

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004155569A (ja) 2002-11-08 2004-06-03 Daifuku Co Ltd 板状体の取り扱い設備
JP2004284772A (ja) * 2003-03-24 2004-10-14 Toshiba Mitsubishi-Electric Industrial System Corp 基板搬送システム
JP4436689B2 (ja) * 2004-01-28 2010-03-24 マルヤス機械株式会社 ガラス基板の搬送システム

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01290299A (ja) * 1988-05-18 1989-11-22 Sanyo Electric Co Ltd 基板供給収納装置
JP2004284722A (ja) * 2003-03-20 2004-10-14 Nec Mobiling Ltd 車輌積載管理システム及び方法
JP2005060110A (ja) * 2003-08-11 2005-03-10 Chi Mei Optoelectronics Corp 順次式基板カセット用基板搬送装置
JP2005170675A (ja) * 2003-11-21 2005-06-30 Ishikawajima Harima Heavy Ind Co Ltd 基板搬送装置、基板保管搬送装置、基板搬入システム、基板搬出システム及び基板搬入／搬出システム
JP2007036227A (ja) * 2005-07-22 2007-02-08 Au Optronics Corp 基板の保存用カセット、搬送コンベア及びそれらを用いた搬送システム
WO2007029401A1 (fr) * 2005-09-02 2007-03-15 Hirata Corporation Systeme de chargement/dechargement de piece de fabrication et dispositif de transport

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102280397A (zh) * 2010-06-10 2011-12-14 致茂电子(苏州)有限公司 一种晶圆输送分配装置及其方法
JP2014056944A (ja) * 2012-09-12 2014-03-27 Ulvac Japan Ltd 真空処理装置
EP4118018A1 (fr) * 2020-03-20 2023-01-18 Hubert Haselsteiner Système de chargement
EP4118018B1 (fr) * 2020-03-20 2025-06-25 Hubert Haselsteiner Système de chargement
WO2021234203A1 (fr) * 2020-05-20 2021-11-25 Tecglass Sl Machine d'impression de verre à transport continu du verre
US12214966B2 (en) 2020-05-20 2025-02-04 Tecglass Sl Glass printing machine with continuous transport system for the glass

Also Published As

Publication number Publication date
CN101801815B (zh) 2012-05-30
JPWO2009037753A1 (ja) 2011-01-06
TW200922851A (en) 2009-06-01
CN101801815A (zh) 2010-08-11
TWI403446B (zh) 2013-08-01
JP4950297B2 (ja) 2012-06-13
KR20100068442A (ko) 2010-06-23
KR101132424B1 (ko) 2012-04-03

Similar Documents

Publication Publication Date Title
WO2009037753A1 (fr) Système de transfert de substrats
WO2008120716A1 (fr) Appareil de traitement de substrat, procédé de traitement de substrat, et support de stockage lisible par ordinateur
WO2008039702A3 (fr) Système et procédé de traitement de substrats
AU2003282480A1 (en) Substrate handling system for aligning and orienting substrates during a transfer operation
WO2009076322A3 (fr) Procédés et dispositifs de traitement d'une couche de précurseur dans un environnement de groupe via
EP2405478A3 (fr) Appareil de revêtement et de développement
WO2008126454A1 (fr) Appareil de transport de substrat
WO2009037754A1 (fr) Système de transfert de substrats
TWI316279B (en) Systems and methods for transferring small lot size substrate carriers between processing tools
WO2009075261A1 (fr) Appareil de transfert de substrat, procédé de transfert de substrat et appareil de traitement sous vide
WO2009067140A3 (fr) Transistor à effet de champ à jonction à ailette
WO2011085010A3 (fr) Système destiné au traitement par lots de données multimédia magnétiques
PL2195267T4 (pl) Urządzenie i sposób desztaplowania elementów płytowych
WO2008063337A3 (fr) Dispositifs à semi-conducteur sur diamant et procédés associés
TW200733780A (en) Light-emitting device and electronic apparatus
MY161955A (en) Systems and methods for handling wafers
TW200734263A (en) Substrate exchange apparatus and substrate processing apparatus, and substrate inspection apparatus
WO2009050849A1 (fr) Appareil de traitement de substrat
KR101397124B9 (ko) 기판지지프레임 및 이를 포함하는 기판처리장치, 이를이용한 기판의 로딩 및 언로딩 방법
JP2009004661A5 (fr)
TW200519012A (en) Glass substrate transporting facility
IN2012DN00641A (fr)
DK1971541T3 (da) Fremgangsmåde og system til overførsel af emner
WO2011028957A3 (fr) Procédés et dispositifs pour le traitement d'une couche de précurseur dans un environnement de groupe via
WO2009005027A1 (fr) Robot de transfert de substrat et appareil de traitement sous vide doté de celui-ci

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 200780100713.3

Country of ref document: CN

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 07807558

Country of ref document: EP

Kind code of ref document: A1

WWE Wipo information: entry into national phase

Ref document number: 2009532986

Country of ref document: JP

NENP Non-entry into the national phase

Ref country code: DE

ENP Entry into the national phase

Ref document number: 20107008262

Country of ref document: KR

Kind code of ref document: A

122 Ep: pct application non-entry in european phase

Ref document number: 07807558

Country of ref document: EP

Kind code of ref document: A1