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WO2009028484A1 - 半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法 - Google Patents

半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法 Download PDF

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Publication number
WO2009028484A1
WO2009028484A1 PCT/JP2008/065164 JP2008065164W WO2009028484A1 WO 2009028484 A1 WO2009028484 A1 WO 2009028484A1 JP 2008065164 W JP2008065164 W JP 2008065164W WO 2009028484 A1 WO2009028484 A1 WO 2009028484A1
Authority
WO
WIPO (PCT)
Prior art keywords
semiconductor device
manufacturing
adhesive sheet
sheet
adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/065164
Other languages
English (en)
French (fr)
Inventor
Yasuhiro Amano
Sadahito Misumi
Takeshi Matsumura
Naohide Takamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nitto Denko Corp
Original Assignee
Nitto Denko Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nitto Denko Corp filed Critical Nitto Denko Corp
Priority to US12/675,433 priority Critical patent/US20100236689A1/en
Priority to CN200880101005A priority patent/CN101765909A/zh
Publication of WO2009028484A1 publication Critical patent/WO2009028484A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J133/00—Adhesives based on homopolymers or copolymers of compounds having one or more unsaturated aliphatic radicals, each having only one carbon-to-carbon double bond, and at least one being terminated by only one carboxyl radical, or of salts, anhydrides, esters, amides, imides, or nitriles thereof; Adhesives based on derivatives of such polymers
    • C09J133/04—Homopolymers or copolymers of esters
    • C09J133/06—Homopolymers or copolymers of esters of esters containing only carbon, hydrogen and oxygen, the oxygen atom being present only as part of the carboxyl radical
    • C09J133/08—Homopolymers or copolymers of acrylic acid esters
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J11/00—Features of adhesives not provided for in group C09J9/00, e.g. additives
    • C09J11/02—Non-macromolecular additives
    • C09J11/04—Non-macromolecular additives inorganic
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/35—Heat-activated
    • C—CHEMISTRY; METALLURGY
    • C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
    • C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
    • C09J7/00—Adhesives in the form of films or foils
    • C09J7/30—Adhesives in the form of films or foils characterised by the adhesive composition
    • C09J7/38—Pressure-sensitive adhesives [PSA]
    • C09J7/381—Pressure-sensitive adhesives [PSA] based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
    • C09J7/385—Acrylic polymers
    • H10W74/114—
    • H10W76/47—
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45147—Copper (Cu) as principal constituent
    • H10W72/073—
    • H10W72/075—
    • H10W72/354—
    • H10W72/5522—
    • H10W72/5524—
    • H10W72/5525—
    • H10W72/884—
    • H10W74/00—
    • H10W90/732—
    • H10W90/734—
    • H10W90/754—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T156/00—Adhesive bonding and miscellaneous chemical manufacture
    • Y10T156/10—Methods of surface bonding and/or assembly therefor
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Adhesives Or Adhesive Processes (AREA)
  • Adhesive Tapes (AREA)
  • Die Bonding (AREA)
  • Dicing (AREA)

Abstract

　接着シートが薄層化した場合にも、当該接着シートの有無を容易に識別することを可能にし、これにより製造装置のダウンタイムを短縮して、歩留まりの向上を可能にする半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法を提供する。本発明の半導体装置製造用の接着シートは、半導体素子を被着体に接着させる半導体装置製造用の接着シートであって、波長域が２９０～４５０ｎｍの範囲内にある光を吸収又は反射させる顔料を含有することを特徴とする。
PCT/JP2008/065164 2007-08-31 2008-08-26 半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法 Ceased WO2009028484A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
US12/675,433 US20100236689A1 (en) 2007-08-31 2008-08-26 Adhesive sheet for manufacturing semiconductor device, and semiconductor device manufacturing method using the sheet
CN200880101005A CN101765909A (zh) 2007-08-31 2008-08-26 半导体装置制造用的胶粘片及使用其的半导体装置的制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-226282 2007-08-31
JP2007226282A JP4975564B2 (ja) 2007-08-31 2007-08-31 半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法

Publications (1)

Publication Number Publication Date
WO2009028484A1 true WO2009028484A1 (ja) 2009-03-05

Family

ID=40387204

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/065164 Ceased WO2009028484A1 (ja) 2007-08-31 2008-08-26 半導体装置製造用の接着シート、及びそれを用いた半導体装置の製造方法

Country Status (5)

Country Link
US (1) US20100236689A1 (ja)
JP (1) JP4975564B2 (ja)
CN (1) CN101765909A (ja)
TW (1) TW200918632A (ja)
WO (1) WO2009028484A1 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015013946A (ja) * 2013-07-05 2015-01-22 日東電工株式会社 接着剤組成物及び接着シート
JP2018016705A (ja) * 2016-07-27 2018-02-01 古河電気工業株式会社 電子デバイス用テープ

Families Citing this family (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8004078B1 (en) * 2009-03-17 2011-08-23 Amkor Technology, Inc. Adhesive composition for semiconductor device
JP5632695B2 (ja) * 2009-11-26 2014-11-26 日東電工株式会社 ダイシングフィルム付き接着フィルム、及び、該ダイシングフィルム付き接着フィルムを用いた半導体装置の製造方法
JP6045773B2 (ja) * 2009-11-26 2016-12-14 日立化成株式会社 接着シート及びその製造方法、並びに、半導体装置の製造方法及び半導体装置
JP4845063B2 (ja) * 2009-12-18 2011-12-28 古河電気工業株式会社 ウエハ加工用テープ及びその製造方法
JP5996836B2 (ja) 2010-02-25 2016-09-21 タレックス光学工業株式会社 眼鏡用合わせガラスレンズ
JP2011253911A (ja) * 2010-06-01 2011-12-15 Shinko Electric Ind Co Ltd 配線基板
JP5408571B2 (ja) * 2010-10-06 2014-02-05 古河電気工業株式会社 ウエハ加工用テープ及びその製造方法
JP5023225B1 (ja) * 2011-03-10 2012-09-12 日東電工株式会社 半導体装置用フィルムの製造方法
JP5036887B1 (ja) 2011-03-11 2012-09-26 日東電工株式会社 保護フィルム付きダイシングフィルム
DE102011077684A1 (de) * 2011-06-17 2012-12-20 Robert Bosch Gmbh Abdeckmaterial für einen Mikrochip, Mikrochip mit Abdeckmaterial sowie Verfahren zur Bereitstellung eines solchen Mikrochips
CN102842512A (zh) * 2011-06-22 2012-12-26 日东电工株式会社 半导体装置的制造方法
RU2476471C1 (ru) * 2011-10-20 2013-02-27 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Волгоградский государственный технический университет" (ВолгГТУ) Способ крепления резин друг к другу
JP6379389B2 (ja) * 2014-12-15 2018-08-29 リンテック株式会社 ダイシングダイボンディングシート
JP6983200B2 (ja) * 2019-07-11 2021-12-17 日東電工株式会社 ダイボンドフィルム及びダイシングダイボンドフィルム
EP4019245B1 (en) * 2019-08-22 2024-04-10 Resonac Corporation Electronic component processing film and electronic component processing method
TW202141600A (zh) 2020-03-27 2021-11-01 日商琳得科股份有限公司 半導體裝置製造用片
CN111477621B (zh) * 2020-06-28 2020-09-15 甬矽电子(宁波)股份有限公司 芯片封装结构、其制作方法和电子设备

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000154250A (ja) * 1998-11-20 2000-06-06 Ube Ind Ltd アンダーフィル用ポリイミド樹脂
JP2001168113A (ja) * 1999-12-10 2001-06-22 Hitachi Chem Co Ltd 半導体素子用接着材組成物及びこれを用いた半導体装置
JP2005252114A (ja) * 2004-03-05 2005-09-15 Towa Corp ダイボンド用粘着テープの貼付方法
JP2007220913A (ja) * 2006-02-16 2007-08-30 Nitto Denko Corp 半導体装置の製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10228186A1 (de) * 2002-06-24 2004-01-22 Merck Patent Gmbh UV-stabilisierte Partikel

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000154250A (ja) * 1998-11-20 2000-06-06 Ube Ind Ltd アンダーフィル用ポリイミド樹脂
JP2001168113A (ja) * 1999-12-10 2001-06-22 Hitachi Chem Co Ltd 半導体素子用接着材組成物及びこれを用いた半導体装置
JP2005252114A (ja) * 2004-03-05 2005-09-15 Towa Corp ダイボンド用粘着テープの貼付方法
JP2007220913A (ja) * 2006-02-16 2007-08-30 Nitto Denko Corp 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015013946A (ja) * 2013-07-05 2015-01-22 日東電工株式会社 接着剤組成物及び接着シート
JP2018016705A (ja) * 2016-07-27 2018-02-01 古河電気工業株式会社 電子デバイス用テープ

Also Published As

Publication number Publication date
CN101765909A (zh) 2010-06-30
US20100236689A1 (en) 2010-09-23
TW200918632A (en) 2009-05-01
JP2009059917A (ja) 2009-03-19
JP4975564B2 (ja) 2012-07-11

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