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WO2009010983A3 - Method and system for measuring a height of a protuberance on a surface of an electric circuit - Google Patents

Method and system for measuring a height of a protuberance on a surface of an electric circuit Download PDF

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Publication number
WO2009010983A3
WO2009010983A3 PCT/IL2008/001003 IL2008001003W WO2009010983A3 WO 2009010983 A3 WO2009010983 A3 WO 2009010983A3 IL 2008001003 W IL2008001003 W IL 2008001003W WO 2009010983 A3 WO2009010983 A3 WO 2009010983A3
Authority
WO
WIPO (PCT)
Prior art keywords
protuberance
height
measuring
electric circuit
select
Prior art date
Application number
PCT/IL2008/001003
Other languages
French (fr)
Other versions
WO2009010983A2 (en
Inventor
Meir Ben Levy
Zehava Ben Ezer
Original Assignee
Camtek Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Camtek Ltd filed Critical Camtek Ltd
Publication of WO2009010983A2 publication Critical patent/WO2009010983A2/en
Publication of WO2009010983A3 publication Critical patent/WO2009010983A3/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

A system for measuring a height of a protuberance on a surface of an electric circuit, the system includes optics and a processor that are adapted to generate height estimations by applying a triangulation process and select a selected protuberance in response to a selection rule.
PCT/IL2008/001003 2007-07-19 2008-07-20 Method and system for measuring a height of a protuberance on a surface of an electric circuit WO2009010983A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US95063407P 2007-07-19 2007-07-19
US60/950,634 2007-07-19

Publications (2)

Publication Number Publication Date
WO2009010983A2 WO2009010983A2 (en) 2009-01-22
WO2009010983A3 true WO2009010983A3 (en) 2010-03-04

Family

ID=40260187

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/IL2008/001003 WO2009010983A2 (en) 2007-07-19 2008-07-20 Method and system for measuring a height of a protuberance on a surface of an electric circuit

Country Status (1)

Country Link
WO (1) WO2009010983A2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9885671B2 (en) 2014-06-09 2018-02-06 Kla-Tencor Corporation Miniaturized imaging apparatus for wafer edge
US9645097B2 (en) 2014-06-20 2017-05-09 Kla-Tencor Corporation In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2619004A (en) * 1950-08-18 1952-11-25 Research Corp Inspection device for determining height of dots on engraved plates
US5878152A (en) * 1997-05-21 1999-03-02 Cognex Corporation Depth from focal gradient analysis using object texture removal by albedo normalization
US6249347B1 (en) * 1998-03-05 2001-06-19 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
US6377865B1 (en) * 1998-02-11 2002-04-23 Raindrop Geomagic, Inc. Methods of generating three-dimensional digital models of objects by wrapping point cloud data points
US6611344B1 (en) * 1998-11-30 2003-08-26 Rahmonic Resources Pte Ltd Apparatus and method to measure three dimensional data
US20040099710A1 (en) * 2000-09-29 2004-05-27 Bernd Sommer Optical ball height measurement of ball grid arrays

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2619004A (en) * 1950-08-18 1952-11-25 Research Corp Inspection device for determining height of dots on engraved plates
US5878152A (en) * 1997-05-21 1999-03-02 Cognex Corporation Depth from focal gradient analysis using object texture removal by albedo normalization
US6377865B1 (en) * 1998-02-11 2002-04-23 Raindrop Geomagic, Inc. Methods of generating three-dimensional digital models of objects by wrapping point cloud data points
US6249347B1 (en) * 1998-03-05 2001-06-19 General Scanning, Inc. Method and system for high speed measuring of microscopic targets
US6611344B1 (en) * 1998-11-30 2003-08-26 Rahmonic Resources Pte Ltd Apparatus and method to measure three dimensional data
US20040099710A1 (en) * 2000-09-29 2004-05-27 Bernd Sommer Optical ball height measurement of ball grid arrays

Also Published As

Publication number Publication date
WO2009010983A2 (en) 2009-01-22

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