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WO2009008384A1 - サーボ弁及びこれを用いたエアアクチュエータ - Google Patents

サーボ弁及びこれを用いたエアアクチュエータ Download PDF

Info

Publication number
WO2009008384A1
WO2009008384A1 PCT/JP2008/062222 JP2008062222W WO2009008384A1 WO 2009008384 A1 WO2009008384 A1 WO 2009008384A1 JP 2008062222 W JP2008062222 W JP 2008062222W WO 2009008384 A1 WO2009008384 A1 WO 2009008384A1
Authority
WO
WIPO (PCT)
Prior art keywords
valve element
valve
servo
air
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/062222
Other languages
English (en)
French (fr)
Inventor
Tomohiro Ogawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Heavy Industries Ltd
Original Assignee
Sumitomo Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Heavy Industries Ltd filed Critical Sumitomo Heavy Industries Ltd
Publication of WO2009008384A1 publication Critical patent/WO2009008384A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/0401—Valve members; Fluid interconnections therefor
    • F15B13/0402—Valve members; Fluid interconnections therefor for linearly sliding valves, e.g. spool valves
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/044—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors
    • F15B13/0446—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by electrically-controlled means, e.g. solenoids, torque-motors with moving coil, e.g. voice coil
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
    • F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
    • F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/02—Actuating devices; Operating means; Releasing devices electric; magnetic
    • F16K31/06—Actuating devices; Operating means; Releasing devices electric; magnetic using a magnet, e.g. diaphragm valves, cutting off by means of a liquid
    • F16K31/0603—Multiple-way valves
    • F16K31/061—Sliding valves
    • F16K31/0613—Sliding valves with cylindrical slides

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Multiple-Way Valves (AREA)
  • Actuator (AREA)
  • Magnetically Actuated Valves (AREA)
  • Servomotors (AREA)

Abstract

　第１の弁体と第２の弁体を有するスプールと、該スプールを軸方向に移動可能に収容し、前記第１の弁体と前記第２の弁体との間にエアーを供給する給気ポートを有するスリーブを備えたサーボ弁であって、前記第１の弁体及び前記第２の弁体は、前記供給ポートから供給された前記エアーによるエアー圧力を受圧する受圧面を各々有し、前記第１の弁体の前記受圧面の面積は、前記第２の弁体の前記受圧面の面積よりも大きく形成され、前記スプールは、前記エアーの供給により前記第１の弁体の方向に移動することを特徴とする。
PCT/JP2008/062222 2007-07-11 2008-07-04 サーボ弁及びこれを用いたエアアクチュエータ Ceased WO2009008384A1 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-182432 2007-07-11
JP2007182432A JP4963446B2 (ja) 2007-07-11 2007-07-11 サーボ弁及びこれを用いたエアアクチュエータ

Publications (1)

Publication Number Publication Date
WO2009008384A1 true WO2009008384A1 (ja) 2009-01-15

Family

ID=40228555

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062222 Ceased WO2009008384A1 (ja) 2007-07-11 2008-07-04 サーボ弁及びこれを用いたエアアクチュエータ

Country Status (2)

Country Link
JP (1) JP4963446B2 (ja)
WO (1) WO2009008384A1 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460089A (zh) * 2019-09-09 2021-03-09 Smc 株式会社 伺服阀

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5904639B2 (ja) 2012-04-27 2016-04-13 国立大学法人東京工業大学 ３ポートバルブ
JP6203605B2 (ja) * 2013-11-07 2017-09-27 三菱重工業株式会社 スプールバルブ組立体、油圧機械及び発電装置
US11803047B2 (en) * 2019-02-04 2023-10-31 Thorlabs Measurement Systems Inc. Actuator and beam steering mechanism using an actuator
JP2021110338A (ja) * 2020-01-06 2021-08-02 住友重機械工業株式会社 スプール型流量制御弁
JP7566607B2 (ja) * 2020-12-10 2024-10-15 住友重機械工業株式会社 スプール型流量制御弁およびその製造方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277377U (ja) * 1985-10-31 1987-05-18
JPH0246384A (ja) * 1988-08-04 1990-02-15 Toyoda Mach Works Ltd 電磁弁
JPH11210919A (ja) * 1998-01-27 1999-08-06 Denso Corp スプール弁型油圧制御弁
JP3109097U (ja) * 2004-11-30 2005-05-12 金子産業株式会社 切換え弁装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03109097U (ja) * 1990-02-17 1991-11-08

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6277377U (ja) * 1985-10-31 1987-05-18
JPH0246384A (ja) * 1988-08-04 1990-02-15 Toyoda Mach Works Ltd 電磁弁
JPH11210919A (ja) * 1998-01-27 1999-08-06 Denso Corp スプール弁型油圧制御弁
JP3109097U (ja) * 2004-11-30 2005-05-12 金子産業株式会社 切換え弁装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112460089A (zh) * 2019-09-09 2021-03-09 Smc 株式会社 伺服阀
CN112460089B (zh) * 2019-09-09 2024-03-29 Smc株式会社 伺服阀

Also Published As

Publication number Publication date
JP4963446B2 (ja) 2012-06-27
JP2009019684A (ja) 2009-01-29

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