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WO2009000500A1 - Procédé et dispositif de mesure du front d'onde d'un rayonnement laser - Google Patents

Procédé et dispositif de mesure du front d'onde d'un rayonnement laser Download PDF

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Publication number
WO2009000500A1
WO2009000500A1 PCT/EP2008/005094 EP2008005094W WO2009000500A1 WO 2009000500 A1 WO2009000500 A1 WO 2009000500A1 EP 2008005094 W EP2008005094 W EP 2008005094W WO 2009000500 A1 WO2009000500 A1 WO 2009000500A1
Authority
WO
WIPO (PCT)
Prior art keywords
laser beam
wavefront
partial
measured
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/EP2008/005094
Other languages
German (de)
English (en)
Inventor
Maik Zimmermann
Matthias Rank
Joachim Schulz
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Trumpf Werkzeugmaschinen SE and Co KG
Original Assignee
Trumpf Werkzeugmaschinen SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Trumpf Werkzeugmaschinen SE and Co KG filed Critical Trumpf Werkzeugmaschinen SE and Co KG
Publication of WO2009000500A1 publication Critical patent/WO2009000500A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors
    • G01J1/4257—Photometry, e.g. photographic exposure meter using electric radiation detectors applied to monitoring the characteristics of a beam, e.g. laser beam, headlamp beam
    • G01J2001/4261—Scan through beam in order to obtain a cross-sectional profile of the beam

Definitions

  • the invention relates to a method and a device for wave front measurement of laser radiation.
  • the measurement of an optical wavefront of a laser beam is useful for various purposes, for example allowing conclusions to be drawn about the quality of optical components with regard to their surface and transmission properties, in laser technology for characterizing the optical properties used in astronomy to measure the deviation of the front rays of light also stars on their way through the atmosphere.
  • the present invention relates in particular to the characterization of the wavefront of laser beams, from which it is possible, for example, to draw conclusions about the alignment accuracy and the degree of soiling of the optical components in the beam path of a laser processing machine.
  • the measurement of the wavefront of laser radiation can take place, for example, by means of interferometric methods with the aid of a reference wave.
  • the main method used is the Hartmann-Shack measuring principle, in which a segmentation of the laser beam by means of pinhole apertures or lens fields and an imaging or focusing of the individual partial beams on a position-sensitive detector are measured.
  • the wavefront can be reconstructed by detecting the lateral deviation of the sub-beams to a predetermined position or referenced by a plane wave.
  • laser radiation in a wavelength range of about 400 nm to 1400 nm can be measured. This can be done with very high accuracy due to the availability of high resolution CCD chips operating in this waveband.
  • the above-mentioned Hartmann-Shack measuring sensors are problematic in their use for the in-situ wavefront measurement of high-power lasers, since the laser beam is to be attenuated for a measured value recording in order not to damage the sensor element.
  • special optical components are used , For example, transmit a small proportion of the laser radiation and reflect the greater part.
  • Disadvantage of this solution is the heating of the optical components by absorption of the laser radiation, which can lead to a change in the wavefront of the laser beam due to the temperature dependence of the refractive index of the medium. An accurate measurement of the wavefront is thereby at least made difficult, if not impossible.
  • Another problem is the wavefront measurement with laser radiation in the middle and far infrared range, ie at a wavelength of about 1.5 to 15 microns.
  • the available sensor elements such as for example micro-bolometer arrays or pyroelectric detectors, are currently available in production only in a low resolution compared to CCD or CMOS chips. In addition, they are extremely expensive.
  • Another disadvantage of these detectors lies in their small detector surface. When measuring a laser beam whose cross-section is larger than the detector surface, then additional optical elements for cross-sectional conversion must be used, which in turn can cause a distortion of the wavefront to be measured by aberrations. Finally, the reduction of the cross-section by optical elements leads to a decrease in the resolution of the wavefront sensor due to larger angles of the beams in the optical design of the measuring device.
  • the present invention seeks to provide a method and a corresponding device for measuring the wavefront of laser radiation, with the aid of which high-power laser can be measured directly with respect to their wavefront.
  • the invention provides a scanning head with a small aperture relative to the laser beam cross-section, which decouples partial laser beams from the laser beam to be measured in temporal succession.
  • the respective partial laser beams are detected by means of a position-resolving detector, which is arranged in the beam path of the decoupled partial laser beam, which generates wavefront-specific measurement data.
  • a position-resolving detector which is arranged in the beam path of the decoupled partial laser beam, which generates wavefront-specific measurement data.
  • the method and apparatus according to the invention have the advantage that the proportion of the laser power passing through the aperture of the arrangement is very small. Thus, no attenuation of the partial laser beam is necessary, corresponding optical elements, which can lead to a distortion of the wavefront to be detected, omitted. Should a power attenuation be required in exceptional cases, the thermal heating of the corresponding optical elements can be neglected due to the low power of the decoupled partial beam. If, after all, thermal effects nevertheless occur, they can be avoided by better cooling of the comparatively smaller optical components.
  • DE 10 2005 038 587 A1 shows a measuring system and method for measuring a laser beam, in which the laser beam to be measured is guided by means of a deflection system over a pinhole of the measuring system, from where the decoupled partial beam falls onto a corresponding measuring sensor.
  • a wavefront survey is also not addressed in this document.
  • the method according to the invention and the corresponding device make it possible to directly measure the wavefront in the measurement plane by evaluating the propagation direction of the partial radiation passing through the aperture on a position-sensitive detector.
  • this measurement method uses a completely different physical effect from the previously discussed prior art to describe the wavefront.
  • a wavefront determination with the aid of the invention is possible by a direct measurement of the propagation direction of the partial laser beams in a measurement plane for arbitrary wavefronts without costly reconstruction from a power distribution in several planes.
  • the inventive method is thus much faster and more accurate than the power measurement, as disclosed in DE 199 09 595 Al or DE 10 2005 038 587 Al.
  • 1 and 2 are schematic representations of a hollow needle measuring device for the wavefront of a laser beam in two different embodiments
  • 3 and 4 is a plan view and an axial section of a measuring device with aperture stops in a first embodiment
  • FIG. 5 shows an axial section of a measuring device in a further embodiment with aperture diaphragm and absorber diaphragm
  • 6 to 8 are plan views of this surveying device with differently shaped aperture diaphragms
  • FIG. 9 is an axial section of the arrangement of FIG. 8,
  • FIG. 10 shows a top view of a measuring device in a further embodiment with aperture diaphragm and absorber diaphragm, and FIG
  • FIG. 11 shows an axial section of an aperture stop of the surveying device according to FIG. 10.
  • the laser beam 1 to be measured is measured with the aid of a hollow needle-like scanning head 2.
  • the latter has, at its end pointing counter to the beam direction S, an aperture 3 small in relation to the laser beam cross section in the form of a circular opening with a diameter of, for example, 1 mm.
  • the size of the aperture 3 is preferably of the order of the intended lateral resolution.
  • the opening can also be reduced, whereby Care must be taken that the aperture size does not become so small that the diffraction produced at the aperture significantly affects the resolution of the measuring arrangement.
  • the aperture diameter is thus to be kept well above the size of the wavelength of the laser radiation to be measured.
  • a partial laser beam 4 is coupled out of the laser beam 1 to be measured.
  • a position-sensitive detector 5 is arranged in the scanning head in the beam path of the partial laser beam 4, onto which the partial laser beam 4 impinges in a position significant for the course of the wavefront 6 in the region of the coupled-out partial laser beam 4.
  • the phase angle of the partial laser beam 4 can be determined via its impact location on the position-resolving detector 5.
  • the scanning head 4 is scanned for detecting the entire wavefront 6 with the aid of an x-y positioning system 7, for example in a two-dimensional grid arrangement with a certain number of measuring points in the x and y directions.
  • the corresponding measurement data of the detector 5 are assigned to the corresponding position of the aperture 3 in the laser beam 1 and thus the laser front 6 of the laser beam to be measured is determined from the wave front-specific position data of the individual partial laser beams 4 in conjunction with the position coordinates of the positioning system 7.
  • an additional optical element 9 for focusing the partial laser beam 4 onto the surface of the detector 5 can be installed in the beam path of the partial laser beam 4.
  • the surface 10 of the scanning head 2 has a highly reflective design so that a large part of the laser radiation impinging thereon is deflected and does not lead to heating of the scanning head 2.
  • the measuring principle according to the invention is distinguished in comparison to known measuring principles by a high spatial resolution and a large measuring range.
  • the resolution of the detector arrays used for the known Hartmann-Shack method is low, especially for the measurement of IR radiation in the range of 8 to 14 microns.
  • the current state is a maximum of 640 x 480 pixel VGA resolution.
  • the Hartmann-Shack method the total available detector area of nxm pixels is subdivided into k sub-areas and assigned to a subaperture. As a result, the measuring range and the resolution of the measuring system are drastically reduced, since for a subaperture that detects a section of the wavefront, therefore, only nxm / k 2 pixels are available.
  • the partial laser beam 4 coupled in via the aperture is evaluated with the aid of the entire surface of the detector 5 with n ⁇ m pixels.
  • This allows dramatically higher resolution or the ability to use smaller, low-pixel detectors or simpler position-sensitive semiconductors, such as four-quadrant diodes or PSD detectors, which then achieve similar resolution compared to prior art Hartmann-Shack systems but are significantly less expensive ,
  • FIG. 2 differs from that of FIG. 1 only in that the aperture 3 of the scanning head 2 is associated with a deflecting mirror 11 which deflects the coupled-out partial laser beam 4 transversely to the beam direction S of the laser beam 1 to be measured onto the detector 5 , This allows a reduction in the height of the Ab- probe. As a result, the mechanical properties can be improved in certain design variants.
  • Matching components are identified by identical reference numbers.
  • FIG. 3 and 4 an alternative embodiment for forming the laser beam 1 scanning aperture 3 is shown, which is constructed on the model of the so-called Nipkov disc.
  • This construction has a first disk element 12 with an aperture slot 13 occupying a radius line, which is combined with a second disk element 14.
  • the latter has at uniform angles of rotation W in each case with increasing distance a arranged aperture openings 16. If the second disk element 14 is rotated relative to the first disk element 12, one of the aperture openings 16 successively comes into coverage in the area of the aperture slot 13 successively.
  • the laser beam 1 can thus be scanned on a chord line relative to the laser cross section.
  • the two disk elements 12, 14 are moved together either linearly to the laser beam 1, so that the Aper- turschlitz 13 sweeps over the complete cross section of the laser beam 1 and correspondingly the entire laser beam 1 is scanned.
  • a rotation of the disk elements 12, 14 about the center of the aperture 14 is also possible for detecting the entire laser beam cross-section, in which case a fan-shaped scanning of the laser beam 1 takes place.
  • the optical element 9 is arranged in the form of a lens, with the aid of which the sub-beams which are hidden in time succession through the aperture openings 16 4 in turn be imaged onto the detector 5 in the form of a four-quadrant diode.
  • the aperture stop is designed as a rotating perforated mirror 17 with an aperture opening 16 in the region of a circumferential groove recess 18 which is conical in cross-section.
  • the hole mirror 17 is thus formed as a W-axicon.
  • an absorber ring aperture 19 is arranged, the central opening is concentric with the traversed by the aperture 16 peripheral line of the hole mirror 17.
  • the absorber ring diaphragm 19 defines with its central opening 20, which has the diameter A, the measuring aperture of the device through which the laser beam 1 passes.
  • an optical element 9 in the form of a lens is again arranged underneath it, with the aid of which the hidden partial laser beam 4 is imaged onto the detector 5 in the form of a four-quadrant diode.
  • the laser radiation 21 reflected by the perforated mirror 17 in the region of the groove recess 18 is absorbed in a defined manner by the absorber ring diaphragm 19 with its absorber section 22 which widens conically downwards.
  • the laser beam 1 can be completely scanned in the direction R by a displacement of the measuring device according to FIGS. 5 and 6. In each case arcuate tendon lines of the laser beam cross section are scanned.
  • a multi-hole mirror 23 is shown with a plurality of aperture openings 16, which are arranged analogously to the nipkovusionnartigen arrangement of FIG. 3 and 4 on a spiral line.
  • a plurality of arc-shaped chord sections of the laser beam 1 can be scanned one after the other without displacement of the surveying device, resulting overall in a shorter scanning time for the measurement of the entire laser beam 1.
  • a plurality of aperture openings 16 are arranged on a single circumferential line in the multiple-hole mirror 23 '. Their distance D must be greater than the diameter A of the central opening 20 of the absorber ring diaphragm 19. When shifting this multiple-hole mirror 23 'in the direction R, a substantially arcuate chord line of the laser beam 1 is scanned with each aperture 16.
  • the aperture openings 16 at the lowest point of the groove recesses 18 are arranged.
  • the distance of the aperture openings 16 from the lens 9 is constant and minimal.
  • the inclined flanks of the groove recesses 18 cause the main laser beam 1 is controlled in the absorber ring diaphragm 19.
  • the groove recesses 18 should be as pointed as possible at their lowest point, ie have the greatest possible curvature in order to produce as little diffuse backscatter as possible.
  • the upwardly facing ridges 24 between the groove recesses 18 are less problematic in terms of scattering, since they can be made quasi acute with an extremely small radius of curvature.
  • FIG. 10 shows a variant of a multiple-hole mirror 25, in which the aperture openings 16 are each surrounded by conically extending zones 26.
  • the aperture openings 16 are in each case at the downward-pointing cone tip.
  • a plurality of conical zones 26 are arranged distributed over the circumference of the multi-hole mirror 25.
  • the disk of the multi-hole mirror 25 can be made relatively thick.
  • cooling louvers 27 may be provided on the rear side of the multiple-hole mirror 25.
  • the multiple-hole mirror 23 (FIG. 9) or 25 (FIG. 11) can be provided at the rear with a plane-parallel absorber 28 in front of each aperture 16. Due to the contact with the heat-dissipating disk of the multi-hole mirror 23 or 25, heating of the absorber 28 is limited. The attenuation thus also takes place in the region of the parallel beam of the partial laser beam 4 and not in the focused section. As an alternative to the absorber 28, a partially reflective coating of the focusing lens 9 is also possible.
  • the aperture openings 16 are moved uniformly in circular paths over the laser beam 1 by the rotation of the respective mirrors 17, 23, 23 'or 25.
  • the detector 5 experiences a comparatively slow change in intensity.
  • the integration time of the detector 5 determines the spatial resolution of the surveying system in this direction at a constant rotational speed. It is thus electronically adjustable.
  • a method of the mirrors 17, 23, 23 'and 25 with fixed lens 9 and detector 5 a rastering of the entire beam cross section is effected, from which the wavefront of the laser beam 1 can be determined.
  • the invention has a multiplicity of advantages:
  • the measurement of the wavefront can be realized at high laser powers without prior power attenuation. As a result, the subject
  • the lateral resolution of the measuring system can be increased by scanning the laser beam cross-section with the aid of a high-precision positioning system.
  • the measurement of large laser beam cross sections can be carried out without cross section conversion.
  • Low cost position sensitive detectors such as four quadrant diodes or P SD detectors may be used.
  • the detectors are more easily interchangeable so that laser beam sources with different wavelengths can be measured flexibly.

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  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Abstract

Dans un procédé et un dispositif de mesure du front d'onde d'un rayonnement laser, des faisceaux lasers partiels successifs (4) sont extraits du faisceau laser (1) à mesurer à l'aide d'une ouverture (3) qui peut être déplacée par rapport à la section transversale du faisceau laser (1) à mesurer et petite par rapport à cette dernière, les faisceaux lasers partiels (4) sont détectés au moyen d'un détecteur (5) à résolution de position, des données de mesure spécifiques au front d'onde en résultent et le front d'onde (6) du faisceau laser (1) est défini à partir des données de mesure spécifiques au front d'onde et des coordonnées de position de chaque faisceau laser (4) séparé du faisceau laser (1) à mesurer.
PCT/EP2008/005094 2007-06-28 2008-06-24 Procédé et dispositif de mesure du front d'onde d'un rayonnement laser Ceased WO2009000500A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102007029923.2 2007-06-28
DE102007029923A DE102007029923A1 (de) 2007-06-28 2007-06-28 Verfahren und Vorrichtung zur Wellenfrontvermessung von Laserstrahlung

Publications (1)

Publication Number Publication Date
WO2009000500A1 true WO2009000500A1 (fr) 2008-12-31

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PCT/EP2008/005094 Ceased WO2009000500A1 (fr) 2007-06-28 2008-06-24 Procédé et dispositif de mesure du front d'onde d'un rayonnement laser

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DE (1) DE102007029923A1 (fr)
WO (1) WO2009000500A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015016240B3 (de) * 2015-12-16 2017-05-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Transparente Mess-Sonde für Strahl-Abtastung
DE102017005418A1 (de) 2017-06-09 2018-12-13 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Mess-Sonde für Strahlabtastung

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102010053323B3 (de) * 2010-12-02 2012-05-24 Xtreme Technologies Gmbh Verfahren zur räumlich aufgelösten Messung von Parametern in einem Querschnitt eines Strahlenbündels energiereicher Strahlung mit hoher Intensität
US8593622B1 (en) * 2012-06-22 2013-11-26 Raytheon Company Serially addressed sub-pupil screen for in situ electro-optical sensor wavefront measurement
DE102019004337B4 (de) 2019-06-21 2024-03-21 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Optisches System und Strahlanalyseverfahren

Citations (3)

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Publication number Priority date Publication date Assignee Title
EP0319345A2 (fr) * 1987-12-03 1989-06-07 Westinghouse Electric Corporation Appareil pour representer la distribution d'intensité dans un faisceau laser de haute puissance
US5287165A (en) * 1991-09-30 1994-02-15 Kaman Aerospace Corporation High sensitivity-wide dynamic range optical tilt sensor
DE19909595A1 (de) * 1999-03-04 2000-09-07 Primes Gmbh Verfahren und Vorrichtung zur Vermessung der räumlichen Leistungsdichteverteilung von Strahlung hoher Divergenz und hoher Leistung

Family Cites Families (5)

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DE4003698C2 (de) * 1990-02-07 1994-09-08 Wild Heerbrugg Ag Wellenfrontsensor
DE4007321C2 (de) 1990-03-08 1993-11-25 Diehl Gmbh & Co Vorrichtung zur Messung der Wellenfront einer elektromagnetischen Welle
DE19735096A1 (de) 1996-08-16 1998-02-19 Fraunhofer Ges Forschung Verfahren zur Charakterisierung der Phasenfront eines optischen Strahlungsfelds
DE10243838B3 (de) 2002-09-13 2004-05-19 Forschungsverbund Berlin E.V. Verfahren und Anordnung zur ortsaufgelösten Charakterisierung der Krümmung einer Wellenfront
DE102005038587A1 (de) 2005-08-16 2007-02-22 Primes Gmbh Messsystem und Verfahren zum Vermessen eines Laserstrahls

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0319345A2 (fr) * 1987-12-03 1989-06-07 Westinghouse Electric Corporation Appareil pour representer la distribution d'intensité dans un faisceau laser de haute puissance
US5287165A (en) * 1991-09-30 1994-02-15 Kaman Aerospace Corporation High sensitivity-wide dynamic range optical tilt sensor
DE19909595A1 (de) * 1999-03-04 2000-09-07 Primes Gmbh Verfahren und Vorrichtung zur Vermessung der räumlichen Leistungsdichteverteilung von Strahlung hoher Divergenz und hoher Leistung

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015016240B3 (de) * 2015-12-16 2017-05-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Transparente Mess-Sonde für Strahl-Abtastung
WO2017101895A2 (fr) 2015-12-16 2017-06-22 Primes Gmbh Sonde de mesure transparente pour balayage de rayonnement
DE102017005418A1 (de) 2017-06-09 2018-12-13 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Mess-Sonde für Strahlabtastung
WO2018224068A1 (fr) 2017-06-09 2018-12-13 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Sonde de mesure pour l'analyse de rayons
DE102017005418B4 (de) 2017-06-09 2019-12-24 Primes GmbH Meßtechnik für die Produktion mit Laserstrahlung Vorrichtung zur Abtastung eines Lichtstrahls

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