[go: up one dir, main page]

WO2009072318A1 - Procédé de formation de revêtement pulvérisé d'oxyde d'yttrium noir et élément comportant un revêtement pulvérisé d'oxyde d'yttrium noir - Google Patents

Procédé de formation de revêtement pulvérisé d'oxyde d'yttrium noir et élément comportant un revêtement pulvérisé d'oxyde d'yttrium noir Download PDF

Info

Publication number
WO2009072318A1
WO2009072318A1 PCT/JP2008/062366 JP2008062366W WO2009072318A1 WO 2009072318 A1 WO2009072318 A1 WO 2009072318A1 JP 2008062366 W JP2008062366 W JP 2008062366W WO 2009072318 A1 WO2009072318 A1 WO 2009072318A1
Authority
WO
WIPO (PCT)
Prior art keywords
black
alloys
oxide
yttrium
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/062366
Other languages
English (en)
Japanese (ja)
Inventor
Yoshio Harada
Junichi Takeuchi
Ryo Yamasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tocalo Co Ltd
Original Assignee
Tocalo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tocalo Co Ltd filed Critical Tocalo Co Ltd
Priority to KR1020087022813A priority Critical patent/KR101133002B1/ko
Publication of WO2009072318A1 publication Critical patent/WO2009072318A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/02—Pretreatment of the material to be coated, e.g. for coating on selected surface areas
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/04—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the coating material
    • C23C4/10—Oxides, borides, carbides, nitrides or silicides; Mixtures thereof
    • C23C4/11—Oxides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C4/00—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge
    • C23C4/12—Coating by spraying the coating material in the molten state, e.g. by flame, plasma or electric discharge characterised by the method of spraying

Definitions

  • the present invention relates to a method for forming a thermal sprayed black yttrium oxide thermal spray coating having excellent properties such as damage resistance and a black yttrium oxide coating material having excellent color design.
  • thermal spraying method a powder of metal, ceramics, cermet or the like is melted by a plasma jet while being burned by a combustion flame, and then sprayed onto the surface of a thermal sprayed body (base material) to thereby surface the base material.
  • This is one of the surface treatment technologies widely used in many industrial fields.
  • the thermal spray coating obtained by applying this thermal spraying method consists of the strength and weakness of the bonding force between the particles that make up this coating, the amount of unbonded particles, and the particles that do not melt (hereinafter referred to as “unmelted particles”). It is known that there are large differences in the mechanical strength and corrosion resistance of the coating depending on the amount.
  • the goal of conventional thermal spraying technology development is to increase the interparticle bonding force and increase the porosity by generating strong collision energy on the surface of the sprayed object, for example, by using a high-temperature heat source such as plasma.
  • the purpose of this was to improve the adhesion between the film and the substrate.
  • Japanese Patent Laid-Open No. Hei 6-196 421 has proposed a method of spraying in a low-pressure inert gas atmosphere (generally, a low pressure plasma spraying method). is called). Specifically, Ar gas is introduced into the vacuum vessel from which air has been exhausted at 50 to 200 h Pa, and plasma spraying is performed in this atmosphere.
  • the thermal spray coating of the oxide-based ceramic is already oxidized in the thermal spray material powder itself, so that it is not oxidized even when sprayed in the atmosphere. Even when sprayed in an Ar gas atmosphere, chemical changes are unlikely to occur in the sprayed particles. For this reason, there are few examples of research and development in the low-pressure plasma spraying method for oxide ceramics compared to atmospheric plasma spraying. In addition, research on conventional thermal spray coatings has been conducted on thermal spray materials such as metals (alloys), ceramics, and cermets in order to improve the hardness, wear resistance, heat resistance, corrosion resistance, and adhesion of the coating.
  • the acid-chromium (C r 2 0 3 ) powder as the thermal spraying material is dark green, which is close to black. When it does, it becomes a black film.
  • the aluminum oxide (A 1 2 0 3 ) powder is white, and the coating obtained by plasma spraying this powder is also white.
  • titanium oxide (T I_ ⁇ 2) powder is a white, becomes film blackish When this plasma spraying.
  • the cause of the change in the color of the thermal spray coating is that, for example, a part of oxygen constituting T i 0 2 disappears in the thermal spray heat source and becomes an oxide represented by (T in O ⁇ -J).
  • the oxide ceramic spray coating generally reproduces the color of the thermal spray powder material as it is, except for some oxides.
  • yttrium oxide Y 2 0 3
  • a 1 2 0 3 acid aluminum
  • the thermal spray coating is also white.
  • ⁇ 2 0 3 is considered to have no change in the bonding state of ⁇ and ⁇ (oxygen) that constitutes ⁇ 2 ⁇ 3 particles even if it is sprayed in a plasma heat source.
  • Both A 1 and ⁇ as metal elements have extremely strong chemical affinity with oxygen, and even in a high-temperature plasma environment, oxygen does not disappear, and even after a sprayed coating, A 1 2 0 3 , Y. Because it is considered that the physical properties of 0 3 are maintained as they are. is there.
  • the above-mentioned ⁇ 2 ⁇ 3 thermal spray coating has excellent heat resistance, high temperature oxidation resistance, corrosion resistance, and excellent resistance (plasma erosion resistance) even in a plasma etching atmosphere using low temperature plasma using halogenated materials.
  • Japanese Patent Laid-Open Nos. 10-004083, 10-163180, 10-547744, 2001-164354, 2003-321760 Japanese Patent Laid-Open Nos. 10-004083, 10-163180, 10-547744, 2001-164354, 2003-321760.
  • the ⁇ 2 ⁇ 3 sprayed coatings disclosed in these documents are all white.
  • these documents change the color of this coating without changing the characteristics of the white ⁇ 2 0 3 thermal spray coating, and use this to improve the product value of color engineering design. It does not suggest a technology to do.
  • JP-A-9-316624 discloses a technique for improving the performance of a film by irradiating a carbide cermet film or a metal film with an electron beam.
  • JP-A-10- two hundred and two thousand seven hundred eighty-two for Z R_ ⁇ 2 based ceramic sprayed coating a technique for laser beam irradiation is disclosed. Further, in Japanese Patent Application Laid-Open No. 2004-100039, when a spray coating of rare earth oxide is formed, the coating is changed from gray to black by adding carbon, Ti, and Mo to the spray material. Technology is disclosed.
  • An object of the present invention by using a thermal spray material consisting of white Upsilon 2 0 3 powder, a black spray coating oxidation Germany Toriumu, without resorting to laser beams or electron beams is proposed a method of directly forming the morphism dissolved Is. This method can solve the following problems of conventional technologies.
  • the present invention adopts the following solutions.
  • the present invention as a mixed gas plasma Jiwetto generating working gas of an inert gas and hydrogen gas, by plasma spraying a white Upsilon 2 0 3 powder, to form a black spray coating oxidation Ittoriumu This is a method for forming a black oxide yttrium sprayed coating.
  • the thermal spray atmosphere in which the thermal spray material flies is maintained in a reduced-pressure environment of 50 to 600 h Pa with an inert gas
  • the black spray coating of the yttrium oxide is ⁇ 2 o 3 _ ⁇ in a state in which some of the oxygen in the Y 2 O 3 powder has disappeared due to the reducing action of atomic hydrogen contained in the plasma jet. It is formed by the accumulation of black particles represented,
  • the spraying atmosphere should be an environment in which non-oxidizing gas is allowed to flow around the plasma spray gun to prevent air from entering the plasma jet toward the surface.
  • the spray material consisting of the white Upsilon 2 ⁇ 3 powder is a particle size is large can of 5 to 80 / zm
  • the working gas for generating plasma 'jet is a gas whose volume ratio of inert gas to hydrogen gas is within the range of 10 1-3 -1;
  • the base material includes various steels including stainless steel, aluminum and alloys thereof, titanium and alloys thereof, tungsten and alloys thereof, molybdenum and alloys thereof, sintered carbon, quartz, glass, plastics, oxides
  • metal-based or non-metallic base materials selected from ceramic and non-oxide ceramic sintered bodies,
  • the undercoat is selected from Ni and alloys thereof, Cr and alloys thereof, W and alloys thereof, Mo and Mo alloys, Ti and Ti alloys, A1 and alloys thereof. Being one or more metals or alloys thereof, it is thought that it will provide a good solution.
  • the present invention also provides that a black sprayed oxide yttrium film having a composition of Y 2 0 3 — x formed by the above method is formed to a thickness of 50 to 2000; zm.
  • a characteristic black oxide yttrium thermal spray coating member is proposed.
  • An undercoat having a film thickness of 50 to 500 ⁇ is provided between the black sprayed coating of yttrium oxide and the base material,
  • the base material includes various steels including stainless steel, aluminum and its alloys, titanium and its alloys, tungsten and its alloys, molypden and And one or more metal-based or non-metallic base materials selected from ceramic alloys, sintered carbon, quartz, glass, plastics, oxide-based and non-acidic ceramics,
  • the undercoat is one selected from Ni and alloys thereof, Cr and alloys thereof, W and alloys thereof, Mo and Mo alloys, Ti and Ti alloys, A1 and alloys thereof.
  • the spraying atmosphere is an environment in which non-oxidizing gas is allowed to flow around the plasma spray gun to prevent air from entering the plasma jet toward the surface.
  • the thermal spray material made of the white Y 2 O 3 powder has a particle size of 5 to 80 ⁇
  • the working gas for generating the plasma jet is a gas having a volume ratio of inert gas to hydrogen gas in the range of 10 Zl to 3 Zl.
  • the present invention adds a highly reducing hydrogen gas to an inert gas for generating a plasma jet as a thermal spraying heat source without using coloring components such as carbon, Ti, and Mo.
  • a commercially available white Y 2 O 3 spray powder for thermal spraying a black yttrium oxide spray coating can be directly formed. Therefore, existing thermal spraying related equipment including low pressure plasma spraying equipment can be used as it is.
  • the processing for secondary blackening such as laser beam or electron beam irradiation can be omitted, so that no high energy irradiation equipment is required. Therefore, in addition to improving workability, there are significant economic effects such as eliminating the need for new equipment.
  • the black oxide yttrium spray coating to which the method of the present invention is applied is white Y W 200
  • Corrosion resistance equivalent to 2 O 3 sprayed coatings, as well as plasma resistance and erosion resistance, can be used in the same applications.
  • the member formed with this black sprayed coating can be used as a heat transfer surface or a heat receiving surface.
  • the heat radiation characteristics and the heat receiving efficiency are improved.
  • the plasma etching rate is improved and the quality is made uniform.
  • a product having a black acid-yttrium spray coating formed in accordance with the present invention maintains a black luster in the entire thickness direction, and therefore, even if a mechanical process such as surface grinding is performed. However, the film is always black, which can increase the product value.
  • the black acid yttrium spray coating member according to the present invention when used in a semiconductor processing apparatus or the like, is less prone to adhesion of reaction products due to the particle etching action. There is no need to clean the equipment, and work efficiency can be improved.
  • the thermal spray coating that is used in semiconductor manufacturing 'processing apparatus are white represented by A 1 2 0 3 Seramitsu click, also formed in the prior art the Y 2 0 3 sprayed coating also white .
  • the black ⁇ 20 3 sprayed coating covering member makes it easy to distinguish between coating materials and improves the accuracy and productivity of maintenance and inspection.
  • Figure 1 is a schematic diagram of a plasma spray gun.
  • Figure 2 is an electron micrograph of the appearance color of the yttrium oxide sprayed coating.
  • a black yttrium oxide film is formed by thermal spraying.
  • an inert gas such as Ar or He is used as the working gas for the plasma spraying method. This is to generate a high-temperature plasma jet as a heat source by flowing an inert gas through the arc in the thermal spray gun obtained by applying a DC voltage.
  • the environment of this plasma jet heat source is composed of a collection of electrons, ions, atoms, and molecules ionized from Ar, He, etc., so the environment is reducible unless air is mixed in from the outside. Is non-oxidizing.
  • the plasma heat source in the spray gun in such a state has white Y 2
  • the sprayed coating obtained when spraying with 3 powders is white, and the appearance color does not change.
  • the reason for this is that the normal plasma spraying method has a low plasma jet reducing power and the spraying atmosphere in which the sprayed particles fly is in the atmosphere, so it is melted by the heat source and sprayed. As the 20 3 particles come into contact with the air, they remain white.
  • the oxygen partial pressure in the spraying atmosphere that is, the spraying environment in which the droplets ejected from the spraying gun fly toward the deposition surface is extremely low, and the oxygen is essentially oxygen-free.
  • a film is formed under a reduced pressure of 50 to 200 h Pa of gas, it may turn gray under weak oxidation, but it does not change to black.
  • the working gas 4 to be introduced into the thermal spray gun 2 installed in the decompression vessel 1 can be mixed with a highly reducing hydrogen gas and introduced.
  • the present invention is characterized in that a mixed gas to which hydrogen gas, which is a reducing gas, is added is used as the plasma generating working gas supplied into the thermal spray gun 2.
  • a mixed gas to which hydrogen gas, which is a reducing gas, is added is used as the plasma generating working gas supplied into the thermal spray gun 2.
  • the thermal spray material introduced into this thermal spray gun 2 (white Y 2 0 3 powder) 5 is reduced.
  • the reduced sprayed material rides on the plasma jet 6 and adheres to the substrate surface.
  • Oxide Ittoriumu thermally sprayed coating 7 formed Te this good Unishi will become those results to be reduced during spraying, black ⁇ 2 ⁇ 3 _ ⁇ spray particles are deposited, it become black sprayed coating.
  • the white Sani ⁇ yttrium arm in "Y 2 0 3 j the oxidation Ittoriumu black comprising the composition of the" ⁇ 2 ⁇ 3 _ ⁇ "obtained according to the application of the present invention I decided to call it “oxidized yttrium”.
  • ⁇ 1 2 0 3 exhibits white even if it is formed using a plasma jet heat source containing hydrogen gas, the blackening phenomenon of ⁇ 2 0 3 is considered to be a phenomenon peculiar to the present invention. .
  • the surface to be treated (base) It was found that when the spraying route of sprayed particles toward the material surface is in the atmosphere (acidic atmosphere), the molten particles return to white or gray again when they come into contact with the air. Therefore, in the present invention, control of the spraying atmosphere (the particle flight route) is also important. That is, in the case of atmospheric plasma spraying (the flight route is under the atmosphere) without using the decompression vessel 1, an environmental shut-off device such as an air is not mixed in the plasma jet 6 is installed.
  • a r around Jiwetto, H e, and flow of the inert gas or less reactive gas such as N 2 is necessary to avoid the direct contact between the spray particles and air to fly in the molten state is there.
  • the use of a low-pressure plasma spraying apparatus that forms a film in a reduced-pressure inert gas atmosphere is advantageous because there is no contact between particles and air (exactly oxygen) during spraying.
  • the amount of H 2 gas added to the plasma generating gas such as Ar or He is preferably set to the following mixing ratio in terms of volume ratio. That is,
  • the mixing ratio of H 2 is less than 10 Zl, preferably 5 Zl, the yttrium oxide is not sufficiently blackened or the color quality is not constant.
  • mixing Ar gas more than 3Z1 will saturate the blackening effect.
  • the object of the invention can be achieved by maintaining the ratio of H 2 gas to the amount of Ar gas alone.
  • the ratio is preferably about 5Zl to 3Zl.
  • Figure 2 (a) ⁇ U) are those according to black oxide I Ttoriumu thermal spray coating and the prior art which is formed by a technique according to the present invention showing the appearance of the Y 2 0 3 film.
  • an Ar / H 2 mixed gas suitable for the present invention is used as a working gas for plasma jet generation, and the thermal spraying environment is also controlled to a non-acidic atmosphere, so that the oxygen partial pressure is reduced.
  • a black oxide yttrium spray coating can be formed by thermal spraying in an atmosphere with little.
  • the particle size of the powder should be in the range of 5-80 ⁇ m, especially 5-50 / im Are preferred. The reason is that powders having a particle size larger than 80 ⁇ often contain unmelted particles that do not completely melt in the thermal spray heat source. The inside of the unmelted particles is not affected by the plasma heat source containing hydrogen gas, and therefore, it is often observed that the white state is maintained, which causes a deterioration in the film quality. On the other hand, particles of 5 m or less completely melt to the inside and turn black, but the feed rate from the powder feeder to the spray gun becomes unstable, or it becomes molten and sublimated in a plasma heat source. This is because it does not become a strength factor for constituting the coating, so that the cross-sectional structure of the thermal spray coating becomes uneven and uneven, and the strength of the coating may deteriorate.
  • Purity Y 2 0 3 powder used in the present invention impurities (e.g. F e, M g, C r , A l, N i, S i , etc.) moderate with less recent inventors As a result of a survey of the commercial products, all of them were 9 8 (mass%) or more, and even if these commercial products were used, they could be formed as a black acid yttrium sprayed coating, so there is no particular limitation.
  • impurities e.g. F e, M g, C r , A l, N i, S i , etc.
  • the target for forming the black spray coating of the above-mentioned yttrium oxide that is, the base material is A 1 and its alloy, stainless steel, Ti and its alloy, ceramic sintered body (for example, oxide, nitriding) Any material such as quartz, glass, plastics, etc. can be used, as well as materials, borides, silicides, and mixtures thereof. In addition, these materials can be used with various vapor-deposited films or adhesive films, and they may be formed directly on the surface of these materials or via an undercoat or intermediate layer. Les.
  • the material for the undercoat includes Ni and its alloys, Cr and its alloys, W and its alloys, Mo and its alloys, Ti and Further, it is preferable to use a metal or an alloy selected from one or more selected from Al, its alloys, Al, its alloys, Mg alloys, and the like to a thickness of about 50 to 500 m.
  • the thermal spray coating of the undercoat is thinner than 50 ⁇ , the effect as an undercoat is weak. It's not a good idea, because it leads to an increase in costs.
  • the undercoat it is preferable to use an electric arc spraying method, a flame spraying method, a high-speed frame spraying method, an atmospheric plasma spraying method, a low pressure plasma spraying method, an explosion spraying method, or the like.
  • the black yttrium yttrium spray coating according to the present invention which will be the top coat, is either formed directly on the surface of the base material or is spray-laminated on the undercoat.
  • the undercoat is formed as an intermediate layer between the black yttrium oxide sprayed coating and the base material, and its role is to exert the adhesion strength with the base material —the black color formed as the top coat.
  • Those that maintain good adhesion with the other yttrium oxide are selected.
  • Metal materials are preferred, such as Ni and its alloys, Cr and its alloys, W and its alloys, Mo and its alloys, Ti and its alloys, A1 and its alloys, Mg It is preferable to use one or more metals or alloys selected from alloys and the like so that the thickness is about 50 to 50 / m.
  • a white spray coating of Y 2 0 3 according to the prior art and a prior art are provided on the surface of a quartz glass protective tube with a built-in heating wire.
  • a white Y 2 O 3 thermal spray coating disclosed in No. 3 black by electron beam irradiation and the black thermal spray coating (50 ⁇ mi ⁇ ) of the yttrium oxide of the present invention.
  • the wavelength emitted from the surface of each coating was investigated by passing an electric current through.
  • the Y 2 O 3 white sprayed coating was about 0.2 to 1 m, while the acid Yittrium black sprayed coating was 0.3 to 5 111 for both the electron beam irradiation treatment and the black coating according to the present invention.
  • infrared emission was observed, and a difference in efficiency as a heater was observed.
  • the above two types of acid wet black spray coating (50 ⁇ m thick) are applied to the surface of the halogen lamp (high brightness lamp). While the wavelength ranged from 0.2 to 0.4 ⁇ , the one with a black sprayed coating would be 0.3 to 10 / m, and can be used in the far infrared region. As a result, the improvement in efficiency was revealed. In the white spray coating Y 2 0 3 according to the prior art, or the same as the state with no facilities E of the thermal spray coating, or less was within the range of wavelengths.
  • the black yttrium oxide spray coating formed by applying the method of the present invention not only improves the plasma erosion resistance but also as a heat source for accelerating the etching processing speed as a member for semiconductor processing equipment. It turned out to be useful.
  • the surface of a test piece of SUS 4 10 steel (5 OmmX 5 OmmX 5 mm) was subjected to blast roughening, and the atmospheric pressure was controlled to 50 to 200 h h Pa with Ar gas.
  • Y 2 0 3 was formed to a thickness of 1 50 ⁇ by the reduced pressure plasma spraying method.
  • the effect was examined on the presence or absence of a test piece in which an Ni 1 A 1 alloy undercoat was applied to a thickness of 100 ⁇ by atmospheric plasma spraying.
  • an Ar / H 2 volume ratio of 5Z1 is used as the working gas.
  • an ArZHe ratio of 5Z1 was used.
  • the test piece with the thermal spray coating is the top coat formed by spraying Y 2 O 3 . After examining the appearance color, the following thermal shock test was conducted to examine the peel resistance of the sprayed coating.
  • test pieces (Nos. 1 to 4) formed under the conditions of Ar ZH 2 volume ratio 5/1 as the working gas of the plasma heat source according to the present invention are black, and hydrogen gas is used.
  • Example 2 all the sprayed specimens shown in Example 2 were formed by an atmospheric plasma spraying method, and the thermal resistance test under the same conditions as in Example 2 was used to investigate the peel resistance of the film.
  • Ar / H 2 volume ratio 4/1 is used, and Ar gas is introduced around the spray gun, particularly near the spray gun outlet. A large amount of air was flown to prevent air from entering the plasma jet.
  • Table 2 shows the results. Even if the black oxide yttrium thermal spray coating was formed by the atmospheric spraying method, the white Y 2 by the conventional technology as well as the reduced pressure plasma spraying method of Example 2 was used. As with the O 3 sprayed coating, it was confirmed that excellent peel resistance was maintained.
  • the thermal spraying uses the atmospheric plasma spraying method, and the gas composition for plasma generation is as follows:
  • the technology according to the present invention can be used not only for blackening yttrium oxide but also for other ceramics, for example, blackening technology such as T i 0 2 and T i 0 2 — A 1 2 0 3. It is applied to the formation of liquid crystal and other materials used in fields such as polymer industry and machine industry.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Coating By Spraying Or Casting (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)

Abstract

L'invention porte sur une technologie servant à former un revêtement pulvérisé d'oxyde d'yttrium noir à partir d'un matériau en poudre de pulvérisation Y2O3 blanc. Le procédé consiste à pulvériser par plasma un matériau en poudre Y2O3 blanc au moyen d'un gaz mélangé obtenu par addition d'hydrogène gazeux à un gaz inerte, tel qu'Ar ou He, qui sert de gaz de travail pour générer du plasma/jet et convertir le matériau en particules noires de formule Y2O3-x contenant une partie de l'oxygène de la poudre Y2O3 perdue par la forte action réductrice de l'oxygène atomique comme source de chaleur à plasma. Ainsi, un revêtement pulvérisé d'oxyde d'yttrium noir est formé sur une surface d'un matériau de base.
PCT/JP2008/062366 2007-12-06 2008-07-02 Procédé de formation de revêtement pulvérisé d'oxyde d'yttrium noir et élément comportant un revêtement pulvérisé d'oxyde d'yttrium noir Ceased WO2009072318A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR1020087022813A KR101133002B1 (ko) 2007-12-06 2008-07-02 흑색 산화이트륨 용사 피막의 형성 방법 및 흑색 산화이트륨 용사 피막 피복 부재

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007315877A JP4740932B2 (ja) 2007-12-06 2007-12-06 黒色酸化イットリウム溶射皮膜の形成方法および黒色酸化イットリウム溶射皮膜被覆部材
JP2007-315877 2007-12-06

Publications (1)

Publication Number Publication Date
WO2009072318A1 true WO2009072318A1 (fr) 2009-06-11

Family

ID=40717500

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/062366 Ceased WO2009072318A1 (fr) 2007-12-06 2008-07-02 Procédé de formation de revêtement pulvérisé d'oxyde d'yttrium noir et élément comportant un revêtement pulvérisé d'oxyde d'yttrium noir

Country Status (4)

Country Link
JP (1) JP4740932B2 (fr)
KR (1) KR101133002B1 (fr)
TW (1) TWI385277B (fr)
WO (1) WO2009072318A1 (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199752A1 (fr) * 2014-06-25 2015-12-30 Fm Industries, Inc. Revêtements à émissivité régulée pour composants de chambre à semi-conducteurs
US11376822B2 (en) 2015-11-16 2022-07-05 Coorstek, Inc. Corrosion-resistant components and methods of making

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101236351B1 (ko) 2010-11-30 2013-02-22 (주)제니스월드 엘이디용 유기금속화학증착장비 쿼츠 실링의 코팅방법
CN103074568A (zh) * 2011-10-26 2013-05-01 中国科学院微电子研究所 一种y2o3耐侵蚀陶瓷涂层的制备方法
CN103132002B (zh) * 2011-12-02 2015-04-15 中国科学院微电子研究所 一种黑色y2o3陶瓷涂层的制备方法
CN103132006B (zh) * 2011-12-02 2015-11-11 中国科学院微电子研究所 一种等离子氢处理制备黑色y2o3陶瓷涂层的方法
CN104080940B (zh) 2012-02-03 2016-10-26 东华隆株式会社 白色氟化物喷涂覆膜的黑化方法以及在表面具有黑色层的氟化物喷涂覆膜覆盖部件
JP5623619B1 (ja) * 2013-12-02 2014-11-12 倉敷ボーリング機工株式会社 ドライエッチング用チャンバー内部材の製造方法
KR102536087B1 (ko) * 2017-03-01 2023-05-24 신에쓰 가가꾸 고교 가부시끼가이샤 용사 피막, 용사용 분말, 용사용 분말의 제조 방법, 및 용사 피막의 제조 방법
TWI598466B (zh) * 2017-03-31 2017-09-11 A composition for a melt-blown layer and a sprayed layer
CN109468575A (zh) * 2018-11-29 2019-03-15 沈阳富创精密设备有限公司 一种应用于半导体领域的氧化钇涂层的制备方法
WO2020217466A1 (fr) * 2019-04-26 2020-10-29 株式会社Ｆｕｊｉ Dispositif de traitement au plasma
JP2022115831A (ja) * 2021-01-28 2022-08-09 京セラ株式会社 半導体製造装置用部材

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321760A (ja) * 2003-05-19 2003-11-14 Tocalo Co Ltd プラズマ処理容器内部材およびその製造方法
JP2005256098A (ja) * 2004-03-12 2005-09-22 Tocalo Co Ltd 熱放射性および耐損傷性に優れるｙ２ｏ３溶射皮膜被覆部材およびその製造方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4006596B2 (ja) * 2002-07-19 2007-11-14 信越化学工業株式会社 希土類酸化物溶射部材および溶射用粉
WO2007013184A1 (fr) * 2005-07-29 2007-02-01 Tocalo Co., Ltd. Element enduit d'un film pulverise thermiquement de y2o3 et son procede de fabrication

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003321760A (ja) * 2003-05-19 2003-11-14 Tocalo Co Ltd プラズマ処理容器内部材およびその製造方法
JP2005256098A (ja) * 2004-03-12 2005-09-22 Tocalo Co Ltd 熱放射性および耐損傷性に優れるｙ２ｏ３溶射皮膜被覆部材およびその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2015199752A1 (fr) * 2014-06-25 2015-12-30 Fm Industries, Inc. Revêtements à émissivité régulée pour composants de chambre à semi-conducteurs
US9790581B2 (en) 2014-06-25 2017-10-17 Fm Industries, Inc. Emissivity controlled coatings for semiconductor chamber components
US11376822B2 (en) 2015-11-16 2022-07-05 Coorstek, Inc. Corrosion-resistant components and methods of making

Also Published As

Publication number Publication date
JP2009138231A (ja) 2009-06-25
TW200925323A (en) 2009-06-16
KR101133002B1 (ko) 2012-04-10
JP4740932B2 (ja) 2011-08-03
TWI385277B (zh) 2013-02-11
KR20090101408A (ko) 2009-09-28

Similar Documents

Publication Publication Date Title
WO2009072318A1 (fr) Procédé de formation de revêtement pulvérisé d'oxyde d'yttrium noir et élément comportant un revêtement pulvérisé d'oxyde d'yttrium noir
US7494723B2 (en) Y2O3 spray-coated member and production method thereof
JP4603018B2 (ja) 熱放射性および耐損傷性に優れる酸化イットリウム溶射皮膜被覆部材およびその製造方法
JP4051351B2 (ja) 熱放射性および耐損傷性に優れるｙ２ｏ３溶射皮膜被覆部材およびその製造方法
CN107109626B (zh) 用于在部件的表面上形成涂层的装置
JP5001323B2 (ja) 白色酸化イットリウム溶射皮膜表面の改質方法および酸化イットリウム溶射皮膜被覆部材
CN101730757B (zh) 涂覆基材表面的方法和经过涂覆的产品
TW201033407A (en) Thermal spray coatings for semiconductor applications
JP6929716B2 (ja) オキシフッ化イットリウム溶射膜及びその製造方法、並びに溶射部材
JP4372748B2 (ja) 半導体製造装置用部材
JP4555864B2 (ja) 熱放射特性等に優れる溶射皮膜被覆部材およびその製造方法
KR100859672B1 (ko) 용사 코팅 방법
CN104080940B (zh) 白色氟化物喷涂覆膜的黑化方法以及在表面具有黑色层的氟化物喷涂覆膜覆盖部件
JP5526364B2 (ja) 白色酸化イットリウム溶射皮膜表面の改質方法
JP3829935B2 (ja) 高耐電圧性部材
JP5001322B2 (ja) 酸化イットリウム溶射皮膜の黒色表面の白色化方法および白色酸化イットリウム溶射皮膜被覆部材
JPS5827971A (ja) 金属溶射方法
KR100801910B1 (ko) Ｙ２ｏ３ 용사 피막 피복 부재 및 그 제조 방법
JP2000178709A (ja) 耐プラズマエロージョン性に優れる溶射被覆部材およびその製造方法
Mrdak et al. Characterization of vacuum plasma spray VPS-W coating deposited on stainless steel substrates
KR20070087219A (ko) 산화이트륨 용사 피막 피복 부재 및 그 제조 방법
JPH024952A (ja) 通電性に優れるコンダクターロールの製造方法およびコンダクターロール
JP2013181239A (ja) 白色フッ化物溶射皮膜の黒色化方法および表面に黒色層を有するフッ化物溶射皮膜被覆部材
JP2013181238A (ja) 白色フッ化物溶射皮膜の黒色化方法および表面に黒色層を有するフッ化物溶射皮膜被覆部材

Legal Events

Date Code Title Description
WWE Wipo information: entry into national phase

Ref document number: 1020087022813

Country of ref document: KR

121 Ep: the epo has been informed by wipo that ep was designated in this application

Ref document number: 08777975

Country of ref document: EP

Kind code of ref document: A1

NENP Non-entry into the national phase

Ref country code: DE

122 Ep: pct application non-entry in european phase

Ref document number: 08777975

Country of ref document: EP

Kind code of ref document: A1