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WO2009069774A1 - Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas - Google Patents

Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas Download PDF

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Publication number
WO2009069774A1
WO2009069774A1 PCT/JP2008/071705 JP2008071705W WO2009069774A1 WO 2009069774 A1 WO2009069774 A1 WO 2009069774A1 JP 2008071705 W JP2008071705 W JP 2008071705W WO 2009069774 A1 WO2009069774 A1 WO 2009069774A1
Authority
WO
WIPO (PCT)
Prior art keywords
adsorption
desorption
columns
concentration
desorption column
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/071705
Other languages
French (fr)
Japanese (ja)
Inventor
Yoichiro Tabata
Yujiro Okihara
Tetsuya Saitsu
Noriyuki Nakamura
Ryohei Ueda
Koji Ota
Yasuhiro Tanimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Toshiba Mitsubishi Electric Industrial Systems Corp
Original Assignee
Mitsubishi Electric Corp
Toshiba Mitsubishi Electric Industrial Systems Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp, Toshiba Mitsubishi Electric Industrial Systems Corp filed Critical Mitsubishi Electric Corp
Priority to EP08853608A priority Critical patent/EP2236459A4/en
Priority to US12/745,595 priority patent/US8460435B2/en
Priority to KR1020107011294A priority patent/KR101185708B1/en
Priority to CN2008801182635A priority patent/CN101878183B/en
Priority to JP2009543885A priority patent/JP5492566B2/en
Publication of WO2009069774A1 publication Critical patent/WO2009069774A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/10—Preparation of ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0203—Preparation of oxygen from inorganic compounds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2253/00—Adsorbents used in seperation treatment of gases and vapours
    • B01D2253/10—Inorganic adsorbents
    • B01D2253/106—Silica or silicates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2256/00—Main component in the product gas stream after treatment
    • B01D2256/14—Ozone
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/403—Further details for adsorption processes and devices using three beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/404—Further details for adsorption processes and devices using four beds
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2259/00—Type of treatment
    • B01D2259/40—Further details for adsorption processes and devices
    • B01D2259/41—Further details for adsorption processes and devices using plural beds of the same adsorbent in series
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/02—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography
    • B01D53/04—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by adsorption, e.g. preparative gas chromatography with stationary adsorbents
    • B01D53/047—Pressure swing adsorption

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • Inorganic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Analytical Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Oxygen, Ozone, And Oxides In General (AREA)
  • Separation Of Gases By Adsorption (AREA)

Abstract

An ozonized gas having a pressure exceeding atmospheric pressure and having a given concentration is fed to adsorption/desorption columns (4) which have been regulated so as to have a temperature as low as 0°C or below and an elevated pressure and packed with silica gel (6) serving as an adsorbent. The adsorption/desorption columns (4) have been constituted so that three or more of the adsorption/desorption columns (4), i.e., adsorption/desorption columns (4-1), (4-2), and (4-3), are disposed in a serial cycle arrangement to constitute a main adsorption/desorption column group (99), and that an adsorption/desorption column (4-4) is disposed in parallel with the main adsorption/desorption column group (99) to constitute a supplemental adsorption/desorption column (999). During the period when a desorption step is conducted in none of the three columns of the main adsorption/desorption column group (99), ozone is desorbed in the supplemental adsorption/desorption column (999). The apparatus can continuously output high-concentration ozone at a high flow rate. By thus efficiently yielding a high-concentration ozonized gas, the amount of the ozone capable of being output can be increased and the amount of a discharge gas which is not permitted to be output can be reduced. That efficient production enables the apparatus for high-concentration ozone gas production to be compact, satisfactorily operable, and inexpensive.
PCT/JP2008/071705 2007-11-30 2008-11-28 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas Ceased WO2009069774A1 (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
EP08853608A EP2236459A4 (en) 2007-11-30 2008-11-28 DEVICE FOR PREPARING HIGH-CONCENTRATED OZONE GAS AND METHOD FOR PRODUCING HIGHLY CONCENTRATED OZONE GAS
US12/745,595 US8460435B2 (en) 2007-11-30 2008-11-28 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas
KR1020107011294A KR101185708B1 (en) 2007-11-30 2008-11-28 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas
CN2008801182635A CN101878183B (en) 2007-11-30 2008-11-28 Device for generating high-concentration ozone gas and method for generating high-concentration ozone gas
JP2009543885A JP5492566B2 (en) 2007-11-30 2008-11-28 High concentration ozone gas generation apparatus and high concentration ozone gas generation method

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007311121 2007-11-30
JP2007-311121 2007-11-30

Publications (1)

Publication Number Publication Date
WO2009069774A1 true WO2009069774A1 (en) 2009-06-04

Family

ID=40678663

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/071705 Ceased WO2009069774A1 (en) 2007-11-30 2008-11-28 Apparatus for producing high-concentration ozone gas and method of producing high-concentration ozone gas

Country Status (6)

Country Link
US (1) US8460435B2 (en)
EP (1) EP2236459A4 (en)
JP (1) JP5492566B2 (en)
KR (1) KR101185708B1 (en)
CN (1) CN101878183B (en)
WO (1) WO2009069774A1 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013051097A1 (en) * 2011-10-04 2013-04-11 東芝三菱電機産業システム株式会社 Ozone generation unit with less nitrogen added
WO2014092046A1 (en) * 2012-12-14 2014-06-19 インテグリス・インコーポレーテッド Gas purification filter unit
JP2017057128A (en) * 2015-09-18 2017-03-23 岩谷産業株式会社 Ozone gas supply method and ozone gas supply system
JP7146138B1 (en) * 2021-04-01 2022-10-03 三菱電機株式会社 Sterilization device and sterilization method
JP7403592B1 (en) 2022-07-08 2023-12-22 明電ナノプロセス・イノベーション株式会社 Ozone gas supply system

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JP5616591B2 (en) * 2008-06-20 2014-10-29 株式会社日立国際電気 Semiconductor device manufacturing method and substrate processing apparatus
US9155988B2 (en) * 2013-03-14 2015-10-13 Universal Laser Systems, Inc. Multi-stage air filtration systems and associated apparatuses and methods
GB2545759A (en) * 2015-12-21 2017-06-28 Linde Ag Methods for producing ozone
CN108473306B (en) * 2016-01-28 2022-04-01 三菱电机株式会社 Ozone supply device and ozone supply method
JP6632463B2 (en) * 2016-04-28 2020-01-22 岩谷産業株式会社 Ozone gas concentration method and ozone gas concentration device
JP6632464B2 (en) * 2016-04-28 2020-01-22 岩谷産業株式会社 Ozone gas concentration method and ozone gas concentration device
CN105836713A (en) * 2016-06-17 2016-08-10 成都康亚环保科技有限公司 Device for separating ozone and oxygen by adsorption and recycling oxygen
US10058815B2 (en) * 2016-09-08 2018-08-28 Linde Aktiengesellschaft Methods for separating ozone
RU2729067C1 (en) * 2016-12-13 2020-08-04 Линде Акциенгезелльшафт Methods of separating ozone
JP6516941B1 (en) * 2018-06-07 2019-05-22 三菱電機株式会社 Ozone supply apparatus and ozone supply method
US10695710B2 (en) 2018-08-02 2020-06-30 Messer Industries Usa, Inc. Methods for producing ozone and oxygen mixtures
US10730004B2 (en) 2018-08-03 2020-08-04 Messer Industries Usa, Inc. Recovery of oxygen used in ozone production
GB201818896D0 (en) * 2018-11-20 2019-01-02 Gas Recovery And Recycle Ltd Gas recovery method
JP6667730B1 (en) * 2019-03-29 2020-03-18 三菱電機株式会社 Ozone supply device and ozone supply method
WO2020245885A1 (en) * 2019-06-03 2020-12-10 三菱電機株式会社 Ozone supply device and ozone supply method

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JPS63159202A (en) * 1986-12-24 1988-07-02 Mitsubishi Heavy Ind Ltd Low-temperature ozone generation apparatus
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JP2002068712A (en) 2000-09-01 2002-03-08 Iwatani Internatl Corp High concentration ozone gas supply method and apparatus
JP2005347679A (en) 2004-06-07 2005-12-15 Renesas Technology Corp Method for manufacturing nonvolatile semiconductor memory device

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JPS63159202A (en) * 1986-12-24 1988-07-02 Mitsubishi Heavy Ind Ltd Low-temperature ozone generation apparatus
JPH11292514A (en) * 1998-04-03 1999-10-26 Mitsubishi Heavy Ind Ltd Production of high concentration ozone gas and its device
JPH11335102A (en) 1998-05-22 1999-12-07 Iwatani Internatl Corp High-concentration ozone continuous generation method and apparatus
JP2000072408A (en) * 1998-08-19 2000-03-07 Ishikawajima Harima Heavy Ind Co Ltd Ozone adsorption / desorption device
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JP2001180915A (en) 1999-12-20 2001-07-03 Sumitomo Precision Prod Co Ltd Ozone generation equipment and its operation method
JP2002068712A (en) 2000-09-01 2002-03-08 Iwatani Internatl Corp High concentration ozone gas supply method and apparatus
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Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9295967B2 (en) 2011-10-04 2016-03-29 Toshiba Mitsubishi-Electric Industrial Systems Corporation Nitrogen-free ozone generating unit
CN103857620A (en) * 2011-10-04 2014-06-11 东芝三菱电机产业系统株式会社 Ozone generation unit with less nitrogen added
WO2013051097A1 (en) * 2011-10-04 2013-04-11 東芝三菱電機産業システム株式会社 Ozone generation unit with less nitrogen added
CN103857620B (en) * 2011-10-04 2016-01-13 东芝三菱电机产业系统株式会社 Do not add the ozone generation unit of nitrogen
US9764268B2 (en) 2012-12-14 2017-09-19 Entegris, Inc. Gas purification filter unit
WO2014092046A1 (en) * 2012-12-14 2014-06-19 インテグリス・インコーポレーテッド Gas purification filter unit
JPWO2014092046A1 (en) * 2012-12-14 2017-01-12 インテグリス・インコーポレーテッド Gas purification filter unit
KR102591018B1 (en) 2015-09-18 2023-10-18 이와타니 산교 가부시키가이샤 Method for supplying ozone gas, and supply system for ozone gas
JP2017057128A (en) * 2015-09-18 2017-03-23 岩谷産業株式会社 Ozone gas supply method and ozone gas supply system
WO2017047201A1 (en) * 2015-09-18 2017-03-23 岩谷産業株式会社 Method for supplying ozone gas and system for supplying ozone gas
KR20180056691A (en) * 2015-09-18 2018-05-29 이와타니 산교 가부시키가이샤 A method for supplying ozone gas, and a system for supplying ozone gas
US10597296B2 (en) 2015-09-18 2020-03-24 Iwatani Corporation Method for supplying ozone gas and system for supplying ozone gas
JP7146138B1 (en) * 2021-04-01 2022-10-03 三菱電機株式会社 Sterilization device and sterilization method
WO2022208842A1 (en) * 2021-04-01 2022-10-06 三菱電機株式会社 Sterilization device and sterilization method
JP7403592B1 (en) 2022-07-08 2023-12-22 明電ナノプロセス・イノベーション株式会社 Ozone gas supply system
WO2024009699A1 (en) * 2022-07-08 2024-01-11 明電ナノプロセス・イノベーション株式会社 Ozone gas supply system
JP2024008579A (en) * 2022-07-08 2024-01-19 明電ナノプロセス・イノベーション株式会社 Ozone gas supply system
US12442075B2 (en) 2022-07-08 2025-10-14 Meiden Nanoprocess Innovations, Inc. Ozone gas supply system

Also Published As

Publication number Publication date
US8460435B2 (en) 2013-06-11
CN101878183A (en) 2010-11-03
US20110052483A1 (en) 2011-03-03
EP2236459A1 (en) 2010-10-06
JPWO2009069774A1 (en) 2011-04-21
CN101878183B (en) 2013-12-25
KR20100087178A (en) 2010-08-03
KR101185708B1 (en) 2012-09-24
JP5492566B2 (en) 2014-05-14
EP2236459A4 (en) 2012-09-12

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