WO2009066996A1 - Device for microfludic application - Google Patents
Device for microfludic application Download PDFInfo
- Publication number
- WO2009066996A1 WO2009066996A1 PCT/MY2008/000162 MY2008000162W WO2009066996A1 WO 2009066996 A1 WO2009066996 A1 WO 2009066996A1 MY 2008000162 W MY2008000162 W MY 2008000162W WO 2009066996 A1 WO2009066996 A1 WO 2009066996A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- microfludic
- plates
- applications according
- channels
- diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F31/00—Mixers with shaking, oscillating, or vibrating mechanisms
- B01F31/29—Mixing by periodically deforming flexible tubular members through which the material is flowing
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F33/00—Other mixers; Mixing plants; Combinations of mixers
- B01F33/30—Micromixers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01L—CHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
- B01L2400/00—Moving or stopping fluids
- B01L2400/04—Moving fluids with specific forces or mechanical means
- B01L2400/0403—Moving fluids with specific forces or mechanical means specific forces
- B01L2400/0415—Moving fluids with specific forces or mechanical means specific forces electrical forces, e.g. electrokinetic
Definitions
- the present invention relates to an integration of mechanical elements, actuators and electronics on a silicon substrate through microfabri cation technology, particularly it relates to micro-electro-mechanical device for microfludic applications.
- Micro-Electro-Mechanical Systems is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology.
- the micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form micro-electro-mechanical devices such as micropump, microvalve, micromixer and microsplitter.
- MEMS devices are extremely small.
- the building block in creating the devices is the ability to deposit thin films of material which may have the thickness anywhere between few nanometer to about 100 micrometer.
- a micro-electro-mechanical device is designed with dedicated channels to perform a dedicated function when electronically or electrostatically actuated.
- a unit of micropump has one inlet channel and one outlet channel to perform a pumping action.
- a separate unit of micromixer is needed because the action requires a device with at least two inlet channels to allow two different sources of microfludic to enter. Different channel configuration and different actuation steps create different microfludic flow and control.
- a separate unit of device is needed to perform a particular function and multiple applications such as mixing, splitting and pumping could not be carried out in a unit of device.
- a single electromechanical device which integrates the function of micropump, microvalve, microsplitter and micromixer by integrating the microstructure of the devices into a single microstructure.
- a single electromechanical device which performs the function of micropump, microvalve, microsplitter and micromixer in response to actuation process by means of electrostatic force.
- Figure 1 illustrates the microstructure model of a micro-electro-mechanical device.
- Figure 2 illustrates the configuration for microfludic flow and control in a micro- electro-mechanical device for multiple microfludic applications.
- the microstructure model of a micro-electromechanical device is illustrated.
- the working principle of the micro-electro-mechanical device is based on the principles of electro-mechanical coupling effects between two electrostatic charged plates.
- the microstructure comprises of plates or silicon substrate which is parallel and adjacent to each other. These plates are formed from polysilicon substrate whereby the top plate (102) comprising a deformable member which acts as diaphragm.
- the bottom plate (103) is a stationary member in which both of its ends are fixed to anchors (101) that prevent the bottom plate from any electrostatic movement induced by electrostatic forces.
- the micro-electro-mechanical device comprises of inlet and output channels (105, 106) for microfludic to enter and leave the device respectively.
- inlet and output channels (105, 106) By opening and/or closing the inlet and outlet channels (105, 106) selectively and with discrete or fluctuate electrostatic f forces, the micro-electro-mechanical device can be applied as micropump, microvalve, micromixer, or microsplitter.
- the microfludic flow and control for this multiple applications are illustrated in Figure 2.
- the plates (102, 103) work as electrode to receive negative or positive charges when voltage is supplied.
- the top plate (102) is anode and the bottom plate (103) is cathode.
- electrostatic potential difference exists between the plates (102, 103). Consequently, a uniform electrostatic field will appear in the vacuum region between the plates (102, 103).
- the electrostatic field will generate electrostatic forces which are attracted to charges (i.e. positive or negative charges) developed in the plates (12, 103).
- the attraction of electrostatic forces towards the charged plates will cause the diaphragm (209) to deform generating pumping action as such microfludic is squeezed out of the device.
- the microstructure of the micro-electro-mechanical device comprising of a plurality of input channels (202, 204), a plurality of output channel (202), voltage supply (205), and diaphragm (209).
- at least one inlet channel and one output channel need to be closed.
- the second inlet channel (202) and the second outlet channel (208) are closed.
- the device needs to be actuated with alternating current (AC) with fluctuating electrostatic force.
- AC alternating current
- an outlet channel need to be closed.
- the second outlet channel is closed (208) while both inlet channels (202,204) are left opened.
- Microfludic will enter both inlet channels (202,204) and leave the device at the first outlet channel (206).
- the first or second inlet channel is closed (202).
- Microsplitter acts as separator of microfludic wherein microfludic that enter the first inlet channel (202) will leave the microfludic at two separate outlet channels (206,208).
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Abstract
Electrostatically actuated Micro-Electro-mechanical device comprising a plurality of channels for selective microfludic flow and control. The device is designed to perform multiple microfludic applications such as mixing, pumping, and splitting.
Description
Device for Microfludic Application
Field of the Invention
The present invention relates to an integration of mechanical elements, actuators and electronics on a silicon substrate through microfabri cation technology, particularly it relates to micro-electro-mechanical device for microfludic applications.
Background of the Invention
Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators and electronics on a common silicon substrate through microfabrication technology. The micromechanical components are fabricated using compatible micromachining processes that selectively etch away parts of the silicon wafer or add new structural layers to form micro-electro-mechanical devices such as micropump, microvalve, micromixer and microsplitter.
MEMS devices are extremely small. The building block in creating the devices is the ability to deposit thin films of material which may have the thickness anywhere between few nanometer to about 100 micrometer. Typically, a micro-electro-mechanical device is designed with dedicated channels to perform a dedicated function when electronically or electrostatically actuated. For instance, a unit of micropump has one inlet channel and one outlet channel to perform a pumping action. For blending or mixing action, a separate unit of micromixer is needed because the action requires a device with at least two inlet channels to allow two different sources of microfludic to enter. Different channel configuration and different actuation steps create different microfludic flow and control. A separate unit of device is needed to perform a particular function and
multiple applications such as mixing, splitting and pumping could not be carried out in a unit of device.
Therefore, it is an object of the present invention to overcome the above- mentioned limitation and disadvantage by providing a unit of micro-electromechanical device for performing multiple microfludic applications with selective microfludic flow and control.
Summary of the Invention
According to the first aspect of the present invention, there is provided a single electromechanical device which integrates the function of micropump, microvalve, microsplitter and micromixer by integrating the microstructure of the devices into a single microstructure.
According to the second aspect of the present invention, there is provided a single electromechanical device which performs the function of micropump, microvalve, microsplitter and micromixer in response to actuation process by means of electrostatic force.
Brief Description of the Drawings
The above description of the present invention is further described by way of example and with reference to the accompanying drawings in which:
Figure 1 illustrates the microstructure model of a micro-electro-mechanical device.
Figure 2 illustrates the configuration for microfludic flow and control in a micro- electro-mechanical device for multiple microfludic applications.
Detailed Description of the Present Invention
The present invention will now be described more specifically with reference to the following embodiments. It is to be noted that the following descriptions of preferred embodiments of the present invention are presented herein for purpose of illustration and description only.
Referring to Figure 1, the microstructure model of a micro-electromechanical device according to the present invention is illustrated. The working principle of the micro-electro-mechanical device is based on the principles of electro-mechanical coupling effects between two electrostatic charged plates. The microstructure comprises of plates or silicon substrate which is parallel and adjacent to each other. These plates are formed from polysilicon substrate whereby the top plate (102) comprising a deformable member which acts as diaphragm. The bottom plate (103) is a stationary member in which both of its ends are fixed to anchors (101) that prevent the bottom plate from any electrostatic movement induced by electrostatic forces.
Further, as illustrated in Figure 1, the micro-electro-mechanical device comprises of inlet and output channels (105, 106) for microfludic to enter and leave the device respectively. By opening and/or closing the inlet and outlet channels (105, 106) selectively and with discrete or fluctuate electrostatic f forces, the micro-electro-mechanical device can be applied as micropump, microvalve, micromixer, or microsplitter. The microfludic flow and control for this multiple applications are illustrated in Figure 2.
The plates (102, 103) work as electrode to receive negative or positive charges when voltage is supplied. According to the present invention, the top plate (102) is anode and the bottom plate (103) is cathode. When voltage is supplied to the plates (102, 103) , electrostatic potential difference exists between the plates (102, 103). Consequently, a uniform electrostatic field will appear in the vacuum region between the plates (102, 103). The electrostatic field will generate electrostatic forces which are attracted to charges (i.e. positive or negative charges) developed in the plates (12, 103).
The attraction of electrostatic forces towards the charged plates will cause the diaphragm (209) to deform generating pumping action as such microfludic is squeezed out of the device. By supplying different form of current
(205), whether alternating current or direct current, the specific function of the micro-electro device can be switched on/off and controlled.
As shown in Figure 2, the microstructure of the micro-electro-mechanical device comprising of a plurality of input channels (202, 204), a plurality of output channel (202), voltage supply (205), and diaphragm (209). According to the present invention, for the device to work as micropump or microvalve, at least one inlet channel and one output channel need to be closed. For instance, the second inlet channel (202) and the second outlet channel (208) are closed. Then, to operate as micropump, alternating current (AC) with fluctuating electrostatic forces is supplied while to operate as microvalve, direct current (DC) with discrete electrostatic forces is supplied.
To operate as micromixer or microsplitter, the device needs to be actuated with alternating current (AC) with fluctuating electrostatic force. For micromixing action, an outlet channel need to be closed. For instance, the second outlet channel is closed (208) while both inlet channels (202,204) are left opened. Microfludic will enter both inlet channels (202,204) and leave the device at the first outlet channel (206). To work as microsplitter, the first or second inlet channel is closed (202). Microsplitter acts as separator of microfludic wherein microfludic that enter the first inlet channel (202) will leave the microfludic at two separate outlet channels (206,208).
Claims
1. A device for multiple microfludic applications comprising: at least two plates which are parallel and adjacent to each other; a plurality of channels for selective microfludic flow; and a diaphragm for displacing microfludic; and a voltage supply that is electrostatically actuated to operate as micropump, microvalve, micromixer and microsplitter.
2. A device for multiple microfludic applications according to Claim 1 wherein the plates are comprised of a top plate and a bottom plate formed from a thin film of silicon substrate.
3. A device for multiple microfludic applications according to Claim 1 wherein the plates act as electrode to receive electrostatic charges when actuated from the voltage supply.
4. A device for multiple microfludic applications according to Claim 1 wherein the channels have at least one inlet and one outlet for microfludic to enter and leave the device respectively.
5. A device for multiple microfludic applications according to Claim 1 wherein the displacement of microfludic is caused by to the deformation of the diaphragm when voltage is supplied to the plates.
6. A device for multiple microfludic applications according to Claim 1 wherein the deformation of the diaphragm is actuated by the fluctuation of electrostatic forces that are attracted to charges developed in the plates.
7. A device for multiple microfludic applications according to Claim 1 wherein the voltage supplied to the plates is in the form of alternating current (AC) or direct current (DC). vice for multiple microfludic applications according to Claim 7 wherein the device work as micropump, micromixer and microsplitter with alternating current (AC) and work as microvalve with direct current (DC).
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| MYPI20072070 | 2007-11-22 | ||
| MYPI20072070 | 2007-11-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| WO2009066996A1 true WO2009066996A1 (en) | 2009-05-28 |
Family
ID=40667705
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/MY2008/000162 Ceased WO2009066996A1 (en) | 2007-11-22 | 2008-11-24 | Device for microfludic application |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2009066996A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10898871B2 (en) | 2018-07-02 | 2021-01-26 | International Business Machines Corporation | Micro electrical mechanical system (MEMS) multiplexing mixing |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5529465A (en) * | 1991-09-11 | 1996-06-25 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micro-miniaturized, electrostatically driven diaphragm micropump |
-
2008
- 2008-11-24 WO PCT/MY2008/000162 patent/WO2009066996A1/en not_active Ceased
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5529465A (en) * | 1991-09-11 | 1996-06-25 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Micro-miniaturized, electrostatically driven diaphragm micropump |
Non-Patent Citations (3)
| Title |
|---|
| "Micro Electro Mechanical Systems, 2001. MEMS 2001. The 14th IEEE International Conference. January 2001", article CABUZ, C. ET AL.: "The dual diaphragm pump", pages: 519 - 522 * |
| TEYMOORI, MIR M. ET AL.: "Design and simulation of a novel electrostatic peristaltic micromachined pump for drug delivery applications.", SENSORS AND ACTUATORS A, vol. 117, August 2004 (2004-08-01), pages 222 - 229 * |
| XIE, JUN ET AL.: "Surface micromachined electrostatically actuated micro peristaltic pump.", LAB CHIP., April 2004 (2004-04-01), pages 495 - 501 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10898871B2 (en) | 2018-07-02 | 2021-01-26 | International Business Machines Corporation | Micro electrical mechanical system (MEMS) multiplexing mixing |
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