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WO2009063562A1 - 基板搬送装置 - Google Patents

基板搬送装置 Download PDF

Info

Publication number
WO2009063562A1
WO2009063562A1 PCT/JP2007/072224 JP2007072224W WO2009063562A1 WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1 JP 2007072224 W JP2007072224 W JP 2007072224W WO 2009063562 A1 WO2009063562 A1 WO 2009063562A1
Authority
WO
WIPO (PCT)
Prior art keywords
substrate
abutting
abutting member
transport device
substrate transport
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/072224
Other languages
English (en)
French (fr)
Inventor
Mitsuhiro Noda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hirata Corp
Original Assignee
Hirata Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hirata Corp filed Critical Hirata Corp
Priority to PCT/JP2007/072224 priority Critical patent/WO2009063562A1/ja
Priority to TW097143891A priority patent/TW200942475A/zh
Publication of WO2009063562A1 publication Critical patent/WO2009063562A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/063—Transporting devices for sheet glass
    • B65G49/064—Transporting devices for sheet glass in a horizontal position
    • H10P72/3202—
    • H10P72/3212—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Special Conveying (AREA)
  • Registering Or Overturning Sheets (AREA)

Abstract

　本発明の基板搬送装置は、水平な搬送軌道上で基板を搬送する搬送手段と、搬送中の前記基板の端縁に当接して前記基板の位置決めを行う当接部材と、前記当接部材が前記搬送軌道上に位置した当接位置と、前記当接部材が前記搬送軌道上に位置しない待機位置との間で前記当接部材を移動する駆動手段と、を備える。前記駆動手段は、前記基板の前記端縁から水平方向に離れるように、前記当接部材を前記当接位置から前記待機位置へ移動する。
PCT/JP2007/072224 2007-11-15 2007-11-15 基板搬送装置 Ceased WO2009063562A1 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
PCT/JP2007/072224 WO2009063562A1 (ja) 2007-11-15 2007-11-15 基板搬送装置
TW097143891A TW200942475A (en) 2007-11-15 2008-11-13 Substrate transport device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/072224 WO2009063562A1 (ja) 2007-11-15 2007-11-15 基板搬送装置

Publications (1)

Publication Number Publication Date
WO2009063562A1 true WO2009063562A1 (ja) 2009-05-22

Family

ID=40638418

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/072224 Ceased WO2009063562A1 (ja) 2007-11-15 2007-11-15 基板搬送装置

Country Status (2)

Country Link
TW (1) TW200942475A (ja)
WO (1) WO2009063562A1 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011175016A (ja) * 2010-02-23 2011-09-08 Hitachi Plant Technologies Ltd 液晶基板貼合システム
JP2013257594A (ja) * 2013-08-30 2013-12-26 Hitachi Ltd 液晶基板貼合システム
JP2014225711A (ja) * 2014-09-10 2014-12-04 芝浦メカトロニクス株式会社 基板検出装置および基板処理装置
EP3254997A1 (de) * 2016-06-06 2017-12-13 ALTRATEC Automation GmbH Vorrichtung zum stoppen eines fördergutes auf einem förderer
CN108735642A (zh) * 2018-07-27 2018-11-02 盐城阿特斯协鑫阳光电力科技有限公司 一种硅片传输装置、硅片传输系统及硅片传输方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6033593B2 (ja) * 2012-07-18 2016-11-30 東レエンジニアリング株式会社 基板搬送装置
JP6629876B2 (ja) * 2015-10-27 2020-01-15 平田機工株式会社 移送ユニット、移載装置及び移載方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108931A (ja) * 1994-10-12 1996-04-30 Murata Mach Ltd ストッパ装置
JP2005286189A (ja) * 2004-03-30 2005-10-13 Anritsu Corp 基板搬送用位置決め装置
WO2006137249A1 (ja) * 2005-06-22 2006-12-28 Hirata Corporation ワーク搬送システム

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH08108931A (ja) * 1994-10-12 1996-04-30 Murata Mach Ltd ストッパ装置
JP2005286189A (ja) * 2004-03-30 2005-10-13 Anritsu Corp 基板搬送用位置決め装置
WO2006137249A1 (ja) * 2005-06-22 2006-12-28 Hirata Corporation ワーク搬送システム

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011175016A (ja) * 2010-02-23 2011-09-08 Hitachi Plant Technologies Ltd 液晶基板貼合システム
JP2013257594A (ja) * 2013-08-30 2013-12-26 Hitachi Ltd 液晶基板貼合システム
JP2014225711A (ja) * 2014-09-10 2014-12-04 芝浦メカトロニクス株式会社 基板検出装置および基板処理装置
EP3254997A1 (de) * 2016-06-06 2017-12-13 ALTRATEC Automation GmbH Vorrichtung zum stoppen eines fördergutes auf einem förderer
CN108735642A (zh) * 2018-07-27 2018-11-02 盐城阿特斯协鑫阳光电力科技有限公司 一种硅片传输装置、硅片传输系统及硅片传输方法

Also Published As

Publication number Publication date
TW200942475A (en) 2009-10-16

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