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WO2009060875A1 - ガラス板の製造方法 - Google Patents

ガラス板の製造方法 Download PDF

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Publication number
WO2009060875A1
WO2009060875A1 PCT/JP2008/070142 JP2008070142W WO2009060875A1 WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1 JP 2008070142 W JP2008070142 W JP 2008070142W WO 2009060875 A1 WO2009060875 A1 WO 2009060875A1
Authority
WO
WIPO (PCT)
Prior art keywords
glass plate
glass
bubbles
manufacturing
plate manufacturing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/070142
Other languages
English (en)
French (fr)
Inventor
Motoichi Iga
Yutaka Kuroiwa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AGC Inc
Original Assignee
Asahi Glass Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Glass Co Ltd filed Critical Asahi Glass Co Ltd
Priority to JP2009540069A priority Critical patent/JP5347969B2/ja
Priority to KR1020107010093A priority patent/KR101271292B1/ko
Priority to CN200880115288XA priority patent/CN101855182B/zh
Publication of WO2009060875A1 publication Critical patent/WO2009060875A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/02—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a discontinuous way
    • C03B29/025—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B29/00—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins
    • C03B29/04—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way
    • C03B29/06—Reheating glass products for softening or fusing their surfaces; Fire-polishing; Fusing of margins in a continuous way with horizontal displacement of the products
    • C03B29/08—Glass sheets
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/0005—Other surface treatment of glass not in the form of fibres or filaments by irradiation
    • C03C23/0025—Other surface treatment of glass not in the form of fibres or filaments by irradiation by a laser beam
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C23/00—Other surface treatment of glass not in the form of fibres or filaments
    • C03C23/007—Other surface treatment of glass not in the form of fibres or filaments by thermal treatment
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/60—Substrates
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70791—Large workpieces, e.g. glass substrates for flat panel displays or solar panels

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Thermal Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Optics & Photonics (AREA)
  • Sustainable Development (AREA)
  • Liquid Crystal (AREA)
  • Re-Forming, After-Treatment, Cutting And Transporting Of Glass Products (AREA)
  • Surface Treatment Of Glass (AREA)
  • Laser Beam Processing (AREA)

Abstract

　本発明は、レーザ光線照射によるガラス板の表面における局所的な隆起形状の発生、ガラス板の内部での局所的な残留応力や複屈折性の発現等を生じることなしに、ディスプレイ基板用ガラス板、特にフラットパネルディスプレイ基板用ガラス板、若しくは、フォトマスク用のガラス板としての使用上問題となる泡が存在しないガラス板を製造することができるガラス板の製造方法を提供する。本発明は、泡を含むガラス板（またはガラス板製造工程におけるガラスリボン）をそのガラスの粘度が１０7～１０14.5ｄＰａ・ｓとなる温度下において、前記ガラス板（またはガラスリボン）に対する吸収率が３０％以上となる波長のレーザ光線を前記ガラス板（またはガラスリボン）中の泡に照射して該泡を縮小ないし消失させることを特徴とするガラス板の製造方法に関する。
PCT/JP2008/070142 2007-11-08 2008-11-05 ガラス板の製造方法 Ceased WO2009060875A1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2009540069A JP5347969B2 (ja) 2007-11-08 2008-11-05 ガラス板の製造方法
KR1020107010093A KR101271292B1 (ko) 2007-11-08 2008-11-05 유리판의 제조 방법
CN200880115288XA CN101855182B (zh) 2007-11-08 2008-11-05 玻璃板制造方法

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007290652 2007-11-08
JP2007-290652 2007-11-08

Publications (1)

Publication Number Publication Date
WO2009060875A1 true WO2009060875A1 (ja) 2009-05-14

Family

ID=40625763

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/070142 Ceased WO2009060875A1 (ja) 2007-11-08 2008-11-05 ガラス板の製造方法

Country Status (5)

Country Link
JP (1) JP5347969B2 (ja)
KR (1) KR101271292B1 (ja)
CN (1) CN101855182B (ja)
TW (1) TWI400202B (ja)
WO (1) WO2009060875A1 (ja)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (ja) * 2009-11-24 2011-06-03 旭硝子株式会社 積層体の製造方法
JP2015061809A (ja) * 2013-08-20 2015-04-02 日本電気硝子株式会社 繊維状ガラス組成物の製造方法、繊維状ガラス組成物の製造装置、繊維状ガラス組成物、およびガラス素材
JP2016011219A (ja) * 2014-06-27 2016-01-21 旭硝子株式会社 ガラス基板の切断方法
CN112279499A (zh) * 2020-10-22 2021-01-29 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
WO2023096759A1 (en) * 2021-11-23 2023-06-01 Corning Incorporated Systems and methods for glass streak improvement via high resolution heating
WO2024129476A1 (en) * 2022-12-15 2024-06-20 Corning Incorporated Methods for manufacturing a glass ribbon
EP4534493A1 (en) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Method for producing a temperature-controlling hollow structure in a substrate using a processing light beam

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012077542A1 (ja) * 2010-12-09 2012-06-14 旭硝子株式会社 ガラス基板
JP6439723B2 (ja) * 2016-03-09 2018-12-19 信越化学工業株式会社 合成石英ガラス基板の製造方法
CN110491993B (zh) * 2019-07-24 2022-06-10 武汉华星光电半导体显示技术有限公司 一种pi基板的制备方法及其显示装置
TWI881138B (zh) * 2020-06-19 2025-04-21 美商康寧公司 製造玻璃帶的方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (ja) * 1992-06-30 1994-01-25 Sharp Corp 透明板表面の欠陥修正方法
JP2003012346A (ja) * 2001-06-27 2003-01-15 Central Glass Co Ltd 板ガラスの着色方法
JP2004035333A (ja) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology ガラス材料の加工方法
WO2006112415A1 (ja) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited ガラス板の内部に存在する泡の径を縮小する方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0616440A (ja) * 1992-06-30 1994-01-25 Sharp Corp 透明板表面の欠陥修正方法
JP2003012346A (ja) * 2001-06-27 2003-01-15 Central Glass Co Ltd 板ガラスの着色方法
JP2004035333A (ja) * 2002-07-04 2004-02-05 National Institute Of Advanced Industrial & Technology ガラス材料の加工方法
WO2006112415A1 (ja) * 2005-04-15 2006-10-26 Asahi Glass Company, Limited ガラス板の内部に存在する泡の径を縮小する方法

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011065336A1 (ja) * 2009-11-24 2011-06-03 旭硝子株式会社 積層体の製造方法
CN102639327A (zh) * 2009-11-24 2012-08-15 旭硝子株式会社 层叠体的制造方法
JP2015061809A (ja) * 2013-08-20 2015-04-02 日本電気硝子株式会社 繊維状ガラス組成物の製造方法、繊維状ガラス組成物の製造装置、繊維状ガラス組成物、およびガラス素材
JP2016011219A (ja) * 2014-06-27 2016-01-21 旭硝子株式会社 ガラス基板の切断方法
CN112279499A (zh) * 2020-10-22 2021-01-29 科立视材料科技有限公司 一种用于控制玻璃带应力的方法和装置
WO2023096759A1 (en) * 2021-11-23 2023-06-01 Corning Incorporated Systems and methods for glass streak improvement via high resolution heating
WO2024129476A1 (en) * 2022-12-15 2024-06-20 Corning Incorporated Methods for manufacturing a glass ribbon
EP4534493A1 (en) * 2023-06-14 2025-04-09 Carl Zeiss SMT GmbH Method for producing a temperature-controlling hollow structure in a substrate using a processing light beam

Also Published As

Publication number Publication date
JPWO2009060875A1 (ja) 2011-03-24
KR101271292B1 (ko) 2013-06-04
KR20100086471A (ko) 2010-07-30
TW200927682A (en) 2009-07-01
CN101855182A (zh) 2010-10-06
CN101855182B (zh) 2012-12-05
TWI400202B (zh) 2013-07-01
JP5347969B2 (ja) 2013-11-20

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