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WO2009050932A1 - 弾性表面波共振子及びラダー型フィルタ - Google Patents

弾性表面波共振子及びラダー型フィルタ Download PDF

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Publication number
WO2009050932A1
WO2009050932A1 PCT/JP2008/063882 JP2008063882W WO2009050932A1 WO 2009050932 A1 WO2009050932 A1 WO 2009050932A1 JP 2008063882 W JP2008063882 W JP 2008063882W WO 2009050932 A1 WO2009050932 A1 WO 2009050932A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface acoustic
wave resonator
acoustic wave
sloped
bas bar
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/063882
Other languages
English (en)
French (fr)
Inventor
Nobuhira Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009537976A priority Critical patent/JP4831235B2/ja
Priority to CN2008801108143A priority patent/CN101821944B/zh
Priority to EP08792095A priority patent/EP2202882A4/en
Publication of WO2009050932A1 publication Critical patent/WO2009050932A1/ja
Priority to US12/749,626 priority patent/US7915976B2/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/02535Details of surface acoustic wave devices
    • H03H9/02543Characteristics of substrate, e.g. cutting angles
    • H03H9/02574Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14517Means for weighting
    • H03H9/1452Means for weighting by finger overlap length, apodisation
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/125Driving means, e.g. electrodes, coils
    • H03H9/145Driving means, e.g. electrodes, coils for networks using surface acoustic waves
    • H03H9/14544Transducers of particular shape or position
    • H03H9/14573Arrow type transducers
    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/46Filters
    • H03H9/64Filters using surface acoustic waves
    • H03H9/6423Means for obtaining a particular transfer characteristic
    • H03H9/6433Coupled resonator filters

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

 反共振周波数におけるインピーダンスを十分に高くすることができ、ラダー型フィルタを構成した場合のフィルタ特性の改善を図り得る弾性表面波共振子を提供する。  弾性表面波伝搬方向外側にいくに連れて交叉幅が減少するようにIDT電極3が交叉幅重み付けされており、第1のバスバー11の内側の辺11aが、第1のバスバー11側の包絡線部分B1に対して一定の距離を隔てて配置されるように傾斜されている傾斜部分11a1,11a2を有し、第2のバスバーの内側の辺12aが、第2のバスバー12側の包絡線部分B2に一定の距離を隔てて配置される傾斜部分12a1,12a2を有し、少なくとも1つの電極指13,15の先端から弾性表面波伝搬方向に延びる直線が、第1または第2のバスバーの辺11a,12aに至るまでに交わる電極指及びダミー電極の総和をNとしたときに、Nが11以上とされている、弾性表面波共振子1。
PCT/JP2008/063882 2007-10-18 2008-08-01 弾性表面波共振子及びラダー型フィルタ Ceased WO2009050932A1 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2009537976A JP4831235B2 (ja) 2007-10-18 2008-08-01 弾性表面波共振子及びラダー型フィルタ
CN2008801108143A CN101821944B (zh) 2007-10-18 2008-08-01 弹性表面波谐振器以及梯型滤波器
EP08792095A EP2202882A4 (en) 2007-10-18 2008-08-01 ACOUSTIC SURFACE WAVE RESONATOR AND SCALE TYPE FILTER
US12/749,626 US7915976B2 (en) 2007-10-18 2010-03-30 Surface acoustic wave resonator and ladder-type filter

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007271606 2007-10-18
JP2007-271606 2007-10-18

Related Child Applications (1)

Application Number Title Priority Date Filing Date
US12/749,626 Continuation US7915976B2 (en) 2007-10-18 2010-03-30 Surface acoustic wave resonator and ladder-type filter

Publications (1)

Publication Number Publication Date
WO2009050932A1 true WO2009050932A1 (ja) 2009-04-23

Family

ID=40567210

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/063882 Ceased WO2009050932A1 (ja) 2007-10-18 2008-08-01 弾性表面波共振子及びラダー型フィルタ

Country Status (5)

Country Link
US (1) US7915976B2 (ja)
EP (1) EP2202882A4 (ja)
JP (1) JP4831235B2 (ja)
CN (1) CN101821944B (ja)
WO (1) WO2009050932A1 (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011135469A (ja) * 2009-12-25 2011-07-07 Murata Mfg Co Ltd 弾性波装置
WO2011111743A1 (ja) * 2010-03-12 2011-09-15 株式会社村田製作所 弾性波共振子及びラダー型フィルタ
US20120025931A1 (en) * 2009-04-07 2012-02-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter
WO2015098756A1 (ja) * 2013-12-26 2015-07-02 株式会社村田製作所 弾性波装置及びフィルタ装置

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102918768B (zh) * 2010-06-22 2015-03-25 株式会社村田制作所 梯型弹性波滤波器装置以及分波器
CN103384961B (zh) * 2011-03-28 2016-05-18 京瓷株式会社 弹性波元件以及使用其的弹性波装置
JP5931868B2 (ja) * 2011-06-28 2016-06-08 京セラ株式会社 弾性波素子およびそれを用いた弾性波装置
JP5965200B2 (ja) * 2012-04-18 2016-08-03 日本電波工業株式会社 弾性波フィルタ
JP7411334B2 (ja) * 2019-03-20 2024-01-11 太陽誘電株式会社 弾性波共振器
WO2021246447A1 (ja) * 2020-06-04 2021-12-09 株式会社村田製作所 弾性波装置
CN114268294B (zh) * 2022-03-03 2022-06-17 深圳新声半导体有限公司 包含混合加权型反射栅的saw器件及混合加权型反射栅
CN115208348B (zh) * 2022-07-25 2025-10-31 天通瑞宏科技有限公司 一种声表面波谐振器及其制作方法和滤波器
CN116111975B (zh) * 2023-01-16 2025-09-19 中国科学技术大学 一种伪模态抑制型的高频声波谐振器
CN116032238A (zh) * 2023-02-13 2023-04-28 成都频岢微电子有限公司 一种叉指换能器及蜂窝状结构声表面波滤波器
CN117526898A (zh) * 2024-01-04 2024-02-06 成都频岢微电子有限公司 一种声表面波滤波器和滤波元件
CN118971835B (zh) * 2024-08-29 2025-12-26 浙江星曜半导体有限公司 一种声表面波谐振器、滤波器以及电子设备

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000286663A (ja) 1999-01-27 2000-10-13 Hitachi Ltd 弾性表面波素子
JP2001298348A (ja) * 2000-02-07 2001-10-26 Murata Mfg Co Ltd 弾性表面波フィルタ
JP2002084162A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 弾性表面波装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4205285A (en) * 1978-11-03 1980-05-27 Gte Laboratories Incorporated Acoustic surface wave device
US4472694A (en) * 1982-09-07 1984-09-18 Gte Laboratories Incorporated Acoustic surface wave device
JP3614234B2 (ja) * 1996-03-14 2005-01-26 沖電気工業株式会社 共振器型弾性表面波フィルタ
US6346761B1 (en) * 1999-01-27 2002-02-12 Hitachi Denshi Kabushiki Kaisha Surface acoustic wave device capable of suppressing spurious response due to non-harmonic higher-order modes
JP2001257554A (ja) * 2000-01-07 2001-09-21 Tdk Corp 弾性表面波装置
JP3391346B2 (ja) * 2000-04-18 2003-03-31 株式会社村田製作所 縦結合共振子型弾性表面波フィルタ
KR100609219B1 (ko) * 2001-04-09 2006-08-02 가부시키가이샤 무라타 세이사쿠쇼 탄성표면파 장치 및 통신 장치
JP2002314365A (ja) * 2001-04-17 2002-10-25 Hitachi Ltd 所望の比帯域を有する弾性表面波共振子およびその製造方法。
JP3509771B2 (ja) * 2001-04-18 2004-03-22 株式会社村田製作所 弾性表面波フィルタ装置、通信装置
EP1324489A1 (en) * 2001-12-21 2003-07-02 Temex Method for realising surface acoustic wave filter arrangements and filter arrangement obtained in accordance to this method
EP2226935A4 (en) * 2007-12-11 2013-08-21 Murata Manufacturing Co SURFACE WAVING DEVICE AND DUPLEX

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000286663A (ja) 1999-01-27 2000-10-13 Hitachi Ltd 弾性表面波素子
JP2001298348A (ja) * 2000-02-07 2001-10-26 Murata Mfg Co Ltd 弾性表面波フィルタ
JP2002084162A (ja) * 2000-09-06 2002-03-22 Hitachi Ltd 弾性表面波装置

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of EP2202882A4

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120025931A1 (en) * 2009-04-07 2012-02-02 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter
US8421560B2 (en) * 2009-04-07 2013-04-16 Murata Manufacturing Co., Ltd. Boundary acoustic wave resonator and ladder filter
JP2011135469A (ja) * 2009-12-25 2011-07-07 Murata Mfg Co Ltd 弾性波装置
WO2011111743A1 (ja) * 2010-03-12 2011-09-15 株式会社村田製作所 弾性波共振子及びラダー型フィルタ
JP5105026B2 (ja) * 2010-03-12 2012-12-19 株式会社村田製作所 弾性波共振子及びラダー型フィルタ
US8471653B2 (en) 2010-03-12 2013-06-25 Murata Manufacturing Co., Ltd. Elastic wave resonator and ladder filter
WO2015098756A1 (ja) * 2013-12-26 2015-07-02 株式会社村田製作所 弾性波装置及びフィルタ装置
US10447240B2 (en) 2013-12-26 2019-10-15 Murata Manufacturing Co., Ltd. Elastic wave device and filter device

Also Published As

Publication number Publication date
US7915976B2 (en) 2011-03-29
EP2202882A4 (en) 2011-12-21
CN101821944B (zh) 2012-12-26
CN101821944A (zh) 2010-09-01
EP2202882A1 (en) 2010-06-30
US20100176900A1 (en) 2010-07-15
JP4831235B2 (ja) 2011-12-07
JPWO2009050932A1 (ja) 2011-02-24

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