WO2009042698A3 - Systems and methods of preparing a composition used in multiple processing tools - Google Patents
Systems and methods of preparing a composition used in multiple processing tools Download PDFInfo
- Publication number
- WO2009042698A3 WO2009042698A3 PCT/US2008/077543 US2008077543W WO2009042698A3 WO 2009042698 A3 WO2009042698 A3 WO 2009042698A3 US 2008077543 W US2008077543 W US 2008077543W WO 2009042698 A3 WO2009042698 A3 WO 2009042698A3
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- control
- disclosed
- blend
- allows
- failure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Ceased
Links
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D11/00—Control of flow ratio
- G05D11/02—Controlling ratio of two or more flows of fluid or fluent material
- G05D11/13—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
- G05D11/131—Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/82—Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Feedback Control In General (AREA)
- Accessories For Mixers (AREA)
Abstract
There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for 'one pass' blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US97465007P | 2007-09-24 | 2007-09-24 | |
| US60/974,650 | 2007-09-24 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| WO2009042698A2 WO2009042698A2 (en) | 2009-04-02 |
| WO2009042698A3 true WO2009042698A3 (en) | 2009-12-30 |
Family
ID=40512103
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| PCT/US2008/077543 Ceased WO2009042698A2 (en) | 2007-09-24 | 2008-09-24 | Systems and methods of preparing a composition used in multiple processing tools |
Country Status (1)
| Country | Link |
|---|---|
| WO (1) | WO2009042698A2 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20120227816A1 (en) * | 2011-03-10 | 2012-09-13 | Xuemei Song | Dynamic gas blending |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070043471A1 (en) * | 2005-07-08 | 2007-02-22 | Anderson Gary R | Batch mixing method with standard deviation homogeneity monitoring |
-
2008
- 2008-09-24 WO PCT/US2008/077543 patent/WO2009042698A2/en not_active Ceased
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070043471A1 (en) * | 2005-07-08 | 2007-02-22 | Anderson Gary R | Batch mixing method with standard deviation homogeneity monitoring |
| US20070043473A1 (en) * | 2005-07-08 | 2007-02-22 | Anderson Gary R | Point-of-use mixing method with standard deviation homogeneity monitoring |
| US20070043472A1 (en) * | 2005-07-08 | 2007-02-22 | Anderson Gary R | Batch mixing method with first derivative homogeneity monitoring |
| US20070106425A1 (en) * | 2005-07-08 | 2007-05-10 | Anderson Gary R | Point-of-use mixing method with first derivative homogeneity monitoring |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2009042698A2 (en) | 2009-04-02 |
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