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WO2009042698A3 - Systems and methods of preparing a composition used in multiple processing tools - Google Patents

Systems and methods of preparing a composition used in multiple processing tools Download PDF

Info

Publication number
WO2009042698A3
WO2009042698A3 PCT/US2008/077543 US2008077543W WO2009042698A3 WO 2009042698 A3 WO2009042698 A3 WO 2009042698A3 US 2008077543 W US2008077543 W US 2008077543W WO 2009042698 A3 WO2009042698 A3 WO 2009042698A3
Authority
WO
WIPO (PCT)
Prior art keywords
control
disclosed
blend
allows
failure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2008/077543
Other languages
French (fr)
Other versions
WO2009042698A2 (en
Inventor
Gary R. Anderson
Matt Fowler
Tom Timmons
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TRES-ARK Inc
Tres Ark Inc
Original Assignee
TRES-ARK Inc
Tres Ark Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRES-ARK Inc, Tres Ark Inc filed Critical TRES-ARK Inc
Publication of WO2009042698A2 publication Critical patent/WO2009042698A2/en
Publication of WO2009042698A3 publication Critical patent/WO2009042698A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G05CONTROLLING; REGULATING
    • G05DSYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D11/00Control of flow ratio
    • G05D11/02Controlling ratio of two or more flows of fluid or fluent material
    • G05D11/13Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means
    • G05D11/131Controlling ratio of two or more flows of fluid or fluent material characterised by the use of electric means by measuring the values related to the quantity of the individual components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80Forming a predetermined ratio of the substances to be mixed
    • B01F35/82Forming a predetermined ratio of the substances to be mixed by adding a material to be mixed to a mixture in response to a detected feature, e.g. density, radioactivity, consumed power or colour
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01FMIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
    • B01F35/00Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
    • B01F35/80Forming a predetermined ratio of the substances to be mixed
    • B01F35/88Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Feedback Control In General (AREA)
  • Accessories For Mixers (AREA)

Abstract

There is disclosed a system and method of formulating a batch comprising at least two chemicals. An embodiment is disclosed wherein a feedforward algorithm can be used to control the target blend. Subsequently a feedback closed loop control loop algorithm is provided for a multivariant blend. Use of this approach allows for a continuously autoreplenished and controlled blend. Also disclosed is the ability to control via feedforward and feedback algorithms a fast responding control mode that allows for the elimination of a container. This approach will allow for 'one pass' blending with control. The controller implements an automated fault detection and correction system, thereby identifying necessary maintenance prior to failure. If failure does occur the signature recognition allows rapid analysis and correction thus maximizing tool availability.
PCT/US2008/077543 2007-09-24 2008-09-24 Systems and methods of preparing a composition used in multiple processing tools Ceased WO2009042698A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US97465007P 2007-09-24 2007-09-24
US60/974,650 2007-09-24

Publications (2)

Publication Number Publication Date
WO2009042698A2 WO2009042698A2 (en) 2009-04-02
WO2009042698A3 true WO2009042698A3 (en) 2009-12-30

Family

ID=40512103

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/077543 Ceased WO2009042698A2 (en) 2007-09-24 2008-09-24 Systems and methods of preparing a composition used in multiple processing tools

Country Status (1)

Country Link
WO (1) WO2009042698A2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20120227816A1 (en) * 2011-03-10 2012-09-13 Xuemei Song Dynamic gas blending

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070043471A1 (en) * 2005-07-08 2007-02-22 Anderson Gary R Batch mixing method with standard deviation homogeneity monitoring

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20070043471A1 (en) * 2005-07-08 2007-02-22 Anderson Gary R Batch mixing method with standard deviation homogeneity monitoring
US20070043473A1 (en) * 2005-07-08 2007-02-22 Anderson Gary R Point-of-use mixing method with standard deviation homogeneity monitoring
US20070043472A1 (en) * 2005-07-08 2007-02-22 Anderson Gary R Batch mixing method with first derivative homogeneity monitoring
US20070106425A1 (en) * 2005-07-08 2007-05-10 Anderson Gary R Point-of-use mixing method with first derivative homogeneity monitoring

Also Published As

Publication number Publication date
WO2009042698A2 (en) 2009-04-02

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