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WO2008123131A1 - Elastic surface wave apparatus - Google Patents

Elastic surface wave apparatus Download PDF

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Publication number
WO2008123131A1
WO2008123131A1 PCT/JP2008/055246 JP2008055246W WO2008123131A1 WO 2008123131 A1 WO2008123131 A1 WO 2008123131A1 JP 2008055246 W JP2008055246 W JP 2008055246W WO 2008123131 A1 WO2008123131 A1 WO 2008123131A1
Authority
WO
WIPO (PCT)
Prior art keywords
surface wave
elastic surface
idt electrode
standardized
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/055246
Other languages
French (fr)
Japanese (ja)
Inventor
Michio Kadota
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Priority to JP2009509068A priority Critical patent/JP4811517B2/en
Publication of WO2008123131A1 publication Critical patent/WO2008123131A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02535—Details of surface acoustic wave devices
    • H03H9/02543—Characteristics of substrate, e.g. cutting angles
    • H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)

Abstract

This invention provides an elastic surface wave apparatus, which is less likely to cause a variation in properties upon a temperature change, has a high reflection coefficient per electrode finger of IDT, and can easily narrow the band. In the elastic surface wave apparatus (1), a metal is filled into a plurality of grooves (2a) provided on the upper surface of a piezoelectric substrate (2) formed of quartz of which the Euler angle is 0° ± 5°, 0° to 140°, and 0° ± 40°, to form an IDT electrode (3). A piezoelectric film (4) formed of c axis-aligned ZnO is formed so as to cover the IDT electrode (3), and a Rayleigh wave is utilized as an elastic surface wave. The IDT electrode (3) is a metallic material composed mainly of at least one metal selected from the group consisting of Au, Ta, W, Pt, Cu, Ni, and Mo. When the wavelength of the elastic surface wave is λ, the metal as a main constituent in the IDT electrode (3), the standardized film thickness standardized by λ of the IDT electrode (3), and the standardized film thickness standardized by λ of the piezoelectric film fall within a range of individual combinations specified in Table 1 below.
PCT/JP2008/055246 2007-03-30 2008-03-21 Elastic surface wave apparatus Ceased WO2008123131A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009509068A JP4811517B2 (en) 2007-03-30 2008-03-21 Surface acoustic wave device

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007-092126 2007-03-30
JP2007092126 2007-03-30

Publications (1)

Publication Number Publication Date
WO2008123131A1 true WO2008123131A1 (en) 2008-10-16

Family

ID=39830628

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/055246 Ceased WO2008123131A1 (en) 2007-03-30 2008-03-21 Elastic surface wave apparatus

Country Status (2)

Country Link
JP (1) JP4811517B2 (en)
WO (1) WO2008123131A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058544A1 (en) * 2008-11-18 2010-05-27 株式会社村田製作所 Tunable filter
JP2010283807A (en) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd Surface acoustic wave device
US8310321B2 (en) 2008-11-18 2012-11-13 Murata Manufacturing Co., Ltd. Tunable filter including a variable capacitor connected with a surface acoustic wave resonator

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002152000A (en) * 2000-11-14 2002-05-24 Seiko Epson Corp Surface acoustic wave device
JP2003037467A (en) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd Surface acoustic wave device
WO2006011417A1 (en) * 2004-07-26 2006-02-02 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2006270906A (en) * 2005-03-23 2006-10-05 Kazuhiko Yamanouchi Temperature high stability/high-coupling groove structure surface acoustic wave substrate and surface acoustic wave function element using the substrate

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100713966B1 (en) * 1997-07-28 2007-05-02 가부시끼가이샤 도시바 Surface acoustic wave device and manufacturing method thereof
JP2002280856A (en) * 2001-03-21 2002-09-27 Seiko Epson Corp Manufacturing method of surface acoustic wave device
JP4244656B2 (en) * 2003-02-26 2009-03-25 株式会社村田製作所 Surface acoustic wave device

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002152000A (en) * 2000-11-14 2002-05-24 Seiko Epson Corp Surface acoustic wave device
JP2003037467A (en) * 2001-07-24 2003-02-07 Murata Mfg Co Ltd Surface acoustic wave device
WO2006011417A1 (en) * 2004-07-26 2006-02-02 Murata Manufacturing Co., Ltd. Surface acoustic wave device
JP2006270906A (en) * 2005-03-23 2006-10-05 Kazuhiko Yamanouchi Temperature high stability/high-coupling groove structure surface acoustic wave substrate and surface acoustic wave function element using the substrate

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
KADOTA M. ET AL.: "ZnO-maku Hyomen Kenma ni yoru SAW Filter no Shuhasu Tokusei Baratsuki no Teigen", THE TRANSACTIONS OF THE INSTITUTE OF ELECTRONICS, INFORMATION AND COMMUNICATION ENGINEERS, vol. J76-A, no. 10, 25 October 1993 (1993-10-25), pages 1399 - 1406 *

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2010058544A1 (en) * 2008-11-18 2010-05-27 株式会社村田製作所 Tunable filter
CN102204091A (en) * 2008-11-18 2011-09-28 株式会社村田制作所 Tunable filter
US8305163B2 (en) 2008-11-18 2012-11-06 Murata Manufacturing Co., Ltd. Tunable filter including a surface acoustic wave resonator and a variable capacitor
US8310321B2 (en) 2008-11-18 2012-11-13 Murata Manufacturing Co., Ltd. Tunable filter including a variable capacitor connected with a surface acoustic wave resonator
JP5120461B2 (en) * 2008-11-18 2013-01-16 株式会社村田製作所 Tunable filter
JP5420564B2 (en) * 2008-11-18 2014-02-19 株式会社村田製作所 Tunable filter
CN102204091B (en) * 2008-11-18 2014-04-02 株式会社村田制作所 Tunable filter
JP2010283807A (en) * 2009-05-08 2010-12-16 Murata Mfg Co Ltd Surface acoustic wave device

Also Published As

Publication number Publication date
JP4811517B2 (en) 2011-11-09
JPWO2008123131A1 (en) 2010-07-15

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