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WO2008120294A1 - 搬送装置 - Google Patents

搬送装置 Download PDF

Info

Publication number
WO2008120294A1
WO2008120294A1 PCT/JP2007/054065 JP2007054065W WO2008120294A1 WO 2008120294 A1 WO2008120294 A1 WO 2008120294A1 JP 2007054065 W JP2007054065 W JP 2007054065W WO 2008120294 A1 WO2008120294 A1 WO 2008120294A1
Authority
WO
WIPO (PCT)
Prior art keywords
linear
turning
base
mechanisms
conveying device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/054065
Other languages
English (en)
French (fr)
Inventor
Akira Miyamoto
Daisuke Sado
Akira Okamoto
Hideki Matsuo
Yasuhiro Nishimori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Daihen Corp
Original Assignee
Daihen Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Daihen Corp filed Critical Daihen Corp
Priority to JP2009507287A priority Critical patent/JPWO2008120294A1/ja
Priority to US12/529,471 priority patent/US8203101B2/en
Priority to CN200780051937XA priority patent/CN101627467B/zh
Priority to PCT/JP2007/054065 priority patent/WO2008120294A1/ja
Priority to TW097107102A priority patent/TW200844021A/zh
Publication of WO2008120294A1 publication Critical patent/WO2008120294A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/10—Programme-controlled manipulators characterised by positioning means for manipulator elements
    • B25J9/106—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links
    • B25J9/1065—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms
    • B25J9/107—Programme-controlled manipulators characterised by positioning means for manipulator elements with articulated links with parallelograms of the froglegs type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/061—Lifting, gripping, or carrying means, for one or more sheets forming independent means of transport, e.g. suction cups, transport frames
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G49/00—Conveying systems characterised by their application for specified purposes not otherwise provided for
    • B65G49/05—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles
    • B65G49/06—Conveying systems characterised by their application for specified purposes not otherwise provided for for fragile or damageable materials or articles for fragile sheets, e.g. glass
    • B65G49/067—Sheet handling, means, e.g. manipulators, devices for turning or tilting sheet glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005—Apparatus not specifically provided for elsewhere
    • H01L21/67011—Apparatus for manufacture or treatment
    • H01L21/67098—Apparatus for thermal treatment
    • H01L21/67115—Apparatus for thermal treatment mainly by radiation
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67739—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations into and out of processing chamber
    • H01L21/67742—Mechanical parts of transfer devices
    • H10P72/0436—
    • H10P72/3302—
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2249/00—Aspects relating to conveying systems for the manufacture of fragile sheets
    • B65G2249/02—Controlled or contamination-free environments or clean space conditions

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Computer Hardware Design (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)

Abstract

　搬送装置（Ａ）は、真空室（Ｂ）内に配置され、固定ベース（１）と、固定ベース（１）に対して旋回可能に保持された旋回ベース（２）と、旋回ベース（２）に支持された直線移動機構（３Ａ，３Ｂ）と、直線機構（３Ａ，３Ｂ）に支持されたハンド（４Ａ，４Ｂ）とを備え、直線移動機構（３Ａ，３Ｂ）の作動によりハンド（４Ａ，４Ｂ）に載置したワークＷを搬送するものである。旋回ベース（２）もしくは直線移動機構（３Ａ，３Ｂ）の下面側の適部に熱輻射板（６２，６３，６５）が設けられており、真空室（Ｂ）を形成する壁のうち旋回ベース（２）の下面側と対向する壁に吸熱板（６１，６６）が設けられている。
PCT/JP2007/054065 2007-03-02 2007-03-02 搬送装置 Ceased WO2008120294A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2009507287A JPWO2008120294A1 (ja) 2007-03-02 2007-03-02 搬送装置
US12/529,471 US8203101B2 (en) 2007-03-02 2007-03-02 Conveying device
CN200780051937XA CN101627467B (zh) 2007-03-02 2007-03-02 搬送装置
PCT/JP2007/054065 WO2008120294A1 (ja) 2007-03-02 2007-03-02 搬送装置
TW097107102A TW200844021A (en) 2007-03-02 2008-02-29 Conveying device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2007/054065 WO2008120294A1 (ja) 2007-03-02 2007-03-02 搬送装置

Publications (1)

Publication Number Publication Date
WO2008120294A1 true WO2008120294A1 (ja) 2008-10-09

Family

ID=39807885

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2007/054065 Ceased WO2008120294A1 (ja) 2007-03-02 2007-03-02 搬送装置

Country Status (5)

Country Link
US (1) US8203101B2 (ja)
JP (1) JPWO2008120294A1 (ja)
CN (1) CN101627467B (ja)
TW (1) TW200844021A (ja)
WO (1) WO2008120294A1 (ja)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158759A (ja) * 2008-12-08 2010-07-22 Daihen Corp ワーク搬送装置
JP2011061149A (ja) * 2009-09-14 2011-03-24 Tokyo Electron Ltd 共通搬送装置及びこれを用いた処理システム
WO2013073379A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
WO2013073378A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
JP2013103331A (ja) * 2011-11-16 2013-05-30 Nidec Sankyo Corp 産業用ロボット
JP2014527314A (ja) * 2011-09-16 2014-10-09 パーシモン テクノロジーズ コーポレイション 低変動ロボット
CN104944160A (zh) * 2014-03-31 2015-09-30 株式会社大亨 输送装置和输送系统
WO2017065254A1 (ja) * 2015-10-15 2017-04-20 豊田鉄工株式会社 加熱炉へのワーク搬出入装置
JP2021027259A (ja) * 2019-08-07 2021-02-22 東京エレクトロン株式会社 基板処理システム
JP2022017840A (ja) * 2020-07-14 2022-01-26 東京エレクトロン株式会社 真空搬送装置および基板処理システム
US11769680B2 (en) 2014-01-21 2023-09-26 Persimmon Technologies Corporation Substrate transport vacuum platform

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102554937B (zh) * 2010-12-20 2015-06-24 理想能源设备(上海)有限公司 搬运机械手及搬运装置
JP5083701B2 (ja) * 2011-01-31 2012-11-28 アキム株式会社 部品搬送装置
JP5403021B2 (ja) * 2011-09-08 2014-01-29 株式会社安川電機 ロボット、ロボットの設置方法および製造装置
CN103084909B (zh) * 2011-10-31 2015-11-25 鸿富锦精密工业（深圳）有限公司 搬运装置
JP5609856B2 (ja) * 2011-12-20 2014-10-22 株式会社安川電機 搬送ロボット
JP5609896B2 (ja) * 2012-01-13 2014-10-22 株式会社安川電機 搬送システム
JP6099916B2 (ja) * 2012-09-25 2017-03-22 株式会社ダイヘン ワーク搬送ロボット
JP6190692B2 (ja) * 2013-10-22 2017-08-30 日本電産サンキョー株式会社 産業用ロボット
CN104210844B (zh) * 2014-09-10 2016-11-02 深圳市华星光电技术有限公司 玻璃基板传递系统及其机械手

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218052A (ja) * 1990-05-15 1993-08-27 Electrotech Ltd 工作物サポート
JPH0655482A (ja) * 1992-08-05 1994-03-01 Hitachi Ltd 宇宙用ロボット関節
JPH10215062A (ja) * 1997-01-29 1998-08-11 Toyota Motor Corp リフロー式はんだ付方法及びワーク搬送治具
JP2006041496A (ja) * 2004-06-25 2006-02-09 Applied Materials Inc マルチ選択エンドエフェクタアセンブリ
JP2006116630A (ja) * 2004-10-20 2006-05-11 Kawada Kogyo Kk 移動ロボット

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06204316A (ja) * 1992-12-28 1994-07-22 Mitsubishi Electric Corp 耐熱ロボットハンド
JP4291709B2 (ja) 2003-04-16 2009-07-08 株式会社ダイヘン 直線移動機構およびこれを用いた搬送ロボット
JP4276534B2 (ja) 2003-12-26 2009-06-10 株式会社ダイヘン 搬送ロボット
TWI400767B (zh) * 2004-12-10 2013-07-01 愛發科股份有限公司 搬運機械手臂及搬運裝置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05218052A (ja) * 1990-05-15 1993-08-27 Electrotech Ltd 工作物サポート
JPH0655482A (ja) * 1992-08-05 1994-03-01 Hitachi Ltd 宇宙用ロボット関節
JPH10215062A (ja) * 1997-01-29 1998-08-11 Toyota Motor Corp リフロー式はんだ付方法及びワーク搬送治具
JP2006041496A (ja) * 2004-06-25 2006-02-09 Applied Materials Inc マルチ選択エンドエフェクタアセンブリ
JP2006116630A (ja) * 2004-10-20 2006-05-11 Kawada Kogyo Kk 移動ロボット

Cited By (26)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010158759A (ja) * 2008-12-08 2010-07-22 Daihen Corp ワーク搬送装置
JP2011061149A (ja) * 2009-09-14 2011-03-24 Tokyo Electron Ltd 共通搬送装置及びこれを用いた処理システム
KR101829397B1 (ko) * 2011-09-16 2018-02-19 퍼시몬 테크놀로지스 코포레이션 낮은 가변성을 가진 로봇
US10569430B2 (en) 2011-09-16 2020-02-25 Persimmon Technologies Corporation Low variability robot
KR102464941B1 (ko) 2011-09-16 2022-11-09 퍼시몬 테크놀로지스 코포레이션 기판 처리 장치
KR20210111357A (ko) * 2011-09-16 2021-09-10 퍼시몬 테크놀로지스 코포레이션 기판 처리 장치
JP2014527314A (ja) * 2011-09-16 2014-10-09 パーシモン テクノロジーズ コーポレイション 低変動ロボット
US10882194B2 (en) 2011-09-16 2021-01-05 Persimmon Technologies Corporation Robot linear drive heat transfer
US10538000B2 (en) 2011-09-16 2020-01-21 Persimmon Technologies Corporation Robot with linear drives and rotary drive
US10800050B2 (en) 2011-09-16 2020-10-13 Persimmon Technologies Corporation Robot linear drive heat transfer
US10792822B2 (en) 2011-09-16 2020-10-06 Persimmon Technologies Corporation Robot drive and wireless data coupling
WO2013073378A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
US9387584B2 (en) 2011-11-16 2016-07-12 Nidec Sankyo Corporation Industrial robot
JP2013103331A (ja) * 2011-11-16 2013-05-30 Nidec Sankyo Corp 産業用ロボット
US9399285B2 (en) 2011-11-16 2016-07-26 Nidec Sankyo Corporation Industrial robot with hollow section
JP2013103330A (ja) * 2011-11-16 2013-05-30 Nidec Sankyo Corp 産業用ロボット
WO2013073379A1 (ja) * 2011-11-16 2013-05-23 日本電産サンキョー株式会社 産業用ロボット
US11769680B2 (en) 2014-01-21 2023-09-26 Persimmon Technologies Corporation Substrate transport vacuum platform
CN104944160A (zh) * 2014-03-31 2015-09-30 株式会社大亨 输送装置和输送系统
US11224976B2 (en) 2015-10-15 2022-01-18 Toyoda Iron Works Co., Ltd. Apparatus for loading/unloading workpieces into/from furnace
JP2017074643A (ja) * 2015-10-15 2017-04-20 豊田鉄工株式会社 加熱炉へのワーク搬出入装置
WO2017065254A1 (ja) * 2015-10-15 2017-04-20 豊田鉄工株式会社 加熱炉へのワーク搬出入装置
JP2021027259A (ja) * 2019-08-07 2021-02-22 東京エレクトロン株式会社 基板処理システム
JP7394554B2 (ja) 2019-08-07 2023-12-08 東京エレクトロン株式会社 基板処理システム
JP2022017840A (ja) * 2020-07-14 2022-01-26 東京エレクトロン株式会社 真空搬送装置および基板処理システム
JP7479229B2 (ja) 2020-07-14 2024-05-08 東京エレクトロン株式会社 真空搬送装置および基板処理システム

Also Published As

Publication number Publication date
TWI346641B (ja) 2011-08-11
US8203101B2 (en) 2012-06-19
JPWO2008120294A1 (ja) 2010-07-15
CN101627467A (zh) 2010-01-13
TW200844021A (en) 2008-11-16
CN101627467B (zh) 2011-04-27
US20100068025A1 (en) 2010-03-18

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