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WO2008153065A1 - Semiconductor light emitting element and method for manufacturing the same - Google Patents

Semiconductor light emitting element and method for manufacturing the same Download PDF

Info

Publication number
WO2008153065A1
WO2008153065A1 PCT/JP2008/060693 JP2008060693W WO2008153065A1 WO 2008153065 A1 WO2008153065 A1 WO 2008153065A1 JP 2008060693 W JP2008060693 W JP 2008060693W WO 2008153065 A1 WO2008153065 A1 WO 2008153065A1
Authority
WO
WIPO (PCT)
Prior art keywords
type semiconductor
semiconductor layer
light emitting
emitting element
layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060693
Other languages
French (fr)
Japanese (ja)
Inventor
Kazuhiko Senda
Tetsuya Fujiwara
Masayuki Sonobe
Shunji Nakata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rohm Co Ltd
Original Assignee
Rohm Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm Co Ltd filed Critical Rohm Co Ltd
Priority to JP2009519278A priority Critical patent/JPWO2008153065A1/en
Publication of WO2008153065A1 publication Critical patent/WO2008153065A1/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/822Materials of the light-emitting regions
    • H10H20/824Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP
    • H10H20/825Materials of the light-emitting regions comprising only Group III-V materials, e.g. GaP containing nitrogen, e.g. GaN
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10HINORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS
    • H10H20/00Individual inorganic light-emitting semiconductor devices having potential barriers, e.g. light-emitting diodes [LED]
    • H10H20/80Constructional details
    • H10H20/81Bodies
    • H10H20/811Bodies having quantum effect structures or superlattices, e.g. tunnel junctions
    • H10H20/812Bodies having quantum effect structures or superlattices, e.g. tunnel junctions within the light-emitting regions, e.g. having quantum confinement structures
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01SDEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S5/00Semiconductor lasers
    • H01S5/30Structure or shape of the active region; Materials used for the active region
    • H01S5/305Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure
    • H01S5/3086Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer
    • H01S5/309Structure or shape of the active region; Materials used for the active region characterised by the doping materials used in the laser structure doping of the active layer doping of barrier layers that confine charge carriers in the laser structure, e.g. the barriers in a quantum well structure

Landscapes

  • Led Devices (AREA)

Abstract

The number of pairs of multiquantum well (MQW) layers of an active layer is optimized for permitting an electron to efficiently rebind with a hole in the active layer, and light emitting efficiency is improved. A semiconductor light emitting element is provided with an n-type semiconductor layer (2); a p-type semiconductor layer (4); and an active layer (3), which is arranged between the n-type semiconductor layer (2) and the p-type semiconductor layer (4) and contains In having a multi quantum well structure of barrier layers (311-31n and 310) composed of GaN and well layers (321-32n) composed of InxGa1-xN (0<x<1). The number of the pairs of the MQW layers is 6-11, and electron overflow from the n-type semiconductor layer (2) to the p-type semiconductor layer (4), diffusion of a p-type dopant from the p-type semiconductor layer (4) to the well layers (321-32n) and diffusion of an n-type dopant from the n-type semiconductor layer (2) to the active layer (3) are suppressed. A method for manufacturing such semiconductor light emitting element is also provided.
PCT/JP2008/060693 2007-06-15 2008-06-11 Semiconductor light emitting element and method for manufacturing the same Ceased WO2008153065A1 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2009519278A JPWO2008153065A1 (en) 2007-06-15 2008-06-11 Semiconductor light emitting device and manufacturing method thereof

Applications Claiming Priority (12)

Application Number Priority Date Filing Date Title
JP2007158562 2007-06-15
JP2007-158562 2007-06-15
JP2007-158565 2007-06-15
JP2007158642 2007-06-15
JP2007-158642 2007-06-15
JP2007158565 2007-06-15
JP2007289735 2007-11-07
JP2007-289735 2007-11-07
JP2007-290587 2007-11-08
JP2007-290613 2007-11-08
JP2007290613 2007-11-08
JP2007290587 2007-11-08

Publications (1)

Publication Number Publication Date
WO2008153065A1 true WO2008153065A1 (en) 2008-12-18

Family

ID=40129670

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060693 Ceased WO2008153065A1 (en) 2007-06-15 2008-06-11 Semiconductor light emitting element and method for manufacturing the same

Country Status (3)

Country Link
JP (1) JPWO2008153065A1 (en)
TW (1) TW200915620A (en)
WO (1) WO2008153065A1 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2317574A3 (en) * 2009-11-02 2011-12-14 LG Innotek Co., Ltd. Light emitting device comprising metal oxide semiconductor layer and pattern for light extraction on active layer
JP2017117845A (en) * 2015-12-21 2017-06-29 株式会社小糸製作所 Semiconductor light emitting element and manufacturing method of the same
WO2022262315A1 (en) * 2021-06-15 2022-12-22 厦门士兰明镓化合物半导体有限公司 Semiconductor light-emitting element

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20210146805A (en) * 2020-05-27 2021-12-06 니치아 카가쿠 고교 가부시키가이샤 A light emitting element and method for manufacturing the same

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH104210A (en) * 1996-06-14 1998-01-06 Toyoda Gosei Co Ltd Group III nitride compound semiconductor light emitting device
JP2002084038A (en) * 2000-07-07 2002-03-22 Nichia Chem Ind Ltd Nitride semiconductor device
JP2006120856A (en) * 2004-10-21 2006-05-11 Hitachi Cable Ltd Manufacturing method of semiconductor light emitting device
JP2006186005A (en) * 2004-12-27 2006-07-13 Sumitomo Chemical Co Ltd Nitride-based compound semiconductor, method for producing the same, and use thereof
JP2007150076A (en) * 2005-11-29 2007-06-14 Rohm Co Ltd Nitride semiconductor light emitting device

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH104210A (en) * 1996-06-14 1998-01-06 Toyoda Gosei Co Ltd Group III nitride compound semiconductor light emitting device
JP2002084038A (en) * 2000-07-07 2002-03-22 Nichia Chem Ind Ltd Nitride semiconductor device
JP2006120856A (en) * 2004-10-21 2006-05-11 Hitachi Cable Ltd Manufacturing method of semiconductor light emitting device
JP2006186005A (en) * 2004-12-27 2006-07-13 Sumitomo Chemical Co Ltd Nitride-based compound semiconductor, method for producing the same, and use thereof
JP2007150076A (en) * 2005-11-29 2007-06-14 Rohm Co Ltd Nitride semiconductor light emitting device

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2317574A3 (en) * 2009-11-02 2011-12-14 LG Innotek Co., Ltd. Light emitting device comprising metal oxide semiconductor layer and pattern for light extraction on active layer
US8698125B2 (en) 2009-11-02 2014-04-15 Lg Innotek Co., Ltd. Light emitting device including second conductive type semiconductor layer and method of manufacturing the light emitting device
JP2017117845A (en) * 2015-12-21 2017-06-29 株式会社小糸製作所 Semiconductor light emitting element and manufacturing method of the same
WO2022262315A1 (en) * 2021-06-15 2022-12-22 厦门士兰明镓化合物半导体有限公司 Semiconductor light-emitting element

Also Published As

Publication number Publication date
TW200915620A (en) 2009-04-01
JPWO2008153065A1 (en) 2010-08-26

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