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WO2008149805A1 - リニアモータの位置検出システム - Google Patents

リニアモータの位置検出システム Download PDF

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Publication number
WO2008149805A1
WO2008149805A1 PCT/JP2008/060021 JP2008060021W WO2008149805A1 WO 2008149805 A1 WO2008149805 A1 WO 2008149805A1 JP 2008060021 W JP2008060021 W JP 2008060021W WO 2008149805 A1 WO2008149805 A1 WO 2008149805A1
Authority
WO
WIPO (PCT)
Prior art keywords
rod
wave signal
position detection
detection system
magnetic sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2008/060021
Other languages
English (en)
French (fr)
Inventor
Toshiyuki Aso
Shuhei Yamanaka
Toshiro Tojo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
THK Co Ltd
Original Assignee
THK Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by THK Co Ltd filed Critical THK Co Ltd
Priority to CN2008800164998A priority Critical patent/CN101680779B/zh
Priority to KR1020097027258A priority patent/KR101479364B1/ko
Priority to US12/602,028 priority patent/US8362720B2/en
Priority to JP2009517842A priority patent/JP5343001B2/ja
Priority to DE112008001432.9T priority patent/DE112008001432B4/de
Publication of WO2008149805A1 publication Critical patent/WO2008149805A1/ja
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/003—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring position, not involving coordinate determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
    • G01D5/244—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains
    • G01D5/245—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing characteristics of pulses or pulse trains; generating pulses or pulse trains using a variable number of pulses in a train
    • G01D5/2451—Incremental encoders
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H02K11/215—Magnetic effect devices, e.g. Hall-effect or magneto-resistive elements
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Linear Motors (AREA)
  • Transmission And Conversion Of Sensor Element Output (AREA)
  • Control Of Linear Motors (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

　センサの取付け精度を厳しく管理する必要のない、より安価に実現できる位置検出システムを提供する。 　本発明の位置検出システムは、Ｎ極及びＳ極の磁極が軸線方向に交互に並べられるロッド１と、ロッド１を囲む複数のコイル４と、を有するリニアモータ１１と、コイル４に対するロッド１の相対的な直線運動によって生ずるロッド１の磁界の方向の変化を検出し、９０°の位相差を持つ正弦波状信号及び余弦波状信号を出力する磁気センサ１２と、正弦波状信号及び余弦波状信号に基づいて、コイル４に対するロッド１の相対的な位置を検出する位置検出回路１３と、を備える。磁気センサ１２がロッド１の磁界の方向の変化を検出するので、たとえロッド１と磁気センサ１２との間の距離がずれても、磁気センサ１２が出力する正弦波状信号及び余弦波状信号には変化が少ない。
PCT/JP2008/060021 2007-05-31 2008-05-30 リニアモータの位置検出システム Ceased WO2008149805A1 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
CN2008800164998A CN101680779B (zh) 2007-05-31 2008-05-30 线性电动机的位置检测系统
KR1020097027258A KR101479364B1 (ko) 2007-05-31 2008-05-30 리니어 모터의 위치 검출 시스템
US12/602,028 US8362720B2 (en) 2007-05-31 2008-05-30 Linear motor position detection system
JP2009517842A JP5343001B2 (ja) 2007-05-31 2008-05-30 リニアモータの位置検出システム
DE112008001432.9T DE112008001432B4 (de) 2007-05-31 2008-05-30 Linearmotor-Positionserfassungssystem

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2007145641 2007-05-31
JP2007-145641 2007-05-31

Publications (1)

Publication Number Publication Date
WO2008149805A1 true WO2008149805A1 (ja) 2008-12-11

Family

ID=40093623

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/JP2008/060021 Ceased WO2008149805A1 (ja) 2007-05-31 2008-05-30 リニアモータの位置検出システム

Country Status (7)

Country Link
US (1) US8362720B2 (ja)
JP (1) JP5343001B2 (ja)
KR (1) KR101479364B1 (ja)
CN (1) CN101680779B (ja)
DE (1) DE112008001432B4 (ja)
TW (1) TWI442026B (ja)
WO (1) WO2008149805A1 (ja)

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010145203A (ja) * 2008-12-18 2010-07-01 Yaskawa Electric Corp リニアエンコーダ信号処理装置および信号処理方法
WO2011115098A1 (ja) * 2010-03-17 2011-09-22 Thk株式会社 制御装置、及び制御方法
WO2012035989A1 (ja) * 2010-09-16 2012-03-22 カヤバ工業株式会社 リニアアクチュエータ
WO2012039260A1 (ja) * 2010-09-21 2012-03-29 カヤバ工業株式会社 リニアアクチュエータ
US20130033125A1 (en) * 2011-08-03 2013-02-07 Kabushiki Kaisha Yaskawa Denki Linear motor armature and linear motor
JP2013072742A (ja) * 2011-09-28 2013-04-22 Thk Co Ltd エンコーダ、アクチュエータ
JP2015224926A (ja) * 2014-05-27 2015-12-14 村田機械株式会社 磁気式変位センサ及び変位の検出方法
TWI621835B (zh) * 2015-04-23 2018-04-21 三菱電機股份有限公司 旋轉檢測裝置及旋轉檢測裝置之製造方法
CN109323646A (zh) * 2018-11-13 2019-02-12 阿斯科纳科技（深圳）有限公司 一种应用于直线电机矢量控制的位置传感器系统
CN117824558A (zh) * 2024-03-06 2024-04-05 成都凯天电子股份有限公司 一种高低温试验用移动机构及位移检测方法

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JP5562333B2 (ja) * 2009-06-29 2014-07-30 サバンジ大学 磁石可動型リニアモータ用の位置検出装置
JP5457986B2 (ja) 2010-09-21 2014-04-02 カヤバ工業株式会社 リニアアクチュエータ
JP2012159495A (ja) * 2011-01-10 2012-08-23 Aisan Ind Co Ltd 位置センサ
DE102011004348A1 (de) * 2011-02-17 2012-08-23 Beckhoff Automation Gmbh Verfahren und Positionserfassungsvorrichtung zum Erfassen einer Position eines beweglichen Elements einer Antriebsvorrichtung
CN102607388B (zh) * 2012-02-17 2014-09-24 清华大学 平面电机动子位移测量装置及方法
WO2014050401A1 (ja) * 2012-09-28 2014-04-03 富士フイルム株式会社 レンズ駆動装置及び方法
US9479031B2 (en) 2013-03-08 2016-10-25 Mts Sensor Technologie Gmbh & Co. Kg Tubular linear motor with magnetostrictive sensor
CN103762822B (zh) * 2014-01-21 2016-08-17 清华大学 直线电机
US20160226349A1 (en) * 2014-12-01 2016-08-04 Hamilton Sundstrand Corporation Electromechanical linear actuator
CN107003655A (zh) * 2014-12-11 2017-08-01 费斯托股份有限两合公司 具有检测组件数据的运动传感器的驱动设备
CN105656282B (zh) * 2016-02-01 2017-12-01 重庆理工大学 一种具有嵌入式位置检测装置的直线永磁伺服电机
US10326398B2 (en) * 2016-10-06 2019-06-18 Hamilton Sundstrand Corporation Linear motor actuators
CN108539949B (zh) * 2017-03-01 2020-07-31 台达电子工业股份有限公司 动磁式移载平台
CN112104797A (zh) * 2019-06-18 2020-12-18 北京小米移动软件有限公司 摄像头模组和电子设备、行程检测方法及装置
US12081094B2 (en) * 2019-08-26 2024-09-03 Nti Ag Drive device having a tubular linear motor
WO2021181534A1 (ja) * 2020-03-10 2021-09-16 三菱電機株式会社 磁気式リニア位置検出器
CN112060113A (zh) * 2020-07-27 2020-12-11 深圳市优必选科技股份有限公司 一种直线位移舵机及机器人手指舵机系统
CN113037047A (zh) * 2021-03-16 2021-06-25 北京华能新锐控制技术有限公司 直线电机模组
CN113404680B (zh) * 2021-05-13 2022-09-30 东莞市力博得电子科技有限公司 水泵活塞运动频率测量方法、装置及存储介质
TWI786751B (zh) * 2021-07-28 2022-12-11 東元電機股份有限公司 距離感測器量測分析系統
TWI765792B (zh) * 2021-07-30 2022-05-21 通泰積體電路股份有限公司 線性致動器之零相位延遲補償方法及其電路
TWI774606B (zh) * 2021-11-09 2022-08-11 承康科技有限公司 磁性角度檢測器
CN115586436B (zh) * 2022-10-18 2025-08-22 重庆邮电大学 基于磁传感阵列的永磁直线电机高分辨率位置检测方法
CN120474428B (zh) * 2025-07-15 2025-11-18 湖北东湖实验室 高精度直线电机位置检测及高速率低时延无线光传输系统

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Cited By (16)

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Publication number Priority date Publication date Assignee Title
JP2010145203A (ja) * 2008-12-18 2010-07-01 Yaskawa Electric Corp リニアエンコーダ信号処理装置および信号処理方法
WO2011115098A1 (ja) * 2010-03-17 2011-09-22 Thk株式会社 制御装置、及び制御方法
JPWO2011115098A1 (ja) * 2010-03-17 2013-06-27 Thk株式会社 制御装置、及び制御方法
JP2012065452A (ja) * 2010-09-16 2012-03-29 Kayaba Ind Co Ltd リニアアクチュエータ
WO2012035989A1 (ja) * 2010-09-16 2012-03-22 カヤバ工業株式会社 リニアアクチュエータ
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US20130033125A1 (en) * 2011-08-03 2013-02-07 Kabushiki Kaisha Yaskawa Denki Linear motor armature and linear motor
JP2013072742A (ja) * 2011-09-28 2013-04-22 Thk Co Ltd エンコーダ、アクチュエータ
JP2015224926A (ja) * 2014-05-27 2015-12-14 村田機械株式会社 磁気式変位センサ及び変位の検出方法
TWI621835B (zh) * 2015-04-23 2018-04-21 三菱電機股份有限公司 旋轉檢測裝置及旋轉檢測裝置之製造方法
CN109323646A (zh) * 2018-11-13 2019-02-12 阿斯科纳科技（深圳）有限公司 一种应用于直线电机矢量控制的位置传感器系统
CN117824558A (zh) * 2024-03-06 2024-04-05 成都凯天电子股份有限公司 一种高低温试验用移动机构及位移检测方法
CN117824558B (zh) * 2024-03-06 2024-05-31 成都凯天电子股份有限公司 一种高低温试验用移动机构及位移检测方法

Also Published As

Publication number Publication date
DE112008001432T5 (de) 2010-04-29
US8362720B2 (en) 2013-01-29
CN101680779B (zh) 2013-03-27
JP5343001B2 (ja) 2013-11-13
CN101680779A (zh) 2010-03-24
DE112008001432B4 (de) 2024-11-07
TW200912260A (en) 2009-03-16
US20100171459A1 (en) 2010-07-08
KR101479364B1 (ko) 2015-01-05
KR20100038176A (ko) 2010-04-13
JPWO2008149805A1 (ja) 2010-08-26
TWI442026B (zh) 2014-06-21

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