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WO2008140728A3 - Appareil de transport de substrat avec de multiples bras mobiles utilisant un mécanisme de commutation mécanique - Google Patents

Appareil de transport de substrat avec de multiples bras mobiles utilisant un mécanisme de commutation mécanique Download PDF

Info

Publication number
WO2008140728A3
WO2008140728A3 PCT/US2008/005884 US2008005884W WO2008140728A3 WO 2008140728 A3 WO2008140728 A3 WO 2008140728A3 US 2008005884 W US2008005884 W US 2008005884W WO 2008140728 A3 WO2008140728 A3 WO 2008140728A3
Authority
WO
WIPO (PCT)
Prior art keywords
substrate transport
transport apparatus
mechanical switch
switch mechanism
movable arms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2008/005884
Other languages
English (en)
Other versions
WO2008140728A2 (fr
Inventor
Christopher Hofmeister
Alexander Krupyshev
Ulysses Gilchrist
Martin Hosek
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Azenta Inc
Original Assignee
Brooks Automation Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brooks Automation Inc filed Critical Brooks Automation Inc
Priority to KR1020177031089A priority Critical patent/KR102121016B1/ko
Priority to JP2010507454A priority patent/JP2010527149A/ja
Priority to KR1020167014985A priority patent/KR20160068991A/ko
Priority to KR1020207001085A priority patent/KR102216638B1/ko
Priority to KR1020147029326A priority patent/KR101629734B1/ko
Priority claimed from US12/117,415 external-priority patent/US8752449B2/en
Publication of WO2008140728A2 publication Critical patent/WO2008140728A2/fr
Anticipated expiration legal-status Critical
Publication of WO2008140728A3 publication Critical patent/WO2008140728A3/fr
Ceased legal-status Critical Current

Links

Classifications

    • H10P72/7602—
    • H10P72/3302—

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

L'invention concerne un appareil de transport de substrat comprenant un cadre, une section d'entraînement reliée au cadre et comprenant au moins un moteur commandable de façon indépendante, au moins deux bras de transport de substrat reliés au cadre et comprenant des liaisons de bras agencées pour supporter et transporter des substrats, et un commutateur de mouvement mécanique couplé au ou aux moteurs commandables de façon indépendante et aux deux ou plusieurs bras de transport de substrat pour effectuer l'extension et la rétraction de l'un des deux ou plusieurs bras de transport de substrat alors que l'autre bras des deux ou plusieurs bras de transport de substrat reste dans une configuration sensiblement rétractée.
PCT/US2008/005884 2007-05-08 2008-05-08 Appareil de transport de substrat avec de multiples bras mobiles utilisant un mécanisme de commutation mécanique Ceased WO2008140728A2 (fr)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020177031089A KR102121016B1 (ko) 2007-05-08 2008-05-08 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
JP2010507454A JP2010527149A (ja) 2007-05-08 2008-05-08 機械的スイッチ機構を利用する複数の可動アームを有する基板搬送装置
KR1020167014985A KR20160068991A (ko) 2007-05-08 2008-05-08 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
KR1020207001085A KR102216638B1 (ko) 2007-05-08 2008-05-08 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치
KR1020147029326A KR101629734B1 (ko) 2007-05-08 2008-05-08 기계적 스위치 메카니즘을 이용한 복수의 가동 암들을 갖는 기판 이송 장치

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US91678107P 2007-05-08 2007-05-08
US60/916,781 2007-05-08
US12/117,415 2008-05-08
US12/117,415 US8752449B2 (en) 2007-05-08 2008-05-08 Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism

Publications (2)

Publication Number Publication Date
WO2008140728A2 WO2008140728A2 (fr) 2008-11-20
WO2008140728A3 true WO2008140728A3 (fr) 2009-12-30

Family

ID=40002839

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2008/005884 Ceased WO2008140728A2 (fr) 2007-05-08 2008-05-08 Appareil de transport de substrat avec de multiples bras mobiles utilisant un mécanisme de commutation mécanique

Country Status (1)

Country Link
WO (1) WO2008140728A2 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8752449B2 (en) 2007-05-08 2014-06-17 Brooks Automation, Inc. Substrate transport apparatus with multiple movable arms utilizing a mechanical switch mechanism
US9117870B2 (en) 2008-03-27 2015-08-25 Lam Research Corporation High throughput cleaner chamber
JP5581338B2 (ja) 2009-01-11 2014-08-27 アプライド マテリアルズ インコーポレイテッド 電子デバイス製造において基板を搬送するためのロボットシステム、装置、および方法
US8562272B2 (en) 2010-02-16 2013-10-22 Lam Research Corporation Substrate load and unload mechanisms for high throughput
US8893642B2 (en) 2010-03-24 2014-11-25 Lam Research Corporation Airflow management for low particulate count in a process tool
US8282698B2 (en) 2010-03-24 2012-10-09 Lam Research Corporation Reduction of particle contamination produced by moving mechanisms in a process tool
US20180308728A1 (en) * 2017-02-07 2018-10-25 Brooks Automation, Inc. Method and apparatus for substrate transport
JP7382932B2 (ja) * 2018-07-06 2023-11-17 川崎重工業株式会社 基板搬送ロボット及びその制御方法
US11569111B2 (en) * 2019-12-02 2023-01-31 Brooks Automation Us, Llc Substrate processing apparatus
CN110883767B (zh) * 2019-12-04 2021-04-20 江苏电子信息职业学院 一种自动化生产用机械臂组件

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6339969B1 (en) * 1999-06-04 2002-01-22 Septimiu E. Salcudean Three-degree-of-freedom parallel planar manipulator
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6525803B2 (en) * 1999-12-21 2003-02-25 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20050262959A1 (en) * 2002-11-06 2005-12-01 Mcgill University Four-degree-of-freedom parallel manipulator for producing schonflies motions
US20060182536A1 (en) * 2004-12-22 2006-08-17 Mike Rice Cartesian robot cluster tool architecture
US20060263177A1 (en) * 2003-11-10 2006-11-23 Meulen Peter V D Linear semiconductor processing facilities
US20060269384A1 (en) * 2005-05-24 2006-11-30 Jubin Kiaie Dynamic carosel robotic workcell

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6485250B2 (en) * 1998-12-30 2002-11-26 Brooks Automation Inc. Substrate transport apparatus with multiple arms on a common axis of rotation
US6339969B1 (en) * 1999-06-04 2002-01-22 Septimiu E. Salcudean Three-degree-of-freedom parallel planar manipulator
US6525803B2 (en) * 1999-12-21 2003-02-25 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20060203216A1 (en) * 1999-12-21 2006-09-14 Asml Netherlands B.V. Balanced positioning system for use in lithographic apparatus
US20020114690A1 (en) * 2001-02-17 2002-08-22 Tooru Ishigame Transfer system
US20050262959A1 (en) * 2002-11-06 2005-12-01 Mcgill University Four-degree-of-freedom parallel manipulator for producing schonflies motions
US20060263177A1 (en) * 2003-11-10 2006-11-23 Meulen Peter V D Linear semiconductor processing facilities
US20060182536A1 (en) * 2004-12-22 2006-08-17 Mike Rice Cartesian robot cluster tool architecture
US20060269384A1 (en) * 2005-05-24 2006-11-30 Jubin Kiaie Dynamic carosel robotic workcell

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104428884B (zh) * 2012-07-05 2017-10-24 应用材料公司 吊杆驱动装置、多臂机械手装置、电子器件处理系统及用于在电子器件制造系统中传送基板的方法

Also Published As

Publication number Publication date
WO2008140728A2 (fr) 2008-11-20

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