WO2008038699A1 - Array type optical component and method for manufacturing the same, and optical system for array type semiconductor laser - Google Patents
Array type optical component and method for manufacturing the same, and optical system for array type semiconductor laser Download PDFInfo
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- WO2008038699A1 WO2008038699A1 PCT/JP2007/068776 JP2007068776W WO2008038699A1 WO 2008038699 A1 WO2008038699 A1 WO 2008038699A1 JP 2007068776 W JP2007068776 W JP 2007068776W WO 2008038699 A1 WO2008038699 A1 WO 2008038699A1
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- light
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- semiconductor laser
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- type semiconductor
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4201—Packages, e.g. shape, construction, internal or external details
- G02B6/4204—Packages, e.g. shape, construction, internal or external details the coupling comprising intermediate optical elements, e.g. lenses, holograms
- G02B6/4206—Optical features
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0004—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed
- G02B19/0028—Condensers, e.g. light collectors or similar non-imaging optics characterised by the optical means employed refractive and reflective surfaces, e.g. non-imaging catadioptric systems
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B19/00—Condensers, e.g. light collectors or similar non-imaging optics
- G02B19/0033—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use
- G02B19/0047—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source
- G02B19/0052—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode
- G02B19/0057—Condensers, e.g. light collectors or similar non-imaging optics characterised by the use for use with a light source the light source comprising a laser diode in the form of a laser diode array, e.g. laser diode bar
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0972—Prisms
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/42—Coupling light guides with opto-electronic elements
- G02B6/4296—Coupling light guides with opto-electronic elements coupling with sources of high radiant energy, e.g. high power lasers, high temperature light sources
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/005—Optical components external to the laser cavity, specially adapted therefor, e.g. for homogenisation or merging of the beams or for manipulating laser pulses, e.g. pulse shaping
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/40—Arrangement of two or more semiconductor lasers, not provided for in groups H01S5/02 - H01S5/30
- H01S5/4012—Beam combining, e.g. by the use of fibres, gratings, polarisers, prisms
Definitions
- the present invention relates to an array type optical component for coupling output light from an array type semiconductor laser to an optical element such as an optical fiber, an optical system for an array type semiconductor laser using the same, and an array type
- the present invention relates to a method for manufacturing an optical component.
- the application of array type semiconductor lasers is expanding as a laser light source that is small and can provide high output.
- the array type semiconductor laser has a plurality of light emission points of several tens to several tens, and is configured to output light from each light emission point. By converging a plurality of output lights having these array-like light emission points, they can be used as a high-power laser light source. For example, by coupling the output light of an array type semiconductor laser to an optical fiber, it is possible to make various applications with a higher degree of freedom.
- the output beam of each light emitting point of an array type semiconductor laser has a high light collecting property in a direction perpendicular to the light emitting point arrangement direction, but is concentrated in a direction parallel to the light emitting point arrangement direction. It has characteristics such as low light intensity. Therefore, since many beams are aligned in the direction of low condensing property, the condensing property in the direction parallel to the arrangement direction of the light emitting points becomes extremely low as an entire array type semiconductor laser, and it is coupled with an optical fiber having a circular cross section. It is difficult.
- FIG. 8 of Non-Patent Document 1 below describes a step mirror. This is the same as that disclosed in Patent Document 1 below.
- the step mirror is made by stacking two mirrors with a structure cut out in the shape of a washboard, and twisting the inclined step surface by 90 ° to face each other.
- the stepped surfaces facing each other are reflecting surfaces, and each outgoing beam from each light emitting point of the array type semiconductor laser is rotated 90 ° by a total of two reflections by the first and second step mirrors.
- the beams at the respective emission points are rearranged so that a large number of beams are aligned along the direction of high light collection, and the output light of the array type semiconductor laser is connected to a circular optical fiber. It is converted into an isotropic condensing beam suitable for the case.
- a collimating lens is used to collect the force by aligning the divergence angles of different beams in parallel in a direction parallel to the direction perpendicular to the light emitting point arrangement direction. For parallel directions, it is necessary to collimate the beam from each emission point before the beam between each emission point is mixed by the divergence angle.
- Conventional step mirror In the one-sided formula, the beam between the light emitting points is mixed after the step mirror, which has a long propagation distance for beam rearrangement. You need to purchase an array. As a result, there is a problem that the entire optical system becomes more expensive.
- FIG. 6 of Non-Patent Document 1 also reports a configuration using a prism array.
- FIG. 7 of Non-Patent Document 1 schematically shows how a beam incident from an array type semiconductor laser is converted by a reflection in a prism and emitted. By the total internal reflection of the prism inner surface, it is possible to rotate the beam emitted from each light emitting point of the array type semiconductor laser by 90 ° and replace the parallel component with the vertical component. Similarly, the output light of the array type semiconductor laser can be converted into an isotropic condensing beam suitable for coupling to a circular optical fiber.
- each prism element is an oblique prism shape
- the five surfaces are the optical surfaces including the input / output surface and the three reflecting surfaces.
- Patent Document 1 JP 10-510933 Gazette
- Non-Patent Document 1 Tetsu Yamaguchi, “Transmission Technology of Semiconductor Laser Light” Laser Research, Vol. 27, No. 3 (March 1999), Plate ⁇ 166 pages
- Non-Patent Document 2 OPTICS LETTERS, Vol. 20, No. 8, April 15, 1995 Disclosure of the invention
- the conventional array-type semiconductor laser coupling optical system rearranges the beams at the respective emission points of the array-type semiconductor laser to convert them into beams suitable for coupling to a circular optical fiber.
- an expensive part that is difficult to manufacture is required as an optical part for the purpose.
- An object of the present invention is to provide an array type optical component and an optical system for an array type semiconductor laser that can convert the output light of the array type semiconductor laser into an isotropic light beam with a relatively simple configuration. Is to provide.
- Another object of the present invention is to provide a method for manufacturing an array-type optical component capable of producing such an array-type optical component at low cost and in large quantities.
- An array type optical component includes a light incident surface, a light reflecting surface that reflects light refracted by the light incident surface, and a light emitting surface that refracts light reflected by the light reflecting surface.
- a plurality of triangular prism-shaped unit transmission optical elements are stacked so that the light reflecting surfaces are substantially parallel to each other.
- An optical system for an array type semiconductor laser according to the present invention is an optical system for condensing output light from an array type semiconductor laser having a plurality of emission points
- Triangular prism-shaped unit transmitted light having a light incident surface on which output light is incident, a light reflecting surface that reflects light refracted by the light incident surface, and a light emitting surface that refracts light reflected by the light reflecting surface It is equipped with an array type optical component constructed by stacking multiple elements so that the light reflecting surfaces are substantially parallel to each other.
- the arrangement direction of the emission points of the array type semiconductor laser is the X direction
- the traveling direction of the output light is the Z direction
- the X direction and the direction perpendicular to the Z direction are the Y direction. Parallel to the direction and intersect the X-Z plane at approximately 45 °.
- the array type optical component is arranged.
- a first condenser lens provided between the array type semiconductor laser and the array type optical component for condensing output light from the array type semiconductor laser in the Y direction, and an array type A second condensing lens for condensing the light that has passed through the optical component in the Y direction, and a third condensing lens for condensing the light that has passed through the second condensing lens in the X and Y directions. It is preferable to further comprise.
- an optical fiber for transmitting light that has passed through the third condenser lens it is preferable to further include an optical fiber for transmitting light that has passed through the third condenser lens.
- the bottom surfaces are substantially parallel to each other.
- a material having a cross-sectional shape in which a plurality of triangles are stacked is produced by stretching along a vertical direction of the cross-section.
- the present invention it is possible to convert the output light of an array type semiconductor laser into an isotropic condensing beam by using an optical component in which relatively simple triangular prism-shaped elements are stacked. become. As a result, it is possible to realize a low-cost array-type semiconductor laser optical system suitable for mass production as a coupling optical system to a circular optical fiber, compared to the conventionally known step mirror and prism array methods. Can do.
- FIG. 1 is a perspective view showing a first embodiment of the present invention.
- FIG. 2 An explanatory diagram showing the function of the array-type optical component.
- Fig. 2 (a) shows the XY plane perpendicular to the light traveling direction
- Fig. 2 (b) shows a cross-sectional view of the unit transmission optical element. Show.
- FIG. 3 is a schematic view of the array type optical component shown in FIG. 1 as viewed from the position of a collimating lens.
- FIG. 4 is a cross-sectional view of array type optical components in which triangular prism-shaped unit optical elements are stacked, cut along a plane perpendicular to the axis of the triangular prism.
- FIG. 5 shows the positional relationship of each part in the optical system for an array type semiconductor laser.
- FIG. 1 is a perspective view showing a first embodiment of the present invention.
- the optical system for the array type semiconductor laser has a function of coupling the output light from the array type semiconductor laser 1 to the optical fiber 6, and along the light traveling direction, the collimating lens 2, the array type optical component 3, and the collimating lens. It consists of a lens 4 and a condenser lens 5.
- the array type semiconductor laser 1 has a plurality of light emission points of several tens to several tens, and light is output from each light emission point.
- the arrangement direction of the emission points of the array type semiconductor laser 1 is set as the X direction
- the traveling direction of the output light is set as the Z direction
- the X direction and the direction perpendicular to the Z direction are set as the Y direction.
- the collimating lens 2 has a function of condensing the output light from the array type semiconductor laser 1 in the Y direction, and is constituted by, for example, a cylindrical lens having a generatrix parallel to the X direction.
- the collimating lens 4 has a function of condensing light that has passed through the array-type optical component 3 in the Y direction, and is formed of, for example, a cylindrical lens having a generatrix parallel to the X direction.
- the condensing lens 5 has a function of condensing light that has passed through the collimating lens 4 in the X direction and the Y direction, and is composed of, for example, a rotationally symmetric lens.
- the array-type optical component 3 includes a light incident surface 3a, a light reflecting surface 3b that reflects light refracted by the light incident surface 3a, and a light emitting surface 3c that refracts light reflected by the light reflecting surface 3b.
- a plurality of triangular prism-shaped unit transmission optical elements are stacked so that the light reflecting surfaces 3b are substantially parallel to each other.
- the array type optical component 3 is collimated with the collimating lens 2 so that it is parallel to the light reflecting surface 3b of each unit transmission optical element and intersects the X-Z plane at approximately 45 °. Located between the lenses 4.
- FIG. 2 is an explanatory view showing the function of the array type optical component 3.
- FIG. 2 (a) shows an XY plane perpendicular to the light traveling direction
- FIG. 2 (b) is a unit transmission optical element.
- FIG. As shown in Fig. 2 (a), when a horizontal slit-shaped light beam (a-b) travels in the Z direction and enters the light incident surface 3a, it is refracted by the light incident surface 3a, and light Proceed toward the reflective surface 3b. Subsequently, the light beam is reflected by the light reflecting surface 3b, travels toward the light emitting surface 3c, and refracts at the light emitting surface 3c. It is converted into a straight slit-shaped light beam (A—B).
- one unit transmission optical element rotates the light beam by 90 ° around the Z axis, It can be seen that it functions as a 90 ° rotating prism that emits a light beam that is elongated in the Y direction along the Z direction.
- the beam emitted from each light emitting point of the array type semiconductor laser 1 has a low light collecting property in the X direction, which is the arrangement direction of the light emitting points, and is condensed in the Y direction. Because of its high performance, it is focused only in the Y direction by the collimating lens 2 and converted into a beam that is substantially parallel to the Y direction. In the X direction, the radiation angle of the array-type semiconductor laser 1 is maintained as it is, so that the array-type optical component 3 is positioned so that the 90 ° rotation is completed before the beams from adjacent emission points mix with each other. Is done.
- each beam force S that has passed through the collimating lens 2 is incident on each light incident surface 3a of the array type optical component 3, it is rotated by 90 ° around the Z axis as described above, and is emitted from the light emitting surface 3c. To do. This exchanges the X- and Y-direction divergence angles of each beam. Furthermore, when each beam emitted from the light exit surface 3c passes through the collimating lens 4, it is condensed only in the Y direction and converted into a beam substantially parallel to the Y direction. In the X direction, the divergence angle controlled by the collimating lens 2 is maintained as it is.
- FIG. 3 is a schematic overview of the array-type optical component 3 shown in FIG. 1 viewed from the position of the collimating lens 4. However, the upper and lower sides of the collimating lens 2 and the array type optical component 3 are omitted.
- the array pitch of the array type optical component 3 in the X direction is the array pitch of the array type semiconductor laser 1 (interval of each light emitting point 1a). Dp Is equal to, and the light beam from each light emitting point of the array type semiconductor laser 1 is rotated by 90 ° around the Z axis to form an array light beam aligned in the X direction.
- the beam emitted from each light emitting point in this manner is converted into an isotropic condensing beam by passing through the collimating lens 2, the array-type optical component 3 and the collimating lens 4, and is orthogonal to two directions.
- the divergence angle for is controlled. Furthermore, by adjusting the magnification of the collimating lenses 2 and 4, a circular beam with the same X-direction divergence angle and Y-direction divergence angle can be obtained. wear.
- the beam that has passed through the collimating lens 4 is condensed in the X and Y directions by the condensing lens 5, adjusted to a divergence angle and a beam diameter that match the numerical aperture of the optical fiber 6, and then the optical fiber 6. Is incident on.
- FIG. 4 is a cross-sectional view of the array-type optical component 3 in which triangular prism-shaped unit optical elements are stacked, cut along a plane perpendicular to the axis of the triangular prism.
- the number of unit optical elements is equal to the number of light emitting points of the array type semiconductor laser, but only a part thereof is shown here.
- the array pitch in this direction is hp and the width of the light reflecting surface is wt.
- Figure 5 shows the positional relationship of each part.
- an actual numerical example is shown.
- the array-type optical component 3 is configured by stacking triangular prism-shaped transmission optical elements having a simple shape in multiple stages, so that the coupling optical system can be configured at low cost.
- the array type optical component 3 requires a short propagation distance for 90 ° rotation of the beam. Therefore, the array type optical component 3 rotates 90 ° before the beam from the adjacent light emitting point of the array type semiconductor laser 1 is mixed. Can be completed. For this reason, the divergence angle in the X direction of the beam from each light emitting point can be controlled using a simple-shaped collimator lens 4, eliminating the need for a conventional microlens array and an inexpensive coupling optical system. Can be configured.
- the unit transmission optical elements constituting the array-type optical component 3 have at least the light incident surface 3a. And the force S described for the case of a substantially triangular cross-sectional shape including the light reflecting surface 3b and the light emitting surface 3c, it goes without saying that the polygonal shape obtained by cutting off the non-passing part of the beam has the same function. Absent.
- the light beam from the two light emitting points of the array type semiconductor laser is converted into the array type optical component.
- one unit transmission optical element it can be rotated 90 ° around the Z axis, and as a whole, it can be an array light beam arranged in two rows in the X direction. In this way, a plurality of light beams from each light emitting point of the array type semiconductor laser as shown in FIG. 3 are not incident on each unit transmission optical element of the array type optical component.
- the light beam from the light emitting point may be incident on one unit transmission optical element.
- the array-type optical component 3 is a triangular prism having three optical surfaces, it is manufactured inexpensively by manufacturing a long triangular prism, and dividing and stacking appropriately like a so-called Kintaro. The power S to do.
- the array-type optical component 3 is a similar material (preform) having a cross-sectional shape in which a plurality of triangles are stacked so that the bottom surfaces are substantially parallel to each other, as in the optical fiber drawing method. Can also be produced by stretching along the vertical direction of the cross-section, which makes it possible to produce a large amount at low cost.
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- Optical Couplings Of Light Guides (AREA)
- Semiconductor Lasers (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
Description
明 細 書 Specification
アレイ型光学部品およびその製造方法、ならびにアレイ型半導体レーザ 用光学系 Array-type optical component, manufacturing method thereof, and optical system for array-type semiconductor laser
技術分野 Technical field
[0001] 本発明は、アレイ型半導体レーザからの出力光を、光ファイバ等の光学素子と結合 させるためのアレイ型光学部品、これを用いたアレイ型半導体レーザ用光学系、およ びアレイ型光学部品の製造方法に関する。 The present invention relates to an array type optical component for coupling output light from an array type semiconductor laser to an optical element such as an optical fiber, an optical system for an array type semiconductor laser using the same, and an array type The present invention relates to a method for manufacturing an optical component.
背景技術 Background art
[0002] 小型で高い出力が得られるレーザ光源として、アレイ型半導体レーザの応用が拡 大している。アレイ型半導体レーザは、十数個〜数十個の複数の発光点を有し、そ れぞれの発光点から光が出力されるように構成されている。これらのアレイ状発光点 力もの複数の出力光を収束することによって、高出力のレーザ光源として利用するこ とができる。例えば、アレイ型半導体レーザの出力光を光ファイバに結合することによ つて、より自由度が高く多様な応用が可能となる。 [0002] The application of array type semiconductor lasers is expanding as a laser light source that is small and can provide high output. The array type semiconductor laser has a plurality of light emission points of several tens to several tens, and is configured to output light from each light emission point. By converging a plurality of output lights having these array-like light emission points, they can be used as a high-power laser light source. For example, by coupling the output light of an array type semiconductor laser to an optical fiber, it is possible to make various applications with a higher degree of freedom.
[0003] 一般に、アレイ型半導体レーザの各発光点の出力ビームは、発光点の配列方向に 対して垂直な方向には集光性が高いが、発光点の配列方向と平行な方向には集光 性が低いといった特性を有する。従って、集光性の低い方向に多数のビームが整列 するため、アレイ型半導体レーザ全体として発光点の配列方向と平行な方向の集光 性が極端に低くなり、円形断面の光ファイバとの結合は困難である。 In general, the output beam of each light emitting point of an array type semiconductor laser has a high light collecting property in a direction perpendicular to the light emitting point arrangement direction, but is concentrated in a direction parallel to the light emitting point arrangement direction. It has characteristics such as low light intensity. Therefore, since many beams are aligned in the direction of low condensing property, the condensing property in the direction parallel to the arrangement direction of the light emitting points becomes extremely low as an entire array type semiconductor laser, and it is coupled with an optical fiber having a circular cross section. It is difficult.
[0004] アレイ型半導体レーザの結合光学系として、例えば、下記の非特許文献 1の図 8に は、ステップミラーが記載されている。これは下記の特許文献 1に開示されたものと同 一である。ステップミラーは、洗濯板状に切り出した構造を持つミラーを 2枚重ね合わ せ、斜めに傾斜したステップ面を 90° ねじって向かい合わせたものである。向かい合 つたステップ面が反射面となっており、アレイ型半導体レーザの各発光点からの各々 の出射ビームを第 1、第 2のステップミラーでの合計 2回の反射によって 90° 回転さ せる。これによつて集光性の高い方向に沿って多数個のビームが並ぶように各発光 点のビームを再配列し、アレイ型半導体レーザの出力光を円形の光ファイバへの結 合に適した等方的な集光性のビームに変換するものである。 [0004] As a coupling optical system of an array type semiconductor laser, for example, FIG. 8 of Non-Patent Document 1 below describes a step mirror. This is the same as that disclosed in Patent Document 1 below. The step mirror is made by stacking two mirrors with a structure cut out in the shape of a washboard, and twisting the inclined step surface by 90 ° to face each other. The stepped surfaces facing each other are reflecting surfaces, and each outgoing beam from each light emitting point of the array type semiconductor laser is rotated 90 ° by a total of two reflections by the first and second step mirrors. As a result, the beams at the respective emission points are rearranged so that a large number of beams are aligned along the direction of high light collection, and the output light of the array type semiconductor laser is connected to a circular optical fiber. It is converted into an isotropic condensing beam suitable for the case.
[0005] しかしながら、こうしたステップミラーの組合せは、形状が複雑で、製作も困難であり 、結合光学系が高価となる問題がある。 However, such a combination of step mirrors has a complicated shape and is difficult to manufacture, and there is a problem that the coupling optical system becomes expensive.
[0006] また、実際には、ステップミラーとは別に、発光点の配列方向に垂直な方向と平行 な方向で異なるビームの発散角を平行に揃えて力 集光するためのコリメートレンズ が用いられており、平行な方向に関しては、各発光点間のビームが発散角によって 混合する前に各発光点からのビームをコリメートする必要がある。従来のステップミラ 一方式では、ビーム再配列に要する伝搬距離が長ぐステップミラーの後では各発光 点間のビームが混合してしまうため、ステップミラーへの入射前に複雑な形状のマイ クロレンズアレイを揷入する必要がある。その結果、全体の光学系がさらに高価となる 問題がある。 [0006] In practice, apart from the step mirror, a collimating lens is used to collect the force by aligning the divergence angles of different beams in parallel in a direction parallel to the direction perpendicular to the light emitting point arrangement direction. For parallel directions, it is necessary to collimate the beam from each emission point before the beam between each emission point is mixed by the divergence angle. Conventional step mirror In the one-sided formula, the beam between the light emitting points is mixed after the step mirror, which has a long propagation distance for beam rearrangement. You need to purchase an array. As a result, there is a problem that the entire optical system becomes more expensive.
[0007] 非特許文献 1の図 6には、プリズムアレイを用いた構成も報告されている。非特許文 献 1の図 7には、アレイ型半導体レーザから入射したビームがプリズム内の反射によ つて変換されて出射していく様子が模式的に示されている。プリズム内面の 3回の全 反射によって、アレイ型半導体レーザの各発光点から出射されるビームを 90° 回転 して平行成分と垂直成分を入れ換えることが可能であり、前述したステップミラーの構 成と同様に、アレイ型半導体レーザの出力光を円形の光ファイバへの結合に適した 等方的な集光性のビームに変換することができる。 [0007] FIG. 6 of Non-Patent Document 1 also reports a configuration using a prism array. FIG. 7 of Non-Patent Document 1 schematically shows how a beam incident from an array type semiconductor laser is converted by a reflection in a prism and emitted. By the total internal reflection of the prism inner surface, it is possible to rotate the beam emitted from each light emitting point of the array type semiconductor laser by 90 ° and replace the parallel component with the vertical component. Similarly, the output light of the array type semiconductor laser can be converted into an isotropic condensing beam suitable for coupling to a circular optical fiber.
[0008] プリズムアレイを用いた方式では、各プリズム素子の形状は斜角柱形状であり、入 出射面と 3つの反射面を合わせて 5面が光学面であることから、個々のプリズム素子 を光学仕上げする必要があり、結合光学系が高価となる問題がある。 [0008] In the method using a prism array, the shape of each prism element is an oblique prism shape, and the five surfaces are the optical surfaces including the input / output surface and the three reflecting surfaces. There is a problem that the coupling optical system becomes expensive because it needs to be finished.
[0009] また、プリズムアレイを用いた方式においても、ビーム再配列に要する伝搬距離が 比較的長ぐマイクロレンズアレイを揷入する必要があり、全体の光学系がさらに高価 となる問題がある。 [0009] Also, even in a system using a prism array, it is necessary to insert a microlens array having a relatively long propagation distance required for beam rearrangement, and there is a problem that the entire optical system becomes more expensive.
[0010] 特許文献 1 :特表平 10— 510933号公報 [0010] Patent Document 1: JP 10-510933 Gazette
非特許文献 1 :山口哲著、「半導体レーザー光の伝送技術」レーザー研究、第 27巻 3 号(1999年 3月)、皿〜 166頁 Non-Patent Document 1: Tetsu Yamaguchi, “Transmission Technology of Semiconductor Laser Light” Laser Research, Vol. 27, No. 3 (March 1999), Plate ~ 166 pages
非特許文献 2 : OPTICS LETTERS, Vol. 20, No. 8, April 15, 1995 発明の開示 Non-Patent Document 2: OPTICS LETTERS, Vol. 20, No. 8, April 15, 1995 Disclosure of the invention
発明が解決しょうとする課題 Problems to be solved by the invention
[0011] 上述したように、従来のアレイ型半導体レーザの結合光学系は、アレイ型半導体レ 一ザの各発光点のビームを再配列して円形光ファイバへの結合に適したビームに変 換するための光学部品として、製造が難しぐ高価な部品が必要であるという問題が ある。 [0011] As described above, the conventional array-type semiconductor laser coupling optical system rearranges the beams at the respective emission points of the array-type semiconductor laser to convert them into beams suitable for coupling to a circular optical fiber. There is a problem that an expensive part that is difficult to manufacture is required as an optical part for the purpose.
[0012] さらに、ビーム再配列のために比較的長い伝搬距離を要するために、マイクロレン ズアレイを併用する必要があり、全体の光学系がさらに複雑で高価となる問題がある [0012] Further, since a relatively long propagation distance is required for beam rearrangement, it is necessary to use a microlens array together, and there is a problem that the entire optical system becomes more complicated and expensive.
〇 Yes
[0013] 本発明の目的は、比較的簡単な構成で、アレイ型半導体レーザの出力光を等方的 な集光性の光ビームに変換できるアレイ型光学部品およびアレイ型半導体レーザ用 光学系を提供することである。 An object of the present invention is to provide an array type optical component and an optical system for an array type semiconductor laser that can convert the output light of the array type semiconductor laser into an isotropic light beam with a relatively simple configuration. Is to provide.
[0014] また本発明の目的は、こうしたアレイ型光学部品を安価かつ大量に生産が可能な アレイ型光学部品の製造方法を提供することである。 [0014] Another object of the present invention is to provide a method for manufacturing an array-type optical component capable of producing such an array-type optical component at low cost and in large quantities.
課題を解決するための手段 Means for solving the problem
[0015] 本発明に係るアレイ型光学部品は、光入射面と、該光入射面で屈折した光を反射 する光反射面と、該光反射面で反射した光を屈折させる光出射面とを有する三角柱 状の単位透過光学素子が、光反射面同士が略平行となるように複数積み重ねられて 構成されている。 [0015] An array type optical component according to the present invention includes a light incident surface, a light reflecting surface that reflects light refracted by the light incident surface, and a light emitting surface that refracts light reflected by the light reflecting surface. A plurality of triangular prism-shaped unit transmission optical elements are stacked so that the light reflecting surfaces are substantially parallel to each other.
[0016] また本発明に係るアレイ型半導体レーザ用光学系は、複数の発光点を有するァレ ィ型半導体レーザからの出力光を集光するための光学系であって、 An optical system for an array type semiconductor laser according to the present invention is an optical system for condensing output light from an array type semiconductor laser having a plurality of emission points,
出力光が入射する光入射面と、該光入射面で屈折した光を反射する光反射面と、 該光反射面で反射した光を屈折させる光出射面とを有する三角柱状の単位透過光 学素子カ、光反射面同士が略平行となるように複数積み重ねられて構成されたァレ ィ型光学部品を備え、 Triangular prism-shaped unit transmitted light having a light incident surface on which output light is incident, a light reflecting surface that reflects light refracted by the light incident surface, and a light emitting surface that refracts light reflected by the light reflecting surface It is equipped with an array type optical component constructed by stacking multiple elements so that the light reflecting surfaces are substantially parallel to each other.
アレイ型半導体レーザの発光点の配列方向を X方向とし、出力光の進行方向を Z 方向とし、 X方向および Z方向に垂直な方向を Y方向として、各単位透過光学素子の 光反射面が Z方向に対して平行、かつ X— Z面に対して略 45° で交差するように、前 記アレイ型光学部品が配置されている。 The arrangement direction of the emission points of the array type semiconductor laser is the X direction, the traveling direction of the output light is the Z direction, and the X direction and the direction perpendicular to the Z direction are the Y direction. Parallel to the direction and intersect the X-Z plane at approximately 45 °. The array type optical component is arranged.
[0017] 本発明において、アレイ型半導体レーザとアレイ型光学部品との間に設けられ、ァ レイ型半導体レーザからの出力光を Y方向に集光するための第 1集光レンズと、 アレイ型光学部品を通過した光を Y方向に集光するための第 2集光レンズと、 第 2集光レンズを通過した光を X方向および Y方向に集光するための第 3集光レン ズとをさらに備えることが好ましい。 In the present invention, a first condenser lens provided between the array type semiconductor laser and the array type optical component for condensing output light from the array type semiconductor laser in the Y direction, and an array type A second condensing lens for condensing the light that has passed through the optical component in the Y direction, and a third condensing lens for condensing the light that has passed through the second condensing lens in the X and Y directions. It is preferable to further comprise.
[0018] 本発明において、第 3集光レンズを通過した光を伝送するための光ファイバをさら に備えることが好ましい。 [0018] In the present invention, it is preferable to further include an optical fiber for transmitting light that has passed through the third condenser lens.
[0019] また本発明に係るアレイ型光学部品の製造方法は、底面同士が略平行となるように[0019] Further, in the method of manufacturing an array type optical component according to the present invention, the bottom surfaces are substantially parallel to each other.
、複数の三角形が積み重なった断面形状を有する素材を、断面垂直方向に沿って 引き伸ばすことによって製作する。 A material having a cross-sectional shape in which a plurality of triangles are stacked is produced by stretching along a vertical direction of the cross-section.
発明の効果 The invention's effect
[0020] 本発明によれば、比較的単純な三角柱形状の素子を積み重ねた光学部品を用い て、アレイ型半導体レーザの出力光を等方的な集光性のビームに変換することが可 能になる。その結果、円形の光ファイバへの結合光学系として、従来知られているス テツプミラーやプリズムアレイ方式と比較して、大量生産に適した低価格のアレイ型半 導体レーザ用光学系を実現することができる。 [0020] According to the present invention, it is possible to convert the output light of an array type semiconductor laser into an isotropic condensing beam by using an optical component in which relatively simple triangular prism-shaped elements are stacked. become. As a result, it is possible to realize a low-cost array-type semiconductor laser optical system suitable for mass production as a coupling optical system to a circular optical fiber, compared to the conventionally known step mirror and prism array methods. Can do.
図面の簡単な説明 Brief Description of Drawings
[0021] [図 1]本発明の第 1実施形態を示す斜視図である。 FIG. 1 is a perspective view showing a first embodiment of the present invention.
[図 2]アレイ型光学部品の機能を示す説明図であり、図 2 (a)は光進行方向に垂直な X— Y面を示し、図 2 (b)は単位透過光学素子の断面図を示す。 [Fig. 2] An explanatory diagram showing the function of the array-type optical component. Fig. 2 (a) shows the XY plane perpendicular to the light traveling direction, and Fig. 2 (b) shows a cross-sectional view of the unit transmission optical element. Show.
[図 3]図 1に示すアレイ型光学部品をコリメートレンズの位置から見た概略図である。 FIG. 3 is a schematic view of the array type optical component shown in FIG. 1 as viewed from the position of a collimating lens.
[図 4]三角柱形状の単位光学素子を積み重ねたアレイ型光学部品を三角柱の軸に 垂直な面で切った断面図である。 FIG. 4 is a cross-sectional view of array type optical components in which triangular prism-shaped unit optical elements are stacked, cut along a plane perpendicular to the axis of the triangular prism.
[図 5]アレイ型半導体レーザ用光学系における各部品の位置関係を示す。 FIG. 5 shows the positional relationship of each part in the optical system for an array type semiconductor laser.
符号の説明 Explanation of symbols
[0022] 1 アレイ型半導体レーザ、 2 コリメートレンズ、 3 アレイ型光学部品、 [0022] 1 array type semiconductor laser, 2 collimating lens, 3 array type optical component,
3a 光入射面、 3b 光反射面、 3c 光出射面、 4 コリメートレンズ、 5 集光レンズ、 6 光ファイバ。 3a Light entrance surface, 3b Light reflection surface, 3c Light exit surface, 4 Collimating lens, 5 condenser lens, 6 optical fiber.
発明を実施するための最良の形態 BEST MODE FOR CARRYING OUT THE INVENTION
[0023] 実施の形態 1. [0023] Embodiment 1.
図 1は、本発明の第 1実施形態を示す斜視図である。アレイ型半導体レーザ用光学 系は、アレイ型半導体レーザ 1からの出力光を光ファイバ 6に結合させる機能を有し、 光進行方向に沿って、コリメートレンズ 2と、アレイ型光学部品 3と、コリメートレンズ 4と 、集光レンズ 5などで構成される。 FIG. 1 is a perspective view showing a first embodiment of the present invention. The optical system for the array type semiconductor laser has a function of coupling the output light from the array type semiconductor laser 1 to the optical fiber 6, and along the light traveling direction, the collimating lens 2, the array type optical component 3, and the collimating lens. It consists of a lens 4 and a condenser lens 5.
[0024] アレイ型半導体レーザ 1は、十数個〜数十個の複数の発光点を有し、各発光点か ら光が出力される。ここでは、理解容易のため、アレイ型半導体レーザ 1の発光点の 配列方向を X方向とし、出力光の進行方向を Z方向とし、 X方向および Z方向に垂直 な方向を Y方向としている。 The array type semiconductor laser 1 has a plurality of light emission points of several tens to several tens, and light is output from each light emission point. Here, for easy understanding, the arrangement direction of the emission points of the array type semiconductor laser 1 is set as the X direction, the traveling direction of the output light is set as the Z direction, and the X direction and the direction perpendicular to the Z direction are set as the Y direction.
[0025] コリメートレンズ 2は、アレイ型半導体レーザ 1からの出力光を Y方向に集光する機 能を有し、例えば、 X方向に平行な母線を有するシリンドリカルレンズで構成される。 [0025] The collimating lens 2 has a function of condensing the output light from the array type semiconductor laser 1 in the Y direction, and is constituted by, for example, a cylindrical lens having a generatrix parallel to the X direction.
[0026] コリメートレンズ 4は、アレイ型光学部品 3を通過した光を Y方向に集光する機能を 有し、例えば、 X方向に平行な母線を有するシリンドリカルレンズで構成される。 [0026] The collimating lens 4 has a function of condensing light that has passed through the array-type optical component 3 in the Y direction, and is formed of, for example, a cylindrical lens having a generatrix parallel to the X direction.
[0027] 集光レンズ 5は、コリメートレンズ 4を通過した光を X方向および Y方向に集光する機 能を有し、例えば、回転対称系のレンズで構成される。 The condensing lens 5 has a function of condensing light that has passed through the collimating lens 4 in the X direction and the Y direction, and is composed of, for example, a rotationally symmetric lens.
[0028] アレイ型光学部品 3は、光入射面 3aと、光入射面 3aで屈折した光を反射する光反 射面 3bと、光反射面 3bで反射した光を屈折させる光出射面 3cとを有する三角柱状 の単位透過光学素子が、光反射面 3b同士が略平行となるように複数積み重ねられ て構成される。そして、アレイ型光学部品 3は、各単位透過光学素子の光反射面 3b 力 方向に対して平行、かつ X—Z面に対して略 45° で交差するように、コリメ一トレ ンズ 2とコリメートレンズ 4の間に配置されている。 The array-type optical component 3 includes a light incident surface 3a, a light reflecting surface 3b that reflects light refracted by the light incident surface 3a, and a light emitting surface 3c that refracts light reflected by the light reflecting surface 3b. A plurality of triangular prism-shaped unit transmission optical elements are stacked so that the light reflecting surfaces 3b are substantially parallel to each other. The array type optical component 3 is collimated with the collimating lens 2 so that it is parallel to the light reflecting surface 3b of each unit transmission optical element and intersects the X-Z plane at approximately 45 °. Located between the lenses 4.
[0029] 図 2は、アレイ型光学部品 3の機能を示す説明図であり、図 2 (a)は光進行方向に 垂直な X— Y面を示し、図 2 (b)は単位透過光学素子の断面図を示す。図 2 (a)に示 すように、水平なスリット状の光束(a— b)が Z方向に進行して、光入射面 3aに入射す ると、光入射面 3aで屈折して、光反射面 3bに向けて進行する。続いて、光束は光反 射面 3bで反射されて、光出射面 3cに向けて進行し、光出射面 3cで屈折すると、垂 直なスリット状の光束 (A— B)に変換される。 FIG. 2 is an explanatory view showing the function of the array type optical component 3. FIG. 2 (a) shows an XY plane perpendicular to the light traveling direction, and FIG. 2 (b) is a unit transmission optical element. FIG. As shown in Fig. 2 (a), when a horizontal slit-shaped light beam (a-b) travels in the Z direction and enters the light incident surface 3a, it is refracted by the light incident surface 3a, and light Proceed toward the reflective surface 3b. Subsequently, the light beam is reflected by the light reflecting surface 3b, travels toward the light emitting surface 3c, and refracts at the light emitting surface 3c. It is converted into a straight slit-shaped light beam (A—B).
[0030] 従って、 1つの単位透過光学素子は、 X方向に細長い光束が Z方向に沿って光入 射面 3aに入射すると、光束を Z軸回りに 90° 回転して、光出射面 3cから Y方向に細 長い光束を Z方向に沿って出射する機能、即ち、 90° 回転プリズムとして機能するこ とが判る。 [0030] Therefore, when a light beam that is elongated in the X direction is incident on the light incident surface 3a along the Z direction, one unit transmission optical element rotates the light beam by 90 ° around the Z axis, It can be seen that it functions as a 90 ° rotating prism that emits a light beam that is elongated in the Y direction along the Z direction.
[0031] 再び、図 1に戻って、アレイ型半導体レーザ 1の各発光点から出射したビームは、発 光点の配列方向である X方向には集光性が低ぐ Y方向には集光性が高いことから、 コリメートレンズ 2により Y方向にのみ集光され、 Y方向に関して略平行なビームに変 換される。 X方向については、アレイ型半導体レーザ 1での放射角がそのまま維持さ れるため、隣接した発光点からのビームが互いに混合する前に 90° 回転が完了する ように、アレイ型光学部品 3が位置決めされる。 [0031] Referring back to FIG. 1, the beam emitted from each light emitting point of the array type semiconductor laser 1 has a low light collecting property in the X direction, which is the arrangement direction of the light emitting points, and is condensed in the Y direction. Because of its high performance, it is focused only in the Y direction by the collimating lens 2 and converted into a beam that is substantially parallel to the Y direction. In the X direction, the radiation angle of the array-type semiconductor laser 1 is maintained as it is, so that the array-type optical component 3 is positioned so that the 90 ° rotation is completed before the beams from adjacent emission points mix with each other. Is done.
[0032] コリメートレンズ 2を通過した各ビーム力 S、アレイ型光学部品 3の各光入射面 3aに入 射すると、上述のように Z軸回りに 90° 回転して、光出射面 3cから出射する。これに より各ビームの X方向発散角と Y方向発散角が交換される。さらに、光出射面 3cから 出射した各ビームがコリメートレンズ 4を通過すると、 Y方向にのみ集光され、 Y方向 に関して略平行なビームに変換される。 X方向については、コリメートレンズ 2によって 制御された発散角がそのまま維持される。 [0032] When each beam force S that has passed through the collimating lens 2 is incident on each light incident surface 3a of the array type optical component 3, it is rotated by 90 ° around the Z axis as described above, and is emitted from the light emitting surface 3c. To do. This exchanges the X- and Y-direction divergence angles of each beam. Furthermore, when each beam emitted from the light exit surface 3c passes through the collimating lens 4, it is condensed only in the Y direction and converted into a beam substantially parallel to the Y direction. In the X direction, the divergence angle controlled by the collimating lens 2 is maintained as it is.
[0033] 図 3は、図 1に示すアレイ型光学部品 3をコリメートレンズ 4の位置から見た概略の概 観図である。ただし、コリメートレンズ 2、およびアレイ型光学部品 3の上下は省略して 描いている。図 3に示されるように、アレイ型光学部品 3の X方向のアレイピッチ(光反 射面 3bの X方向における間隔)をアレイ型半導体レーザ 1のアレイピッチ(各発光点 1 aの間隔) dpと等しくすることにより、アレイ型半導体レーザ 1の一つ一つの発光点か らの光束をそれぞれ Z軸回りに 90° 回転させて X方向に一列に並んだアレイ光束と すること力 Sでさる。 FIG. 3 is a schematic overview of the array-type optical component 3 shown in FIG. 1 viewed from the position of the collimating lens 4. However, the upper and lower sides of the collimating lens 2 and the array type optical component 3 are omitted. As shown in Fig. 3, the array pitch of the array type optical component 3 in the X direction (interval in the X direction of the light reflecting surface 3b) is the array pitch of the array type semiconductor laser 1 (interval of each light emitting point 1a). Dp Is equal to, and the light beam from each light emitting point of the array type semiconductor laser 1 is rotated by 90 ° around the Z axis to form an array light beam aligned in the X direction.
[0034] こうして各発光点から出射したビームは、コリメートレンズ 2,アレイ型光学部品 3およ びコリメートレンズ 4を通過することによって、等方的な集光性のビームに変換され、 直交 2方向に関する発散角が制御される。さらに、コリメートレンズ 2, 4の倍率を調整 することによって、 X方向発散角と Y方向発散角が等しい円形のビームを得ることがで きる。 [0034] The beam emitted from each light emitting point in this manner is converted into an isotropic condensing beam by passing through the collimating lens 2, the array-type optical component 3 and the collimating lens 4, and is orthogonal to two directions. The divergence angle for is controlled. Furthermore, by adjusting the magnification of the collimating lenses 2 and 4, a circular beam with the same X-direction divergence angle and Y-direction divergence angle can be obtained. wear.
[0035] コリメートレンズ 4を通過したビームは、集光レンズ 5によって X方向および Y方向に 集光され、光ファイバ 6の開口数に適合した発散角およびビーム径に調整された後、 光ファイバ 6に入射する。 The beam that has passed through the collimating lens 4 is condensed in the X and Y directions by the condensing lens 5, adjusted to a divergence angle and a beam diameter that match the numerical aperture of the optical fiber 6, and then the optical fiber 6. Is incident on.
[0036] 図 4は、三角柱形状の単位光学素子を積み重ねたアレイ型光学部品 3を三角柱の 軸に垂直な面で切った断面図である。なお、単位光学素子の数はアレイ型半導体レ 一ザの発光点の数に等しいが、ここではその一部を示している。図 4において、この 方向のアレイピッチを hp、光反射面の幅を wtとする。また、図 5に各部品の位置関係 を示す。 FIG. 4 is a cross-sectional view of the array-type optical component 3 in which triangular prism-shaped unit optical elements are stacked, cut along a plane perpendicular to the axis of the triangular prism. The number of unit optical elements is equal to the number of light emitting points of the array type semiconductor laser, but only a part thereof is shown here. In Fig. 4, the array pitch in this direction is hp and the width of the light reflecting surface is wt. Figure 5 shows the positional relationship of each part.
[0037] ここで実際の数値例を示す。例えば、アレイピッチ dpが 0. 5mm、各発光点の X方 向の長さ 150 μ m、 Y方向の長さ 1 μ m、 X方向の発散角 10° 、 Y方向の発散角 50 ° のアレイ型半導体レーザ 1を用いた場合、アレイ型半導体レーザ 1の出射面から L 1 = 0. 5mmの位置に焦点距離 0. 5mmの半円柱型のコリメートレンズ 2を配置し、コ リメ一トレンズ 2力、ら L2 = 0. 1mmの位置に X方向のアレイピッチ 0. 5mm、すなわち hp = 0. 353mm, wt= lmmの三角柱を積み重ねたアレイ型光学部品 3を配置する 。このアレイ型光学部品 3から L3 = 55mmの位置に焦点距離 57mmの半円柱型の コリメートレンズ 4を配置する。このように配置することにより、コリメートレンズ 4から L4 = lmmの位置に配置した口径 15mm、焦点距離 25mmの集光レンズ 5によりフアイ ノ 6の入射位置で X方向 50 μ m、 Y方向 66 μ mに集光でき、ファイバ径 100 μ の ファイバ 6に、アレイ型半導体 1からのレーザ光を効率良く入射できることが判る。 Here, an actual numerical example is shown. For example, an array with an array pitch dp of 0.5 mm, the length of each light emitting point in the X direction 150 μm, the Y direction length 1 μm, the X direction divergence angle 10 °, and the Y direction divergence angle 50 ° Type semiconductor laser 1, a semi-cylindrical collimating lens 2 with a focal length of 0.5 mm is placed at a position of L 1 = 0.5 mm from the emitting surface of the array type semiconductor laser 1, and the collimating lens 2 forces , Et al. An array type optical component 3 in which triangular prisms having an array pitch in the X direction of 0.5 mm, that is, hp = 0.353 mm, wt = lmm, are stacked at the position of L2 = 0. 1 mm. A semi-cylindrical collimating lens 4 with a focal length of 57 mm is arranged at a position L3 = 55 mm from this array type optical component 3. By arranging in this way, the collimating lens 4 is placed at the position of L4 = lmm from the collimating lens 4 and the condensing lens 5 with the aperture of 15mm and the focal length of 25mm is 50 μm in the X direction and 66 μm in the Y direction. It can be seen that the laser beam from the array-type semiconductor 1 can be efficiently incident on the fiber 6 having a fiber diameter of 100 μm.
[0038] 以上のように、アレイ型光学部品 3は、単純な形状である三角柱状の透過光学素子 を多段に積み重ねて構成しているために、結合光学系を安価に構成できる。 As described above, the array-type optical component 3 is configured by stacking triangular prism-shaped transmission optical elements having a simple shape in multiple stages, so that the coupling optical system can be configured at low cost.
[0039] 本発明に係るアレイ型光学部品 3は、ビームの 90° 回転に要する伝搬距離が短く て済むため、アレイ型半導体レーザ 1の隣接発光点からのビームが混合する前に 90 ° 回転を完了させることができる。このため、各発光点からのビームの X方向発散角 は、単純な形状のコリメートレンズ 4を用いて制御可能になるため、従来で必要であつ たマイクロレンズアレイが不要となり、安価な結合光学系を構成できる。 The array type optical component 3 according to the present invention requires a short propagation distance for 90 ° rotation of the beam. Therefore, the array type optical component 3 rotates 90 ° before the beam from the adjacent light emitting point of the array type semiconductor laser 1 is mixed. Can be completed. For this reason, the divergence angle in the X direction of the beam from each light emitting point can be controlled using a simple-shaped collimator lens 4, eliminating the need for a conventional microlens array and an inexpensive coupling optical system. Can be configured.
[0040] なお、アレイ型光学部品 3を構成する単位透過光学素子は、少なくとも光入射面 3a と、光反射面 3bと、光出射面 3cとを含む略三角形の断面形状である場合を説明した 力 S、ビームの不通過部分を切り落とした多角形形状でも同じ機能を有することは言う までもない。 [0040] The unit transmission optical elements constituting the array-type optical component 3 have at least the light incident surface 3a. And the force S described for the case of a substantially triangular cross-sectional shape including the light reflecting surface 3b and the light emitting surface 3c, it goes without saying that the polygonal shape obtained by cutting off the non-passing part of the beam has the same function. Absent.
[0041] また、アレイ型光学部品の X方向のアレイピッチをアレイ型半導体レーザのアレイピ ツチ dpの 2倍にすることにより、アレイ型半導体レーザの 2つの発光点からの光束を、 アレイ型光学部品の一つの単位透過光学素子により、 Z軸回りに 90° 回転させること ができ、全体として X方向に二列に並んだアレイ光束とすることができる。このように、 図 3に示したようなアレイ型半導体レーザの一つ一つの発光点からの光束をそれぞ れアレイ型光学部品の一つ一つの単位透過光学素子に入射するようにせず、複数 の発光点からの光束を一つの単位透過光学素子に入射するようにしてもよい。 [0041] Further, by making the array pitch in the X direction of the array type optical component twice the array pitch dp of the array type semiconductor laser, the light beam from the two light emitting points of the array type semiconductor laser is converted into the array type optical component. With one unit transmission optical element, it can be rotated 90 ° around the Z axis, and as a whole, it can be an array light beam arranged in two rows in the X direction. In this way, a plurality of light beams from each light emitting point of the array type semiconductor laser as shown in FIG. 3 are not incident on each unit transmission optical element of the array type optical component. The light beam from the light emitting point may be incident on one unit transmission optical element.
[0042] アレイ型光学部品 3の製造方法としては、切削および研磨による製作が容易であり 、あるいはモールド成形のための金型製作が容易である。 [0042] As a method of manufacturing the array-type optical component 3, manufacturing by cutting and polishing is easy, or manufacturing of a mold for molding is easy.
[0043] また、アレイ型光学部品 3は、 3つの光学面を持つ三角柱であるから、長尺の三角 柱を製作し、いわば金太郎飴のように適当に分割して積み重ねることによって安価に 製造すること力 Sでさる。 [0043] Since the array-type optical component 3 is a triangular prism having three optical surfaces, it is manufactured inexpensively by manufacturing a long triangular prism, and dividing and stacking appropriately like a so-called Kintaro. The power S to do.
[0044] また、アレイ型光学部品 3は、光ファイバの延伸法と同様に、底面同士が略平行と なるように、複数の三角形が積み重なった断面形状を有する相似形の素材 (プリフォ ーム)を、断面垂直方向に沿って引き伸ばすことによって製作することも可能であり、 これにより安価で大量に生産することができる。 [0044] Also, the array-type optical component 3 is a similar material (preform) having a cross-sectional shape in which a plurality of triangles are stacked so that the bottom surfaces are substantially parallel to each other, as in the optical fiber drawing method. Can also be produced by stretching along the vertical direction of the cross-section, which makes it possible to produce a large amount at low cost.
産業上の利用可能性 Industrial applicability
[0045] 本発明によれば、従来の光学系と比較して、大量生産に適した低価格のアレイ型 半導体レーザ用光学系を実現することができる。 [0045] According to the present invention, it is possible to realize a low-cost array type semiconductor laser optical system suitable for mass production as compared with a conventional optical system.
Claims
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| JP2006264033A JP2009294236A (en) | 2006-09-28 | 2006-09-28 | Array type optical component, method for manufacturing the same and optical system for array type semiconductor laser |
| JP2006-264033 | 2006-09-28 |
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| WO2008038699A1 true WO2008038699A1 (en) | 2008-04-03 |
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| EP0961152A1 (en) * | 1998-05-25 | 1999-12-01 | Fisba Optik Ag | Method and device for forming a collimated beam of light from the emissions of a plurality of light sources |
| WO2001035149A1 (en) * | 1999-11-10 | 2001-05-17 | Hamamatsu Photonics K.K. | Optical lens and optical system |
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| US6888679B2 (en) * | 2002-11-20 | 2005-05-03 | Mems Optical, Inc. | Laser diode bar integrator/reimager |
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| JPS5517110A (en) * | 1978-07-21 | 1980-02-06 | Nippon Telegr & Teleph Corp <Ntt> | Microfilm retrieval device |
| JPS63502451A (en) * | 1985-12-05 | 1988-09-14 | バクスター、インターナショナル、インコーポレイテッド | optical data acquisition device |
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| JPH0798402A (en) * | 1993-04-30 | 1995-04-11 | Nippon Steel Corp | Optical path changer used for linear array laser diode, laser device using the same, and manufacturing method thereof |
| EP0961152A1 (en) * | 1998-05-25 | 1999-12-01 | Fisba Optik Ag | Method and device for forming a collimated beam of light from the emissions of a plurality of light sources |
| WO2001035149A1 (en) * | 1999-11-10 | 2001-05-17 | Hamamatsu Photonics K.K. | Optical lens and optical system |
| WO2002091037A1 (en) * | 2001-05-09 | 2002-11-14 | Hamamatsu Photonics K.K. | Optical lens-use base material, optical lens, and method of producing optical lens |
| US6888679B2 (en) * | 2002-11-20 | 2005-05-03 | Mems Optical, Inc. | Laser diode bar integrator/reimager |
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