WO2008038573A1 - Anisotropic conductive connector and method for inspecting article inspected using this anisotropic conductive connector - Google Patents

Abstract

[PROBLEMS] To provide an anisotropic conductive connector excellent in durability in which elasticity does not fall even if scaling-down of inter-electrode dimensions progress to increase the load per area being borne by an elastic body, variation in height of the bump profile of an article inspected can be sufficiently absorbed, the electrode position of the article inspected progressed in scaling-down and the electrode position of an anisotropic conductive sheet can be matched accurately, electrical conduction can be attained even when the pressing force is small, and occurrence of buckling causing permanent deformation is eliminated. [MEANS FOR SOLVING PROBLEMS] An anisotropic conductive connector characterized in that a first anisotropic conductive sheet layer (20A) and a second anisotropic conductive sheet layer (20B) are formed with elastic conductive paths (21) respectively projecting in the thickness direction, and, under a state where the projecting portion (21a) of each elastic conductive path is inserted into the through hole (23) of a sheet-like spacer (20C), the first anisotropic conductive sheet layer (20A), the second anisotropic conductive sheet layer (20B), and the sheet-like spacer (20C) are assembled integrally.

Description

 Specification

 Anisotropic conductive connector and method for detecting test object using anisotropic conductive connector

 Technical field

 [0001] The present invention relates to an anisotropic conductive connector preferably used as an electrical connection between circuit elements such as a wafer and an IC substrate and a connector in an inspection apparatus for a printed board, and the anisotropic conductive connector. The present invention relates to a method for inspecting a used object.

 Background art

 [0002] As an anisotropic conductive sheet, for example, a sheet that exhibits conductivity only in the thickness direction, or a pressure-conductive conductive portion that exhibits conductivity only in the thickness direction when pressed in the thickness direction. It has been known. They can achieve a compact electrical connection without using means such as soldering or mechanical fitting, and if the sheet material is an elastic body such as an elastomer, It has features such as absorbing strain and making soft connections.

 [0003] Therefore, by utilizing such features, in the fields of electronic computers, electronic digital watches, electronic cameras, computer keyboards, etc., circuit elements such as a printed circuit board and a leadless chip carrier, a liquid crystal panel It is widely used as a connector to achieve electrical connection with each other.

 [0004] In addition, for electrical inspection of a circuit board such as a printed circuit board, V, an electrode to be inspected formed on one surface of the circuit board to be inspected, and a connection formed on the surface of the circuit board for inspection In order to achieve electrical connection with the electrodes for the test, an anisotropic conductive sheet should be interposed as a connector between the electrode area to be inspected on the circuit board and the electrode area for connection on the circuit board for inspection. Has been done.

For example, as shown in FIG. 9, an anisotropic conductive connector 10 is arranged between an inspection object 1 such as a wafer to be inspected, an IC substrate, etc., and an inspection circuit board 5, and the object to be inspected. By pressurizing the test object 1, the test object 1 is brought into contact with the anisotropic conductive connector 10 and an electric signal is supplied from this state to the test circuit board 5 to inspect the test circuit board 5 6 electrodes Then, the electric signal is sent back to the inspection circuit board 5 through the anisotropic conductive connector 10 to inspect the circuit of the object 1 to be inspected. ing.

 [0006] Conventionally, anisotropic conductive sheets used for such electrical inspections are known in various structures. For example, Patent Document 1 (Japanese Patent Laid-Open No. 51-93393) and the like are known. Discloses an anisotropic conductive sheet obtained by uniformly dispersing metal particles in an elastomer (hereinafter referred to as “dispersed anisotropic conductive sheet”), and Patent Document 2 (Patent Document 2) (Kaisho 53-1477 72)) distributes conductive magnetic particles non-uniformly in the elastomer so that a number of conductive path forming portions extending in the thickness direction can be insulated from each other. An anisotropic conductive sheet (hereinafter referred to as “unevenly-distributed anisotropic conductive sheet”) is disclosed, and Patent Document 3 (Japanese Patent Laid-Open No. 61-250906) and the like are further disclosed. An unevenly anisotropic anisotropic conductive sheet in which a step is formed between the surface of the conductive path forming part and the insulating part. Door has been disclosed.

 [0007] Since the unevenly distributed anisotropic conductive sheet has a conductive path forming portion formed in accordance with the pattern of the electrode pattern of the circuit board or the like and the opposite pattern, it is connected in comparison with the distributed anisotropic conductive sheet. This is advantageous in that the electrical connection between the electrodes can be achieved with high reliability even for a circuit board or the like in which the electrodes to be arranged are arranged at a small pitch.

 [0008] By the way, in recent years, surface mount LSIs and electronic circuit boards have become increasingly finer and more dense in electrode dimensions and inter-electrode dimensions. Sheets have also been required to be finer, such as forming conductive parts. With the progress of such miniaturization, in the anisotropic conductive sheet, the area ratio between the area of the elastic body and the conductive portion is reduced, and the load load per area supported by the elastic body against strain is reduced. Will become large and the elasticity will decrease.

 [0009] In addition, the bump shape of the electrode 2 to be inspected 1 in contact with the anisotropic conductive sheet also varies to some extent with respect to the height direction. For this reason, depending on the bump shape, there is a portion that is partially subjected to high strain, and it is preferable that the anisotropic conductive sheet has elasticity that can sufficiently absorb variations in the height of the bump shape.

[0010] In addition, the conventional unevenly distributed anisotropic conductive sheet is based on silicone rubber or the like. However, the circuit boards and semiconductor elements connected to this are glass fiber-containing epoxy resin, metal plates such as copper, silicon, etc., and the thermal expansion coefficients of the two are different. Deviation occurs, and electrical continuity may not be obtained especially when the pressing force is small. Such a problem becomes more prominent as the electrode pattern becomes finer with a narrower electrode interval.

 On the other hand, in order to solve such a problem, for example, Patent Document 4 (Japanese Patent Laid-Open No. 2001-93599) is provided by the present applicant. In Patent Document 4, as shown in FIG. 10, an insulating sheet-like spacer 9 in which a through-hole is formed is interposed between an object to be inspected 3 and an anisotropic conductive sheet 7, A projecting electrode 3a projecting from the inspection object 3 from one side is inserted into the through hole 11 of the sheet-like spacer 9, and a conductive path is formed projecting from the other side to the anisotropic conductive sheet 7. The part 7a is inserted, and the tips of each other are brought into contact with each other in the through hole. Patent Document 1: Japanese Patent Laid-Open No. 51-93393

 Patent Document 2: Japanese Patent Laid-Open No. 53-147772

 Patent Document 3: Japanese Patent Application Laid-Open No. 61-250906

 Patent Document 4: Japanese Patent Laid-Open No. 2001-93599

 Disclosure of the invention

 Problems to be solved by the invention

 By the way, as in Patent Document 4, when the protruding electrode 3a and the conductive path forming portion 7a are directly inserted into the through hole 11 of the spacer 9, the protrusion electrode 3 and the conductive path forming portion 7a Since the alignment becomes difficult, the thickness of the anisotropic conductive sheet could not be set sufficiently thick. If the dimensional accuracy is not set high, it is difficult to adjust the amount of deformation during pressurization by the spacer 9, and the conductive path forming portion 7a is laterally moved when pressurized from the inspected object 3 side. There is a risk that it will buckle and cause permanent deformation.

[0013] In view of such a conventional situation, the present invention, when inspecting the electrical characteristics of the inspection object, the inter-electrode dimension has become finer and the load load per area supported by the elastic body has increased. Therefore, the elasticity does not decrease, and the variation in bump shape height of the object to be inspected can be sufficiently absorbed, and the electrode position and anisotropic conductivity of the object to be inspected have been further miniaturized. The electrode position on the sheet can be accurately aligned, and in addition, the pressing force is small In addition, it is possible to provide an anisotropic conductive connector that can obtain electrical continuity and has excellent durability without buckling that causes permanent deformation in the elastic conductive path of the anisotropic conductive sheet. As Mejiro Tsumugi! /

[0014] Further, the present invention is to provide a method for inspecting an object to be inspected using the anisotropic conductive connector.

 Means for solving the problem

[0015] An anisotropic conductive connector according to the present invention includes:

 An anisotropic conductive connector for inspecting the electrical characteristics of an object to be inspected, comprising a first anisotropic conductive sheet layer disposed on the inspected object side to be inspected and an inspection circuit board side A second anisotropic conductive sheet layer disposed; and an insulating sheet-like spacer disposed between the first anisotropic conductive sheet layer and the second anisotropic conductive sheet layer. Configured,

 Each of the first anisotropic conductive sheet layer and the second anisotropic conductive sheet layer is formed such that an elastic conductive path protrudes in the thickness direction, and the protruding portion of each elastic conductive path is The first anisotropic conductive sheet layer, the second anisotropic conductive sheet layer, and the sheet spacer are integrated with each other while being inserted into the through hole of the sheet spacer. It is characterized by being assembled! /!

 [0016] According to the anisotropically conductive connector having such a configuration, the force S can be selected appropriately for the thickness of the spacer, and therefore the force S can be secured to ensure a sufficient thickness.

 [0017] Further, an anisotropic conductive connector for inspecting electrical characteristics of an object to be inspected according to the present invention is:

An anisotropic conductive connector for inspecting the electrical characteristics of an object to be inspected, the first anisotropic conductive sheet layer disposed on the inspected object side to be inspected, and the inspection circuit board side A second anisotropically conductive sheet layer, an insulating sheet-like spacer disposed between the first anisotropically conductive sheet layer and the second anisotropically conductive sheet layer, and the sheet A conductive contact member fixed on the back side of the spacer, and the first anisotropic conductive sheet layer and the second anisotropic conductive sheet layer have a thickness respectively. Elastic conductive paths projecting in the direction and the first anisotropic conductivity When a protruding portion of one of the elastic conductive path in the sheet layer or the elastic conductive path in the second anisotropic conductive sheet is inserted into the through hole of the sheet-like spacer, The protruding portion of the first anisotropic conductive sheet layer and the protruding portion of the second anisotropic conductive sheet layer are arranged to face each other via the conductive contact member! As a special feature!

[0018] According to the anisotropic conductive connector having such a configuration, the force S can be selected as appropriate for the thickness of the spacer, and the conductive contact portion can be used even when the pressing load from the inspection object side is small. Realizes stable electrical connection between the elastic conductive path protruding from the first anisotropic conductive sheet layer and the elastic conductive path protruding from the second anisotropic conductive sheet layer through the material This ensures that the contact stability between the elastic conductors is sufficiently high and prevents small deformations that can cause buckling, damage, collapse or permanent deformation of the elastic conductors. Can obtain high strength and durability.

 Furthermore, in the present invention, it is preferable that the conductive contact member fixed on the back side of the sheet-like spacer is made of a metal plate.

With such a configuration, it is possible to prevent occurrence of abnormal deformation such as distortion of the elastic conductive path of the anisotropically conductive connector.

[0020] Further, in the present invention, it is preferable that a support region portion of the sheet-shaped spacer that supports the conductive contact member is formed to be displaceable in a thickness direction of the sheet-shaped spacer. That's right.

 [0021] With such a configuration, the contact between the conductive contact member and the elastic conductive path can be reliably performed.

 Here, it is preferable that a slit is formed in the support region portion of the sheet-like spacer so that the periphery of the slit can be displaced in the thickness direction.

[0023] With such a configuration, it is possible to easily realize the deformation of the support region portion.

[0024] Further, in the present invention, the sheet-like spacer is composed of two plate members, and the conductive contact member is disposed between the first plate member and the second plate member, and V, OK!

[0025] With such a configuration, the elastic conductive path on the first anisotropic conductive sheet side and the second anisotropic conductive path Since the elastic conductive path on the conductive sheet side can be arranged at the center position of the two plates, positioning can be performed accurately.

[0026] Further, the inspection method for an object to be inspected using the anisotropic conductive connector according to the present invention includes a first anisotropic conductive material that is arranged on the object side and has an elastic conductive path protruding in the thickness direction. With the sea cocoon layer,

 An insulating sheet-like spacer having a through hole is disposed between the second anisotropic conductive sheet layer that is disposed on the inspected object side and has an elastic conductive path protruding in the thickness direction. On the occasion

 An elastic conductive path protruding from the anisotropic conductive sheet layer is inserted into the through hole of the sheet-shaped spacer so as to abut on both sides, and the thickness of the sheet-shaped spacer and the It is a special feature that the amount of deformation of the elastic conductive path is adjusted by appropriately adjusting the length of the elastic conductive path.

[0027] According to such an inspection method, the amount of deformation of the elastic conductive path can be set as appropriate, so that it is possible to contribute to improvement in durability while performing an accurate inspection.

 The invention's effect

 [0028] According to the anisotropic conductive connector of the present invention, the overall thickness can be set sufficiently thick by interposing a spacer. In addition, the amount of deformation during pressurization can be adjusted by adjusting the thickness of the spacer. Furthermore, the deformation amount of the elastic conductive path can be regulated by the inner wall surface of the through hole of the spacer. As a result, the durability when repeatedly used can be improved. In addition, if a conductive contact member is fixed to the back of the through hole of the sheet spacer, electrical connection will be easy even if the test is performed with a small applied pressure. Can do.

 [0029] Further, according to the inspection method using the anisotropic conductive connector according to the present invention, the anisotropic conductive connector can be adjusted to the most preferable thickness, so that a correct inspection is performed. Not only can the force S be applied, but also the amount of deformation of the elastic conductive path can be regulated, so the durability of repeated use is improved.

 Brief Description of Drawings

FIG. 1 is a plan view of an anisotropic conductive connector according to an embodiment of the present invention. [FIG. 2] FIG. 2 is a partially enlarged cross-sectional view of the anisotropic conductive connector shown in FIG.

 FIG. 3 is a cross-sectional view when the enlarged portions shown in FIG. 2 are assembled together.

[FIG. 4] FIG. 4 shows another embodiment of the present invention, in which a sheet-like spacer is composed of two plates, and a conductive contact member is installed on one of the plates. It is the expanded sectional view shown.

5] FIG. 5 is an enlarged cross-sectional view showing a state in which the sheet-like spacer composed of the two plates shown in FIG. 4 is assembled together with the conductive contact member.

 FIG. 6 is a plan view of the first plate shown in FIG.

 FIG. 7 is an assembled cross-sectional view of the sheet-like spacer member shown in FIG.

8] FIG. 8 is a cross-sectional view of an anisotropic conductive connector according to still another embodiment of the present invention. 9] FIG. 9 inspects an object to be inspected such as a circuit board using the anisotropic conductive connector. It is a schematic sectional drawing of the conventional inspection apparatus.

Fig. 10 is a cross-sectional view of a conventional inspection apparatus disclosed in Japanese Patent Laid-Open No. 2001-93599.

Explanation of symbols

 20 anisotropic conductive nectar

 20 A First anisotropic conductive sheet layer

 20B Second anisotropic conductive sheet layer

 20B 'Second anisotropic conductive sheet layer

 20C sheet spacer

 21 Elastic conductive path

 22a, 22b ;

 21a Protruding part

 23 Through hole

 25 First plate

27 Second plate 28 Support area

 30 anisotropic conductive nectar

 50 anisotropic conductive nectar

 BEST MODE FOR CARRYING OUT THE INVENTION

 Hereinafter, an anisotropic conductive connector according to the present invention and a method for inspecting an object to be inspected using the anisotropic conductive connector will be described with reference to the drawings.

 FIG. 1 is a plan view of an anisotropic conductive connector 20 according to an embodiment of the present invention, and FIG. 2 is a partially enlarged sectional view in the direction of the line AA in FIG.

 [0034] As shown in Fig. 2, the anisotropic conductive connector 20 of the present embodiment includes a first anisotropic conductive sheet layer 20A, a second anisotropic conductive sheet layer 20B, and the like. The insulating sheet-like spacer 20C is disposed between the first and second anisotropic conductive sheet layers.

 [0035] Since the first anisotropic conductive sheet layer 20A and the second anisotropic conductive sheet 20B are formed in the same manner, the first anisotropic conductive sheet layer 20A will be described below as an example. Explained.

 As shown in FIG. 1, the anisotropic conductive sheet 20A includes a plurality of cylindrical elastic conductive paths 21 extending in the thickness direction, and an insulating portion 15 that insulates the elastic conductive paths 21 from each other. And a plate-like support 17 that supports the insulating portion 15, and is formed in a rectangular sheet shape as a whole. The elastic conductive path 21 contains conductive particles P exhibiting magnetism, and the elastic conductive path 21 exhibits conductivity when pressed in the thickness direction. In the example shown in FIG. 1, among the plurality of elastic conductive paths 21, for example, a range electrically connected to an electrode to be inspected such as a wafer to be inspected or an IC substrate is defined as an effective conductive path 12. The portion not connected to the target electrode is the ineffective conductive path 13. The effective conductive path 12 is arranged corresponding to the pattern of the electrode to be inspected to be connected, and the elastic conductive path 21 has protrusions 21a on both sides in the thickness direction, as shown in FIG. Is formed.

 [0037] The insulating portion 15 is integrally formed so as to surround the periphery of each elastic conductive path 21, so that all the elastic conductive paths 21 are insulated from each other by the insulating portion 15. Yes.

[0038] Various materials can be used as a material for forming the base material and the insulating portion 15 containing the conductive particles P. Specific examples thereof include polybutadiene rubber, natural rubber, polyisoprene. Conjugated rubbers such as rubber, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber and hydrogenated products thereof, block copolymers such as styrene butadiene-gen block copolymer rubber, styrene isoprene block copolymer, etc. Examples include polymer rubber and hydrogenated products thereof, black-prene, urethane rubber, polyester rubber, epichlorohydrin rubber, silicone rubber, ethylene-propylene copolymer rubber, and ethylene-propylene copolymer copolymer rubber. . In the above, when the anisotropically conductive sheet to be obtained is required to have weather resistance, it is preferable to use a material other than the conjugated-gen rubber. S, particularly from the viewpoint of molding processability and electrical properties, silicone rubber Is preferably used.

 [0039] As specific examples of the conductive particles P, particles of metal such as iron, cobalt, nickel or the like, particles of these alloys, particles containing these metals, or these particles as core particles, The surface of the core particle is coated with a metal having good conductivity such as gold, silver, palladium, rhodium, or non-magnetic metal particle or inorganic substance particle such as glass beads or polymer particle is used as the core particle. Examples include those obtained by coating the surface of the core particles with a conductive magnetic material such as nickel or cobalt, or those obtained by coating the core particles with both a conductive magnetic material and a metal having good conductivity. Among these, it is preferable to use nickel particles as core particles, and the surface of which is coated with a metal with good conductivity such as gold or silver. In particular, both gold and silver are coated. Are preferred. The means for coating the surface of the core particles with the conductive metal is not particularly limited, but can be performed by, for example, chemical plating or electroless plating.

[0040] The first anisotropic conductive sheet 20A and the second anisotropic conductive sheet 20B are formed as described above.

 [0041] Hereinafter, the sheet-like spacer 20C will be described.

Similarly to the case shown in FIG. 9, the sheet-like spacer 20C is positioned at the position corresponding to the pattern of the electrode 2 to be inspected, that is, the elastic conductivity of the anisotropic conductive sheet layers 20A and 20B. A through hole 23 is formed at a position corresponding to the paths 21, 21. In each through-hole 23, the corresponding projecting portions 21a and 21a of the anisotropic conductive sheet layers 20A and 20B are inserted from both directions. [0043] The shape of the through hole 23 of the sheet-like spacer 20C is not particularly limited, but the shape of the conductive path 21 and the shape of the protruding portion 21a of the anisotropic conductive sheet layers 20A and 20B For example, it is formed in a columnar shape.

 [0044] The inner diameter of the through hole 23 may be larger than the protruding portion 21a so that the protruding portion 21a of the anisotropic conductive sheets 20A and 20B is inserted, It is preferable that there is room. Specifically, the inner diameter of the through hole 23 is preferably such that the ratio to the diameter of the protruding portion 21a is, for example, 1.05 to 2 times, preferably 1.;! To 1.8 times. . The sheet-like spacer 20C is preferably positioned so that the tips of the protruding portions 21a inserted from both directions are close to the intermediate portion of the through hole 31.

[0045] The material of the sheet-like spacer 20C is made of a heat-resistant insulating material having high dimensional stability. S is preferable. Specifically, thermosetting such as glass fiber reinforced epoxy resin and polyimide resin. The ability to use thermoplastic resins such as conductive resin, polyethylene terephthalate resin, butyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, acrylic resin, polybutadiene resin, and other various insulating resins Especially glass fiber reinforcement A type epoxy resin is most suitable.

 For such an insulating material, a sheet-shaped spacer 20 C force S can be obtained by forming the through hole 23 using, for example, a numerical drilling device or a laser processing device. .

[0047] The thickness d of the sheet-like spacer 20C is smaller than the sum of the protruding height H of one protruding portion 21a and the height H of the other protruding portion 21a. Then, by controlling the thickness d of the sheet-like spacer 20C and the size and height of the protruding portion 21a, when the object 1 shown in FIG. The other protruding portion 21a is brought into contact with an appropriate force to ensure the electrical connection between them. Further, by appropriately adjusting the thickness of the sheet-like spacer 20C and the height of the protruding portion 21a of the elastic conductive path 21, the conductive path forming portion 21 including the protruding portions 21a of the anisotropic conductive sheets 20A and 20B can be adjusted. Excessive deformation is avoided. Therefore, a highly reliable operation can be obtained and the service life can be extended. [0048] The first anisotropic conductive sheet layer 20A, the second anisotropic conductive sheet layer 20B, and the sheet-like spacer 20C according to the present embodiment are configured as described above. However, these are assembled as shown in FIG. 3, and are arranged between the first anisotropic conductive sheet layer 20A and the sheet-like spacer 20 C, and the second anisotropic conductive sheet layer 20B and the sheet. Between the spacers 20C, the insulating portion 15 is integrally fixed by an adhesive such as silicon.

 [0049] The anisotropically conductive connector 20 formed in this way is arranged between an inspected object 1 such as an IC substrate and an inspection circuit board 5 as in the case shown in FIG. Used for electrical inspection of device under test 1. In FIG. 1, reference numeral 19 denotes a guide hole into which the guide pin is inserted.

 [0050] When the anisotropic conductive connector 20 as shown in Fig. 3 is used, the thickness of the protruding portion 21a of the elastic conductive path 21 and the thickness of the sheet-like spacer 20C can be appropriately adjusted. Accurate inspection of the object to be inspected 1 such as IC substrate and wafer. Further, since the protruding portions 21a, 21a having low heights are inserted from both sides of the through hole 23 and face each other at the central portion of the through hole 23, the electrode position is not easily displaced. Therefore, even if an inspection is performed with a small pressure or an inspection with a slightly large applied pressure, electrical continuity can be obtained. Further, it is determined by the force that absorbs the variation in the height direction of the electrode 2 to be inspected due to the deformation caused by the pressing of the protruding portion 21a.

 [0051] Thus, in the present invention, a good electrical inspection can be performed when inspecting the inspection object 1 on which a fine electrode pattern with a narrow electrode interval is formed.

[0052] Further, in the method for inspecting an object to be inspected such as an IC substrate using the anisotropic conductive sheet according to the present invention, the deformation amount of the elastic conductive path 21 can be appropriately set, so that an accurate inspection is performed. It can be strong and has good durability.

Although one embodiment of the present invention has been described above, the present invention is not limited to the above embodiment.

[0054] For example, in the above embodiment, the sheet-like spacer 20C is composed of one plate material, but may be composed of two plate materials instead. Further, when two sheet materials are used as the sheet-like spacer, a conductive contact member made of a material harder than the elastic conductive path 21 may be interposed between them. [0055] In the following, the force for explaining another embodiment of the present invention in which the sheet-like spacer 20C is composed of two plate members and a conductive contact member is interposed between them is the same as the above-described embodiment. Are denoted by the same reference numerals, and detailed description thereof is omitted.

 4 to 7 show an anisotropic conductive connector 30 according to another embodiment of the present invention.

[0057] This anisotropically conductive connector 30 includes a first anisotropically conductive sheet 20A, a second anisotropically conductive sheet 20B, and a sheet-like spacer 20C made of two plates. ! /

 In the anisotropic conductive connector 30, the first anisotropic conductive sheet layer 20A and the second anisotropic conductive sheet layer 20B are formed in the same manner as in the above embodiment. That is, the protruding portions 21a are formed on both sides of the insulating portion. Further, the sheet-like spacer 20C has a first plate member 25 and a second plate member 27 that are approximately half the thickness. These plate members 25 and 27 are similar to the above embodiment in that predetermined through holes 23 and 23 are formed.

 [0059] Further, in the anisotropic conductive connector 30 of the present embodiment, the through hole 23 is provided on the back surface side (second plate material 27 side) of the first plate material 25 constituting the sheet-like spacer 20C. A conductive contact member 29 is fixed so as to cover the body.

 [0060] As the material of the conductive contact member 29, various metals, conductive inorganic materials, and conductive organic materials are used as long as they are conductive. Of these, metals are preferable, such as copper, gold, silver, palladium, rhodium, nickel, iron, sus, aluminum, cobalt, tin, and zinc.

, Lead, a laminate thereof, or an alloy containing these. Among these, copper, gold, silver, palladium, rhodium, nickel, iron or a laminate thereof or an alloy containing these is preferred, and particularly, a copper or gold laminate is preferred. Is preferable as an alloy containing these.

 [0061] The conductive contact member 29 has, for example, a square shape or a circular shape in plan view. In addition, the conductive contact member 29 is formed on the elastic conductive portion 21 of the first and second anisotropic conductive sheet layers 20A and 20B so as to withstand the pressure when pressed to obtain electrical continuity. It is preferably a rigid body rather than a material.

[0062] The thickness of the conductive contact member 29 is, for example, 0.;!-1000 m, preferably;!-500 in, and more preferably 10-200 111. FIG. 6 is a plan view showing a part of the first plate member 25. In the first plate member 25, through-holes 23 are arranged vertically and horizontally corresponding to the respective positions of the protruding electrodes of the object to be inspected such as an IC substrate (corresponding to the protruding electrode 3a of the inspected object 3 in FIG. 10). It is formed in a state of being arranged in a shape. In addition, slits 22a extending in a U-shape are continuously formed in a region surrounding each through hole 23. In addition, linear slits 22b are formed in the open portions of the U-shaped slits 22a. Thus, the peripheral region of the through hole 23 is formed to be displaceable in the front-rear direction, that is, in the thickness direction of the sheet-like spacer 20C, on the paper surface of FIG.

 That is, the support region portion 28 of the conductive contact member 29 disposed so as to close the through hole 23 is formed to be displaceable in the thickness direction by these slits 22a and 22b. Thereby, deformation of the conductive contact member 29 is facilitated. The shape of the support region portion 28 of the conductive contact member 29 is not particularly limited as long as it can be displaced in the thickness direction. For example, the linear slit 22b reduces resistance to displacement of the support region portion 28, and is not essential. Thus, the shape of the slit that facilitates deformation is not limited to the embodiment. In FIG. 6, reference numeral 19 indicates a hole 19 for passing the positioning pin (see FIG. 1).

 [0065] The shape of the through-hole 23 is not particularly limited, but it is preferable that the through-hole 23 is, for example, widened in a columnar shape in that it can receive the electrode 2 to be inspected 1. In this example, the diameter of the through hole 21 is, for example, 1.05 to 2 times, preferably 1.;! To 1.6 times the maximum diameter of the electrode 2 to be inspected formed in a spherical shape, for example. More preferably, it is 1.2 to 1.4.

 [0066] In the present embodiment, the sheet-like spacer 20C is constituted by the two plate members 25 and 27 as described above, and the conductive contact member 29 is further provided. These are shown in FIG. Assemble each other to insulate between the first anisotropic conductive sheet layer 20A and the first plate member 25 and between the second anisotropic conductive sheet layer 20B and the second plate member 27. Adhesion may be performed with an appropriate adhesive.

In this embodiment, when the protruding portion 21a formed in the elastic conductive path 21 of the first anisotropic conductive sheet layer 20A is inserted into the through hole 23 of the first plate member 25, the protruding portion 21a The heights of the first plate member 25, the second plate member 27, and the protruding portion 21a are adjusted in advance so that the tip portion is arranged slightly apart so as to be close to the conductive contact member 29. . Similarly, the protruding portion 21a of the elastic conductive path 21 of the second anisotropic conductive sheet layer 20B is also arranged slightly apart so as to be close to the conductive contact member 29. Therefore, when pressed from the inspected object 1 side for electrical inspection, the relatively flexible elastic conductive path 21 comes into contact with the relatively hard conductive contact member 29, thereby making contact. Even if a test is performed with a small applied pressure in the same usage state as in Fig. 9, an electrical test can be performed.

 As described above, in the present invention, a sheet-like spacer can be constituted by two plate materials, and the overall thickness can be increased or decreased by using such a plate material.

 [0068] Further, the present invention can be variously modified.

 For example, in another embodiment of the present invention shown in FIG. 4 to FIG. 7, the force that causes the conductive contact member 29 to be interposed between the two plate members 25, 27, this conductive contact member 29 As shown in FIG. 8 between the two plate members 25 and 27, it can be installed on the sheet-like spacer 20C made of one plate member. In that case, for example, one projecting portion 21a of the second anisotropic conductive sheet 20B ′ corresponding to the conductive contact member 29 may be eliminated, and the entire end face may be formed substantially flat.

 [0070] Even with such an anisotropically conductive connector 50, it is possible to use the force S to produce the same effects as the above embodiments.

Claims

The scope of the claims  [1] An anisotropic conductive connector for inspecting the electrical characteristics of an object to be inspected,  A first anisotropic conductive sheet layer disposed on the inspected object side to be inspected, a second anisotropic conductive sheet layer disposed on the inspection circuit board side, and the first anisotropic conductive layer An insulating sheet-like spacer disposed between the sheet layer and the second anisotropic conductive sheet layer, and  Each of the first anisotropic conductive sheet layer and the second anisotropic conductive sheet layer is formed such that an elastic conductive path protrudes in the thickness direction, and the protruding portion of each elastic conductive path is The first anisotropic conductive sheet layer, the second anisotropic conductive sheet layer, and the sheet spacer are integrated with each other while being inserted into the through hole of the sheet spacer. An anisotropically conductive connector, characterized in that it is assembled together.  [2] An anisotropic conductive connector for inspecting the electrical characteristics of an object to be inspected,  A first anisotropic conductive sheet layer disposed on the inspected object side to be inspected, a second anisotropic conductive sheet layer disposed on the inspection circuit board side, and the first anisotropic conductive layer An insulating sheet-like spacer disposed between the sheet layer and the second anisotropic conductive sheet layer, and a conductive contact member fixed on the back side of the sheet-like spacer. The first anisotropic conductive sheet layer and the second anisotropic conductive sheet layer each have an elastic conductive path protruding in the thickness direction, and the first anisotropic conductive sheet layer. When the protruding portion of one of the elastic conductive paths in the sheet layer or the elastic conductive path in the second anisotropic conductive sheet is inserted into the through hole of the sheet-like spacer , The protruding portion of the first anisotropic conductive sheet layer, and the second And the projecting portion of the anisotropically conductive sheet layer, are oppositely placed through the conductive contact member! /, Anisotropically conductive connector, wherein Rukoto.  [3] The anisotropically conductive connector according to [2], wherein the conductive contact member fixed to the back side of the sheet-like spacer is made of a metal plate. [4] The supporting region of the sheet-like spacer that supports the conductive contact member is formed to be displaceable in the thickness direction of the sheet-like spacer. An anisotropic conductive connector as described in 1. 5. A slit force S is formed in the support region portion of the sheet-like spacer so that the periphery of the slit is formed to be displaceable in the thickness direction. 4. An anisotropic conductive connector according to 4. [6] The sheet-like spacer is composed of two plate members, and the conductive contact member is disposed between the first plate member and the second plate member. The anisotropically conductive connector according to any one of 2 to 5. [7] A first anisotropic conductive sheet layer disposed on the inspected object side and formed with an elastic conductive path protruding in the thickness direction;  An insulating sheet-like spacer having a through hole is disposed between the second anisotropic conductive sheet layer that is disposed on the inspected object side and has an elastic conductive path protruding in the thickness direction. On the occasion  An elastic conductive path protruding from the anisotropic conductive sheet layer is inserted into the through hole of the sheet-shaped spacer so as to abut on both sides, and the thickness of the sheet-shaped spacer and the A method for inspecting an object to be inspected using an anisotropic conductive connector, wherein the amount of deformation of the elastic conductive path is adjusted by appropriately adjusting the length of the elastic conductive path.