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WO2008030230A3 - Focal adjustment system for mems device - Google Patents

Focal adjustment system for mems device Download PDF

Info

Publication number
WO2008030230A3
WO2008030230A3 PCT/US2006/034530 US2006034530W WO2008030230A3 WO 2008030230 A3 WO2008030230 A3 WO 2008030230A3 US 2006034530 W US2006034530 W US 2006034530W WO 2008030230 A3 WO2008030230 A3 WO 2008030230A3
Authority
WO
WIPO (PCT)
Prior art keywords
mems device
adjustment system
focal adjustment
temperature
motion stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2006/034530
Other languages
French (fr)
Other versions
WO2008030230A2 (en
Inventor
Hiroshi Hayakawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Optoelectronics Co Ltd
Opticon Inc
Original Assignee
Optoelectronics Co Ltd
Opticon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Optoelectronics Co Ltd, Opticon Inc filed Critical Optoelectronics Co Ltd
Priority to DE112006004021T priority Critical patent/DE112006004021T5/en
Priority to PCT/US2006/034530 priority patent/WO2008030230A2/en
Publication of WO2008030230A2 publication Critical patent/WO2008030230A2/en
Anticipated expiration legal-status Critical
Publication of WO2008030230A3 publication Critical patent/WO2008030230A3/en
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/0025—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration
    • G02B27/0068—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for optical correction, e.g. distorsion, aberration having means for controlling the degree of correction, e.g. using phase modulators, movable elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/008—Mountings, adjusting means, or light-tight connections, for optical elements with means for compensating for changes in temperature or for controlling the temperature; thermal stabilisation

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Lens Barrels (AREA)

Abstract

A MEMS architecture is disclosed which provides a motion stage upon which a lens is mounted. The device includes a temperature sensor that stores parameters. During operation, temperature is measured and the motion stage is moved to position it optimally for a given operating temperature.
PCT/US2006/034530 2006-09-06 2006-09-06 Focal adjustment system for mems device Ceased WO2008030230A2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
DE112006004021T DE112006004021T5 (en) 2006-09-06 2006-09-06 Focus adjustment system for MEMS device
PCT/US2006/034530 WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/US2006/034530 WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device

Publications (2)

Publication Number Publication Date
WO2008030230A2 WO2008030230A2 (en) 2008-03-13
WO2008030230A3 true WO2008030230A3 (en) 2009-04-16

Family

ID=39157712

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2006/034530 Ceased WO2008030230A2 (en) 2006-09-06 2006-09-06 Focal adjustment system for mems device

Country Status (2)

Country Link
DE (1) DE112006004021T5 (en)
WO (1) WO2008030230A2 (en)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4050532A (en) * 1976-06-30 1977-09-27 The Brearley Company Platform type weighing scale
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
US5162855A (en) * 1990-06-13 1992-11-10 Konica Corporation Image forming apparatus having temperature sensor for estimating the off time of the fuser as related to the platen glass temperature
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5668364A (en) 1985-02-28 1997-09-16 Symbol Technologies, Inc. Target finder in electro-optical scanners
US4897532A (en) 1985-02-28 1990-01-30 Symbol Technologies, Inc. Portable laser diode scanning head

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4050532A (en) * 1976-06-30 1977-09-27 The Brearley Company Platform type weighing scale
US4669842A (en) * 1983-12-08 1987-06-02 Canon Kabushiki Kaisha Projection optical device
US5162855A (en) * 1990-06-13 1992-11-10 Konica Corporation Image forming apparatus having temperature sensor for estimating the off time of the fuser as related to the platen glass temperature
US6713367B2 (en) * 2001-08-28 2004-03-30 The Board Of Trustees Of The Leland Stanford Junior University Self-aligned vertical combdrive actuator and method of fabrication

Also Published As

Publication number Publication date
WO2008030230A2 (en) 2008-03-13
DE112006004021T5 (en) 2009-07-16

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