WO2008018167A1 - Motor-integrated type magnetic bearing device - Google Patents

Abstract

Provided is a motor-integrated type magnetic bearing device using roller bearings (15, 16) and a magnetic bearing together, the roller bearings (15, 16) of which bear a radial load, and the magnetic bearing of which bears an axial load and/or a bearing pre-load. The magnetic bearing device comprises a position sensor (43) for detecting an angular phase between a motor rotor (28a) and a motor stator (28b), and motor drive current phase adjusting means for applying a voltage to a motor coil (28ba). The motor drive current phase adjusting means decides, while the motor rotor (28a) is rotating at the rotating speed, the timing for starting the voltage application, by a predetermined operation based on at least the position sensor (43) among the position sensor (43), a speed sensor (45) for detecting the rotating speed of the motor rotor (28a) and a current sensor (44) for detecting the electric current to flow to the motor coil (28b).

Description

 Specification

 Motor type magnetic bearing device

 Technical field

 TECHNICAL FIELD [0001] The present invention relates to a magnetic bearing device used for an air cycle refrigeration cooling turbine unit or the like, and in particular, a rolling bearing and a magnetic bearing are used in combination, and the magnetic bearing performs either one or both of an axial load and a bearing preload. The present invention relates to a motor-type magnetic bearing device that is supported.

 Background art

 [0002] The air cycle refrigeration cooling system uses air as a refrigerant, and thus is less energy efficient than using chlorofluorocarbon, ammonia gas, or the like, but is preferable in terms of environmental protection. Also, in facilities where refrigerant air can be blown directly, such as in a refrigerated warehouse, there is a possibility that the total cost may be reduced by omitting the internal fan and defroster, etc. Patent 2 6 2 3 Japanese Laid-Open Patent Publication No. 2000 proposes an air cycle refrigeration cooling system for such applications.

 [0003] It is also known that the theoretical efficiency of air cooling is equal to or higher than that of chlorofluorocarbon and ammonia gas in the _30 ° C to -60 ° C deep region. However, it is said that the theoretical efficiency of the above air cooling can only be achieved with optimally designed peripherals. Peripheral devices include compressors and expansion turbines.

 In Japanese Patent No. 2 6 2 3 2 02, as a compressor and an expansion turbine, a turbine unit in which a compressor wheel and an expansion turbine wheel are attached to a common main shaft is used.

[0004] In Japanese Patent Laid-Open No. 7-9 1 7 60, as a turbine-compressor for processing a process gas, a turbine impeller is attached to one end of a main shaft, and a compressor impeller is attached to the other end. Magnetic bearing turbine compressors that are supported by journals and thrust bearings that control the current with electromagnet current have been proposed. Japanese Patent Laid-Open No. 8-2 6 1 2 3 7 discloses a gas turbine engine. Although it is a proposal, it is proposed to reduce the thrust load acting on the rolling bearing with a thrust magnetic bearing in order to avoid the thrust load acting on the rolling bearing for supporting the spindle from shortening the bearing life. .

 [0005] As described above, as an air cycle refrigeration cooling system, in order to obtain the theoretical efficiency of air cooling that is highly efficient in the vacuum region, an optimally designed compressor and expansion turbine are required. Necessary.

 As the compressor and the expansion turbine, a turbine unit in which the compressor wheel and the expansion turbine wheel are attached to a common main shaft as described above is used. This turbine unit improves the efficiency of the air cycle refrigerator by driving the compressor wheel with the power generated by the expansion turbine.

 [0006] However, in order to obtain practical efficiency, it is necessary to keep the gap between each impeller and the housing small. This fluctuation in the gap hinders stable high-speed rotation and leads to a decrease in efficiency.

 In addition, air acting on the compressor wheel and turbine wheel causes a thrust force to act on the main shaft, and a thrust load is applied to the bearing that supports the main shaft. The rotational speed of the main shaft of the turbine unit in the air cycle refrigeration cooling system is 80,000 to 10,000,000 revolutions per minute, which is very high compared to the bearings for general applications. For this reason, the thrust load as described above reduces the long-term durability and life of the bearing supporting the main shaft, and reduces the reliability of the turbine unit for air cycle refrigeration cooling. It is difficult to put the air cycle refrigeration cooling turbine unit into practical use unless the long-term durability problem of such a bearing is solved. However, the technique disclosed in Patent Document 1 has not yet been solved with respect to a decrease in the long-term durability of the bearing against a thrust load under high-speed rotation.

[0007] Magnetic bearing type turbine disclosed in Japanese Patent Application Laid-Open No. 7_9 1 7 60 ■ If the main shaft is supported by a journal bearing consisting of a magnetic bearing and a thrust bearing, such as a compressor, the journal bearing is controlled in the axial direction. There is no. For this reason, if there is an instability factor in the control of the thrust bearing, it is difficult to perform stable high-speed rotation with a small gap between the impeller and the diffuser. For magnetic bearings There is also a problem of contact when the power is stopped.

 [0008] Therefore, the present inventors have developed a motor-body-type magnetic bearing device as shown in FIG. 11 as a solution to the above problems. This motor-type magnetic bearing device is used in an air cycle refrigeration cooling turbine unit in which a compressor impeller 4 6a of a compressor 4 6 and a turbine impeller 4 7a of an expansion turbine 4 7 are attached to both ends of a main shaft 53. The radial load of the main shaft 5 3 is supported by the rolling bearings 5 5 and 5 6, and the axial load is supported by the electromagnet 5 7, and the driving force by the motor 6 8 provided coaxially with the main shaft 5 3 and the turbine impeller 4 7 a The compressor impeller 4 6a is driven to rotate with the driving force of. The electromagnet 5 7 that supports the axial load is arranged so as to face the thrust plate 5 3 a that is perpendicular and coaxial with the main shaft 53 without contact, and outputs the sensor 5 8 that detects the axial force. Depending on the control, it is controlled by the magnetic bearing controller 59. The motor 68 is of an axial gap type, and a motor rotor 6 8 a is formed on another thrust plate 53 b provided perpendicularly to the main shaft 53 and on the same axis, and the motor rotor 68 is formed in the axial direction. The motor stators 6 8 b are arranged so as to face each other. The motor 68 is controlled by a motor controller 69 independently of the electromagnet 57. In this case, the motor controller 69 is connected to the motor coil 6 8 ba in the motor stator 6 8 b by inserting the permanent magnet 6 8 aa of the motor rotor 6 8 a as shown in the timing chart of FIG. At this timing, a voltage is applied to the motor coil 68 ba to control the motor efficiency.

 [0009] According to the motor-integrated magnetic bearing device having the above-described configuration, the thruster applied to the main shaft 53 is supported by the electromagnet 57. The acting thrust force can be reduced. As a result, the small gap between each impeller 4 6 a, 4 7 a and the housing 4 6 b, 4 7 b can be kept constant, and the long-term durability of the rolling bearings 5 5, 5 6 against the thrust load Can be improved.

However, in the motor-integrated magnetic bearing device configured as described above, as shown in FIG. At the timing when the magnetic pole switching position of the permanent magnet 6 8 aa of the motor rotor 6 8 a approaches the center of the motor coil 6 8 ba in the motor stator 6 8 b, voltage application to the motor coil 6 8 ba is started. In this case, the current rise of the current is delayed with respect to the applied voltage due to the inductance of the motor coil. In other words, the optimum motor efficiency cannot always be obtained.

 Disclosure of the invention

 [001 1] An object of the present invention is to provide a motor-integrated magnetic bearing device capable of improving the long-term durability of a rolling bearing against a thrust load, making it compact, and improving motor efficiency. It is to be.

[0012] A motor-type magnetic bearing device of the present invention uses a rolling bearing and a magnetic bearing in combination, the rolling bearing supports a radial load, the magnetic bearing supports one or both of an axial load and a bearing preload, The electromagnet constituting the magnetic bearing is attached to the spindle housing so as to face the flange-shaped thrust plate made of a ferromagnetic material provided on the main shaft in a non-contact manner, and the motor rotor of the axial gear motor is connected to the thrust gear. A motor in which a motor stator having a motor coil opposed to the motor rotor is installed in the spindle housing, and a plurality of permanent magnets provided on the thrust plate at an equal pitch in the circumferential direction. An integrated magnetic bearing device for detecting an angular phase between the motor rotor and the motor stator The timing of voltage application to the motor coil is determined in accordance with the set or detected rotation speed of the sensor and the motor rotor, and the voltage is applied to the motor coil every time the magnet of the motor rotor passes the motor coil. A motor drive current phase adjusting means for performing the motor drive current phase adjusting means in a state where the motor rotor rotates at the rotation speed, the position sensor, a speed sensor for detecting a rotation speed of the motor rotor, and the motor. The voltage application start timing is determined by a predetermined process based on at least a position sensor among current sensors that detect a current flowing in the coil. To be determined.

 [0013] According to this configuration, since the rolling bearing and the magnetic bearing are used in combination, the rolling bearing supports the radial load, and the magnetic bearing supports one or both of the axial load and the bearing preload. Axial direction precision support can be performed, long-term durability of the rolling bearing can be secured, and damage when the power supply is stopped in the case of supporting only the magnetic bearing can be avoided. In addition, since the permanent magnet of the motor rotor is provided on the thrust plate facing the electromagnet of the magnetic bearing, it is compacted by using both the bearing and the motor as parts.

 [0014] In addition, the timing of voltage application to the motor coil is determined according to the number of rotations, and the start timing of applying the voltage to the motor coil every time the magnet of the motor rotor passes the motor coil by a predetermined process. Since it is determined, the efficiency of the motor can be improved.

 [0015] In the present invention, preferably, the motor drive current phase adjustment means is configured so that the magnetic pole switching position of the permanent magnet of the motor rotor is the center of the magnetic flux generated by the motor stator while the motor rotor rotates at the set rotational speed. The start timing of the current application is determined so that the current value of the motor coil becomes the maximum when passing the motor. The set rotational speed is, for example, a rated rotational speed. According to this configuration, the motor drive current phase adjusting means is arranged so that the motor coil current value is maximized when the magnetic pole switching position of the permanent magnet of the motor rotor passes through the center of the magnetic flux generated by the motor stator. Since the start timing of voltage application to the coil is determined, the efficiency of the motor can be improved.

[001 6] In this invention, the motor drive current phase adjusting means can be switched to a plurality of set rotational speeds, and the permanent magnet magnetic pole switching position of the motor rotor is set to the motor stator at each of the switched rotational speeds. It is also possible to be able to determine the start timing of the current application so that the current value of the motor coil is maximized when passing through the center of the magnetic flux generated. In the case of this configuration, for example, the motor efficiency can be improved at a plurality of rated rotational speeds. [001 7] In the present invention, the sensor detects passage of the permanent magnet of the motor rotor, and the motor drive current phase adjusting means detects the passage of the permanent magnet after the sensor detects passage of the permanent magnet. There may be provided an output rapid setting time setting means for setting a time until the sensor signal is output, and current application is started in response to the sensor signal. In this configuration, since the time is set by the output rapid setting time setting means composed of an electronic circuit and its circuit elements, it is easy to change the time until the sensor signal is output. Therefore, it is easy to improve the motor efficiency by setting the time until each sensor signal is output.

 In the present invention, the sensor detects passage of the permanent magnet of the motor rotor, and the motor drive current phase adjusting means applies current in response to a sensor signal output from the sensor. The mounting position of the sensor is detected by rotation before the magnetic pole switching position of the permanent magnet of the motor rotor reaches the position passing through the center of the magnetic flux generated by the motor stator. It is good also as a position. In this configuration, the motor efficiency can be improved simply by adjusting the sensor mounting position, and the configuration is simple.

 [001 9] In the motor-integrated magnetic bearing device of the present invention, the compressor side impeller and the turbine bin impeller are attached to the main shaft, and either or both of the motor power and the power generated by the turbine side impeller are provided. Thus, the compressor-side impeller may be driven and applied to a compression / expansion table bin system.

[0020] In the present invention, the motor drive current phase adjusting means determines the voltage application timing by a predetermined process based on the output of the position sensor, the output of the speed sensor, and the output of the current sensor. It is said. As means for detecting the rotational speed of the motor rotor, means for obtaining the rotational speed by calculating from the output of the position sensor may be provided instead of the speed sensor. According to this configuration, in the operation of the motor drive current phase adjusting means that applies a voltage to the motor coil each time the magnet of the motor rotor passes through the motor coil, the output of the position sensor that detects the angle phase between the motor rotor and the motor stator is output. , The voltage application timing is determined by a predetermined process using the output of a current sensor that detects the current flowing through the motor coil and the output of the speed sensor that detects the rotational speed of the motor port unit. A system using this type of motor-integrated magnetic bearing device (for example, an air cycle refrigeration system) is always operated at a constant rotational speed. However, the higher the rotational speed, the greater the power consumption of the motor. On the other hand, according to this configuration, the voltage application timing at which the target rotation speed can be obtained with the minimum motor current can be obtained, so that the motor power consumption can be minimized.

 In the present invention, the motor drive current phase adjusting means determines the timing of voltage application to the motor coil by using the output of the position sensor without using the output of the current sensor when the motor rotation speed is less than the set value. It is also good to decide.

 When the rotational speed is low, the influence of the current delay of the motor coil is small. Therefore, it is preferable to determine the timing of voltage application using only the output of the position sensor without using the output of the current sensor.

In the present invention, the predetermined process includes

 Procedure for setting unit time (Δ Τ) to advance voltage application timing, procedure for storing current value of current motor current detected from current sensor, unit time for current voltage application timing time (T) Procedure to add only (Δ Τ),

 A procedure for determining whether or not the rotational speed of the motor rotor output from the speed sensor is the target rotational speed. If the rotational speed is not the target rotational speed, a procedure for increasing or decreasing the motor coil current according to the rotational speed until the target rotational speed is reached.

 If the motor current decreases with respect to the stored current value when the target rotational speed is reached in the determination process, return to the procedure for storing the current current value and set the decreased current value. Procedure to remember,

If the motor current increases with respect to the stored current value when the target rotational speed is reached in the determination process, the unit time (Δ Τ) is reversed in the opposite direction. After changing to the value (_ΔΤ), the procedure returns to the procedure for storing the current current value and the procedure for storing the increased current value,

 If the motor current does not change with respect to the stored current value when the target rotational speed is reached in the determination process, the current voltage application timing time (Τ) is set to the previous state. The procedure to return to the state (Τ = _ _ Δ Τ) before the unit time (Δ Τ) is added,

 These steps may be included.

In the present invention, the main shaft may be one to which a turbine impeller and a compressor impeller are attached.

 Brief Description of Drawings

 The present invention will be more clearly understood from the following description of preferred embodiments with reference to the accompanying drawings. However, the embodiments and drawings are merely for illustration and description, and should not be used to define the scope of the present invention. The scope of the invention is determined by the appended claims (claims). In the accompanying drawings, the same part number in a plurality of drawings indicates the same part.

 FIG. 1 is a cross-sectional view of a turbine unit in which a motor-integrated magnetic bearing device according to a first embodiment of the present invention is incorporated.

 FIG. 2 is a block diagram showing an example of a magnetic bearing controller used in a motor-integrated magnetic bearing device.

 FIG. 3 is a block diagram showing an example of a motor controller used in a motor-integrated magnetic bearing device.

 FIG. 4 is an explanatory diagram of a mounting position of a phase detection sensor in a motor-integrated magnetic bearing device.

 FIG. 5 is a timing chart showing the relationship between the detection signal of the phase detection sensor and the motor coil current by the function of an example of the phase adjustment circuit in the motor controller.

[Fig.6] Phase by function of another example of phase adjustment circuit in motor controller 3 is a timing chart showing the relationship between the detection signal of the detection sensor and the current of the motor coil.

 FIG. 7 is a cross-sectional view of a turbine unit in which a motor-integrated magnetic bearing device according to a second embodiment of the present invention is incorporated.

 FIG. 8 is a system diagram of an air cycle refrigeration cooling system to which the turbine unit of FIG. 1 is applied.

 FIG. 9 is a block diagram showing an example of a motor controller used in a motor-integrated magnetic bearing device according to a third embodiment of the present invention.

 FIG. 10 is a flowchart showing an example of a timing determination process for applying a voltage to a motor coil by a phase adjustment circuit in the motor controller.

 FIG. 11 is a sectional view of a conventional example.

 FIG. 12 is a timing chart showing the relationship between the detection signal of the phase detection sensor and the motor coil current under the control of the motor controller in the conventional example. BEST MODE FOR CARRYING OUT THE INVENTION

 [0025] A first embodiment of the present invention will be described with reference to Figs. FIG. 1 shows a cross-sectional view of a turbine unit 5 incorporating the motor-integrated magnetic bearing device of this embodiment. The turbine unit 5 constitutes a compression / expansion turbine system, and includes a compressor 6 and an expansion turbine 7, and the compressor impeller 6a of the compressor 6 and the turbine impeller 7a of the expansion turbine 7 have a main shaft 1 3. They are fitted at both ends. Low carbon steel with good magnetic properties is used as the material for the main shafts 13.

 In FIG. 1, the compressor 6 is connected to the compressor impeller 6 a and a minute gap d.

 1 has a compressor housing 6b facing through 1 and the air sucked in the axial direction from the suction port 6c at the center is compressed by the compressor wheel 6a, and an arrow from the outlet (not shown) at the outer periphery 6 Discharge as shown in d.

The expansion turbine 7 has a turbine housing 7 b that is opposed to the turbine impeller 7 a via a minute gap d 2, and the air sucked from the outer periphery as indicated by an arrow 7 c is received by the turbine impeller 7 a. Adiabatic expansion, axial direction from center outlet 7d To the direction.

 [0027] The motor-integrated magnetic bearing device in the turbine unit 5 is configured such that the main shaft 13 is supported by a plurality of bearings 15 and 16 in the radial direction, and either the axial load applied to the main shaft 13 or the bearing preload is applied. One or both of them are supported by an electromagnetic stone 17 that is a magnetic bearing, and an axial gap type motor 28 that rotates the main shaft 13 is provided. The turbine unit 5 includes a sensor 18 for detecting a thrust force acting on the main shaft 13, a magnetic bearing controller 19 for controlling a supporting force by the electromagnet 17 according to the output of the sensor 18, A motor controller 29 that controls the motor 28 independently of the electromagnet 17 is provided.

 The electromagnet 17 is composed of two flange-shaped thrust plates 1 3 a, 1 3 made of a ferromagnetic material that is provided perpendicularly and coaxially to the main shaft 13 so as to be aligned in the axial direction at the axial intermediate portion of the main shaft 13. A pair is installed in the spindle housing 14 so as to face each side of b without contact. Specifically, one of the electromagnets 17 constituting the magnetic bearing unit is opposed to the one surface of the thrust plate 13 a located near the expansion turbine 7 toward the expansion turbine 7 as an electromagnet target without contact. To be installed in the spindle housing 14. In addition, the other electromagnet 17 constituting the magnetic bearing unit has one surface facing the compressor 6 side of the thrust plate 13 b positioned near the compressor 6 as an electromagnet target, and is opposed to this one surface in a non-contact manner. Is installed in the spindle housing 14.

The motor 28 includes a motor port 2 8 a provided on the main shaft 13 side by side with the electromagnet 17, and a motor stator 2 8 b facing the motor rotor 2 8 a in the axial direction. This is a motor unit. Specifically, the motor rotor 28a constituting one part of the motor unit is provided on each side of the main shaft 13 opposite to the side on which the electromagnets 17 of the thrust plates 13a, 13b are opposed. By arranging the permanent magnets 28 aa arranged at equal pitches in the circumferential direction, a pair of left and right is configured. In this way, between the permanent magnets 28 aa opposed in the axial direction, Are set to be different from each other. Since the low-carbon steel with good magnetic properties is used for the main shaft 1 3, the thrust plates 1 3 a and 1 3 b provided so as to be integrated with the main shaft 1 3 are replaced with permanent magnets 2 8 Can also be used as aa back yoke and electromagnet target.

 The motor stator 28 b, which is another part of the motor unit, faces the surfaces of both motor rotors 28 a in a non-contact manner at the center position in the axial direction between the pair of left and right motor rotors 28 a. The motor coil 2 8 ba arranged without a core is installed in the spindle housing 14 so as to be configured. The motor 28 rotates the main shaft 13 by a mouth-lens force acting between the motor rotor 28a and the motor stator 28b. Thus, since this axial gap type motor 28 is a coreless motor, the negative rigidity due to the magnetic force pulling between the motor rotor 28a and the motor stator 28b is zero. ing.

 [0029] Bearings 15 and 16 that support the main shaft 13 are rolling bearings and have a function of restricting the axial direction position. For example, deep groove ball bearings are used as angular bearings. Deep groove ball bearings have a thrust support function in both directions, and return the inner and outer rings in the axial position to the neutral position. These two bearings 15 and 16 are arranged in the vicinity of the compressor wheel 6a and the turbine wheel 7a in the spindle housing 14 respectively.

 [0030] The main shaft 13 is a stepped shaft having a large-diameter portion 13c at an intermediate portion and small-diameter portions 13d at both ends. The bearings 15 and 16 on both sides have their inner rings 15 a and 16 a fitted into the small-diameter portion 13 d in a press-fit state, and one of the width surfaces is between the large-diameter portion 13 c and the small-diameter portion 13 d Engage with the step surface.

The bearings 6 a and 7 a side of the bearings 15 and 16 on both sides of the spindle housing 14 are formed so that the inner diameter surface is close to the main shaft 13 and the non-contact seal 2 is provided on the inner diameter surface. 1 and 2 2 are formed. In this embodiment, the non-contact seals 2 1 and 2 2 are labyrinth seals in which a plurality of circumferential grooves are arranged in the axial direction on the inner diameter surface of the spiddle housing 14, but other non-contact seals are used. May be used.

 [0031] The sensor 18 is provided on the stationary side in the vicinity of the bearing 16 on the turbine impeller 7a side, that is, on the spindle housing 14 side. A bearing 16 provided with the sensor 18 in the vicinity thereof has an outer ring 16 b fitted in a fixed state in the bearing housing 23. The bearing housing 2 3 is formed in a ring shape and has an inner flange 2 3 a that engages with the width surface of the outer ring 16 b of the bearing 16 at one end, and an inner diameter surface provided on the spindle housing 14 2 4 is movably fitted in the axial direction. The inner flange 2 3 a is provided at the center end in the axial direction.

 [0032] The sensors 1 8 are distributed and arranged at multiple circumferential locations around the main shaft 1 3 (for example, 2 locations) and fixed to the inner flange 2 3 a side width surface of the bearing housing 2 3 and the spindle housing 1 4 It is interposed between one of the electromagnets 17 which is the formed member. The sensor 18 is preloaded by a sensor preload spring 25. The sensor preload spring 25 is housed in a housing recess provided in the spindle housing 14 to urge the outer ring 16 b of the bearing 16 in the axial direction. The outer ring 16 b and the bearing housing 2 3 Preload sensor 1 8 via. The sensor preload spring 25 is composed of, for example, coil springs provided at a plurality of locations in the circumferential direction around the main shaft 13.

 [0033] The preload by the sensor preload spring 25 is to detect any movement of the main shaft 1 3 in the axial direction, which detects the thrust force by the pressing force. It is larger than the average thruster acting on the main shaft 13 in the normal operation state of 5.

The bearing 15 on the non-arrangement side of the sensor 18 is installed so as to be movable in the axial direction with respect to the spindle housing 14, and is elastically supported by a bearing preload spring 26. In this example, the outer ring 1 5 b of the bearing 15 is fitted to the inner surface of the spindle housing 14 4 so as to be movable in the axial direction. The bearing preload spring 2 6 is formed between the outer ring 15 b and the spindle housing 14. Is intervening. The bearing preload spring 26 is configured to urge the outer ring 15 b facing the step surface of the main shaft 13 with which the width surface of the inner ring 15 a is engaged, and applies a preload to the bearing 15. Bearing preload The screws 26 are composed of coil springs and the like provided at a plurality of locations in the circumferential direction around the main shaft 13, and are accommodated in receiving recesses provided in the spindle housing 14, respectively. The bearing preload spring 26 is assumed to have a smaller spring constant than the sensor preload spring 25.

 [0035] The dynamic model of the motor-integrated magnetic bearing device in the turbine unit 5 can be constituted by a simple panel system. That is, this panel system includes a synthetic panel formed by bearings 15 and 16 and a support system for these bearings (sensor preload spring 25, bearing preload spring 26, bearing housing 23, etc.), and a motor unit ( This is a configuration in which a synthetic panel formed by the electromagnet 17 and the motor 28) is arranged in parallel. In this spring system, the composite panel formed by the bearings 15 and 16 and the support system of these bearings has rigidity that acts in proportion to the amount of displacement in the direction opposite to the displaced direction. The composite panel formed by the electromagnet 17 and the motor 28 has a negative stiffness that acts in proportion to the amount of displacement in the direction of displacement.

 For this reason, the magnitude relationship between the rigidity of both composite panels described above is

 Synthetic panel stiffness due to bearings, etc. <Electromagnet ■ Negative stiffness value of synthetic panel due to motor ... When (1) is assumed, the phase of the mechanical system is delayed by 180 °, resulting in an unstable system. In the magnetic bearing controller 19 that controls 17, it is necessary to add a phase compensation circuit in advance, and the configuration of the controller 19 becomes complicated.

 [0036] Therefore, in the motor-integrated magnetic bearing device of this embodiment, the magnitude relationship between the rigidity of the two composite panels described above is

 Rigidity value of composite panel by bearings, etc.> Electromagnet ■ Negative stiffness value of synthetic panel by motor… (2). In particular, in this motor-integrated magnetic bearing device, since the axial gap motor 28 is a coreless motor as described above, the negative stiffness acting on the motor 28 can be reduced to zero. 2) The magnitude relationship of the equation can be maintained.

As a result, the phase of the mechanical system can be prevented from being delayed by 180 ° in the control band, so that the control target of the magnetic bearing controller 19 can be controlled stably. The circuit configuration of the controller 19 can be configured as a simple one using proportional or proportional integration as shown in Fig. 2.

[0037] In the magnetic bearing controller 19 shown in the block diagram of FIG. 2, the detection outputs P 1 and P 2 of the sensors 18 are added and subtracted by the sensor output arithmetic circuit 30 and the calculation results are compared by the comparator 31. Deviation is calculated by comparing with the reference value of the reference value setting means 3 2, and the calculated deviation is proportionally integrated (or appropriately set by the PI compensation circuit (or P compensation circuit) 3 3 according to the turbine unit 5 (or Proportional) By processing, the control signal of the electromagnet 17 is calculated. The output of the PI compensation circuit (or P compensation circuit) 3 3 is input to the power circuits 3 6 and 3 7 that drive the electromagnets 1 7 1 7 ₂ in each direction via the diodes 3 4 and 3 5. The electromagnets 17,, 17 ₂ are a pair of magnets 17 facing the thrust plates 13 a, 13 b shown in FIG. 1 and only act on the attraction force. The direction of the current is determined by, and the two electromagnets 1 7 1 7 ₂ are selectively driven.

 In the motor controller 29 of FIG. 3 also shown in the block diagram, the phase adjustment circuit 3 8 can adjust the phase of the motor drive current based on the rotation angle of the motor rotor 28 a calculated by the phase adjustment circuit 38. The motor drive current is supplied from the motor drive circuit 39 to the motor stator 28b at a timing according to the adjustment result. Since the rotational speed fluctuates due to phase adjustment, constant rotation control is performed based on the rotation synchronization command signal by adjusting the motor drive current magnitude using the rotation angle of the motor rotor 28a as a feedback signal. .

[0039] As one of the phase adjustments of the motor drive current by the phase adjustment circuit 38, specifically, the following control is performed. The phase adjustment circuit 3 8 detects the angular phase between the motor rotor 2 8 a and the motor stator 2 8 b by the output of the phase detection sensor 40 in FIG. The timing of voltage application to the motor coil 28 ba is determined according to the rated speed of the motor 28. At the timing determined in this manner, the motor drive circuit 39 is connected to the motor rotor 2 8 a by the permanent magnet 2 8 aa of the motor rotor 2 8 a. Apply voltage to motor coil 2 8 ba each time it passes.

 In FIG. 4, since the phase detection sensor 40 0 is attached at a position corresponding to the center of the motor coil 2 8 ba in the rotational direction, the permanent magnet 2 8 aa of the motor rotor 2 8 a is attached as shown in FIG. When passing through the motor coil 28 ba, the detection signal of the phase detection sensor 40 becomes a signal having a pulse width that matches the passage time as shown in FIG. 5 (B).

 However, when the voltage application timing to the motor coil 28 ba is determined based on this detection signal, the current in the motor coil 28 ba becomes the waveform shown in FIG. When the magnetic pole switching position of magnet 2 8 aa passes through the center of magnetic flux generated by motor stator 2 8 b (the center of motor coil 2 8 ba), the current value of motor coil 2 8 ba does not become the maximum. .

Therefore, here, it is assumed that the phase adjustment circuit 3 8 force has an output rapid setting time setting means 41 that advances the output of the phase detection sensor 40 by a predetermined angle and converts it into a phase, and this output rapid setting time setting means 4 By applying voltage to the motor coil 2 8 ba in response to the output of 1, the permanent magnet 2 of the motor rotor 2 8 a 2 8 aa's magnetic pole switching position changes the magnetic flux generated by the motor stator 2 8 b The current value of the motor coil 28 ba is maximized when passing through the center of the motor (the center of the motor coil 28 ba). In other words, the output quick setting time setting means 41 is based on the elapsed time from when the phase detection sensor 40 detects the passage of the permanent magnet 28 aa until the next passage of the permanent magnet 28 aa is detected. After a short predetermined delay time, the previous detection signal of the phase detection sensor 40 is output. Fig. 5 (D) shows the waveform of the output signal converted into a phase advance by the output rapid setting time setting means 41, and Fig. 5 (E) shows the voltage to the motor coil 28 ba at the output timing. A waveform diagram of the current of the motor coil 28 ba when application is started is shown. The advance angle (output quick start time) of the output signal converted by the output quick start time setting means 41 is obtained by measurement or calculation, and is preset in the output quick start time setting means 41. The set value is prepared for each rated speed of the motor 28. [0041] The operation of the phase adjustment circuit 3 8 that determines the start timing of voltage application to the motor coil 2 8 ba based on the signal converted into the lead phase by the output quick setting time setting means 4 1 is the number of rotations of the motor 2 8 However, there is no problem because the turbine unit 5 using this type of motor-integrated magnetic bearing device operates at a constant speed.

 [0042] The start timing of voltage application to the motor coil 2 8 ba is advanced, and the center of the permanent magnet 2 8 aa of the motor port 2 8 a is the center of the magnetic flux generated by the motor stator 2 8 b (motor As another means of maximizing the current value of the motor coil 2 8 ba when passing through the center of the coil 2 8 ba), the mounting position of the phase detection sensor 40 as shown by the broken line in FIG. The center of the permanent magnet 28 aa of the motor rotor 28 a may be closer to the position passing through the center of the magnetic flux generated by the motor stator 28 b (the center of the motor coil 28 ba) due to the rotation. In this case, the output quick start time setting means 41 in the phase adjustment circuit 38 in FIG. 3 is omitted.

 In this case, as shown in FIG. 6 (A), when the permanent magnet 28 aa of the motor rotor 28 a passes through the motor coil 28 ba, the detection signal of the phase detection sensor 40 is as shown in FIG. As shown in Fig. 3, the permanent magnet 2 8 aa has a leading phase that rises from before it reaches the motor coil 2 8 ba, and the phase adjustment circuit 3 8 determines the start timing of voltage application to the motor coil 2 8 ba based on this detection signal. decide. As a result, the current of the motor coil 2 8 ba has the waveform shown in FIG. 6 (C), and the center of the permanent magnet 2 8 aa of the motor rotor 2 8 a is the magnetic flux generated by the motor stator 2 8 b. When passing through the center of the motor (the center of the motor coil 2 8 ba), the current value of the motor coil 2 8 ba becomes the maximum.

The turbine unit 5 having this configuration is applied to, for example, an air cycle refrigeration cooling system so that air as a cooling medium can be efficiently heat-exchanged by a heat exchanger (not shown here) at a subsequent stage. The temperature is increased by compressing at 6 and the air cooled by the heat exchanger at the subsequent stage is further insulated by the expansion turbine 7 to a target temperature, for example, a very low temperature of about 30 ° C. to about 60 ° C. Cold due to expansion It is used to discharge on the contrary.

 In such an example of use, the turbine unit 5 is fitted to the main shaft 1 3 common to the thrust plate 1 3 a and the motor rotor 2 8 a, and the motor 2 8 The compressor impeller 6a is driven by one or both of the power of the turbine and the power generated by the turbine impeller 7a. For this reason, stable high-speed rotation of the main shaft 13 can be obtained while maintaining appropriate gaps d 1 and d 2 between the impellers 6 a and 7 a, and the long-term durability of the bearings 15 and 16 can be improved. Improved lifespan is obtained.

 That is, in order to ensure the efficiency of compression and expansion of the turbine unit 5, it is necessary to keep the gaps 01 1 and d 2 between the impellers 6 a and 7 a and the housings 6 b and 7 13 minute. is there. For example, when this turbine unit 5 is applied to an air cycle refrigeration cooling system, ensuring this efficiency is important. On the other hand, since the main shaft 13 is supported by rolling type bearings 15 and 16, the axial position control function of the rolling bearing restricts the axial direction position of the main shaft 13 to some extent. The minute gaps d 1 and d 2 between the impellers 6 a and 7 a and the housings 6 b and 7 b can be kept constant.

However, a thrust force is applied to the main shaft 13 of the turbine unit 5 by the pressure of air acting on the impellers 6 a and 7 a. In addition, the turbine unit 5 used in the air cooling system rotates at a very high speed of, for example, about 80,000 to 100,000 revolutions per minute. For this reason, when the above thrust force acts on the rolling bearings 15 and 16 that rotatably support the main shaft 13, the long-term durability of the bearings 15 and 16 decreases. In this embodiment, since the thrust force is supported by the electromagnet 17, the thrust force applied to the rolling bearings 15 and 16 for supporting the main shaft 13 is reduced while suppressing an increase in torque without contact. be able to. In this case, a sensor 18 for detecting the thrust force acting on the main shaft 13 and a magnetic bearing controller 19 for controlling the supporting force by the electromagnet 17 according to the output of the sensor 18 are provided. Therefore, the rolling bearings 15 and 16 can be used in an optimum state with respect to the thrust force according to the bearing specifications. In particular, a magnetic bearing unit is constructed by arranging two electromagnets 17 on the outer side in the axial direction of two thrust plates 13a, 13b arranged on the main shaft 13 in the axial direction. By arranging an axial gap type motor 28 at a position sandwiched between the plates 1 3 a and 1 3 b to form a motor unit, the magnetic bearing unit and the motor unit are made into a compact integrated structure. The shaft length of 3 can be shortened, and the natural frequency of the main shaft 13 can be increased accordingly, so that the main shaft 13 can be rotated at high speed.

 [0047] In the motor-integrated magnetic bearing device, in the motor controller 29, the center of the permanent magnet 28aa of the motor rotor 28a is the center of the magnetic flux generated by the motor stator 28b ( The phase adjustment circuit 3 8 determines the start timing of voltage application to the motor coil 2 8 ba so that the current value of the motor coil 2 8 ba is maximized when passing through the center of the motor coil 2 8 ba). As a result, the efficiency of the motor 28 can be improved.

 FIG. 7 shows a second embodiment of the turbine unit 5. In the embodiment shown in FIG. 1, the turbine unit 5 includes only one flange-like thrust plate made of a ferromagnetic material that is provided perpendicularly and coaxially to the main shaft 13 and uses the thrust plate 1 3 a as an electromagnetic target. A pair of left and right electromagnets 17 and 17 are installed on the spindle housing 14 so as to face each other in a non-contact manner.

[0049] The motor 28 includes a motor rotor 28a provided on the main shaft 13 and a motor stator 28b that faces the motor rotor 28a in the axial direction. The motor rotor 28 a is arranged by arranging permanent magnets 28 aa arranged at equal pitches in the circumferential direction on the outer diameter side of the thrust plate 13 a on the both sides of the electromagnet 17 facing each other. A pair is constructed. Thus, between the permanent magnets 28 aa arranged opposite to each other in the axial direction, the magnetic poles are set to be different from each other. The thrust plate 1 3 a doubles as the back yoke of the permanent magnet 2 8 aa. The motor stator 28b is a strong force installed in the spindle housing 14 so as to face the motor rotor 28a on both sides of the thrust plate 13a in a non-contact manner. A pair of stator yokes made of magnetic material (for example, low carbon steel and key steel plate)

A pair of left and right is formed by winding motor coils b a around 28 b b. In this way, the two left and right motors 28 configured with the thrust plate 1 3 a sandwiched between them are driven by the magnetic force acting between the motor rotor 2 8 a and the motor stator 2 8 b. Rotate. In this case, since the position of the motor rotor 28 b on the thrust plate 13 a is on the outer diameter side with respect to the position facing the electromagnet 17, a larger torque can be obtained with a small motor driving current. Other configurations are the same as those in the embodiment of FIG. 1, and the description thereof is omitted here.

 FIG. 8 shows the overall configuration of an air cycle refrigeration cooling system using the turbine unit 5 shown in FIG. This air cycle refrigeration cooling system is a system that directly cools air in a space to be cooled 10 such as a freezer warehouse as a refrigerant. Air circulation path 1 leading to b. In this air circulation path 1, pre-compression means 2, first heat exchanger 3, compressor 6 of air cycle refrigeration cooling turbine unit 5, second heat exchanger 3, intermediate heat exchanger 9, and said turbine unit 5 The expansion turbines 7 are provided in order. The intermediate heat exchanger 9 exchanges heat between the inflow air near the intake 1a in the same air circulation path 1 and the air that has been heated by the subsequent compression and cooled. The air near the intake port 1a passes through the heat exchanger 9a.

 [0051] The pre-compression means 2 comprises a blower or the like and is driven by a motor 2a. The first heat exchanger 3 and the second heat exchanger 8 have heat exchangers 3 a and 8 a for circulating a cooling medium, respectively, and a cooling medium such as water in the heat exchangers 3 a and 8 a Heat exchange with the air in the air circulation path 1. Each of the heat exchangers 3 a and 8 a is connected to the cooling tower 11 by piping, and the cooling medium heated by the heat exchange is cooled by the cooling tower 11. An air cycle refrigeration cooling system having a configuration not including the pre-compression means 2 may be used.

[0052] In this air cycle refrigeration cooling system, the space to be cooled 10 is 0 ° C to-60 ° C This is a system that keeps the pressure at a level, and air of 1 atm flows from the cooled space 10 to the intake 1 a of the air circulation path 1 at about 0 ° C to -60 ° C. Note that the temperature and pressure values shown below are just examples. The air flowing into the intake 1a is used to cool the air in the latter stage in the air circulation path 1 by the intermediate heat exchanger 9, and the temperature is raised to 30 ° C. This heated air remains at 1 atm, but is compressed to 1.4 atm by pre-compression means 2, and the temperature is raised to 70 ° C by the compression. The first heat exchanger 3 only needs to cool the heated air at 70 ° C, so it can be cooled efficiently even with cold water at room temperature, and it is cooled to 40 ° C.

 [0053] Air at 40 ° C and 1.4 atm cooled by heat exchange is compressed to 1.8 atm by the compressor 6 of the turbine unit 5, and the temperature is raised to about 70 ° C by this compression. Cooled to 40 ° C by the second heat exchanger 8. This 40 ° C air is cooled to –20 ° C by –30 ° C air in the intermediate heat exchanger 9. The atmospheric pressure is maintained at 1.8 atm which is discharged from the compressor 6. The air cooled to 20 ° C in the intermediate heat exchanger 9 is adiabatically expanded by the expansion turbine 7 of the turbine unit 5, cooled to _55 ° C, and discharged to the cooled space 10 from the outlet 1b. . This air cycle refrigeration cooling system performs such a refrigeration cycle.

 In this air cycle refrigeration cooling system, in the turbine unit 5, stable high-speed rotation of the main shaft 1 3 can be obtained while maintaining appropriate gaps d 1 and d 2 between the impellers 6 a and 7 a, and bearings By improving the long-term durability and life of 1 5 and 1 6 and improving the long-term durability of bearings 1 and 16, the turbine unit 5 as a whole, and therefore the air cycle The reliability of the entire refrigeration / cooling system is improved. In this way, stable high-speed rotation, long-term durability, and reliability of the main spindle bearings 1 5 and 1 6 of the turbine unit 5 which is the network of the air cycle refrigeration and cooling system are improved. Commercialization is possible.

FIG. 9 shows a motor-integrated magnetic bearing device according to a third embodiment of the turbine unit 5. The motor controller 29 used is shown. Specifically, the phase adjustment of the motor drive current by the phase adjustment circuit 38 is performed as follows. The phase adjustment circuit 3 8 includes a position sensor 4 3 that detects an angular phase between the motor rotor 2 8 a and the motor stator 2 8 b, a current sensor 4 4 that detects a current flowing through the motor coil 2 8 ba, The timing of voltage application to the motor coil 28 ba is determined by predetermined processing based on the outputs of the speed sensor 45 that detects the rotational speed of the motor rotor 28 a. At the timing determined in this manner, the motor drive circuit 3 9 causes the motor coil 2 8 aa to move every time the permanent magnet 2 8 aa of the motor rotor 2 8 a passes the motor coil 2 8 ba of the motor stator 2 8. Apply voltage to ba. Instead of providing the speed sensor 45, a means (not shown) for calculating the rotational speed of the motor rotor 28a from the change in the output of the angular phase of the position sensor 43 is provided. It may be used in the adjustment circuit 3 8.

 A specific example of the phase adjustment process in which the phase adjustment circuit 38 determines the voltage application timing to the motor coil 28 b a will be described below with reference to the flowchart of FIG.

 First, the unit time ΔT for adjusting the voltage application timing time T is set (step S 1). Next, the current value I of the current motor current detected by the current sensor 44 is stored as a value I 0 stored in a storage unit (not shown) (step S 2), and the current voltage application timing time T is stored. Add only the unit time Δ （(step S 3). If the unit time ΔΤ is a positive value, the voltage application timing T is changed slightly to the delayed phase side by the above process.

[0057] Next, it is determined whether or not the rotational speed of the motor rotor 28a output from the speed sensor 45 is the target rotational speed (step S4). If the rotational speed is not the target rotational speed, step S5 ~ The current of motor coil 28 ba is increased or decreased according to the rotational speed until the target rotational speed is reached by S7. That is, if it is determined in step S5 that the rotation speed of the motor port 28a is lower than the target rotation speed, the current is increased. If the rotational speed of the motor rotor 28a is determined to be greater than the target rotational speed in step S5, the current is decreased to decrease the rotational speed (step S7).

 In step S 4, if it is determined that the rotational speed of the motor rotor 2 8 a output from the speed sensor 4 5 has reached the target rotational speed, the current value 10 stored in the storage unit is then compared with the current value 1 0. It is determined whether or not the motor current I has decreased (step S8). If it is determined in step 8 that the current motor current I has decreased with respect to the current value I 0 stored in the storage unit, the process returns to step S 2 where the current current value I is stored in the storage unit. Check if the motor current further decreases by repeating the timing adjustment process of S3 to S8.

 [0059] — On the other hand, the current motor current I stored in the storage unit in step S 8

 When it is determined that the current does not decrease with respect to 10 0, it is determined whether or not the current motor current I has increased with respect to the current value 10 stored in the storage unit (step S 9). If it is determined in step S9 that the current motor current I has not increased with respect to the current value I 0 stored in the storage unit, the current value should not change by fine adjustment of the voltage application timing. From this, it is determined that there is a possibility that the best voltage application timing can be obtained, and thereafter, the timing adjustment process in steps 2 to S9 is repeated.

 [0060] In step S9, the current motor current I stores the current value stored in the storage unit.

 If it is determined that the increase has increased with respect to 1 0, it is determined whether or not the increase is a monotonous increase following the previous increase (step S 1 0). If it is determined that the increase is monotonous in step S10, it is determined that the direction of voltage application timing adjustment is reversed, and the unit time ΔT for timing adjustment is changed to the opposite value of 1 ΔT. (Step S 1 1) and Steps S 2 to S 10 are repeated to adjust the voltage application timing in the reverse direction.

[0061] —Meanwhile, in step S 1 0, if it is determined that the motor current I has changed from the previous decrease to the current increase, it is determined that the voltage application timing has passed the best point, and the current The voltage application timing time T is in the previous state Return to the state before the addition of unit time Δ 加 算 (Τ- Δ Τ) (Step S 1 2). By adjusting the timing in this way, it is possible to obtain the voltage application timing at which a predetermined target rotational speed can be obtained with a small motor current.

 [0062] It should be noted that when adjusting the timing of voltage application to the motor coil 28 ba by the above processing, if the force rotation speed is low using the outputs of the position sensor 43, current sensor 44, and speed sensor 45, the motor coil 28 Since the influence of the current delay of ba is small, it is preferable to determine the timing of voltage application using only the output of the position sensor 43 instead of using the output of the current sensor 44.

 [0063] The turbine unit 5 having this configuration is applied to, for example, an air cycle refrigeration cooling system so that air as a cooling medium can be efficiently heat-exchanged by a subsequent heat exchanger (not shown here). The air cooled by the heat exchanger 6 and further cooled by the heat exchanger at the subsequent stage is subjected to adiabatic expansion by the expansion turbine 7 to a target temperature, for example, a very low temperature of about 30 ° C. to about 60 ° C. Used to cool and discharge.

 In such an example of use, the turbine unit 5 is fitted to the main shaft 13 common to the thrust plate 1 3 a and the motor rotor 2 8 a, and the compressor blade 6 a and the turbine blade 7 a force. The compressor wheel 6a is driven by either one or both of the power and the power generated by the turbine wheel 7a. For this reason, stable high-speed rotation of the main shaft 13 can be obtained while maintaining appropriate gaps d 1 and d 2 between the impellers 6 a and 7 a, and the long-term durability of the bearings 15 and 16 can be improved. Improved lifespan is obtained.

That is, in order to ensure the efficiency of compression and expansion of the turbine unit 5, it is necessary to keep the gaps 01 1 and d 2 between the respective impellers 6 a and 7 a and the housings 6 b and 7 13 minute. is there. For example, when this turbine unit 5 is applied to an air cycle refrigeration cooling system, ensuring this efficiency is important. On the other hand, since the main shaft 1 3 is supported by rolling type bearings 15 and 16, the axial direction position restricting function of the rolling bearing is regulated to some extent by the axial direction position of the main shaft 1 3. Minute clearance d between impeller 6a, 7a and housing 6b, 7b 1 and d 2 can be kept constant.

 However, a thrust force is applied to the main shaft 13 of the turbine unit 5 by the air pressure acting on the impellers 6 a and 7 a. In addition, the turbine unit 5 used in the air cooling system rotates at a very high speed of, for example, about 80,000 to 100,000 revolutions per minute. For this reason, when the above thrust force acts on the rolling bearings 15 and 16 that rotatably support the main shaft 13, the long-term durability of the bearings 15 and 16 decreases. In this embodiment, since the thrust force is supported by the electromagnet 17, the thrust force applied to the rolling bearings 15 and 16 for supporting the main shaft 13 is reduced while suppressing an increase in torque without contact. be able to. In this case, a sensor 18 for detecting the thrust force acting on the main shaft 13 and a magnetic bearing controller 19 for controlling the supporting force by the electromagnet 17 according to the output of the sensor 18 are provided. Therefore, the rolling bearings 15 and 16 can be used in an optimum state with respect to the thrust force according to the bearing specifications.

 In particular, a magnetic bearing unit is constructed by arranging two electromagnets 17 on the outer side in the axial direction of two thrust plates 13a, 13b arranged on the main shaft 13 in the axial direction. By arranging an axial gap type motor 28 at a position between the plates 1 3 a and 1 3 b to form a motor unit, the magnetic bearing unit and the motor unit are made into a compact and integrated structure. The shaft length of 3 can be shortened, and the natural frequency of the main shaft 13 can be increased accordingly, so that the main shaft 13 can be rotated at high speed.

[0066] Further, in this motor-integrated magnetic bearing device, the permanent magnet 2 8aa of the motor rotor 28a is converted to the motor coil of the motor stator 28b by the phase adjustment circuit 38 of the motor controller 38. 2 In the operation of applying a voltage to the motor coil 2 8 ba every time it passes 8 ba, the output of the position sensor 4 3 that detects the angle phase between the motor rotor 2 8 a and the motor stator 2 8 b, the motor status Using the output of the current sensor 4 4 that detects the current flowing through the 2 8 b motor coil 2 8 ba and the output of the speed sensor 4 5 that detects the rotation speed of the motor rotor 2 8 a, The timing of the voltage application by the predetermined processing shown Therefore, the voltage application timing at which the target rotational speed can be obtained with the minimum motor current can be obtained, and the power consumption of the motor 28 can be reduced.

 As described above, the preferred embodiments have been described with reference to the drawings. However, those skilled in the art will readily assume various changes and modifications within the obvious scope by looking at the present specification. For example, instead of a speed sensor, a rotational speed detecting means is provided.

 Accordingly, such changes and modifications are to be construed as within the scope of the invention as defined by the appended claims.

Claims

The scope of the claims  [1] A rolling bearing and a magnetic bearing are used in combination, the rolling bearing supports a radial load, the magnetic bearing supports one or both of an axial load and a bearing preload, and the electromagnet constituting the magnetic bearing is attached to the main shaft. It is attached to the spindle housing so as to face the flanged thrust plate made of ferromagnetic material without contact.  A motor rotor of an axial gap motor is composed of the thrust plate and a plurality of permanent magnets provided on the thrust plate at an equal pitch in the circumferential direction, and a motor stator having a motor coil facing the motor rotor is described above. A motor-integrated magnetic bearing device installed in a spindle / wing, a position sensor for detecting an angular phase between the motor rotor and the motor stator, and a set or detected rotational speed of the motor rotor And a motor driving current phase adjusting means for determining a timing of voltage application to the motor coil and applying a voltage to the motor coil each time the magnet of the motor rotor passes through the motor coil,  The motor drive current phase adjustment means includes: a position sensor; a speed sensor that detects a rotation speed of the motor rotor; and a current sensor that detects a current flowing through the motor coil in a state where the motor rotor rotates at the rotation speed. A motor-integrated magnetic bearing device that determines the timing of starting the voltage application by a predetermined process based on at least a position sensor. [2] In Claim 1, the motor drive current phase adjusting means is configured such that when the motor rotor rotates at the rotation speed, the magnetic pole switching position of the permanent magnet of the motor rotor passes through the center of the magnetic flux generated by the motor stator. In addition, a motor-type magnetic bearing device in which the voltage application start timing is determined so that the current value of the motor coil is maximized. [3] In Claim 2, the motor drive current phase adjusting means can be switched to a plurality of set rotational speeds, and the permanent magnet switching position of the permanent magnet of the motor rotor is set to the motor stator at each switched rotational speed. Passes through the center of magnetic flux generated by A motor-integrated magnetic bearing device in which the current application start timing can be determined so that the current value of the motor coil is sometimes maximized.  [4] In Claim 2, the sensor detects the passage of the permanent magnet of the motor rotor, and the motor drive current phase adjusting means detects the passage of the permanent magnet after the sensor detects the passage of the permanent magnet. A motor-integrated magnetic bearing device having an output quick start time setting means for setting a time until a sensor signal is output, and starting current application in response to the sensor signal.  [5] In Claim 2, the sensor detects passage of the permanent magnet of the motor rotor, and the motor drive current phase adjusting means applies current in response to a sensor signal output from the sensor. Rotating the mounting position of the sensor, the permanent magnet is detected before the magnetic pole switching position of the permanent magnet of the motor rotor reaches the position passing through the center of the magnetic flux generated by the motor stator. A motor-type magnetic bearing device in a position to be used.  [6] In Claim 2, the compressor side impeller and the turbine side impeller are attached to the main shaft, and the compressor side impeller is driven by one or both of motor power and power generated by the turbine side impeller. A motor-integrated magnetic bearing device applied to a compression / expansion table bin system.  [7] In Claim 1, the motor drive current phase adjusting means determines the timing of voltage application by a predetermined process based on the output of the position sensor, the output of the speed sensor, and the output of the current sensor. A motor-integrated magnetic bearing device.  8. The motor according to claim 7, wherein means for detecting the rotational speed of the motor rotor is provided with means for calculating the rotational speed by calculating from the output of the position sensor instead of the speed sensor. Body-shaped magnetic bearing device. [9] In Claim 7, the motor drive current phase adjusting means outputs the position sensor output without using the output of the current sensor for the timing of voltage application to the motor coil when the motor rotor rotation speed is lower than the set value. Motor body type magnetic bearing device determined by [10] In Claim 7, the predetermined processing is:  The procedure for setting the unit time (Δ 進 め る) to advance the timing of voltage application, the procedure for storing the current value of the current of the motor current detected from the current sensor, the unit time (T) for the current voltage application timing time (T) Procedure to add only ΔΤ),  A procedure for determining whether or not the rotational speed of the motor rotor output from the speed sensor is the target rotational speed. If the rotational speed is not the target rotational speed, a procedure for increasing or decreasing the motor coil current according to the rotational speed until the target rotational speed is reached.  If the motor current decreases with respect to the stored current value when the target rotational speed is reached in the determination process, return to the procedure for storing the current current value and set the decreased current value. Procedure to remember,  If the motor current increases with respect to the stored current value when the target rotational speed is reached in the determination process, the unit time (ΔΤ) is changed to the opposite value (_ΔΤ). Then, returning to the procedure for storing the current current value, the procedure for storing the increased current value,  If the motor current does not change with respect to the stored current value when the target rotational speed is reached in the determination process, the current voltage application timing time (Τ) is set to the previous state. The procedure to return to the state before addition of unit time (ΔΤ) (加 算 = Τ_ ΔΤ),  Motor type magnetic bearing device including 11. The motor-integrated magnetic bearing device according to claim 7, wherein the main shaft is attached with a turbine impeller and a compressor impeller.