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WO2008017050A3 - Smart component-based management techniques in a substrate processing system - Google Patents

Smart component-based management techniques in a substrate processing system Download PDF

Info

Publication number
WO2008017050A3
WO2008017050A3 PCT/US2007/075113 US2007075113W WO2008017050A3 WO 2008017050 A3 WO2008017050 A3 WO 2008017050A3 US 2007075113 W US2007075113 W US 2007075113W WO 2008017050 A3 WO2008017050 A3 WO 2008017050A3
Authority
WO
WIPO (PCT)
Prior art keywords
components
component
processing system
substrate processing
identification data
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/US2007/075113
Other languages
French (fr)
Other versions
WO2008017050A2 (en
WO2008017050A9 (en
Inventor
Neil Benjamin
Richard Alan Gottscho
Nicolas Bright
Robert Steger
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lam Research Corp
Original Assignee
Lam Research Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lam Research Corp filed Critical Lam Research Corp
Publication of WO2008017050A2 publication Critical patent/WO2008017050A2/en
Publication of WO2008017050A9 publication Critical patent/WO2008017050A9/en
Publication of WO2008017050A3 publication Critical patent/WO2008017050A3/en
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06Q—INFORMATION AND COMMUNICATION TECHNOLOGY [ICT] SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL OR SUPERVISORY PURPOSES, NOT OTHERWISE PROVIDED FOR
    • G06Q10/00—Administration; Management
    • G06Q10/06—Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31291—Store value detected signal and machine name and name of part of machine, mask
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/31—From computer integrated manufacturing till monitoring
    • G05B2219/31421—File with parameters for station and identification of station
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
    • G05B2219/00—Program-control systems
    • G05B2219/30—Nc systems
    • G05B2219/45—Nc applications
    • G05B2219/45031—Manufacturing semiconductor wafers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

Landscapes

  • Engineering & Computer Science (AREA)
  • Business, Economics & Management (AREA)
  • Human Resources & Organizations (AREA)
  • Strategic Management (AREA)
  • Economics (AREA)
  • Entrepreneurship & Innovation (AREA)
  • Educational Administration (AREA)
  • Game Theory and Decision Science (AREA)
  • Development Economics (AREA)
  • Marketing (AREA)
  • Operations Research (AREA)
  • Quality & Reliability (AREA)
  • Tourism & Hospitality (AREA)
  • Physics & Mathematics (AREA)
  • General Business, Economics & Management (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Drying Of Semiconductors (AREA)
  • General Factory Administration (AREA)

Abstract

A method of component management in a substrate processing system is disclosed. The substrate processing system has a set of components, at least a plurality of components of the set of components being designated to be smart components, each component of the plurality of components having an intelligent component enhancement (ICE). The method includes querying the plurality of components to request their respective unique identification data from their respective ICEs. The method further includes receiving unique identification data from the plurality of components if any of the plurality of components responds to the querying. The method additionally includes flagging the first component for corrective action if a first component of the plurality of components fails to provide first component unique identification data when the first component identification data is expected.
PCT/US2007/075113 2006-08-02 2007-08-02 Smart component-based management techniques in a substrate processing system Ceased WO2008017050A2 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/927,161 2004-08-25
US92716106A 2006-08-02 2006-08-02

Publications (3)

Publication Number Publication Date
WO2008017050A2 WO2008017050A2 (en) 2008-02-07
WO2008017050A9 WO2008017050A9 (en) 2008-03-20
WO2008017050A3 true WO2008017050A3 (en) 2008-10-30

Family

ID=38997882

Family Applications (1)

Application Number Title Priority Date Filing Date
PCT/US2007/075113 Ceased WO2008017050A2 (en) 2006-08-02 2007-08-02 Smart component-based management techniques in a substrate processing system

Country Status (1)

Country Link
WO (1) WO2008017050A2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629870A (en) * 1994-05-31 1997-05-13 Siemens Energy & Automation, Inc. Method and apparatus for predicting electric induction machine failure during operation
US20050159911A1 (en) * 2002-07-03 2005-07-21 Tokyo Electron Limited Method and apparatus for automatic sensor installation

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5629870A (en) * 1994-05-31 1997-05-13 Siemens Energy & Automation, Inc. Method and apparatus for predicting electric induction machine failure during operation
US20050159911A1 (en) * 2002-07-03 2005-07-21 Tokyo Electron Limited Method and apparatus for automatic sensor installation

Also Published As

Publication number Publication date
WO2008017050A2 (en) 2008-02-07
WO2008017050A9 (en) 2008-03-20

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