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WO2008015849A1 - Dispositif de palier et pompe turbo-moléculaire - Google Patents

Dispositif de palier et pompe turbo-moléculaire Download PDF

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Publication number
WO2008015849A1
WO2008015849A1 PCT/JP2007/062236 JP2007062236W WO2008015849A1 WO 2008015849 A1 WO2008015849 A1 WO 2008015849A1 JP 2007062236 W JP2007062236 W JP 2007062236W WO 2008015849 A1 WO2008015849 A1 WO 2008015849A1
Authority
WO
WIPO (PCT)
Prior art keywords
magnetic
inner ring
bearing
outer ring
shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Ceased
Application number
PCT/JP2007/062236
Other languages
English (en)
Japanese (ja)
Inventor
Takashi Kabasawa
Satoshi Okudera
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Edwards Japan Ltd
Original Assignee
Edwards Japan Ltd
BOC Edwards Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Edwards Japan Ltd, BOC Edwards Japan Ltd filed Critical Edwards Japan Ltd
Publication of WO2008015849A1 publication Critical patent/WO2008015849A1/fr
Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0442—Active magnetic bearings with devices affected by abnormal, undesired or non-standard conditions such as shock-load, power outage, start-up or touchdown
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/048—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps comprising magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/0566—Ceramic bearing designs
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/057—Bearings hydrostatic; hydrodynamic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/059—Roller bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0459—Details of the magnetic circuit
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C39/00—Relieving load on bearings
    • F16C39/02—Relieving load on bearings using mechanical means
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C19/00—Bearings with rolling contact, for exclusively rotary movement
    • F16C19/02—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows
    • F16C19/04—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly
    • F16C19/06—Bearings with rolling contact, for exclusively rotary movement with bearing balls essentially of the same size in one or more circular rows for radial load mainly with a single row or balls
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • F16C2360/44—Centrifugal pumps
    • F16C2360/45—Turbo-molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0489—Active magnetic bearings for rotary movement with active support of five degrees of freedom, e.g. two radial magnetic bearings combined with an axial bearing

Definitions

  • the present invention relates to a bearing device that supports a rotating shaft in a non-contact manner and a turbo molecular pump, and more particularly to a bearing device that includes a protective bearing (auxiliary bearing) that backs up when touched down, and a turbo molecular pump.
  • a protective bearing auxiliary bearing
  • a bearing device that supports a rotating shaft in a non-contact manner, such as a hydrodynamic bearing device and a magnetic bearing device, it is structurally difficult to obtain a high (high) rigidity of the device.
  • these non-contact bearing devices are used for emergency (protective) protective bearings (touch-down and non-contact) when a disturbance such as an earthquake impact is applied or when the control system is abnormal. If the rotating shaft cannot be held, it is configured to back up with this protective bearing.
  • the protective bearing is constituted by a rolling bearing such as a ball bearing or a roller bearing.
  • the bearing device when the bearing device is in a non-contact state and cannot hold the rotating shaft, that is, when the protective bearing functions, the inner ring of the protective bearing contacts the rotating shaft and is close to the rated speed (rotor speed). It is accelerated rapidly.
  • the rolling elements (balls, rollers) of the protective bearing are made of a ceramic member that is lightweight and has a small rotational torque.
  • turbo molecular pump that uses such a non-contact bearing to exhaust gas by the action of a fixed blade and a rotating blade rotating at high speed is available.
  • the turbo molecular pump uses a high-frequency motor to rotate the rotor blades at high speed. Therefore, the permanent magnet which comprises a high frequency motor is embed
  • a protective bearing is disposed at the end, and a rotating shaft is inserted through a cylindrical fixed portion.
  • raceway rings (inner ring, outer ring) of the protection bearing are magnetized when passing through the inside of the permanent magnet force protection bearing carried on the rotating shaft.
  • FIG. 9 is a diagram showing a state where the raceway ring is magnetized in a conventional protective bearing.
  • 9A shows a cross section in the radial direction (radial direction) of the protective bearing
  • FIG. 9B shows a cross section in the axial direction (axial direction).
  • the rolling element 103 is made of a non-magnetic member (for example, a ceramic member), it functions as an air gap between the inner ring 101 and the outer ring 102, as between the inner ring 101 and the rotating shaft 104. To do.
  • a non-magnetic member for example, a ceramic member
  • the magnetic flux density in the magnetic circuit is larger (higher) in the closed magnetic path (thick line) passing through the inner ring 101 and the rotating shaft 104 than in the closed magnetic path (broken line) passing through the inner ring 101 and the outer ring 102.
  • an induced current is generated in the rotating shaft 104 due to the magnetism of the race (inner ring 101).
  • the inner ring 101 of the protective bearing rotates by attracting the magnetic force generated by the rotating shaft 104.
  • Patent Document 1 Japanese Patent Laid-Open No. 2002-54593
  • Patent Document 1 describes that an inner ring of a touchdown bearing (protective bearing) has a low residual magnetic flux density.
  • a technique has been proposed in which the inner ring is formed of a different material and is suppressed from being magnetized.
  • a technology has been proposed in which the inner ring of the touchdown bearing is formed of a non-magnetic member such as austenitic stainless steel formed in a solid state, thereby suppressing the inner ring of the touchdown bearing from being magnetized. Yes.
  • an object of the present invention is to provide a bearing device and a turbo molecular pump including a protective bearing capable of appropriately suppressing the rotation of the inner ring while maintaining sufficient rigidity.
  • the invention according to claim 1 is a bearing device that supports a rotating shaft on which a permanent magnet constituting a motor is disposed in a non-contact manner, the rolling element made of a non-magnetic material, and the rolling element.
  • rotational torque of the inner ring indicates, for example, traction torque that rotates with the rotation of the rotation shaft.
  • a magnetic resistance between the inner ring and the outer ring is smaller than a magnetic resistance between the inner ring and the rotating shaft.
  • the magnetic induction structure is a magnetic induction member force composed of a magnetic member for guiding the magnetism of the inner ring to the outer ring.
  • the magnetic induction member in the bearing device according to the second aspect, is disposed at a predetermined distance / 3 from the inner ring, and the distance / 3 is defined by the rotation shaft and the inner ring. It is characterized by being smaller than the distance between and.
  • the magnetic induction structure in the bearing device according to the first, second, or third aspect, includes a distance ⁇ between the inner ring and the outer ring, and the rotation shaft and the inner ring. It is characterized in that it is smaller than the interval ⁇ .
  • the invention according to claim 5 is the bearing device according to claim 1, claim 2, claim 3 or claim 4, wherein the rolling element is made of a ceramic member.
  • the invention according to claim 6 is characterized in that in the bearing device according to any one of claims 1 to 5, the rotating shaft is supported by a magnetic force or a dynamic pressure.
  • the invention according to claim 7 is a turbomolecular pump comprising the bearing device according to any one of claims 1 to 6.
  • the rotation of the inner ring in the protective bearing is provided with the magnetic induction structure that makes the rotation torque of the inner ring smaller than the friction torque, so that the accompanying rotation of the inner ring can be suppressed.
  • FIG. 1 is a diagram showing a schematic configuration of a turbo molecular pump according to the present embodiment.
  • FIG. 2 (a) is a diagram showing a configuration of a magnetic induction structure, and (b) is an enlarged view of a region indicated by a broken line part in (a).
  • FIG. 3 is a diagram showing a state in which the protective bearing according to the present embodiment is magnetized.
  • FIG. 4 is a diagram showing a configuration of a first modification of the magnetic induction structure.
  • FIG. 5 is a diagram showing a configuration of a second modification of the magnetic induction structure.
  • FIG. 6 is a diagram showing a configuration of a third modification of the magnetic induction structure.
  • FIG. 7 is a view showing a configuration of a fourth modification of the magnetic induction structure.
  • FIG. 8 is a view showing a configuration of a fifth modification of the magnetic induction structure.
  • FIG. 9 is a view showing a state in which a race is magnetized in a conventional protective bearing. Explanation of symbols
  • a turbo molecular pump provided with a magnetic bearing device will be described as a device using a non-contact bearing device having a protective bearing.
  • FIG. 1 is a diagram showing a schematic configuration of a turbo molecular pump 1 according to the present embodiment.
  • FIG. 1 shows a cross section in the axial direction of the turbo molecular pump 1.
  • the turbo molecular pump 1 is installed, for example, in a semiconductor manufacturing apparatus, and is used when exhausting process gas from a vacuum chamber.
  • the casing 2 constituting the exterior body of the turbo molecular pump 1 has a substantially cylindrical shape, and constitutes the casing of the turbo molecular pump 1 together with the base 3 provided at the lower part of the casing 2 (exhaust port 6 side). ing.
  • a structure for allowing the turbo molecular pump 1 to perform an exhaust function, that is, a gas transfer mechanism is disposed inside the housing.
  • This gas transfer mechanism is mainly composed of a rotating part that is rotatably supported by a shaft and a fixed part that is fixed to the casing.
  • An inlet 4 for introducing gas into the turbo molecular pump 1 is formed at the end of the casing 2.
  • a flange portion 5 is formed on the end surface of the casing 2 on the intake port 4 side so as to project to the outer peripheral side.
  • the base 3 is formed with an exhaust port 6 for exhausting gas from the turbo molecular pump 1, that is, exhausting process gas from the semiconductor manufacturing apparatus.
  • the rotating part includes a shaft 7 that is a rotating shaft, a substantially inverted U-shaped port body 8 disposed on the shaft 7, a rotor blade 9 provided on the rotor body 8, and an exhaust port 6 side. It is composed of a cylindrical member 10 provided in the (thread groove pump part S).
  • the rotor body 8 is fixed to the upper part of the shaft 7 with bolts 23.
  • the cylindrical member 10 is formed on the extension of the rotor body 8 and is a cylindrical member that is concentric with the rotation axis of the rotor body 8.
  • a rotor blade 9 is disposed on the outer periphery of the rotor body 8, and the rotor blade 9 is inclined by a predetermined angle from a plane perpendicular to the axis of the shaft 7 and extends radially from the shaft 7 (blade blades). Root).
  • a motor unit 11 for rotating the shaft 7 at a high speed is provided.
  • the motor unit 11 is a DC brushless motor (high frequency motor), and is configured as follows.
  • the motor unit 11 includes a permanent magnet 111 embedded in the shaft 7.
  • the permanent magnet 111 is fixed so that the N pole and the S pole are arranged around the shaft 7 every 180 °.
  • the motor unit 11 includes an electromagnet 112 disposed around the permanent magnet with a predetermined clearance from the shaft 7.
  • electromagnets are arranged so as to face each other symmetrically with respect to the axis of the shaft 7 every 60 °.
  • the turbo molecular pump 1 is connected to the control device 70 via a connector and a cable. Then, the current of the electromagnet 112 is switched one after another so that the rotation of the shaft 7 is continued by the control device 70.
  • control device 70 generates a rotating magnetic field around the permanent magnet 111 fixed to the shaft 7 by switching the exciting currents of the six electromagnets 112, and causes the shaft to move by causing the permanent magnet 111 to follow the rotating magnetic field.
  • Magnetic bearings 12 and 13 for pivotally supporting the shaft 7 in the radial direction (radial direction) are provided on the intake port 4 side and the exhaust port 6 side with respect to the motor portion 11 of the shaft 7. Yes.
  • a magnetic bearing 14 for pivotally supporting the shaft 7 in the thrust direction (axial direction) is provided at the lower end (exhaust port 6 side end) of the shaft 7.
  • These magnetic bearings 12 to 14 constitute so-called five-axis control type magnetic bearings.
  • the shaft 7 is supported by the magnetic bearings 12 and 13 in a non-contact manner in the radial direction (the radial direction of the shaft 7), and is supported by the magnetic bearing 14 in a non-contact manner in the thrust direction (the axial direction of the shaft 7).
  • Displacement sensors 15 to 17 for detecting the displacement of the shaft 7 are provided in the vicinity of the magnetic bearings 12 to 14, respectively.
  • the shaft 7 is formed of a high magnetic permeability material (such as iron), and these electromagnets It is attracted by magnetic force.
  • the displacement sensor 15 detects the displacement of the shaft 7 in the radial direction by sampling at predetermined time intervals.
  • control device 70 When the control device 70 detects that the shaft 7 is displaced from the predetermined position in the radial direction by the displacement signal from the displacement sensor 15, the control device 70 adjusts the magnetic force of each electromagnet in the magnetic bearing 12 to determine the shaft 7 in advance. It operates to return to the position of. The adjustment of the magnetic force of the electromagnet is performed by feedback controlling the excitation current of each electromagnet.
  • the control device 70 performs feedback control of the magnetic bearing 12 based on the signal of the displacement sensor 15, and as a result, the shaft 7 is magnetically levitated in the radial direction with a predetermined clearance from the electromagnet in the magnetic bearing 12, and the space 7 It is held in a non-contact manner.
  • the configuration and action of the magnetic bearing 13 are the same as those of the magnetic bearing 12.
  • the control device 70 performs feedback control of the magnetic bearing 13 based on the signal of the displacement sensor 16, whereby the shaft 7 is magnetically levitated in the radial direction by the magnetic bearing 13 and is held in a non-contact manner in the space. .
  • the shaft 7 is held at a predetermined position in the radial direction by the action of the magnetic bearings 12 and 13.
  • the magnetic bearing 14 includes a disk-shaped metal disk 18 and electromagnets 19 and 20, and holds the shaft 7 in the thrust direction.
  • the metal disk 18 is made of a high permeability material such as iron, and is fixed perpendicularly to the shaft 7 at the center thereof. Magnets 19 and 20 are arranged so as to sandwich the metal disk 18 and face each other. The electromagnet 19 attracts the metal disk 18 upward by magnetic force, and the electromagnet 20 attracts the metal disk 18 downward.
  • the control device 70 appropriately adjusts the magnetic force exerted by the electromagnets 19 and 20 on the metal disk 18 so that the shaft 7 is magnetically levitated in the thrust direction and held in a non-contact manner in the space.
  • a displacement sensor 17 is disposed so as to face the lower end portion of the shaft 7.
  • the displacement sensor 17 samples and detects the displacement of the shaft 7 in the thrust direction, and transmits this to the control device 70.
  • the control device 70 detects the displacement of the shaft 7 in the thrust direction based on the displacement detection signal received from the displacement sensor 17.
  • the control device 70 adjusts the magnetic force by feedback controlling the exciting currents of the electromagnets 19 and 20 so as to correct this displacement. It operates to return the shaft 7 to a predetermined position.
  • the control device 70 continuously performs this feedback control. As a result, the shaft 7 is magnetically levitated and held at a predetermined position in the thrust direction.
  • the shaft 7 is held in the radial direction by the magnetic bearings 12 and 13, and is held in the thrust direction by the magnetic bearing 14, so that it rotates around the axis of the shaft 7. .
  • the fixed part is fixed blade 30 provided on the intake port 4 side (turbomolecular pump part T), thread groove spacer 31 provided on the exhaust port 6 side (thread groove type pump part S), stator column 34, etc. Consists of.
  • the fixed wing 30 is configured with a blade force that is inclined from the plane perpendicular to the axis of the shaft 7 by a predetermined angle and extends from the inner peripheral surface of the casing 2 toward the shaft 7.
  • the fixed blades 30 are formed in a plurality of stages alternately with the rotor blades 9 in the axial direction.
  • the fixed wings 30 of each stage are separated from each other by a spacer 33 having a cylindrical shape.
  • the thread groove spacer 31 is a cylindrical member in which a spiral groove 32 is formed on the inner peripheral surface.
  • the inner peripheral surface of the thread groove spacer 31 faces the outer peripheral surface of the cylindrical member 10 with a predetermined gap therebetween.
  • the direction of the spiral groove 32 formed in the thread groove spacer 31 is the direction of force toward the exhaust port 6 when gas is transported in the spiral groove 32 in the rotational direction of the rotating part.
  • the depth of the spiral groove 32 becomes shallower as it approaches the exhaust port 6. The gas transported through the spiral groove 32 is compressed as it approaches the exhaust port 6.
  • the base 3 and the casing 2 constitute an exterior body of the turbo molecular pump 1.
  • a stator column having a cylindrical shape concentrically with the rotational axis of the rotor is attached in the direction of the 34 force inlet 4.
  • the turbo molecular pump 1 is disposed on the intake port 4 side of the displacement sensor 15 inside the casing 2.
  • a protective bearing (auxiliary bearing) 40 constituted by a full ball type deep groove ball bearing is provided.
  • a protective bearing 50 constituted by a pair of angular ball bearings in which oblique contact directions are combined in opposite directions is provided.
  • These protective bearings 40 and 50 are rolling bearings (touch-down bearings) for protecting the shaft 7 from contact with the magnetic bearings 12, 13, and 14 when the shaft 7 is stopped or abnormally controlled. It is.
  • the shaft 7 in a state where the shaft 7 is rotatably supported by the magnetic bearings 12, 13, 14 in a magnetically levitated state, the shaft 7 maintains a non-contact state with respect to the protective bearings 40, 50.
  • the shaft 7 when the shaft 7 is stopped or when the control is abnormal due to the action of an external force, the shaft 7 comes into contact with the protective bearings 40 and 50 and is rotatably supported before contacting the magnetic bearings 12, 13 and 14.
  • the rotor body 8 is fixed to the shaft 7 using the bolts 23.
  • the shaft 7 is preloaded with a permanent magnet 111 that constitutes a motor unit 11 (high frequency motor).
  • a cylindrical stator column 34 is fixed to the base 3 using bolts 25.
  • a protective bearing 40 is fixed to the inner peripheral surface of the stator column 34 in the vicinity of the end on the intake port 4 side.
  • the metal disk 18 (magnetic bearing 14) is attached to the shaft 7 from the direction of the exhaust port 6. (Mounting) Assemble the rotating part to the fixed part.
  • Magnetic induction structure that suppresses the accompanying phenomenon in which the protective bearing 40 rotates as the shaft 7 rotates due to the action of the magnetic circuit formed by the generated residual magnetic field as in the past (magnetic induction mechanism) Is provided.
  • Fig. 2 (a) is a diagram showing the configuration of the magnetic induction structure
  • Fig. 2 (b) is an enlarged view of the region indicated by the broken line in (a).
  • the description of the rotor main body 8 and the like fixed to the shaft 7 is omitted to avoid complicating the description.
  • the turbo molecular pump 1 includes an inner ring 41, an outer ring 42, a protective bearing 40 including rolling elements 43, and a magnetic derivative 44.
  • the inner ring 41 and the outer ring 42 constitute a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 40 roll.
  • the inner ring 41 and the outer ring 42 are formed of a magnetic member (for example, a SUS440C member that is martensitic stainless steel or SUJ2 that is carbon steel).
  • a magnetic member for example, a SUS440C member that is martensitic stainless steel or SUJ2 that is carbon steel.
  • the rolling elements 43 are balls (balls) disposed between the circular raceways of the inner ring 41 and the outer ring 42, and are formed of a ceramic material that is a nonmagnetic material.
  • This rolling element 43 made of ceramics (for example, 3.20g / cm3 for Si3N4 ceramics) is lower than the density of bearing steel (7.85g / cm3). Thus, the centrifugal force can be effectively suppressed, and the load on the rolling element 43 can be reduced.
  • the magnetic derivative 44 is a member formed of a magnetic material, and has a magnetic induction function for guiding the magnetism of the magnetized inner ring 41 to a closed magnetic path passing through the inner ring 41 and the outer ring 42, and a protective bearing 40 (outer ring 42). ) Is fixed to the stator column 34.
  • the magnetic derivative 44 is composed of a bearing fixing portion 44a and a magnetic induction portion 44b.
  • the bearing fixing portion 44a is formed of an annular plate member, and the magnetic derivative 44 is attached to the stator column 34. A plurality of through-holes 47 into which screws 45 for fixing (wearing) are fitted (pressed) are formed.
  • a screw hole 48 for fixing the screw 45 is provided on the end surface of the stator column 34 on the intake port 4 side.
  • the protective bearing 40 in which the outer ring 42 is disposed in the fitting groove 46 provided on the end of the intake port 4 of the stator column 34 is fixed to the screw hole 48 with the screw 45 so that It is pressed down from the 4th side and fixed.
  • the magnetic induction portion 44b extends from the inner peripheral edge of the bearing fixing portion 44a to the direction in which the bearing fixing portion 44a extends.
  • the portion of the magnetic induction portion 44b that protrudes in the axial direction (exhaust port 6 direction) is disposed between the inner ring 41 and the outer ring 42 of the protective bearing 40, and the outer circumferential surface and the inner circumferential surface of the outer ring 42 are arranged. Thus, they are in contact (contacted) so that the magnetic resistance becomes smaller.
  • a closed magnetic path (thick line) passing through the inner ring 41 and the outer ring 42 is an induction magnetic path.
  • the gap i3 between the inner ring 41 of the protective bearing 40 and the magnetic induction portion 44b is a clearance between the inner peripheral surface of the inner ring 41 and the outer peripheral wall surface of the shaft 7. It is configured to be sufficiently small (narrow) compared to the interval ⁇ .
  • the interval i3 is the distance between the gap between the radially projecting portion of the magnetic guiding portion 44b and the end surface on the inlet 4 side of the inner ring 41, and the portion of the magnetic guiding portion 44b protruding in the axial direction.
  • the distance between the inner ring 41 and the inner peripheral wall surface is shown.
  • FIG. 3 is a view showing a state where the protective bearing 40 according to the present embodiment is magnetized.
  • 3A shows a cross section in the radial direction (radial direction) of the protective bearing 40
  • FIG. 3B shows a cross section in the axial direction (axial direction).
  • the turbo molecular pump 1 As shown in FIG. 2, by providing a magnetic derivative 44 that guides the magnetism of the magnetized inner ring 41 to the outer ring 42, the inner ring 41 and the outer ring 42 are separated. Air gap distance j3 force in the closed magnetic path that passes through It becomes smaller than the conventional air gap distance (the distance between the inner ring 101 and the outer ring 102) (shown in Fig. 9). That is, the magnetic resistivity in the closed magnetic circuit passing through the inner ring 41 and the outer ring 42 is reduced.
  • the magnetic flux density (number of magnetic flux lines per unit area) of the closed magnetic circuit (thick line) passing through the inner ring 41 and the outer ring 42 is larger (higher) than the closed magnetic circuit (broken line) passing through the inner ring 41 and the shaft 7. . Therefore, by providing the magnetic derivative 44, the magnetic flux leaking to the shaft 7 side can be reduced by guiding the magnetic flux to the closed magnetic path (thick line) passing through the inner ring 41 and the outer ring 42.
  • the turbo molecular pump 1 is supported in steady operation, that is, the shaft 7 is supported by the magnetic bearings 12, 13, and 14 in a non-contact manner.
  • the relationship of (rotational torque of the inner ring 41 of the protective bearing 40) ⁇ (friction torque of the protective bearing 40) is established.
  • the friction torque of the protective bearing 40 includes a component of the rolling friction force of the rolling element 43.
  • the present embodiment by providing the magnetic induction structure that induces the magnetism of the magnetized protective bearing 40, the rotation of the protective bearing 40 during steady operation of the turbo molecular pump 1 is achieved. Therefore, the wear rate (wear rate) of the protective bearing 40 can be reduced. As a result, it is possible to increase the life of the protective bearing 40.
  • the accompanying rotation of the protective bearing 40 can be suppressed, noise (abnormal noise) and vibration caused by the rotation of the protective bearing 40 can be reduced. Further, according to the present embodiment, since the magnetic flux leaking to the shaft 7 side is reduced, The temperature rise of the shaft 7 due to heat can be prevented.
  • a closed magnetic circuit (thick line) passing through the inner ring 41 and the outer ring 42 is formed by inducing magnetic flux through the magnetic derivative 44.
  • a force (torque) for braking the rotation of the inner ring 41 acts.
  • the wear rate (wear speed) of the protective bearing 40 can be reduced. As a result, the life of the protective bearing 40 can be extended.
  • an AC magnetic field is applied (acts) between the inner ring 41 and the outer ring 42 of the protective bearing 40 when the touch is down (when the shaft 7 is stopped or when the control is abnormal).
  • the magnetic material forming the inner ring 41, the outer ring 42, and the magnetic derivative 44 constituting the protective bearing 40 has a small degree (rectangular ratio) indicating the rectangularity (rectangularity) of the hysteresis curve (B—H curve). It is preferable to select one.
  • magnetic soft iron 3% silicon iron, free-cutting silicon iron and the like are preferable.
  • the magnetic induction structure that suppresses the accompanying rotation of the protective bearing 40 described above is not limited to a structure in which the magnetic derivative 44 as shown in FIG. 2 is provided in the protective bearing 40.
  • FIG. 4 is a diagram showing a configuration of a first modification of the magnetic induction structure.
  • turbo molecular pump 1 shown in the embodiment described above.
  • the same reference numerals are given to the parts that are omitted, and the description thereof will be omitted.
  • the magnetic induction structure shown in the first modification includes an inner ring 41, an outer ring 42, a protective bearing 40 including a rolling element 43, a bearing fixing member 51, and a magnetic derivative 52.
  • the outer ring 42 constitutes a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 40 roll.
  • the inner ring 41 and the outer ring 42 are formed of a magnetic member.
  • the rolling element 43 is a ball disposed between the circular raceways of the inner ring 41 and the outer ring 42, and is formed of a ceramic material that is a non-magnetic substance.
  • the bearing fixing member 51 is formed of an annular plate member, and the protective bearing 40 is connected to the stator column.
  • a plurality of through-holes 47 for fitting (pushing through) screws 45 for fixing (wearing) to 34 are formed.
  • a screw hole 48 for fixing the screw 45 is provided on the end surface of the stator column 34 on the intake port 4 side.
  • the protective bearing 40 in which the outer ring 42 is disposed in the fitting groove 46 provided at the end of the intake port 4 of the stator column 34 via the magnetic induction 52 is used to fix the bearing fixing member 51 to the screw hole 48 with the screw 45. By fixing to, it is pressed and fixed from the inlet 4 side.
  • the magnetic derivative 52 is a member formed of a magnetic material having a magnetic induction function that guides the magnetism of the magnetized inner ring 41 to a closed magnetic path passing through the inner ring 41 and the outer ring 42, and projects in the axial direction. It has a (protruded) site.
  • the portion of the magnetic derivative 52 that protrudes in the axial direction (in the direction of the intake port 4) is disposed between the inner ring 41 and the outer ring 42 of the protective bearing 40, and the outer peripheral surface and the inner peripheral surface of the outer ring 42 are more Contact is made so that the magnetic resistance is reduced.
  • the gap between the inner ring 41 and the magnetic derivative 52 of the protective bearing 40 is equal to the gap j3 between the inner ring 41 and the magnetic guiding portion 44b shown in FIG.
  • the gap between the inner peripheral surface of the inner ring 41 and the outer peripheral wall surface of the shaft 7 is sufficiently small (narrow) It is configured to be.
  • FIG. 5 is a diagram showing a configuration of a second modification of the magnetic induction structure.
  • the magnetic induction structure shown in the second modification includes an inner ring 41, an outer ring 42, a protective bearing 40 including a rolling element 43, an upper magnetic derivative 53, and a lower magnetic derivative 54.
  • the inner ring 41 and the outer ring 42 constitute a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 40 roll.
  • the inner ring 41 and the outer ring 42 are formed of a magnetic member.
  • the rolling element 43 is a ball disposed between the circular raceways of the inner ring 41 and the outer ring 42, and is formed of a ceramic material that is a non-magnetic substance.
  • the upper magnetic derivative 53 is a member made of a magnetic material, and has a magnetic induction function for guiding the magnetism of the magnetized inner ring 41 to a closed magnetic path passing through the inner ring 41 and the outer ring 42, and a protective bearing 40 (outer ring It also has a fixing function for fixing 42) to the stator column 34.
  • the upper magnetic derivative 53 is made of an annular plate member, and has a plurality of through-holes 47 into which screws 45 for fixing (mounting) the protective bearing 40 to the stator column 34 are fitted (pushed).
  • a screw hole 48 for fixing the screw 45 is provided on the end surface of the stator column 34 on the intake port 4 side.
  • the protective bearing 40 disposed in the fitting groove 46 provided at the end of the intake port 4 side of the stator column 34 via the lower magnetic derivative 54 fixes the bearing fixing member 51 to the screw hole 48 with the screw 45. By doing so, it is pressed down and fixed from the inlet 4 side.
  • the inner peripheral edge portion of the upper magnetic derivative 53 protrudes inward (in the axial center direction) to the vicinity of the inner peripheral wall surface of the inner ring 41 when the protective bearing 40 is fixed to the stator column 34.
  • the inner diameter of the upper magnetic derivative 53 is formed larger than the inner diameter of the inner ring 41 so as not to hinder the function as the protective bearing 40.
  • the lower magnetic derivative 54 is a member formed of a magnetic material having a magnetic induction function for guiding the magnetism of the magnetized inner ring 41 to a closed magnetic circuit passing through the inner ring 41 and the outer ring 42, and is an annular plate. It consists of members.
  • the outer peripheral portion of the side surface of the air inlet 4 in the lower magnetic derivative 54 is in contact (contact) with the end surface on the exhaust port 6 side of the outer ring 42 so that the magnetic resistance becomes smaller. In this way, by bringing the upper magnetic derivative 53 and the lower magnetic derivative 54 into contact with the outer ring 42, more magnetic flux can be picked up and guided to the closed magnetic circuit passing through the inner ring 41 and the outer ring 42.
  • the gap between the upper magnetic derivative 53 and the lower magnetic derivative 54 and the inner ring 41 of the protective bearing 40 is equal to the inner ring 41 and the magnetic induction portion shown in FIG. Similar to the gap distance between the inner ring 41 and the outer circumference wall surface of the shaft 7, the gap is sufficiently smaller (narrower) than the gap gap with the 44b.
  • the closed magnetic circuit passing through the inner ring 41 and the outer ring 42 includes a magnetic circuit (closed magnetic circuit) via the upper magnetic derivative 53 and a lower magnetic derivative 54. It is formed from a magnetic circuit (closed magnetic circuit).
  • FIG. 6 is a diagram showing a configuration of a third modification of the magnetic induction structure.
  • the above-described protective bearing 40 is a modified protective bearing 80.
  • An example of configuring the magnetic induction structure will be described.
  • the magnetic induction structure shown in the third modification includes an inner ring 55, an outer ring 56, a protective bearing 80 made up of rolling elements 43, and a bearing fixing member 51.
  • the inner ring 55 and the outer ring 56 constitute a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 80 roll.
  • the inner ring 55 and the outer ring 56 are formed of magnetic members.
  • the rolling element 43 is a ball disposed between the circular raceways of the inner ring 55 and the outer ring 56, and is made of a ceramic material that is a non-magnetic substance.
  • the depth of the groove of the raceway ring formed on the outer peripheral wall surface of the inner ring 55 and the inner peripheral wall surface of the outer ring 56, that is, the groove into which the rolling element 43 is fitted, is shown in FIG. It is formed deeper than the protective bearing 40 (inner ring 41, outer ring 42).
  • the gap between the opposing wall surfaces of the inner ring 55 and the outer ring 56 excluding the raceway groove region that is, between the outer peripheral wall surface of the inner ring 55 excluding the raceway groove region and the inner peripheral wall surface of the outer ring 56.
  • the gap interval ⁇ is compared with the gap interval ⁇ between the inner peripheral surface of the inner ring 55 and the outer peripheral wall surface of the shaft 7 in the same manner as the gap interval between the inner ring 41 and the magnetic guiding portion 44b shown in FIG. It is configured to be sufficiently small (narrow).
  • a magnetic circuit (closed magnetic circuit) that passes through the inner ring 55 and the outer ring 56 by passing magnetic flux through the gap between the inner ring 55 and the outer ring 56. Is formed. That is, a magnetic flux (line of magnetic force) is induced to the induction magnetic path.
  • the cross-sectional area of the induction magnetic path can be further increased. This increases the allowable limit of the magnetic flux density, which causes magnetic saturation in the protective bearing 80.
  • FIG. 7 is a diagram showing a configuration of a fourth modification of the magnetic induction structure.
  • a magnetic induction structure is configured by a protection bearing 81 obtained by further modifying the protection bearing 80 shown in the third modification.
  • the magnetic induction structure shown in the fourth modification includes an inner ring 57, an outer ring 58, a protective bearing 81 made up of rolling elements 43, and a bearing fixing member 51.
  • the inner ring 57 and the outer ring 58 constitute a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 81 roll.
  • the inner ring 57 and the outer ring 58 are formed of a magnetic member.
  • the rolling elements 43 are balls (balls) disposed between the circular raceways of the inner ring 57 and the outer ring 58, and are formed of a ceramic material that is a non-magnetic substance.
  • the depth of the groove of the raceway ring on which the rolling element 43 rolls is formed on the outer peripheral wall surface of the inner ring 57 and the inner peripheral wall surface of the outer ring 58. It is formed deeper than the protective bearing 40 (inner ring 41, outer ring 42) shown in FIG.
  • the outer ring 58 is provided with a magnetic induction part 59 that protrudes (projects) inward (in the axial center direction) from the end of the outer ring 58 on the intake port 4 side.
  • the magnetic induction portion 59 is formed integrally with the outer ring 58 by a magnetic member.
  • the magnetic induction unit 59 has a magnetic induction function for inducing the magnetism of the magnetized inner ring 57 to a closed magnetic path passing through the inner ring 57 and the outer ring 58.
  • the magnetic guiding portion 59 integrally with the outer ring 58, more magnetic flux can be picked up and guided to the closed magnetic path passing through the inner ring 57 and the outer ring 58.
  • the inner peripheral edge of the magnetic guide portion 59 projects inward (in the axial center direction) to the vicinity of the inner peripheral wall surface of the inner ring 57.
  • the inner diameter of the magnetic induction portion 59 is formed larger than the inner diameter of the inner ring 57 so as not to hinder the function as the protective bearing 81.
  • the gap between the outer peripheral wall surface of the inner ring 57 and the inner peripheral wall surface of the outer ring 58, excluding the raceway groove region, and the gap between the magnetic guide portion 59 and the inner ring 57 are as described above.
  • the gap spacing between the inner ring 57 and the outer wall surface of the shaft 7 is sufficiently smaller (narrower) than the gap gap / 3 between the inner ring 41 and the magnetic guide 44b shown in Fig. 2. ).
  • more magnetic flux can be picked up and guided to the closed magnetic circuit passing through the inner ring 55 and the outer ring 56.
  • the cross-sectional area of the induction magnetic path can be further increased.
  • the allowable limit of the magnetic flux density further increases, which causes magnetic saturation in the protective bearing 81 .
  • FIG. 8 is a diagram showing a configuration of a fifth modification of the magnetic induction structure.
  • the magnetic induction structure shown in the fifth modification includes an inner ring 60, an outer ring 61, a protective bearing 82 composed of rolling elements 43, a magnetic derivative 63, and a bearing fixing member 51.
  • the inner ring 60 and the outer ring 61 constitute a raceway (circular raceway) on which the rolling elements 43 in the protective bearing 81 roll.
  • the inner ring 57 and the outer ring 58 are formed of a magnetic member.
  • the rolling element 43 is a ball disposed between the circular raceways of the inner ring 60 and the outer ring 61, and is formed of a ceramic material that is a non-magnetic substance.
  • the depth of the groove of the raceway ring on which the rolling element 43 rolls is formed on the outer peripheral wall surface of the inner ring 60 and the inner peripheral wall surface of the outer ring 61. It is formed deeper than the protective bearing 40 (inner ring 41, outer ring 42) shown in FIG.
  • the outer ring 61 is provided with a magnetic induction portion 62 that protrudes (projects) inward (in the axial center direction) from the end of the outer ring 61 on the exhaust port 6 side.
  • the magnetic guiding portion 62 is formed integrally with the outer ring 61 by a magnetic member.
  • the magnetic induction unit 62 has a magnetic induction function for inducing the magnetism of the magnetized inner ring 60 to a closed magnetic path passing through the inner ring 60 and the outer ring 61.
  • a magnetic induction function for inducing the magnetism of the magnetized inner ring 60 to a closed magnetic path passing through the inner ring 60 and the outer ring 61.
  • a magnetic derivative 63 having an annular plate member force made of a magnetic material is provided on the end surface of the outer ring 61 on the intake port 4 side.
  • the magnetic derivative 63 also has a magnetic induction function that induces the magnetism of the magnetized inner ring 60 to a closed magnetic circuit passing through the inner ring 60 and the outer ring 61.
  • the inner peripheral edge portions of the magnetic induction portion 62 and the magnetic derivative 63 project inward (in the axial center direction) to the vicinity of the inner peripheral wall surface of the inner ring 60.
  • the inner diameters of the magnetic induction portion 62 and the magnetic derivative 63 are formed larger than the inner diameter of the inner ring 60 so as not to hinder the function as the protective bearing 82.
  • the protective bearing 82 in which the outer ring 61 is disposed in the fitting groove 46 can be pressed from the intake port 4 side by fixing the bearing fixing member 51 to the screw hole 48 with the screw 45 via the magnetic derivative 63. Attached and fixed.
  • the gap between the outer peripheral wall surface of the inner ring 60 and the inner peripheral wall surface of the outer ring 61 excluding the raceway groove region, and the gap between the magnetic induction portion 62 and the magnetic derivative 63 and the inner ring 60 are 2 is sufficiently small compared to the clearance ⁇ between the inner peripheral surface of the inner ring 60 and the outer peripheral wall surface of the shaft 7 in the same manner as the clearance of the inner ring 41 and the magnetic induction portion 44b shown in FIG. Narrow).
  • the magnetic induction section 62 and the magnetic derivative 63 are provided, so that the cross-sectional area of the induction magnetic path can be further increased. As a result, the allowable limit of the magnetic flux density is further increased, which causes magnetic saturation in the protective bearing 82.

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Fluid Mechanics (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Rolling Contact Bearings (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

La présente invention concerne un palier de protection équipé d'éléments roulants de corps non magnétique dans lequel la co-rotation d'une bague intérieure magnétisée est supprimée. Une bague intérieure et une bague extérieure sont formées d'un élément de corps magnétique, respectivement, et des éléments roulants sont formés de corps non magnétique. Un inducteur de magnétisme est un élément formé d'un matériau magnétique et possède une fonction pour induire un magnétisme d'une bague intérieure magnétisée sur un passage magnétique fermé qui passe la bague intérieure et la bague extérieure. Une partie d'induction de magnétisme est constituée d'une partie qui s'étend dans la direction d'extension et la direction axiale d'une partie de fixation de palier à partir du bord circonférentiel intérieur de celle-ci, et touche la bague extérieure afin de réduire la réluctance. L'intervalle β de l'espace libre entre la bague intérieure du palier de protection et la partie d'induction de magnétisme est établi pour être suffisamment plus petit que l'intervalle α de l'espace libre entre la surface circonférentielle intérieure de la bague intérieure et la face de paroi circonférentielle extérieure d'un arbre. Du fait que l'inducteur de magnétisme est prévu de sorte que l'intervalle β devienne plus petit que l'intervalle α, des flux plus magnétiques peuvent être captés et induits sur le passage magnétique fermé qui passe la bague intérieure et la bague extérieure.
PCT/JP2007/062236 2006-08-01 2007-06-18 Dispositif de palier et pompe turbo-moléculaire Ceased WO2008015849A1 (fr)

Applications Claiming Priority (2)

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JP2006210271A JP2008038935A (ja) 2006-08-01 2006-08-01 軸受装置、及びターボ分子ポンプ
JP2006-210271 2006-08-01

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013056920A1 (fr) * 2011-10-21 2013-04-25 Siemens Aktiengesellschaft Frein à friction, palier de secours comportant un frein à friction et procédé pour faire fonctionner un palier magnétique
CN105612361A (zh) * 2013-10-25 2016-05-25 埃地沃兹日本有限公司 保护轴承、轴承装置及真空泵
JP2019059347A (ja) * 2017-09-27 2019-04-18 Ntn株式会社 発電機付き車輪用軸受装置
JP2021110457A (ja) * 2020-01-14 2021-08-02 燕山大学Yanshan University 歯車ポンプにおける磁気転がり軸受及びその寿命計算方法
WO2024241415A1 (fr) * 2023-05-22 2024-11-28 株式会社ジェイテクト Roulement à billes

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2910080B1 (fr) * 2006-12-19 2009-03-20 Snecma Sa Pompe avec un dispositif elastique sur un roulement
WO2014122719A1 (fr) * 2013-02-05 2014-08-14 三菱重工業株式会社 Structure de support de palier et générateur d'énergie éolienne

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09210061A (ja) * 1996-01-31 1997-08-12 Seiko Seiki Co Ltd 半径方向位置修正電磁石付磁気軸受装置
JPH10176714A (ja) * 1997-09-10 1998-06-30 Koyo Seiko Co Ltd 磁気軸受装置
JP2000274433A (ja) * 1999-03-19 2000-10-03 Koyo Seiko Co Ltd 磁気軸受装置における保護用転がり軸受
JP2001003890A (ja) * 1999-06-23 2001-01-09 Shimadzu Corp 磁気軸受式ターボ分子ポンプ
JP2005105846A (ja) * 2003-09-26 2005-04-21 Boc Edwards Kk 真空ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09210061A (ja) * 1996-01-31 1997-08-12 Seiko Seiki Co Ltd 半径方向位置修正電磁石付磁気軸受装置
JPH10176714A (ja) * 1997-09-10 1998-06-30 Koyo Seiko Co Ltd 磁気軸受装置
JP2000274433A (ja) * 1999-03-19 2000-10-03 Koyo Seiko Co Ltd 磁気軸受装置における保護用転がり軸受
JP2001003890A (ja) * 1999-06-23 2001-01-09 Shimadzu Corp 磁気軸受式ターボ分子ポンプ
JP2005105846A (ja) * 2003-09-26 2005-04-21 Boc Edwards Kk 真空ポンプ

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013056920A1 (fr) * 2011-10-21 2013-04-25 Siemens Aktiengesellschaft Frein à friction, palier de secours comportant un frein à friction et procédé pour faire fonctionner un palier magnétique
CN105612361A (zh) * 2013-10-25 2016-05-25 埃地沃兹日本有限公司 保护轴承、轴承装置及真空泵
JP2019059347A (ja) * 2017-09-27 2019-04-18 Ntn株式会社 発電機付き車輪用軸受装置
JP6997571B2 (ja) 2017-09-27 2022-02-04 Ntn株式会社 発電機付き車輪用軸受装置
JP2021110457A (ja) * 2020-01-14 2021-08-02 燕山大学Yanshan University 歯車ポンプにおける磁気転がり軸受及びその寿命計算方法
WO2024241415A1 (fr) * 2023-05-22 2024-11-28 株式会社ジェイテクト Roulement à billes

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