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WO2008015701A2 - Dispositifs de nanopositionnement d'objets pour un déplacement à grande distance, et procédés associés - Google Patents

Dispositifs de nanopositionnement d'objets pour un déplacement à grande distance, et procédés associés Download PDF

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Publication number
WO2008015701A2
WO2008015701A2 PCT/IN2007/000280 IN2007000280W WO2008015701A2 WO 2008015701 A2 WO2008015701 A2 WO 2008015701A2 IN 2007000280 W IN2007000280 W IN 2007000280W WO 2008015701 A2 WO2008015701 A2 WO 2008015701A2
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WIPO (PCT)
Prior art keywords
actuator
stage
shear
moving stage
actuators
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PCT/IN2007/000280
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WO2008015701A3 (fr
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Hilaal Alam
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Anticipated expiration legal-status Critical
Ceased legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors

Definitions

  • the present invention is related to the flexural cam (6) with actuator ram, incorporated Nanopositioner for long range displacement with short range actuator. Since actuators have limitation in displacement up to their maximum possible range, Flexural Cam (6) for Actuator Ram (FlexCAR) (5) is useful in achieving long range displacement.
  • Positioning objects such as lenses, fibers, tools, sensors etc.
  • the nanometer resolution is a challenging one.
  • the requirement for precise positioning with nanometer resolution is inevitable.
  • the one of the ways to achieve this is to use actuators of larger displacement.
  • an Inchworm is one of the technology with which one can move for larger displacement with number of actuators. These solutions become expensive one since the actuator increases the cost of the equipment.
  • An inchworm requires al least four to five actuators and complex control systems with intelligent algorithm.
  • the displacement is limited by the flexural stage designs i.e. the flexure design limit set the displacement range; not the. actuator expansion range.
  • the primary objective of the present invention is to develop an actuator engine for nanopositioners for longer range displacement.
  • Yet another object of the present invention is to provide a method of discontinuous motion for long range displacement of objects using flexural cam (6) with actuator ram incorporating nanopositioner and device thereof.
  • Still another object of the present invention is to provide a system to achieve aforementioned objectives.
  • the present invention provides for a method of discontinuous motion for long range displacement of objects using flexural cam with actuator ram incorporating nanopositioner, said method comprising steps of placing the object onto a moving stage (2); expanding second actuator (4) to its half the range keeping first actuator (3) at zero expansion to cause first cam (cl) to grip the stage (2) while second cam (c2) and third cam (c3) have no hold of the stage (2); activating the actuator (3) to its full range of expansion to bring block (1) in contact with the stage causing cl to loose its hold over the stage (2); driving the stage for a predetermined distance (2) using the block (1) to result in displacement of the stage (2) to make tip of the cam (c3) to come in contact with the stage (2); contracting the block (1) to bring cam (c2) in contact with the stage (2) and thereafter clenching the stage by cam (c2) to cause the actuator (3) not to expand further; and releasing the cam (c2) to bring the actuator (3) to its original state without disturbing the stage which is already moved forward and continuously holding the stage using the cam (c3) to obtain
  • moving stage (32) to hold the object
  • shear actuator (33) to move the moving stage (32) and linear actuator (34) to lift the shear actuator (33) to come in contact with the moving stage (32)
  • shear actuator (36) to move the moving stage (32) and another linear actuator (35) to lift the shear actuator (36) to come in contact with the moving stage (32)
  • holder (31) to maintain the moving stage (32) in single axis direction.
  • Figure 1 shows nanopositioner assembly showing the various parts of the assembly showing their positioners.
  • Figure 2 shows actual fabrication of nanopositioner used for discontinuous motion with two actuators.
  • Figures 2A to 2E shows conceptual representation and working principle of discontinuous motion with two actuators.
  • Figure 3 shows actual fabrication of nanopositioner used for discontinuous motion with three actuators.
  • Figures 3A to 3F shows conceptual representation and working principle of discontinuous motion with three actuators.
  • Figure 4 shows actual fabrication of nanopositioner used for continuous motion with four actuators.
  • Figure 5 shows block diagram of the figure 4.
  • Figures 5A to 5E shows conceptual representation and working principle of continuous motion with four actuators.
  • the primary embodiment of the present invention is a method of discontinuous motion for long range displacement of objects using flexural cam with actuator ram incorporating nanopositioner, said method comprising steps of placing the object onto a moving stage (2); expanding second actuator (4) to its half the range keeping first actuator (3) at zero expansion to cause first cam (cl) to grip the stage (2) while second cam (c2) and third cam (c3) have no hold of the stage (2); activating the actuator (3) to its full range of expansion to bring block (1) in contact with the stage causing cl to loose its hold over the stage (2); driving the stage for a predetermined distance (2) using the block (1) to result in displacement of the stage (2) to make tip of the cam (c3) to come in contact with the stage (2); contracting the block (1) to bring cam (c2) in contact with the stage (2) and thereafter clenching the stage by cam (c2) to cause the actuator (3) not to expand further; and releasing the cam (c2) to bring the actuator (3) to its original state without disturbing the stage which is already moved forward and continuously holding the stage using the cam (c3) to
  • the stage does not go back due to the spring force.
  • a device for long range displacement of objects using flexural cam with actuator ram incorporating nanopositioner said device comprises moving stage (2) to hold the objects; actuator (3) for driving the stage (2) forward or backward and another actuator (4) for holding the stage against spring force when actuator (3) has idle motion or not driving the stage (2); and cams (cl, c2, c3) to clench the stages for different time periods at various stages.
  • the cams (cl, c2, c3) rotate around the fulcrum s to have grip.
  • the flexure above the cams (cl, c2, c3) move up and holds the moving stage (2).
  • the stage (2) is either monolithic flexible compliance linear spring or monolithic flexural linear spring.
  • the initial position of the holder actuator (14) and shear actuator (13) are at zero expansion.
  • a device for long range displacement of objects using actuators along with spring pusher (15) incorporating nanopositioner said device comprises moving stage (12) to hold the object; shear actuator (13) to move the moving stage (2)(12); holder actuator (14) to lift spring pusher (15) and to hold the moving stage (12); wherein the actuators (13, 14) are mounted at the base (16); and holder (11) to maintain the moving stage (12) in single axis direction
  • the shear actuator (13) and the holder actuator (14) are placed next to each other and are having predetermined distance between them.
  • the holder (11) moves the moving stage (12) in single axis preventing sway and crosstalk motion.
  • the actuators (13, 14) are solid state actuator(s) preferably piezo crystals.
  • the holder (11) is spring.
  • the device is a monolithic or non- monolithic structure.
  • the stage (12) is either monolithic flexible compliance linear spring or monolithic flexural linear spring.
  • in still another embodiment of the present invention is a method of discontinuous motion for long range displacement of objects using actuators incorporating nanopositioner, said method comprising steps of placing the object onto a moving stage (22) wherein the actuators (23, 24, 25) are at zero expansion; lifting shear actuator (23) vertically by expanding linear actuator (24) placed below the shear actuator (23) to bring it in contact with the moving stage (22); moving the stage (22) horizontally in a single axis forward direction by expanding the shear actuator (23); holding the stage (22) by expanding the holder actuator (25) to make shear actuator (23) loose contact with the stage (22) and thereby resulting into no further movement of the stage (22); and holding the stage (22) firmly till the linear actuator (24) contracts and the shear actuator (23) return to its initial stage and thereby obtaining long range displacement of objects.
  • a device for long range displacement of objects using actuators incorporating nanopositioner said device comprises moving stage 22) to hold the object; shear actuator (23) to move the moving stage (22), linear actuator (24) to lift the shear actuator (23) to come in contact with the moving stage (22); holder actuator (25) to hold the moving stage (22) firmly when the linear actuator (24) contracts and the shear actuator (23) return to its initial stage; and holder (21) to maintain the moving stage (22) in single axis direction.
  • the shear actuator (23) is stacked above the linear actuator (24).
  • the holder (21) moves the moving stage (22) in single axis preventing sway and crosstalk motion.
  • the actuators (23, 24, 25) are solid state actuator(s) preferably piezo crystals.
  • the holder (21) is spring.
  • the device is a monolithic or non monolithic structure.
  • the stage (22) is either monolithic flexible compliance linear spring or monolithic flexural linear spring.
  • a continuous motion method for long range displacement of objects using actuators incorporating nanopositioner comprising steps of placing the object onto a moving stage (32) wherein the actuators (33, 34, 35, 36) are at zero expansion; lifting shear actuator (33) vertically by expanding linear actuator (34) placed below the shear actuator (33) to bring it in contact with the moving stage (32) and in the mean time expanding another shear actuator (36) without lifting it by another linear actuator (35) placed above the actuator (35); moving the stage (32) horizontally in a single axis forward direction by expanding the shear actuator (13) (33) and at the same time keeping the linear actuator (35) at zero expansion; lifting the expanded shear actuator (36) by expanding the linear actuator (35) to bring it in contact with the stage (32) and thereafter releasing the shear actuator
  • a device for long range displacement of objects using actuators incorporating nanopositioner said device comprises a. moving stage (32) to hold the object; shear actuator (33) to move the moving stage (32) and linear actuator (34) to lift the shear actuator (33) to come in contact with the moving stage (32); shear actuator (36) to move the moving stage (32) and another linear actuator (35) to lift the shear actuator (36) to come in contact with the moving stage (32); and holder (31) to maintain the moving stage (32) in single axis direction.
  • the shear actuators (33 & 36) are stacked above the linear actuators (34 & 35) respectively.
  • the holder (or spring) (31) moves the moving stage 1 (32) in one axis preventing sway and crosstalk motion.
  • the actuators (33, 34, 35, 36) are solid state actuator(s) preferably piezo crystals.
  • the holder (31) is spring.
  • the device is a monolithic or non monolithic structure.
  • the stage (32) is either monolithic flexible compliance linear spring or monolithic flexural linear spring.
  • the present invention is a system for nanopositioning of objects comprising the device of claims 3, 9, 17, 25 and a circuit to drive the actuators.
  • the primary objective of the present invention is to develop an actuator engine for nanopositioners for longer range.
  • the novelty of this invention is to obtain longer range displacement with two, three and four small range actuators.
  • the spring and actuator stiffness can be designed to applications and the stiffness of the stage and actuator, are not needed to be unequal.
  • This invention will be useful in various field of astronomy, data storage, medical, metrology, micro machining, microscopy, photonics, precision machining, semiconductors etc.
  • flexural concepts can be applied with just two, three and four actuators in order to move the stage for larger distance.
  • Figure 1 is a nanopositioner assembly showing the various parts of the assembly showing their positioners.
  • This FlexCAR (5) uses two actuators namely Al (3) and A2 (4).
  • Al (3) is used for driving the stage (2) forward or backward and A2 (4) is used for holding the stage (2) against the spring force when Al (3) has idle motion or not driving the stage (2).
  • A2 (4) is expanded for half of its full expansion range.
  • the cams Cl, C2, C3 are to clench the stage (2) for different time period at the various stages. The following table describes the forward displacement. When these cams rotate about the fulcrums to have grip, the flexures above the cams move up and holds the moving stage (2).
  • the Al (3) actuator has no expansion and A2 (4) actuator is expanded to its half the range and hence Cl is gripping the stage while C2 and C3 have no hold of it.
  • the Al (3) is activated, and when it reaches 1 micron expansion, CAM - Cl is designed to hold the stage while CAM - C2 and CAM - C3 still do not hold the stage. Now CAM - Cl holds the stage with it's the tip of the edge, from where a slight move forward will lose contact from the stage.
  • the A2 (4) actuator is activated to its full range of expansion, which results in prime mover or block coming to contact with the stage. At this juncture, CAM - Cl also loses its hold on the stage.
  • the prime mover drives the stage along with it for 3 micron (if the total range of Piezo is 5 micron).
  • CAM - C3 tip come into contact with the moving stage (2).
  • mode D Begins In mode D, CAM - C2 come into contact with the stage (2) with its tip while the prime mover (1) contracts (or deactivated) with 0 voltages.
  • CAM - C2 clenches the stage (2) well once the contraction of the actuator is completed.
  • the Actuator Al (3) cannot expand ahead as it reaches its full range. Now it is time for actuator Al (3) to go back to the original state without disturbing the stage (2) which is already moved forward.
  • the mode E initiates this process by releasing CAM - C2 at the end of this process.
  • CAM - C3 is constantly holds the stage till a new cycle begins; the stage will not go back due to the spring force.
  • CAM - Cl comes into complete contact with the stage (2). Now the same cycle repeats till the required target is arrived.
  • the Al (3) actuator is set to full expansion while A2 (4) actuator has half expansion and hence C3 is gripping the stage while Cl and C2 have no hold of it.
  • the Al (3) is contracted, and when it lessens by 1 micron, CAM - C3 is designed to hold the stage while CAM - Cl and CAM - C2 still do not hold the stage. Now CAM - C2 holds the stage with it's the tip of the edge, from where a slight move backward will lose contact from the stage.
  • the A2 (4) actuator is activated which results in prime mover or block (1) coming to contact with the stage (2) releasing CAM - C3 from the hold.
  • CAM - C3 also loses it hold on the stage (2).
  • the prime mover (1) drives the stage (2) along with it for 3 micron in reverse direction (if the total range of Piezo is 5 micron).
  • mode S begins.
  • CAM - Cl come into contact with the stage (2) with its tip while the prime mover (1) contracts (or deactivated).
  • CAM - C2 clenches the stage (2) well once the contraction of the actuator is completed.
  • the Actuator Al (3) cannot contract below as it reaches its full range. Now it is time for actuator Al (3) to go forward to the start the similar process in mode P without disturbing the stage (2) which is already moved back.
  • the mode T initiates this process by releasing CAM - Cl at the end of this process.
  • CAM - C2 is constantly holds the stage (2) till a new cycle begins; the stage (2) will not go back due to the spring force.
  • CAM - C2 comes into complete contact with the stage (2). Now the same cycle repeats till the required target is arrived.
  • This design uses two actuators only.
  • the holder actuator (14) and shear actuator (13) are used for displacement and holding purpose.
  • the actuators are mounted at base (16) of the nanopositioner which can move up and down.
  • Spring pusher (15) is shown in green color and dotted circle.
  • the figure 2 shows the actual fabrication of the Nanopositioner.
  • the material is stainless steel with the following specifications:
  • the nanopositioner can produce displacement up to 1000 mircon (1 mm) and the stiffness is 9.5157E-07 kN/micron.
  • the dynamic analysis shows that the natural frequency of the stage is 0.21991612 Hz.
  • the actuator stiffness should be more than that of the stiffness of the stage.
  • the stiffness of the actuator is 0.003070446 kN / micron which is more than the value of stage.
  • Step 1 Moving stage (12) is at initial state. Shear and linear actuator (13 and 14) are at zero expansion. ( Figure 2A)
  • Step 2 Shear actuator (13) moves the moving stage (12) as shear actuator (13) expands fully by “x” distance. Linear actuator (14) is at zero expansion. ( Figure 2B)
  • Step 3 Shear actuator (13) stops expanding and hence the moving stage (2).
  • Linear actuator (14) expands and lifts the spring pusher (15) so that shear actuator (13) gets disengaged.
  • Step 4 Shear actuator (13) returns to its original state without touching the moving stage (12). Linear actuator keeps holding the spring so that shear actuator (13) gets disengaged. ( Figure 2D)
  • Step 5 Shear actuator (13) is at zero expansion. Linear actuator (14) contracts and thus due to spring action, the spring pusher (15) comes into contact with shear actuator (13).
  • linear (24) and shear actuators (23) are stacked one above the other.
  • Third actuator (25) is attached for holding the moving stage (22) firmly when linear actuator (24) contracts and shear actuator (13) returns to its initial stage. In this case the holding actuator (25) holds the stage (22) firmly with respect to the payload which could be parallel or perpendicular to the force line.
  • the figure 3 shows the actual fabrication of the Nanopositioner.
  • the material is stainless steel with the following specifications:
  • Figure 3 shows the steel made monolithic nanopositioner, linear actuator (24) and the shear actuator (23).
  • the nanopositioner can produce displacement up to 1000 mircon (1 mm) and the stiffness is 9.5157E-07 kN/micron.
  • the dynamic analysis shows that the natural frequency of the stage is 0.21991612 Hz.
  • the actuator stiffness should be more than that of the stiffness of the stage.
  • the stiffness of the actuator is 0.003070446 kN / micron which is more than the value of stage.
  • the moving stage (22) is held by Shear actuator (23) and linear actuator (24) set.
  • the moving stage (22) is not moved by the shear actuator (23).
  • Step 3 Linear actuator (24) at full expansion, Shear actuator (23) at full expansion and Holde' actuator (25) at zero expansion.
  • the moving stage (22) is moved by the shear actuator
  • Figure 4 shows the steel made monolithic nanopositioner, linear actuator (34) and indicates the shear actuator (33).
  • the nanopositioner can produce displacement up to 1000 mircon (1 mm) and the stiffness is 9.5157E-07 kN/micron.
  • the dynamic analysis shows that the natural frequency of the stage is 0.21991612 Hz.
  • the actuator stiffness should be more than that of the stiffness of the stage.
  • the stiffness of the actuator is 0.003070446 kN / micron which is more than the value of stage.
  • SIDE A Linear actuator (34) fully expanded, Shear actuator (33) at zero expansion and Nanopositioner at zero displacement
  • SIDE B Linear actuator (35) with zero expanded, Shear actuator (36) at full expansion and Nanopositioner at zero displacement
  • the blue strips are flexible springs which deforms on application of force.
  • Step 2 ( Figure 5B): SIDE A: Linear actuator (34) fully expanded, Shear actuator (33) at full expansion to
  • SIDE B Linear actuator (35) with zero expanded, Shear actuator (36) at full expansion and Nanopositioner at zero displacement due SIDE B ACTUATORS As shear actuator (33) shears, it takes the moving stage (32) along with it to "x" displacement (i.e. full range expansion of the solid state actuators). Doted lines show the previous state.
  • SHEAR ACTUATOR (36) is fully expanded and yet LINEAR
  • SIDE A Linear actuator (34) at full expansion, Shear actuator (33) at full expansion and Nanopositioner at "x" displacement DUE TO SHEAR ACTUATOR (33)
  • SIDE B Linear actuator (35) with fully expanded, Shear actuator (36) at full expansion and Nanopositioner at zero displacement DUE TO SHEAR ACTUATOR (36) B .
  • Linear actuator (34) gets contracted and shear actuator (33) is released to its original state.
  • LINEAR & SHEAR ACTUATOR (35 and 36) at SIDE B contact the moving stage (32) and move by "x" distance further.
  • SIDE A Linear actuator (34) at zero expansion, Shear actuator (33) at zero expansion and Nanopositioner at zero displacement DUE TO SHEAR ACTUATOR (33)
  • SIDE B Linear actuator (35) with fully expanded, Shear actuator (36) at full expansion and Nanopositioner at "xl” displacement DUE TO SHEAR ACTUATOR (36)
  • Linear actuator (34) gets contracted and shear actuator (33) is released to its original state.
  • LINEAR & SHEAR ACTUATOR (35 and 36) at SIDE B contact the moving stage (32) and move by "x" distance further.
  • SIDE A Linear actuator (34) at full expansion, Shear actuator (33) at zero expansion and Nanopositioner at zero displacement DUE TO SHEAR ACTUATOR (33) A.
  • SIDE B Linear actuator (35) with fully expanded, Shear actuator (36) at full expansion and Nanopositioner at "xl” displacement DUE TO SHEAR ACTUATOR (36) B.
  • Linear actuator (34) expands and shear actuator (33) is still at zero expansion.
  • the moving stage (32) also is stationary.
  • step 1 through step 5 is considered as one cycle, the total displacement that can be produced with the actuator that expands for "x" distance, is

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  • Control Of Position Or Direction (AREA)
  • Transmission Devices (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

La présente invention concerne un procédé d'accomplissement d'un mouvement discontinu pour un déplacement à grande distance d'objets, au moyen d'une came de flexion munie d'un poussoir d'actionneur, un poussoir à ressort incorporant un nanopositionneur. Puisque le déplacement des actionneurs est limité jusqu'à la portée maximale possiblede ces derniers, la came de flexion (6) pour le poussoir d'actionneur (FlexCAR) (5) est utile pour l'accomplissement d'un déplacement à grande distance. L'invention concerne également un procédé qui permet de réaliser un mouvement continu ou discontinu pour un déplacement à grande distance d'objets, au moyen d'actionneurs incorporant un nanopositionneur. Elle concerne en outre des dispositifs associés.
PCT/IN2007/000280 2006-07-31 2007-07-09 Dispositifs de nanopositionnement d'objets pour un déplacement à grande distance, et procédés associés Ceased WO2008015701A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IN01357/CHE/2006 2006-07-31
IN1357CH2006 2006-07-31

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WO2008015701A2 true WO2008015701A2 (fr) 2008-02-07
WO2008015701A3 WO2008015701A3 (fr) 2008-03-27

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012054814A3 (fr) * 2010-10-21 2012-08-16 Thorlabs, Inc. Mécanisme de maintien de parallélisme pour nanopositionneur

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
CHU C.-L. ET AL.: 'A novel long-travel piezoelectric-driven linear nanopositioning stage' PRECISION ENGINEERING vol. 30, no. 1, 01 January 2006, pages 85 - 95 *
LIN WU ET AL.: 'Modelling and Experiments of Input-Output Displacement Relations for a Piezoelectric Nanopositioner' PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON MEMS, NANO AND SMART SYSTEMS (ICMENS 2004) 25 August 2004, pages 453 - 460 *

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2012054814A3 (fr) * 2010-10-21 2012-08-16 Thorlabs, Inc. Mécanisme de maintien de parallélisme pour nanopositionneur
CN103167930A (zh) * 2010-10-21 2013-06-19 统雷有限公司 用于纳米定位的平行保持装置
US8484859B2 (en) 2010-10-21 2013-07-16 Thorlabs, Inc. Parallellism conservation mechanism for nanopositioner

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